TW202306017A - Method and apparatus for substrate transport - Google Patents

Abstract

A substrate processing apparatus includes a linearly elongated substantially hexahedron shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron substantially orthogonal to the linearly elongated sides. A plurality of process modules are linearly arrayed along the at least one of the linearly elongated sides. A substrate transport arm is pivotally mounted within the substrate transport chamber so that a pivot axis of the substrate transport arm is mounted, fixed relative to the substrate transport chamber. The substrate transport arm has a three link - three joint SCARA configuration, of which one link is an end effector with at least one substrate holder, that is articulate to transport the substrate, and held by the at least one substrate holder, in and out of the substrate transport chamber through the end and side substrate transport openings.

Description

Substrate delivery method and equipment

Exemplary embodiments of the present invention relate generally to robotic systems, and more particularly to robotic transport equipment. [Related applications]

This patent application is related to and claims the benefit of U.S. Provisional Application No. 62/455,874, filed February 7, 2017, the disclosure of which is hereby incorporated by reference.

Productivity is one way to judge the efficiency of a semiconductor manufacturing plant (which is called a FAB). Improvement in productivity of FABs has long been sought and welcomed. Another measure used to judge the efficiency of a FAB is the flexibility of the FAB's configuration (and the flexibility of the configuration of the processing tool and the equipment within it).

The main factors in FAB productivity are the productivity of the processing tool (substrates are loaded into the processing tool, processed and removed from the processing tool after processing), and how efficiently processing modules can be installed in a given FAB space within (ie, how many processing tools can fit into a given FAB space, and a configuration that optimizes productivity). On the other hand, the requirement for smaller transport chambers has led to longer processing times in processing tools to implement processing recipes and a corresponding increase in substrate size, such as 400mm and 450mm or even larger substrates , trying to mitigate the impact of longer processing times on productivity by applying a scaling factor. The effects of processing substrates with substantially increased processing substrate size are, for example, larger processing tool components and longer processing times. For example, handling equipment with longer reach is required to handle larger substrates. Larger process chambers, transfer chambers, and load lock chambers with larger footprints are also required to process larger substrates. An example of a conventional process tool 100 having larger process tool components is illustrated in FIG. 1 and includes a transport chamber 114, a substrate transport arm 150 disposed within the transport chamber 114, coupled to the transport chamber 114 Load lock chambers 110, 112 and process modules 120, 122, 124, 126, 128, 130 coupled to the transport chamber 114. Here, three processing modules are coupled to each side of the transport chamber, where the substrate transport arm 150 includes an upper arm linkage 152 , a forearm linkage 154 and end effectors 156 , 158 . Figure 1 shows a conventional transport chamber 114 with a conventional transport arm 150 having a three-link configuration (one of the links is an end effector 156), plus another end effector 158 and shown limitations of this traditional approach. For example, the conventional form shown in FIG. 1 is substantially similar in length and width ratio (or aspect ratio) to that of the conventional hexahedron-shaped planar form processing tool 100' shown in FIG. 1A, It has a modest increase in processing module capacity and efficiency to compensate for processing time.

Increases in the size of processing modules and load lock chambers, for example, increase processing time per substrate. An increase in the processing time per substrate in one or more processing modules/load lock chambers results in a change in the idle time of other processing modules in the processing tool that are used to perform subsequent substrate processing on the substrate's processing recipe. Longer results, this is clearly considered to have a detrimental effect on process tool productivity. This detrimental effect can naturally be achieved by increasing the number of process modules (which, as mentioned above, cannot be achieved with conventional transport chambers) and by increasing any time spent on a given load/unload operation of the process tool. Improvements can be made by the number of substrates per process tool at a given point in time. Thus, a processing tool with a minimal footprint and a large number of process modules (or a high density ratio of process modules to process tool footprint) and corresponding implementation component configurations, while within the process tool a desired A processing tool with better substrate positioning characteristics is desirable.

One aspect of the present invention provides a substrate processing equipment, which comprises: a linearly elongated substantially hexahedron-shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron substantially orthogonal to the linearly elongated sides; The at least one end wall has an end substrate delivery opening, at least one of the linearly elongated sides has a linear array of side substrate delivery openings, at least one of the end and side substrate delivery openings is arranged to allow a substrate is transported through it into and out of the substrate transport chamber; a plurality of processing modules, which are arranged linearly along at least one of the linear elongated sides and respectively communicate with the substrate delivery chamber through the corresponding side substrate delivery openings; and a substrate transport arm, which is pivotally mounted in the substrate transport chamber such that the pivot axis of the substrate transport arm is fixedly mounted relative to the substrate transport chamber, the substrate transport arm has three linkages Rod - a three-joint SCARA type in which one of the links is an end-effector with at least one substrate holder articulated to hold the at least one substrate holder the substrate is transported into and out of the substrate transport chamber through the end and side substrate transport openings such that the end effector is common to each of the end and side substrate transport openings; Wherein the hexahedron has a side length-to-width aspect ratio that is large and the width is compact relative to the footprint of the substrate transport arm.

Referring to FIGS. 2A-2E , aspects of the disclosed embodiments provide a substrate processing tool 200 having an in-line processing tool configuration that can be adjusted for increased productivity and increased efficiency of the substrate processing tool, wherein, The substrate processing tool 200 has higher processing modules for a given space (eg, the width W1 of the substrate processing tool 200 ) than conventional substrate processing tools (such as those described above). density. Aspects of the disclosed embodiments described herein provide a modular substrate processing tool 200 such that the number of process modules PM coupled to the transport module 210 can be simplified simply by the modularization of the transport chamber 210 This is achieved by increasing the length L of the transport chamber without increasing the width W of the transport chamber 210 . Additionally, the modular transport chamber 210 described herein can be accommodated within the existing space (eg, width) of the conventional substrate processing tool 100 shown in FIG. One end of the tool has a twin load lock chamber pattern similar to conventional processing tools with a hexahedral shaped planar/octahedral shaped delivery chamber with a length to width aspect ratio of about 1:1 or less :1.

In one aspect, the substrate processing tool 200 includes a front end 201, a rear end 202 and any suitable controller 299 for controlling the operation of the substrate processing tool 200 in the manner described below. In one aspect, controller 299 may be part of any suitable control architecture (eg, cluster architecture control). The control system may be a closed-loop controller with a master controller (which in one aspect may be controller 110), cluster controller, and autonomous remote controller (for example, disclosed in March 8, 2011 No. 7,904,182 issued to the controller entitled "Scalable Motion Control System," the disclosure of which is hereby incorporated by reference). In other aspects, any suitable controller and/or control system may be used.

In one aspect, the front end 201 may be an atmospheric front end that includes an equipment front end module (EFEM) 290, load ports 292A-292C, and one or more load lock chambers LL1, LL2. In one aspect, the FEM 290 includes a transport chamber 291 to which the one or more loadports 292A- 292C are coupled. The load ports 292A-292C are configured to hold a substrate cassette/carrier C within which a substrate S is held for loading into the substrate via the load ports 292A-292C. The substrate processing tool 200 is moved or removed from the substrate processing tool 200 . The one or more load lock chambers LL1 , LL2 are coupled to the transport chamber 291 for transporting the substrate S between the transport chamber 291 and the rear end 202 .

The backend 202 may be a vacuum backend. It should be noted that, as used herein, the term vacuum may indicate that the environment in which the substrate is processed is a high vacuum (eg, 10 ⁻⁵ Torr or lower). In one aspect, the rear end 202 includes a rectilinearly elongated substantially hexahedron-shaped delivery chamber 210 having rectilinearly elongated sides 210S1 , 210S2 and end walls 210E1 , 210E2 extending between the sides 210S1 , 210S2. In one aspect, the sides 210S1, 210S2 have a length L and the end walls 210E1, 210E2 have a width W, such that the hexahedron-shaped transport chamber 210 has an aspect ratio of side length L to width W (which is a large length). width ratio), and the width W is relative to a footprint FP of a substrate transport arm 250 disposed in the transport chamber 210 (that is, the substrate transport arm is in a fully retracted configuration) The minimum swing radius) is compact (compact). The width W is compact relative to the footprint FP of the substrate transport arm 250 because only enough minimum clearance is provided between the sides 210S1, 210S2 and the footprint FP to allow the substrate transport arm 250 to operate as described herein. operate as described in. In one aspect, the transport chamber 210 has an aspect ratio greater than 2:1, and the footprint of the substrate transport arm is compact for a predetermined maximum reach of the substrate transport arm; and in In other aspects, the aspect ratio is about 3:1, and the footprint of the substrate transfer arm is compact for a predetermined maximum reach of the substrate transfer arm.

In one aspect, a linear array of side substrate transport openings 270A1-270A6, 270B1-270B6 (which are disposed opposite the hexahedron-shaped substrate transport chamber 210 and the at least one end wall 210E1, 210E2 The side substrate delivery openings 270A1-270A6, 270B1-270B6 of (opposite) the other end wall 210E1, 210E2 adjacent) are oriented so that a side substrate delivery opening 270A1-270A1- The respective axes of motion of the substrate holders of 270A6, 270B1-270B6 (axis) 270A1X-270A6X, 270B1X-270B6X (see FIG. 6) are substantially orthogonal to the end bases passing through the at least one end wall 250E1, 250E2. Another axis of substrate holder movement 260AX, 260BX for the substrate delivery openings 260A, 260B. For example, the at least one end wall 210E1 , 210E2 of the hexahedron-shaped substrate transport chamber 210 is substantially perpendicular to the linear elongated side surfaces 210S1 , 210S2 . The at least one end wall 210E1 , 210E2 has at least one end substrate delivery opening 260A, 260B. At least one of the linear elongated sides 210S1, 210S2 has a linear array of side substrate delivery openings 270A1-270A6, 270B1-270B6. In one aspect, the other linear elongated side 210S1, 210S2 opposite to the at least one linear elongated side 210S1, 210S2 of the substrate transport chamber 210 has at least one other side substrate transport opening 270A1-270A6, 270B1 - 270B6, and the substrate delivery arm 250 is configured to hold the substrate S (which is held by at least one substrate holder 250EH of an end effector 250E, 250E1, 250E2 of a substrate delivery arm 250, 250A1, 250A2) The substrate transport openings 260A, 260B, 270A1-270A6, 270B1-270B6 are transported in and out of the substrate transport chamber through the end, the side, and the other side, so that the end effectors 250E, 250E1, 250E2 are respectively disposed on the substrate The end wall 210E1, 210E2 of the transport chamber 210 and the end, side, and other side substrate transport openings 260A, 260B on the linearly elongated side 210S1, 210S2 and the linearly elongated opposite side 210S1, 210S2 , 270A1-270A6, and each of 270B1-270B6 are common. In one aspect, each of the end substrate transfer openings 260A, 260B and side substrate transfer openings 270A1-270A6, 270B1-270B6 are configured to transfer a substrate S into and out of the substrate S through the openings. Transport room 210 . In one aspect, a respective axis of substrate holder motion 270A1X-270A6X, 270B1X-270B6X passes through each side substrate delivery opening 270A1-270A6, 270B1-270B6 and passes through each side substrate delivery opening, respectively. The axes of motion of the substrate holders of 270A1-270A6, 270B1-270B6 extend substantially parallel to each other. In one aspect, the substrate transport chamber 210 includes a buffer station BS adjacent to at least one of the openings 260A, 260B, 270A1-270A6, 270B1-270B6 during the transport of substrates within the substrate transport chamber 210. is temporarily stored in the buffer.

