TW202144815A - Manufacturing method of lens grating - Google Patents

Manufacturing method of lens grating Download PDF

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Publication number
TW202144815A
TW202144815A TW110117703A TW110117703A TW202144815A TW 202144815 A TW202144815 A TW 202144815A TW 110117703 A TW110117703 A TW 110117703A TW 110117703 A TW110117703 A TW 110117703A TW 202144815 A TW202144815 A TW 202144815A
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Taiwan
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substrate
light
lenses
opening
lens
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TW110117703A
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Chinese (zh)
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刁鴻浩
玲溪 黃
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大陸商北京芯海視界三維科技有限公司
新加坡商視覺技術創投私人有限公司
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Publication of TW202144815A publication Critical patent/TW202144815A/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/20Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes
    • G02B30/26Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type
    • G02B30/27Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images by providing first and second parallax images to an observer's left and right eyes of the autostereoscopic type involving lenticular arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0012Arrays characterised by the manufacturing method
    • G02B3/0031Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0037Arrays characterized by the distribution or form of lenses
    • G02B3/005Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/0006Arrays
    • G02B3/0037Arrays characterized by the distribution or form of lenses
    • G02B3/0056Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

A manufacturing method of a lens grating comprises: providing a substrate; and forming at least one light-blocking structure and at least two lenses on the substrate, and configuring such that the light-blocking structure corresponds to a boundary region between adjacent lenses of the at least two lenses. The light-blocking structure can effectively reduce or eliminate stray light generated at a boundary region between two lenses, thereby effectively improving the quality of an image projected via the boundary region.

Description

透鏡光柵的製作方法How to make a lens grating

本申請主張在2020年05月22日提交中國知識産權局、申請號為202010439805.1、發明名稱為“透鏡光柵的製作方法”的中國專利申請的優先權,其全部內容通過引用結合在本申請中。This application claims the priority of the Chinese patent application filed on May 22, 2020 with the China Intellectual Property Office, the application number is 202010439805.1, and the invention name is "Method for making lens gratings", the entire contents of which are incorporated into this application by reference.

本申請涉及光學技術領域,例如涉及一種透鏡光柵的製作方法。The present application relates to the field of optical technology, for example, to a method for manufacturing a lens grating.

目前,透鏡光柵廣泛應用於3D顯示器中,基於透鏡光柵的3D顯示器不需要借助眼鏡即可獲得3D觀看效果。At present, lens gratings are widely used in 3D displays, and 3D displays based on lens gratings can obtain 3D viewing effects without glasses.

在實現本公開實施例的過程中,發現相關技術中至少存在如下問題:由於製作工藝的精度限制,透鏡表面不會絕對光滑,尤其是在兩個透鏡的交界處,極易形成畸變的溝槽,當子像素的光線經過畸變區域時,透射光線無法控制,會成為雜散光,造成左右眼圖像串擾,降低了該區域投射的圖像質量。In the process of implementing the embodiments of the present disclosure, it is found that there are at least the following problems in the related art: due to the precision limitation of the manufacturing process, the surface of the lens will not be absolutely smooth, especially at the junction of the two lenses, it is easy to form a distorted groove , When the light of the sub-pixel passes through the distortion area, the transmitted light cannot be controlled, and it will become stray light, resulting in crosstalk between the left and right eye images, and reducing the quality of the image projected in this area.

為了對披露的實施例的一些方面有基本的理解,下面給出了簡單的概括。該概括不是泛泛評述,也不是要確定關鍵/重要組成元素或描繪這些實施例的保護範圍,而是作為後面的詳細說明的序言。In order to provide a basic understanding of some aspects of the disclosed embodiments, a brief summary is given below. This summary is not intended to be an extensive review, nor to identify key/critical elements or delineate the scope of protection of these embodiments, but rather serves as a prelude to the detailed description that follows.

本公開實施例提供了一種透鏡光柵的製作方法,以解決透鏡光柵中兩個透鏡之間畸變區域帶來的圖像串擾的技術問題。The embodiments of the present disclosure provide a method for fabricating a lens grating, so as to solve the technical problem of image crosstalk caused by a distortion region between two lenses in the lens grating.

在一些實施例中,提供一種透鏡光柵的製作方法,包括:In some embodiments, a method of fabricating a lens grating is provided, comprising:

提供基板;provide the substrate;

在基板上形成至少一個遮光結構以及至少兩個透鏡,使得遮光結構對應於至少兩個透鏡中相鄰透鏡的交界區域。At least one light-shielding structure and at least two lenses are formed on the substrate, so that the light-shielding structure corresponds to a boundary area between adjacent lenses of the at least two lenses.

在一些實施例中,基板可以為整體基板。In some embodiments, the substrate may be a monolithic substrate.

在一些實施例中,在基板上形成至少一個遮光結構以及至少兩個透鏡,可以包括:In some embodiments, forming at least one light-shielding structure and at least two lenses on the substrate may include:

在基板的一面形成至少兩個透鏡;at least two lenses are formed on one side of the substrate;

在基板上形成所述至少一個遮光結構。The at least one light shielding structure is formed on the substrate.

在一些實施例中,在基板上形成至少一個遮光結構,可以包括:In some embodiments, forming at least one light-shielding structure on the substrate may include:

在基板上對應於至少兩個透鏡中相鄰透鏡的交界區域,設置開口;An opening is provided on the substrate corresponding to the boundary area between adjacent lenses in at least two lenses;

在開口中填充遮光材料,形成遮光結構。A light-shielding material is filled in the opening to form a light-shielding structure.

在一些實施例中,在基板上對應於至少兩個透鏡中相鄰透鏡的交界區域,設置開口,可以包括:In some embodiments, an opening is provided on the substrate corresponding to a boundary area between adjacent lenses of the at least two lenses, which may include:

基板上對應於至少兩個透鏡中相鄰透鏡的交界區域,沿基板的厚度方向上設置開口。An opening is provided on the substrate along the thickness direction of the substrate corresponding to the boundary region of the adjacent lenses among the at least two lenses.

在一些實施例中,沿基板的厚度方向設置開口,可以包括:In some embodiments, arranging the openings along the thickness direction of the substrate may include:

從基板背離至少兩個透鏡的一面,形成開口,使得開口延伸至對應的透鏡內,或者延伸至基板內,或者貫穿基板。An opening is formed from a side of the substrate facing away from the at least two lenses, so that the opening extends into the corresponding lens, or extends into the substrate, or penetrates through the substrate.

在一些實施例中,在開口中填充遮光材料,可以包括:In some embodiments, filling the opening with light-shielding material may include:

在開口中完全填充遮光材料;或者,Fill the opening completely with shading material; or,

在開口中部分填充遮光材料。The opening is partially filled with light-shielding material.

在一些實施例中,在開口中部分填充遮光材料之後,還可以包括:In some embodiments, after the opening is partially filled with the light-shielding material, it may further include:

在遮光材料表面填充材料。Fill material on the surface of the shading material.

在一些實施例中,在基板上形成至少一個遮光結構以及至少兩個透鏡,可以包括:In some embodiments, forming at least one light-shielding structure and at least two lenses on the substrate may include:

在基板上形成至少一個遮光結構;forming at least one light-shielding structure on the substrate;

在基板的一面形成至少兩個透鏡。At least two lenses are formed on one surface of the substrate.

