TW202230934A - Filtering device and manufacturing method of casing thereof - Google Patents

Abstract

A filtering device is provided, comprising a filtering component on one side of a casing integrally formed, an fan component on the other side of the casing, and a guide component arranged between the filtering component and the fan component. The casing is integrally formed to avoid vibration of the casing when the fan component is running, and noise of the filtering device is reduced at the same time.

Description

Filtration equipment and method of making its casing

The present invention relates to a filter device, in particular to a filter device used in a clean room and a method for making its shell.

At present, in semiconductor factories, fan filter groups are equipped to clean the air quality of the environment and ensure the specifications of the clean room.

However, in the conventional fan filter unit, the casing for accommodating the fan unit is formed by screwing or welding a plurality of plates, so when the fan is installed in operation, each of the plates is likely to vibrate, causing the fan to filter The group produces a lot of noise in use.

In addition, since the conventional fan filter group is erected on the frame of the ceiling, when each of the plates vibrates, the fan filter group and the frame are prone to loosen, thus causing the fan filter group and the frame. Unexpected gaps are created between them, resulting in problems with poor air filtration or backflow of exhaust gas into the clean room.

Therefore, how to know the various deficiencies of the technology has become a difficult problem that the industry needs to overcome urgently.

In view of the lack of the above-mentioned prior art, the present invention provides a method for manufacturing a casing of a filter device, which comprises: integrally forming the casing by metal die-casting, so that the casing is an integrally formed groove-like structure, which has opposite first sides and first sides. The two sides and an accommodating space enclosed by the slot-like structure are used to accommodate the fan assembly in the accommodating space.

As in the aforementioned manufacturing method, the metal system is an aluminum alloy.

As in the aforementioned manufacturing method, the second side of the casing is formed with a through hole serving as an inlet port. For example, in the manufacturing process of the casing, a casing is integrally formed first, and then the through hole is formed on the casing, so that the fan assembly can be mounted on the through hole.

The present invention also provides a filtering device, comprising: a casing, which is an integrally formed groove-like structure, which has opposite first sides and second sides and an accommodating space bounded by the groove-like structure; A filter assembly is disposed on the first side of the casing; a fan assembly is accommodated in the accommodating space and fixed on the second side of the casing; and a guide member is accommodated in the accommodating space in the space and fixed on the casing.

In the aforementioned filter device, an opening is formed on the first side of the casing to serve as an outlet port, and the filter element covers the opening.

In the aforementioned filtering device, the second side of the casing is formed with a perforation to serve as an inlet port, and the fan assembly is erected at the perforation.

In the aforementioned filtering device, ribs are formed on the surface of the casing.

In the aforementioned filtering device, a filter screen is disposed on the second side of the casing corresponding to the position of the fan assembly.

In the aforementioned filtering device, the filtering component includes a filtering screen structure.

In the aforementioned filtering equipment, the fan assembly includes a fan body, a support for the fan body to be erected on the casing, and a shaft for pivoting the support to rotate the fan body.

In the aforementioned filter equipment, the guide member is used to cover the cover of the fan assembly.

In the aforementioned filtering equipment, the guide member has a plate body and a retaining wall erected on the side of the plate body, and the retaining wall is formed with a gap to serve as a lead-out port. For example, the top end of the retaining wall is bent outward to form a plate, and each plate is formed with a plurality of third fixing holes for the use of bolts to pass through the third fixing holes and the housing to accommodate A plurality of fourth fixing holes on the bottom surface of the space are used to fix the guide member to the casing.

In the aforementioned filtering equipment, the electronic device for actuating the fan assembly is further included, and is arranged inside or outside the casing.

