TW202314420A - 資訊處理方法、資訊處理裝置及資訊處理系統 - Google Patents
資訊處理方法、資訊處理裝置及資訊處理系統 Download PDFInfo
- Publication number
- TW202314420A TW202314420A TW111130908A TW111130908A TW202314420A TW 202314420 A TW202314420 A TW 202314420A TW 111130908 A TW111130908 A TW 111130908A TW 111130908 A TW111130908 A TW 111130908A TW 202314420 A TW202314420 A TW 202314420A
- Authority
- TW
- Taiwan
- Prior art keywords
- learning
- learning model
- model
- control
- unit
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
- G06N20/20—Ensemble learning
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/0265—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion
- G05B13/027—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric the criterion being a learning criterion using neural networks only
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N20/00—Machine learning
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
- G06N3/045—Combinations of networks
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
- G06N3/049—Temporal neural networks, e.g. delay elements, oscillating neurons or pulsed inputs
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/08—Learning methods
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Software Systems (AREA)
- Artificial Intelligence (AREA)
- Evolutionary Computation (AREA)
- General Physics & Mathematics (AREA)
- Computing Systems (AREA)
- Mathematical Physics (AREA)
- Data Mining & Analysis (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Biophysics (AREA)
- Molecular Biology (AREA)
- General Health & Medical Sciences (AREA)
- Computational Linguistics (AREA)
- Biomedical Technology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Medical Informatics (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Image Analysis (AREA)
- Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021141750 | 2021-08-31 | ||
| JP2021-141750 | 2021-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW202314420A true TW202314420A (zh) | 2023-04-01 |
Family
ID=85412226
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111130908A TW202314420A (zh) | 2021-08-31 | 2022-08-17 | 資訊處理方法、資訊處理裝置及資訊處理系統 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20240202607A1 (https=) |
| JP (1) | JPWO2023032637A1 (https=) |
| KR (1) | KR20240058131A (https=) |
| CN (1) | CN117897711A (https=) |
| TW (1) | TW202314420A (https=) |
| WO (1) | WO2023032637A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026048631A1 (ja) * | 2024-09-02 | 2026-03-05 | 東京エレクトロン株式会社 | 情報処理方法、情報処理装置及び基板処理システム |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6214922B2 (ja) * | 2013-05-20 | 2017-10-18 | 日本電信電話株式会社 | 情報処理装置、情報処理システム、情報処理方法、および学習プログラム |
| JP6720402B2 (ja) | 2017-03-21 | 2020-07-08 | 株式会社Preferred Networks | サーバ装置、学習済モデル提供プログラム、学習済モデル提供方法及び学習済モデル提供システム |
| JP6689507B2 (ja) | 2018-02-20 | 2020-04-28 | 株式会社Abeja | 情報処理システム |
| JP7007244B2 (ja) * | 2018-07-09 | 2022-01-24 | 株式会社シマノ | 作成装置、コンポーネント制御装置、作成方法、コンポーネント制御方法、コンピュータプログラムおよび学習モデル |
| EP4073714A1 (en) * | 2019-12-13 | 2022-10-19 | Qualcomm Technologies, Inc. | Federated mixture models |
-
2022
- 2022-08-12 JP JP2023545410A patent/JPWO2023032637A1/ja active Pending
- 2022-08-12 KR KR1020247010659A patent/KR20240058131A/ko active Pending
- 2022-08-12 CN CN202280058383.0A patent/CN117897711A/zh active Pending
- 2022-08-12 WO PCT/JP2022/030708 patent/WO2023032637A1/ja not_active Ceased
- 2022-08-17 TW TW111130908A patent/TW202314420A/zh unknown
-
2024
- 2024-02-28 US US18/589,947 patent/US20240202607A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| KR20240058131A (ko) | 2024-05-03 |
| WO2023032637A1 (ja) | 2023-03-09 |
| CN117897711A (zh) | 2024-04-16 |
| JPWO2023032637A1 (https=) | 2023-03-09 |
| US20240202607A1 (en) | 2024-06-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW202329205A (zh) | 資訊處理方法、資訊處理裝置及基板處理系統 | |
| US12242237B2 (en) | Methods and mechanisms for generating a data collection plan for a semiconductor manufacturing system | |
| US12429846B2 (en) | Systems and methods for adaptive troubleshooting of semiconductor manufacturing equipment | |
| US20220284342A1 (en) | Systems and methods for process chamber health monitoring and diagnostics using virtual model | |
| US12235624B2 (en) | Methods and mechanisms for adjusting process chamber parameters during substrate manufacturing | |
| US12191126B2 (en) | Process control knob estimation | |
| TW202314420A (zh) | 資訊處理方法、資訊處理裝置及資訊處理系統 | |
| US12506024B2 (en) | Method and mechanism for contact-free process chamber characterization | |
| US20230306300A1 (en) | Methods and mechanisms for measuring patterned substrate properties during substrate manufacturing | |
| TW202509692A (zh) | 修改用於新半導體處理設備的機器學習模型的方法和機制 | |
| US20230089982A1 (en) | Methods and mechanisms for coupling sensors to transfer chamber robot | |
| KR20230164607A (ko) | 머신 러닝 모델 성능의 변동을 방지하기 위한 방법들 및 메커니즘들 | |
| CN117836895A (zh) | 制造系统处的多级rf脉冲监测和rf脉冲化参数优化 | |
| US20260111013A1 (en) | Augmented manufacturing systems with field-provisioned sensors and algorithms | |
| US11892821B2 (en) | Communication node to interface between evaluation systems and a manufacturing system | |
| CN117916871A (zh) | 用于将传感器耦合至传输腔室机器人的方法和机构 |