TW202213554A - Semiconductor device and manufacturing method thereof - Google Patents

Semiconductor device and manufacturing method thereof Download PDF

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Publication number
TW202213554A
TW202213554A TW110102842A TW110102842A TW202213554A TW 202213554 A TW202213554 A TW 202213554A TW 110102842 A TW110102842 A TW 110102842A TW 110102842 A TW110102842 A TW 110102842A TW 202213554 A TW202213554 A TW 202213554A
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Taiwan
Prior art keywords
insulating film
substrate
semiconductor device
opening
plug
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TW110102842A
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Chinese (zh)
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TWI782400B (en
Inventor
冨松孝宏
荒井伸也
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日商鎧俠股份有限公司
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Publication of TW202213554A publication Critical patent/TW202213554A/en
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Publication of TWI782400B publication Critical patent/TWI782400B/en

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    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
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Abstract

According to one embodiment, a semiconductor device includes a first substrate; a first insulating film provided on the first substrate; a first plug provided in the first insulating film; a second substrate provided on the first insulating film; and a first wiring including a first portion and a second portion. The first portion is provided in the second substrate and coupled to the first plug, and the second portion is provided on the second substrate and coupled to a bonding pad.

Description

半導體裝置及其製造方法Semiconductor device and method of manufacturing the same

本發明之實施形態係關於一種半導體裝置及其製造方法。Embodiments of the present invention relate to a semiconductor device and a method of manufacturing the same.

於基板上形成通孔插塞與接合墊之情形時，期望以較適宜之態樣將接合墊電性連接於通孔插塞。When the through-hole plugs and the bonding pads are formed on the substrate, it is desirable to electrically connect the bonding pads to the through-hole plugs in a suitable manner.

實施形態提供一種可以適宜之態樣將接合墊電性連接於通孔插塞之半導體裝置及其製造方法。Embodiments provide a semiconductor device in which a bonding pad can be electrically connected to a via plug in a suitable form, and a method for manufacturing the same.

根據一實施形態，半導體裝置具備第1基板、及設置於上述第1基板上之第1絕緣膜。上述裝置進而具備：第1插塞，其設置於上述第1絕緣膜內；及第2基板，其設置於上述第1絕緣膜上。上述裝置進而具備第1配線，其包含：第1部分，其設置於上述第2基板內，且設置於上述第1插塞上；及第2部分，其設置於上述第2基板上，包含接合墊，且以與上述第1部分之材料相同之材料形成。According to one embodiment, a semiconductor device includes a first substrate and a first insulating film provided on the first substrate. The above device further includes: a first plug provided in the first insulating film; and a second substrate provided on the first insulating film. The device further includes a first wiring including: a first part provided in the second substrate and on the first plug; and a second part provided on the second substrate and including bonding The pad is formed of the same material as the above-mentioned part 1.

以下，參照圖式說明本發明之實施形態。圖1至圖9中，對相同構成附注相同符號，省略重複之說明。Hereinafter, embodiments of the present invention will be described with reference to the drawings. In FIGS. 1 to 9 , the same reference numerals are attached to the same components, and overlapping descriptions are omitted.

(第1實施形態) 圖1係顯示第1實施形態之半導體裝置之構造之剖視圖。圖1之半導體裝置係將陣列晶片1與電路晶片2加以貼合之3維記憶體。 (first embodiment) FIG. 1 is a cross-sectional view showing the structure of the semiconductor device according to the first embodiment. The semiconductor device of FIG. 1 is a three-dimensional memory in which an array chip 1 and a circuit chip 2 are bonded together.

圖1表示互相垂直之X方向、Y方向及Z方向。本說明書中，將+Z方向作為上方向處理，將-Z方向作為下方向處理。-Z方向可與重力方向一致，亦可不與重力方向一致。FIG. 1 shows the X direction, the Y direction and the Z direction which are perpendicular to each other. In this specification, the +Z direction is treated as the upward direction, and the -Z direction is treated as the downward direction. - The Z direction can be consistent with the direction of gravity or not.

陣列晶片1具備包含複數個記憶胞之記憶胞陣列11、記憶胞陣列11上之基板12、及記憶胞陣列11下之層間絕緣膜13。基板12例如為矽基板等半導體基板。圖1顯示形成於基板12內之井(well)區域12a。層間絕緣膜13例如為氧化矽膜、或包含氧化矽膜與其他絕緣膜之積層膜。基板12為第2基板之例。層間絕緣膜13為第1絕緣膜之例。The array wafer 1 includes a memory cell array 11 including a plurality of memory cells, a substrate 12 on the memory cell array 11 , and an interlayer insulating film 13 below the memory cell array 11 . The substrate 12 is, for example, a semiconductor substrate such as a silicon substrate. FIG. 1 shows a well region 12a formed in the substrate 12. As shown in FIG. The interlayer insulating film 13 is, for example, a silicon oxide film or a laminated film including a silicon oxide film and other insulating films. The substrate 12 is an example of the second substrate. The interlayer insulating film 13 is an example of a first insulating film.

電路晶片2設置於陣列晶片1下。圖1顯示陣列晶片1與電路晶片2之貼合面S。電路晶片2具備層間絕緣膜14、與層間絕緣膜14下之基板15。層間絕緣膜14例如為氧化矽膜、或包含氧化矽膜與其他絕緣膜之積層膜。基板15例如為矽基板等半導體基板。層間絕緣膜14與層間絕緣膜13皆為第1絕緣膜之例。基板15為第1基板之例。The circuit chip 2 is disposed under the array chip 1 . FIG. 1 shows the bonding surface S of the array chip 1 and the circuit chip 2 . The circuit chip 2 includes an interlayer insulating film 14 and a substrate 15 under the interlayer insulating film 14 . The interlayer insulating film 14 is, for example, a silicon oxide film or a laminated film including a silicon oxide film and other insulating films. The substrate 15 is, for example, a semiconductor substrate such as a silicon substrate. Both the interlayer insulating film 14 and the interlayer insulating film 13 are examples of the first insulating film. The substrate 15 is an example of a first substrate.

陣列晶片1具備複數條字元線WL作為記憶胞陣列11內之電極層。圖1顯示記憶胞陣列11內之階差構造部21。各字元線WL經由接觸插塞22及通孔插塞23與字元配線層WI電性連接。圖1中進而顯示貫通上述複數條字元線WL之複數個柱狀部CL中之一個。各柱狀部CL經由通孔插塞24與位元線BL電性連接。The array chip 1 has a plurality of word lines WL as electrode layers in the memory cell array 11 . FIG. 1 shows the step structure 21 in the memory cell array 11 . Each word line WL is electrically connected to the word wiring layer WI via the contact plug 22 and the via plug 23 . FIG. 1 further shows one of the plurality of columnar portions CL penetrating the above-mentioned plurality of word lines WL. Each columnar portion CL is electrically connected to the bit line BL via the via plug 24 .

