TW202200328A - Control device and robot hand system - Google Patents

Abstract

Provided are a control device and a robot hand system with which it is possible to improve the usability of an actuator. A control device 14A is connectable to an actuator 12 using a negative pressure as a power source, and comprises: a vacuum ejector 52 having an inflow port 60, a discharge port 62, and a suction port 64; inflow piping 54A that can connect the inflow port 60 and a pump 66; suction piping 58A that can connect the suction port 64 and the actuator 12; and a first valve 56 provided in a path 65 passing through the discharge port 62, the vacuum ejector 52, the suction port 64, and the suction piping 58A.

Description

Control device and robotic arm system

The present invention relates to a control device and a robotic arm system.

In order to hold a workpiece as an actuator, Patent Document 1 discloses a holding device including a palm portion, a plurality of finger portions, an elastic portion, and a shape holding portion. A plurality of fingers are provided to protrude from the circumference of the palm, and fall toward the palm by deforming the aforementioned palm in the thickness direction. The elastic part is arranged in the finger part. The shape maintaining portion prevents shrinkage of the outer peripheral surface of the palm portion. This holding device is elastically deformed so that the palm portion deforms in the thickness direction and the fingers fall toward the palm portion by decompressing the inside of the holding body. Since the gripping device has a plurality of fingers, it can hold workpieces of different sizes and shapes for general purposes, and can hold only by decompressing the gripping body, so the control is simple, and there is no need to force the gripping body to the workpiece. , so you can hold a food-soft workpiece without damaging it. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2018-062038.

[Problems to be Solved by Invention]

If the gripping device of Patent Document 1 described above can control the negative pressure as a power source, the degree of opening of the fingers relative to the palm can be controlled, so it is considered that the application can be further expanded and the usability can be improved.

An object of the present invention is to provide a control device and a robotic arm system that can improve the usability of the actuator. [means to solve the problem]

The control device according to the present invention is a control device connectable to an actuator using negative pressure as a power source, and includes a vacuum ejector, an inflow pipe, a suction pipe, and a first valve. The aforementioned vacuum ejector has an inflow port, a discharge port, and a suction port. The inflow piping may be connected to the inflow port and the pump. The suction pipe may be connected to the suction port and the actuator. The said 1st valve is provided in the path|route which passes the said discharge port, the said vacuum ejector, the said suction port, and the said suction piping.

The control device according to the present invention is a control device connectable to an actuator using negative pressure as a power source, and includes a vacuum ejector, inflow piping, suction piping, and positive pressure piping. The aforementioned vacuum ejector has an inflow port, a discharge port, and a suction port. The inflow piping may be connected to the inflow port and the pump. The suction pipe may be connected to the suction port and the actuator. The positive pressure piping can be connected to the actuator and a positive pressure source capable of supplying positive pressure. Among them, the positive pressure piping system has a third valve.

The control device according to the present invention is a control device connectable to an actuator using negative pressure as a power source, and includes a vacuum ejector, a plurality of inflow pipes, and suction pipes. The aforementioned vacuum ejector has an inflow port, a discharge port, and a suction port. The plurality of inflow pipes may be connected to the inflow port and the pump. The suction pipe may be connected to the suction port and the actuator. The plurality of inflow pipes have a sub-pressure regulating valve and a sub-valve, respectively, and the plurality of inflow pipes are configured in parallel with the vacuum ejector.

A robot arm system according to the present invention includes the aforementioned control device and a gripping device serving as the aforementioned actuator. [Effect of invention]

According to the present invention, since the actuator can be controlled by opening and closing the first valve, the third valve, or the sub-valve, the usability can be improved.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The embodiments and modifications shown below are examples of the present invention, and the present invention is not limited thereto. In the following description of each embodiment and each modification, the same components are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

1. First Embodiment (overall composition)

The robot arm system 10A shown in FIG. 1 includes a gripping device 12 as an actuator and a control device 14A. The gripping device 12 is elastically deformed by a predetermined negative pressure generated by the control device 14A, and performs a desired operation such as gripping the workpiece W.

(holding device)

The gripping device 12 includes a bag-shaped gripping body 16 . The grip body 16 may be formed of a material having airtightness and elasticity, such as natural rubber or synthetic rubber. Preferably, the hardness of the grip body 16 measured in accordance with JIS K6253 durometer hardness test (type A) is about 60 to 90.

As shown in FIG. 2 , the grip body 16 includes a palm portion 18 and finger portions 20 , and a plurality of (three) finger portions 20 are provided to protrude around the palm portion 18 . The palm portion 18 has a substantially disc shape. The finger portion 20 is integrally formed with the palm portion 18 , and the three finger portions 20 are radially arranged so as to surround the palm portion 18 . The fingers 20 form predetermined intervals with each other. The inner face 22 of the finger portion 20 is integrally formed with the palm portion 18 .

The grip body 16 is integrally formed with the palm portion 18 at a position connecting portion 24 surrounding the outer edge of the palm portion 18 on the opposite side to the side where the finger portion 20 is formed. The connection portion 24 is cylindrical, and in the case of this figure, has a circular opening at the upper end. The grip body 16 has an outer peripheral surface 26 that is curved in a direction protruding outward from the palm portion 18 toward the connecting portion 24 . The fingers 20 are solid. The internal material of the finger portion 20 is the same material as that of the grip body 16, but may be a different material. In addition, it does not need to be a uniform material, and may include additives such as composite materials and fillers in different combinations of materials.

The opening of the grip body 16 is sealed by the casing 28 inserted into the connection portion 24 . The casing 28 is preferably made of a metal such as stainless steel or a hard resin such as plastic. The case 28 has a bottom portion 44 having a through hole 42 in the center, a cylindrical portion 46 integrally formed with an outer edge of the bottom portion 44 , and a disk-shaped top portion 48 . The top 48 is provided with the joint 32 . The fitting 32 is screwed to the top 48 via the sealing material 50 . The connector 32 is connected to the detachable part 30 by one touch.

The dismounting portion 30 is a one-touch connector, one end is connected to the adapter plate provided at the front end of the machine body (not shown), and the other end is connected to the connector 32 of the housing 28 . When the connector 32 is inserted in the insertion direction, the detachment part 30 is connected, and the connection is released by the release part being pushed in the insertion direction. The detachable part 30 is not limited to the one-touch joint, and may be a joint connected to the joint 32 by a screw. The detachable portion 30 is provided with a plurality of air supply and exhaust ports 34 on the peripheral surface.

The grip body 16 includes a high-strength portion 36 that is less deformable in the thickness direction than the palm portion 18 between the connection portion 24 and the palm portion 18 . The high-strength portion 36 is arranged in the inner space of the palm portion 18 of the grip body 16 . The high-strength portion 36 holds the grip body 16 other than the palm portion 18 , that is, the outer periphery of the palm portion 18 does not shrink. The material of the high-strength portion 36 may not deform significantly under the reduced pressure of the grip body 16 , and for example, hard resin or metal may be used. The material of the high-strength portion 36 does not necessarily need to be uniform, and may also be a composite material in which different materials are combined.

The high-strength portion 36 shown in FIG. 2 is a frame-shaped member having a guide hole 38 for accommodating the deformed palm portion 18 and a curved portion 40 on the outer side of the front end. In the case of the first embodiment, the high-strength portion 36 is a cylindrical member and gradually tapers toward the front end as a whole. The distal end of the high-strength portion 36 is in contact with the proximal end of the finger portion 20 . The curved portion 40 has a convex shape toward the outside. The guide hole 38 is located at the center of the high-strength portion 36 corresponding to the palm portion 18 , and the inner diameter is preferably approximately the same size as the palm portion 18 . The base end of the high-strength portion 36 is in contact with the case 28 .

(control device)

As shown in FIG. 1 , the control device 14A includes a vacuum ejector 52 , an inflow pipe 54A, and a suction pipe 58A having a first valve 56 . The vacuum ejector 52 uses compressed gas to generate negative pressure. The vacuum ejector 52 has an inflow port 60 , a discharge port 62 , and a suction port 64 . The inflow port 60 is connected to the discharge port 62 via a nozzle and a diffuser (not shown) in the vacuum ejector 52 . The suction port 64 is connected to the outlet of the nozzle.

The inflow port 60 is connected to one end of the inflow pipe 54A. The other end of the inflow pipe 54A is connected to the pump 66 . The inflow pipe 54A is provided with a first pressure regulating valve 68 on the other end side, and a second valve 70 is provided between the first pressure regulating valve 68 and one end. The first pressure regulating valve 68 reduces the pressure of the high-pressure gas supplied from the pump 66 to a predetermined pressure. The second valve 70 is a valve that opens and closes the inflow piping 54A, and for example, a solenoid valve can be used. When the second valve 70 is opened, the gas whose pressure is regulated by the first pressure regulating valve 68 is fed into the inflow port 60 .

The discharge port 62 is opened to the atmosphere via the muffler 63 . The suction port 64 is connected to one end of the suction pipe 58A. The other end of the suction pipe 58A is connected to one of the plurality of supply and exhaust ports 34 . The supply and exhaust ports 34 other than those connected to the suction piping 58A are blocked by plugs.

From the discharge port 62 , the vacuum ejector 52 , the suction port 64 , and the suction pipe 58A form a path 65 that connects the outside with the inside of the grip body 16 . In the first embodiment, the suction pipe 58A in the path 65 is provided with the first valve 56 . The first valve 56 is a valve that opens and closes the suction pipe 58A, and for example, a solenoid valve can be used. When the first valve 56 is closed, the gripping device 12 side is blocked from the outside by the first valve 56, and the inside of the gripping body 16 is hermetically sealed.

