TW202240171A - Test socket for semiconductor integrated circuits - Google Patents

Test socket for semiconductor integrated circuits Download PDF

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TW202240171A
TW202240171A TW110113115A TW110113115A TW202240171A TW 202240171 A TW202240171 A TW 202240171A TW 110113115 A TW110113115 A TW 110113115A TW 110113115 A TW110113115 A TW 110113115A TW 202240171 A TW202240171 A TW 202240171A
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Taiwan
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socket
rotary joint
rotary
state
contact
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TW110113115A
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Chinese (zh)
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彼得 烏蘇
家純 周
翔 蘇
賈斯汀 巴哈吉
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美商史密斯英特康美國公司
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Priority to TW110113115A priority Critical patent/TW202240171A/en
Publication of TW202240171A publication Critical patent/TW202240171A/en

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Abstract

A test socket for an IC includes a socket body, a rotational contact, and an elastomer retainer. The socket body includes a top surface that faces the IC, and a bottom surface that faces a load board. The socket body defines a slot extending from the top surface to an aperture in the bottom surface. The rotational contact is positioned in the slot. The elastomer retainer captures the rotational contact in the socket body and includes a round section about which the rotational contact rotates. The elastomer retainer compresses under translatory force from the rotational contact when translating from the free state to the pre-load state upon engagement with the load board, and compresses under rotational force from the rotational contact when rotating from the pre-load state to the loaded state upon engagement with the IC.

Description

半導體積體電路測試插座Semiconductor integrated circuit test socket

本發明之技術領域大體上係關於一種用於半導體積體電路之測試插座,且更具體而言,本發明之技術領域係關於一種具有在受測試積體電路之接觸墊上平移或「摩擦」之旋轉接點之測試插座。The technical field of the present invention relates generally to a test socket for a semiconductor integrated circuit, and more specifically, the technical field of the present invention relates to a test socket having the ability to translate or "rub" on the contact pads of the integrated circuit under test. Test socket for rotary contact.

半導體積體電路(IC)產生於各種封裝或晶片組態(包含(例如)常見於諸多IC應用中且大量生產之四方扁平無引線(QFN)封裝)中。生產任何數量之IC一般包含依模擬一終端使用者應用該等IC之一方式測試IC。測試IC之一方式係將各IC連接至訓練IC之接點及各種功能之一印刷電路板(PCB)。PCB有時指稱一負載板且可再用於測試諸多IC。實現此測試之負載板之一基本組件係可多次再用於測試大量IC之IC之一測試插座。測試插座將IC電及機械連接至負載板。測試插座可再用之程度由其可在不降級效能(例如信號效能)之情況下承受之「循環」次數量化。一IC插入或固定至測試插座中之每一次指稱一個循環。一般而言,在經過多次循環之後,測試插座之接點及結構之電及機械性質開始由於(例如)氧化、磨蝕、壓縮、拉伸或其他形式之磨損而降級。此降級最終影響測試本身之完整性,此時測試插座達到其使用壽命之終點。因此,期望測試插座在長生命循環中維持良好電及機械效能。Semiconductor integrated circuits (ICs) are produced in a variety of packages or chip configurations including, for example, quad flat no-leads (QFN) packages that are common in many IC applications and are mass-produced. Producing ICs in any quantity generally includes testing the ICs in a manner that simulates an end-user application of the ICs. One way to test the ICs is to connect each IC to a printed circuit board (PCB) that trains the contacts of the IC and various functions. A PCB is sometimes referred to as a load board and can be reused for testing many ICs. One of the basic components of the load board that enables this testing is a test socket for the IC that can be reused many times to test a large number of ICs. The test socket electrically and mechanically connects the IC to the load board. The degree of reusability of a test socket is quantified by the number of "cycles" it can withstand without degrading performance (eg, signal performance). Each time an IC is inserted or secured into a test socket is referred to as one cycle. Generally, after many cycles, the electrical and mechanical properties of the contacts and structure of the test socket begin to degrade due to, for example, oxidation, abrasion, compression, tension, or other forms of wear. This degradation ultimately affects the integrity of the test itself when the test socket reaches the end of its useful life. Therefore, it is desirable for the test socket to maintain good electrical and mechanical performance over a long life cycle.

在一態樣中,一種用於一扁平無引線半導體IC之測試插座包含一插座本體、一旋轉接點及一彈性體保持器。該插座本體包含經組態以面向該扁平無引線半導體IC之一頂面及經組態以面向一負載板之與該頂面對置之一底面。該插座本體界定自該頂面延伸至該底面中之一孔隙之一插槽。該旋轉接點定位於該插槽中。該旋轉接點經組態以平移於一自由狀態與一預負載狀態之間且圍繞該彈性體保持器之一圓形區段旋轉於該預負載狀態與一負載狀態之間。該彈性體保持器將該旋轉接點捕獲於該插座本體中。該彈性體保持器經組態以在與該負載板接合之後在自該自由狀態平移至該預負載狀態時在來自該旋轉接點之平移力下壓縮及在與該扁平無引線半導體IC接合之後在自該預負載狀態旋轉至該負載狀態時在來自該旋轉接點之旋轉力下壓縮。In one aspect, a test socket for a flat leadless semiconductor IC includes a socket body, a rotary contact, and an elastomeric retainer. The socket body includes a top surface configured to face the flat leadless semiconductor IC and a bottom surface configured to face a load board opposite the top surface. The socket body defines a slot extending from the top surface to an aperture in the bottom surface. The rotary joint is positioned in the slot. The rotary joint is configured to translate between a free state and a preloaded state and to rotate about a circular segment of the elastomeric retainer between the preloaded state and a loaded state. The elastomer retainer captures the swivel joint in the socket body. The elastomeric retainer is configured to compress under the translational force from the rotary joint when translating from the free state to the preloaded state after engagement with the load board and after engagement with the flat leadless semiconductor IC Compression under the rotational force from the rotary joint when rotating from the preloaded state to the loaded state.

