TW202247498A - Bonding structures and methods for forming the same - Google Patents

Abstract

A bonding structure is provided, including a first substrate having a first surface opposite to a second surface; a light-emitting element disposed on the first surface; an adhesive layer disposed on the second surface; a second substrate disposed opposite to the first substrate; a conductive layer disposed on the second substrate and facing the second surface; and a silver feature disposed between the adhesion layer and the conductive layer. The silver feature includes a nano-twinned structure including parallel-arranged twin boundaries. The parallel-arranged twin boundaries include 90% or more [111] crystal orientation.

Description

Joining structure and method for forming same

The present disclosure relates to a bonding structure and a method of forming the same, and more particularly to a bonding structure with silver components and a method of forming the same.

The packaging process of light-emitting diodes (light emitting diodes, LEDs) includes steps such as wafer dicing, die bonding, wiring, and glue sealing. Among them, the die bonding process needs to be carried out at a lower temperature to avoid damage to the LED components. At the same time, the die bonding structure is required to have good thermal conductivity, so that the LED package has a better heat dissipation effect to ensure the luminous efficiency of the LED components. In addition, the die bonding interface needs to have sufficient mechanical strength and reliability.

Conventionally, a heat-conducting adhesive method is used for the bonding of the LED die and its packaging substrate. Its bonding temperature is low, but the thermal conductivity of the bonding interface is not good enough to withstand the high LED operating temperature. In order to increase the thermal conductivity of the die bonding interface, in recent years, solder alloys with a melting point below 250°C have been used for soldering. The bonding temperature is not high, but LED products cannot withstand high operating temperature after bonding. Therefore, Au20Sn high-temperature solder alloy with a melting point of 278°C has been used for soft soldering. Although its die bonding structure has good thermal conductivity and temperature resistance, its bonding temperature is as high as 300° C., which will cause LED components to fail during the high temperature soldering process. After this high temperature solder bonding, during cooling to room temperature, thermal stress can cause cracks at the bonded interface, resulting in poor yield and high material cost.

Other known technologies use Au-Sn eutectic bonding. First, a pure Au layer is plated on the back of the LED crystal grain and the surface of the packaging substrate, and then a pure Sn layer is plated on it. Then heated to a temperature above the eutectic point of the Au-Sn binary phase diagram, so that the pure Au layer and the pure Sn layer between the sapphire crystal grain and the LED packaging substrate have a eutectic reaction, forming a eutectic of Au-rich and Sn-rich alloy interface structure. Although its LED package has good thermal conductivity and temperature resistance, but because the bonding temperature is too high, it is easy to cause LED failure and package damage, and the material cost is also high. In addition, for micro-LEDs (micro-LEDs) or mini-LEDs (mini-LEDs), due to the extremely small size of the wafers, it is known that when the wafers are cooled to room temperature after bonding, the wafers will not move. This will cause the die to be bonded out of alignment with the substrate.

Nano-twinned films have been used in bonding processes. Invention Patent No. I6865724 of the Republic of China discloses an electrical connection mechanism and method for electroplated copper nano-twinned films, which bond two oxide substrates respectively covered with metal layers at a pressure of 0.8MPa to 3MPa and a temperature of 200°C to 350°C . Although this conventional technology can be bonded at a low pressure of 0.8MPa to 3MPa, it must first perform chemical mechanical polishing (CMP) on the nano-twinned film to reduce surface roughness before bonding, which is not only complicated and will destroy the nano-twinned film. Invention Patent No. I521104 of the Republic of China discloses a packaging structure and method for first electroplating a copper seed layer on a substrate and then electroplating a nickel nano-twin film, and then bonding the two substrates; and Invention Patent No. I519681 of the Republic of China discloses a semiconductor The invention relates to a structure and method for electroplating gold nano twin film on the surface of a wafer, a circuit board or a conductive substrate, and then bonding each other.

However, the conventional technology adopts a high-speed spin plating method of 50 rpm or even 1500 rpm, the process and film quality are not easy to control, the twin spacing is relatively large, and the [111] preferred crystallographic orientation is less than 90%. Invention Patent No. I432613 of the Republic of China shows that there are still obvious Cu(222) crystal orientations in the X-ray diffraction (XRD) diagram of its twin structure; Invention Patent No. I507548 of the Republic of China shows the X-ray diffraction of its twin structure There is still an obvious Au (222) crystallographic orientation in the figure, and its [111] preferred crystallographic orientation is even as low as only 50%.