In one aspect, at least one end wall 210E1, 210E2 is sized to receive side-by-side, two side-by-side load lock chambers LL1, LL2 or other process modules PM (see FIGS. 7, 9A, 9B, and 11), They are placed adjacent to each other at a common height or plane (e.g., the substrate transport plane TP1 shown in FIG. 210E2. It should be understood that while the substrate transport chamber 210 is shown in the drawings as having two end openings 260A, 260B on one or both of the end walls 210E1, 210E2, in other aspects, Only one end opening may be provided on one or both of the end walls 210E1 , 210E2 such that only one load lock chamber or process module is coupled to the respective end wall 210E1 , 210E2. Similarly, sides 210S1, 210S2 are configured to receive side-by-side, two side-by-side process modules PM or load lock chambers LL1, LL2 that are placed adjacent to each other on a common level or plane (e.g., substrate handling plane TP1) and face the respective sides 210S1, 210S2 together. In other aspects, load lock chambers LL1, LL2 and/or process modules PM may be stacked one upon the other at different heights or planes on respective end walls 210E1, 210E2 or sides 210S1, 210S2 (e.g. , substrate transport plane TP1, TP2), any suitable grid (grid) (with any suitable size) for forming openings 260A, 260B, 260A', 260B', 270A, 270B (see FIG. 2E, it Only open ends are shown for example purposes) for connecting process modules PM or load lock chambers LL1 , LL2 to the transport chamber 210 . In one aspect, the process module PM is a cascaded process module TPM (e.g., substrate holding stations PMH1, PMH2 within a common housing and coupled to two side-by-side openings of the substrate transport chamber. ); while in other aspects, the processing modules can be a single processing module SPM (eg, within a common housing and coupled to a single opening of the substrate transport chamber—see FIG. 2A ) or coupled to a A single module or a combination of cascaded modules for the individual openings of the common substrate transport chamber 210 (see FIG. 2A ).

In one aspect, the substrate processing tool 200 includes disposed along at least one of the linearly elongated sides 210S1, 210S2 and communicates with the substrate through corresponding side substrate transport openings 270A1-270A6, 270B1-270B6, respectively. A plurality of processing modules PM communicated with the material transport chamber 210. In one aspect, the linear array of process modules PM provides at least six process module substrate holding stations PMH, PHM1, PMH2 distributed at substantially the same height along at least one linearly elongated side 210S1, 210S2, and Each substrate holding station is accessed by a common end effector 250E, 250E1, 250E2 of the substrate transfer arm 250, 250A, 250B through a corresponding side substrate transfer opening 270A1-270A6, 270B1-270B6. Although three process modules PM are illustrated on each side 210S1, 210S2 of the substrate transport chamber 210 (with the exception of a single process module SPM in FIG. Process modules PM or less than three process modules PM are used to provide any suitable substrate holding stations on each side 210S1, 210S2. In one aspect, the side openings 270A1-270A6, 270B1-270B6 and the process module PM can be arranged at different heights for use with the same openings 260A, 260B as described herein with reference to FIG. 2E and end walls 210E1, 210E2. , 260A', 260B' describe a substantially similar manner to form openings and processing module grids (grids) (the transport device 245 includes a Z-axis drive for raising the end effectors 250E, 250E1, 250E2 and lowered to different heights TP1, TP2). In one aspect, the processing module PM operates on the substrate by deposition, etching, or other types of processing to form electronic circuits or other desired structures on the substrate. Typical processes include, but are not limited to, thin film processing using vacuum, such as plasma etching or other etching processes, chemical vapor deposition (CVD), plasma vapor deposition (PVD), implantation (e.g., ion implantation), Metrology, rapid thermal processing (RTP), dry exfoliation atomic layer deposition (ALD), oxidation/diffusion, nitride formation, vacuum lithography, epitaxy (EPI), wire bonder and evaporation or other use of vacuum Pressure film handling.

2A, 2B and 2C, as mentioned above, the substrate processing tool 200 has a modular form. In one aspect, the front end 201 can be a module of the substrate processing tool 200 (e.g., front end module 200M1) such that there is a transfer chamber 291, load lock ports 292A-292C, and load lock chambers LL1, LL2. Any suitable front end may be coupled to the substrate transport chamber 210 via end openings 260A, 260B on one or more end walls 210E1 , 210E2 of the substrate transport chamber 210 . In one aspect, the substrate transfer chamber 210 forms another module of the substrate processing tool, wherein the substrate transfer chamber 210 includes a common or core module 200M2 and one or more end-of-chamber modules or Insert modules 200M3, 200M4, 200M5, 200M6, 200M7, 200M8. In one aspect, the core module 200M2 includes a frame 200F2 and the at least one substrate handling device 245 is mounted to the frame 200F1 in any suitable manner. Each plug-in module 200M3, 200M4, 200M5, 200M6, 200M7, 200M8 also includes a respective frame 200F3, 200F4, 200F5, 200F6, 200F7, 200F8 which, when joined to the frame 200F2 of the core module 200M2, form the The frame 200F of the substrate transport chamber 210 .

In one aspect, each of the plug-in modules 200M3, 200M4, 200M5, 200M6, 200M7, 200M8 has a different configuration such that they can be selected to connect to the core module 200M2 to provide the base The linear elongated sides 210S1, 210S2 of the substrate transport chamber 210 have a selectable variable length L, wherein the sides 210S1, 210S2 of the substrate transport chamber can be selected between different lengths and define the substrate transport chamber An optional variable type for . For example, the plug-in module 200M3 includes sides 210M3S1, 210M3S2, each side 210M3S1, 210M3S2 has a length L1 and includes, for example, two of the side openings 270A1-270A6, 270B1-270B6 (labeled as openings 270A and 270B), and the end wall 210M3E1 of the insert module 200M3 does not have any openings through which the end effectors 250E, 250E1, 250E2 can pass. Insertion module 200M5 is substantially similar to insertion module 200M3, but end wall 210M5E of insertion module 200M5 includes openings 260A, 260B. Similarly, the plug-in module 200M6 includes sides 210M6S1, 210M6S2, each side 210M6S1, 210M6S2 has a length L2 and includes, for example, one of the openings 270A and 270B, and the end wall 210M6E1 of the plug-in module 200M6 does not have any Openings through which end effectors 250E, 250E1, 250E2 pass. Insertion module 200M4 is substantially similar to insertion module 200M6, but end wall 210M4E of insertion module 200M4 includes openings 260A, 260B. The insert module 200M8 includes sides 210M8S1, 210M8S2, each side 210M8S1, 210M8S2 has a length L3 and does not include any side openings, and the end wall 210M8E1 of the insert module 200M8 does not have any end effectors 250E, 250E1, 250E2 to penetrate. open mouth. Insertion module 200M7 is substantially similar to insertion module 200M8, but end wall 210M7E of insertion module 200M7 includes openings 260A, 260B. Insert modules 200M3, 200M4, 200M5, 200M6, 200M7, 200M8 are coupled to the core module 200M2 in any suitable manner (e.g., bolts BLT on the interface), any suitable seal 200SL is provided on each insert module Between each end wall 200M2E1, 200M2E2 of the groups 200M3, 200M4, 200M5, 200M6, 200M7, 200M8 and the core module 200M2.

In this aspect, the length L1 of the insertion modules 200M3 and 200M5 is greater than the length L2 of the insertion modules 200M4 and 200M6; and the length L2 of the insertion modules 200M4 and 200M6 is greater than the length L3 of the insertion modules 200M7 and 200M8. Additionally, although the insert module is shown without side openings, with one side opening 270A, 270B on each side, and with two side openings 270A, 270B on each side, with or without end openings 260A, 260B, In other aspects, the insert modules can have any suitable number of side openings 270A, 270B and any suitable length to provide variable lengths of the substrate transport chamber 210 and any suitable number of side openings 270A, 270B and any suitable length. End openings 260A, 260B are provided on the end walls 210E1 , 210E2 of the substrate transport chamber 210 . For example, referring to FIGS. 7, 8, 9A, 9B, 10, 11, and 12, the substrate transport chamber 210 is shown as having a selectable variable profile, wherein the profile can be in the side length L versus width W (See Figure 2A) Choose between structures in which the aspect ratio changes from a large aspect ratio (e.g., 3:1) to a single (unity) aspect ratio (e.g., 1:1) structure in which the substrate transports Arm 250 is common to each optional substrate transport chamber 210 type.

As can be seen in FIG. 7 , the substrate transport chamber 210 includes the core module 200M2 and two insert modules 200M5 coupled to each end 200M2E1 , 200M2E2 of the core module 200M2. In this aspect, the insert modules 200M5 are selected to provide end openings 260A, 260B on each end wall 210E1, 210E2 of the substrate transport chamber 210 while providing the substrate transport chamber 210-3:1 The aspect ratio of length L to width W. The configuration of the substrate transport chamber 210 illustrated in FIG. 8 also includes insert modules 200M5, 200M6 selected such that the substrate transport chamber 210 has an aspect ratio of length L to width W of 3:1; but In this aspect, only one end wall 210E1 of the substrate transport chamber includes end openings 260A, 260B, while end wall 210E2 does not include any openings. In this aspect, the add-in module 200M5 is coupled to the first end 200ME1 of the core module 200M2 and the add-in module 200M6 is coupled to the second end 200M2E2 of the core module 200M2.

As can be seen in FIGS. 9A and 9B , the substrate transport chamber 210 includes the core module 200M2 and two insert modules 200M4 selected to provide the substrate transport chamber 210 with a length L of 2:1. Aspect ratio to width W. Here, one of the plug-in modules 200M4 is coupled to the first end 200M2E1 of the core module 200M2 and the other plug-in module 200M4 is coupled to the second end 200M2E2 of the core module 200M2 for To provide the 2:1 aspect ratio, end openings 260A, 260B of the substrate transport chamber 210 are also provided at each end wall 210E1 , 210E2 of the substrate transport chamber 210 . Although not shown, the plug-in module 200M4 coupled to the second end 200M2E2 of the core module 200M2 may be replaced with a plug-in module 200M6 such that the end openings 260A, 260B are formed in a manner substantially similar to that shown in FIG. is provided only at the end wall 210E1 of the substrate transport chamber 210 .

The configuration of the substrate transport chamber 210 illustrated in FIG. 10 also includes insert modules 200M3, 200M7 selected such that the substrate transport chamber 210 has an aspect ratio of length L to width W of 2:1. but in this aspect, only one end wall 210E2 of the substrate transport chamber includes end openings 260A, 260B, and the end wall 210E2 does not include any openings. In this aspect, an insert module 200M3 is coupled to the second end 200M2E2 of the core module 200M2 such that the core module 200M2 and the insert module 200M3 provide each side 210S1 , 210S2 of the substrate transport chamber 210 Four side openings 270A, 270B. The plug-in module 200M7 is coupled to the first end 200M2E1 of the core module 200M2 such that the load lock chambers LL1, LL2 of the front-end module 200M1 can be coupled to the substrate transport chamber 210, wherein the plug-in module 200M7 includes only End openings 260A, 260B. Although not shown, the plug-in module 200M6 coupled to the second end 200M2E2 of the core module 200M2 may be replaced with a plug-in module 200M5 such that the end openings 260A, 260B are substantially similar to FIGS. 7, 9A, 9B. The manner shown is provided only at the two end walls 210E1 , 210E2 of the substrate transport chamber 210 .