在另一態樣中,一種測試系統包含一負載板及一測試插座。該測試插座包含經組態以面向半導體IC之一頂面及安裝至該負載板之一底面。插座本體界定自該頂面延伸至該底面中之一孔隙之一插槽。旋轉接點在一預負載狀態中定位於該插槽中。該旋轉接點經組態以圍繞彈性體保持器之一圓形區段旋轉於該預負載狀態與一負載狀態之間。該彈性體保持器將該旋轉接點捕獲於該插座本體中。該彈性體保持器壓縮於一插座框與該旋轉接點之間且經組態以在與該半導體IC接合之後在自該預負載狀態旋轉至該負載狀態時在來自該旋轉接點之旋轉力下進一步壓縮。In another aspect, a test system includes a load board and a test socket. The test socket includes a top surface configured to face a semiconductor IC and a bottom surface mounted to the load board. The socket body defines a slot extending from the top surface to an aperture in the bottom surface. The rotary joint is positioned in the slot in a preloaded state. The rotary joint is configured to rotate about a circular segment of the elastomeric retainer between the preloaded state and a loaded state. The elastomer retainer captures the swivel joint in the socket body. The elastomeric retainer is compressed between a socket frame and the rotary joint and is configured to withstand rotational force from the rotary joint when rotating from the preloaded state to the loaded state after engagement with the semiconductor IC. Compress further.

在又一態樣中,提供一種組裝用於一半導體IC之一測試系統之方法。該方法包含將複數個旋轉接點定位於一測試插座之一插座本體之對應插槽中。該方法包含將一彈性體保持器定位於該等旋轉接點上方。該方法包含將一插座框安裝於該複數個旋轉接點及該彈性體保持器上方。In yet another aspect, a method of assembling a test system for a semiconductor IC is provided. The method includes positioning a plurality of rotary contacts in corresponding slots of a socket body of a test socket. The method includes positioning an elastomeric retainer over the rotary joints. The method includes installing a socket frame over the plurality of rotary joints and the elastomer retainer.

本文中所描述之測試插座之實施例提供一旋轉接點,其在與一負載板及一受測試IC接合時在IC之一接觸墊上產生摩擦。所描述之測試插座經組態以接納一扁平無引線IC封裝(諸如一QFN IC),其中可期望IC之接觸墊上之摩擦減小IC與測試插座之旋轉接點之間的電連接之接觸電阻。相反地,本文中所描述之測試插座一般藉由負載板之PCB接點上之旋轉接點來最小化平移或摩擦。Embodiments of the test socket described herein provide a rotary joint that, when engaged with a load board and an IC under test, creates friction on a contact pad of the IC. The described test socket is configured to accept a flat no-lead IC package, such as a QFN IC, where friction on the contact pads of the IC can be expected to reduce the contact resistance of the electrical connection between the IC and the rotary contacts of the test socket . In contrast, the test sockets described herein generally minimize translation or friction by rotating the joints on the PCB contacts of the load board.

圖1係用於測試一半導體IC 102之一實例性IC測試系統100之一橫截面圖。IC 102係封裝至一單一半導體晶片中之一或多個電子電路,單一半導體晶片一般包含用於傳導至及來自封裝內之電路之信號之複數個接觸墊104。IC測試系統100包含其上安裝一測試插座108之一負載板106。負載板106包含將IC 102連接至一負載電路或測試電路(圖中未展示)之PCB接點110 (與負載板106整合)。測試插座108係用於將IC 102之諸多單元連接至負載板106之一可再用介面。圖2係用於一QFN IC (諸如IC 102)之測試插座108之一透視圖。測試插座108包含界定接納IC 102之一插口114之一插座本體112。在測試插座108之特定實施例中,插座本體112包含可呈筆直或錐形以將IC 102導引至插口114中以確保接觸墊104與PCB接點110適當對準之導壁116。更具體而言,導壁116使接觸墊104與測試插座108之對應接點(圖中未展示)對準。測試插座108之接點延伸穿過插座本體112以電連接IC 102之各接觸墊104與負載板106上之一對應PCB接點110。FIG. 1 is a cross-sectional view of an exemplary IC test system 100 for testing a semiconductor IC 102 . IC 102 is one or more electronic circuits packaged into a single semiconductor die, which typically includes a plurality of contact pads 104 for conducting signals to and from the circuits within the package. The IC testing system 100 includes a load board 106 on which a test socket 108 is mounted. Load board 106 includes PCB contacts 110 (integrated with load board 106 ) that connect IC 102 to a load circuit or test circuit (not shown). The test socket 108 is used to connect the units of the IC 102 to a reusable interface of the load board 106 . FIG. 2 is a perspective view of test socket 108 for a QFN IC, such as IC 102 . The test socket 108 includes a socket body 112 that defines a socket 114 that receives the IC 102 . In a particular embodiment of test socket 108 , socket body 112 includes guide walls 116 which may be straight or tapered to guide IC 102 into socket 114 to ensure proper alignment of contact pads 104 with PCB contacts 110 . More specifically, the guide walls 116 align the contact pads 104 with corresponding contacts (not shown) of the test socket 108 . The contacts of the test socket 108 extend through the socket body 112 to electrically connect each contact pad 104 of the IC 102 to a corresponding PCB contact 110 on the load board 106 .

圖3係一自由狀態中(即,在測試插座108安裝至負載板106之前且在固定IC 102之前)之測試插座108 (圖1中所展示)中之一旋轉接點300之一實施例之一橫截面圖。圖4係一預負載狀態中(即,測試插座108安裝至負載板106,但IC 102尚未固定)之旋轉接點300之一橫截面圖。圖5係一負載狀態中(即,測試插座108安裝至負載板106且IC 102固定至插口114中)之旋轉接點300之一橫截面圖。圖6係與測試插座108分離之旋轉接點300之一透視圖。旋轉接點300由諸如(例如)銅、銅合金、鋁、鋁合金、鋼或其他導電金屬或其等之一些組合之一導電材料構成。3 is an illustration of one embodiment of a rotary joint 300 in the test socket 108 (shown in FIG. 1 ) in a free state (i.e., before the test socket 108 is mounted to the load board 106 and before the IC 102 is secured). A cross-sectional view. 4 is a cross-sectional view of rotary joint 300 in a preloaded state (ie, test socket 108 mounted to load board 106, but IC 102 not yet secured). 5 is a cross-sectional view of rotary joint 300 in a loaded state (ie, test socket 108 mounted to load board 106 and IC 102 secured in socket 114 ). FIG. 6 is a perspective view of the rotary joint 300 detached from the test socket 108 . Rotary joint 300 is constructed of a conductive material such as, for example, copper, copper alloys, aluminum, aluminum alloys, steel or other conductive metals, or some combination thereof.

