TW202309137A - Photosensitive resin composition, protrusion pattern and display device using the same - Google Patents

Photosensitive resin composition, protrusion pattern and display device using the same Download PDF

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TW202309137A
TW202309137A TW111131680A TW111131680A TW202309137A TW 202309137 A TW202309137 A TW 202309137A TW 111131680 A TW111131680 A TW 111131680A TW 111131680 A TW111131680 A TW 111131680A TW 202309137 A TW202309137 A TW 202309137A
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photosensitive resin
resin composition
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anhydride
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金正植
丁相天
曹昇鉉
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南韓商東友精細化工有限公司
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Abstract

The present invention relates to a photosensitive resin composition, and a protrusion pattern and a display device using the same. The photosensitive resin composition according to the present invention can form a pattern exhibiting high refractive index without using inorganic particles and has excellent pattern characteristics and chemical resistance even at a low temperature curing.

Description

感光性樹脂組合物、利用彼之突出圖案以及利用彼之顯示裝置Photosensitive resin composition, projecting pattern using same, and display device using same

本發明係關於一種感光性樹脂組合物、利用彼之突出圖案以及利用彼之顯示裝置。尤其,本發明係關於一種感光性樹脂組合物,其可在不使用無機粒子的情況下形成表現出高折射率,並且即使在低溫固化下亦具有優異的圖案特性以及化學抗性的圖案,以及利用該組合物之突出圖案以及顯示裝置。The present invention relates to a photosensitive resin composition, a protruding pattern using it and a display device using it. In particular, the present invention relates to a photosensitive resin composition capable of forming a pattern exhibiting a high refractive index without using inorganic particles and having excellent pattern characteristics and chemical resistance even at low temperature curing, and A protruding pattern and a display device using the composition.

由於有機發光二極體(organic light emitting diodes ,OLEDs)具有快速的反應速率、寬廣的視角、低電壓操作等特性,而被期望成為下一個世代的顯示裝置及照明裝置。Organic light emitting diodes (organic light emitting diodes, OLEDs) are expected to become the next generation of display devices and lighting devices due to their fast response rate, wide viewing angle, and low-voltage operation.

一般而言,由發光材料或電荷轉移材料製造的有機材料層位於OLED的上部電極與下部電極之間。由於OLED具有不同折射率之材料的堆疊結構,反射發生在這些材料的界面,因此外部光萃取效應(external light extraction efficiency)低。In general, an organic material layer made of light emitting material or charge transfer material is located between the upper and lower electrodes of the OLED. Since the OLED has a stacked structure of materials with different refractive indices, the reflection occurs at the interface of these materials, so the external light extraction efficiency is low.

尤其,OLED的有機發光層的折射率係約1.7,用作透明電極的氧化銦錫(ITO)的折射率係2.0,以及玻璃基板的折射率係1.5。在此情況下,被捕獲至透明電極或有機材料層中的不可萃取波導光(waveguided light)的比例係約45%,被捕獲至基板中而無法萃取的基板波導光的比例係約35%。因此,僅約20%之從OLED發出的光被萃取至外部。In particular, the refractive index of the organic light emitting layer of the OLED is about 1.7, the refractive index of indium tin oxide (ITO) used as a transparent electrode is 2.0, and the refractive index of the glass substrate is 1.5. In this case, the proportion of non-extractable waveguided light trapped in the transparent electrode or organic material layer is about 45%, and the proportion of unextractable substrate waveguided light trapped in the substrate is about 35%. Therefore, only about 20% of the light emitted from the OLED is extracted to the outside.

已進行各種研究以解決這個問題,而代表性的實例係微透鏡陣列(microlens array)。微透鏡陣列係藉由改變在OLED裝置中的玻璃基板與空氣表面之間的界面的入射角來增加光萃取效應。Various studies have been conducted to solve this problem, and a representative example is a microlens array. The microlens array increases the light extraction effect by changing the incident angle at the interface between the glass substrate and the air surface in the OLED device.

微透鏡陣列應表現出大於或同等於玻璃基板的高折射率。典型地,無機粒子相較於有機材料具有較高的折射率。然而,當使用包含無機粒子之感光性樹脂組合物形成圖案時,該圖案的表面粗糙度增加、出現裂痕且彎曲抗性低。因此,不適合用於撓性顯示裝置。The microlens array should exhibit a high refractive index greater than or equal to that of the glass substrate. Typically, inorganic particles have a higher refractive index than organic materials. However, when a pattern is formed using a photosensitive resin composition containing inorganic particles, the surface roughness of the pattern increases, cracks occur, and bending resistance is low. Therefore, it is not suitable for use in flexible display devices.

因此,需要發展一種可在不使用無機粒子的情況下形成表現出大於或等於玻璃基板的高折射率圖案之感光性樹脂組合物。Therefore, there is a need to develop a photosensitive resin composition capable of forming a pattern exhibiting a high refractive index greater than or equal to that of a glass substrate without using inorganic particles.

進一步而言,需要發展一種用於撓性顯示裝置,即使在低溫固化下亦表現出優異的圖案特性,且具有優異的化學抗性而在後處理過程中薄膜厚度不會發生變化的感光性樹脂組合物。Further, there is a need to develop a photosensitive resin for flexible display devices that exhibits excellent pattern characteristics even at low temperature curing and has excellent chemical resistance without changing the film thickness during post-processing combination.

本發明之目的在於提供一種感光性樹脂組合物,該感光性樹脂組合物可在不使用無機粒子的情況下形成表現出高折射率,並且即使在低溫固化下亦具有優異的圖案特性以及化學抗性的圖案。An object of the present invention is to provide a photosensitive resin composition which can be formed without using inorganic particles, exhibits a high refractive index, and has excellent pattern characteristics and chemical resistance even at low temperature curing. sexual pattern.

本發明之另一目的在於提供一種利用該感光性樹脂組合物所形成的突出圖案。Another object of the present invention is to provide a protruding pattern formed by using the photosensitive resin composition.

本發明之又另一目的在於提供一種包含該突出圖案的顯示裝置。Yet another object of the present invention is to provide a display device comprising the protruding pattern.

根據本發明之一方案,提供一種感光性樹脂組合物,其包含由以下式(I)所表示之多硫醇化合物、鹼溶性樹脂、多官能丙烯酸酯光聚合性化合物、光聚合起始劑以及溶劑:

Figure 02_image001
(I) 其中, R係包含硫原子的k價的脂族烴基,或是包含硫原子的k價的脂環烴基;以及 k係2至6的整數。 According to one aspect of the present invention, there is provided a photosensitive resin composition comprising a polythiol compound represented by the following formula (I), an alkali-soluble resin, a polyfunctional acrylate photopolymerizable compound, a photopolymerization initiator, and Solvent:
Figure 02_image001
(I) wherein, R is a k-valent aliphatic hydrocarbon group containing a sulfur atom, or a k-valent alicyclic hydrocarbon group containing a sulfur atom; and k is an integer of 2 to 6.

在本發明之一實施態樣中,該由式(I)所表示之多硫醇化合物可包含由以下式(II)或式(III)所表示之多硫醇化合物:

Figure 02_image004
(II)
Figure 02_image006
(III) 其中, R a、R b、R c及R d各自獨立為氫原子或-CH 2-SH; R e、R f、R g及R h各自獨立為氫原子或-CH 2-SH,並且R e、R f、R g及R h中的至少二者為-CH 2-SH; d係1至2的整數;以及 e係0至2的整數。 In one embodiment of the present invention, the polythiol compound represented by formula (I) may include a polythiol compound represented by the following formula (II) or formula (III):
Figure 02_image004
(II)
Figure 02_image006
(III) Among them, R a , R b , R c and R d are each independently a hydrogen atom or -CH 2 -SH; Re , R f , R g and Rh are each independently a hydrogen atom or -CH 2 -SH , and at least two of R e , R f , R g and Rh are —CH 2 —SH; d is an integer of 1 to 2; and e is an integer of 0 to 2.

在本發明之一實施態樣中,該由式(I)所表示的多硫醇化合物可包含由以下式(IV)至式(VIII)中任一者所表示的多硫醇化合物:

Figure 02_image008
(IV)
Figure 02_image010
(V)
Figure 02_image012
(VI)
Figure 02_image014
(VII)
Figure 02_image016
(VIII) In one embodiment of the present invention, the polythiol compound represented by formula (I) may comprise a polythiol compound represented by any one of the following formulas (IV) to (VIII):
Figure 02_image008
(IV)
Figure 02_image010
(V)
Figure 02_image012
(VI)
Figure 02_image014
(VII)
Figure 02_image016
(VIII)

在本發明之一實施態樣中,以該感光性樹脂組合物中的總固含量為100重量%計,該由式(I)所表示的多硫醇化合物的含量可為0.1至10重量%。In one embodiment of the present invention, based on 100% by weight of the total solid content of the photosensitive resin composition, the content of the polythiol compound represented by formula (I) may be 0.1 to 10% by weight .

在本發明之一實施態樣中,該鹼溶性樹脂可包含由以下式(IX)至式(XIV)所表示之重複單元的至少一者:

Figure 02_image018
(IX)
Figure 02_image020
(X)
Figure 02_image022
(XI)
Figure 02_image024
(XII)
Figure 02_image026
(XIII)
Figure 02_image028
(XIV) 其中, X及X'各自獨立為單鍵、-CO-、-SO 2-、-C(CF 3) 2-、-Si(CH 3) 2-、-CH 2-、-C(CH 3) 2-、-O-、
Figure 02_image030
Figure 02_image032
Figure 02_image034
Figure 02_image036
Figure 02_image038
Figure 02_image040
Figure 02_image042
Figure 02_image044
Figure 02_image046
Figure 02_image048
Figure 02_image050
Figure 02_image052
Figure 02_image054
; Y係酸酐的殘基; Z係酸二酐的殘基; R'係氫原子、乙基、苯基、-C 2H 4Cl、-C 2H 4OH或-CH 2CH=CH 2, R1、R1'、R2、R2'、R3、R3'、R4、R4'、R5、R5'、R6及R6'各自獨立為氫原子或甲基; R7、R7'、R8及R8'各自獨立為C 1至C 6的伸烷基,其中該伸烷基係插入有酯鍵、C 6至C 14的伸環烷基、伸芳基之至少一者或沒有插入; R9、R9'、R10、R10'、R11、R11'、R12及R12'各自獨立為氫原子、鹵素原子或C 1至C 6的烷基; m及n各自獨立為1至30的整數; t及u各自獨立為0至1的整數; P各自獨立為
Figure 02_image056
Figure 02_image058
Figure 02_image060
Figure 02_image062
Figure 02_image064
; R13及R14各自獨立為氫原子、羥基、硫醇基、胺基、硝基或鹵素原子; Ar1各自獨立為芳基; Y'係酸酐的殘基; Z'係酸二酐的殘基; A係O、S、NR'、Si(R') 2或Se; a及b各自獨立為1至6的整數;以及 p及q各自獨立為1至30的整數。 In one embodiment of the present invention, the alkali-soluble resin may comprise at least one of the repeating units represented by the following formulas (IX) to (XIV):
Figure 02_image018
(IX)
Figure 02_image020
(X)
Figure 02_image022
(XI)
Figure 02_image024
(XII)
Figure 02_image026
(XIII)
Figure 02_image028
(XIV) Wherein, X and X' are each independently a single bond, -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C( CH 3 ) 2 -, -O-,
Figure 02_image030
,
Figure 02_image032
,
Figure 02_image034
,
Figure 02_image036
,
Figure 02_image038
,
Figure 02_image040
,
Figure 02_image042
,
Figure 02_image044
,
Figure 02_image046
,
Figure 02_image048
,
Figure 02_image050
,
Figure 02_image052
or
Figure 02_image054
; Y is the residue of an acid anhydride; Z is the residue of an acid dianhydride; R' is a hydrogen atom, ethyl, phenyl, -C 2 H 4 Cl, -C 2 H 4 OH or -CH 2 CH=CH 2 , R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 and R6' are each independently a hydrogen atom or a methyl group; R7, R7', R8 and R8' are independently C 1 to C 6 alkylene group, wherein the alkylene group is inserted with an ester bond, C 6 to C 14 cycloalkylene group, at least one of aryl group or no insertion; R9, R9', R10 , R10', R11, R11', R12 and R12' are each independently a hydrogen atom, a halogen atom or a C 1 to C 6 alkyl group; m and n are each independently an integer from 1 to 30; t and u are each independently 0 Integers from to 1; P are each independently
Figure 02_image056
,
Figure 02_image058
,
Figure 02_image060
,
Figure 02_image062
or
Figure 02_image064
; R13 and R14 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group or a halogen atom; Ar1 is each independently an aryl group; Y' is an acid anhydride residue; Z' is an acid dianhydride residue; A is O, S, NR', Si(R') 2 or Se; a and b are each independently an integer of 1 to 6; and p and q are each independently an integer of 1 to 30.

在本發明之一實施態樣中,該酸酐可選自以下群組:順丁烯二酸酐、琥珀酸酐、伊康酸酐、酞酸酐、四氫酞酸酐(tetrahydrophthalic anhydride)、六氫酞酸酐、甲基內亞甲基四氫酞酸酐(methylendomethylenetetrahydrophthalic anhydride)、氯橋酐及甲基四氫酞酸酐。In one embodiment of the present invention, the acid anhydride may be selected from the following groups: maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, formic Inner methylene tetrahydrophthalic anhydride (methylendomethylenetetrahydrophthalic anhydride), chlorine bridge anhydride and methyl tetrahydrophthalic anhydride.

在本發明之一實施態樣中,該酸二酐可選自以下群組:焦蜜石酸二酐、二苯基酮四羧酸二酐(benzophenonetetracarboxylic dianhydride)、聯苯四羧酸二酐以及聯苯醚四羧酸二酐(biphenylethertetracarboxylic dianhydride)。In one embodiment of the present invention, the acid dianhydride may be selected from the following groups: pyromelteric dianhydride, benzophenonetetracarboxylic dianhydride (benzophenonetetracarboxylic dianhydride), biphenyltetracarboxylic dianhydride and biphenylethertetracarboxylic dianhydride.

根據本發明之一實施態樣的感光性樹脂組合物可進一步包含由以下式(XV)至式(XVII)中任一者所表示的咔哚系(cardo-based)光聚合性化合物:

Figure 02_image066
(XV)
Figure 02_image068
(XVI)
Figure 02_image070
(XVII) 其中,R15及R16各自獨立為氫原子、羥基、硫醇基、胺基、硝基、鹵素原子或具有不飽和雙鍵的2至20個碳的聚合性官能基,並且R15及R16之至少一者係具有不飽和雙鍵的2至20個碳的聚合性官能基。 The photosensitive resin composition according to one embodiment of the present invention may further include a cardo-based photopolymerizable compound represented by any one of the following formula (XV) to formula (XVII):
Figure 02_image066
(XV)
Figure 02_image068
(XVI)
Figure 02_image070
(XVII) wherein, R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amine group, a nitro group, a halogen atom, or a polymerizable functional group of 2 to 20 carbons having an unsaturated double bond, and R15 and R16 At least one of them is a polymerizable functional group of 2 to 20 carbons having an unsaturated double bond.

在本發明之一實施態樣中,R15及R16各自獨立為氫原子、羥基、硫醇基、胺基、硝基、鹵素原子或

Figure 02_image072
,並且R15及R16之至少一者係
Figure 02_image072
, R17係C 1至C 6的伸烷基,並且該伸烷基係插入有酯鍵、C 6至C 14的伸環烷基、伸芳基之至少一者或沒有插入;以及 R18可為氫原子或甲基。 In one embodiment of the present invention, R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amine group, a nitro group, a halogen atom or
Figure 02_image072
, and at least one of R15 and R16 is
Figure 02_image072
, R17 is C 1 to C 6 alkylene group, and the alkylene system is inserted with an ester bond, C 6 to C 14 cycloalkylene group, at least one of arylene group or no insertion; and R18 can be hydrogen atom or methyl group.

根據本發明之一實施態樣的感光性樹脂組合物可不包含無機粒子。The photosensitive resin composition according to one embodiment of the present invention may not contain inorganic particles.

根據本發明之另一方案,提供一種利用該感光性樹脂組合物所形成之突出圖案(protrusion pattern)。According to another aspect of the present invention, a protrusion pattern formed by using the photosensitive resin composition is provided.

根據本發明之另一方案,提供一種包含該突出圖案的顯示裝置。According to another aspect of the present invention, a display device including the protruding pattern is provided.

藉由包含具有特定結構的多硫醇化合物,根據本發明的感光性樹脂組合物可在不使用無機粒子的情況下形成在550奈米的波長下表現出1.60或大於1.60的高折射率,即使在低溫固化下亦具有例如顯影速度、殘留物、黏著特性及表面硬度特性的優異的圖案特性,且對顯影劑及單體具有優異的化學抗性的圖案。By including a polythiol compound having a specific structure, the photosensitive resin composition according to the present invention can be formed to exhibit a high refractive index of 1.60 or more than 1.60 at a wavelength of 550 nm without using inorganic particles, even if It also has excellent pattern properties such as developing speed, residue, adhesive properties, and surface hardness properties under low-temperature curing, and has excellent chemical resistance to developers and monomers.

以下更詳細的描述本發明。The present invention is described in more detail below.