The configuration of the substrate transport chamber 210 illustrated in FIG. 11 includes two insert modules 200M7 selected such that the substrate transport chamber 210 has a 1:1 aspect ratio of length L to width W (eg, , a single aspect ratio). In this aspect, the two end walls 210E1 , 210E2 of the transport chamber include end openings 260A, 260B. In this aspect, one of the add-in modules 200M7 is coupled to the second end 200M2E2 of the core module 200M2, while the other add-in module 200M7 is coupled to the first end of the core module 200M2 200M2E1, so that only the core module 200M2 provides two side openings 270A, 270B on each side 210S1, 210S2 of the substrate transport chamber 210. In this aspect, the plug-in modules 200M7 are coupled to the core module 200M2 so that the load lock chambers LL1, LL2 of the front-end module 200M1 can be coupled to the substrate transport chamber 210 and the process module PM can be is coupled to the second end 200E2 of the substrate transport chamber 210, wherein the insert modules 200M7 include only end openings 260A, 260B. In an aspect as shown in FIG. 12, the plug-in module 200M7 coupled to the second end 200M2E2 of the core module 200M2 can be replaced with a plug-in module 200M8, which is used for the second terminal of the core module 200M2. Both ends 200M2E2 are capped without providing any side openings or end openings, so that while end openings 260A, 260B are provided only on the end wall 210E1 of the substrate transport chamber 210, the substrate transport chamber can remain The 1:1 aspect ratio of length L to width W. In an aspect as shown in FIG. 12A , a plug-in module 200M7 can be coupled to the ends 200M2E1 , 200M2E2 of the core module 200M2, wherein a process module PM can be disposed in one of the substrate transport chambers 210. or a plurality of sides 210S1 , 210S2 and/or a second end 210E2 (one or more load lock chambers are coupled to the first end 210E1 of the substrate transfer chamber 210 ). While exemplary configurations of substrate transport chambers 210 have been shown in FIGS. Modules 200M may be combined in any suitable pattern to provide any suitable length L to width W aspect ratio of the substrate transport chamber 210 having any suitable number of side openings 270A, 70B and end openings 260A, 260B.

Referring again to FIGS. 2A and 2E , in one aspect, at least one substrate transport device 245 is disposed at least partially within the transport chamber 210 . In one aspect, each substrate transport apparatus 245 includes a substrate transport arm 250 that is pivotally mounted within the transport chamber 210 such that a pivot axis of the substrate transport arm 250 (e.g., shoulder axis) SX is fixedly mounted relative to the transport chamber 210 such that the pivot axis SX does not traverse the length L or width W of the substrate transport chamber 210. In one aspect, the stationary mounting of the pivot axis SX is advantageous compared to mounting the substrate transport arm 250 to a linear translator, because the stationary mounting of the pivot axis SX will result in Particles within the transport chamber 210 are minimized and any sealing interface isolating the sliding features used to effectuate the positioning of the pivot joint SX is limited or eliminated. Furthermore, as opposed to conventional articulating arms constructed with pivoting links on which the transport arm is mounted, the articulating transport arm 250 described herein provides Long reach, in order to can in one end wall 210E1 (for example, the load lock chamber LL1, LL2 that is connected with it), the other end wall 210E1 (for example, the load lock chamber or processing module that is connected with it) and along this The sides 210S1, 210S2 of the transport chamber 210 with large aspect ratio are arranged between the processing modules PM between the end walls to solve the droop effect (shown by conventional arms); provide the substrate transport arm 250 Corresponding to this long reach is substantially unrestricted arm mobility (which will be described below); Pivot rigidity for high precision substrate positioning of openings 260A, 260B).

In one aspect, the substrate delivery arm 250 has a three-link-three-joint SCARA (Selectively Compliant Articulated Robotic Arm) type. For example, the substrate transfer arm 250 includes a first arm link or upper arm 250UA, a second arm link or forearm 250FA and at least one third arm link or at least one end effector 250E, 250E1, 250E2, at least one of which is The effectors 250E, 250E1 , 250E2 include at least one substrate holder 250EH (whose motion control implements the complete transport motion of the substrate holder 250EH over the entire range of motion of the substrate transport arm 250). In an aspect with reference to FIG. 2A, the substrate delivery arm 250 includes a single end effector 250E having a single substrate holder 250EH. In an aspect with reference to FIG. 5, the substrate delivery arm 250A includes a single end effector 250E1 having more than one substrate holder 250EH. In the aspect with reference to Figure 5, the end effector 250E1 is provided with two substrate holders 250EH, but in other aspects any suitable number of substrate holders may be provided such that they are arranged in a side-by-side configuration The substrates can be picked and placed substantially simultaneously from the side-by-side substrate holding stations PMH1, PMH2. For example, the substrate holders 250EH of the end effector 250E1 are configured such that the end effectors 250E1 extend or retract the more than one substrate holders 250EH substantially simultaneously with a common end effector motion Linearly arranged side substrate delivery openings 270A1 - 270A6 , 270B1 - 270B6 (or openings 260A, 260B linearly arranged on one or more of the end walls 210E1 , 210E2 ). In one aspect, the substrate transfer arm 250B includes a plurality of end effectors, such as end effectors 250E, 250E2, wherein the end effectors 250E, 250E2 are attached to a common forearm link of the substrate transfer arm 250B. 250FA such that the end effectors 250E, 250E2 pivot relative to the forearm 250FA about a common axis of rotation (e.g., wrist axis WX), and the two end effectors 250E, 250E2 are each end and side substrate transport Openings 260A, 260B, 270A1-270A2, 270B1-270B2 are shared. When the substrate transfer arm 250B includes more than one end effector 250E, 250E2, the end effectors 250E, 250E2 provide the substrate transfer arm 250B with a substrate transfer opening 260A, 260B for each end and side, 270A1-270A2, 270B1-270B2 common rapid exchange end effector. In one aspect, each end effector 250E, 250E2 is independently rotationally driven by a respective degree of freedom of the drive section 300A, 300B, 300C, 300D, while in other aspects, the end effector 250E, 250E2 is independently driven by a An approach substantially similar to that described in U.S. Patent No. 9,401,294, issued July 26, 2016 (the contents of which are hereby incorporated by reference) (e.g., one of the end effectors 250E, 250E2 replaced by any Suitable counter drive drives) are differentially driven by a common degree of freedom of drive sections 300A, 300B, 300C, 300D.

Referring to FIG. 4 , in one aspect, the end effectors 250E, 250E1 , 250E2 and each of the upper arm 250UA and forearm 250FA may be driven by any suitable drive section 300A, 300B, 300C, 300D using any suitable actuator. (It is described below, and the driving section 300A is illustrated in FIG. 4 as an example) driving. For example, in one aspect, substrate delivery arms 250, 250A, 250B include those disclosed in U.S. Patent Publication No. 2015/0128749, disclosed on May 14, 2015, and U.S. Patent No. 5,682,795, issued on November 4, 1997. U.S. Patent No. 5,778,730, issued July 14, 1998; U.S. Patent No. 5,794,487, issued August 18, 1998; U.S. Patent No. 5,908,281, issued June 1, 1999; and August 6, 2002 A substantially similar split band transmission is the split band transmission of US Patent No. 6,428,266 issued on . For example, referring to the drive transmission 400 for the forearm 250FA (it should be understood that the drive transmission for the end effector is substantially similar), a shoulder pulley 410 may be mounted to the drive transmission 300A around The shoulder axis SX rotates so that the drive shaft of the drive section 300A drives the rotation of the shoulder pulley 410 . An elbow pulley 411 is rotatably mounted on the elbow axis EX such that the elbow pulley 411 and the forearm 250FA rotate around the elbow axis EX together as a unit. Drive belts 400A, 400B of any suitable height are partially wrapped around pulleys 410, 411 in opposite directions so that both drive belts 400A, 400B are under tension during operation of the substrate transport arm 250, with At least the joints EX, WX of the arm 250 provide rigidity to the substrate.

2A and 2E, in one aspect, the upper arm 250UA has a first length AL1 from the joint center SX to the joint center EX; the forearm 250FA has a second length AL2 from the joint center EX to the joint center WX and the end effector 250E has a third length AL3 from the joint center WX to the substrate holding reference datum DD of the substrate holder 250EH. In one aspect, one or more of the first length AL1, second length AL2 and third length AL3 and the other one or more of the first length AL1, second length AL2 and third length AL3 or different (ie, the delivery arm 250 is not equal in length to the arm linkage). In one aspect, length AL2 is longer than lengths AL1 and AL3.

The first end 250UAE1 of the upper arm 250UA is rotatably coupled at pivot joint SX, for example, to any suitable drive section, such as the drive sections 300A, 300B, 300C, 300D described herein (see FIGS. 3D) to provide at least two degrees of freedom for the substrate delivery arm 250 . 3A, 3B, 3C, and 3D, each drive shaft 380S, 380AS, 380BS, 388 of the drive sections 300A, 300B, 300C, 300D (collection of the drive shafts forms a drive spindle) and The shoulder axes SX of the substrate transport arms 250, 250A, 250B coupled thereto are coaxial. In one aspect, the substrate transport arm 250 includes three degrees of freedom, while in other aspects, the substrate transport arm has four or more degrees of freedom. The first end of the forearm 250FA is rotatably coupled to the second end 250UAE2 of the upper arm 250UA at a pivot joint (eg, elbow joint) EX. A first end of the at least one end effector 250E is coupled at a pivot joint (eg, wrist joint) WX to a second end of the forearm 250FA, the second end of the substrate transfer arm 250 includes a Substrate holder 250E for substrate S. Here, the substrate delivery arm 250 is articulated for moving the substrate S held by the at least one substrate holder 250EH through the end and side substrate delivery openings 260A, 260B, 270A1-270A6, 270B1. - 270B6 transports in and out of the transport chamber 210 such that the substrate transport arm 250 is shared by the end and side substrate transport openings 260A, 260B, 270A1-270A6, 270B1-270B6.

3A, 3B, 3C, 3D, in one aspect, the transport device 245 includes at least one drive section 300A, 300B, 300C, 300D and at least one transport arm 250, 250A, 250B. arm part. The at least one transport arm 250, 250A, 250B may be coupled to the drive shafts of the drive sections 300A-300D at any suitable junction CNX in any suitable manner such that the drive shafts rotate as described herein The movement of the at least one transport arm 250, 250A, 250B is implemented in a smooth manner. In one embodiment, the at least one transport arm 250, 250A, 250B is interchangeable with a plurality of different interchangeable transport arms 250, 250A, 250B for exchanging at the junction CNX with the drive section, each of which can Interchangeable delivery arms 250, 250A, 250B have different drop characteristics and a corresponding drop distance register associated therewith, which describes the arm drop distance of the associated delivery arm 250, 250A, 250B, This enables the drive section to use a compensating arm motion in the Z direction as described, for example, in U.S. Patent Application No. 62 entitled "Method and Apparatus for Substrate Transport Apparatus Position Compensation" filed on January 26, 2017 /450,818, the disclosure of which is hereby incorporated herein by reference.

