TW202304598A - Gas supply system and control method thereof capable of supplying gas from two opposite sides of processing chamber to achieve uniform coating and developing - Google Patents

Abstract

The present invention provides a gas supply system, which comprises a gas supply device, a connection sealing device, and a wind box device. The gas supply device comprises two gas supply chambers disposed opposite to each other and a gas supply port relatively disposed on the side wall of each gas supply chamber. The connection sealing device comprises two external gas guiding chambers having both ends opened. The wind box device comprises a gas homogenizing chamber. One end of each external gas guiding chamber is fixed and connected with one gas supply chamber through the gas supply port, the other end is fixed and connected with one end of the gas homogenizing chamber. The gas homogenizing chamber is configured with an internal gas guiding member. The internal gas guiding member is disposed and inclined along the extension direction of the gas homogenizing chamber, so the gas flow entering from both ends of the gas homogenizing chamber will flow in another direction due to the action of the internal gas guiding member to realize the gas supply to the target area.

Description

Air supply system and its control method

The invention relates to the field of semiconductor processing, in particular to an air supply system and a control method thereof.

The coating and development process is an indispensable process in the wafer production process, and it is a necessary condition for accurate follow-up process steps. Among them, there are four most important process indicators in the coating and developing process: film thickness, film thickness uniformity, line width and line width uniformity. In addition, there are supporting particle control, metal ion control, and corresponding defect control, etc., which will affect the yield rate of the subsequent process, and then affect the yield rate of the entire product. extremely high requirements.

The coating and developing unit is a core unit of the coating and developing (Track) machine, which directly affects the thickness and thickness uniformity of the film. Usually, in order to save space and cost in the front track, the coating unit will place 2~3 coating process chambers, which is convenient for the sharing of glue arms and saves glue pumps. In the coating and developing process chamber, an air supply system with constant temperature, constant humidity and constant wind speed is generally used. During the coating process, the manipulator sends the wafer to the carrier table of the coating and developing chamber, and the uniform air flow continues to flow out through the air outlet surface above the wafer. The carrier table absorbs the wafer and presses it under the drive of the motor. Rotate at a certain speed, and cooperate with the uniform wind speed on the wafer to achieve the purpose of uniform coating and development.

The air supply device for coating and developing equipment commonly used in the prior art usually supplies air from one side to the coating and developing process chamber. Since the destination area that needs to be supplied with air is relatively large, it is difficult to ensure that the air velocity received by different positions inside the cavity is consistent with the single-side air supply. .

Therefore, it is necessary to develop a novel air supply system and control method to avoid the above-mentioned problems in the prior art.

The first object of the present invention is to provide an air supply system that realizes air supply from opposite sides of the same process chamber.

In order to achieve the above purpose, the air supply system provided by the present invention includes an air supply element, a connecting sealing element and an air box element, and the air supply assembly includes two oppositely arranged air supply chambers and a side wall oppositely arranged on each of the air supply chambers. The air supply opening enables the gas to move along the extension direction of the air supply cavity and output through the air supply opening; the connecting sealing element includes two outer tubes that are arranged opposite to the two air supply cavities and are open at both ends. The air guide cavity, the air box element includes an air uniform cavity with openings at both ends, one end of each outer guide cavity is fixedly connected to one of the air supply chambers through the air supply opening, and the other end is fixedly connected to the air supply cavity. One end of the uniform air cavity, the cavity structure of the openings at both ends of the outer flow guide cavity is inclined to the extension direction of the air supply cavity, so that the gas entering the outer flow guide cavity turns to flow and flows from the The two ends of the uniform gas chamber enter the uniform gas chamber along opposite directions; the internal flow guide assembly is arranged in the uniform gas chamber, and the internal flow guide component is arranged obliquely to the extending direction of the uniform gas chamber , so that the gas entering from both ends of the uniform gas chamber is turned to flow after being acted on by the inner flow guide component.

The beneficial effect of the air supply system of the present invention is that: the air supply element includes two air supply chambers oppositely arranged and an air supply opening oppositely arranged on the side wall of each of the air supply chambers, and the connecting sealing element includes two oppositely arranged air supply openings. The two air-supply cavities, and two outer guide cavities with openings at both ends, the air box element includes an air-distribution cavity with openings at both ends, and one end of each of the outer guide cavities passes through the The air supply opening is fixedly connected to one of the air supply chambers, and the other end is fixedly connected to one end of the air uniformity chamber. An inner flow guide assembly is arranged in the air uniformity chamber, and the inner flow guide assembly is inclined to the air uniformity chamber. The extension direction of the chamber is set so that the gas entering from both ends of the uniform gas chamber is turned to flow after being acted on by the inner guide component, so that air can be supplied from opposite sides of the same process chamber.