The compressed gas system fed into the inflow port 60 is concentrated by the nozzle in the vacuum ejector 52 , released at a high speed, flows into the diffuser, and is released from the discharge port 62 to the outside. A vacuum is created at the outlet of the nozzle where the compressed gas is released at a high speed. The gas is sucked into the suction port 64 from the suction pipe 58A by the negative pressure at the nozzle outlet. The higher the pressure of the gas flowing into the inflow port 60, the faster the speed of the compressed gas discharged from the nozzle, and the higher the vacuum degree of the suction port 64 (ie, the lower the pressure).

The control device 14A may include a control unit (not shown) that integrally controls the pump 66 , the first valve 56 , the first pressure regulating valve 68 , and the second valve 70 . For example, a programmable logic controller (PLC, Programmable Logic Controller) or the like can be applied to the control unit, and various processes can be executed in accordance with a gripping operation program for the gripping device 12, an opening operation program, or the like.

(actions and effects)

Actions and effects of the robot arm system 10A will be described. As shown in FIG. 3, the first valve 56 and the second valve 70 are normally open. Compressed gas 67 is supplied from start-up pump 66 . The compressed gas 67 is reduced to a predetermined pressure by the first pressure regulating valve 68 , passes through the second valve 70 , and flows into the inflow port 60 . The vacuum ejector 52 sucks the gas 69 from the suction port 64 while discharging the gas 71 from the discharge port 62 by feeding the compressed gas 67 into the inflow port 60 . Therefore, the gas 69 in the grip body 16 is sucked by the suction pipe 58A connected to the suction port 64 . The gas 69 passes through the muffler 63 together with the compressed gas 67 and is discharged to the outside from the discharge port 62 (reference numeral 71 in FIG. 3 ). The gas 69 in the grip body 16 is sucked until the suction port 64 and the inside of the grip body 16 have the same degree of vacuum.

The grip body 16 is maintained in a state in which the shape of the outer peripheral surface 26 of the palm portion 18 is maintained by the high-strength portion 36 . Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 ( FIG. 4 ). As the palm portion 18 deforms in the thickness direction, the inner surface 22 of the finger portion 20 is pulled toward the center of the palm portion 18 . Then, the fingers 20 are elastically deformed so as to fall down toward the palm 18 . As a result, the inner surface 22 of the finger 20 mainly contacts the surface of the workpiece W. As shown in FIG. As described above, the gripping device 12 can hold the workpiece W by decompressing the inside of the gripping body 16 so that the fingers 20 are closed relative to the palm 18 . The amount of deformation of the fingers 20 varies according to the degree of vacuum in the grip body 16 . That is, as the degree of vacuum in the grip body 16 increases (that is, the pressure decreases), the amount of deformation of the fingers 20 increases.

Next, when the second valve 70 is closed, the supply of the compressed gas 67 to the inflow port 60 is stopped. Then, the gas flows into the discharge port 62 from the outside by the suction pipe 58A and the negative pressure in the grip body 16 . The gas system flows along the path 65 in the direction of the arrow in FIG. 1 and flows into the grip body 16 , thereby reducing the degree of vacuum in the grip body 16 (ie, increasing the pressure). As the degree of vacuum in the grip body 16 decreases, the palm portion 18 is pushed out from the guide hole 38 . As the palm 18 is pushed out, the fingers 20 open. When the degree of opening of the fingers 20 is in a desired state, the first valve 56 is closed, and the inside of the grip body 16 is kept in a hermetic state. Since the degree of vacuum in the grip body 16 is kept constant, the degree of opening of the fingers 20 is maintained at a desired state.

As described above, by closing the suction pipe 58A by the first valve 56 and keeping the inside of the grip body 16 in a hermetic state, the opening degree of the fingers 20 can be maintained in a desired state. In this way, the robot arm system 10A can control the degree of opening of the fingers 20 with respect to the palm 18 only by opening and closing the first valve 56, so that the usability can be improved.

In the above embodiment, the first valve 56 is closed when the finger 20 is opened, but the present invention is not limited to this, and the first valve 56 may be closed when the finger 20 is closed.

(Variation 1-1)

A robot arm system 10B according to Modification 1-1 of the first embodiment will be described with reference to FIG. 5 . The robot arm system 10B includes a gripping device 12 and a control device 14B. The control device 14B includes a plurality (three) of vacuum ejectors 52 , an inflow pipe 54B, and a plurality (three) of suction pipes 58A.

The inflow pipe 54B has the main inflow pipe 72 , the distribution pipe 74 , and a plurality of (three) sub-inflow pipes 76 . One end of the main inlet pipe 72 is connected to the pump 66 , and the other end is connected to one end of the distribution pipe 74 . The main inflow pipe 72 is provided with a first pressure regulating valve 68 at one end, and a second valve 70 is provided between the first pressure regulating valve 68 and the other end.

The distribution pipe 74 has one pipe at one end and a plurality of (three) pipes at the other end. One end of the distribution pipe 74 is connected to the other end of the main inflow pipe 72 , and the other ends of the distribution pipe 74 are connected to one end of the plurality of sub inflow pipes 76 , respectively. The plurality of sub inflow pipes 76 include a first sub inflow pipe 76A, a second sub inflow pipe 76B, and a third sub inflow pipe 76C. The other ends of the plurality of auxiliary inflow pipes 76 are connected to and from the inflow ports 60 of the plurality of vacuum ejectors 52 , respectively. The plurality of sub-inflow pipes 76 are provided with sub-valves 78 on one end side, respectively, and a sub-pressure regulating valve 80 is provided between the sub-valve 78 and the other end. The auxiliary pressure regulating valves 80 provided in the plurality of auxiliary inflow pipes 76 are respectively set to different pressures. For example, the pressure of the first sub-pressure regulating valve 80A provided in the first sub-inflow pipe 76A may be set to "low", and the pressure of the second sub-pressure regulating valve 80B provided in the second sub-inflow pipe 76B may be set to "low" "Medium", and the pressure of the third auxiliary pressure regulating valve 80C provided in the third auxiliary inflow pipe 76C is set to "high".

The suction ports 64 of the plurality of vacuum ejectors 52 are connected to one ends of the plurality of suction pipes 58A, respectively. The other ends of the plurality of suction pipes 58A are connected to one end of the collection pipe 82 . Each of the plurality of suction pipes 58A is provided with the first valve 56 . The one first valve 56 that faces the one sub-valve 78 and sandwiches the vacuum ejector 52 is referred to as "the first valve 56 of the group" with respect to the aforementioned sub-valve 78 . The collective pipe 82 has a plurality of (three) pipes at one end and one pipe at the other end. The other end of the collecting pipe 82 is connected to the air supply and exhaust port 34 .

The sub-valve 78 provided in the first sub-inflow pipe 76A and the first valve 56 of the group are opened, and the sub-valve 78 and the first valve 56 of the group in the second sub-inflow pipe 76B and the third sub-inflow pipe 76C are closed. In this state, when the pump 66 is activated, the compressed gas is supplied only to the first sub-inflow piping 76A. The compressed gas system is lowered to a predetermined pressure (“low”) by the first sub-pressure regulating valve 80A, and flows into the inflow port 60 . The vacuum ejector 52 passes through the suction pipe 58A and the collecting pipe 82 at a low negative pressure according to the pressure of the compressed gas, and sucks the gas from the grip body 16 . Therefore, since the degree of vacuum in the grip body 16 is lowered, the amount of deformation of the fingers 20 is small.

The sub-valve 78 provided in the second sub-inflow pipe 76B and the first valve 56 of the group are opened, and the sub-valve 78 of the first sub-inflow pipe 76A and the third sub-inflow pipe 76C and the first valve 56 of the group are closed. In this state, when the pump 66 is activated, the compressed gas is supplied only to the second sub-inflow piping 76B. The compressed gas system is reduced to a predetermined pressure (“middle”) by the second sub-pressure regulating valve 80B, and flows into the inflow port 60 . The vacuum ejector 52 passes through the suction pipe 58A and the collecting pipe 82 at a moderate negative pressure according to the pressure of the compressed gas, and sucks the gas from the grip body 16 . Therefore, since the degree of vacuum in the grip body 16 is moderate, the amount of deformation of the fingers 20 is moderate.

The sub valve 78 provided in the third sub inflow pipe 76C and the first valve 56 of the group are opened, and the sub valve 78 of the first sub inflow pipe 76A and the second sub inflow pipe 76B and the first valve 56 of the group are closed. In this state, when the pump 66 is activated, the compressed gas is supplied only to the third sub-inflow piping 76C. The compressed gas system is lowered to a predetermined pressure (“high”) by the third sub-pressure regulating valve 80C, and flows into the inflow port 60 . The vacuum ejector 52 passes through the suction pipe 58A and the collecting pipe 82 at a high negative pressure according to the pressure of the compressed gas, and sucks the gas from the grip body 16 . Therefore, since the degree of vacuum in the grip body 16 is high, the deformation amount of the fingers 20 is large.

As described above, in the case of the present modification 1-1, the degree of vacuum in the grip body 16 can be individually managed by selecting the sub-valve 78 to be opened and closed and the first valve 56 of the group, so that the finger can be easily controlled. The degree of opening of the portion 20 relative to the palm portion 18 . Since the robot arm system 10B includes the first valve 56, the same effects as those of the first embodiment described above can be obtained.

