TW202212811A - Method of detecting a surface defect on an object and system thereof - Google Patents

Abstract

A method of detecting a surface defect on an object is provided in some embodiments in the present disclosure, including: providing an object; providing a system for detecting a surface defect on an object, including a laser emitting module, a laser detecting module and an analyzation module, in which the laser detecting module is linked to the laser emitting module, and the analyzation module is linked to the laser detecting module; emitting a laser to a surface of an object using the laser emitting module; detecting a plurality of emitted positions emitted by the laser using the laser detecting module; analyzing a surface feature, based on the plurality of emitted positions, using the analyzation module; identifying whether a surface detect is existed in the surface, based on the surface feature.

Description

Method and system for detecting surface defects of articles

The present disclosure relates to methods and systems for detecting surface defects. In particular, the present disclosure relates to methods and systems for detecting surface defects using laser light.

In the semiconductor manufacturing process, some processes, such as high temperature or friction or collision during the component transfer process, may cause surface defects (such as hot melt marks or scratches) on the wafer or components in the wafer processing equipment, affecting the subsequent process. Yield. For example, when there is a surface defect on the inner edge of the wafer storage carrier, it is easy to cause the robot arm to be interfered by the surface defect when accessing the wafer, resulting in wafer breakage.

The current methods for inspecting surface defects mainly rely on human eye interpretation or automatic optical inspection systems. However, when the surface defects are less obvious, the human eye may easily miss the inspection. As for the automatic optical inspection system, there are limitations on the lighting and the capture angle. If the light is insufficient or the capture angle is not appropriate, it is easy to miss the inspection. In addition, Resolution is also limited.

Therefore, how to provide a method and a system for detecting surface defects of objects without lighting and with high resolution is an urgent problem to be solved.

One aspect of the present disclosure is to provide a method for detecting surface defects of an article, including: providing an article; providing a system for detecting surface defects of an article, including: a laser emission module, a laser detection module, and an analysis module, the laser detection module is electrically connected to the laser emission module, and the analysis module is electrically connected to the laser detection module; the laser emission module is used to emit laser light to the surface of the article; the steps are: Use the laser detection module to detect multiple irradiation positions when the laser light is irradiated to the surface; use the analysis module to analyze the surface features of the surface based on the multiple irradiation positions; based on the surface features, determine whether there are surface defects on the surface.

In some embodiments, the articles comprise wafers, or components in wafer processing equipment.

In some embodiments, the surface defects include physical damage.

In some embodiments, the laser light emits a single beam of light or a fan of light.

In some embodiments, if the coordinate axis parallel to the direction of the emission point of the laser light perpendicular to the surface is set as the X axis, and the coordinate axis parallel to any direction on the surface is set as the Y axis, then a plurality of irradiation The information of any one of the positions includes an X-axis coordinate and a Y-axis coordinate.

In some embodiments, the step of analyzing the surface features of the surface includes presenting a plurality of Y-axis coordinates of a plurality of irradiation positions and a plurality of X-axis coordinates corresponding to the plurality of Y-axis coordinates.

In some embodiments, the step of judging whether there is a surface defect on the surface includes, if the first Y-axis coordinate and the second Y-axis coordinate adjacent to the first Y-axis coordinate, the corresponding first X-axis coordinate and the second X-axis coordinate respectively If the difference between the axis coordinates is greater than a certain value, it is determined that the surface has surface defects.

Another aspect of the present disclosure is to provide a system for detecting surface defects of an article, comprising: at least one laser emission module for emitting laser light to the surface of the article, at least one laser detection module, and The analysis module, the laser emission module is arranged on the laser detection module, the laser detection module is used for detecting a plurality of irradiation positions when the laser light irradiates the surface, and the analysis module is electrically connected to the laser Detection module.

In some embodiments, the system for detecting surface defects of articles further includes a plurality of laser emission modules, a plurality of laser detection modules or a combination thereof, wherein the plurality of laser emission modules are disposed in one of the laser detection modules. On the measuring module, or a plurality of laser emission modules are respectively arranged on a plurality of laser detection modules in a one-to-one manner.

In some embodiments, the analysis module includes an automatic interpretation element for interpreting whether the article has surface defects according to a plurality of irradiation positions.

