TW202238058A - Body sheet for vapor chamber, vapor chamber, and electronic apparatus - Google Patents

Abstract

A vapor chamber that comprises: a body sheet that has a first body surface and a second body surface that is provided on the reverse side from the first body surface; a space part that is provided on the first body surface of the body sheet; a first sheet that is layered on the first body surface of the body sheet and covers the space part; and a drawn part that, in plan view, is drawn further toward the space part side than the outer peripheral edge of the body sheet or the first sheet.

Description

Body sheets for steam chambers, steam chambers and electronic equipment

The disclosure relates to a body sheet for a steam chamber, a steam chamber and an electronic device.

The central processing unit (CPU: Central Processing Unit) or LED: Light Emitting Diode (LED: Light Emitting Diode), power semiconductors and other devices that generate heat used in mobile terminals such as portable terminals and tablet terminals dissipate heat through heat pipes, etc. Cooling with components (for example, refer to Patent Document 1). In recent years, in order to reduce the thickness of mobile terminals and the like, thinner heat dissipation components are also required, and the development of vapor chambers that can be thinner than heat pipes has been progressing. A working fluid is sealed in the steam chamber, and the steam chamber cools the device by absorbing and dissipating the heat of the device through the working fluid.

More specifically, the actuating fluid in the vapor chamber receives heat from the device at a portion (the evaporating portion) close to the device, evaporates and becomes vapor (actuating vapor). The operating steam diffuses in the direction away from the evaporator in the steam flow path, cools down, and condenses into a liquid. There is a liquid channel part as a capillary structure (wick) in the vapor chamber, and the liquid (operating fluid) of the operating fluid enters the liquid channel part from the vapor channel part, flows in the liquid channel part, and evaporates department delivery. And, the working fluid again receives heat in the evaporation part and evaporates. In this way, the actuating fluid undergoes a phase change, that is, repeats evaporation and condensation, and at the same time flows back in the steam chamber, thereby moving the heat of the device and improving the heat dissipation efficiency. [Prior Art Literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2008-82698

[Problem to be solved by the invention]

Place the manufactured steam chamber in a specific place and keep it. Thereafter, when shipping or installing the device, the steam chamber is taken out from the placement place and transported.

However, the steam chamber is thinner, and the sides of the steam chamber are vertically formed, and there is no gripping part for transportation. Therefore, it may be difficult to transport the steam chamber.

Taking this point into consideration, the present disclosure aims to provide a body sheet for a steam chamber, a steam chamber, and an electronic device that can improve the transportability of the steam chamber. [Technical means to solve the problem]

The first form of the present disclosure is a steam chamber, which is a steam chamber, which is sealed with a working fluid, and has: A body sheet having a first body surface and a second body surface opposite to the first body surface; a space portion provided on the first body surface of the body sheet; a first sheet that is laminated on the first body surface of the body sheet to cover the space; and The receded portion is retracted to a side closer to the space portion than the outer peripheral edge of the main body sheet or the first sheet in plan view.

The second aspect of the present disclosure is the steam chamber of the first aspect above, wherein The retracted part may include a first retracted part provided on the first sheet and retracted to the side of the space part from the outer peripheral edge of the main body sheet in plan view.

The third aspect of the present disclosure is the steam chamber of the first aspect above, wherein The retracted portion may include a retracted portion of the main body sheet that is disposed on the main body sheet and retracts to the side of the space portion from the outer peripheral edge of the first sheet in plan view.

The fourth aspect of the present disclosure is the steam chamber of each of the above-mentioned first aspect to the above-mentioned third aspect, wherein The above-mentioned first sheet may have a pair of first side edges extending in a first direction and a pair of second side edges extending in a second direction perpendicular to the first direction in plan view, The setbacks may be provided on the pair of first side edges and the pair of second side edges, respectively.

The fifth aspect of the present disclosure is the steam chamber of each of the above-mentioned first aspect to the above-mentioned third aspect, wherein The above-mentioned first sheet may have a pair of first side edges extending in a first direction and a pair of second side edges extending in a second direction perpendicular to the first direction in plan view, The setback portion may be provided on at least one of the pair of first side edges.

The sixth aspect of the present disclosure is the vapor chamber of the fifth aspect above, wherein The setback portion may be respectively provided on both of the pair of first side edges.

The seventh aspect of the present disclosure is the steam chamber of each of the above-mentioned fifth aspect and the above-mentioned sixth aspect, wherein The retracted portion may be provided on a part of the first side edge.

The eighth aspect of the present disclosure is the vapor chamber of the fifth aspect above, wherein The setback portion may be provided on one of the pair of first side edges, and also be provided on one of the pair of second side edges.

The ninth aspect of the present disclosure is the steam chamber of each of the above-mentioned first aspect to the above-mentioned eighth aspect, wherein The retracted portion may be retracted to a position between 10 μm and 1000 μm from the outer peripheral edge of the main body sheet in plan view.

A tenth aspect of the present disclosure is the steam chamber of each of the above-mentioned first aspect to the above-mentioned ninth aspect, wherein The setback portion may be provided at a position at least 30 μm away from the space portion in plan view.

The eleventh aspect of this disclosure is like the steam chamber of each of the above-mentioned first aspect to the above-mentioned tenth aspect, which may have: the second sheet laminated on the second body surface of the body sheet, The space part penetrates from the first body surface to the second body surface, The second sheet covers the space portion on the second main body surface, The retracted part includes a second retracted part provided on the second sheet and retracted to the side of the space part from the outer peripheral edge of the main body sheet in plan view.

The twelfth aspect of the present disclosure is a steam chamber, which is sealed with an operating fluid, and has: A body sheet having a first body surface and a second body surface disposed on the opposite side of the first body surface; a space portion provided on the first body surface of the body sheet; a first sheet that is laminated on the first body surface of the body sheet to cover the space; a through hole penetrating through the above-mentioned body sheet and the above-mentioned first sheet; and The receded portion retracts to the opposite side of the through hole than the inner peripheral edge of the through hole defining the main body sheet or the first sheet in plan view.

A thirteenth aspect of the present disclosure is the steam chamber of the twelfth aspect above, wherein The retracted part may include a first retracted part provided on the first sheet and retracted to the opposite side of the through hole than the inner peripheral edge of the through hole defining the main body sheet in plan view.

The fourteenth aspect of this disclosure is the same as the steam chamber of the above-mentioned twelfth aspect and the above-mentioned thirteenth aspect, which may have: the second sheet laminated on the second body surface of the body sheet, The space part penetrates from the first body surface to the second body surface, The second sheet covers the space portion on the second main body surface, The through hole penetrates the body sheet, the first sheet, and the second sheet, The retracted part includes a second retracted part provided on the second sheet and retracted to the opposite side of the through hole than the inner peripheral edge of the through hole defining the main body sheet in plan view.

A fifteenth aspect of the present disclosure is the vapor chamber of the above-mentioned twelfth aspect, wherein The retracted portion may include a retracted portion of the main body sheet that is disposed on the main body sheet and retracts to the opposite side of the through hole than the inner peripheral edge of the through hole defining the first sheet in plan view.

The sixteenth aspect of this disclosure is an electronic device, which has: shell; a device housed within said housing; and The steam chamber according to any one of the above-mentioned first aspect to the above-mentioned fifteenth aspect, which is in thermal contact with the above-mentioned device.

The seventeenth aspect of the present disclosure is a body sheet for a steam chamber, which is used to enclose a steam chamber with a working fluid, and has: 1st Body Face; The second body surface is arranged on the opposite side of the above-mentioned first body surface; a space portion provided on the first body surface; the outer periphery when viewed from above; and The receding portion recedes from the outer peripheral edge toward the side of the space portion when viewed in a thickness direction.

An eighteenth aspect of the present disclosure is the main body sheet for the steam chamber of the above-mentioned seventeenth aspect, wherein In the above-mentioned plan view, the above-mentioned setback portion may have a setback edge extending from the above-mentioned outer peripheral edge, The outer peripheral edge may be located on the side of the second body surface, The setback edge may extend from the outer peripheral edge to the first body surface, The above-mentioned retreating edge may be curved toward the side of the above-mentioned space portion in a concave shape.

A nineteenth aspect of the present disclosure is the body sheet for the steam chamber of the above-mentioned seventeenth aspect, wherein In the above-mentioned plan view, the above-mentioned setback portion may have a setback edge extending from the above-mentioned outer peripheral edge, The outer peripheral edge may be located on the side of the second body surface, The setback edge may extend from the outer peripheral edge to the first body surface, The setback edge may be inclined with respect to the thickness direction.

A twentieth aspect of the present disclosure is the main body sheet for the steam chamber of the above-mentioned 17th aspect, wherein In the above-mentioned plan view, the above-mentioned setback portion may have a setback edge extending from the above-mentioned outer peripheral edge, The outer peripheral edge may be located on the side of the second body surface, The setback edge may extend from the outer peripheral edge to the first body surface, The retracted edge may be convexly bent toward the side opposite to the space portion.

The 21st aspect of this disclosure is the body sheet for the steam chamber of each of the above-mentioned 18th aspect to the above-mentioned 20th aspect, wherein The retracted edge may be formed so as to approach the space portion as it approaches the first main body surface.

A twenty-second aspect of the present disclosure is the main body sheet for the steam chamber of the above-mentioned seventeenth aspect, wherein In the above-mentioned plan view, the above-mentioned setback portion may have a setback edge extending from the above-mentioned outer peripheral edge, The outer peripheral edge may be located on the side of the second body surface, The retracted edge may include: a first retracted edge extending from the first body facing the second body surface; a second retracting edge extending from the second body facing the first body surface; and a step The differential connection edge connects the first setback edge and the second setback edge.

A twenty-third aspect of the present disclosure is the main body sheet for the steam chamber of the above-mentioned eighteenth aspect, wherein said setback edge may extend from said outer peripheral edge to said first body surface through a relay point, The retracted edge may be formed so as to approach the space portion as it approaches the relay point from the outer peripheral edge, and may be formed to move away from the space portion as it approaches the first body surface from the relay point.

A twenty-fourth aspect of the present disclosure is the body sheet for the steam chamber of the above-mentioned seventeenth aspect, wherein The setback portion may include: a first setback portion on the side of the first body surface, and a second setback portion on the side of the second body surface; and The outer peripheral edge may be located between the first body surface and the second body surface.

A twenty-fifth aspect of the present disclosure is the body sheet for the steam chamber of the twenty-fourth aspect above, wherein In the above cross-sectional view, the first body surface side setback portion may have a first body surface side setback edge extending from the outer peripheral edge to the first body surface side, and The retracted edge of the first body surface may be concavely bent toward the side of the space portion as it approaches the first body surface, In the above cross-sectional view, the second body surface side setback portion may have a second body surface side setback edge extending from the outer peripheral edge to the second body surface side; The retracted edge of the second body surface may be concavely curved toward the side of the space portion as it approaches the second body surface and approaches the space portion.

A twenty-sixth aspect of the present disclosure is the body sheet for the steam chamber of each of the above-mentioned seventeenth aspect to the above-mentioned twenty-fifth aspect, wherein In the plan view, the outer peripheral edge may have a pair of side edges extending in a first direction, and a pair of second side edges extending in a second direction perpendicular to the first direction, The retracted portion may retract from the pair of first side edges and the pair of second side edges, respectively.

A twenty-seventh aspect of the present disclosure is the body sheet for the steam chamber of each of the above-mentioned seventeenth aspect to the above-mentioned twenty-fifth aspect, wherein In the plan view, the outer peripheral edge may have a pair of side edges extending in a first direction and a pair of second side edges extending in a second direction perpendicular to the first direction, and The retracted portion may retract from at least one of the pair of first side edges.

A twenty-eighth aspect of the present disclosure is the body sheet for the steam chamber of the twenty-seventh aspect above, wherein The retracted portion may retract from one of the pair of first side edges, and retract from one of the pair of second side edges.

A twenty-ninth aspect of the present disclosure is the body sheet for the steam chamber of each of the above-mentioned twenty-sixth aspect to the above-mentioned twenty-eighth aspect, wherein The retracted portion may retract from a portion of the first side edge.

A thirtieth aspect of the present disclosure is a steam chamber, which has: The main body sheet for the steam chamber according to any one of the above-mentioned 17th aspect to the above-mentioned 29th aspect; and The first sheet is laminated on the first body surface to cover the space.

The 31st aspect of the present disclosure is the same as the steam chamber of the 30th aspect mentioned above, which may include: The second sheet laminated on the above-mentioned second body surface, The above-mentioned space part can penetrate from the above-mentioned first body surface to the above-mentioned second body surface, The second sheet may cover the space on the second body surface.

The thirty-second aspect of this disclosure is an electronic device, which has: shell; a device housed within said housing; and The steam chamber according to the above-mentioned twenty-ninth aspect or the above-mentioned thirty-ninth aspect, which is in thermal contact with the above-mentioned device. [Effect of Invention]

According to the present disclosure, the transportability of the steam chamber can be improved.

Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In addition, in the drawings attached to this manual, for the convenience of illustration and easy understanding, the scale and the aspect ratio of the aspect ratio are appropriately exaggerated relative to the real ones.

In addition, terms such as "parallel", "orthogonal", and "same", lengths, angles, and values of physical properties used in this specification to specify shapes or geometric conditions and physical properties and their degrees, Not limited to the strict meaning, it should be construed in the scope including the degree to which the same function can be expected. Furthermore, in the drawings, the shapes of a plurality of parts that can expect the same function are regularly described for clarity, but the shapes of the parts may be different from each other within the range that the function can be expected without restricting to the strict meaning. Also, in the drawings, for the sake of convenience, only a straight line is used to represent the boundary line between the bonding surfaces of the display members, but it is not limited to a strict straight line. Within the range where the desired bonding performance can be expected, the shape of the boundary line is: arbitrary. In addition, there are cases where the boundary line is lost due to joining of members.

(first embodiment) The vapor chamber and the electronic device according to the first embodiment will be described using FIGS. 1 to 8 . The steam chamber 1 of the present embodiment is a device mounted on the electronic device E for cooling the device D (device to be cooled) as a heat generating body housed in the electronic device E. As an example of the electronic equipment E, mobile terminals, such as a portable terminal and a tablet terminal, etc. are mentioned. Examples of the device D include electronic devices that generate heat, such as a central processing unit (CPU), a light emitting diode (LED), and a power semiconductor.

Here, an electronic device E equipped with the vapor chamber 1 of the present embodiment will first be described by taking a tablet terminal as an example. As shown in FIG. 1 , an electronic device E (tablet terminal) includes a case H, a device D accommodated in the case H, and a steam chamber 1 . In the electronic device E shown in FIG. 1 , a touch panel display TD is provided on the front surface of the case H. As shown in FIG. The steam chamber 1 is accommodated in the housing H and is arranged in thermal contact with the device D. Thereby, when the electronic equipment E is used, the steam chamber 1 can receive the heat generated in the device D. The heat received by the steam chamber 1 is released to the outside of the steam chamber 1 through the working fluids 2a and 2b described later. In this way, the device D is effectively cooled. When the electronic equipment E is a tablet terminal, the device D corresponds to a central processing unit or the like.

Next, the steam chamber 1 of this embodiment will be described. As shown in FIGS. 2 and 3 , the steam chamber 1 has a sealed space 3 in which working fluids 2a, 2b are sealed. The device D of the above-mentioned electronic equipment E is cooled by repeated phase changes of the working fluids 2a and 2b in the sealed space 3 . Examples of the working fluids 2a and 2b include pure water, ethanol, methanol, acetone, and mixed liquids thereof.

As shown in FIGS. 2 and 3 , the steam chamber 1 has a lower sheet 10 (the first sheet), an upper sheet 20 (the second sheet), and a gap between the lower sheet 10 and the upper sheet 20. The capillary structure sheet 30 (main body sheet) used for the steam chamber in between. In the present embodiment, the steam chamber 1 includes one capillary structure sheet 30 . In the steam chamber 1 of this embodiment, the lower sheet 10 , the capillary structure sheet 30 and the upper sheet 20 are sequentially stacked and bonded.

The steam chamber 1 is roughly formed in the shape of a thin plate. The planar shape of the steam chamber 1 is arbitrary, but it can also be rectangular as shown in FIG. 2 . The plane shape of the steam chamber 1 can be, for example, a rectangle with one side being 1 cm and the other side being 3 cm, or a square with one side being 15 cm. The plane size of the steam chamber 1 is arbitrary. In this embodiment, as an example, an example in which the planar shape of the steam chamber 1 is a rectangular shape whose longitudinal direction is the X direction will be described. In addition, the planar shape of the steam chamber 1 is not limited to a rectangular shape, and may be any shape such as a circle, an ellipse, an L shape, or a T shape.

As shown in FIG. 2 , the steam chamber 1 has an evaporation region SR where the working fluids 2a and 2b evaporate, and a condensation region CR where the working fluids 2a and 2b condense.

The evaporation region SR is the region overlapping with the device D in plan view, and is the region where the device D is mounted. The evaporation region SR can be arranged anywhere in the steam chamber 1 . In this embodiment, an evaporation region SR is formed on one side of the steam chamber 1 in the X direction (the left side in FIG. 2 ). The heat from the device D is transferred to the evaporation region SR, and the liquid of the working fluid (suitably referred to as working fluid 2b) evaporates in the evaporation region SR due to the heat. The heat from the device D is not only transferred to the region that overlaps with the device D in plan view, but also to the periphery of the region. Therefore, the evaporation region SR includes a region overlapping with the device D and a region around it in plan view. Here, the plane view corresponds to the surface receiving heat from the device D of the steam chamber 1 (the first lower sheet surface 10a described later on the lower sheet 10) and the surface releasing the received heat (the upper sheet 20). The state of the second upper sheet 20b) described later is observed in the orthogonal direction, that is, for example, as shown in FIG. 2, the state of the steam chamber 1 viewed from above, or the state of the steam chamber 1 viewed from below.

The condensing region CR is a region that does not overlap with the device D when viewed from above, and is mainly a region where the steam of the working fluid (suitably referred to as working steam 2a) releases heat and condenses. The condensation region CR may also be referred to as the region around the evaporation region SR. In this embodiment, a condensation region CR is formed on the other side of the steam chamber 1 in the X direction (the right side in FIG. 2 ). The heat from the working steam 2a in the condensation region CR is released to the upper sheet 20, and the working steam 2a is cooled and condensed in the condensation region CR.

In addition, when the steam chamber 1 is installed in the mobile terminal, the vertical relationship may be disturbed according to the posture of the mobile terminal. However, in this embodiment, for convenience, the sheet that receives heat from the device D is referred to as the above-mentioned lower sheet 10 , and the sheet that releases the received heat is referred to as the above-mentioned upper sheet 20 . Therefore, in the following, the lower sheet 10 is arranged on the lower side, and the upper sheet 20 is arranged on the upper side.

First, the lower sheet 10 will be described.

As shown in FIG. 3 , the lower sheet 10 has a first lower sheet surface 10a disposed on the opposite side of the capillary structure sheet 30, and a first lower sheet surface 10a disposed on the opposite side of the first lower sheet surface 10a (that is, capillary structure). The second lower sheet surface 10b of the side of the structural sheet 30). The lower sheet 10 may be formed flat as a whole, or may have a certain thickness as a whole. The above-mentioned device D is mounted on the first lower sheet surface 10a.

As shown in FIG. 4 , the planar shape of the lower sheet 10 may have a rectangular shape as a whole. More specifically, the lower sheet 10 may have a pair of longitudinal side edges 11a, 11b (first side edges) extending in the X direction (first direction) in plan view, and a pair of side edges 11a, 11b (first side edges) extending in the X direction A pair of short-side direction side edges 11c and 11d (second side edges) extending in the Y direction (second direction) intersect. A pair of side edges 11a, 11b in the longitudinal direction are provided on both sides in the Y direction. The longitudinal side edge 11 a is provided on one side in the Y direction (lower side in FIG. 4 ), and the longitudinal side edge 11 b is provided on the other side in the Y direction (upper side in FIG. 4 ). A pair of side edges 11c and 11d in the short side direction are provided on both sides in the X direction. The lateral direction side edge 11c is provided on one side in the X direction (left side in FIG. 4 ), and the lateral direction side edge 11d is provided on the other side in the X direction (right side in FIG. 4 ). As will be described later, the lower sheet 10 is formed to be smaller than the capillary structure sheet 30 as a whole in plan view. Therefore, on the outer peripheral edge 11o of the lower sheet 10, that is, the pair of longitudinal side edges 11a, 11b and the pair of lateral direction side edges 11c, 11d, the lower sheet retracted portions 15a, 15b, which will be described later, are respectively provided. , 15c, 15d (the first setback).

As shown in FIG. 4 , the lower sheet 10 may also have a rectangular lower sheet body 11 and a lower sheet injection protrusion 13 protruding outward from the lower sheet body 11 . In the example shown in FIG. 4 , the lower sheet injection protrusion 13 is provided on the lateral edge 11c, and protrudes from the lateral edge 11c toward one side in the X direction (the left side in FIG. 4 ).

Moreover, as shown in FIG. 4 , alignment holes 12 may also be provided at the four corners of the lower sheet body 11 of the lower sheet 10 . In the example shown in FIG. 4, the planar shape of the alignment hole 12 is circular, but it is not limited thereto. The alignment hole 12 can also pass through the lower sheet body 11 .

Next, the upper sheet 20 will be described.

As shown in FIG. 3, the upper sheet 20 has a first upper sheet surface 20a disposed on the side of the capillary structure sheet 30, and a second upper sheet surface 20b disposed on the opposite side to the first upper sheet surface 20a. . The upper sheet 20 may be formed flat as a whole, or may have a certain thickness as a whole. On the second upper sheet surface 20b, a housing member Ha constituting a part of the housing H of a mobile terminal or the like is attached. The entirety of the second upper sheet surface 20b may be covered by the shell member Ha.

As shown in FIG. 5 , the planar shape of the upper sheet 20 may have a rectangular shape as a whole. More specifically, the upper sheet 20 may have a pair of longitudinal side edges 21a, 21b extending in the X direction and a pair of lateral direction side edges 21c, 21d extending in the Y direction in plan view. A pair of longitudinal side edges 21a, 21b are provided on both sides in the Y direction. The longitudinal side edge 21a is provided on one side in the Y direction (lower side in FIG. 5 ), and the longitudinal side edge 21b is provided on the other side in the Y direction (upper side in FIG. 5 ). A pair of side edges 21c and 21d in the short side direction are provided on both sides in the X direction. The lateral direction side edge 21c is provided on one side in the X direction (left side in FIG. 5 ), and the lateral direction side edge 21d is provided on the other side in the X direction (right side in FIG. 5 ). As will be described later, the upper sheet 20 is formed to be smaller than the capillary structure sheet 30 as a whole in plan view. Therefore, on the outer peripheral edge 21o of the upper sheet 20, that is, a pair of longitudinal side edges 21a, 21b and a pair of lateral direction side edges 21c, 21d, upper sheet retracted portions 25a, 25b, 25c, which will be described later, are respectively provided. , 25d (the second retreat).

As shown in FIG. 5 , the upper sheet 20 may have a rectangular upper sheet body 21 and an upper sheet injection protrusion 23 protruding outward from the upper sheet body 21 . In the example shown in FIG. 5 , the upper sheet injection protrusion 23 is provided on the lateral edge 21c, and protrudes from the lateral edge 21c toward one side in the X direction (the left side in FIG. 5 ).

Moreover, as shown in FIG. 5 , alignment holes 22 may also be provided at the four corners of the upper sheet body 21 of the upper sheet 20 . In the example shown in FIG. 5, the planar shape of the alignment hole 22 is circular, but it is not limited thereto. The alignment hole 12 can also pass through the upper sheet body 21 .

Next, the capillary structure sheet 30 will be described.

As shown in FIG. 3 , the capillary structure sheet 30 includes a sheet body 31 and a vapor flow path portion 50 (space portion) provided on the sheet body 31 . The sheet main body 31 has a first main body surface 31a and a second main body surface 31b provided on the opposite side of the first main body surface 31a. The first main body surface 31 a is arranged on the side of the lower sheet 10 , and the second main body surface 31 b is arranged on the side of the upper sheet 20 .

The second lower sheet surface 10b of the lower sheet 10 and the first main body surface 31a of the sheet main body 31 can be permanently bonded to each other by thermocompression bonding. Similarly, the first upper sheet surface 20a of the upper sheet 20 and the second main body surface 31b of the sheet main body 31 can also be permanently bonded to each other by thermocompression bonding. As an example of bonding by thermocompression bonding, for example, diffusion bonding is mentioned. However, as long as the lower sheet 10, the upper sheet 20, and the capillary structure sheet 30 can be permanently joined, they can also be joined by other methods such as welding instead of diffusion joining. In addition, the term "permanent bonding" is not limited to a strict meaning, and can be used as a term with the following meaning: when the steam chamber 1 operates, the bonding between the lower sheet 10 and the capillary structure sheet 30 can be maintained so as to maintain a sealed space 3, and can maintain the degree of bonding between the upper sheet 20 and the capillary structure sheet 30 .

As shown in FIG. 6 , when viewed from above, the outer shape of the capillary structure sheet 30 may have a rectangular shape as a whole. More specifically, the capillary structure sheet 30 may have a pair of long side edges 32a, 32b extending in the X direction and a pair of short side edges 32c, 32d extending in the Y direction in plan view. A pair of longitudinal side edges 32a, 32b are provided on both sides in the Y direction. The longitudinal side edge 32a is provided on one side in the Y direction (lower side in FIG. 6 ), and the longitudinal side edge 32b is provided on the other side in the Y direction (upper side in FIG. 6 ). A pair of side edges 32c and 32d in the short side direction are provided on both sides in the X direction. The lateral direction side edge 32c is provided on one side in the X direction (left side in FIG. 6 ), and the lateral direction side edge 32d is provided on the other side in the X direction (right side in FIG. 6 ).

As shown in FIG. 6 , the capillary structure sheet 30 may have a capillary structure sheet injection protrusion 36 protruding outward from the frame portion 32 . In the example shown in FIG. 6, the capillary structure sheet injection protrusion 36 is provided on the side edge 32c in the short side direction, and protrudes from the side edge 32c in the short side direction toward one side in the X direction (left side in FIG. 6).

Also, as shown in FIG. 6 , alignment holes 35 can be provided at the four corners of the sheet body 31 of the capillary structure sheet 30 . In the example shown in FIG. 6, the planar shape of the alignment hole 35 is circular, but it is not limited thereto. The alignment hole 35 can also pass through the sheet body 31 .

The sheet body 31 of the capillary structure sheet 30 of this embodiment, as shown in FIGS. 3 and 6, has a frame portion 32 formed in a rectangular frame shape when viewed from above, and a plurality of lands arranged in the frame portion 32. Section 33. The frame portion 32 and the land portion 33 are portions where the material of the capillary structure sheet 30 remains without being etched in the etching step described later.