In addition, the component or contact size will be limited by the plating process. In detail, generally, components or contacts smaller than 2 microns cannot be produced by electroplating, and the electroplating waste liquid produced in the electroplating process also has environmental concerns. Furthermore, direct electroplating of the nano-twinned film on the substrate will result in insufficient bonding force between the substrate and the nano-twinned film, which will cause the film to peel off and affect the overall reliability of the film. In view of the above problems, the existing bonding technology still faces many challenges.

Some embodiments of the present disclosure provide a bonding structure, including: a first substrate having opposite first and second surfaces; a light emitting element on the first surface; an adhesive layer on the second surface; a second substrate, Set opposite to the second surface of the first substrate; the conductive layer is on the second substrate and faces the second surface; and the silver component is between the adhesive layer and the conductive layer, wherein the silver component includes a silver nano twin structure, and The silver nanotwin structure has parallel twin boundaries, and the parallel twin boundaries include more than 90% of the [111] crystallographic orientations.

In some embodiments, at least 80% of the silver feature is silver nanotwinned.

In some embodiments, the thickness of the silver features is at least 3.0 microns.

In some embodiments, the thickness of the silver nanotwinned structure is at least 2.0 microns.

In some embodiments, the distance between the parallel aligned twin boundaries is 1 nm to 100 nm.

In some embodiments, the adhesive layer has a thickness of 0.01 micron to 1 micron.

In some embodiments, the adhesion layer includes titanium, chromium, titanium-tungsten, or combinations thereof.

In some embodiments, the first substrate is a sapphire substrate with a light emitting element.

In some embodiments, the second substrate includes a printed circuit board, a metal heat sink, a ceramic substrate, or a combination thereof.

In some embodiments, the ceramic substrate includes aluminum oxide, aluminum nitride, silicon nitride, or combinations thereof.

In some embodiments, a transition die layer is further included between the adhesive layer and the silver component.

Some other embodiments of the present disclosure provide a method for forming a bonding structure, including: providing a first substrate, the first substrate has a first surface opposite to a second surface; forming a light emitting element on the first surface of the first substrate; An adhesive layer is formed on the second surface of the first substrate; a silver component is formed on the adhesive layer; a second substrate is provided, and a conductive layer is formed on the second substrate; and the silver component is relatively bonded to the conductive layer, wherein the silver component includes silver nano The nano-twin structure, and the silver nano-twin structure has parallel twin boundaries, and the parallel twin boundaries have more than 90% [111] crystallographic orientations.

In some other embodiments, at least 80% of the silver feature is silver nanotwinned structure, and wherein the spacing between parallel twinned grain boundaries is 1 nm to 100 nm.

In other embodiments, the thickness of the silver feature is at least 3.0 microns, and wherein the thickness of the silver nanotwinned structure is at least 2.0 microns.

In other embodiments, the step of forming the adhesive layer and the silver component includes sputtering or evaporation.

In other embodiments, the bonding of the silver component to the conductive layer is performed at a temperature of 100°C to 200°C.

In other embodiments, the bonding of the silver component to the conductive layer is performed at a pressure of 3 MPa to 30 MPa.

In other embodiments, the adhesion layer includes titanium, chromium, titanium-tungsten, or combinations thereof.

In some other embodiments, the first substrate is a sapphire substrate with light emitting elements, and the second substrate includes a printed circuit board, a metal heat sink, a ceramic substrate or a combination thereof.

In other embodiments, a transition grain layer is formed between the adhesive layer and the silver component.

The following content provides many different embodiments or examples for implementing different components of the embodiments of the present invention. Specific examples of components and configurations are described below to simplify embodiments of the invention. Of course, these are just examples, not intended to limit the embodiments of the present invention. For example, if the description mentions that the first component is formed on the second component, it may include an embodiment where the first and second components are in direct contact, or it may include an additional component formed between the first and second components , such that the first and second components are not in direct contact. In addition, the embodiments of the present invention may repeat element symbols and/or letters in many examples. These repetitions are for the purposes of simplicity and clarity and do not in themselves imply a specific relationship between the various embodiments and/or configurations discussed.

Some variations of the embodiment are described below. In the different drawings and described embodiments, like reference numerals are used to designate like elements. It is understood that additional steps may be provided before, during, and after the method, and that some recited steps may be substituted or deleted in other embodiments of the method.

In addition, space-relative terms may be used, such as "below", "below", "lower", "above", "above", etc. Words are used to facilitate the description of the relationship between one (some) component or feature and another (some) component or feature in the drawings. Spatially relative terms are intended to encompass different orientations of the device in use or operation, as well as orientations depicted in the drawings. When the device is turned to a different orientation (rotated 90 degrees or otherwise), the spatially relative adjectives used therein shall also be interpreted in accordance with the turned orientation.