(Variation 1-2)

A robot arm system 10C according to Modification 1-2 of the first embodiment will be described with reference to FIG. 6 . The robot arm system 10C includes a gripping device 12 and a control device 14C.

The control apparatus 14C has the vacuum ejector 52, the inflow piping 54C, and the suction piping 58B. The inflow piping 54C has the distribution pipe 74 and a plurality of (three) sub inflow pipes 84 . One end of the distribution pipe 74 is connected to the pump 66 , and the other end is connected to one end of the plurality of auxiliary inflow pipes 84 , respectively.

The plurality of sub inflow pipes 84 include a first sub inflow pipe 84A, a second sub inflow pipe 84B, and a third sub inflow pipe 84C. The plurality of auxiliary inflow pipes 84 are provided with the second valve 70 on one end side, the auxiliary pressure regulating valve 80 on the other end side of the second valve 70 , and the auxiliary pressure regulating valve 80 and the other end. valve 78. The auxiliary pressure regulating valves 80 provided in the plurality of auxiliary inflow pipes 84 are respectively set to different pressures. For example, the pressure of the first secondary pressure regulating valve 80A provided in the first secondary inflow piping 84A may be set to “low”, and the pressure of the second secondary pressure regulating valve 80B provided in the second secondary inflow piping 84B may be set to “low” "Medium", the pressure of the third auxiliary pressure regulating valve 80C provided in the third auxiliary inflow pipe 84C is set to "high".

The other ends of the plurality of sub-inflow pipes 84 are connected to one end of the collecting pipe 82 . The other end of the manifold 82 is connected to the inflow port 60 of one vacuum ejector 52 . One end of the suction pipe 58B is connected to the suction port 64 of the vacuum ejector 52 . The other end of the suction pipe 58B is connected to the air supply and exhaust port 34 . In FIG. 6, although the suction piping 58B does not include the first valve 56, the first valve 56 may be included.

By opening the second valve 70 and the sub-valve 78 provided in any one of the first sub-inflow pipe 84A, the second sub-inflow pipe 84B, and the third sub-inflow pipe 84C, as in Modification 1-1, since The degree of vacuum within the grip body 16 can be individually managed, so the degree of opening of the fingers 20 relative to the palm 18 can be easily controlled. If the robot arm system 10C includes the first valve 56, the same effects as those of the first embodiment described above can be obtained.

(Variation 1-3)

The robot arm system 10D according to Modifications 1 to 3 of the first embodiment will be described with reference to FIG. 7 . The robot arm system 10D includes a gripping device 12 and a control device 14D. The control device 14D includes a plurality (three) of vacuum ejectors 52 , an inflow pipe 54D, and a plurality (three) of suction pipes 58A.

The inflow piping 54D includes the main inflow piping 86 , the distribution pipe 74 , and a plurality of (three) sub inflow pipings 88 . One end of the main inlet pipe 86 is connected to the pump 66 and the other end is connected to one end of the distribution pipe 74 , and the first pressure regulating valve 68 is provided. The first pressure regulating valve 68 is set so that the plurality of vacuum ejectors 52 to be described later can reach the maximum attained vacuum degree at the same time.

One end of the distribution pipe 74 is connected to the other end of the main inflow pipe 86 , and the other end of the distribution pipe 74 is connected to one end of the plurality of auxiliary inflow pipes 88 , respectively. The plurality of sub inflow pipes 88 include a first sub inflow pipe 88A, a second sub inflow pipe 88B, and a third sub inflow pipe 88C. The other ends of the plurality of auxiliary inflow pipes 88 are connected to and from the inflow ports 60 of the plurality of vacuum ejectors 52 , respectively. The plurality of sub-inflow pipes 88 are each provided with the second valve 70 .

One ends of the plurality of suction pipes 58A are respectively connected to the suction ports 64 of the plurality of vacuum ejectors 52 . The other ends of the plurality of suction pipes 58A are connected to different supply and exhaust ports 34, respectively. The first valve 56 is provided in each of the plurality of suction pipes 58A. The one first valve 56 provided facing the one second valve 70 with the vacuum ejector 52 sandwiched therebetween is referred to as "the first valve 56 of the group" with respect to the aforementioned second valve 70 .

The second valve 70 provided in the first sub-inflow pipe 88A and the first valve 56 of the group are opened, and the second valve 70 of the second sub-inflow pipe 88B and the third sub-inflow pipe 88C and the first valve 56 of the group are opened. When the pump 66 is activated in the OFF state, the compressed gas is supplied only to the first sub-inflow piping 88A. The gas is sucked from the grip body 16 through the suction pipe 58A according to the degree of vacuum that can be exerted by one vacuum ejector 52 provided in the first sub-inflow pipe 88A. Therefore, since the vacuum produced by one vacuum ejector 52 is low (ie, the pressure is high), the amount of deformation of the fingers 20 is small.

The second valve 70 provided in the first sub-inflow pipe 88A and the first valve 56 of the group are opened, the second valve 70 provided in the second sub-inflow pipe 88B and the first valve 56 of the group are opened, and at the third When the pump 66 is activated with the second valve 70 of the valve sub inflow pipe 88C and the first valve 56 of the group closed, the compressed gas is supplied to the first sub inflow pipe 88A and the second sub inflow pipe 88B. The gas is sucked from the grip body 16 through the suction pipe 58A according to the degree of vacuum that can be exerted by the two vacuum ejectors 52 respectively provided in the first sub-inflow pipe 88A and the second sub-inflow pipe 88B. Therefore, since the degree of vacuum generated by the two vacuum ejectors 52 is moderate, the amount of deformation of the fingers 20 is moderate.

When the pump 66 is activated with all the second valves 70 and the first valves 56 of the group open, the compressed gas is supplied to all the sub-inflow pipes 88 . The gas is sucked from the grip body 16 through the suction pipe 58A in accordance with the degree of vacuum that can be exerted by the three vacuum ejectors 52 . Therefore, since the degree of vacuum generated by the three vacuum ejectors 52 is high (ie, the pressure is low), the amount of deformation of the fingers 20 is large.

As described above, in the case of the present modification 1-3, the degree of vacuum in the grip body 16 can be individually managed by selecting the second valve 70 to be opened and closed and the first valve 56 of the group, so that the control can be easily performed. The degree of opening of the fingers 20 relative to the palm 18 . Since the robot arm system 10D includes the first valve 56, the same effects as those of the first embodiment described above can be obtained. In addition, the three vacuum ejectors 52 may all be the same, or may have different performances.

(Variation 1-4)

The robot arm system 10E related to Modifications 1 to 4 of the first embodiment will be described with reference to FIG. 8 . The robot arm system 10E includes a gripping device 12 and a control device 14E.

The control device 14E includes the vacuum ejector 52, the inflow piping 54A, and the suction piping 58C. One end of the suction pipe 58C is connected to the suction port 64 , and the other end is connected to the air supply and exhaust port 34 . The discharge port 62 of the vacuum ejector 52 is connected to one end of the discharge pipe 92 . A path 93 connecting the outside with the inside of the grip body 16 is formed by the discharge pipe 92 , the discharge port 62 , the vacuum ejector 52 , the suction port 64 , and the suction pipe 58C. In Modification 1-4, the first valve 56 is provided in the discharge piping 92 in the path 93 .

The first valve 56 and the second valve 70 are normally open. The gas in the grip body 16 is sucked through the suction pipe 58C connected to the suction port 64 by sending the compressed gas from the activated pump 66 to the inflow port 60 . The compressed gas system is discharged to the outside through the first valve 56 from the discharge port 62 together with the sucked gas. Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 , and the finger portion 20 is elastically deformed so as to fall toward the palm portion 18 .

Next, when the second valve 70 is closed, the gas supply to the inflow port 60 is stopped. Then, the gas flows into the discharge port 62 from the outside by the suction pipe 58C and the negative pressure in the grip body 16 . The gas system flows through the path 93 in the direction of the arrow in FIG. 8 , and flows into the grip body 16 , thereby reducing the degree of vacuum in the grip body 16 . In the gripping device 12 , the palm portion 18 is pushed out from the guide hole 38 as the degree of vacuum in the gripping body 16 decreases. As the palm 18 is pushed out, the fingers 20 open. When the degree of opening of the fingers 20 is in a desired state, the first valve 56 is closed, and the inside of the grip body 16 is kept in a hermetic state. Since the degree of vacuum in the grip body 16 is kept constant, the degree of opening of the fingers 20 is maintained in a desired state.

As described above, the first valve 56 and the second valve 70 maintain the inside of the grip body 16 in a sealed state, so that the degree of opening of the fingers 20 can be maintained in a desired state. In this way, the robot arm system 10E can also control the degree of opening of the fingers 20 with respect to the palm 18 by providing the first valve 56 in the discharge piping 92 .

In Modifications 1-4, the first valve 56 is closed when the finger 20 is opened, but the present invention is not limited to this, and the first valve 56 may be closed when the finger 20 is closed.

2. Second Embodiment

A robot arm system 10F according to the second embodiment of the present invention will be described with reference to FIG. 9 . The robot arm system 10F shown in FIG. 9 includes a gripping device 12 and a control device 14F. The control device 14F includes the vacuum ejector 52, the inflow piping 54A, the suction piping 58B, and the positive pressure piping 94A.