In the present embodiment, the frame body portion 32 is formed in a rectangular frame shape in plan view. Inside the frame portion 32, a steam flow path portion 50 (space portion) is provided. Each land portion 33 is provided in the steam flow path portion 50 , and the moving steam 2 a flows around each land portion 33 . That is, the steam flow path portion 50 includes the above-mentioned plurality of land portions 33 , and passages provided around each land portion 33 through which the actuating steam 2 a flows, ie, steam passages 51 and 52 to be described later.

In this embodiment, the land portion 33 can be elongated with the X direction (the left-right direction in FIG. 6 ) as the long side direction in plan view, and the planar shape of the land portion 33 can be an elongated rectangular shape. In addition, the land portions 33 may be arranged parallel to each other at equal intervals in the Y direction (the vertical direction in FIG. 6 ) perpendicular to the X direction. The width w1 (see FIG. 7 ) of the land portion 33 may be, for example, 100 μm to 1500 μm. Here, the width w1 of the land portion 33 means the size of the land portion 33 in the Y direction, that is, the size in the Z direction at the position where the penetration portion 34 described later exists. Here, the Z direction corresponds to the up-down direction in FIGS. 3 and 7 , and corresponds to the thickness direction of the capillary structure sheet 30 .

The frame portion 32 and each land portion 33 are bonded to the lower sheet 10 by thermocompression bonding, and are bonded to the upper sheet 20 by thermocompression bonding. A wall surface 53 a of the lower steam channel recess 53 and a wall surface 54 a of the upper steam channel recess 54 described later constitute side walls of the land portion 33 . The first main body surface 31 a and the second main body surface 31 b of the sheet main body 31 may be formed flat over the frame portion 32 and each land portion 33 .

The steam flow path portion 50 is mainly a flow path through which the working steam 2a passes. The working fluid 2 b can also pass through the vapor flow path portion 50 . As shown in FIGS. 3 and 7 , the steam flow path portion 50 may penetrate from the first body surface 31a to the second body surface 31b. That is, the sheet body 31 of the capillary structure sheet 30 may also be penetrated. The steam channel portion 50 may be covered by the lower sheet 10 on the first main body surface 31a, or may be covered by the upper sheet 20 on the second main body surface 31b.

As shown in FIG. 6 , the steam channel portion 50 of this embodiment has a first steam channel 51 and a plurality of second steam channels 52 . The first steam passage 51 is formed between the frame portion 32 and the land portion 33 . The first steam passage 51 is continuously formed inside the frame portion 32 and outside the land portion 33 . The planar shape of the first steam passage 51 is a rectangular frame shape. The second vapor passage 52 is formed between the adjacent land portions 33 . The planar shape of the second steam passage 52 is an elongated rectangular shape. The steam channel section 50 is divided into a first steam channel 51 and a plurality of second steam channels 52 by a plurality of land parts 33 .

As shown in FIG. 3 , the first steam passage 51 and the second steam passage 52 penetrate from the first main body surface 31 a of the sheet main body 31 to the second main body surface 31 b. That is, the capillary structure sheet 30 is penetrated in the Z direction. The first steam passage 51 and the second steam passage 52 are respectively composed of a steam flow channel recess 53 provided on the lower side of the first body surface 31a and a steam flow channel recess 54 provided on the upper side of the second body surface 31b. The lower steam channel recess 53 communicates with the upper steam channel recess 54, and the first steam channel 51 and the second steam channel 52 of the steam channel 50 are formed to extend from the first body surface 31a to the second body surface 31b. .

The lower vapor channel recess 53 is formed in a concave shape on the first main body surface 31a by etching from the first main body surface 31a of the capillary structure sheet 30 in an etching step described later. As a result, the lower steam channel recess 53 has a curved wall surface 53 a as shown in FIG. 7 . The wall surface 53a defines the lower steam channel recess 53, and in the cross section shown in FIG. 7, is curved so as to approach the opposing wall surface 53a as it advances toward the second main body surface 31b. Such a lower steam passage recess 53 constitutes a part (lower half) of the first steam passage 51 and a part (lower half) of the second steam passage 52 .

The upper steam channel recess 54 is formed in a concave shape on the second body surface 31b by etching from the second body surface 31b of the capillary structure sheet 30 in an etching step described later. As a result, the upper steam channel recess 54 has a curved wall surface 54 a as shown in FIG. 7 . The wall surface 54a defines the upper steam channel recess 54, and in the cross section shown in FIG. 7, is curved so as to approach the opposing wall surface 54a as it advances toward the first main body surface 31a. Such an upper steam passage recess 54 constitutes a part (upper half) of the first steam passage 51 and a part (upper half) of the second steam passage 52 .

As shown in FIG. 7 , the wall surface 53 a of the lower steam flow path recess 53 is connected to the wall surface 54 a of the upper steam flow path recess 54 to form the penetration portion 34 . The wall surface 53 a and the wall surface 54 a are respectively curved toward the penetration portion 34 . Thereby, the lower steam flow path recess 53 and the upper steam flow path recess 54 communicate with each other. In this embodiment, the planar shape of the penetrating portion 34 of the first steam passage 51 is a rectangular frame shape similarly to the first steam passage 51, and the planar shape of the penetrating portion 34 of the second steam passage 52 is elongated like the second steam passage 52. of rectangular shape. The penetration portion 34 may be defined by a ridge line formed so that the wall surface 53a of the lower steam channel recess 53 and the wall surface 54a of the upper steam channel recess 54 merge and protrude inward. In the penetration portion 34, the planar area of the steam flow path portion 50 is the smallest. The widths w2 and w2' (see FIG. 7 ) of such penetrating portions 34 may be, for example, 400 μm to 1600 μm. Here, the width w2 of the penetration portion 34 corresponds to the gap between the adjacent land portions 33 in the Y direction. Moreover, the width w2' of the penetration part 34 corresponds to the gap between the frame part 32 and the land part 33 in the Y direction (or X direction).

The position of the through portion 34 in the Z direction may be an intermediate position between the first main body surface 31a and the second main body surface 31b, or may be a position shifted from the intermediate position toward the lower side or the upper side. The position of the penetration portion 34 is arbitrary as long as the lower steam flow path recess 53 communicates with the upper steam flow path recess 54 .

In addition, in the present embodiment, the cross-sectional shapes of the first steam passage 51 and the second steam passage 52 are formed to include the penetration portion 34 defined by the ridge line formed to protrude inward, but the present invention is not limited thereto. For example, the cross-sectional shape of the first steam passage 51 and the cross-sectional shape of the second steam passage 52 may be trapezoidal or rectangular, or may be barrel-shaped.

The steam channel part 50 including the first steam channel 51 and the second steam channel 52 configured in this way constitutes a part of the above-mentioned sealed space 3 . Each of the steam passages 51, 52 has a relatively large cross-sectional area for the actuating steam 2a to pass through.

Here, FIG. 3 shows the first steam passage 51 and the second steam passage 52 etc. enlargedly in order to clarify the drawing, and the number or arrangement of these steam passages 51 , 52 etc. is different from FIG. 2 and FIG. 6 .

However, although not shown, a plurality of supporting parts that support the land part 33 on the frame part 32 may be provided in the steam flow path part 50 . In addition, a support portion for supporting the land portions 33 adjacent to each other may be provided. These supporting parts can be arranged on both sides of the land portion 33 in the X direction, and can also be arranged on both sides of the land portion 33 in the Y direction. The supporting portion can be formed so as not to hinder the flow of the working steam 2 a diffused in the steam flow path portion 50 . For example, it may be arranged on one side of the first main body surface 31a and the second main body surface 31b of the sheet main body 31 of the capillary structure sheet 30, and a space constituting a concave portion of the vapor flow path may be formed on the other side. Thereby, the thickness of the support part can be made thinner than the thickness of the sheet main body 31, and it can prevent that the 1st steam passage 51 and the 2nd steam passage 52 are cut|disconnected in the X direction and the Y direction.

As shown in Fig. 3, Fig. 6 and Fig. 7, on the first body surface 31a of the sheet body 31 of the capillary structure sheet 30, there is provided a liquid flow path portion 60 (groove portion) mainly through which the working fluid 2b passes. Specifically, the liquid channel portion 60 is provided on the first body surface 31 a of each land portion 33 of the capillary structure sheet 30 . The working steam 2 a also passes through the liquid channel portion 60 . The liquid flow path portion 60 constitutes a part of the sealed space 3 and communicates with the vapor flow path portion 50 . The liquid channel portion 60 is configured as a capillary structure (wick) for sending the working fluid 2b to the evaporation region SR. The liquid channel portion 60 may be integrally formed over the first body surface 31 a of each land portion 33 . The liquid channel portion 60 may not be provided on the second body surface 31 b of each land portion 33 .

As shown in FIG. 8, the liquid channel part 60 is comprised by the several groove|channel provided in the 1st main body surface 31a. More specifically, the liquid flow path portion 60 has a plurality of liquid flow path main grooves 61 through which the working fluid 2b passes, and a plurality of liquid flow path connecting grooves 65 communicating with the liquid flow path main flow grooves 61 .

As shown in FIG. 8 , each liquid channel main channel 61 is formed to extend in the X direction. The main channel groove 61 of the liquid channel mainly has a flow channel cross-sectional area smaller than that of the first steam channel 51 or the second steam channel 52 of the steam channel part 50, so that the working fluid 2b flows by capillary action. Thereby, the main channel groove 61 of the liquid channel is configured to send the working fluid 2 b condensed from the working vapor 2 a to the evaporation region SR. The mainstream grooves 61 of the liquid channels may also be arranged at equal intervals in the Y direction.

The main channel groove 61 of the liquid channel is formed by etching from the first body surface 31a of the sheet body 31 of the capillary structure sheet 30 in an etching step described later. Thereby, the main channel groove 61 of the liquid flow path has the wall surface 62 formed in a curved shape as shown in FIG. 7 . The wall surface 62 defines the main flow groove 61 of the liquid flow path, and is concavely curved toward the second body surface 31b.

The width w3 (dimension in the Y direction) of the liquid channel main groove 61 shown in FIGS. 7 and 8 may be, for example, 5 μm˜150 μm. In addition, the width w3 of the main channel groove 61 of the liquid channel means the dimension on the first body surface 31a. In addition, the depth h1 (dimension in the Z direction) of the liquid channel main groove 61 shown in FIG. 7 may be, for example, 3 μm to 150 μm.

As shown in FIG. 8 , each liquid channel connection groove 65 extends in a direction different from the X direction. In this embodiment, each of the liquid channel connecting grooves 65 is formed to extend in the Y direction, and is formed perpendicular to the main channel groove 61 of the liquid channel. The plurality of liquid flow channel connection grooves 65 are arranged to communicate with each other adjacent liquid flow channel main grooves 61 . The other liquid channel connection grooves 65 are arranged so as to connect the vapor channel portion 50 (the first vapor channel 51 or the second vapor channel 52 ) and the liquid channel main groove 61 . That is, the liquid flow path connecting groove 65 extends from the end edge of the land portion 33 in the Y direction to the liquid flow path main flow groove 61 adjacent to the end edge. In this way, the first vapor passage 51 or the second vapor passage 52 of the vapor passage portion 50 communicates with the main flow groove 61 of the liquid passage.

The liquid channel connection groove 65 mainly has a flow channel cross-sectional area smaller than that of the first steam channel 51 or the second steam channel 52 of the steam channel part 50, so that the working fluid 2b flows by capillary action. The connecting grooves 65 for the liquid channels may also be arranged at equal intervals in the X direction.

The liquid channel connecting groove 65 is formed by etching similarly to the liquid channel main channel groove 61 , and has a curved wall surface (not shown) similar to the liquid channel main channel groove 61 . The width w4 (dimension in the X direction) of the liquid channel connecting groove 65 shown in FIG. 8 may be equal to the width w3 of the liquid channel main groove 61, but may be larger than the width w3, or may be smaller than the width w3. The depth of the liquid channel connecting groove 65 may be equal to the depth h1 of the liquid channel main groove 61, but may also be deeper than the depth h1, or may also be shallower than the depth h1.

As shown in FIG. 8 , the liquid channel portion 60 has a liquid channel convex portion row 63 provided on the first body surface 31 a of the sheet body 31 . The liquid channel convex portion row 63 is disposed between adjacent liquid channel main grooves 61 . Each liquid channel protrusion row 63 includes a plurality of liquid channel protrusions 64 arranged in the X direction. The liquid channel convex portion 64 is provided in the liquid channel portion 60 and is in contact with the second lower sheet surface 10 b of the lower sheet 10 . Each liquid channel convex portion 64 is formed in a rectangular shape with the X direction being the longitudinal direction in plan view. The liquid channel main groove 61 is interposed between the liquid channel protrusions 64 adjacent to each other in the Y direction, and the liquid channel connecting groove 65 is interposed between the liquid channel protrusions 64 adjacent to each other in the X direction. The liquid channel connecting grooves 65 are formed to extend in the Y direction, and connect the adjacent liquid channel mainstream grooves 61 in the Y direction to each other. In this way, the working fluid 2b can travel back and forth between the main grooves 61 of the fluid flow path.

The liquid channel protrusion 64 is not etched in the etching step described later, and the material of the capillary structure sheet 30 remains. In this embodiment, as shown in FIG. 8 , the planar shape of the liquid channel protrusion 64 (the shape at the position of the first body surface 31a of the sheet body 31 of the capillary structure sheet 30 ) is rectangular.

In the present embodiment, the liquid channel convex portions 64 are arranged in a zigzag shape. More specifically, the liquid channel protrusions 64 of the liquid channel protrusion rows 63 adjacent to each other in the Y direction are arranged offset from each other in the X direction. The offset amount can be half of the arrangement pitch of the liquid channel protrusions 64 in the X direction. The width w5 (dimension in the Y direction) of the liquid channel protrusion 64 shown in FIG. 8 may be, for example, 5 μm to 500 μm. In addition, the width w5 of the liquid channel convex part 64 means the dimension on the 1st main body surface 31a. In addition, the arrangement of the liquid channel protrusions 64 is not limited to a staggered shape, and may be arranged side by side. In this case, the liquid channel protrusions 64 of the liquid channel protrusion rows 63 adjacent to each other in the Y direction are aligned in the X direction.

The liquid flow main groove 61 includes a liquid flow intersection 66 communicating with the liquid flow connecting groove 65 . In the liquid flow path intersection portion 66 , the liquid flow path mainstream groove 61 communicates with the liquid flow path connecting groove 65 in a T-shape. Thereby, in the liquid flow path intersection 66 in which the main liquid flow path main groove 61 communicates with the liquid flow path connecting groove 65 on one side (such as the upper side of FIG. 8 ), the other side (such as the upper side of FIG. 8 ) can be avoided. The connecting groove 65 of the liquid flow path on the lower side) communicates with the main flow groove 61 of the liquid flow path. This prevents the wall 62 of the liquid channel main groove 61 from being notched on both sides (upper side and lower side in FIG. 8 ) in the liquid channel intersection 66 , leaving one side of the wall 62 remaining. Therefore, in the liquid flow path intersection portion 66, capillary action can also be imparted to the working fluid in the liquid flow path mainstream groove 61, and the propulsive force of the working fluid 2b toward the evaporation region SR can be suppressed from decreasing at the liquid flow path intersection portion 66. .

Furthermore, as shown in FIG. 2 , the steam chamber 1 may further include an injection portion 4 for injecting the working fluid 2 b into the sealed space 3 on the side edge of one side in the X direction (the left side in FIG. 2 ). In the example shown in FIG. 2 , the injection part 4 is arranged on the side of the evaporation region SR, and protrudes outward from the side edge of the side of the evaporation region SR.

The injection part 4 is composed of the lower side sheet injection protrusion 13 of the lower sheet 10 (see FIG. 4 ), the upper side sheet injection protrusion 23 of the upper side sheet 20 (see FIG. 5 ), and the capillary structure of the capillary structure sheet 30. The structural sheet injection protrusions 36 (refer to FIG. 6 ) are formed by overlapping each other. In the illustrated example, the lower surface (first body surface 31a) of the capillary structure sheet injection protrusion 36 overlaps with the upper surface (second lower sheet surface 10b) of the lower sheet injection protrusion 13, and the capillary structure The upper surface (second body surface 31 b ) of the structural sheet injection protrusion 36 overlaps with the lower surface (first upper sheet surface 20 a ) of the upper side sheet injection protrusion 23 . Wherein, the injection channel 37 can be formed in the injection protrusion 36 of the capillary structure sheet. The injection channel 37 can penetrate from the first body surface 31a of the sheet body 31 to the second body surface 31b. That is, the sheet main body 31 (capillary structure sheet injection protrusion 36 ) can be penetrated in the Z direction. The injection channel 37 may communicate with the first steam channel 51 , and the working fluid 2b may be injected into the first steam channel 51 through the injection channel 37 . In addition, depending on the arrangement of the liquid flow path 60 , the injection flow path 37 may communicate with the liquid flow path 60 . The upper and lower surfaces of the capillary structure sheet injection protrusion 36 may be formed flat, and the upper surface of the lower sheet injection protrusion 13 and the lower surface of the upper sheet injection protrusion 23 may also be formed flat. The planar shapes of the injection protrusions 13, 23, 36 may be equal.

In addition, in this embodiment, an example is shown in which the injection part 4 is provided on one of the pair of side edges of the steam chamber 1 in the X direction, but it is not limited thereto, and may be provided at any position. In addition, the injection channel 37 provided in the capillary structure sheet injection protrusion 36 may not pass through the sheet body 31 as long as the working fluid 2b can be injected. In this case, only one of the first body surface 31 a and the second body surface 31 b of the sheet body 31 may be etched to form the injection flow path 37 communicating with the steam flow path portion 50 . In addition, the injection part 4 can also be cut and removed after injecting the working fluid 2b when manufacturing the steam chamber 1 .

However, in the present embodiment, as described above, the lower sheet 10 is formed smaller than the capillary structure sheet 30 as a whole when viewed in plan. Therefore, as shown in FIG. 2 , FIG. 3 and FIG. 7 , the outer peripheral edge 11 o of the lower sheet 10 is positioned on the inner side than the outer peripheral edge 32 o of the capillary structure sheet 30 , that is, on the side close to the steam flow path portion 50 . Thereby, the lower sheet 10 is provided with lower sheet retracted portions 15a, 15b, 15c, 15d that are retracted to the side of the vapor flow path portion 50 than the outer peripheral edge 32o of the capillary structure sheet 30 in plan view. .

More specifically, the longitudinal side edge 11a of the lower sheet 10 is positioned on the side closer to the vapor flow path portion 50 than the longitudinal side edge 32a of the capillary structure sheet 30, and is positioned on the longer side of the lower sheet 10. The side edge 11a in the lateral direction is formed with a lower sheet retraction portion 15a. In addition, the longitudinal side edge 11b of the lower sheet 10 is positioned on the side of the steam channel portion 50 than the longitudinal side edge 32b of the capillary structure sheet 30, and on the longitudinal side of the lower sheet 10. The edge 11b is formed with a lower side sheet setback 15b. In addition, the lateral edge 11c of the lower sheet 10 is positioned closer to the steam flow path portion 50 than the lateral edge 32c of the capillary structure sheet 30, on the lateral side of the lower sheet 10. The edge 11c is formed with a lower side sheet setback 15c. In addition, the lateral edge 11d of the lower sheet 10 is positioned on the side of the steam flow path portion 50 than the lateral edge 32d of the capillary structure sheet 30, and on the lateral side of the lower sheet 10. The edge 11d is formed with a lower side sheet setback 15d. In this way, the lower sheet retracted portions 15a, 15b, 15c, and 15d are formed over the entire circumference except for the portion where the lower sheet injection portion 13 is provided in the outer peripheral edge 11o of the lower sheet 10 .

In addition, as mentioned above, the planar shape of the steam chamber 1 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L shape, or a T shape. In this case, the lower sheet retracted portions 15a, 15b, 15c, and 15d may be formed over the entire circumference of the outer peripheral edge 11o of the lower sheet 10, or may be formed at any position in the outer peripheral edge 11o of the lower sheet 10. .

The dimension w6 between the longitudinal side edge 11a of the lower sheet 10 in the Y direction and the longitudinal side edge 32a of the capillary structure sheet 30 shown in FIG. 7 may be, for example, 10 μm to 1000 μm. Regarding the dimension between the longitudinal side edge 11b of the lower sheet 10 in the Y direction and the longitudinal side edge 32b of the capillary structure sheet 30, and the shorter side edge 11c of the lower sheet 10 in the X direction The dimension between the short side edge 32c of the capillary structure sheet 30 and the dimension between the short side edge 11d of the lower sheet 10 in the X direction and the short side edge 32d of the capillary structure sheet 30 Also the same. That is, each of the lower sheet retracted portions 15a, 15b, 15c, and 15d may be retracted to a position of 10 μm or more and 1000 μm or less from the outer peripheral edge 32o of the capillary structure sheet 30 in plan view.

Also, the dimension w7 between the longitudinal side edge 11a of the upper and lower sheet 10 in the Y direction shown in FIG. 7 and the steam channel portion 50 (first steam channel 51 ) can be, for example, 30 μm to 3000 μm. Here, the dimension w7 means the dimension on the first body surface 31a. Regarding the dimension between the longitudinal side edge 11b of the upper and lower sheet 10 in the Y direction and the steam flow path portion 50, and the distance between the shorter side edge 11c of the upper and lower sheet 10 in the X direction and the steam flow path portion 50 The same is true for the dimensions between the side edges 11d in the short-side direction of the lower sheet 10 in the X direction and the steam flow path portion 50 . That is, each of the lower sheet retracted portions 15a, 15b, 15c, and 15d may be provided at a distance of 30 μm or more and 3000 μm or less from the steam flow path portion 50 (first steam passage 51 ).

In addition, in the present embodiment, as described above, the upper sheet 20 is formed smaller than the capillary structure sheet 30 as a whole when viewed in plan. Therefore, as shown in FIG. 2 , FIG. 3 and FIG. 7 , the outer peripheral edge 21 o of the upper sheet 20 is positioned inside the outer peripheral edge 32 o of the capillary structure sheet 30 , that is, on the side close to the steam flow path portion 50 . Thereby, the upper sheet 20 is provided with upper sheet retracted portions 25 a , 25 b , 25 c , and 25 d retracted to the side of the vapor flow path portion 50 than the outer peripheral edge 32 o of the capillary structure sheet 30 in plan view. In addition, the upper sheet 20 may have the same size as the lower sheet 10 in plan view, but may be larger than the lower sheet 10 or may be smaller than the lower sheet 10 .

More specifically, the longitudinal side edge 21a of the upper sheet 20 is positioned on the side closer to the vapor flow path portion 50 than the longitudinal side edge 32a of the capillary structure sheet 30 , in the longitudinal direction of the upper sheet 20 . The side edge 21a is formed with an upper side sheet setback 25a. In addition, the longitudinal side edge 21b of the upper sheet 20 is positioned on the side closer to the steam channel portion 50 than the longitudinal side edge 32b of the capillary structure sheet 30, and the longitudinal side edge 21b of the upper sheet 20 An upper side sheet retracted portion 25b is formed. In addition, the short side edge 21c of the upper sheet 20 is positioned on the side closer to the steam flow path portion 50 than the short side edge 32c of the capillary structure sheet 30, and the short side edge 21c of the upper sheet 20 An upper side sheet retracted portion 25c is formed. In addition, the short side edge 21d of the upper sheet 20 is positioned closer to the steam flow path portion 50 than the short side edge 32d of the capillary structure sheet 30, and the short side edge 21d of the upper sheet 20 An upper side sheet retreat portion 25d is formed. In this way, the upper sheet retracted portions 25a, 25b, 25c, and 25d are formed over the entire circumference except for the portion where the upper sheet injection protrusion 23 is provided in the outer peripheral edge 21o of the upper sheet 20 .

In addition, as mentioned above, the planar shape of the steam chamber 1 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, a T-shape, etc. 25c and 25d may be formed over the entire circumference of the outer periphery 21o of the upper sheet 20, or may be formed at any position in the outer periphery 21o of the upper sheet 20.

The dimension w6' between the longitudinal side edge 21a of the upper sheet 20 in the Y direction and the longitudinal side edge 32a of the capillary structure sheet 30 shown in FIG. 7 may be, for example, 10 μm˜1000 μm. Regarding the dimension between the longitudinal side edge 21b of the upper sheet 20 in the Y direction and the longitudinal side edge 32b of the capillary structure sheet 30, and the dimension between the short side edge 21c of the upper sheet 20 in the X direction and the capillary The dimension between the short side edges 32c of the structural sheet 30 and the dimension between the short side edges 21d of the upper sheet 20 and the short side edges 32d of the capillary structure sheet 30 in the X direction are also the same. That is, each of the upper sheet retracted portions 25a, 25b, 25c, and 25d may be retracted to a position of 10 μm or more and 1000 μm or less from the outer peripheral edge 32o of the capillary structure sheet 30 in plan view. In addition, the dimension w6' may be equal to the above-mentioned dimension w6, but may also be larger than the above-mentioned dimension w6, or may also be smaller than the above-mentioned dimension w6.

Also, the dimension w7' between the longitudinal side edge 21a of the upper sheet 20 in the Y direction and the steam flow path portion 50 (first steam path 51) shown in FIG. 7 may be, for example, 30 μm to 3000 μm. Here, this dimension w7' means the dimension on the 2nd main body surface 31b. Dimensions between the longitudinal side edge 21b of the upper sheet 20 in the Y direction and the steam flow path portion 50, and the dimension between the short side edge 21c of the upper sheet 20 in the X direction and the steam flow path portion 50 , and the dimensions between the short-side direction side edge 21d of the upper sheet 20 in the X direction and the steam flow path portion 50 are also the same. That is, each of the upper sheet retracted portions 25a, 25b, 25c, and 25d may be provided at a distance of 30 μm or more and 3000 μm or less from the steam flow path portion 50 (first steam passage 51 ). In addition, the dimension w7' may be equal to the above-mentioned dimension w7, but may also be larger than the above-mentioned dimension w7, or may also be smaller than the above-mentioned dimension w7.

In addition, the materials constituting the lower sheet 10, the upper sheet 20, and the capillary structure sheet 30 are not particularly limited as long as they are materials with good thermal conductivity, but the lower sheet 10, the upper sheet 20, and the capillary structure sheet 30 may, for example, comprise copper or a copper alloy. In this case, the thermal conductivity of each sheet 10, 20, 30 can be increased, and the heat dissipation efficiency of the steam chamber 1 can be improved.

In particular, the capillary structure sheet 30 may be formed of a material having a lower strength than the material constituting the lower sheet 10 and the material constituting the upper sheet 20 . In other words, the lower sheet 10 and the upper sheet 20 may be made of a material having a higher strength than the material constituting the capillary structure sheet 30 . The capillary structure sheet 30 can be made of, for example, pure copper (or oxygen-free copper, C1020, etc.) or copper alloy (such as phosphor bronze). When the capillary structure sheet 30 is made of pure copper, the lower sheet 10 and the upper sheet 20 may be made of a copper alloy, for example. The lower sheet 10 and the upper sheet 20 may be made of the same material, but may be made of different materials.