旋轉接點300定位於插座本體112中之一插槽302中。旋轉接點300自插口114延伸至插座本體112中之一孔隙304,其中旋轉接點突出及接合PCB接點110。旋轉接點300包含在旋轉接點300處於自由狀態中時分別靜置於插座本體112之一表面310及一支撐邊緣312上之一表面306及一臂308。旋轉接點300藉由一彈性體保持器314捕獲於插槽302中,彈性體保持器314使旋轉接點300保持或偏置抵靠表面310及支撐邊緣312。彈性體保持器314提供力來維持旋轉接點300與IC 102之接觸墊104之間及旋轉接點300與負載板106之PCB接點110之間的良好連接。The rotary joint 300 is positioned in a slot 302 in the socket body 112 . The rotary contact 300 extends from the socket 114 to a hole 304 in the socket body 112 , wherein the rotary contact protrudes and engages the PCB contact 110 . The rotary joint 300 includes a surface 306 and an arm 308 resting on a surface 310 of the socket body 112 and a supporting edge 312 respectively when the rotary joint 300 is in a free state. The rotary joint 300 is captured in the socket 302 by an elastomeric retainer 314 which holds or biases the rotary joint 300 against the surface 310 and the support edge 312 . Elastomeric retainer 314 provides force to maintain a good connection between rotary joint 300 and contact pad 104 of IC 102 and between rotary joint 300 and PCB contact 110 of load board 106 .

旋轉接點300終止於具有在IC 102之接觸墊104上接合及平移或摩擦之一尖端316之一第一端,且包含將尖端316連接至臂308之一下表面之一圓形邊緣318。旋轉接點300終止於具有一圓釘320及一平坦部322之與尖端316對置之一第二端。Rotary joint 300 terminates at a first end with a tip 316 that engages and translates or rubs on contact pad 104 of IC 102 and includes a rounded edge 318 connecting tip 316 to a lower surface of arm 308 . The swivel joint 300 terminates at a second end opposite the tip 316 having a stud 320 and a flat portion 322 .

旋轉接點300之尖端316應為尖的或「尖銳」以能夠在IC 102之接觸墊104上有效摩擦。例如,在一實施例中,尖端316依約0.05毫米(mm)之一半徑圓化。更一般而言,尖端316應依不超過0.10 mm之一半徑圓化。Tip 316 of rotary contact 300 should be pointed or “sharp” to be able to rub effectively on contact pad 104 of IC 102 . For example, in one embodiment, tip 316 is rounded to a radius of about 0.05 millimeter (mm). More generally, the tip 316 should be rounded to a radius not exceeding 0.10 mm.

將尖端316連接至旋轉接點300之臂308之下表面之圓形邊緣318依一足夠半徑圓化以能夠在自由狀態中測試插座108之組裝期間平滑運動且能夠在插槽302內平滑旋轉運動。例如,在一實施例中,圓形邊緣318具有約0.15 mm之一半徑。The rounded edge 318 connecting the tip 316 to the lower surface of the arm 308 of the swivel joint 300 is rounded to a sufficient radius to enable smooth movement during assembly of the test socket 108 in a free state and to enable smooth rotational movement within the socket 302 . For example, in one embodiment, rounded edge 318 has a radius of about 0.15 mm.

旋轉接點之臂308實質上呈筆直,且在特定實施例中,在尖端316處比在旋轉接點300之對置端處更窄。例如,臂308可在尖端316附近具有一窄寬度W漸變至與PCB接點110之接點附近之一較寬寬度W。臂308之錐度實現歸因於增大寬度W之旋轉接點300之增大機械強度。臂308之錐度亦藉由避免旋轉接點300之表面不連續來實現高效電流傳導。臂308之寬度W亦部分界定(藉由表面306之形狀)旋轉接點300在表面310及支撐邊緣312處靜置於插座本體112上之位置。The arm 308 of the swivel joint is substantially straight and, in a particular embodiment, narrower at the tip 316 than at the opposite end of the swivel joint 300 . For example, arm 308 may have a narrow width W near tip 316 that tapers to a wider width W near the contact with PCB contact 110 . The taper of the arm 308 achieves increased mechanical strength of the rotary joint 300 due to the increased width W. The taper of the arms 308 also enables efficient current conduction by avoiding surface discontinuities of the rotary joint 300 . The width W of the arm 308 also partially defines (by the shape of the surface 306 ) where the swivel joint 300 rests on the socket body 112 at the surface 310 and the support edge 312 .

旋轉接點300之表面306在測試插座108處於自由狀態中時靜置於插座本體112之表面310上及在處於預負載或負載狀態中時上升遠離表面310。當旋轉接點移動至預負載狀態中時,圓釘320接合彈性體保持器314。圓釘320經圓化以提供彈性體保持器314之平滑變形且在變形時減少彈性體保持器314上之磨損。在一實施例中,例如,圓釘320具有約0.18 mm之一半徑。更一般而言,圓釘320應具有至少0.10 mm之一半徑以實現平滑變形且最小化彈性體保持器314上之磨損。Surface 306 of rotary joint 300 rests on surface 310 of socket body 112 when test socket 108 is in a free state and rises away from surface 310 when in a preloaded or loaded state. The stud 320 engages the elastomeric retainer 314 when the rotary joint moves into the preloaded state. The studs 320 are rounded to provide smooth deformation of the elastomeric retainer 314 and reduce wear on the elastomeric retainer 314 when deformed. In one embodiment, for example, round peg 320 has a radius of about 0.18 mm. More generally, the studs 320 should have a radius of at least 0.10 mm to achieve smooth deformation and minimize wear on the elastomeric retainer 314 .

當測試插座108安裝於負載板106上(即,圖4中所展示之預負載狀態)時,PCB接點110接合旋轉接點300且負載板106接合插座本體112。在接合旋轉接點300之後,PCB接點110迫使旋轉接點300向上以壓縮彈性體保持器314抵靠測試插座108之一插座框324。更具體而言,旋轉接點300朝向插座框324平移以使彈性體保持器314抵靠插座框324之一第一頭326及一第二頭328壓縮及變形。旋轉接點300之平坦部322使旋轉接點300能夠沿部分界定插槽302之插座本體112之一壁平滑平移。在與負載板106接合且壓縮彈性體保持器314之後,彈性體保持器314將一預負載力施加至旋轉接點300。施加至旋轉接點300之預負載力確保旋轉接點300與PCB接點110之間良好電接觸,且必須藉由將IC 102插入至插口114中來至少部分克服。由彈性體保持器314提供之預負載力量可藉由選擇彈性體保持器314之適當性質來針對一給定應用客製。When the test socket 108 is mounted on the load plate 106 (ie, the preloaded state shown in FIG. 4 ), the PCB contacts 110 engage the rotary joint 300 and the load plate 106 engages the socket body 112 . After engaging the swivel joint 300 , the PCB contact 110 forces the swivel joint 300 upward to compress the elastomeric retainer 314 against one of the socket frames 324 of the test socket 108 . More specifically, the rotary joint 300 translates toward the socket frame 324 to compress and deform the elastomeric retainer 314 against a first head 326 and a second head 328 of the socket frame 324 . Flat portion 322 of swivel joint 300 enables smooth translation of swivel joint 300 along a wall of socket body 112 partially defining slot 302 . After engaging the load plate 106 and compressing the elastomeric retainer 314 , the elastomeric retainer 314 applies a preload force to the rotary joint 300 . The preload force applied to rotary joint 300 ensures good electrical contact between rotary joint 300 and PCB contact 110 and must be at least partially overcome by inserting IC 102 into socket 114 . The amount of preload provided by the elastomeric retainer 314 can be customized for a given application by selecting appropriate properties of the elastomeric retainer 314 .