電路晶片2具備複數個電晶體31。圖1顯示該等電晶體31中之1個。各電晶體31具備介隔閘極絕緣膜設置於基板15上之閘極電極32、及設置於基板15內之未圖示之源極擴散層及汲極擴散層。又，電路晶片2具備：複數個接觸插塞33，其等設置於該等電晶體31之閘極電極32、源極擴散層或汲極擴散層上；配線層34，其設置於該等接觸插塞33上，包含複數條配線；及複數個通孔插塞35，其設置於配線層34上。The circuit chip 2 includes a plurality of transistors 31 . FIG. 1 shows one of these transistors 31 . Each of the transistors 31 includes a gate electrode 32 provided on the substrate 15 through a gate insulating film, and a source diffusion layer and a drain diffusion layer not shown in the substrate 15 provided in the substrate 15 . In addition, the circuit chip 2 is provided with: a plurality of contact plugs 33, which are arranged on the gate electrodes 32, the source diffusion layer or the drain diffusion layer of the transistors 31; the wiring layer 34 is arranged on the contacts The plug 33 includes a plurality of wirings; and a plurality of through-hole plugs 35 , which are arranged on the wiring layer 34 .

電路晶片2進而具備：配線層36，其設置於該等通孔插塞35上，包含複數條配線；複數個通孔插塞37，其等設置於配線層36上；及複數個金屬焊墊38，其等設置於該等通孔插塞37上。金屬焊墊38例如為包含Cu層或Al層之金屬層(Cu表示銅，Al表示鋁)。電路晶片2作為控制陣列晶片1之動作之控制電路(邏輯電路)發揮功能。該控制電路由電晶體31等構成，電性連接於金屬焊墊38。The circuit chip 2 further includes: a wiring layer 36 arranged on the through-hole plugs 35 and including a plurality of wirings; a plurality of through-hole plugs 37 arranged on the wiring layer 36; and a plurality of metal pads 38 , which are arranged on the through-hole plugs 37 . The metal pad 38 is, for example, a metal layer including a Cu layer or an Al layer (Cu represents copper, and Al represents aluminum). The circuit chip 2 functions as a control circuit (logic circuit) that controls the operation of the array chip 1 . The control circuit is composed of a transistor 31 and the like, and is electrically connected to the metal pad 38 .

陣列晶片1具備：複數個金屬焊墊41，其等設置於金屬焊墊38上；及複數個通孔插塞42，其等設置於金屬焊墊41上。又，陣列晶片1具備：配線層43，其設置於該等通孔插塞42上，包含複數條配線；及複數個通孔插塞44，其等設置於配線層43上。金屬焊墊41例如為包含Cu層或Al層之金屬層。上述位元線BL或字元配線層WI包含於配線層43。又，上述控制電路經由金屬焊墊41、38等電性連接於記憶胞陣列11，且經由金屬焊墊41、38等控制記憶胞陣列11之動作。The array chip 1 includes: a plurality of metal pads 41 , which are arranged on the metal pads 38 ; and a plurality of through-hole plugs 42 , which are arranged on the metal pads 41 . Furthermore, the array chip 1 includes: a wiring layer 43 provided on the through-hole plugs 42 and including a plurality of wirings; and a plurality of through-hole plugs 44 provided on the wiring layer 43 . The metal pad 41 is, for example, a metal layer including a Cu layer or an Al layer. The above-described bit line BL or word wiring layer WI is included in the wiring layer 43 . In addition, the control circuit is electrically connected to the memory cell array 11 via the metal pads 41 and 38 and the like, and controls the operation of the memory cell array 11 via the metal pads 41 and 38 .

陣列晶片1進而具備設置於上述複數個通孔插塞44上之複數個通孔插塞45。圖1顯示該等通孔插塞45中之2個。通孔插塞45設置於層間絕緣膜13內，設置於記憶胞陣列11之側方。通孔插塞45例如為包含W層之金屬層(W表示鎢)。通孔插塞45為第1插塞之例。The array wafer 1 further includes a plurality of through-hole plugs 45 disposed on the plurality of through-hole plugs 44 . FIG. 1 shows 2 of the through-hole plugs 45 . The through-hole plug 45 is disposed in the interlayer insulating film 13 and is disposed on the side of the memory cell array 11 . The via plug 45 is, for example, a metal layer including a W layer (W represents tungsten). The through-hole plug 45 is an example of the first plug.

陣列晶片1進而具備依序形成於基板12上之絕緣膜46、絕緣膜47及金屬配線48。絕緣膜46例如為氧化矽膜。絕緣膜47例如為氧化矽膜。金屬配線48例如為包含Al層之金屬層。絕緣膜46為第2絕緣膜或第1膜之例。絕緣膜47為第2絕緣膜或第2膜之例。金屬配線48為第1配線之例。The array wafer 1 further includes an insulating film 46 , an insulating film 47 and a metal wiring 48 formed on the substrate 12 in this order. The insulating film 46 is, for example, a silicon oxide film. The insulating film 47 is, for example, a silicon oxide film. The metal wiring 48 is, for example, a metal layer including an Al layer. The insulating film 46 is an example of a second insulating film or a first film. The insulating film 47 is a second insulating film or an example of a second film. The metal wiring 48 is an example of the first wiring.

絕緣膜47包含：側方部47a，其形成於基板12及絕緣膜46之側面；上方部47b，其形成於絕緣膜46之上表面；及埋入部47c，其埋入於基板12及絕緣膜46內。側方部47a及埋入部47c形成於基板12及絕緣膜46之內部，上方部47b形成於基板12及絕緣膜46之外部。本實施形態中，側方部47a作為基板12及絕緣膜46之側面之側壁絕緣膜發揮功能，埋入膜47c作為基板12及絕緣膜46內之元件分離絕緣膜發揮功能。本實施形態之埋入部47c包含將埋入部47埋入於基板12及絕緣膜46內時形成之氣隙AG。側方部47a為第3部分之例。埋入部47c為與第3部分不同之第4部分之例。The insulating film 47 includes: a side portion 47a formed on the side surfaces of the substrate 12 and the insulating film 46; an upper portion 47b formed on the upper surface of the insulating film 46; and a buried portion 47c buried in the substrate 12 and the insulating film within 46. The side portion 47 a and the embedded portion 47 c are formed inside the substrate 12 and the insulating film 46 , and the upper portion 47 b is formed outside the substrate 12 and the insulating film 46 . In this embodiment, the side portion 47a functions as a sidewall insulating film on the side surfaces of the substrate 12 and the insulating film 46, and the embedded film 47c functions as an element isolation insulating film within the substrate 12 and the insulating film 46. The buried portion 47 c of the present embodiment includes an air gap AG formed when the buried portion 47 is buried in the substrate 12 and the insulating film 46 . The side portion 47a is an example of the third portion. The embedded portion 47c is an example of a fourth portion different from the third portion.