In addition, the thickness t1 of the steam chamber 1 shown in FIG. 3 may be, for example, 100 μm˜1000 μm. By setting the thickness t1 of the steam chamber 1 to be 100 μm or more, the steam flow path portion 50 can be secured appropriately, and the steam chamber 1 can function appropriately. On the other hand, by setting the thickness t1 of the steam chamber 1 to be 1000 μm or less, it is possible to suppress the thickness t1 of the steam chamber 1 from increasing.

The thickness t2 of the lower sheet 10 shown in FIG. 3 may be, for example, 6 μm to 100 μm. By setting the thickness t2 of the lower sheet 10 to be 6 μm or more, the mechanical strength of the lower sheet 10 can be ensured. On the other hand, by setting the thickness t2 of the lower sheet 10 to be 100 μm or less, it is possible to suppress the thickness t1 of the steam chamber 1 from increasing. Similarly, the thickness t3 of the upper sheet 20 shown in FIG. 3 can be set in the same manner as the thickness t2 of the lower sheet 10 . The thickness t3 of the upper sheet 20 and the thickness t2 of the lower sheet 10 may also be different.

The thickness t4 of the capillary structure sheet 30 shown in FIG. 3 may be, for example, 50 μm˜400 μm. By setting the thickness t4 of the capillary structure sheet 30 to 50 μm or more, the steam flow path portion 50 can be properly secured, and the steam chamber 1 can be properly operated. On the other hand, by setting the thickness t4 of the capillary structure sheet 30 to 400 μm or less, it is possible to suppress the thickness t1 of the steam chamber 1 from increasing.

Next, a method of manufacturing the steam chamber 1 including such a configuration will be described using FIGS. 9 to 12 .

Here, first, the sheet preparation procedure for preparing the respective sheets 10, 20, 30 will be described. The sheet preparation step includes: the lower sheet preparation step of preparing the lower sheet 10; the upper sheet preparation step of the upper sheet 20; and the capillary structure sheet preparation step of preparing the capillary structure sheet 30.

In the lower sheet preparation step, first, a lower sheet base material having a desired thickness is prepared. The lower sheet base material may be a rolled material. Next, the lower sheet 10 having a desired planar shape is formed by etching the lower sheet base material. Alternatively, the lower sheet 10 having a desired planar shape can also be formed by pressing the lower sheet base material. In this way, the lower sheet 10 having the outline shape as shown in FIG. 4 can be prepared. That is, the lower side sheet 10 having the above-mentioned outer peripheral edge 11o can be obtained.

Also in the upper sheet preparation step, first, an upper sheet base material having a desired thickness is prepared in the same manner as in the lower sheet preparation step. The upper sheet base material may also be a rolled material. Next, the upper sheet 20 having a desired planar shape is formed by etching the upper sheet base material. Alternatively, the upper sheet 20 having a desired planar shape can also be formed by pressing the upper sheet base material. In this way, the upper side sheet 20 having an outline shape as shown in FIG. 5 can be prepared. That is, the upper side sheet 20 having the above-mentioned outer peripheral edge 21o can be obtained.

The capillary structure sheet preparation step includes: a material sheet preparation step of preparing the metal material sheet M, and an etching step of etching the metal material sheet M.

First, in the material sheet preparation step, as shown in FIG. 9 , a flat metal material sheet M including the first material surface Ma and the second material surface Mb is prepared. The metal material sheet M can also be formed of a rolled material having a desired thickness.

Next, in the etching step, as shown in FIG. 10 , the metal material M is etched from the first material surface Ma and the second material surface Mb to form the vapor flow path portion 50 and the liquid flow path portion 60 .

More specifically, a patterned resist film (not shown) is formed on the first material surface Ma and the second material surface Mb of the metal material sheet M by photolithography. Next, the first material surface Ma and the second material surface Mb of the metal material sheet M are etched through the openings of the patterned resist film. Thereby, the 1st material surface Ma and the 2nd material surface Mb of the metal material sheet M are etched in pattern shape, and the steam flow path part 50 and the liquid flow path part 60 shown in FIG. 10 are formed. In addition, as the etchant, for example, a ferric chloride-based etchant such as a second ferric chloride aqueous solution, or a copper chloride-based etchant such as a copper chloride aqueous solution can be used.

The etching can etch the first material surface Ma and the second material surface Mb of the metal material sheet M at the same time. However, it is not limited thereto, and the etching of the first material surface Ma and the second material surface Mb may also be performed in separate steps. In addition, the vapor flow path portion 50 and the liquid flow path portion 60 may be etched and formed at the same time, or may be formed in separate steps.

In addition, in the etching step, by etching the first material surface Ma and the second material surface Mb of the metal material sheet M, a specific contour shape as shown in FIG. 6 can be obtained. That is, the capillary structure sheet 30 having the above-mentioned outer peripheral edge 32o can be obtained.

In this way, the lower sheet 10, the upper sheet 20, and the capillary structure sheet 30 of the present embodiment can be obtained.

After the preparation step, as a joining step, as shown in FIG. 11 , the lower sheet 10 , the upper sheet 20 , and the capillary structure sheet 30 are joined.

More specifically, first, the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 are laminated in this order. In this case, the first body surface 31a of the capillary structure sheet 30 overlaps the second lower sheet surface 10b of the lower sheet 10, and the first upper sheet surface 20a of the upper sheet 20 and the capillary structure sheet The second body surface 31b of the material 30 overlaps. At this time, the alignment holes 12 of the lower sheet 10 , the alignment holes 35 of the capillary structure sheet 30 , and the alignment holes 22 of the upper sheet 20 can be used to align the sheets 10 , 20 , 30 .

Next, the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 are temporarily fixed. For example, these sheet materials 10, 20, 30 may be temporarily fixed by spot resistance welding, or these sheet materials 10, 20, 30 may be temporarily fixed by laser welding.

Next, the lower sheet 10, the capillary structure sheet 30, and the upper sheet 20 are permanently joined by thermocompression bonding. For example, the sheets 10, 20, 30 can also be permanently bonded by diffusion bonding. The so-called diffusion bonding is the following method: make the lower side sheet 10 to be bonded and the capillary structure sheet 30 close contact, and make the capillary structure sheet 30 and the upper side sheet 20 close contact, in a controlled atmosphere such as vacuum or inert gas, Pressure and heat are applied in the stacking direction, and bonding is performed by diffusion of atoms generated in the bonding surface. Diffusion bonding heats the materials of the sheets 10, 20, 30 to a temperature close to the melting point, but since it is lower than the melting point, it can prevent the sheets 10, 20, 30 from melting and deforming. Thereby, the first body surface 31 a of the frame portion 32 and each land portion 33 of the capillary structure sheet 30 and the second lower sheet surface 10 b of the lower sheet 10 are diffusely bonded. Moreover, the second main body surface 31b at the frame portion 32 and each land portion 33 of the capillary structure sheet 30 is diffusely bonded to the first upper sheet surface 20a of the upper sheet 20 . In this way, the sheets 10 , 20 , and 30 are diffusion-bonded to form the sealed space 3 having the vapor flow path 50 and the liquid flow path 60 between the lower sheet 10 and the upper sheet 20 . At this stage, in the sealed space 3 , the above-mentioned injection flow path 37 is not yet closed, but communicates with the outside through the injection flow path 37 .

After the bonding step, as an injection step, the working fluid 2 b is injected into the sealed space 3 from the injection channel 37 of the injection part 4 .

After the injection step, as a closing step, the injection flow path 37 is closed. For example, the injection channel 37 may be closed by partially melting the injection part 4 . Thereby, the communication between the sealed space 3 and the outside is cut off, and the sealed space 3 is sealed. Therefore, the sealed space 3 in which the working fluid 2b is sealed can be obtained, and the working fluid 2b in the sealed space 3 is prevented from leaking to the outside. The injection part 4 may also be removed after closing the injection channel 37 . The entire injection part 4 can be removed. Alternatively, a part of the injection part 4 may be removed, leaving the remaining part.

As described above, the steam chamber 1 of this embodiment can be obtained.

In this way, the steam chamber 1 of this embodiment can be manufactured sequentially. As shown in FIG. 12 , the manufactured steam chamber 1 can be placed and stored in a stacked manner on the placement surface 70 provided at a specific place. Thereafter, the steam chamber 1 is taken out from the placement place and transported when it is shipped or mounted on the device D.

Next, a method of transporting the steam chamber 1 manufactured in this way will be described using FIGS. 13 and 14 . Here, a method of taking out and transporting the steam chambers 1 from the state in which the steam chambers 1 are stacked on each other as shown in FIG. 12 will be described.

First, as shown in FIG. 13 , the claws 82a, 82b of the first arm 81a and the second arm 81b of the suspension device 80 enter the lower sheet retraction portions 15a, 15b of the lower sheet 10, respectively.

More specifically, first, the first arm portion 81a is moved in the vertical direction, and the first claw portion 82a provided at the front end of the first arm portion 81a is positioned on the lower side plate of the uppermost steam chamber 1. The position in the Z direction of the material retracted portion 15a is the same. Also, the second arm portion 81b is moved in the vertical direction, and the second claw portion 82b provided at the front end of the second arm portion 81b is positioned at a position in the Z direction relative to the lower side sheet retreat portion 15b of the steam chamber 1. same location. Next, the 1st arm part 81a is moved in the horizontal direction, and the 1st claw part 82a is made to enter the lower side sheet retreat part 15a. Similarly, the 2nd arm part 81b is moved in a horizontal direction, and the 2nd claw part 82b enters the lower side sheet retreat part 15b. Thereby, the first claw portion 82a and the second claw portion 82b can be respectively brought into contact with the first main body surface 31a of the capillary structure sheet 30 .

Next, as shown in FIG. 14 , the steam chamber 1 is suspended by the suspension device 80 .

More specifically, in a state where the first claw portion 82a and the second claw portion 82b are in contact with the first main body surface 31a of the capillary structure sheet 30, the first arm portion 81a and the second arm portion 81b are respectively directed toward the Move up. Thereby, the first body surface 31 a of the capillary structure sheet 30 is supported by the first claw portion 82 a and the second claw portion 82 b, and the steam chamber 1 is suspended by the suspension device 80 .

Then, in the state where the steam chamber 1 is suspended by the suspension device 80, the first arm portion 81a and the second arm portion 81b are moved in the horizontal direction, and the steam chamber 1 is transported to a desired target position.

In this way, the steam chamber 1 of this embodiment can be transported by the suspension device 80 .

In addition, here, the method of taking out and conveying the steam chamber 1 from the state where the steam chamber 1 was piled up and placed has been demonstrated. However, it is not limited thereto, and when the steam chamber 1 is directly placed on the mounting surface 70 , the suspension device 80 may be used to transport the steam chamber 1 .

Here, the method of conveying the general steam chamber 1' will be described. As shown in Fig. 15, the sides of the general steam chamber 1' are formed vertically, unlike the steam chamber 1 of this embodiment, the lower sheet retracted parts 15a, 15b, 15c, 15d are formed on the lower sheet 10. Therefore, the claws 82a, 82b of the suspension device 80 cannot enter the lower sheet retracted parts 15a, 15b, and it is difficult to transport the general steam chamber 1' to the above suspension device 80.

As shown in FIG. 15 , a general steam chamber 1 ′ can be taken out and transported by an adsorption device 85 . More specifically, the adsorption device 85 has an adsorption pad 86 that generates adsorption force by setting the interior to a negative pressure, and presses the adsorption pad 86 on the upper surface of the steam chamber 1' to make it adsorb to the steam chamber 1'. Thereafter, in a state where the vapor chamber 1' is adsorbed by the adsorption pad 86, the adsorption device 85 is moved upward to suspend the vapor chamber 1'. And, the adsorption device 85 is moved in the horizontal direction, and the vapor chamber 1' is transported to a desired target position.

At this time, when the steam chamber 1' is thinned, the steam chamber 1' may be deformed due to the adsorption force of the adsorption pad 86 acting on the upper surface of the steam chamber 1'. Therefore, in order to suppress deformation of the steam chamber 1', thinning of the steam chamber 1' may be suppressed.

On the other hand, in this embodiment, the lower side sheet 10 is provided with the lower side sheet retraction part 15a, 15b, 15c, 15d in the steam chamber 1 lower side. Thereby, the claw portions 82a, 82b of the suspension device 80 can enter the lower side sheet retreat portions 15a, 15b, 15c, 15d of the placed steam chamber 1 . Therefore, the steam chamber 1 can be suspended and transported by the suspension device 80, and the above-mentioned adsorption device 85 can be unnecessary. Therefore, deformation of the vapor chamber 1' can be suppressed. As a result, further thinning of the steam chamber 1' can be achieved.

In addition, the conveyance of the steam chamber 1 by the above-mentioned suspension device 80 is an example, and the steam chamber 1 may be conveyed using other arbitrary devices or the like. For example, the vapor chamber 1 can also be transported using a tool with a sharp front end. More specifically, the front end of the tool may enter the lower sheet retreat portion 15a, and then the tool may be moved upward to raise the steam chamber 1. In addition, the lifted steam chamber 1 can also be grasped by hand and transported. In addition, for example, instead of using such a device or tool, the steam chamber 1 may be lifted up by inserting fingers into the lower sheet retreat portion 15a, and thereafter, the steam chamber 1 may be grasped and transported. In this case, since the lower sheet 10 is provided with the lower sheet retracted portions 15a, 15b, 15c, 15d, it is easy to take out and transport the steam chamber 1.

Next, the operation method of the vapor chamber 1, that is, the cooling method of the device D will be described.

The steam chamber 1 transported as described above is installed in the case H of a mobile terminal or the like at the transport destination, and the case member Ha is in contact with the second upper sheet surface 20b of the upper sheet 20 . Also, on the first lower side sheet surface 10a of the lower side sheet 10, the device D such as the CPU to be cooled is installed (or the steam chamber 1 is installed on the device D), and the first lower side sheet of the lower side sheet 10 Face 10a is in contact with device D. As shown in FIG. The working fluid 2b in the sealed space 3 adheres to the wall surface of the sealed space 3 due to its surface tension, that is, the wall surface 53a of the lower vapor flow path recess 53, the wall surface 54a of the upper vapor flow path recess 54, and the liquid in the liquid flow path portion 60. The wall surface 62 of the channel mainstream groove 61 and the wall surface of the liquid channel connection groove 65 . In addition, the working fluid 2b may also adhere to the second lower sheet surface 10b of the lower sheet 10, which is exposed in the lower vapor flow path recess 53, the liquid flow path main groove 61, and the liquid flow path connecting groove 65. part. Furthermore, the working fluid 2 b may also adhere to the portion of the first upper sheet surface 20 a of the upper sheet 20 exposed to the upper vapor flow path recess 54 .

When the device D generates heat in this state, the working fluid 2b present in the evaporation region SR (see FIG. 6 ) receives heat from the device D. The received heat is absorbed as latent heat, and the working fluid 2b is evaporated (gasified) to generate working steam 2a. Most of the generated operating gas 2a diffuses in the lower steam flow path recess 53 and the upper steam flow path recess 54 constituting the sealed space 3 (see the solid arrow in FIG. 6 ). The operating steam 2a in each steam channel recess 53, 54 leaves the evaporation region SR, and most of the operating steam 2a is transported to the relatively low temperature condensation area CR (the right part of FIG. 6). In the condensation region CR, the working steam 2 a mainly dissipates heat toward the upper sheet 20 to be cooled. The heat received by the upper sheet 20 from the working steam 2a is transferred to the outside air via the casing member Ha (see FIG. 3 ).

The actuating steam 2a loses the latent heat absorbed in the evaporation region SR by dissipating heat toward the upper sheet 20 in the condensation region CR, and condenses to generate the actuating fluid 2b. The generated working fluid 2b adheres to the wall surfaces 53a, 54a of the respective steam channel recesses 53, 54, the second lower sheet surface 10b of the lower sheet 10, and the first upper sheet surface 20a of the upper sheet 20. . Here, since the working fluid 2b continues to evaporate in the evaporation region SR, the working fluid 2b in the region other than the evaporation region SR (that is, the condensation region CR) in the liquid flow path portion 60 passes through the main groove 61 of each liquid flow path. Capillary action transports to the evaporation region SR (refer to the dotted arrow in FIG. 6 ). As a result, the working fluid 2b adhering to the wall surfaces 53a, 54a, the second lower sheet surface 10b, and the first upper sheet surface 20a moves to the liquid flow path portion 60, and enters the liquid flow through the liquid flow path connecting groove 65. Road mainstream groove 61. In this way, the working fluid 2b is filled in the main flow grooves 61 of the liquid flow paths and the connection grooves 65 of the liquid flow paths. Therefore, the filled working fluid 2b obtains a propulsion force towards the evaporation region SR through the capillary action of the main grooves 61 of each liquid flow path, and is smoothly transported to the evaporation region SR.

In the liquid flow path portion 60 , each liquid flow path mainstream groove 61 communicates with other adjacent liquid flow path main flow grooves 61 through the corresponding liquid flow path connecting groove 65 . Thereby, the working fluid 2b travels back and forth between the adjacent liquid flow path main grooves 61, and the drying up of the liquid flow path main grooves 61 is suppressed. Therefore, capillary action is given to the working fluid 2b in the main channel groove 61 of each liquid channel, and the working fluid 2b is smoothly transported to the evaporation region SR.

The working fluid 2b reaching the evaporation region SR receives heat from the device D again and evaporates. The actuating steam 2a evaporated from the actuating liquid 2b passes through the liquid flow path connection groove 65 in the evaporation region SR, and moves to the lower steam flow path recess 53 and the upper steam flow path recess 54 with a larger cross-sectional area of the flow path. Diffusion inside the channel recesses 53 , 54 . In this way, the actuating fluids 2a and 2b change phases, that is, repeat evaporation and condensation, and flow back in the sealed space 3 to transport and release the heat of the device D. As a result, the device D is cooled.

Thus, according to the present embodiment, the lower sheet 10 is provided with the lower sheet retracted portions 15a, 15b, which are retracted to the side of the vapor flow path portion 50 than the outer peripheral edge 32o of the capillary structure sheet 30 in plan view, 15c, 15d. Thereby, the claw parts 82a, 82b, etc. of the suspension device 80 can enter the lower side sheet retraction part 15a, 15b, 15c, 15d of the placed steam chamber 1. Therefore, the steam chamber 1 can be lifted easily, and the steam chamber 1 can be easily transported. As a result, the transportability of the steam chamber 1 can be improved.

Also, according to this embodiment, the transport of the steam chamber 1 can be performed without using the adsorption device 85 . Therefore, deformation of the vapor chamber 1 can be suppressed. As a result, further thinning of the vapor chamber 1 can be achieved.

Also, according to the present embodiment, by providing the lower sheet 10 with the lower sheet retracted portions 15a, 15b, 15c, 15d, the lower sheet 10 can be avoided during manufacture or use of the steam chamber 1. If the end comes into contact with other parts, etc., the part will be damaged. In addition, it is also possible to avoid the leakage of the working fluid 2b in the sealed space 3 due to the contact of the end of the lower sheet 10 with other parts and the peeling of the lower sheet 10 from the capillary structure sheet 30 . Therefore, the safety of the steam chamber 1 can be improved.

Also, according to this embodiment, the lower sheet retracted portions 15a, 15b, 15c, and 15d are provided on the pair of longitudinal side edges 11a, 11b and the pair of lateral side edges 11c, 11d of the lower sheet 10, respectively. . Thereby, the claws 82a, 82b, etc. of the suspension device 80 can enter any one of the lower sheet retreating parts 15a, 15b, 15c, 15d from any direction when viewed from above of the placed steam chamber 1, and lift up. Open the steam chamber 1. Thus, the vapor chamber 1 can be lifted more easily. As a result, the transportability of the steam chamber 1 can be further improved.

Also, according to this embodiment, the lower sheet retracted portions 15a, 15b, 15c, and 15d are retracted to positions separated from the outer peripheral edge 32o of the capillary structure sheet 30 by 10 μm or more and 1000 μm or less in plan view. In this way, by retracting the lower sheet retracted portions 15a, 15b, 15c, and 15d by more than 10 μm, the claw portions 82a, 82b of the suspension device 80 can firmly support the first body surface 31a of the capillary structure sheet 30 . Thus, the vapor chamber 1 can be lifted more easily. As a result, the transportability of the steam chamber 1 can be further improved. Also, the area of the steam chamber 1 can be effectively utilized by reducing the lower sheet retracted portions 15a, 15b, 15c, and 15d to 1000 μm or less. That is, the steam flow path 50 and the liquid flow path 60 can be provided in a wider area of the steam chamber 1, and the performance of the steam chamber 1 can be improved.

In addition, according to the present embodiment, the lower sheet retracted portions 15a, 15b, 15c, and 15d are provided at positions separated from the steam flow path portion 50 by 30 μm or more in plan view. In this way, by setting the distance between the steam channel portion 50 and the lower sheet retracted portions 15a, 15b, 15c, and 15d to be 30 μm or more, the first main body surface 31a can be formed in the bonding step during the manufacture of the steam chamber 1. It is firmly bonded to the second lower sheet surface 10b. Therefore, reduction in the strength of the vapor chamber 1 can be suppressed.

Also, according to the present embodiment, the steam flow path portion 50 penetrates from the first body surface 31a to the second body surface 31b, and the upper sheet 20 covers the steam flow path portion 50 on the second body surface 31b. In this way, by constituting the steam chamber 1 with the lower sheet 10 , the upper sheet 20 , and the capillary structure sheet 30 , the heat received from the device D by the lower sheet 10 can be released from the upper sheet 20 . Thereby, the device D can be effectively cooled. Therefore, the performance of the vapor chamber 1 can be improved.

Also, according to the present embodiment, the upper sheet 20 is provided with upper sheet retracted portions 25a, 25b, 25c, 25d that are retracted to the side of the vapor flow path portion 50 than the outer peripheral edge 32o of the capillary structure sheet 30 in plan view. . Thereby, when the steam chambers 1 are stacked on each other, the claws 82a, 82b of the suspension device 80 can easily enter the lower sheet retreating parts 15a, 15b. That is, as shown in FIG. 13 , when each steam chamber 1 is provided with an upper sheet retraction portion 25a, 25b, the lower sheet retraction portion 15a, 15b of the uppermost steam chamber 1 can be arranged with the lower sheet retraction portion 25a, 15b. The upper side sheet retracted parts 25a, 25b of the steam chamber 1 below it are aligned to ensure a wide space for the claws 82a, 82b of the suspension device 80 to enter. Therefore, the steam chamber 1 can be lifted more easily, and the transportability of the steam chamber 1 can be further improved. Also, by this, for example, the thickness t2 of the lower sheet 10 can be made thinner than the thickness (dimension in the Z direction) of the claw portions 82a, 82b of the suspension device 80 . Therefore, further thinning of the steam chamber 1 can be achieved.

Also, according to this embodiment, by providing the upper side sheet 20 with the upper side sheet retracted parts 25a, 25b, 25c, 25d, when the steam chamber 1 is manufactured or used, etc., the end of the upper side sheet 20 can be avoided. contact with other parts, etc., causing damage to the part. In addition, it is also possible to prevent the upper sheet 20 from being peeled off from the capillary structure sheet 30 due to the contact of the end of the upper sheet 20 with other parts, thereby causing the hydraulic fluid 2b in the sealed space 3 to leak. Therefore, the safety of the steam chamber 1 can be improved.

Also, according to the present embodiment, the capillary structure sheet 30 is made of a material having a strength lower than that of the material constituting the lower sheet 10 and the material constituting the upper sheet 20 . As described above, in this embodiment, the lower sheet 10 is provided with the lower sheet retracted portions 15a, 15b, 15c, 15d, and the upper sheet 20 is provided with the upper sheet retracted portions 25a, 25b, 25c, 25d. . In this way, when the steam chamber 1 is installed in the housing H of a mobile terminal, even if the steam chamber 1 is inadvertently in contact with the housing H, it is possible to avoid contact between the relatively high-strength lower sheet 10 and the upper sheet 20 and the housing H. touch. That is, the relatively low-strength capillary structure sheet 30 is in contact with the housing H. As shown in FIG. Therefore, damage to the housing H can be suppressed, and foreign matter falling out of the housing H due to damage to the housing H can be suppressed. In addition, damage to the steam chamber 1 can also be suppressed, and foreign matter falling out of the casing H due to damage to the steam chamber 1 can also be suppressed.

(The first modification example of the first embodiment) In the above-mentioned first embodiment, the lower sheet retracted portions 15a, 15b, 15c, and 15d are provided on the pair of longitudinal side edges 11a, 11b and the pair of lateral side edges of the lower sheet 10, respectively. Examples of 11c and 11d will be described. However, it is not limited thereto, and the lower sheet retracted portions 15a, 15b may also be provided on at least one of the pair of longitudinal side edges 11a, 11b of the lower sheet 10 .

In the example shown in FIGS. 16 and 17 , a lower sheet retracted portion 15 a is provided on the longitudinal side edge 11 a (lower side in FIG. 16 ) of the lower sheet 10 . Similarly, the upper sheet 20 is provided with an upper sheet retracted portion 25a on the longitudinal side edge 21a (the lower side in FIG. 16 ) of the upper sheet 20 .

In this case, it is also possible to insert a specific device or tool, fingers, etc. into the lower sheet retracted portion 15a, so that the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved. Also, by limiting the area where the lower sheet retreat portion 15a is provided, the area of the steam chamber 1 can be effectively utilized. That is, the vapor flow path portion 50 and the liquid flow path portion 60 can be provided in a wider area of the vapor chamber 1, and the performance of the vapor chamber 1 can be improved.

(Second modification of the first embodiment) In addition, the lower sheet retracted portions 15a, 15b, 15c, and 15d may also be provided on one of the pair of longitudinal side edges 11a, 11b of the lower sheet 10, and may also be provided on the lower sheet 10. One of the pair of short side edges 11c, 11d.

In the example shown in FIG. 18 , a lower sheet retreat portion 15 a is provided on the side edge 11 a in the longitudinal direction of the lower sheet 10 (the lower side in FIG. 18 ), and the lower sheet 10 is provided with a retracted portion 15 a in the shorter direction of the lower sheet 10. The side edge 11c (the left side in FIG. 18 ) is provided with a lower sheet retraction portion 15c. The upper side sheet 20 is also the same, on the longitudinal direction side edge 21a of the upper side sheet material 20 (the lower side in FIG. The left side of Fig. 18) is provided with the upper side sheet retracted part 25c.

In this case, specific devices, tools, fingers, etc. can be inserted into the lower sheet retracted parts 15a, 15c, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved. Also, by limiting the area where the lower sheet retracted portions 15a, 15c are provided, the area of the steam chamber 1 can be effectively utilized. That is, the steam flow path 50 and the liquid flow path 60 can be provided in a wider area of the steam chamber 1, and the performance of the steam chamber 1 can be improved.