When the terms "about", "approximately" and similar terms are used herein to describe a number or range of numbers, the term is intended to cover values that include the stated number within a reasonable range, such as +/-10 of the stated number. %, or other values understood by those skilled in the art to which the present invention pertains. For example, the term "about 5 nm" encompasses a size range from 4.5 nm to 5.5 nm.

Furthermore, the ordinal numbers used in the description and claims, such as "first", "second", "third", etc., are used to modify the elements of the claim, which do not imply and represent that the element of the claim has Any previous ordinal numbers do not represent the order of a claimed element with another claimed element, or the order of the manufacturing method, and the use of these ordinal numbers is only used to enable a claimed element with a certain designation to have the same Named request elements make a clear distinction.

An embodiment of the present disclosure provides a bonding structure, including: a silver component between two substrates, and an adhesive layer between the substrate and the silver component. The adhesive layer can provide a better bonding force between the substrate and the silver component to avoid peeling off, and the adhesive layer can reduce the influence of the crystallographic orientation of the substrate on the silver component. In addition, the silver component has at least 80% silver nanotwin structure, and the silver nanotwin structure has more than 90% [111] crystallographic orientations of parallel aligned twin boundaries. Due to the characteristics of silver and the twin structure, the present disclosure can perform direct bonding process at a low temperature of 100° C. to 200° C. to ensure the yield rate of the packaging process and the bonding strength of the bonding structure. Furthermore, the bonding interface will not be cracked due to high temperature thermal stress, thereby improving the reliability of the product. Especially for micro-LEDs or mini-LEDs, this low-temperature bonding does not cause chip displacement.

1A-1D illustrate cross-sectional views of bonding structures at different stages of fabrication, according to some embodiments. Referring to FIG. 1A, a first substrate 10 is provided, and the first substrate 10 includes opposite first surfaces S1 and second surfaces S2. In some embodiments, the first substrate 10 may be a sapphire (Sapphire) substrate having a light emitting element (as described below), and includes aluminum oxide (Al ₂ O ₃ ).

Continuing to refer to FIG. 1A , the light emitting element 20 is formed on the first surface S1 of the first substrate 10 , and the adhesive layer 12 is formed on the second surface S2 of the first substrate 10 . In some embodiments, the light emitting element 20 includes a light emitting diode (LED), a mini light emitting diode (mini-LED), a micro light emitting diode (micro-LED), or a combination thereof. In some embodiments, the adhesion layer 12 includes titanium, chromium, titanium-tungsten, or combinations thereof. The adhesive layer can provide better bonding force between the substrate and the subsequently formed silver parts (see Figure 1B) while having a lattice buffering effect. The thickness of the adhesive layer 12 may be 0.01 micron to 1 micron, for example, 0.05 micron to 0.1 micron. If the thickness of the adhesive layer 12 is greater than, for example, 1 micron, the luminous efficiency of the light-emitting element will be reduced; if the thickness of the adhesive layer 12 is less than, for example, 0.01 micron, it will not be able to provide sufficient bonding force between the substrate and the subsequently formed silver component.

In some embodiments, the adhesive layer 12 may be formed on the second surface S2 of the first substrate 10 by sputtering. Sputtering adopts single-gun sputtering or multi-gun co-plating. The sputtering power supply can use, for example, DC, DC plus, RF, high-power pulse magnetron sputtering (high-power impulse magnetron sputtering, HIPIMS) and the like. The sputtering power of the adhesive layer 12 may be, for example, about 100W to about 200W. The temperature of the sputtering process is room temperature, but the temperature rises from about 50° C. to about 200° C. during the sputtering process. The deposition rate of the adhesion layer 12 may be, for example, about 0.1 nm/s to about 0.3 nm/s. The background pressure of the sputtering process is less than 1 x 10 ^-5 torr, and the working pressure may be, for example, about 1 x 10 ^-3 torr to 1 x 10 ^-2 torr. Argon flow is about 10 seem to about 20 seem. The stage rotational speed may be, for example, from about 5 rpm to about 20 rpm. The sputtering process substrate is applied with a bias voltage of about -100V to about -200V. It should be understood that the above sputtering process parameters can be adjusted appropriately according to actual applications, and the present disclosure is not limited thereto.

In other embodiments, the adhesive layer 12 may be formed on the second surface S2 of the first substrate 10 by evaporation. The background pressure of the evaporation process is less than 1 x 10 ^-5 torr, and the working pressure can be, for example, about 1 x 10 ^-4 torr to about 5 x 10 ^-4 torr. Argon flow is about 2 seem to about 10 seem. The stage rotational speed may be, for example, from about 5 rpm to about 2 rpm. The evaporation rate of the adhesive layer 12 may be, for example, about 1 nm/s to about 5.0 nm/s. It should be understood that the above evaporation process parameters can be properly adjusted according to actual applications, and the present disclosure is not limited thereto.