在一些實施例中,在基板上形成至少一個遮光結構,可以包括:In some embodiments, forming at least one light-shielding structure on the substrate may include:

在基板的預設位置設置開口;Provide openings at preset positions of the substrate;

在開口中填充遮光材料,形成遮光結構。A light-shielding material is filled in the opening to form a light-shielding structure.

在一些實施例中,在基板的預設位置設置開口,可以包括:In some embodiments, disposing openings at predetermined positions of the substrate may include:

從基板的一面,沿基板的厚度方向上設置開口,開口延伸至基板的另一面或者延伸至基板內。From one side of the substrate, an opening is provided along the thickness direction of the substrate, and the opening extends to the other side of the substrate or into the substrate.

在一些實施例中,在開口中填充遮光材料,可以包括:In some embodiments, filling the opening with light-shielding material may include:

在開口中完全填充遮光材料;或者,Fill the opening completely with shading material; or,

在開口中部分填充遮光材料。The opening is partially filled with light-shielding material.

在一些實施例中,在開口中部分填充遮光材料之後,還可以包括:In some embodiments, after the opening is partially filled with the light-shielding material, it may further include:

在遮光材料表面填充材料。Fill material on the surface of the shading material.

在一些實施例中,在基板的一面形成至少兩個透鏡,可以包括:In some embodiments, at least two lenses are formed on one side of the substrate, which may include:

在基板的任意一面形成至少兩個透鏡。At least two lenses are formed on either side of the substrate.

在一些實施例中,在開口中完全填充遮光材料之後,還可以包括:In some embodiments, after the light-shielding material is completely filled in the opening, it may further include:

在基板上靠近開口的開口端的一面,對應於開口區域形成遮光材料,使得形成的遮光結構部分凸出於基板的表面。On the side of the substrate close to the opening end of the opening, a light-shielding material is formed corresponding to the opening area, so that the formed light-shielding structure partially protrudes from the surface of the substrate.

在一些實施例中,在基板上形成至少一個遮光結構,可以包括:In some embodiments, forming at least one light-shielding structure on the substrate may include:

在基板的一面形成遮光結構,遮光結構完全凸出於基板的表面。A light-shielding structure is formed on one side of the substrate, and the light-shielding structure completely protrudes from the surface of the substrate.

在一些實施例中,在基板的一面形成至少兩個透鏡,可以包括:In some embodiments, at least two lenses are formed on one side of the substrate, which may include:

在基板上遮光結構凸出於基板的一面,設置至少兩個透鏡,使得遮光結構凸出的部分對應於至少兩個透鏡中相鄰透鏡的交界區域。On the substrate, the light-shielding structure protrudes from one side of the substrate, and at least two lenses are arranged, so that the protruding part of the light-shielding structure corresponds to the boundary area between adjacent lenses of the at least two lenses.

在一些實施例中,基板可以為部分基板:In some embodiments, the substrate may be a partial substrate:

在基板上形成至少一個遮光結構,可以包括:Forming at least one light-shielding structure on the substrate may include:

在部分基板的一面形成遮光結構;A light-shielding structure is formed on one side of part of the substrate;

在部分基板形成有遮光結構的一面鋪設基板材料。The substrate material is laid on one side of a part of the substrate on which the light-shielding structure is formed.

在一些實施例中,形成的所述至少兩個透鏡可以包括凹透鏡和凸透鏡中的至少一種。In some embodiments, the at least two lenses formed may include at least one of a concave lens and a convex lens.

在一些實施例中,透鏡可以包括柱狀透鏡和球面透鏡中的至少一種。In some embodiments, the lenses may include at least one of cylindrical lenses and spherical lenses.

在一些實施例中,透鏡可以包括柱狀透鏡;In some embodiments, the lens may comprise a lenticular lens;

在基板上形成至少兩個透鏡可以包括:Forming the at least two lenses on the substrate may include:

將柱狀透鏡中的部分或全部呈平行分佈在基板上。Some or all of the lenticular lenses are distributed on the substrate in parallel.

在一些實施例中,透鏡可以包括球面透鏡;In some embodiments, the lens may comprise a spherical lens;

在基板上形成至少兩個透鏡可以包括:Forming the at least two lenses on the substrate may include:

將球面透鏡中的部分或全部呈陣列排佈在基板上。Part or all of the spherical lenses are arranged on the substrate in an array.

本公開實施例提供的透鏡光柵的製作方法,可以實現以下技術效果:The manufacturing method of the lens grating provided by the embodiment of the present disclosure can achieve the following technical effects:

解決透鏡光柵中兩個透鏡之間畸變區域帶來的圖像串擾的技術問題。Solve the technical problem of image crosstalk caused by the distortion area between two lenses in the lens grating.

以上的總體描述和下文中的描述僅是示例性和解釋性的,不用於限制本申請。The foregoing general description and the following description are exemplary and explanatory only and are not intended to limit the application.

為了能夠更加詳盡地瞭解本公開實施例的特點與技術內容,下面結合圖式對本公開實施例的實現進行詳細闡述,所附圖式僅供參考說明之用,並非用來限定本公開實施例。在以下的技術描述中,為方便解釋起見,通過多個細節以提供對所披露實施例的充分理解。然而,在沒有這些細節的情況下,一個或多個實施例仍然可以實施。在其它情況下,為簡化圖式,熟知的結構和裝置可以簡化展示。In order to understand the features and technical contents of the embodiments of the present disclosure in more detail, the implementation of the embodiments of the present disclosure will be described in detail below with reference to the drawings. In the following technical description, for the convenience of explanation, numerous details are provided to provide a thorough understanding of the disclosed embodiments. However, one or more embodiments may be practiced without these details. In other instances, well-known structures and devices may be shown simplified in order to simplify the drawings.

參考圖1,圖1是本公開實施例提供的透鏡光柵的製作方法的流程示意圖,在一些實施例中,提供一種透鏡光柵的製作方法,包括:Referring to FIG. 1, FIG. 1 is a schematic flowchart of a method for fabricating a lens grating provided by an embodiment of the present disclosure. In some embodiments, a method for fabricating a lens grating is provided, including:

S101,提供基板;S101, providing a substrate;

S102,在基板上形成至少一個遮光結構以及至少兩個透鏡,使得遮光結構對應於至少兩個透鏡中相鄰透鏡的交界區域。S102 , forming at least one light-shielding structure and at least two lenses on the substrate, so that the light-shielding structure corresponds to a boundary area between adjacent lenses of the at least two lenses.

參考圖2,圖2是本公開實施例提供的製作透鏡光柵時採用的基板的剖面結構示意圖,在一些實施例中,S101中,提供的基板101可以為整體基板。Referring to FIG. 2 , FIG. 2 is a schematic cross-sectional structure diagram of a substrate used in fabricating a lens grating according to an embodiment of the present disclosure. In some embodiments, in S101 , the provided substrate 101 may be an integral substrate.