Furthermore, in the example shown in FIG. 18, the sides of the steam chamber 1 provided with the longitudinal side edges 11a and the short side edges 11c of the lower sheet retracted portions 15a, 15c can be lifted and conveyed, so that The sides of the steam chamber 1 where the longitudinal side edges 11b and the short side edges 11d of the lower sheet retracted portions 15a and 15c are not provided abut against specific wall surfaces. Thereby, the vapor chamber 1 can be easily positioned relative to the wall. Therefore, for example, when laser light is irradiated to a specific position of the steam chamber 1 to mark manufacturing information, etc., marking can be performed at the correct position. In addition, after the steam chamber 1 abuts against the wall surface, the side edges 11a in the longitudinal direction and the side edges 11c in the short direction of the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved.

(The third modification of the first embodiment) In addition, the lower sheet retracted portions 15a, 15b may be provided on both of the pair of longitudinal side edges 11a, 11b of the lower sheet 10, respectively. Furthermore, the lower sheet retracted portions 15a, 15b may also be provided on a part of the pair of longitudinal side edges 11a, 11b of the lower sheet 10 .

In the example shown in FIG. 19, the lower side sheet retracted portions 15a, 15b are respectively provided on both of the pair of longitudinal side edges 11a, 11b of the lower side sheet 10, and each lower sheet retracted portion 15a, 15b is provided on a part of the side edges 11a and 11b in the longitudinal direction. The same is true for the upper sheet 20. The upper sheet retracted portions 25a, 25b are respectively provided on both of the pair of longitudinal side edges 21a, 21b of the upper sheet 20, and each upper sheet retracted portion 25a, 25b is arranged on the longitudinal direction side edges 21a, 21b. A part of the edge direction side edge 21a, 21b. Each lower sheet retracted part 15a, 15b may be provided in the center part of the longitudinal direction side edge 11a, 11b. Moreover, each upper side sheet retreat part 25a, 25b may be provided in the center part of the longitudinal direction side edge 11a, 11b.

In this case, the lower sheet retracted portion 15a and the lower sheet retracted portion 15b may be disposed at positions symmetrical to each other with respect to the center of gravity of the steam chamber 1 in plan view. In addition, the upper sheet setback 25a can be arranged at a position overlapping with the lower sheet setback 15a in plan view, and the upper sheet setback 25b can be arranged at a position overlapping with the lower sheet setback 15b in plan view.

In this case, the claws 82a, 82b of the suspension device 80 can also be made to enter the lower sheet retracted parts 15a, 15b, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved. Furthermore, by further restricting the area where the lower sheet retreat portions 15a, 15b are provided, the area of the steam chamber 1 can be further effectively utilized. That is, the steam flow path 50 and the liquid flow path 60 can be provided in a wider area of the steam chamber 1, and the performance of the steam chamber 1 can be further improved.

In addition, since the lower sheet retracted portion 15a and the lower sheet retracted portion 15b are arranged at positions symmetrical to each other with respect to the center of gravity of the steam chamber 1 in plan view, when suspended by the suspension device 80, etc., The posture of the steam chamber 1 is stabilized. Therefore, the steam chamber 1 can be easily transported. Also, when the upper side sheet retracted parts 25a, 25b are arranged at positions overlapping with the lower side sheet retracted parts 15a, 15b in a plan view, when the steam chambers 1 are stacked and placed on each other, the suspension device can be easily mounted. The claw portions 82a, 82b and the like of 80 enter the lower sheet retreat portions 15a, 15b.

(Fourth modification of the first embodiment) Also, the lower sheet retracted portions 15a, 15b may be provided at the corners of the lower sheet 10 .

In the example shown in FIG. 20 , the lower sheet 10 is provided with a lower sheet retracted portion at the corner (lower right side in FIG. 20 ) on the side of the longitudinal side edge 11a and the short side edge 11d of the lower sheet 10. 15a. Further, a lower sheet retracted portion 15b is provided at a corner (upper left side in FIG. 20 ) on the side of the longitudinal side edge 11b and the lateral direction side edge 11c of the lower sheet 10 . Similarly, the upper sheet 20 is provided with an upper sheet retracted portion 25a at the corner (lower right side in FIG. 20 ) on the side of the longitudinal side edge 21a and the short side edge 21d of the upper sheet 20 . In addition, an upper sheet retracted portion 25b is provided at a corner (upper left side in FIG. 20 ) on the side of the longitudinal side edge 21b and the lateral direction side edge 21c of the upper sheet 20 .

In this case, the lower sheet retracted portion 15a and the lower sheet retracted portion 15b may be disposed at positions symmetrical to each other with respect to the center of gravity of the steam chamber 1 in plan view. In addition, the upper sheet setback 25a can be arranged at a position overlapping with the lower sheet setback 15a in plan view, and the upper sheet setback 25b can be arranged at a position overlapping with the lower sheet setback 15b in plan view.

In this case, the claws 82a, 82b of the suspension device 80 can also be made to enter the lower sheet retracted parts 15a, 15b, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved. Furthermore, by further restricting the area where the lower sheet retreat portions 15a, 15b are provided, the area of the steam chamber 1 can be further effectively utilized. That is, the steam flow path 50 and the liquid flow path 60 can be provided in a wider area of the steam chamber 1, and the performance of the steam chamber 1 can be further improved.

In addition, since the lower sheet retracted portion 15a and the lower sheet retracted portion 15b are arranged at positions symmetrical to each other with respect to the center of gravity of the steam chamber 1 in plan view, when suspended by the suspension device 80, etc., The posture of the steam chamber 1 is stabilized. Therefore, the steam chamber 1 can be easily transported. In addition, since the upper sheet retracted portions 25a, 25b are arranged at positions overlapping with the lower sheet retracted portions 15a, 15b in a plan view, when the steam chambers 1 are placed on top of each other, the suspension can be easily made. The claws 82a, 82b and the like of the device 80 enter the lower sheet retreating parts 15a, 15b.

(Fifth modification of the first embodiment) Also, in the first embodiment described above, the lower sheet 10 is provided with the lower sheet retracted portions 15a, 15b, 15c, 15d, and the upper sheet 20 is provided with the upper sheet retracted portions 25a, 25b. , 25c, and 25d are described (see FIG. 3 ). However, it is not limited to this, and the lower side sheet shrinkage part 15a, 15b, 15c, 15d may not be provided in the lower side sheet 10. Alternatively, the upper sheet shrinkage portions 25 a , 25 b , 25 c , and 25 d may not be provided on the upper sheet 20 .

In the example shown in FIG. 21 , the lower sheet 10 is provided with lower sheet retreats 15a, 15b, 15c, 15d, while the upper sheet 20 is not provided with upper sheet retreats 25a, 25b, 25c, 25d.

In this case, it is also possible to insert specific devices, tools, fingers, etc. into the lower sheet retracted parts 15a, 15b, 15c, 15d, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved.

Also, the upper sheet retracted portions 25 a , 25 b , 25 c , and 25 d may be provided on the upper sheet 20 , while the lower sheet retracted portions 15 a , 15 b , 15 c , and 15 d may not be provided on the lower sheet 10 .

In this case, by placing the steam chamber 1 in the opposite direction, that is, in the state where the second upper sheet surface 20b of the upper sheet 20 faces the loading surface 70, the specific device or tool The steam chamber 1 can be easily lifted by inserting fingers, etc. into the upper side sheet retracted parts 25a, 25b, 25c, 25d. Therefore, the transportability of the steam chamber 1 can be improved.

(Sixth modification of the first embodiment) In addition, in the above-mentioned first embodiment, the example in which the liquid flow path portion 60 is not provided between the lower sheet shrinkage portions 15a, 15b, 15c, and 15d and the vapor flow path portion 50 has been described (see FIG. 3 ). . However, the present invention is not limited to this, and the liquid flow path portion 60 may be provided between the lower sheet shrinkage portions 15 a , 15 b , 15 c , and 15 d and the vapor flow path 50 .

In the example shown in FIG. 22 , a liquid flow path portion 60 is provided between the lower sheet shrinkage portions 15 a , 15 b and the vapor flow path portion 50 . That is, between the longitudinal side edge 11a of the lower sheet 10 and the first vapor passage 51, the liquid channel portion 60 is provided, and between the longitudinal side edge 11b of the lower sheet 10 and the first vapor passage. Between 51, a liquid flow path portion 60 is provided.

In this case, the dimension w8 between the longitudinal side edge 11a of the upper and lower sheet 10 in the Y direction and the liquid channel portion 60 shown in FIG. 22 may be, for example, 30 μm to 3000 μm. Here, the dimension w8 means the dimension on the first body surface 31a. The same applies to the dimension between the longitudinal side edge 11b of the lower sheet 10 in the Y direction and the liquid channel portion 60 . That is, the lower sheet retracted portions 15a, 15b may be provided at positions separated from the liquid channel portion 60 by 30 μm or more and 3000 μm or less.

In this case, it is also possible to insert specific devices, tools, fingers, etc. into the lower sheet retracted parts 15a, 15b, 15c, 15d, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved.

In addition, since the distance between the liquid channel portion 60 and the lower sheet retracted portions 15a, 15b, 15c, and 15d is 30 μm or more, the first main body surface 31a can be formed in the bonding step during the manufacture of the steam chamber 1. It is firmly bonded to the second lower sheet surface 10b. Therefore, reduction in the strength of the vapor chamber 1 can be suppressed.

(Seventh modification of the first embodiment) In addition, in the above-mentioned first embodiment, the example in which the steam chamber 1 is provided with one capillary structure sheet 30 has been described. However, it is not limited thereto, and the steam chamber 1 may also have a plurality of capillary structure sheets 30 .

In the example shown in FIG. 23 , the steam chamber 1 has three capillary structure sheets 30 . Each capillary structure sheet 30 is disposed between the lower sheet 10 and the upper sheet 20 . Each capillary structure sheet 30 is formed larger than the lower sheet 10 and the upper sheet 20 as a whole when viewed in plan. In other words, the lower sheet 10 and the upper sheet 20 are formed smaller than the capillary structure sheets 30 as a whole when viewed in plan. Therefore, the lower sheet 10 is provided with the lower sheet shrinkage portions 15a, 15b, 15c, and 15d. Moreover, the upper side sheet|seat 20 is provided with upper side sheet shrinkage part 25a, 25b, 25c, 25d.

In this case, a specific device or tool, finger, etc. can be inserted into the lower sheet retreat portion 15a, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved.

In addition, in the example shown in FIG. 23 , the capillary structure sheets 30 have the same shape and size, but the present invention is not limited thereto, and the capillary structure sheets 30 may have different shapes and sizes. For example, although not shown, one capillary structure sheet 30 may be formed smaller than the other capillary structure sheets 30 as a whole when viewed from above. In addition, the one capillary structure sheet 30 may be formed smaller than the lower sheet 10 and the upper sheet 20 as a whole in plan view.

In addition, in the example shown in FIG. 23 , the steam chamber 1 is equipped with three capillary structure sheets 30 , but the present invention is not limited thereto, and the number of capillary structure sheets 30 is arbitrary. The steam chamber 1 may have two capillary structure sheets 30 , or may have four or more capillary structure sheets 30 .

(Eighth modification of the first embodiment) In addition, the steam chamber 1 may have a through hole 90 .

In the example shown in FIGS. 24 and 25 , the steam chamber 1 has a through hole 90 penetrating the lower sheet 10 , the capillary structure sheet 30 and the upper sheet 20 .

The through hole 90 has: a lower sheet penetration portion 91 penetrating from the first lower sheet surface 10a to the second lower sheet surface 10b; a capillary structure sheet penetration portion 92 penetrating from the first main body surface 31a. to the second main body surface 31b; and an upper sheet penetration portion 93 penetrating from the first upper sheet surface 20a to the second upper sheet surface 20b. That is, the lower sheet penetration portion 91 penetrates the lower sheet 10 , the capillary structure sheet penetration portion 92 penetrates the capillary structure sheet 30 , and the upper sheet penetration portion 93 penetrates the upper sheet 20 . A wall portion 94 is formed around the capillary structure sheet penetration portion 92 , and the vapor flow path portion 50 and the liquid flow path portion 60 do not communicate with the through hole 90 . In addition, in the example shown in FIG. 24 , an evaporation region SR is provided at the center of the steam chamber 1 in the X direction, and on one side and the other side of the steam chamber 1 in the X direction (left and right sides in FIG. 24 ). A condensation region CR is provided.

The lower sheet penetration portion 91 can be formed by etching the lower sheet base material in the above-mentioned lower sheet preparation step. Alternatively, it can also be formed by pressing the lower sheet base material. The upper sheet penetration portion 93 can be formed by etching the upper sheet base material in the upper sheet preparation step described above. Alternatively, it can also be formed by pressing the upper sheet base material. The capillary structure sheet penetration portion 92 can be formed by etching the metal material sheet M in the etching step of the capillary structure sheet preparation step described above. In addition, in Fig. 25, the cross-sectional shape of the capillary structure sheet penetration portion 92 is a rectangular shape, but it may also have a concave shape formed on the first main body surface 31a like the above-mentioned first steam passage 51 and second steam passage 52. The lower recessed portion is formed in communication with the upper recessed portion on the second main body surface 31b. The same applies to the lower sheet penetration portion 91 and the upper sheet penetration portion 93 .

In the example shown in Fig. 24 and Fig. 25, when viewed from above, the inner peripheral edge 10i defining the lower side sheet penetration portion 91 of the lower side sheet 10 is positioned at a point where the capillary structure sheet penetration of the lower side sheet 10 is defined. The inner peripheral edge 31i of the portion 92 is further outside, that is, the side opposite to the through hole 90 . Thereby, the lower sheet 10 is provided with the lower sheet retracted portion 15i that retracts to the opposite side of the through hole 90 than the inner peripheral edge 31i defining the through hole 90 of the capillary structure sheet 30 in plan view.

The dimension w9 between the inner peripheral edge 10i of the lower sheet 10 and the inner peripheral edge 31i of the capillary structure sheet 30 in the Y direction shown in FIG. 25 may be, for example, 10 μm˜1000 μm. That is, the lower sheet retracted portion 15i may retract to a position separated from the inner peripheral edge 31i of the capillary structure sheet 30 by 10 μm or more and 1000 μm or less in plan view.

Also, the dimension w10 between the inner peripheral edge 10i of the lower sheet 10 in the Y direction and the liquid channel portion 60 shown in FIG. 25 may be, for example, 30 μm to 3000 μm. Here, the dimension w10 means the dimension on the first body surface 31a. That is, the lower sheet retreat portion 15i may be provided at a position separated from the liquid channel portion 60 by 30 μm or more and 3000 μm or less. In addition, when the vapor flow path portion 50 is provided between the inner peripheral edge 10i of the lower sheet 10 and the liquid flow path portion 60, the inner peripheral edge 10i of the lower sheet 10 and the vapor flow path portion 50 in the Y direction The size between them can be from 30 μm to 3000 μm.

Also, in the examples shown in FIGS. 24 and 25 , the inner peripheral edge 20i defining the upper side sheet penetration portion 93 of the upper side sheet 20 is positioned at the capillary structure sheet penetration portion 92 that defines the capillary structure sheet 30 in plan view. The outer side of the inner peripheral edge 31 i is the opposite side to the through hole 90 . Thereby, the upper sheet 20 is provided with an upper sheet retracted portion 25i that retracts to the side opposite to the through hole 90 than the inner peripheral edge 31i defining the through hole 90 defining the capillary structure sheet 30 in plan view.

The dimension w9' between the inner peripheral edge 20i of the upper sheet 20 and the inner peripheral edge 31i of the capillary structure sheet 30 in the Y direction shown in FIG. 25 may be, for example, 10 μm˜1000 μm. That is, the upper sheet retracted portion 25i may retract to a position separated from the inner peripheral edge 31i of the capillary structure sheet 30 by 10 μm or more and 1000 μm or less in plan view. In addition, the dimension w9' may be equal to the above-mentioned dimension w9, but may also be larger than the above-mentioned dimension w9, or may also be smaller than the above-mentioned dimension w9.

In this case, as shown in FIG. 26, the first arm portion 81a and the second arm portion 81b of the suspension device 80 can enter the lower side sheet retraction portion 15i of the lower side sheet 10, and can be easily lifted. Steam Chamber 1. Therefore, the transportability of the steam chamber 1 can be improved.

Also, by retracting the lower sheet retracted portion 15i by 10 μm or more, the claws 82a, 82b of the suspension device 80 can firmly support the first body surface 31a of the capillary structure sheet 30 . Thus, the vapor chamber 1 can be lifted more easily. As a result, the transportability of the steam chamber 1 can be further improved. Also, the area of the steam chamber 1 can be effectively utilized by reducing the lower sheet retraction portion 15i to 1000 μm or less. That is, the steam flow path 50 and the liquid flow path 60 can be provided in a wider area of the steam chamber 1, and the performance of the steam chamber 1 can be improved.

In addition, since the distance between the steam channel portion 50 and the lower sheet retracted portion 15i is 30 μm or more, the first main body surface 31a and the second lower sheet can be connected in the bonding step during the manufacture of the steam chamber 1. The material surfaces 10b are firmly bonded. Therefore, reduction in the strength of the vapor chamber 1 can be suppressed.

In addition, by forming the steam chamber 1 by the lower sheet 10 , the upper sheet 20 and the capillary structure sheet 30 , the heat received by the lower sheet 10 from the device D can be released from the upper sheet 20 . Thereby, the device D can be effectively cooled. Therefore, the performance of the vapor chamber 1 can be improved.

In addition, the upper sheet 20 is provided with an upper sheet retracted portion 25i retracted to the side opposite to the through hole 90 than the inner peripheral edge 31i of the capillary structure sheet 30 in plan view. Thereby, when the steam chambers 1 are stacked on each other, the claws 82a, 82b, etc. of the suspension device 80 can be easily entered into the lower sheet retreating portion 15i. That is, as shown in FIG. 26 , when each steam chamber 1 is provided with an upper sheet retraction portion 25i, the lower sheet retraction portion 15i arranged in the uppermost steam chamber 1 and the steam disposed below it can be arranged together. The side sheet retraction part 25i on the upper side of the chamber 1 is aligned to ensure a wider space for the claws 82a, 82b of the suspension device 80 to enter. Therefore, the steam chamber 1 can be lifted more easily, and the transportability of the steam chamber 1 can be further improved. Also, by this, for example, the thickness t2 of the lower sheet 10 can be made thinner than the thickness (dimension in the Z direction) of the claw portions 82a, 82b of the suspension device 80 . Therefore, further thinning of the steam chamber 1 can be achieved.

(Ninth modification of the first embodiment) In addition, in the above-mentioned first embodiment, the example in which the steam chamber 1 is composed of the lower sheet 10, the upper sheet 20, and the capillary structure sheet 30 has been described. However, it is not limited thereto, and the steam chamber 1 may also be composed of the lower sheet 10 (first sheet) and the capillary structure sheet 30 (main sheet).

In the example shown in FIG. 27 , the steam chamber 1 includes the lower sheet 10 and the capillary structure sheet 30 , but does not include the upper sheet 20 . The housing member Ha can be attached to the second body surface 31b of the capillary structure sheet 30 . The heat of the working steam 2a is transferred from the capillary structure sheet 30 to the housing member Ha.

In the example shown in FIG. 27 , the steam channel portion 50 is provided on the first body surface 31 a, but does not extend to the second body surface 31 b and does not penetrate through the capillary structure sheet 30 . That is, the first steam channel 51 and the second steam channel 52 of the steam channel part 50 are constituted by the lower steam channel recessed part 53 , and the upper steam channel recessed part 54 is not provided in the capillary structure sheet 30 .

The thickness t5 of the steam chamber 1 shown in FIG. 27 may be, for example, 100 μm˜1000 μm. The thickness t6 of the lower sheet 10 shown in FIG. 27 may be, for example, 6 μm to 200 μm. The thickness t7 of the capillary structure sheet 30 shown in FIG. 27 may be, for example, 50 μm to 800 μm.

In addition, not limited to the example shown in FIG. 27 , the steam flow path portion 50 may be provided on the second lower sheet surface 10 b of the lower sheet 10 . In this case, the vapor flow path portion 50 of the lower sheet 10 may be provided at a position facing the vapor flow path portion 50 of the capillary structure sheet 30 . In addition, the liquid channel portion 60 may be provided on the second lower sheet surface 10 b of the lower sheet 10 .

In this way, the steam chamber 1 can also be composed of the lower sheet 10 and the capillary structure sheet 30 .

In this case, the claws 82a, 82b of the suspension device 80 can also be made to enter the lower sheet retracted parts 15a, 15b, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved.

(Second Embodiment) Next, the vapor chamber and the electronic device according to the second embodiment will be described using FIGS. 28 to 30 .

In the second embodiment shown in FIGS. 28 to 30 , the main difference is that the main body sheet is provided with a retracted portion of the main body sheet that retracts to the side of the space portion compared to the outer peripheral edge of the first sheet when viewed from above. Other configurations are substantially the same as those of the first embodiment shown in FIGS. 1 to 14 . In addition, in FIGS. 28 to 30, the same parts as those of the first embodiment shown in FIGS. 1 to 14 are assigned the same reference numerals, and detailed description thereof will be omitted.

In this embodiment, as shown in FIG. 28 and FIG. 29 , the capillary structure sheet 30 (main body sheet) is formed smaller than the lower sheet 10 (second sheet) and the upper sheet 20 (second sheet) when viewed from above. 1 sheet). Therefore, the outer peripheral edge 32 o of the capillary structure sheet 30 is positioned on the inner side of the outer peripheral edge 11 o of the lower sheet 10 and the outer peripheral edge 21 o of the upper sheet 20 , that is, on the side of the steam flow path portion 50 . In this way, the capillary structure sheet 30 is provided with a capillary structure sheet shrinkage portion that retracts to the side of the vapor flow path portion 50 than the outer peripheral edge 11o of the lower sheet 10 and the outer peripheral edge 21o of the upper sheet 20 in plan view. 38a, 38b, 38c, 38d (main body sheet retracted portion).

More specifically, the longitudinal side edge 32a of the capillary structure sheet 30 is positioned closer to the vapor flow path than the longitudinal side edge 11a of the lower sheet 10 and the longitudinal side edge 21a of the upper sheet 20 On the side of 50 , a capillary structure sheet retracted portion 38 a is formed on the longitudinal side edge 32 a of the capillary structure sheet 30 . Also, the longitudinal side edge 32b of the capillary structure sheet 30 is positioned closer to the side of the steam flow path portion 50 than the longitudinal side edge 11b of the lower sheet 10 and the longitudinal side edge 21b of the upper sheet 20 , the capillary structure sheet shrinkage portion 38b is formed on the side edge 32b of the capillary structure sheet 30 in the longitudinal direction. In addition, the lateral edge 32c of the capillary structure sheet 30 is positioned on the side closer to the steam flow path portion 50 than the lateral edge 11c of the lower sheet 10 and the lateral edge 21c of the upper sheet 20. A capillary structure sheet shrinkage portion 38 c is formed on the lateral edge 32 c of the capillary structure sheet 30 . In addition, the lateral edge 32d of the capillary structure sheet 30 is positioned closer to the side of the steam flow path portion 50 than the lateral edge 11d of the lower sheet 10 and the lateral edge 21d of the upper sheet 20. , the capillary structure sheet shrinkage portion 38d is formed on the lateral edge 32d of the capillary structure sheet 30 . In this way, the capillary structure sheet retracted portions 38 a , 38 b , 38 c , and 38 d are formed over the entire circumference except for the portion where the capillary structure sheet injection protrusion 36 is provided in the peripheral edge 32 o of the capillary structure sheet 30 .

The dimension w11 between the longitudinal side edge 11a of the upper and lower sheet 10 in the Y direction and the longitudinal side edge 32a of the capillary structure sheet 30 shown in FIG. 29 may be, for example, 10 μm to 1000 μm. Regarding the dimension between the longitudinal side edge 11b of the lower sheet 10 in the Y direction and the longitudinal side edge 32b of the capillary structure sheet 30, and the shorter side edge 11c of the lower sheet 10 in the X direction The dimension between the short side edge 32c of the capillary structure sheet 30 and the dimension between the short side edge 11d of the lower sheet 10 in the X direction and the short side edge 32d of the capillary structure sheet 30 Also the same. That is, each capillary structure sheet retracted part 38a, 38b, 38c, 38d can retract to a position separated from the outer peripheral edge 11o of the lower sheet 10 by 10 μm or more and 1000 μm or less in plan view.

The dimension w11' between the longitudinal side edge 21a of the upper sheet 20 in the Y direction and the longitudinal side edge 32a of the capillary structure sheet 30 shown in FIG. 29 may be, for example, 10 μm˜1000 μm. Regarding the dimension between the long side edge 21b of the upper sheet 20 in the Y direction and the long side edge 32b of the capillary structure sheet 30, and the dimension between the short side edge 21c of the upper sheet 20 in the X direction and the capillary The dimension between the short side edges 32c of the structural sheet 30 and the dimension between the short side edges 21d of the upper sheet 20 in the X direction and the short side edges 32d of the capillary structure sheet 30 are also the same. That is, each capillary structure sheet retracted part 38a, 38b, 38c, 38d can retract to a position separated from the outer peripheral edge 21o of the upper sheet 20 by 10 μm or more and 1000 μm or less in plan view. In addition, the dimension w11' may be equal to the above-mentioned dimension w11, but may also be larger than the above-mentioned dimension w11, or may also be smaller than the above-mentioned dimension w11.

In addition, the dimension w12 between the longitudinal side edge 32a of the capillary structure sheet 30 in the Y direction and the steam channel portion 50 (first steam channel 51 ) shown in FIG. 29 may be, for example, 30 μm to 3000 μm. Here, the dimension w12 means a dimension on the first body surface 31a or the second body surface 31b. Regarding the dimension between the longitudinal side edge 32b of the capillary structure sheet 30 in the Y direction and the steam flow path portion 50, and the dimension between the short side edge 32c of the capillary structure sheet 30 in the X direction and the steam flow path portion 50 The size of the capillary structure sheet 30 and the size between the short side edge 32d of the capillary structure sheet 30 and the steam channel portion 50 in the X direction are also the same. That is, each of the capillary structure sheet shrinkage portions 38a, 38b, 38c, and 38d may be provided at a position separated from the steam flow path portion 50 (first steam path 51) by 30 μm or more and 3000 μm or less.

Next, the transport method of the steam chamber 1 of this embodiment will be described using FIG. 30 . Here, a method of taking out and transporting the steam chambers 1 from the state in which the steam chambers 1 are stacked on each other will be described.

First, as shown in FIG. 30, the claws 82a, 82b of the first arm portion 81a and the second arm portion 81b of the suspension device 80 are respectively inserted into the capillary structure sheet retracted portions 38a, 38b of the capillary structure sheet 30, so that The first claw portion 82a and the second claw portion 82b are in contact with the first upper sheet surface 20a of the upper sheet 20, respectively.

