TW202225202A - Coloring resin composition, and photoresist structure, color filter and display device using the same - Google Patents

Coloring resin composition, and photoresist structure, color filter and display device using the same Download PDF

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TW202225202A
TW202225202A TW109146571A TW109146571A TW202225202A TW 202225202 A TW202225202 A TW 202225202A TW 109146571 A TW109146571 A TW 109146571A TW 109146571 A TW109146571 A TW 109146571A TW 202225202 A TW202225202 A TW 202225202A
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resin composition
colored resin
colored
meth
weight
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TW109146571A
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TWI817068B (en
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陳亞柔
忠輝 劉
張鴻偉
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住華科技股份有限公司
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Priority to CN202110666697.6A priority patent/CN113485071A/en
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)

Abstract

A coloring resin composition, and a photoresist, a color filter and a display device using the same are provided. The coloring resin composition includes a colorant, an alkali-soluble resin, a polymerizable unsaturated monomer, a photo initiator and a solvent. The alkali-soluble resin includes a photopolymerizable resin having a weight-average molecular weight (Mw) less than 20000, and the acid value determined by titrating g a potassium hydroxide (KOH) is less than 100 mg KOH/g.

Description

著色樹脂組成物、及應用其之光阻結構、彩色濾光片和顯示裝置Colored resin composition, photoresist structure using the same, color filter and display device

本發明係有關於一種組成物及應用其之光阻結構、彩色濾光片和顯示裝置,且特別係有關於一種著色樹脂組成物及應用其之光阻結構、彩色濾光片和顯示裝置。The present invention relates to a composition and a photoresist structure using the same, a color filter and a display device, and particularly relates to a colored resin composition and a photoresist structure, a color filter and a display device using the same.

顯示裝置已經普遍應用於日常生活中,包括各種可攜式或非便攜式電子產品、工作場所的設備、智慧家電用品、交通工具、或公共用途等,以提供相關資訊和/或互動模式,以提昇使用者在生活和工作上的便利性和趣味性。而光阻在顯示裝置中扮演重要角色。以彩色液晶顯示裝置為例,在彩色液晶顯示裝置中係採用彩色濾光片以呈現彩色的顯示畫面。彩色濾光片包括不同顏色的光阻層,典型的彩色濾光片包括例如紅色、綠色、藍色、和黑色四種顏色的光阻。而彩色濾光片的光學特性對於彩色液晶顯示裝置的光學顯示效果具有關鍵的影響。Display devices have been widely used in daily life, including various portable or non-portable electronic products, workplace equipment, smart home appliances, transportation, or public use, etc., to provide relevant information and/or interactive modes to enhance User convenience and fun in life and work. The photoresist plays an important role in the display device. Taking a color liquid crystal display device as an example, a color filter is used in the color liquid crystal display device to present a color display screen. Color filters include photoresist layers of different colors, and typical color filters include, for example, four colors of photoresist, red, green, blue, and black. The optical properties of the color filter have a key influence on the optical display effect of the color liquid crystal display device.

雖然目前的光阻組成物在形成的方法上普遍來說是適當的,但它們並未完全地滿足所有方面的需求,至今仍對於彩色濾光片中光阻組成物有著各種嘗試及調整。Although the current photoresist compositions are generally suitable in terms of their formation methods, they do not fully satisfy all requirements. There are still various attempts and adjustments for photoresist compositions in color filters.

本發明的一些實施例係揭示一種著色樹脂組成物包括著色劑、鹼可溶性樹脂、聚合性不飽和化合物、光聚合起始劑以及溶劑,其中該鹼可溶性樹脂包含一光固性樹脂,該光固性樹脂的重量平均分子量(Mw)低於20000,且氫氧化鉀(KOH)滴定酸價係小於 100 mg/g。Some embodiments of the present invention disclose a coloring resin composition comprising a colorant, an alkali-soluble resin, a polymerizable unsaturated compound, a photopolymerization initiator and a solvent, wherein the alkali-soluble resin comprises a photocurable resin, the photocurable resin is The weight-average molecular weight (Mw) of the resin is less than 20,000, and the potassium hydroxide (KOH) titration acid value is less than 100 mg/g.

在一些實施例中,光固性樹脂的氫氧化鉀(KOH)滴定酸價係小於 55mg/g。In some embodiments, the potassium hydroxide (KOH) titration acid value of the photocurable resin is less than 55 mg/g.

在一些實施例中,光固性樹脂的重量平均分子量係低於10000。In some embodiments, the weight average molecular weight of the photocurable resin is less than 10,000.

在一些實施例中,光固性樹脂的重量平均分子量介於6000~20000 之間。再者,光固性樹脂包含的-COOH基團例如是佔該光固性樹脂的小於7 %/mol。In some embodiments, the weight average molecular weight of the photocurable resin is between 6,000 and 20,000. Furthermore, the -COOH group contained in the photocurable resin, for example, accounts for less than 7 %/mol of the photocurable resin.

本發明的一些實施例係揭示一種彩色濾光片,包含一光阻層,此光阻層係由如上述的著色樹脂組成物施加於一基板之上方並曝光顯影而形成。Some embodiments of the present invention disclose a color filter comprising a photoresist layer, the photoresist layer is formed by applying the above-mentioned colored resin composition over a substrate and exposing and developing.

本發明的一些實施例係揭示一種顯示裝置,包括上述的彩色濾光片。此光透過層或此光屏蔽及反射層是將上述之著色樹脂組成物施加於一基板之上方並固化而形成。Some embodiments of the present invention disclose a display device including the above-mentioned color filter. The light-transmitting layer or the light-shielding and reflecting layer is formed by applying the above-mentioned colored resin composition on a substrate and curing.

除了常見的液晶顯示器,近年顯示技術發展的主流例如有機發光二極體(OLED)顯示器也日益普及,其他新型態的顯示技術例如極具市場前景的高發光性、壽命長的微發光二極體(Mini LED)及次毫米發光二極體Micro LED也備受關注。隨著各種型態的顯示技術發展,對於光阻特性的需求也增加。以包含一彩色濾光片基板的顯示裝置為例,可以使用著色樹脂組成物作為光阻材料而在一基板上形成彩色濾光片的光阻結構。一般來說,為了配合各種類型的顯示器應用,著色樹脂組成物的成分可加以調整和最佳化,以達到形成各種具有預定特性的彩色濾光片,包括形成廓形完整底切較小且廓形完整的光阻結構,此亦為業界關注且努力的目標之一。然而目前的著色樹脂組成物在基板上形成的光阻結構仍容易有底切較大甚至過深,而產生局部剝落或廓形不完整等缺陷。In addition to common liquid crystal displays, the mainstream of display technology development in recent years, such as organic light-emitting diode (OLED) displays, are also increasingly popular, and other new types of display technologies such as highly luminous, long-life micro-light-emitting diodes with great market prospects Bulk (Mini LED) and sub-millimeter light-emitting diode Micro LED are also attracting attention. With the development of various types of display technologies, the demand for photoresist characteristics also increases. Taking a display device including a color filter substrate as an example, a colored resin composition can be used as a photoresist material to form a color filter photoresist structure on a substrate. In general, for various types of display applications, the composition of the pigmented resin composition can be adjusted and optimized to form a variety of color filters with predetermined characteristics, including the formation of a full profile with smaller undercuts and a smaller profile. Forming a complete photoresist structure is also one of the goals that the industry is concerned about and striving for. However, the photoresist structure formed on the substrate by the current colored resin composition is still prone to have large or even deep undercuts, resulting in defects such as partial peeling or incomplete outline.

另外,一般的光阻材料可包含樹脂材料、聚合性不飽和化合物、光聚合起始劑、溶劑以及其他添加劑(additive),其中樹脂材料是作為黏著劑(Binder),溶劑則是可以溶解其他材料/化合物的稀釋液體,使光阻以液態形式存在,以便於使用。一般的光阻材料因其特性可分為正光阻與負光阻。正光阻本身難溶於顯影液,但受光照射產生反應後,會解離成一種易溶於顯影液(鹼性)的酸性高分子化合物;反之,負光阻(為酸性物質)易溶於顯影液,但受光照射產生反應後,會產生新的高分子鍵結使結構加強而難溶於顯影液。以下係以負光阻作為本揭露之一些實施例的光阻材料做相關說明。In addition, general photoresist materials may include resin materials, polymerizable unsaturated compounds, photopolymerization initiators, solvents and other additives, wherein the resin material acts as a binder and the solvent can dissolve other materials / Diluent liquid of the compound, so that the photoresist exists in liquid form for ease of use. General photoresist materials can be divided into positive photoresist and negative photoresist because of their characteristics. The positive photoresist itself is insoluble in the developing solution, but after being irradiated by light to react, it will dissociate into an acidic polymer compound that is easily soluble in the developing solution (alkaline). , but after being irradiated by light to react, new polymer bonds will be generated to strengthen the structure and be insoluble in the developer. The following description is made by taking negative photoresist as the photoresist material in some embodiments of the present disclosure.

第1A圖為以目前著色樹脂組成物形成之光阻結構的剖面示意圖。第1B圖為以目前著色樹脂組成物形成之光阻結構的上視圖。在光阻製程中,由於曝光強度會隨著光阻厚度遞減而造成接近基板10的光阻結構11的底部的交聯(Crosslink)較為不足。再者,在光阻的顯影過程中,光阻的底部會因為侧蝕效應而使形成的光阻結構具有一定的底切(undercut)深度d 0。目前著色樹脂組成物所製得的光阻結構11,其剖面具有略為凹陷的頂面,且光阻結構11的最邊緣端點與接觸基板10之底面11b具有較大的底切深度d 0,如第1A圖所示。若底切過深,於顯影製程時容易造成光阻剝落(Peeling),例如第1B圖中之圈選處,長條狀的光阻結構11的廓形出現缺角,而使顯示裝置的畫素露光,或者產生亮暗線不均而使得檢測機誤判光阻的缺陷數目過高。 FIG. 1A is a schematic cross-sectional view of a photoresist structure formed with a current colored resin composition. FIG. 1B is a top view of the photoresist structure formed with the current colored resin composition. In the photoresist manufacturing process, the crosslinking (Crosslink) of the bottom of the photoresist structure 11 close to the substrate 10 is insufficient because the exposure intensity decreases with the thickness of the photoresist. Furthermore, during the developing process of the photoresist, the bottom of the photoresist will have a certain undercut depth d 0 due to the undercut effect. At present, the photoresist structure 11 made of the colored resin composition has a slightly concave top surface in cross section, and the most edge point of the photoresist structure 11 and the bottom surface 11b of the contact substrate 10 have a large undercut depth d 0 . As shown in Figure 1A. If the undercut is too deep, photoresist peeling is likely to occur during the developing process. For example, at the circled place in Figure 1B, the profile of the long photoresist structure 11 has a missing corner, which may cause the image of the display device. The number of defects in the photoresist is too high due to the fact that the light is exposed, or the uneven light and dark lines are generated, which makes the detector misjudge the photoresist.

為了滿足以上需要,本揭露內容之實施例係提出著色樹脂組成物,以及應用此著色樹脂組成物所形成的光阻結構、彩色濾光片及顯示裝置。一些實施例中,著色樹脂組成物係塗覆於一顯示裝置的一基板上方,並進行烘烤及光學微影製程(例如曝光和顯影步驟)而固化形成一圖案化光阻層,其中此圖案化光阻層包含多個光阻結構。一些實施例中,前述光阻結構例如是凸狀體。實施例提出的著色樹脂組成物係包含鹼可溶性樹脂,鹼可溶性樹脂所包含的一種或多種的共聚物可使著色樹脂組成物在曝光顯影後,所形成的光阻結構呈現較為完好的一蘑菇狀剖面,且明顯改善傳統著色樹脂組成物形成光阻結構後的底切過深的問題。In order to meet the above needs, the embodiments of the present disclosure propose a colored resin composition, and a photoresist structure, a color filter, and a display device formed by using the colored resin composition. In some embodiments, the colored resin composition is coated over a substrate of a display device, and is cured by baking and photolithography processes (eg, exposure and development steps) to form a patterned photoresist layer, wherein the pattern The photoresist layer includes a plurality of photoresist structures. In some embodiments, the aforementioned photoresist structure is, for example, a convex body. The coloring resin composition proposed in the embodiment includes an alkali-soluble resin, and the one or more copolymers contained in the alkali-soluble resin can make the photoresist structure formed by the coloring resin composition after exposure and development to present a relatively intact mushroom shape. cross section, and significantly improve the problem of undercut too deep after the photoresist structure is formed by the traditional colored resin composition.

以下係提出各種實施例進行詳細說明,實施例僅用以作為範例說明,並不會限縮本揭露欲保護之範圍,本揭露仍可採用其他特徵、元件、方法及參數來加以實施。實施例的提出,僅係用以例示本揭露的技術特徵,並非用以限定本揭露的申請專利範圍。該技術領域中具有通常知識者,將可根據以下說明書的描述,在不脫離本揭露的精神範圍內,作均等的修飾與變化。Various embodiments are provided below for detailed description. The embodiments are only used as examples to illustrate, and do not limit the scope of protection of the present disclosure. The present disclosure can still be implemented by adopting other features, elements, methods and parameters. The embodiments are provided only to illustrate the technical features of the present disclosure, and are not intended to limit the scope of the patent application of the present disclosure. Those with ordinary knowledge in the technical field can make equivalent modifications and changes according to the description of the following specification without departing from the spirit and scope of the present disclosure.

第2A圖為以本揭露一些實施例之著色樹脂組成物形成之光阻結構的剖面示意圖。一些實施例中所提出的著色樹脂組成物係包含鹼可溶性樹脂,鹼可溶性樹脂可以包含的光固性樹脂、或者光固性樹脂和熱固性樹脂之組合,透過分子量和酸價的適當搭配,可使得實施例之著色樹脂組成物在基板20上所形成的光阻層的上方部分(較遠離基板20)和下方部分(較鄰近基板20)具有更少的交聯程度上的差異,進而縮小交聯後組成物上方部分和下方部分的強度差異。因此,實施例之著色樹脂組成物在塗覆於基板20上並進行光學微影製程時, 光阻層的上方部分和下方部分可具有差異不大甚至相近的抗側蝕力,因此顯影完後的光阻結構21係具有良好且完整的形狀,且也沒有傳統著色樹脂組成物形成光阻結構後的底切過深的缺陷。FIG. 2A is a schematic cross-sectional view of a photoresist structure formed with the colored resin composition according to some embodiments of the present disclosure. The coloring resin composition proposed in some embodiments comprises an alkali-soluble resin, and the alkali-soluble resin may contain a photo-curable resin, or a combination of a photo-curable resin and a thermosetting resin. The upper part (farther away from the substrate 20 ) and the lower part (closer to the substrate 20 ) of the photoresist layer formed on the substrate 20 by the colored resin composition of the embodiment have less difference in the degree of crosslinking, thereby reducing the crosslinking degree The difference in strength between the upper and lower parts of the rear composition. Therefore, when the colored resin composition of the embodiment is coated on the substrate 20 and undergoes an optical lithography process, the upper part and the lower part of the photoresist layer may have little difference or even similar undercut resistance, so after developing The photoresist structure 21 has a good and complete shape, and also does not have the defect that the undercut is too deep after the photoresist structure is formed by the conventional colored resin composition.

一些實施例中,如第2A圖所示,在基板20上的光阻結構21係為凸狀體。例如,光阻結構21具有一蘑菇狀剖面,亦即,光阻結構21的頂部較大而下部則略呈內縮。一些實施例中,凸狀的光阻結構21在基板20上的一垂直投影面積係大於光阻結構21之底面21b與基板20的接觸面積。如第2A圖所示,光阻結構21在基板20上具有一垂直投影區域A 1,光阻結構21之底面21b與基板20之間係具有一接觸區域A 2,其中垂直投影區域A 1的面積係大於接觸區域A 2的面積。根據本案一些實施例所提出的著色樹脂組成物,係可使形成的光阻結構21的接觸區域A 2的面積至少在垂直投影區域A 1的面積的94%~100%範圍。 In some embodiments, as shown in FIG. 2A , the photoresist structures 21 on the substrate 20 are convex bodies. For example, the photoresist structure 21 has a mushroom-shaped cross-section, that is, the top of the photoresist structure 21 is larger and the lower part is slightly retracted. In some embodiments, a vertical projected area of the convex photoresist structure 21 on the substrate 20 is larger than the contact area between the bottom surface 21 b of the photoresist structure 21 and the substrate 20 . As shown in FIG. 2A , the photoresist structure 21 has a vertical projection area A 1 on the substrate 20 , and a contact area A 2 is formed between the bottom surface 21 b of the photoresist structure 21 and the substrate 20 , wherein the vertical projection area A 1 has a contact area A 2 . The area is greater than the area of the contact area A2. According to the colored resin composition proposed by some embodiments of the present application, the area of the contact area A2 of the formed photoresist structure 21 can be at least in the range of 94%-100% of the area of the vertical projection area A1.

一些實施例中,如第2A圖所示,為凸狀體的光阻結構21其頂部係具有一弧度。再者,一些實施例中,光阻結構21的剖面自頂部朝向側緣之間亦包含一弧形線段。例如,於凸狀體的一最高頂點(例如第2A圖中所標示之a點)平行於基板20繪製一平行線L1,於凸狀體的邊緣的最遠端點(例如第2A圖中所標示之b點)垂直於基板20繪製一垂直線L2,其中平行線L1及垂直線L2係形成等於90度的一夾角,且此凸狀體的剖面(例如沿著XZ平面)在平行線L1及垂直線L2之間係包含一弧形線段21c。In some embodiments, as shown in FIG. 2A , the top of the photoresist structure 21 which is a convex body has an arc. Furthermore, in some embodiments, the cross-section of the photoresist structure 21 also includes an arc-shaped line segment from the top to the side edges. For example, a parallel line L1 is drawn parallel to the substrate 20 at a highest vertex of the convex body (for example, the point a indicated in FIG. 2A ), and a parallel line L1 is drawn at the most distal point of the edge of the convex body (for example, as shown in FIG. 2A ). The marked point b) draws a vertical line L2 perpendicular to the substrate 20, wherein the parallel line L1 and the vertical line L2 form an included angle equal to 90 degrees, and the cross-section of the convex body (for example, along the XZ plane) is at the parallel line L1 An arc line segment 21c is included between the vertical line L2 and the vertical line L2.

再者,一些實施例中,如第2A圖所示,光阻結構21垂直於基板20的剖面(例如沿著XZ平面)的一最邊緣端點(例如第2A圖中所標示之b點)到凸狀體之底面21b與基板20接觸的位置之間係具有一缺口U C。此缺口U C又可稱為底切(undercut),而此缺口U C在沿著例如X方向上的深度又可稱為底切深度(undercut depth)d。 Furthermore, in some embodiments, as shown in FIG. 2A , the photoresist structure 21 is perpendicular to a cross-section of the substrate 20 (eg, along the XZ plane) at an edge point (eg, point b marked in FIG. 2A ) There is a gap UC between the position where the bottom surface 21b of the convex body contacts with the substrate 20 . The notch UC may also be referred to as an undercut, and the depth of the notch UC along, for example, the X-direction may also be referred to as an undercut depth d.

換句話說,如第2A圖所示,光阻結構21的其中一邊緣的最遠端點(例如第2A圖中所標示之b點)在基板20上的垂直投影與光阻結構21之底面21b接觸基板20的位置(例如第2A圖中所標示之c點)係在例如X方向上具有一距離,此距離則定義為此光阻結構21的底切深度d。In other words, as shown in FIG. 2A , the vertical projection of the farthest point of one of the edges of the photoresist structure 21 (for example, point b marked in FIG. 2A ) on the substrate 20 and the bottom surface of the photoresist structure 21 The position where 21b contacts the substrate 20 (eg, point c marked in FIG. 2A ) has a distance in the X direction, for example, which is defined as the undercut depth d of the photoresist structure 21 .

根據本案一些實施例所提出的著色樹脂組成物,所形成的光阻結構21的底切深度d可以小於約1 μm。因此,相較於如第1A圖所示的光阻結構11,以實施例所提出的著色樹脂組成物在基板20上所形成的光阻結構21(如第2A圖所示),可以有效改善傳統光阻材料形成光阻結構後的底切深度過深的問題。According to the colored resin composition proposed by some embodiments of the present application, the undercut depth d of the photoresist structure 21 formed may be less than about 1 μm. Therefore, compared with the photoresist structure 11 shown in FIG. 1A , the photoresist structure 21 (as shown in FIG. 2A ) formed on the substrate 20 with the colored resin composition proposed in the embodiment can effectively improve the The undercut depth of the traditional photoresist material after the photoresist structure is formed is too deep.

第2B圖為以本揭露一些實施例之著色樹脂組成物形成之光阻結構的上視圖。請同時參照第1B圖和第2B圖。相較於如第1B圖所示的長條狀光阻結構11,以實施例之著色樹脂組成物在基板20上所形成的多個長條狀的光阻結構21(如第2B圖所示),可以呈現完整的廓形,而沒有底切過深、或是局部剝落(Peeling)的缺陷產生、或是亮暗線不均而使得檢測機誤判光阻的缺陷數目過高,影響製程。FIG. 2B is a top view of a photoresist structure formed with the colored resin composition according to some embodiments of the present disclosure. Please refer to both Figure 1B and Figure 2B. Compared with the strip-shaped photoresist structure 11 shown in FIG. 1B , a plurality of strip-shaped photoresist structures 21 (as shown in FIG. 2B ) are formed on the substrate 20 with the colored resin composition of the embodiment. ), can present a complete profile without undercutting too deep, or local peeling (peeling) defects, or uneven light and dark lines, which makes the detector misjudge the number of photoresist defects is too high, affecting the process.

本揭露的一些實施例是關於一種著色樹脂組成物及其應用,包括使用著色樹脂組成物而形成的光阻結構、包含此光阻結構的彩色濾光片以及包含此彩色濾光片的顯示裝置。一些實施例中,著色樹脂組成物包括著色劑、鹼可溶性樹脂、聚合性不飽和化合物、光聚合起始劑以及溶劑,其中該鹼可溶性樹脂包含一光固性樹脂,該光固性樹脂的重量平均分子量(Mw)低於20000,且氫氧化鉀(KOH)滴定酸價係小於 100 mg KOH /g。使用實施例之著色樹脂組成物係具有良好的抗側蝕性,能有改善形成的光阻結構在顯影製程所造成的脫落或亮暗線不均之問題。在一些實施例中,所述鹼可溶性樹脂可包含一種或多種的光固性樹脂、一種或多種的熱固性樹脂、或前述樹脂之組合。Some embodiments of the present disclosure relate to a colored resin composition and applications thereof, including a photoresist structure formed using the colored resin composition, a color filter including the photoresist structure, and a display device including the color filter . In some embodiments, the colored resin composition includes a colorant, an alkali-soluble resin, a polymerizable unsaturated compound, a photopolymerization initiator, and a solvent, wherein the alkali-soluble resin includes a photocurable resin, and the weight of the photocurable resin is The average molecular weight (Mw) is less than 20,000, and the potassium hydroxide (KOH) titration acid value is less than 100 mg KOH/g. The colored resin composition of the embodiment has good resistance to side etching, and can improve the problem of peeling off or uneven light and dark lines caused by the formed photoresist structure during the development process. In some embodiments, the alkali-soluble resin may comprise one or more photosetting resins, one or more thermosetting resins, or a combination of the foregoing resins.

在一些實施例中,以著色樹脂組成物的總重量為100重量%,所述著色劑係佔著色樹脂組成物的約10重量%至約30重量%;所述鹼可溶性樹脂係占所述著色樹脂組成物的約5重量%至約50重量%;所述聚合性不飽和化合物係占所述著色樹脂組成物的約5重量%至約50重量%;所述光聚合起始劑係佔所述著色樹脂組成物的約0.1重量%至約10重量%。在一些實施例中,鹼可溶性樹脂是一種黏著劑(Binder),可使著色樹脂組成物能順利附著於基板表面,並有效提供避免受酸、鹼或電漿侵蝕之阻抗力。In some embodiments, taking the total weight of the colored resin composition as 100 wt %, the colorant accounts for about 10 wt % to about 30 wt % of the colored resin composition; the alkali-soluble resin accounts for the coloring about 5% to about 50% by weight of the resin composition; the polymerizable unsaturated compound accounts for about 5% to about 50% by weight of the colored resin composition; the photopolymerization initiator accounts for all the about 0.1 wt % to about 10 wt % of the colored resin composition. In some embodiments, the alkali-soluble resin is a binder, which enables the colored resin composition to be smoothly attached to the surface of the substrate, and effectively provides resistance against corrosion by acid, alkali or plasma.

在一些實施例中,著色樹脂組成物的著色劑可包含顏料和染料。著色劑的顏料沒有特別的限定,可使用公知的顏料,例如,可舉例如色指數(The Society of Dyers and Colourists出版)中被分類成顏料(pigment)的化合物。根據一些實施例,著色劑的染料沒有特別的限定,只要可符合所希望的彩色濾光片的分光光譜而適宜選出即可。In some embodiments, the colorant of the colored resin composition may include pigments and dyes. The pigment of the colorant is not particularly limited, and known pigments can be used, and examples thereof include compounds classified as pigments in the color index (published by The Society of Dyers and Colourists). According to some embodiments, the dye of the colorant is not particularly limited, as long as it can be appropriately selected in accordance with the desired spectral spectrum of the color filter.