本發明之一實施態樣係關於一種感光性樹脂組合物,其包含多硫醇化合物(A)、鹼溶性樹脂(B)、多官能丙烯酸酯光聚合性化合物(C)、光聚合起始劑(D)以及溶劑(E)。One embodiment of the present invention relates to a photosensitive resin composition comprising a polythiol compound (A), an alkali-soluble resin (B), a polyfunctional acrylate photopolymerizable compound (C), and a photopolymerization initiator (D) and solvent (E).

根據本發明之一實施態樣的感光性樹脂組合物藉由利用具有特定結構的多硫醇化合物,可在不使用無機粒子的情況下形成在550奈米的波長下表現出1.60或大於1.60的高折射率,例如1.60至1.7的折射率。因此,藉由利用根據本發明之一實施態樣的感光性樹脂組合物的微影製程而圖案化的絕緣薄膜可被用於作為自發光裝置的光萃取材料,且因此從自發光裝置發出的光的光萃取效應及亮度可被大幅地改善。The photosensitive resin composition according to one embodiment of the present invention can form a photosensitive resin composition exhibiting 1.60 or more than 1.60 at a wavelength of 550 nm without using inorganic particles by using a polythiol compound having a specific structure. High refractive index, such as a refractive index of 1.60 to 1.7. Therefore, the insulating film patterned by the lithography process using the photosensitive resin composition according to an embodiment of the present invention can be used as a light extraction material of the self-luminous device, and thus the light emitted from the self-luminous device The light extraction effect and brightness of light can be greatly improved.

此外,根據本發明之一實施態樣的感光性樹脂組合物顯示出顯影速度的比率,從而即使在低溫固化下曝光部分及非曝光部分皆是清晰的,且具有例如殘留物、黏著特性及表面硬度特性的優異的圖案特性,以及由於優異的固化程度而對在後處理過程中使用的顯影劑及/或單體具有優異的化學抗性。In addition, the photosensitive resin composition according to an embodiment of the present invention exhibits a ratio of developing speed so that the exposed portion and the non-exposed portion are clear even under low-temperature curing, and has, for example, residue, adhesive properties, and surface Excellent pattern properties of hardness properties, and excellent chemical resistance to developers and/or monomers used in post-processing due to excellent degree of curing.

多硫醇化合物(polythiol compounds ( AA )

在本發明之一實施態樣中,多硫醇化合物(A)係用於增加折射率及改善固化程度的成分,且係分子內具有二個以上硫醇基的化合物。In one embodiment of the present invention, the polythiol compound (A) is a component for increasing the refractive index and improving the curing degree, and is a compound having two or more thiol groups in the molecule.

該多硫醇化合物(A)係由以下式(I)所表示:

Figure 02_image001
(I) 其中, R係包含硫原子的k價的脂族烴基,或是包含硫原子的k價的脂環烴基;以及 k係2至6的整數。 The polythiol compound (A) is represented by the following formula (I):
Figure 02_image001
(I) wherein, R is a k-valent aliphatic hydrocarbon group containing a sulfur atom, or a k-valent alicyclic hydrocarbon group containing a sulfur atom; and k is an integer of 2 to 6.

該由式(I)所表示的多硫醇化合物可包含由以下式(II)或式(III)所表示的多硫醇化合物:

Figure 02_image004
(II)
Figure 02_image006
(III) 其中, R a、R b、R c及R d各自獨立為氫原子或-CH 2-SH; R e、R f、R g及R h各自獨立為氫原子或-CH 2-SH,並且R e、R f、R g及R h中的至少二者為-CH 2-SH; d係1至2的整數;以及 e係0至2的整數。 The polythiol compound represented by formula (I) may include a polythiol compound represented by the following formula (II) or formula (III):
Figure 02_image004
(II)
Figure 02_image006
(III) Among them, R a , R b , R c and R d are each independently a hydrogen atom or -CH 2 -SH; Re , R f , R g and Rh are each independently a hydrogen atom or -CH 2 -SH , and at least two of R e , R f , R g and Rh are —CH 2 —SH; d is an integer of 1 to 2; and e is an integer of 0 to 2.

該由式(I)所表示的多硫醇化合物可包含由以下式(IV)至式(VIII)中任一者所表示的多硫醇化合物:

Figure 02_image008
(IV)
Figure 02_image010
(V)
Figure 02_image012
(VI)
Figure 02_image014
(VII)
Figure 02_image016
(VIII) The polythiol compound represented by formula (I) may comprise a polythiol compound represented by any one of the following formulas (IV) to (VIII):
Figure 02_image008
(IV)
Figure 02_image010
(V)
Figure 02_image012
(VI)
Figure 02_image014
(VII)
Figure 02_image016
(VIII)

該多硫醇化合物可包含單獨之所例示的多硫醇化合物或組合二者以上之所例示的多硫醇化合物。The polythiol compound may contain the exemplified polythiol compounds alone or in combination of two or more exemplified polythiol compounds.

藉由包含式(I)所表示的多硫醇化合物,根據本發明的感光性樹脂組合物可形成在550奈米的波長下表現出1.60或大於1.60的高折射率,即使在低溫固化下亦具有優異的圖案特性,且對在後處理過程中使用的顯影劑及/或單體具有優異的化學抗性的圖案。By including the polythiol compound represented by formula (I), the photosensitive resin composition according to the present invention can be formed to exhibit a high refractive index of 1.60 or more than 1.60 at a wavelength of 550 nm, even under low temperature curing. A pattern with excellent pattern properties and excellent chemical resistance to developers and/or monomers used in post-processing.

在本發明之一實施態樣中,以感光性樹脂組合物中的總固含量為100重量%計,該由式(I)所表示的多硫醇化合物的含量可為0.1至10重量%,較佳為1至10重量%。當該由式(I)所表示的多硫醇化合物的含量少於0.1重量%時,折射率及/或固化的程度可能降低,以及當該由式(I)所表示的多硫醇化合物的含量多於10重量%時,非曝光部分可能在顯影劑中不被顯影,例如,在2.38%的氫氧化四甲銨(TMAH)的水溶液中。In one embodiment of the present invention, based on 100% by weight of the total solid content in the photosensitive resin composition, the content of the polythiol compound represented by formula (I) may be 0.1 to 10% by weight, Preferably it is 1 to 10% by weight. When the content of the polythiol compound represented by the formula (I) is less than 0.1% by weight, the refractive index and/or the degree of curing may decrease, and when the polythiol compound represented by the formula (I) When the content is more than 10% by weight, the non-exposed portion may not be developed in a developer, for example, in a 2.38% aqueous solution of tetramethylammonium hydroxide (TMAH).

在本發明中,感光性樹脂組合物中的固含量係指除了溶液以外的成分的總和。In the present invention, the solid content in the photosensitive resin composition means the sum of components other than the solution.

鹼溶性樹脂(Alkali-soluble resin ( BB )

在本發明之一實施態樣中,鹼溶性樹脂(B)係藉由光或熱的作用而具有反應性的成分,且在形成圖案時賦予在顯影過程中所使用之鹼性顯影劑中的溶解性。In one embodiment of the present invention, the alkali-soluble resin (B) is a reactive component by the action of light or heat, and when forming a pattern, it imparts Solubility.

該鹼溶性樹脂(B)可較佳包含咔哚系鹼溶性樹脂。該咔哚系鹼溶性樹脂可包含由以下式(IX)至式(XIV)所表示之重複單元的至少一者:

Figure 02_image018
(IX)
Figure 02_image020
(X)
Figure 02_image022
(XI)
Figure 02_image024
(XII)
Figure 02_image026
(XIII)
Figure 02_image028
(XIV) 其中, X及X'各自獨立為單鍵、-CO-、-SO 2-、-C(CF 3) 2-、-Si(CH 3) 2-、-CH 2-、-C(CH 3) 2-、-O-、
Figure 02_image030
Figure 02_image032
Figure 02_image034
Figure 02_image036
Figure 02_image038
Figure 02_image040
Figure 02_image042
Figure 02_image044
Figure 02_image046
Figure 02_image048
Figure 02_image050
Figure 02_image052
Figure 02_image054
; Y係酸酐的殘基; Z係酸二酐的殘基; R'係氫原子、乙基、苯基、-C 2H 4Cl、-C 2H 4OH或-CH 2CH=CH 2, R1、R1'、R2、R2'、R3、R3'、R4、R4'、R5、R5'、R6及R6'各自獨立為氫原子或甲基; R7、R7'、R8及R8'各自獨立為C 1至C 6的伸烷基,其中該伸烷基係插入有酯鍵、C 6至C 14的伸環烷基、伸芳基之至少一者或沒有插入; R9、R9'、R10、R10'、R11、R11'、R12及R12'各自獨立為氫原子、鹵素原子或C 1至C 6的烷基; m及n各自獨立為1至30的整數; t及u各自獨立為0至1的整數; P各自獨立為
Figure 02_image056
Figure 02_image058
Figure 02_image060
Figure 02_image062
Figure 02_image064
; R13及R14各自獨立為氫原子、羥基、硫醇基、胺基、硝基或鹵素原子; Ar1各自獨立為芳基; Y'係酸酐的殘基; Z'係酸二酐的殘基; A係O、S、NR'、Si(R') 2或Se; a及b各自獨立為1至6的整數;以及 p及q各自獨立為1至30的整數。 The alkali-soluble resin (B) may preferably include a cardole-based alkali-soluble resin. The cardole-based alkali-soluble resin may comprise at least one of the repeating units represented by the following formulas (IX) to (XIV):
Figure 02_image018
(IX)
Figure 02_image020
(X)
Figure 02_image022
(XI)
Figure 02_image024
(XII)
Figure 02_image026
(XIII)
Figure 02_image028
(XIV) Wherein, X and X' are each independently a single bond, -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C( CH 3 ) 2 -, -O-,
Figure 02_image030
,
Figure 02_image032
,
Figure 02_image034
,
Figure 02_image036
,
Figure 02_image038
,
Figure 02_image040
,
Figure 02_image042
,
Figure 02_image044
,
Figure 02_image046
,
Figure 02_image048
,
Figure 02_image050
,
Figure 02_image052
or
Figure 02_image054
; Y is the residue of an acid anhydride; Z is the residue of an acid dianhydride; R' is a hydrogen atom, ethyl, phenyl, -C 2 H 4 Cl, -C 2 H 4 OH or -CH 2 CH=CH 2 , R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 and R6' are each independently a hydrogen atom or a methyl group; R7, R7', R8 and R8' are independently C 1 to C 6 alkylene group, wherein the alkylene group is inserted with an ester bond, C 6 to C 14 cycloalkylene group, at least one of aryl group or no insertion; R9, R9', R10 , R10', R11, R11', R12 and R12' are each independently a hydrogen atom, a halogen atom or a C 1 to C 6 alkyl group; m and n are each independently an integer from 1 to 30; t and u are each independently 0 Integers from to 1; P are each independently
Figure 02_image056
,
Figure 02_image058
,
Figure 02_image060
,
Figure 02_image062
or
Figure 02_image064
; R13 and R14 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group or a halogen atom; Ar1 is each independently an aryl group; Y' is an acid anhydride residue; Z' is an acid dianhydride residue; A is O, S, NR', Si(R') 2 or Se; a and b are each independently an integer of 1 to 6; and p and q are each independently an integer of 1 to 30.

在本文中,C 1至C 6的伸烷基係指具有1至6個碳原子的直鏈或支鏈的二價烴,且包括例如亞甲基、伸乙基、伸丙基、伸丁基等,但不限於此。 Herein, the C 1 to C 6 alkylene group refers to a linear or branched divalent hydrocarbon having 1 to 6 carbon atoms, and includes, for example, methylene, ethylidene, propylidene, butylene base, but not limited to.

在本文中,C 6至C 14的伸環烷基係指具有6至14個碳原子的單環或稠環二價烴,且包括例如伸環己基、伸環庚基、伸環辛基等,但不限於此。 Herein, C 6 to C 14 cycloalkylene refers to a monocyclic or condensed ring divalent hydrocarbon having 6 to 14 carbon atoms, and includes, for example, cyclohexylene, cycloheptylene, cyclooctylene, etc. , but not limited to this.

在本文中,伸芳基包括二價芳基及雜芳基以及部份它們還原的衍生物。芳基係5至15元單環或稠環基團,且雜芳基係指包含氧、硫或氮之至少一者的芳基。代表性伸芳基的實例包括伸苯基、伸萘基、伸吡啶基、伸呋喃基、伸苯硫基、伸吲哚基、伸喹啉基、伸咪唑啉基、伸噁唑基、伸噻唑基、伸四氫化萘基等,但不限於此。As used herein, aryl includes divalent aryl and heteroaryl groups and some of their reduced derivatives. Aryl is a 5 to 15 membered monocyclic or condensed ring group, and heteroaryl refers to an aryl group containing at least one of oxygen, sulfur or nitrogen. Examples of representative arylenyl groups include phenylene, naphthylene, pyridylene, furylene, thiophenylene, indolylene, quinolinyl, imidazolinyl, oxazolylene, Thiazolyl, tetrahydronaphthyl, etc., but not limited thereto.

在本文中,C 1至C 6的烷基係指具有1至6個碳原子的直鏈或支鏈的單價烴,且包括例如甲基、乙基、正丙基、異丙基、正丁基、異丁基、三級丁基、正戊基、正己基等,但不限於此。 Herein, a C1 to C6 alkyl refers to a linear or branched monovalent hydrocarbon having 1 to 6 carbon atoms, and includes, for example, methyl, ethyl, n-propyl, isopropyl, n-butyl group, isobutyl group, tertiary butyl group, n-pentyl group, n-hexyl group, etc., but not limited thereto.

在本文中,芳基包括單價芳基及雜芳基以及部份它們還原的衍生物。芳基係5至15元單環或稠環基團,且雜芳基係指包含氧、硫或氮之至少一者的芳基。代表性芳基的實例包括苯基、萘基、吡啶基、呋喃基、苯硫基、吲哚基、喹啉基、咪唑啉基、噁唑基、噻唑基、四氫化萘基等,但不限於此。As used herein, aryl includes monovalent aryl and heteroaryl as well as some of their reduced derivatives. Aryl is a 5 to 15 membered monocyclic or condensed ring group, and heteroaryl refers to an aryl group containing at least one of oxygen, sulfur or nitrogen. Examples of representative aryl groups include phenyl, naphthyl, pyridyl, furyl, thiophenyl, indolyl, quinolinyl, imidazolinyl, oxazolyl, thiazolyl, tetralinyl, and the like, but not limited to this.

本文中之酸酐的殘基可藉由使本發明咔哚系樹脂的合成中間產物與酸酐進行反應來獲得。可被引入轉化為酸酐殘基的酸酐沒有特別的限制,且包括例如順丁烯二酸酐、琥珀酸酐、伊康酸酐、酞酸酐、四氫酞酸酐(tetrahydrophthalic anhydride)、六氫酞酸酐、甲基內亞甲基四氫酞酸酐(methylendomethylenetetrahydrophthalic anhydride)、氯橋酐及甲基四氫酞酸酐等。這些酸酐可單獨使用或組合二者以上使用。The residue of the acid anhydride herein can be obtained by reacting the synthesis intermediate product of the cardole-based resin of the present invention with an acid anhydride. The acid anhydride that can be introduced into the acid anhydride residue is not particularly limited, and includes, for example, maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methyl Inner methylene tetrahydrophthalic anhydride (methylendomethylenetetrahydrophthalic anhydride), chlorine bridge anhydride and methyl tetrahydrophthalic anhydride, etc. These acid anhydrides can be used alone or in combination of two or more.

本文中之酸二酐的殘基可藉由使本發明咔哚系樹脂的合成中間產物與酸二酐進行反應來獲得。可被引入轉化為酸二酐殘基的酸二酐沒有特別的限制,且包括例如焦蜜石酸二酐、二苯基酮四羧酸二酐(benzophenonetetracarboxylic dianhydride)、聯苯四羧酸二酐以及聯苯醚四羧酸二酐(biphenylethertetracarboxylic dianhydride)等。這些酸酐可單獨使用或組合二者以上使用。The residue of the acid dianhydride herein can be obtained by reacting the synthesis intermediate product of the cardole-based resin of the present invention with the acid dianhydride. The acid dianhydride that can be introduced into the acid dianhydride residue is not particularly limited, and includes, for example, pyromelteric dianhydride, benzophenonetetracarboxylic dianhydride, biphenyltetracarboxylic dianhydride And biphenyl ether tetracarboxylic dianhydride (biphenylethertetracarboxylic dianhydride) and so on. These acid anhydrides can be used alone or in combination of two or more.

在本文中的酸二酐係指在分子內包含二個酸酐基團的化合物。The acid dianhydride herein refers to a compound containing two acid anhydride groups in the molecule.

根據本發明的感光性樹脂組合物藉由包含含有由式(IX)至式(XIV)所表示之重複單元的至少一者的咔哚系鹼溶性樹脂,可進一步增加折射率,以及進一步改善在低溫固化下的圖案特性及化學抗性。The photosensitive resin composition according to the present invention can further increase the refractive index and further improve the Pattern properties and chemical resistance under low temperature curing.