Next, in a state where the first claw portion 82a and the second claw portion 82b are in contact with the first upper sheet surface 20a of the upper sheet 20, the first arm portion 81a and the second wall portion 81b are moved upward, respectively. . Thereby, the 1st upper side sheet surface 20a of the upper side sheet 20 is supported by the 1st claw part 82a and the 2nd claw part 82B, and the steam chamber 1 is suspended by the suspension device 80.

Then, in the state where the steam chamber 1 is suspended by the suspension device 80, the first arm portion 81a and the second arm portion 81b are moved in the horizontal direction, and the steam chamber 1 is transported to a desired target position.

In this way, the steam chamber 1 of this embodiment can be transported by the suspension device 80 .

In addition, similarly to the first embodiment, the transportation of the steam chamber 1 by the above-mentioned suspension device 80 is an example, and the steam chamber 1 may be conveyed using other arbitrary devices or the like.

Thus, according to the present embodiment, the capillary structure sheet 30 is provided with the capillary structure sheet retreating portions 38 a , 38 b , 38 c , which recede to the side of the vapor flow path portion 50 from the outer peripheral edge 21 o of the upper sheet 20 in plan view, 38d. Thereby, the claws 82a, 82b, etc. of the suspension device 80 can enter the retracted portions 38a, 38b, 38c, 38d of the capillary structure sheet of the placed steam chamber 1 . Therefore, the steam chamber 1 can be lifted easily, and the steam chamber 1 can be easily transported. As a result, the transportability of the steam chamber 1 can be improved.

Also, according to this embodiment, the transport of the steam chamber 1 can be performed without using the adsorption device 85 . Therefore, deformation of the vapor chamber 1 can be suppressed. As a result, further thinning of the vapor chamber 1 can be achieved.

Moreover, according to the present embodiment, the capillary structure sheet 30 is formed to be smaller than the lower sheet 10 and the upper sheet 20 as a whole when viewed in plan. Thereby, the strict alignment of the lower sheet 10 , the capillary structure sheet 30 and the upper sheet 20 is not required in the bonding step during the manufacture of the steam chamber 1 . That is, even when the lower sheet 10 and the upper sheet 20 are offset from the capillary structure sheet 30, the steam provided on the capillary structure sheet 30 can be covered by the lower sheet 10 and the upper sheet 20. The flow path part 50. Therefore, the vapor chamber 1 can be easily manufactured.

Also, according to the present embodiment, the capillary structure sheet retracted portions 38a, 38b, 38c, 38d are provided on the pair of longitudinal side edges 32a, 32b and the pair of short side edges 32c, 32d of the capillary structure sheet 30, respectively. . Thereby, the claws 82a, 82b of the suspension device 80 can enter the retracted parts 38a, 38b, 38c, 38d of the capillary structure sheet from any direction when the placed steam chamber 1 is viewed from above, and the steam chamber can be lifted. 1. Thus, the vapor chamber 1 can be lifted more easily. As a result, the transportability of the steam chamber 1 can be further improved.

Also, according to this embodiment, the capillary structure sheet retracted portions 38a, 38b, 38c, and 38d retract to positions separated from the outer peripheral edge 21o of the upper sheet 20 by 10 μm or more and 1000 μm or less in plan view. In this way, by retracting the capillary structure sheet shrinkage portions 38a, 38b, 38c, and 38d by more than 10 μm, the claw portions 82a, 82b of the suspension device 80 can firmly support the first upper sheet surface 20a of the upper sheet 20. . Thus, the vapor chamber 1 can be lifted more easily. As a result, the transportability of the steam chamber 1 can be further improved. Also, by shrinking the capillary structure sheet shrinkage portions 38a, 38b, 38c, and 38d to 1000 μm or less, the area of the steam chamber 1 can be effectively utilized. That is, the steam flow path 50 and the liquid flow path 60 can be provided in a wider area of the steam chamber 1, and the performance of the steam chamber 1 can be improved.

Also, according to the present embodiment, the capillary structure sheet shrinkage portions 38a, 38b, 38c, and 38d are provided at positions separated from the steam flow path portion 50 by 30 μm or more in plan view. In this way, by setting the distance between the steam flow path portion 50 and the capillary structure sheet retracted portions 38a, 38b, 38c, and 38d to be 30 μm or more, the second main body surface 31b can be formed in the bonding step during the manufacture of the steam chamber 1. It is firmly bonded to the first upper sheet surface 20a. Therefore, reduction in the strength of the vapor chamber 1 can be suppressed.

Also, according to the present embodiment, since the steam chamber 1 is formed by the lower sheet 10, the upper sheet 20, and the capillary structure sheet 30, the heat received by the lower sheet 10 from the device D can be released from the upper sheet 20. Thereby, the device D can be effectively cooled. Therefore, the performance of the vapor chamber 1 can be improved.

Also, according to the present embodiment, the capillary structure sheet retracted portions 38a, 38b, 38c, and 38d retract to the side of the steam flow path portion 50 from the outer peripheral edge 11o of the lower sheet 10 in plan view. Thereby, when the steam chamber 1 is placed in reverse, that is, when the second upper sheet surface 20b of the upper sheet 20 faces the loading surface 70, the suspension device 80 can The claws 82a, 82b and the like abut against the second lower sheet surface 10d of the lower sheet 10 and move upward to easily lift the steam chamber 1. Therefore, even when the steam chamber 1 is placed upside down, the steam chamber 1 can be easily transported. As a result, the transportability of the steam chamber 1 can be further improved.

Also, according to the present embodiment, the lower sheet 10 and the upper sheet 20 are made of a material having a higher strength than the material constituting the capillary structure sheet 30 . Thereby, when the claws 82a, 82b, etc. of the suspension device 80 contact the first upper sheet surface 20a of the upper sheet 20 or the second lower sheet surface 10b of the lower sheet 10, the steam is suspended. When opening the cavity 1, deformation of the lower sheet 10 and the upper sheet 20 can be suppressed.

(The first modification example of the second embodiment) In the above-mentioned second embodiment, the capillary structure sheet retracted portions 38a, 38b, 38c, 38d are respectively provided on the pair of longitudinal side edges 32a, 32b and the pair of short side edges of the capillary structure sheet 30. Examples of 32c and 32d will be described (see FIG. 28). However, it is not limited thereto. Similar to the first modification of the above-mentioned first embodiment, the retracted portions 38a, 38b of the capillary structure sheet may be provided between the pair of side edges 32a, 32b in the longitudinal direction of the capillary structure sheet 30. at least one.

(Second Variation of Second Embodiment) Also, like the second modification of the above-mentioned first embodiment, the capillary structure sheet retracted parts 38a, 38b, 38c, 38d may be provided in the pair of longitudinal direction side edges 32a, 32b of the capillary structure sheet 30. One of them is also arranged on one of the pair of side edges 32c, 32d in the short side direction of the capillary structure sheet 30 .

(The third modification of the second embodiment) Also, similarly to the third modified example of the above-mentioned first embodiment, the capillary structure sheet retracted portions 38a, 38b may be provided on both of the pair of longitudinal direction side edges 32a, 32b of the capillary structure sheet 30, respectively. Furthermore, the retracted portions 38 a and 38 b of the capillary structure sheet can also be disposed on a part of a pair of side edges 32 a and 32 b in the longitudinal direction of the capillary structure sheet 30 .

(Fourth modification of the second embodiment) Also, similarly to the fourth modification of the above-mentioned first embodiment, the capillary structure sheet retracted portions 38a, 38b may be provided at the corners of the capillary structure sheet 30 .

(Fifth modification of the second embodiment) In addition, in the above-mentioned second embodiment, the retracted portions 38a, 38b, 38c, and 38d of the capillary-structure sheet are retracted to the side of the vapor flow path portion 50 from the outer peripheral edge 11o of the lower sheet 10 in plan view, Furthermore, an example of retreating to the side of the steam flow path portion 50 from the outer peripheral edge 21 o of the upper sheet 20 will be described (see FIG. 29 ). However, it is not limited thereto, and the retracted portions 38a, 38b, 38c, and 38d of the capillary structure sheet may not retract to the side closer to the vapor flow path portion 50 than the outer peripheral edge 11o of the lower sheet 10 in plan view. Alternatively, the retracted portions 38a, 38b, 38c, and 38d of the capillary-structure sheet may not retract to the side closer to the vapor flow path portion 50 than the outer peripheral edge 21o of the upper sheet 20 in plan view.

In the example shown in FIG. 31 , the capillary structure sheet 30 is formed smaller than the upper sheet 20 as a whole when viewed from above, and is formed to have the same size as the lower sheet 10 . That is, the capillary structure sheet 30 and the lower sheet 10 are formed smaller than the upper sheet 20 as a whole when viewed in plan. Thereby, the capillary structure sheet 30 is provided with capillary structure sheet retreating portions 38 a , 38 b , 38 c , 38 d retracted to the side of the vapor flow path portion 50 than the outer peripheral edge 21 o of the upper sheet 20 in plan view.

In this case, it is also possible to insert specific devices, tools, fingers, etc. into the capillary structure sheet retracted parts 38a, 38b, 38c, 38d, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved.

In addition, the capillary structure sheet 30 may be formed to be smaller than the lower sheet 10 as a whole in a planar view, and may be formed to have the same size as the upper sheet 20 on the other hand. That is, the capillary structure sheet 30 and the upper sheet 20 may be formed smaller than the lower sheet 10 as a whole when viewed from above. In this way, the capillary structure sheet 30 can also be provided with the capillary structure sheet retreating portions 38a, 38b, 38c that retract to the side of the steam flow path portion 50 from the outer peripheral edge 11o of the lower sheet 10 in plan view. , 38d.

In this case, in the state where the steam chamber 1 is reversely loaded, that is, in the state where the second upper sheet surface 20b of the upper sheet 20 faces the loading surface 70, a specific device or tool, The vapor chamber 1 can be easily lifted by inserting fingers or the like into the retracted parts 38a, 38b, 38c, and 38d of the capillary structure sheet. Therefore, the transportability of the steam chamber 1 can be improved.

(Sixth modification of the second embodiment) In addition, in the above-mentioned second embodiment, the example in which the liquid flow path portion 60 is not provided between the capillary structure sheet shrinkage portions 38a, 38b, 38c, and 38d and the vapor flow path portion 50 has been described (see FIG. 29 ). . However, the present invention is not limited thereto, and the liquid flow path 60 may be provided between the capillary structure sheet shrinkage portions 38 a , 38 b , 38 c , 38 d and the steam flow path 50 as in the sixth modification of the first embodiment.

(Seventh modification of the second embodiment) In addition, in the above-mentioned second embodiment, the example in which the steam chamber 1 is provided with one capillary structure sheet 30 has been described (see FIG. 29 ). However, it is not limited thereto, and the steam chamber 1 may include a plurality of capillary structure sheets 30 similarly to the seventh modification example of the above-mentioned first embodiment.

(Eighth modification of the second embodiment) In addition, the vapor chamber 1 may have the through-hole 90 similarly to the eighth modification of the first embodiment described above.

In the example shown in Fig. 32 and Fig. 33, when viewed from above, the inner peripheral edge 31i of the capillary structure sheet penetration part 92 defining the capillary structure sheet 30 is positioned at the lower side sheet penetration than the lower side sheet 10. The inner peripheral edge 10i of the portion 91 and the inner peripheral edge 20i defining the upper sheet penetration portion 93 of the upper sheet 20 are further outside, that is, the side opposite to the through hole 90 . Thereby, when the capillary structure sheet 30 is provided, the inner peripheral edge 10i of the through hole 90 defining the lower sheet 10 and the inner peripheral edge 20i of the through hole 90 defining the upper sheet 20 are closer to the through hole when viewed from above. The capillary structure sheet retreating portion 38i on the opposite side of 90.

The dimension w13 between the inner peripheral edge 10i of the lower sheet 10 in the Y direction and the inner peripheral edge 31i of the capillary structure sheet 30 shown in FIG. 33 may be, for example, 10 μm˜1000 μm. That is, the retracted portion 38i of the capillary structure sheet may retract to a position separated from the inner peripheral edge 10i of the lower sheet 10 by 10 μm or more and 1000 μm or less in plan view.

The dimension w13' between the inner peripheral edge 20i of the upper sheet 20 in the Y direction and the inner peripheral edge 31i of the capillary structure sheet 30 shown in FIG. 33 may be, for example, 10 μm to 1000 μm. That is, the retracted portion 38i of the capillary structure sheet may retract to a position separated from the inner peripheral edge 20i of the upper sheet 20 by 10 μm or more and 1000 μm or less in plan view. In addition, the dimension w13' may be equal to the above-mentioned dimension w13, but may also be larger than the above-mentioned dimension w13, or may also be smaller than the above-mentioned dimension w13.

In addition, the dimension w14 between the inner peripheral edge 31i of the capillary structure sheet 30 and the liquid channel portion 60 in the Y direction shown in FIG. 33 may be, for example, 30 μm to 3000 μm. Here, the dimension w14 means a dimension on the first body surface 31a or the second body surface 31b. That is, the capillary structure sheet retreat portion 38i may be provided at a position separated from the liquid channel portion 60 by 30 μm or more and 3000 μm or less. In addition, when the vapor flow path portion 50 is provided between the inner peripheral edge 31i of the capillary structure sheet 30 and the liquid flow path portion 60, the inner peripheral edge 31i of the capillary structure sheet 30 and the vapor flow path portion 50 in the Y direction The size between them can also be 30 μm to 3000 μm.

In this case, as shown in FIG. 34 , the first arm portion 81a and the second arm portion 81b of the suspension device 80 can enter the retracted portion 38i of the capillary structure sheet, and the steam chamber 1 can be easily lifted. Therefore, the transportability of the steam chamber 1 can be improved.

Further, by retracting the capillary structure sheet retracted portion 38i by 10 μm or more, the first upper sheet surface 20a of the upper sheet 20 can be firmly supported by the claws 82a, 82b of the suspension device 80 and the like. Thus, the vapor chamber 1 can be lifted more easily. As a result, the transportability of the steam chamber 1 can be further improved. Also, by shrinking the capillary structure sheet shrinkage portion 38i to 1000 μm or less, the area of the steam chamber 1 can be effectively utilized. That is, the steam flow path 50 and the liquid flow path 60 can be provided in a wider area of the steam chamber 1, and the performance of the steam chamber 1 can be improved.

In addition, since the distance between the steam channel portion 50 and the capillary structure sheet retracted portion 38i is 30 μm or more, the first main body surface 31a and the first upper sheet can be bonded in the bonding step during the manufacture of the steam chamber 1. Face 20a is firmly joined. Therefore, reduction in the strength of the vapor chamber 1 can be suppressed.

In addition, by forming the steam chamber 1 by the lower sheet 10 , the upper sheet 20 and the capillary structure sheet 30 , the heat received by the lower sheet 10 from the device D can be released from the upper sheet 20 . Thereby, the device D can be effectively cooled. Therefore, the performance of the vapor chamber 1 can be improved.

In addition, the capillary structure sheet retracted portion 38i is retracted to the side closer to the vapor flow path portion 50 than the inner peripheral edge 10i of the lower sheet 10 in plan view. Thereby, when the steam chamber 1 is placed in reverse, that is, when the second upper sheet surface 20b of the upper sheet 20 faces the loading surface 70, the suspension device 80 can The claws 82a, 82b, etc. abut against the second lower sheet surface 10b of the lower sheet 10 and move upward, so that the steam chamber 1 can be easily lifted. Therefore, even when the steam chamber 1 is placed upside down, the steam chamber 1 can be easily transported. As a result, the transportability of the steam chamber 1 can be further improved.

(Ninth modification of the second embodiment) In addition, in the above-mentioned first embodiment, the example in which the steam chamber 1 is composed of the lower sheet 10, the upper sheet 20, and the capillary structure sheet 30 has been described. However, it is not limited thereto, and the steam chamber 1 may be composed of the lower sheet 10 (first sheet) and the capillary structure sheet 30 (main sheet) similarly to the ninth modification of the first embodiment described above.

(third embodiment) Next, the vapor chamber and the electronic device according to the third embodiment will be described using FIGS. 35 to 41 .

As shown in FIG. 35 and FIG. 36, the steam chamber 101 of this embodiment has a sealed space 103 in which the working fluids 2a and 2b are sealed. The device D of the above-mentioned electronic equipment E is cooled by the repeated phase transition of the working fluids 2a and 2b in the sealed space 103 .

As shown in FIGS. 35 and 36 , the steam chamber 101 includes a lower sheet 110 (first sheet), an upper sheet 120 (second sheet), and an upper sheet 110 interposed between the lower sheet 110 and the upper sheet 120. The capillary structure sheet 130 (main body sheet) used for the steam chamber in between. In the present embodiment, the steam chamber 101 includes one capillary structure sheet 130 . In the steam chamber 101 of this embodiment, the lower sheet 110, the capillary structure sheet 130, and the upper sheet 120 are sequentially stacked and bonded.

The steam chamber 101 is roughly formed in the shape of a thin plate. The planar shape of the steam chamber 101 is arbitrary, but may be rectangular as shown in FIG. 35 . The planar shape of the steam chamber 101 can be, for example, a rectangle with one side of 1 cm and the other sides of 3 cm, or a square with one side of 15 cm. The planar size of the steam chamber 101 is arbitrary. In this embodiment, as an example, an example in which the planar shape of the steam chamber 101 is a rectangular shape whose longitudinal direction is the X direction will be described. In addition, the planar shape of the steam chamber 101 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L-shape, or a T-shape.

As shown in FIG. 35 , the vapor chamber 101 has an evaporation region SSR for evaporating the working fluids 2a, 2b, and a condensation region CCR for condensing the working fluids 2a, 2b.

The evaporation region SSR is the region that overlaps with the device D when viewed from above, and is the region where the device D is installed. The evaporation region SSR can be arranged anywhere in the steam chamber 101 . In this embodiment, an evaporation region SSR is formed on one side (left side in FIG. 35 ) of the vapor chamber 101 in the X direction. The heat from the device D is transferred to the evaporation region SSR, and the liquid of the working fluid (actuating fluid 2b) is evaporated in the evaporation region SSR by the heat. The heat from the device D is not only transferred to the area that coincides with the device D in plan view, but may also be transferred to the periphery of the area. Therefore, the evaporation region SSR includes a region overlapping with the device D and a region around it in plan view. Here, the plane view corresponds to the surface that receives heat from the device D (the first lower sheet surface 110a described later on the lower sheet 110) and the surface that releases the received heat (the upper sheet 120) from the steam chamber 101. The state observed in the direction perpendicular to the second upper sheet surface 120b) described later is, for example, as shown in FIG.

The condensation region CCR is a region that does not overlap with the device D when viewed from above, and is mainly a region where the steam of the working fluid (working steam 2a) releases heat and condenses. The condensing region CCR may also be referred to as the region around the evaporating region SSR. In this embodiment, a condensation region CCR is formed on the other side (right side in FIG. 35 ) of the vapor chamber 101 in the X direction. In the condensation region CCR, the heat from the working steam 2a is released to the upper sheet 120, and the working steam 2a is cooled and condensed in the condensation region CCR.

In addition, when the steam chamber 101 is installed in the mobile terminal, the vertical relationship may be disturbed according to the posture of the mobile terminal. However, in this embodiment, the sheet that receives heat from the device D is referred to as the lower sheet 110 and the sheet that releases the received heat is referred to as the upper sheet 120 for convenience. Therefore, the following description will be made in a state where the lower sheet 110 is arranged on the lower side and the upper sheet 120 is arranged on the upper side.

First, the lower sheet 110 will be described.

As shown in FIG. 36, the lower sheet 110 has a first lower sheet surface 110a disposed on the opposite side of the capillary structure sheet 130, and a first lower sheet surface 110a disposed on the opposite side of the first lower sheet surface 110a (that is, a capillary structure). The second lower sheet surface 110b of the side of the sheet 130). The lower sheet 110 may be formed flat as a whole, or may have a certain thickness as a whole. The above-mentioned device D is mounted on the first lower sheet surface 110a.

As shown in FIG. 37 , the planar shape of the lower sheet 110 may have a rectangular shape as a whole. More specifically, the lower sheet 110 may have a pair of longitudinal side edges 111a, 111b (first side edges) extending in the X direction (first direction) in plan view, and a pair of side edges 111a, 111b (first side edges) perpendicular to the X direction. A pair of lateral direction side edges 111c and 111d (second side edges) extending in the Y direction (second direction). A pair of side edges 111a, 111b in the longitudinal direction are provided on both sides in the Y direction. The longitudinal side edge 111a is provided on one side in the Y direction (lower side in FIG. 37 ), and the longitudinal side edge 111b is provided on the other side in the Y direction (upper side in FIG. 37 ). A pair of side edges 111c and 111d in the short side direction are provided on both sides in the X direction. The lateral direction side edge 111c is provided on one side in the X direction (left side in FIG. 37 ), and the lateral direction side edge 111d is provided on the other side in the X direction (right side in FIG. 37 ). The pair of longitudinal side edges 111a, 111b and the pair of lateral direction side edges 111c, 111d constitute an outer peripheral edge 111o of the lower sheet 110 in plan view.

As shown in FIGS. 35 and 36 , the lower sheet 110 is formed to be smaller than the upper sheet 120 described later as a whole in plan view. Therefore, in a plan view, the outer peripheral edge 111o of the lower sheet 110 is positioned on the inner side of the outer peripheral edge 121o of the upper sheet 120 (on the side of the steam channel portion 150 described later). That is, the longitudinal side edges 111a, 111b and the short side edges 111c, 111d of the lower sheet 110 are respectively positioned on the longitudinal side edges 121a, 121b and the short side edges of the upper sheet 120 described later. 121c, 121d are more medial.

As shown in FIG. 37 , the lower sheet 110 may have a rectangular lower sheet body 111 and a lower sheet injection protrusion 113 protruding outward from the lower sheet body 111 . In the example shown in FIG. 37 , the lower sheet injection protruding portion 113 is provided on the lateral edge 111c, and protrudes from the lateral edge 111c toward one side in the X direction (the left side in FIG. 37 ).

Also, as shown in FIG. 37 , alignment holes 112 may be provided at the four corners of the lower sheet body 111 of the lower sheet 110 . In the example shown in FIG. 37, the planar shape of the alignment hole 112 is circular, but it is not limited thereto. The alignment hole 112 can also pass through the lower sheet body 111 .

Next, the upper sheet 120 will be described.

As shown in FIG. 36, the upper sheet 120 has a first upper sheet surface 120a disposed on the side of the capillary structure sheet 130, and a second upper sheet surface 120b disposed on the opposite side to the first upper sheet surface 120a. . The upper sheet 120 may be formed flat as a whole, or may have a certain thickness as a whole. On the second upper sheet surface 120b, a housing member Ha constituting a part of the housing H of a mobile terminal or the like is attached. The entirety of the second upper sheet surface 120b can be covered by the shell member Ha.

As shown in FIG. 38 , the planar shape of the upper sheet 120 may have a rectangular shape as a whole. More specifically, the upper sheet 120 may have a pair of long side edges 121a, 121b extending in the X direction and a pair of short side edges 121c, 121d extending in the Y direction in plan view. A pair of side edges 121a, 121b in the longitudinal direction are provided on both sides in the Y direction. The longitudinal side edge 121a is provided on one side in the Y direction (lower side in FIG. 38 ), and the longitudinal side edge 121b is provided on the other side in the Y direction (upper side in FIG. 38 ). A pair of side edges 121c and 121d in the short side direction are provided on both sides in the X direction. The lateral direction side edge 121c is provided on one side in the X direction (left side in FIG. 38 ), and the lateral direction side edge 121d is provided on the other side in the X direction (right side in FIG. 38 ). The pair of longitudinal side edges 121a, 121b and the pair of lateral direction side edges 121c, 121d constitute an outer peripheral edge 121o of the upper sheet 120 in plan view.

As shown in FIGS. 35 and 36 , the upper sheet 120 is formed larger than the above-mentioned lower sheet 110 as a whole when viewed from above. Therefore, in plan view, the outer peripheral edge 121o of the upper sheet 120 is positioned outside the outer peripheral edge 111o of the lower sheet 110 (on the opposite side to the steam channel portion 150 described later). That is, the longitudinal side edges 121a, 121b and the lateral direction side edges 121c, 121d of the upper side sheet 120 are respectively positioned relative to the longitudinal direction side edges 111a, 111b and the lateral direction side edges of the lower side sheet 110 described above. 111c, 111d are more lateral.

As shown in FIG. 38 , the upper sheet 120 may have a rectangular upper sheet body 121 and an upper sheet injection protrusion 123 protruding outward from the upper sheet body 121 . In the example shown in FIG. 38 , the upper sheet injection protruding portion 123 is provided on the lateral edge 121c, and protrudes from the lateral edge 121c toward one side in the X direction (the left side in FIG. 38 ).

Moreover, as shown in FIG. 38 , alignment holes 122 may also be provided at the four corners of the upper sheet body 121 of the upper sheet 120 . In the example shown in FIG. 38, the planar shape of the alignment hole 122 is circular, but it is not limited thereto. The alignment hole 112 can also pass through the upper sheet body 121 .

Next, the capillary structure sheet 130 will be described.

As shown in FIG. 36 , the capillary structure sheet 130 includes a sheet body 131 and a vapor flow path portion 150 (space portion) provided on the sheet body 131 . The sheet body 131 has a first body surface 131a and a second body surface 131b provided on the opposite side of the first body surface 131a. The first main body surface 131 a is arranged on the side of the lower sheet 110 , and the second main body surface 131 b is arranged on the side of the upper sheet 120 .

The second lower sheet surface 110b of the lower sheet 110 and the first main body surface 131a of the sheet main body 131 may also be permanently bonded to each other by thermocompression bonding. Similarly, the first upper sheet surface 120b of the upper sheet 120 and the second main body surface 131b of the sheet body 131 can also be permanently bonded to each other by thermocompression bonding. As an example of bonding by thermocompression bonding, for example, diffusion bonding is mentioned. However, as long as the lower sheet 110, the upper sheet 120, and the capillary structure sheet 130 can be permanently joined, they can also be joined by other means such as welding instead of diffusion joining. In addition, the term "permanent bonding" is not limited to a strict meaning, and can be used as a term with the following meaning: when the steam chamber 101 operates, the bond between the lower sheet 110 and the capillary structure sheet 130 can be maintained so as to maintain a sealed space 3, and the degree of bonding between the upper sheet 120 and the capillary structure sheet 130 can be maintained.