在一些實施例中,實施例中,著色劑包括綠色顏料及/或黃色顏料及/或藍色顏料In some embodiments, the colorants include green pigments and/or yellow pigments and/or blue pigments

在一些實施例中,著色劑的顏料係指包括綠色顏料及/或黃色顏料及/或藍色顏料的分散液。實施例中,綠色顏料及/或黃色顏料及/或藍色顏料的分散液包括丙烯顏料分散劑、顏料分散樹脂與丙二醇甲醚醋酸酯(propylene glycol monomethyl ether acetate)的混合物經珠粒研磨機均勻分散所製得。In some embodiments, the pigment of the colorant refers to a dispersion comprising green pigment and/or yellow pigment and/or blue pigment. In the embodiment, the dispersion liquid of green pigment and/or yellow pigment and/or blue pigment comprises a mixture of propylene pigment dispersant, pigment dispersing resin and propylene glycol monomethyl ether acetate (propylene glycol monomethyl ether acetate) through a bead mill. prepared by dispersion.

一些實施例中,本發明的著色劑中作為綠色顏料,可列舉酞菁顏料、甲亞胺金屬錯合物顏料等,具體而言,例如可使用:C.I.顏料綠1、C.I.顏料綠4、C.I. 顏料綠7、C.I.顏料綠8、C.I.顏料綠36、C.I.顏料綠58等。在一實施例中,本發明的著色劑可包括鹵化金屬酞菁顏料作為顏料。鹵化金屬酞菁顏料可列舉鹵化銅酞菁顏料、鹵化鋅酞菁顏料,特別優選含有C.I.顏料綠58、C.I.顏料綠59等鹵化鋅酞菁顏料。於本發明中,特佳為C.I.顏料綠58。In some embodiments, as green pigments in the coloring agent of the present invention, phthalocyanine pigments, methanimine metal complex pigments, etc. can be cited. Specifically, for example, C.I. Pigment Green 1, C.I. Pigment Green 4, C.I. Pigment Green 4, C.I. Pigment Green 7, C.I. Pigment Green 8, C.I. Pigment Green 36, C.I. Pigment Green 58, etc. In one embodiment, the colorant of the present invention may include a halogenated metal phthalocyanine pigment as a pigment. Halogenated metal phthalocyanine pigments include halogenated copper phthalocyanine pigments and halogenated zinc phthalocyanine pigments, and it is particularly preferable to contain halogenated zinc phthalocyanine pigments such as C.I. Pigment Green 58 and C.I. Pigment Green 59. In the present invention, C.I. Pigment Green 58 is particularly preferred.

一些實施例中,本發明的著色劑可包括黃色顏料,可列舉單偶氮顏料(monoazo pigment)、單偶氮色澱顏料(monoazo lake pigment)、雙偶氮顏料(disazo pigment)、蒽醌顏料(anthraquinone pigment)、單偶氮吡唑啉酮顏料(monoazo pyrazolone pigment)、縮合偶氮顏料(condensed azo pigment)、異吲哚啉顏料(isoindoline pigment)、苯并咪唑酮顏料(benzimidazolone pigment)、甲亞胺金屬錯合物顏料(azomethine metal complex pigment)、喹酞酮顏料(quinophthalone pigment)、喹噁啉顏料(quinoxaline pigment)等,具體而言,例如可使用:C.I.顏料黃1、C.I.顏料黃2、C.I.顏料黃3、C.I.顏料黃4、C.I.顏料黃5、C.I.顏料黃6、C.I.顏料黃10、C.I.顏料黃12、C.I.顏料黃13、C.I.顏料黃14、C.I.顏料黃15、C.I.顏料黃16、C.I.顏料黃17、C.I.顏料黃18、C.I.顏料黃20、C.I.顏料黃24、C.I.顏料黃31、C.I.顏料黃32、C.I.顏料黃34、C.I.顏料黃35、C.I.顏料黃35:1、C.I.顏料黃36、C.I.顏料黃36:1、C.I.顏料黃37、C.I.顏料黃37:1、C.I.顏料黃40、C.I.顏料黃42、C.I.顏料黃43、C.I.顏料黃53、C.I.顏料黃55、C.I.顏料黃60、C.I.顏料黃61、C.I.顏料黃62、C.I.顏料黃63、C.I.顏料黃65、C.I.顏料黃73、C.I.顏料黃74、C.I.顏料黃77、C.I.顏料黃81、C.I.顏料黃83、C.I.顏料黃86、C.I.顏料黃93、C.I.顏料黃94、C.I.顏料黃95、C.I.顏料黃97、C.I.顏料黃98、 C.I.顏料黃100、C.I.顏料黃101、C.I.顏料黃104、C.I.顏料黃106、C.I.顏料黃108、C.I.顏料黃109、C.I.顏料黃110、C.I.顏料黃113、C.I.顏料黃114、C.I.顏料黃115、C.I.顏料黃116、C.I.顏料黃117、C.I.顏料黃118、C.I.顏料黃119、C.I.顏料黃120、C.I.顏料黃123、C.I.顏料黃125、C.I.顏料黃126、C.I.顏料黃127、C.I.顏料黃128、C.I.顏料黃129、C.I.顏料黃137、C.I.顏料黃138、C.I.顏料黃139、C.I.顏料黃147、C.I.顏料黃148、C.I.顏料黃150、C.I.顏料黃151、C.I.顏料黃152、C.I.顏料黃153、C.I.顏料黃154、C.I.顏料黃155、C.I.顏料黃156、C.I.顏料黃161、C.I.顏料黃162、C.I.顏料黃164、C.I.顏料黃166、C.I.顏料黃167、C.I.顏料黃168、C.I.顏料黃169、C.I.顏料黃170、C.I.顏料黃171、C.I.顏料黃172、C.I.顏料黃173、C.I.顏料黃174、C.I.顏料黃175、C.I.顏料黃176、C.I.顏料黃177、C.I.顏料黃179、C.I.顏料黃180、C.I.顏料黃181、C.I.顏料黃182、C.I.顏料黃185、C.I.顏料黃187、C.I.顏料黃188、C.I.顏料黃193、C.I.顏料黃194、C.I.顏料黃199、C.I.顏料黃213、C.I.顏料黃214等黃色顏料。於本發明中,特佳為C.I.顏料黃138。In some embodiments, the colorants of the present invention may include yellow pigments, such as monoazo pigments, monoazo lake pigments, disazo pigments, anthraquinone pigments anthraquinone pigment, monoazo pyrazolone pigment, condensed azo pigment, isoindoline pigment, benzimidazolone pigment, formazan Imine metal complex pigment (azomethine metal complex pigment), quinophthalone pigment (quinophthalone pigment), quinoxaline pigment (quinoxaline pigment) etc. Specifically, for example, can be used: C.I. Pigment Yellow 1, C.I. Pigment Yellow 2 , C.I. Pigment Yellow 3, C.I. Pigment Yellow 4, C.I. Pigment Yellow 5, C.I. Pigment Yellow 6, C.I. Pigment Yellow 10, C.I. Pigment Yellow 12, C.I. Pigment Yellow 13, C.I. Pigment Yellow 14, C.I. Pigment Yellow 15, C.I. , C.I. Pigment Yellow 17, C.I. Pigment Yellow 18, C.I. Pigment Yellow 20, C.I. Pigment Yellow 24, C.I. Pigment Yellow 31, C.I. Pigment Yellow 32, C.I. Pigment Yellow 34, C.I. Pigment Yellow 35, C.I. Pigment Yellow 36, C.I. Pigment Yellow 36:1, C.I. Pigment Yellow 37, C.I. Pigment Yellow 37:1, C.I. Pigment Yellow 40, C.I. Pigment Yellow 42, C.I. Pigment Yellow 43, C.I. Pigment Yellow 53, C.I. Pigment Yellow 55, C.I. Pigment Yellow 60, C.I. Pigment Yellow 61, C.I. Pigment Yellow 62, C.I. Pigment Yellow 63, C.I. Pigment Yellow 65, C.I. Pigment Yellow 73, C.I. Pigment Yellow 74, C.I. Pigment Yellow 77, C.I. Pigment Yellow 81, C.I. Pigment Yellow 83, C.I. Pigment Yellow 86. C.I. Pigment Yellow 93, C.I. Pigment Yellow 94, C.I. Pigment Yellow 95, C.I. Pigment Yellow 97, C.I. Pigment Yellow 98, C.I. Pigment Yellow 100, C.I. Pigment Yellow 101, C.I. Pigment Yellow 104, C.I. Pigment Yellow 106, C.I. Pigment Yellow 108, C.I. Pigment Yellow 109, C.I. Pigment Yellow 110, C.I. Pigment Yellow 113, C.I. Pigment Yellow 114, C.I. Pigment Yellow 115, C.I. Pigment Yellow 116, C.I. Pigment Yellow 117, C.I. Pigment Yellow 118, C.I. Pigment Yellow 119, C.I. 120. C.I. Pigment Yellow 123, C.I. Pigment Yellow 125, C.I. Pigment Yellow 126, C.I. Pigment Yellow 127, C.I. Pigment Yellow 128, C.I. Pigment Yellow 129, C.I. Pigment Yellow 137, C.I. Pigment Yellow 138, C.I. Pigment Yellow 139, C.I. C.I. Pigment Yellow 148, C.I. Pigment Yellow 150, C.I. Pigment Yellow 151, C.I. Pigment Yellow 152, C.I. Pigment Yellow 153, C.I. Pigment Yellow 154, C.I. Pigment Yellow 155, C.I. Pigment Yellow 156, C.I. C.I. Pigment Yellow 164, C.I. Pigment Yellow 166, C.I. Pigment Yellow 167, C.I. Pigment Yellow 168, C.I. Pigment Yellow 169, C.I. Pigment Yellow 170, C.I. Pigment Yellow 171, C.I. Pigment Yellow 172, C.I. C.I. Pigment Yellow 175, C.I. Pigment Yellow 176, C.I. Pigment Yellow 177, C.I. Pigment Yellow 179, C.I. Pigment Yellow 180, C.I. Pigment Yellow 181, C.I. Pigment Yellow 182, C.I. Pigment Yellow 185, C.I. C.I. Pigment Yellow 193, C.I. Pigment Yellow 194, C.I. Pigment Yellow 199, C.I. Pigment Yellow 213, C.I. Pigment Yellow 214 and other yellow pigments. In the present invention, C.I. Pigment Yellow 138 is particularly preferred.

一些實施例中,本發明的著色劑中作為藍色顏料,可列舉C.I.顏料藍15、15:1、15:2、15:3、15:4、15:6、16、22、60、64、80等藍色顔料。或者,一些實施例中,著色劑可包括例如C.I.顏料紫1、19、23、27、29、30、32、37、40、42、50等紫色顔料。In some embodiments, as the blue pigment in the coloring agent of the present invention, C.I. Pigment Blue 15, 15:1, 15:2, 15:3, 15:4, 15:6, 16, 22, 60, 64 can be listed , 80 and other blue pigments. Alternatively, in some embodiments, the colorant may include violet pigments such as C.I. Pigment Violet 1, 19, 23, 27, 29, 30, 32, 37, 40, 42, 50, and the like.

在一些實施例中,顏料可單獨使用或以其中兩種或多於兩種之組合使用以增加色純度。In some embodiments, pigments may be used alone or in a combination of two or more of them to increase color purity.

在一些實施例中,著色劑樹脂組成物中除了綠色顏料、黃色顏料及/或藍色顏料以外,可根據實際需求,具有其他顏色的顏料,或是綠色、黃色、藍色、或其他顏色之染料。In some embodiments, in addition to the green pigment, yellow pigment and/or blue pigment, the colorant resin composition may have other colors of pigments, or green, yellow, blue, or other colors according to actual needs. dye.

再者,在本發明中,顏料及染料可以分別單獨使用或者將兩種以上混合使用。作為其他顏料,可例示黃色顏料、茶色顏料、紫色顏料等。In addition, in this invention, a pigment and a dye can be used individually or in mixture of 2 or more types, respectively. As another pigment, a yellow pigment, a brown pigment, a purple pigment, etc. can be illustrated.

實施例中可使用的染料並無特別限定,能夠使用公知的染料,例如可列舉出溶劑染料、酸性染料、直接染料、媒染染料等。作為染料,例如可列舉出在色彩索引(The Society of Dyers and Colourists出版)中分類為在顏料以外具有色調的物質的化合物、染色筆記(色染社)中記載的公知的染料。此外,根據化學結構,可列舉偶氮染料、菁染料、三苯基甲烷染料、呫噸染料、酞菁染料、萘醌染料、醌亞胺染料、次甲基染料、偶氮甲鹼染料、方酸染料、吖啶染料、苯乙烯基染料、香豆素染料、花青染料、蒽醌染料、偶氮染料、方酸菁染料、二吡咯亞甲基染料、喹啉染料、卟啉染料、喹啉染料和硝基染料等。The dyes that can be used in the examples are not particularly limited, and well-known dyes can be used, and examples thereof include solvent dyes, acid dyes, direct dyes, and mordant dyes. Examples of the dyes include compounds classified as substances having a hue other than pigments in the Color Index (published by The Society of Dyers and Colourists), and known dyes described in Dyeing Notes (Shiyesha). In addition, according to the chemical structure, azo dyes, cyanine dyes, triphenylmethane dyes, xanthene dyes, phthalocyanine dyes, naphthoquinone dyes, quinoneimine dyes, methine dyes, azomethine dyes, square dyes Acid dyes, acridine dyes, styryl dyes, coumarin dyes, cyanine dyes, anthraquinone dyes, azo dyes, squaraine dyes, dipyrromethene dyes, quinoline dyes, porphyrin dyes, quinoline dyes Fluorine dyes and nitro dyes, etc.

在一些實施例中,在著色樹脂組成物中之著色劑,若著色樹脂組成物總重量為100重量份,優選為5至50重量份,更優選為10至25重量份。In some embodiments, the colorant in the colored resin composition is preferably 5 to 50 parts by weight, more preferably 10 to 25 parts by weight, if the total weight of the colored resin composition is 100 parts by weight.

而根據實際需求,著色樹脂組成物中還可含有分散劑,使著色劑在溶液中可均勻地分散。作為上述分散劑,例如可列舉陽離子系、陰離子系、非離子系、兩性、聚酯系、多胺系、丙烯酸系等的表面活性劑等。這些分散劑可單獨使用,也可將2種以上組合使用。作為顏料分散劑,用商品名表示,可列舉KP(信越化學工業股份有限公司製造)、FLOREN(共榮社化學股份有限公司製造)、Solsperse(zeneca股份有限公司製造)、EFKA(CIBA公司製造)、Adisper(Ajinomoto fine-techno股份有限公司製造)、Disperbyk(畢克化學公司製造)等。According to actual needs, the coloring resin composition may also contain a dispersant, so that the colorant can be uniformly dispersed in the solution. As said dispersing agent, cationic, anionic, nonionic, amphoteric, polyester, polyamine, acrylic, etc. surfactants are mentioned, for example. These dispersants may be used alone or in combination of two or more. The pigment dispersant is represented by a trade name, and examples include KP (manufactured by Shin-Etsu Chemical Co., Ltd.), FLOREN (manufactured by Kyōeisha Chemical Co., Ltd.), Solsperse (manufactured by Zeneca Co., Ltd.), and EFKA (manufactured by CIBA Corporation) , Adisper (manufactured by Ajinomoto fine-techno Co., Ltd.), Disperbyk (manufactured by BYK Chemicals), and the like.

在一些實施例中,著色劑樹脂組成物的鹼可溶性樹脂可包含樹脂單體單元以及矽烷基單體單元,其中樹脂單體單元含不飽和雙鍵及/或環氧基。In some embodiments, the alkali-soluble resin of the colorant resin composition may include a resin monomer unit and a silane-based monomer unit, wherein the resin monomer unit contains an unsaturated double bond and/or an epoxy group.

在一些實施例中,著色劑樹脂組成物的鹼可溶性樹脂可以選用側鏈為烷類或環烷類之結構體,且側鏈結構上可能包含酸枝官能基或不飽和鍵。In some embodiments, the alkali-soluble resin of the colorant resin composition may be a structure whose side chain is alkane or cycloalkane, and the side chain structure may contain acid branch functional groups or unsaturated bonds.

在一些實施例中,著色劑樹脂組成物的鹼可溶性樹脂可例如是但不限於具有(甲基)丙烯酸衍生之結構單元。In some embodiments, the alkali-soluble resin of the colorant resin composition may, for example, but not be limited to, have (meth)acrylic acid derived structural units.

在一些實施例中,鹼可溶性樹脂可為具有由單體(m2-1)衍生的構成單元、及由具有碳數2~4的環狀醚結構和烯屬不飽和鍵的單體(以下稱為「單體(m2-2)」)所衍生的構成單元之共聚物。上述共聚物也可以包含其他構成單元。作為其他構成單元,可例如與單體(m2-1)以及單體(m2-2)不同的單體(以下稱為「單體(m2-3)」)所衍生的構成單元、或具有烯屬不飽和鍵的構成單元等。共聚物中,上述構成單元均只含有1種,也可以包含2種以上。In some embodiments, the alkali-soluble resin may have a structural unit derived from a monomer (m2-1) and a monomer (hereinafter referred to as a monomer having a cyclic ether structure having 2 to 4 carbons and an ethylenically unsaturated bond) It is a copolymer of structural units derived from "monomer (m2-2)"). The above-mentioned copolymer may contain other constituent units. As the other structural unit, for example, a structural unit derived from a monomer (hereinafter referred to as "monomer (m2-3)") different from the monomer (m2-1) and the monomer (m2-2), or having an alkene It is a structural unit of unsaturated bonds, etc. In the copolymer, each of the above-mentioned structural units contains only one type, but may contain two or more types.

作為單體(m2-1),可列舉例如(1)丙烯酸、甲基丙烯酸(MAA)、琥珀酸(succinic acid;SA)、巴豆酸、鄰-、間-、對-乙烯基苯甲酸等不飽和單羧酸類;(2)馬來酸、富馬酸、檸康酸、中康酸、衣康酸、3-乙烯基鄰苯二甲酸、4-乙烯基鄰苯二甲酸、3,4,5,6-四氫鄰苯二甲酸、1,2,3,6-四氫鄰苯二甲酸、二甲基四氫鄰苯二甲酸、1,4-環己烯二羧酸等不飽和二羧酸類;(3)甲基-5-降冰片烯-2,3-二羧酸、5-羧基雙環[2.2.1]庚-2-烯、5,6-二羧基雙環[2.2.1]庚-2-烯、5-羧基-5-甲基雙環[2.2.1]庚-2-烯、5-羧基-5-乙基雙環[2.2.1]庚-2-烯、5-羧基-6-甲基雙環[2.2.1]庚-2-烯、5-羧基-6-乙基雙環[2.2.1]庚-2-烯等含有羧基的雙環不飽和化合物類;(4)馬來酸酐、檸康酸酐、衣康酸酐、3-乙烯基鄰苯二甲酸酐、4-乙烯基鄰苯二甲酸酐、3,4,5,6-四氫鄰苯二甲酸酐、1,2,3,6-四氫鄰苯二甲酸酐、二甲基四氫鄰苯二甲酸酐、5,6-二羧基雙環[2.2.1]庚-2-烯酐等不飽和二羧酸類酐;(5)琥珀酸單[2-(甲基)丙烯醯氧基乙基]酯、鄰苯二甲酸單[2-(甲基)丙烯醯氧基乙基]酯等2元以上的多元羧酸的不飽和單[(甲基)丙烯醯氧基烷基]酯類;或(6)α-(羥基甲基)丙烯酸這樣的在同一分子中含有羥基和羧基的不飽和丙烯酸酯類等。Examples of the monomer (m2-1) include (1) acrylic acid, methacrylic acid (MAA), succinic acid (SA), crotonic acid, o-, m-, p-vinyl benzoic acid, etc. Saturated monocarboxylic acids; (2) maleic acid, fumaric acid, citraconic acid, mesaconic acid, itaconic acid, 3-vinylphthalic acid, 4-vinylphthalic acid, 3,4, 5,6-tetrahydrophthalic acid, 1,2,3,6-tetrahydrophthalic acid, dimethyltetrahydrophthalic acid, 1,4-cyclohexene dicarboxylic acid and other unsaturated dicarboxylic acids Carboxylic acids; (3) methyl-5-norbornene-2,3-dicarboxylic acid, 5-carboxybicyclo[2.2.1]hept-2-ene, 5,6-dicarboxybicyclo[2.2.1] Hept-2-ene, 5-carboxy-5-methylbicyclo[2.2.1]hept-2-ene, 5-carboxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-carboxy- Bicyclic unsaturated compounds containing carboxyl groups such as 6-methylbicyclo[2.2.1]hept-2-ene, 5-carboxy-6-ethylbicyclo[2.2.1]hept-2-ene, etc.; (4) Maleate Acid anhydride, citraconic anhydride, itaconic anhydride, 3-vinylphthalic anhydride, 4-vinylphthalic anhydride, 3,4,5,6-tetrahydrophthalic anhydride, 1,2, Unsaturated dicarboxylic acid anhydrides such as 3,6-tetrahydrophthalic anhydride, dimethyltetrahydrophthalic anhydride, 5,6-dicarboxybicyclo[2.2.1]hept-2-ene anhydride; ( 5) Mono-[2-(meth)acryloyloxyethyl] succinate, mono[2-(meth)acrylooxyethyl] phthalate and other polyvalent carboxylic acids of divalent or higher Unsaturated mono[(meth)acrylooxyalkyl]esters; or (6) unsaturated acrylates containing a hydroxyl group and a carboxyl group in the same molecule, such as (6) α-(hydroxymeth)acrylic acid, and the like.

這些中,從共聚反應性的方面、得到的樹脂在鹼水溶液中的溶解性的方面出發,優選丙烯酸(AA)、甲基丙烯酸(MAA)、馬來酸酐等。Among these, acrylic acid (AA), methacrylic acid (MAA), maleic anhydride, etc. are preferable from the viewpoint of copolymerization reactivity and the solubility of the obtained resin in an aqueous alkali solution.

單體(m2-2)指例如具有碳數2至4的環狀醚結構(例如環氧乙烷環、氧雜環丁烷環、或四氫呋喃環)和烯屬不飽和鍵的聚合性化合物。The monomer (m2-2) refers to, for example, a polymerizable compound having a cyclic ether structure having 2 to 4 carbon atoms (eg, an oxirane ring, an oxetane ring, or a tetrahydrofuran ring) and an ethylenically unsaturated bond.

作為單體(m2-2),可列舉例如具有環氧乙基和烯屬不飽和鍵的單體(m2-2-1)(以下有時亦稱為「單體(m2-2-1)」)、具有氧雜環丁基(oxetanyl group)和烯屬不飽和鍵的單體(m2-2-2)(以下有時亦稱為「單體(m2-2-2)」)、或具有四氫呋喃基和烯屬不飽和鍵的單體(m2-2-3)(以下有時亦稱為「單體(m2-2-3)」)等。Examples of the monomer (m2-2) include a monomer (m2-2-1) having an oxirane group and an ethylenically unsaturated bond (hereinafter sometimes referred to as "monomer (m2-2-1)" "), a monomer (m2-2-2) having an oxetanyl group and an ethylenically unsaturated bond (hereinafter sometimes referred to as "monomer (m2-2-2)"), or A monomer (m2-2-3) having a tetrahydrofuran group and an ethylenically unsaturated bond (hereinafter sometimes referred to as "monomer (m2-2-3)") and the like.

作為單體(m2-2-1),可列舉例如具有直鏈狀或支鏈狀的脂肪族不飽和烴被環氧化的結構之單體(m2-2-1a)(以下有時稱為「單體(m2-2-1a)」)、具有脂環式不飽和烴被環氧化的結構的單體(m2-2-1b)(以下有時稱為「單體(m2-2-1b)」)。Examples of the monomer (m2-2-1) include monomers (m2-2-1a) having a structure in which a linear or branched aliphatic unsaturated hydrocarbon is epoxidized (hereinafter sometimes referred to as "" Monomer (m2-2-1a)"), monomer (m2-2-1b) having a structure in which alicyclic unsaturated hydrocarbons are epoxidized (hereinafter sometimes referred to as "monomer (m2-2-1b)" ”).

作為單體(m2-2-1a),優選可為具有環氧丙基(glycidyl group)和烯屬不飽和鍵之單體。單體(m2-2-1a)可列舉(甲基)丙烯酸縮水甘油酯(GMA)、(甲基)丙烯酸β-甲基縮水甘油酯、(甲基)丙烯酸β-乙基縮水甘油酯、縮水甘油基乙烯基醚、鄰-乙烯基苄基縮水甘油基醚、間-乙烯基苄基縮水甘油基醚、對-乙烯基苄基縮水甘油基醚、α-甲基-鄰-乙烯基苄基縮水甘油基醚、α-甲基-間-乙烯基苄基縮水甘油基醚、α-甲基-對-乙烯基苄基縮水甘油基醚、2,3-雙(縮水甘油氧基甲基)苯乙烯、2,4-雙(縮水甘油氧基甲基)苯乙烯、2,5-雙(縮水甘油氧基甲基)苯乙烯、2,6-雙(縮水甘油氧基甲基)苯乙烯、2,3,4-三(縮水甘油氧基甲基)苯乙烯、2,3,5-三(縮水甘油氧基甲基)苯乙烯、2,3,6-三(縮水甘油氧基甲基)苯乙烯、3,4,5-三(縮水甘油氧基甲基)苯乙烯、2,4,6-三(縮水甘油氧基甲基)苯乙烯等。As the monomer (m2-2-1a), a monomer having a glycidyl group and an ethylenically unsaturated bond is preferable. Examples of the monomer (m2-2-1a) include glycidyl (meth)acrylate (GMA), β-methyl glycidyl (meth)acrylate, β-ethyl glycidyl (meth)acrylate, glycidyl (meth)acrylate, and glycidyl (meth)acrylate. Glyceryl vinyl ether, o-vinylbenzyl glycidyl ether, m-vinylbenzyl glycidyl ether, p-vinylbenzyl glycidyl ether, alpha-methyl-o-vinylbenzyl Glycidyl ether, α-methyl-m-vinylbenzyl glycidyl ether, α-methyl-p-vinylbenzyl glycidyl ether, 2,3-bis(glycidoxymethyl) Styrene, 2,4-bis(glycidoxymethyl)styrene, 2,5-bis(glycidoxymethyl)styrene, 2,6-bis(glycidoxymethyl)styrene , 2,3,4-tris(glycidoxymethyl)styrene, 2,3,5-tris(glycidoxymethyl)styrene, 2,3,6-tris(glycidoxymethyl) base) styrene, 3,4,5-tris(glycidoxymethyl)styrene, 2,4,6-tris(glycidoxymethyl)styrene, and the like.

