TW202305916A - Processing device - Google Patents

Abstract

The invention provides a machining device, which can early find the bad condition that the rotation of a main shaft included in a machining unit (a cutting unit or a grinding unit) is hindered. A control unit for controlling a motor for rotating a main shaft includes a determination unit for determining the presence or absence of a defect in a machining unit on the basis of information obtained by rotating the main shaft at a predetermined rotational speed. As a result, it is possible to early find a malfunction that hinders the rotation of the main shaft included in the processing unit.

Description

Processing device

The present invention relates to a processing device for processing workpieces.

Chips of devices such as IC (Integrated Circuit) and LSI (Large Scale Integration) are indispensable components in various electronic devices such as mobile phones and personal computers.

Such a wafer is manufactured by, for example, using a cutting device to divide a workpiece such as a wafer on which a plurality of devices are formed on the front side into regions including devices (see, for example, Patent Document 1). This cutting device includes a cutting unit including, for example, a main shaft on which a cutting blade (processing tool) is mounted at a front end, and a motor that rotates the main shaft.

In addition, this cutting insert has an annular cutting edge (processing grindstone) in which abrasive grains are dispersed. In addition, the cutting device cuts and divides the workpiece by bringing the cutting edge of the cutting blade into contact with the workpiece while rotating the cutting blade mounted on the front end of the main shaft by the motor.

In addition, many workpieces used in the manufacture of wafers are thinned before being divided using a grinding device for the purpose of miniaturization and weight reduction of wafers. This grinding device includes a grinding unit having, for example, a main shaft on which a grinding wheel (grinding tool) is attached to a front end, and a motor that rotates the main shaft.

In addition, this grinding wheel has an annular wheel base and a plurality of grinding stones (processing grindstones) fixed to one surface of the wheel base. In addition, the grinding device makes the plurality of grinding stones contact the workpiece while the motor rotates the grinding wheel mounted on the front end of the main shaft, thereby grinding and thinning the workpiece. prior art literature patent documents

Patent Document 1: Japanese Patent Laid-Open No. 2010-129623

The problem to be solved by the invention

In processing devices such as cutting devices and grinding devices, if the processing (cutting or grinding) of the workpiece is performed at a low rotational speed of the processing tool (cutting blade or grinding wheel), the Material load (processing load) will increase.

In addition, in this case, there is a possibility that processing defects such as cracks (defects) and cracks are formed in the workpiece, and the quality of wafers manufactured by dividing the workpiece may be reduced.

In view of this point, an object of the present invention is to provide a machining device capable of early detection of a malfunction that inhibits rotation of a spindle included in a machining unit (cutting unit or grinding unit). means to solve problems

According to one aspect of the present invention, there is provided a processing device for processing a workpiece. The processing device includes: a processing unit having a main shaft on which a grinding stone is mounted at a front end; and a motor for rotating the main shaft; and a control unit. , to control the movement of the motor, The control unit includes a judging unit that judges whether there is a defect in the machining unit based on information obtained by rotating the spindle at a predetermined rotational speed set in advance.

In addition, it is preferable that in the present invention, a rotation speed measuring unit for measuring the rotation speed of the main shaft is further provided, and the determination unit calculates a value from the rotation speed of the main shaft measured by the rotation speed measurement unit. After the motor is activated to rotate the spindle until the rotation speed of the spindle reaches the specified rotation speed, it will determine whether there is a defect in the processing unit according to whether the required time exceeds the preset threshold. situation.

Alternatively, preferably, in the present invention, a load current value measuring unit is further provided, the aforementioned load current value measuring unit measures the load current value of the motor when the main shaft is rotated, and the determination unit responds to making the main shaft When constantly rotating at the specified rotation speed, it is determined whether there is a defect in the processing unit based on whether the load current value measured by the load current value measuring unit exceeds a preset threshold. Invention effect

In the present invention, the control unit that controls the motor that rotates the main shaft includes a determination unit that determines whether there is a defect in the machining unit based on information obtained by rotating the main shaft at a predetermined rotational speed set in advance. Thereby, in the present invention, it is possible to find a malfunction that hinders the rotation of the main shaft included in the machining unit (cutting unit or grinding unit) early.

form for carrying out the invention

Embodiments of the present invention will be described with reference to the attached drawings. Fig. 1 is a perspective view schematically showing an example (cutting device) of the processing device of the present invention. Furthermore, the X-axis direction (front-rear direction, machining feed direction) and the Y-axis direction (left-right direction, indexing feed direction) shown in FIG. 1 are directions perpendicular to each other on a horizontal plane, and the Z-axis direction ( Up-down direction) is a direction perpendicular to the X-axis direction and the Y-axis direction (vertical direction, cutting feed direction).