As can be seen from the above, the manufacturing method of the filter device and the shell of the present invention mainly forms the shell by the shell system in an integrated manner, so as to facilitate the formation of a filter device with a large weight and a large volume, and the fan assembly is operated. When the casing is installed, the vibration of the casing can be avoided. Therefore, compared with the prior art, the present invention can increase the structural strength of the filter device, reduce the vibration and noise problems, and avoid the frame of the ceiling and the filter device. Unexpected gaps between the frame and the filtering device are caused by looseness between the two, which can effectively avoid the problems of poor air filtration or the backflow of exhaust gas into the room.

1: Filter equipment

10: Shell

10': shell parts

10a: First side

10b: Second side

10c: Wall

10d: Bottom surface

100: Opening

101: Perforation

102: Positioning pieces

103: Ribs

105: Handle

106: Fourth fixing hole

107: The first fixing hole

11: Filter components

11a: Filter structure

12: Fan assembly

12a: Fan body

120: Shaft

121: Supports

123: Through hole

124: Bearing seat

125: Positioning piece

126: The first positioning hole

127: Second fixing hole

13: Filter

14: Electronics

15: Guides

150: Board body

150a: First surface

150b: Second surface

151: Retaining Wall

152: export port

153: Mounting holes

154: Plate

155: The third fixing hole

156: Second positioning hole

A: Outside air

A1,A2: Area

f1,f2: Airflow direction

S: accommodating space

V: Vortex

FIG. 1A is a schematic perspective view from the front of the filtering device of the present invention.

FIG. 1B is a schematic diagram showing the rear view of the filtering device of the present invention.

FIG. 1C is a schematic exploded perspective view of the filtering device of the present invention.

FIG. 2A is a partial perspective view of the filtering device of the present invention.

FIG. 2B is a schematic side plan view of FIG. 1A .

FIG. 2B-1 is a perspective view of the housing of FIG. 1A before processing.

FIG. 2B-2 is a schematic perspective view of FIG. 2B-1 from another perspective.

FIG. 2C is a partial enlarged perspective view of the fan assembly of FIG. 1C .

FIG. 2D is a rear perspective view of the fan assembly of FIG. 1C .

FIG. 3A is a schematic perspective view of the guide member of the filtering device of the present invention.

FIG. 3B is a schematic top plan view of FIG. 3A .

FIG. 4 is a rear perspective schematic diagram of another embodiment of the filtering device of the present invention.

The following specific embodiments are used to illustrate the implementation of the present invention, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings in this specification are only used to cooperate with the contents disclosed in the specification for the understanding and reading of those who are familiar with the art, and are not intended to limit the implementation of the present invention. Therefore, it has no technical significance. Any modification of the structure, change of the proportional relationship or adjustment of the size should still fall within the scope of the present invention without affecting the effect and the purpose that the present invention can achieve. The technical content disclosed by the invention can be covered within the scope. At the same time, terms such as "above", "four" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of implementation of the present invention. Changes in their relative relationships or Adjustments, without substantial changes to the technical content, shall be regarded as the scope of the present invention.

1A to 2D are schematic diagrams of the filtering apparatus 1 of the present invention. The filter device 1 includes: a casing 10 , a filter assembly 11 , a fan assembly 12 and a guide member 15 .

The casing 10 is a groove-shaped structure, which is formed by integral molding. In this embodiment, it is integrally formed by aluminum alloy die-casting, with a thickness of about 1.5 mm and a weight of about 13 kg. The structure forms an accommodating space S with a symmetrical outline. The cross-section of this embodiment is square and the area is 1200mm·1200mm. It can also be a circular or other regular polygon accommodating space, which has opposite first sides 10a and 10a. The second side 10b, the first side 10a is located on one side of the accommodating space S, that is, a side close to the filter element 11, and the second side 10b is located on the other side of the accommodating space S, that is, close to One side of the fan assembly 12 .