製備咔哚系鹼溶性樹脂的方法沒有特別限制。舉例來說,咔哚系鹼溶性樹脂可藉由以下方法來製備:使雙酚化合物與環氧化合物進行反應以合成雙酚環氧化合物,將所合成的雙酚環氧化合物與丙烯酸酯化合物進行反應以合成雙酚環氧丙烯酸酯化合物,然後將該雙酚環氧丙烯酸酯化合物與酸酐、酸二酐或其混合物進行反應。The method for preparing the cardole-based alkali-soluble resin is not particularly limited. For example, a carbadole-based alkali-soluble resin can be prepared by reacting a bisphenol compound with an epoxy compound to synthesize a bisphenol epoxy compound, and subjecting the synthesized bisphenol epoxy compound to an acrylate compound. react to synthesize a bisphenol epoxy acrylate compound, and then react the bisphenol epoxy acrylate compound with an acid anhydride, an acid dianhydride or a mixture thereof.

根據本發明的感光性樹脂組合物除了作為鹼溶性樹脂的咔哚系鹼溶性樹脂外,可進一步包含丙烯酸鹼溶性樹脂。The photosensitive resin composition according to the present invention may further contain an acrylic alkali-soluble resin in addition to the cardole-based alkali-soluble resin as the alkali-soluble resin.

該丙烯酸鹼溶性樹脂包括例如含羧基的單體及可與其共聚的其他單體的共聚物。The acrylic alkali-soluble resin includes, for example, a copolymer of a carboxyl group-containing monomer and other monomers copolymerizable therewith.

該含羧基的單體的實例包括不飽和羧酸,舉例來說,包括不飽和單羧酸以及在分子內具有二個以上的羧基的不飽和多羧酸,例如不飽和二羧酸及不飽和三羧酸。不飽和單羧酸的實例包括丙烯酸、甲基丙烯酸、巴豆酸、α-氯丙烯酸、肉桂酸等。不飽和二羧酸的實例包括順丁烯二酸、反丁烯二酸、伊康酸、檸康酸、中康酸等。不飽和多羧酸可以是酸酐且具體的實例包括順丁烯二酸酐、伊康酸酐、檸康酸酐等。此外,不飽和多羧酸可以是其單(2-甲基丙烯醯氧基烷)酯,包括例如單(2-丙烯醯氧基乙基)琥珀酸酯、單(2-甲基丙烯醯氧基乙基)琥珀酸酯、單(2-丙烯醯氧基乙基)酞酸酯、單(2-甲基丙烯醯氧基乙基)酞酸酯等。不飽和多羧酸可以是在二末端具有二羧聚合物的單(甲基)丙烯酸酯,例如包括ω-羧基聚己內酯單丙烯酸酯、ω-羧基聚己內酯單甲基丙烯酸酯等。這些含羧基的單體可以單獨使用或組合二者以上使用。Examples of the carboxyl group-containing monomer include unsaturated carboxylic acids, for example, unsaturated monocarboxylic acids and unsaturated polycarboxylic acids having two or more carboxyl groups in the molecule, such as unsaturated dicarboxylic acids and unsaturated tricarboxylic acid. Examples of unsaturated monocarboxylic acids include acrylic acid, methacrylic acid, crotonic acid, α-chloroacrylic acid, cinnamic acid and the like. Examples of unsaturated dicarboxylic acids include maleic acid, fumaric acid, itaconic acid, citraconic acid, mesaconic acid, and the like. The unsaturated polycarboxylic acid may be an acid anhydride and specific examples include maleic anhydride, itaconic anhydride, citraconic anhydride, and the like. In addition, the unsaturated polycarboxylic acids may be mono(2-methacryloxyalkyl)esters thereof, including for example mono(2-acryloxyethyl)succinate, mono(2-methacryloxyethyl)succinate, mono(2-methacryloxy ethyl) succinate, mono(2-acryloxyethyl) phthalate, mono(2-methacryloxyethyl) phthalate, etc. The unsaturated polycarboxylic acid may be a mono(meth)acrylate having a dicarboxylic polymer at both ends, including, for example, ω-carboxypolycaprolactone monoacrylate, ω-carboxypolycaprolactone monomethacrylate, etc. . These carboxyl group-containing monomers can be used alone or in combination of two or more.

可與含羧基的單體共聚的其他單體包括芳香族乙烯基化合物,例如苯乙烯、α-甲基苯乙烯、鄰乙烯甲苯、間乙烯甲苯、對乙烯甲苯、對氯苯乙烯、鄰甲氧苯乙烯、間甲氧苯乙烯、對甲氧苯乙烯、鄰苯乙烯甲基醚、間苯乙烯甲基醚、對苯乙烯甲基醚、鄰苯乙烯環氧丙基醚、間苯乙烯環氧丙基醚、對苯乙烯環氧丙基醚、茚等;不飽和羧酸酯,例如丙烯酸甲酯、甲基丙烯酸甲酯、丙烯酸乙酯、甲基丙烯酸乙酯、丙烯酸正丙酯、甲基丙烯酸正丙酯、丙烯酸異丙酯、甲基丙烯酸異丙酯、丙烯酸正丁酯、甲基丙烯酸正丁酯、丙烯酸異丁酯、甲基丙烯酸異丁酯、丙烯酸二級丁酯、甲基丙烯酸二級丁酯、丙烯酸三級丁酯、甲基丙烯酸三級丁酯、丙烯酸2-羥乙酯、甲基丙烯酸2-羥乙酯、丙烯酸2-羥丙酯、甲基丙烯酸2-羥丙酯、丙烯酸3-羥丙酯、甲基丙烯酸3-羥丙酯、丙烯酸2-羥丁酯、甲基丙烯酸2-羥丁酯、丙烯酸3-羥丁酯、甲基丙烯酸3-羥丁酯、丙烯酸4-羥丁酯、甲基丙烯酸4-羥丁酯、丙烯酸烯丙酯、甲基丙烯酸烯丙酯、丙烯酸苄酯、甲基丙烯酸苄酯、丙烯酸環己酯、甲基丙烯酸環己酯、丙烯酸苯酯、甲基丙基酸苯酯、丙烯酸2-甲氧基乙酯、甲基丙烯酸2-甲氧基乙酯、丙烯酸2-苯氧基乙酯、甲基丙烯酸2-苯氧基乙酯、丙烯酸甲氧基二乙二醇酯、甲基丙烯酸甲氧基二乙二醇酯、丙烯酸甲氧基三乙二醇酯、甲基丙烯酸甲氧基三乙二醇酯、丙烯酸甲氧基丙二醇酯、甲基丙烯酸甲氧基丙二醇酯、丙烯酸甲氧基二丙二醇酯、甲基丙烯酸甲氧基二丙二醇酯、丙烯酸異莰酯、甲基丙烯酸異莰酯、丙烯酸二環戊二烯基酯、甲基丙烯酸二環戊二烯基酯、(甲基)丙烯酸金剛烷酯、(甲基)丙烯酸降莰酯、丙烯酸2-羥-3-苯氧基丙酯、甲基丙烯酸2-羥-3-苯氧基丙酯、單丙烯酸甘油酯、甲基單丙烯酸甘油酯等;不飽和羧酸胺基烷酯,例如丙烯酸2-胺基乙酯、甲基丙烯酸2-胺基乙酯、丙烯酸2-二甲胺基乙酯、甲基丙烯酸2-二甲胺基乙酯、丙烯酸2-胺基丙酯、甲基丙烯酸2-胺基丙酯、丙烯酸2-二甲胺基丙酯、甲基丙烯酸2-二甲胺基丙酯、丙烯酸3-胺基丙酯、甲基丙烯酸3-胺基丙酯、丙烯酸3-二甲胺基丙酯、甲基丙烯酸3-二甲胺基丙酯等;不飽和羧酸環氧丙基酯,例如丙烯酸環氧丙酯、甲基丙烯酸環氧丙酯等;羧酸乙烯酯,例如乙酸乙烯酯、丙酸乙烯酯、丁酸乙烯酯、苯甲酸乙烯酯等;不飽和醚,例如乙烯甲醚、乙烯乙醚、烯丙基環氧丙基醚等;乙烯基氰化物(vinyl cyanide)化合物,例如丙烯腈、甲基丙烯腈、α-氯丙烯腈、二氰亞乙烯等;不飽和醯胺,例如丙烯醯胺、甲基丙烯醯胺、α-氯丙烯醯胺、N-2-羥乙基丙烯醯胺、N-2-羥乙基甲基丙烯醯胺等;不飽和醯亞胺,例如順丁烯二醯亞胺、芐基順丁烯二醯亞胺、N-苯基順丁烯二醯亞胺、N-環己基順丁烯二醯亞胺等;脂肪族共軛二烯,例如1,3-丁二烯、異戊二烯、氯丁二烯等;以及在聚合物的分子鏈二端具有單丙烯醯基或單甲基丙烯醯基的巨分子單體,例如聚苯乙烯、聚丙烯酸甲酯、聚甲基丙烯酸甲酯、聚丙烯酸正丁酯、聚甲基丙烯酸正丁酯、及聚矽氧烷。這些單體可單獨使用或組合二者以上使用。Other monomers copolymerizable with carboxyl-containing monomers include aromatic vinyl compounds such as styrene, α-methylstyrene, o-vinyltoluene, m-vinyltoluene, p-vinyltoluene, p-chlorostyrene, o-methoxy Styrene, m-methoxystyrene, p-methoxystyrene, o-styrene methyl ether, m-styrene methyl ether, p-styrene methyl ether, o-styrene glycidyl ether, m-styrene epoxy Propyl ether, p-styrene glycidyl ether, indene, etc.; unsaturated carboxylic acid esters, such as methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, n-propyl acrylate, methyl n-propyl acrylate, isopropyl acrylate, isopropyl methacrylate, n-butyl acrylate, n-butyl methacrylate, isobutyl acrylate, isobutyl methacrylate, secondary butyl acrylate, methacrylic acid Secondary butyl ester, tertiary butyl acrylate, tertiary butyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, 2-hydroxypropyl methacrylate , 3-hydroxypropyl acrylate, 3-hydroxypropyl methacrylate, 2-hydroxybutyl acrylate, 2-hydroxybutyl methacrylate, 3-hydroxybutyl acrylate, 3-hydroxybutyl methacrylate, acrylic acid 4-Hydroxybutyl methacrylate, 4-hydroxybutyl methacrylate, allyl acrylate, allyl methacrylate, benzyl acrylate, benzyl methacrylate, cyclohexyl acrylate, cyclohexyl methacrylate, acrylic acid Phenyl ester, phenyl methacrylate, 2-methoxyethyl acrylate, 2-methoxyethyl methacrylate, 2-phenoxyethyl acrylate, 2-phenoxyethyl methacrylate , Methoxydiethylene glycol acrylate, Methoxydiethylene glycol methacrylate, Methoxytriethylene glycol acrylate, Methoxytriethylene glycol methacrylate, Methoxypropylene glycol acrylate ester, methoxypropylene glycol methacrylate, methoxydipropylene glycol acrylate, methoxydipropylene glycol methacrylate, isobornyl acrylate, isobornyl methacrylate, dicyclopentadienyl acrylate, Dicyclopentadienyl methacrylate, Adamantyl (meth)acrylate, Norbornyl (meth)acrylate, 2-Hydroxy-3-phenoxypropyl acrylate, 2-Hydroxy-3-methacrylate - Phenoxypropyl, glyceryl monoacrylate, glycerol methacrylate, etc.; aminoalkyl unsaturated carboxylates, such as 2-aminoethyl acrylate, 2-aminoethyl methacrylate, 2-aminoethyl acrylate -Dimethylaminoethyl methacrylate, 2-dimethylaminoethyl methacrylate, 2-aminopropyl acrylate, 2-aminopropyl methacrylate, 2-dimethylaminopropyl acrylate, methyl 2-dimethylaminopropyl acrylate, 3-aminopropyl acrylate, 3-aminopropyl methacrylate, 3-dimethylaminopropyl acrylate, 3-dimethylaminopropyl methacrylate, etc. ; Unsaturated carboxylic acid glycidyl esters, such as glycidyl acrylate, glycidyl methacrylate, etc.; vinyl carboxylates, such as vinyl acetate, vinyl propionate, vinyl butyrate, vinyl benzoate Esters, etc.; unsaturated ethers, such as vinyl methyl ether, vinyl ethyl ether, allyl glycidyl ether, etc.; vinyl cyanide (vinyl cyanide) compounds, such as acrylonitrile, methacrylonitrile, α-chloroacrylonitrile, Vinylidene dicyanide, etc.; unsaturated amides, such as acrylamide, methacrylamide, α-chloroacrylamide, N-2-hydroxyethylacrylamide, N-2-hydroxyethylmethacrylamide Amides, etc.; unsaturated imides, such as maleimide, benzylmaleimide, N-phenylmaleimide, N-cyclohexylmaleimide imines, etc.; aliphatic conjugated dienes, such as 1,3-butadiene, isoprene, chloroprene, etc.; Acyl-based macromonomers, such as polystyrene, polymethyl acrylate, polymethyl methacrylate, poly-n-butyl acrylate, poly-n-butyl methacrylate, and polysiloxane. These monomers may be used alone or in combination of two or more.

該鹼溶性樹脂可具有20至200的酸值(KOH毫克/公克)。當酸值在上述範圍時,在顯影劑中的溶解度得到改善。因此非曝光部分容易溶解且靈敏度增加。因此,曝光部分的圖案在顯影時會繼續存在,從而改善膜的殘留比率,這係較佳的。本文中的酸值係測量中和1公克的聚合物所需的氫氧化鉀的量(毫克)的值,且可藉由使用氫氧化鉀水溶液滴定來測定。The alkali-soluble resin may have an acid value (KOH mg/g) of 20 to 200. When the acid value is within the above range, the solubility in the developer is improved. Therefore, the non-exposed portion is easily dissolved and the sensitivity is increased. Therefore, the pattern of the exposed portion continues to exist at the time of development, thereby improving the residual ratio of the film, which is preferable. The acid value herein is a value measuring the amount (mg) of potassium hydroxide required to neutralize 1 g of polymer, and can be determined by titration using an aqueous potassium hydroxide solution.

藉由凝膠滲透層析法(GPC;使用四氫呋喃作為沖堤液)測量的鹼溶性樹脂的以聚苯乙烯為基準的重量平均分子量(以下簡稱為重量平均分子量)較佳係1,000公克/莫耳至30,000公克/莫耳。當重量平均分子量在上述範圍內時,非曝光部分溶解於顯影劑的靈敏度增加,且在熱固化後在後處理過程中表現優異的化學抗性,這係較佳的。The polystyrene-based weight average molecular weight of the alkali-soluble resin measured by gel permeation chromatography (GPC; using tetrahydrofuran as a dike fluid) (hereinafter referred to as the weight average molecular weight) is preferably 1,000 g/mol Up to 30,000 g/mol. When the weight average molecular weight is within the above range, the sensitivity of the non-exposed portion to dissolve in the developer increases, and exhibits excellent chemical resistance during post-processing after thermal curing, which is preferable.

鹼溶性樹脂的分子量分布(重量平均分子量(Mw)/數量平均分子量(Mn))較佳係1.0至6.0,更佳係1.5至6.0。1.5至6.0的分子量分布係較佳的,因為可靠性優異。The molecular weight distribution (weight average molecular weight (Mw)/number average molecular weight (Mn)) of the alkali-soluble resin is preferably 1.0 to 6.0, more preferably 1.5 to 6.0. A molecular weight distribution of 1.5 to 6.0 is preferable because of excellent reliability .

以感光性樹脂組合物中的總固含量為100重量%計,該鹼溶性樹脂(B)的含量為20至80重量%,較佳係30至70重量%。當鹼溶性樹脂(B)的含量低於20重量%時,非曝光部分溶解於顯影劑的靈敏度降低且因此可能產生殘留物。當鹼溶性樹脂(B)的含量高於80重量%時,光固化性(photocurability)可能降低且因此曝光部分可能溶解於顯影劑中。Based on 100% by weight of the total solid content in the photosensitive resin composition, the content of the alkali-soluble resin (B) is 20 to 80% by weight, preferably 30 to 70% by weight. When the content of the alkali-soluble resin (B) is less than 20% by weight, the sensitivity of the non-exposed portion to dissolve in the developer decreases and thus residue may be generated. When the content of the alkali-soluble resin (B) is more than 80% by weight, photocurability may decrease and thus exposed portions may be dissolved in the developer.

多官能丙烯酸酯光聚合性化合物(Multifunctional acrylate photopolymerizable compound ( CC )

在本發明之一實施態樣中,多官能丙烯酸酯光聚合性化合物(C)係可藉由光與下述光聚合起始劑作用而聚合的成分。其係藉由曝光製程聚合以改善圖案的機械特性,例如硬度、黏著特性等,或增加鹼溶性樹脂的顯影性。In one embodiment of the present invention, the polyfunctional acrylate photopolymerizable compound (C) is a component that can be polymerized by the action of light on the following photopolymerization initiator. It is polymerized through the exposure process to improve the mechanical properties of the pattern, such as hardness, adhesive properties, etc., or to increase the developability of the alkali-soluble resin.

該多官能丙烯酸酯光聚合性化合物係在分子中具有二個以上的(甲基)丙烯醯氧基的化合物,較佳係具有三個以上的(甲基)丙烯醯氧基,更佳係具有四個以上的(甲基)丙烯醯氧基。The polyfunctional acrylate photopolymerizable compound is a compound having two or more (meth)acryloxy groups in the molecule, preferably having three or more (meth)acryloxy groups, and more preferably having Four or more (meth)acryloyloxy groups.