In some embodiments, a conveying device is further included, and the conveying device carries the laser emission module and the laser detection module, so as to convey the laser emission module and the laser detection module to the position to be measured, and the laser detection module The measuring module is electrically connected to the analysis module through the conveying device.

It is to be understood that both the foregoing general description and the following detailed description are examples and are intended to provide further explanation of the disclosure as claimed.

It will be appreciated that different implementations or examples provided in the following may implement different features of the subject matter of the present disclosure. The embodiments of specific components and arrangements are used to simplify the disclosure and not to limit the disclosure. Of course, these are only examples and are not intended to be limiting. For example, the description below that the first feature is formed on the second feature includes the two being in direct contact, or there are other additional features between the two that are not in direct contact. Furthermore, the present disclosure may repeat reference numerals and/or symbols in the various embodiments. Such repetition is for simplicity and clarity and does not represent a relationship between the various embodiments and/or configurations discussed.

Terms used in this specification generally have their ordinary meanings in the art and in the context in which they are used. The examples used in this specification, including examples of any terms discussed herein, are illustrative only and do not limit the scope and meaning of the disclosure or any exemplified terms. Likewise, the present disclosure is not limited to some of the implementations provided in this specification.

It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the present embodiments.

As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

As used herein, the terms "comprising", "including", "having" and the like should be construed as open ended, ie, meaning including but not limited to.

Please refer to FIG. 1 and FIG. 2, FIG. 1 exemplarily describes the flow of a method 100 for detecting surface defects of an article according to some embodiments of the present disclosure, and FIG. 2 exemplarily describes the process according to the present disclosure. A perspective view of a method 100 of detecting surface defects of an article in some embodiments of the disclosure. In some embodiments, a surface defect is a state in which the surface of any item 300 differs from the original topography. For example, the original flat appearance is lost. In some embodiments, the surface defect is a thermal fusion mark or a scratch caused by physical damage (high temperature, friction or impact, etc.) to the article 300, but not limited thereto.

The method 100 for detecting surface defects of an article includes steps S110 to S160, respectively step S110, providing the article 300; step S120, providing a system 200 for detecting surface defects of the article, including: a laser emission module 210, a laser detection The measurement module 220 and the analysis module 230; step S130, use the laser emission module 210 to emit laser light to the surface of the article 300; step S140, use the laser detection module 220 to detect the laser light irradiated to the surface In step S150, the analysis module 230 is used to analyze the surface features of the surface based on the plurality of irradiation positions; finally, in step S160, based on the surface features, it is determined whether the surface has surface defects.

First, step S110 is performed, and the article 300 is provided. In some embodiments, article 300 includes a wafer, an element in a wafer processing apparatus, such as a wafer storage carrier or wafer transfer element.

Next, step S120 is performed to provide a system 200 for detecting surface defects of articles, including a laser emission module 210 , a laser detection module 220 , and an analysis module 230 . In some embodiments, the laser detection module 220 is electrically connected to the laser emission module 210, and the analysis module 230 is electrically connected to the laser detection module 220, wherein the laser emission module 210 is used for emitting laser light To the surface of the article 300, the laser detection module 220 is used for detecting the irradiation position when the laser light is irradiated to the surface. In some embodiments, the laser detection module 220 is disposed on the laser emission module 210 . In some embodiments, the laser emission module 210 and the laser detection module 220 can be adjusted according to the size of the object 300 to be tested, for example, the laser emission module 210 and the laser detection module 220 can be miniaturized, The laser emission module 210 and the laser detection module 220 can extend into the wafer accommodating space of the wafer storage carrier.

Next, step S130 is performed, and the laser emission module 210 is used to emit laser light to the surface of the article 300 . In some embodiments, the laser light emits a single beam of light or a fan-shaped light with wavelengths ranging from 400 nm to 700, such as 400 nm, 405 nm, 410 nm, 420 nm, 430 nm, 440 nm, 450 nm, 460 nm, 470 nm, 480 nm, 490 nm, 500 nm, 510 nm, 520nm, 530nm, 540nm, 550nm, 560nm, 570nm, 580nm, 590nm, 600nm, 610nm, 620nm, 630nm, 640nm, 650nm, 660nm, 670nm, 680nm, 690nm, 700nm, or a combination thereof, but not limited thereto.