The positive pressure piping 94A has the distribution pipe 74 and a plurality of sub positive pressure piping 96 . One end of the distribution pipe 74 is connected to the supply and exhaust port 34 different from the supply and exhaust port 34 connected to the suction pipe 58B, and the other end of the distribution pipe 74 is connected to one end of the plurality of sub positive pressure pipes 96, respectively. The plurality of sub positive pressure pipes 96 include a first sub positive pressure pipe 96A, a second sub positive pressure pipe 96B, and a third sub positive pressure pipe 96C. The other ends of the plurality of sub positive pressure pipes 96 are respectively opened to the atmosphere as a positive pressure source. The plurality of auxiliary positive pressure pipes 96 are each provided with a third valve 98 on one end side, and a speed controller 100 is provided between the third valve 98 and the other end. The third valve 98 is a valve that opens and closes the plurality of sub positive pressure pipes 96, and for example, a solenoid valve can be used.

The set flow rates of the speed controllers 100 are different from each other. For example, the flow rate of the speed controller 100 installed in the first auxiliary positive pressure pipe 96A may be set to "large", the flow rate of the speed controller 100 installed in the second auxiliary positive pressure pipe 96B may be set to "medium", and the The flow rate of the speed controller 100 installed in the third sub positive pressure piping 96C is set to "small".

The second valve 70 is normally open. All third valves 98 are normally closed. The compressed gas is fed into the inflow port 60 from the activated pump 66 , and the gas in the grip body 16 is sucked through the suction pipe 58B connected to the suction port 64 . Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 , and the finger portion 20 is elastically deformed so as to fall toward the palm portion 18 .

Next, when any one of the third valves 98 is opened, a predetermined flow of gas flows from the speed controller 100 through the third valve 98 into the positive pressure piping 94A. The gas system that has flowed into the positive pressure piping 94A flows into the grip body 16 through the supply and exhaust port 34 . The degree of vacuum in the grip body 16 can be controlled by the balance between the gas sucked through the suction pipe 58B and the gas flowing in through the positive pressure pipe 94A.

When only the third valve 98 provided in the first auxiliary positive pressure pipe 96A is opened, the flow rate of the gas flowing in through the positive pressure pipe 94A is large, so that the degree of vacuum in the grip body 16 becomes low. Therefore, the deformation amount of the fingers 20 is small.

When only the third valve 98 provided in the second sub positive pressure piping 96B is opened, the flow rate of the gas flowing in through the positive pressure piping 94A is moderate, so the deformation amount of the fingers 20 is moderate.

When only the third valve 98 provided in the third sub positive pressure piping 96C is opened, the flow rate of the gas flowing in through the positive pressure piping 94A is small, so that the degree of vacuum in the grip body 16 becomes high. Therefore, the deformation amount of the fingers 20 is large.

As described above, in the case of the second embodiment, since the degree of vacuum in the grip body 16 can be individually managed by selecting the third valve 98 to be opened and closed, the degree of vacuum in the grip body 16 can be easily controlled. degree of openness. If the robot arm system 10F includes the first valve 56, the same effects as those of the first embodiment described above can be obtained.

(Variation 2-1)

A robot arm system 10G according to Modification 2-1 of the second embodiment will be described with reference to FIG. 10 . The robot arm system 10G shown in FIG. 10 includes a gripping device 12 and a control device 14G.

The control device 14G includes the vacuum ejector 52 , the inflow piping 54E, the suction piping 58B, and the positive pressure piping 94B. One end of the inflow pipe 54E is connected to the pump 66 and the other end is connected to the inflow port 60 . The first pressure regulating valve 68 is provided in the inflow piping 54E.

One end of the positive pressure piping 94B is connected to the primary side of the first pressure regulating valve 68 of the inflow piping 54E, and is connected to the pump 66 which is also a positive pressure source. The other end of the positive pressure piping 94B is connected to the air supply and exhaust port 34 different from the air supply and exhaust port 34 connected to the suctioned piping 58B. The positive pressure piping 94B is provided with the second pressure regulating valve 102 on one end side, and the third valve 98 is provided on the secondary side of the second pressure regulating valve 102 . The second pressure regulating valve 102 reduces the pressure of the high pressure gas supplied from the pump 66 to a predetermined pressure. One end of the atmosphere release piping 106 is connected between the second pressure regulating valve 102 and the third valve 98 of the positive pressure piping 94B. The atmosphere release piping 106 is provided with a release valve 104, and the other end is open to the atmosphere. The relief valve 104 opens the valve to allow gas to flow from the secondary side to the primary side when the pressure on the secondary side is higher than the pressure on the primary side by a predetermined amount or more.

The third valve 98 is normally closed. The gas in the grip body 16 is sucked through the suction pipe 58B connected to the suction port 64 by sending the compressed gas into the inflow port 60 from the activated pump 66 . Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 , and the finger portion 20 is elastically deformed so as to fall toward the palm portion 18 .

The compressed gas is also supplied to one end of the positive pressure piping 94B, is reduced to a predetermined pressure by the second pressure regulating valve 102 , and is supplied to the primary side of the third valve 98 . When the third valve 98 is opened, the compressed gas whose pressure is adjusted by the second pressure regulating valve 102 flows into the grip body 16 through the positive pressure piping 94B. The pressure system in the grip body 16 can be controlled by the balance between the gas sucked through the suction pipe 58B and the gas flowing in through the positive pressure pipe 94A.

When more gas flows in through the positive pressure pipe 94B than is sucked through the suction pipe 58B and the pressure in the grip body 16 becomes higher than a certain level, the release valve 104 is opened, and the atmosphere release pipe 106 is The gas in the grip body 16 is released to the outside.

If the robot arm system 10G includes the first valve 56, the same effects as those of the first embodiment described above can be obtained.

(Variation 2-2)

A robot arm system 10H according to Modification 2-2 of the second embodiment will be described with reference to FIG. 11 . The robot arm system 10H shown in FIG. 11 includes a gripping device 12 and a control device 14H. The control device 14H includes the vacuum ejector 52 , the inflow piping 54A, the suction piping 58A, and the positive pressure piping 109 .

One end of the positive pressure piping 109 is connected to the air supply and exhaust port 34 different from the air supply and exhaust port 34 connected to the suctioned piping 58A. The other end of the positive pressure pipe 109 is connected to the front end of the syringe 110 as a positive pressure source. The third valve 98 is provided in the positive pressure piping 109 .

The syringe 110 is provided with a syringe 112 and a plunger 114 that is axially movable within the syringe 112 . Plunger 114 is coupled to cylinder 116 . The cylinder 116 has a cylinder tube 118 and a piston rod 120 , and the piston rod 120 is provided so as to be able to move forward and backward relative to the cylinder tube 118 . The pipes 122 and 124 are provided in the cylinder pipe 118 . By supplying and discharging compressed gas through the aforementioned pipes 122 and 124 , the piston rod 120 can move forward and backward with respect to the cylinder pipe 118 . The plunger 114 is connected to the front end of the piston rod 120 .

The first valve 56 and the second valve 70 are normally open. The third valve 98 is normally closed. By feeding compressed gas into the inflow port 60 from the activated pump 66 , the gas in the grip body 16 is sucked through the suction pipe 58A connected to the suction port 64 . Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 , and the finger portion 20 is elastically deformed so as to fall toward the palm portion 18 . The robotic arm system 10H closes the first valve 56 and keeps the fingers 20 in the elastically deformed state.

The pressure system in the grip body 16 after being sucked by the suction pipe 58A can be controlled by the gas flowing in or sucked out by the positive pressure pipe 109 . For example, by opening the third valve 98 and extending the cylinder 116, the gas in the syringe 112 is pushed out by the plunger 114. The gas system pushed out by the plunger 114 flows into the positive pressure piping 109 and flows into the grip body 16 through the third valve 98 . Then, the degree of vacuum in the grip body 16 is lowered only by the amount of the inflowing gas, and the fingers 20 are opened with respect to the palm 18 . Since the syringe 110 can push out a small amount of gas, the fingers 20 can be deformed with a small amount of deformation.

The cylinder 116 is retractable. By opening the third valve 98 and contracting the air cylinder 116 , the gas in the grip body 16 is sucked out by a syringe through the positive pressure piping 109 . Then, the vacuum degree in the grip body 16 is increased only by the amount of the sucked gas, and the fingers 20 are elastically deformed so as to fall toward the palm 18 . Since the syringe 110 can suck out a small amount of gas, the finger 20 can be deformed with a small amount of deformation.

As described above, by controlling the syringe 110 with the air cylinder 116, the gas flowing in or sucked out through the positive pressure piping 109 can be finely adjusted, so that the degree of opening of the fingers 20 can be precisely controlled. Since the robot arm system 10H includes the first valve 56, the same effects as those of the first embodiment described above can be obtained.

3. Third Embodiment A robot arm system 10I according to a third embodiment of the present invention will be described with reference to FIG. 12 . The robot arm system 10I shown in FIG. 12 includes a gripping device 12 and a control device 14I. The control device 14I includes the vacuum ejector 52, the inflow piping 54A, the suction piping 58D, and the positive pressure piping 94C.

The vacuum ejector 52 has an inflow port 60 , a discharge port 62 , and a suction port 64 . The inflow piping 54A has the first pressure regulating valve 68 and the second valve 70 .

One end of the suction pipe 58D is connected to the suction port 64 of the vacuum ejector 52 . The other end of the suction pipe 58D is connected to one of the plurality of supply and exhaust ports 34 . In this example, two supply and exhaust ports 34 are provided on the peripheral surface of the attaching and detaching portion 30 , and among the two supply and exhaust ports 34 here, a suction pipe 58D is connected to one supply and exhaust port shown in FIG. 12 . mouth 34. In Fig. 12, the other air supply and exhaust port 34 to which the suction piping 58D is not connected is hidden on the back side of the drawing.