當IC 102插入或固定至測試插座108之插口114中時,接觸墊104接合旋轉接點300之尖端316以迫使尖端316向下進入插座本體112中之插槽302。尖端316向下運動至插槽302中導致旋轉接點300圍繞彈性體保持器314旋轉運動。插座本體112之支撐邊緣312亦充當一支點或樞軸點以將IC 102之向下力轉換成由旋轉接點300之圓釘320施加至彈性體保持器314上之一壓縮力或一接觸力,彈性體保持器314進一步抵靠插座框324之第一頭326及第二頭328變形。同樣地,PCB接點110亦用作一樞軸點以將IC 102之向下力轉換成一旋轉力以壓縮彈性體保持器314。因為旋轉接點300之運動係旋轉的,所以圓釘320旋轉遠離插座本體112之壁,且同樣地,旋轉接點300之尖端316沿接觸墊104平移或摩擦。由旋轉接點300且更具體而言,尖端316之旋轉運動產生之摩擦減小接觸墊104與旋轉接點300之間的連接之電阻且最終減小IC 102之接觸墊104與負載板106之PCB接點110之間的電連接之接觸電阻。圍繞彈性體保持器314且跨PCB接點110旋轉能夠減少負載板106之PCB墊110上之摩擦。When IC 102 is inserted or secured into socket 114 of test socket 108 , contact pad 104 engages tip 316 of rotary contact 300 to force tip 316 down into socket 302 in socket body 112 . Downward movement of tip 316 into slot 302 causes rotational movement of swivel joint 300 about elastomeric retainer 314 . The supporting edge 312 of the socket body 112 also acts as a fulcrum or pivot point to convert the downward force of the IC 102 into a compressive force or a contact force applied by the peg 320 of the rotary joint 300 to the elastomeric retainer 314 , the elastomer retainer 314 is further deformed against the first head 326 and the second head 328 of the socket frame 324 . Likewise, the PCB contact 110 also serves as a pivot point to convert the downward force of the IC 102 into a rotational force to compress the elastomeric retainer 314 . Because the motion of the rotary joint 300 is rotational, the peg 320 rotates away from the wall of the socket body 112 and likewise the tip 316 of the rotary joint 300 translates or rubs along the contact pad 104 . The friction created by the rotational motion of the rotary contact 300 and, more specifically, the tip 316 reduces the resistance of the connection between the contact pads 104 and the rotary contact 300 and ultimately reduces the distance between the contact pads 104 of the IC 102 and the load board 106. The contact resistance of the electrical connection between the PCB contacts 110 . Rotation about the elastomeric retainer 314 and across the PCB joint 110 can reduce friction on the PCB pad 110 of the load board 106 .

當IC 102自測試插座108之插口114移除時,先前在旋轉力下變形之彈性體保持器314回復至預負載狀態且使旋轉接點300上之旋轉力反向,且藉由一回復力使旋轉接點300回復至預負載狀態。When the IC 102 is removed from the receptacle 114 of the test socket 108, the elastomeric retainer 314, which was previously deformed under the rotational force, returns to the preloaded state and reverses the rotational force on the rotary joint 300, and by a restoring force Return the rotary joint 300 to the preload state.

圖7係在自由狀態中定位於測試插座108中之旋轉接點300 (如圖3至圖6中所展示)之一透視圖。圖7繪示與IC 102分離之接觸墊104且繪示與負載板106分離之PCB接點110。旋轉接點300定位於界定於插座本體112中之插槽302中。圖7僅繪示接近所展示之旋轉接點300之插座本體112之部分。測試插座108之實施例可包含沿一或多個維度封裝於各自插槽302中之任何數目個旋轉接點300。例如,圖2中所展示之測試插座108之一實施例經組態用於具有配置於插座本體112之所有四個側上之複數個旋轉接點300之一QFN IC。在此一實施例中,例如,插槽302獨立界定於插座本體112中以將旋轉接點300之運動約束為圖3至圖5所展示之平面中之旋轉運動。相反地,在特定實施例中,彈性體保持器314及插座框324跨越定位於其各自插槽302中之多個旋轉接點300。FIG. 7 is a perspective view of the rotary joint 300 (as shown in FIGS. 3-6 ) positioned in the test socket 108 in a free state. FIG. 7 shows the contact pads 104 separated from the IC 102 and shows the PCB contacts 110 separated from the load board 106 . The rotary joint 300 is positioned in a slot 302 defined in the socket body 112 . FIG. 7 shows only the portion of the socket body 112 close to the rotary contact 300 shown. Embodiments of the test socket 108 may include any number of rotary joints 300 packaged in respective sockets 302 along one or more dimensions. For example, one embodiment of the test socket 108 shown in FIG. 2 is configured for a QFN IC with a plurality of rotary contacts 300 disposed on all four sides of the socket body 112 . In this embodiment, for example, socket 302 is defined independently in socket body 112 to constrain the motion of rotary joint 300 to rotational motion in the plane shown in FIGS. 3-5 . Rather, in certain embodiments, the elastomeric retainer 314 and the receptacle frame 324 span the plurality of rotary joints 300 positioned in their respective sockets 302 .