Referring to FIG. 1B , a silver component 50 is formed on the adhesive layer 12 . In some embodiments, the silver component 50 includes the silver nanotwin structure 14 , and the silver nanotwin structure 14 has nanoscale parallel alignment twin boundaries (Σ3+Σ9). In the cross-sectional view of the silver component 50 , electron backscatter diffraction (EBSD) analysis shows that the sum of twin boundaries (Σ3) and quasi-twin boundaries (Σ9) accounts for more than 40% of the overall grain boundaries. In addition, the parallel twin boundaries have more than 90% (for example greater than 90% or greater than 95%) [111] crystallographic orientations, and the distance between the twin boundaries can be 1 nm to 100 nm, preferably 2 nm to 50 nm.

Continuing to refer to FIG. 1B , in some embodiments, the thickness T1 of the silver feature 50 is at least 2.0 microns, such as about 3 microns to about 10 microns. The thickness T2 of the silver nanotwin structure 14 is at least 1.5 microns, such as about 2.0 microns to about 10 microns. The silver nanotwin structure 14 includes parallel stacked silver nanotwin columns 16 . In some embodiments, the diameter of the silver nanotwinned pillars 16 may be 0.1 μm to 10 μm, preferably 0.3 μm to 1.0 μm.

Continuing to refer to FIG. 1B , in some embodiments, the silver feature 50 also includes a transition grain layer 22 in addition to the silver nanotwin structure 14 . When the silver component 50 is initially formed on the adhesive layer 12, the silver component 50 does not immediately form the silver nano-twin structure 14 with parallel twin grain boundaries, but forms a transition grain layer that does not contain parallel twin grain boundaries twenty two. In some embodiments, the thickness of the transition grain layer 22 is, for example, 0.1 micron to about 1 micron.

In some embodiments, the silver component 50 can be formed on the adhesive layer 12 by sputtering. In some embodiments, the sputtering adopts single-gun sputtering or multi-gun co-plating. The sputtering power supply can use, for example, DC, DC plus, RF, high-power pulsed magnetron sputtering (HIPIMS), and the like. The sputtering power of the silver component 50 may be, for example, about 100W to about 200W. The temperature of the sputtering process is room temperature, but the temperature rises from about 50° C. to about 200° C. during the sputtering process. The background pressure of the sputtering process is less than 1 x 10 ^-5 torr, and the working pressure may be, for example, about 1 x 10 ^-3 torr to 1 x 10 ^-2 torr. Argon flow is about 10 seem to about 20 seem. The stage rotational speed may be, for example, from about 5 rpm to about 20 rpm. The sputtering process substrate is applied with a bias voltage of about -100V to about -200V. The deposition rate of silver features 50 may be, for example, 0.5 nm/s to about 3 nm/s. It should be understood that the above sputtering process parameters can be adjusted appropriately according to actual applications, and the present disclosure is not limited thereto.

In other embodiments, the silver component 50 may be formed on the adhesive layer 12 by evaporation. In some embodiments, the background pressure of the evaporation process is less than 1 x 10 ^-5 torr, and the working pressure may be, for example, about 1 x 10 ^-4 torr to about 5 x 10 ^-4 torr. Argon flow is about 2 seem to about 10 seem. The stage rotational speed may be, for example, from about 5 rpm to about 20 rpm. The deposition rate of silver features 50 may be, for example, 0.5 nm/s to about 3 nm/s. Additionally, ion impact may be applied to the silver nanotwin structure 14 during the evaporation process with a voltage of about 10V to about 200V and a current of about 0.1A to about 1A. It should be understood that the above evaporation process parameters can be properly adjusted according to actual applications, and the present disclosure is not limited thereto.

Compared with sputtering or evaporation, the electroplating process has limitations in the size of components or contacts. Specifically, components or contacts generally smaller than 2 microns cannot be fabricated by electroplating. However, even components or contacts with dimensions below 2 microns can be easily fabricated by sputtering or evaporation.

The adhesive layer of the present disclosure can improve the bonding force between the subsequent metal film layer and the substrate to avoid peeling off. If the nano-twinned thin film is directly sputtered on the substrate, the film thickness can only reach about 2 microns due to insufficient bonding force between the nano-twinned thin film and the substrate.