Preferably, the air supply element further includes a trimming device, the number of which is at least 1, so as to be arranged opposite to at least one of the air supply openings, so as to adjust the flow rate of gas entering the air supply opening.

Further preferably, the fine-tuning device includes an air supply deflector, a flow rate adjusting component, and a flow rate monitoring part; the air supply deflector is arranged in the air supply cavity across the air supply opening, so that the air supply deflector and each The structure surrounded by the side walls of the air supply cavity has a bottom opening to communicate with the outer guide cavity; the flow rate monitoring part is connected to the flow rate regulator to obtain the gas flow rate information entering the air supply opening. The flow rate regulator is arranged on the air supply guide and close to the bottom opening, so as to adjust the gas flow rate entering the air supply opening according to the gas flow rate information entering the air supply opening.

Still further preferably, the flow rate regulator includes a rotating shaft and a baffle that are movably connected to each other, so as to control the flow rate of the gas entering the air supply opening by adjusting the position of the baffle by operating the rotating shaft.

Further preferably, the air supply assembly further includes an in-use viewing window disposed on the side wall of the air supply cavity and opposite to the flow rate regulator. The beneficial effect is that it is convenient to install and control the flow rate adjusting member.

Preferably, the cross-sectional areas of the cavity structures formed in the outer flow guide cavity along the extension direction of the air supply cavity decrease continuously along the extension direction of the air uniformity cavity.

Further preferably, the outer flow guide cavity includes an outer flow guide top plate and an outer flow guide bottom plate oppositely arranged along the extension direction of the air supply cavity, the bottom surface of the outer flow guide top plate and the outer flow guide bottom plate The top surface encloses the cavity structure, the bottom surface of the outer flow guide top plate is perpendicular to the extension direction of the air supply cavity, and the top surface of the outer flow guide bottom plate is inclined to the extension direction of the air supply cavity.

Still further preferably, the top surface of the outer deflector bottom plate is formed by sequentially connecting at least two inclined surfaces toward the direction of the uniform air cavity, and the at least two inclined surfaces extend toward the extension of the air supply cavity. The direction extends and at least two inclination angles formed with the extending direction of the air supply cavity increase sequentially.

Preferably, the inner flow guide assembly includes two inner guide orifice plates arranged oppositely in the uniform gas cavity, so as to divide the uniform gas cavity into an intermediate inner cavity, and the inner cavity located in the intermediate cavity Two inner diversion cavities on both sides, the two inner diversion cavities are respectively fixedly connected to the other ends of the two opposite outer diversion cavities to achieve internal communication, so that the gas passes through the two opposite ends After one of the outer diversion cavities enters the two inner diversion cavities, it enters the middle inner cavity through the two inner diversion orifice plates.

Further preferably, the two inner orifice plates are arranged obliquely to the arrangement direction of the gas uniform chamber.

More preferably, the inner cavity structure of the uniform gas chamber is surrounded by a relative gas uniform top plate and a gas uniform bottom plate, and one end of any one of the two inner guide orifice plates is fixedly connected to the gas uniform bottom plate , and the other end is fixedly connected with the gas uniform top plate, so that the gas uniform top plate, the gas uniform bottom plate and the two inner diversion orifice plates enclose the middle inner cavity.

Further preferably, the two inner flow guide cavities and the middle inner cavity are arranged symmetrically with respect to the central axis of the gas uniform cavity.

Further preferably, each cross-sectional area formed by any one of the two inner guide cavities along the extension direction of the air supply cavity decreases continuously along the respective extension directions, and any of the two inner guide cavities One extension direction is from one end of each inner flow guide cavity to the other end along the extension direction of the gas uniform cavity.

Further preferably, several through holes are opened on the inner orifice plate.

Preferably, the connecting sealing element includes 2N outer flow guiding cavities, the air box assembly includes N aeration cavities, and each of the two ends of the aeration cavities is fixedly connected to one of the aeration chambers. The outer guide cavity, N is a positive integer greater than 1. The beneficial effect is that the overall system can increase or decrease the number of target air supply areas according to actual needs.

Preferably, the N aeration chambers are arranged parallel to each other.

Preferably, the two air supply chambers are perpendicular to the air uniformity chamber.

The second object of the present invention is to provide a method for controlling the air supply system, which realizes the air supply from opposite sides of the same process chamber.