作為單體(m2-2-1b),可列舉乙烯基環己烯一氧化物、1,2-環氧-4-乙烯基環己烷(例如,CELLOXIDE 2000;股份有限公司大賽璐製造)、(甲基)丙烯酸3,4-環氧環己基甲酯(例如,CYCLOMERA400;股份有限公司大賽璐製造)、(甲基)丙烯酸3,4-環氧環己基甲酯(例如,CYCLOMERM100;股份有限公司大賽璐製造)等。Examples of the monomer (m2-2-1b) include vinylcyclohexene monoxide, 1,2-epoxy-4-vinylcyclohexane (for example, CELLOXIDE 2000; manufactured by Daicel Co., Ltd.), 3,4-Epoxycyclohexylmethyl (meth)acrylate (for example, CYCLOMERA400; manufactured by Daicel Co., Ltd.), 3,4-epoxycyclohexylmethyl (meth)acrylate (for example, CYCLOMERA400; Co., Ltd.) Company Daicel manufacturing) and so on.

作為單體(m2-3),可列舉例如(甲基)丙烯酸甲酯(MMA)、(甲基)丙烯酸乙酯、(甲基)丙烯酸正丁酯、(甲基)丙烯酸第二丁酯、(甲基)丙烯酸第三丁酯、2-乙基己基丙烯酸酯(2-Ethylhexyl acrylate;2EHA)、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸十二烷基酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸硬脂酯、(甲基)丙烯酸環戊酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-甲基環己酯、(甲基)丙烯酸三環[5.2.1.0 2,6]癸烷-8-基酯(在該技術領域中,作為慣用名,稱為“(甲基)丙烯酸二環戊酯”。此外,有時稱為“(甲基)丙烯酸三環癸酯”)、(甲基)丙烯酸三環[5.2.1.0 2,6]癸烯-8-基酯(該技術領域中,作為慣用名,稱為“(甲基)丙烯酸二環戊烯酯”)、(甲基)丙烯酸二環戊氧基乙酯、(甲基)丙烯酸異冰片酯、(甲基)丙烯酸金剛烷酯、(甲基)丙烯酸烯丙酯、(甲基)丙烯酸炔丙酯、(甲基)丙烯酸苯酯、(甲基)丙烯酸萘酯、(甲基)丙烯酸苄酯(BZMA)等(甲基)丙烯酸酯類; (甲基)丙烯酸2-羥基乙酯(HEMA)、(甲基)丙烯酸2-羥基丙酯等含有羥基的(甲基)丙烯酸酯類; 馬來酸二乙酯、富馬酸二乙酯、衣康酸二乙酯等二羧酸二酯;雙環[2.2.1]庚-2-烯、5-甲基雙環[2.2.1]庚-2-烯、5-乙基雙環[2.2.1]庚-2-烯、5-羥基雙環[2.2.1]庚-2-烯、5-羥基甲基雙環[2.2.1]庚-2-烯、5-(2’-羥基乙基)雙環[2.2.1]庚-2-烯、5-甲氧基雙環[2.2.1]庚-2-烯、5-乙氧基雙環[2.2.1]庚-2-烯、5,6-二羥基雙環[2.2.1]庚-2-烯、5,6-二(羥基甲基)雙環[2.2.1]庚-2-烯、5,6-二(2’-羥基乙基)雙環[2.2.1]庚-2-烯、5,6-二甲氧基雙環[2.2.1]庚-2-烯、5,6-二乙氧基雙環[2.2.1]庚-2-烯、5-羥基-5-甲基雙環[2.2.1]庚-2-烯、5-羥基-5-乙基雙環[2.2.1]庚-2-烯、5-羥基甲基-5-甲基雙環[2.2.1]庚-2-烯、5-第三-丁氧基羰基雙環[2.2.1]庚-2-烯、5-環己氧基羰基雙環[2.2.1]庚-2-烯、5-苯氧基羰基雙環[2.2.1]庚-2-烯、5,6-雙(第三丁氧基羰基)雙環[2.2.1]庚-2-烯、5,6-雙(環己氧基羰基)雙環[2.2.1]庚-2-烯等雙環不飽和化合物類; N-苯基馬來醯亞胺、N-環己基馬來醯亞胺(CHMI)、N-苄基馬來醯亞胺、N-琥珀醯亞胺基-3-馬來醯亞胺苯甲酸鹽、N-琥珀醯亞胺基-4-馬來醯亞胺丁酸鹽、N-琥珀醯亞胺基-6-馬來醯亞胺己酸鹽、N-琥珀醯亞胺基-3-馬來醯亞胺丙酸鹽、N-(9-吖啶基)馬來醯亞胺等二羰基亞胺衍生物類; 苯乙烯、α-甲基苯乙烯、間-甲基苯乙烯、對-甲基苯乙烯、乙烯基甲苯、對-甲氧基苯乙烯、丙烯腈、甲基丙烯腈、氯乙烯、偏氯乙烯、丙烯醯胺、甲基丙烯醯胺、醋酸乙烯酯、1,3-丁二烯、異戊二烯、2,3-二甲基-1,3-丁二烯等。 Examples of the monomer (m2-3) include methyl (meth)acrylate (MMA), ethyl (meth)acrylate, n-butyl (meth)acrylate, 2-butyl (meth)acrylate, 3-butyl (meth)acrylate, 2-Ethylhexyl acrylate (2-Ethylhexyl acrylate; 2EHA), 2-ethylhexyl (meth)acrylate, dodecyl (meth)acrylate, ( Lauryl meth)acrylate, stearyl (meth)acrylate, cyclopentyl (meth)acrylate, cyclohexyl (meth)acrylate, 2-methylcyclohexyl (meth)acrylate, (meth)acrylate ) tricyclo[5.2.1.0 2,6 ]decan-8-yl acrylate (in this technical field, as a common name, referred to as "dicyclopentyl (meth)acrylate". In addition, sometimes referred to as "(meth)acrylate tricyclodecyl"), (meth)acrylate tricyclo[5.2.1.0 2,6 ]decen-8-yl ester (in this technical field, as a common name, called "(methyl) (meth)dicyclopentenyl acrylate”), dicyclopentyloxyethyl (meth)acrylate, isobornyl (meth)acrylate, adamantyl (meth)acrylate, allyl (meth)acrylate , (meth)acrylates such as propargyl (meth)acrylate, phenyl (meth)acrylate, naphthyl (meth)acrylate, benzyl (meth)acrylate (BZMA); (meth)acrylic acid (meth)acrylates containing hydroxyl groups such as 2-hydroxyethyl ester (HEMA) and 2-hydroxypropyl (meth)acrylate; diethyl maleate, diethyl fumarate, diethyl itaconic acid Dicarboxylic acid diesters such as esters; bicyclo[2.2.1]hept-2-ene, 5-methylbicyclo[2.2.1]hept-2-ene, 5-ethylbicyclo[2.2.1]hept-2- alkene, 5-hydroxybicyclo[2.2.1]hept-2-ene, 5-hydroxymethylbicyclo[2.2.1]hept-2-ene, 5-(2'-hydroxyethyl)bicyclo[2.2.1] Hept-2-ene, 5-methoxybicyclo[2.2.1]hept-2-ene, 5-ethoxybicyclo[2.2.1]hept-2-ene, 5,6-dihydroxybicyclo[2.2. 1] Hept-2-ene, 5,6-bis(hydroxymethyl)bicyclo[2.2.1]hept-2-ene, 5,6-bis(2'-hydroxyethyl)bicyclo[2.2.1]heptane -2-ene, 5,6-dimethoxybicyclo[2.2.1]hept-2-ene, 5,6-diethoxybicyclo[2.2.1]hept-2-ene, 5-hydroxy-5 -Methylbicyclo[2.2.1]hept-2-ene, 5-hydroxy-5-ethylbicyclo[2.2.1]hept-2-ene, 5-hydroxymethyl-5-methylbicyclo[2.2.1 ]hept-2-ene, 5-3-butoxycarbonylbicyclo[2.2.1]hept-2-ene, 5-cyclohexyloxycarbonylbicyclo[2.2.1]hept-2-ene, 5-benzene Oxycarbonylbicyclo[2.2.1]hept-2-ene, 5,6-bis(tert-butoxycarbonyl)bicyclo[2.2.1]hept-2-ene, 5,6-bis(cyclohexyloxy) carbonyl) bis Bicyclic unsaturated compounds such as cyclo[2.2.1]hept-2-ene; N-phenylmaleimide, N-cyclohexylmaleimide (CHMI), N-benzylmaleimide , N-succinimidyl-3-maleimide benzoate, N-succinimidyl-4-maleimide butyrate, N-succinimidyl-6- Maleimide caproate, N-succinimidyl-3-maleimide propionate, N-(9-acridinyl)maleimide and other dicarbonylimine derivatives ; Styrene, α-methylstyrene, m-methylstyrene, p-methylstyrene, vinyltoluene, p-methoxystyrene, acrylonitrile, methacrylonitrile, vinyl chloride, chloride Ethylene, acrylamide, methacrylamide, vinyl acetate, 1,3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene, etc.

這些中,從共聚反應性和耐熱性的方面出發,優選為苯乙烯、乙烯基甲苯、(甲基)丙烯酸2-羥基乙酯、N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-苄基馬來醯亞胺、雙環[2.2.1]庚-2-烯、以及苄基(甲基)丙烯酸酯等。Among these, from the viewpoint of copolymerization reactivity and heat resistance, styrene, vinyltoluene, 2-hydroxyethyl (meth)acrylate, N-phenylmaleimide, and N-cyclohexylmaleimide are preferred. Imide, N-benzylmaleimide, bicyclo[2.2.1]hept-2-ene, and benzyl(meth)acrylate, etc.

具有烯屬不飽和鍵的構成單元,優選可為具有(甲基)丙烯醯基的結構單元。具有這樣的結構單元的第一黏合聚合物(B1),可藉由使含有源自於單體(m2-1)的結構單元和源自於單體(m2-2)的結構單元的聚合物,和具有可與前述構成單元反應之基團以及烯屬不飽和鍵之單體反應而得。The structural unit having an ethylenically unsaturated bond is preferably a structural unit having a (meth)acryloyl group. The first adhesive polymer (B1) having such a structural unit can be obtained by making a polymer containing a structural unit derived from the monomer (m2-1) and a structural unit derived from the monomer (m2-2) , and react with monomers having reactive groups and ethylenically unsaturated bonds with the aforementioned constituent units.

作為具有烯屬不飽和鍵的構成單元,例如可以藉由在(甲基)丙烯酸單元中加成縮水甘油(甲基)丙烯酸酯而得到的構成單元、藉由在馬來酸酐單元中加成2-羥乙基(甲基)丙烯酸酯而得到的構成單元、藉由在縮水甘油(甲基)丙烯酸酯單元中加成(甲基)丙烯酸而得到的構成單元、以及在具有羥基的構成單元中加成羧酸酐而得到的構成單元等。As a constitutional unit having an ethylenically unsaturated bond, for example, a constitutional unit obtained by adding glycidyl (meth)acrylate to a (meth)acrylic acid unit, or by adding 2 to a maleic anhydride unit can be used. - A structural unit obtained by hydroxyethyl (meth)acrylate, a structural unit obtained by adding (meth)acrylic acid to a glycidyl (meth)acrylate unit, and in a structural unit having a hydroxyl group A structural unit obtained by adding a carboxylic acid anhydride, etc.

在一些實施例中,鹼可溶性樹脂係包含一光固性樹脂,此光固性樹脂的重量平均分子量(Mw)低於20000,且氫氧化鉀(KOH)滴定酸價係小於 100 mg KOH/g。氫氧化鉀(KOH)滴定酸價的單位於文中亦可簡單表示為mg/g。在一些實施例中,此光固性樹脂的氫氧化鉀(KOH)滴定酸價係小於 55 mg/g。在一實施例中,鹼可溶性樹脂所包含的光固性樹脂可如下述式(I)所示結構之共聚物(說明如後)。In some embodiments, the alkali-soluble resin comprises a photocurable resin, the photocurable resin has a weight average molecular weight (Mw) of less than 20,000 and a potassium hydroxide (KOH) titration acid value of less than 100 mg KOH/g . The unit of potassium hydroxide (KOH) titration acid value can also be simply expressed as mg/g in the text. In some embodiments, the potassium hydroxide (KOH) titratable acid value of the photocurable resin is less than 55 mg/g. In one embodiment, the photocurable resin contained in the alkali-soluble resin may be a copolymer of the structure represented by the following formula (I) (explained below).

在一些實施例中,著色劑樹脂組成物的鹼可溶性樹脂可例如包含具有如下式(I)所示結構之共聚物:

Figure 02_image001
式(I) In some embodiments, the alkali-soluble resin of the colorant resin composition may, for example, comprise a copolymer having a structure represented by the following formula (I):
Figure 02_image001
Formula (I)

其中,m、e、f、g為正整數。Among them, m, e, f, and g are positive integers.

在一示例中,若設定整條分子鏈為100%,m佔比高分子鏈1~10%、e佔比高分子鏈20~70%、f佔比高分子鏈20~70%、g佔比高分子鏈1~35%。In an example, if the entire molecular chain is set to be 100%, m accounts for 1-10% of the polymer chain, e accounts for 20-70% of the polymer chain, f accounts for 20-70% of the polymer chain, and g accounts for 20-70% of the polymer chain. It is 1~35% higher than the polymer chain.

在一些實施例中,鹼可溶性樹脂所包含的如上述式(I)所示結構之共聚物係為(甲基)丙烯酸二環戊酯(TCDMA)/(甲基)丙烯酸甲酯(MMA)/(甲基)丙烯酸縮水甘油酯(GMA)/(甲基)丙烯酸(MAA)之共聚物的光固性樹脂。在此,使用括號來敘述的化合物,意味著包含括號內文字存在與不存在的情況,例如前述的(甲基)丙烯酸二環戊酯,包含丙烯酸二環戊酯、和甲基丙烯酸二環戊酯的情形。In some embodiments, the copolymer of the structure represented by the above formula (I) contained in the alkali-soluble resin is dicyclopentyl (meth)acrylate (TCDMA)/methyl (meth)acrylate (MMA)/ A photocurable resin of a copolymer of glycidyl (meth)acrylate (GMA)/(meth)acrylic acid (MAA). Here, compounds described in parentheses mean the presence or absence of the words in parentheses, such as the aforementioned dicyclopentyl (meth)acrylate, including dicyclopentyl acrylate, and dicyclopentyl methacrylate the case of esters.

在一些實施例中,如式(I)所示結構之共聚物的主鏈係包含:(甲基)丙烯酸二環戊酯(TCDMA),係佔前述主鏈的3 %/mol;(甲基)丙烯酸甲酯(MMA),係佔前述主鏈的70%/mol至27 %/mol;以及(甲基)丙烯酸縮水甘油酯(GMA),係佔前述主鏈的27%/mol至70 %/mol。In some embodiments, the main chain of the copolymer of the structure shown in formula (I) comprises: (meth)dicyclopentyl acrylate (TCDMA), which accounts for 3%/mol of the aforementioned main chain; (methyl) ) methyl acrylate (MMA), which accounts for 70%/mol to 27%/mol of the aforementioned main chain; and glycidyl (meth)acrylate (GMA), which accounts for 27%/mol to 70% of the aforementioned main chain /mol.

根據本揭露的一些實施例中,鹼可溶性樹脂所包含的光固性樹脂例如製備例3~8所製得的共聚物。According to some embodiments of the present disclosure, the photocurable resin included in the alkali-soluble resin is, for example, the copolymers prepared in Preparation Examples 3-8.

再者,在一些實施例中,鹼可溶性樹脂所包含的光固性樹脂,例如是但不限於如上述式(I)所示結構,其重量平均分子量低於20000,且氫氧化鉀(KOH)滴定酸價小於 55 mg/g為佳;而重量平均分子量低於10000,且氫氧化鉀(KOH)滴定酸價小於100 mg/g次之。Furthermore, in some embodiments, the photocurable resin included in the alkali-soluble resin, such as but not limited to the structure shown in the above formula (I), has a weight-average molecular weight of less than 20,000, and potassium hydroxide (KOH) The titration acid value is preferably less than 55 mg/g; the weight average molecular weight is less than 10,000, and the titration acid value of potassium hydroxide (KOH) is less than 100 mg/g.

另外,根據一些比較例,若鹼可溶性樹脂所包含的光固性樹脂,例如是但不限於如上述式(I)所示結構,其重量平均分子量大於10000且氫氧化鉀(KOH)滴定酸價大於 55 mg/g時,則形成的光阻結構會有底切深度較深,並可能有局部剝落(Peeling)或是亮暗線不均的缺陷產生。In addition, according to some comparative examples, if the photocurable resin contained in the alkali-soluble resin, such as but not limited to the structure shown in the above formula (I), has a weight-average molecular weight greater than 10,000 and a potassium hydroxide (KOH) titration acid value When it is greater than 55 mg/g, the photoresist structure formed will have a deep undercut depth, and may have local peeling (Peeling) or uneven bright and dark lines.

在一些實施例中,鹼可溶性樹脂所包含的光固性樹脂,例如是但不限於如上述式(I)所示結構,其重量平均分子量低於10000,且此光固性樹脂所包含的-COOH基團係佔光固性樹脂的大約3.5 %/mol~大約31.2 %/mol。在一些其他的實施例中,光固性樹脂的重量平均分子量低於10000,此光固性樹脂所包含的-COOH基團係佔光固性樹脂的大約3.5 %/mol~大約10 %/mol。In some embodiments, the photocurable resin contained in the alkali-soluble resin, such as but not limited to the structure shown in the above formula (I), has a weight average molecular weight of less than 10,000, and the photocurable resin contains- The COOH group accounts for about 3.5%/mol to about 31.2%/mol of the photocurable resin. In some other embodiments, the weight average molecular weight of the photocurable resin is less than 10,000, and the -COOH group contained in the photocurable resin accounts for about 3.5%/mol to about 10%/mol of the photocurable resin. .

在一些實施例中,鹼可溶性樹脂所包含的光固性樹脂,例如是但不限於如上述式(I)所示結構,其重量平均分子量係介於6000~20000之間,且光固性樹脂包含的-COOH基團係佔光固性樹脂的小於大約7 %/mol。In some embodiments, the photocurable resin included in the alkali-soluble resin, such as but not limited to the structure shown in the above formula (I), has a weight average molecular weight between 6,000 and 20,000, and the photocurable resin is The -COOH groups included are less than about 7 %/mol of the photocurable resin.

在一些實施例中,鹼可溶性樹脂所包含的光固性樹脂相對於著色樹脂組成物的聚合性不飽和化合物的單體的比例(Binder / Monomer Ratio)係為大約6.7%~大約300%。在一些其他的實施例中,前述光固性樹脂相對於前述聚合性不飽和化合物的單體的比例係為大約6.7%~大約166.7%。In some embodiments, the ratio (Binder/Monomer Ratio) of the photocurable resin contained in the alkali-soluble resin to the monomer of the polymerizable unsaturated compound in the colored resin composition is about 6.7% to about 300%. In some other embodiments, the ratio of the aforementioned photocurable resin to the aforementioned monomers of the polymerizable unsaturated compound is about 6.7% to about 166.7%.

再者,根據本揭露一些實施例中,著色樹脂組成物的鹼可溶性樹脂除了光固性樹脂,可更包含一熱固性樹脂。在一些實施例中,前述熱固性樹脂可包括EDCPA/甲基丙烯酸(MAA)之共聚物,其中商品名「E-DCPA」(大賽璐股份有限公司製造)為含有丙烯酸3,4-環氧三環[5.2.1.0 2,6]癸烷-8-基酯與丙烯酸3,4-環氧三環[5.2.1.0 2,6]癸烷-9-基酯以莫耳比計為50:50之混合物。再者,一些實施例中,前述熱固性樹脂包含如後述製備例9~11所製得之樹脂I-1(如化學式1-4所示)、樹脂I-2(如化學式1-5所示)、樹脂J-1(如化學式1-4所示)、樹脂J-2(如化學式1-5所示)、樹脂K-1(如化學式1-4所示)、樹脂K-2(如化學式1-5所示)的其中之一者、或前述樹脂之組合。表三亦列出樹脂I、J、K的組成比例、分子量與-COOH基團的占比。 Furthermore, according to some embodiments of the present disclosure, the alkali-soluble resin of the colored resin composition may further include a thermosetting resin in addition to the photocurable resin. In some embodiments, the aforementioned thermosetting resin may include a copolymer of EDCPA/methacrylic acid (MAA), wherein the trade name "E-DCPA" (manufactured by Daicel Co., Ltd.) is a 3,4-epoxy tricyclic acrylic acid containing [5.2.1.0 2,6 ] Decan-8-yl ester and 3,4-epoxy tricyclo[5.2.1.0 2,6 ] Decan-9-yl acrylate in a molar ratio of 50:50 mixture. Furthermore, in some embodiments, the aforementioned thermosetting resin comprises resin I-1 (as shown in chemical formula 1-4) and resin I-2 (as shown in chemical formula 1-5) prepared in the following preparation examples 9-11. , resin J-1 (as shown in chemical formula 1-4), resin J-2 (as shown in chemical formula 1-5), resin K-1 (as shown in chemical formula 1-4), resin K-2 (as shown in chemical formula 1-5), or a combination of the aforementioned resins. Table 3 also lists the composition ratio of resins I, J and K, the molecular weight and the ratio of -COOH groups.

在一些實施例中,鹼可溶性樹脂所包含的熱固性樹脂的重量平均分子量介於大約5000~大約20000,氫氧化鉀(KOH)滴定酸價係介於大約100 mg/g ~大約120 mg/g。在一些其他實施例中,鹼可溶性樹脂所包含的熱固性樹脂,其重量平均分子量可以低於大約10000。In some embodiments, the weight average molecular weight of the thermosetting resin included in the alkali-soluble resin is between about 5,000 and about 20,000, and the potassium hydroxide (KOH) titration acid value is between about 100 mg/g and about 120 mg/g. In some other embodiments, the alkali-soluble resin comprises a thermosetting resin having a weight average molecular weight of less than about 10,000.

在一些實施例中,鹼可溶性樹脂所包含的熱固性樹脂係佔著色樹脂組成物重量百分比的大約8.9 %~大約10%,而鹼可溶性樹脂所包含的光固性樹脂係佔著色組成物重量百分比的大約1.5%~大約17.4%。在一些其他實施例中,鹼可溶性樹脂所包含的光固性樹脂係佔著色組成物重量百分比的大約1.5%~大約14.6%,且氫氧化鉀(KOH)滴定酸價小於大約50 mg/g。In some embodiments, the thermosetting resin contained in the alkali-soluble resin accounts for about 8.9% to about 10% by weight of the coloring resin composition, and the photocurable resin contained in the alkali-soluble resin accounts for the coloring composition. About 1.5% to about 17.4%. In some other embodiments, the photocurable resin contained in the alkali-soluble resin accounts for about 1.5% to about 14.6% by weight of the coloring composition, and the potassium hydroxide (KOH) titration acid value is less than about 50 mg/g.

再者,在一些實施例中,鹼可溶性樹脂所包含的熱固性樹脂,其中包含的-COOH基團係佔熱固性樹脂的大約18mol%,或者小於大約18mol%。在一實施例中,鹼可溶性樹脂包含熱固性樹脂和光固性樹脂,其中熱固性樹脂所包含的-COOH基團係佔熱固性樹脂的大約18mol%,且光固性樹脂的重量平均分子量係小於10000。Furthermore, in some embodiments, the thermosetting resin contained in the alkali-soluble resin contains -COOH groups accounting for about 18 mol % of the thermosetting resin, or less than about 18 mol %. In one embodiment, the alkali-soluble resin comprises a thermosetting resin and a photosetting resin, wherein the -COOH group contained in the thermosetting resin accounts for about 18 mol % of the thermosetting resin, and the weight average molecular weight of the photosetting resin is less than 10,000.

根據一些實施例,著色樹脂組成物的聚合性不飽和化合物可以是藉由光聚合起始劑產生的活性自由基及/或酸而聚合的單體,例如是但不限於具有可聚合性的乙烯性不飽和鍵,像是(甲基)丙烯酸酯化合物。在此,使用括號來敘述的化合物,意味著包含括號內文字存在與不存在的情況,例如前述的(甲基)丙烯酸酯化合物,包含丙烯酸酯化合物、和甲基丙烯酸酯化合物的情形。聚合性不飽和化合物又可稱作聚合性化合物。According to some embodiments, the polymerizable unsaturated compound of the colored resin composition may be a monomer polymerized by reactive radicals and/or acids generated by a photopolymerization initiator, such as, but not limited to, polymerizable ethylene. Sexually unsaturated bonds, such as (meth)acrylate compounds. Here, the compound described using parentheses means including the presence or absence of the characters in the parentheses, such as the aforementioned (meth)acrylate compound, the case of including an acrylate compound, and a methacrylate compound. The polymerizable unsaturated compound may also be referred to as a polymerizable compound.