In addition, if the nano-twinned film is directly formed on the substrate, the film will be affected by the crystal orientation of the substrate. Specifically, nanotwinned thin films with high twinning density can be formed only on (111)-oriented substrates, while nanotwinned structures formed on non-(111)-oriented substrates have only low twinning density. density. However, the adhesive layer of the present disclosure has the effect of lattice buffering for the formation of twin structures on substrates with different orientations. In detail, regardless of the crystal orientation of the substrate, the formed nanotwins have more than 90% [111] crystal orientation.

Referring to FIG. 1C, a second substrate 30 is provided. A conductive layer 40 is formed on the second substrate 30 , and the conductive layer 40 and the silver member 50 are disposed opposite to each other for subsequent bonding (see FIG. 1D ). In some embodiments, the second substrate 30 includes a printed circuit board, a metal heat sink, a ceramic substrate or a combination thereof. Conductive layer 40 may be formed of metal, which may include, for example, copper, gold, silver, or combinations thereof. In some embodiments, the conductive layer 40 may have a thickness of 10 microns to 100 microns. Specifically, the ceramic substrate includes alumina, aluminum nitride, silicon nitride or combinations thereof. In embodiments where the second substrate 30 is a printed circuit board, the conductive layer 40 is a copper circuit formed on the printed circuit board. In an embodiment where the second substrate 30 is a ceramic substrate, the conductive layer 40 is copper, gold, silver or a combination thereof additionally deposited on the ceramic substrate. In the embodiment where the second substrate 30 is a metal heat sink, the conductive layer 40 is integrated with the second substrate 30 instead of two components formed separately.

It should be understood that the structure shown in FIG. 1C is only an example, and various passive and active devices (not shown) may be additionally included on the second substrate 30, such as: resistors, capacitors, inductors, diodes, field effect transistors ( field effect transistors, FETs), metal-oxide semiconductor field-effect transistors (metal-oxide semiconductor FETs, MOSFETs), complementary metal-oxide semiconductor (complementary metal-oxide semiconductor, CMOS) transistors, bipolar junction transistors ( bipolar junction transistors, BJTs), laterally diffused MOS (laterally diffused MOS, LDMOS) transistors, high voltage transistors, high frequency transistors, other suitable devices or combinations thereof.

Referring to FIG. 1D , the silver component 50 is bonded opposite to the conductive layer 40 to form a bonding structure 100 . The silver component 50 includes a silver nanotwin structure 14 , and the silver nanotwin structure 14 has nanoscale parallel twin boundaries (Σ3+Σ9). In the cross-sectional view of the silver component 50 , electron backscatter diffraction (EBSD) analysis shows that the sum of twin boundaries (Σ3) and quasi-twin boundaries (Σ9) accounts for more than 40% of the overall grain boundaries. In addition, the parallel twin boundaries have more than 90% (for example greater than 90% or greater than 95%) [111] crystallographic orientations, and the distance between the twin boundaries can be 1 nm to 100 nm, preferably 2 nm to 50 nm.

In some embodiments, silver feature 50 has a thickness of at least 2.0 microns, such as from about 3.0 microns to about 10 microns. The silver nanotwin structure 14 has a thickness of at least 1.5 microns, such as about 2.0 microns to about 10 microns. The silver nanotwin structure 14 includes parallel stacked silver nanotwin columns 16 . In some embodiments, the diameter of the silver nanotwinned pillars 16 may be 0.1 μm to 10 μm, preferably 0.3 μm to 1.0 μm.

In practice, regardless of electroplating, sputtering or vapor deposition, when the thickness of the nano-twinned film is greater than 2 microns, the bonding force between the nano-twinned film and the substrate has obviously deteriorated and is easily peeled off. In the present disclosure, before forming the nano-twin film, an adhesive layer is formed on the substrate to ensure that the nano-twin film has a thickness greater than 10 micrometers, and the nano-twin film and the substrate still maintain good bonding force.

In addition, when the thickness of the nano-twinned film is less than 2 microns, the nano-twinned film will quickly react with the bonding material in the subsequent bonding process. The formed interfacial intermetallic compound has no bonding force with the substrate and causes the interface to fall off, which is meaningless in application.

In some embodiments, at a temperature of 100°C to 300°C (eg, about 100°C to about 150°C or about 120°C to about 180°C), and at a pressure of 3MPa to 30MPa (eg, about 5MPa to about 10MPa or about 15 MPa to about 20 MPa) to perform bonding of the silver member 50 to the conductive layer 40 . After the silver component 50 is bonded to the conductive layer 40 , the bonding structure 100 still retains the characteristics of the nano-twin structure.