金屬配線48包含：上方部48a，其形成於層間絕緣膜13及上述複數個通孔插塞45之上表面；側方部48b，其形成於絕緣膜47之側面；及上方部48c，其形成於絕緣膜47之上表面。金屬配線48電性連接於上述複數個通孔插塞45。上方部48a及側方部48b形成於基板12、絕緣膜46及絕緣膜47之內部，上方部48c形成於基板12、絕緣膜46及絕緣膜47之外部。因本實施形態之上方部48a、側方部48b及上方部48c由相同之配線層同時形成，故以相同之材料(例如鋁)形成。本實施形態之上方部48a、側方部48b及上方部48c形成連續之1條配線。上方部48a及側方部48b為第1部分之例。上方部48c為第2部分之例。The metal wiring 48 includes: an upper portion 48a formed on the upper surface of the interlayer insulating film 13 and the plurality of through-hole plugs 45; a side portion 48b formed on the side surface of the insulating film 47; and an upper portion 48c formed on the upper surface of the insulating film 47 . The metal wiring 48 is electrically connected to the plurality of through-hole plugs 45 . The upper portion 48 a and the side portion 48 b are formed inside the substrate 12 , the insulating film 46 , and the insulating film 47 , and the upper portion 48 c is formed outside the substrate 12 , the insulating film 46 , and the insulating film 47 . Since the upper part 48a, the side part 48b, and the upper part 48c of this embodiment are formed by the same wiring layer at the same time, they are formed by the same material (for example, aluminum). In this embodiment, the upper part 48a, the side part 48b, and the upper part 48c form one continuous wiring. The upper part 48a and the side part 48b are an example of a 1st part. The upper portion 48c is an example of the second portion.

陣列晶片1進而具備形成於絕緣膜47及金屬配線48上之鈍化膜49。鈍化膜49為第3絕緣膜之例。The array wafer 1 further includes a passivation film 49 formed on the insulating film 47 and the metal wiring 48 . The passivation film 49 is an example of a third insulating film.

鈍化膜49包含依序形成於絕緣膜47及金屬配線48上之絕緣膜49a、絕緣膜49b、及絕緣膜49c。絕緣膜49a例如為氧化矽膜。絕緣膜49b例如為氮化矽膜。絕緣膜49c例如為聚醯亞胺膜。本實施形態之鈍化膜49如圖1所示包含介隔絕緣膜47(側方部47a)與金屬配線48(側方部48a)形成於基板12及絕緣膜46內之部分。The passivation film 49 includes an insulating film 49a, an insulating film 49b, and an insulating film 49c formed on the insulating film 47 and the metal wiring 48 in this order. The insulating film 49a is, for example, a silicon oxide film. The insulating film 49b is, for example, a silicon nitride film. The insulating film 49c is, for example, a polyimide film. The passivation film 49 of this embodiment includes a portion formed in the substrate 12 and the insulating film 46 through the insulating film 47 (side portion 47 a ) and the metal wiring 48 (side portion 48 a ) as shown in FIG. 1 .

鈍化膜49例如具有使金屬層48之上方部48c之上表面露出之開口部P。於開口部P內露出之上方部48c作為圖1之半導體裝置之外部連接墊(接合墊)發揮功能。上方部48c可經由開口部P利用接合線、焊料球、金屬凸塊等連接於安裝基板或其他裝置。The passivation film 49 has, for example, an opening portion P that exposes the upper surface of the upper portion 48 c of the metal layer 48 . The upper portion 48c exposed in the opening portion P functions as an external connection pad (bonding pad) of the semiconductor device of FIG. 1 . The upper portion 48c can be connected to a mounting substrate or other devices through the opening portion P by bonding wires, solder balls, metal bumps, or the like.

本實施形態之金屬配線48包含：上方部48a，其設置於上述複數個通孔插塞45上；及上方部48c，其包含接合墊；且作為電性連接該等通孔插塞45與接合墊之連接配線發揮功能。與該1條金屬配線48電性連接之通孔插塞45之個數可為任意個，例如為100～10000個。The metal wiring 48 of the present embodiment includes: an upper portion 48a disposed on the plurality of through-hole plugs 45; and an upper portion 48c including bonding pads; and serves as an electrical connection between the through-hole plugs 45 and the bonding The connection wiring of the pad functions. The number of through-hole plugs 45 electrically connected to the one metal wiring 48 may be any number, for example, 100 to 10,000.

陣列晶片1內之記憶胞陣列11包含與上述複數條字元線WL交替積層之複數個絕緣層51。絕緣層51例如為氧化矽膜。The memory cell array 11 in the array chip 1 includes a plurality of insulating layers 51 alternately laminated with the above-mentioned plurality of word lines WL. The insulating layer 51 is, for example, a silicon oxide film.

陣列晶片1內之各柱狀部CL包含記憶體絕緣膜52、通道半導體層53、芯絕緣膜54、半導體層55及半導體層56。記憶體絕緣膜52、通道半導體層53、及芯絕緣膜54依序形成於字元線WL及絕緣層51內。半導體層55形成於通道半導體層53上，電性連接通道半導體層53與基板12。半導體層56於芯絕緣膜54下形成於通道半導體層53之側面，且電性連接通道半導體層53與通孔插塞24。Each columnar portion CL in the array chip 1 includes a memory insulating film 52 , a channel semiconductor layer 53 , a core insulating film 54 , a semiconductor layer 55 and a semiconductor layer 56 . The memory insulating film 52 , the channel semiconductor layer 53 , and the core insulating film 54 are sequentially formed in the word line WL and the insulating layer 51 . The semiconductor layer 55 is formed on the channel semiconductor layer 53 and electrically connects the channel semiconductor layer 53 and the substrate 12 . The semiconductor layer 56 is formed on the side surface of the channel semiconductor layer 53 under the core insulating film 54 , and electrically connects the channel semiconductor layer 53 and the via plug 24 .

圖2係顯示第1實施形態之各柱狀部CL之構造之剖視圖。圖2相當於圖1之剖視圖之放大圖。FIG. 2 is a cross-sectional view showing the structure of each columnar portion CL of the first embodiment. FIG. 2 corresponds to an enlarged view of the sectional view of FIG. 1 .