在一些實施例中,聚合性不飽和化合物例如是光聚合單體,其可包括但不受限於選自於由下列選項所組成的群組中的至少一者:丙烯酸壬基苯基卡必醇酯、丙烯酸2-羥基-3-苯氧基丙酯、丙烯酸2-乙基己基卡必醇酯、丙烯酸2-羥基乙酯、N-乙烯基吡咯酮等具有一個乙烯性不飽和鍵的聚合性化合物;二(甲基)丙烯酸1,6-己烷二醇酯、二(甲基)丙烯酸乙二醇酯、二(甲基)丙烯酸新戊二醇酯、二(甲基)丙烯酸三乙二醇酯、雙酚A的雙(丙烯醯氧基乙基)醚、二(甲基)丙烯酸3-甲基戊烷二醇酯等具有二個乙烯性不飽和鍵的聚合性化合物;以及三(甲基)丙烯酸三羥甲基丙烷酯、三(甲基)丙烯酸季戊四醇酯、四(甲基)丙烯酸季戊四醇酯、五(甲基)丙烯酸二季戊四醇酯、六(甲基)丙烯酸二季戊四醇酯、八(甲基)丙烯酸三季戊四醇酯、三季戊四醇七(甲基)丙烯酸酯、三季戊四醇八(甲基)丙烯酸酯、十(甲基)丙烯酸四季戊四醇酯、九(甲基)丙烯酸四季戊四醇酯、三(2-(甲基)丙烯醯氧基乙基)異氰酸酯、四(甲基)丙烯酸乙二醇改性季戊四醇酯、六(甲基)丙烯酸乙二醇改性二季戊四醇酯、四(甲基)丙烯酸丙二醇改性季戊四醇酯、六(甲基)丙烯酸丙二醇改性二季戊四醇酯、四(甲基)丙烯酸己內酯改性季戊四醇酯、六(甲基)丙烯酸己內酯改性二季戊四醇酯等具有三個乙烯性不飽和鍵的聚合性化合物。一些實施例中,聚合性不飽和化合物例如是具有乙烯性不飽和雙鍵之化合物。一些實施例中,聚合性不飽和化合物例如是具有三個乙烯性不飽和雙鍵之聚合性化合物。In some embodiments, the polymerizable unsaturated compound is, for example, a photopolymerizable monomer, which may include, but is not limited to, at least one selected from the group consisting of: Nonylphenyl carboxylate acrylate Polymerization of alcohol ester, 2-hydroxy-3-phenoxypropyl acrylate, 2-ethylhexyl carbitol acrylate, 2-hydroxyethyl acrylate, N-vinylpyrrolidone, etc. with one ethylenically unsaturated bond Compounds; 1,6-hexanediol di(meth)acrylate, ethylene glycol di(meth)acrylate, neopentyl glycol di(meth)acrylate, triethyl di(meth)acrylate Polymerizable compounds having two ethylenically unsaturated bonds, such as glycol esters, bis(acrylooxyethyl) ether of bisphenol A, and 3-methylpentanediol di(meth)acrylate; and three Trimethylolpropane (meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol penta(meth)acrylate, dipentaerythritol hexa(meth)acrylate, Tripentaerythritol octa (meth)acrylate, tripentaerythritol hepta (meth)acrylate, tripentaerythritol octa (meth)acrylate, pentaerythritol ten (meth)acrylate, pentaerythritol nona (meth)acrylate, Tris(2-(meth)acryloyloxyethyl)isocyanate, ethylene glycol tetra(meth)acrylate-modified pentaerythritol, ethylene glycol hexa(meth)acrylate-modified dipentaerythritol, tetra(methyl)acrylate ) Propylene glycol modified pentaerythritol acrylate, propylene glycol hexa(meth)acrylate modified dipentaerythritol, tetra(meth)acrylate caprolactone modified pentaerythritol, hexa(meth)acrylate modified dipentaerythritol, etc. A polymerizable compound having three ethylenically unsaturated bonds. In some embodiments, the polymerizable unsaturated compound is, for example, a compound having an ethylenically unsaturated double bond. In some embodiments, the polymerizable unsaturated compound is, for example, a polymerizable compound having three ethylenically unsaturated double bonds.

聚合性不飽和化合物的市售商品可例舉如KAYARAD(登録商標)DPHA(日本化薬社)及商品名「A-TMM-3LM-N」(季戊四醇三丙烯酸酯;新中村化學工業股份有限公司)。Commercially available products of the polymerizable unsaturated compound include KAYARAD (registered trademark) DPHA (Nihon Kayaku Co., Ltd.) and trade name "A-TMM-3LM-N" (pentaerythritol triacrylate; Shin-Nakamura Chemical Industry Co., Ltd. ).

在一些實施例中,聚合性不飽和化合物的重量平均分子量例如是150以上且2,900以下。在一些實施例中,聚合性不飽和化合物的重量平均分子量例如是250以上且1,500以下。In some embodiments, the weight average molecular weight of the polymerizable unsaturated compound is, for example, 150 or more and 2,900 or less. In some embodiments, the weight average molecular weight of the polymerizable unsaturated compound is, for example, 250 or more and 1,500 or less.

一些實施例中,聚合性不飽和化合物可佔著色樹脂組成物的約1~10wt%。In some embodiments, the polymerizable unsaturated compound may account for about 1-10 wt % of the colored resin composition.

根據一些實施例,光聚合起始劑可為任何能夠藉由光的作用而產生活性自由基、酸等,進而使得光聚合反應開始的化合物,並沒有特別限定。According to some embodiments, the photopolymerization initiator can be any compound that can generate active radicals, acids, etc. under the action of light, thereby starting the photopolymerization reaction, and is not particularly limited.

在一些實施例中,著色樹脂組成物的光聚合起始劑可包含但不受限於選自於由下列選項所組成的群組中的至少一者:O-醯基肟(O-acyloxime)化合物、烷基苯基酮化合物、雙咪唑化合物、三嗪化合物、醯基膦氧化物(acyl phosphine oxide)、安息香化合物、二苯基酮化合物、醌系化合物、10-丁基-2-氯吖啶酮、苄基、苯基甲醯甲酸甲酯、苯乙酮(acetophenone)、和環戊二烯鈦(titanocene)化合物。In some embodiments, the photopolymerization initiator of the colored resin composition may include, but is not limited to, at least one selected from the group consisting of: O-acyloxime (O-acyloxime) Compounds, alkyl phenyl ketone compounds, bisimidazole compounds, triazine compounds, acyl phosphine oxide, benzoin compounds, benzophenone compounds, quinone compounds, 10-butyl-2-chloroacridine pyridone, benzyl, methyl phenylformate, acetophenone, and titanium cyclopentadienyl compounds.

在一些實施例中,光聚合起始劑較佳地包含選自於由下列選項所組成的群組中的至少一者:O-醯基肟化合物、烷基苯基酮化合物、雙咪唑化合物、苯乙酮化合物、三嗪化合物、醯基氧化膦化合物、和聯咪唑化合物。舉例來說,在以O-醯基肟化合物作為光聚合起始劑(D)的情況,可使用Irgacure® OXE-01(BASF公司)、Irgacure® OXE-02(BASF公司)、N-1919(ADEKA公司)等市售商品。In some embodiments, the photopolymerization initiator preferably includes at least one selected from the group consisting of: O-acyl oxime compounds, alkyl phenyl ketone compounds, bisimidazole compounds, Acetophenone compounds, triazine compounds, acylphosphine oxide compounds, and biimidazole compounds. For example, in the case of using an O-acyl oxime compound as the photopolymerization initiator (D), Irgacure® OXE-01 (BASF Corporation), Irgacure® OXE-02 (BASF Corporation), N-1919 ( ADEKA Corporation) and other commercially available products.

上述O-醯基肟化合物是具有由式(d1)表示的部分結構的化合物。以下,*表示鍵合端。The above-mentioned O-acyl oxime compound is a compound having a partial structure represented by formula (d1). Hereinafter, * represents a bonding end.

Figure 02_image004
Figure 02_image004

作為上述O-醯基肟化合物,可列舉例如N-苯甲醯氧基-1-(4-苯基硫烷基苯基)丁烷-1-酮-2-亞胺、N-苯甲醯氧基-1-(4-苯基硫烷基苯基)辛烷-1-酮-2-亞胺、N-苯甲醯氧基-1-(4-苯基硫烷基苯基)-3-環戊基丙烷-1-酮-2-亞胺、N-乙醯氧基-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]乙烷-1-亞胺、N-乙醯氧基-1-[9-乙基-6-{2-甲基-4-(3,3-二甲基-2,4-二氧雜環戊基甲氧基)苯甲醯基}-9H-咔唑-3-基]乙烷-1-亞胺、N-乙醯氧基-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-3-環戊基丙烷-1-亞胺、N-苯甲醯氧基-1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-3-環戊基丙烷-1-酮-2-亞胺等。可使用IRGACURE OXE01、OXE02(以上為BASF公司製造)、N-1919(ADEKA株式會社製造)等市售品。其中,O-醯基肟化合物優選選自N-苯甲醯氧基-1-(4-苯基硫烷基苯基)丁烷-1-酮-2-亞胺、N-苯甲醯氧基-1-(4-苯基硫烷基苯基)辛烷-1-酮-2-亞胺和N-苯甲醯氧基-1-(4-苯基硫烷基苯基)-3-環戊基丙烷-1-酮-2-亞胺中的至少1種,更優選N-苯甲醯氧基-1-(4-苯基硫烷基苯基)辛烷-1-酮-2-亞胺。如果是這些O-醯基肟化合物,則傾向 於得到高明度的彩色濾光片。Examples of the above-mentioned O-acyl oxime compound include N-benzyloxy-1-(4-phenylsulfanylphenyl)butane-1-one-2-imine, N-benzyloxy-1-(4-phenylsulfanylphenyl)butane-1-one-2-imine, Oxy-1-(4-phenylsulfanylphenyl)octan-1-one-2-imine, N-benzyloxy-1-(4-phenylsulfanylphenyl)- 3-Cyclopentylpropan-1-one-2-imine, N-acetoxy-1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazole-3 -yl]ethane-1-imine, N-acetoxy-1-[9-ethyl-6-{2-methyl-4-(3,3-dimethyl-2,4-di Oxolatylmethoxy)benzyl}-9H-carbazol-3-yl]ethane-1-imine, N-acetoxy-1-[9-ethyl-6-( 2-Methylbenzyl)-9H-carbazol-3-yl]-3-cyclopentylpropane-1-imine, N-benzyloxy-1-[9-ethyl-6- (2-methylbenzyl)-9H-carbazol-3-yl]-3-cyclopentylpropan-1-one-2-imine and the like. Commercially available products such as IRGACURE OXE01 and OXE02 (the above are manufactured by BASF Corporation) and N-1919 (manufactured by ADEKA Corporation) can be used. Among them, the O-acyl oxime compound is preferably selected from N-benzyloxy-1-(4-phenylsulfanylphenyl)butane-1-one-2-imine, N-benzyloxy-1-(4-phenylsulfanylphenyl)butane-1-one-2-imine, yl-1-(4-phenylsulfanylphenyl)octan-1-one-2-imine and N-benzyloxy-1-(4-phenylsulfanylphenyl)-3 -At least one of cyclopentylpropan-1-one-2-imine, more preferably N-benzyloxy-1-(4-phenylsulfanylphenyl)octan-1-one- 2-Imine. In the case of these O-acyl oxime compounds, a high-brightness color filter tends to be obtained.

上述烷基苯基酮化合物是具有由式(d2)表示的部分結構或由式(d3)表示的部分結構的化合物。這些部分結構中,苯環可具有取代基。

Figure 02_image006
The above-mentioned alkyl phenyl ketone compound is a compound having a partial structure represented by formula (d2) or a partial structure represented by formula (d3). In these partial structures, the benzene ring may have a substituent.
Figure 02_image006

作為具有由式(d2)表示的部分結構的化合物,可列舉例如2-甲基-2-嗎啉代-1-(4-甲基硫烷基苯基)丙烷-1-酮、2-二甲基胺基-1-(4-嗎啉代苯基)-2-苄基丁烷-1-酮、2-(二甲基胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]丁烷-1-酮等。可使用IRGACURE 369、907、379(以上為BASF公司製造)等的市售品。As a compound having a partial structure represented by formula (d2), for example, 2-methyl-2-morpholino-1-(4-methylsulfanylphenyl)propan-1-one, 2-di Methylamino-1-(4-morpholinophenyl)-2-benzylbutan-1-one, 2-(dimethylamino)-2-[(4-methylphenyl)methyl base]-1-[4-(4-morpholinyl)phenyl]butan-1-one and the like. Commercially available products such as IRGACURE 369, 907, and 379 (the above are manufactured by BASF Corporation) can be used.

作為具有由式(d3)表示的部分結構的化合物,可列舉例如2-羥基-2-甲基-1-苯基丙烷-1-酮、2-羥基-2-甲基-1-[4-(2-羥基乙氧基)苯基]丙烷-1-酮、1-羥基環己基苯基酮、2-羥基-2-甲基-1-(4-異丙烯基苯基)丙烷-1-酮的低聚物、α,α-二乙氧基苯乙酮、苯偶醯二甲基縮酮等。As a compound having a partial structure represented by formula (d3), for example, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 2-hydroxy-2-methyl-1-[4- (2-Hydroxyethoxy)phenyl]propan-1-one, 1-hydroxycyclohexylphenyl ketone, 2-hydroxy-2-methyl-1-(4-isopropenylphenyl)propane-1- Oligomers of ketones, α,α-diethoxyacetophenone, benzalkonium dimethyl ketal, etc.

在感光度的部份,作為烷基苯基酮化合物,優選具有由式(d2)表示的部分結構的化合物。In terms of sensitivity, as the alkyl phenyl ketone compound, a compound having a partial structure represented by the formula (d2) is preferable.

作為上述三嗪化合物,可列舉例如2,4-雙_三氯甲基-6-_4-甲氧基苯基-1,3,5-三嗪、2,4-雙三氯甲基-6-4-甲氧基萘基-1,3,5-三嗪、2,4-雙三氯甲基-6-胡椒基-1,3,5-三嗪、2,4-雙三氯甲基-6-4-甲氧基苯乙烯 基-1,3,5-三嗪、2,4-雙三氯甲基-6-[2-(5-甲基呋喃-2-基)乙烯基]-1,3,5-三嗪、2,4-雙三氯甲基-6-[2-(呋喃-2-基)乙烯基]-1,3,5-三嗪、2,4-雙三氯甲基-6-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-1,3,5-三嗪、2,4-雙三氯甲基-6-[2-(3,4-二甲氧基苯基)乙烯基]-1,3,5-三嗪等。Examples of the above-mentioned triazine compound include 2,4-bis-trichloromethyl-6--4-methoxyphenyl-1,3,5-triazine, 2,4-bis-trichloromethyl-6 -4-Methoxynaphthyl-1,3,5-triazine, 2,4-bistrichloromethyl-6-pipronyl-1,3,5-triazine, 2,4-bistrichloromethane yl-6-4-methoxystyryl-1,3,5-triazine, 2,4-bistrichloromethyl-6-[2-(5-methylfuran-2-yl)vinyl ]-1,3,5-triazine, 2,4-bistrichloromethyl-6-[2-(furan-2-yl)vinyl]-1,3,5-triazine, 2,4- Bistrichloromethyl-6-[2-(4-diethylamino-2-methylphenyl)vinyl]-1,3,5-triazine, 2,4-bistrichloromethyl- 6-[2-(3,4-dimethoxyphenyl)vinyl]-1,3,5-triazine, etc.

作為上述醯基氧化膦化合物,可列舉2,4,6-三甲基苯甲醯基二苯基氧化膦等。可使用IRGACURE(註冊商標)819(BASF公司製造)等的市售品。As said acyl phosphine oxide compound, 2, 4, 6- trimethylbenzyl diphenyl phosphine oxide etc. are mentioned. Commercially available products such as IRGACURE (registered trademark) 819 (manufactured by BASF) can be used.

作為上述聯咪唑化合物,可列舉例如2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基聯咪唑(例如,參照日本特開平6-75372號公報、日本特開平6-75373號公報等)、2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(二烷氧基苯基)聯咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(三烷氧基苯基)聯咪唑(例如,參照日本特公昭48-38403號公報、日本特開昭62-174204號公報等)、4,4’,5,5’-位的苯基被烷氧羰基取代的咪唑化合物(例如,參照日本特開平7-10913號公報等)等。As said biimidazole compound, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2,3- dichlorophenyl)-4,4',5,5'-tetraphenylbiimidazole (for example, refer to Japanese Patent Laid-Open No. 6-75372, Japanese Patent Laid-Open No. 6-75373, etc.), 2,2'- Bis(2-chlorophenyl)-4,4',5,5'-tetraphenylbiimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis (Alkoxyphenyl)biimidazole, 2,2'-bis(2-chlorophenyl)-4,4',5,5'-tetrakis(dialkoxyphenyl)biimidazole, 2,2' -Bis(2-chlorophenyl)-4,4',5,5'-tetrakis(trialkoxyphenyl)biimidazole (for example, refer to Japanese Patent Publication No. 48-38403, Japanese Patent Publication No. 62- 174204 Gazette, etc.), imidazole compounds in which the phenyl group at the 4,4', 5,5'-position is substituted with an alkoxycarbonyl group (for example, see Japanese Patent Laid-Open No. 7-10913, etc.), and the like.

其他之聚合起始劑,可列舉安息香、安息香甲基醚、安息香乙基醚、安息香異丙基醚、安息香異丁基醚等安息香化合物;二苯甲酮、鄰-苯甲醯基苯甲酸甲酯、4-苯基二苯甲酮、4-苯甲醯基-4’-甲基二苯基硫醚、3,3’,4,4’-四(第三-丁基過氧羰基)二苯甲酮、2,4,6-三甲基 二苯甲酮等二苯甲酮化合物;9,10-菲醌、2-乙基蒽醌、樟腦醌等醌化合物;10-丁基-2-氯吖啶酮、苯偶醯、苯基乙醛酸甲酯、二茂鈦化合物等。優選地,這些聚合起始劑可與後述的聚合起始助劑(特別是胺類)組合使用。Other polymerization initiators include benzoin compounds such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, and benzoin isobutyl ether; Esters, 4-phenylbenzophenone, 4-benzyl-4'-methyldiphenyl sulfide, 3,3',4,4'-tetra(3-butylperoxycarbonyl) Benzophenone compounds such as benzophenone and 2,4,6-trimethylbenzophenone; quinone compounds such as 9,10-phenanthraquinone, 2-ethylanthraquinone and camphorquinone; 10-butyl- 2-Chloroacridone, benzil, methyl phenylglyoxylate, titanocene compounds, etc. Preferably, these polymerization initiators may be used in combination with a polymerization initiator (especially amines) described later.

而酸產生劑,可列舉出4-羥基苯基二甲基鋶-對-甲苯磺酸鹽、4-羥基苯基二甲基鋶六氟銻酸鹽、4-乙醯氧基苯基二甲基鋶-對-甲苯磺酸鹽、4-乙醯氧基苯基甲基苄基鋶六氟銻酸鹽、三苯基鋶-對-甲苯磺酸鹽、三苯基鋶六氟銻酸鹽、二苯基碘鎓-對-甲苯磺酸鹽、二苯基碘鎓六氟銻酸鹽等鎓鹽類、硝基苄基甲苯磺酸酯類、安息香甲苯磺酸酯類等。The acid generators include 4-hydroxyphenyldimethyl perylene-p-toluenesulfonate, 4-hydroxyphenyldimethyl perylene hexafluoroantimonate, and 4-acetoxyphenyldimethylene Acetyl-p-toluenesulfonate, 4-Acetyloxyphenylmethylbenzyl-hexafluoroantimonate, triphenyl-p-toluenesulfonate, triphenyl-perylene hexafluoroantimonate , Diphenyliodonium-p-toluenesulfonate, onium salts such as diphenyliodonium hexafluoroantimonate, nitrobenzyl tosylate, benzoin tosylate, etc.

一些實施例中,光聚合起始劑可佔著色樹脂組成物的約0.1 wt%~10wt%。In some embodiments, the photopolymerization initiator may account for about 0.1 wt % to 10 wt % of the colored resin composition.

在一些實施例中,著色樹脂組成物的溶劑可包含但不受限於選自於由下列選項所組成的群組中的至少一者:酯溶劑(在此意指於分子中含有-COO-但不含-O-的溶劑)、醚溶劑(在此意指於分子中含有-O-但不含-COO-的溶劑)、醚酯溶劑(在此意指於分子中含有-COO-及-O-的溶劑)、酮溶劑(在此意指於分子中含有-CO-但不含-COO-的溶劑)、醇溶劑(在此意指於分子中含有OH但不含-O-、-CO-及-COO-的溶劑)、芳香族烴溶劑、醯胺溶劑、二甲基亞碸等。In some embodiments, the solvent of the colored resin composition may include, but is not limited to, at least one selected from the group consisting of: an ester solvent (herein meaning a molecule containing -COO- Solvents that do not contain -O-), ether solvents (referred to herein as solvents that contain -O- but not -COO- in the molecule), ether ester solvents (referred to herein as those that contain -COO- and -O- solvent), ketone solvent (here means a solvent containing -CO- but not -COO- in the molecule), alcohol solvent (here means containing OH but not -O- in the molecule, -CO- and -COO- solvents), aromatic hydrocarbon solvents, amide solvents, dimethyl sulfoxide, etc.

作為酯溶劑,可列舉出乳酸甲酯、乳酸乙酯、乳酸丁酯、2-羥基異丁酸甲酯、醋酸乙酯、醋酸正丁酯、醋酸異丁酯、甲酸戊酯、醋酸異戊酯、丙酸丁酯、丁酸異丙酯、丁酸乙酯、丁酸丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸丙酯、乙醯乙酸甲酯、乙醯乙酸乙酯、環己醇乙酸酯和γ-丁內酯等。Examples of the ester solvent include methyl lactate, ethyl lactate, butyl lactate, methyl 2-hydroxyisobutyrate, ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, and isoamyl acetate , butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl pyruvate, ethyl pyruvate, propyl pyruvate, methyl acetoacetate, ethyl acetoacetate, cyclic Hexanol acetate and γ-butyrolactone, etc.

作為醚溶劑,可列舉出乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單丙基醚、乙二醇單丁基醚、二甘醇單甲基醚、二甘醇單乙基醚、二甘醇單丁基醚、丙二 醇單甲基醚、丙二醇單乙基醚、丙二醇單丙基醚、丙二醇單丁基醚、3-甲氧基-1-丁醇、3-甲氧基-3-甲基丁醇、四氫呋喃、二甘醇二甲基醚、二甘醇二乙基醚、二甘醇甲基乙基醚、二甘醇二丙基醚、二甘醇二丁基醚、茴香醚、苯乙醚和甲基茴香醚等。Examples of the ether solvent include ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monopropyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol Monoethyl ether, diethylene glycol monobutyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, 3-methoxy-1-butanol, 3- Methoxy-3-methylbutanol, tetrahydrofuran, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, diethylene glycol dipropyl ether, diethylene glycol diethylene glycol Butyl ether, anisole, phenethyl ether and methyl anisole, etc.

作為酮溶劑,可列舉出4-羥基-4-甲基-2-戊酮、丙酮、2-丁酮、2-庚酮、3-庚酮、4-庚酮、4-甲基-2-戊酮、環戊酮、環己酮(cyclohexanone,CHN)和異佛爾酮等。Examples of the ketone solvent include 4-hydroxy-4-methyl-2-pentanone, acetone, 2-butanone, 2-heptanone, 3-heptanone, 4-heptanone, 4-methyl-2- Pentanone, cyclopentanone, cyclohexanone (cyclohexanone, CHN) and isophorone, etc.

作為醇溶劑,可列舉甲醇、乙醇、丙醇、丁醇、己醇、環己醇、乙二醇、丙二醇和甘油等。Examples of the alcohol solvent include methanol, ethanol, propanol, butanol, hexanol, cyclohexanol, ethylene glycol, propylene glycol, and glycerin.

作為芳香族烴溶劑,可列舉苯、甲苯、二甲苯和1,3,5-三甲基苯等。As the aromatic hydrocarbon solvent, benzene, toluene, xylene, 1,3,5-trimethylbenzene and the like can be mentioned.

作為醯胺溶劑,可列舉N,N-二甲基甲醯 胺、N,N-二甲基乙醯胺和N-甲基吡咯啶酮等。As an amide solvent, N,N- dimethylformamide, N,N-dimethylacetamide, N-methylpyrrolidone, etc. are mentioned.

上述的溶劑中,從塗佈性、乾燥性的方面出發,優選1atm下的沸點為120°C以上且180°C以下的有機溶劑。作為溶劑,優選丙二醇單甲基醚乙酸酯(PGMEA)、乳酸乙酯、丙二醇單甲基醚、3-乙氧基丙酸乙酯、乙二醇單甲基醚、二甘醇單甲基醚、二甘醇單乙基醚、4-羥基-4-甲基-2-戊酮、N-甲基吡咯啶酮和N,N-二甲基甲醯胺,更優選丙二醇單甲基醚乙酸酯、丙二醇單甲基醚、N-甲基吡咯啶酮、乳酸乙酯和3-乙氧基丙酸乙酯。Among the above-mentioned solvents, an organic solvent having a boiling point at 1 atm of 120° C. or higher and 180° C. or lower is preferable from the viewpoint of coatability and drying properties. As the solvent, propylene glycol monomethyl ether acetate (PGMEA), ethyl lactate, propylene glycol monomethyl ether, ethyl 3-ethoxypropionate, ethylene glycol monomethyl ether, and diethylene glycol monomethyl ether are preferable ether, diethylene glycol monoethyl ether, 4-hydroxy-4-methyl-2-pentanone, N-methylpyrrolidone and N,N-dimethylformamide, more preferably propylene glycol monomethyl ether Acetate, propylene glycol monomethyl ether, N-methylpyrrolidone, ethyl lactate and ethyl 3-ethoxypropionate.