參考圖3、圖4、圖5,圖3是本公開實施例提供的製作透鏡光柵時形成遮光結構和透鏡的流程示意圖,圖4是本公開實施例提供的製作透鏡光柵時形成的透鏡的剖面結構示意圖,圖5是本公開實施例提供的製作透鏡光柵時形成的遮光結構的剖面結構示意圖,在一些實施例中,S102中,在基板上形成至少一個遮光結構以及至少兩個透鏡,可以包括:Referring to FIGS. 3 , 4 and 5 , FIG. 3 is a schematic flowchart of forming a light-shielding structure and a lens when manufacturing a lens grating provided by an embodiment of the present disclosure, and FIG. 4 is a cross-section of a lens formed when manufacturing a lens grating provided by an embodiment of the present disclosure. 5 is a schematic cross-sectional structural diagram of a light-shielding structure formed when a lens grating is fabricated according to an embodiment of the present disclosure. In some embodiments, in S102, at least one light-shielding structure and at least two lenses are formed on the substrate, which may include :

S1021,在基板101的一面形成至少兩個透鏡102;S1021, forming at least two lenses 102 on one side of the substrate 101;

S1022,在基板101上形成至少一個遮光結構103。S1022 , at least one light-shielding structure 103 is formed on the substrate 101 .

在一些實施例中,在基板101的一面形成的至少兩個透鏡102,可以包括凹透鏡和凸透鏡中的至少一種。In some embodiments, the at least two lenses 102 formed on one side of the substrate 101 may include at least one of a concave lens and a convex lens.

參考圖4,圖4是本公開實施例提供的製作透鏡光柵時形成的透鏡的剖面結構示意圖,在基板101的一面形成的至少兩個透鏡102可以包括凸透鏡。Referring to FIG. 4 , FIG. 4 is a schematic cross-sectional structure diagram of a lens formed when a lens grating is fabricated according to an embodiment of the present disclosure. The at least two lenses 102 formed on one side of the substrate 101 may include convex lenses.

參考圖6,圖6是本公開實施例提供的製作透鏡光柵時形成的凹透鏡的剖面結構示意圖,在基板101的一面形成的至少兩個透鏡102可以包括凹透鏡。Referring to FIG. 6 , FIG. 6 is a schematic cross-sectional structure diagram of a concave lens formed when a lens grating is fabricated according to an embodiment of the present disclosure. The at least two lenses 102 formed on one side of the substrate 101 may include concave lenses.

參考圖7,圖7是本公開實施例提供的製作透鏡光柵時形成的凹透鏡和凸透鏡的剖面結構示意圖,在基板101的一面形成的至少兩個透鏡102可以包括凸透鏡和凹透鏡。Referring to FIG. 7 , FIG. 7 is a schematic cross-sectional structure diagram of a concave lens and a convex lens formed when a lens grating is fabricated according to an embodiment of the present disclosure. The at least two lenses 102 formed on one side of the substrate 101 may include a convex lens and a concave lens.

以下以透鏡102為凸透鏡為例進行說明。The following description will be given by taking the lens 102 as a convex lens as an example.

參考圖8,圖8是本公開實施例提供的製作透鏡光柵時形成遮光結構的流程示意圖,在一些實施例中,S1022中,在基板上形成至少一個遮光結構,包括:Referring to FIG. 8, FIG. 8 is a schematic flowchart of forming a light-shielding structure when fabricating a lens grating according to an embodiment of the present disclosure. In some embodiments, in S1022, at least one light-shielding structure is formed on the substrate, including:

S1022a,在基板上對應於至少兩個透鏡中相鄰透鏡的交界區域,設置開口;S1022a, providing an opening on the substrate corresponding to the boundary area between adjacent lenses of the at least two lenses;

S1022b,在開口中填充遮光材料,形成遮光結構。S1022b, filling the opening with a light-shielding material to form a light-shielding structure.

在一些實施例中,參考圖9A、圖9B、圖9C,圖9A、圖9B、圖9C是本公開實施例提供的製作透鏡光柵時形成的開口的剖面結構示意圖,在基板上對應於至少兩個透鏡中相鄰透鏡的交界區域,設置開口,包括:In some embodiments, referring to FIGS. 9A , 9B, and 9C, FIGS. 9A , 9B, and 9C are schematic cross-sectional structural diagrams of openings formed when a lens grating is fabricated according to an embodiment of the present disclosure, corresponding to at least two openings on the substrate. In the junction area of adjacent lenses among the lenses, an opening is provided, including:

基板上對應於至少兩個透鏡中相鄰透鏡的交界區域,沿基板的厚度方向上設置開口。An opening is provided on the substrate along the thickness direction of the substrate corresponding to the boundary region of the adjacent lenses among the at least two lenses.

在一些實施例中,沿基板的厚度方向設置開口,包括:In some embodiments, arranging the openings along the thickness direction of the substrate includes:

從基板背離至少兩個透鏡的一面,形成開口,使得開口延伸至對應的透鏡內,或者延伸至基板內,或者貫穿基板。An opening is formed from a side of the substrate facing away from the at least two lenses, so that the opening extends into the corresponding lens, or extends into the substrate, or penetrates through the substrate.

參考圖9A,在一些實施例中,從基板101背離至少兩個透鏡102的一面,形成開口104,形成的開口104延伸至對應的透鏡102內。Referring to FIG. 9A , in some embodiments, openings 104 are formed from a surface of the substrate 101 away from the at least two lenses 102 , and the formed openings 104 extend into the corresponding lenses 102 .

參考圖9B,在一些實施例中,從基板101背離至少兩個透鏡102的一面,形成開口104,形成的開口104延伸至基板101內。Referring to FIG. 9B , in some embodiments, an opening 104 is formed from a surface of the substrate 101 facing away from the at least two lenses 102 , and the formed opening 104 extends into the substrate 101 .

參考圖9C,在一些實施例中,從基板101背離至少兩個透鏡102的一面,形成開口104,形成的開口104貫穿基板101。Referring to FIG. 9C , in some embodiments, an opening 104 is formed from a surface of the substrate 101 away from the at least two lenses 102 , and the formed opening 104 penetrates through the substrate 101 .

參考圖10A、圖10B、圖11A、圖11B、圖11C,圖10A、圖10B是本公開實施例提供的製作透鏡光柵時在開口中完全填充遮光材料所形成的剖面結構示意圖,圖11A、圖11B、圖11C是本公開實施例提供的製作透鏡光柵時在開口中部分填充遮光材料所形成的剖面結構示意圖,在一些實施例中,在開口中填充遮光材料,包括:10A, 10B, 11A, 11B, and 11C, FIGS. 10A and 10B are schematic diagrams of cross-sectional structures formed by completely filling the openings with light-shielding materials when fabricating a lens grating according to an embodiment of the present disclosure. 11B and FIG. 11C are schematic cross-sectional structural diagrams formed by partially filling the opening with a light-shielding material when fabricating a lens grating according to an embodiment of the present disclosure. In some embodiments, filling the opening with a light-shielding material includes:

在開口中完全填充遮光材料;或者,Fill the opening completely with shading material; or,

在開口中部分填充遮光材料。The opening is partially filled with light-shielding material.

在一些實施例中,參考圖10A,開口104延伸至透鏡102內,在開口104中完全填充遮光材料,形成的遮光結構103延伸至透鏡102內。In some embodiments, referring to FIG. 10A , the opening 104 extends into the lens 102 , the opening 104 is completely filled with light-shielding material, and the formed light-shielding structure 103 extends into the lens 102 .

參考圖10B,開口104延伸至基板101內,在開口104中完全填充遮光材料,形成的遮光結構103延伸至基板101內。Referring to FIG. 10B , the opening 104 extends into the substrate 101 , the opening 104 is completely filled with light-shielding material, and the formed light-shielding structure 103 extends into the substrate 101 .