In order to achieve the above purpose, the control method of the air supply system provided by the present invention is to supply air to the two air supply chambers through the air source, so that the gas enters the two opposite outer guides through the opposite air supply openings. After the cavity, it enters the gas uniform cavity from both ends of the gas uniform cavity, and turns to flow after the action of the inner flow guide component.

Further preferably, the gas flow rate information entering the air supply opening is obtained through the flow rate monitoring part; the flow rate regulator is operated according to the gas flow rate information entering the air supply opening to adjust the gas flow rate entering the air supply opening .

In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of them. the embodiment. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein shall have the usual meanings understood by those skilled in the art to which the present invention belongs. The words "comprising" and the like used herein mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other elements or items.

In order to solve the problems existing in the prior art, an embodiment of the present invention provides an air supply system.

Fig. 1 is a schematic structural diagram of an air supply system according to an embodiment of the present invention. Fig. 2 is a schematic diagram of the assembly structure of the air supply element, the connecting sealing element and an air box element shown in Fig. 1 . Fig. 3 is a schematic structural diagram of the single-side air supply element shown in Fig. 1 .

In the embodiment of the present invention, the air supply system includes an air supply element, a connecting sealing element and an air box element, and the air supply assembly includes two opposite air supply chambers and an air supply opening oppositely arranged on the side wall of each of the air supply chambers, The gas is moved along the extending direction of the air supply cavity and output through the air supply opening.

Specifically, referring to FIG. 1 , the air supply system shown in FIG. 1 includes an air supply element 1 , a connecting sealing element 2 and an air box element 3 . Specifically, referring to FIG. 2 and FIG. 3 , the air supply assembly 1 includes a left air supply assembly 11 and a right air supply assembly (not shown in the figure), which are arranged oppositely. Several air supply openings 112 on the side wall, after the air source supplies air along the extension direction of the air supply cavity, that is, the direction A shown in FIG. . Wherein, the structure of the right air supply element is the same as that of the left air supply element 11 , and each of the air supply openings 112 also has the same structure.

Fig. 4 is a schematic structural diagram of a single connection sealing element shown in Fig. 1 . Fig. 5 is a schematic diagram of the assembly structure of the single gas uniform chamber, the single outer guide chamber and the single air supply chamber shown in Fig. 1 .

In the embodiment of the present invention, the connecting sealing element includes two outer guide cavities that are arranged opposite to the two air supply cavities and are both open at both ends, and the air box element includes an air uniform cavity that is open at both ends one end of each of the outer flow guide cavities is fixedly connected to one of the air supply cavities through the air supply opening, and the other end is fixedly connected to one end of the uniform gas cavity, and the two ends of the outer flow guide cavity are open The cavity structure is inclined to the extension direction of the air supply cavity, so that the gas entering the outer guide cavity turns to flow and enters the gas uniform cavity from both ends of the uniform gas cavity in opposite directions .

Specifically, referring to Fig. 1, Fig. 4 and Fig. 5, the connection sealing element 2 includes an outer flow guide cavity 21, an outer flow guide top plate 211, an outer flow guide bottom plate 212 and a connection fixture 22, the outer flow guide cavity There are openings at both ends of the body 21 (not marked in the figure), and the wind box assembly 3 includes a uniform air chamber 31, and both ends of the uniform air cavity 31 have openings (not marked in the figure), and the two oppositely arranged One end of each of the outer guide cavities 21 is respectively fixed to the two ends of the uniform gas chamber 31 through the connecting fixture 22, and the other ends of the two outer guide cavities 21 are connected to a set of oppositely arranged The air supply opening 112 of the air supply assembly 1 is fixed. The outer guide top plate 211 and the outer guide bottom plate 212 enclose a cavity structure (not shown in the figure) in the outer guide cavity 21, and the cavity structure in the outer guide cavity 21 (not shown in the figure) There is a certain inclination angle with the extension direction of the air supply cavity 111, so that the gas entering the outer flow guide cavity 21 turns to flow and enters the air distribution cavity 31 from both ends of the uniform gas cavity 31 in the opposite direction. The uniform gas cavity 31 is described.

In some embodiments, the two outer guide cavities 21 and the two air supply cavities 111 are arranged in the aeration cavity 31 in an axisymmetric manner with respect to the symmetry axis 37 of the aeration cavity 31 and supply air to the two opposite air supply chambers 111 under the same conditions. At this time, the airflow speeds entering the uniform air chamber 31 at both ends are equal in magnitude and opposite in direction.