Next, step S140 is executed, and the laser detection module 220 is used to detect a plurality of irradiation positions when the laser light is irradiated to the surface. In some embodiments, the laser detection module 220 transmits the information of the plurality of irradiation positions back to the analysis module 230 in real time, so that the analysis module 230 can analyze the surface features (such as flatness, concave, protrusion, etc.) of the surface. . In some embodiments, the laser detection module 220 includes a photographing element, which allows the laser detection module 220 to capture a real-time image of the surface while detecting the irradiation position, and send it back to the analysis module 230 .

In some embodiments, if the coordinate axis parallel to the direction of the emission point of the laser light perpendicular to the surface is set as the X axis, and the coordinate axis parallel to any direction on the surface is set as the Y axis, and corresponds to the X axis and the Y axis The axis defines the Z axis (that is, the Z axis is perpendicular to the X axis and the Y axis), and the information of the irradiation position includes the X axis coordinates and the Y axis coordinates or the X axis coordinates, the Y axis coordinates and the Z axis coordinates.

In some embodiments, the laser emission module 210 and the laser detection module 220 can be held by hand to detect surface defects, for example, the laser emission module 210 and the laser detection module 220 can be moved along the Y axis Or move the Z axis to detect the irradiation position of the laser light. In some embodiments, the system 200 for detecting surface defects of the article 300 may further include a conveying device 240 , see FIG. 3 . The conveying device 240 carries the laser emission module 210 and the laser detection module 220 , and conveys the laser emission module 210 and the laser detection module 220 to the position to be measured to perform detection, and the laser detection module 220 The analysis module 230 is electrically connected to the transmission device 240 to return the information of the irradiation position. In one embodiment, the delivery device 240 may be a robotic arm.

In some embodiments, a proper distance L needs to be maintained between the laser light and the surface, so that the laser detection module 220 can detect the information of the irradiation position, and the distance L can be greater than 40 mm, such as 40 mm to 200 mm (for example, 40mm, 50mm, 60mm, 70mm, 80mm, 90mm, 100mm, 110mm, 120mm, 130mm, 140mm, 150mm, 160mm, 170mm, 180mm, 190mm, 200mm , or the numerical value of any of the foregoing ranges), but not limited thereto.

In some embodiments, when the laser light is fan-shaped light, when the fan-shaped light irradiates the surface, the width W of the fan-shaped light received by the surface is at least 20 mm, such as 20 mm to 150 mm (for example, 20 mm, 30 mm , 40 mm, 50 mm, 60 mm, 70 mm, 80 mm, 90 mm, 100 mm, 110 mm, 120 mm, 130 mm, 140 mm, 150 mm, or any of the foregoing values), but not limited to .

In some embodiments, the resolution of the laser detection module 220 can be 10 microns to 150 microns (for example, 10 microns, 20 mm, 30 mm, 40 mm, 50 mm, 60 mm, 70 mm, 80 mm , 90 mm, 100 mm, 110 mm, 120 mm, 130 mm, 140 mm, 150 mm, or any value in the aforementioned interval), but not limited thereto. It should be understood that the laser detection module 220 can detect the irradiation position of the laser light without additional illumination, and has a higher resolution than human eye recognition or automatic optical detection systems.

In some embodiments, the system 200 for detecting surface defects of articles may include one or more laser emission modules 210 and one or more laser detection modules 220 . In some embodiments, a plurality of laser emission modules 210 may be disposed on one laser detection module 220 . For example, please refer to FIG. 4A to FIG. 4F , which illustrate the combination of the laser emission module 210 and the laser detection module 210 . FIG. 4A illustrates that two laser emitting modules 210 are disposed on one laser detection module 220 horizontally opposite to each other at 180 degrees. 4B and 4C illustrate that three or four laser emitting modules 210 are respectively disposed on one laser detection module 220 , wherein each laser emitting module 210 is located on the same horizontal plane and is arranged at a 90-degree angle in turn. Rotation arrangement. In some embodiments, the system 200 for detecting surface defects of articles can also combine a laser emitting module 210 with a laser detection module 220 to form a laser receiving group on a one-to-one basis. The plurality of laser emission modules 210 and the plurality of laser detection modules 220 are combined to form a plurality of laser receiving groups, thereby obtaining the information of the irradiation positions of the plurality of laser beams, thereby improving the detection efficiency. FIG. 4D illustrates the combination of two laser receiving groups. The laser detecting modules 220 are arranged opposite to each other between the respective laser receiving groups, so that the laser emitting modules 210 are arranged 180 degrees opposite each other. FIG. 4E illustrates the combination of three laser receiving groups. The three laser receiving groups are respectively attached to each other through the laser detection modules 220 , so that the laser emission modules 210 are located on the same horizontal plane, and are The 90-degree rotation or the orderly arrangement is between 180 degrees, for example, the laser emitting modules 210 are respectively located at the positions of 0 degrees, 90 degrees, and 180 degrees. Fig. 4F illustrates the combination of four laser receiving groups, and further two groups of laser receiving groups similar to those in Fig. 4D are attached to each other, and the angle of the laser emitting module 210 is slightly changed. The adjacent laser emitting modules 210 located on the same plane face different directions, so as to increase the detectable range of the laser light. In the above implementation, one laser detection module 220 can be used with multiple laser emission modules 210, or multiple laser receiving groups can be used (one laser detection module 220 is matched with one laser emission module 210). module 210 ), simultaneously detecting the information of the irradiation positions of a plurality of laser beams, compared with only setting a single laser emitting module 210 , the detection efficiency is improved.