該多官能丙烯酸酯光聚合性化合物包括,舉例來說,雙官能基(甲基)丙烯酸酯光聚合性化合物,例如1,6-己二醇二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、雙酚A的雙(丙烯醯氧基乙基)醚、3-甲基戊二醇二(甲基)丙烯酸酯等;三官能基(甲基)丙烯酸酯光聚合性化合物,例如三羥甲丙烷三(甲基)丙烯酸酯、乙氧基化三羥甲丙烷三(甲基)丙烯酸酯、丙氧基化三羥甲丙烷三(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯等;四官能基(甲基)丙烯酸酯光聚合性化合物,例如二三羥甲丙烷四(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、乙氧基化新戊四醇四(甲基)丙烯酸酯等;五官能基(甲基)丙烯酸酯光聚合性化合物,例如二新戊四醇五(甲基)丙烯酸酯等;以及六官能基(甲基)丙烯酸酯光聚合性化合物,例如乙氧基化二新戊四醇六(甲基)丙烯酸酯、丙氧基化二新戊四醇六(甲基)丙烯酸酯、二新戊四醇六(甲基)丙烯酸酯等。The polyfunctional acrylate photopolymerizable compound includes, for example, a difunctional (meth)acrylate photopolymerizable compound such as 1,6-hexanediol di(meth)acrylate, ethylene glycol di( Meth)acrylate, Neopentyl glycol di(meth)acrylate, Triethylene glycol di(meth)acrylate, Bis(acryloxyethyl)ether of bisphenol A, 3-Methylpentyl Diol di(meth)acrylate, etc.; trifunctional (meth)acrylate photopolymerizable compounds such as trimethylolpropane tri(meth)acrylate, ethoxylated trimethylolpropane tri(methyl) ) acrylate, propoxylated trimethylolpropane tri(meth)acrylate, neopentylthritol tri(meth)acrylate, etc.; tetrafunctional (meth)acrylate photopolymerizable compounds such as Hydroxymethylpropane tetra(meth)acrylate, neopentylitol tetra(meth)acrylate, ethoxylated neopentylitol tetra(meth)acrylate, etc.; pentafunctional (meth)acrylate light Polymerizable compounds such as dipenteoerythritol penta(meth)acrylate, etc.; and hexafunctional (meth)acrylate photopolymerizable compounds such as ethoxylated dipenteoerythritol hexa(meth)acrylate ester, propoxylated diperythritol hexa(meth)acrylate, dipenteoerythritol hexa(meth)acrylate, etc.

所例示的多官能丙烯酸酯光聚合性化合物可單獨使用或組合二者以上使用。The illustrated polyfunctional acrylate photopolymerizable compounds can be used alone or in combination of two or more.

以感光性樹脂組合物中的總固含量為100重量%計,該多官能丙烯酸酯光聚合性化合物(C)的含量為10至60重量%,較佳係20至50重量%。當多官能丙烯酸酯光聚合性化合物(C)的含量低於10重量%時,光固化性降低且因此曝光部分可能溶解於顯影劑中。當多官能丙烯酸酯光聚合性化合物(C)的含量高於50重量%時,可能在下基板上產生殘留物或可能降低折射率。Based on 100% by weight of the total solid content in the photosensitive resin composition, the content of the polyfunctional acrylate photopolymerizable compound (C) is 10 to 60% by weight, preferably 20 to 50% by weight. When the content of the polyfunctional acrylate photopolymerizable compound (C) is less than 10% by weight, photocurability decreases and thus exposed portions may be dissolved in a developer. When the content of the polyfunctional acrylate photopolymerizable compound (C) is more than 50% by weight, residue may be generated on the lower substrate or the refractive index may be lowered.

光聚合起始劑(Photopolymerization initiator ( DD. )

在本發明之一實施態樣中,只要能聚合多官能丙烯酸酯光聚合性化合物(C)及下述的咔哚系光聚合性化合物(F),則光聚合起始劑(D)的使用沒有特別的限制。具體地,其較佳係使用選自以下群組的至少一者:苯乙酮系化合物、二苯甲酮系化合物、三嗪系化合物、雙咪唑系化合物、肟系化合物及噻噸酮(thioxanthone)系化合物(依聚合特性、起始效率、吸收波長、可得性、價格等方面)。尤其,苯乙酮系化合物係較佳的。In one embodiment of the present invention, as long as the polyfunctional acrylate photopolymerizable compound (C) and the following cardole-based photopolymerizable compound (F) can be polymerized, the use of the photopolymerization initiator (D) There are no particular restrictions. Specifically, it is preferable to use at least one selected from the following groups: acetophenone-based compounds, benzophenone-based compounds, triazine-based compounds, bis-imidazole-based compounds, oxime-based compounds, and thioxanthone (thioxanthone) ) is a compound (according to polymerization characteristics, initial efficiency, absorption wavelength, availability, price, etc.). In particular, acetophenone-based compounds are preferred.

苯乙酮系化合物的具體實例包括二乙氧基苯乙酮、2-羥-2-甲基-1-苯丙-1-酮、苄基二甲基縮酮、2-羥-1-[4-(2-羥乙氧)苯]-2-甲基丙-1-酮、1-羥環己基苯酮、2-甲基-1-(4-甲基苯硫)-2-嗎福林丙-1-酮、2-苄-2-二甲胺-1-(4-嗎福林苯)丁-1-酮、2-羥-2-甲基-1-[4-(-1-甲基乙烯)苯] 丙-1-酮、2-(4-甲苄)-2-(二甲胺)-1-(4-嗎福林苯)丁-1-酮等。Specific examples of acetophenone-based compounds include diethoxyacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, benzyl dimethyl ketal, 2-hydroxy-1-[ 4-(2-Hydroxyethoxy)benzene]-2-methylpropan-1-one, 1-hydroxycyclohexylbenzophenone, 2-methyl-1-(4-methylbenzenethio)-2-morphol Linpropan-1-one, 2-benzyl-2-dimethylamine-1-(4-morpholinobenzene)butan-1-one, 2-hydroxy-2-methyl-1-[4-(-1 -methylvinyl)benzene]propan-1-one, 2-(4-methylbenzyl)-2-(dimethylamine)-1-(4-morpholinbenzene)butan-1-one, etc.

二苯甲酮系化合物的實例包括二苯甲酮、鄰苯甲醯苯甲酸甲酯、4-苯二苯甲酮、4-苯甲醯-4'-甲基二苯基硫醚、3,3',4,4'-四(三級丁基過氧羰)二苯甲酮、2,4,6-三甲基二苯甲酮等。Examples of benzophenone-based compounds include benzophenone, methyl phthalate, 4-benzobenzophenone, 4-benzoyl-4'-methyldiphenylsulfide, 3, 3',4,4'-Tetrakis(tertiary butylperoxycarbonyl)benzophenone, 2,4,6-trimethylbenzophenone, etc.

三嗪系化合物的具體實例包括2,4-雙(三氯甲基)-6-(-4-甲氧苯)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-(4-甲氧萘)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-胡椒基-1,3,5-三嗪(2,4-bis(trichloromethyl)-6-piperonyl-1,3,5-triazine)、2,4-雙(三氯甲基)-6-(4-甲氧苯乙烯)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(5-甲基呋喃-2-基)乙烯基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(呋喃-2-基)乙烯基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(4-二甲胺基-2-甲苯)乙烯基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(3,4-二甲氧苯)乙烯基]-1,3,5-三嗪等。Specific examples of triazine compounds include 2,4-bis(trichloromethyl)-6-(-4-methoxybenzene)-1,3,5-triazine, 2,4-bis(trichloromethyl) )-6-(4-methoxynaphthalene)-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-piperonyl-1,3,5-triazine (2,4 -bis(trichloromethyl)-6-piperonyl-1,3,5-triazine), 2,4-bis(trichloromethyl)-6-(4-methoxystyrene)-1,3,5-triazine , 2,4-bis(trichloromethyl)-6-[2-(5-methylfuran-2-yl)vinyl]-1,3,5-triazine, 2,4-bis(trichloro Methyl)-6-[2-(furan-2-yl)vinyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(4-di Methylamino-2-toluene)vinyl]-1,3,5-triazine, 2,4-bis(trichloromethyl)-6-[2-(3,4-dimethoxybenzene)ethenyl ]-1,3,5-triazine etc.

雙咪唑系化合物的具體實例包括2,2'-雙(2-氯苯)-4,4',5,5'-四苯雙咪唑、2,2'-雙(2,3-二氯苯)-4,4',5,5'-四苯雙咪唑、2,2'-雙(2-氯苯)-4,4',5,5'-四(烷氧基苯)雙咪唑、2,2'-雙(2-氯苯)-4,4',5,5'-四(三烷氧基苯)雙咪唑、2,2'-雙(2,6-二氯苯)-4,4',5,5'-四苯-1,2'-雙咪唑以及在4,4',5,5'位置的苯基被碳烷氧基取代的雙咪唑化合物。較佳係使用2,2'-雙(2-氯苯)-4,4',5,5'-四苯雙咪唑、2,2'-雙(2,3-二氯苯)-4,4',5,5'-四苯雙咪唑或2,2'-雙(2,6-二氯苯)-4,4',5,5'-四苯-1,2'-雙咪唑。Specific examples of bisimidazole-based compounds include 2,2'-bis(2-chlorobenzene)-4,4',5,5'-tetraphenylbisimidazole, 2,2'-bis(2,3-dichlorobenzene )-4,4',5,5'-tetraphenylbisimidazole, 2,2'-bis(2-chlorobenzene)-4,4',5,5'-tetra(alkoxybenzene)bisimidazole, 2,2'-bis(2-chlorobenzene)-4,4',5,5'-tetrakis(trialkoxybenzene)biimidazole, 2,2'-bis(2,6-dichlorobenzene)- 4,4',5,5'-tetraphenyl-1,2'-biimidazole and bisimidazole compounds in which the phenyl groups at the 4,4',5,5' positions are substituted by carboalkoxy groups. Preferably, 2,2'-bis(2-chlorobenzene)-4,4',5,5'-tetraphenylbisimidazole, 2,2'-bis(2,3-dichlorobenzene)-4, 4',5,5'-tetraphenylbisimidazole or 2,2'-bis(2,6-dichlorobenzene)-4,4',5,5'-tetraphenyl-1,2'-bisimidazole.

肟系化合物的具體實例包括鄰乙氧羰基-α-氧亞胺-1-苯丙-1-酮、1,2-辛二酮-1-(4-苯硫)苯-2-(鄰苯甲醯肟)、乙烯酮-1-(9-乙基)-6-(2-甲基苯甲醯-3-基)-1-(鄰乙醯肟)等。市售的肟系化合物包括CGI-124(購自汽巴嘉基(Ciba-Geigy))、CGI-224(購自汽巴嘉基)、Irgacure OXE-01(購自巴斯夫(BASF))、Irgacure OXE-02(購自巴斯夫)、N-1919(購自艾迪科(Adeka))、NCI-831(購自艾迪科)等。Specific examples of oxime compounds include o-ethoxycarbonyl-α-oxyimine-1-phenylpropan-1-one, 1,2-octanedione-1-(4-phenylthio)benzene-2-(o-phenyl formyl oxime), ketene-1-(9-ethyl)-6-(2-methylbenzoyl-3-yl)-1-(o-acetyloxime), etc. Commercially available oxime compounds include CGI-124 (available from Ciba-Geigy), CGI-224 (available from Ciba-Geigy), Irgacure OXE-01 (available from BASF), Irgacure OXE-02 (purchased from BASF), N-1919 (purchased from Adeka), NCI-831 (purchased from Adeka), etc.

噻噸酮系化合物的實例包括2-異丙基噻噸酮、2,4-二乙基噻噸酮、2,4-二氯噻噸酮、1-氯-4-丙氧基噻噸酮等。Examples of thioxanthone-based compounds include 2-isopropylthioxanthone, 2,4-diethylthioxanthone, 2,4-dichlorothioxanthone, 1-chloro-4-propoxythioxanthone wait.

此外,在不損害本發明功效的範圍內,上述以外的其他光聚合起始劑可另外一起使用。舉例來說,可使用安息香系化合物或蒽系化合物,且可單獨使用或組合二者以上使用。In addition, other photopolymerization initiators other than the above may be additionally used together within the range not impairing the efficacy of the present invention. For example, a benzoin-based compound or an anthracene-based compound can be used alone or in combination of two or more.

安息香系化合物的實例包括安息香、安息香甲醚、安息香乙醚、安息香異丙醚、安息香異丁醚等。Examples of the benzoin-based compound include benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin isobutyl ether, and the like.

蒽系化合物的實例包括9,10-二甲氧蒽、2-乙基-9,10-二甲氧蒽、9,10-二乙氧蒽、2-乙基-9,10-二甲氧蒽等。Examples of anthracene compounds include 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene Anthracene et al.

此外,2,4,6-三甲基苯甲醯二苯膦氧化物、10-丁基-2-氯吖啶酮、2-乙基蒽醌、9,10-菲醌、樟腦醌、甲基苯乙醛酸(methyl phenylglyoxylate)或二茂鈦化合物可另外作為光聚合起始劑組合使用。In addition, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 10-butyl-2-chloroacridone, 2-ethylanthraquinone, 9,10-phenanthrenequinone, camphorquinone, formazan Methylphenylglyoxylate or a titanocene compound may additionally be used in combination as a photopolymerization initiator.

以感光性樹脂組合物中的總固含量為100重量%計,該光聚合起始劑(D)的含量為1至15重量%,較佳係3至10重量%。該範圍考量了聚合速率及最終獲得的塗膜的物理特性。當光聚合起始劑的含量低於該範圍時,聚合速率低且因此整個製程時間可能變長。當光聚合光聚合起始劑的含量高於該範圍時,因為過度反應導致過度的交聯反應,塗膜的物理特性可能惡化。因此,應在上述範圍內適當地使用。Based on 100% by weight of the total solid content in the photosensitive resin composition, the content of the photopolymerization initiator (D) is 1 to 15% by weight, preferably 3 to 10% by weight. This range takes into account the rate of polymerization and the physical properties of the resulting coating film. When the content of the photopolymerization initiator is lower than this range, the polymerization rate is low and thus the overall process time may become long. When the content of the photopolymerization photopolymerization initiator is higher than the range, the physical properties of the coating film may be deteriorated due to excessive reaction resulting in excessive crosslinking reaction. Therefore, it should be used appropriately within the above range.

此外,光聚合起始劑助劑可與光聚合起始劑一起使用。當光聚合起始劑助劑與光聚合起始劑一起使用時,感光性樹脂組合物變的更靈敏且因此改善產率。較佳可使用選自由胺類及羧酸化合物組成的群組中之至少一化合物作為光聚合起始劑助劑。In addition, a photopolymerization initiator adjuvant may be used together with the photopolymerization initiator. When the photopolymerization initiator auxiliary agent is used together with the photopolymerization initiator, the photosensitive resin composition becomes more sensitive and thus improves productivity. Preferably, at least one compound selected from the group consisting of amines and carboxylic acid compounds can be used as the photopolymerization initiator auxiliary agent.

這種光聚合起始劑助劑的用量較佳為以每1莫耳光聚合起始劑計使用10莫耳或更少,更佳在0.01至5莫耳的範圍內。當光聚合起始劑助劑在上述範圍中使用時,聚合效應增加且因此改善產率。Such a photopolymerization initiator auxiliary is preferably used in an amount of 10 mol or less, more preferably in the range of 0.01 to 5 mol, per 1 mol of the photopolymerization initiator. When the photopolymerization initiator adjuvant is used in the above range, the polymerization effect is increased and thus the yield is improved.

溶劑(solvent ( EE. )

在本發明之一實施態樣中,在感光性樹脂組合物中使用的溶劑沒有特別的限制,且各種在感光性樹脂組合物領域中使用的溶劑皆可使用。In one embodiment of the present invention, the solvent used in the photosensitive resin composition is not particularly limited, and various solvents used in the field of photosensitive resin compositions can be used.

具體實例包括乙二醇單烷醚類,例如乙二醇單甲醚、乙二醇單乙醚、乙二醇單丙醚、乙二醇單丁醚等;二乙二醇二烷醚類,例如二乙二醇二甲醚、二乙二醇二乙醚、二乙二醇二丙醚、二乙二醇二丁醚等;乙二醇烷醚乙酸酯類,例如乙酸甲賽璐蘇(methyl cellosolve acetate)、乙酸乙賽璐蘇等;烷二醇烷醚乙酸酯類,例如丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、丙二醇單丙基醚乙酸酯、甲氧丁基乙酸酯、甲氧戊基乙酸酯等;芳香烴,例如苯、甲苯、二甲苯、均三甲苯等;酮類,例如甲基乙基酮、丙酮、甲基戊基酮、甲基異丁基酮、環己酮等;醇類,例如乙醇、丙醇、丁醇、己醇、環己醇、乙二醇、甘油等;酯類,例如3-乙氧基丙酸乙酯、3-甲氧基丙酸甲酯等;環酯類,例如γ-丁內酯等。Specific examples include ethylene glycol monoalkyl ethers, such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, etc.; diethylene glycol dialkyl ethers, such as Diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether, etc.; glycol alkyl ether acetates, such as methyl cellosolve acetate acetate), ethyl celluloid acetate, etc.; alkanediol alkyl ether acetates, such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monopropyl ether acetate, methoxybutyl Acetate, methoxypentyl acetate, etc.; aromatic hydrocarbons, such as benzene, toluene, xylene, mesitylene, etc.; ketones, such as methyl ethyl ketone, acetone, methyl amyl ketone, methyl Isobutyl ketone, cyclohexanone, etc.; alcohols, such as ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, glycerin, etc.; esters, such as ethyl 3-ethoxypropionate, Methyl 3-methoxypropionate, etc.; cyclic esters, such as γ-butyrolactone, etc.