The at least one drive section 300A, 300B, 300C, 300D is mounted to any suitable frame 200F of the processing device 200, such as the frame 200F2 mounted to the core module 200M2. In one aspect, the at least one drive section 300A, 300B, 300C can include a common drive section that includes a frame 300F that houses one or both of a Z-axis drive 370 and a rotational drive section 382 many. The interior 300FI of the frame 300F may be sealed in any suitable manner as will be described hereinafter. In one aspect, the Z-axis drive 370 can be any suitable drive configured to move the at least one transport arm 250, 250A, 250B along the Z-axis. In one aspect, the Z-axis drive can be a screw drive, but in other aspects, the drive can be any suitable linear drive, such as linear actuators, piezoelectric motors, and the like. The rotational drive section 382 may be configured as any suitable drive section, such as, for example, a harmonic drive section. For example, the rotational drive section 382 may include any suitable number of coaxially arranged coherent drive motors 380 (as seen in FIG. 3A ), where the drive section 382 includes three coaxially arranged coherent drive motors 380 , 380A, 380B. In other aspects, the drivers of drive section 382 may be arranged side-by-side and/or coaxially. In one aspect, the rotational drive section 382 may include any suitable number of coordinated drive motors 380, 380A, 380B, eg, corresponding to any suitable number of drive shafts 380S, 380AS, 380BS in the coaxial drive system. The harmonic drive motor 380 can have high capacity output bearings so that a ferrofluidic seal (ferrofluidic seal) 376, 377 components can be at least partially controlled by the harmonic drive motor 380 in the desired position of the transport device 245. Centered and supported with sufficient stability and sufficient clearance during the desired rotational movement T and extension movement R. It should be noted that the ferrofluidic seals 376, 377 may comprise several components that form a substantially concentric coaxial seal as will be described below. In this example, the rotary drive section 382 includes a housing 381 that houses one or more drive motors 380 substantially similar to those described in U.S. Patent Nos. 6,845,250; 5,899,658; 5,813,823; The drive motors in the patents, the disclosures of which are hereby incorporated by reference. The ferrofluid seals 376, 377 may be tolerated to seal each drive shaft 380S, 380AS, 380BS within the drive shaft assembly. In one aspect, ferrofluidic seals may not be provided. For example, the drive section 382 may include a drive having a stator that is substantially hermetically sealed from the environment within which the transport arm operates, while the rotor and drive shaft share the environment within which the transport arm operates. Suitable examples of drive sections that do not have ferrofluid seals and that can be employed in aspects of the disclosed embodiments include the MagnaTran ^® 7 and MagnaTran ^® 8 robotic drive sections provided by Brooks Automation, which have A seal configuration will be described below. It should be noted that the drive shaft 380S, 380AS, 380BS may also have a hollow structure (e.g., a hole extending lengthwise along the center of the drive shaft) to allow wires or any other suitable material to pass through the shaft. Drive assembly for connection, for example, to another drive section mounted to the drive 300A, 300B, 300C, such as U.S. Patent Application No. 15/110,130 filed July 7, 2016 (which was filed in November 2016 Published as US2016/0325440 on 10th (the disclosure of which application is hereby incorporated by reference), any suitable position encoder, controller, and/or the at least one transport arm 250, 250A, 250B. It will be appreciated that each drive handle of the actuators 300A, 300B, 300C may include any suitable encoder configured to detect the position of an individual motor for determining the position of each transport arm 250, 250A, 250B. Location of end effectors 250E, 250E1, 250E2.

In one aspect, the housing 381 can be mounted to a cassette coupled to the Z-axis drive 370 such that the Z-axis drive 370 moves the cassette (and the housing thereon) along the Z-axis. 381). It will be appreciated that in order to seal the controlled atmosphere within which the at least one transport arm 250, 250A, 250B operates, from the interior of the drive 300A, 300B, 300C (which is in an atmospheric pressure ATM environment) operation) isolation, the driver may include one or more of ferrofluidic seals 376, 377 and a bellows type seal. The bellows seal can be coupled to the cassette at one end and to any suitable portion of the frame 300FI at the other end so that the interior 300FI of the frame 300F is separated from the controlled atmosphere (the at least one The transport arms 250, 250A, 250B operate in this atmosphere) isolated.

In other aspects, a drive having stators may be provided on the cassette, wherein the stators are sealed without ferrofluidic seals from the atmosphere in which the transport arms operate , such as the MagnaTran ^® 7 and MagnaTran ^® 8 robot-driven sections provided by Brooks Automation. For example, referring to FIGS. 3A, 3B, 3C, 3D, the rotational drive section 382 is constructed such that the motor stators are sealed from the atmosphere in which the robotic arms operate, while the motor rotors share the environment in which the robotic arms operate.

Figure 3B shows an in-line drive having a first drive motor 380' and a second drive motor 380A'. The first drive motor 380' has a stator 380S' and a rotor 380R', wherein the rotor 380R' is coupled to a drive shaft 380S. A can seal 380CS may be disposed between the stator 380S' and the rotor 380R' and connected to the housing 381 in any suitable manner for sealing the stator 380S' against the This environment in which the robotic arm operates is isolated. Similarly, the motor 380A' includes a stator 380AS' and a rotor 380AR', wherein the rotor 380AR' is coupled to a drive shaft 380AS. A container seal 380ACS may be disposed between the stator 380AS' and the rotor 380AR'. The container seal 380ACS may be connected to the housing 381 in any suitable manner to seal the stator 380AS' from the environment in which the robotic arms operate. It will be appreciated that any suitable encoder/sensor 368A, 368B may be provided for determining the position of the drive shaft (and the arm on which the drive shaft operates).

Referring to FIG. 3C, a three-axis rotational drive section 382 is shown. The three-axis rotational drive section may be substantially similar to the coaxial drive section described above with reference to FIG. Individual drive shafts 380A, 380AS, 380BS and rotors 380R', 380AR', 380BR'. Each motor also includes a respective stator 380S', 380AS', 380BS' which is isolated from the environment within which the robotic arm operates by respective container seals 380CS, 380ACS, 380BCS. It will be appreciated that any suitable encoder/sensor may be provided as described above with reference to FIG. 3C to determine the position of the drive shaft (and the arm the drive shaft operates). Referring also to FIG. 3D , a drive 300D having a multi-axis rotary drive section 382 substantially similar to the three-axis rotary drive section described above is shown having four drive shafts 380S, 380AS, 380BS, 388 and four individual motors 380', 380A', 380B', 388M, wherein motor 38M includes a stator 388S, a rotor 388R and a container seal 388SC, substantially similar to those described above. In one aspect, a four degree of freedom drive 300D (excluding the Z-axis drive) may be provided, such as when the substrate transport arm (eg, substrate transport arm 250B) is configured to rapidly exchange end effectors and each When an end effector is rotated independently of other end effectors. In one aspect, a three-degree-of-freedom drive 300C (excluding the Z-axis drive) may be provided, such as when the substrate transport arm (e.g., substrate transport arm 250B) is provided with a rapid exchange end effector (which uses are coupled in a manner different from that described above). It will be appreciated that in one aspect the drive shafts of the motors shown in Figures 3B, 3C and 3D may not allow the wire feed through, while in other aspects any suitable seal may be provided such that The electrical wires may, for example, pass through the hollow drive shaft of the motors shown in Figures 3B, 3C and 3D.

In an aspect with reference to FIGS. 2A , 2G and 2H, to compensate for arm descent (e.g., in addition to or instead of the Z movement implemented by the register for the descent described above) movement) and/or in order to reduce any bending moment exerted on the at least one drive section 300A, 300B, 300C, 300D due to the weight of the substrate transport arm 250, the first end 250UAE1 of the upper arm 250UA includes a A balance weight (ballast) member 247 (shown schematically in the drawings in representative form for purposes of example) with its pivot axis SX extending in a direction substantially opposite to the direction of extension of the substrate transport arm direction, and have a balance according to the moment of the substrate transport arm on the pivot axis SX (e.g., on the drive spindle), and/or according to the compact footprint in which the substrate transport arm 250 is installed. Configuration and weight determined by compatibility. In one aspect, the counterweight 247 is fixedly mounted to a frame of the substrate transport arm 250 (eg, frame 250UAF of the upper arm 250UA) at a fixed position relative to the pivot axis SX, As shown in FIG. 2G; and in other aspects, the balance weight 247 is movably mounted to the frame of the substrate delivery arm 250 (eg, the frame 250UAF of the upper arm 250UA) for being disposed on At various locations on the frame toward or away from the pivot axis SX (eg, along the direction 296 of the longitudinal axis LAX of the upper arm 250UA). In other aspects, the balance weight 247 can be installed at any suitable location on the substrate transport device 245 , such as a position not associated with the transport arm linkages 250US, 250FA, 250E, 250E1, 250E2. For example, the balance weight 247 may be used in any suitable manner (eg, by mounting the balance weight 247 to one or more of the drive shafts or by mounting the balance weight 247 to a Pivot 247PA (which is mounted, for example, to one of the drive section's drive shafts 380S, 380AS, 380BS, 388 as shown in FIG. 2I ) is fixedly or movably mounted to drive sections 300A, 300B , 300C, the frame or housing of 300D. In this example, the pivot 247PA is illustrated as being mounted to the drive shaft 280S, like but independently of the upper arm 250UA, but as described above, the pivot 247PA may be mounted to any of drive shafts 380S, 380AS, 380BS, 388 of drive sections 300A, 300B, 300C, 300D.

In one aspect, the counterweight 247 is a movable weight that can move in direction 296 away from and toward the pivot axis SX relative to a frame (e.g., frame 250UAF of the upper arm 250UA), in contact with the substrate The extension and contraction of the transport arm 250 are complementary. For example, when the substrate transport arm 250 is extended, the counterweight 247 moves in direction 296 away from the pivot axis SX and when the substrate transport arm 250 is retracted, the counterweight 247 moves in direction 296 Movement towards this pivot axis SX. In one aspect, the balance weight 247 is operatively coupled to the substrate transport arm 250 and implements at least one of the drive sections 300A, 300B, 300C, 300D of the substrate transport arm 250 articulation. The drive shaft moves relative to the substrate transport arm frame (eg, frame 250UAF of the upper arm 250UA) in any suitable manner. For example, the counterweight 247 may be mounted on any suitable slide 247SL within the upper arm 250UA (or within the pivot 247PA) for the driven sections 300A, 300B, 300C, 300D. Actuated by any suitable means (for example, via a belt and pulley drive or any other suitable drive transmission). In one aspect, at least one drive shaft of the drive sections 300A, 300B, 300C, 300D implements movement of the counterweight 247 in direction 296 away from and toward the pivot axis and implements movement of the substrate transport arm 250. expanding and contracting such that the at least one drive shaft is the common drive shaft for the movement of the balance weight 246 and the expansion and contraction of the substrate transport arm 250 . For example, referring also to FIGS. 3A-3D , an outer drive shaft 380S may be coupled to the upper arm 250UA for rotating the upper arm 250UA about the shoulder axis SX. The intermediate drive shaft 380AS can be coupled to the forearm 250FA (eg, via the belt and pulley arrangement described herein) for rotating the forearm 250FA about the elbow axis EX. The inner drive shaft 380BS, 388 can be coupled to the end effectors 250E, 250E1, 250E2 (e.g., via a belt and pulley arrangement as described herein) for rotating the end effectors 250E, 250E1, 250E2 about the wrist axis. WX turns. The intermediate drive shaft 380AS can also be used in any suitable manner (for example, through a belt comprising the shoulder pulley 410 and another pulley 412 disposed on the upper arm 250UA opposite to the elbow pulley 411 with respect to the shoulder axis SX). configured with pulleys to be coupled to the balance weight 246. The belts 400A', 400B' may be connected to the pulleys 410, 412, and the balance weight 246 may be coupled to one of the belts 400A', 400B' in any suitable manner. Alternatively, to move along any suitable linear slide 247SL in direction 296. It will be appreciated that the pulley size ratio between pulley 410 and pulley 411 may be different than the pulley size ratio between pulley 410 and pulley 412 such that Movement of the balance weight 246 is calibrated to arm extension/contraction (e.g., the shoulder pulley 410 may include a first diameter to which the belts 400A, 400B are coupled and the belts 400A', 400B' to be coupled coupling, wherein the first and second diameters each correspond to one of the pulleys 411, 412). In other aspects, the balance weight 246 can be coupled with the upper arm 250UA, the forearm 250UA, and the end effector 250E , any one of 250E1, 250E2 is coupled in any suitable manner to any suitable drive shaft 380S, 380AS, 380BS, 388 of drive section 300A, 300B, 300C, 300D such that the balance weight 246 moves between Directions 296 on.