如圖2所示，記憶體絕緣膜52包含依序形成於字元線WL及絕緣層51內之阻擋絕緣膜52a、電荷蓄積層52b、及穿隧絕緣膜52c。阻擋絕緣膜52a、穿隧絕緣膜52c、及芯絕緣膜54例如為氧化矽膜或金屬絕緣膜。電荷蓄積層52b例如為氮化矽膜。電荷蓄積層52b亦可為多晶矽層等半導體層。通道半導體層53、半導體層55(圖1)及半導體層56(圖1)例如為多晶矽層或單晶矽層。As shown in FIG. 2, the memory insulating film 52 includes a blocking insulating film 52a, a charge accumulating layer 52b, and a tunnel insulating film 52c which are sequentially formed in the word line WL and the insulating layer 51. The barrier insulating film 52a, the tunnel insulating film 52c, and the core insulating film 54 are, for example, a silicon oxide film or a metal insulating film. The charge storage layer 52b is, for example, a silicon nitride film. The charge storage layer 52b may be a semiconductor layer such as a polysilicon layer. The channel semiconductor layer 53 , the semiconductor layer 55 ( FIG. 1 ) and the semiconductor layer 56 ( FIG. 1 ) are, for example, polysilicon layers or single crystal silicon layers.

圖3係用於比較第1實施形態之半導體裝置及其比較例之半導體裝置之剖視圖。3 is a cross-sectional view for comparing the semiconductor device of the first embodiment and a semiconductor device of a comparative example.

圖3(a)顯示比較例之半導體裝置之構造。比較例之半導體裝置具有與本實施形態之半導體裝置大致相同之構造。但，比較例中，於上述複數個通孔插塞45上形成有複數個通孔插塞61，於該等通孔插塞61上形成有金屬配線48之上方部48c。比較例之金屬配線48不具備上方部48a或側方部48b。FIG. 3( a ) shows the structure of the semiconductor device of the comparative example. The semiconductor device of the comparative example has substantially the same structure as that of the semiconductor device of the present embodiment. However, in the comparative example, a plurality of through-hole plugs 61 are formed on the plurality of through-hole plugs 45 , and the upper portion 48 c of the metal wiring 48 is formed on the through-hole plugs 61 . The metal wiring 48 of the comparative example does not have the upper part 48a or the side part 48b.

圖3(a)所示之通孔插塞61與金屬配線48例如以如下方式形成。首先，於基板12內形成複數個通孔，於該等通孔內，使複數個通孔插塞45露出。接著，於該等通孔內介隔絕緣膜47形成通孔插塞61，於通孔插塞45上配置通孔插塞61。接著，於通孔插塞61上形成金屬配線48。The through-hole plug 61 and the metal wiring 48 shown in FIG. 3(a) are formed, for example, as follows. First, a plurality of through holes are formed in the substrate 12, and a plurality of through hole plugs 45 are exposed in the through holes. Next, through-hole plugs 61 are formed in the through-holes via the insulating film 47 , and the through-hole plugs 61 are arranged on the through-hole plugs 45 . Next, the metal wiring 48 is formed on the via plug 61 .

另一方面，圖3(b)顯示第1實施形態之半導體裝置之構造。圖3(b)所示之金屬配線48例如以如下方式形成。首先，於基板12內形成1個開口部，於該開口部內，使複數個通孔插塞45露出。接著，遍及該開口部之內部與外部形成金屬配線48，於通孔插塞45上形成金屬配線48。On the other hand, FIG.3(b) shows the structure of the semiconductor device of 1st Embodiment. The metal wiring 48 shown in FIG.3(b) is formed as follows, for example. First, one opening is formed in the substrate 12, and a plurality of through-hole plugs 45 are exposed in the opening. Next, the metal wiring 48 is formed over the inside and outside of the opening, and the metal wiring 48 is formed on the through-hole plug 45 .

比較例中，為了將接合墊(金屬配線48之上方部48c)電性連接於通孔插塞45，需要進行形成通孔之步驟、形成通孔插塞61之步驟、及形成金屬配線48之步驟。另一方面，根據本實施形態，藉由進行形成開口部之步驟與形成金屬配線48之步驟，可將接合墊(金屬配線48之上方部48c)電性連接於通孔插塞45。如此，根據本實施形態，可省略形成通孔插塞61之步驟，藉此，可削減半導體裝置之製造步驟數、製造成本。In the comparative example, in order to electrically connect the bonding pad (the upper portion 48 c of the metal wiring 48 ) to the via plug 45 , it is necessary to perform the step of forming the via hole, the step of forming the via plug 61 , and the step of forming the metal wiring 48 . step. On the other hand, according to the present embodiment, by performing the step of forming the opening and the step of forming the metal wiring 48 , the bonding pad (the upper portion 48c of the metal wiring 48 ) can be electrically connected to the through-hole plug 45 . In this way, according to the present embodiment, the step of forming the through-hole plug 61 can be omitted, whereby the number of manufacturing steps and the manufacturing cost of the semiconductor device can be reduced.

另外，比較例之上述通孔之縱橫比高，相對於此，本實施形態之上述開口部之縱橫比降低。因此，根據本實施形態，可於基板12內同時形成上述開口部與元件分離槽，藉此，可進一步削減半導體裝置之製造步驟數、製造成本。In addition, the aspect ratio of the above-mentioned through hole of the comparative example is high, but the aspect ratio of the above-mentioned opening part of the present embodiment is lowered. Therefore, according to the present embodiment, the above-mentioned opening portion and the element separation groove can be simultaneously formed in the substrate 12, whereby the number of manufacturing steps and the manufacturing cost of the semiconductor device can be further reduced.

本實施形態中，於該元件分離槽內埋入有元件分離絕緣膜(絕緣膜47之埋入部47c)。根據本實施形態，可與上述開口部之側面之側壁絕緣膜(絕緣膜47之側方部47a)同時形成該元件分離絕緣膜，藉此，可進一步削減半導體裝置之製造步驟數、製造成本。In this embodiment, an element isolation insulating film (embedded portion 47c of the insulating film 47 ) is embedded in the element isolation trench. According to this embodiment, the element isolation insulating film can be formed simultaneously with the sidewall insulating film (the side portion 47a of the insulating film 47) on the side surface of the opening, thereby further reducing the number of manufacturing steps and manufacturing cost of the semiconductor device.

又，比較例之金屬配線48經由通孔插塞61電性連接於通孔插塞45，相對於此，本實施形態之金屬配線48不經由其他層電性連接於通孔插塞45。因此，根據本實施形態，可減少通孔插塞45與金屬配線48間之電阻，藉此，可減少通孔插塞45與接合墊間之電阻。In addition, the metal wiring 48 of the comparative example is electrically connected to the via plug 45 via the via plug 61 , whereas the metal wiring 48 of the present embodiment is not electrically connected to the via plug 45 via other layers. Therefore, according to the present embodiment, the resistance between the through-hole plug 45 and the metal wiring 48 can be reduced, whereby the resistance between the through-hole plug 45 and the bonding pad can be reduced.