As shown in FIG. 39 , the overall shape of the capillary structure sheet 130 may have a rectangular shape when viewed from above. More specifically, the capillary structure sheet 130 may have a pair of long side edges 132a, 132b extending in the X direction and a pair of short side edges 132c, 132d extending in the Y direction in plan view. A pair of longitudinal side edges 132a, 132b are provided on both sides in the Y direction. The longitudinal side edge 132a is provided on one side in the Y direction (lower side in FIG. 39 ), and the longitudinal side edge 132b is provided on the other side in the Y direction (upper side in FIG. 39 ). A pair of short-side direction side edges 132c, 132d are provided on both sides in the X direction. The lateral direction side edge 132c is provided on one side in the X direction (left side in FIG. 39 ), and the lateral direction side edge 132d is provided on the other side in the X direction (right side in FIG. 39 ). The pair of side edges 132a, 132b in the longitudinal direction and the pair of side edges 132c, 132d in the short direction constitute the outer peripheral edge 132o of the capillary structure sheet 130 in plan view.

As shown in FIGS. 35 and 36 , when viewed from above, the outer peripheral edge 132 o of the capillary structure sheet 130 overlaps with the outer peripheral edge 121 o of the upper sheet 120 . That is, the longitudinal side edges 132a, 132b and the short side edges 132c, 132d of the capillary structure sheet 130 overlap with the longitudinal side edges 121a, 121b and the short side edges 121c, 121d of the upper sheet 120, respectively. . Further, the capillary structure sheet 130 includes a retracted portion 170 retracted from the outer peripheral edge 132o to the inner side (the side of the steam flow path portion 150 described later). The details of the setback 170 are described below.

As shown in FIG. 39 , the capillary structure sheet 130 may have a capillary structure sheet injection protrusion 136 protruding outward from a frame portion 132 described later. In the example shown in FIG. 39, the capillary structure sheet injection protrusion 136 is provided on the side edge 132c in the short side direction, and protrudes toward one side in the X direction (left side in FIG. 39) from the side edge 132c in the short side direction.

Also, as shown in FIG. 39 , alignment holes 135 may be provided at the four corners of the sheet body 131 of the capillary structure sheet 130 . In the example shown in FIG. 39, the planar shape of the alignment hole 135 is circular, but it is not limited thereto. The alignment hole 135 can also pass through the sheet body 131 .

Also, as shown in FIGS. 36 and 39, the sheet body 131 of the capillary structure sheet 130 of this embodiment has a frame portion 132 formed in a rectangular frame shape when viewed from above and a plurality of banks arranged in the frame portion 132. Desk 133. The frame portion 132 and the land portion 133 are portions where the material of the capillary structure sheet 30 remains without being etched in the etching step described later.

In the present embodiment, the frame body portion 132 is formed in a rectangular frame shape in plan view. Inside the frame portion 132, a steam flow path portion 150 (space portion) is provided. Each land portion 133 is provided in the steam flow path portion 150 , and the moving steam 2 a flows around each land portion 133 . That is, the steam flow path portion 150 includes the above-mentioned plurality of land portions 133 , and passages provided around each land portion 133 through which the actuating steam 2a flows, ie, steam passages 151 and 152 to be described later.

In this embodiment, the land portion 133 can be elongated with the X direction (the left-right direction in FIG. 39 ) as the long side direction in a plan view, and the planar shape of the land portion 133 can be an elongated rectangular shape. In addition, the land portions 133 may be separated at equal intervals in the Y direction (the vertical direction in FIG. 39 ) perpendicular to the X direction, and may be arranged in parallel to each other. The width ww1 (see FIG. 40 ) of the land portion 133 may be, for example, 100 μm to 1500 μm. Here, the width ww1 of the land portion 133 means the size of the land portion 133 in the Y direction, that is, the size in the Z direction at the position where the penetration portion 134 described later exists. Here, the Z direction corresponds to the up-down direction in FIGS. 36 and 40 , and corresponds to the thickness direction of the capillary structure sheet 130 .

The frame portion 132 and each land portion 133 are bonded to the lower sheet 110 by thermocompression bonding, and are bonded to the upper sheet 120 by thermocompression bonding. A wall surface 153 a of the lower steam channel concave portion 153 and a wall surface 154 a of the upper steam channel concave portion 154 described later constitute side walls of the land portion 133 . The first main body surface 131 a and the second main body surface 131 b of the sheet main body 131 may be formed flat over the frame portion 132 and each land portion 133 .

The steam flow path part 150 is mainly a flow path through which the working steam 2a passes. The hydraulic fluid 2b also passes through the vapor flow path portion 150 . As shown in FIGS. 36 and 40 , the steam flow path portion 150 may pass through from the first body surface 131a to the second body surface 131b. That is, the sheet body 131 of the capillary structure sheet 130 can be penetrated. The steam channel portion 150 may be covered by the lower sheet 110 on the first main body surface 131a, or may be covered by the upper sheet 120 on the second main body surface 131b.

As shown in FIG. 39 , the steam passage portion 150 of the present embodiment has a first steam passage 151 and a plurality of second steam passages 152 . The first steam passage 151 is formed between the frame portion 132 and the land portion 133 . The first steam passage 151 is continuously formed inside the frame portion 132 and outside the land portion 133 . The planar shape of the first steam passage 151 is a rectangular frame shape. The second vapor passage 152 is formed between the adjacent land portions 133 . The planar shape of the second steam passage 152 is an elongated rectangular shape. The steam channel part 150 is divided into a first steam channel 151 and a plurality of second steam channels 152 by a plurality of land parts 133 .

As shown in FIG. 36 , the first steam passage 151 and the second steam passage 152 penetrate from the first main body surface 131 a to the second main body surface 131 b of the sheet main body 131 . That is, the capillary structure sheet 130 is penetrated in the Z direction. The first steam passage 151 and the second steam passage 152 are respectively composed of a steam passage recess 153 provided below the first body surface 131a and a steam passage recess 154 provided above the second body surface 131b. The lower steam channel recess 153 communicates with the upper steam channel recess 154, and the first steam channel 151 and the second steam channel 152 of the steam channel 150 are formed to extend from the first body surface 131a to the second body surface 131b. .

The lower vapor channel recess 153 is formed in a concave shape on the first body surface 131a by etching from the first body surface 131a of the capillary structure sheet 130 in an etching step described later. As a result, the lower steam channel recess 153 has a curved wall surface 153a as shown in FIG. 40 . The wall surface 153a defines the lower steam flow path recess 153, and in the cross section shown in FIG. 40, it is curved so as to approach the opposing wall surface 153a as it advances toward the second main body surface 131b. Such a lower steam passage recess 153 constitutes a part (lower half) of the first steam passage 151 and a part (lower half) of the second steam passage 152 .

The upper vapor channel recess 154 is formed in a concave shape on the second body surface 131b by etching from the second body surface 131b of the capillary structure sheet 130 in an etching step described later. As a result, the upper steam channel recess 154 has a curved wall surface 154a as shown in FIG. 40 . The wall surface 154a defines the lower steam channel recess 154, and in the cross section shown in FIG. 40, is curved so as to approach the opposing wall surface 154a as it advances toward the first main body surface 131a. Such an upper steam passage recess 154 constitutes a part (upper half) of the first steam passage 151 and a part (upper half) of the second steam passage 152 .

As shown in FIG. 40 , the wall surface 153 a of the lower steam flow path recess 153 is connected to the wall surface 154 of the upper steam flow path recess 154 to form the penetration portion 134 . The wall surface 153 a and the wall surface 154 a are respectively curved toward the penetration portion 134 . Thereby, the lower steam flow path recess 153 and the upper steam flow path recess 154 communicate with each other. In this embodiment, the planar shape of the penetrating portion 134 of the first steam passage 151 is a rectangular frame shape similar to that of the first steam passage 151, and the planar shape of the penetrating portion 134 of the second steam passage 152 is elongated like the second steam passage 152. of rectangular shape. The penetrating portion 134 may be defined by a ridge line formed by converging the wall surface 153a of the lower steam channel recess 153 and the wall surface 154a of the upper steam channel recess 154 and protruding inward. Among the penetration portions 134, the steam flow path portion 150 has the smallest planar area. The widths ww2 and ww2' (see FIG. 40 ) of such penetrating portions 134 may be, for example, 400 μm to 1600 μm. Here, the width ww2 of the penetrating portion 134 corresponds to the gap between the adjacent land portions 133 in the Y direction. Moreover, the width ww2' of the penetration portion 134 corresponds to the gap between the frame portion 132 and the land portion 133 in the Y direction (or X direction).

The position of the through portion 134 in the Z direction may be an intermediate position between the first main body surface 131a and the second main body surface 131b, or may be a position offset from the intermediate position toward the lower side or the upper side. The position of the penetration portion 134 is arbitrary as long as the lower steam flow path recess 153 communicates with the upper steam flow path recess 154 .

In addition, in the present embodiment, the cross-sectional shapes of the first steam passage 151 and the second steam passage 152 are formed to include the penetration portion 134 defined by the ridge line formed to protrude inward, but it is not limited thereto. For example, the cross-sectional shape of the first steam passage 151 and the cross-sectional shape of the second steam passage 152 may be trapezoidal or rectangular, or may be barrel-shaped.

The steam channel portion 150 including the first steam channel 151 and the second steam channel 152 configured in this way constitutes a part of the above-mentioned sealed space 103 . Each steam passage 151, 152 has a relatively large cross-sectional area for the passage of the actuating steam 2a.

Here, FIG. 36 shows enlarged first steam passage 151, second steam passage 152, etc. for clarity of the drawing, and the number or arrangement of these steam passages 151, 152, etc. is different from FIG. 35 and FIG. 39 .

However, although not shown, a plurality of supporting parts that support the land part 133 on the frame part 132 may be provided in the steam flow path part 150 . In addition, a supporting portion may be provided to support the land portions 133 adjacent to each other. These supporting parts can be arranged on both sides of the land portion 133 in the X direction, and can also be arranged on both sides of the land portion 133 in the Y direction. The supporting portion can be formed so as not to hinder the flow of the motive steam 2 a diffused in the steam flow path portion 150 . For example, it may be arranged on one side of the first body surface 131a and the second body surface 131b of the sheet body 131 of the capillary structure sheet 130, and a space constituting a concave portion of the steam flow path may be formed on the other side. Thereby, the thickness of the support part can be made thinner than the thickness of the sheet main body 131, and it can prevent that the 1st steam passage 151 and the 2nd steam passage 152 are cut|disconnected in the X direction and the Y direction.

As shown in Fig. 36, Fig. 39 and Fig. 40, on the first body surface 131a of the sheet body 131 of the capillary structure sheet 130, there is provided a liquid flow path portion 160 (groove portion) mainly through which the working liquid 2b passes. More specifically, the liquid channel portion 160 is provided on the first body surface 131 a of each land portion 133 of the capillary structure sheet 130 . The working steam 2a may also pass through the liquid channel portion 160 . The liquid flow path portion 160 constitutes a part of the sealed space 103 and communicates with the vapor flow path portion 150 . The liquid channel portion 160 is configured as a capillary structure (Wick) for sending the working fluid 2b to the evaporation region SSR. The liquid channel portion 160 may be formed over the entire first body surface 131 a of each land portion 133 . The liquid channel portion 160 may not be provided on the second body surface 131 b of each land portion 133 .

As shown in FIG. 41, the liquid channel portion 160 is constituted by a plurality of grooves provided on the first main body surface 131a. More specifically, the liquid flow path portion 160 has a plurality of liquid flow path main grooves 161 through which the working fluid 2b passes and a plurality of liquid flow path connecting grooves 165 communicating with the liquid flow path main flow grooves 161 .

As shown in FIG. 41 , each liquid channel main flow groove 161 is formed to extend in the X direction. The main channel groove 161 of the liquid channel mainly has a flow channel cross-sectional area smaller than that of the first steam channel 151 or the second steam channel 152 of the steam channel part 150, so that the working fluid 2b flows by capillary action. Thereby, the main channel groove 161 of the liquid channel is configured to send the working fluid 2b condensed from the working steam 2a to the evaporation region SSR. The mainstream grooves 161 of the liquid channels can also be arranged at equal intervals in the Y direction.

The main channel groove 161 of the liquid channel is formed by etching from the first body surface 131a of the sheet body 131 of the capillary structure sheet 130 in an etching step described later. As a result, the main channel groove 161 of the liquid flow path has a curved wall surface 162 as shown in FIG. 40 . The wall surface 162 defines the main flow groove 161 of the liquid flow path, and is concavely curved toward the second body surface 131b.

The width ww3 (dimension in the Y direction) of the liquid channel main groove 161 shown in FIGS. 40 and 41 may be, for example, 5 μm to 150 μm. In addition, the width ww3 of the main channel groove 61 of the liquid channel means the dimension on the first body surface 131a. Also, the depth hh1 (dimension in the Z direction) of the liquid channel main groove 161 shown in FIG. 40 may be, for example, 3 μm to 150 μm.

As shown in FIG. 41 , each liquid channel connection groove 165 extends in a direction different from the X direction. In this embodiment, each of the liquid channel connecting grooves 165 is formed to extend in the Y direction, and is formed perpendicularly to the main channel groove 161 of the liquid channel. A plurality of liquid flow channel connecting grooves 165 are arranged to communicate with each other adjacent liquid flow channel main grooves 161 . The other liquid channel connection grooves 165 are arranged so as to connect the vapor channel part 150 (the first vapor channel 151 or the second vapor channel 152 ) with the liquid channel main groove 161 . That is, the liquid channel connecting groove 165 extends from the end edge of the land portion 133 in the Y direction to the liquid channel mainstream groove 161 adjacent to the end edge. In this manner, the first vapor passage 151 or the second vapor passage 152 of the vapor passage portion 150 communicates with the main flow groove 161 of the liquid passage.

The liquid channel connecting groove 165 mainly has a flow channel cross-sectional area smaller than that of the first steam channel 151 or the second steam channel 152 of the steam channel part 150, so that the working fluid 2b flows by capillary action. Each of the liquid channel connection grooves 165 may also be arranged at equal intervals in the X direction.

The liquid channel connecting groove 165 is formed by etching similarly to the liquid channel main channel groove 161 , and has a wall surface (not shown) formed in the same curved shape as the liquid channel main channel groove 161 . The width ww4 (dimension in the X direction) of the liquid flow path connecting groove 165 shown in FIG. The depth of the liquid channel connecting groove 165 may be equal to the depth hh1 of the liquid channel main groove 161, but may be deeper than the depth hh1, or may also be shallower than the depth hh1.

As shown in FIG. 41 , the liquid channel portion 160 has a liquid channel convex portion row 163 provided on the first body surface 131 a of the sheet body 131 . The liquid channel convex portion row 163 is disposed between the adjacent liquid channel mainstream grooves 161 . Each liquid channel protrusion row 163 includes a plurality of liquid channel protrusions 164 arranged in the X direction. The liquid channel convex portion 164 is provided in the liquid channel portion 160 and is in contact with the second lower sheet surface 110 b of the lower sheet 110 . Each liquid channel convex portion 164 is formed in a rectangular shape with the X direction as the longitudinal direction in plan view. Between the liquid flow channel protrusions 164 adjacent to each other in the Y direction, the liquid flow channel main groove 161 is interposed, and between the liquid flow channel protrusions 164 adjacent to each other in the X direction, a liquid flow channel is interposed. The way connects to the groove 165 . The liquid channel connection groove 165 is formed to extend in the Y direction, and communicates with the adjacent liquid channel mainstream grooves 161 in the Y direction. In this way, the working fluid 2b can travel back and forth between the main grooves 161 of the fluid flow path.

The liquid channel protrusion 164 is a portion where the material of the capillary structure sheet 130 remains without being etched in an etching step described later. In this embodiment, as shown in FIG. 41 , the planar shape of the liquid channel protrusion 164 (the shape at the position of the first body surface 131a of the sheet body 131 of the capillary structure sheet 130 ) is rectangular.

In the present embodiment, the liquid channel convex portions 164 are arranged in a zigzag shape. More specifically, the liquid channel protrusions 164 of the liquid channel protrusion rows 163 adjacent to each other in the Y direction are arranged offset from each other in the X direction. The offset can be half of the arrangement pitch of the liquid channel protrusions 164 in the X direction. The width ww5 (dimension in the Y direction) of the liquid channel protrusion 164 shown in FIG. 41 may be, for example, 5 μm to 500 μm. In addition, the width ww5 of the liquid channel protrusion 164 means the dimension on the first body surface 131a. In addition, the arrangement of the liquid channel protrusions 164 is not limited to a staggered shape, and may also be arranged side by side. In this case, the liquid channel protrusions 164 of the liquid channel protrusion rows 163 adjacent to each other in the Y direction are also aligned in the X direction.

The liquid flow main groove 161 includes a liquid flow crossing portion 166 communicating with the liquid flow connection groove 165 . In the liquid flow path intersection portion 166 , the liquid flow path mainstream groove 161 communicates with the liquid flow path connecting groove 165 in a T-shape. In this way, in the liquid flow path intersection 166 where the main channel groove 161 of a liquid flow path communicates with the liquid flow path connecting groove 165 on one side (such as the upper side of FIG. 41 ), the other side (such as the upper side of FIG. 41 ) can be avoided The connecting groove 165 of the liquid flow path on the lower side) communicates with the main flow groove 161 of the liquid flow path. This prevents the wall surface 162 of the liquid flow path mainstream groove 161 from being notched on both sides (upper side and lower side in FIG. 41 ) in the liquid flow path intersection portion 166 , leaving one side of the wall surface 162 remaining. Therefore, in the liquid channel intersection 166, capillary action can also be imparted to the working fluid in the liquid channel main groove 161, and the propulsion force of the working fluid 2b toward the evaporation region SSR can be suppressed from decreasing at the liquid channel intersection 166.

Moreover, as shown in FIG. 35 , the vapor chamber 101 may further include an injection portion 104 for injecting the working fluid 2b into the sealed space 103 on the side edge of one side in the X direction (the left side in FIG. 35 ). In the example shown in FIG. 35 , the injection part 104 is arranged on the side of the evaporation region SSR, and protrudes outward from the side edge of the side of the evaporation region SSR.

The injection part 104 is composed of the bottom sheet injection protrusion 113 of the lower sheet 110 (refer to FIG. 37 ), the upper side sheet injection protrusion 123 of the upper sheet 120 (refer to FIG. 38 ), and the capillary of the capillary structure sheet 130. The structural sheet injecting protrusions 136 (see FIG. 39 ) are formed by overlapping each other. In the illustrated example, the lower surface (first body surface 131a) of the capillary structure sheet injection protrusion 136 overlaps with the upper surface (second lower sheet surface 110b) of the lower sheet injection protrusion 113, and the capillary structure The upper surface (second body surface 131 b ) of the structural sheet injection protrusion 136 overlaps with the lower surface (first upper sheet surface 120 a ) of the upper side sheet injection protrusion 123 . Wherein, the injection channel 137 can be formed in the injection protrusion 136 of the capillary structure sheet. The injection channel 137 can penetrate from the first body surface 131a of the sheet body 131 to the second body surface 131b. That is, the sheet main body 131 (capillary structure sheet injection protrusion 136 ) can be penetrated in the Z direction. The injection channel 137 may communicate with the first steam channel 151 , and the working fluid 2 b may be injected into the first steam channel 151 through the injection channel 137 . In addition, depending on the arrangement of the liquid flow path 160 , the injection flow path 137 may communicate with the liquid flow path 160 . The top and bottom surfaces of the capillary structure sheet injection protrusion 136 may be formed flat, and the upper surface of the lower sheet injection protrusion 113 and the lower surface of the upper sheet injection protrusion 123 may also be formed flat. The plane shapes of the injection protrusions 113, 123, 136 may be equal.

In addition, in this embodiment, an example is shown in which the injection part 104 is provided on one of the pair of side edges of the steam chamber 101 in the X direction, but it is not limited thereto, and may be provided at any position. In addition, the injection flow path 137 provided in the capillary structure sheet injection protrusion 136 may not pass through the sheet body 131 as long as the working fluid 2b can be injected. In this case, only one of the first body surface 131 a and the second body surface 131 b of the sheet body 131 may be etched to form the injection flow path 137 communicating with the steam flow path portion 150 . In addition, the injection part 104 can also be cut off and removed after injecting the working fluid 2 b when manufacturing the steam chamber 101 .

However, as described above, the capillary structure sheet 130 of the present embodiment includes the retracted portion 170 retracted from the outer peripheral edge 132 o to the side of the steam flow path portion 150 . In this embodiment, the receding portion 170 retreats from the pair of longitudinal side edges 132 a , 132 b and the pair of lateral side edges 132 c , 132 d of the capillary structure sheet 130 . That is, the retracted portion 170 is provided on the side of each of the pair of longitudinal side edges 132a, 132b and the pair of lateral direction side edges 132c, 132d. The receding portion 170 may also recede from the entire circumference of the outer peripheral edge 132 o of the capillary structure sheet 130 except for the portion where the capillary structure sheet injecting protrusion 136 is provided.

In addition, as mentioned above, the planar shape of the steam chamber 101 is not limited to a rectangular shape, and may be any shape such as a circular shape, an elliptical shape, an L shape, or a T shape. In this case, the retracted portion 170 may be formed over the entire circumference of the outer peripheral edge 132o of the capillary structure sheet, or may be formed at any position in the outer peripheral edge 132o of the capillary structure sheet.

As shown in FIGS. 36 and 40 , when viewed along the thickness direction (Z direction) of the capillary structure sheet 130, the retracted portion 170 has an outer peripheral edge 132o (longitudinal direction side edges 132a, 132b and A setback edge 171 extending in the short direction from the side edges 132c, 132d). Here, the outer peripheral edge 132 o is the outer peripheral edge of the capillary structure sheet 130 in plan view as shown in FIG. 39 , and is located on the side of the upper sheet 120 . The retracted edge 171 extends from the outer peripheral edge 132o toward the first main body surface 131a, and bends toward the side of the steam flow path portion 150 in a concave shape. The retracted edge 171 may be formed so as to approach the steam flow path portion 150 as it approaches the first body surface 131a. In the illustrated example, the retracted edge 171 extends from the outer peripheral edge 121 o of the upper sheet 120 to the outer peripheral edge 111 o of the lower sheet 110 .

The dimension ww6 between the outer periphery 121o of the upper sheet 120 and the outer periphery 111o of the lower sheet 110 in the Y direction shown in FIG. 40 may be, for example, 50 μm˜1000 μm. That is, the retracted portion 170 may be retracted from the outer peripheral edge 132 o by 50 μm or more and 1000 μm or less.

Also, the dimension ww7 between the longitudinal side edge 111a of the upper and lower sheet 110 in the Y direction shown in FIG. Here, the dimension ww7 means the dimension on the first body surface 131a. That is, the retreat portion 170 may be provided at a position separated from the steam flow path portion 150 (first steam passage 151 ) by 30 μm or more and 3000 μm or less on the first body surface 131 a.

Such a retreat portion 170 can be formed by etching from the first body surface 131a of the sheet body 131 of the capillary structure sheet 130 in an etching step described later.

However, the materials constituting the lower sheet 110, the upper sheet 120, and the capillary structure sheet 130 are not particularly limited as long as they are materials with good thermal conductivity, but the lower sheet 110, the upper sheet 120, and the capillary structure sheet 130 may comprise copper or a copper alloy, for example. In this case, the thermal conductivity of each sheet 110, 120, 130 can be increased, and the heat dissipation efficiency of the steam chamber 101 can be improved.

The thickness tt1 of the steam chamber 101 shown in FIG. 36 may be, for example, 100 μm˜1000 μm. By setting the thickness tt1 of the steam chamber 101 to be 100 μm or more, the steam flow path portion 150 can be appropriately secured, and the steam chamber 101 can function appropriately. On the other hand, by setting the thickness tt1 of the steam chamber 101 to be 1000 μm or less, it is possible to suppress the thickness tt1 of the steam chamber 101 from increasing.

The thickness tt2 of the lower sheet 110 shown in FIG. 36 may be, for example, 6 μm to 100 μm. By setting the thickness tt2 of the lower sheet 110 to 6 μm or more, the mechanical strength of the lower sheet 110 can be ensured. On the other hand, by setting the thickness tt2 of the lower sheet 110 to 100 μm or less, it is possible to suppress the thickness tt1 of the steam chamber 101 from increasing. Similarly, the thickness tt3 of the upper sheet 120 shown in FIG. 36 can be set in the same manner as the thickness tt2 of the lower sheet 110 . The thickness tt3 of the upper sheet 120 and the thickness tt2 of the lower sheet 110 may also be different.

The thickness tt4 of the capillary structure sheet 130 shown in FIG. 36 may be, for example, 50 μm˜400 μm. By setting the thickness tt4 of the capillary structure sheet 130 to 50 μm or more, the steam flow path portion 150 can be appropriately secured, and the steam chamber 101 can be properly operated. On the other hand, by setting the thickness tt4 of the capillary structure sheet 130 to 400 μm or less, it is possible to suppress the thickness tt1 of the steam chamber 101 from increasing.

Next, a method of manufacturing the steam chamber 101 including such a configuration will be described using FIGS. 42 to 45 .

Here, first, the sheet preparation steps for preparing the respective sheets 110, 120, 130 will be described. The sheet preparation step includes: a lower sheet preparation step of preparing the lower sheet 110 ; an upper sheet preparation step of the upper sheet 120 ; and a capillary structure sheet preparation step of preparing the capillary structure sheet 130 .

In the lower sheet preparation step, first, a lower sheet base material having a desired thickness is prepared. The lower sheet base material may also be a rolled material. Next, the lower sheet 110 having a desired planar shape is formed by etching the lower sheet base material. Alternatively, the lower sheet 110 having a desired planar shape can also be formed by pressing the lower sheet base material. As described above, the lower sheet 110 is formed to be smaller than the upper sheet 120 as a whole in plan view. In this way, the lower sheet 110 having the outline shape as shown in FIG. 37 can be prepared.

Also in the upper sheet preparation step, first, an upper sheet base material having a desired thickness is prepared in the same manner as in the lower sheet preparation step. The upper sheet base material may also be a rolled material. Next, the upper sheet 120 having a desired planar shape is formed by etching the upper sheet base material. Alternatively, the upper sheet 120 having a desired planar shape can also be formed by pressing the upper sheet base material. As described above, the upper sheet 120 is formed to be larger than the lower sheet 110 as a whole in plan view. In this way, the upper side sheet 120 having an outline shape as shown in FIG. 38 can be prepared.

The capillary structure sheet preparation step includes: a material sheet preparation step of preparing the metal material sheet MM, and an etching step of etching the metal material sheet MM.

First, in the material sheet preparation step, as shown in FIG. 42 , a flat metal material sheet MM including the first material surface MMa and the second material surface MMb is prepared. The metal material sheet MM may be formed as a rolled material with a desired thickness.

Next, in the etching step, as shown in FIG. 43 , the metal material sheet MM is etched from the first material surface MMa and the second material surface MMb to form the vapor channel portion 150 , the liquid channel portion 160 and the retreat portion 170 .