該溶劑較佳係具有沸點為100°C至200°C的有機溶劑(依塗布及乾燥方面),更佳係烷二醇烷醚乙酸酯類、酮類、酯類,例如3-乙氧基丙酸乙酯、3-甲氧基丙酸甲酯,甚至更佳係丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯、環己酮、3-乙氧基丙酸乙酯及3-甲氧基丙酸甲酯。上述溶劑可單獨使用或組合二者以上使用。The solvent is preferably an organic solvent with a boiling point of 100°C to 200°C (in terms of coating and drying), more preferably alkanediol alkyl ether acetates, ketones, esters, such as 3-ethoxy Ethyl propionate, methyl 3-methoxypropionate, and even better, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, cyclohexanone, ethyl 3-ethoxypropionate and methyl 3-methoxypropionate. The above-mentioned solvents may be used alone or in combination of two or more.

以感光性樹脂組合物中的總固含量為100重量%計,該溶劑(E)的含量為60至90重量%,較佳係70至85重量%。當溶劑的用量在上述範圍內時,在使用塗布機器例如輥塗機(roll coater)、旋塗機(spin coater)、狹縫及旋塗機(slit and spin coater)、狹縫塗布機(slit coater,也稱為壓鑄模塗布機(die coater))及噴墨(inkjet)塗布時,塗布性的趨勢是好的。Based on 100% by weight of the total solid content in the photosensitive resin composition, the content of the solvent (E) is 60 to 90% by weight, preferably 70 to 85% by weight. When the amount of the solvent is within the above range, when using a coating machine such as a roll coater (roll coater), a spin coater (spin coater), a slit and spin coater (slit and spin coater), a slit coater (slit Coater (also called die coater) and inkjet (inkjet) coating, the coating tendency is good.

咔哚系光聚合性化合物(Cardole photopolymerizable compound ( Ff )

根據本發明之一實施態樣的感光性樹脂組合物可進一步包含咔哚系光聚合性化合物(F)。The photosensitive resin composition according to one embodiment of the present invention may further include a cardole-based photopolymerizable compound (F).

該咔哚系光聚合性化合物(F)係可藉由光與光聚合起始劑而聚合的咔哚系化合物,且用於增加圖案的折射率。The carbadole-based photopolymerizable compound (F) is a carbadole-based compound that can be polymerized by light and a photopolymerization initiator, and is used to increase the refractive index of the pattern.

該咔哚系光聚合性化合物可包括由以下式(XV)至式(XVII)中任一者所表示的化合物:

Figure 02_image106
(XV)
Figure 02_image068
(XVI)
Figure 02_image109
(XVII) 其中,R15及R16各自獨立為氫原子、羥基、硫醇基、胺基、硝基、鹵素原子或具有不飽和雙鍵的2至20個碳原子的聚合性官能基,並且R15及R16之至少一者係具有不飽和雙鍵的2至20個碳原子的聚合性官能基。 The cardole-based photopolymerizable compound may include a compound represented by any one of the following formula (XV) to formula (XVII):
Figure 02_image106
(XV)
Figure 02_image068
(XVI)
Figure 02_image109
(XVII) wherein, R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amine group, a nitro group, a halogen atom, or a polymerizable functional group of 2 to 20 carbon atoms with an unsaturated double bond, and R15 and At least one of R16 is a polymerizable functional group of 2 to 20 carbon atoms having an unsaturated double bond.

在本發明之一實施態樣中,R15及R16各自獨立為氫原子、羥基、硫醇基、胺基、硝基、鹵素原子或

Figure 02_image072
,並且R15及R16之至少一者係
Figure 02_image072
; R17係C 1至C 6的伸烷基,並且該伸烷基係插入有酯鍵、C 6至C 14的伸環烷基、伸芳基之至少一者或沒有插入;以及 R18係氫原子或甲基。 In one embodiment of the present invention, R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amine group, a nitro group, a halogen atom or
Figure 02_image072
, and at least one of R15 and R16 is
Figure 02_image072
; R17 is C 1 to C 6 alkylene group, and the alkylene system is inserted with an ester bond, C 6 to C 14 cycloalkylene group, at least one of arylene group or no insertion; and R18 is hydrogen atom or methyl.

尤其,該咔哚系光聚合性化合物可進一步包括由以下式(XVIII)至式(XXII)中任一者所表示的化合物:

Figure 02_image112
(XVIII)
Figure 02_image114
(XIX)
Figure 02_image116
(XX)
Figure 02_image118
(XXI)
Figure 02_image120
(XXII) In particular, the carbadole-based photopolymerizable compound may further include a compound represented by any one of the following formulas (XVIII) to formula (XXII):
Figure 02_image112
(XVIII)
Figure 02_image114
(XIX)
Figure 02_image116
(XX)
Figure 02_image118
(XXI)
Figure 02_image120
(XXII)

以感光性樹脂組合物中的總固含量為100重量%計,該咔哚系光聚合性化合物(F)的含量可為30重量%或更少,舉例來說,咔哚系光聚合性化合物的含量為5至30重量%,較佳係5至20重量%。當咔哚系光聚合性化合物的含量大於30重量%時,非曝光部分溶解於顯影劑的靈敏度可能降低。Based on the total solid content of the photosensitive resin composition as 100% by weight, the content of the carbadole-based photopolymerizable compound (F) may be 30% by weight or less, for example, the carbadole-based photopolymerizable compound The content of is 5 to 30% by weight, preferably 5 to 20% by weight. When the content of the cardole-based photopolymerizable compound is more than 30% by weight, the sensitivity of the non-exposed portion to dissolve in the developer may decrease.

添加劑(additive( GG )

根據本發明之一實施態樣的感光性樹脂組合物除了上述成分以外,根據需要還可進一步包含添加劑,例如界面活性劑、助黏劑、以及抗氧化劑。The photosensitive resin composition according to one embodiment of the present invention may further include additives such as surfactants, adhesion promoters, and antioxidants, in addition to the above components, as needed.

界面活性劑的實例包括聚氧乙烯烷醚類、聚氧乙烯烷苯醚類、聚乙二醇二酯類、山梨醇脂肪酸酯、脂肪酸改質聚酯、三級胺改質聚胺酯、聚乙烯亞胺等。此外,實例可包括例如以下產品:KP(購自信越化學工業股份公司)、POLYFLOW(購自Kyoeisha Chemical公司)、EFTOP(購自Tochem Products)、MEGAFAC(購自Dainippon Ink & Chemicals公司)、Flourad(購自Sumitomo 3M公司)、Asahi guard(購自Asahi Glass公司)、Surflon(購自Asahi Glass公司)、SOLSPERSE(購自Lubrizol公司)、EFKA(購自EFKA Chemicals)、PB 821(購自Ajinomoto公司)、及DISPER BYK(購自BYK 公司)。Examples of surfactants include polyoxyethylene alkyl ethers, polyoxyethylene alkylphenyl ethers, polyethylene glycol diesters, sorbitol fatty acid esters, fatty acid modified polyesters, tertiary amine modified polyurethanes, polyethylene imine etc. In addition, examples may include, for example, the following products: KP (available from Shinyue Chemical Industry Co., Ltd.), POLYFLOW (available from Kyoeisha Chemical Company), EFTOP (available from Tochem Products), MEGAFAC (available from Dainippon Ink & Chemicals Company), Flourad ( Sumitomo 3M), Asahi guard (Asahi Glass), Surflon (Asahi Glass), SOLSPERSE (Lubrizol), EFKA (EFKA Chemicals), PB 821 (Ajinomoto) , and DISPER BYK (purchased from BYK Company).

助黏劑的實例包括乙烯基三甲氧基矽烷、乙烯基三乙氧基矽烷、乙烯基三(2-甲氧乙氧)矽烷、N-(2-胺乙基)-3-胺丙基甲基二甲氧矽烷、N-(2-胺乙基)-3-胺丙基三甲氧矽烷、N-(2-胺乙基)-8-胺辛基三甲氧矽烷、3-胺丙基三乙氧矽烷、3-環氧丙氧代丙基三甲氧矽烷、3-環氧丙氧代丙基甲基二甲氧矽烷、2-(3,4-環氧環己基)乙基三甲氧矽烷、3-氯丙基甲基二甲氧矽烷、3-氯丙基三甲氧矽烷、3-甲基丙烯醯氧基丙基三甲氧矽烷、3-氫硫丙基三甲氧矽烷等。Examples of adhesion promoters include vinyltrimethoxysilane, vinyltriethoxysilane, vinyltris(2-methoxyethoxy)silane, N-(2-aminoethyl)-3-aminopropylmethyl Dimethoxysilane, N-(2-aminoethyl)-3-aminopropyltrimethoxysilane, N-(2-aminoethyl)-8-aminooctyltrimethoxysilane, 3-aminopropyltrimethoxysilane Ethoxysilane, 3-Glycidoxypropyltrimethoxysilane, 3-Glycidoxypropylmethyldimethoxysilane, 2-(3,4-Epoxycyclohexyl)ethyltrimethoxysilane , 3-chloropropylmethyldimethoxysilane, 3-chloropropyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3-hydrogenthiopropyltrimethoxysilane, etc.

抗氧化劑的實例包括2,2'-硫雙(4-甲基-6-三級丁基苯酚)、2,6-二-三級丁基-4-甲基苯酚等。Examples of antioxidants include 2,2'-thiobis(4-methyl-6-tert-butylphenol), 2,6-di-tert-butyl-4-methylphenol, and the like.

以感光性樹脂組合物中的總固含量為100重量%計,該添加劑(G)的含量為10重量%或少於10重量%,舉例來說,添加劑的含量為0.1至10重量%,較佳係0.1至5重量%,但不限於此。Based on the total solid content of the photosensitive resin composition as 100% by weight, the content of the additive (G) is 10% by weight or less than 10% by weight, for example, the content of the additive is 0.1 to 10% by weight, which is relatively Jia is 0.1 to 5% by weight, but not limited thereto.

根據本發明之一實施態樣的感光性樹脂組合物可不包含無機粒子。因此,根據本發明之一實施態樣的感光性樹脂組合物可不包含散射粒子(scattering particle),例如金屬氧化物粒子,舉例來說,無機粒子例如填料,如玻璃、二氧化矽、氧化鋁等。The photosensitive resin composition according to one embodiment of the present invention may not contain inorganic particles. Therefore, the photosensitive resin composition according to one embodiment of the present invention may not contain scattering particles (scattering particles), such as metal oxide particles, for example, inorganic particles such as fillers, such as glass, silicon dioxide, alumina, etc. .

因此,根據本發明之一實施態樣的感光性樹脂組合物可具有低的圖案表面粗糙度、防止裂痕以及具有足夠的彎曲抗性以應用於撓性顯示裝置。Therefore, the photosensitive resin composition according to an embodiment of the present invention may have low pattern surface roughness, prevent cracks, and have sufficient bending resistance to be applied to a flexible display device.

本發明之一實施態樣係關於一種利用上述感光性樹脂組合物形成的突出圖案(protrusion pattern)。One embodiment of the present invention relates to a protrusion pattern formed by using the above-mentioned photosensitive resin composition.

該突出圖案可用於微透鏡陣列中,用於增加自發光裝置的光萃取效應。The protruding pattern can be used in the microlens array to increase the light extraction effect of the self-luminous device.

該突出圖案可具有半球形的形狀、梯形的形狀、圓錐形的形狀等。The protrusion pattern may have a hemispherical shape, a trapezoidal shape, a conical shape, or the like.

該突出圖案可藉由在基板上塗布上述感光性樹脂組合物,以預定的圖案曝光並溶解該感光性樹脂組合物,然後實施後烘烤(post-baking)而形成。The protruding pattern can be formed by coating the above-mentioned photosensitive resin composition on a substrate, exposing and dissolving the photosensitive resin composition in a predetermined pattern, and then performing post-baking.

首先,在基板上塗布本發明的感光性樹脂組合物並且藉由加熱乾燥以移除揮發性成分如溶劑以獲得平滑的塗布膜。First, the photosensitive resin composition of the present invention is coated on a substrate and dried by heating to remove volatile components such as solvents to obtain a smooth coating film.

塗布的方法包括例如噴墨印製、旋塗、撓性塗布(flexible coating)、輥塗、旋轉及狹縫塗布、狹縫塗布等。Coating methods include, for example, inkjet printing, spin coating, flexible coating, roll coating, spin and slit coating, slit coating, and the like.

在塗布組合物後,藉由加熱(預烘烤)乾燥或減壓乾燥,並加熱以移除輝發性成分,例如溶劑。在此情況下,加熱溫度係70至100℃相對低的溫度。After the composition is applied, it is dried by heating (pre-baking) or dried under reduced pressure, and heated to remove hair-glowing ingredients such as solvents. In this case, the heating temperature is a relatively low temperature of 70 to 100°C.

所獲得的膜被通過光罩(mask)的紫外線照射以形成目標圖案。在此情況下,較佳係使用例如光罩對準機(mask aligner)或步進機(stepper)之設備使平行光線均勻地照射至整個曝光部分並且精準地對準光罩及基板。當照射紫外線時,被紫外線照射的部分固化。The obtained film is irradiated with ultraviolet light passing through a mask to form a target pattern. In this case, it is preferable to use equipment such as a mask aligner or a stepper to uniformly irradiate the parallel light to the entire exposed portion and align the mask and the substrate precisely. When ultraviolet rays are irradiated, the part irradiated with ultraviolet rays is cured.

G-射線(波長436奈米)、h-射線、i-射線(波長365奈米)等可被用作紫外線。紫外線的輻射量可依需要適當地選擇。G-rays (wavelength 436 nm), h-rays, i-rays (wavelength 365 nm), etc. can be used as the ultraviolet rays. The amount of radiation of ultraviolet rays can be appropriately selected as required.

之後,藉由使固化塗布膜與顯影劑接觸以溶解未曝光的部分來進行顯影製程。After that, a developing process is performed by bringing the cured coating film into contact with a developer to dissolve unexposed portions.

該顯影的方法可以是液體添加法、浸漬法及噴霧法中的任一者。同時,基板在顯影過程中可被傾斜任何角度。The image development method may be any of a liquid addition method, a dipping method, and a spray method. At the same time, the substrate can be tilted at any angle during the developing process.

在顯影後,用水沖洗基板並在70至100℃相對低的溫度下進行後烘烤10至60分鐘。After development, the substrate is rinsed with water and post-baked at a relatively low temperature of 70 to 100° C. for 10 to 60 minutes.

本發明之一實施態樣係關於一種包含上述突出圖案的顯示裝置。該顯示裝置的實例包括,但不限於,液晶顯示裝置(LCD)、有機發光二極體(OLED)等,以及包括本領域已知的且可應用的任何顯示裝置。尤其,該顯示裝置可以係撓性顯示器。An embodiment of the present invention relates to a display device including the above-mentioned protruding pattern. Examples of the display device include, but are not limited to, a liquid crystal display device (LCD), an organic light emitting diode (OLED), etc., and include any display device known in the art and applicable. In particular, the display device may be a flexible display.

以下,將藉由實施例、比較例及實驗實例詳細說明本發明。這些實施例、比較例及實驗實例僅係用於說明本發明,對於本領域技術人員顯而易見的是本發明之範圍並不限於此。Hereinafter, the present invention will be described in detail through examples, comparative examples and experimental examples. These examples, comparative examples and experimental examples are only used to illustrate the present invention, and it is obvious to those skilled in the art that the scope of the present invention is not limited thereto.

合成例Synthesis example 11 :咔哚系鹼溶性樹脂(: Cardole-based alkali-soluble resin ( B-1B-1 )

在反應器中加入138公克的9,9'-雙(4-環氧丙氧苯)茀(為一種雙酚環氧化合物)(購自Hear Chem)、54公克的2-羧乙基丙酸酯、1.4公克的苄三乙基氯化銨(購自Daejeong Chemicals & Metals公司)、1公克的三苯膦(購自Aldrich)、128公克的丙二醇甲基乙基乙酸酯(購自大賽璐公司)以及0.5公克的氫醌,並將溫度升至120℃維持12小時以合成由以下式(XIX)所表示之化合物。Add 138 grams of 9,9'-bis(4-epoxypropoxyphenyl) stilbene (which is a bisphenol epoxy compound) (purchased from Hear Chem) and 54 grams of 2-carboxyethylpropionic acid to the reactor ester, 1.4 grams of benzyltriethylammonium chloride (purchased from Daejeong Chemicals & Metals), 1 gram of triphenylphosphine (purchased from Aldrich), 128 grams of propylene glycol methyl ethyl acetate (purchased from Daicel company) and 0.5 g of hydroquinone, and the temperature was raised to 120°C for 12 hours to synthesize the compound represented by the following formula (XIX).