圖4至圖9係顯示第1實施形態之半導體裝置之製造方法之剖視圖。本實施形態之半導體裝置如後文所述，藉由將包含複數個陣列晶片1之陣列晶圓W1、與包含複數個電路晶片2之電路晶圓W2貼合而製造。4 to 9 are cross-sectional views showing a method of manufacturing the semiconductor device according to the first embodiment. The semiconductor device of the present embodiment is manufactured by bonding an array wafer W1 including a plurality of array chips 1 and a circuit wafer W2 including a plurality of circuit chips 2, as described later.

首先，準備基板12，於基板12內形成井區域12a(圖4(a))。圖4(a)顯示基板12內之井區域12a與其他區域12b。接著，於基板12上形成記憶胞陣列11、層間絕緣膜13、通孔插塞45、通孔插塞44、配線層43、通孔插塞42、金屬焊墊41等(圖4(a))。圖4(a)進而顯示記憶胞陣列11所含之字元線WL、絕緣層51、柱狀部CL、階差構造部21等。例如，複數個通孔插塞45於層間絕緣膜13內形成於基板12(井區域12a)上。如此，製造陣列晶圓W1。圖4(a)顯示陣列晶圓W1之上表面S1。First, the substrate 12 is prepared, and the well region 12a is formed in the substrate 12 ( FIG. 4( a )). FIG. 4( a ) shows the well region 12 a and the other regions 12 b in the substrate 12 . Next, the memory cell array 11 , the interlayer insulating film 13 , the via plugs 45 , the via plugs 44 , the wiring layer 43 , the via plugs 42 , the metal pads 41 , etc. are formed on the substrate 12 ( FIG. 4( a ) ). FIG. 4( a ) further shows the word lines WL, the insulating layer 51 , the columnar portion CL, the step structure portion 21 and the like included in the memory cell array 11 . For example, a plurality of via plugs 45 are formed on the substrate 12 (well region 12 a ) within the interlayer insulating film 13 . In this way, the array wafer W1 is manufactured. FIG. 4( a ) shows the upper surface S1 of the array wafer W1 .

接著，準備基板15，於基板15上形成層間絕緣膜14、電晶體31、閘極電極32、接觸插塞33、配線層34、通孔插塞35、配線層36、通孔插塞37、金屬焊墊38等(圖4(b))。如此，製造電路晶圓W2。圖4(b)顯示電路晶圓W2之上表面S2。Next, the substrate 15 is prepared, and the interlayer insulating film 14 , the transistor 31 , the gate electrode 32 , the contact plug 33 , the wiring layer 34 , the through-hole plug 35 , the wiring layer 36 , the through-hole plug 37 , Metal pads 38, etc. (FIG. 4(b)). In this way, the circuit wafer W2 is manufactured. FIG. 4(b) shows the upper surface S2 of the circuit wafer W2.

接著，將陣列晶圓W1與電路晶圓W2貼合(圖5(a))。具體而言，將基板12與基板15介隔記憶胞陣列11、層間絕緣膜13、層間絕緣膜14、電晶體31、通孔插塞45等貼合。圖5(a)中，使陣列晶圓W1之上下方向反轉，將陣列晶圓W1貼合於電路晶圓W2。其結果，將基板12配置於基板15之上方。於該貼合步驟中，層間絕緣膜13與層間絕緣膜14藉由機械壓力而接著，金屬焊墊41與金屬焊墊38藉由退火而接合。Next, the array wafer W1 and the circuit wafer W2 are bonded together ( FIG. 5( a )). Specifically, the substrate 12 and the substrate 15 are bonded via the memory cell array 11 , the interlayer insulating film 13 , the interlayer insulating film 14 , the transistor 31 , the via plug 45 , and the like. In FIG. 5( a ), the up-down direction of the array wafer W1 is reversed, and the array wafer W1 is bonded to the circuit wafer W2 . As a result, the substrate 12 is arranged above the substrate 15 . In this bonding step, the interlayer insulating film 13 and the interlayer insulating film 14 are bonded by mechanical pressure, and the metal pad 41 and the metal pad 38 are bonded by annealing.

接著，藉由濕蝕刻將基板12薄膜化(圖5(b))。其結果，基板12之厚度變薄。圖5(b)中，基板12內之井區域12a於薄膜化後仍殘留，基板12內之其他區域12b藉由薄膜化而去除。Next, the substrate 12 is thinned by wet etching (FIG. 5(b)). As a result, the thickness of the substrate 12 is reduced. In FIG. 5( b ), the well region 12a in the substrate 12 remains after thinning, and the other regions 12b in the substrate 12 are removed by thinning.

接著，於基板12上形成絕緣膜46(圖6(a))。接著，藉由RIE(Reactive Ion Etching：反應離子蝕刻)蝕刻絕緣膜46及基板12(圖6(b))。其結果，於絕緣膜46及基板12內形成開口部H1，於開口部H1內，層間絕緣膜13與上述複數個通孔插塞45露出。再者，於絕緣膜46及基板12內形成開口部H2，於開口部H2內，層間絕緣膜13露出。本實施形態之開口部H2為元件分離槽。圖6(b)之步驟中，藉由上述RIE同時形成開口部H1與開口部H2。開口部H1為第1開口部之例。開口部H2為與第1開口部不同之第2開口部之例。絕緣膜46為第1膜之例。Next, the insulating film 46 is formed on the substrate 12 (FIG. 6(a)). Next, the insulating film 46 and the substrate 12 are etched by RIE (Reactive Ion Etching) (FIG. 6(b)). As a result, an opening H1 is formed in the insulating film 46 and the substrate 12, and the interlayer insulating film 13 and the plurality of through-hole plugs 45 are exposed in the opening H1. Furthermore, an opening H2 is formed in the insulating film 46 and the substrate 12, and the interlayer insulating film 13 is exposed in the opening H2. The opening part H2 of this embodiment is an element isolation|separation groove. In the step of FIG. 6( b ), the opening portion H1 and the opening portion H2 are simultaneously formed by the above-mentioned RIE. The opening part H1 is an example of a 1st opening part. The opening portion H2 is an example of a second opening portion different from the first opening portion. The insulating film 46 is an example of the first film.

接著，於基板12之整面形成絕緣膜47(圖7(a))。其結果，於絕緣膜46、基板12、層間絕緣膜13、及通孔插塞45之表面形成絕緣膜47。具體而言，開口部H1之側面及底面由絕緣膜47覆蓋，開口部H2由絕緣膜47填滿。本實施形態中，以圖7(a)之步驟，於開口部H2內之絕緣膜47內形成氣隙AG。接著，於基板12之整面形成抗蝕劑層71，自開口部H1之底面去除抗蝕劑層71(圖7(a))。Next, an insulating film 47 is formed on the entire surface of the substrate 12 ( FIG. 7( a )). As a result, the insulating film 47 is formed on the surfaces of the insulating film 46 , the substrate 12 , the interlayer insulating film 13 , and the via plug 45 . Specifically, the side surface and the bottom surface of the opening portion H1 are covered with the insulating film 47 , and the opening portion H2 is filled with the insulating film 47 . In this embodiment, the air gap AG is formed in the insulating film 47 in the opening portion H2 by the step of FIG. 7(a). Next, a resist layer 71 is formed on the entire surface of the substrate 12, and the resist layer 71 is removed from the bottom surface of the opening portion H1 (FIG. 7(a)).