參考圖5,開口104貫穿基板101,在開口104中完全填充遮光材料,形成的遮光結構103貫穿基板101。Referring to FIG. 5 , the opening 104 penetrates through the substrate 101 , the opening 104 is completely filled with a light-shielding material, and the formed light-shielding structure 103 penetrates through the substrate 101 .

參考圖11A,開口104延伸至透鏡102內,在開口104中部分填充遮光材料,形成遮光結構103。Referring to FIG. 11A , the opening 104 extends into the lens 102 , and the opening 104 is partially filled with a light-shielding material to form the light-shielding structure 103 .

參考圖11B,開口104延伸至基板101內,在開口104中部分填充遮光材料,形成遮光結構103。Referring to FIG. 11B , the opening 104 extends into the substrate 101 , and the opening 104 is partially filled with a light-shielding material to form the light-shielding structure 103 .

參考圖11C,開口104貫穿基板101,在開口104中部分填充遮光材料,形成遮光結構103。Referring to FIG. 11C , the opening 104 penetrates through the substrate 101 , and the opening 104 is partially filled with a light-shielding material to form the light-shielding structure 103 .

在一些實施例中,參考圖12A、圖12B、圖12C,圖12A、圖12B、圖12C是本公開實施例提供的製作透鏡光柵時在開口中部分填充遮光材料之後填充基板材料所形成的剖面結構示意圖,在開口中部分填充遮光材料之後,還包括:In some embodiments, referring to FIGS. 12A , 12B, and 12C, FIGS. 12A , 12B, and 12C are cross-sections formed by partially filling the openings with light-shielding materials and then filling the substrate materials when fabricating a lens grating according to an embodiment of the present disclosure. The schematic diagram of the structure, after the opening is partially filled with the light-shielding material, further includes:

在遮光材料表面填充材料。Fill material on the surface of the shading material.

在一些實施例中,遮光材料表面填充的材料為基板材料。In some embodiments, the material filled on the surface of the light-shielding material is a substrate material.

參考圖12A,開口104延伸至透鏡102內,在開口104中部分填充遮光材料,形成遮光結構103之後,填充基板材料105。Referring to FIG. 12A , the opening 104 extends into the lens 102 , the opening 104 is partially filled with a light-shielding material, and after the light-shielding structure 103 is formed, the substrate material 105 is filled.

參考圖12B,開口104延伸至基板101內,在開口104中部分填充遮光材料,形成遮光結構103之後,填充基板材料105。Referring to FIG. 12B , the opening 104 extends into the substrate 101 , and the opening 104 is partially filled with a light-shielding material, and after the light-shielding structure 103 is formed, the substrate material 105 is filled.

參考圖12C,開口104貫穿基板101,在開口104中部分填充遮光材料,形成遮光結構103之後,填充基板材料105。Referring to FIG. 12C , the opening 104 penetrates through the substrate 101 , the opening 104 is partially filled with a light-shielding material, and after the light-shielding structure 103 is formed, the substrate material 105 is filled.

在一些實施例中,各個遮光結構103的遮光材料可以相同也可以不同。In some embodiments, the light-shielding materials of each light-shielding structure 103 may be the same or different.

在一些實施例中,遮光結構103凸出於基板101表面部分的遮光材料與位於基板101內部分的遮光材料可以相同也可以不同。In some embodiments, the light-shielding material of the light-shielding structure 103 protruding from the surface of the substrate 101 and the light-shielding material of the inner portion of the substrate 101 may be the same or different.

參考圖13,圖13是本公開實施例提供的製作透鏡光柵時形成遮光結構和透鏡的另一流程示意圖,在一些實施例中,S102中,在基板上形成至少一個遮光結構以及至少兩個透鏡,包括:Referring to FIG. 13 , FIG. 13 is another schematic flowchart of forming a light-shielding structure and a lens when fabricating a lens grating according to an embodiment of the present disclosure. In some embodiments, in S102 , at least one light-shielding structure and at least two lenses are formed on a substrate ,include:

S102A,在基板上形成至少一個遮光結構;S102A, forming at least one light-shielding structure on the substrate;

S102B,在基板的一面形成至少兩個透鏡。S102B, forming at least two lenses on one surface of the substrate.

參考圖14,圖14是本公開實施例提供的製作透鏡光柵時形成的基板的另一剖面結構示意圖,首先,提供整體的基板201。Referring to FIG. 14 , FIG. 14 is another schematic cross-sectional structure diagram of a substrate formed when a lens grating is fabricated according to an embodiment of the present disclosure. First, an overall substrate 201 is provided.

參考圖15,圖15是本公開實施例提供的製作透鏡光柵時形成遮光結構的另一流程示意圖,在一些實施例中,S102A中,在基板上形成至少一個遮光結構,包括:Referring to FIG. 15, FIG. 15 is another schematic flowchart of forming a light-shielding structure when fabricating a lens grating according to an embodiment of the present disclosure. In some embodiments, in S102A, at least one light-shielding structure is formed on the substrate, including:

S102a,在基板的預設位置設置開口;S102a, setting an opening at a preset position of the substrate;

S102b,在開口中填充遮光材料,形成遮光結構。S102b, filling the opening with a light-shielding material to form a light-shielding structure.

參考圖16A、圖16B,圖16A、圖16B是本公開實施例提供的製作透鏡光柵時在基板上形成的開口的另一剖面結構示意圖,在一些實施例中,預先在基板201上設計出設置開口的位置,在基板的預設位置設置開口,包括:Referring to FIGS. 16A and 16B , FIGS. 16A and 16B are another cross-sectional structural schematic diagram of the opening formed on the substrate when the lens grating is fabricated according to an embodiment of the present disclosure. In some embodiments, a setting is designed on the substrate 201 in advance. The position of the opening, setting the opening at the preset position of the substrate, including:

從基板的一面,沿基板的厚度方向上設置開口,開口延伸至基板的另一面或者延伸至基板內。From one side of the substrate, an opening is provided along the thickness direction of the substrate, and the opening extends to the other side of the substrate or into the substrate.

參考圖16A,從基板201的一面,延其厚度方向,設置開口202,開口202延伸至基板201的另一面。Referring to FIG. 16A , an opening 202 is provided from one side of the substrate 201 along the thickness direction thereof, and the opening 202 extends to the other side of the substrate 201 .

參考圖16B,從基板201的一面,延其厚度方向,設置開口202,開口202延伸至基板201內。Referring to FIG. 16B , from one side of the substrate 201 , along the thickness direction thereof, an opening 202 is provided, and the opening 202 extends into the substrate 201 .

在一些實施例中,在開口中填充遮光材料,包括:In some embodiments, filling the opening with a light-shielding material includes:

在開口中完全填充遮光材料;或者,Fill the opening completely with shading material; or,

在開口中部分填充遮光材料。The opening is partially filled with light-shielding material.

在一些實施例中,圖17A、圖17B是本公開實施例提供的製作透鏡光柵時在基板中完全填充遮光材料所形成的另一剖面結構示意圖,參考圖17A,開口202延伸至基板201的另一面,在開口202中完全填充遮光材料,形成遮光結構203。In some embodiments, FIGS. 17A and 17B are another schematic cross-sectional structure diagrams formed by completely filling the light-shielding material in the substrate when fabricating the lens grating provided by the embodiments of the present disclosure. Referring to FIG. 17A , the opening 202 extends to another part of the substrate 201 . On one side, the opening 202 is completely filled with light-shielding material to form a light-shielding structure 203 .