彈性體保持器314提供力來維持旋轉接點300與IC 102之接觸墊104之間及旋轉接點300與負載板106之PCB接點110之間的良好或「緊密」連接。彈性體保持器314包含接合旋轉接點300以產生預負載力之一圓形區段702。彈性體保持器314包含一四邊形區段704,其在旋轉接點300轉變至負載狀態時在來自IC 102之一接觸力下變形及在自測試插座108之插口114移除IC 102時藉由一回復力將旋轉接點300推回至預負載狀態。插座框324之第一頭326經定位以與釘320之一頂點或尖端對準。同樣地,插座框324之第二頭328經定位以與彈性體保持器314之圓形區段702之一中心線對準。Elastomeric retainer 314 provides force to maintain a good or “tight” connection between rotary joint 300 and contact pad 104 of IC 102 and between rotary joint 300 and PCB contact 110 of load board 106 . The elastomeric retainer 314 includes a circular segment 702 that engages the swivel joint 300 to create a preload force. Elastomeric retainer 314 includes a quadrangular section 704 that deforms under a contact force from IC 102 when rotary joint 300 transitions to the loaded state and that is deformed by a contact force when IC 102 is removed from socket 114 of test socket 108. The restoring force pushes the rotary joint 300 back to the preload state. The first head 326 of the receptacle frame 324 is positioned to align with an apex or tip of the nail 320 . Likewise, the second head 328 of the socket frame 324 is positioned to align with a centerline of the circular section 702 of the elastomeric retainer 314 .

圖8係組裝圖3至圖5及圖7中所展示之測試插座108之一方法800之一流程圖。將旋轉接點300定位802於一插座本體112之對應插槽302中。各旋轉接點300定位於一表面310及一支撐邊緣312上。接著,將彈性體保持器314定位804於旋轉接點300上方以將旋轉接點300捕獲於彈性體保持器314與插座本體112之間。將插座框324安裝806於旋轉接點300及彈性體保持器314上方,其使彈性體保持器314及旋轉接點300兩者保持於適當位置中。當旋轉接點300處於自由狀態中時(即,在將測試插座108安裝至一負載板上之前),彈性體保持器314未被壓縮。接著,將測試插座108安裝808至負載板106上以使旋轉接點300自自由狀態轉變至預負載狀態。旋轉接點300朝向插座框324平移至預負載狀態中以壓縮彈性體保持器314抵靠插座框324。更具體而言,彈性體保持器314抵靠插座框324之第一頭326及第二頭328壓縮及變形。FIG. 8 is a flowchart of a method 800 of assembling the test socket 108 shown in FIGS. 3-5 and 7 . The rotary contact 300 is positioned 802 in a corresponding slot 302 of a socket body 112 . Each rotary joint 300 is positioned on a surface 310 and a supporting edge 312 . Next, the elastomeric retainer 314 is positioned 804 over the swivel joint 300 to capture the swivel joint 300 between the elastomeric retainer 314 and the socket body 112 . Mounting 806 the socket frame 324 over the rotary joint 300 and the elastomeric retainer 314 holds both the elastomeric retainer 314 and the rotary joint 300 in place. When the swivel joint 300 is in a free state (ie, prior to mounting the test socket 108 on a load board), the elastomeric retainer 314 is not compressed. Next, the test socket 108 is mounted 808 on the load board 106 to transition the rotary joint 300 from the free state to the preload state. The rotary joint 300 translates towards the socket frame 324 into a preloaded state to compress the elastomeric retainer 314 against the socket frame 324 . More specifically, the elastomeric retainer 314 compresses and deforms against the first head 326 and the second head 328 of the receptacle frame 324 .

將半導體IC 102固定810至測試插座108中以使旋轉接點300自預負載狀態轉變至負載狀態。旋轉接點300圍繞彈性體保持器314旋轉以使各旋轉接點300之釘320旋轉至彈性體保持器314中以壓縮彈性體保持器314抵靠插座框324。各旋轉接點300之尖端316跨半導體IC 102之一對應接觸墊104平移。Securing 810 the semiconductor IC 102 into the test socket 108 causes the rotary joint 300 to transition from the preloaded state to the loaded state. Rotation of the rotary joints 300 about the elastomeric retainer 314 rotates the peg 320 of each rotary joint 300 into the elastomeric retainer 314 to compress the elastomeric retainer 314 against the socket frame 324 . The tip 316 of each rotary joint 300 translates across a corresponding one of the contact pads 104 of the semiconductor IC 102 .

當半導體IC 102自測試插座108移除時,旋轉接點300旋轉回至預負載狀態。當自負載狀態轉變回至預負載狀態時,彈性體保持器314釋放釘320且使釘320朝向插座本體112之表面310旋轉回以藉此使尖端316朝向插座框324旋轉回。When the semiconductor IC 102 is removed from the test socket 108, the rotary joint 300 rotates back to the preload state. When transitioning back from the loaded state to the preloaded state, the elastomeric retainer 314 releases the spike 320 and rotates the spike 320 back toward the surface 310 of the socket body 112 thereby rotating the tip 316 back toward the socket frame 324 .

本文中所描述之系統及設備之技術效應可包含:(a)經由一彈性體保持器提供可客製預負載力;(b)能夠在將IC固定至測試插座中時跨半導體IC接觸墊摩擦;(c)藉由在將IC固定於測試插座中時引入摩擦來減小測試插座與IC之間的接觸電阻;及(d)藉由旋轉接點來減少跨負載板之PCB接點之摩擦。Technical effects of the systems and apparatus described herein may include: (a) providing customizable preload forces via an elastomeric retainer; (b) being able to rub across semiconductor IC contact pads when securing the IC into a test socket ; (c) reduce the contact resistance between the test socket and the IC by introducing friction when securing the IC in the test socket; and (d) reduce the friction of the PCB contact across the load board by rotating the contact .

在以上說明書及以下申請專利範圍中,參考具有以下含義之若干術語。In the above specification and the claims below, reference is made to certain terms with the following meanings.

如本文中所使用,以單數敘述及前面加用語「一」之一元件或步驟應被理解為不排除複數個元件或步驟,除非明確敘述此排除。此外,參考本發明之「實例性實施方案」或「一實施方案」不意欲被解譯為排除亦併入所敘述之特徵之額外實施方案之存在。As used herein, an element or step recited in the singular and preceded by the word "a" should be understood as not excluding plural elements or steps, unless such exclusion is explicitly recited. Furthermore, references to "an exemplary embodiment" or "an embodiment" of the present invention are not intended to be interpreted as excluding the existence of additional embodiments that also incorporate the recited features.

「選用」或「視情況」意謂:可或可不發生隨後將描述之事件或情形,且描述包含其中發生事件之例項及其中不發生事件之例項。"Optional" or "as the case may be" means that an event or circumstance to be described subsequently may or may not occur, and that the description includes instances where the event occurs and instances where the event does not occur.