Fig. 6 is a schematic diagram of the working state of the gas uniform chamber shown in Fig. 5 . FIG. 7 is a schematic diagram of a part of the internal structure of the gas uniform chamber shown in FIG. 6 .

In the embodiment of the present invention, the inner flow guide assembly is arranged in the uniform gas cavity, and the inner flow guide component is arranged obliquely to the extension direction of the uniform gas cavity, so that the air entering from both ends of the uniform gas cavity The gas turns to flow after being acted on by the inner guide component.

Specifically, referring to Fig. 6 and Fig. 7, a left inner guide orifice 321 and a right inner guide orifice 322 are arranged in the uniform gas chamber 31 as inner guide elements 32, and the left inner guide orifice 321 and the right inner guide orifice plate 322 are inclined to the extension direction of the uniform gas cavity at the same degree of inclination, that is, the C or E direction shown in FIG. After the airflow entering from the side passes through the adjustment of the left inner orifice plate 321 and the right inner orifice plate 322, the direction of the airflow is changed from a horizontal direction to a vertical downward direction. Wherein, the E direction is the opposite direction of the C direction.

In an embodiment of the present invention, the air supply element further includes a fine-tuning device, the number of which is at least 1, and is arranged opposite to at least one of the air supply openings, so as to adjust the flow rate of gas entering the air supply opening.

In some specific embodiments, the number of the fine-tuning device can be 1, so as to be arranged opposite to one of the air supply openings 112 , so as to adjust the flow rate of the gas entering the air supply opening 112 .

In some specific embodiments, the number of the fine-tuning devices may be 2, so as to be arranged opposite to the two air supply openings 112 , so as to adjust the gas flow rate entering the air supply openings 112 .

In the embodiment of the present invention, the inner flow guide assembly includes two inner guide orifice plates arranged oppositely in the uniform gas chamber, so as to divide the uniform gas chamber into an intermediate inner cavity, and Two inner diversion cavities on both sides of the middle cavity, the two inner diversion cavities are respectively fixedly connected to the other ends of the two opposite outer diversion cavities to achieve internal communication, so that the gas passes through After the two opposite outer guide cavities enter the two inner guide cavities, they enter the middle inner cavity through the two inner guide orifices.

Specifically, referring to FIG. 7, the left inner guide orifice 321 and the right inner guide orifice 322 are arranged in the uniform gas cavity 31, and the uniform gas cavity 31 is divided into the middle inner cavity 33 and the left inner cavity. The inner diversion cavity 341 and the right inner diversion cavity 342, the left inner diversion cavity 341 and the right inner diversion cavity 342 respectively communicate with the interior of the outer diversion cavity 21 arranged oppositely, The gas enters the left inner guide cavity 341 and the right inner guide cavity 342 through the oppositely arranged outer guide cavity 21, and then passes through the left inner guide orifice plate 321 and the right inner guide cavity. The orifice plate 322 guides the flow into the middle inner cavity 33 .

In the embodiment of the present invention, the two inner guide orifice plates are arranged obliquely to the installation direction of the gas uniform chamber.

Specifically, referring to FIG. 7 , there is an angle γ between the arrangement direction of the left inner guide orifice plate 321 and the right inner guide orifice plate 322 and the arrangement direction of the gas uniform cavity 31 .

In some specific embodiments, the range of the angle γ between the arrangement direction of the left inner guide orifice plate 321 and the right inner guide orifice plate 322 and the arrangement direction of the uniform gas chamber 31 is greater than Equal to 135° and less than 180°.

In some specific embodiments, the range of γ is greater than 90 degrees and less than 180 degrees.

In the embodiment of the present invention, the inner cavity structure of the uniform gas chamber is surrounded by the relative gas uniform top plate and the gas uniform bottom plate, and one end of any one of the two inner guide orifice plates is fixedly connected to the gas uniform The other end of the bottom plate is fixedly connected with the gas uniform top plate, so that the gas uniform top plate, the gas uniform bottom plate and the two inner diversion orifice plates enclose the middle inner cavity.

Specifically, referring to FIG. 7 , the uniform gas cavity 31 is surrounded by the oppositely arranged uniform gas top plate 35 and the gas uniform bottom plate 36, and the left inner guide orifice plate 321 and the right inner guide Any one end of the orifice plate 322 is respectively fixed on the left end and the right end of the said gas uniform bottom plate 36, and the other end is fixed to the said gas uniform top plate 35, the said gas uniform top plate 35, the said gas uniform bottom plate 36, the left The inner orifice plate 321 and the right inner orifice plate 322 enclose the middle inner cavity 33 .