The suction piping 58D has the check valve 130 , the first sensor 131 , the second sensor 132 , and the third sensor 133 .

The check valve 130 is configured to allow the gas to flow from the suction pipe 58D to the suction port 64 of the vacuum ejector 52 and to prevent the gas from flowing from the suction port 64 of the vacuum ejector 52 to the suction pipe 58D.

The first sensor 131, the second sensor 132, and the third sensor 133 are pressure sensors that detect the pressure in the suction pipe 58D. The first sensor 131 , the second sensor 132 , and the third sensor 133 are disposed between the check valve 130 and the holding device 12 . In FIG. 12, the first sensor 131, the second sensor 132, and the third sensor 133 are arranged in this order from the check valve 130 toward the holding device 12, but the first sensor 131, the The arrangement order of the second sensor 132 and the third sensor 133 is not limited to this. The first sensor 131 , the second sensor 132 , and the third sensor 133 are connected to a power source (not shown) and actuated by supplying power from the power source.

The first sensor 131 detects the pressure in the suction pipe 58D, and outputs a first detection signal when the detected pressure is equal to or less than a first threshold value. Although the first threshold value can be appropriately changed, in this example, the gauge pressure is -0.02MPa.

The second sensor 132 detects the pressure in the suction pipe 58D, and outputs a second detection signal when the detected pressure is equal to or less than a second threshold value lower than the first threshold value. Although the second threshold value can be appropriately changed, in this example, the gauge pressure is -0.04MPa.

The third sensor 133 detects the pressure in the suction pipe 58D, and outputs a third detection signal when the detected pressure is equal to or less than a third threshold value lower than the second threshold value. Although the third threshold value can be appropriately changed, in this example, the gauge pressure is -0.06MPa.

One end of the positive pressure piping 94C is connected to an air supply and exhaust port 34 that is different from the air supply and exhaust port 34 connected to the suctioned piping 58D. The other end of the positive pressure piping 94C is open to the atmosphere as a positive pressure source. The positive pressure piping 94C has the third valve 98 . The third valve 98 is a valve that opens and closes the positive pressure piping 94C, and for example, a solenoid valve can be used.

Actions and effects of the robot arm system 10I will be described. In the robot arm system 10I, the control device 14I controls to close the second valve 70 when the pressure in the suction pipe 58D becomes a desired pressure (hereinafter referred to as a test pressure). The test pressure is selected from a first threshold (-0.02 MPa), a second threshold (-0.04 MPa), and a third threshold (-0.06 MPa). For example, the pressure inside the grip body 16 when the inner surface 22 of the finger 20 contacts the surface of the workpiece W is measured in advance, and the test pressure can be selected based on the measured value. In this example, when the pressure in the grip body 16 is slightly lower than the second threshold value and the inner surface 22 of the finger 20 contacts the surface of the workpiece W, the second threshold value (-0.04MPa) is set as the test pressure. The compressed gas system supplied from the pump 66 to the inflow port 60 of the vacuum ejector 52 adjusts the first pressure regulating valve 68 so that the pressure in the suction pipe 58D is set to a predetermined positive value such that the pressure in the suction pipe 58D reaches the third threshold value (-0.06 MPa). pressure above the pressure value.

The second valve 70 is normally open. The third valve 98 is normally closed. The first pressure regulating valve 68 is supplied with compressed gas from the activated pump 66 . The compressed gas system is adjusted to a pressure equal to or higher than a predetermined positive pressure value by the first pressure regulating valve 68 , and flows into the inflow port 60 of the vacuum ejector 52 through the second valve 70 . The vacuum ejector 52 sucks the gas in the suction pipe 58D from the suction port 64 while discharging the gas from the discharge port 62 to the outside by feeding the compressed gas into the inflow port 60 . The gas system sucked into the suction port 64 at this time is the gas in a part of the pipe between the suction port 64 and the check valve 130 in the suction pipe 58D.

The check valve 130 is opened when the gas in the above-mentioned part of the piping is sucked into the suction port 64 . The check valve 130 is maintained in an open state when the compressed gas flows into the inflow port 60 and is discharged from the discharge port 62 . When the check valve 130 is opened, the gas in the grip body 16 is sucked through the suction pipe 58D. The gas system sucked from the inside of the grip body 16 is discharged to the outside from the discharge port 62 together with the compressed gas. As a result, the degree of vacuum in the grip body 16 increases (that is, the pressure decreases). Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 , and the finger portion 20 is elastically deformed so as to fall toward the palm portion 18 (refer to FIG. 4 ).

When the pressure in the suction pipe 58D is the first threshold value (-0.02 MPa), the first sensor 131 outputs a first detection signal. When the first sensor 131 outputs the first detection signal, the control device 14I determines that the pressure in the suction pipe 58D is lower than the test pressure, and maintains the open state of the second valve 70 . As the compressed gas continuously flows into the inflow port 60 , the gas in the suction pipe 58D and the gas in the grip body 16 are further sucked from the suction port 64 , and the degree of vacuum in the grip body 16 is further increased (that is, the pressure is further reduced). . As a result, the fingers 20 are elastically deformed so that the fingers 20 fall further toward the palm 18 .

When the pressure in the suction pipe 58D is the second threshold value (-0.04 MPa), the second sensor 132 outputs a second detection signal. When the second sensor 132 outputs the second detection signal, the control device 14I determines that the pressure in the suction pipe 58D has reached the test pressure, and performs control to close the second valve 70 . When the second valve 70 is closed and the inflow of the compressed gas to the inflow port 60 is stopped, the discharge of the gas from the suction pipe 58D to the discharge port 62 is stopped, and the check valve 130 is closed. The inside of the grip body 16 is hermetically sealed, and the pressure inside the grip body 16 is kept at the test pressure, that is, the second threshold value. Since the degree of vacuum in the grip body 16 is kept constant, the degree of opening of the fingers 20 is kept in a desired state. The holding device 12 can hold the workpiece W by the pressure in the suction pipe 58D being the second threshold value as the test pressure and the second valve 70 being closed. In this way, since the robotic arm system 10I can control the degree of opening of the fingers 20 relative to the palm 18 by controlling the timing of closing the second valve 70, usability can be improved.

When the third valve 98 is opened, the negative pressure in the main body 16 is held, and the external air passes through the third valve 98 and flows into the positive pressure piping 94C. The gas system that has flowed into the positive pressure piping 94C flows into the grip body 16 through the supply and exhaust port 34 , thereby reducing the degree of vacuum in the grip body 16 (ie, increasing the pressure). As the degree of vacuum in the grip body 16 decreases, the palm portion 18 is pushed out from the guide hole 38 . As the palm 18 is pushed out, the fingers 20 open. As a result, the workpiece W can be released. In addition, the check valve 130 is opened by the gas flowing into the grip body 16 flowing into the other end of the suction pipe 58D.

(Variation 3-1)

A robot arm system 10J according to a modification 3-1 of the third embodiment will be described with reference to FIG. 13 . The robot arm system 10J includes a gripping device 12 and a control device 14J. The control apparatus 14J has the vacuum ejector 52, the inflow piping 54A, and the suction piping 58E.

The vacuum ejector 52 has an inflow port 60 , a discharge port 62 , and a suction port 64 . The inflow piping 54A has the first pressure regulating valve 68 and the second valve 70 .

The suction piping 58E has the first valve 56 , the first sensor 131 , the second sensor 132 , and the third sensor 133 .

The first valve 56 is a valve that opens and closes the suction pipe 58E, and for example, a solenoid valve can be used. When the first valve 56 is closed, the gripping device 12 side is blocked from the outside by the first valve 56, and the inside of the gripping body 16 is hermetically sealed.

The first sensor 131, the second sensor 132, and the third sensor 133 are pressure sensors that detect the pressure in the suction pipe 58E. In FIG. 13, although the first sensor 131, the second sensor 132, and the third sensor 133 are provided between the first valve 56 and the holding device 12, they may also be provided in the first valve 56 between the vacuum ejector 52 . In FIG. 13, although the first sensor 131, the second sensor 132, and the third sensor 133 are arranged in this order from the first valve 56 toward the gripping device 12, the first sensor 131, The arrangement order of the second sensor 132 and the third sensor 133 is not limited to this.

The first sensor 131 detects the pressure in the suction pipe 58E, and outputs a first detection signal when the detected pressure is equal to or less than the first threshold value. Although the first threshold value can be appropriately changed, in this example, the gauge pressure is -0.02MPa.

The second sensor 132 detects the pressure in the suction pipe 58E, and outputs a second detection signal when the detected pressure is equal to or less than a second threshold value lower than the first threshold value. Although the second threshold can be appropriately changed, in this example, the gauge pressure is -0.04MPa.

The third sensor 133 detects the pressure in the suction pipe 58E, and outputs a third detection signal when the detected pressure is equal to or less than a third threshold value lower than the second threshold value. Although the third threshold value can be appropriately changed, in this example, the gauge pressure is -0.06MPa.