在反應器中加入60公克的由以下式(XIX)所表示之化合物、11公克的聯苯四羧酸二酐(購自三菱氣體化學公司)、3公克的四氫酞酸酐(購自Aldrich)、20公克的丙二醇甲基乙基乙酸酯(購自大賽璐公司)以及0.1公克N,N'-四甲基氯化銨,並將溫度升至120℃維持2小時以合成由以下式(XXIII)所表示之化合物。所獲得的樹脂的重量平均分子量為5,400公克/莫耳。

Figure 02_image122
(XIX)
Figure 02_image124
(XXIII) In the reactor, add 60 grams of compounds represented by the following formula (XIX), 11 grams of biphenyl tetracarboxylic dianhydride (purchased from Mitsubishi Gas Chemical Company), 3 grams of tetrahydrophthalic anhydride (purchased from Aldrich) , 20 grams of propylene glycol methyl ethyl acetate (purchased from Daicel) and 0.1 grams of N,N'-tetramethylammonium chloride, and the temperature was raised to 120 ° C for 2 hours to synthesize the following formula ( Compounds represented by XXIII). The weight average molecular weight of the obtained resin was 5,400 g/mol.
Figure 02_image122
(XIX)
Figure 02_image124
(XXIII)

合成例Synthesis example 22 :咔哚系鹼溶性樹脂(: Cardole-based alkali-soluble resin ( B-2B-2 )

在反應器中加入138公克的9,9'-雙(4-環氧丙氧苯)茀(為一種雙酚環氧化合物)(購自Hear Chem)、54公克的單-2-丙烯醯氧基乙基琥珀酸酯、1.4公克的苄三乙基氯化銨(購自Daejeong Chemicals & Metals公司)、1公克的三苯膦(購自Aldrich)、128公克的丙二醇甲基乙基乙酸酯(購自大賽璐公司)以及0.5公克的氫醌,並將溫度升至120℃維持12小時以合成由以下式(XX)所表示之化合物。Add 138 grams of 9,9'-bis(4-epoxypropoxyphenyl) stilbene (a bisphenol epoxy compound) (purchased from Hear Chem), 54 grams of mono-2-acryloxy Ethyl ethyl succinate, 1.4 g of benzyltriethylammonium chloride (purchased from Daejeong Chemicals & Metals), 1 g of triphenylphosphine (purchased from Aldrich), 128 g of propylene glycol methyl ethyl acetate (purchased from Daicel) and 0.5 g of hydroquinone, and the temperature was raised to 120° C. for 12 hours to synthesize a compound represented by the following formula (XX).

在反應器中加入60公克的由以下式(XX)所表示之化合物、11公克的聯苯四羧酸二酐(購自三菱氣體化學公司)、3公克的四氫酞酸酐(購自Aldrich)、20公克的丙二醇甲基乙基乙酸酯(購自大賽璐公司)以及0.1公克N,N'-四甲基氯化銨,並將溫度升至120℃維持2小時以合成由以下式(XXIV)所表示之化合物。所獲得的樹脂的重量平均分子量為5,400公克/莫耳。

Figure 02_image126
(XX)
Figure 02_image128
(XXIV) In the reactor, add 60 grams of compounds represented by the following formula (XX), 11 grams of biphenyl tetracarboxylic dianhydride (purchased from Mitsubishi Gas Chemical Company), 3 grams of tetrahydrophthalic anhydride (purchased from Aldrich) , 20 grams of propylene glycol methyl ethyl acetate (purchased from Daicel) and 0.1 grams of N,N'-tetramethylammonium chloride, and the temperature was raised to 120 ° C for 2 hours to synthesize the following formula ( XXIV) compounds represented. The weight average molecular weight of the obtained resin was 5,400 g/mol.
Figure 02_image126
(XX)
Figure 02_image128
(XXIV)

合成例Synthesis example 33 :咔哚系鹼溶性樹脂(: Cardole-based alkali-soluble resin ( B-3B-3 )

在3000毫升的三頸圓底瓶中混合364.4公克的3',6'-二羥螺(茀-9,9-二苯并哌喃)與0.4159公克的三級丁基溴化銨,再加入2359公克的表氯醇並加熱至90℃進行反應。當液相層析法的分析確認3',6'-二羥螺(茀-9,9-二苯并哌喃)已完全耗盡,將該反應冷卻至30℃並緩慢加入50%氫氧化鈉水溶液(3個當量)。當液相層析法的分析確認表氯醇已完全耗盡,利用二氯甲烷執行萃取。接著,利用水執行洗滌三次,並將有機層以硫酸鎂乾燥。然後,減壓蒸餾二氯甲烷,並利用二氯甲烷與甲醇(50:50,體積/體積)的混合溶劑執行再結晶。Mix 364.4 grams of 3',6'-dihydroxyspiro(fen-9,9-dibenzopyran) and 0.4159 grams of tertiary butylammonium bromide in a 3000-ml three-necked round-bottom bottle, and then add 2359 grams of epichlorohydrin and heated to 90 ° C for reaction. When analysis by liquid chromatography confirmed that 3',6'-dihydroxyspiro(terpine-9,9-dibenzopyran) was completely consumed, the reaction was cooled to 30°C and 50% hydroxide was added slowly Aqueous sodium solution (3 eq.). When analysis by liquid chromatography confirmed that the epichlorohydrin was completely consumed, extraction was performed with dichloromethane. Next, washing with water was performed three times, and the organic layer was dried over magnesium sulfate. Then, dichloromethane was distilled under reduced pressure, and recrystallization was performed using a mixed solvent of dichloromethane and methanol (50:50, v/v).

混合1當量的所合成的環氧化合物、0.004當量的三級丁基溴化銨、0.001當量的2,6-二異丁基苯酚以及2.2當量的丙烯酸,然後加入24.89公克作為溶劑的丙二醇單甲醚乙酸酯並混合。藉由在90至100℃的溫度下加熱溶解該反應溶液,同時以25毫升/分鐘的速率吹入空氣至該溶液。將混濁狀態的反應溶液加熱至120℃以使其完全溶解。當該溶液變得透明且黏度增加時,測量酸值並攪拌溶液直到酸值變成小於1.0毫克KOH/公克。需要攪拌11個小時直到酸值達到目標值(0.8)。在完成反應後,將反應器的溫度降至室溫以獲得無色且透明的下式(XXI)化合物。

Figure 02_image118
(XXI) Mix 1 equivalent of the synthesized epoxy compound, 0.004 equivalent of tertiary butylammonium bromide, 0.001 equivalent of 2,6-diisobutylphenol and 2.2 equivalents of acrylic acid, then add 24.89 grams of propylene glycol monomethyl as solvent ether acetate and mix. The reaction solution was dissolved by heating at a temperature of 90 to 100° C. while blowing air into the solution at a rate of 25 ml/min. The reaction solution in a cloudy state was heated to 120° C. to completely dissolve it. When the solution became clear and the viscosity increased, the acid value was measured and the solution was stirred until the acid value became less than 1.0 mg KOH/g. Stirring is required for 11 hours until the acid value reaches the target value (0.8). After completing the reaction, the temperature of the reactor was lowered to room temperature to obtain a colorless and transparent compound of the following formula (XXI).
Figure 02_image118
(XXI)

將600公克的丙二醇單甲醚乙酸酯加入307.0公克的式(XXI)化合物中並溶解。接著,加入78公克的聯苯四羧酸二酐以及1公克的四乙基溴化銨,將該混合物逐漸地加熱並達到110至115℃下4個小時。在確認酸酐基團消失後,加入38.0公克的1,2,3,6-四氫酞酸酐並達到90℃下6個小時以獲得樹脂。藉由紅外線光譜(IR spectrum)確認酸酐基團的消失。 600 g of propylene glycol monomethyl ether acetate was added to 307.0 g of the compound of formula (XXI) and dissolved. Next, 78 g of biphenyltetracarboxylic dianhydride and 1 g of tetraethylammonium bromide were added, and the mixture was gradually heated to 110 to 115° C. for 4 hours. After confirming that the anhydride group disappeared, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was added and brought to 90° C. for 6 hours to obtain a resin. The disappearance of the anhydride group was confirmed by IR spectrum.

合成例Synthesis example 44 :咔哚系鹼溶性樹脂(: Cardole-based alkali-soluble resin ( B-4B-4 )

在3000毫升的三頸圓底瓶中混合364.4公克的4,4'-(9H-二苯并哌喃-9,9-二基)二酚與0.4159公克的三級丁基溴化銨,再加入2359公克的表氯醇並加熱至90℃進行反應。當液相層析法的分析確認4,4'-(9H-二苯并哌喃-9,9-二基)二酚已完全耗盡,將該反應溶液冷卻至30℃且緩慢加入50%氫氧化鈉水溶液(3個當量)。當液相層析法的分析確認表氯醇已完全耗盡,利用二氯甲烷執行萃取。接著,利用水執行洗滌三次並將有機層以硫酸鎂乾燥。然後,減壓蒸餾二氯甲烷,且利用二氯甲烷與甲醇(50:50,體積/體積)的混合溶劑執行再結晶。Mix 364.4 grams of 4,4'-(9H-dibenzopyran-9,9-diyl)diphenol and 0.4159 grams of tertiary butylammonium bromide in a 3000 ml three-neck round bottom bottle, and then Add 2359 grams of epichlorohydrin and heat to 90°C for reaction. When the analysis by liquid chromatography confirmed that 4,4'-(9H-dibenzopyran-9,9-diyl)diphenol was completely consumed, the reaction solution was cooled to 30°C and 50% Aqueous sodium hydroxide solution (3 equivalents). When analysis by liquid chromatography confirmed that the epichlorohydrin was completely consumed, extraction was performed with dichloromethane. Next, washing with water was performed three times and the organic layer was dried over magnesium sulfate. Then, dichloromethane was distilled under reduced pressure, and recrystallization was performed using a mixed solvent of dichloromethane and methanol (50:50, v/v).

混合1當量的所合成的環氧化合物、0.004當量的三級丁基溴化銨、0.001當量的2,6-二異丁基苯酚以及2.2當量的丙烯酸,然後加入24.89公克作為溶劑的丙二醇單甲醚乙酸酯並混合。藉由在90至100℃的溫度下加熱溶解該反應溶液,同時以25毫升/分鐘的速率吹入空氣至該溶液。將混濁狀態的反應溶液加熱至120℃以使其完全溶解。當反應溶液變得透明且黏度增加時,測量酸值並攪拌溶液直到酸值變成小於1.0毫克KOH/公克。需要攪拌11個小時直到酸值達到目標值(0.8)。在完成反應後,將反應器的溫度降至室溫以獲得無色且透明的下式(XXII)化合物。

Figure 02_image120
(XXII) Mix 1 equivalent of the synthesized epoxy compound, 0.004 equivalent of tertiary butylammonium bromide, 0.001 equivalent of 2,6-diisobutylphenol and 2.2 equivalents of acrylic acid, then add 24.89 grams of propylene glycol monomethyl as solvent ether acetate and mix. The reaction solution was dissolved by heating at a temperature of 90 to 100° C. while blowing air into the solution at a rate of 25 ml/min. The reaction solution in a cloudy state was heated to 120° C. to completely dissolve it. When the reaction solution became transparent and the viscosity increased, the acid value was measured and the solution was stirred until the acid value became less than 1.0 mgKOH/g. Stirring is required for 11 hours until the acid value reaches the target value (0.8). After completing the reaction, the temperature of the reactor was lowered to room temperature to obtain a colorless and transparent compound of the following formula (XXII).
Figure 02_image120
(XXII)

將600公克的丙二醇單甲醚乙酸酯加入307.0公克的式(XXII)化合物中並溶解。接著,加入78公克的聯苯四羧酸二酐以及1公克的四乙基溴化銨,將該混合物逐漸地加熱並達到110至115℃的溫度4個小時。在確認酸酐基團消失後,加入38.0公克的1,2,3,6-四氫酞酸酐並達到90℃的溫度6個小時以獲得樹脂。藉由紅外線光譜確認酸酐基團的消失。 600 g of propylene glycol monomethyl ether acetate was added to 307.0 g of the compound of formula (XXII) and dissolved. Next, 78 g of biphenyltetracarboxylic dianhydride and 1 g of tetraethylammonium bromide were added, and the mixture was gradually heated to a temperature of 110 to 115° C. for 4 hours. After confirming that the anhydride group disappeared, 38.0 g of 1,2,3,6-tetrahydrophthalic anhydride was added and the temperature was brought to 90° C. for 6 hours to obtain a resin. The disappearance of the anhydride group was confirmed by infrared spectroscopy.

合成例Synthesis example 55 :咔哚系鹼溶性樹脂(: Cardole-based alkali-soluble resin ( B-5B-5 )

步驟1step 1

[反應機構1]

Figure 02_image132
[response mechanism 1]
Figure 02_image132

在三頸瓶安裝冷凝回流器及溫度計後,加入42.5公克的9,9-雙酚茀以及測量220毫升的2-(氯甲基)環氧乙烷並注入。加入100毫克四丁基溴化銨後,在開始攪拌的同時將溫度升至90℃。確認未反應的成分小於0.3%後,實施減壓蒸餾。After installing a condensing reflux device and a thermometer in the three-necked bottle, add 42.5 grams of 9,9-bisphenol oxirane and measure 220 milliliters of 2-(chloromethyl)oxirane and inject. After adding 100 mg of tetrabutylammonium bromide, the temperature was raised to 90°C while stirring was started. After confirming that the unreacted component was less than 0.3%, vacuum distillation was carried out.

在溫度降至30℃後,注入二氯甲烷,且緩慢地加入氫氧化鈉。藉由高效能液相層析法(HPLC)確認產物為96%以上後,滴加5%的鹽酸(HCl)以終止反應。萃取反應產物並分層後,用水洗滌有機層直到變成中性。用硫酸美乾燥有機層並藉由使用旋轉蒸發器減壓蒸餾濃縮。將二氯甲烷加入濃縮的產物,以及在溫度升至40℃並攪拌的同時加入甲醇。然後,冷卻並攪拌該溶液。過濾所得固體後,在室溫下執行真空乾燥以獲得52.7公克的白色固體粉末(產率94%)。藉由 1H NMR確認其結構。 After the temperature dropped to 30°C, dichloromethane was injected, and sodium hydroxide was slowly added. After confirming that the product was more than 96% by high performance liquid chromatography (HPLC), 5% hydrochloric acid (HCl) was added dropwise to terminate the reaction. After extracting the reaction product and separating the layers, the organic layer was washed with water until it became neutral. The organic layer was dried with methoxysulfate and concentrated by distillation under reduced pressure using a rotary evaporator. Dichloromethane was added to the concentrated product, and methanol was added while the temperature was raised to 40°C and stirred. Then, the solution was cooled and stirred. After filtering the obtained solid, vacuum drying was performed at room temperature to obtain 52.7 g of white solid powder (yield 94%). Its structure was confirmed by 1 H NMR.

在CDCl 3中的 1H NMR:7.75(2H),7.35-7.254(6H),7.08(4H),6.74(4H),4.13(2H),3.89(2H),3.30(2H),2.87(2H)2.71(2H)。 1H NMR in CDCl3 : 7.75(2H), 7.35-7.254(6H), 7.08(4H), 6.74(4H), 4.13(2H), 3.89(2H), 3.30(2H), 2.87(2H) 2.71 (2H).

步驟2step 2

[反應機構2]

Figure 02_image134
[Reaction Mechanism 2]
Figure 02_image134

在三頸瓶安裝冷凝回流器及溫度計後,加入1000公克步驟1的反應產物、524公克的苯硫酚以及617公克的乙醇並攪拌。緩慢地滴加328公克的三乙胺至反應溶液中。藉由高效能液相層析法(HPLC)確認起始物消失後,終止反應。在完成反應後,藉由減壓蒸餾移除乙醇。將有機物質溶解於二氯甲烷中,用水洗滌,然後藉由減壓蒸餾移除二氯甲烷。將濃縮的有機物質溶解在乙酸乙酯後,滴加醚類溶劑並攪拌30分鐘。將該化合物減壓蒸餾以獲得945公克的淡黃色油(產率64%)。藉由 1H NMR確認其結構。 After installing a condensing reflux device and a thermometer in the three-necked flask, add 1000 grams of the reaction product of step 1, 524 grams of thiophenol and 617 grams of ethanol and stir. Slowly add 328 g of triethylamine dropwise into the reaction solution. After confirming the disappearance of the starting material by high performance liquid chromatography (HPLC), the reaction was terminated. After completing the reaction, ethanol was removed by distillation under reduced pressure. The organic material was dissolved in dichloromethane, washed with water, and the dichloromethane was removed by distillation under reduced pressure. After dissolving the concentrated organic matter in ethyl acetate, an ether solvent was added dropwise and stirred for 30 minutes. The compound was distilled under reduced pressure to obtain 945 g of light yellow oil (64% yield). Its structure was confirmed by 1 H NMR.

在CDCl 3中的 1H NMR:7.82(2H),7.38-6.72(20H),6.51(4H),4.00(2H),3.97(2H),3.89(2H),3.20(2H),3.01(2H),2.64(2H)。 1H NMR in CDCl3 : 7.82(2H), 7.38-6.72(20H), 6.51(4H), 4.00(2H), 3.97(2H), 3.89(2H), 3.20(2H), 3.01(2H) , 2.64 (2H).