In the embodiment of the present invention, the two inner flow guiding cavities and the middle inner cavity are arranged symmetrically with respect to the central axis of the gas uniform cavity.

Specifically, referring to FIG. 7 , the left inner diversion cavity 341 and the right inner diversion cavity 342 are distributed in a mirror image with the central axis 37 of the uniform gas cavity 31 as a symmetrical axis, and their internal spaces are equal in size and symmetrical in shape and position. .

In the embodiment of the present invention, each cross-sectional area formed by any one of the two inner guide cavities along the extension direction of the air supply cavity decreases continuously along the respective extension directions, and the two inner guide cavities The extending direction of any one of them is from one end of each inner flow guide cavity to the other end along the extending direction of the gas uniform cavity.

Specifically, referring to FIG. 7 , the cross-sectional areas formed by the left inner guide cavity 341 and the right inner guide cavity 342 along the extension direction of the air supply cavity 111, that is, the vertical direction, are along the respective extension directions. , that is, the C and E directions shown in the figure decrease continuously.

In some specific embodiments, the left inner orifice plate 321 and the right inner orifice plate 322 are flat plates.

In some specific embodiments, the left inner orifice plate 321 and the right inner orifice plate 322 are arc-shaped plates.

Fig. 8 is a perspective view of the partial structure of the air blowing element shown in Fig. 1 . Fig. 9 is a schematic diagram of the internal structure of the air supply element shown in Fig. 1 .

In the embodiment of the present invention, the fine-tuning device includes an air supply deflector, a flow rate regulator, and a flow rate monitoring part; the air supply deflector is arranged in the air supply cavity across the air supply opening, so that the air supply deflector The structure surrounded by the side wall of each air supply cavity has a bottom opening to communicate with the outer guide cavity; the flow rate monitoring part is connected to the flow rate regulator to obtain the gas entering the air supply opening Flow rate information: the flow rate regulator is disposed on the air supply guide and close to the bottom opening, so as to adjust the gas flow rate entering the air supply opening according to the gas flow rate information entering the air supply opening.

Specifically, referring to Fig. 5, Fig. 8 and Fig. 9, the fine-tuning device (not marked in the figure) includes an air supply deflector 15, a flow rate regulating component 16 and a flow rate monitoring part (not marked in the figure); the air supply deflector 15 The air supply opening 112 is arranged in the air supply cavity 111, so that the structure surrounded by the air supply guide 15 and the side wall of the air supply cavity 111 has a bottom opening, so as to be connected with the outer flow guide cavity. 21 (not marked in the figure); the flow rate monitoring part (not marked in the figure) is connected to the flow rate regulator 16 to obtain the gas flow rate information entering the air supply opening 112; the flow rate regulator 16 is set on the The air supply guide 15 is close to the bottom opening, so as to adjust the gas flow rate entering the air supply opening 112 according to the gas flow rate information entering the air supply opening 112 .

In the embodiment of the present invention, the flow rate regulator includes a rotating shaft and a baffle which are movably connected to each other, so as to control the flow rate of the gas entering the air supply opening by adjusting the position of the baffle by operating the rotating shaft.

Specifically, referring to Fig. 5, Fig. 8 and Fig. 9, the flow rate regulator 16 includes a rotary valve 19 and a baffle 18 which are movably connected to each other, so as to adjust the position of the baffle 18 by operating the rotary valve 19 to realize Control the flow rate of gas entering the air supply opening 112; when the direction of the baffle is vertically downward, it is in a normal air supply state; when the rotary valve 19 rotates clockwise, the baffle 18 faces the air supply opening The side wall of the air supply chamber 111 where 112 is located moves, so that the bottom opening of the structure enclosed by the air supply deflector 15 and the side wall of the air supply chamber 111 shrinks to reduce the air supply; when the rotary valve 19 counterclockwise When rotating, the baffle plate 18 moves away from the side wall of the air supply cavity 111 where the air supply opening 112 is located, so that the bottom opening of the structure enclosed by the air supply deflector 15 and the side wall of the air supply cavity 111 is enlarged to increase air supply.

In the embodiment of the present invention, the air supply assembly further includes an in-use viewing window disposed on the side wall of the air supply cavity and opposite to the flow rate adjusting member.

Specifically, referring to Fig. 1 and Fig. 8, the air supply assembly 1 also includes an in-use viewing window 17, which is located on the side wall of the air supply chamber and is opposite to the flow rate adjusting member 16, so as to facilitate passing the The in-use window 17 is used to adjust the flow rate regulator 16.