Actions and effects of the robot arm system 10J will be described. In the robot arm system 10I, the control device 14J controls to close the first valve 56 when the pressure in the suction pipe 58E becomes a desired pressure (test pressure). The test pressure is selected from a first threshold (-0.02 MPa), a second threshold (-0.04 MPa), and a third threshold (-0.06 MPa). For example, the pressure inside the grip body 16 when the inner surface 22 of the finger 20 contacts the surface of the workpiece W is measured in advance, and the test pressure can be selected based on the measured value. In this example, when the pressure in the grip body 16 is slightly lower than the third threshold value and the inner surface 22 of the finger 20 is in contact with the surface of the workpiece W, the third threshold value (-0.06MPa) is set as the test pressure. The compressed gas system supplied from the pump 66 to the inflow port 60 of the vacuum ejector 52 adjusts the first pressure regulating valve 68 so that the pressure in the suction pipe 58E is set to a predetermined positive value such that it reaches the third threshold value (-0.06 MPa). pressure above the pressure value.

The first valve 56 and the second valve 70 are normally open. Compressed gas is supplied from the activated pump 66 to the first pressure regulating valve 68 . The compressed gas system is adjusted to a pressure equal to or higher than a predetermined positive pressure value by the first pressure regulating valve 68 , and flows into the inflow port 60 of the vacuum ejector 52 through the second valve 70 . The vacuum ejector 52 sucks the gas in the suction pipe 58D from the suction port 64 while discharging the gas from the discharge port 62 to the outside by feeding the compressed gas into the inflow port 60 . Therefore, the gas in the grip body 16 is sucked by the suction pipe 58E connected to the suction port 64 . The gas system sucked from the inside of the grip body 16 is discharged to the outside from the discharge port 62 together with the compressed gas. As a result, the degree of vacuum in the grip body 16 increases (that is, the pressure decreases). Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 , and the finger portion 20 is elastically deformed so as to fall toward the palm portion 18 (refer to FIG. 4 ).

When the pressure in the suction pipe 58E is the first threshold value (-0.02 MPa), the first sensor 131 outputs a first detection signal. When the first sensor 131 outputs the first detection signal, the control device 14J determines that the pressure in the suction pipe 58E is lower than the test pressure, and keeps the first valve 56 and the second valve 70 open. As the compressed gas continuously flows into the inflow port 60 , the gas in the suction pipe 58E and the gas in the grip body 16 are further sucked from the suction port 64 , and the degree of vacuum in the grip body 16 is further increased (that is, the pressure is further reduced). . As a result, the fingers 20 are elastically deformed so that the fingers 20 fall further toward the palm 18 .

When the pressure in the suction pipe 58E is the second threshold value (-0.04 MPa), the second sensor 132 outputs a second detection signal. When the second sensor 132 outputs the second detection signal, the control device 14J determines that the pressure in the suction pipe 58E is lower than the test pressure, and keeps the first valve 56 and the second valve 70 open. As the compressed gas continuously flows into the inflow port 60 , the gas in the suction pipe 58E and the gas in the grip body 16 are further sucked from the suction port 64 , and the degree of vacuum in the grip body 16 is further increased (that is, the pressure is further reduced). . As a result, the fingers 20 are elastically deformed so that the fingers 20 fall further toward the palm 18 .

When the pressure in the suction pipe 58E is the third threshold value (-0.06 MPa), the third sensor 133 outputs a third detection signal. When the third sensor 133 outputs the third detection signal, the control device 14J determines that the pressure in the suction pipe 58E has reached the test pressure, and performs control to close the first valve 56 . When the first valve 56 is closed, the discharge of the gas from the suction pipe 58E to the discharge port 62 is stopped. The inside of the grip body 16 is hermetically sealed, and the pressure inside the grip body 16 is kept at the test pressure, that is, the third threshold value. Since the degree of vacuum in the grip body 16 is kept constant, the degree of opening of the fingers 20 is kept in a desired state. In this example, when the pressure in the grip body 16 is slightly lower than the third threshold value, the inner surface 22 of the finger portion 20 contacts the surface of the workpiece W. As shown in FIG. Therefore, the gripping device 12 can grip the workpiece W when the pressure in the suction pipe 58E becomes the third threshold value as the test pressure and the first valve 56 is closed. In this way, usability can be improved because the robotic arm system 10J can control the degree of opening of the fingers 20 relative to the palm 18 by controlling the time at which the first valve 56 is closed.

When the first valve 56 is opened, the gas flows into the discharge port 62 from the outside by the suction pipe 58E and the negative pressure in the grip body 16 . The gas system that has flowed into the discharge port 62 flows into the grip body 16 through the suction pipe 58E, thereby reducing the degree of vacuum in the grip body 16 (ie, increasing the pressure). As the degree of vacuum in the grip body 16 decreases, the palm portion 18 is pushed out from the guide hole 38 . As the palm 18 is pushed out, the fingers 20 open. As a result, the workpiece W can be released.

In addition, the control device 14J may close the second valve 70 in addition to the first valve 56 when the first valve 56 is closed. The control device 14J may open and close the first valve 56 after closing the first valve 56 and the second valve 70 to adjust the degree of vacuum in the grip body 16 .

The control device 14J may further include a positive pressure piping 94C. In addition, the control device 14J may include the inflow piping 54E instead of the inflow piping 54A. That is, the inflow piping 54A need not have the second valve 70 .

(Variation 3-2)

A robot arm system 10K according to a modification 3-2 of the third embodiment will be described with reference to FIG. 14 . The robot arm system 10K includes a gripping device 12 and a control device 14K. The control device 14K includes the vacuum ejector 52 , the inflow piping 54A, the suction piping 58D, the positive pressure piping 94D, and the collecting piping 134 .

The vacuum ejector 52 has an inflow port 60 , a discharge port 62 , and a suction port 64 . The inflow piping 54A has the first pressure regulating valve 68 and the second valve 70 .

One end of the suction pipe 58D is connected to the suction port 64 of the vacuum ejector 52 . The other end of the suction pipe 58D is connected to the collection pipe 134 . The suction piping 58D has the check valve 130 , the first sensor 131 , the second sensor 132 , and the third sensor 133 .

One end of the positive pressure piping 94D is connected to the secondary side of the first pressure regulating valve 68 of the inflow piping 54A. The other end of the positive pressure piping 94D is connected to the collecting piping 134 . The positive pressure piping 94D has the third valve 98 and the flow throttle valve 135 . The third valve 98 is a valve that opens and closes the positive pressure piping 94D, and for example, a solenoid valve can be used. The flow throttle valve 135 is provided between the third valve 98 and the other end of the positive pressure pipe 94D. The flow throttle valve 135 controls the flow rate of the gas flowing through the positive pressure piping 94D. Although the flow throttle valve 135 can be omitted, in the modification 3-2 having the flow throttle valve 135, since the flow rate of the gas flowing into the grip body 16 is adjusted by the flow throttle valve 135, safety can be improved.

The collection piping 134 connects the suction piping 58D and the positive pressure piping 94D to the gripping device 12 serving as an actuator. The collection pipe 134 has two pipes at one end and one pipe at the other end. A piping system constituting one end of the collection piping 134 is connected to the other end of the suction piping 58D. The other end of the positive pressure piping 94D is connected to the piping system constituting the other end of the collection piping 134 . The other end of the collecting pipe 134 is connected to the air supply and exhaust port 34 . The manifold 134 has a release valve 136 . The release valve 136 is configured to release the gas in the collection pipe 134 to the atmosphere when the pressure in the collection pipe 134 is equal to or higher than a specific pressure. Although the release valve 136 may be omitted, in the modification 3-2 having the release valve 136, the release valve 136 can reliably prevent the pressure in the manifold 134 and the pressure in the grip body 16 from becoming more than a specific pressure. So security can be improved.

Actions and effects of the robot arm system 10K will be described. In the robot arm system 10K, the control device 14K controls to close the second valve 70 when the pressure in the suction pipe 58D becomes a desired pressure (test pressure). The test pressure is selected from a first threshold (-0.02 MPa), a second threshold (-0.04 MPa), and a third threshold (-0.06 MPa). For example, the pressure inside the grip body 16 when the inner surface 22 of the finger 20 contacts the surface of the workpiece W is measured in advance, and the test pressure can be selected based on the measured value. In this example, when the pressure in the grip body 16 is slightly lower than the first threshold value and the inner surface 22 of the finger 20 is in contact with the surface of the workpiece W, the first threshold value (-0.02MPa) is set as the test pressure. The compressed gas system supplied from the pump 66 to the inflow port 60 of the vacuum ejector 52 adjusts the first pressure regulating valve 68 so that the pressure in the suction pipe 58D is set to a predetermined positive value such that the pressure in the suction pipe 58D reaches the third threshold value (-0.06 MPa). pressure above

The second valve 70 is normally open. The third valve 98 is normally closed. Compressed gas is supplied from the activated pump 66 to the first pressure regulating valve 68. The compressed gas system is adjusted to a pressure equal to or higher than a predetermined positive pressure value by the first pressure regulating valve 68 , and flows into the inflow port 60 of the vacuum ejector 52 through the second valve 70 . The vacuum ejector 52 sucks the gas in the suction pipe 58D from the suction port 64 while discharging the gas from the discharge port 62 to the outside by feeding the compressed gas into the inflow port 60 . The gas system sucked into the suction port 64 at this time is the gas in a part of the pipe between the suction port 64 and the check valve 130 in the suction pipe 58D.