參考圖17B,開口202延伸至基板201內,開口202中完全填充遮光材料,形成遮光結構203。Referring to FIG. 17B , the opening 202 extends into the substrate 201 , and the opening 202 is completely filled with a light-shielding material to form a light-shielding structure 203 .

圖18A、圖18B是本公開實施例提供的製作透鏡光柵時在基板中部分填充遮光材料所形成的另一剖面結構示意圖,參考圖18A,開口202延伸至基板201的另一面,在開口202中部分填充遮光材料,形成遮光結構203。FIGS. 18A and 18B are schematic diagrams of another cross-sectional structure formed by partially filling a light-shielding material in a substrate when fabricating a lens grating according to an embodiment of the present disclosure. Referring to FIG. 18A , the opening 202 extends to the other side of the substrate 201 , and in the opening 202 The light-shielding material is partially filled to form the light-shielding structure 203 .

參考圖18B,開口202延伸至基板201內,在開口202中部分填充遮光材料,形成遮光結構203。Referring to FIG. 18B , the opening 202 extends into the substrate 201 , and the opening 202 is partially filled with a light-shielding material to form a light-shielding structure 203 .

在一些實施例中,在開口中部分填充遮光材料之後,還包括:In some embodiments, after partially filling the light-shielding material in the opening, the method further includes:

在遮光材料表面填充材料。Fill material on the surface of the shading material.

在一些實施例中,遮光材料表面填充的材料為基板材料。In some embodiments, the material filled on the surface of the light-shielding material is a substrate material.

圖19A、圖19B是本公開實施例提供的製作透鏡光柵時在基板中部分填充遮光材料之後填充基底材料所形成的另一剖面結構示意圖,參考圖19A,開口202延伸至基板201的另一面,在開口202中部分填充遮光材料,形成遮光結構203之後,在遮光材料表面填充基板材料204。FIGS. 19A and 19B are another schematic cross-sectional structure diagrams formed by partially filling the substrate with the light-shielding material and then filling the base material during the manufacture of the lens grating provided by the embodiment of the present disclosure. Referring to FIG. 19A , the opening 202 extends to the other side of the substrate 201 . After partially filling the light-shielding material in the opening 202 to form the light-shielding structure 203 , the surface of the light-shielding material is filled with the substrate material 204 .

參考圖19B,開口202延伸至基板201內,在開口202中部分填充遮光材料,形成遮光結構203之後,在遮光材料表面填充基板材料204。Referring to FIG. 19B , the opening 202 extends into the substrate 201 , the opening 202 is partially filled with a light-shielding material, and after the light-shielding structure 203 is formed, the surface of the light-shielding material is filled with the substrate material 204 .

在一些實施例中,在基板的一面形成至少兩個透鏡,包括:In some embodiments, at least two lenses are formed on one side of the substrate, including:

在基板的任意一面形成至少兩個透鏡。At least two lenses are formed on either side of the substrate.

參考圖20A、圖20B、圖20C、圖20D、圖20E,圖20A、圖20B、圖20C、圖20D、圖20E是本公開實施例提供的製作透鏡光柵時形成的透鏡的另一剖面結構示意圖,形成的上述基板201,可在基板201的任意一面形成該至少兩個透鏡205。20A, 20B, 20C, 20D, and 20E, FIGS. 20A, 20B, 20C, 20D, and 20E are another cross-sectional structural schematic diagram of a lens formed when a lens grating is fabricated according to an embodiment of the present disclosure. , the above-mentioned substrate 201 is formed, and the at least two lenses 205 can be formed on any side of the substrate 201 .

參考圖20A、圖20B、圖20C、圖20D、圖20E,形成帶有遮光結構203的基板201之後,在基板201的任意一面形成的至少兩個透鏡205可以包括凸透鏡。20A, 20B, 20C, 20D, and 20E, after the substrate 201 with the light shielding structure 203 is formed, the at least two lenses 205 formed on any side of the substrate 201 may include convex lenses.

參考圖21,圖21是本公開實施例提供的製作透鏡光柵時形成的凹透鏡的另一剖面結構示意圖,在基板201的任意一面形成的至少兩個透鏡205可以包括凹透鏡。Referring to FIG. 21 , FIG. 21 is another schematic cross-sectional structure diagram of a concave lens formed when a lens grating is fabricated according to an embodiment of the present disclosure. The at least two lenses 205 formed on any side of the substrate 201 may include concave lenses.

參考圖22,圖22是本公開實施例提供的製作透鏡光柵時形成的凹透鏡和凸透鏡的另一剖面結構示意圖,在基板201的任意一面形成的至少兩個透鏡205可以包括凹透鏡和凸透鏡。Referring to FIG. 22 , FIG. 22 is another cross-sectional structural schematic diagram of a concave lens and a convex lens formed when a lens grating is fabricated according to an embodiment of the present disclosure. The at least two lenses 205 formed on any side of the substrate 201 may include a concave lens and a convex lens.

以下以透鏡205為凸透鏡進行說明。Hereinafter, the lens 205 will be described as a convex lens.

在一些實施例中,參考圖23B和圖23D,圖23B和圖23D是遮光結構凸出於基板表面的結構示意圖,在開口中完全填充遮光材料之後,還包括:In some embodiments, referring to FIG. 23B and FIG. 23D, FIG. 23B and FIG. 23D are schematic structural diagrams of the light-shielding structure protruding from the surface of the substrate. After the opening is completely filled with the light-shielding material, it further includes:

在基板201上靠近開口202的開口端的一面,對應於開口區域形成遮光材料,使得形成的遮光結構203部分凸出於基板201的表面。On the side of the substrate 201 close to the opening end of the opening 202 , a light-shielding material is formed corresponding to the opening area, so that the formed light-shielding structure 203 partially protrudes from the surface of the substrate 201 .

在一些實施例中,遮光結構201凸出於基板201表面的部分,可以通過刻蝕、噴墨、壓印、絲網印刷等方式形成,以下以刻蝕為例進行說明:In some embodiments, the portion of the light-shielding structure 201 protruding from the surface of the substrate 201 may be formed by etching, inkjet, embossing, screen printing, etc. The following description will be given by taking etching as an example:

參考圖23A、圖23B、圖23C、圖23D,圖23A、圖23B、圖23C、圖23D是本公開實施例提供的製作透鏡光柵時刻蝕遮光層所形成的遮光結構的另一剖面結構示意圖,在開口中完全填充遮光材料之後,還包括:23A, 23B, 23C, and 23D, FIGS. 23A, 23B, 23C, and 23D are another cross-sectional structural schematic diagram of a light-shielding structure formed by etching a light-shielding layer while manufacturing a lens grating according to an embodiment of the present disclosure, After the opening is completely filled with shading material, also include:

在基板201上靠近開口202的開口端的一面,塗覆遮光材料,設置遮光層206;A light-shielding material is coated on the side of the substrate 201 close to the opening end of the opening 202, and a light-shielding layer 206 is arranged;

對遮光層206進行刻蝕,保留對應於開口區域的遮光材料,使得形成的遮光結構203部分凸出於基板的表面。The light-shielding layer 206 is etched to retain the light-shielding material corresponding to the opening area, so that the formed light-shielding structure 203 partially protrudes from the surface of the substrate.