In the present disclosure, using a pressure range of 3 MPa to 30 MPa, both the substrate and the silver nanotwins can remain intact. Although the conventional technology can carry out the bonding process at a low pressure of 0.8MPa to 3MPa, it must first perform chemical mechanical polishing (CMP) on the nano twin film to reduce the surface roughness before bonding, which is not only complicated but also damages the nano-twin film. Twin film. In this disclosure, under the condition of not damaging the substrate and the silver nano twins, compared with the conventional technology, a pressure of about 3 MPa to about 30 MPa is applied, so that the convex structure on the surface of the silver nano twins undergoes nanoscale plastic deformation , in order to achieve the effect of close contact with the target. It not only solves the problem of the surface roughness of silver nano twins, but also eliminates the need for additional complicated chemical mechanical polishing or other surface treatment steps in the conventional technology, so that the production capacity and yield can be greatly improved.

In addition, the hardness of the copper nanotwins in the conventional technology is as high as 4GPa, which is about twice the hardness of the silver nanotwins disclosed in this disclosure. If the plastic deformation mechanism of the nano-scale protrusion structure disclosed in this disclosure is to be used to solve the problem of the surface roughness of the copper nano-twins, a pressure of more than 100 MPa must be applied, which will cause damage to the substrate and the copper nano-twins.

Furthermore, the resistivity of silver is 1.63 μΩ•cm, which is lower than that of copper (1.69 μΩ•cm), gold (2.2 μΩ•cm) and nickel (6.90 μΩ•cm). The stacking fault energy of silver is 25 mJ/m ² , which is also lower than that of copper (70 mJ/m ² ), gold (45 mJ/m ² ) and nickel (225 mJ/m ² ). Therefore, silver is more likely to form twins than copper, gold and nickel. Compared with the conventional technique of forming copper nano twin films by electroplating, in the process of sputtering nano twin films of the disclosed embodiment, the diffusion rate of silver is more than 10 times faster than that of copper. The melting point of silver is about 100°C lower than that of copper, so the subsequent bonding process can be performed in a lower temperature environment.

In the present disclosure, the bonding process can be performed at a lower temperature than the conventional technology, so that the semiconductor device is not affected by the high temperature of the bonding process. In detail, compared with the silver nano-twin structure, the copper nano-twin structure needs to be bonded at a higher temperature (for example, higher than 200° C.). It can damage the device and cause tiny joints to fail in alignment due to material shrinkage when the bond is completed and cooled to room temperature.

In addition, the hardness of silver nanotwins is only about 2GPa, which is softer than copper nanotwins, and the surface roughness has less influence on subsequent bonding with other materials. Silver nano-twinned films are less prone to oxidation than copper nano-twinned films, and can obtain a more perfect bonding interface than copper nano-twinned films. These characteristics all show that the silver nano-twin structure of the disclosed embodiment has better advantages in market application. Especially for the needs of the semiconductor industry such as low-temperature wafer bonding and flip-chip assembly.

The formation of the twin structure is due to the fact that the accumulated strain energy in the material drives the atoms in some regions to uniformly shear (shear) to form a mirror-symmetric lattice position with the unsheared atoms inside the grain. Twins include: annealing twins and mechanical twins. The interface of mutual symmetry is the twin boundary.

Twins mainly occur in face-centered cubic (FCC) or hexagonal closed-packed (HCP) crystalline materials with the closest lattice arrangement. In addition to the conditions of the tightest crystal lattice arrangement, generally the smaller the stacking fault energy, the easier it is for a material to produce twins. For example, although aluminum is a face-centered cubic crystal structure material, its stacking energy is about 200 erg/cm ² , and twins rarely appear.

The twin boundary is a tuned (Coherent) crystal structure, which belongs to the low-energy Σ3 and Σ9 special grain boundaries. The crystal orientations are all {111} planes. Compared with the high-angle grain boundaries formed by general annealing and recrystallization, the interface energy of twin grain boundaries is about 5% of that of general high-angle grain boundaries (please refer to: George E. Dieter, Mechanical Metallurgy, McGRAW-HILL Book Company, 1976 , P.135-141).

Due to the low interface energy of the twin boundary, it can avoid being the path of oxidation, sulfidation and chloride ion corrosion. Therefore, it exhibits better oxidation resistance and corrosion resistance. In addition, the symmetrical lattice arrangement of such twins has less hindrance to electron transport. Therefore, it exhibits better electrical and thermal conductivity. Due to the blocking of dislocation movement by the twin boundaries, the material can still maintain high strength. This characteristic of high strength and high electrical conductivity has been confirmed in copper film (please refer to: L.Lu, Y.Shen, X.Chen, L.Qian, and K.Lu, Ultrahigh Strength and High Electrical Conductivity in Copper , Science, vol.304, 2004, p.422-426).