如本文整個說明書及申請專利範圍中所使用,近似用語可用於修飾可在不導致與其相關之基本功能改變之情況下准許變動之任何定量表示。因此,由諸如「約」、「近似」及「實質上」之一或多個術語修飾之一值不限於所指定之精確值。在至少一些例項中,近似用語可對應於用於量測值之一儀器之精度。此處及在整個說明書及申請專利範圍中,可組合或互換範圍限制。除非內文或用語另外指示,否則此等範圍被識別且包含其中所含之所有子範圍。As used herein throughout the specification and claims, approximating terms may be used to modify any quantitative representation that permissible changes can be made without resulting in a change in the basic function to which it is associated. Accordingly, a value modified by a term or terms such as "about", "approximately" and "substantially" is not to be limited to the precise value specified. In at least some instances, approximate terms may correspond to the precision of an instrument used to measure a value. Here and throughout the specification and claims, range limitations may be combined or interchanged. These ranges are identified and include all subranges subsumed therein unless context or terminology indicates otherwise.

除非另有明確說明,否則諸如片語「X、Y或Z之至少一者」之析取用語在內文中一般被理解為用於說明一項目、術語等等可為X、Y或Z或其任何組合(例如X、Y及/或Z)。因此,此析取用語一般不意欲且不應隱含特定實施例需要各存在X之至少一者、Y之至少一者或Z之至少一者。另外,除非另有明確說明,否則諸如片語「X、Y及Z之至少一者」之合取用語亦應被理解為意謂X、Y、Z或其任何組合(包含X、Y及/或Z)。Disjunctions such as the phrase "at least one of X, Y, or Z" are generally understood in the context to indicate that an item, term, etc. may be X, Y, or Z, or one of X, Y, or Z, unless expressly stated otherwise. Any combination (eg X, Y and/or Z). Thus, this disjunctive term is generally not intended and should not imply that a particular embodiment requires at least one of X, at least one of Y, or at least one of Z each to be present. In addition, conjunctions such as the phrase "at least one of X, Y, and Z" should also be understood to mean X, Y, Z, or any combination thereof (including X, Y, and/or or Z).

本文中所描述之系統及方法不受限於本文中所描述之特定實施例,相反地,系統之組件及/或方法之步驟可與本文中所描述之其他組件及/或步驟獨立及分開利用。The systems and methods described herein are not limited to the particular embodiments described herein, but rather, components of the systems and/or steps of the methods may be utilized independently and separately from other components and/or steps described herein .

儘管可在一些圖式而非其他圖式中展示本發明之各種實施例之特定特徵,但此僅為了方便。根據本發明之原理,一圖式之任何特徵可被參考及/或與任何其他圖式之任何特徵組合主張。Although specific features of various embodiments of the invention may be shown in some drawings and not in others, this is for convenience only. In accordance with the principles of the invention, any feature of a drawing may be referred to and/or claimed in combination with any feature of any other drawing.

本發明使用實例來提供本發明之細節(包含最佳模式)且亦使熟習技術者能夠實踐本發明(包含製造及使用任何裝置或系統及執行任何併入方法)。本發明之專利範疇係由申請專利範圍界定,且可包含熟習技術者想到之其他實例。若此等其他實例具有與申請專利範圍之文字用語並無不同之結構元件或若此等其他實例包含與申請專利範圍之文字用語無實質不同之等效結構元件,則其意欲在申請專利範圍之範疇內。This disclosure uses examples to provide details of the invention, including the best mode, and also to enable any person skilled in the art to practice the invention, including making and using any devices or systems and performing any incorporated methods. The patent scope of the present invention is defined by the scope of patent application, and may include other examples that occur to those skilled in the art. If these other examples have structural elements that do not differ from the literal terms of the claimed claim, or if these other examples include equivalent structural elements that do not differ substantially from the literal terms of the claimed claim, they are intended to be included in the claimed claim. within the category.

100:積體電路(IC)測試系統 102:半導體IC 104:接觸墊 106:負載板 108:測試插座 110:印刷電路板(PCB)接點/PCB墊 112:插座本體 114:插口 116:導壁 300:旋轉接點 302:插槽 304:孔隙 306:表面 308:臂 310:表面 312:支撐邊緣 314:彈性體保持器 316:尖端 318:圓形邊緣 320:圓釘 322:平坦部 324:插座框 326:第一頭 328:第二頭 702:圓形區段 704:四邊形區段 800:方法 802:將複數個旋轉接點定位於一測試插座之一插座本體之對應插槽中 804:將一彈性體保持器定位於旋轉接點上方 806:將一插座框安裝於複數個旋轉接點及彈性體保持器上方 808:將插座本體安裝於一負載板上且使複數個旋轉接點朝向插座框平移以壓縮彈性體保持器抵靠插座框 810:將半導體IC固定至測試插座中且圍繞對應於支撐邊緣旋轉複數個旋轉接點,藉此將各旋轉接點之一釘旋轉至彈性體保持器中以壓縮彈性體保持器抵靠插座框 W:寬度 100: Integrated circuit (IC) test system 102: Semiconductor IC 104: contact pad 106: Load board 108: Test socket 110: Printed circuit board (PCB) contacts/PCB pads 112: socket body 114: socket 116: guide wall 300: rotary joint 302: slot 304: porosity 306: surface 308: arm 310: surface 312: support edge 314: Elastomer retainer 316: tip 318: round edge 320: round nail 322: flat part 324: socket frame 326: first head 328: second head 702: circular segment 704: quadrilateral segment 800: method 802: Locate a plurality of rotary contacts in corresponding slots of a socket body of a test socket 804: Positioning an elastomeric retainer over the rotary joint 806: Install a socket frame above a plurality of rotary joints and elastomer holders 808: Mounting the socket body on a load plate and translating the rotary joints toward the socket frame to compress the elastomeric retainer against the socket frame 810: Securing the semiconductor IC into the test socket and rotating the plurality of rotary joints around corresponding support edges, whereby one nail of each rotary joint is rotated into the elastomeric holder to compress the elastomeric holder against the socket frame W: width

圖1係一實例性IC測試系統之一橫截面圖;FIG. 1 is a cross-sectional view of one of an exemplary IC testing system;

圖2係用於一QFN IC之一實例性測試插座之一透視圖;Figure 2 is a perspective view of an exemplary test socket for a QFN IC;