Next, step S150 is performed, and the analysis module 230 is used to analyze the surface features of the surface based on the plurality of irradiation positions; then, step S160 is performed to determine whether the surface has surface defects based on the surface features. In some embodiments, the step of analyzing the surface features of the surface includes presenting a plurality of Y-axis coordinates of a plurality of illumination locations and a plurality of X-axis coordinates corresponding to the plurality of Y-axis coordinates. In some embodiments, please refer to FIG. 5A, if the first Y-axis coordinate Y1 and the second Y-axis coordinate Y2 adjacent to the first Y-axis coordinate, the corresponding first X-axis coordinate X1 and the second X-axis coordinate respectively The difference of the axis coordinate X2 is greater than a certain value (for example, 10 microns, 20 mm, 30 mm, 40 mm, 50 mm, 60 mm, 70 mm, 80 mm, 90 mm, 100 mm, 110 mm, 120 mm, 130 mm mm, 140 mm, 150 mm, or the value of any of the foregoing ranges), it is determined that the surface has surface defects.

In one embodiment, please refer to FIG. 5B , which illustrates an integrated curve of the irradiation position obtained by using the system 200 for detecting surface defects of the article configured with two laser emission modules 210 for an article 300 with surface defects. In the figure, the upper and lower lines represent the signals received by the two laser emitting modules 210 respectively, the circle frame is the position where the surface defect exists, the graph shows obvious break points, and the adjacent Y-axis irradiation positions The difference between the corresponding X-axis irradiation positions is greater than a certain value, indicating the existence of surface defects. For example, if the adjacent Y-axis irradiation positions are about 625 μm and about 650 μm, the corresponding X-axis irradiation positions are about 8500 μm and about 8250 μm, and the X-axis difference is about 250 μm, it is determined that there are surface defects.

In one embodiment, the analysis module 230 includes an automatic interpretation element, which can be used to integrate and analyze the information of multiple irradiation positions obtained by the system 200 for detecting surface defects of the article, and to determine whether the surface has surface defects. It should be understood that those skilled in the art can set the conditions of the X-axis coordinate and the Y-axis coordinate for determining the existence of surface defects according to the detection requirements. For example, when the difference between Y1 and Y2 of the Y-axis is 100 microns, and the corresponding X1 and X2 of the X-axis are greater than 200 microns, it is determined that there is a surface defect.

In some embodiments, the system 200 for detecting surface defects of an article may include a conveying device 240 and an automatic interpretation element, so that the determination of surface defects can be completed without the need for hand-held and manual analysis of the irradiation position information; The defective system 200 can also include an item transfer module electrically connected to the conveying device 240 , which can transfer the items 300 of the same item to be tested to the implementation positions of the laser emission module 210 and the laser detection module 220 , and move the detected object 300 out of the implementation position. Accordingly, it is possible to fully automatically determine whether a number of objects 300 to be tested have surface defects without manpower, which not only saves inspection time and manpower, but also reduces the risk of errors in manpower analysis.

The method and system for detecting surface defects of an article disclosed in some embodiments of the present disclosure utilize the height difference of the irradiated position when the laser light is irradiated on the surface to determine whether the article has surface defects, compared with the conventional method. The automatic optical inspection system or human eye recognition, not only the detection resolution is not affected by the illumination brightness or the shooting angle, but also has better resolution and can distinguish more subtle surface defects.