Referring to FIG. 2G, the balance weight member 247 has a balance weight portion 247A, 247B, 247C, which can be selected from a plurality of different interchangeable balance weight portions 247A, 247B, 247C. In one aspect, the selection of the interchangeable balance weight portions 247A, 247B, 247C depends on the aspect ratio of the length L to the width W of the substrate transport chamber 210 . In other aspects, the selection of the interchangeable balance weight sections 247A, 247B, 247C also depends on the type of end effectors 250E, 250E1, 250E2 included in the substrate transport arm 250 (e.g., single base substrate holder end effectors (eg, end effectors 250E, 250E2) or side-by-side substrate holder end effectors (eg, end effector 250E1)) or number. For example, the balance weight sections 247A, 247B, 247C are selected for a transport chamber 210 (eg, as shown in FIG. 2A ) constructed with six side openings than for a transport chamber constructed with four side openings. The balance weight sections 247A, 247B, 247C are selected for the transport chamber 210 (eg, shown in FIG. 9A ). Similarly, the balance weight sections 247A, 247B, 247C are selected for a transport chamber 210 (eg, as shown in FIG. 9A ) constructed with four side openings than for a transport chamber constructed with two sides Open transport chamber 210 (eg, as shown in FIG. 11 ) is weighted by selected counterweight portions 247A, 247B, 247C. In one aspect, when the substrate transport chamber 210 has an aspect ratio of length L to width W of 1:1, no counterweight is required at all (e.g., the counterweight portion does not substantially add any balance weight (counter weight) onto the substrate delivery arm 250). It will be appreciated that the counterweight portions 247A, 247B, 247C can be adjusted as desired, for example depending on the aspect ratio of the substrate transport chamber 210 and/or the end effectors included in the substrate transport arm 250 are added to or removed from the substrate transport arm 250 .

Referring now to Figures 2A, 2G, 2H and 13A-17, an exemplary operation of the substrate processing tool 200 will be described. In one aspect, the substrate transport chamber 210 is provided (block 1700 of FIG. 17 ) and the plurality of process modules PM are as described above along at least one of the sides 210S1, 210S2 of the substrate transport chamber. or are arranged in a linear array (block 1710 of FIG. 17). In one aspect, the process modules PM and/or load lock chambers LL1 , LL2 are also arranged in an array on the end walls 210E1 , 210E2 of the substrate transport chamber 210 . In one aspect, drive sections 300A, 300B, 300C, 300D are provided and connected to the substrate transport chamber 210 (block 1705 of FIG. 17 ), wherein the drive sections include at least two degrees of freedom and the drive Each drive shaft 380S, 380AS, 380BS, 388 of a section 300A, 300B, 300C, 300D and the other drive shafts 380S, 380AS, 380BS, 388 of that drive section 300A, 300B, 300C, 300D revolve around a common axis (eg, shoulder axis SX) rotation. In one aspect, the substrate transport arm 250 is provided (block 1720 of FIG. 17 ) and is pivotally mounted within the substrate transport chamber 210 such that a pivot axis of the transport arm (e.g., shoulder The axis SX) is fixedly mounted relative to the substrate transport chamber as described above. As described above, in one aspect, the shoulder axis SX of the transport arm 250 is a common axis with the other drive shafts 380S, 380AS, 380BS, 388 of the drive sections 300A, 300B, 300C, 300D.

In one aspect, the substrate delivery arm 250 is articulated for moving a substrate held by the at least one substrate holder 250EH of an end effector 250E, 250E1, 250E2 through the end and side substrate delivery opening 260A. , 260B, 270A1-270A6, 270B1-270B6 are transported in and out of the substrate transporter 210 such that the end effectors 250E, 250E1, 250E2 are each of the end and side substrate transport openings 260A, 260B, 270A1-270A6, 270B1-270B6 shared by. In one aspect, when the counterweight 247 is active, articulation of the arm includes moving the counterweight 247 in direction 296 in dependence on extension of the substrate transport arm 250 .

In one aspect, as described above, the axes 270A1X-270A6X, 270B1X-270B6X of substrate holder movement through the side substrate transport openings 270A1-270A6, 270B1-270B6 are substantially orthogonal to the axes passing through the at least one end. Another axis of substrate holder movement 260A, 260BX of the end substrate delivery openings 260A, 260B of the walls 250E1, 250E2. As also described above, some axes of motion (eg, 270A1X, 270A6X, 270B1X, 270B6X) are adjacent to end walls 210E1 , 210E2 of the substrate transport chamber. The joints of the substrate transport arm 250 driven by the drive sections 300A, 300B, 300C, 300D allow the substrate transport arm 250 to be provided with mobility for moving the end effectors 250E, 250E1, 250E2 about the axis of motion. Substantially orthogonal corner rotations defined by 260AX, 260BX and axes of motion 270A1X, 270A6X, 270B1X, 270B6X.

Referring to Figures 13A, 13B, an exemplary movement of the end effectors 250E, 250E1, 250E2 is shown as the substrate transport arm 250 is extended and retracted into each end opening 260A, 260B. Here, in the retracted configuration of the substrate transport arm 250, the shoulder axis SX is immovably mounted relative to the substrate transport chamber 210 and allows the drive shaft driving the transport arm and the shoulder Coaxially disposed with axis SX, the end effector is provided with a range of rotational motion 1300 greater than 270 degrees but less than 360 degrees relative to the wrist axis WX of the substrate transfer arm 250 (see FIG. 13B ). When the substrate transport arm 250 is extended such that end effector 250E extends through end opening 260B, the end effector 250E (and end effector 250E2) maintains the angle greater than 270 degrees but less than 360 degrees relative to the wrist axis. Rotational range of motion of WX 1300 (see FIG. 13C ). Similarly, when the substrate transport arm 250 is extended such that the end effector 250E extends through the end opening 260A, the end effector 250E (and end effector 250E2) maintains the relative angle greater than 270 degrees but less than 360 degrees. Rotational range of motion 1300 about the wrist axis WX (see FIG. 13D ). It will be appreciated that the full range of motion of the substrate delivery arm 250 can be used without limitation with the full range of motion of the individual joints including the end effectors 250E, 250E1, 250E2, throughout the reach and position of the arm motion. A bifurcated belt drive 400 is implemented for rapid exchange, as opposed to conventional substrate processing systems (eg, conventional substrate processing system 100 shown in FIG. 1 ), which have conventional linear The elongated substrate transport chamber and the use of long arm linkages, which results in reduced mobility of the end effector with the belt drive, and because the length of the transport chamber 114 is increased to be on each side of the transport chamber 114 To accommodate more than three processing modules (each processing module has a single substrate holding station), so additional arm linkages are added to its substrate transport arm 150, these additional linkages because the substrate transport The increased weight of the arm increases the torque on the substrate transport arm drive system. The increased weight of the substrate transport arm 150 and the misalignment between the joints coupling the arm linkages together cause an increase in the drop or sag of the substrate transport arm 150, which can cause the substrate transport arm 150 to lose weight. Reduced substrate placement and/or picking accuracy. While end openings 260A, 260B are illustrated on end wall 210E1 of substrate transport chamber 210, it should be understood that end effectors 250E, 250E1, 250E2 extend into end openings 260A on end wall 210E2, 260B (shown in Figure 7) is substantially similar.

14A-14C, when the substrate delivery arm 250 is extended into each side opening 270A3, 270A4, 270B3, 270B4 of the core processing module 200M2 (or 1:1 aspect ratio as shown in FIGS. 11 and 12 An exemplary mobility of the end effectors 250E, 250E1 , 250E2 is shown when the end openings 260A, 260B of the transport chamber 210 are transported. Here, when the substrate transport arm 250 is extended such that end effector 250E extends through side opening 270B3 or 270B4, end effector 250E (and end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to The range of rotational motion 1300 of the wrist axis WX (see FIG. 14B ). Similarly, when the substrate transport arm 250 is extended such that end effector 250E extends through side opening 270A3 or 270A4, end effector 250E (and end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to The range of rotational motion 1300 of the wrist axis WX (see FIG. 14C ). While side openings 270A3, 270B3 are illustrated in Figures 14B and 14C, it should be understood that the extension of end effectors 250E, 250E1, 250E2 into side openings 270A4, 270B4 is substantially similar.

Referring to FIGS. 15A-15C , when the substrate transport arm 250 is extended into the side openings 270A2, 270A5, 270B2, 270B5 (or as in FIGS. An exemplary mobility of end effectors 250E, 250E1, 250E2 is shown when end walls 210E1, 210E2 of end wall 210 are adjacent to each of side openings 270A2, 270A5, 270B2, 270B5). Here, when the substrate transfer arm 250 is extended such that end effector 250E extends through side opening 270B2, end effector 250E (and end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to the arm. Rotational range of motion 1300 of axis WX (see FIG. 15B ). Similarly, when the substrate transport arm 250 is extended such that end effector 250E extends through side opening 270A2, end effector 250E (and end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to the arm. Rotational range of motion 1300 of axis WX (see FIG. 15C ). While side openings 270A2, 270B2 are illustrated in Figures 15B and 15C, it should be understood that the extension of end effectors 250E, 250E1, 250E2 into side openings 270A5, 270B5 is substantially similar.

Referring to FIGS. 16A-16C , when the substrate transport arm 250 is extended into the side openings 270A1 , 270A6 adjacent to the end walls 210E1 , 210E2 of the transport chamber 210 having an aspect ratio of length L to width W of 3:1, An exemplary mobility of end effectors 250E, 250E1 , 250E2 is shown for each of 270B1 , 270B6 . Here, when the substrate transfer arm 250 is extended such that end effector 250E extends through side opening 270B1, end effector 250E (and end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to the arm. Range of rotational movement 1300 of axis WX (see FIG. 16B ). Similarly, when the substrate transport arm 250 is extended such that end effector 250E extends through side opening 270A1, end effector 250E (and end effector 250E2) remains greater than 270 degrees but less than 360 degrees relative to the arm. Rotational range of motion 1300 of axis WX (see FIG. 16C ). While side openings 270A1 , 270B1 are illustrated in FIGS. 16B and 16C , it should be understood that the extension of end effectors 250E , 250E1 , 250E2 into side openings 270A6 , 270B6 is substantially similar.