圖3係一自由狀態中之圖1中所展示之測試插座中之一旋轉接點之一實施例之一橫截面圖;3 is a cross-sectional view of an embodiment of a rotary joint in the test socket shown in FIG. 1 in a free state;

圖4係一預負載狀態中之圖3中所展示之旋轉接點之一橫截面圖;Figure 4 is a cross-sectional view of the rotary joint shown in Figure 3 in a preloaded state;

圖5係一負載狀態中之圖3及圖4中所展示之旋轉接點之一橫截面圖;Figure 5 is a cross-sectional view of the rotary joint shown in Figures 3 and 4 in a loaded state;

圖6係圖3至圖5中所展示之旋轉接點之一透視圖;Figure 6 is a perspective view of the rotary joint shown in Figures 3 to 5;

圖7係自由狀態中之圖3至圖5中所展示之旋轉接點之一透視圖;及Figure 7 is a perspective view of the rotary joint shown in Figures 3 to 5 in a free state; and

圖8係組裝用於一半導體IC之一測試系統之一方法之一流程圖。8 is a flowchart of a method of assembling a test system for a semiconductor IC.

104:接觸墊 104: contact pad

108:測試插座 108: Test socket

110:印刷電路板(PCB)接點/PCB墊 110: Printed circuit board (PCB) contacts/PCB pads

112:插座本體 112: socket body

114:插口 114: socket

300:旋轉接點 300: rotary joint

302:插槽 302: slot

304:孔隙 304: porosity

310:表面 310: surface

312:支撐邊緣 312: support edge

314:彈性體保持器 314: Elastomer retainer

316:尖端 316: tip

324:插座框 324: socket frame

326:第一頭 326: first head

328:第二頭 328: second head

702:圓形區段 702: circular segment

704:四邊形區段 704: quadrilateral segment

Claims (20)