參考圖25,圖25是本公開實施例提供的製作透鏡光柵時在基板表面形成的遮光結構的另一剖面結構示意圖,在基板上形成至少一個遮光結構,包括:Referring to FIG. 25 , FIG. 25 is another schematic cross-sectional structural diagram of a light-shielding structure formed on the surface of a substrate when a lens grating is fabricated according to an embodiment of the present disclosure. At least one light-shielding structure is formed on the substrate, including:

在基板201的一面形成遮光結構203,遮光結構203完全凸出於基板201的表面。A light-shielding structure 203 is formed on one side of the substrate 201 , and the light-shielding structure 203 completely protrudes from the surface of the substrate 201 .

在一些實施例中,遮光結構201完全凸出於基板201表面的部分,可以通過刻蝕、噴墨、壓印等方式形成,以下以刻蝕為例進行說明:In some embodiments, the portion of the light-shielding structure 201 that is completely protruded from the surface of the substrate 201 may be formed by etching, inkjet, embossing, etc. The following is an illustration of etching as an example:

在一些實施例中,參考圖24和圖25,圖24是本公開實施例提供的製作透鏡光柵時在基板表面形成的遮光層的另一剖面結構示意圖,圖25是本公開實施例提供的製作透鏡光柵時在基板表面形成的遮光結構的另一剖面結構示意圖,在基板上形成至少一個遮光結構,包括:In some embodiments, referring to FIG. 24 and FIG. 25 , FIG. 24 is another cross-sectional structural schematic diagram of the light shielding layer formed on the surface of the substrate during the manufacture of the lens grating provided by the embodiment of the present disclosure, and FIG. 25 is the manufacturing method provided by the embodiment of the present disclosure. Another cross-sectional schematic diagram of the light-shielding structure formed on the surface of the substrate during the lens grating, at least one light-shielding structure is formed on the substrate, including:

在基板201的一面塗覆遮光材料,設置遮光層206;A light-shielding material is coated on one side of the substrate 201, and a light-shielding layer 206 is provided;

對遮光層206進行刻蝕,保留預設位置的遮光材料,形成遮光結構203,遮光結構203完全凸出於基板的表面。The light-shielding layer 206 is etched, and the light-shielding material at the preset position is retained to form the light-shielding structure 203 , and the light-shielding structure 203 is completely protruded from the surface of the substrate.

在一些實施例中,各個遮光結構203的遮光材料可以相同也可以不同。In some embodiments, the light-shielding materials of each light-shielding structure 203 may be the same or different.

在一些實施例中,遮光結構203凸出於基板201表面部分的遮光材料與位於基板201內部分的遮光材料可以相同也可以不同。In some embodiments, the light-shielding material of the light-shielding structure 203 protruding from the surface of the substrate 201 and the light-shielding material of the inner portion of the substrate 201 may be the same or different.

在一些實施例中,參考圖26A、圖26B、圖26C,圖26A、圖26B、圖26C是本公開實施例提供的製作透鏡光柵時形成的透鏡的另一剖面結構示意圖,對於基板201上遮光結構203凸出於基板201的情況,在基板的一面形成至少兩個透鏡,包括:In some embodiments, referring to FIGS. 26A , 26B, and 26C, FIGS. 26A , 26B, and 26C are another cross-sectional structural schematic diagram of a lens formed when a lens grating is fabricated according to an embodiment of the present disclosure. For the light shielding on the substrate 201 When the structure 203 protrudes from the substrate 201, at least two lenses are formed on one side of the substrate, including:

在基板201上遮光結構203凸出於基板的一面,設置至少兩個透鏡205,使得遮光結構203凸出的部分對應於至少兩個透鏡205中相鄰透鏡的交界區域。On the substrate 201 , the light-shielding structure 203 protrudes from one side of the substrate, and at least two lenses 205 are provided, so that the protruding portion of the light-shielding structure 203 corresponds to the boundary area between adjacent lenses of the at least two lenses 205 .

參考圖28、圖29,圖28和圖29是本公開實施例提供的製作透鏡光柵時形成的基板的另一剖面結構示意圖,在一些實施例中,基板可以為部分基板:Referring to FIGS. 28 and 29 , FIGS. 28 and 29 are another schematic cross-sectional structural diagram of a substrate formed when a lens grating is fabricated according to an embodiment of the present disclosure. In some embodiments, the substrate may be a partial substrate:

在基板上形成至少一個遮光結構,可以包括:Forming at least one light-shielding structure on the substrate may include:

在部分基板301的一面形成遮光結構303;A light-shielding structure 303 is formed on one side of a part of the substrate 301;

在部分基板301形成有遮光結構303的一面鋪設基板材料304。The substrate material 304 is laid on the surface of the part of the substrate 301 on which the light shielding structure 303 is formed.

在一些實施例中,部分基板301上形成的遮光結構303,可以通過刻蝕、噴墨、壓印等方式形成,以下以刻蝕為例進行說明:In some embodiments, the light-shielding structures 303 formed on some of the substrates 301 may be formed by etching, inkjet, embossing, etc. The following description will be given by taking etching as an example:

在一些實施例中,參考圖27、圖28、圖29,圖27、圖28、圖29是本公開實施例提供的製作透鏡光柵時形成的基板的另一剖面結構示意圖,提供的基板為部分基板301;In some embodiments, referring to FIGS. 27 , 28 , and 29 , FIGS. 27 , 28 and 29 are another cross-sectional structural schematic diagram of a substrate formed when a lens grating is fabricated according to an embodiment of the present disclosure, and the provided substrate is a part of the substrate 301;

在基板上形成至少一個遮光結構,包括:At least one light-shielding structure is formed on the substrate, including:

在部分基板301的一面塗覆遮光材料,形成遮光層302;A light-shielding material is coated on one side of part of the substrate 301 to form a light-shielding layer 302;

對遮光層302進行刻蝕,形成遮光結構303;etching the light-shielding layer 302 to form a light-shielding structure 303;

在部分基板301形成有遮光結構303的一面鋪設基板材料304,之後可在基板的任意一面設置該至少兩個透鏡。The substrate material 304 is laid on one side of the partial substrate 301 on which the light shielding structure 303 is formed, and then the at least two lenses can be arranged on any side of the substrate.

在一些實施例中,參考圖30、圖31、圖32、圖33、圖34,圖30是本公開實施例提供的製作透鏡光柵時形成的柱狀透鏡的排列方式示意圖,圖31是本公開實施例提供的製作透鏡光柵時形成的柱狀透鏡的另一排列方式示意圖,圖32是本公開實施例提供的製作透鏡光柵時形成的球面透鏡的排列方式示意圖,圖33是本公開實施例提供的製作透鏡光柵時形成的球面透鏡的另一排列方式示意圖,圖34是本公開實施例提供的製作透鏡光柵時形成的柱狀透鏡和球面透鏡的排列方式示意圖,基板401上,設置的透鏡402包括柱狀透鏡4021和球面透鏡4022中的至少一種。In some embodiments, referring to FIGS. 30 , 31 , 32 , 33 , and 34 , FIG. 30 is a schematic diagram of the arrangement of the lenticular lenses formed when manufacturing the lens grating provided by the embodiments of the present disclosure, and FIG. 31 is the present disclosure Another schematic diagram of the arrangement of the cylindrical lenses formed in the manufacture of the lens grating provided by the embodiment, FIG. 32 is a schematic diagram of the arrangement of the spherical lenses formed in the manufacture of the lens grating provided by the embodiment of the present disclosure, and FIG. 33 is provided by the embodiment of the present disclosure. Fig. 34 is a schematic diagram of another arrangement of spherical lenses formed during the manufacture of lens gratings according to an embodiment of the present disclosure. Fig. 34 is a schematic diagram of the arrangement of cylindrical lenses and spherical lenses formed during the manufacture of lens gratings provided by an embodiment of the present disclosure. On the substrate 401, a lens 402 is provided. At least one of a cylindrical lens 4021 and a spherical lens 4022 is included.