The cutting device 2 shown in FIG. 1 includes a base 4 on which various components can be mounted. A cover 6 covering the upper surface side of the base 4 is attached to the upper portion of the base 4 . A cutting unit (machining unit) 8 for cutting a workpiece 11 is housed inside the cover 6 . The cutting unit 8 has been connected to a cutting unit moving mechanism (not shown), and can move along the Y-axis direction and the Z-axis direction, for example. Furthermore, details about the cutting unit 8 will be described later.

Below the cutting unit 8, a work holder 10 holding a workpiece 11 is provided. The work holder 10 is connected to a work holder moving mechanism (not shown), and can move along the X-axis direction, for example. In addition, the work chuck 10 is connected to a rotation mechanism (not shown), and can rotate about a straight line substantially parallel to the Z-axis direction as a rotation axis.

A cassette table 12 is provided at a corner of the base 4 . A cassette 14 capable of accommodating a plurality of workpieces 11 is placed on the upper surface of the cassette table 12 . The cassette table 12 has been connected to a cassette table moving mechanism (not shown), and can move along the Z axis, for example. This cassette table moving mechanism adjusts the height of the cassette 14 placed on the cassette table 12 so that the workpiece 11 can be carried in and out appropriately.

A touch panel-type monitor (monitor) 16 as a user interface is provided on the side surface 6 a of the cover 6 . Furthermore, a warning lamp (pilot lamp) 18 is provided on the upper surface 6 b of the cover 6 . In addition, the above-mentioned constituent elements of the cutting device 2 are connected to a control unit (not shown in FIG. 1 ). This control unit has a central processing unit (CPU), and a memory device including a main memory device (volatile memory) and an auxiliary memory device (non-volatile memory), and can control the actions of the above-mentioned components of the cutting device 2 .

FIG. 2 is a partial sectional side view schematically showing a cutting unit (machining unit) 8 . The cutting unit 8 has a main shaft 20 that rotates about a straight line substantially parallel to the Y-axis direction as a rotation axis. The main shaft 20 is accommodated in a space inside a cylindrical housing 22 . An air supply path 22 a substantially parallel to the rotation axis of the spindle 20 is provided inside the casing 22 (inside the wall material).

The air supply path 22a is connected to an external air supply source (not shown) through the air supply port 22b. In addition, the air supply path 22a is connected to the radial air bearing portion (radial air bearing) 24 through the first supply path 22c, and is connected to the thrust air bearing portion (thrust air bearing) through the second supply path 22d. air bearing (thrust air bearing) 26.

By supplying high-pressure air from an air supply source to the radial air bearing portion 24 and the thrust air bearing portion 26 , the main shaft 20 can be kept in a floating state in the inner space of the housing 22 . For example, the radial air bearing unit 24 keeps the position of the main shaft 20 constant in the direction perpendicular to the rotation axis by spraying air in a direction perpendicular to the rotation axis toward the main shaft 20 .

On the other hand, the thrust air bearing part 26 sprays air in a direction parallel to the rotation axis of the main shaft 20 toward a disc-shaped thrust plate 20a provided on the main shaft 20, so that the main shaft 20 is positioned at The direction parallel to the axis of rotation remains constant. The high-speed rotating main shaft 20 can be stably supported by the radial air bearing 24 and the thrust air bearing 26 .

An opening 22 e is provided on one end (front end) side of the housing 22 . The spindle 20 is exposed from the housing 22 by inserting its one end (tip end) 20b into the opening 22e. That is, the front end portion 20b of the main shaft 20 protrudes outward from the opening portion 22e of the housing 22 . FIG. 3 is an exploded perspective view schematically showing the structure of the front end of the spindle 20 .