While FIGS. 13A-16C have been described with reference to a substrate transport arm 250 comprising one or more end effectors 250E, 250E2, it should be appreciated that the range of motion 1300 of the plurality of substrate holders 250EH of the end effector 250E2 The system is substantially similar to that described above. It will also be appreciated that aspects of the disclosed embodiments provide substantially unrestricted mobility of the substrate transport arm 250, including a range of motion 1300 of the end effectors 250E, 250E1, 250E2, which imparts the Ability of Substrate Transport Arms to Reach Proximity to Substantially Orthogonal Corners Defined by Substantially Orthogonal Axes of Motion 270A1X-270A6X, 270B1X-270B6X, and 260AX, 260BX, Whether or Not Adjacent to the Substrate Transport Chamber 210 The end walls 210E1, 210E2. In one aspect, the range of motion 1300 of the end effectors 250E, 250E1, 250E2 is stationary or fixed relative to the substrate transport chamber 210 at the shoulder axis SX, the drive sections 300A, Drive spindles 300B, 300C, 300D and the shoulder axis SX and/or drive belt drives that drive rotation of the substrate transport arm 250 linkage (e.g., forearm 250FA and end effectors 250E, 250E1, 250E2) provide A coaxial belt drive 400 (FIG. 4) is provided where the driven belt drive provides tension on either side of the pulleys 410, 411 regardless of the direction of pulley rotation (e.g., this improves the substrate transport Rigidity of the arm 250). In one aspect, rotation of the end effectors 250E, 250E1, 250E2 to compensate for rotation of the upper arm 250UA and forearm 250FA drive shafts (e.g., drive shafts 280A, 280AS) is used to implement extension of the substrate transfer arm 250. (Whilst keeping the end effectors 250E, 250E1, 250E2 in a predetermined direction (e.g., along respective axes of motion 270A1X-270A6X, 270B1X-270B6X, 260AX, 260BX), the end effectors 250E, 250E1, 250E2 The range of motion 1300 may exceed the axis 270A1X-270A6X, 270B1X-270B6X, 260AX, 260BX for extending the end effectors 250E, 250E1, 250E2 along the respective axes of motion through the openings 270A1-270A6, 270B1-270B6, 260A, 260B range of motion (eg, adjacent to one of the end walls 210E1, 210E2 or anywhere between the end walls 210E1, 210E2).

According to one or more aspects of the disclosed embodiments, a substrate processing apparatus includes:

a linearly elongated substantially hexahedron-shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron substantially orthogonal to the linearly elongated sides; The at least one end wall has an end substrate delivery opening, at least one of the linearly elongated sides has a linear array of side substrate delivery openings, each of the end and side substrate delivery openings is arranged to transporting a substrate therethrough into and out of the substrate transport chamber;

a plurality of processing modules, which are arranged linearly along at least one of the linear elongated sides and respectively communicate with the substrate delivery chamber through the corresponding side substrate delivery openings; and

a substrate transport arm, which is pivotally mounted in the substrate transport chamber such that the pivot axis of the substrate transport arm is fixedly mounted relative to the substrate transport chamber, the substrate transport arm has three linkages Rod - a three-joint SCARA type in which one of the links is an end-effector with at least one substrate holder articulated to hold the at least one substrate holder the substrate is transported into and out of the substrate transport chamber through the end and side substrate transport openings such that the end effector is common to each of the end and side substrate transport openings;

Wherein the hexahedron has a side length-to-width aspect ratio that is large and the width is compact relative to the footprint of the substrate transport arm.

According to one or more aspects of the disclosed embodiments, the aspect ratio is greater than 2:1, and for a predetermined maximum reach of the substrate transport arm, the The footprint is compact.

According to one or more aspects of the disclosed embodiments, the aspect ratio is about 3:1, and for a predetermined maximum reach of the substrate transport arm, the footprint of the substrate transport arm is Compact.

In accordance with one or more aspects of the disclosed embodiment, the end wall is configured to accept two side-by-side load-lock load locks positioned substantially adjacent to each other at a common height along the sides and facing the end wall together. Chamber or other process module dimensions.

According to one or more aspects of the disclosed embodiments, the SCARA arm has three degrees of freedom and links of different lengths, and the pivot axis defines a shoulder joint of the SCARA arm.

According to one or more aspects of the disclosed embodiments, the linear array of process modules provides at least six process module substrate holding stations distributed along the at least one linear elongated side in a substantially identical height, and each of the substrate holding stations is accessed through a corresponding side transport opening with the common end effector of the substrate transport arm.

According to one or more aspects of the disclosed embodiments, it includes at least one load lock or other processing module in communication with the substrate transfer chamber through the end substrate transfer opening.

According to one or more aspects of the disclosed embodiments, the other of the linearly elongated sides opposite the at least one linearly elongated side of the substrate transport chamber has at least one other side substrate a transport opening, and the substrate transport arm is configured to transport the substrate held by the at least one substrate holder through the end substrate transport opening, the side substrate transport opening, and the other side substrate openings are transported into and out of the substrate transport chamber such that the end effector is the end substrate respectively disposed on the end wall, the linear elongated side, and the opposing linear elongated side of the substrate transport chamber Each of the delivery opening, the side substrate delivery opening, and the other side substrate delivery opening are common.

According to one or more aspects of the disclosed embodiments, the opposite linearly elongated side of the substrate transfer chamber has more than one substrate transfer opening on the other side that is positioned along the opposite side arranged in a linear array, and wherein the end effector is common to each of the other side substrate delivery openings.

According to one or more aspects of the disclosed embodiments, it includes a drive section coupled to the substrate transfer chamber and having a drive spindle comprising a coaxial drive shaft that is driven by Operatively coupled to the substrate transport arm and defining at least two degrees of freedom, articulation of the substrate transport arm is effected, and the drive spindle is positioned such that its axis of rotation and the pivot axis are substantially coincident.

In accordance with one or more aspects of the disclosed embodiment, the substrate transport arm has a counterweight disposed on the substrate transport arm to extend from the pivot axis between one and the base. The direction of extension of the material transport arm is substantially opposite to the direction of extension, and has a shape and weight defined according to the balance of the material transport arm lowering moment on the drive spindle.

According to one or more aspects of the disclosed embodiment, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the counterweight Form factor and weight are further defined in terms of what can fit within the compact footprint of the substrate transfer arm.

According to one or more aspects of the disclosed embodiments, the at least one substrate holder of the end effector comprises more than one substrate holder disposed on the end effector and arranged to The end effector is caused to extend or retract the more than one substrate holder substantially simultaneously through more than one of the side substrate transport openings arranged in a linear array with a common end effector motion.

According to one or more aspects of the disclosed embodiments, the end effector is a first end effector and the substrate transfer arm has a second end effector attached to the first end effector a common forearm of the substrate transport arm such that the first and the second end effectors pivot about a common axis of rotation relative to the forearm, wherein the second end effector is the end substrate transport common to each of the opening and the side substrate delivery opening.

According to one or more aspects of the disclosed embodiment, the first and the second end effectors provide a rapid exchange common to each of the end substrate transfer openings and side substrate transfer openings The end effector delivers an arm to the substrate.

According to one or more aspects of the disclosed embodiments, the linearly elongated sides have selectively variable lengths, wherein the sides of the substrate transport chamber are selectable between different lengths and define A selectively alterable configuration of the substrate transport chamber.

According to one or more aspects of the disclosed embodiments, the selectively alterable configuration of the substrate transport chamber can vary in the side length-to-width aspect ratio from a large aspect ratio to 1 : 1 aspect ratio for selection, and wherein the substrate transport arm is common to each selectable form of the substrate transport chamber.

According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm and has a counterweight, which is arranged on the substrate transport arm to extend from the pivot axis in a direction substantially opposite to the direction in which the substrate transport arm extends and has a substrate transport arm descending from the drive shaft The balance of moment and shape and weight can be defined in terms of the compact footprint that can fit within the substrate transfer arm.

According to one or more aspects of the disclosed embodiment, the counterweight is fixedly mounted to the frame of the substrate transfer arm at a fixed position relative to the pivot axis.

In accordance with one or more aspects of the disclosed embodiment, the counterweight is movably mounted to the frame of the substrate transport arm for different weights disposed on the frame toward and away from the pivot axis. Location.

In accordance with one or more aspects of the disclosed embodiment, the counterweight is movably mounted to the frame of the substrate transport arm for movement relative to the frame away from and toward the pivot axis to augment The substrate conveys the extension and contraction of the arm.

According to one or more aspects of the disclosed embodiment, the counterweight is moved relative to the substrate transport arm frame by at least one drive shaft of a drive section operatively coupled to the The substrate transport arm performs the articulation of the substrate transport arm.

According to one or more aspects of the disclosed embodiment, the at least one drive shaft effects movement of the counterweight away from and toward the pivot axis and extension and retraction of the substrate transport arm such that the at least one drive shaft The shaft is a common drive shaft for the movement of the counterweight and the extension and retraction of the substrate transport arm.

According to one or more aspects of the disclosed embodiment, the weight has a weight section that can be selected from several different weight sections that are interchangeable and the selection is based on the substrate transport chamber of the aspect ratio.

According to one or more aspects of the disclosed embodiments, the substrate transport arm includes a bifurcated belt drive system that implements articulation of the substrate transport arm.

According to one or more aspects of the disclosed embodiments, the substrate transport arm is a three degrees of freedom transport arm.

According to one or more aspects of the disclosed embodiments, a substrate handling device includes:

A linearly elongated substantially hexahedron-shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron having an end substrate transport opening, the hexahedron At least one of the linearly elongated sides of has a linear array of side substrate transport openings, each of the end portions and the side substrate transport openings being arranged to allow a substrate to be transported in and out of the substrate therethrough delivery room;

a drive section coupled to the substrate transport chamber and having a drive spindle comprising coaxial drive shafts defining at least two degrees of freedom of rotation about a common axis; and

a substrate transport arm pivotally mounted within the substrate transport chamber such that the pivot axis of the substrate transport arm is immovably mounted relative to the substrate transport chamber and is coupled to the drive spindle common axes substantially coincident, the substrate transport arm has a three-link-three-joint SCARA configuration in which one link is an end effector with a substrate holder operatively coupled to the drive hub Shaft such that the substrate transport arm is articulated with the at least two degrees of freedom implemented by the coaxial drive shafts for passing the substrate on the substrate holder through the ends and side substrate transport openings for transporting in and out of the substrate transport chamber;

wherein the substrate transport arm has a counterweight disposed on the substrate transport arm to extend from the common axis of the drive spindles in a direction substantially opposite to the direction in which the substrate transport arm extends and have a shape and weight defined by the balance of substrate transport arm lowering moments on the drive spindle.

According to one or more aspects of the disclosed embodiment, one of the linear array of side substrate transport openings is disposed at the other end opposite the at least one end wall of the hexahedron-shaped substrate transport chamber. Adjacent side substrate delivery openings are oriented such that an axis corresponding to movement of the substrate holder through the side substrate delivery opening adjacent the opposite end and the end substrate delivery opening through the at least one end wall The other axis of motion of the substrate holder is substantially orthogonal.

According to one or more aspects of the disclosed embodiments, the substrate transport arm is articulated for the substrate on the substrate holder through the end and side substrate transport openings Transporting into and out of the substrate transport chamber such that the end effector is common to each of the end and side substrate transport openings.

According to one or more aspects of the disclosed embodiments, each of the side substrate transport openings has a respective axis of substrate holder movement through each side substrate transport opening, the linear array Each of the substrate movement axes of the side substrate delivery openings extends substantially parallel to each other through each substrate delivery opening, respectively.

According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the hexahedron has a side The aspect ratio of length to width, which is a large aspect ratio, and the width is compact relative to the footprint of the substrate transport arm.

According to one or more aspects of the disclosed embodiment, the at least one end wall of the hexahedron is substantially orthogonal to the rectilinear elongated sides of the hexahedron.

According to one or more aspects of the disclosed embodiments, the substrate transport arm includes a bifurcated belt drive system that implements articulation of the substrate transport arm.

According to one or more aspects of the disclosed embodiments, the coaxial drive shafts provide the substrate transport arm with three degrees of freedom.