一種用於一扁平無引線半導體積體電路(IC)之測試插座,其包括: 一插座本體,其包含經組態以面向該扁平無引線半導體IC之一頂面及經組態以面向一負載板之與該頂面對置之一底面,該插座本體界定自該頂面延伸至該底面中之一孔隙之一插槽; 一旋轉接點,其定位於該插槽中,該旋轉接點經組態以平移於一自由狀態與一預負載狀態之間且旋轉於該預負載狀態與一負載狀態之間;及 一彈性體保持器,其將該旋轉接點捕獲於該插座本體中,該彈性體保持器包含該旋轉接點圍繞其旋轉之一圓形區段,該彈性體保持器經組態以在與該負載板接合之後在自該自由狀態平移至該預負載狀態時在來自該旋轉接點之平移力下壓縮及在與該扁平無引線半導體IC接合之後在自該預負載狀態旋轉至該負載狀態時在來自該旋轉接點之旋轉力下壓縮。 A test socket for a flat leadless semiconductor integrated circuit (IC), comprising: A socket body comprising a top surface configured to face the flat leadless semiconductor IC and a bottom surface configured to face a load board opposite the top surface, the socket body defined to extend from the top surface to a slot in an aperture in the bottom surface; a rotary joint positioned in the socket, the rotary joint configured to translate between a free state and a preloaded state and to rotate between the preloaded state and a loaded state; and an elastomeric retainer that captures the rotary joint in the socket body, the elastomeric retainer comprising a circular segment about which the rotary joint rotates, the elastomeric retainer configured to be in contact with the The load plate is compressed under the translational force from the rotary joint after bonding while translating from the free state to the preload state and rotates from the preload state to the loaded state after bonding with the flat leadless semiconductor IC Compressed under the rotational force from the rotary joint. 如請求項1之測試插座,其中該旋轉接點包括接近該插座本體之該頂面之一尖端,該尖端經組態以在該旋轉接點自該預負載狀態旋轉至該負載狀態時接合該扁平無引線半導體IC之一接觸墊。The test socket of claim 1, wherein the rotary contact includes a tip proximate to the top surface of the socket body, the tip being configured to engage the rotary contact when the rotary contact is rotated from the preloaded state to the loaded state One of the contact pads of a flat leadless semiconductor IC. 如請求項2之測試插座,其中該旋轉接點之該尖端經組態以在該旋轉接點自該預負載狀態旋轉至該負載狀態時跨該扁平無引線半導體IC之該接觸墊平移。The test socket of claim 2, wherein the tip of the rotary contact is configured to translate across the contact pad of the flat leadless semiconductor IC as the rotary contact rotates from the preloaded state to the loaded state. 如請求項2之測試插座,其中該旋轉接點進一步包括與該尖端對置之一端處之一釘,該釘經組態以在該旋轉接點自該預負載狀態旋轉至該負載狀態時行進遠離該插座本體之一壁。The test socket of claim 2, wherein the rotary joint further includes a spike at an end opposite the tip, the spike configured to travel when the rotary joint is rotated from the preloaded state to the loaded state away from one wall of the socket body. 如請求項2之測試插座,其中該旋轉接點進一步包括: 一凸起部,其接近該插座本體之該底面且經組態以在處於該預負載狀態及該負載狀態中時接合該負載板之一印刷電路板(PCB)墊;及 一臂,其延伸於該尖端與該凸起部之間,該臂經組態以在該插槽內在該插座本體之一支撐邊緣上樞轉。 As the test socket of claim 2, wherein the rotary contact further includes: a raised portion proximate the bottom surface of the socket body and configured to engage a printed circuit board (PCB) pad of the load board when in the preloaded state and the loaded state; and An arm extending between the tip and the boss is configured to pivot within the slot on a support edge of the socket body. 如請求項1之測試插座,其進一步包括界定一插口之一插座框,該扁平無引線半導體IC經組態以固定至該插口中。The test socket of claim 1, further comprising a socket frame defining a socket into which the flat leadless semiconductor IC is configured to be fixed. 如請求項6之測試插座,其中該插座框安置於該彈性體保持器上方,且其中該彈性體保持器經組態以在來自該旋轉接點之平移力下抵靠該插座框壓縮且在來自該旋轉接點之旋轉力下抵靠該插座框壓縮。The test socket of claim 6, wherein the socket frame is disposed over the elastomeric retainer, and wherein the elastomeric retainer is configured to compress against the socket frame under translational force from the rotary joint and to The rotary force from the rotary contact compresses against the socket frame. 一種用於一半導體積體電路(IC)之測試系統,該測試系統包括: 一負載板;及 一測試插座,其包括: 一插座本體,其包含經組態以面向該半導體IC之一頂面及安裝至該負載板之一底面,該插座本體界定自該頂面延伸至該底面中之一孔隙之一插槽; 一旋轉接點,其在一預負載狀態中定位於該插槽中,該旋轉接點經組態以旋轉於該預負載狀態與一負載狀態之間;及 一彈性體保持器,其將該旋轉接點捕獲於該插座本體中,該彈性體保持器包含該旋轉接點經組態以圍繞其旋轉之一圓形區段及將一接觸力及一回復力提供至該旋轉接點之一四邊形區段,該彈性體保持器壓縮於一插座框與該旋轉接點之間且經組態以在與該半導體IC接合之後在自該預負載狀態旋轉至該負載狀態時在來自該旋轉接點之旋轉力下進一步壓縮。 A test system for a semiconductor integrated circuit (IC), the test system comprising: a load plate; and A test socket comprising: a socket body comprising a top surface configured to face the semiconductor IC and a bottom surface mounted to the load board, the socket body defining a socket extending from the top surface to an aperture in the bottom surface; a rotary joint positioned in the slot in a preloaded state, the rotary joint configured to rotate between the preloaded state and a loaded state; and an elastomeric retainer that captures the swivel joint in the socket body, the elastomeric retainer comprising a circular segment that the swivel joint is configured to rotate about and incorporating a contact force and a return Force is provided to a quadrilateral section of the rotary joint, the elastomeric retainer is compressed between a socket frame and the rotary joint and is configured to rotate from the preloaded state to the rotary joint after engagement with the semiconductor IC. The load state is further compressed under the rotational force from the rotary joint. 如請求項8之測試系統,其中該旋轉接點包括接近該插座本體之該頂面之一尖端,該尖端經組態以在該旋轉接點自該預負載狀態旋轉至該負載狀態時接合該半導體IC之一接觸墊。The test system of claim 8, wherein the rotary joint includes a tip proximate the top surface of the socket body, the tip being configured to engage the rotary joint when the rotary joint is rotated from the preloaded state to the loaded state One of the contact pads of a semiconductor IC. 如請求項9之測試系統,其中該旋轉接點之該尖端經組態以在該旋轉接點自該預負載狀態旋轉至該負載狀態時跨該半導體IC之該接觸墊平移。The test system of claim 9, wherein the tip of the rotary joint is configured to translate across the contact pad of the semiconductor IC as the rotary joint rotates from the preloaded state to the loaded state. 如請求項9之測試系統,其中該旋轉接點進一步包括與該尖端對置之一端處之一釘,該釘經組態以在該旋轉接點自該預負載狀態旋轉至該負載狀態時行進遠離該插座本體之一壁。The testing system of claim 9, wherein the rotary joint further includes a spike at an end opposite the tip, the spike configured to travel when the rotary joint is rotated from the preloaded state to the loaded state away from one wall of the socket body. 如請求項9之測試系統,其中該旋轉接點進一步包括: 一凸起部,其接近該插座本體之該底面且經組態以在處於該預負載狀態及該負載狀態中時接合該負載板之一印刷電路板(PCB)墊;及 一臂,其延伸於該尖端與該凸起部之間,該臂經組態以在該插槽內在該插座本體之支撐邊緣上樞轉。 The test system as claimed in item 9, wherein the rotary joint further comprises: a raised portion proximate the bottom surface of the socket body and configured to engage a printed circuit board (PCB) pad of the load board when in the preloaded state and the loaded state; and An arm extends between the tip and the boss, the arm being configured to pivot within the slot on the supporting edge of the socket body. 如請求項8之測試系統,其中該插座框界定一插口,該半導體IC經組態以固定至該插口中。The test system according to claim 8, wherein the socket frame defines a socket, and the semiconductor IC is configured to be fixed into the socket. 如請求項13之測試系統,其中該插座框包含經組態以使該半導體IC之一接觸墊與該旋轉接點對準之一錐形導壁。The test system according to claim 13, wherein the socket frame includes a tapered guide wall configured to align a contact pad of the semiconductor IC with the rotary contact. 一種組裝用於一半導體積體電路(IC)之一測試系統之方法,該方法包括: 將複數個旋轉接點定位於一測試插座之一插座本體之對應插槽中; 將一彈性體保持器定位於該等旋轉接點上方;及 將一插座框安裝於該複數個旋轉接點及該彈性體保持器上方。 A method of assembling a test system for a semiconductor integrated circuit (IC), the method comprising: positioning a plurality of rotary contacts in corresponding slots of a socket body of a test socket; positioning an elastomeric retainer over the rotary joints; and A socket frame is installed above the plurality of rotary joints and the elastic body holder. 如請求項15之方法,其中定位該複數個旋轉接點包括:針對該複數個旋轉接點之各旋轉接點,將該旋轉接點定位於該插座本體之一支撐邊緣上。The method according to claim 15, wherein positioning the plurality of rotary joints comprises: for each rotary joint of the plurality of rotary joints, positioning the rotary joint on a supporting edge of the socket body. 如請求項15之方法,其進一步包括: 將該插座本體安裝於一負載板上;及 使該複數個旋轉接點朝向該插座框平移至一預負載狀態中以壓縮該彈性體保持器抵靠該插座框。 The method as claimed in item 15, further comprising: mounting the socket body on a load plate; and Translating the plurality of rotary joints toward the socket frame into a preloaded state compresses the elastomeric retainer against the socket frame. 如請求項17之方法,其進一步包括: 將該半導體IC固定至該測試插座中;及 使該複數個旋轉接點圍繞該彈性體保持器旋轉至一負載狀態中,藉此使各旋轉接點之一釘旋轉至該彈性體保持器中以壓縮該彈性體保持器抵靠該插座框。 The method of claim 17, further comprising: securing the semiconductor IC into the test socket; and rotating the plurality of revolving joints about the elastomeric retainer into a loaded state, whereby a pin of each revolving joint is rotated into the elastomeric retainer to compress the elastomeric retainer against the socket frame . 如請求項18之方法,其中旋轉該複數個旋轉接點包括跨該半導體IC之一對應接觸墊平移各旋轉接點之一尖端。The method of claim 18, wherein rotating the plurality of rotary joints comprises translating a tip of each rotary joint across a corresponding contact pad of the semiconductor IC. 如請求項18之方法,其進一步包括自該測試插座移除該半導體IC及將該複數個旋轉接點旋轉回至該預負載狀態。The method of claim 18, further comprising removing the semiconductor IC from the test socket and rotating the plurality of rotary contacts back to the preload state.
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