接著，使用抗蝕劑層71作為遮罩，藉由RIE蝕刻絕緣膜47(圖7(b))。其結果，自開口部H1之底面去除絕緣膜47，於開口部H1內，層間絕緣膜13與上述複數個通孔插塞45再次露出。再者，將絕緣膜47加工成包含以下三部分之形狀，上述三部分指開口部H1之側面之側方部47a、絕緣膜46之上表面之上方側47b、及開口部H2內之埋入部47c。本實施形態中，側方部47a作為側壁絕緣膜發揮功能，埋入膜47c作為元件分離絕緣膜發揮功能。如此，根據本實施形態，可同時形成側壁絕緣膜與元件分離絕緣膜。絕緣膜47為第2膜之例。Next, using the resist layer 71 as a mask, the insulating film 47 is etched by RIE (FIG. 7(b)). As a result, the insulating film 47 is removed from the bottom surface of the opening portion H1, and the interlayer insulating film 13 and the plurality of through-hole plugs 45 are exposed again in the opening portion H1. Furthermore, the insulating film 47 is processed into a shape including the following three parts, which are the side portion 47a of the side surface of the opening portion H1, the upper side 47b of the upper surface of the insulating film 46, and the embedded portion in the opening portion H2. 47c. In this embodiment, the side portion 47a functions as a sidewall insulating film, and the embedded film 47c functions as an element isolation insulating film. In this way, according to the present embodiment, the sidewall insulating film and the element isolation insulating film can be simultaneously formed. The insulating film 47 is an example of the second film.

接著，於基板12之整面，形成作為金屬配線48之材料之金屬配線層48(圖8(a))。其結果，於絕緣膜47、層間絕緣膜13及通孔插塞45之表面形成金屬配線層48。具體而言，開口部H1之側面介隔絕緣膜47由金屬配線層48覆蓋，開口部H1之底面由金屬配線層48覆蓋。金屬配線層48例如為包含Al層之金屬層。接著，於基板12之整面形成抗蝕劑層72，其後去除抗蝕劑層72之一部分(圖8(a))。Next, the metal wiring layer 48 which is the material of the metal wiring 48 is formed on the whole surface of the board|substrate 12 (FIG.8(a)). As a result, the metal wiring layer 48 is formed on the surfaces of the insulating film 47 , the interlayer insulating film 13 , and the via plug 45 . Specifically, the side surface of the opening H1 is covered with the metal wiring layer 48 via the insulating film 47 , and the bottom surface of the opening H1 is covered with the metal wiring layer 48 . The metal wiring layer 48 is, for example, a metal layer including an Al layer. Next, a resist layer 72 is formed on the entire surface of the substrate 12, and then a part of the resist layer 72 is removed (FIG. 8(a)).

接著，使用抗蝕劑層72作為遮罩，藉由RIE蝕刻金屬配線層48(圖8(b))。其結果，金屬配線層48被加工成包含開口部H1之底面之上方部48a、開口部H1之側面之側方部48b、及絕緣膜47之上表面之上方部48c之金屬配線48。因上方部48a形成於上述複數個通孔插塞45上，故金屬配線48電性連接於該等通孔插塞45。因本實施形態之上方部48a、側方部48b及上方部48c由相同之金屬配線層48同時形成，故可由相同材料(例如鋁)形成。本實施形態之上方部48a、側方部48b及上方部48c形成連續之1條配線。Next, using the resist layer 72 as a mask, the metal wiring layer 48 is etched by RIE (FIG. 8(b)). As a result, the metal wiring layer 48 is processed into the metal wiring 48 including the upper portion 48a of the bottom surface of the opening H1, the side portion 48b of the side surface of the opening H1, and the upper portion 48c of the upper surface of the insulating film 47. Since the upper portion 48 a is formed on the plurality of through-hole plugs 45 , the metal wiring 48 is electrically connected to the through-hole plugs 45 . Since the upper part 48a, the side part 48b, and the upper part 48c of this embodiment are formed by the same metal wiring layer 48 at the same time, they can be formed of the same material (for example, aluminum). In this embodiment, the upper part 48a, the side part 48b, and the upper part 48c form one continuous wiring.

接著，於基板12之整面，依序形成鈍化膜49之絕緣膜49a、49b、49c(圖9(a))。其結果，於絕緣膜47及金屬配線48之表面形成鈍化膜49。本實施形態之鈍化膜49包含介隔絕緣膜47(側方部47a)與金屬配線48(側方部48a)形成於開口部H1內之部分。Next, on the entire surface of the substrate 12, insulating films 49a, 49b, and 49c of the passivation film 49 are sequentially formed (FIG. 9(a)). As a result, the passivation film 49 is formed on the surfaces of the insulating film 47 and the metal wiring 48 . The passivation film 49 of the present embodiment includes a portion where the insulating film 47 (side portion 47 a ) and the metal wiring 48 (side portion 48 a ) are formed in the opening portion H1 .

接著，去除上方部48c之上表面之鈍化膜49之一部分(圖9(b))。其結果，於鈍化膜49內形成開口部P，於開口部P內，上方部48c之上表面露出。於開口部P內露出之上方部48c作為接合墊發揮功能。因此，本實施形態之金屬配線48包含與通孔插塞45相接之部分、及作為接合墊發揮功能之部分之兩者。Next, a part of the passivation film 49 on the upper surface of the upper portion 48c is removed (FIG. 9(b)). As a result, an opening P is formed in the passivation film 49, and in the opening P, the upper surface of the upper portion 48c is exposed. The upper part 48c exposed in the opening part P functions as a bonding pad. Therefore, the metal wiring 48 of the present embodiment includes both a portion that is in contact with the via plug 45 and a portion that functions as a bonding pad.

其後，藉由切割將陣列晶圓W1及電路晶圓W2切斷成複數個晶片。該等晶片以各晶片包含1個陣列晶片1與1個電路晶片2之方式被切斷。如此，製造圖1之半導體裝置。After that, the array wafer W1 and the circuit wafer W2 are cut into a plurality of chips by dicing. These wafers are cut so that each wafer includes one array wafer 1 and one circuit wafer 2 . In this way, the semiconductor device of FIG. 1 is manufactured.