在一些實施例中,參考圖30和圖31,透鏡402包括柱狀透鏡4021;In some embodiments, referring to FIGS. 30 and 31 , the lens 402 includes a lenticular lens 4021;

在基板401上形成至少兩個透鏡包括:Forming at least two lenses on the substrate 401 includes:

將柱狀透鏡4021中的部分或全部呈平行分佈在基板上。Some or all of the lenticular lenses 4021 are distributed on the substrate in parallel.

在一些實施例中,參考圖32和圖33,透鏡402包括球面透鏡4022;In some embodiments, referring to Figures 32 and 33, the lens 402 comprises a spherical lens 4022;

在基板401上形成至少兩個透鏡包括:Forming at least two lenses on the substrate 401 includes:

將球面透鏡4022中的部分或全部呈陣列排佈在基板上。Some or all of the spherical lenses 4022 are arranged on the substrate in an array.

參考圖34,在基板401上形成至少兩個透鏡包括柱狀透鏡4021和球面透鏡4022。Referring to FIG. 34 , at least two lenses including a cylindrical lens 4021 and a spherical lens 4022 are formed on the substrate 401 .

在一些實施例中,多個柱狀透鏡4021可以是柱狀凹透鏡,也可以是柱狀凸透鏡,也可以是柱狀凸透鏡和柱狀凹透鏡的組合。多個球面透鏡4022可以是球面凹透鏡,也可以是球面凸透鏡,還可以是球面凹透鏡和球面凸透鏡的組合。此外,多個透鏡還可以是柱狀凸透鏡和球面凸透鏡的組合、柱狀凸透鏡和球面凹透鏡的組合、柱狀凹透鏡和球面凹透鏡的組合,柱狀凹透鏡和球面凸透鏡的組合。透鏡102的數量、類型根據實際需求設置。In some embodiments, the plurality of lenticular lenses 4021 may be concave lenticular lenses, or may be lenticular convex lenses, or may be a combination of lenticular convex lenses and lenticular concave lenses. The plurality of spherical lenses 4022 may be spherical concave lenses, spherical convex lenses, or a combination of spherical concave lenses and spherical convex lenses. In addition, the plurality of lenses may also be a combination of a cylindrical convex lens and a spherical convex lens, a combination of a cylindrical convex lens and a spherical concave lens, a combination of a cylindrical concave lens and a spherical concave lens, and a combination of a cylindrical concave lens and a spherical convex lens. The number and type of the lenses 102 are set according to actual needs.

在一些實施例中,無論透鏡包括柱狀透鏡、球面透鏡還是具有其他形狀,透鏡的表面的至少一條曲線在宏觀上可以是圓形或非圓形,例如:橢圓形、雙曲線形、拋物線形,等。可選地,透鏡的表面的至少一條曲線在微觀上可以呈多邊形等非圓形的形狀。可選地,可以根據工藝需求等實際情況確定透鏡的形狀,例如:透鏡的表面的形狀。In some embodiments, whether the lens comprises a cylindrical lens, a spherical lens, or has other shapes, at least one curve of the surface of the lens may be macroscopically circular or non-circular, such as: elliptical, hyperbolic, parabolic ,Wait. Optionally, at least one curve of the surface of the lens may be in a non-circular shape such as a polygon in microscopic view. Optionally, the shape of the lens may be determined according to actual conditions such as process requirements, for example, the shape of the surface of the lens.

本公開實施例提供的透鏡光柵的製作方法,形成的透鏡光柵的遮光結構,能夠有效減少或消除兩個透鏡交界處産生的雜散光,從而有效提高該區域投射的圖像質量。The method for fabricating a lens grating provided by the embodiments of the present disclosure, and the formed light-shielding structure of the lens grating can effectively reduce or eliminate stray light generated at the junction of two lenses, thereby effectively improving the image quality projected in this area.

以上描述和圖式充分地示出了本公開的實施例,以使本領域技術人員能夠實踐它們。其他實施例可以包括結構的、邏輯的、電氣的、過程的以及其他的改變。實施例僅代表可能的變化。除非明確要求,否則單獨的部件和功能是可選的,並且操作的順序可以變化。一些實施例的部分和特徵可以被包括在或替換其他實施例的部分和特徵。本公開實施例的範圍包括申請專利範圍的整個範圍,以及申請專利範圍的所有可獲得的等同物。當用於本申請中時,雖然術語“第一”、“第二”等可能會在本申請中使用以描述各元件,但這些元件不應受到這些術語的限制。這些術語僅用於將一個元件與另一個元件區別開。比如,在不改變描述的含義的情況下,第一元件可以叫做第二元件,並且同樣地,第二元件可以叫做第一元件,只要所有出現的“第一元件”一致重命名並且所有出現的“第二元件”一致重命名即可。第一元件和第二元件都是元件,但可以不是相同的元件。而且,本申請中使用的用詞僅用於描述實施例並且不用於限制申請專利範圍。如在實施例以及申請專利範圍的描述中使用的,除非上下文清楚地表明,否則單數形式的“一個”(a)、“一個”(an)和“所述”(the)旨在同樣包括複數形式。類似地,如在本申請中所使用的術語“和/或”是指包含一個或一個以上相關聯的列出的任何以及所有可能的組合。另外,當用於本申請中時,術語“包括”(comprise)及其變型“包括”(comprises)和/或包括(comprising)等指陳述的特徵、整體、步驟、操作、元素,和/或組件的存在,但不排除一個或一個以上其它特徵、整體、步驟、操作、元素、組件和/或這些的分組的存在或添加。在沒有更多限制的情況下,由語句“包括一個…”限定的要素,並不排除在包括該要素的過程、方法或者設備中還存在另外的相同要素。本文中,每個實施例重點說明的可以是與其他實施例的不同之處,各個實施例之間相同相似部分可以互相參見。對於實施例公開的方法、産品等而言,如果其與實施例公開的方法部分相對應,那麽相關之處可以參見方法部分的描述。The foregoing description and drawings sufficiently illustrate the embodiments of the present disclosure to enable those skilled in the art to practice them. Other embodiments may include structural, logical, electrical, process, and other changes. The examples represent only possible variations. Unless expressly required, individual components and functions are optional and the order of operations may vary. Portions and features of some embodiments may be included in or substituted for those of other embodiments. The scope of the disclosed embodiments includes the entire scope of the claimed scope, along with all available equivalents to the claimed scope. When used in this application, although the terms "first," "second," etc. may be used in this application to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, without changing the meaning of the description, a first element could be termed a second element, and similarly, a second element could be termed a first element, so long as all occurrences of "the first element" were consistently renamed and all occurrences of "the first element" were named consistently The "second element" can be renamed consistently. The first element and the second element are both elements, but may not be the same element. Also, the terms used in this application are used to describe the embodiments only and not to limit the scope of the claims. As used in the description of the examples and the claimed scope, the singular forms "a" (a), "an" (an) and "the" (the) are intended to include the plural referents as well, unless the context clearly dictates otherwise. form. Similarly, the term "and/or" as used in this application is meant to include any and all possible combinations of one or more of the associated listings. Additionally, as used in this application, the term "comprise" and its variants "comprises" and/or including (comprising), etc., refer to stated features, integers, steps, operations, elements, and/or The presence of a component does not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and/or groupings of these. Without further limitation, an element qualified by the phrase "comprising a..." does not preclude the presence of additional identical elements in the process, method, or device that includes the element. Herein, each embodiment may focus on the differences from other embodiments, and the same and similar parts between the various embodiments may refer to each other. For the methods, products, etc. disclosed in the embodiments, if they correspond to the method section disclosed in the embodiments, reference may be made to the description of the method section for relevant parts.