A mounting base 28 is disposed at the front end of the main shaft 20 . The mount 28 has a disc-shaped flange portion 30 and a cylindrical support shaft 32 protruding from the center of the front surface 30 a of the flange portion 30 . On the outer peripheral part of the flange part 30, the annular convex part 30b which protrudes from the front surface 30a is provided. The front end surface 30c of the convex part 30b is formed substantially parallel to the front surface 30a.

A mountain 32 a is formed on the outer peripheral surface of the support shaft 32 . Moreover, a recessed part 32b is formed in the center part of the front-end|tip surface of the support shaft 32. As shown in FIG. A ring-shaped cutting blade (processing tool) 34 for cutting the workpiece 11 can be attached to the support shaft 32 . The cutting insert 34 has an annular base 36 made of a metal material such as aluminum (Al), and an annular cutting edge (processing grindstone) 38 formed along the outer peripheral edge of the base 36 .

An opening 36a that penetrates the base 36 in the thickness direction so that the support shaft 32 can be inserted is provided at the center portion of the base 36 . Also, around the opening 36a of the base 36, an annular convex portion 36b protruding toward the front side along the thickness direction of the base 36 is provided. The cutting edge 38 is formed by, for example, fixing abrasive grains made of diamond or the like with a nickel plating layer. However, there is no limitation on the abrasive grains of the cutting edge 38 and the material of the bonding material, which can be appropriately selected according to the material of the workpiece 11 or the processing content.

An annular nut 40 for fixing the cutting blade 34 can be fastened to the tooth mountain 32 a of the support shaft 32 . A circular opening 40 a corresponding to the diameter of the support shaft 32 is formed at a central portion of the nut 40 . In this opening 40a, a tooth mountain corresponding to the tooth mountain 32a formed on the support shaft 32 is formed.

The cutting insert 34 is attached to the mount 28 so as to be inserted into the support shaft 32 through the opening 36 a of the base 36 . Furthermore, when the nut 40 is screwed and locked to the tooth ridge 32 a of the support shaft 32 , the cutting insert 34 is sandwiched between the front end surface 30 c of the flange portion 30 and the nut 40 . Thereby, the cutting insert 34 including the cutting edge (processing grindstone) 38 can be attached to the one end portion (front end portion) 20 b of the main shaft 20 .

As shown in FIG. 2 , a motor 42 that applies force for rotating the main shaft 20 is connected to the other end side of the main shaft 20 . The motor 42 includes a stator 44 fixed inside the casing 22 and a rotor 46 integrated with the main shaft 20 .

The spindle 20 then rotates in response to the magnetic force acting between the stator 44 and the rotor 46 . Furthermore, although the main shaft 20 and the rotor 46 are integrated here, the main shaft 20 and the rotor 46 formed separately may be connected.

Part of the air supplied to the radial air bearing portion 24 and the thrust air bearing portion 26 can pass through the gap between the front end portion 20b of the main shaft 20 and the housing 22 (part of the opening 22e) and be discharged to the outside of the housing 22. (spray). This air flow can seal the gap between the front end portion 20b of the main shaft 20 and the opening portion 22e of the case 22 (air seal).

Here, when a foreign matter is mixed into the air supplied to the radial air bearing portion 24 and the thrust air bearing portion 26 and/or the pressure of the air drops momentarily, the main shaft 20 may come into contact with the foreign matter and/or the housing 22 In the event of damage due to waiting. In addition, the main shaft 20 may be damaged due to misoperation during maintenance of the cutting unit 8 (for example, rotating the main shaft 20 without supplying air to the radial air bearing part 24 and the thrust air bearing part 26, etc.).

This damage is also known as spindle scratching and can impede the rotation of the spindle 20 . Also, when the motor 42 has deteriorated, the rotation of the main shaft 20 is hindered. In view of these points, the cutting device 2 includes a determination unit in the control unit, and the determination unit determines whether there is such a defect in the cutting unit 8 that hinders the rotation of the main shaft 20 .

4 and 5 are diagrams schematically showing components of the cutting device 2 for determining whether there is a defect in the cutting unit 8 that hinders the rotation of the main shaft 20 . The control unit 48 shown in FIGS. 4 and 5 can control the operation of the motor 42 housed in the casing 22 and rotate the cutting blade 34 installed at the front end of the main shaft 20 .