More specifically, a patterned resist film (not shown) is formed on the first material surface MMa and the second material surface MMb of the metal material sheet MM by photolithography. The pattern of the resist film includes the above-mentioned patterns of the vapor channel portion 150 or the liquid channel portion 160 and the retracted portion 170 . Next, the first material surface MMa and the second material surface MMb of the metal material sheet MM are etched through the openings of the patterned resist film. Thereby, the first material surface MMa and the second material surface MMb of the metal material sheet MM are etched into patterns to form the vapor flow path portion 150 and the liquid flow path portion 160 as shown in FIG. 43 . In addition, the recessed portion 170 is also formed by this etching (etching from the first material surface MMa). In addition, as the etchant, for example, a ferric chloride-based etchant such as a second iron chloride aqueous solution, or a copper chloride-based etchant such as a copper chloride aqueous solution can be used.

The etching can simultaneously etch the first material surface MMa and the second material surface MMb of the metal material sheet MM. However, it is not limited thereto, and the etching of the first material surface MMa and the second material surface MMb can also be performed in separate steps. In addition, the vapor channel portion 150, the liquid channel portion 160, and the retracted portion 170 may be formed by etching at the same time, or may be formed in separate steps.

In addition, in the etching step, by etching the first material surface MMa and the second material surface MMb of the metal material sheet MM, a specific outline shape as shown in FIG. 39 can be obtained. That is, the capillary structure sheet 130 having the above-mentioned outer peripheral edge 132o can be obtained.

In addition, the retreat portion 170 is not limited to be formed by etching, for example, it can also be formed by cutting the edge of the metal material sheet MM after the etching step.

In this way, the capillary structure sheet 130 of this embodiment can be prepared.

After the preparation step, as a joining step, as shown in FIG. 44 , the lower sheet 110 , the upper sheet 120 , and the capillary structure sheet 130 are joined.

More specifically, first, the lower sheet 110, the capillary structure sheet 130, and the upper sheet 120 are laminated in this order. In this case, the first body surface 131a of the capillary structure sheet 130 overlaps the second lower sheet surface 110b of the lower sheet 110, and the first upper sheet surface 120a of the upper sheet 120 and the capillary structure sheet The second body surface 131b of the material 130 overlaps. At this time, the alignment holes 112 of the lower sheet 110 , the alignment holes 135 of the capillary structure sheet 130 , and the alignment holes 122 of the upper sheet 120 can also be used to align the sheets 110 , 120 , and 130 .

Next, the lower sheet 110, the capillary structure sheet 130, and the upper sheet 120 are temporarily fixed. For example, these sheet materials 110, 120, 130 may be temporarily fixed by spot welding, or these sheet materials 110, 120, 130 may be temporarily fixed by laser welding.

Next, the lower sheet 110, the capillary structure sheet 130, and the upper sheet 120 are permanently bonded by thermocompression. The sheets 110, 120, 130 may be permanently joined, for example, by diffusion bonding. The so-called diffusion bonding is to make the lower side sheet 110 to be bonded and the capillary structure sheet 130 close contact, and make the capillary structure sheet 130 and the upper side sheet 120 close contact, in a controlled atmosphere such as vacuum or inert gas, in the stacking direction A method of bonding by applying pressure and heating, and utilizing the diffusion of atoms generated in the bonding surface. Diffusion bonding heats the material of each sheet 110, 120, 130 to a temperature close to the melting point, but since it is lower than the melting point, melting deformation of each sheet 110, 120, 130 can be avoided. Thereby, the frame body 132 of the capillary structure sheet 130 and the first main body surface 131a of each land portion 133 and the second lower sheet surface 110b of the lower sheet 110 are diffusion bonded. In addition, the frame portion 132 of the capillary structure sheet 130 and the second body surface 131b of each land portion 133 are diffusely bonded to the first upper sheet surface 120a of the upper sheet 120 . In this way, the sheets 110 , 120 , and 130 are diffusion-bonded to form the sealed space 103 having the vapor flow path 150 and the liquid flow path 160 between the lower sheet 110 and the upper sheet 120 . At this stage, in the sealed space 103 , the above-mentioned injection flow path 137 is not sealed, and communicates with the outside through the injection flow path 137 .

After the bonding step, as an injection step, the working fluid 2 b is injected into the sealed space 103 from the injection channel 137 of the injection part 104 .

After the injection step, as a sealing step, the injection channel 137 is sealed. The injection part 104 can be partially melted to seal the injection channel 137 . Thereby, the communication between the sealed space 103 and the outside is cut off, and the sealed space 103 is sealed. Therefore, the sealed space 103 in which the working fluid 2b is sealed can be obtained, and the working fluid 2b in the sealed space 103 is prevented from leaking to the outside. The injection part 104 may also be removed after the injection channel 137 is sealed. The injection part 104 may be entirely removed. Alternatively, a part of the injection part 104 can also be removed, leaving the remaining part.

As described above, the steam chamber 101 of this embodiment can be obtained.

In this way, the steam chamber 101 of this embodiment can be manufactured sequentially. As shown in FIG. 45, the manufactured steam chamber 101 can be placed and stored in a stacked manner on the placement surface 179 provided at a specific place. Thereafter, the steam chamber 101 is taken out from the placement place and transported when it is shipped or mounted on the device D.

Next, a method of transporting the steam chamber 101 manufactured in this way will be described using FIGS. 46 and 47 . Here, as shown in FIG. 45 , a method of taking out and transporting the steam chambers 101 from the state in which the steam chambers 101 are stacked on each other will be described.

First, as shown in FIG. 46 , the claws 182 a , 182 b of the first arm 181 a and the second arm 181 b of the suspension device 180 are respectively engaged with the retracted portion 170 of the capillary structure sheet 130 .

More specifically, first, the first arm portion 181a is moved in the vertical direction, and the first claw portion 182a provided at the front end of the first arm portion 181a is positioned in the Z direction of the uppermost steam chamber 101. There is a position of setback 170 . Then, the second arm portion 181b is moved in the vertical direction, and the second claw portion 182b provided at the front end of the second arm portion 181b is positioned at a position where the retracted portion 170 is provided in the Z direction of the steam chamber 101 . Next, the first arm portion 181a is moved in the horizontal direction, so that the first claw portion 182a abuts against the retracted edge 171 of the retracted portion 170 provided on one side of the Y direction (left side in FIG. 46 ). Similarly, the second arm portion 181b is moved in the horizontal direction so that the second claw portion 182b abuts against the retracted edge 171 of the retracted portion 170 provided on the other side in the Y direction (right side in FIG. 46 ).

Next, as shown in FIG. 47 , the steam chamber 101 is suspended by the suspension device 180 .

More specifically, the first arm portion 181 a and the second arm portion 181 b are moved upward while the first claw portion 182 a and the second claw portion 182 b are in contact with the retracted edge 171 of the retracted portion 170 . Thereby, the capillary structure sheet 130 is supported by the first claw portion 182 a and the second claw portion 182 b, and the steam chamber 101 is suspended by the suspension device 180 .

And, in the state where the steam chamber 101 is suspended by the suspension device 180, the first arm part 181a and the second arm part 181b are moved in the horizontal direction, and the steam chamber 101 is transported to a desired target position.

In this way, the steam chamber 101 of this embodiment can be transported by the suspension device 180 .

In addition, here, the method of taking out and transporting the steam chamber 101 from the state in which the steam chamber 101 is stacked and placed has been demonstrated. However, it is not limited thereto, and when the steam chamber 101 is directly placed on the mounting surface 179 , the suspension device 180 may be used to transport the steam chamber 101 .

Here, the method of conveying the general steam chamber 101' will be described. As shown in FIG. 48 , the sides of the general steam chamber 101 ′ are vertically formed, and the retracted portion 170 is not formed on the capillary structure sheet 30 like the steam chamber 101 of the present embodiment. Therefore, the claws 182 a , 182 b of the suspension device 180 cannot be engaged with the retracted part 170 , and it is difficult to transport the general steam chamber 101 ′ through the above suspension device 180 .

A general steam chamber 101', as shown in FIG. 48, can be taken out and transported by an adsorption device 185. More specifically, the adsorption device 185 has an adsorption pad 186 that generates adsorption force by setting the interior to a negative pressure, and presses the adsorption pad 186 on the upper surface of the steam chamber 101' to make it adsorb to the steam chamber 101'. Thereafter, in a state where the vapor chamber 101' is adsorbed by the adsorption pad 186, the adsorption device 185 is moved upward to suspend the vapor chamber 101'. And, the adsorption device 185 is moved in the horizontal direction, and the steam chamber 101' is transported to a desired target position.

At this time, when the thickness of the steam chamber 101 ′ is reduced, the steam chamber 101 ′ may be deformed due to the adsorption force of the adsorption pad 186 acting on the upper surface of the steam chamber 101 ′. Therefore, in order to suppress deformation of the steam chamber 101', thinning of the steam chamber 101' may be suppressed.

In contrast, in this embodiment, the capillary structure sheet 130 of the steam cavity 101 is provided with a retracted portion 170 . Thereby, the claw parts 182a and 182b of the suspension device 180 can be engaged with the retracted part 170 of the capillary structure sheet 130 of the placed steam chamber 101 . Therefore, the steam chamber 101 can be suspended and transported by the suspension device 180, and the above-mentioned adsorption device 185 can be unnecessary. Therefore, deformation of the vapor chamber 101 can be suppressed. As a result, further thinning of the steam chamber 101 can be achieved.

In addition, the transportation of the steam chamber 101 by the above-mentioned suspension device 180 is an example, and the steam chamber 101 may be conveyed using other arbitrary devices or the like. For example, the vapor chamber 101 can also be transported using a tool with a sharp front end. More specifically, the front end of the tool can be brought into contact with the retracted edge 171 of the retracted portion 170 , and then the tool can be moved upward to lift the steam chamber 101 . In addition, the raised steam chamber 101 can also be carried by hand. In addition, for example, instead of using such a device or tool, the steam chamber 101 may be lifted by touching fingers against the retracted edge 171 of the retracted portion 170 , and then the steam chamber 101 may be grasped and transported. In this case, because the capillary structure sheet 130 has the retracted portion 170 , it is easy to take out and transport the steam chamber 101 .

Next, the operation method of the vapor chamber 101 , that is, the cooling method of the device D will be described.

The steam chamber 101 conveyed as described above is installed in the casing H of a mobile terminal or the like at the conveyance destination, and the casing member Ha is in contact with the second upper sheet surface 120b of the upper sheet 120 . Also, on the first lower side sheet surface 110a of the lower side sheet 110, the device D such as the CPU to be cooled is installed (or the steam chamber 101 is installed on the device D), and the first lower side sheet of the lower side sheet 110 Face 110a is in contact with device D. As shown in FIG. The working fluid 2b in the sealed space 103 utilizes its surface tension to adhere to the wall surface of the sealed space 103, that is, the wall surface 153a of the lower vapor flow path recess 153, the wall surface 154a of the upper vapor flow path recess 154, and the liquid in the liquid flow path portion 160. The wall surface 162 of the channel mainstream groove 161 and the wall surface of the liquid flow channel connecting groove 165 . In addition, the working fluid 2b may also adhere to the second lower sheet surface 110b of the lower sheet 110, which is exposed in the lower steam flow path recess 153, the liquid flow path mainstream groove 161, and the liquid flow path connecting groove 165. part. Furthermore, the working fluid 2b may also adhere to the portion of the first upper sheet surface 120a of the upper sheet 120 exposed to the upper vapor channel recess 154 .

When the device D generates heat in this state, the working fluid 2b present in the evaporation region SSR (see FIG. 39 ) receives heat from the device D. The received heat is absorbed as latent heat, and the working fluid 2b evaporates (vaporizes) to generate working steam 2a. Most of the generated operating gas 2a is diffused in the lower steam flow path recess 153 and the upper steam flow path recess 154 constituting the sealed space 103 (see the solid arrow in FIG. 39 ). The working steam 2a in each steam channel recess 153, 154 leaves the evaporation region SSR, and most of the working steam 2a is transported to the relatively low temperature condensation region CCR (the right part of FIG. 39). In the condensation region CCR, the working steam 2 a mainly dissipates heat toward the upper sheet 120 to be cooled. The heat received by the upper sheet 120 from the motive steam 2a is transferred to the outside air via the casing member Ha (see FIG. 36 ).

The actuating vapor 2a loses the latent heat absorbed in the evaporation region SSR by dissipating heat toward the upper sheet 120 in the condensation region CCR, and condenses to generate the actuating fluid 2b. The generated working fluid 2b adheres to the wall surfaces 153a, 154a of the respective steam channel recesses 153, 154, the second lower sheet surface 110b of the lower sheet 110, and the first upper sheet surface 120a of the upper sheet 120. . Here, since the working fluid 2b continues to evaporate in the evaporation region SSR, the working fluid 2b in the region other than the evaporation region SSR (that is, the condensation region CCR) in the liquid flow path portion 160 passes through the main groove 161 of each liquid flow path. Capillary action, and transported to the evaporation region SSR (refer to the dotted arrow in Figure 39). As a result, the working fluid 2b adhering to the wall surfaces 153a, 154a, the second lower sheet surface 110b, and the first upper sheet surface 120a moves to the liquid channel portion 160, and enters the liquid flow through the liquid channel connection groove 165. Road mainstream groove 161. In this way, the working fluid 2 b is filled in the main flow groove 161 of each liquid flow path and the liquid flow path connecting groove 165 . Therefore, the filled working liquid 2b obtains the propulsion force toward the evaporation region SSR through the capillary action of the main channel grooves 161 of each liquid flow path, and is smoothly transported to the evaporation region SSR.

In the liquid flow path portion 160 , each liquid flow path mainstream groove 161 communicates with other adjacent liquid flow path main flow grooves 161 via the corresponding liquid flow path connecting groove 165 . Thereby, the working fluid 2b travels back and forth between the adjacent liquid flow path main grooves 161 , and the drying up of the liquid flow path main flow grooves 161 is suppressed. Therefore, capillary action is exerted on the working fluid 2b in the main groove 161 of each liquid channel, and the working fluid 2b is smoothly transported to the evaporation region SSR.

The working fluid 2b reaching the evaporation region SSR receives heat from the device D again and evaporates. The actuating steam 2a evaporated from the actuating liquid 2b passes through the liquid flow path connecting groove 165 in the evaporation region SSR, and moves to the lower side steam flow path concave portion 153 and the upper side steam flow path concave portion 154 with a larger cross-sectional area of the flow path. Diffusion inside the channel recesses 153 and 154 . In this way, the actuating fluids 2a and 2b change phases, that is, repeat evaporation and condensation, and flow back in the sealed space 103 to transport and release the heat of the device D. As a result, the device D is cooled.

Thus, according to the present embodiment, the capillary structure sheet 130 has the retracted portion 170 retracted from the outer peripheral edge 132 o to the side of the steam flow path portion 150 . Thereby, the claw portions 182a, 182b, etc. of the suspension device 180 can be engaged with the retracted portion 170 of the capillary structure sheet 130 of the placed steam chamber 101 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

Also, according to this embodiment, the transport of the vapor chamber 101 can be performed without using the adsorption device 185 . Therefore, deformation of the vapor chamber 101 can be suppressed. As a result, further thinning of the steam chamber 101 can be achieved.

Also, according to this embodiment, by forming the retracted portion 170 on the side surface of the capillary structure sheet 130, when a plurality of steam chambers 101 are stacked and placed on top of each other, each steam chamber 101 can be easily distinguished when viewed from the side. Thereby, the steam chamber 101 can be taken out and carried easily individually. Therefore, the transportability of the steam chamber 101 can be improved.

Also, according to the present embodiment, by forming the retracted portion 170 in the capillary structure sheet 130, the weight and space of the steam chamber 101 can be reduced.

Moreover, according to the present embodiment, the retracted edge 171 of the retracted portion 170 is curved toward the side of the steam flow path portion 150 in a concave shape. Thereby, the steam chamber 101 can be firmly supported and lifted by the claws 182a, 182b of the suspension device 180 and the like. Therefore, the transportability of the steam chamber 101 can be further improved.

Moreover, according to the present embodiment, the retracted edge 171 of the retracted portion 170 is formed so as to approach the steam flow path portion 150 as it approaches the first body surface 131 a. Thereby, the steam chamber 101 can be more firmly supported and lifted by the claws 182a, 182b of the suspension device 180 and the like. Therefore, the transportability of the steam chamber 101 can be further improved.

Moreover, according to this embodiment, the receding part 170 recedes from the pair of longitudinal direction side edges 132a, 132b and the pair of lateral direction side edges 132c, 132d of the capillary structure sheet 130, respectively. Thereby, the claws 182a, 182b, etc. of the suspension device 180 can be engaged with the retracted portion 170 of the capillary structure sheet 130 from any direction when the placed steam chamber 101 is viewed from above, and the steam chamber 101 can be lifted. Therefore, the vapor chamber 101 can be lifted more easily. As a result, the transportability of the steam chamber 101 can be further improved.

Also, according to the present embodiment, the steam flow path portion 150 penetrates from the first body surface 131a to the second body surface 131b, and the upper sheet 120 covers the steam flow path portion 150 on the second body surface 131b. In this way, by forming the steam chamber 101 by the lower sheet 110 , the upper sheet 120 and the capillary structure sheet 130 , the heat received by the lower sheet 110 from the device D can be released from the upper sheet 120 . Thereby, the device D can be effectively cooled. Therefore, the performance of the vapor chamber 101 can be improved.

In addition, the steam chamber 101 may have a shape symmetrical to the above-mentioned shape in the Z direction. That is, the lower sheet 110 may be formed larger than the upper sheet 120 as a whole in plan view, and the retracted edge 171 of the retracted portion 170 extends from the outer peripheral edge 111 o of the lower sheet 110 to the outer peripheral edge 121 o of the upper sheet 120 . In this case, by placing the steam chamber 101 in reverse, that is, in a state where the second upper sheet surface 120b of the upper sheet 120 faces the loading surface 179, the suspension device The claws 182a, 182b of 180 abut against the retracted edge 171 of the retracted portion 170 and move upward, so that the steam chamber 101 can be easily lifted. Therefore, the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

(The first variation example of the third embodiment) In the above-mentioned third embodiment, the example in which the setback edge 171 of the setback portion 170 is bent in a concave shape to the side of the steam flow path portion 150 has been described (see FIG. 36 ). However, it is not limited thereto, as shown in FIG. 49 , the retracted edge 171 of the retracted portion 170 may also be inclined relative to the Z direction.

In the example shown in FIG. 49, the retracted edge 171 extends from the outer peripheral edge 132o toward the first body surface 131a, and is inclined relative to the Z direction. The retracted edge 171 is formed so as to approach the steam flow path portion 150 as it approaches the first main body surface 131 a. The retracted edge 171 extends linearly from the outer peripheral edge 121 o of the upper sheet 120 to the outer peripheral edge 110 o of the lower sheet 110 . Therefore, when viewed in section along the Z direction, the shape of the capillary structure sheet 130 is an inverted trapezoid as shown in FIG. 49 .

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

In addition, the retracted edge 171 is inclined relative to the Z direction, so that the claws 182a, 182b, etc. of the suspension device 180 contact the retracted edge 171 of the retracted portion 170 and move upward, so that the steam chamber 101 can be easily lifted. . Therefore, the transportability of the steam chamber 101 can be further improved.

(Second Variation of Third Embodiment) In addition, in the above-mentioned third embodiment, the example in which the retracted edge 171 of the retracted portion 170 is bent in a concave shape of the steam flow path portion 150 has been described (see FIG. 36 ). However, it is not limited thereto. As shown in FIG. 50 , the retracted edge 171 of the retracted portion 170 may also be convexly curved toward the opposite side of the steam flow path portion 150 .

In the example shown in FIG. 50 , the retracted edge 171 extends from the outer peripheral edge 132o toward the first body surface 131a, and is convexly curved toward the opposite side of the steam flow path portion 150 . The retracted edge 171 is formed so as to approach the steam flow path portion 150 as it approaches the first main body surface 131 a. The retracted edge 171 extends from the outer peripheral edge 121o of the upper sheet 120 to the outer peripheral edge 110o of the lower sheet 110 .

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

(The third modification of the third embodiment) In addition, in the above-mentioned third embodiment, the example in which the retracted edge 171 of the retracted portion 170 is bent in a concave shape of the steam flow path portion 150 has been described (see FIG. 36 ). However, it is not limited to this. As shown in FIG. 51, the retracted edge 171 of the retracted portion 170 may also include: a first retracted edge 171a extending from the first body surface 131a to the side of the second body surface 131b, a first retracted edge 171a extending from the second body surface 131b The second setback edge 171b extending to the side of the first main body surface 131a, and the step connection edge 171c connecting the first setback edge 171a and the second setback edge 171b.

In the example shown in FIG. 51 , the setback edge 171 includes a first setback edge 171a, a second setback edge 171b, and a step connection edge 171c connecting the first setback edge 171a and the second setback edge 171b. The first retracted edge 171a is disposed on the side of the first body surface 131a. The second retracted edge 171b is disposed on the side of the second body surface 131b. The first retracted edge 171a is located closer to the steam flow path portion 150 than the second retracted edge 171b. The first retracted edge 171a extends linearly in the Z direction from the first body surface 131a to the side of the second body surface 131b. For example, the first retracted edge 171a may extend to a middle position between the first body surface 131a and the second body surface 131b. The second retracted edge 171b extends linearly in the Z direction from the second body surface 131b to the side of the first body surface 131a. For example, the second retracted edge 171b can extend to the middle position between the first body surface 131a and the second body surface 131b. The step connecting edge 171c extends linearly from the first setback edge 171a to the second setback edge 171b so as to connect the first setback edge 171a and the second setback edge 171b. In this way, when viewed in the Z direction, the setback edge 171 of the setback portion 170 is formed in a stepped shape.

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

Furthermore, by providing the stepped connection edge 171c connecting the first setback edge 171a and the second setback edge 171b, the steam chamber 101 can be firmly supported and lifted by the claws 182a, 182b of the suspension device 180 and the like. Therefore, the transportability of the steam chamber 101 can be further improved.

(Fourth modification of the third embodiment) In addition, in the third embodiment described above, an example has been described in which the retracted edge 171 of the retracted portion 170 is formed so as to approach the steam flow path portion 150 as it approaches the first body surface 131a (see FIG. 36 ). However, it is not limited thereto. As shown in FIG. 52 , the retracted edge 171 of the retracted portion 170 can also be formed in such a way that it approaches the steam channel portion 150 as it approaches the relay point 172 from the outer peripheral edge 132 172 is formed so as to be close to the first body surface 131 a and away from the steam flow path portion 150 .

In the example shown in FIG. 52, unlike the above-mentioned embodiment, the lower sheet 110 and the upper sheet 120 are formed to have the same size in plan view. Moreover, when viewed from above, the outer peripheral edge 111 o of the lower side sheet 110 overlaps with the outer peripheral edge 121 o of the upper side sheet 120 . That is, in a plan view, the longitudinal side edges 111a, 111b and the lateral direction side edges 111c, 111d of the lower sheet 110 are respectively aligned with the longitudinal side edges 121a, 121b and the lateral direction side edges of the upper sheet 120. 121c and 121d overlap.

In addition, in the example shown in FIG. 52, the outer peripheral edge 132o of the capillary structure sheet 130 is located on the side of the second main body surface 131b in plan view. In this case, the retracted edge 171 of the retracted portion 170 extends from the outer peripheral edge 132o to the first main body surface 131a through the relay point 172 . The relay point 172 may be located in the middle of the first body surface 131a and the second body surface 131b in the Z direction. The retracted edge 171 is concavely bent toward the side of the steam flow path portion 150 . The retracted edge 171 is formed so as to approach the steam flow path portion 150 as it approaches the relay point 172 from the outer peripheral edge 132o, and is formed so as to move away from the steam flow path portion 150 as it approaches the first body surface 131a from the relay point 172. form. With such a retracted edge 171 , the retracted portion 170 has a shape that is recessed toward the side of the steam flow path portion 150 at the central portion of the capillary structure sheet 130 .

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

In addition, since the retracted edge 171 of the retracted portion 170 is bent toward the side of the steam passage portion 150 in a concave shape, the steam chamber 101 can be firmly supported and lifted by the claw portions 182a, 182b of the suspension device 180 . Therefore, the transportability of the steam chamber 101 can be further improved.

Also, even in the case where the steam chamber 101 is reversely placed, that is, when the second upper sheet surface 120b of the upper side sheet 120 faces the loading surface 179, the suspension device The claws 182a, 182b of 180 abut against the retracted edge 171 of the retracted portion 170 and move upward, so that the steam chamber 101 can be easily lifted. In addition, even when the steam chamber 101 is placed upside down, the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be further improved.

(Fifth modification of the third embodiment) In addition, in the above-mentioned third embodiment, the example in which the retracted edge 171 of the retracted part 170 has the retracted edge 171 extending from the outer peripheral edge 132o when viewed in the Z direction has been described (see FIG. 36 ). However, it is not limited thereto. As shown in FIG. 53 , the retracted portion 170 includes a first body surface side retracted portion 174 and a second body surface side retracted portion 175, and when viewed along the Z direction, the first body surface side The retracted portion 174 has a first retracted edge 176 on the body surface side, and the second retracted portion 175 on the body surface side has a second retracted edge 177 on the body surface side.

In the example shown in FIG. 53, unlike the above-mentioned embodiment, the lower sheet 110 and the upper sheet 120 are formed to have the same size in plan view. Moreover, when viewed from above, the outer peripheral edge 111 o of the lower side sheet 110 overlaps with the outer peripheral edge 121 o of the upper side sheet 120 . That is, in a plan view, the longitudinal side edges 111a, 111b and the lateral direction side edges 111c, 111d of the lower sheet 110 are respectively aligned with the longitudinal side edges 121a, 121b and the lateral direction side edges of the upper sheet 120. 121c and 121d overlap.

Also, in the example shown in FIG. 53 , the retraction portion 170 includes a first body surface side retraction portion 174 disposed on the side of the first body surface 131a, and a second body surface side retraction portion disposed on the side of the second body surface 131b. Section 175. The outer peripheral edge 132o of the capillary structure sheet 130 in plan view is located between the first body surface 131a and the second body surface 131b. The outer peripheral edge 132o may be located in the middle of the first body surface 131a and the second body surface 131b. The outer peripheral edge 132 o of the capillary structure sheet 130 is formed to protrude further outside than the outer peripheral edge 111 o of the lower sheet 110 and the outer peripheral edge 121 o of the upper sheet 120 . The first body surface side setback portion 174 is formed on the side closer to the first body surface 131a than the outer peripheral edge 132o, and the second body surface side setback portion 175 is formed on the side closer to the second body surface 131b than the outer peripheral edge 132o.

When viewed in section along the Z direction, the first body surface side setback portion 174 has a first body surface side setback edge 176 extending from the outer peripheral edge 132o to the first body surface 131a. The first main body surface-side setback edge 176 is concavely curved toward the side of the steam flow path portion 150 as it approaches the first body surface 131a so as to approach the steam flow path portion 150 . Thereby, the first main body surface side retracted portion 174 has a shape that is recessed from the side of the first main body surface 131 a toward the side of the steam flow path portion 150 .