步驟3step 3

在三頸瓶安裝冷凝回流器及溫度計後,加入200公克的在步驟2合成的3,3'-(((9H-茀-9,9-二基)雙(4,1-伸苯基))雙(氧基))雙(1-(苯硫基)丙-2-醇)單體,其係溶解於50%丙二醇甲醚乙酸酯(PGMEA)中,並升溫至115℃。在115℃的溫度下滴加31.1公克的3,3',4,4'-聯苯四羧酸二酐,然後攪拌6個小時同時維持在115℃。在加入7.35公克的酞酸酐並再攪拌2個小時後,終止反應。在冷卻後獲得具有重量平均分子量為3,500公克/莫耳的樹脂。After installing a condensing reflux device and a thermometer in the three-necked flask, add 200 grams of 3,3'-(((9H-oxa-9,9-diyl)bis(4,1-phenylene) synthesized in step 2 )bis(oxy))bis(1-(phenylthio)propan-2-ol) monomer dissolved in 50% propylene glycol methyl ether acetate (PGMEA) and warmed to 115°C. 31.1 g of 3,3',4,4'-biphenyltetracarboxylic dianhydride was added dropwise at a temperature of 115°C, followed by stirring for 6 hours while maintaining the temperature at 115°C. After adding 7.35 g of phthalic anhydride and stirring for an additional 2 hours, the reaction was terminated. A resin having a weight average molecular weight of 3,500 g/mole was obtained after cooling.

合成例Synthesis example 66 :咔哚系鹼溶性樹脂(: Cardole-based alkali-soluble resin ( B-6B-6 )

在三頸瓶安裝冷凝回流器及溫度計後,加入200公克的在合成例5中步驟2合成的3,3'-(((9H-茀-9,9-二基)雙(4,1-伸苯基))雙(氧基))雙(1-(苯硫基)丙-2-醇)單體,其係溶解於50%丙二醇甲醚乙酸酯(PGMEA)中,並升溫至115℃。在115℃的溫度下滴加21.1公克的焦蜜石酸二酐,然後攪拌6個小時同時維持在115℃。在加入7.35公克的酞酸酐並再攪拌2個小時後,終止反應。在冷卻後獲得具有重量平均分子量為4,500公克/莫耳的樹脂。After installing a condensing reflux device and a thermometer in the three-necked flask, add 200 grams of 3,3'-(((9H-oxa-9,9-diyl)bis(4,1- phenylene))bis(oxyl))bis(1-(phenylthio)propan-2-ol) monomer dissolved in 50% propylene glycol methyl ether acetate (PGMEA) and heated to 115 ℃. At a temperature of 115°C, 21.1 g of pyromelteric dianhydride was added dropwise, followed by stirring for 6 hours while maintaining the temperature at 115°C. After adding 7.35 g of phthalic anhydride and stirring for an additional 2 hours, the reaction was terminated. A resin having a weight average molecular weight of 4,500 g/mole was obtained after cooling.

實施例及比較例:感光性樹脂組合物的製備Embodiment and comparative example: the preparation of photosensitive resin composition

藉由混合如下表1及表2之組合物中的各成分(重量%)以製備感光性樹脂組合物。A photosensitive resin composition was prepared by mixing the components (% by weight) in the compositions shown in Table 1 and Table 2 below.

表1 實施例 多硫醇化合物 鹼溶性樹脂 多官能丙烯酸酯光聚合性化合物 咔哚系光聚合性化合物 光聚合起始劑 溶劑 添加劑 總合 A B C F D E G 1 A-1 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 2 A-2 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 3 A-3 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 4 A-4 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 5 A-5 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 6 A-1 B-1 0.65 F-1 0.22 7.5 0.04 10 0.07 1.09 0.43 7 A-1 B-1 0.65 F-2 0.22 7.5 0.04 10 0.07 1.09 0.43 8 A-1 B-1 0.65 F-3 0.22 7.5 0.04 10 0.07 1.09 0.43 9 A-1 B-1 0.81 - 0.22 7.5 0.04 10 0.13 1.3 0 10 A-1 B-1 0.75 - 0.21 7.5 0.04 10 0.2 1.3 0 11 A-1 B-1 0.6 F-1 0.22 7.5 0.04 10 0.13 1.09 0.42 12 A-1 B-1 0.6 F-1 0.21 7.5 0.04 10 0.2 1.04 0.41 13 A-1 B-2 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 14 A-1 B-3 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 15 A-1 B-4 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 16 A-1 B-5 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 17 A-1 B-6 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 Table 1 Example polythiol compound Alkali soluble resin Multifunctional acrylate photopolymerizable compound Cardole photopolymerizable compound Photopolymerization initiator solvent additive total A B C f D. E. G 1 A-1 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 2 A-2 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 3 A-3 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 4 A-4 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 5 A-5 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 6 A-1 B-1 0.65 F-1 0.22 7.5 0.04 10 0.07 1.09 0.43 7 A-1 B-1 0.65 F-2 0.22 7.5 0.04 10 0.07 1.09 0.43 8 A-1 B-1 0.65 F-3 0.22 7.5 0.04 10 0.07 1.09 0.43 9 A-1 B-1 0.81 - 0.22 7.5 0.04 10 0.13 1.3 0 10 A-1 B-1 0.75 - 0.21 7.5 0.04 10 0.2 1.3 0 11 A-1 B-1 0.6 F-1 0.22 7.5 0.04 10 0.13 1.09 0.42 12 A-1 B-1 0.6 F-1 0.21 7.5 0.04 10 0.2 1.04 0.41 13 A-1 B-2 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 14 A-1 B-3 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 15 A-1 B-4 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 16 A-1 B-5 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 17 A-1 B-6 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0

表2 比較例 多硫醇化合物 鹼溶性樹脂 多官能丙烯酸酯光聚合性化合物 咔哚系光聚合性化合物 光聚合起始劑 溶劑 添加劑 總合 A B C F D E G 1 - B-1 0.83 - 0.23 7.5 0.04 10 0 1.4 0 2 A-6 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 3 A-7 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 4 A-8 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 5 A-1 B-1 0.79 - 0.2 7.5 0.04 10 0.29 1.18 0 6 A-1 B-1 0.00 F-1 0.22 7.5 0.04 10 0.07 1.30 0.87 A-1:由式(IV)所表示的多硫醇化合物 A-2:由式(V)所表示的多硫醇化合物 A-3:由式(VI)所表示的多硫醇化合物 A-4:由式(VII)所表示的多硫醇化合物 A-5:由式(VIII)所表示的多硫醇化合物 A-6:四乙二醇雙(3-氫硫丙酸酯)(EGMP-4,購自SC Organic Chemical公司) A-7:1,4-雙(3-氫硫丁氧基)丁烷(購自昭和電工) A-8:由下式(a)所表示的乙炔脲衍生物(TS-G,購自四國化成工業)

Figure 02_image136
(a) B-1:合成例1的咔哚系鹼溶性樹脂 B-2:合成例2的咔哚系鹼溶性樹脂 B-3:合成例3的咔哚系鹼溶性樹脂 B-4:合成例4的咔哚系鹼溶性樹脂 B-5:合成例5的咔哚系鹼溶性樹脂 B-6:合成例6的咔哚系鹼溶性樹脂 C:二新戊四醇六丙烯酸酯(購自Nippon Kayaku公司) F-1:由式(XVIII)所表示的化合物 F-2:由式(XXI)所表示的化合物 F-3:由式(XXII)所表示的化合物 D: 2-苄-2-二甲胺-1-(4- N-嗎福林苯)丁-1-酮(Irgacure 369,購自汽巴精化) E:丙二醇單甲醚乙酸酯 G:N-2-(胺乙基)-8-胺辛三甲氧矽烷(KBM-6803,購自信越化學工業) Table 2 comparative example polythiol compound Alkali soluble resin Multifunctional acrylate photopolymerizable compound Cardole photopolymerizable compound Photopolymerization initiator solvent additive total A B C f D. E. G 1 - B-1 0.83 - 0.23 7.5 0.04 10 0 1.4 0 2 A-6 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 3 A-7 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 4 A-8 B-1 0.87 - 0.22 7.5 0.04 10 0.07 1.3 0 5 A-1 B-1 0.79 - 0.2 7.5 0.04 10 0.29 1.18 0 6 A-1 B-1 0.00 F-1 0.22 7.5 0.04 10 0.07 1.30 0.87 A-1: Polythiol compound represented by formula (IV) A-2: Polythiol compound represented by formula (V) A-3: Polythiol compound represented by formula (VI) A- 4: Polythiol compound represented by formula (VII) A-5: Polythiol compound represented by formula (VIII) A-6: Tetraethylene glycol bis(3-hydrothiopropionate) (EGMP -4, available from SC Organic Chemical Company) A-7: 1,4-bis(3-hydrothiobutoxy)butane (available from Showa Denko) A-8: Acetylene represented by the following formula (a) Urea derivatives (TS-G, purchased from Shikoku Chemical Industries)
Figure 02_image136
(a) B-1: Cardole-based alkali-soluble resin of Synthesis Example 1 B-2: Cardole-based alkali-soluble resin of Synthesis Example 2 B-3: Cardole-based alkali-soluble resin of Synthesis Example 3 B-4: Synthesis Cardole-based alkali-soluble resin B-5 of Example 4: cardole-based alkali-soluble resin B-6 of Synthesis Example 5: cardole-based alkali-soluble resin C of Synthesis Example 6: Dineopentaerythritol hexaacrylate (purchased from Nippon Kayaku Corporation) F-1: compound represented by formula (XVIII) F-2: compound represented by formula (XXI) F-3: compound represented by formula (XXII) D: 2-benzyl-2 -Dimethylamine-1-(4-N-morpholine benzene)butan-1-one (Irgacure 369, purchased from Ciba Specialty Chemicals) E: Propylene glycol monomethyl ether acetate G: N-2-(amine Ethyl)-8-aminooctyl trimethoxysilane (KBM-6803, purchased from Xinyue Chemical Industry)

實驗例Experimental example 11 :圖案物理特性的評估: Evaluation of Pattern Physical Properties

藉由使用在實施例及比較例中製備的感光性樹脂組合物如下製備圖案。Patterns were prepared as follows by using the photosensitive resin compositions prepared in Examples and Comparative Examples.

如下評估圖案的折射率、顯影速度、殘留物、黏著特性、表面硬度以及對TMAH及DPHA的化學抗性,且結果顯示如下表3。The patterns were evaluated for refractive index, developing speed, residue, adhesive properties, surface hardness, and chemical resistance to TMAH and DPHA as follows, and the results are shown in Table 3 below.

<製備圖案的方法><How to prepare the pattern>

將5公分×5公分的玻璃基板(Eagle 2000,購自康寧公司)依序以中性清潔劑、水及乙醇洗滌,然後乾燥。將每一個實施例及比較例製造的感光性樹脂組合物旋塗在玻璃基板上,然後利用加熱板在80℃下120秒進行預烘烤。將預烘烤後的玻璃基板冷卻至室溫後,利用曝光設備(MA6,購自Karl suss公司)以30毫焦耳/平方公分的曝光量(基於365奈米)照射該基板,其中與石英玻璃光罩的距離設置為50微米。A 5 cm x 5 cm glass substrate (Eagle 2000, purchased from Corning Incorporated) was sequentially washed with neutral detergent, water and ethanol, and then dried. The photosensitive resin composition manufactured for each Example and the comparative example was spin-coated on the glass substrate, and it prebaked at 80 degreeC for 120 second on the hotplate after that. After the pre-baked glass substrate was cooled to room temperature, the substrate was irradiated with exposure equipment (MA6, purchased from Karl suss) at an exposure dose of 30 mJ/cm2 (based on 365 nm), and the quartz glass The reticle distance was set to 50 μm.

該光罩具有直徑為5微米、10微米、20微米及30微米的圓形開口(點圖案),具有形成在同一平面上之間隔為30微米的圖案。光照後,將基板在2.38%的氫氧化四甲銨(TMAH)的水溶液中顯影60秒,用超純水洗滌,在氮氣下乾燥以在感光性樹脂組合物上形成圖案。在85℃的烘箱中進行後烘乾2小時。The mask had circular openings (dot patterns) with diameters of 5 µm, 10 µm, 20 µm, and 30 µm, with patterns formed at intervals of 30 µm on the same plane. After light irradiation, the substrate was developed for 60 seconds in an aqueous solution of 2.38% tetramethylammonium hydroxide (TMAH), washed with ultrapure water, and dried under nitrogen to form a pattern on the photosensitive resin composition. Post drying was performed in an oven at 85°C for 2 hours.

( 11 )折射率量測) Refractive Index Measurement

與製備圖案的方法一樣,對藉由曝光形成的固化膜施加65°、70°及75°的入射角,惟不使用光罩,使用橢圓偏光儀(M-2000,購自J. A. Woollam公司)在25℃及50%相對溼度下,且在200奈米至1000奈米的波長範圍內測量線性極化。使用Complete EASE軟體,利用以下方程式1的Cauchy模型擬合線性極化的測量數據(橢圓偏振技術數據(Ψ,Δ))使MSE等於或小於70,並計算在550奈米波長下的折射率。 [方程式1]

Figure 02_image138
In the same way as in the pattern preparation method, incident angles of 65°, 70° and 75° were applied to the cured film formed by exposure, but without using a photomask, an ellipsometer (M-2000, available from JA Woollam Co.) Linear polarization is measured in the wavelength range from 200nm to 1000nm at 25°C and 50% relative humidity. Using the Complete EASE software, use the Cauchy model of the following equation 1 to fit the measured data of linear polarization (ellipsometry data (Ψ, Δ)) to make the MSE equal to or less than 70, and calculate the refractive index at a wavelength of 550 nm. [Formula 1]
Figure 02_image138

在方程式1中,n(λ)係在λ波長下的折射率,λ在200奈米至1000奈米的範圍內,且A、B及C係Cauchy參數。In Equation 1, n(λ) is the refractive index at λ wavelength, λ is in the range of 200 nm to 1000 nm, and A, B, and C are Cauchy parameters.

( 22 )非曝光部分之顯影速度) The developing speed of the non-exposed part

將由圖案製備方法預烘烤的基板浸入2.38%的氫氧化四甲銨水溶液中,以測量感光性樹脂組合物完全溶解的時間,並根據以下的評估標準進行顯影速度評估。 <評估標準> 顯影速度:紀錄時間四捨五入至10秒增量 120秒內未顯影:× The substrate prebaked by the pattern preparation method was immersed in a 2.38% tetramethylammonium hydroxide aqueous solution to measure the time for the photosensitive resin composition to completely dissolve, and the developing speed was evaluated according to the following evaluation criteria. <Evaluation criteria> Development Speed: Recording times rounded to 10 second increments No development within 120 seconds: ×

( 33 )殘留物)the remains

使用光學顯微鏡觀察由圖案製備方法獲得的點圖案周圍是否存在殘留物,並根據以下的評估標準進行評估。 <評估標準> 無殘留物:O 觀察到殘留物:× The presence or absence of residue around the dot pattern obtained by the pattern preparation method was observed using an optical microscope, and evaluated according to the following evaluation criteria. <Evaluation criteria> No residue: O Residue observed: ×

( 44 )黏著特性) Adhesive properties

測量其中90%或以上的由圖案製備方法獲得的點圖案被黏著至下基板的最小光罩尺寸,並根據以下的評估標準進行評估。 <評估標準> 黏著90%或以上的5微米的點圖案:5 黏著90%或以上的10微米的點圖案:10 黏著90%或以上的20微米的點圖案:20 黏著90%或以上的30微米的點圖案:30 未顯影或損失圖案:× The minimum mask size in which 90% or more of the dot patterns obtained by the pattern preparation method is adhered to the lower substrate was measured, and evaluated according to the following evaluation criteria. <Evaluation criteria> 5 micron dot pattern with 90% adhesion or better: 5 90% or better adhesion of 10 micron dot pattern: 10 20 micron dot pattern with 90% or more adhesion: 20 30 micron dot pattern with 90% or more adhesion: 30 Undeveloped or lost pattern: ×

( 55 )表面硬度)Surface hardness

使用硬度計(HM500,購自Fischer公司)測量藉由圖案製備方法中的曝光(惟不使用光罩)而形成的固化膜的固化程度。藉由以下的評估標準評估表面硬度。 <評估標準> ◎:表面硬度40或以上 ○:表面硬度30或以上且小於40 △:表面硬度10或以上且小於30 ×:表面硬度小於10 A hardness meter (HM500, available from Fischer Co.) was used to measure the degree of curing of the cured film formed by exposure in the pattern preparation method (but without using a photomask). Surface hardness was evaluated by the following evaluation criteria. <Evaluation criteria> ◎: Surface hardness 40 or above ○: Surface hardness 30 or more and less than 40 △: Surface hardness 10 or more and less than 30 ×: surface hardness is less than 10

( 66 )對)right 2.38% TMAH2.38% TMAH 的化學抗性chemical resistance

將藉由圖案製備方法(惟不使用光罩)而形成的固化膜浸在2.38%的氫氧化四甲銨(TMAH)的水溶液中2分鐘以測量膜厚度的變化(單位:微米)。The cured film formed by the pattern preparation method (but without using a photomask) was immersed in 2.38% tetramethylammonium hydroxide (TMAH) aqueous solution for 2 minutes to measure the change of film thickness (unit: μm).