While the present disclosure has been described in detail in terms of certain implementations, other implementations are possible. Therefore, the spirit and scope of the appended claims should not be limited to the embodiments described herein.

100: Method for detecting surface defects of articles 200: Systems for the detection of surface defects on items 210: Laser launch module 220: Laser detection module 230: Analysis Module 240: Conveyor 300:Item W: width L: Spacing X: X axis X1: the first X-axis coordinate X2: Second X-axis coordinate Y: Y axis Z: Z axis S110, S120, S130, S140, S150, S160: Steps

A more complete understanding of the present disclosure can be obtained by reading the following detailed description of embodiments with reference to the accompanying drawings. FIG. 1 exemplarily depicts the flow of a method of detecting surface defects of an article in accordance with some embodiments of the present disclosure; FIG. 2 illustrates a perspective perspective view of a method of detecting surface defects of an article in accordance with some embodiments of the present disclosure; FIG. 3 illustrates a perspective perspective view of a method of detecting surface defects of an article in accordance with further embodiments of the present disclosure; FIGS. 4A-4F exemplarily describe aspects of the combination of the laser emission module and the laser detection module according to some embodiments of the present disclosure; FIG. 5A exemplarily depicts a perspective perspective view of detecting surface defects of an article in accordance with some embodiments of the present disclosure; and FIG. 5B exemplarily depicts an integrated graph of irradiation positions obtained by a system for detecting surface defects of an article for an article with surface defects, according to an embodiment of the present disclosure.

100: Method for detecting surface defects of articles

S110, S120, S130, S140, S150, S160: Steps

Claims (11)

A method of detecting surface defects of an article, comprising: provide an item; A system for detecting surface defects of articles is provided, the system comprising: a laser launch module; a laser detection module electrically connected to the laser emission module; and an analysis module, electrically connected to the laser detection module; using the laser emission module to emit a laser light to a surface of the object; Using the laser detection module to detect a plurality of irradiation positions when the laser light is irradiated to the surface; using the analysis module to analyze a surface feature of the surface based on the plurality of irradiation positions; and Based on the surface features, it is determined whether the surface has surface defects. The method of claim 1, wherein the article comprises a wafer, or a component in a wafer processing facility. The method of claim 1, wherein the surface defect comprises a physical damage. The method of claim 1, wherein the laser light emits a single beam of light or a fan-shaped light. The method of claim 1, wherein a coordinate axis parallel to a direction perpendicular to the surface of the laser light emission point is set as the X axis, and a coordinate axis parallel to any direction on the surface is set as Y-axis, the information of any one of the plurality of irradiation positions includes an X-axis coordinate and a Y-axis coordinate. The method of claim 5, wherein the step of analyzing the surface features of the surface includes presenting a plurality of Y-axis coordinates of the plurality of irradiation positions and a plurality of X-axis coordinates corresponding to the plurality of Y-axis coordinates. The method of claim 5, wherein the step of determining whether the surface has surface defects includes if a first Y-axis coordinate and a second Y-axis coordinate adjacent to the first Y-axis coordinate correspond to one of If the difference between the first X-axis coordinate and a second X-axis coordinate is greater than a certain value, it is determined that the surface has surface defects. A system for detecting surface defects of articles, comprising: at least one laser emitting module for emitting a laser light to a surface of an object; At least one laser detection module, wherein the laser emission module is disposed on the laser detection module, and the laser detection module is used for detecting a plurality of irradiations when the laser light irradiates the surface location; and An analysis module is electrically connected to the laser detection module. The system of claim 8, wherein the system further comprises a plurality of laser emission modules, a plurality of laser detection modules, or a combination thereof, wherein the plurality of laser emission modules are disposed on the plurality of lasers One of the detection modules, or the plurality of laser emission modules are respectively disposed on the plurality of laser detection modules in a one-to-one manner. The system of claim 8, wherein the analysis module includes an automatic interpretation element for judging whether the article has surface defects according to the plurality of irradiation positions. The system of claim 8, further comprising a conveying device, the conveying device carries the laser emission module and the laser detection module for conveying the laser emission module and the laser detection module to a position to be measured, and the laser detection module is electrically connected to the analysis module through the conveying device.

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