Moreover, when viewed in the Z-direction, the second body surface side retracted portion 175 has a second body surface side retracted edge 177 extending from the outer peripheral edge 132o to the second body surface 131b. The second main body surface side retracted edge 177 is concavely curved toward the side of the steam flow path portion 150 as it approaches the second body surface 131b so as to approach the steam flow path portion 150 . Thereby, the second main body surface side retracted portion 175 has a shape that is recessed from the side of the second main body surface 131b toward the side of the steam flow path portion 150 .

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 can also be engaged with the first body surface side retracted portion 174 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

In addition, since the first body surface side setback edge 176 of the first body surface side setback portion 174 is bent toward the side of the steam flow path portion 150 in a concave shape, it can be firmly supported and lifted by the claw portions 182a, 182b of the suspension device 180, etc. Start steam chamber 101. Therefore, the transportability of the steam chamber 101 can be further improved.

Also, when the steam chamber 101 is placed in the opposite direction, that is, when the second upper sheet surface 120b of the upper sheet 120 is placed toward the loading surface 179, the suspension device 180 can The claws 182a, 182b, etc. abut against the second body surface side retracted edge 177 of the second body surface side retracted portion 175 and move upward, so that the steam chamber 101 can be easily lifted. In addition, even when the steam chamber 101 is placed upside down, the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be further improved.

(Sixth modification of the third embodiment) In addition, in the above-mentioned third embodiment, the example in which the retracted portion 170 retracts from the pair of longitudinal side edges 132a, 132b and the pair of lateral direction side edges 132c, 132d of the capillary structure sheet 130 has been described ( Refer to Figure 35). However, it is not limited thereto, and the retracted portion 170 may also be retracted from at least one of the pair of side edges 132 a , 132 b in the longitudinal direction of the capillary structure sheet 130 .

In the example shown in FIG. 54 and FIG. 55 , the retracted portion 170 is retracted from the longitudinal side edge 132 a (lower side in FIG. 54 ) of the capillary structure sheet 130 . That is, the retracted portion 170 is provided on the side of the longitudinal side edge 132 a of the capillary structure sheet 130 . On the other hand, the retracted portion 170 does not retract from the longitudinal side edge 132b (upper side in FIG. 54 ) and the lateral direction side edges 132c, 132d of the capillary structure sheet 130 .

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

In addition, by limiting the area where the retreat portion 170 is provided, the area of the steam chamber 101 can be effectively utilized. That is, the steam flow path 150 and the liquid flow path 160 can be provided in a wider area of the capillary structure sheet 130, and the performance of the steam chamber 101 can be improved.

(Seventh modification of the third embodiment) In addition, the retracted portion 170 may retreat from one of the pair of long side edges 132a, 132b of the capillary structure sheet 130, and also retreat from one of the pair of short side edges 132c, 132d of the capillary structure sheet 130. One retreats.

In the example shown in FIG. 56 , the retracted portion 170 retracts from the side edge 132a (the lower side in FIG. 56 ) of the capillary structure sheet 130 in the longitudinal direction, and also retracts from the side edge 132c in the short direction (Fig. 56) back off. That is, the setback 170 is provided on the side of the longitudinal side edge 132 a of the capillary structure sheet 130 , and the setback 170 is also provided on the side of the short side edge 132 c of the capillary structure sheet 130 . On the other hand, the retracted portion 170 does not retract from the longitudinal side edge 132b (upper side in FIG. 56 ) and the lateral direction side edge 132d (left side in FIG. 56 ) of the capillary structure sheet 130 .

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

In addition, by limiting the area where the retreat portion 170 is provided, the area of the steam chamber 101 can be effectively utilized. That is, the steam flow path 150 and the liquid flow path 160 can be provided in a wider area of the capillary structure sheet 130, and the performance of the steam chamber 101 can be improved.

Furthermore, in the example shown in FIG. 56, the side (the side of the side edge 132a in the longitudinal direction and the side edge 132c in the direction of the short side) of the steam chamber 101 provided with the retracted portion 170 can be lifted and transported, so that the steam chamber 101 The side on which the setback part 170 is not provided (the side of the side edge 132b in the longitudinal direction and the side edge 132d in the lateral direction) is in contact with a specific wall surface. Thereby, the vapor chamber 101 can be easily positioned relative to the wall. Therefore, for example, when marking manufacturing information by irradiating a specific position of the vapor chamber 101 with laser light, marking can be performed at a correct position. In addition, after the steam chamber 101 is brought into contact with the wall surface, the steam chamber 101 can also be easily lifted from the side where the retracted portion 170 is provided. Therefore, the transportability of the steam chamber 101 can be improved.

(Eighth modification of the third embodiment) In addition, the receding portion 170 may recede from a part of a pair of side edges 132 a , 132 b in the longitudinal direction of the capillary structure sheet 130 .

In the example shown in FIG. 57 , the retracted portion 170 is retracted from both of the pair of longitudinal side edges 132 a , 132 b of the capillary structure sheet 130 . That is, a retracted portion 170 is provided on each side of the pair of longitudinal side edges 132 a , 132 b of the capillary structure sheet 130 . In addition, each retracted portion 170 is retracted from a part of the side edges 132a, 132b in the longitudinal direction.

Each setback portion 170 can also be set back from the central portion of the side edges 132a, 132b in the longitudinal direction. In addition, the retracted portions 17 may also be arranged at positions symmetrical to each other with respect to the center of gravity of the steam chamber 101 in plan view.

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

Furthermore, by further restricting the area where the retreat portion 170 is provided, the area of the steam chamber 101 can be further effectively utilized. That is, by providing the steam flow path 150 and the liquid flow path 160 in a wider area of the capillary structure sheet 130, the performance of the steam chamber 101 can be further improved.

Also, by arranging the retracted parts 170 at positions symmetrical to each other with respect to the center of gravity of the steam chamber 101 in plan view, the attitude of the steam chamber 101 can be stabilized when suspended by the suspension device 180 or the like. Therefore, the steam chamber 101 can be easily transported.

(Ninth modification of the third embodiment) In addition, in the above-mentioned third embodiment, the example in which the steam chamber 101 is provided with one capillary structure sheet 130 has been described (see FIG. 36 ). However, it is not limited thereto, and the steam chamber 101 may also have a plurality of capillary structure sheets 130 .

The number of capillary structure sheets 130 can be arbitrary. Each capillary structure sheet 130 may have the same shape and size as each other, or may have different shapes and sizes from each other. For example, each capillary structure sheet 130 may be formed with the same size when viewed from above. In addition, for example, one capillary structure sheet 130 can also be formed to be smaller than other capillary structure sheets 130 in plan view.

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

(The tenth modification of the third embodiment) In addition, in the above-mentioned third embodiment, the example in which the steam chamber 101 is constituted by the lower sheet 110, the upper sheet 120, and the capillary structure sheet 130 has been described (see FIG. 36). However, it is not limited thereto, and the steam cavity 101 can also be formed by the lower sheet 110 and the capillary structure sheet 130 .

In the example shown in FIG. 58 , the steam chamber 101 includes the lower sheet 110 and the capillary structure sheet 130 , but does not include the upper sheet 120 . The housing member Ha may be attached to the second body surface 131b of the capillary structure sheet 130 . The heat of the working steam 2a is transferred from the capillary structure sheet 130 to the housing member Ha.

In the example shown in FIG. 58 , the steam channel portion 150 is provided on the first body surface 131 a, but does not extend to the second body surface 131 b and does not penetrate through the capillary structure sheet 130 . That is, the first steam channel 151 and the second steam channel 152 of the steam channel part 150 are constituted by the lower steam channel recess 153 , and the upper steam channel recess 154 is not provided in the capillary structure sheet 130 .

The thickness tt5 of the vapor chamber 101 shown in FIG. 58 may be, for example, 100 μm˜1000 μm. The thickness tt6 of the lower sheet 110 shown in FIG. 58 may be, for example, 6 μm to 200 μm. The thickness tt7 of the capillary structure sheet 130 shown in FIG. 58 may be, for example, 50 μm to 800 μm.

In addition, not limited to the example shown in FIG. 58 , the steam flow path portion 150 may be provided on the second lower sheet surface 110 b of the lower sheet 110 . In this case, the steam flow path portion 150 of the lower sheet 110 may be provided at a position facing the steam flow path portion 150 of the capillary structure sheet 130 . In addition, the liquid channel portion 160 may be provided on the second lower sheet surface 110 b of the lower sheet 110 .

In this way, the steam cavity 101 may be composed of the lower sheet 110 and the capillary structure sheet 130 .

In this case, the claw portions 182a, 182b, etc. of the suspension device 180 may also be engaged with the retracted portion 170 of the capillary structure sheet 130 . Therefore, the steam chamber 101 can be lifted easily, and the steam chamber 101 can be easily transported. As a result, the transportability of the steam chamber 101 can be improved.

According to the embodiment described above, the transportability of the steam chamber can be improved.

The present invention is not limited to the above-mentioned embodiments and various modifications, and the constituent elements can be changed and realized in the range not departing from the gist at the stage of implementation. In addition, various inventions can be formed by appropriate combinations of a plurality of constituent elements disclosed in the above-mentioned embodiments and various modifications. It is also possible to delete some constituent elements from all the constituent elements shown in the above-mentioned embodiment and each modification.

1: steam chamber 1': steam chamber 2a: Actuating steam 2b: working fluid 3: sealed space 4: Injection part 10: Lower side sheet 10a: 1st lower side sheet surface 10b: Second lower sheet surface 10i: inner periphery 11: Lower sheet body 11a: side edge in the direction of the long side 11b: side edge in the direction of the long side 11c: Short side edge 11d: side edge in short side direction 11o: outer periphery 12: Alignment hole 13: Bottom sheet injection part 15a: lower side sheet retracted part 15b: lower side sheet retracted part 15c: lower side sheet retracted part 15d: lower side sheet retracted part 15i: Retraction of the lower sheet 20: Upper sheet 20a: 1st upper sheet surface 20b: The second upper sheet 20i: inner periphery 21: Upper sheet body 21a: side edge in the direction of the long side 21b: side edge in the direction of the long side 21c: Side edge in the direction of the short side 21d: Side edge in the direction of the short side 21o: outer periphery 22: Alignment hole 23: Upper sheet injection protrusion 25a: upper side sheet retracted part 25b: upper side sheet retracted part 25c: upper side sheet retracted part 25d: Retraction of the upper sheet 25i: Retraction of the upper sheet 30: capillary structure sheet 31: sheet body 31a: 1st Body Plane 31b: 2nd Body Face 31i: inner periphery 32: frame part 32a: side edge in the direction of the long side 32b: side edge in the direction of the long side 32c: side edge in the direction of the short side 32d: side edge in short side direction 32o: outer periphery 33: Coastal Department 34: Penetrating part 35: Alignment hole 36: capillary structure sheet injection protrusion 37: Injection flow path 38a: capillary structure sheet retreat 38b: capillary structure sheet retreat 38c: capillary structure sheet retraction 38d: Retraction part of capillary structure sheet 38i: capillary structure sheet retraction 50:Steam flow path 51: Vapor passage 52: Vapor passage 53: Recessed portion of the lower steam flow path 53a: wall 54: Recessed portion of the upper steam flow path 54a: wall 60: Liquid flow path 61: Main channel groove of liquid flow path 62: wall 63: Convex row of liquid flow path 64: Convex portion of liquid flow path 65: Liquid flow path connection groove 66: Intersection of liquid flow path 70: Loading surface 80: suspension device 81a: 1st arm 81b: 2nd arm 82a: 1st claw 82b: 2nd claw 85: Adsorption device 86: Adsorption pad 90: Through hole 91: Lower sheet penetration part 92: capillary structure sheet penetration part 93: Upper sheet penetration part 94: wall 101: steam chamber 101': steam chamber 103:Sealed space 104: injection part 110: lower side sheet 110a: 1st lower side sheet surface 110b: second lower sheet surface 111a: side edge in the direction of the long side 111b: side edge in the direction of the long side 111c: side edge in short side direction 111d: side edge in short side direction 111o: outer periphery 112: Alignment hole 113: Lower sheet injection protrusion 120: upper side sheet 120a: the first upper sheet surface 120b: the second upper sheet surface 121a: side edge in the direction of the long side 121b: side edge in the direction of the long side 121c: side edge in short side direction 121d: side edge in short side direction 121o: outer periphery 122: Alignment hole 123: upper side sheet injection protrusion 130: capillary structure sheet 131: sheet body 131a: The first body surface 131b: Second Body Plane 132: frame part 132a: side edge in the direction of the long side 132b: side edge in the direction of the long side 132c: side edge in short side direction 132d: side edge in short side direction 132o: outer periphery 133: Coastal Department 134: Penetrating part 135: alignment hole 136: capillary structure sheet injection protrusion 137: injection flow path 150:Steam flow path 151: Vapor passage 152: Vapor passage 153: Recessed portion of the lower steam flow path 153a: wall 154: Recessed portion of the upper side steam flow path 154a: wall 160: Liquid flow path 161: Main channel groove of liquid flow path 162: wall 163: Convex row of liquid flow path 164: Convex portion of liquid flow path 165: Liquid flow path connection groove 166: Intersection of liquid flow path 170: Retreat 171: retreat edge 171a: 1st retreat edge 171b: 2nd retreat edge 171c: Step difference connecting edges 174: The first body surface side setback 175: The second body surface side setback 176: 1st body face side retracted edge 177: Second body face side retracted edge 179: loading surface 180: suspension device 181a: 1st arm 181b: 2nd arm 182a: claw 182b: claw 185: adsorption device 186: Adsorption pad CCR: condensation area CR: condensation area D: device E: electronic equipment H: shell h1: depth hh1: depth Ha: shell member M: metal material sheet Ma: 1st material side Mb: Second material side MM: metal material sheet MMa: 1st material plane MMb: 2nd material side SR: evaporation area SSR: evaporative region t1: Thickness t2: Thickness t3: Thickness t4: Thickness t5: Thickness t6: Thickness t7: Thickness TD: Touch Panel Display tt1: Thickness tt2: Thickness tt3: Thickness tt4: Thickness tt5: Thickness tt6: Thickness tt7: Thickness w1: width w2: width w2': width w3: width w4: width w5: width w6: size w6': size w7: size w7': size w8: size w9: size w9': size w10: size w11: size w11': size w12: size w13: size w13': size w14: size ww1: width ww2: width ww2': width ww3: width ww4: width ww5: width ww6: size ww7: size

Fig. 1 is a schematic perspective view illustrating an electronic device according to a first embodiment. Fig. 2 is a top view showing the steam chamber of the first embodiment. Fig. 3 is a cross-sectional view of line A-A of Fig. 2 . Fig. 4 is a top view of the lower side sheet of Fig. 3 . Fig. 5 is a bottom view of the upper side sheet in Fig. 3 . FIG. 6 is a top view of the capillary structure sheet in FIG. 3 . Fig. 7 is a partially enlarged cross-sectional view of Fig. 3 . Fig. 8 is a partially enlarged bottom view of the liquid flow path shown in Fig. 7 . Fig. 9 is a diagram for explaining a step of preparing a material sheet in the method of manufacturing the steam chamber according to the first embodiment. Fig. 10 is a diagram for explaining an etching step in the method of manufacturing the vapor chamber according to the first embodiment. Fig. 11 is a diagram for explaining a bonding step in the method of manufacturing the steam chamber according to the first embodiment. Fig. 12 is a diagram showing a state in which steam chambers manufactured by the manufacturing method of the steam chamber according to the first embodiment are stacked on top of each other. Fig. 13 is a diagram for explaining the conveying method of the steam chamber of Fig. 12, and is a diagram showing a state in which the claw portion of the suspension device enters the lower sheet retreat portion. Fig. 14 is a diagram for explaining the transport method of the steam chamber of Fig. 12, and is a diagram showing a state in which the steam chamber is suspended by a suspension device. Fig. 15 is a diagram for explaining a method of transporting a general steam chamber. Fig. 16 is a modification example (first modification example) of Fig. 2 . Fig. 17 is a cross-sectional view of line B-B in Fig. 16 . Fig. 18 is a modification example (second modification example) of Fig. 2 . Fig. 19 is a modification example (third modification example) of Fig. 2 . Fig. 20 is a variation example (fourth variation example) of Fig. 2 . Fig. 21 is a variation example (fifth variation example) of Fig. 3 . Fig. 22 is a modification example (sixth modification example) of Fig. 3 . Fig. 23 is a modification example (seventh modification example) of Fig. 3 . Fig. 24 is a modification example (eighth modification example) of Fig. 2 . Fig. 25 is a sectional view taken along line C-C of Fig. 24 . Fig. 26 is a diagram for explaining the transport method of the steam chamber of Fig. 25. Fig. 27 is a variation example (ninth variation example) of Fig. 3 . Fig. 28 is a plan view showing the steam chamber of the second embodiment. Fig. 29 is a sectional view taken along line A'-A' of Fig. 28. Fig. 30 is a diagram for explaining the transport method of the steam chamber of Fig. 29. Fig. 31 is a modification example (fifth modification example) of Fig. 29 . Fig. 32 is a modification example (eighth modification example) of Fig. 28 . Fig. 33 is a sectional view taken along line C'-C' of Fig. 32 . Fig. 34 is a diagram for explaining the transport method of the steam chamber of Fig. 33. Fig. 35 is a top view showing the steam chamber of the third embodiment. Fig. 36 is a sectional view taken along line AA-AA of Fig. 35 . Figure 37 is a top view of the lower side sheet of Figure 36. Figure 38 is a bottom view of the upper side sheet of Figure 36. Figure 39 is a top view of the capillary structure sheet of Figure 36. Fig. 40 is a partially enlarged cross-sectional view of Fig. 36 . Fig. 41 is a partial enlarged bottom view of the liquid flow path shown in Fig. 40. Fig. 42 is a diagram for explaining a step of preparing a material sheet in the method of manufacturing the steam chamber according to the third embodiment. Fig. 43 is a diagram for explaining the etching step in the method of manufacturing the vapor chamber according to the third embodiment. Fig. 44 is a diagram for explaining the bonding step in the method of manufacturing the steam chamber according to the third embodiment. Fig. 45 is a diagram showing a state in which steam chambers manufactured by the manufacturing method of the steam chamber according to the third embodiment are stacked on each other. Fig. 46 is a diagram for explaining the transport method of the steam chamber of Fig. 45, and is a diagram showing a state in which the claw portion of the suspension device is engaged with the retracted portion. Fig. 47 is a diagram for explaining the transport method of the steam chamber of Fig. 45, and is a diagram showing a state in which the steam chamber is suspended by a suspension device. Fig. 48 is a diagram for explaining a method of transporting a general steam chamber. Fig. 49 is a modification example (first modification example) of Fig. 36 . Fig. 50 is a modification example (second modification example) of Fig. 36 . Fig. 51 is a modified example of Fig. 36 (third modified example). Fig. 52 is a modification example (fourth modification example) of Fig. 36 . Fig. 53 is a modified example of Fig. 36 (fifth modified example). Fig. 54 is a modified example of Fig. 35 (sixth modified example). Fig. 55 is a sectional view taken along line BB-BB in Fig. 54 . Fig. 56 is a modified example of Fig. 35 (the seventh modified example). Fig. 57 is a modified example of Fig. 35 (eighth modified example). Fig. 58 is a modified example of Fig. 36 (a tenth modified example).

1: steam chamber

10: Lower side sheet

10a: 1st lower side sheet surface

10b: Second lower sheet surface

11a: side edge in the direction of the long side

11b: side edge in the direction of the long side

15a: lower side sheet retracted part

15b: lower side sheet retracted part

20: Upper sheet

20a: 1st upper sheet surface

20b: The second upper sheet

21a: side edge in the direction of the long side

21b: side edge in the direction of the long side

25a: upper side sheet retracted part

25b: upper side sheet retracted part

30: capillary structure sheet

31: sheet body

31a: 1st Body Plane

31b: 2nd Body Face

32: frame part

32a: side edge in the direction of the long side

32b: side edge in the direction of the long side

33: Coastal Department

50:Steam flow path

51: Vapor passage

52: Vapor passage

53: Recessed portion of the lower steam flow path

54: Recessed portion of the upper steam flow path

60: Liquid flow path

D: device

Ha: shell member

t1: Thickness

t2: Thickness

t3: Thickness

t4: Thickness

Claims (28)

A steam chamber, which is sealed with an operating fluid, and has: A body sheet having a first body surface and a second body surface disposed on the opposite side of the first body surface; a space portion provided on the first body surface of the body sheet; a first sheet that is laminated on the first body surface of the body sheet to cover the space; and The receded portion is retracted to a side closer to the space portion than the outer peripheral edge of the main body sheet or the first sheet in plan view. The steam chamber according to claim 1, wherein the retracted portion includes a first retracted portion disposed on the first sheet and retracted to the side of the space portion compared to the outer periphery of the main body sheet in plan view. Such as the steam chamber of claim 1, wherein The retracted portion includes a retracted portion of the main body sheet that is disposed on the main body sheet and retracts to the side of the space portion from the outer peripheral edge of the first sheet in plan view. The steam chamber according to any one of claims 1 to 3, wherein The first sheet has a pair of first side edges extending in a first direction and a pair of second side edges extending in a second direction perpendicular to the first direction in a plan view, The setbacks are provided on the pair of first side edges and the pair of second side edges, respectively. The steam chamber according to any one of claims 1 to 3, wherein The first sheet has a pair of first side edges extending in a first direction and a pair of second side edges extending in a second direction perpendicular to the first direction in a plan view, The setback portion is disposed on at least one of the pair of first side edges. The steam chamber according to claim 5, wherein the above-mentioned retracted portions are respectively provided on both of the pair of above-mentioned first side edges. The steam chamber according to claim 5 or 6, wherein the above-mentioned retracted portion is provided on a part of the above-mentioned first side edge. The steam chamber according to claim 5, wherein the retracted portion is disposed on one of the pair of first side edges, and is also disposed on one of the pair of second side edges. The steam chamber according to any one of claims 1 to 8, which has a second sheet laminated on the second main surface of the main body sheet, and The space part penetrates from the first body surface to the second body surface, The second sheet covers the space portion on the second main body surface, The retracted part includes a second retracted part provided on the second sheet and retracted to the side of the space part from the outer peripheral edge of the main body sheet in plan view. A steam chamber, which is sealed with an operating fluid, and has: A body sheet having a first body surface and a second body surface disposed on the opposite side of the first body surface; a space portion provided on the first body surface of the body sheet; a first sheet that is laminated on the first body surface of the body sheet to cover the space; a through hole penetrating through the above-mentioned body sheet and the above-mentioned first sheet; and The receded portion retracts to the opposite side of the through hole than the inner peripheral edge of the through hole defining the main body sheet or the first sheet in plan view. The steam chamber according to claim 10, wherein the retracted portion includes a portion disposed on the first sheet and retracted to the opposite side of the through hole than the inner periphery of the through hole defining the body sheet when viewed from above. 1st retreat. The steam chamber according to claim 10 or 11, which has a second sheet laminated on the second main surface of the main body sheet, and The space part penetrates from the first body surface to the second body surface, The second sheet covers the space portion on the second main body surface, The through hole penetrates the body sheet, the first sheet, and the second sheet, The retracted part includes a second retracted part provided on the second sheet and retracted to the opposite side of the through hole than the inner peripheral edge of the through hole defining the main body sheet in plan view. The steam chamber according to claim 10, wherein the retracted portion includes a portion disposed on the body sheet and retracted to the opposite side of the through hole than the inner periphery of the through hole defining the first sheet when viewed from above. Body sheet retracted portion. An electronic machine having: shell; a device housed within said housing; and The vapor chamber according to any one of claims 1 to 13, which is in thermal contact with the above-mentioned device. A body sheet for a steam chamber, which is used to enclose a steam chamber with a working fluid, and has: 1st Body Face; The second body surface is arranged on the opposite side of the above-mentioned first body surface; a space portion provided on the first body surface; the outer periphery when viewed from above; and The receding portion recedes from the outer peripheral edge toward the side of the space portion when viewed in a thickness direction. Such as the body sheet for the steam chamber of claim 15, wherein In the plan view, the setback portion has a setback edge extending from the outer peripheral edge, The outer peripheral edge is located on the side of the second body surface, said setback edge extends from said outer periphery to said first body surface, The retracted edge is concavely bent toward the side of the space portion. Such as the body sheet for the steam chamber of claim 15, wherein In the plan view, the setback portion has a setback edge extending from the outer peripheral edge, The outer peripheral edge is located on the side of the second body surface, said setback edge extends from said outer periphery to said first body surface, The setback edge is inclined with respect to the thickness direction. Such as the body sheet for the steam chamber of claim 15, wherein In the plan view, the setback portion has a setback edge extending from the outer peripheral edge, The outer peripheral edge is located on the side of the second body surface, said setback edge extends from said outer periphery to said first body surface, The retracted edge is convexly curved toward the side opposite to the space portion. Such as the body sheet for the steam chamber of claim 15, wherein In the plan view, the setback portion has a setback edge extending from the outer peripheral edge, The outer peripheral edge is located on the side of the second body surface, The retracted edge includes: a first retracted edge extending from the first body facing the second body surface; a second retracting edge extending from the second body facing the first body surface; and a step difference A connecting edge connecting the first setback edge and the second setback edge. Such as the body sheet for the steam chamber of claim 16, wherein said setback edge extends from said outer periphery to said first body surface through a relay point, The retracted edge is formed to approach the space portion as it approaches the relay point from the outer peripheral edge, and is formed to move away from the space portion as it approaches the first body surface from the relay point. Such as the body sheet for the steam chamber of claim 15, wherein The setback includes: a first setback on the side of the first body, and a setback on the second side of the second body; and The outer peripheral edge is located between the first body surface and the second body surface. The body sheet for the steam chamber according to any one of claims 15 to 21, wherein In the plan view, the outer peripheral edge has a pair of first side edges extending in a first direction and a pair of second side edges extending in a second direction perpendicular to the first direction, and The retracted portion is retracted from the pair of the first side edges and the pair of the second side edges, respectively. The body sheet for the steam chamber according to any one of claims 15 to 21, wherein In the plan view, the outer peripheral edge has a pair of first side edges extending in a first direction and a pair of second side edges extending in a second direction perpendicular to the first direction, and The retracted portion retracts from at least one of the pair of first side edges. Such as the body sheet for the steam chamber of claim 23, wherein The setback part is set back from one of the pair of first side edges, and is set back from one of the pair of second side edges. The body sheet for the steam chamber according to any one of claims 22 to 24, wherein The retracted portion retracts from a portion of the first side edge. A vapor chamber having: The body sheet for the steam chamber according to any one of Claims 15 to 25; and The first sheet is laminated on the first body surface to cover the space. The steam chamber according to claim 26, which has a second sheet laminated on the surface of the second body, The space part penetrates from the first body surface to the second body surface, The second sheet covers the space portion on the second main body surface. An electronic machine having: shell; a device housed within said housing; and The steam chamber as claimed in claim 26 or 27, which is in thermal contact with the above-mentioned device.

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