TW202147250A - 異常晶圓圖像分類 - Google Patents

異常晶圓圖像分類 Download PDF

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Publication number
TW202147250A
TW202147250A TW110114543A TW110114543A TW202147250A TW 202147250 A TW202147250 A TW 202147250A TW 110114543 A TW110114543 A TW 110114543A TW 110114543 A TW110114543 A TW 110114543A TW 202147250 A TW202147250 A TW 202147250A
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Taiwan
Prior art keywords
images
image
classifier
steps
features
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TW110114543A
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English (en)
Chinese (zh)
Inventor
本田智土
理查 伯奇
祝青
傑弗瑞德魯 大衛
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美商Ｐｄｆ對策公司
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Publication of TW202147250A publication Critical patent/TW202147250A/zh

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/241—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches
    • G06F18/2415—Classification techniques relating to the classification model, e.g. parametric or non-parametric approaches based on parametric or probabilistic models, e.g. based on likelihood ratio or false acceptance rate versus a false rejection rate
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G06F18/243—Classification techniques relating to the number of classes
    • G06F18/2431—Multiple classes
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/20—Ensemble learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/045—Combinations of networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/0464—Convolutional networks [CNN, ConvNet]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods
    • G06N3/09—Supervised learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N5/00—Computing arrangements using knowledge-based models
    • G06N5/04—Inference or reasoning models
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/40—Extraction of image or video features
    • G06V10/44—Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersections; Connectivity analysis, e.g. of connected components
    • G06V10/443—Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersections; Connectivity analysis, e.g. of connected components by matching or filtering
    • G06V10/449—Biologically inspired filters, e.g. difference of Gaussians [DoG] or Gabor filters
    • G06V10/451—Biologically inspired filters, e.g. difference of Gaussians [DoG] or Gabor filters with interaction between the filter responses, e.g. cortical complex cells
    • G06V10/454—Integrating the filters into a hierarchical structure, e.g. convolutional neural networks [CNN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/764—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using classification, e.g. of video objects
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/82—Arrangements for image or video recognition or understanding using pattern recognition or machine learning using neural networks
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N20/00—Machine learning
    • G06N20/10—Machine learning using kernel methods, e.g. support vector machines [SVM]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20076—Probabilistic image processing
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Software Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mathematical Physics (AREA)
  • Medical Informatics (AREA)
  • Multimedia (AREA)
  • Molecular Biology (AREA)
  • Biomedical Technology (AREA)
  • Computational Linguistics (AREA)
  • Databases & Information Systems (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Evolutionary Biology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Biophysics (AREA)
  • Quality & Reliability (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Probability & Statistics with Applications (AREA)
  • Image Analysis (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW110114543A 2020-04-22 2021-04-22 異常晶圓圖像分類 TW202147250A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063013737P 2020-04-22 2020-04-22
US63/013,737 2020-04-22

Publications (1)

Publication Number Publication Date
TW202147250A true TW202147250A (zh) 2021-12-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW110114543A TW202147250A (zh) 2020-04-22 2021-04-22 異常晶圓圖像分類

Country Status (6)

Country Link
US (1) US11972552B2 (enExample)
JP (1) JP2023523426A (enExample)
KR (1) KR20230006822A (enExample)
CN (1) CN115485740A (enExample)
TW (1) TW202147250A (enExample)
WO (1) WO2021216822A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI801038B (zh) * 2021-12-16 2023-05-01 新加坡商鴻運科股份有限公司 瑕疵檢測方法、系統、電子設備及介質
TWI844228B (zh) * 2022-01-26 2024-06-01 康斯坦茨大學 訓練神經網路執行機器學習任務
TWI886645B (zh) * 2023-11-21 2025-06-11 環球晶圓股份有限公司 產生標記結果檔的方法及電子裝置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115280468B (zh) * 2021-03-01 2025-10-14 株式会社日立高新技术 实验要点推荐装置、实验要点推荐方法及半导体装置制造系统
US12080042B2 (en) 2021-07-16 2024-09-03 Taiwan Semiconductor Manufacturing Company, Ltd. Method for retrieving images from database
US12449379B2 (en) * 2023-05-25 2025-10-21 Applied Materials, Inc. Machine learning model training
US12462369B2 (en) * 2023-08-16 2025-11-04 Applied Materials, Inc. Method for image-based sensor trace analysis

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6456899B1 (en) * 1999-12-07 2002-09-24 Ut-Battelle, Llc Context-based automated defect classification system using multiple morphological masks
US8965116B2 (en) * 2010-10-19 2015-02-24 3M Innovative Properties Company Computer-aided assignment of ratings to digital samples of a manufactured web product
JP5608575B2 (ja) 2011-01-19 2014-10-15 株式会社日立ハイテクノロジーズ 画像分類方法および画像分類装置
US9715723B2 (en) * 2012-04-19 2017-07-25 Applied Materials Israel Ltd Optimization of unknown defect rejection for automatic defect classification
US10650508B2 (en) 2014-12-03 2020-05-12 Kla-Tencor Corporation Automatic defect classification without sampling and feature selection
JP7144244B2 (ja) * 2018-08-31 2022-09-29 株式会社日立ハイテク パターン検査システム

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI801038B (zh) * 2021-12-16 2023-05-01 新加坡商鴻運科股份有限公司 瑕疵檢測方法、系統、電子設備及介質
TWI844228B (zh) * 2022-01-26 2024-06-01 康斯坦茨大學 訓練神經網路執行機器學習任務
TWI886645B (zh) * 2023-11-21 2025-06-11 環球晶圓股份有限公司 產生標記結果檔的方法及電子裝置

Also Published As

Publication number Publication date
KR20230006822A (ko) 2023-01-11
JP2023523426A (ja) 2023-06-05
US11972552B2 (en) 2024-04-30
WO2021216822A1 (en) 2021-10-28
CN115485740A (zh) 2022-12-16
US20210334608A1 (en) 2021-10-28

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