In terms of high-temperature stability, due to the lower interface energy of the twin boundary, its twin boundary is more stable than the general high-angle grain boundary. The twin boundary itself is not easy to move at high temperature, and it will also have a locking effect on the high-angle grain boundaries around the grains where it is located, making these high-angle grain boundaries unable to move. Therefore, the overall grain will not have obvious grain growth phenomenon at high temperature to maintain the high temperature strength of the material.

In terms of the reliability of current flow, due to the low rate of diffusion of atoms through or across twin boundaries with low energy. When using electronic products, it is also difficult to move atoms inside the wire accompanied by high-density current. In this way, the problem of electromigration (Electromigration) that often occurs when the wire is passed through the current is solved. It has been reported in copper thin films that twins can inhibit the electromigration of materials (please refer to: K.C.Chen, W.W.Wu, C.N.Liao, L.J.Chen, and K.N.Tu, Observation of Atomic Diffusion at Twin-Modified Grain Boundaries in Copper, Science, vol.321, 2008, p.1066-1069.).

In semiconductor devices, the silver components of the present disclosure can be used as electrodes. Compared with the conventional copper pillar and solder (solder) bonding structures, the silver component with the twin structure in the disclosed embodiment has better application advantages in the low temperature and low pressure bonding process. As mentioned above, compared with other metals (such as copper, gold, nickel, etc.), silver has lower resistivity, stack energy and melting point, and it is easier to form nano-twin structure and can be formed at low temperature and low pressure. Carry out bonding process.

The following describes some specific examples of forming silver components and test results of the present disclosure.

Embodiment one

Referring to Figure 2, sputter a titanium adhesive layer with a thickness of 0.1 micron on the back of the sapphire substrate grain with a light-emitting diode on the front, and then sputter a silver nano-twin film with a thickness of 8 microns on the titanium adhesive layer. After stacking the sapphire crystal grains with silver nanotwinned film and the alumina ceramic substrate covered with copper on the surface, heat for 30 minutes under the condition of vacuum degree of 10 ^-5 Torr, pressure of 20MPa and temperature of 200°C. Complete the die bonding process. Afterwards, the bonding strength was measured to be 32MPa by crystal push test, and the reflectivity was 46% at a wavelength of 460nm.

Embodiment two

Referring to Fig. 3, a titanium adhesive layer with a thickness of 0.1 micron is evaporated on the back of the sapphire substrate grain with a light-emitting diode on the front, and then a silver nano-twin film with a thickness of 8 microns is evaporated on the titanium adhesive layer. After stacking the sapphire crystal grains with silver nanotwinned film and the alumina ceramic substrate covered with copper on the surface, heat for 30 minutes under the condition of vacuum degree of 10 ^-5 Torr, pressure of 20MPa and temperature of 200°C. Complete the die bonding process. Afterwards, the bonding strength was measured to be 26MPa by crystal pushing test, and the reflectivity at a wavelength of 460nm was 45%.

Embodiments of the present disclosure have some advantageous features. The adhesive layer located between the substrate and the silver nano twin structure provides better bonding force between the substrate and the silver nano twin structure to avoid peeling off. The adhesive layer also has the effect of lattice buffering, so as to reduce the influence of substrate lattice on the growth of silver nano twin structure. In the cross-sectional view of the junction structure, the silver nanotwin structure has twin boundaries arranged in parallel, and accounts for more than 40% of the total grain boundaries. Parallel twin boundaries have more than 90% [111] crystallographic orientations. The silver nanotwinned structure accounts for at least 80% of the overall silver part. In addition, compared with other metals (such as copper, gold, nickel, etc.), silver has lower resistivity, stacking energy and melting point, which is easier to form nano-twin structure and can be bonded at low temperature and low pressure Process. The formed joint interface will not be cracked due to high-temperature thermal stress, and at the same time, the problem of wafer displacement can be avoided, thereby improving the reliability of the product.

The features of several embodiments are summarized above, so that those skilled in the art of the present invention can better understand the viewpoints of the embodiments of the present invention. Those skilled in the art of the present invention should understand that other processes and structures can be easily designed or modified based on the embodiments of the present invention to achieve the same purpose and/or advantages as the embodiments described herein. Those who have ordinary knowledge in the technical field of the present invention should also understand that such equivalent structures do not depart from the spirit and scope of the present invention, and can be made in various ways without departing from the spirit and scope of the present invention. changes, substitutions and replacements. Therefore, the scope of protection of the present invention should be defined by the scope of the appended patent application.