In this embodiment, the outline of the first side 10a of the casing 10 is symmetrical, the cross section of this embodiment is square, and the area (cross-sectional area) A1 of the first side 10a is larger than that of the second side 10b. Area (cross-sectional area) A2, as shown in Figure 2B. For example, an opening 100 is formed on the first side 10a to serve as an air outlet, and a hole 101 is formed in the middle of the second side 10b to serve as an air inlet. Therefore, the first side 10a of the housing 10 serves as an outlet port for airflow, and the second side 10b of the housing 10 serves as an inlet port for airflow. It should be understood that the shape of the through hole 101 can be designed according to requirements. For example, the shell 10 ′ without the through hole 101 is first fabricated, as shown in FIG. 2B-1 and FIG. 2B-2 , and then the desired shape is formed as required. The perforation 101.

Furthermore, a plurality of ribs 103 are formed on the outside of the casing 10, in the form of a mesh at the bottom of the groove as shown in FIG. 1B, and extending to the side of the groove (in the shape of a grid as shown in FIG. 1B), in addition to increasing the strength. In addition, it can also reduce vibration and noise problems. It should be understood that the ribs 103 can also be disposed inside the casing 10 .

In addition, the second side 10b of the casing 10 is provided with a filter screen 13 corresponding to the position of the fan assembly 12 . For example, the screen 13 is located at the perforation 101 . It should be understood that there are various types and specifications of the filter screen 13, and there is no particular limitation.

The filter element 11 is disposed on the first side 10a of the housing 10 and closely contacts the periphery of the first side 10a.

In the present embodiment, the filter element 11 includes a filter structure 11a, which covers the opening 100, so that the airflow enters the accommodating space S, and is filtered through the filter structure 11a and then enters as in the experiment. room or room within a clean room. It should be understood that there are many types of filter elements 11, and are not limited to the above.

Furthermore, at least one positioning member 102 (a quadrilateral ring strip as shown in FIG. 1C or other suitable structures) may be disposed at the edge or corner of the opening 100 of the casing 10 . For example, the filter element 11 abuts against the inner edge of the positioning member 102 , so that the filter element 11 can be assembled on the first side 10 a of the housing 10 in close contact.

The fan assembly 12 is disposed in the accommodating space S, and is erected at the through hole 101 to be fixed on the second side 10b of the casing 10, as shown in FIG. 2A .

In this embodiment, the fan assembly 12 is in the form of a fan. For example, the fan assembly 12 includes a fan body 12 a , a shaft member 120 for rotating the fan body 12 a , and a support member 121 for mounting the fan body 12 a on the casing 10 . Specifically, the support member 121 is in the shape of a disk, which is fixed on a plurality of (eg six) first fixing holes 107 on the edge of the through hole 101 on the second side 10b of the housing 10 for using bolts (not shown in the figure). ) through a plurality of second fixing holes 127 on the edge of the support member 121 (as shown in FIG. 1C and FIG. 2C ) and the first fixing holes 107 of the casing 10 to fix the fan assembly 12 to the bottom surface of the casing 10 10d, and the support member 121 has a through hole 123, so that the filter screen 13 is covered on the through hole 123, as shown in FIG. 1B and FIG. 2D. It should be understood that there are various types of the fan body 12a, and there is no particular limitation.

Furthermore, as shown in FIG. 1C and FIG. 2A , an electronic device 14 may be disposed in the casing 10 to actuate the shaft member 120 of the fan assembly 12 as required. For example, the electronic device 14 includes a circuit board to electrically control the fan assembly 12 . Alternatively, as shown in FIG. 4 , the electronic device 14 can also be disposed outside the casing 10 .

The guide member 15 is a cover, which is arranged in the accommodating space S and fixed between the filter element 11 and the fan element 12 .

