TW202247930A - 雷射加工裝置 - Google Patents

雷射加工裝置 Download PDF

Info

Publication number
TW202247930A
TW202247930A TW111110292A TW111110292A TW202247930A TW 202247930 A TW202247930 A TW 202247930A TW 111110292 A TW111110292 A TW 111110292A TW 111110292 A TW111110292 A TW 111110292A TW 202247930 A TW202247930 A TW 202247930A
Authority
TW
Taiwan
Prior art keywords
laser light
unit
laser
light
incident surface
Prior art date
Application number
TW111110292A
Other languages
English (en)
Chinese (zh)
Inventor
是松克洋
飯田哲也
Original Assignee
日商濱松赫德尼古斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商濱松赫德尼古斯股份有限公司 filed Critical 日商濱松赫德尼古斯股份有限公司
Publication of TW202247930A publication Critical patent/TW202247930A/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50—Working by transmitting the laser beam through or within the workpiece
    • B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Laser Beam Processing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW111110292A 2021-06-01 2022-03-21 雷射加工裝置 TW202247930A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021092245 2021-06-01
JP2021-092245 2021-06-01

Publications (1)

Publication Number Publication Date
TW202247930A true TW202247930A (zh) 2022-12-16

Family

ID=84324187

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111110292A TW202247930A (zh) 2021-06-01 2022-03-21 雷射加工裝置

Country Status (5)

Country Link
JP (1) JPWO2022254844A1 (enrdf_load_stackoverflow)
KR (1) KR20240015615A (enrdf_load_stackoverflow)
CN (1) CN117412830A (enrdf_load_stackoverflow)
TW (1) TW202247930A (enrdf_load_stackoverflow)
WO (1) WO2022254844A1 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118089565B (zh) * 2024-04-23 2024-07-02 常州奥瑞克精密测量系统有限公司 一种具有多点式多姿态激光同轴度校验装置及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11201719A (ja) * 1998-01-09 1999-07-30 Nikon Corp 位置測定装置及びレーザ加工装置
JP4964554B2 (ja) 2006-10-03 2012-07-04 浜松ホトニクス株式会社 レーザ加工方法
JP4402708B2 (ja) * 2007-08-03 2010-01-20 浜松ホトニクス株式会社 レーザ加工方法、レーザ加工装置及びその製造方法
JP2013096853A (ja) * 2011-11-01 2013-05-20 Omron Corp 変位センサ
JP5775811B2 (ja) * 2011-12-26 2015-09-09 浜松ホトニクス株式会社 レーザ加工装置及びレーザ加工方法
JP6911882B2 (ja) * 2019-03-28 2021-07-28 ブラザー工業株式会社 レーザマーカ

Also Published As

Publication number Publication date
JPWO2022254844A1 (enrdf_load_stackoverflow) 2022-12-08
WO2022254844A1 (ja) 2022-12-08
CN117412830A (zh) 2024-01-16
KR20240015615A (ko) 2024-02-05

Similar Documents

Publication Publication Date Title
KR102736968B1 (ko) 레이저 가공 장치
KR102359284B1 (ko) 레이저광 조사 장치 및 레이저광 조사 방법
JP7034621B2 (ja) レーザ加工装置
TWI725133B (zh) 雷射光照射裝置及雷射光照射方法
JP6644563B2 (ja) レーザ光照射装置
KR102343564B1 (ko) 레이저 가공 장치 및 동작 확인 방법
KR20180104643A (ko) 레이저 가공 장치 및 레이저 출력 장치
JP2021100766A (ja) レーザ出力装置
JP6661392B2 (ja) レーザ加工装置
JP7222906B2 (ja) レーザ加工方法、及び、レーザ加工装置
JP6695699B2 (ja) レーザ加工装置
TW202247930A (zh) 雷射加工裝置
JP6896913B2 (ja) レーザ加工装置
JP6661394B2 (ja) レーザ加工装置
TW202346014A (zh) 雷射加工裝置和雷射加工方法
JP6689612B2 (ja) レーザ加工装置
JP6661393B2 (ja) レーザ加工装置