在一些實施例中,相對於著色樹脂組成物的總量,溶劑的含有率可為約30 wt%~約95wt%,或40 wt%至60 wt%,例如約45 wt%。溶劑的含量適當,將可使塗佈時的平坦性變得良好,且形成了彩色濾光片時色濃度沒有不足,因而使顯示特性可變得更為良好。In some embodiments, the content of the solvent may be about 30 wt % to about 95 wt %, or 40 wt % to 60 wt %, eg, about 45 wt %, relative to the total amount of the colored resin composition. When the content of the solvent is appropriate, the flatness at the time of coating can be improved, and the color density is not insufficient when the color filter is formed, so that the display characteristics can be further improved.

為了讓本揭露之上述和其他目的、特徵、和優點能更明顯易懂,下文特舉數個實驗例和比較例的著色樹脂組成物之製備,並將這些例子中的著色樹脂組成物塗覆於基板上後進行數項檢測分析與評價,以觀察包含組合物之膜層的特性。此些實驗內容可具體地說明根據本揭露內容之實施例的著色樹脂組成物可達成的功效,以及應用本揭露內容所製得之彩色光阻組成物的特性。然而以下之實施例和比較例僅為例示說明之用,而不應被解釋為本揭露內容實施之限制。In order to make the above-mentioned and other objects, features, and advantages of the present disclosure more obvious and easy to understand, the preparation of colored resin compositions in several experimental examples and comparative examples is given below, and the colored resin compositions in these examples are coated After being placed on the substrate, several inspections, analyses and evaluations were carried out to observe the characteristics of the film layer containing the composition. These experimental contents can specifically illustrate the effect achieved by the coloring resin composition according to the embodiments of the present disclosure, and the characteristics of the color photoresist composition prepared by applying the present disclosure. However, the following examples and comparative examples are only used for illustration, and should not be construed as a limitation of the implementation of the present disclosure.

另外,實驗例中所提出的著色樹脂組成物,其塗膜的形成和膜層特性評價方式先簡述如下。於後續分析各個實驗例的檢測結果時將不再重述檢測和評價方式。In addition, the coloring resin composition proposed in the experimental example, the formation of the coating film and the evaluation method of the film layer characteristics are briefly described below. In the subsequent analysis of the detection results of each experimental example, the detection and evaluation methods will not be repeated.

[塗膜的形成][Formation of coating film]

(a)首先,在厚度大約0.4mm~大約0.7mm的基板上,利用旋轉塗佈方式執行各實驗例的著色樹脂組成物之塗佈;(a) First, on a substrate with a thickness of about 0.4 mm to about 0.7 mm, the coloring resin composition of each experimental example is applied by spin coating;

(b)將塗佈有著色樹脂組成物的基板上放置在大約80℃~大約90℃的熱板(Hot plate)上,實施時間大約38秒~大約88秒的預烘烤,以去除組合物中大部分的溶劑;以及(b) placing the substrate coated with the colored resin composition on a hot plate at about 80° C. to about 90° C., and pre-baking for about 38 seconds to about 88 seconds to remove the composition most solvents; and

(c)待基板冷卻後,使用曝光機執行曝光步驟後,將基板移至顯影機台執行顯影步驟,以在基板上形成著色膜層。(c) After the substrate is cooled, and after the exposure step is performed using an exposure machine, the substrate is moved to a developing machine to perform the developing step, so as to form a coloring film layer on the substrate.

[顯影製程條件][Development process conditions]

顯影製程:顯影壓力0.07兆帕(MPa)和顯影時間50秒使用鹼性顯影液進行顯影。之後,以清水(去離子水??)進行沖洗,沖洗壓力 0.1兆帕(MPa),沖洗時間40秒。Development process: The development pressure is 0.07 megapascal (MPa) and the development time is 50 seconds for development using an alkaline developer. After that, rinse with clean water (deionized water??), the rinse pressure is 0.1 MPa (MPa), and the rinse time is 40 seconds.

完成顯影後,在基板上形成著色膜層。After the development is completed, a colored film layer is formed on the substrate.

[著色膜層評價方法][Evaluation method of colored film layer]

本揭露係對於各個實驗例的著色樹脂組成物在預烘烤、曝光和顯影等步驟後,以掃描式電子顯微鏡(SEM)(型號:HITACH Regulus 8100)拍攝於基板上形成的著色膜層的邊緣和底切部分,以觀察膜層的剖面形狀以及量測底切深度(undercut depth)。其中,底切深度的定義請參照上述如第2A圖所示之例如光阻結構21沿著X方向上的深度d以及相關說明。In the present disclosure, the colored resin composition of each experimental example was photographed on the edge of the colored film layer formed on the substrate with a scanning electron microscope (SEM) (model: HITACH Regulus 8100) after the steps of pre-baking, exposure and development. and the undercut part to observe the cross-sectional shape of the film and measure the undercut depth. For the definition of the undercut depth, please refer to the above-mentioned depth d of the photoresist structure 21 along the X direction as shown in FIG. 2A and related descriptions.

再者,亦使用光學顯微鏡(型號:NiKon eclipse LV150N)以放大倍率20倍和50倍分別對於基板上形成的著色膜層的上方進行OM照片拍攝,以檢視和觀察基板上形成的著色膜層的邊緣是否完整;例如自著色膜層的上方視之,若形成的著色膜層包含數條長條狀的光阻結構(如第2B圖所示),則檢視該些長條狀的光阻結構的邊緣是否有剝落、下陷或其他缺陷,並評估些缺陷在所有光阻結構的所占比例是否過高。Furthermore, an optical microscope (model: NiKon eclipse LV150N) was also used to take OM photos of the upper part of the colored film layer formed on the substrate at a magnification of 20 times and 50 times, respectively, to inspect and observe the coloring film layer formed on the substrate. Whether the edge is complete; for example, when viewed from the top of the coloring film layer, if the formed coloring film layer includes several strip-shaped photoresist structures (as shown in Figure 2B), then inspect these strip-shaped photoresist structures the edges of the photoresist for peeling, sag or other defects, and assess whether these defects account for a disproportionately high percentage of all photoresist structures.

(a)在基板上形成的著色膜層的底切深度評價標準如下:(a) The evaluation criteria for the undercut depth of the colored film layer formed on the substrate are as follows:

底切深度小於等於1 μm(≦ 1 μm)係評價為O,表示著色膜層具有良好的底切特性;The undercut depth of less than or equal to 1 μm (≦ 1 μm) is evaluated as O, indicating that the colored film layer has good undercut characteristics;

底切深度在大於1 μm到小於3 μm的範圍(亦即,1 μm < 底切深度 μm < 3 μm)係評價為Δ,表示著色膜層具有尚可的底切特性;以及An undercut depth in the range of more than 1 μm to less than 3 μm (ie, 1 μm < undercut depth μm < 3 μm) is evaluated as Δ, indicating that the pigmented film layer has acceptable undercut characteristics; and

底切深度大於等於3 μm (≧ 3 μm)係評價為X,表示著色膜層的底切特性不佳。An undercut depth of 3 μm or more (≧ 3 μm) was evaluated as X, indicating that the undercut characteristics of the colored film layer were poor.

(b)以光學顯微鏡檢視基板上形成的著色膜層,其膜層邊緣完整度評價標準如下:(b) Check the colored film layer formed on the substrate with an optical microscope, and the evaluation criteria for the edge integrity of the film layer are as follows:

若以光學顯微鏡檢視基板上形成的著色膜層的邊緣,其線條顏色均一,且完全沒有凹陷的瑕疵,則評價為O,表示著色膜層具有優異的邊緣完整度;If the edge of the colored film layer formed on the substrate is inspected with an optical microscope, the line color is uniform, and there is no concave defect at all, it is evaluated as 0, indicating that the colored film layer has excellent edge integrity;

若檢視著色膜層的邊緣的顏色少部分不均,則評價為Δ,表示著色膜層具有尚可接受的邊緣完整度,在實驗中係以邊緣所有缺陷在所有膜層結構的面積占比低於30%以下,評定為"少部分";If the color of the edge of the colored film layer is slightly uneven, it is evaluated as Δ, indicating that the colored film layer has acceptable edge integrity. In the experiment, the proportion of all edge defects in all film structures is low Below 30%, it is rated as "minor";

若檢視著色膜層的邊緣,其線條顏色大部分不均或者有塌下的情況發生,則評價為X,表示著色膜層具有無法接受的邊緣完整度。If the edge of the colored film layer is inspected and the color of the lines is mostly uneven or collapsed, the evaluation is X, indicating that the colored film layer has an unacceptable edge integrity.

綜合底切結果與OM照片進行總評價,判斷標準如下: 底切結果 OM 總評價 O O O Δ O Δ O O Δ Δ Δ X X X Comprehensive evaluation of the undercut results and OM photos is carried out, and the judgment criteria are as follows: undercut result OM Overall rating O O O Δ O Δ O O Δ Δ Δ X X X

<相關實驗一:著色樹脂組成物的鹼可溶性樹脂中包含不同的光固性樹脂><Related experiment 1: Different photocurable resins are included in the alkali-soluble resin of the colored resin composition>

請參照表1和表2。相關實驗一中,各個實驗例及比較例之著色樹脂組成物的組成(包括成分及其重量百分比)係列於表1。表2列出各個實驗例及比較例中所使用的光固性樹脂的種類與特性(例如其重量平均分子量及所包含的-COOH基團),以及包含此光固性樹脂的組合物所形成的著色膜層的底切深度。Please refer to Table 1 and Table 2. In the related experiment 1, the compositions (including components and their weight percentages) of the colored resin compositions of each experimental example and the comparative example are listed in Table 1. Table 2 lists the types and characteristics of the photocurable resins used in each of the experimental examples and comparative examples (such as their weight-average molecular weight and the -COOH group contained), and the composition formed by the composition comprising the photocurable resin. The undercut depth of the pigmented film layer.

如表1列出的各個實驗例中的鹼可溶性樹脂係包含熱固性樹脂-I(如後續製備例9)和光固性樹脂(包含7種不同種類及/或不同比例的自備樹脂,如後續製備例1-製備例7)。為利於簡要顯示表格,表1中的成分/共聚物係以市售商品名及/或成分縮寫表示,並於表1下方以及表2中整理羅列出各成分/共聚物的單體名稱和比例。The alkali-soluble resins in each experimental example listed in Table 1 include thermosetting resin-I (as in the subsequent preparation example 9) and photocurable resins (including 7 kinds and/or different proportions of self-provided resins, as in the subsequent preparations Example 1-Preparation Example 7). For the convenience of displaying the table briefly, the components/copolymers in Table 1 are represented by commercially available trade names and/or component abbreviations, and the monomer names and proportions of each component/copolymer are listed at the bottom of Table 1 and in Table 2. .

表1 種類 品名 實驗1-1 實驗1-2 實驗1-3 實驗1-4 著色劑 B15:6 20.9 % 熱固性樹脂 I 8.9 % 光固性樹脂 A 10.0 %       B   10.0 %     C     10.0 %   D       10.0 % 聚合性不飽和化合物之單體 DPHA 10.0 % 光聚合 起始劑 OXE-01 5 % 溶劑 PGMEA 45 % (續表1) 種類 品名 實驗1-5 實驗1-6 實驗1-7 著色劑 B15:6 20.9 % 熱固性樹脂 I 8.9 %   E 10.0 %     F   10.0 %   G     10.0 % 聚合性不飽和化合物之單體 DPHA 10.0 % 光聚合 起始劑 OXE-01 5 % 溶劑 PGMEA 45 % 著色劑顏料藍B15:6:有機藍色顏料 (購自Nippon Pigment公司產品 ­)熱固性樹脂材料-I:請參照製備例9 聚合性不飽和化合物之單體DPHA:使用二季戊四醇六丙烯酸酯(KAYARAD(註冊商標)) 光聚合起始劑OXE-01:O-醯基肟(O-acyloxime)化合物 (購自BASF ­)溶劑PGMEA:丙二醇單甲基醚乙酸酯 (購自友和貿易­ ) Table 1 type Product name Experiment 1-1 Experiment 1-2 Experiments 1-3 Experiments 1-4 Colorant B15:6 20.9% Thermosetting resin I 8.9% photocurable resin A 10.0% B 10.0% C 10.0% D 10.0% Monomers of polymerizable unsaturated compounds DPHA 10.0% photopolymerization initiator OXE-01 5% solvent PGMEA 45% (Continued from Table 1) type Product name Experiments 1-5 Experiments 1-6 Experiments 1-7 Colorant B15:6 20.9% Thermosetting resin I 8.9% E 10.0% F 10.0% G 10.0% Monomers of polymerizable unsaturated compounds DPHA 10.0% photopolymerization initiator OXE-01 5% solvent PGMEA 45% Colorant Pigment Blue B15:6: Organic blue pigment ( purchased from Nippon Pigment ) Thermosetting resin material-I: Please refer to Preparation Example 9 Polymerizable unsaturated compound monomer DPHA: Dipentaerythritol hexaacrylate (KAYARAD ( Registered trademark)) Photopolymerization initiator OXE-01: O-acyloxime compound ( purchased from BASF ) Solvent PGMEA: propylene glycol monomethyl ether acetate ( purchased from Yuwa Trading )

表2 實驗 光固性樹脂之品名 共聚物的單體比例 (% / mol) 分子量(Mw) 底切深度 COOH 基團 1-1 A TCDMA/ BZMA/ MAA/ (GMA+MMA) = 10/ 50/ 25/ 15 27000 3.55 μm 25% / mol 1-2 B BZMA /MAA = 60/ 40 10500 9.02 μm 40% / mol 1-3 C TCDMA/ MMA/ MAA/( MAA+GMA) = 3/ 27/6.9 /63.1 17200 1.41 μm 6.9%mol 1-4 D TCDMA/ MMA/ MAA / (MAA+GMA) = 3/ 27/ 31.2/ 38.8 6100 1.01 μm 31.2%mol 1-5 E TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/ 27/ 9.1/ 60.9 6400 0.36μm 9.1%mol 1-6 F TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/70/ 3.5/ 23.5 6500 0.251μm 3.5%mol 1-7 G TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/ 27/ 31.2/ 38.8 23900 7.87 μm 31.2%mol TCDMA:(甲基)丙烯酸二環戊酯 BZMA:(甲基)丙烯酸苄酯 MAA:甲基丙烯酸 MMA:(甲基)丙烯酸甲酯 GMA:(甲基)丙烯酸縮水甘油酯 Table 2 experiment Name of photocurable resin Monomer ratio of copolymer (%/mol) Molecular weight (Mw) Undercut depth COOH group 1-1 A TCDMA/ BZMA/ MAA/ (GMA+MMA) = 10/ 50/ 25/ 15 27000 3.55 μm 25%/mol 1-2 B BZMA/MAA = 60/40 10500 9.02 μm 40%/mol 1-3 C TCDMA/MMA/MAA/(MAA+GMA) = 3/27/6.9/63.1 17200 1.41 μm 6.9%mol 1-4 D TCDMA/ MMA/ MAA / (MAA+GMA) = 3/ 27/ 31.2/ 38.8 6100 1.01 μm 31.2%mol 1-5 E TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/ 27/ 9.1/ 60.9 6400 0.36μm 9.1%mol 1-6 F TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/70/ 3.5/ 23.5 6500 0.251μm 3.5%mol 1-7 G TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/ 27/ 31.2/ 38.8 23900 7.87 μm 31.2%mol TCDMA: Dicyclopentyl (meth)acrylate BZMA: Benzyl (meth)acrylate MAA: Methacrylate MMA: Methyl (meth)acrylate GMA: Glycidyl (meth)acrylate

再者,對應表2列出的實驗1-1~1-7的光固性樹脂,其化學式和單體比例(mol %)係整理如下: 實驗 化學式 單體比例(mol %) 1-1 [化學式1-1]

Figure 02_image008
TCDMA (m)=10mol %, BZMA (n)=50 mol %, MAA (p)=25 mol % , MAA+GMA (f)=15 mol %   1-2 [化學式1-2]
Figure 02_image010
BZMA(n) = 60 % / mol, MAA(p) = 40 % / mol
1-3~ 1-7 [化學式1-3]
Figure 02_image001
以實驗1-3為例,化學式1-3中: TCDMA(m) =3% / mol, MMA(e) =27% / mol, GMA+MAA (f) = 63.1% / mol, MAA(p) = 6.9% / mol (實驗1-4~1-7的單體成分比例係參照表2)
Furthermore, the photocurable resins corresponding to experiments 1-1 to 1-7 listed in Table 2, their chemical formulas and monomer ratios (mol %) are organized as follows: experiment chemical formula Monomer ratio (mol %) 1-1 [Chemical formula 1-1]
Figure 02_image008
TCDMA (m)=10mol %, BZMA (n)=50 mol %, MAA (p)=25 mol %, MAA+GMA (f)=15 mol %
1-2 [Chemical formula 1-2]
Figure 02_image010
BZMA(n) = 60 % / mol, MAA(p) = 40 % / mol
1-3~ 1-7 [Chemical formula 1-3]
Figure 02_image001
Taking experiment 1-3 as an example, in chemical formula 1-3: TCDMA(m) =3% / mol, MMA(e) =27% / mol, GMA+MAA (f) = 63.1% / mol, MAA(p) = 6.9% / mol (refer to Table 2 for the proportion of monomer components in experiments 1-4~1-7)

相關實驗一中,各個實驗例的著色樹脂組成物的特性、在基板上形成的著色膜層後通過掃描式電子顯微鏡(SEM)檢視膜層的邊緣和底切部分、以及量測的底切深度(undercut depth)的評價結果,係列於表3。可同時參照表3與第3A~3G圖,其中第3A~3G圖係分別為根據實驗1-1~1-7的SEM圖的膜層邊緣和底切部分的簡單示意圖,圖中係示出各實驗例的基板30上之局部光阻結構31及底切深度d。再者,以放大倍率20倍和50倍的光學顯微鏡分別觀察各實驗例的著色膜層的邊緣是否完整的評價結果,亦列於表3。In related experiment 1, the characteristics of the colored resin composition of each experimental example, the edge and undercut portion of the film layer were inspected by scanning electron microscope (SEM) after the colored film layer formed on the substrate, and the measured undercut depth The evaluation results of (undercut depth) are listed in Table 3. Table 3 and Figures 3A to 3G can be referred to at the same time, wherein Figures 3A to 3G are respectively simple schematic diagrams of the film edge and the undercut portion of the SEM images according to experiments 1-1 to 1-7, and the figures show The partial photoresist structure 31 and the undercut depth d on the substrate 30 of each experimental example. In addition, the evaluation results of whether the edges of the colored film layers of each experimental example were observed with an optical microscope with a magnification of 20 times and 50 times, respectively, are also listed in Table 3.

表3 實驗例 光固性樹脂 分子量 酸價 底切深度 底切評價 (SEM) 著色膜層邊緣完整度(OM 20X & 50X) 總評價 1-1 A 27000 86.9 3.55 μm X X X 1-2 B 10500 120 9.02 μm X X X 1-3 C 17200 28 1.41 μm O O 1-4 D 6100 97 1.01 μm 1-5 E 6400 35.4 0.36 μm O O 1-6 F 6500 33.7 0.25 μm O O 1-7 G 23900 96 7.87 μm X X X table 3 Experimental example photocurable resin molecular weight Acid value Undercut depth Undercut Evaluation (SEM) Colored Film Edge Integrity (OM 20X & 50X) Overall rating 1-1 A 27000 86.9 3.55 μm X X X 1-2 B 10500 120 9.02 μm X X X 1-3 C 17200 28 1.41 μm O O 1-4 D 6100 97 1.01 μm 1-5 E 6400 35.4 0.36 μm O O 1-6 F 6500 33.7 0.25 μm O O 1-7 G 23900 96 7.87 μm X X X

根據上述的相關實驗一的結果顯示,如實驗例1-3、1-4、1-5和1-6提出的著色樹脂組成物的鹼可溶性樹脂,所使用包含例如(甲基)丙烯酸二環戊酯(TCDMA)/(甲基)丙烯酸甲酯(MMA)/(甲基)丙烯酸縮水甘油酯(GMA)/(甲基)丙烯酸(MAA)之共聚物的光固性樹脂,在適當的分子量及搭配酸價情況下,例如其分子量低於20000,且氫氧化鉀(KOH)滴定酸價係小於 100 mg/g,在基板上形成的著色膜層後,可以改善膜層的底切深度以及形成完整邊緣。例如,實驗例1-3~1-6使用的光固性樹脂,其分子量分別為17200、6100、6400、6500(皆低於20000),酸價分別為28、97、35.4、33.7 mg/g(皆小於100 mg/g),形成的著色膜層具有良好的一蘑菇狀剖面(如第3C~3F圖所示),且底切深度皆小於1.5μm,以光學顯微鏡檢視基板上形成的著色膜層的邊緣也具有良好或者可接受的邊緣完整度。According to the results of the above-mentioned related experiment 1, the alkali-soluble resins of the coloring resin compositions proposed in Experimental Examples 1-3, 1-4, 1-5 and 1-6 used, for example, a bicyclic (meth)acrylic acid. Photocurable resin of copolymer of amyl ester (TCDMA)/methyl (meth)acrylate (MMA)/glycidyl (meth)acrylate (GMA)/(meth)acrylic acid (MAA), in appropriate molecular weight And in the case of matching acid value, such as its molecular weight is less than 20000, and potassium hydroxide (KOH) titration acid value is less than 100 mg/g, after the coloring film layer is formed on the substrate, it can improve the undercut depth of the film layer and form a complete edge. For example, the photocurable resins used in Experimental Examples 1-3 to 1-6 have molecular weights of 17200, 6100, 6400, and 6500 (all lower than 20000) and acid values of 28, 97, 35.4, and 33.7 mg/g, respectively. (all less than 100 mg/g), the formed coloring film layer has a good mushroom-shaped cross section (as shown in Figures 3C~3F), and the undercut depth is less than 1.5μm, and the coloring formed on the substrate is inspected with an optical microscope. The edges of the film layers also have good or acceptable edge integrity.

再者,在一些實施例中,所使用包含例如(甲基)丙烯酸二環戊酯(TCDMA)/甲基丙烯酸甲酯(MMA)/(甲基)丙烯酸縮水甘油酯(GMA)/(甲基)丙烯酸(MAA) 之共聚物的光固性樹脂,在分子量低於20000,且氫氧化鉀(KOH)滴定酸價小於 55 mg/g,例如實驗例1-3、1-5和1-6中的酸價小於40mg/g,以光學顯微鏡檢視基板上形成的著色膜層的邊緣,其線條顏色均一,在基板上形成的著色膜層的邊緣具有良好的邊緣完整度。而實驗例1-4的光固性樹脂具有酸價97 mg/g,在基板上曝光顯影而形成著色膜層後,著色膜層的邊緣的顏色少部分不均,但仍在可接受的邊緣完整度的標準內(即檢測機不會產生過高的瑕疵誤判數目)。Furthermore, in some embodiments, the compounds used include, for example, dicyclopentyl (meth)acrylate (TCDMA)/methyl methacrylate (MMA)/glycidyl (meth)acrylate (GMA)/(methyl methacrylate) ) Photocurable resin of copolymer of acrylic acid (MAA), the molecular weight is less than 20000, and the acid value of potassium hydroxide (KOH) titration is less than 55 mg/g, such as experimental examples 1-3, 1-5 and 1-6 The acid value is less than 40mg/g, and the edge of the coloring film layer formed on the substrate is inspected with an optical microscope, the line color is uniform, and the edge of the coloring film layer formed on the substrate has good edge integrity. However, the photocurable resin of Experimental Example 1-4 has an acid value of 97 mg/g. After exposure and development on the substrate to form a colored film layer, the color of the edge of the colored film layer is slightly uneven, but the color is still acceptable. Within the standard of completeness (that is, the inspection machine will not produce an excessive number of false positives).

再者,在一些實施例中,所使用包含例如(甲基)丙烯酸二環戊酯(TCDMA)/ 甲基丙烯酸甲酯(MMA)/(甲基)丙烯酸縮水甘油酯(GMA)/(甲基)丙烯酸(MAA) 之共聚物的光固性樹脂,在分子量低於10000,且氫氧化鉀(KOH)滴定酸價小於 55 mg/g,例如實驗例1-5和1-6,形成的著色膜層的底切深度可降低小於0.4μm,以光學顯微鏡檢視基板上形成的著色膜層的邊緣,亦具有非常優異的邊緣完整度。Furthermore, in some embodiments, the compounds used include, for example, dicyclopentyl (meth)acrylate (TCDMA)/methyl methacrylate (MMA)/glycidyl (meth)acrylate (GMA)/(methyl methacrylate) ) The photocurable resin of the copolymer of acrylic acid (MAA), the molecular weight is less than 10000, and the potassium hydroxide (KOH) titration acid value is less than 55 mg/g, such as experimental examples 1-5 and 1-6, the coloring formed The undercut depth of the film layer can be reduced by less than 0.4 μm, and the edge of the colored film layer formed on the substrate is inspected with an optical microscope, and the edge integrity is also very excellent.

<相關實驗二:著色樹脂組成物的鹼可溶性樹脂中包含相同成分但不同成分比例的一光固性樹脂><Related Experiment 2: A photocurable resin containing the same components but different component ratios in the alkali-soluble resin of the colored resin composition>

請參照表4和表5。相關實驗二中,實驗例2-1~2-7之著色樹脂組成物的熱固性樹脂、光固性樹脂以及聚合性不飽和化合物之單體的各成分,以及此三者之間的比例(%)(Binder / Monomer Ratio)係列於表4。實驗例2-1~2-7中,係選用品名I為熱固性樹脂,選用品名F為光固性樹脂,選用DPHA為聚合性不飽和化合物之單體。Please refer to Table 4 and Table 5. In the relevant experiment 2, the components of the thermosetting resin, the photosetting resin and the monomer of the polymerizable unsaturated compound of the colored resin composition of the experimental examples 2-1~2-7, and the ratio (%) ) (Binder/Monomer Ratio) series in Table 4. In the experimental examples 2-1 to 2-7, the product name I was selected as a thermosetting resin, the product name F was selected as a photocurable resin, and DPHA was selected as a monomer of a polymerizable unsaturated compound.