如以上所述，本實施形態之金屬配線48包含設置於通孔插塞45上之上方部48a、及包含接合墊之上方部48c。因此，根據本實施形態，可以適宜之態樣將接合墊電性連接於通孔插塞45。例如，可不使用如比較例之通孔插塞61而將接合墊電性連接於通孔插塞45，或可減少接合墊與通孔插塞45間之電阻。藉此，可削減半導體裝置之製造步驟數、製造成本。As described above, the metal wiring 48 of this embodiment includes the upper portion 48a provided on the via plug 45 and the upper portion 48c including the bonding pad. Therefore, according to the present embodiment, the bonding pads can be electrically connected to the through-hole plugs 45 in an appropriate manner. For example, the bonding pads can be electrically connected to the through-hole plugs 45 without using the through-hole plugs 61 as in the comparative example, or the resistance between the bonding pads and the through-hole plugs 45 can be reduced. Thereby, the number of manufacturing steps and manufacturing cost of a semiconductor device can be reduced.

以上，已說明若干實施形態，但該等實施形態僅作為例而提示，並非旨在限定發明範圍者。本說明書中說明之新穎之裝置及方法可以其他各種形態實施。又，對於本說明書中說明之裝置及方法之形態，可於不脫離發明主旨之範圍內進行各種省略、置換、變更。隨附之專利申請範圍及與其均等之範圍旨在包含發明範圍或主旨所含之此種形態或變化例。As mentioned above, although some embodiment was demonstrated, these embodiment is shown only as an example, and it does not intend to limit the scope of the invention. The novel apparatus and methods described in this specification can be implemented in various other forms. In addition, various omissions, substitutions, and changes can be made in the form of the apparatus and method described in this specification within the scope of not departing from the spirit of the invention. The scope of the appended patent application and its equivalents are intended to include such forms or modifications included in the scope of the invention or the gist.

[相關申請案] 本申請案享有以日本專利申請案第2020-156645號(申請日：2020年9月17日)為基礎申請案之優先權。本申請案藉由參照該基礎申請案而包含基礎申請案之所有內容。 [Related applications] This application enjoys the priority of the basic application based on Japanese Patent Application No. 2020-156645 (filing date: September 17, 2020). This application contains all the contents of the basic application by reference to the basic application.

1:陣列晶片 2:電路晶片 11:記憶胞陣列 12:基板 12a:井區域 12b:其他區域 13:層間絕緣膜 14:層間絕緣膜 15:基板 21:階差構造部 22:接觸插塞 23:通孔插塞 24:通孔插塞 31:電晶體 32:閘極電極 33:接觸插塞 34:配線層 35:通孔插塞 36:配線層 37:通孔插塞 38:金屬焊墊 41:金屬焊墊 42:通孔插塞 43:配線層 44:通孔插塞 45:通孔插塞 46:絕緣膜 47:絕緣膜 47a:側方部 47b:上方部 47c:埋入部 48:金屬配線/金屬配線層 48a:上方部 48b:側方部 48c:上方部 49:鈍化膜 49a:絕緣膜 49b:絕緣膜 49c:絕緣膜 51:絕緣層 52:記憶體絕緣膜 52a:阻擋絕緣膜 52b:電荷蓄積層 52c:穿隧絕緣膜 53:通道半導體層 54:芯絕緣膜 55:半導體層 56:半導體層 61:通孔插塞 71:抗蝕劑層 72:抗蝕劑層 AG:氣隙 BL:位元線 CL:柱狀部 H1:開口部 H2:開口部 P:開口部 S:貼合面 S1:上表面 S2:上表面 WL:字元線 WI:字元配線層 W1:陣列晶圓 W2:電路晶圓 1: Array wafer 2: circuit chip 11: Memory Cell Array 12: Substrate 12a: Well area 12b: Other areas 13: Interlayer insulating film 14: Interlayer insulating film 15: Substrate 21: Step Structure Department 22: Contact plug 23: Through hole plug 24: Through hole plug 31: Transistor 32: Gate electrode 33: Contact plug 34: wiring layer 35: Through hole plug 36: wiring layer 37: Through hole plug 38: Metal pads 41: Metal pads 42: Through hole plug 43: wiring layer 44: Through hole plug 45: Through-hole plug 46: insulating film 47: Insulating film 47a: side part 47b: Upper part 47c: Embedding part 48: Metal wiring/metal wiring layer 48a: Upper part 48b: side part 48c: Upper part 49: Passivation film 49a: insulating film 49b: insulating film 49c: insulating film 51: Insulation layer 52: Memory insulating film 52a: Barrier insulating film 52b: charge accumulation layer 52c: Tunneling insulating film 53: Channel semiconductor layer 54: Core insulating film 55: Semiconductor layer 56: Semiconductor layer 61: Through hole plug 71: Resist layer 72: Resist layer AG: Air Gap BL: bit line CL: columnar part H1: Opening H2: Opening P: Opening S: Fitting surface S1: upper surface S2: Upper surface WL: word line WI: Character Wiring Layer W1: Array wafer W2: Circuit Wafer

圖1係顯示第1實施形態之半導體裝置之構造之剖視圖。 圖2係顯示第1實施形態之各柱狀部之構造之剖視圖。 圖3(a)、(b)係用以比較第1實施形態之半導體裝置與其之比較例之半導體裝置之剖視圖。 圖4(a)～9(b)係顯示第1實施形態之半導體裝置之製造方法之剖視圖。 FIG. 1 is a cross-sectional view showing the structure of the semiconductor device according to the first embodiment. FIG. 2 is a cross-sectional view showing the structure of each columnar portion of the first embodiment. 3(a) and (b) are cross-sectional views for comparing the semiconductor device of the first embodiment and the semiconductor device of the comparative example. 4(a) to 9(b) are cross-sectional views showing a method of manufacturing the semiconductor device according to the first embodiment.