In addition, in the cutting device 2 shown in FIG. 4 , a rotation speed measuring unit 50 for measuring the rotation speed of the main shaft 20 is provided. The rotational speed of the spindle 20 measured by the rotational speed measuring unit 50 can be input to the control unit 48 at any time. Furthermore, the control unit 48 has a judging unit 48 a that uses information input from the rotation speed measuring unit 50 to judge whether there is a defect in the cutting unit 8 that hinders the rotation of the main shaft 20 .

The information used in the determination here is, for example, the rotational speed of the main shaft 20 measured by the rotational speed measuring unit 50 . Specifically, based on the rotational speed of the main shaft 20 measured by the rotational speed measuring unit 50, the determination unit 48a calculates the time period from when the motor 42 is operated to rotate the main shaft 20 until the rotational speed of the main shaft 20 reaches a predetermined rotational speed. time required. Then, the judging part 48 a judges whether there is a bad condition of the cutting unit 8 that hinders the rotation of the main shaft 20 according to whether the calculated required time exceeds a preset threshold. Furthermore, the threshold value can also be stored in the memory device of the control unit 48 in advance.

FIG. 6 is a graph schematically showing an example of changes over time in the rotational speed of the main shaft 20 measured by the rotational speed measuring unit 50 until the rotational speed of the main shaft 20 reaches a predetermined rotational speed V. FIG. When the rotational speed of the main shaft 20 measured by the rotational speed measuring unit 50 changes in the form of the dotted line A shown in FIG. 6 , the calculated required time does not exceed the threshold T1. In this case, the judging unit 48 a judges that there is no defect of the cutting unit 8 that hinders the rotation of the main shaft 20 .

On the other hand, when the rotational speed of the main shaft 20 measured by the rotational speed measuring unit 50 changes in the chain line B shown in FIG. 6 , the calculated required time exceeds the threshold T1. In this case, the judging unit 48 a judges that there is a defect in the cutting unit 8 that hinders the rotation of the main shaft 20 . In addition, in this case, the control unit 48 controls the monitor 16 and/or the warning light 18 and notifies the operator of the cutting device 2 of the failure of the cutting unit 8 .

Further, in the cutting device 2 shown in FIG. 5 , a load current value measuring unit 52 for measuring a load current value of the motor 42 that rotates the spindle 20 is provided. The load current value of the motor 42 measured by the load current value measuring unit 52 can be input to the control unit 48 at any time. Furthermore, the control unit 48 has a judging unit 48b that uses the information input from the load current value measuring unit 52 to judge whether there is a defect in the cutting unit 8 that hinders the rotation of the main shaft 20 .

The information used for this determination is, for example, measured by the load current value measuring unit 52 when the spindle 20 is rotated at a predetermined rotational speed while the workpiece 11 is not being cut by the cutting unit 8. The load current value of the motor 42. Specifically, the judging unit 48b judges whether there is a bad condition of the cutting unit 8 that hinders the rotation of the spindle 20 according to whether the load current value exceeds a preset threshold. Furthermore, the threshold value can also be stored in the memory device of the control unit 48 in advance.

FIG. 7 is a graph schematically showing an example of the change with time of the load current value of the motor 42 measured by the load current value measuring unit 52 until the main shaft 20 rotates at a constant rotation speed at a predetermined speed. When the load current value of the motor 42 measured by the load current value measuring unit 52 changes in the form of the dotted line C shown in FIG. Threshold T2 will not be exceeded. In this case, the judging unit 48 b judges that there is no defect of the cutting unit 8 that hinders the rotation of the main shaft 20 .

On the other hand, when the load current value of the motor 42 measured by the load current value measuring unit 52 changes in the form of a dotted chain line D shown in FIG. The load current value of 42 will exceed the threshold T2. In this case, the judging unit 48b judges that there is a defect in the cutting unit 8 that hinders the rotation of the main shaft 20 . In addition, in this case, the control unit 48 controls the monitor 16 and/or the warning light 18 and notifies the operator of the cutting device 2 of the failure of the cutting unit 8 .

In the above-mentioned cutting device 2, the control unit 48 that controls the motor 42 that rotates the main shaft 20 includes a determination part 48a or a determination part 48b. 20 rotates the obtained information to determine whether there is a bad condition of the cutting unit 8. Thereby, in the above-mentioned cutting device 2 , it is possible to find a defect that prevents the rotation of the main shaft 20 included in the cutting unit 8 early.