表4 種類 品名 實驗2-1 實驗2-2 實驗2-3 實驗2-4 實驗2-5 實驗2-6 實驗2-7 熱固性樹脂 I 20 光固性樹脂 F 5 10 20 30 40 50 60 聚合性不飽和化合物之單體 DPHA 75 70 60 50 40 30 20 熱固性樹脂I的組成,請參照表6。 光固性樹脂F的組成,如前述。 Table 4 type Product name Experiment 2-1 Experiment 2-2 Experiment 2-3 Experiment 2-4 Experiment 2-5 Experiment 2-6 Experiment 2-7 Thermosetting resin I 20 photocurable resin F 5 10 20 30 40 50 60 Monomers of polymerizable unsaturated compounds DPHA 75 70 60 50 40 30 20 For the composition of the thermosetting resin I, please refer to Table 6. The composition of the photocurable resin F is as described above.

相關實驗二中,各個實驗例的著色樹脂組成物的特性、在基板上形成的著色膜層後通過掃描式電子顯微鏡(SEM)檢視膜層的邊緣和底切部分、以及量測的底切深度(undercut depth)的評價結果,係列於表5。可同時參照表5與第4A~4F圖,其中第4A~4G圖係分別為根據實驗例2-1~2-7的SEM圖的膜層邊緣和底切部分的簡單示意圖,圖中係示出各實驗例的基板40上之局部光阻結構41及底切深度d。再者,以放大倍率20倍和50倍的光學顯微鏡分別觀察各實驗的著色膜層的邊緣是否完整的評價結果,亦列於表5。In the relevant experiment 2, the characteristics of the colored resin composition of each experimental example, the edge and undercut portion of the film layer were inspected by scanning electron microscope (SEM) after the colored film layer formed on the substrate, and the measured undercut depth The evaluation results of (undercut depth) are listed in Table 5. Table 5 and Figures 4A to 4F can be referred to at the same time, wherein Figures 4A to 4G are respectively a simple schematic diagram of the film edge and the undercut portion of the SEM images according to Experimental Examples 2-1 to 2-7, and the figures show The partial photoresist structure 41 and the undercut depth d on the substrate 40 of each experimental example are shown. Furthermore, the evaluation results of whether the edges of the colored film layers in each experiment were observed with an optical microscope with a magnification of 20 times and 50 times, respectively, are also listed in Table 5.

表5 實驗例 光固性樹脂/聚合性不飽和化合物之單體 底切深度 底切評價 (SEM) 著色膜層邊緣完整度(OM 20X & 50X) 總評價 實驗2-1 6.7% 0.271 μm 實驗2-2 14.3% 0.204 μm 實驗2-3 33.3% 0.582 μm 實驗2-4 60% 0.591 μm 實驗2-5 100% 0.715 μm 實驗2-6 166.7% 0 μm 實驗2-7 300% 0μm table 5 Experimental example Photocurable resin/polymerizable unsaturated compound monomer Undercut depth Undercut Evaluation (SEM) Colored Film Edge Integrity (OM 20X & 50X) Overall rating Experiment 2-1 6.7% 0.271 μm Experiment 2-2 14.3% 0.204 μm Experiment 2-3 33.3% 0.582 μm Experiment 2-4 60% 0.591 μm Experiment 2-5 100% 0.715 μm Experiment 2-6 166.7% 0 μm Experiment 2-7 300% 0μm

根據上述的相關實驗二的結果顯示,如實驗例2-1~2-7提出的著色樹脂組成物的鹼可溶性樹脂,係使用相同的熱固性樹脂I和光固性樹脂F,其中熱固性樹脂I係為( 組成請參照表6以及製備例9的製備方法),光固性樹脂F係為TCDMA/ MMA/ (GMA+MAA)/ MAA = 3/70/ 23.5/ 3.5( 重量比為3:70: 23.5: 3.5)之共聚物的光固性樹脂。相關實驗二中,進一步變化光固性樹脂相對於著色樹脂組成物的聚合性不飽和化合物的單體的比例(Binder / Monomer Ratio)。根據實驗結果,當光固性樹脂相對於聚合性不飽和化合物的單體的比例(Binder / Monomer Ratio)在大約6.7%~大約300%時,形成的著色膜層具有良好或可接受的蘑菇狀剖面(如第4A~4G圖所示),且底切深度皆小於1.0μm,且以光學顯微鏡檢視基板上形成的著色膜層的邊緣也具有良好或者可接受的邊緣完整度。 According to the results of the above-mentioned related experiment 2, the alkali-soluble resin of the coloring resin composition proposed in Experimental Examples 2-1 to 2-7 uses the same thermosetting resin I and photosetting resin F, wherein the thermosetting resin I is (please refer to the preparation method of table 6 and preparation example 9 for composition ), photocurable resin F series is TCDMA/MMA/(GMA+MAA)/MAA=3/70/23.5/3.5 (weight ratio is 3:70:23.5 : 3.5) photocurable resin of the copolymer. In the related experiment 2, the ratio (Binder/Monomer Ratio) of the photocurable resin to the monomer of the polymerizable unsaturated compound of the colored resin composition was further changed. According to the experimental results, when the ratio (Binder / Monomer Ratio) of the photocurable resin to the monomer of the polymerizable unsaturated compound is about 6.7% to about 300%, the formed colored film layer has a good or acceptable mushroom shape Sections (as shown in Figures 4A to 4G), and the undercut depths are all less than 1.0 μm, and the edge of the colored film layer formed on the substrate also has good or acceptable edge integrity when inspected with an optical microscope.

再者,在一些實施例中,例如實驗例2-1~2-6所使用的光固性樹脂相對於聚合性不飽和化合物的單體的比例(Binder / Monomer Ratio)在大約6.7%~大約166.7%時,形成的著色膜層具有良好的蘑菇狀剖面,底切深度小於1.0μm,且以光學顯微鏡檢視基板上形成的著色膜層的邊緣也具有良好甚至優異的邊緣完整度。Furthermore, in some embodiments, for example, the ratio (Binder/Monomer Ratio) of the photocurable resin used in Experimental Examples 2-1 to 2-6 relative to the monomer of the polymerizable unsaturated compound is about 6.7% to about 6.7%. At 166.7%, the formed colored film has a good mushroom-shaped section, the undercut depth is less than 1.0 μm, and the edge of the formed colored film on the substrate also has good or even excellent edge integrity when inspected with an optical microscope.

<相關實驗三:著色樹脂組成物的鹼可溶性樹脂中包含不同的熱固性樹脂><Related experiment 3: Different thermosetting resins are included in the alkali-soluble resin of the colored resin composition>

請參照表6和表7。相關實驗三中,實驗例3-1~3-3中之各著色樹脂組成物中所使用的熱固性樹脂的成分(例如單體比例)與特性(例如其重量平均分子量及所包含的-OH基團及-COOH基團),係列於表6。Please refer to Table 6 and Table 7. In the relevant experiment 3, the components (such as the monomer ratio) and characteristics (such as the weight average molecular weight and the -OH group contained in the thermosetting resin used in each of the colored resin compositions in the experimental examples 3-1 to 3-3) group and -COOH group), series in Table 6.

表6 熱固性樹脂品名 單體比例(%mol) 分子量 COOH基團 I EDCPA/MAA=84.9/15.1 7960 15.1 % /mol J EDCPA/MAA =82.9/17.1 18650 17% /mol K EDCPA/MAA =81.7/18.3 24800 18.3%/mol Table 6 Thermosetting resin product name Monomer ratio (%mol) molecular weight COOH group I EDCPA/MAA=84.9/15.1 7960 15.1 %/mol J EDCPA/MAA =82.9/17.1 18650 17%/mol K EDCPA/MAA =81.7/18.3 24800 18.3%/mol

再者,對應表6列出的熱固性樹脂,以熱固性樹脂K為例,其化學式1-4如下:

Figure 02_image013
[化學式1-4] Furthermore, corresponding to the thermosetting resins listed in Table 6, taking the thermosetting resin K as an example, its chemical formulas 1-4 are as follows:
Figure 02_image013
[Chemical formula 1-4]

相關實驗三中,各個實驗例的著色樹脂組成物的特性、在基板上形成的著色膜層後通過掃描式電子顯微鏡(SEM)檢視膜層的邊緣和底切部分、以及量測的底切深度(undercut depth)的評價結果,係列於表7。可同時參照表6與第5A~5C圖,其中第5A~5C圖係分別為根據實驗例3-1~3-3的SEM圖的膜層邊緣和底切部分的簡單示意圖,圖中係示出各實驗例的基板50上之局部光阻結構51及底切深度d。再者,以放大倍率20倍和50倍的光學顯微鏡分別觀察各實驗的著色膜層的邊緣是否完整的評價結果,亦列於表7。In the relevant experiment 3, the characteristics of the colored resin composition of each experimental example, the edge and undercut portion of the film layer were inspected by scanning electron microscope (SEM) after the colored film layer formed on the substrate, and the measured undercut depth The evaluation results of (undercut depth) are listed in Table 7. Table 6 and Figures 5A to 5C can be referred to at the same time, wherein Figures 5A to 5C are respectively simple schematic diagrams of the film edge and the undercut portion of the SEM images according to Experimental Examples 3-1 to 3-3, which are shown in the figures. The partial photoresist structure 51 and the undercut depth d on the substrate 50 of each experimental example are shown. Furthermore, the evaluation results of whether the edges of the colored film layers in each experiment were observed with an optical microscope with a magnification of 20 times and 50 times, respectively, are also listed in Table 7.

表7 實驗例 熱固性樹脂 分子量 酸價 底切深度 底切評價 (SEM) 著色膜層邊緣完整度(OM 20X & 50X) 總評價 實驗3-1 I 7960 111 0.715 μm 實驗3-2 J 18650 119 0.515 μm 實驗3-3 K 24800 132 6.07 μm X X X Table 7 Experimental example Thermosetting resin molecular weight Acid value Undercut depth Undercut Evaluation (SEM) Colored Film Edge Integrity (OM 20X & 50X) Overall rating Experiment 3-1 I 7960 111 0.715 μm Experiment 3-2 J 18650 119 0.515 μm Experiment 3-3 K 24800 132 6.07 μm X X X

根據上述的相關實驗三(使用相同的光固性樹脂但使用不同的熱固性樹脂)的結果顯示,例如實驗例3-1和3-2提出的著色樹脂組成物的鹼可溶性樹脂,其包含的熱固性樹脂的重量平均分子量介於大約5000~大約20000,氫氧化鉀(KOH)滴定酸價係介於大約100 mg/g ~大約120 mg/g,所形成的著色膜層具有良好或可接受的蘑菇狀剖面(如第5A、5B圖所示),底切深度皆小於1.0μm(分別為0.715 μm和0.515 μm),且以光學顯微鏡檢視基板上形成的著色膜層的邊緣也具有良好或者可接受的邊緣完整度。According to the results of the above-mentioned related experiment 3 (using the same photosetting resin but using different thermosetting resins), it is shown that, for example, the alkali-soluble resins of the coloring resin compositions proposed in Experimental Examples 3-1 and 3-2 contain thermosetting The weight average molecular weight of the resin is between about 5000 and about 20000, and the potassium hydroxide (KOH) titration acid value is between about 100 mg/g and about 120 mg/g, and the formed pigmented film layer has good or acceptable mushroom (as shown in Figures 5A and 5B), the undercut depths are all less than 1.0 μm (0.715 μm and 0.515 μm, respectively), and the edge of the colored film layer formed on the substrate is also good or acceptable when inspected with an optical microscope edge integrity.

再者,在一些實施例中,鹼可溶性樹脂所包含的熱固性樹脂,其中包含的-COOH基團係佔熱固性樹脂的大約18mol%或者小於大約18 mol%,例如實驗例3-1和3-2的熱固性樹脂包含的-COOH基團係分別佔熱固性樹脂的15.1 mol%和17 mol%,所形成的著色膜層具有小於1.0μm的底切深度皆以及良好的邊緣完整度。Furthermore, in some embodiments, the thermosetting resin contained in the alkali-soluble resin, the -COOH group contained therein accounts for about 18 mol % or less than about 18 mol % of the thermosetting resin, such as experimental examples 3-1 and 3-2. The -COOH groups contained in the thermosetting resin account for 15.1 mol% and 17 mol% of the thermosetting resin, respectively, and the formed colored film layer has an undercut depth of less than 1.0 μm and good edge integrity.

在一些其他實施例中,例如實驗例3-1,鹼可溶性樹脂所包含的熱固性樹脂的重量平均分子量低於大約10000,搭配氫氧化鉀(KOH)滴定酸價係介於大約100 mg/g ~大約120 mg/g。形成的著色膜層具有良好的剖面,除了底切深度小於1.0μm,以光學顯微鏡檢視基板上形成的著色膜層的邊緣也具有十分良好的邊緣完整度。In some other embodiments, such as Experimental Example 3-1, the weight average molecular weight of the thermosetting resin contained in the alkali-soluble resin is less than about 10,000, and the acid value of the titration with potassium hydroxide (KOH) is between about 100 mg/g ~ About 120 mg/g. The formed coloring film layer has a good cross section, except that the undercut depth is less than 1.0 μm, and the edge of the coloring film layer formed on the substrate is inspected with an optical microscope, and also has very good edge integrity.

<相關實驗四:著色樹脂組成物的鹼可溶性樹脂中包含兩種光固性樹脂><Related experiment 4: The alkali-soluble resin of the colored resin composition contains two kinds of photocurable resins>

請參照表8和表9。相關實驗四中,實驗例4-1~4-3之著色樹脂組成物的成分及其重量百分比係列於表8。如表8所列出的實驗例4-1~4-3中,各實驗例之著色樹脂組成物的鹼可溶性樹脂係包含一種熱固性樹脂(例如:I)和兩種光固性樹脂(例如5%的F及另一種5%的光固性樹脂A、C、或H)。Please refer to Table 8 and Table 9. In the relevant experiment 4, the components and weight percentages of the colored resin compositions of the experimental examples 4-1 to 4-3 are listed in Table 8. In the experimental examples 4-1 to 4-3 listed in Table 8, the alkali-soluble resin system of the colored resin composition of each experimental example comprises a thermosetting resin (for example: 1) and two photosetting resins (for example, 5 % F and another 5% photocurable resin A, C, or H).

在相關實驗四中,所採用的熱固性樹脂I、光固性樹脂A和C的成分及性質如前述,而光固性樹脂H的共聚物單體比例(% / mol)則為:TCDMA/ MMA/ MAA/(MAA+GMA) = 3/ 27/ 18.9/ 51.1。光固性樹脂H的分子量為17800,底切深度為6.11μm,COOH基團為18.9%mol。光固性樹脂H的製備方法例如參照後續製備例8。In the relevant experiment 4, the components and properties of the thermosetting resin I, photocurable resins A and C used are as described above, and the copolymer monomer ratio (%/mol) of the photocurable resin H is: TCDMA/MMA /MAA/(MAA+GMA) = 3/ 27/ 18.9/ 51.1. The molecular weight of the photocurable resin H was 17800, the undercut depth was 6.11 μm, and the COOH group was 18.9% mol. For the preparation method of the photocurable resin H, refer to the subsequent preparation example 8, for example.

表8 種類 品名 實驗4-1 實驗4-2 實驗 4-3 著色劑 B15:6 20 % 熱固性樹脂 I 10 % 光固性樹脂 F 5% 光固性樹脂 A 5% - - C - 5% - H - - 5% 聚合性不飽和化合物之單體 DPHE 10% 光聚合 起始劑 OXIME 5% 溶劑 PGMEA 45% Table 8 type Product name Experiment 4-1 Experiment 4-2 Experiment 4-3 Colorant B15:6 20% Thermosetting resin I 10% photocurable resin F 5% photocurable resin A 5% - - C - 5% - H - - 5% Monomers of polymerizable unsaturated compounds DPHE 10% photopolymerization initiator OXIME 5% solvent PGMEA 45%

相關實驗四中,各個實驗例的著色樹脂組成物的特性、在基板上形成的著色膜層後通過掃描式電子顯微鏡(SEM)檢視膜層的邊緣和底切部分、以及量測的底切深度(undercut depth)的評價結果,係列於表9。可同時參照表9與第6A~6C圖,其中第6A~6C圖係分別為根據實驗例4-1~4-3的SEM圖的膜層邊緣和底切部分的簡單示意圖,圖中係示出各實驗例的基板60上之局部光阻結構61及底切深度d。再者,以放大倍率20倍和50倍的光學顯微鏡分別觀察實驗例4-1~4-3的各個著色膜層的邊緣是否完整,其評價結果亦列於表9。In the relevant experiment 4, the characteristics of the colored resin composition of each experimental example, the edge and undercut portion of the film layer were inspected by scanning electron microscope (SEM) after the colored film layer formed on the substrate, and the measured undercut depth The evaluation results of (undercut depth) are listed in Table 9. Table 9 and Figures 6A to 6C may be referred to at the same time, wherein Figures 6A to 6C are respectively simple schematic diagrams of the film edge and the undercut portion of the SEM images according to Experimental Examples 4-1 to 4-3, which are shown in the figures. The partial photoresist structure 61 and the undercut depth d on the substrate 60 of each experimental example are shown. Furthermore, whether the edges of each colored film layer of Experimental Examples 4-1 to 4-3 are complete was observed with an optical microscope with a magnification of 20 times and 50 times, respectively. The evaluation results are also listed in Table 9.

表9 實驗例 光固性樹脂 分子量 酸價 底切深度 底切評價 (SEM) 著色膜層邊緣完整度(OM 20X & 50X) 總評價 實驗4-1 A 27000 86.9 5.27 μm X X X 實驗4-3 C 17200 28 0.99 μm 實驗4-4 H 17800 66 1.12 μm Table 9 Experimental example photocurable resin molecular weight Acid value Undercut depth Undercut Evaluation (SEM) Colored Film Edge Integrity (OM 20X & 50X) Overall rating Experiment 4-1 A 27000 86.9 5.27 μm X X X Experiment 4-3 C 17200 28 0.99 μm Experiment 4-4 H 17800 66 1.12 μm

根據上述的相關實驗四的結果顯示,可以混和兩種的光固性樹脂,亦可製得剖面形狀良好、底切深度接近或小於1.0μm、以及膜層邊緣完整的著色膜層。According to the results of the above-mentioned related experiment 4, two kinds of photocurable resins can be mixed, and a colored film layer with a good cross-sectional shape, an undercut depth close to or less than 1.0 μm, and a complete film edge can also be obtained.

以實驗4-3為例,其除了使用如上述實驗例1-6的光固性樹脂F還使用了光固性樹脂H,且重量平均分子量小於20000,所形成的著色膜層具有良好的蘑菇狀剖面(如第6C圖所示),底切深度1.12μm(接近1.0μm),且以光學顯微鏡檢視基板上形成的著色膜層的邊緣具有可接受的邊緣完整度。Taking experiment 4-3 as an example, in addition to using the photocurable resin F as in the above-mentioned experimental example 1-6, photocurable resin H is also used, and the weight average molecular weight is less than 20,000, and the formed coloring film layer has a good mushroom. 6C), the undercut depth was 1.12 μm (close to 1.0 μm), and the edges of the pigmented film layer formed on the substrate had acceptable edge integrity under optical microscope inspection.

再者,以實驗4-2為例,其使用如上述實驗例1-6的光固性樹脂F以及例如實驗例1-3的光固性樹脂C,且重量平均分子量小於20000,所形成的著色膜層具有良好的蘑菇狀剖面(如第6B圖所示),底切深度0.99μm (小於1.0μm),且以光學顯微鏡檢視基板上形成的著色膜層的邊緣具有良好的邊緣完整度。Furthermore, taking Experiment 4-2 as an example, it uses the photocurable resin F of the above-mentioned experimental example 1-6 and the photocurable resin C of the experimental example 1-3, and the weight average molecular weight is less than 20000. The colored film layer has a good mushroom-shaped cross-section (as shown in Figure 6B), the undercut depth is 0.99 μm (less than 1.0 μm), and the edges of the colored film layer formed on the substrate are inspected with an optical microscope and have good edge integrity.

<光固性樹脂及熱固性樹脂的合成><Synthesis of photosetting resin and thermosetting resin>

如上述光固性樹脂A~H的合成方法,分別如以下製備例1~8所述。如上述熱固性樹脂I、J、K的合成方法,分別如以下製備例9~11所述。為方便對照,係將上述實驗所使用到的光固性樹脂A~H的組成與其製備方式整理如下。 實驗 光固性樹脂 共聚物的單體比例 (% / mol) 製備方式 分子量(Mw) 1-1 A TCDMA/BZMA/ MAA/(GMA+MAA) =10/50/25/15 製備例1 27000 1-2 B BZMA/MAA = 60/40 製備例2 10500 1-3 C TCDMA/ MMA/ MAA/( MAA+GMA) = 3/ 27/6.9 /63.1 製備例3 17200 1-4 D TCDMA/ MMA/ MAA / (MAA+GMA) = 3/ 27/ 31.2/ 38.8 製備例4 6100 1-5 E TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/ 27/ 9.1/ 60.9 製備例5 6400 1-6 F TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/70/ 3.5/ 23.5 製備例6 6500 1-7 G TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/ 27/ 31.2/ 38.8 製備例7 23900 - H TCDMA/ MMA/ MAA/(MAA+GMA) = 3/ 27/ 18.9/ 51.1 製備例8 17800 The synthesis methods of the above-mentioned photocurable resins A to H are described in the following Preparation Examples 1 to 8, respectively. The synthetic methods of the above-mentioned thermosetting resins I, J, and K are respectively described in the following Preparation Examples 9 to 11. For the convenience of comparison, the compositions and preparation methods of the photocurable resins A~H used in the above experiments are arranged as follows. experiment photocurable resin Monomer ratio of copolymer (%/mol) Preparation method Molecular weight (Mw) 1-1 A TCDMA/BZMA/MAA/(GMA+MAA) =10/50/25/15 Preparation Example 1 27000 1-2 B BZMA/MAA = 60/40 Preparation Example 2 10500 1-3 C TCDMA/MMA/MAA/(MAA+GMA) = 3/27/6.9/63.1 Preparation Example 3 17200 1-4 D TCDMA/ MMA/ MAA / (MAA+GMA) = 3/ 27/ 31.2/ 38.8 Preparation Example 4 6100 1-5 E TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/ 27/ 9.1/ 60.9 Preparation Example 5 6400 1-6 F TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/70/ 3.5/ 23.5 Preparation Example 6 6500 1-7 G TCDMA/ MMA/ MAA/ (MAA+GMA) = 3/ 27/ 31.2/ 38.8 Preparation Example 7 23900 - H TCDMA/MMA/MAA/(MAA+GMA) = 3/ 27/ 18.9/ 51.1 Preparation Example 8 17800

[製備例1]:[Preparation Example 1]:

於具備有攪拌裝置、滴下漏斗、冷凝器、溫度計及氣體導入管的燒瓶中,置入213.6g之丙二醇單甲基醚乙酸酯後,邊以氮氣取代邊攪拌,昇溫至90°C。接著,將已於由88.2g(0.50莫耳)之甲基丙烯酸苄基酯、22.0g(0.1莫耳)之甲基丙烯酸、三環癸基酯及28.9g(0.40莫耳)g之甲基丙烯酸所成之單體混合物中添加4.0g之t-丁基過氧-2-乙基已酸酯者,自滴下漏斗滴入前述燒瓶中。滴下終了後,在95°C下攪拌約3小時進行共聚合反應,製造共聚物。接著,使前述燒瓶內取代為空氣之後,加入21.4g(0.15莫耳)之環氧丙基甲基丙烯酸酯、0.6g之三苯基膦(觸媒)及0.6g之氫醌(聚合禁止劑),於120°C進行約6小時開環加成反應,製造共聚物。接著,於此反應溶液中,加入221.3g之丙二醇單甲基醚,得到固形分濃度30質量%之共聚物溶液(重量平均分子量27,000)。製備例1所製成的共聚物(光固性樹脂A)具有如化學式1-1所示的構成單元。In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet pipe, 213.6 g of propylene glycol monomethyl ether acetate was placed, and the temperature was raised to 90° C. with stirring while replacing with nitrogen. Next, a mixture of 88.2 g (0.50 mol) of benzyl methacrylate, 22.0 g (0.1 mol) of methacrylic acid, tricyclodecyl ester and 28.9 g (0.40 mol) of methyl 4.0 g of t-butylperoxy-2-ethylhexanoate was added to the monomer mixture made of acrylic acid, and dropped into the aforementioned flask from a dropping funnel. After the dropping was completed, the copolymer was produced by stirring at 95° C. for about 3 hours to carry out a copolymerization reaction. Next, after replacing the inside of the flask with air, 21.4 g (0.15 moles) of glycidyl methacrylate, 0.6 g of triphenylphosphine (catalyst) and 0.6 g of hydroquinone (polymerization inhibitor) were added ), carry out ring-opening addition reaction at 120 ℃ for about 6 hours, manufacture copolymer. Next, 221.3 g of propylene glycol monomethyl ether was added to this reaction solution to obtain a copolymer solution (weight average molecular weight 27,000) having a solid content concentration of 30% by mass. The copolymer (photocurable resin A) prepared in Preparation Example 1 has a structural unit as shown in Chemical Formula 1-1.