In this embodiment, the guide member 15 is used to cover one side of the fan assembly 12 , as shown in FIG. 2A . For example, the guide member 15 is connected to the shaft member 120 and accommodates the fan body 12 a , so that the guide member 15 is disposed corresponding to the fan assembly 12 . Specifically, a bearing seat 124 is disposed on the shaft member 120 , and the guide member 15 has a plate body 150 engaged with the bearing seat 124 and a plurality of (eg, four) retaining walls erected on the plate body 150 151, and each of the blocking walls 151 is formed with a gap to serve as an outlet port 152 for guiding the airflow of the fan body 12a to flow through the outlet port 152 to the side wall surface 10c of the accommodating space S of the housing 10.

Furthermore, as shown in FIG. 3A and FIG. 3B , the plate body 150 has a first surface 150a and a second surface 150b opposite to each other and a mounting hole 153 connecting the first surface 150a and the second surface 150b, so that the guide The guide member 15 is axially connected to the bearing seat 124 with its mounting hole 153 , and the second surface 150b of its plate body 150 faces the filter element 11 , so that the fan body 12a is located between the first surface 150a and the support member 121 . For example, the bearing seat 124 can be configured with a positioning piece 125 having a plurality of first positioning holes 126 (as shown in FIG. 1C and FIG. 2C ), and a plurality of (eg, four) corresponding first positioning holes are arranged around the mounting hole 153 The second positioning hole 156 of the 126 is used for bolts (not shown) to pass through the first positioning hole 126 and the second positioning hole 156 to fix the plate body 150 on the bearing seat 124 .

In addition, the first surface 150a of the plate body 150 is substantially in the shape of a quadrangular plane, and the retaining walls 151 are in the shape of a streamline, so as to be erected on each side of the first surface 150a of the plate body 150 respectively, and The four lead-out ports 152 of the guide member 15 are located between the first surface 150a of the plate body 150 and the two adjacent blocking walls 151, facing in different directions, as shown in FIG. 3B, so that the fan body 12a The airflow is directed in four different directions. For example, each of the lead-out ports 152 is located at a corner of the first surface 150 a of the board body 150 . Specifically, the outlet ports 152 located on opposite sides are symmetrically distributed, so that the airflow generated by the fan body 12a will flow toward the wall surface 10c of the accommodating space S of the housing 10 , so that the airflow will be deflected after hitting the wall surface 10c A vortex V is formed (as shown in FIG. 2A ), and then flows to the filter element 11 .

In addition, the top end of the retaining wall 151 is bent outward and protrudes with a plate 154, and each plate 154 is provided with a plurality of (eg, four) third fixing holes 155 for using bolts (not shown) The guide member 15 is fixed on the casing 10 by passing through the third fixing hole 155 and the plurality of fourth fixing holes 106 on the bottom surface 10d of the accommodating space S of the casing 10 .

When using the filter device 1, the handle 105 of the filter device 1 (as shown in FIG. 4) can be held by a tool, and the filter device 1 with the first side 10a of the housing 10 is placed on a target frame (illustration omitted), make the filter element 11 face a target space (such as a laboratory or a clean room). Next, the fan body 12a of the fan assembly 12 is activated to generate airflow, so that the outside air A flows toward the filter element 11 (the airflow direction f1 shown in FIG. The through holes 101 of the two sides 10b are sucked into the accommodating space S of the housing 10, and then flow to the filter element 11 through the four outlet ports 152 of the guide member 15 to be discharged after filtering (as shown in FIG. 1A ). The air flow direction shown in f2) to the predetermined area of the target space (such as a laboratory or a clean room), so that the gas discharged from the filter equipment 1 meets the relevant regulations of the laboratory (or clean room) (the filter equipment 1 The filtration efficiency is at least 60%, if it is a rectangular shell, the filtration efficiency of the filter device 1 is at most 50%).

To sum up, the manufacturing method of the filter device 1 and the casing 10 of the present invention mainly uses the casing 10 to form the casing 10 ′ in one piece, so as to facilitate the formation of a filter device with a large weight and volume 1. Ribs 103 are provided to prevent the casing 10 from vibrating when the fan assembly 12 is running, so it can not only increase the structural strength of the filter device 1, but also reduce the problems of vibration and noise, and can To avoid the loosening between the target frame and the filter device 1 to cause an unexpected gap between the target frame and the filter element 11, it can effectively prevent poor air filtration or waste gas from entering the laboratory or clean room the problem.