According to one or more aspects of the disclosed embodiments, a method includes:

providing a linearly elongated substantially hexahedron-shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron substantially orthogonal to the linearly elongated sides the at least one end wall has an end substrate delivery opening, at least one of the linear elongated sides has a linear array of side substrate delivery openings, each of the end and side substrate delivery openings is arranged to allow a substrate to be transported into and out of the substrate transport chamber through it;

providing a plurality of processing modules, which are arranged linearly along at least one of the linear elongated sides and respectively communicate with the substrate transport chamber through the corresponding side substrate transport openings;

A substrate transport arm is provided pivotally mounted within the substrate transport chamber such that the pivot axis of the substrate transport arm is fixedly mounted relative to the substrate transport chamber, the substrate transport arm having three Links - a three-joint SCARA type in which one link is an end effector with at least one substrate holder; and

articulating the substrate transport arm for transporting the substrate held by the at least one substrate holder into and out of the substrate transport chamber through the end and side substrate transport openings such that the end effector is the common to each of the end and side substrate delivery openings;

Wherein the hexahedron has a side length-to-width aspect ratio that is large and the width is compact relative to the footprint of the substrate transport arm.

According to one or more aspects of the disclosed embodiments, the aspect ratio is greater than 2:1, and for a predetermined maximum reach of the substrate transport arm, the The footprint is compact.

According to one or more aspects of the disclosed embodiments, the aspect ratio is about 3:1, and for a predetermined maximum reach of the substrate transport arm, the footprint of the substrate transport arm is Compact.

In accordance with one or more aspects of the disclosed embodiment, the end wall is configured to accept two side-by-side load locks positioned substantially adjacent to each other at a common height along the sides and facing the end wall together. Chamber or other process module dimensions.

According to one or more aspects of the disclosed embodiment, further comprising providing the SCARA arm with three degrees of freedom and links of different lengths, and the pivot axis defining the shoulder joint of the SCARA arm.

According to one or more aspects of the disclosed embodiments, the linear array of process modules provides at least six process module substrate holding stations distributed along the at least one linear elongated side in a substantially identical Highly, the method further includes entering and exiting each of the substrate holding stations with the common end effector of the substrate transport arm through corresponding side transport openings.

According to one or more aspects of the disclosed embodiments, at least one load lock or other processing module communicates with the substrate transfer chamber through the end substrate transfer opening.

According to one or more aspects of the disclosed embodiments, the other of the linearly elongated sides opposite the at least one linearly elongated side of the substrate transport chamber has at least one other side substrate the transfer opening, and the method further comprises passing the substrate held by the at least one substrate holder through the end substrate transfer opening, the side substrate transfer opening, and the other side substrate with the substrate transfer arm The substrate transport opening is transported into and out of the substrate transport chamber, so that the end effector is respectively disposed on the end wall, the linear elongated side and the opposite linear elongated side of the substrate transport chamber. Each of the substrate delivery opening, the side substrate delivery opening, and the other side substrate delivery opening are common.

According to one or more aspects of the disclosed embodiments, the opposite linearly elongated side of the substrate transfer chamber has more than one substrate transfer opening on the other side that is positioned along the opposite side arranged in a linear array, and wherein the end effector is common to each of the other side substrate delivery openings.

According to one or more aspects of the disclosed embodiments, a drive section is coupled to the substrate transport chamber and has a drive spindle comprising coaxial drive shafts operatively coupled to the substrate transport arm and defining at least two degrees of freedom, the method further comprising articulating the substrate transport arm with the drive section, wherein the drive spindle is configured such that its axis of rotation and the The pivot axes are substantially coincident.

According to one or more aspects of the disclosed embodiments, further comprising providing the substrate transport arm with a counterweight disposed on the substrate transport arm to extend from the pivot axis in a In a direction substantially opposite to the direction of extension of the substrate transport arm and having a shape and weight defined by a balance of substrate transport arm lowering moments on the drive spindle.

According to one or more aspects of the disclosed embodiment, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the counterweight Form factor and weight are further defined in terms of what can fit within the compact footprint of the substrate transfer arm.

According to one or more aspects of the disclosed embodiments, the at least one substrate holder of the end effector comprises more than one substrate holder disposed on the end effector, the method further comprising extending or contracting the end effector such that the more than one substrate holders extend or contract substantially simultaneously in a common end effector motion across more than one of the side substrates arranged in a linear array Shipping opening.

According to one or more aspects of the disclosed embodiments, the end effector is a first end effector and the substrate transfer arm has a second end effector attached to the first end effector a common forearm of the substrate transport arm, the method further comprising pivoting the first and the second end effectors relative to the forearm about a common axis of rotation, wherein the second end effector is the end effector common to each of the top substrate delivery opening and the side substrate delivery openings.

According to one or more aspects of the disclosed embodiment, the first and the second end effectors provide a rapid exchange common to each of the end substrate transfer openings and side substrate transfer openings The end effector delivers an arm to the substrate.

According to one or more aspects of the disclosed embodiments, the linearly elongated sides have selectively variable lengths, wherein the method further comprises selecting the substrate transport chamber from sides having different lengths Sides defining a selectively alterable configuration of the substrate transport chamber.

According to one or more aspects of the disclosed embodiments, the selectively alterable configuration of the substrate transport chamber can vary in the side length-to-width aspect ratio from a large aspect ratio to 1 : 1 aspect ratio for selection, and wherein the substrate transport arm is common to each selectable form of the substrate transport chamber.

According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, the method further comprising providing the substrate transfer arm a counterweight disposed on the substrate transfer arm to extend from the common axis of the pivot shafts in a direction substantially opposite to the direction in which the substrate transfer arm extends and having a The balance of the substrate transport arm lowering moment on the pivot axis and the defined form and weight according to the compact footprint that can fit within the substrate transport arm.

According to one or more aspects of the disclosed embodiment, the counterweight is fixedly mounted to the frame of the substrate transfer arm at a fixed position relative to the pivot axis.

According to one or more aspects of the disclosed embodiment, further comprising moving the weight relative to the frame of the substrate transport arm such that the weight is disposed on the frame toward and away from the Different positions of the pivot axis.

According to one or more aspects of the disclosed embodiment, further comprising moving the weight relative to the frame of the substrate transport arm such that the weight moves away from and toward the pivot axis relative to the frame , to augment the extension and contraction of the substrate delivery arm.

According to one or more aspects of the disclosed embodiment, the counterweight is moved relative to the substrate transport arm frame by at least one drive shaft of a drive section operatively coupled to the The substrate transport arm performs the articulation of the substrate transport arm.

According to one or more aspects of the disclosed embodiment, the at least one drive shaft effects movement of the counterweight away from and toward the pivot axis and extension and retraction of the substrate transport arm such that the at least one drive shaft The shaft is a common drive shaft for the movement of the counterweight and the extension and retraction of the substrate transport arm.

According to one or more aspects of the disclosed embodiment, the method further includes selecting a weight portion of the weight member from a plurality of interchangeable different weight portions and the selection is delivered according to the substrate The aspect ratio of the chamber.

According to one or more aspects of the disclosed embodiments, further comprising implementing articulation of the substrate transport arm with a bifurcated belt drive system of the substrate transport arm.

According to one or more aspects of the disclosed embodiments, the substrate transport arm is a three degrees of freedom transport arm.

According to one or more aspects of the disclosed embodiments, a method includes:

There is provided a linearly elongated substantially hexahedron-shaped substrate transfer chamber having rectilinearly elongated sides of the hexahedron and at least one end wall of the hexahedron having an end substrate transfer opening, the hexahedral At least one of the linearly elongated sides of the body has a linear array of side substrate transport openings, each of the end portions and the side substrate transport openings being arranged to allow a substrate to be transported in and out of the substrate therethrough material delivery room;

providing a drive section coupled to the substrate transport chamber and having a drive spindle comprising coaxial drive shafts defining at least two degrees of freedom of rotation about a common axis;

A substrate transport arm is provided pivotally mounted within the substrate transport chamber such that the pivot axis of the substrate transport arm is immovably mounted relative to the substrate transport chamber in relation to the drive spindle the common axes are substantially coincident, the substrate delivery arm has a three-link-three-joint SCARA configuration, one of the links being an end effector with a substrate holder; and

articulating the substrate transport arm with the at least two degrees of freedom implemented by the coaxial drive shafts of the drive spindle for passing the substrate on the substrate holder through the ends and side substrate transport openings for transporting in and out of the substrate transport chamber;

wherein the substrate transport arm has a counterweight disposed on the substrate transport arm to extend from the common axis of the drive spindles in a direction substantially opposite to the direction in which the substrate transport arm extends on, and have a shape and weight defined by the balance of substrate transport arm lowering moments on the drive spindle.

According to one or more aspects of the disclosed embodiment, one of the linear array of side substrate transport openings is disposed at the other end opposite the at least one end wall of the hexahedron-shaped substrate transport chamber. Adjacent side substrate delivery openings are oriented such that an axis corresponding to movement of the substrate holder through the side substrate delivery opening adjacent the opposite end and the end substrate delivery opening through the at least one end wall The other axis of motion of the substrate holder is substantially orthogonal.

According to one or more aspects of the disclosed embodiments, the substrate transport arm is articulated for the substrate on the substrate holder through the end and side substrate transport openings Transporting into and out of the substrate transport chamber such that the end effector is common to each of the end and side substrate transport openings.

According to one or more aspects of the disclosed embodiments, each of the side substrate transport openings has a respective axis of substrate holder movement through each side substrate transport opening, the linear array Each of the substrate movement axes of the side substrate delivery openings extends substantially parallel to each other through each substrate delivery opening, respectively.

According to one or more aspects of the disclosed embodiments, the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the hexahedron has a side The aspect ratio of length to width, which is a large aspect ratio, and the width is compact relative to the footprint of the substrate transport arm.

According to one or more aspects of the disclosed embodiment, the at least one end wall of the hexahedron is substantially orthogonal to the rectilinear elongated sides of the hexahedron.

One or more aspects according to the disclosed embodiments further include implementing articulation of the substrate transport arm with a bifurcated belt drive system of the substrate transport arm.

According to one or more aspects of the disclosed embodiments, the substrate transport arm is a three degrees of freedom transport arm.

It should be understood that the above description is only an example of aspects of the disclosed embodiment. Various substitutions and modifications can be made by those skilled in the art without departing from the disclosed embodiments. Accordingly, such aspects of the disclosed embodiments are intended to embrace all such alternatives, modifications and variations that fall within the scope of the following claims of claim. In addition, the fact that different features are recited in mutually different dependent claims or independent claims does not mean that the combination of these features cannot be advantageously used, and such combinations still remain within the scope of the various aspects of the present invention.