1:陣列晶片 1: Array wafer

2:電路晶片 2: circuit chip

11:記憶胞陣列 11: Memory Cell Array

12:基板 12: Substrate

12a:井區域 12a: Well area

13:層間絕緣膜 13: Interlayer insulating film

14:層間絕緣膜 14: Interlayer insulating film

15:基板 15: Substrate

21:階差構造部 21: Step Structure Department

22:接觸插塞 22: Contact plug

23:通孔插塞 23: Through hole plug

24:通孔插塞 24: Through hole plug

31:電晶體 31: Transistor

32:閘極電極 32: Gate electrode

33:接觸插塞 33: Contact plug

34:配線層 34: wiring layer

35:通孔插塞 35: Through hole plug

36:配線層 36: wiring layer

37:通孔插塞 37: Through hole plug

38:金屬焊墊 38: Metal pads

41:金屬焊墊 41: Metal pads

42:通孔插塞 42: Through hole plug

43:配線層 43: wiring layer

44:通孔插塞 44: Through hole plug

45:通孔插塞 45: Through-hole plug

46:絕緣膜 46: insulating film

47:絕緣膜 47: Insulating film

47a:側方部 47a: side part

47b:上方部 47b: Upper part

47c:埋入部 47c: Embedding part

48:金屬配線/金屬配線層 48: Metal wiring/metal wiring layer

48a:上方部 48a: Upper part

48b:側方部 48b: side part

48c:上方部 48c: Upper part

49:鈍化膜 49: Passivation film

49a:絕緣膜 49a: insulating film

49b:絕緣膜 49b: insulating film

49c:絕緣膜 49c: insulating film

51:絕緣層 51: Insulation layer

52:記憶體絕緣膜 52: Memory insulating film

53:通道半導體層 53: Channel semiconductor layer

54:芯絕緣膜 54: Core insulating film

55:半導體層 55: Semiconductor layer

56:半導體層 56: Semiconductor layer

AG:氣隙 AG: Air Gap

BL:位元線 BL: bit line

CL:柱狀部 CL: columnar part

P:開口部 P: Opening

S:貼合面 S: Fitting surface

WL:字元線 WL: word line

WI:字元配線層 WI: Character Wiring Layer

Claims (12)

一種半導體裝置，其具備： 第1基板； 第1絕緣膜，其設置於上述第1基板上； 第1插塞，其設置於上述第1絕緣膜內； 第2基板，其設置於上述第1絕緣上；及 第1配線，其包含：第1部分，其設置於上述第2基板內，且設置於上述第1插塞上；及第2部分，其設置於上述第2基板上，包含接合墊，以與上述第1部分之材料相同之材料形成。 A semiconductor device comprising: the first substrate; a first insulating film disposed on the first substrate; a first plug, which is arranged in the above-mentioned first insulating film; a second substrate disposed on the first insulation; and The first wiring includes: a first part provided in the second substrate and provided on the first plug; and a second part provided on the second substrate and including bonding pads to connect with The material of the above-mentioned part 1 is formed of the same material. 如請求項1之半導體裝置，其進而具備： 第2絕緣膜，其設置於上述第2基板上；且 上述第1部分設置於上述第2基板及上述第2絕緣膜內； 上述第2部分介隔上述第2絕緣膜設置於上述第2基板上。 The semiconductor device of claim 1, further comprising: a second insulating film disposed on the second substrate; and the first part is disposed in the second substrate and the second insulating film; The second portion is provided on the second substrate via the second insulating film. 如請求項2之半導體裝置，其中 上述第2絕緣膜包含：第3部分，其設置於上述第2基板內，且設置於上述第2基板與上述第1部分之間；及第4部分，其設置於上述第2基板內，與上述第3部分不同。 The semiconductor device of claim 2, wherein The second insulating film includes: a third part provided in the second substrate and between the second substrate and the first part; and a fourth part provided in the second substrate, and Part 3 above is different. 如請求項3之半導體裝置，其中上述第4部分包含氣隙。The semiconductor device of claim 3, wherein the fourth part includes an air gap. 如請求項1至4中任一項之半導體裝置，其進而具備： 第3絕緣膜，其設置於上述第1配線上； 上述第3絕緣膜包含設置於上述第2基板內之部分。 The semiconductor device of any one of claims 1 to 4, further comprising: a third insulating film provided on the first wiring; The third insulating film includes a portion provided in the second substrate. 如請求項5之半導體裝置，其中上述接合墊在設置於上述第3絕緣膜內之開口部內露出。The semiconductor device of claim 5, wherein the bonding pad is exposed in the opening provided in the third insulating film. 如請求項1至4中任一項之半導體裝置，其中 具備複數個插塞作為上述第1插塞； 具備設置於上述複數個插塞上之1條配線，作為上述第1配線。 The semiconductor device of any one of claims 1 to 4, wherein having a plurality of plugs as the above-mentioned first plugs; One wiring provided on the plurality of plugs is provided as the first wiring. 一種半導體裝置之製造方法，其包含： 準備第1基板與第2基板； 於上述第2基板上形成第1絕緣膜； 於上述第1絕緣膜內形成第1插塞； 將上述第1基板與上述第2基板介隔上述第1絕緣膜及上述第1插塞貼合，於上述第1基板之上方配置上述第2基板； 於上述第2基板內形成第1開口部，於上述第1開口部內，使上述第1插塞露出； 形成第1配線，其包含：第1部分，其設置於上述第1開口部內，且設置於上述第1插塞上；第2部分，其設置於上述第2基板上，包含接合墊，以與上述第1部分之材料相同之材料形成。 A method of manufacturing a semiconductor device, comprising: Prepare the first substrate and the second substrate; forming a first insulating film on the second substrate; forming a first plug in the first insulating film; bonding the first substrate and the second substrate with the first insulating film and the first plug interposed therebetween, and disposing the second substrate above the first substrate; forming a first opening in the second substrate, and exposing the first plug in the first opening; A first wiring is formed, which includes: a first part provided in the first opening and on the first plug; a second part provided on the second substrate, including bonding pads to be The material of the above-mentioned part 1 is formed of the same material. 如請求項8之半導體裝置之製造方法，其中上述第1配線介隔第2絕緣膜形成於上述第2基板上。The method of manufacturing a semiconductor device according to claim 8, wherein the first wiring is formed on the second substrate via the second insulating film. 如請求項9之半導體裝置之製造方法，其進而包含：於上述第2基板內，形成與上述第1開口部不同之第2開口部； 上述第2絕緣膜包含：第3部分，其設置於上述第1開口部內；及第4部分，其設置於上述第2開口部內。 The method for manufacturing a semiconductor device according to claim 9, further comprising: forming a second opening that is different from the first opening in the second substrate; The second insulating film includes a third portion provided in the first opening portion, and a fourth portion provided in the second opening portion. 如請求項10之半導體裝置之製造方法，其中 上述第2絕緣膜包含： 第1膜，其於形成上述第1及第2開口部前，形成於上述第2基板上；及 第2膜，其於形成上述第1及第2開口部後，形成於上述第1膜上與上述第1及第2開口部內。 A method of manufacturing a semiconductor device as claimed in claim 10, wherein The above-mentioned second insulating film includes: a first film formed on the second substrate before forming the first and second openings; and The second film is formed on the first film and in the first and second openings after the first and second openings are formed. 如請求項8至11中任一項之半導體裝置之製造方法，其進而包含：於上述第1配線上形成第3絕緣膜； 上述第3絕緣膜包含設置於上述第1開口部內之部分。 The method for manufacturing a semiconductor device according to any one of claims 8 to 11, further comprising: forming a third insulating film on the first wiring; The said 3rd insulating film contains the part provided in the said 1st opening part.
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US11444039B2 (en) * 2020-05-29 2022-09-13 Sandisk Technologies Llc Semiconductor die including diffusion barrier layers embedding bonding pads and methods of forming the same

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