[化學式1-1]

Figure 02_image015
[Chemical formula 1-1]
Figure 02_image015

[製備例2]:[Preparation Example 2]:

於具備有攪拌裝置、滴下漏斗、冷凝器、溫度計及氣體導入管的燒瓶中,置入213.6g之丙二醇單甲基醚乙酸酯後,邊以氮氣取代邊攪拌,昇溫至90°C。接著,將已於由88.2g(0.60莫耳)之甲基丙烯酸苄基酯、22.0g(0.4莫耳)之甲基丙烯酸、之單體混合物中添加4.0g之t-丁基過氧-2-乙基已酸酯者,自滴下漏斗滴入前述燒瓶中。滴下終了後,在95°C下攪拌1.5小時進行共聚合反應,製造共聚物。接著,使前述燒瓶內取代為空氣之後,加入221.3g之丙二醇單甲基醚,得到固形分濃度30質量%之共聚物溶液(重量平均分子量10,500)。製備例2所製成的共聚物(光固性樹脂B)具有如化學式1-2所示的構成單元。In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet pipe, 213.6 g of propylene glycol monomethyl ether acetate was placed, and the temperature was raised to 90° C. with stirring while replacing with nitrogen. Next, 4.0 g of t-butylperoxy-2 was added to the monomer mixture consisting of 88.2 g (0.60 mol) of benzyl methacrylate, 22.0 g (0.4 mol) of methacrylic acid, -Ethyl caproate is dropped into the aforementioned flask from a dropping funnel. After the dropping was completed, the copolymer was stirred at 95° C. for 1.5 hours to carry out a copolymerization reaction to produce a copolymer. Next, after replacing the inside of the flask with air, 221.3 g of propylene glycol monomethyl ether was added to obtain a copolymer solution (weight average molecular weight: 10,500) having a solid content concentration of 30% by mass. The copolymer (photocurable resin B) prepared in Preparation Example 2 has a structural unit as shown in Chemical Formula 1-2.

[化學式1-2]

Figure 02_image010
[Chemical formula 1-2]
Figure 02_image010

[製備例3]:[Preparation Example 3]:

於具備有攪拌裝置、滴下漏斗、冷凝器、溫度計及氣體導入管的燒瓶中,置入213.6g之丙二醇單甲基醚乙酸酯後,邊以氮氣取代邊攪拌,昇溫至90°C。接著,將已於由30.0g(0.30莫耳)之甲基丙烯酸甲基酯、11.0g(0.05莫耳)之甲基丙烯酸三環癸基酯及46.9g(0.65莫耳)g之甲基丙烯酸所成之單體混合物中添加4.0g之t-丁基過氧-2-乙基已酸酯者,自滴下漏斗滴入前述燒瓶中。滴下終了後,在95°C下攪拌約2小時進行共聚合反應,製造共聚物。接著,使前述燒瓶內取代為空氣之後,加入82.5g(0.58莫耳)之環氧丙基甲基丙烯酸酯、0.6g之三苯基膦(觸媒)及0.6g之氫醌(聚合禁止劑),於120°C進行約7小時開環加成反應,製造共聚物。接著,於此反應溶液中,加入221.3g之丙二醇單甲基醚,得到固形分濃度30質量%之共聚物溶液(重量平均分子量17,200)。製備例3所製成的共聚物(光固性樹脂C)具有如化學式1-3所示的構成單元。In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet pipe, 213.6 g of propylene glycol monomethyl ether acetate was placed, and the temperature was raised to 90° C. with stirring while replacing with nitrogen. Next, 30.0 g (0.30 moles) of methyl methacrylate, 11.0 g (0.05 moles) of tricyclodecyl methacrylate and 46.9 g (0.65 moles) of methacrylic acid were mixed with To the obtained monomer mixture, 4.0 g of t-butylperoxy-2-ethylhexanoate was added, and it was dropped into the aforementioned flask from a dropping funnel. After the dropping was completed, the copolymer was produced by stirring at 95° C. for about 2 hours to carry out a copolymerization reaction. Next, after replacing the inside of the flask with air, 82.5 g (0.58 moles) of glycidyl methacrylate, 0.6 g of triphenylphosphine (catalyst) and 0.6 g of hydroquinone (polymerization inhibitor) were added ), at 120 DEG C, carry out ring-opening addition reaction for about 7 hours, manufacture copolymer. Next, 221.3 g of propylene glycol monomethyl ether was added to this reaction solution to obtain a copolymer solution (weight average molecular weight 17,200) having a solid content concentration of 30% by mass. The copolymer (photocurable resin C) prepared in Preparation Example 3 has the constituent unit shown in Chemical Formula 1-3.

[化學式1-3]

Figure 02_image001
[Chemical formula 1-3]
Figure 02_image001

[製備例4]:[Preparation Example 4]:

於具備有攪拌裝置、滴下漏斗、冷凝器、溫度計及氣體導入管的燒瓶中,置入213.6g之丙二醇單甲基醚乙酸酯後,邊以氮氣取代邊攪拌,昇溫至90°C。接著,將已於由30.0g(0.30莫耳)之甲基丙烯酸甲基酯、11.0g(0.05莫耳)之甲基丙烯酸三環癸基酯及46.9g(0.65莫耳)g之甲基丙烯酸所成之單體混合物中添加4.0g之t-丁基過氧-2-乙基已酸酯者,自滴下漏斗滴入前述燒瓶中。滴下終了後,在95°C下攪拌約1小時進行共聚合反應,製造共聚物。接著,使前述燒瓶內取代為空氣之後,加入49.8g(0.35莫耳)之環氧丙基甲基丙烯酸酯、0.6g之三苯基膦(觸媒)及0.6g之氫醌(聚合禁止劑),於120°C進行約3小時開環加成反應,製造共聚物。接著,於此反應溶液中,加入221.3g之丙二醇單甲基醚,得到固形分濃度30質量%之共聚物溶液(重量平均分子量6,100)。製備例4所製成的共聚物(光固性樹脂D)具有如上化學式1-3所示的構成單元。In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet pipe, 213.6 g of propylene glycol monomethyl ether acetate was placed, and the temperature was raised to 90° C. with stirring while replacing with nitrogen. Next, 30.0 g (0.30 moles) of methyl methacrylate, 11.0 g (0.05 moles) of tricyclodecyl methacrylate and 46.9 g (0.65 moles) of methacrylic acid were mixed with To the obtained monomer mixture, 4.0 g of t-butylperoxy-2-ethylhexanoate was added, and it was dropped into the aforementioned flask from a dropping funnel. After completion of dropping, the copolymer was produced by stirring at 95° C. for about 1 hour to carry out a copolymerization reaction. Next, after replacing the inside of the flask with air, 49.8 g (0.35 moles) of glycidyl methacrylate, 0.6 g of triphenylphosphine (catalyst) and 0.6 g of hydroquinone (polymerization inhibitor) were added ), at 120 ℃, carry out the ring-opening addition reaction for about 3 hours, manufacture copolymer. Next, 221.3 g of propylene glycol monomethyl ether was added to this reaction solution to obtain a copolymer solution (weight average molecular weight 6,100) having a solid content concentration of 30% by mass. The copolymer (photocurable resin D) prepared in Preparation Example 4 has the constituent units shown in the above Chemical Formulas 1-3.

[製備例5]:[Preparation Example 5]:

於具備有攪拌裝置、滴下漏斗、冷凝器、溫度計及氣體導入管的燒瓶中,置入213.6g之丙二醇單甲基醚乙酸酯後,邊以氮氣取代邊攪拌,昇溫至90°C。接著,將已於由30.0g(0.30莫耳)之甲基丙烯酸甲基酯、11.0g(0.05莫耳)之甲基丙烯酸三環癸基酯及46.9g(0.65莫耳)g之甲基丙烯酸所成之單體混合物中添加4.0g之t-丁基過氧-2-乙基已酸酯者,自滴下漏斗滴入前述燒瓶中。滴下終了後,在95°C下攪拌約1小時進行共聚合反應,製造共聚物。接著,使前述燒瓶內取代為空氣之後,加入78.2g(0.55莫耳)之環氧丙基甲基丙烯酸酯、0.6g之三苯基膦(觸媒)及0.6g之氫醌(聚合禁止劑),於120°C進行約6小時開環加成反應,製造共聚物。接著,於此反應溶液中,加入221.3g之丙二醇單甲基醚,得到固形分濃度30質量%之共聚物溶液(重量平均分子量6,400)。製備例5所製成的共聚物(光固性樹脂E)具有如以上化學式1-3所示的構成單元。In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet pipe, 213.6 g of propylene glycol monomethyl ether acetate was placed, and the temperature was raised to 90° C. with stirring while replacing with nitrogen. Next, 30.0 g (0.30 moles) of methyl methacrylate, 11.0 g (0.05 moles) of tricyclodecyl methacrylate and 46.9 g (0.65 moles) of methacrylic acid were mixed with To the obtained monomer mixture, 4.0 g of t-butylperoxy-2-ethylhexanoate was added, and it was dropped into the aforementioned flask from a dropping funnel. After completion of dropping, the copolymer was produced by stirring at 95° C. for about 1 hour to carry out a copolymerization reaction. Next, after replacing the inside of the flask with air, 78.2 g (0.55 moles) of glycidyl methacrylate, 0.6 g of triphenylphosphine (catalyst) and 0.6 g of hydroquinone (polymerization inhibitor) were added ), carry out ring-opening addition reaction at 120 ℃ for about 6 hours, manufacture copolymer. Next, 221.3 g of propylene glycol monomethyl ether was added to this reaction solution to obtain a copolymer solution (weight average molecular weight 6,400) having a solid content concentration of 30% by mass. The copolymer (photocurable resin E) prepared in Preparation Example 5 has the constituent units shown in the above Chemical Formulas 1-3.

[製備例6]:[Preparation Example 6]:

於具備有攪拌裝置、滴下漏斗、冷凝器、溫度計及氣體導入管的燒瓶中,置入213.6g之丙二醇單甲基醚乙酸酯後,邊以氮氣取代邊攪拌,昇溫至90°C。接著,將已於由70.0g(0.70莫耳)之甲基丙烯酸甲基酯、11.0g(0.05莫耳)之甲基丙烯酸三環癸基酯及18.1g(0.25莫耳)g之甲基丙烯酸所成之單體混合物中添加4.0g之t-丁基過氧-2-乙基已酸酯者,自滴下漏斗滴入前述燒瓶中。滴下終了後,在95°C下攪拌約1小時進行共聚合反應,製造共聚物。接著,使前述燒瓶內取代為空氣之後,加入28.5g(0.20莫耳)之環氧丙基甲基丙烯酸酯、0.6g之三苯基膦(觸媒)及0.6g之氫醌(聚合禁止劑),於120°C進行8小時開環加成反應,製造共聚物。接著,於此反應溶液中,加入221.3g之丙二醇單甲基醚,得到固形分濃度30質量%之共聚物溶液(重量平均分子量6,500)。製備例6所製成的共聚物(光固化樹酯-F)具有如以上化學式1-3所示的構成單元。In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet pipe, 213.6 g of propylene glycol monomethyl ether acetate was placed, and the temperature was raised to 90° C. with stirring while replacing with nitrogen. Next, a mixture of 70.0 g (0.70 moles) of methyl methacrylate, 11.0 g (0.05 moles) of tricyclodecyl methacrylate and 18.1 g (0.25 moles) of methacrylic acid To the obtained monomer mixture, 4.0 g of t-butylperoxy-2-ethylhexanoate was added, and it was dropped into the aforementioned flask from a dropping funnel. After completion of dropping, the copolymer was produced by stirring at 95° C. for about 1 hour to carry out a copolymerization reaction. Next, after replacing the inside of the flask with air, 28.5 g (0.20 moles) of glycidyl methacrylate, 0.6 g of triphenylphosphine (catalyst) and 0.6 g of hydroquinone (polymerization inhibitor) were added ), carried out ring-opening addition reaction at 120 DEG C for 8 hours, and produced copolymer. Next, 221.3 g of propylene glycol monomethyl ether was added to this reaction solution to obtain a copolymer solution (weight average molecular weight 6,500) having a solid content concentration of 30% by mass. The copolymer (photocurable resin-F) prepared in Preparation Example 6 has the structural unit shown in the above Chemical Formula 1-3.

[製備例7]:[Preparation Example 7]:

於具備有攪拌裝置、滴下漏斗、冷凝器、溫度計及氣體導入管的燒瓶中,置入213.6g之丙二醇單甲基醚乙酸酯後,邊以氮氣取代邊攪拌,昇溫至90°C。接著,將已於由30.0g(0.30莫耳)之甲基丙烯酸甲基酯、11.0g(0.05莫耳)之甲基丙烯酸三環癸基酯及46.9g(0.65莫耳)g之甲基丙烯酸所成之單體混合物中添加4.0g之t-丁基過氧-2-乙基已酸酯者,自滴下漏斗滴入前述燒瓶中。滴下終了後,在95°C下攪拌約3小時進行共聚合反應,製造共聚物。接著,使前述燒瓶內取代為空氣之後,加入49.8g(0.35莫耳)之環氧丙基甲基丙烯酸酯、0.6g之三苯基膦(觸媒)及0.6g之氫醌(聚合禁止劑),於120°C進行約3小時開環加成反應,製造共聚物。接著,於此反應溶液中,加入221.3g之丙二醇單甲基醚,得到固形分濃度30質量%之共聚物溶液(重量平均分子量23,900)。製備例7所製成的共聚物(光固性樹脂G)具有如以上化學式1-3所示的構成單元。In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet pipe, 213.6 g of propylene glycol monomethyl ether acetate was placed, and the temperature was raised to 90° C. with stirring while replacing with nitrogen. Next, 30.0 g (0.30 moles) of methyl methacrylate, 11.0 g (0.05 moles) of tricyclodecyl methacrylate and 46.9 g (0.65 moles) of methacrylic acid were mixed with To the obtained monomer mixture, 4.0 g of t-butylperoxy-2-ethylhexanoate was added, and it was dropped into the aforementioned flask from a dropping funnel. After the dropping was completed, the copolymer was produced by stirring at 95° C. for about 3 hours to carry out a copolymerization reaction. Next, after replacing the inside of the flask with air, 49.8 g (0.35 moles) of glycidyl methacrylate, 0.6 g of triphenylphosphine (catalyst) and 0.6 g of hydroquinone (polymerization inhibitor) were added ), at 120 ℃, carry out the ring-opening addition reaction for about 3 hours, manufacture copolymer. Next, 221.3 g of propylene glycol monomethyl ether was added to this reaction solution to obtain a copolymer solution (weight average molecular weight: 23,900) having a solid content concentration of 30% by mass. The copolymer (photocurable resin G) prepared in Preparation Example 7 has the constituent units shown in the above Chemical Formulas 1-3.

[製備例8]:[Preparation Example 8]:

於具備有攪拌裝置、滴下漏斗、冷凝器、溫度計及氣體導入管的燒瓶中,置入213.6g之丙二醇單甲基醚乙酸酯後,邊以氮氣取代邊攪拌,昇溫至90°C。接著,將已於由30.0g(0.30莫耳)之甲基丙烯酸甲基酯、11.0g(0.05莫耳)之甲基丙烯酸三環癸基酯及46.9g(0.65莫耳)g之甲基丙烯酸所成之單體混合物中添加4.0g之t-丁基過氧-2-乙基已酸酯者,自滴下漏斗滴入前述燒瓶中。滴下終了後,在95°C下攪拌約2小時進行共聚合反應,製造共聚物。接著,使前述燒瓶內取代為空氣之後,加入64.0g(0.45莫耳)之環氧丙基甲基丙烯酸酯、0.6g之三苯基膦(觸媒)及0.6g之氫醌(聚合禁止劑),於120°C進行約4小時開環加成反應,製造共聚物。接著,於此反應溶液中,加入221.3g之丙二醇單甲基醚,得到固形分濃度30質量%之共聚物溶液(重量平均分子量17,800)。製備例8所製成的共聚物(光固性樹脂H)具有如以上化學式1-3所示的構成單元。In a flask equipped with a stirring device, a dropping funnel, a condenser, a thermometer, and a gas inlet pipe, 213.6 g of propylene glycol monomethyl ether acetate was placed, and the temperature was raised to 90° C. with stirring while replacing with nitrogen. Next, 30.0 g (0.30 moles) of methyl methacrylate, 11.0 g (0.05 moles) of tricyclodecyl methacrylate and 46.9 g (0.65 moles) of methacrylic acid were mixed with To the obtained monomer mixture, 4.0 g of t-butylperoxy-2-ethylhexanoate was added, and it was dropped into the aforementioned flask from a dropping funnel. After the dropping was completed, the copolymer was produced by stirring at 95° C. for about 2 hours to carry out a copolymerization reaction. Next, after replacing the inside of the flask with air, 64.0 g (0.45 moles) of glycidyl methacrylate, 0.6 g of triphenylphosphine (catalyst) and 0.6 g of hydroquinone (polymerization inhibitor) were added ), carry out ring-opening addition reaction at 120 ℃ for about 4 hours, manufacture copolymer. Next, 221.3 g of propylene glycol monomethyl ether was added to this reaction solution to obtain a copolymer solution (weight average molecular weight 17,800) having a solid content concentration of 30% by mass. The copolymer (photocurable resin H) prepared in Preparation Example 8 has the constituent units shown in the above Chemical Formulas 1-3.

再者,熱固性樹脂I為自行合成的樹脂材料,請參照以下製備例9-1~9-2。製備例9-1之熱固性樹脂I-1與製備例9-2之熱固性樹脂I-2可擇一或混合使用,以作為熱固性樹脂I之材料。Furthermore, the thermosetting resin I is a self-synthesized resin material, please refer to the following preparation examples 9-1 to 9-2. The thermosetting resin I-1 of the preparation example 9-1 and the thermosetting resin I-2 of the preparation example 9-2 can be used individually or in combination as the material of the thermosetting resin I.

[製備例9-1:製備熱固性樹脂I-1][Preparation Example 9-1: Preparation of Thermosetting Resin I-1]

於具備回流冷凝器、滴液漏斗及攪拌機之燒瓶內使適量氮氣流動而設為氮氣環境,並放入丙二醇單甲基醚乙酸酯100份,一面進行攪拌,一面加熱至85°C為止。接著,向該燒瓶內,使用滴入泵以約5小時滴入將甲基丙烯酸(用以形成下方左側的構成單元)19份、丙烯酸3,4-環氧三環[5.2.1.02,6]癸烷-8-基酯與丙烯酸3,4-環氧三環[5.2.1.02,6]癸烷-9-基酯之混合物(含有比以莫耳比計為50:50)(商品名「E-DCPA」,大賽璐股份有限公司製造)171份溶解於丙二醇單甲基醚乙酸酯40份而成之溶液。另一方面,向燒瓶內,使用另一滴入泵以約5小時滴入將聚合起始劑2,2'-偶氮雙(2,4-二甲基戊腈)26份溶解於丙二醇單甲基醚乙酸酯120份而成之溶液。待聚合起始劑之滴入結束後,約3小時保持為相同溫度,其後冷卻至室溫為止,獲得固形物成分43.5%之共聚物(熱固性樹脂I-1)之溶液。所獲得之樹脂I-1之重量平均分子量為8000。製備例9-1所製成的共聚物具有如以下化學式1-4所示的構成單元。 [化學式1-4]

Figure 02_image013
In a flask equipped with a reflux condenser, a dropping funnel, and a stirrer, an appropriate amount of nitrogen was allowed to flow to make it a nitrogen atmosphere, and 100 parts of propylene glycol monomethyl ether acetate was put in and heated to 85°C while stirring. Next, 19 parts of methacrylic acid (for forming the structural unit on the lower left side) and acrylic acid 3,4-epoxytricyclo[5.2.1.02,6] were dropped into the flask using a dropping pump for about 5 hours. A mixture of decane-8-yl ester and 3,4-epoxytricyclo[5.2.1.02,6]decane-9-yl acrylate (the content ratio is 50:50 in molar ratio) (trade name "E-DCPA", manufactured by Daicel Co., Ltd.) 171 parts were dissolved in 40 parts of propylene glycol monomethyl ether acetate. On the other hand, 26 parts of polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) dissolved in propylene glycol monolayer was added dropwise to the flask using another dripping pump for about 5 hours. A solution of 120 parts of methyl ether acetate. After the dropping of the polymerization initiator was completed, the temperature was maintained at the same temperature for about 3 hours, and then cooled to room temperature to obtain a solution of a copolymer (thermosetting resin I-1) with a solid content of 43.5%. The weight average molecular weight of the obtained resin I-1 was 8000. The copolymer prepared in Preparation Example 9-1 has the constitutional unit shown in the following Chemical Formula 1-4. [Chemical formula 1-4]
Figure 02_image013

[製備例9-2:製備熱固性樹脂I-2][Preparation Example 9-2: Preparation of Thermosetting Resin I-2]

在具備回流冷凝器、滴液漏斗及攪拌機的燒瓶內置換成氮氣氣氛,加入丙二醇單甲醚乙酸酯280份,邊攪拌邊加熱至80°C。接著,丙烯酸38份、3,4-環氧三環[5.2.1.02,6]癸烷-8-基丙烯酸酯和3,4-環氧三環[5.2.1.02]6)癸烷-9-基丙烯酸酯的混合物(含有比以摩爾比計為1:1)用5小時滴加289份、丙二醇單甲醚乙酸酯125份的混合溶液。另一方面,用6小時滴加在丙二醇單甲醚乙酸酯235份中溶解有33份的2,2-偶氮雙(2,4-二甲基戊腈)的溶液。滴加結束後,將混合物在80°C保持4小時後,冷卻至室溫,得到固體成分35.1%、B型粘度計(23°C)測定的粘度125mPas的共聚物(熱固性樹脂I-2)溶液。得到的共聚物的重均分子量(Mw)為9200。製備例9-2所製成的共聚物具有如以下化學式1-5所示的構成單元。 [化學式1-5]

Figure 02_image019
The flask equipped with a reflux condenser, a dropping funnel, and a stirrer was replaced with a nitrogen atmosphere, 280 parts of propylene glycol monomethyl ether acetate was added, and the mixture was heated to 80° C. with stirring. Next, 38 parts of acrylic acid, 3,4-epoxytricyclo[5.2.1.02,6]decane-8-yl acrylate and 3,4-epoxytricyclo[5.2.1.02]6)decane-9- 289 parts of propylene glycol monomethyl ether acetate and 125 parts of mixed solutions of propylene glycol monomethyl ether acetate were dripped over 5 hours to the mixture of acrylic acid ester (the content ratio was 1:1 in molar ratio). On the other hand, a solution in which 33 parts of 2,2-azobis(2,4-dimethylvaleronitrile) was dissolved in 235 parts of propylene glycol monomethyl ether acetate was added dropwise over 6 hours. After the dropwise addition, the mixture was kept at 80° C. for 4 hours, and then cooled to room temperature to obtain a copolymer (thermosetting resin I-2) with a solid content of 35.1% and a viscosity of 125 mPas measured by a Brookfield viscometer (23° C.). solution. The weight average molecular weight (Mw) of the obtained copolymer was 9200. The copolymer prepared in Preparation Example 9-2 had structural units as shown in the following Chemical Formulas 1-5. [Chemical formula 1-5]
Figure 02_image019

熱固性樹脂J為自行合成的樹脂材料,請參照以下製備例10-1~10-2。製備例10-1之熱固性樹脂J-1與製備例10-2之熱固性樹脂J-2可擇一或混合使用作為熱固性樹脂J之材料。Thermosetting resin J is a self-synthesized resin material, please refer to the following preparation examples 10-1 to 10-2. The thermosetting resin J-1 of the preparation example 10-1 and the thermosetting resin J-2 of the preparation example 10-2 can be used as the material of the thermosetting resin J either individually or in combination.

[製備例10-1:製備熱固性樹脂J-1][Preparation Example 10-1: Preparation of Thermosetting Resin J-1]

於具備回流冷凝器、滴液漏斗及攪拌機之燒瓶內使適量氮氣流動而設為氮氣環境,並放入丙二醇單甲基醚乙酸酯100份,一面進行攪拌,一面加熱至85°C為止。接著,向該燒瓶內,使用滴入泵以約5小時滴入將甲基丙烯酸(用以形成下方左側的構成單元)19份、丙烯酸3,4-環氧三環[5.2.1.02,6]癸烷-8-基酯與丙烯酸3,4-環氧三環[5.2.1.02,6]癸烷-9-基酯之混合物(含有比以莫耳比計為50:50)(商品名「E-DCPA」,大賽璐股份有限公司製造)171份溶解於丙二醇單甲基醚乙酸酯40份而成之溶液。另一方面,向燒瓶內,使用另一滴入泵以約5小時滴入將聚合起始劑2,2'-偶氮雙(2,4-二甲基戊腈)26份溶解於丙二醇單甲基醚乙酸酯120份而成之溶液。待聚合起始劑之滴入結束後,約4.5小時保持為相同溫度,其後冷卻至室溫為止,獲得固形物成分43.5%之共聚物(熱固性樹脂J-1)之溶液。所獲得之樹脂J-1之重量平均分子量為18000。製備例10-1所製成的共聚物具有如以上化學式1-4所示的構成單元。In a flask equipped with a reflux condenser, a dropping funnel, and a stirrer, an appropriate amount of nitrogen was allowed to flow to make it a nitrogen atmosphere, and 100 parts of propylene glycol monomethyl ether acetate was placed, and heated to 85°C while stirring. Next, 19 parts of methacrylic acid (for forming the structural unit on the lower left side) and acrylic acid 3,4-epoxytricyclo[5.2.1.02,6] were dropped into the flask using a dropping pump for about 5 hours. A mixture of decane-8-yl ester and 3,4-epoxytricyclo[5.2.1.02,6]decane-9-yl acrylate (the content ratio is 50:50 in molar ratio) (trade name " E-DCPA", manufactured by Daicel Co., Ltd.) 171 parts were dissolved in 40 parts of propylene glycol monomethyl ether acetate. On the other hand, 26 parts of polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) dissolved in propylene glycol monolayer was added dropwise to the flask using another dripping pump for about 5 hours. A solution of 120 parts of methyl ether acetate. After the drop of the polymerization initiator was completed, the temperature was maintained at the same temperature for about 4.5 hours, and then cooled to room temperature to obtain a solution of the copolymer (thermosetting resin J-1) with a solid content of 43.5%. The weight average molecular weight of the obtained resin J-1 was 18,000. The copolymer prepared in Preparation Example 10-1 has the constituent units shown in the above Chemical Formula 1-4.