100: Traditional processing tools 110: Load lock chamber 112: Load lock chamber 114: Delivery room 120: Processing module 122: Processing module 124: Processing module 126: Processing module 128: Processing module 130: Processing module 150: Substrate delivery arm 152: Upper arm link 154: Forearm link 156: End effector 158: End effector 100': Traditional Processing Tools 200: Substrate handling tools 210: Delivery room L: Length W: width 201: front end 202: Backend 299:Controller 290:Equipment front-end module 292A: Loading port 292B: Load port 292C: Load port LL1: Load lock chamber LL2: Load lock chamber 291: Delivery room C: Substrate cassette/carrier S: Substrate 210S1: straight slender sides 210S2: straight slender sides 210E1: end wall 210E2: end wall 250: Substrate delivery arm FP: Footprint 270A1: Side substrate delivery opening 270A2: Side substrate delivery opening 270A3: Side substrate delivery opening 270A4: Side substrate delivery opening 270A5: Side substrate delivery opening 270A6: Side substrate delivery opening 270B1: Side substrate delivery opening 270B2: Side substrate delivery opening 270B3: Side substrate delivery opening 270B4: Side substrate delivery opening 270B5: Side substrate delivery opening 270B6: Side substrate delivery opening 260A': opening 260B': opening 270A1X: axis 270A2X: axis 270A3X: axis 270A4X: axis 270A5X: axis 270A6X: axis 270B1X: axis 270B2X: axis 270B3X: axis 270B4X: axis 270B5X: axis 270B6X: axis 260AX: axis 260BX: axis PM: processing module TP1: substrate transport plane TP2: substrate transport plane 270A: opening 270B: opening TPM: Tandem Processing Module PMH1: Substrate holding station PMH2: Substrate holding station SPM: Single Processing Module 250A: Substrate transfer arm 250B: Substrate delivery arm PMH: Substrate Holding Station 245: Transport equipment 200M1: Front-end module 292A: Load lock port 292B: Load lock port 292C: Load lock port 200M2: core module 200M3: insert module 200M4: insert module 200M5: insert module 200M6: insert module 200M7: insert module 200M8: insert module 200F2: frame 200F3: frame 200F4: frame 200F5: frame 200F6: frame 200F7: frame 200F8: frame 200F: frame 210M3S1: side 210M3S2: side 210M3E1: end wall 210M5E: end wall 210M6S1: side 210MS2: side L1: Length L2: Length 210M6E1: end wall 210M4E: end wall 210M8S1: side 210M82: side 210M7E: end wall L3: Length 210M8E1: end wall 200M2E1: first end 200M2E2: second end SX: Pivot axis 250EH: Substrate Holder PMH1: Substrate holding station PMH2: Substrate holding station WX: wrist axis 300A: drive section 300B: drive section 300C: drive section 300D: drive section 400: drive transmission 410: Shoulder Pulley 411: Elbow Pulley EX: Elbow axis 400A: drive belt 400B: drive belt AL1: first length AL2: second length AL3: third length 250UAE1: first end 250UAE1: second end 380S: drive shaft 380AS: drive shaft 380BS: drive shaft 388: drive shaft CNX: Connect Contact 300: frame 200F: frame 370: Z-axis driver 382: Rotate drive section 300FI: internal 380: Harmony drive motor 380A: Harmony drive motor 380B: Harmony drive motor 376: ferrofluid seals 377: ferrofluid seals T: turning motion R: Stretching 381: shell 380': First drive motor 380A’: Second drive motor 380S': Stator 380R': rotor 380AS': Stator 380AR': rotor 380ACS: Container Closures 380CS: Container Closures 368A: Encoder/Sensor 368B: Encoder/Sensor 380B': motor 380BS': Stator 380BR': rotor 380BCS: Container Closures 388CS: Container Closures 388R: rotor 296: direction LAX: Longitudinal axis 247PA: Pivot 246: Balance counterweight 400A': belt 400B': belt 412: Pulley 247: Balance counterweight 247A: Balance counterweight 247B: Balance counterweight 247C: Balance counterweight

The foregoing aspects and other features of the disclosed embodiments are described hereinafter with reference to the accompanying drawings, in which:

[FIGS. 1 and 1A] are schematic diagrams of prior art substrate processing tools with different types;

[ FIG. 2A ] is a schematic diagram of a substrate processing tool according to aspects of the disclosed embodiments;

[FIGS. 2B, 2C, 2D, 2E, 2F, 2G, 2H, and 2I] are schematic illustrations of portions of the substrate processing tool shown in FIG. 2A in accordance with aspects of the disclosed embodiments;

[FIGS. 3A-3D] are schematic diagrams of the driving section of the transport device of the substrate processing tool in FIGS. 2A-2E;

[ FIG. 4 ] is a schematic diagram of a portion of the substrate handling apparatus of the substrate processing tool shown in FIGS. 2A-2E in accordance with aspects of the disclosed embodiments;

[ FIG. 5 ] is a schematic diagram of the substrate processing tool shown in FIGS. 2A-2E according to aspects of the disclosed embodiments;

[ FIG. 6 ] is a schematic diagram of the substrate processing tool shown in FIGS. 2A-2E according to aspects of the disclosed embodiments;

[Figures 7, 8, 9A, 9B, 10, 11, 12, and 12A] are shown in Figures 2A-2E configured within different substrate processing tool types according to aspects of the disclosed embodiments Schematic diagram of the substrate handling tool;

[FIGS. 13A, 13B, 13C, and 13D] are schematic diagrams illustrating the operation of a substrate processing tool according to aspects of the disclosed embodiments;

[FIGS. 14A, 14B, 14C] are schematic diagrams illustrating the operation of a substrate processing tool according to aspects of the disclosed embodiments;

[FIGS. 15A, 15B, 15C] are schematic diagrams illustrating the operation of a substrate processing tool according to aspects of the disclosed embodiments;

[FIGS. 16A, 16B, 16C] are schematic diagrams illustrating the operation of a substrate processing tool according to aspects of the disclosed embodiments; and

[ FIG. 17 ] is an exemplary flow chart according to aspects of the disclosed embodiments.

200: Substrate handling tools

200F: frame

200SL: Seals

201: front end

202: Backend

210: Delivery room

210E1, 210E2: end wall

210S1, 210S2: side

245: Transport equipment

250: Substrate delivery arm

250E: End effector

250EH: Substrate Holder

250FA: Forearm

250UA: upper arm

260A, 260B: End substrate delivery openings

270A1~270A6, 270B1~270B6: side substrate delivery opening

290:Equipment front-end module

291: Delivery room

292A~292C: loading port

299:Controller

300A: drive section

AL1: first length

AL2: second length

AL3: third length

BS: buffer station

C: Substrate cassette/carrier

DD: Substrate holding reference datum

EX: Elbow axis

FP: Footprint

LL1, LL2: load lock chamber

PM: processing module

PMH, PMH1, PMH2: substrate holding station

S: Substrate

SPM: processing module

SX: Pivot axis

TPM: Tandem Processing Module

W, W1: width

WX: wrist axis

L: Length

Claims (16)

A substrate processing apparatus comprising: A linearly elongated substantially hexahedron-shaped substrate transport chamber having linearly elongated sides of the hexahedron and at least one end wall of the hexahedron having an end substrate transport opening, the hexahedron At least one of the linearly elongated sides of has a linear array of side substrate transport openings, each of the end portions and the side substrate transport openings being arranged to allow a substrate to be transported in and out of the substrate therethrough delivery room; a drive section coupled to the substrate transport chamber and having a drive spindle comprising coaxial drive shafts defining at least two degrees of freedom of rotation about a common axis; and a substrate transport arm pivotally mounted within the substrate transport chamber such that the pivot axis of the substrate transport arm is immovably mounted relative to the substrate transport chamber and is coupled to the drive spindle common axes substantially coincident, the substrate transport arm has a three-link-three-joint SCARA configuration in which one link is an end effector with a substrate holder operatively coupled to the drive hub Shaft such that the substrate transport arm is articulated with the at least two degrees of freedom implemented by the coaxial drive shafts for passing the substrate on the substrate holder through the ends and side substrate transport openings for transporting in and out of the substrate transport chamber; wherein the substrate transport arm has a counterweight disposed on the substrate transport arm to extend from the common axis of the drive spindles in a direction substantially opposite to the direction in which the substrate transport arm extends and have a shape and weight defined by the balance of substrate transport arm lowering moments on the drive spindle. The substrate processing apparatus according to claim 1, wherein one of the linear array of side substrate transport openings is disposed on a side adjacent to the other end opposite to the at least one end wall of the hexahedron-shaped substrate transport chamber The substrate delivery opening is oriented such that an axis corresponding to the movement of the substrate holder passing through the side substrate delivery opening adjacent the opposite end is held with the substrate holder passing through the end substrate delivery opening of the at least one end wall. The other axis of machine motion is substantially orthogonal. The substrate processing apparatus of claim 2, wherein the substrate transport arm is articulated for transporting the substrate on the substrate holder into and out of the substrate via the end and side substrate transport openings A substrate delivery chamber such that the end effector is common to each of the end substrate delivery openings and the side substrate delivery openings. The substrate processing apparatus of claim 3, wherein each of the side substrate delivery openings has a corresponding axis of movement of the substrate holder passing through each side substrate delivery opening, the linear array of side substrates Each of the substrate movement axes of the delivery openings extends substantially parallel to each other through each of the substrate delivery openings, respectively. The substrate processing apparatus of claim 1, wherein the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the hexahedron has a lateral length-to-width ratio Aspect ratio, which is a large aspect ratio, and the width is compact relative to the footprint of the substrate transport arm. The substrate processing apparatus according to claim 5, wherein the at least one end wall of the hexahedron is substantially orthogonal to the linear elongated side surfaces of the hexahedron. The substrate processing apparatus as claimed in claim 1, wherein the substrate conveying arm comprises a bifurcated belt drive system for performing articulation of the substrate conveying arm. The substrate processing apparatus according to claim 1, wherein the coaxial drive shafts provide the substrate transport arm with three degrees of freedom. A method of transporting a substrate, the method comprising: There is provided a linearly elongated substantially hexahedron-shaped substrate transfer chamber having rectilinearly elongated sides of the hexahedron and at least one end wall of the hexahedron having an end substrate transfer opening, the hexahedral At least one of the linearly elongated sides of the body has a linear array of side substrate transport openings, each of the end portions and the side substrate transport openings being arranged to allow a substrate to be transported in and out of the substrate therethrough material delivery room; providing a drive section coupled to the substrate transport chamber and having a drive spindle comprising coaxial drive shafts defining at least two degrees of freedom of rotation about a common axis; A substrate transport arm is provided pivotally mounted within the substrate transport chamber such that the pivot axis of the substrate transport arm is immovably mounted relative to the substrate transport chamber in relation to the drive spindle the common axes are substantially coincident, the substrate delivery arm has a three-link-three-joint SCARA configuration, one of the links being an end effector with a substrate holder; and articulating the substrate transport arm with the at least two degrees of freedom implemented by the coaxial drive shafts of the drive spindle for passing the substrate on the substrate holder through the ends and side substrate transport openings for transporting in and out of the substrate transport chamber; wherein the substrate transport arm has a counterweight disposed on the substrate transport arm to extend from the common axis of the drive spindles in a direction substantially opposite to the direction in which the substrate transport arm extends direction, and have a shape and weight defined by the balance of substrate transport arm lowering moments on the drive spindle. The method of claim 9, wherein one of the linear array of side substrate delivery openings is disposed adjacent to the other end of the hexahedron-shaped substrate delivery chamber opposite to the at least one end wall. The opening is oriented such that an axis corresponding to the movement of the substrate holder through the side substrate delivery opening adjacent the opposite end and the substrate holder movement through the end substrate delivery opening of the at least one end wall The other axis system is substantially orthogonal. The method of claim 10, wherein the substrate transport arm is articulated for transporting the substrate on the substrate holder into and out of the substrate transport chamber through the end and side substrate transport openings , such that the end effector is common to each of the end substrate delivery openings and the side substrate delivery openings. The method of claim 11, wherein each of the side substrate delivery openings has a corresponding axis of movement of the substrate holder through each side substrate delivery opening, the linear array of side substrate delivery openings The axes of motion of each of the substrate holders extend substantially parallel to each other through each of the substrate delivery openings, respectively. The method of claim 9, wherein the substrate transport arm has a compact footprint for a predetermined maximum reach of the substrate transport arm, and the hexahedron has a side length-to-width aspect ratio ratio, which is a large aspect ratio, and the width is compact relative to the footprint of the substrate transport arm. The method of claim 13, wherein the at least one end wall of the hexahedron is substantially orthogonal to the rectilinear elongated sides of the hexahedron. The method of claim 9, further comprising implementing articulation of the substrate transport arm with a forked belt drive system of the substrate transport arm. The method of claim 9, wherein the substrate delivery arm is a three-degree-of-freedom delivery arm.

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