The check valve 130 is opened when the gas in the above-mentioned part of the piping is sucked into the suction port 64 . The check valve 130 is maintained in an open state when the compressed gas flows into the inflow port 60 and is discharged from the discharge port 62 . When the check valve 130 is opened, the gas in the holding body 16 is sucked through the suction pipe 58D and the collecting pipe 134 . The gas system sucked from the inside of the grip body 16 is discharged to the outside from the discharge port 62 together with the compressed gas. As a result, the degree of vacuum in the grip body 16 increases (that is, the pressure decreases). Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 , and the finger portion 20 is elastically deformed so as to fall toward the palm portion 18 (refer to FIG. 4 ).

When the pressure in the suction pipe 58D is the first threshold value (-0.02 MPa), the first sensor 131 outputs a first detection signal. When the first sensor 131 outputs the first detection signal, the control device 14K determines that the pressure in the suction pipe 58D has reached the test pressure, and performs control to close the second valve 70 . When the second valve 70 is closed and the inflow of the compressed gas to the inflow port 60 is stopped, the discharge of the gas from the suction pipe 58D to the discharge port 62 is stopped, and the check valve 130 is closed. The inside of the grip body 16 is hermetically sealed, and the pressure inside the grip body 16 is kept at the test pressure, that is, the first threshold value. Since the degree of vacuum in the grip body 16 is kept constant, the degree of opening of the fingers 20 is maintained in a desired state. In this example, when the pressure in the grip body 16 is slightly lower than the first threshold value, the inner surface 22 of the finger portion 20 contacts the surface of the workpiece W. As shown in FIG. Therefore, the holding device 12 can hold the workpiece W by the pressure in the suction pipe 58D being the first threshold value as the test pressure and the second valve 70 being closed. In this way, since the robotic arm system 10K can control the degree of opening of the fingers 20 relative to the palm 18 by controlling the timing of closing the second valve 70, usability can be improved.

When the third valve 98 is opened with the second valve 70 closed, the compressed gas flows from the pump 66 serving as the positive pressure source through the first pressure regulating valve 68 into the positive pressure piping 94D. The compressed gas system flowing into the positive pressure piping 94D is controlled to a predetermined flow rate by the flow throttle valve 135 , and then flows into the collecting piping 134 . The compressed gas system that has flowed into the collecting pipe 134 flows into the grip body 16 through the supply and exhaust port 34 , thereby reducing the degree of vacuum in the grip body 16 (ie, increasing the pressure). As the degree of vacuum in the grip body 16 decreases, the palm portion 18 is pushed out from the guide hole 38 . As the palm 18 is pushed out, the fingers 20 open. As a result, the workpiece W can be released. Further, the check valve 130 is opened by the compressed gas flowing into the collecting pipe 134 flowing into the other end of the suction pipe 58D.

In addition, the control device 14K system may include the suction pipe 58E instead of the suction pipe 58D. That is, the first valve 56 may be used in place of the check valve 130 . When the control device 14K includes the suction pipe 58E, the first valve 56 is closed when the inside of the suction pipe 58E is at the test pressure. The control device 14K opens the first valve 56 in addition to the third valve 98 when the third valve 98 is opened.

The positive pressure piping 94D may further include the second pressure regulating valve 102 . The second pressure regulating valve 102 is provided between one end of the positive pressure piping 94D and the third valve 98 . The second pressure regulating valve 102 reduces the pressure of the high pressure gas supplied from the pump 66 to a predetermined pressure.

(Variation 3-3)

A robot arm system 10L according to a modification 3-3 of the third embodiment will be described with reference to FIG. 15 . The robot arm system 10L includes a gripping device 12 and a control device 14L. The control device 14L includes the vacuum ejector 52 , the inflow piping 54A, the suction piping 58F, and the positive pressure piping 94C.

The vacuum ejector 52 has an inflow port 60 , a discharge port 62 , and a suction port 64 . The inflow piping 54A has the first pressure regulating valve 68 and the second valve 70 . The positive pressure piping 94C has the third valve 98 .

The suction piping 58F has a check valve 130 , a first sensor 131 , a second sensor 132 , a third sensor 133 , a power source 137 , and a selection switch 138 .

The check valve 130 is configured to allow the gas to flow from the suction pipe 58F to the suction port 64 of the vacuum ejector 52 and to prevent the gas from flowing from the suction port 64 of the vacuum ejector 52 to the suction pipe 58F.

The first sensor 131 detects the pressure in the suction pipe 58F, and outputs a first detection signal when the detected pressure is equal to or less than the first threshold value. Although the first threshold value can be appropriately changed, in this example, the gauge pressure is -0.02MPa.

The second sensor 132 detects the pressure in the suction pipe 58F, and outputs a second detection signal when the detected pressure is equal to or less than a second threshold value lower than the first threshold value. Although the second threshold can be appropriately changed, in this example, the gauge pressure is -0.04MPa.

The third sensor 133 detects the pressure in the suction pipe 58F, and outputs a third detection signal when the detected pressure is equal to or less than a third threshold value lower than the second threshold value. Although the third threshold value can be appropriately changed, in this example, the gauge pressure is -0.06MPa.

The power supply 137 supplies power to the first sensor 131 , the second sensor 132 and the third sensor 133 .

The selection switch 138 connects any one of the first sensor 131 , the second sensor 132 , and the third sensor 133 to the power source 137 .

Actions and effects of the robot arm system 10L will be described. In the robot arm system 10L, the control device 14L controls to close the second valve 70 when the pressure in the suction pipe 58F becomes a desired pressure (test pressure). The test pressure is selected from a first threshold (-0.02 MPa), a second threshold (-0.04 MPa), and a third threshold (-0.06 MPa). For example, the pressure inside the grip body 16 when the inner surface 22 of the finger 20 contacts the surface of the workpiece W is measured in advance, and the test pressure can be selected based on the measured value. The control device 14L switches the selection switch 138 according to the selected test pressure to set the sensor to be activated from among the first sensor 131 , the second sensor 132 , and the third sensor 133 . In this example, when the pressure in the grip body 16 is slightly lower than the second threshold value and the inner surface 22 of the finger 20 is in contact with the surface of the workpiece W, the second threshold value (-0.04MPa) is set as the test pressure. The control device 14L is connected to the power source 137 and the second sensor 132 by switching the selection switch 138 . The compressed air system supplied from the pump 66 to the inflow port 60 of the vacuum ejector 52 adjusts the first pressure regulating valve 68 so that the pressure in the suction pipe 58F is set to a predetermined positive value such that the pressure in the suction pipe 58F reaches the third threshold value (-0.06 MPa). pressure above the pressure value.

The second valve 70 is normally open. The third valve 98 is normally closed. Compressed gas is supplied from the activated pump 66 to the first pressure regulating valve 68 . The compressed gas system is adjusted to a pressure equal to or higher than a predetermined positive pressure value by the first pressure regulating valve 68 , and flows into the inflow port 60 of the vacuum ejector 52 through the second valve 70 . The vacuum ejector 52 sucks the gas in the suction pipe 58F from the suction port 64 while discharging the gas from the discharge port 62 to the outside by feeding the compressed gas into the inflow port 60 . The gas sucked into the suction port 64 at this time is the gas in a part of the pipe between the suction port 64 and the check valve 130 in the suction pipe 58F.

The check valve 130 is opened when the gas in the above-mentioned part of the piping is sucked into the suction port 64 . The check valve 130 is maintained in an open state when the compressed gas flows into the inflow port 60 and is discharged from the discharge port 62 . When the check valve 130 is opened, the gas in the grip body 16 is sucked through the suction pipe 58F. The gas system sucked from the inside of the grip body 16 is discharged to the outside from the discharge port 62 together with the compressed gas. As a result, the degree of vacuum in the grip body 16 increases (that is, the pressure decreases). Then, the palm portion 18 is deformed in the thickness direction so as to be sucked into the guide hole 38 of the high-strength portion 36 , and the finger portion 20 is elastically deformed so as to fall toward the palm portion 18 (refer to FIG. 4 ).

When the pressure in the suction pipe 58F is the second threshold value (-0.04 MPa), the second sensor 132 outputs a second detection signal. When the second sensor 132 outputs the second detection signal, the control device 14L determines that the pressure in the suction pipe 58F has reached the test pressure, and performs control to close the second valve 70 . When the second valve 70 is closed and the inflow of the compressed gas to the inflow port 60 is stopped, the discharge of the gas from the suction pipe 58F to the discharge port 62 is stopped, and the check valve 130 is closed. The inside of the grip body 16 is hermetically sealed, and the pressure inside the grip body 16 is kept at the test pressure, that is, the second threshold value. Since the degree of vacuum in the grip body 16 is kept constant, the degree of opening of the fingers 20 is maintained in a desired state. The holding device 12 can hold the workpiece W by the pressure in the suction pipe 58F being the second threshold value as the test pressure and the second valve 70 being closed. In this way, since the robotic arm system 10L can control the degree of opening of the fingers 20 relative to the palm 18 by controlling the timing of closing the second valve 70, usability can be improved.

When the third valve 98 is opened, the negative pressure in the main body 16 is held, and the external air passes through the third valve 98 and flows into the positive pressure piping 94C. The gas system flowing into the positive pressure piping 94C flows into the grip body 16 through the air supply and exhaust port 34 , thereby reducing the degree of vacuum in the grip body 16 (ie, increasing the pressure). As the degree of vacuum in the grip body 16 decreases, the palm portion 18 is pushed out from the guide hole 38 . As the palm 18 is pushed out, the fingers 20 open. As a result, the workpiece W can be released. In addition, the check valve 130 is opened by the gas flowing into the grip body 16 flowing into the other end of the suction pipe 58F.