[製備例10-2:製備熱固性樹脂J-2][Preparation Example 10-2: Preparation of Thermosetting Resin J-2]

在具備回流冷凝器、滴液漏斗及攪拌機的燒瓶內置換成氮氣氣氛,加入丙二醇單甲醚乙酸酯280份,邊攪拌邊加熱至80°C。接著,丙烯酸38份、3,4-環氧三環[5.2.1.02,6]癸烷-8-基丙烯酸酯和3,4-環氧三環[5.2.1.02]6)癸烷-9-基丙烯酸酯的混合物(含有比以摩爾比計為1:1)用5小時滴加289份、丙二醇單甲醚乙酸酯125份的混合溶液。另一方面,用6小時滴加在丙二醇單甲醚乙酸酯235份中溶解有33份的2,2-偶氮雙(2,4-二甲基戊腈)的溶液。滴加結束後,將混合物在80°C保持6.5小時後,冷卻至室溫,得到固體成分35.1%、B型粘度計(23°C)測定的粘度125mPas的共聚物(熱固性樹脂J-2)溶液。得到的共聚物的重均分子量(Mw)為19100。製備例10-2所製成的共聚物具有如以上化學式1-5所示的構成單元。The flask equipped with a reflux condenser, a dropping funnel, and a stirrer was replaced with a nitrogen atmosphere, 280 parts of propylene glycol monomethyl ether acetate was added, and the mixture was heated to 80° C. with stirring. Next, 38 parts of acrylic acid, 3,4-epoxytricyclo[5.2.1.02,6]decane-8-yl acrylate and 3,4-epoxytricyclo[5.2.1.02]6)decane-9- 289 parts of propylene glycol monomethyl ether acetate and 125 parts of mixed solutions of propylene glycol monomethyl ether acetate were dripped over 5 hours to the mixture of acrylic acid ester (the content ratio was 1:1 in molar ratio). On the other hand, a solution in which 33 parts of 2,2-azobis(2,4-dimethylvaleronitrile) was dissolved in 235 parts of propylene glycol monomethyl ether acetate was added dropwise over 6 hours. After the dropwise addition, the mixture was kept at 80° C. for 6.5 hours, and then cooled to room temperature to obtain a copolymer (thermosetting resin J-2) with a solid content of 35.1% and a viscosity of 125 mPas measured by a Brookfield viscometer (23° C.). solution. The weight average molecular weight (Mw) of the obtained copolymer was 19,100. The copolymer prepared in Preparation Example 10-2 has the constituent units shown in the above Chemical Formulas 1-5.

熱固性樹脂K為自行合成的樹脂材料,請參照以下製備例11-1~11-2。製備例11-1之熱固性樹脂K-1與製備例11-2之熱固性樹脂K-2可擇一或混合使用作為熱固性樹脂K之材料。Thermosetting resin K is a self-synthesized resin material, please refer to the following preparation examples 11-1~11-2. The thermosetting resin K-1 of the preparation example 11-1 and the thermosetting resin K-2 of the preparation example 11-2 can be used as the material of the thermosetting resin K either individually or in combination.

[製備例11-1:製備熱固性樹脂K-1][Preparation Example 11-1: Preparation of Thermosetting Resin K-1]

於具備回流冷凝器、滴液漏斗及攪拌機之燒瓶內使適量氮氣流動而設為氮氣環境,並放入丙二醇單甲基醚乙酸酯100份,一面進行攪拌,一面加熱至85°C為止。接著,向該燒瓶內,使用滴入泵以約5小時滴入將甲基丙烯酸(用以形成下方左側的構成單元)19份、丙烯酸3,4-環氧三環[5.2.1.02,6]癸烷-8-基酯與丙烯酸3,4-環氧三環[5.2.1.02,6]癸烷-9-基酯之混合物(含有比以莫耳比計為50:50)(商品名「E-DCPA」,大賽璐股份有限公司製造)171份溶解於丙二醇單甲基醚乙酸酯40份而成之溶液。另一方面,向燒瓶內,使用另一滴入泵以約5小時滴入將聚合起始劑2,2'-偶氮雙(2,4-二甲基戊腈)26份溶解於丙二醇單甲基醚乙酸酯120份而成之溶液。待聚合起始劑之滴入結束後,約6小時保持為相同溫度,其後冷卻至室溫為止,獲得固形物成分43.5%之共聚物(熱固性樹脂K-1)之溶液。所獲得之樹脂K-1之重量平均分子量為24000。製備例11-1所製成的共聚物具有如以上化學式1-4所示的構成單元。In a flask equipped with a reflux condenser, a dropping funnel, and a stirrer, an appropriate amount of nitrogen was allowed to flow to make it a nitrogen atmosphere, and 100 parts of propylene glycol monomethyl ether acetate was placed, and heated to 85°C while stirring. Next, 19 parts of methacrylic acid (for forming the structural unit on the lower left side) and acrylic acid 3,4-epoxytricyclo[5.2.1.02,6] were dropped into the flask using a dropping pump for about 5 hours. A mixture of decane-8-yl ester and 3,4-epoxytricyclo[5.2.1.02,6]decane-9-yl acrylate (the content ratio is 50:50 in molar ratio) (trade name " E-DCPA", manufactured by Daicel Co., Ltd.) 171 parts were dissolved in 40 parts of propylene glycol monomethyl ether acetate. On the other hand, 26 parts of polymerization initiator 2,2'-azobis(2,4-dimethylvaleronitrile) dissolved in propylene glycol monolayer was added dropwise to the flask using another dripping pump for about 5 hours. A solution of 120 parts of methyl ether acetate. After the dropping of the polymerization initiator was completed, the temperature was maintained at the same temperature for about 6 hours, and then cooled to room temperature to obtain a solution of a copolymer (thermosetting resin K-1) with a solid content of 43.5%. The weight average molecular weight of the obtained resin K-1 was 24,000. The copolymer prepared in Preparation Example 11-1 has the constituent units shown in the above Chemical Formula 1-4.

[製備例11-2:製備熱固性樹脂K-2][Preparation Example 11-2: Preparation of Thermosetting Resin K-2]

在具備回流冷凝器、滴液漏斗及攪拌機的燒瓶內置換成氮氣氣氛,加入丙二醇單甲醚乙酸酯280份,邊攪拌邊加熱至80°C。接著,丙烯酸38份、3,4-環氧三環[5.2.1.02,6]癸烷-8-基丙烯酸酯和3,4-環氧三環[5.2.1.02]6)癸烷-9-基丙烯酸酯的混合物(含有比以摩爾比計為1:1)用5小時滴加289份、丙二醇單甲醚乙酸酯125份的混合溶液。另一方面,用6小時滴加在丙二醇單甲醚乙酸酯235份中溶解有33份的2,2-偶氮雙(2,4-二甲基戊腈)的溶液。滴加結束後,將混合物在80°C保持約6小時後,冷卻至室溫,得到固體成分35.1%、B型粘度計(23°C)測定的粘度125mPas的共聚物(熱固性樹脂K-2)溶液。得到的共聚物的重均分子量(Mw)為25400。製備例11-2所製成的共聚物具有如以上化學式1-5所示的構成單元。The flask equipped with a reflux condenser, a dropping funnel, and a stirrer was replaced with a nitrogen atmosphere, 280 parts of propylene glycol monomethyl ether acetate was added, and the mixture was heated to 80° C. with stirring. Next, 38 parts of acrylic acid, 3,4-epoxytricyclo[5.2.1.02,6]decane-8-yl acrylate and 3,4-epoxytricyclo[5.2.1.02]6)decane-9- 289 parts of propylene glycol monomethyl ether acetate and 125 parts of mixed solutions of propylene glycol monomethyl ether acetate were dripped over 5 hours to the mixture of acrylic acid ester (the content ratio was 1:1 in molar ratio). On the other hand, a solution in which 33 parts of 2,2-azobis(2,4-dimethylvaleronitrile) was dissolved in 235 parts of propylene glycol monomethyl ether acetate was added dropwise over 6 hours. After the dropwise addition, the mixture was kept at 80° C. for about 6 hours, and then cooled to room temperature to obtain a copolymer (thermosetting resin K-2) having a solid content of 35.1% and a viscosity of 125 mPas measured by a Brookfield viscometer (23° C.). ) solution. The weight average molecular weight (Mw) of the obtained copolymer was 25,400. The copolymer prepared in Preparation Example 11-2 had the constituent units shown in the above Chemical Formulas 1-5.

綜合上述,本揭露之實施例係提出著色樹脂組成物,以及應用此著色樹脂組成物所形成的光阻結構,以及包含此光阻結構的彩色濾光片和顯示裝置。一些實施例中,著色樹脂組成物包括著色劑、鹼可溶性樹脂、聚合性不飽和化合物、光聚合起始劑以及溶劑,其中,鹼可溶性樹脂包含一光固性樹脂,此光固性樹脂的重量平均分子量(Mw)低於20000,且氫氧化鉀(KOH)滴定酸價係小於 100 mg/g。實施例所提出的著色樹脂組成物在塗覆於基板上並曝光後,其鹼可溶性樹脂的成分,可以明顯減少遠離基板的組成物上方部分和鄰近基板的組成物下方部分的交聯程度的差異,進而縮小交聯後組成物上方部分和下方部分的強度差異。特別是一些實施例提出的鹼可溶性樹脂所包含的光固性樹脂及/或熱固性樹脂的分子量和酸價的適當搭配,可以明顯使得著色樹脂組成物塗覆於基板後光阻上下的抗側蝕力相當,於曝光顯影後,所形成的光阻結構可呈現蘑菇狀剖面,且明顯減少底切深度(例如可減少至大約1.0μm或小於1.0μm)。因此,根據本案實施例所提出的著色樹脂組成物於顯影製程後可避免光阻剝落(Peeling)的問題,所形成的光阻結構係整體和邊緣的廓形都具有可接受或良好的完整度。因此,應用本揭露之實施例的顯示裝置可避免因光阻局部脫落而使顯示裝置的畫素所產生的露光缺陷,也可以大幅改善因缺陷光阻所產生的亮暗線不均而導致檢測機誤判光阻缺陷數目過高的問題。In view of the above, the embodiments of the present disclosure provide a colored resin composition, a photoresist structure formed by using the colored resin composition, and a color filter and a display device including the photoresist structure. In some embodiments, the colored resin composition includes a colorant, an alkali-soluble resin, a polymerizable unsaturated compound, a photopolymerization initiator, and a solvent, wherein the alkali-soluble resin includes a photocurable resin, and the weight of the photocurable resin is The average molecular weight (Mw) is lower than 20,000, and the titration acid value of potassium hydroxide (KOH) is lower than 100 mg/g. After the colored resin composition proposed in the embodiment is coated on the substrate and exposed to light, the composition of the alkali-soluble resin can significantly reduce the difference in the degree of cross-linking between the upper part of the composition far from the substrate and the lower part of the composition adjacent to the substrate. , thereby reducing the strength difference between the upper part and the lower part of the cross-linked composition. In particular, the appropriate combination of the molecular weight and acid value of the photocurable resin and/or thermosetting resin contained in the alkali-soluble resin proposed in some embodiments can obviously make the colored resin composition coated on the substrate to resist side etching on the top and bottom of the photoresist With the same force, after exposure and development, the formed photoresist structure can have a mushroom-shaped cross-section, and the undercut depth can be significantly reduced (for example, it can be reduced to about 1.0 μm or less than 1.0 μm). Therefore, according to the coloring resin composition proposed in the embodiments of the present application, the problem of photoresist peeling (peeling) can be avoided after the development process, and the photoresist structure as a whole and the outline of the edges have acceptable or good integrity. . Therefore, applying the display device of the embodiments of the present disclosure can avoid light exposure defects caused by the pixels of the display device due to partial detachment of the photoresist, and can also greatly improve the detection machine caused by the uneven light and dark lines caused by the defective photoresist. The problem of misjudging the number of photoresist defects is too high.

雖然本發明已以數個較佳實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者在不脫離本發明之精神和範圍內,當可作任意之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed above with several preferred embodiments, it is not intended to limit the present invention. Anyone with ordinary knowledge in the technical field can make any changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the appended patent application.

10,20,30,40,50,60:基板 11,21,31,41,51,61:光阻結構 21b:底面 21c:弧形線段 d 0,d:底切深度 A 1:垂直投影區域 A 2:接觸區域 L1:平行線 L2:垂直線 U C:缺口 a,b,c:點 10, 20, 30, 40, 50, 60: substrate 11, 21, 31, 41, 51, 61: photoresist structure 21b: bottom surface 21c: arc line segment d 0 , d: undercut depth A 1 : vertical projection area A 2 : Contact area L1 : Parallel line L2 : Vertical line U C : Notch a,b,c: Point

第1A圖為以目前著色樹脂組成物形成之光阻結構的剖面示意圖。 第1B圖為以目前著色樹脂組成物形成之光阻結構的上視圖。 第2A圖為以本揭露一些實施例之著色樹脂組成物形成之光阻結構的剖面示意圖。 第2B圖為以本揭露一些實施例之著色樹脂組成物形成之光阻結構的上視圖。 第3A~3G圖係分別為根據實驗1-1~1-7的SEM圖的膜層邊緣和底切部分的簡單示意圖。 第4A~4G圖係分別為根據實驗例2-1~2-7的SEM圖的膜層邊緣和底切部分的簡單示意圖。 第5A~5C圖係分別為根據實驗例3-1~3-3的SEM圖的膜層邊緣和底切部分的簡單示意圖。 第6A~6C圖係分別為根據實驗例4-1~4-3的SEM圖的膜層邊緣和底切部分的簡單示意圖。 FIG. 1A is a schematic cross-sectional view of a photoresist structure formed with a current colored resin composition. FIG. 1B is a top view of the photoresist structure formed with the current colored resin composition. FIG. 2A is a schematic cross-sectional view of a photoresist structure formed with the colored resin composition according to some embodiments of the present disclosure. FIG. 2B is a top view of a photoresist structure formed with the colored resin composition according to some embodiments of the present disclosure. Figures 3A to 3G are simple schematic diagrams of the film edge and undercut portion of the SEM images according to experiments 1-1 to 1-7, respectively. Figures 4A to 4G are simple schematic diagrams of the edge of the film layer and the undercut portion of the SEM images according to Experimental Examples 2-1 to 2-7, respectively. Figures 5A to 5C are simple schematic diagrams of the edge of the film layer and the undercut portion of the SEM images according to Experimental Examples 3-1 to 3-3, respectively. Figures 6A to 6C are simple schematic diagrams of the film edge and the undercut portion of the SEM images according to Experimental Examples 4-1 to 4-3, respectively.

Figure 109146571-A0101-11-0002-1
Figure 109146571-A0101-11-0002-1

20:基板 20: Substrate

21:光阻結構 21: Photoresist structure

21b:底面 21b: Underside

21c:弧形線段 21c: Arc segment

d:底切深度 d: undercut depth

A1:垂直投影區域 A 1 : Vertical projection area

A2:接觸區域 A 2 : Contact area

L1:平行線 L1: Parallel line

L2:垂直線 L2: vertical line

UC:缺口 U C : Notch

a,b,c:點 a,b,c: point

Claims (25)

一種著色樹脂組成物,包括著色劑、鹼可溶性樹脂、聚合性不飽和化合物、光聚合起始劑以及溶劑,其中,該鹼可溶性樹脂包含一光固性樹脂,該光固性樹脂的重量平均分子量(Mw)低於20000,且氫氧化鉀(KOH)滴定酸價係小於 100 mg/g。A coloring resin composition comprising a colorant, an alkali-soluble resin, a polymerizable unsaturated compound, a photopolymerization initiator and a solvent, wherein the alkali-soluble resin comprises a photocurable resin, and the photocurable resin has a weight-average molecular weight of (Mw) is lower than 20000, and potassium hydroxide (KOH) titration acid value is less than 100 mg/g. 如請求項1所述之著色樹脂組成物,其中該光固性樹脂的氫氧化鉀(KOH)滴定酸價係小於 55mg/g。The colored resin composition according to claim 1, wherein the potassium hydroxide (KOH) titration acid value of the photocurable resin is less than 55 mg/g. 如請求項2所述之著色樹脂組成物,其中該光固性樹脂包含的-COOH基團係佔該光固性樹脂的3.5 %/mol~31.2 %/mol。The colored resin composition according to claim 2, wherein the -COOH group contained in the photocurable resin accounts for 3.5%/mol to 31.2%/mol of the photocurable resin. 如請求項1或2所述之著色樹脂組成物,其中該光固性樹脂的重量平均分子量介於6000~20000 之間。The colored resin composition according to claim 1 or 2, wherein the weight-average molecular weight of the photocurable resin is between 6,000 and 20,000. 如請求項4所述之著色樹脂組成物,其中該光固性樹脂包含的-COOH基團係佔該光固性樹脂的小於7 %/mol。The colored resin composition according to claim 4, wherein the -COOH group contained in the photocurable resin accounts for less than 7%/mol of the photocurable resin. 如請求項1所述之著色樹脂組成物,其中該光固性樹脂相對於該聚合性不飽和化合物的單體的比例(Binder / Monomer Ratio)係為6.7%~300%。The colored resin composition according to claim 1, wherein the ratio (Binder/Monomer Ratio) of the photocurable resin to the monomer of the polymerizable unsaturated compound is 6.7% to 300%. 如請求項1所述之著色樹脂組成物,其中,該鹼可溶性樹脂之該光固性樹脂係包含具有如下式(I)所示結構之共聚物:
Figure 03_image001
式(I), 其中,m、e、f、g為正整數。
The colored resin composition as claimed in claim 1, wherein the photocurable resin of the alkali-soluble resin comprises a copolymer having a structure represented by the following formula (I):
Figure 03_image001
Formula (I), wherein m, e, f, and g are positive integers.
如請求項7所述之著色樹脂組成物,其中,如式(I)所示結構,其中設定整條分子鏈為100%,則m佔比高分子鏈1~10%;e佔比高分子鏈20~70%;f佔比高分子鏈20~70%;以及 g佔比高分子鏈1~35%。 The colored resin composition according to claim 7, wherein, the structure shown in formula (I), wherein the entire molecular chain is set to be 100%, then m accounts for 1-10% of the polymer chain; e accounts for the polymer chain chain 20~70%; f accounts for 20~70% of the polymer chain; and g accounts for 1~35% of the polymer chain. 如請求項7所述之著色樹脂組成物,其中如式(I)所示結構之共聚物係包括: (甲基)丙烯酸二環戊酯(TCDMA)/(甲基)丙烯酸甲酯(MMA)/(甲基)丙烯酸縮水甘油酯(GMA)/(甲基)丙烯酸(MAA) 之共聚物。 The colored resin composition according to claim 7, wherein the copolymer of the structure represented by formula (I) comprises: Dicyclopentyl (meth)acrylate (TCDMA)/methyl (meth)acrylate (MMA)/glycidyl (meth)acrylate (GMA)/(meth)acrylic acid (MAA) the copolymer. 如請求項9所述之著色樹脂組成物,其中,如式(I)所示結構之共聚物的主鏈係包含: (甲基)丙烯酸二環戊酯(TCDMA),係佔前述主鏈的3 %/mol; (甲基)丙烯酸甲酯(MMA),係佔前述主鏈的70%/mol至27 %/mol;以及 (甲基)丙烯酸縮水甘油酯(GMA),係佔前述主鏈的27%/mol至70 %/mol。 The colored resin composition according to claim 9, wherein the main chain system of the copolymer of the structure represented by formula (I) comprises: (Meth) dicyclopentyl acrylate (TCDMA), which accounts for 3%/mol of the aforementioned main chain; Methyl (meth)acrylate (MMA), 70%/mol to 27%/mol of the aforementioned backbone; and Glycidyl (meth)acrylate (GMA), which accounts for 27%/mol to 70%/mol of the aforementioned main chain. 如請求項1所述之著色樹脂組成物,其中以該著色樹脂組成物的總重量為100重量%,該鹼可溶性樹脂係占所述著色樹脂組成物的5重量%至50重量%的範圍。The colored resin composition according to claim 1, wherein the alkali-soluble resin accounts for the range of 5 to 50 wt % of the colored resin composition, taking the total weight of the colored resin composition as 100 wt %. 如請求項1所述之著色樹脂組成物,其中該鹼可溶性樹脂可更包含一熱固性樹脂。The colored resin composition according to claim 1, wherein the alkali-soluble resin may further comprise a thermosetting resin. 如請求項12所述之著色樹脂組成物,其中該熱固性樹脂佔該著色樹脂組成物重量百分比為8.9 %~10%,且該光固性樹脂佔該著色組成物重量百分比為1.5%~17.4%。The colored resin composition of claim 12, wherein the thermosetting resin accounts for 8.9% to 10% by weight of the colored resin composition, and the photocurable resin accounts for 1.5% to 17.4% by weight of the colored composition . 如請求項13所述之著色樹脂組成物,其中該光固性樹脂佔該著色組成物重量百分比為1.5%~14.6%,且氫氧化鉀(KOH)滴定酸價小於50 mg/g。The colored resin composition of claim 13, wherein the photocurable resin accounts for 1.5% to 14.6% by weight of the colored composition, and the potassium hydroxide (KOH) titration acid value is less than 50 mg/g. 如請求項12所述之著色樹脂組成物,其中該熱固性樹脂的重量平均分子量介於5000~20000,氫氧化鉀(KOH)滴定酸價介於100 mg/g~120 mg/g。The colored resin composition according to claim 12, wherein the thermosetting resin has a weight-average molecular weight of 5,000 to 20,000, and a potassium hydroxide (KOH) titration acid value of 100 mg/g to 120 mg/g. 如請求項15所述之著色樹脂組成物,其中該熱固性樹脂中包含的-COOH基團係佔該熱固性樹脂的18mol%或小於18mol%。The colored resin composition of claim 15, wherein the -COOH group contained in the thermosetting resin accounts for 18 mol% or less of the thermosetting resin. 如請求項12所述之著色樹脂組成物,其中該熱固性樹脂的重量平均分子量係低於10000。The colored resin composition according to claim 12, wherein the weight average molecular weight of the thermosetting resin is lower than 10,000. 如請求項1所述之著色樹脂組成物,其中以該著色樹脂組成物的總重量為100重量%, 該著色劑係佔著色樹脂組成物的10重量%至30重量%的範圍; 該聚合性不飽和化合物係占所述著色樹脂組成物的5重量%至50重量%的範圍;以及 該光聚合起始劑係佔所述著色樹脂組成物的0.1重量%至10重量%的範圍。 The colored resin composition as claimed in claim 1, wherein the total weight of the colored resin composition is 100% by weight, The colorant is in the range of 10% to 30% by weight of the colored resin composition; The polymerizable unsaturated compound is in the range of 5% by weight to 50% by weight of the colored resin composition; and The photopolymerization initiator is in the range of 0.1% by weight to 10% by weight of the colored resin composition. 一種光阻結構,包含如請求項1~18中任一項所述的著色樹脂組成物塗覆於一基板上並經烘烤、曝光、顯影步驟後而形成,其中該光阻結構為一凸狀體,且該凸狀體在該基板上的一垂直投影面積係大於該凸狀體之一底面與該基板的接觸面積。A photoresist structure, comprising the colored resin composition as described in any one of claims 1 to 18, coated on a substrate and formed after baking, exposing, and developing steps, wherein the photoresist structure is a convex and a vertical projected area of the protruding body on the substrate is greater than the contact area of a bottom surface of the protruding body and the substrate. 如請求項19所述之光阻結構,其中該凸狀體的頂部具有一弧度,於該凸狀體的一邊緣的一最遠端點到該凸狀體之底面與該基板接觸的位置之間係形成一缺口。The photoresist structure as claimed in claim 19, wherein the top of the protruding body has an arc, from a farthest point of an edge of the protruding body to the position where the bottom surface of the protruding body contacts the substrate A gap is formed between the system. 如請求項19所述之光阻結構,其中於該凸狀體的一邊緣的一最遠端點在該基板上的垂直投影與該凸狀體之底面接觸該基板的位置係具有一距離,該距離定義為一底切深度(undercut depth),該底切深度係小於1 μm。The photoresist structure of claim 19, wherein a vertical projection of a farthest point of an edge of the convex body on the substrate has a distance from the position where the bottom surface of the convex body contacts the substrate, This distance is defined as an undercut depth, which is less than 1 μm. 如請求項21所述之光阻結構,其中於該凸狀體的一最高頂點平行於該基板繪製一平行線,於該凸狀體的該邊緣的該最遠端點垂直於該基板繪製一垂直線,其中該平行線及該垂直線形成等於90度的一夾角,且該凸狀體的一剖面在該平行線及該垂直線之間係包含一弧形線段。The photoresist structure of claim 21, wherein a parallel line is drawn parallel to the substrate at a highest vertex of the convex body, and a line is drawn perpendicular to the substrate at the farthest point of the edge of the convex body A vertical line, wherein the parallel line and the vertical line form an included angle equal to 90 degrees, and a section of the convex body includes an arc line segment between the parallel line and the vertical line. 一種彩色濾光片,由如請求項1~18中任一項所述的著色樹脂組成物所形成。A color filter formed of the colored resin composition according to any one of claims 1 to 18. 如請求項23所述之彩色濾光片,係包括一光阻層一,該光阻層係由如該著色樹脂組成物施加於一基板之上方並曝光顯影而形成。The color filter of claim 23 includes a photoresist layer, the photoresist layer is formed by applying the colored resin composition over a substrate and exposing and developing. 一種顯示裝置,包括如請求項23所述的彩色濾光片。A display device comprising the color filter as claimed in claim 23.
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