Fig. 10 is a schematic diagram of the assembly structure connecting the sealing element and the air supply element according to the embodiment of the present invention.

In the embodiment of the present invention, the cross-sectional areas formed in the cavity structure in the outer guide cavity along the extension direction of the air supply cavity decrease continuously along the extension direction of the air uniformity cavity.

Specifically, referring to FIG. 10, the cavity structure (not shown in the figure) of the outer guide cavity 21 is formed along the extension direction of the air supply cavity 111, that is, the cross-sectional areas formed in the direction A shown in FIG. 10 Along the extension direction of the uniform gas chamber, that is, the horizontal direction decreases continuously.

In some specific embodiments, the shape of the outer flow guide top plate 211 and the outer flow guide bottom plate 212 surrounding the cavity structure in the outer flow guide cavity 21 is plane.

In some specific embodiments, the outer flow guide top plate 211 is a flat plate, and the outer flow guide bottom plate 212 is an arc-shaped plate or a broken-line plate.

In the embodiment of the present invention, the outer flow guide cavity includes an outer flow guide top plate and an outer flow guide bottom plate oppositely arranged along the extending direction of the air supply cavity, and the bottom surface of the outer flow guide top plate and the outer flow guide The top surface of the bottom plate encloses the cavity structure, the bottom surface of the outer flow guide top plate is perpendicular to the extension direction of the air supply cavity, and the top surface of the outer flow guide bottom plate is inclined to the extension direction of the air supply cavity .

Specifically, referring to FIG. 10 , the bottom surface of the outer flow guide top plate 211 is perpendicular to the extension direction of the air supply cavity 111, that is, the direction A, and the top surface of the outer flow guide bottom plate 212 is perpendicular to the extension direction of the air supply cavity 111, that is, A direction. There is a certain inclination angle in the direction.

In the embodiment of the present invention, the top surface of the outer deflector bottom plate is formed by sequentially connecting at least two inclined surfaces towards the direction of the air uniform cavity, and the at least two inclined surfaces are directed towards the side of the air supply cavity. The extension direction extends and at least two inclination angles formed with the extension direction of the air supply cavity increase sequentially.

Specifically, referring to FIG. 10 , the top surface of the outer deflector bottom plate 212 includes a first inclined surface 2121 and a second inclined surface 2122 connected in sequence toward the direction of the uniform gas chamber 31 , and the first inclined surface 2121 is connected to the air supply chamber 31. The included angle α of the extending direction of the cavity 111 is smaller than the included angle β of the second slope 2122 and the extending direction of the air supply cavity 111 .

In the embodiment of the present invention, several through holes are opened on the inner guide orifice plate. Specifically, the through holes opened by the left inner orifice plate 321 and the right inner orifice plate 322 to allow the air flow to flow are evenly distributed on the surface of each orifice plate in a rectangular array or an annular array.

In the embodiment of the present invention, the air supply element and the connecting sealing element are arranged axisymmetrically with respect to the air box element.

Specifically, the two air supply elements 1 and the connecting sealing element 2 are arranged axisymmetrically with respect to the air box element 3 .

In the embodiment of the present invention, the connecting sealing element includes 2N outer guide cavities, the wind box assembly includes N gas uniform cavities, and the two ends of each gas uniform cavity are respectively fixed One of the outer guide chambers is connected, and N is a positive integer greater than 1.

In some specific embodiments, referring to FIG. 1 , the several connecting sealing elements 2 include 12 outer flow guide cavities 21 in total, and the wind box assembly 3 includes 6 aeration uniform cavities 31 , each Two ends of each of the gas uniform chambers 31 are respectively fixedly connected to one of the outer guide chambers 21 .

In some specific embodiments, the connecting sealing element 2 includes two outer guide cavities 21, the wind box assembly 3 includes one gas uniform cavity 31, and the gas uniform cavity 31 The two ends are respectively fixedly connected to one of the outer guide chambers 21 .

In the embodiment of the present invention, the N gas uniform chambers are arranged parallel to each other.

In some embodiments, there is a certain inclination angle between the arrangement directions of the N gas uniform cavities 31,

In the embodiment of the present invention, the two air supply chambers are perpendicular to the air uniformity chamber.

In some embodiments, the angle formed by the extending direction of the air supply cavity 111 and the extending direction of the uniform gas cavity 31 is greater than 0° and less than 90°.

The embodiment of the present invention also provides a control method of the air supply system. include:

Air is supplied to the two air supply cavities through the air source, so that the gas enters the two opposite outer guide cavities through the opposite air supply openings, and then enters the two ends of the uniform air cavity. In the uniform gas cavity, and after the action of the inner guide component, it turns to flow.