In the above-described third embodiment, although three pressure sensors of the first sensor 131, the second sensor 132, and the third sensor 133 are used as pressure sensors for detecting the pressure in the suction pipe, the The number of pressure sensors is not limited to this, and may be plural.

4. Variations

The present invention is not limited to the above-described embodiments, and can be appropriately modified within the scope of the gist of the present invention. In the above-mentioned embodiment, although the case where the "plurality" is three is described, the present invention is not limited to this, and the number may be two or four or more.

The above-mentioned embodiments can be applied in combination respectively. For example, the control device 14D shown in FIG. 7 may be combined with the positive pressure piping 94B shown in FIG. 10 . In addition, the control device 14E shown in FIG. 8 may be combined with the positive pressure piping 109 shown in FIG. 11 . The suction piping 58D shown in FIGS. 12 and 14 and the suction piping 58E shown in FIG. 13 can be combined with the power supply 137 and the selection switch 138 of the suction piping 58F shown in FIG. 15 . The control device 14I shown in FIG. 12 , the control device 14J shown in FIG. 13 , and the control device 14L shown in FIG. 15 can be combined with the positive pressure piping 94D and the collecting piping 134 shown in FIG. 14 .

The actuator system of the present invention is not limited to the case where it is a gripping device. For example, the present invention may include a telescopic portion that expands and contracts in response to changes in internal pressure, and a hinge portion that opens and closes in accordance with the telescopic motion of the telescopic portion, and can be opened and closed by changes in the pressure of the air supplied to the telescopic portion. The angle of the hinge portion is determined to be applied to the actuator that obtains the driving force. The present invention includes a pressure chamber having a plurality of tubular bodies, and can be applied to actuators that generate propulsive force in response to changes in air pressure supplied to the body.

10A, 10B, 10C, 10D, 10E, 10F, 10G, 10H, 10I, 10J, 10K, 10L: Robotic arm system 12: Holding device (actuator) 14A, 14B, 14C, 14D, 14E, 14F, 14G, 14H, 14I, 14J, 14K, 14L: Control device 16: Control the subject 18: Palm 20: Fingers 22: Inside 24: Connection part 26: Peripheral surface 28: Shell 30: Disassembly part 32: Connector 34: Supply and exhaust port 36: High strength part 38: Pilot hole 40: Bending part 42: Through hole 44: Bottom 46: Tubular part 48: Top 50: Sealing material 52: Vacuum ejector 54A, 54B, 54C, 54D, 54E: Inflow piping 56: First valve 58A, 58B, 58C, 58D, 58E, 58F: Suction piping 60: flow inlet 62: discharge port 63: Muffler 64: Attraction mouth 65,93: Path 66: Pump 67: Compressed gas 68: The first pressure regulating valve 69,71: Gas 70: Second valve 72, 86: Main inflow piping 74: Distribution Tube 76, 84, 88: Sub-inflow piping 76A, 84A, 88A: First sub-inflow piping 76B, 84B, 88B: Second sub-inflow piping 76C, 84C, 88C: The third sub-inflow piping 78: Vice valve 80A: The first auxiliary pressure regulating valve 80B: The second auxiliary pressure regulating valve 80C: The third auxiliary pressure regulating valve 82,134: manifold piping 92: Discharge piping 94A, 94B, 94C, 94D: Positive pressure piping 96: Sub positive pressure piping 96A: The first positive pressure piping 96B: Second positive pressure piping 96C: The third positive pressure piping 98: The third valve 100: Speed Controller 102: The second pressure regulating valve 109: Positive pressure piping 110: Syringe 112: Syringe 114: Plunger 116: Cylinder 118: Cylinder tube 120: Piston rod 122, 124: Piping 130: Check valve 131: The first sensor 132: Second sensor 133: Third sensor 135: Flow throttle valve 136: Release valve W: workpiece

FIG. 1 is a schematic diagram showing a robot arm system related to the first embodiment. Fig. 2 is a partial cross-sectional view showing the gripping device according to the first embodiment. FIG. 3 is a schematic diagram showing a state of use of the robot arm system related to the first embodiment. FIG. 4 is a partial cross-sectional view showing a use state of the robot arm system according to the first embodiment. FIG. 5 is a schematic diagram showing a robot arm system according to Modification 1-1 of the first embodiment. FIG. 6 is a schematic diagram showing a robot arm system according to Modification 1-2 of the first embodiment. FIG. 7 is a schematic diagram showing a robot arm system related to Modifications 1 to 3 of the first embodiment. FIG. 8 is a schematic diagram showing a robot arm system related to Modifications 1 to 4 of the first embodiment. FIG. 9 is a schematic diagram showing a robot arm system related to the second embodiment. FIG. 10 is a schematic diagram showing a robot arm system according to Modification 2-1 of the second embodiment. FIG. 11 is a schematic diagram showing a robot arm system according to Modification 2-2 of the second embodiment. FIG. 12 is a schematic diagram showing a robot arm system related to the third embodiment. FIG. 13 is a schematic diagram showing a robot arm system according to Modification 3-1 of the third embodiment. FIG. 14 is a schematic diagram showing a robot arm system according to Modification 3-2 of the third embodiment. FIG. 15 is a schematic diagram showing a robot arm system related to Modification 3-3 of the third embodiment.

10A: Robotic arm system

12: Holding device/actuator

14A: Controls

16: Control the subject

34: Supply and exhaust port

52: Vacuum ejector

54A: Inflow piping

56: First valve

58A: Suction piping

60: flow inlet

62: discharge port

63: Muffler

64: Attraction mouth

65: Path

66: Pump

68: The first pressure regulating valve

70: Second valve

W: workpiece

Claims (19)

A control device is a control device that can be connected to an actuator using negative pressure as a power source, comprising: a vacuum ejector having an inflow port, a discharge port, and a suction port; The inflow piping can be connected to the inflow port and the pump; a suction pipe to which the suction port and the actuator can be connected; and A 1st valve is provided in the path|route which passes the said discharge port, the said vacuum ejector, the said suction port, and the said suction piping. The control device according to claim 1, wherein the inflow piping system has a second valve. The control device according to claim 2, wherein the inflow piping system has a first pressure regulating valve. The control device according to any one of claims 1 to 3, further comprising: a plurality of vacuum ejectors, each of the same construction as the preceding vacuum ejectors; connected with respect to the aforementioned plurality of vacuum ejectors; a plurality of inflow pipes, each of the inflow pipes having the same configuration as the foregoing inflow pipes; and A plurality of suction pipes, each of which has the same structure as the aforementioned suction pipes. A robotic arm system comprising the control device according to any one of claims 1 to 4 and a holding device as the aforementioned actuator. A control device is a control device that can be connected to an actuator using negative pressure as a power source, comprising: a vacuum ejector having an inflow port, a discharge port, and a suction port; The inflow piping can be connected to the inflow port and the pump; a suction pipe to which the suction port and the actuator can be connected; and Positive pressure piping, which can be connected to the aforementioned actuator and a positive pressure source that can supply positive pressure; Among them, the positive pressure piping system has a third valve. The control device according to claim 6, further comprising a plurality of positive pressure pipes, each positive pressure pipe having the same structure as the aforementioned positive pressure pipe; wherein the plurality of positive pressure piping systems can be connected in parallel with respect to the actuator, and each positive pressure piping system has a speed controller; The aforementioned speed controller is open to the atmosphere. The control device according to claim 6, wherein the positive pressure piping is connected to the inflow piping, and a second pressure regulating valve is provided. The control device according to claim 6, wherein the positive pressure piping is connected to the syringe. A robotic arm system comprising the control device according to any one of claims 6 to 9 and a holding device as the aforementioned actuator. A control device is a control device that can be connected to an actuator using negative pressure as a power source, comprising: a vacuum ejector having an inflow port, a discharge port, and a suction port; a plurality of inflow pipes that can be connected to the inflow port and the pump; and The suction pipe can be connected to the suction port and the actuator; wherein the plurality of inflow pipes respectively have a sub-pressure regulating valve and a sub-valve; Among them, the plurality of inflow pipings are configured in parallel with the vacuum ejector. A robotic arm system comprising the control device of claim 11 and a holding device serving as the aforementioned actuator. A control device is a control device that can be connected to an actuator using negative pressure as a power source, comprising: a vacuum ejector having an inflow port, a discharge port, and a suction port; Inflow piping, which can be connected to the aforementioned inflow port and the pump; and The suction pipe can be connected to the suction port and the actuator; The suction piping system has a plurality of pressure sensors for detecting the pressure in the suction piping. The control device of claim 13, wherein the suction pipe further has a check valve configured to allow gas to flow from the suction pipe to the suction port and to prevent the gas from flowing from the suction port to the suction pipe; However, the said inflow piping has a 2nd valve. The control device according to claim 13, wherein the suction piping further includes a first valve. The control device according to claim 13, further comprising a positive pressure piping capable of connecting the aforementioned actuator and a positive pressure source capable of supplying positive pressure; Among them, the positive pressure piping system has a third valve. The control device according to claim 16, further comprising a collection pipe connecting the suction pipe and the positive pressure pipe to the actuator; The aforementioned collective piping system has a release valve; Among them, the positive pressure piping further has a flow throttle valve. The control device according to claim 13, wherein the suction piping further has: a power supply for supplying power to the aforementioned plurality of pressure sensors; and Select a switch to connect any one of the plurality of pressure sensors to the power supply. A robotic arm system comprising the control device of any one of claims 13 to 18 and a holding device as the aforementioned actuator.

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