Furthermore, through the design of the guide member 15, the airflow (including the outside air A) generated by the fan body 12a forms a vortex V, so that the airflow (including the outside air A) generated by the fan body 12a The vortex flow V is continuously advancing and flows to the filter element 11, so the vortex flow V can Smaller foreign objects (such as particles that cannot be filtered by the filter element 11 ) in the flow (including the outside air A) are thrown away (for example, the smaller foreign objects are thrown onto the wall 10c ), and then the larger ones are further filtered through the filter element 11 . foreign body. Therefore, the filter device 1 can effectively improve the cleanliness of the gas discharged from the filter device 1 .

The above embodiments are used to illustrate the principles and effects of the present invention, but not to limit the present invention. Any person skilled in the art can make modifications to the above embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the right of the present invention should be the same as the scope of the patent application described later.

1: Filter equipment

10: Shell

10b: Second side

11: Filter components

11a: Filter structure

A: Outside air

f1,f2: Airflow direction

Claims (16)

A method for manufacturing a casing of a filter device, comprising: die-casting a metal to form the casing integrally, wherein the casing is an integrally formed groove-like structure, which has opposite first sides and second sides and is formed by the casing. An accommodating space enclosed by the trough structure is used for accommodating the fan assembly in the accommodating space. The manufacturing method of the casing according to claim 1, wherein the metal system is an aluminum alloy. The manufacturing method of the casing as claimed in claim 1, wherein the second side of the casing is formed with a through hole serving as an inlet port. The manufacturing method of the casing according to claim 3, wherein the manufacturing process of the casing is to form a casing in one piece, and then form the through hole on the casing, so that the fan assembly can be erected at the through hole. The manufacturing method of the casing according to claim 1, wherein ribs are formed on the surface of the casing. A filter device, comprising: The casing is an integrally formed groove-like structure, which has a first side and a second side opposite to each other and an accommodating space enclosed by the groove-like structure; a filter assembly, which is arranged on the first side of the casing; a fan assembly accommodated in the accommodating space and fixed on the second side of the casing; and The guide piece is accommodated in the accommodating space and fixed on the casing. The filtering apparatus of claim 6, wherein an opening as an outlet port is formed on the first side of the housing, and the filter element covers the opening. The filtering device of claim 6, wherein the second side of the casing is formed with a perforation as an inlet port for the fan assembly to be erected at the perforation. The filtering apparatus of claim 6, wherein the surface of the housing is formed with ribs. The filtering device as claimed in claim 6, wherein a filter screen is disposed on the second side of the casing corresponding to the position of the fan assembly. The filtering device of claim 6, wherein the filtering assembly includes a filtering screen structure. The filtering device of claim 6, wherein the fan assembly comprises a fan body, a support for the fan body to be erected on the casing, and a shaft for pivoting the support to rotate the fan body, and the The fan assembly is fixed on the bottom surface of the casing. The filtering device of claim 6, wherein the guide member is used to cover the cover of the fan assembly. The filtering device according to claim 6, wherein the guide member has a plate body and a retaining wall erected on the side of the plate body, and each of the retaining walls is formed with a gap to serve as a lead-out port, Each of the lead-out ports is located between the first surface of the plate body and the two adjacent retaining walls. The filtering device of claim 14, wherein the top end of the retaining wall is bent outward to form a plate, and each plate is formed with a plurality of third fixing holes for bolts to pass through the first plate. The three fixing holes and the plurality of fourth fixing holes on the bottom surface of the accommodating space of the casing are fixed to the casing. The filtering device as claimed in claim 6 further includes an electronic device for actuating the fan assembly, and is disposed inside or outside the casing.

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