10: Substrate 12: Adhesive layer 14: Silver nano-twin structure 16:Silver nano-twin column 20: Light emitting element 22: Transition grain layer 30: Substrate 40: Conductive layer 50: silver parts 100: joint structure T1: Thickness T2: Thickness

Various aspects of the present disclosure will be described in detail below with reference to the accompanying drawings. It should be noted that, in accordance with the standard practice in the industry, the various features are not drawn to scale and are used for illustrative purposes only. In fact, the dimensions of the elements may be arbitrarily expanded or reduced to clearly represent the features of the present disclosure. Figures 1A-1D are schematic cross-sectional views illustrating bonding structures at different stages of fabrication, according to some embodiments. FIG. 2 is a focused ion beam (FIB) image of a joint structure of a silver nanotwinned component and a sapphire substrate, according to some embodiments, and the joint structure is formed by a sputtering process. FIG. 3 is a focused ion beam (FIB) image of a joint structure of a silver nanotwin component and a sapphire substrate according to other embodiments, and the joint structure is formed by evaporation process.

10: Substrate

12: Adhesive layer

14: Silver nano-twin structure

20: Light emitting element

22: Transition grain layer

30: Substrate

40: Conductive layer

50: silver parts

100: joint structure

Claims (20)

A joint structure comprising: A first substrate has a first surface and a second surface opposite; a light emitting element on the first surface; an adhesive layer on the second surface; a second substrate disposed opposite to the second surface of the first substrate; a conductive layer on the second substrate and facing the second surface; and A silver component, between the adhesive layer and the conductive layer, wherein the silver component includes a silver nanotwin structure, and the silver nanotwin structure has a parallel twinning boundary, wherein the parallel twinning The boundaries include more than 90% of the [111] crystallographic orientations. The bonding structure of claim 1, wherein at least 80% of the silver component is the silver nanotwin structure. The bonding structure of claim 1, wherein the thickness of the silver component is at least 2.0 microns. The bonding structure as claimed in claim 1, wherein the thickness of the silver nanotwin structure is at least 1.5 microns. The bonding structure as claimed in claim 1, wherein the distance between the parallel twin boundaries is 1 nm to 100 nm. The bonding structure according to claim 1, wherein the adhesive layer has a thickness of 0.01 micron to 1 micron. The joint structure according to claim 1, wherein the adhesive layer comprises titanium, chromium, titanium-tungsten or a combination thereof. The bonding structure as claimed in claim 1, wherein the first substrate is a sapphire substrate. The bonding structure according to claim 1, wherein the second substrate comprises a printed circuit board, a metal heat sink, a ceramic substrate or a combination thereof. The joint structure according to claim 9, wherein the ceramic substrate comprises aluminum oxide, aluminum nitride, silicon nitride or a combination thereof. The bonding structure as claimed in claim 1, further comprising a transition die layer between the adhesive layer and the silver component. A method of forming a bonded structure, comprising: providing a first substrate having an opposite first surface and a second surface; forming a light emitting element on the first surface of the first substrate; forming an adhesive layer on the second surface of the first substrate; forming a silver component on the adhesive layer; providing a second substrate on which a conductive layer is formed; and The silver component is relatively bonded to the conductive layer, wherein the silver component includes a silver nanotwin structure, and the silver nanotwin structure has a parallel twin boundary, wherein the parallel twin boundary has 90% The above [111] crystallographic orientation. The method for forming a bonded structure as claimed in claim 12, wherein at least 80% of the silver component is the silver nanotwin structure, and wherein the spacing between parallel twin grain boundaries is 1 nm to 100 nm. The method of forming a bonding structure as claimed in claim 12, wherein the thickness of the silver component is at least 2.0 microns, and wherein the thickness of the silver nanotwin structure is at least 1.5 microns. The method for forming a bonding structure as claimed in claim 12, wherein the step of forming the adhesive layer and the silver component comprises sputtering or evaporation. The method of forming a bonding structure as claimed in claim 12, wherein the bonding of the silver component and the conductive layer is performed at a temperature of 100° C. to 200° C. The method of forming a bonding structure as claimed in claim 12, wherein the bonding of the silver member and the conductive layer is performed under a pressure of 3 MPa to 30 MPa. The method for forming a bonding structure as claimed in claim 12, wherein the adhesive layer comprises titanium, chromium, titanium-tungsten or a combination thereof. The method for forming a joint structure according to claim 12, wherein the first substrate is a sapphire substrate, and the second substrate includes a printed circuit board, a metal heat sink, a ceramic substrate or a combination thereof. The method for forming a bonding structure as claimed in claim 12 further includes forming a transition grain layer between the adhesive layer and the silver component.

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