In addition, the above-mentioned cutting device 2 is an example of the processing device of the present invention, and the processing device of the present invention is not limited to the cutting device 2 . For example, the processing unit of the processing device of the present invention may also be a cutting unit that has a main shaft and a motor that rotates the main shaft, and the front end of the main shaft is provided with a washer-type cutting blade (only by a ring-shaped cutting blade). Blade (processing grinding stone) composed of cutting blades).

Moreover, the processing device of the present invention may also be a grinding device. The aforementioned grinding device includes: a processing unit having a main shaft and a motor to rotate the main shaft; grindstone) grinding wheel; and a control unit to control the movement of the motor.

In addition, the processing apparatus of the present invention may include all of the control unit 48 including the determination unit 48a and the determination unit 48b, the rotation speed measurement unit 50, and the load current value measurement unit 52. In addition, the structures, methods, etc. of the above-mentioned embodiments can be appropriately changed and implemented as long as they do not deviate from the purpose of the present invention.

2: Cutting device 4: Abutment 6: cover 6a: side 6b: Upper surface 8: Cutting unit (processing unit) 10: Work clamp table 11: Processed object 12: Cassette workbench 14: Cassette 16: Monitor 18: Warning light (indicator light) 20: Spindle 20a: Thrust plate 20b: one end (front end) 22: shell 22a: Air supply path 22b: Air supply port 22c: 1st supply road 22d: The second supply road 22e: opening 24: Radial air bearing part (radial air bearing) 26: Thrust air bearing part (thrust air bearing) 28: Mounting seat 30: Flange 30a: front 30b, 36b: convex part 30c: front face 32: Support shaft 32a: Asan 34: Cutting blade 36: abutment 36a, 40a: opening 38: cutting edge 40: Nut 42: motor 44: Stator 46: rotor 48: Control unit 48a, 48b: judging part 50: Rotation speed measurement unit 52: load current value measuring unit A,C: dotted line B, D: a little chain line T1, T2: Threshold V: specifies the rotation speed X, Y, Z: direction

FIG. 1 is a perspective view schematically showing an example of a processing apparatus. Fig. 2 is a partial cross-sectional side view schematically showing an example of a processing unit. Fig. 3 is an exploded perspective view schematically showing an example of the structure of the tip of the main shaft. 4 is a diagram schematically showing an example of components of a cutting device for determining whether there is a defect in the cutting unit that hinders the rotation of the main shaft. 5 is a diagram schematically showing another example of components of a cutting device for determining whether there is a defect in the cutting unit that hinders the rotation of the main shaft. FIG. 6 is a graph schematically showing an example of temporal changes in the rotational speed of the main shaft until the rotational speed of the main shaft reaches a predetermined rotational speed. FIG. 7 is a graph schematically showing an example of the temporal change of the load current value of the motor until the main shaft rotates at a constant rotation speed.

10: Work clamp table

20: Spindle

22: shell

34: Cutting blade

48: Control unit

48a: Judgment Department

50: Rotation speed measurement unit

Claims (3)

A processing device for processing a workpiece, the processing device having: The processing unit has a main shaft with a grinding stone mounted on the front end, and a motor for rotating the main shaft; and a control unit to control the action of the motor, The control unit includes a judging unit that judges whether there is a defect in the machining unit based on information obtained by rotating the spindle at a predetermined rotational speed set in advance. As the processing device of claim 1, it is further provided with a rotation speed measuring unit for measuring the rotation speed of the main shaft, The determination unit calculates the time required from when the motor operates to rotate the main shaft until the main shaft reaches the specified rotational speed based on the rotational speed of the main shaft measured by the rotational speed measuring unit. Afterwards, according to whether the required time exceeds the preset threshold, it is determined whether there is a bad condition of the processing unit. The processing device as claimed in claim 1, further comprising a load current value measuring unit, wherein the load current value measuring unit measures the load current value of the motor when the spindle is rotated, The judging unit determines whether there is a defect in the machining unit based on whether the load current value measured by the load current value measuring unit exceeds a preset threshold when the spindle is rotated at the specified rotational speed. .

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