Specifically, air is supplied to the two air supply chambers 112 through an air source, so that the gas enters the two opposite outer guide chambers 21 through the opposite air supply openings 112, and then flows from the air uniform chamber. The two ends of the body 31 enter the uniform gas chamber 31 and turn to flow after being acted by the left inner flow guide assembly 341 and the right inner flow guide assembly 342 .

In the embodiment of the present invention, the flow rate monitoring part obtains the gas flow rate information entering the air supply opening; the flow rate regulator is operated according to the gas flow rate information entering the air supply opening to adjust the air flow rate entering the air supply opening. gas flow rate.

Specifically, the gas flow rate information entering the air supply opening 112 is obtained through the flow rate monitoring part (not shown in the figure); the flow rate regulator 16 is operated according to the gas flow rate information entering the air supply opening 112 to adjust The gas flow rate entering the air supply opening 112 .

Although the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the invention described in the claims. Furthermore, the invention described herein is capable of other embodiments and of being practiced or carried out in various ways.

1: air supply element 11:Left air supply assembly 111: air supply cavity 112: air supply opening 15: Air supply deflector 16: Flow rate regulator 17: Active window 18: Baffle 19: Rotary valve 2: Connect the sealing element 21: Outer guide cavity 211: Outer diversion top plate 212: Outer guide plate 2121: first bevel 2122: second slope 22: Connect the fixture 3: Wind box components 31: Uniform gas cavity 32: Inner diversion components 321:Left inner guide orifice 322: Right inner guide orifice plate 33: Middle inner cavity 341: Left internal diversion cavity 342: Right inner diversion cavity 35: Uniform gas top plate 36: Evening base plate 37: Central axis

Fig. 1 is a schematic structural view of an air supply system according to an embodiment of the present invention; Fig. 2 is a schematic diagram of the assembly structure of the air supply element shown in Fig. 1, the connecting sealing element and an air box element; Fig. 3 is a schematic structural diagram of the single-side air supply element shown in Fig. 1; Fig. 4 is a schematic structural view of a single connection sealing element shown in Fig. 1; Fig. 5 is a schematic diagram of the assembly structure of the single gas uniform cavity, the single external flow guide cavity and the single air supply cavity shown in Fig. 1; Fig. 6 is a schematic diagram of the working state of the gas uniform chamber shown in Fig. 5; Fig. 7 is a schematic diagram of part of the internal structure of the uniform gas chamber shown in Fig. 6; Fig. 8 is a perspective view of the partial structure of the air supply element shown in Fig. 1; Fig. 9 is a schematic diagram of the internal structure of the air supply element shown in Fig. 1; Fig. 10 is a schematic diagram of the assembly structure connecting the sealing element and the air supply element according to the embodiment of the present invention.

1: air supply element

2: Connect the sealing element

3: Wind box components

Claims (20)