( 77 )對)right DPHADPHA 的化學抗性chemical resistance

將二新戊四醇六丙烯酸酯(DPHA)滴加至藉由圖案製備方法(惟不使用光罩)而形成的固化膜,並放置2分鐘。以超純水清洗該膜並在氮氣下乾燥以測量膜厚度的變化(單位:微米)。Dineopenylthritol hexaacrylate (DPHA) was added dropwise to the cured film formed by the pattern preparation method (but without using a photomask) and left for 2 minutes. The film was washed with ultrapure water and dried under nitrogen to measure the change in film thickness (unit: micron).

表3   折射率 顯影速度 殘留物 黏著特性 表面硬度 對2.38% TMAH的化學抗性 對DPHA的化學抗性 實施例 1 1.63 20 20 -0.09 0.02 2 1.62 20 20 -0.09 0.03 3 1.62 20 20 -0.09 0.03 4 1.63 20 20 -0.1 0.05 5 1.63 20 20 -0.12 0.07 6 1.65 30 10 -0.07 0.03 7 1.66 30 10 -0.08 0.02 8 1.65 30 10 -0.08 0.02 9 1.66 30 10 -0.05 0.03 10 1.66 30 10 -0.03 0.02 11 1.67 30 5 -0.01 0.01 12 1.67 30 5 -0.01 0 13 1.63 30 10 -0.1 0.03 14 1.63 30 10 -0.09 0.03 15 1.63 30 10 -0.1 0.04 16 1.69 20 10 -0.01 0 17 1.69 20 10 -0.02 0.01 比較例 1 1.56 20 30 × -0.31 0.54 2 1.57 50 20 -0.15 0.32 3 1.57 50 20 -0.13 0.31 4 1.57 50 20 -0.14 0.27 5 1.6 × × 20 -0.23 0.17 6 - - - - - - - table 3 Refractive index Development speed the remains Adhesive properties Surface hardness Chemical resistance to 2.38% TMAH Chemoresistance to DPHA Example 1 1.63 20 20 -0.09 0.02 2 1.62 20 20 -0.09 0.03 3 1.62 20 20 -0.09 0.03 4 1.63 20 20 -0.1 0.05 5 1.63 20 20 -0.12 0.07 6 1.65 30 10 -0.07 0.03 7 1.66 30 10 -0.08 0.02 8 1.65 30 10 -0.08 0.02 9 1.66 30 10 -0.05 0.03 10 1.66 30 10 -0.03 0.02 11 1.67 30 5 -0.01 0.01 12 1.67 30 5 -0.01 0 13 1.63 30 10 -0.1 0.03 14 1.63 30 10 -0.09 0.03 15 1.63 30 10 -0.1 0.04 16 1.69 20 10 -0.01 0 17 1.69 20 10 -0.02 0.01 comparative example 1 1.56 20 30 x -0.31 0.54 2 1.57 50 20 -0.15 0.32 3 1.57 50 20 -0.13 0.31 4 1.57 50 20 -0.14 0.27 5 1.6 x x 20 -0.23 0.17 6 - - - - - - -

如表3所示,由實施例1至17包含特定結構之多硫醇化合物而不使用無機粒子的感光性樹脂組合物可形成表現出在550奈米波長下具有1.60以上的高折射率的圖案。此外,實施例1至17的感光性樹脂組合物即使在低於100℃以下的固化下亦表現出優異的圖案特性,例如顯影速度、殘留物、黏著特性及表面硬度等特性,以及對顯影劑及單體具有優異的化學抗性。As shown in Table 3, from Examples 1 to 17, the photosensitive resin composition containing the polythiol compound of a specific structure without using inorganic particles can form a pattern exhibiting a high refractive index of 1.60 or more at a wavelength of 550 nm . In addition, the photosensitive resin compositions of Examples 1 to 17 exhibited excellent pattern properties, such as development speed, residue, adhesive properties, and surface hardness, even when cured below 100°C, and were resistant to developer And the monomer has excellent chemical resistance.

另一方面,比較例1至4的感光性樹脂組合物,不包含特定結構的多硫醇化合物,表現出在550奈米波長下小於1.60的折射率,以及在顯影速度、殘留物、黏著特性及表面硬度中之任一者或多者具有差的物理特性。此外,比較例1至4的感光性樹脂組合物對在顯影過程中使用的顯影劑及後處理過程中用於形成另一圖案的單體具有差的化學抗性,導致嚴重的膜損失及膜溶脹。On the other hand, the photosensitive resin compositions of Comparative Examples 1 to 4, which do not contain a polythiol compound of a specific structure, exhibited a refractive index of less than 1.60 at a wavelength of 550 nm, and exhibited a high performance in terms of developing speed, residue, and adhesion characteristics. Any one or more of surface hardness and surface hardness have poor physical properties. In addition, the photosensitive resin compositions of Comparative Examples 1 to 4 had poor chemical resistance to the developer used in the developing process and the monomer used to form another pattern in the post-processing process, resulting in severe film loss and film loss. swelling.

另外,比較例5中的感光性樹脂組合物,以感光性樹脂組合物中的總固含量為100重量%計,多硫醇化合物的含量大於10重量%,具有差的顯影速度、殘留物以及對顯影劑及單體的化學抗性。In addition, the photosensitive resin composition in Comparative Example 5, based on 100% by weight of the total solid content in the photosensitive resin composition, contained more than 10% by weight of the polythiol compound, and had poor developing speed, residue and Chemical resistance to developers and monomers.

此外,比較例6中的感光性樹脂組合物,不包含多官能丙烯酸酯光聚合性化合物,曝光部分溶解於2.38%的氫氧化四甲銨(TMAH)水溶液中,從而無形成塗布膜。因此,無法確認其特性。In addition, the photosensitive resin composition in Comparative Example 6 did not contain a polyfunctional acrylate photopolymerizable compound, and the exposed portion was dissolved in a 2.38% tetramethylammonium hydroxide (TMAH) aqueous solution, so that no coating film was formed. Therefore, its characteristics cannot be confirmed.

儘管已描述並示出本發明特定實施態樣,本發明所屬技術領域之通常知識者將了解到,其並非意圖將本發明限制於較佳實施態樣,並且對本發明所屬技術領域之通常知識者顯而易見的是,在不違背本發明的精神與範圍的情況下可進行各種改變與修改。Although specific embodiments of the present invention have been described and illustrated, those skilled in the art will understand that it is not intended to limit the invention to the preferred embodiments, and those skilled in the art It will be apparent that various changes and modifications can be made without departing from the spirit and scope of the invention.

本發明的範圍由所附申請專利範圍及其等效物定義。The scope of the invention is defined by the appended claims and their equivalents.

:無。:none.

:無。:none.

Figure 111131680-A0101-11-0002-1
Figure 111131680-A0101-11-0002-1

:無。:none.

Claims (12)

一種感光性樹脂組合物,其包含由以下式(I)所表示之多硫醇化合物、鹼溶性樹脂、多官能丙烯酸酯光聚合性化合物、光聚合起始劑以及溶劑:
Figure 03_image001
(I) 其中, R係包含硫原子的k價的脂族烴基,或是包含硫原子的k價的脂環烴基;以及 k係2至6的整數。
A photosensitive resin composition comprising a polythiol compound represented by the following formula (I), an alkali-soluble resin, a multifunctional acrylate photopolymerizable compound, a photopolymerization initiator, and a solvent:
Figure 03_image001
(I) wherein, R is a k-valent aliphatic hydrocarbon group containing a sulfur atom, or a k-valent alicyclic hydrocarbon group containing a sulfur atom; and k is an integer of 2 to 6.
如請求項1所述之感光性樹脂組合物,其中,該由式(I)所表示之多硫醇化合物包含由以下式(II)或式(III)所表示之多硫醇化合物:
Figure 03_image004
(II)
Figure 03_image006
(III) 其中, R a、R b、R c及R d各自獨立為氫原子或-CH 2-SH; R e、R f、R g及R h各自獨立為氫原子或-CH 2-SH,並且R e、R f、R g及R h中的至少二者為-CH 2-SH; d係1至2的整數;以及 e係0至2的整數。
The photosensitive resin composition according to claim 1, wherein the polythiol compound represented by the formula (I) includes a polythiol compound represented by the following formula (II) or formula (III):
Figure 03_image004
(II)
Figure 03_image006
(III) Among them, R a , R b , R c and R d are each independently a hydrogen atom or -CH 2 -SH; Re , R f , R g and Rh are each independently a hydrogen atom or -CH 2 -SH , and at least two of R e , R f , R g and Rh are —CH 2 —SH; d is an integer of 1 to 2; and e is an integer of 0 to 2.
如請求項1所述之感光性樹脂組合物,其中,該由式(I)所表示的多硫醇化合物包含由以下式(IV)至式(VIII)中任一者所表示的多硫醇化合物:
Figure 03_image008
(IV)
Figure 03_image010
(V)
Figure 03_image012
(VI)
Figure 03_image014
(VII)
Figure 03_image016
(VIII)。
The photosensitive resin composition according to claim 1, wherein the polythiol compound represented by the formula (I) comprises a polythiol represented by any one of the following formulas (IV) to (VIII) Compound:
Figure 03_image008
(IV)
Figure 03_image010
(V)
Figure 03_image012
(VI)
Figure 03_image014
(VII)
Figure 03_image016
(VIII).
如請求項1所述之感光性樹脂組合物,其中,以該感光性樹脂組合物中的總固含量為100重量%計,該由式(I)所表示的多硫醇化合物的含量為0.1至10重量%。The photosensitive resin composition according to claim 1, wherein, based on 100% by weight of the total solid content in the photosensitive resin composition, the content of the polythiol compound represented by formula (I) is 0.1 to 10% by weight. 如請求項1所述之感光性樹脂組合物,其中,該鹼溶性樹脂包含由以下式(IX)至式(XIV)所表示之重複單元的至少一者:
Figure 03_image018
(IX)
Figure 03_image020
(X)
Figure 03_image022
(XI)
Figure 03_image024
(XII)
Figure 03_image026
(XIII)
Figure 03_image028
(XIV) 其中, X及X'各自獨立為單鍵、-CO-、-SO 2-、-C(CF 3) 2-、-Si(CH 3) 2-、-CH 2-、-C(CH 3) 2-、-O-、
Figure 03_image030
Figure 03_image032
Figure 03_image034
Figure 03_image036
Figure 03_image038
Figure 03_image040
Figure 03_image042
Figure 03_image044
Figure 03_image046
Figure 03_image048
Figure 03_image050
Figure 03_image052
Figure 03_image054
; Y係酸酐的殘基; Z係酸二酐的殘基; R'係氫原子、乙基、苯基、-C 2H 4Cl、-C 2H 4OH或-CH 2CH=CH 2, R1、R1'、R2、R2'、R3、R3'、R4、R4'、R5、R5'、R6及R6'各自獨立為氫原子或甲基; R7、R7'、R8及R8'各自獨立為C 1至C 6的伸烷基,其中該伸烷基係插入有酯鍵、C 6至C 14的伸環烷基、伸芳基之至少一者或沒有插入; R9、R9'、R10、R10'、R11、R11'、R12及R12'各自獨立為氫原子、鹵素原子或C 1至C 6的烷基; m及n各自獨立為1至30的整數; t及u各自獨立為0至1的整數; P各自獨立為
Figure 03_image056
Figure 03_image058
Figure 03_image060
Figure 03_image062
Figure 03_image064
; R13及R14各自獨立為氫原子、羥基、硫醇基、胺基、硝基或鹵素原子; Ar1各自獨立為芳基; Y'係酸酐的殘基; Z'係酸二酐的殘基; A係O、S、NR'、Si(R') 2或Se; a及b各自獨立為1至6的整數;以及 p及q各自獨立為1至30的整數。
The photosensitive resin composition according to claim 1, wherein the alkali-soluble resin comprises at least one of the repeating units represented by the following formulas (IX) to (XIV):
Figure 03_image018
(IX)
Figure 03_image020
(X)
Figure 03_image022
(XI)
Figure 03_image024
(XII)
Figure 03_image026
(XIII)
Figure 03_image028
(XIV) Wherein, X and X' are each independently a single bond, -CO-, -SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C( CH 3 ) 2 -, -O-,
Figure 03_image030
,
Figure 03_image032
,
Figure 03_image034
,
Figure 03_image036
,
Figure 03_image038
,
Figure 03_image040
,
Figure 03_image042
,
Figure 03_image044
,
Figure 03_image046
,
Figure 03_image048
,
Figure 03_image050
,
Figure 03_image052
or
Figure 03_image054
; Y is the residue of an acid anhydride; Z is the residue of an acid dianhydride; R' is a hydrogen atom, ethyl, phenyl, -C 2 H 4 Cl, -C 2 H 4 OH or -CH 2 CH=CH 2 , R1, R1', R2, R2', R3, R3', R4, R4', R5, R5', R6 and R6' are each independently a hydrogen atom or a methyl group; R7, R7', R8 and R8' are independently C 1 to C 6 alkylene group, wherein the alkylene group is inserted with an ester bond, C 6 to C 14 cycloalkylene group, at least one of aryl group or no insertion; R9, R9', R10 , R10', R11, R11', R12 and R12' are each independently a hydrogen atom, a halogen atom or a C 1 to C 6 alkyl group; m and n are each independently an integer from 1 to 30; t and u are each independently 0 Integers from to 1; P are each independently
Figure 03_image056
,
Figure 03_image058
,
Figure 03_image060
,
Figure 03_image062
or
Figure 03_image064
; R13 and R14 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group or a halogen atom; Ar1 is each independently an aryl group; Y' is an acid anhydride residue; Z' is an acid dianhydride residue; A is O, S, NR', Si(R') 2 or Se; a and b are each independently an integer of 1 to 6; and p and q are each independently an integer of 1 to 30.
如請求項5所述之感光性樹脂組合物,其中,該酸酐係選自以下群組:順丁烯二酸酐、琥珀酸酐、伊康酸酐、酞酸酐、四氫酞酸酐(tetrahydrophthalic anhydride)、六氫酞酸酐、甲基內亞甲基四氫酞酸酐(methylendomethylenetetrahydrophthalic anhydride)、氯橋酐及甲基四氫酞酸酐。The photosensitive resin composition as described in Claim 5, wherein the acid anhydride is selected from the following group: maleic anhydride, succinic anhydride, itaconic anhydride, phthalic anhydride, tetrahydrophthalic anhydride, six Hydrophthalic anhydride, methylendomethylenetetrahydrophthalic anhydride, chlorobridge anhydride, and methyltetrahydrophthalic anhydride. 如請求項5所述之感光性樹脂組合物,其中,該酸二酐係選自以下群組:焦蜜石酸二酐、二苯基酮四羧酸二酐(benzophenonetetracarboxylic dianhydride)、聯苯四羧酸二酐以及聯苯醚四羧酸二酐(biphenylethertetracarboxylic dianhydride)。The photosensitive resin composition as described in Claim 5, wherein the acid dianhydride is selected from the following groups: pyromelteric dianhydride, benzophenonetetracarboxylic dianhydride, biphenyl tetracarboxylic dianhydride, Carboxylic dianhydride and biphenylethertetracarboxylic dianhydride. 如請求項1所述之感光性樹脂組合物,其進一步包含由以下式(XV)至式(XVII)中任一者所表示的咔哚系(cardo-based)光聚合性化合物:
Figure 03_image172
(XV)
Figure 03_image068
(XVI)
Figure 03_image175
(XVII) 其中,R15及R16各自獨立為氫原子、羥基、硫醇基、胺基、硝基、鹵素原子或具有不飽和雙鍵的2至20個碳的聚合性官能基,並且R15及R16之至少一者係具有不飽和雙鍵的2至20個碳的聚合性官能基。
The photosensitive resin composition according to Claim 1, further comprising a cardo-based photopolymerizable compound represented by any one of the following formulas (XV) to (XVII):
Figure 03_image172
(XV)
Figure 03_image068
(XVI)
Figure 03_image175
(XVII) wherein, R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amine group, a nitro group, a halogen atom, or a polymerizable functional group of 2 to 20 carbons having an unsaturated double bond, and R15 and R16 At least one of them is a polymerizable functional group of 2 to 20 carbons having an unsaturated double bond.
如請求項8所述之感光性樹脂組合物,其中R15及R16各自獨立為氫原子、羥基、硫醇基、胺基、硝基、鹵素原子或
Figure 03_image072
,並且R15及R16之至少一者係
Figure 03_image072
; R17係C 1至C 6的伸烷基,並且該伸烷基係插入有酯鍵、C 6至C 14的伸環烷基、伸芳基之至少一者或沒有插入;以及 R18係氫原子或甲基。
The photosensitive resin composition as described in Claim 8, wherein R15 and R16 are each independently a hydrogen atom, a hydroxyl group, a thiol group, an amino group, a nitro group, a halogen atom or
Figure 03_image072
, and at least one of R15 and R16 is
Figure 03_image072
; R17 is C 1 to C 6 alkylene group, and the alkylene system is inserted with an ester bond, C 6 to C 14 cycloalkylene group, at least one of arylene group or no insertion; and R18 is hydrogen atom or methyl.
如請求項1所述之感光性樹脂組合物,其不包含無機粒子。The photosensitive resin composition according to claim 1, which does not contain inorganic particles. 一種利用如請求項1至10中任一項所述之感光性樹脂組合物所形成之突出圖案(protrusion pattern)。A protrusion pattern formed by using the photosensitive resin composition described in any one of Claims 1 to 10. 一種包含如請求項11所述之突出圖案的顯示裝置。A display device comprising the protruding pattern as claimed in claim 11.
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