An air supply system, including an air supply element, a connecting sealing element and an air box element: The air-supply element includes two air-supply chambers arranged oppositely and an air-supply opening oppositely arranged on the side wall of each of the air-supply chambers, so that the airflow moves along the extending direction of the air-supply chamber and is output through the air-supply openings; The connecting sealing element includes two outer guide cavities that are arranged opposite to the two air supply cavities and are open at both ends. One end of the outer flow guide cavity is fixedly connected to one of the air supply cavity through the air supply opening, and the other end is fixedly connected to one end of the uniform air cavity. The cavity structure with openings at both ends in the outer flow guide cavity is inclined to The extension direction of the air supply cavity is such that the gas entering the outer guide cavity turns to flow and enters the gas uniform cavity from both ends of the uniform gas cavity in opposite directions; The inner guide assembly is arranged in the uniform gas cavity, and the inner guide component is arranged obliquely to the extension direction of the uniform gas cavity, so that the gas entering from both ends of the uniform gas cavity passes through the inner guide Turns to flow after the flow component is applied. The air supply system according to claim 1, wherein the air supply element further includes a fine-tuning device, and the number of the fine-adjustment devices is at least one, so as to be arranged opposite to at least one of the air supply openings, so as to control the air entering the air supply opening. The flow rate is adjusted. The air supply system according to claim 2, wherein the fine-tuning device includes an air supply deflector, a flow rate regulator, and a flow rate monitoring part; The air-supply guide is arranged in the air-supply cavity across the air-supply opening, so that the structure formed by the air-supply guide and the side walls of each of the air-supply cavity has a bottom opening to communicate with the outer guide. Flow cavity is connected; The flow rate monitoring part is connected to the flow rate regulator to obtain the flow rate information of the gas entering the air supply opening; The flow rate regulator is disposed on the air supply guide and close to the bottom opening, so as to adjust the flow rate of gas entering the air supply opening according to the information of the gas flow rate entering the air supply opening. The air supply system according to claim 3, wherein the flow rate regulator includes a rotating shaft and a baffle that are movably connected to each other, so as to adjust the position of the baffle by operating the rotating shaft to realize the control of entering the air supply opening. Gas flow rate control. The air supply system according to claim 3, wherein the air supply element further includes an in-use viewing window disposed on the side wall of the air supply cavity and opposite to the flow rate adjusting member. The air supply system according to claim 1, wherein the cross-sectional areas formed in the cavity structure in the outer air guide cavity along the extension direction of the air supply cavity decrease continuously along the extension direction of the air uniformity cavity. The air supply system according to claim 6, wherein the outer flow guide cavity includes an outer flow guide top plate and an outer flow guide bottom plate oppositely arranged along the extension direction of the air supply cavity, and the bottom surface of the outer flow guide top plate and The top surface of the outer flow guide bottom plate encloses the cavity structure, the bottom surface of the outer flow guide top plate is perpendicular to the extension direction of the air supply cavity, and the top surface of the outer flow guide bottom plate is inclined to the air supply cavity. The extension direction of the cavity. The air supply system according to claim item 7, wherein the top surface of the outer deflector bottom plate is formed by at least two inclined surfaces connected in sequence along the direction toward the uniform gas chamber, and the at least two inclined surfaces face the The extension direction of the air supply cavity extends and at least two inclination angles formed with the extension direction of the air supply cavity increase sequentially. According to the air supply system according to claim 1, wherein the inner guide assembly includes two inner guide orifice plates arranged oppositely in the air uniform chamber, so as to divide the air uniform chamber into an intermediate inner cavity , and two inner guide cavities located on both sides of the middle cavity, the two inner guide cavities are respectively fixedly connected to the other ends of the two opposite outer guide cavities to achieve internal communication, After the gas enters the two inner guide cavities through the two opposite outer guide cavities, it enters the middle inner cavity through the two inner guide orifice plates. The air supply system according to claim 9, wherein the two inner guide orifice plates are arranged obliquely to the installation direction of the uniform gas chamber. According to the air supply system described in claim 10, wherein the cavity structure in the air-distribution chamber is surrounded by a relative air-distribution top plate and an air-distribution bottom plate, and one end of any one of the two inner guide orifice plates is fixedly connected The other end of the gas uniform bottom plate is fixedly connected to the gas uniform top plate, so that the gas uniform top plate, the gas uniform bottom plate and the two inner diversion orifice plates enclose the middle inner cavity. The air supply system according to claim 10, wherein the two inner guide cavities and the middle inner cavity are arranged symmetrically with respect to the central axis of the uniform gas cavity. According to the air supply system according to claim 9, wherein each cross-sectional area formed by any one of the two inner guide cavities along the extension direction of the air supply cavity decreases continuously along the respective extension directions, and the two The extension direction of any one of the inner flow guide cavities is directed from one end of each inner flow guide cavity to the other end along the extension direction of the gas uniform cavity. The air supply system according to claim 9, wherein several through holes are opened on the inner guide orifice plate. The air supply system according to claim 1, wherein the air supply element and the connecting sealing element are arranged axisymmetrically with respect to the air box element. According to the air supply system according to claim 1, wherein the connecting sealing element includes 2N of the outer flow guiding cavities, the air box assembly includes N of the aeration cavities, and each of the aeration cavities Two ends of each are fixedly connected to one of the outer guide chambers, and N is a positive integer greater than 1. The air supply system according to claim 1, wherein the N aeration chambers are arranged parallel to each other. The air supply system according to claim 1, wherein the two air supply chambers are perpendicular to the air uniformity chamber. A method for controlling the air supply system according to any one of claim items 1-18, comprising supplying air into the two air supply chambers through an air source, so that the gas enters the opposite two air supply chambers through the opposite air supply openings. After the outer diversion cavity, it enters the gas uniform cavity from both ends of the gas uniform cavity, and turns to flow after the action of the inner diversion component. According to the control method of the air supply system described in claim 19, comprising: Obtaining the flow rate information of the gas entering the air supply opening through the flow rate monitoring part; The flow rate regulator is operated according to the information of the gas flow rate entering the air supply opening to adjust the gas flow rate entering the air supply opening.

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