本領域技術人員可以意識到,結合本文中所公開的實施例描述的各示例的單元及算法步驟,能夠以電子硬件、或者計算機軟件和電子硬件的結合來實現。這些功能究竟以硬件還是軟件方式來執行,可以取決於技術方案的特定應用和設計約束條件。本領域技術人員可以對每個特定的應用來使用不同方法以實現所描述的功能,但是這種實現不應認為超出本公開實施例的範圍。本領域技術人員可以清楚地瞭解到,為描述的方便和簡潔,上述描述的系統、裝置和單元的工作過程,可以參考前述方法實施例中的對應過程,在此不再贅述。Those skilled in the art can realize that the units and algorithm steps of each example described in conjunction with the embodiments disclosed herein can be implemented by electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software may depend on the specific application and design constraints of the technical solution. Skilled artisans may use different methods for implementing the described functionality for each particular application, but such implementations should not be considered beyond the scope of the disclosed embodiments. Those skilled in the art can clearly understand that, for the convenience and brevity of the description, for the working process of the above-described systems, devices and units, reference may be made to the corresponding processes in the foregoing method embodiments, which will not be repeated here.

本文所披露的實施例中,所揭露的方法、産品(包括但不限於裝置、設備等),可以通過其它的方式實現。例如,以上所描述的裝置實施例僅僅是示意性的,例如,單元的劃分,可以僅僅為一種邏輯功能劃分,實際實現時可以有另外的劃分方式,例如多個單元或組件可以結合或者可以集成到另一個系統,或一些特徵可以忽略,或不執行。另外,所顯示或討論的相互之間的耦合或直接耦合或通信連接可以是通過一些接口,裝置或單元的間接耦合或通信連接,可以是電性,機械或其它的形式。作為分離部件說明的單元可以是或者也可以不是物理上分開的,作為單元顯示的部件可以是或者也可以不是物理單元,即可以位於一個地方,或者也可以分佈到多個網路單元上。可以根據實際的需要選擇其中的部分或者全部單元來實現本實施例。另外,在本公開實施例中的各功能單元可以集成在一個處理單元中,也可以是各個單元單獨物理存在,也可以兩個或兩個以上單元集成在一個單元中。In the embodiments disclosed herein, the disclosed methods and products (including but not limited to apparatuses, devices, etc.) may be implemented in other ways. For example, the apparatus embodiments described above are only illustrative. For example, the division of units may only be a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated. to another system, or some features can be ignored, or not implemented. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be through some interfaces, indirect coupling or communication connection of devices or units, and may be in electrical, mechanical or other forms. Units described as separate components may or may not be physically separated, and components shown as units may or may not be physical units, that is, may be located in one place, or may be distributed over multiple network units. This embodiment may be implemented by selecting some or all of the units according to actual needs. In addition, each functional unit in the embodiment of the present disclosure may be integrated into one processing unit, or each unit may exist physically alone, or two or more units may be integrated into one unit.

101:基板 102:透鏡 103:遮光結構 104:開口 105:基板材料 201:基板 202:開口 203:遮光結構 204:基板材料 205:透鏡 206:遮光層 301:部分基板 302:遮光層 303:遮光結構 304:基板材料 401:基板 4021:柱狀透鏡 4022:球面透鏡101: Substrate 102: Lens 103: Shading structure 104: Opening 105: Substrate material 201: Substrate 202: Opening 203: Shading structure 204: Substrate material 205: Lens 206: shading layer 301: Partial substrate 302: shading layer 303: Shading structure 304: Substrate Material 401: Substrate 4021: Cylindrical lens 4022: Spherical Lens

一個或多個實施例通過與之對應的圖式進行示例性說明,這些示例性說明和圖式並不構成對實施例的限定,圖式中具有相同參考數字標號的元件示為類似的元件,圖式不構成比例限制,並且其中:One or more embodiments are exemplified by the corresponding drawings, which do not constitute limitations of the embodiments, and elements with the same reference numerals in the drawings are shown as similar elements, The drawings do not constitute a limitation of scale, and where:

圖1是本公開實施例提供的透鏡光柵的製作方法的流程示意圖;1 is a schematic flowchart of a method for manufacturing a lens grating provided by an embodiment of the present disclosure;

圖2是本公開實施例提供的製作透鏡光柵時採用的基板的剖面結構示意圖;FIG. 2 is a schematic cross-sectional structural diagram of a substrate used in manufacturing a lens grating provided by an embodiment of the present disclosure;

圖3是本公開實施例提供的製作透鏡光柵時形成遮光結構和透鏡的流程示意圖;3 is a schematic flowchart of forming a light-shielding structure and a lens when manufacturing a lens grating according to an embodiment of the present disclosure;

圖4是本公開實施例提供的製作透鏡光柵時形成的透鏡的剖面結構示意圖;4 is a schematic cross-sectional structure diagram of a lens formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖5是本公開實施例提供的製作透鏡光柵時形成的遮光結構的剖面結構示意圖;5 is a schematic cross-sectional structural diagram of a light-shielding structure formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖6是本公開實施例提供的製作透鏡光柵時形成的凹透鏡的剖面結構示意圖;6 is a schematic cross-sectional structural diagram of a concave lens formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖7是本公開實施例提供的製作透鏡光柵時形成的凹透鏡和凸透鏡的剖面結構示意圖;7 is a schematic cross-sectional structural diagram of a concave lens and a convex lens formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖8是本公開實施例提供的製作透鏡光柵時形成遮光結構的流程示意圖;8 is a schematic flowchart of forming a light-shielding structure when fabricating a lens grating according to an embodiment of the present disclosure;

圖9A、圖9B、圖9C是本公開實施例提供的製作透鏡光柵時形成的開口的剖面結構示意圖;9A, FIG. 9B, and FIG. 9C are schematic cross-sectional structural diagrams of openings formed when manufacturing a lens grating according to an embodiment of the present disclosure;

圖10A、圖10B是本公開實施例提供的製作透鏡光柵時在開口中完全填充遮光材料所形成的剖面結構示意圖;10A and 10B are schematic cross-sectional structural diagrams formed by completely filling light-shielding materials in the openings when fabricating a lens grating according to an embodiment of the present disclosure;

圖11A、圖11B、圖11C是本公開實施例提供的製作透鏡光柵時在開口中部分填充遮光材料所形成的剖面結構示意圖;11A , 11B, and 11C are schematic cross-sectional structural diagrams formed by partially filling the opening with a light-shielding material when fabricating a lens grating according to an embodiment of the present disclosure;

圖12A、圖12B、圖12C是本公開實施例提供的製作透鏡光柵時在開口中部分填充遮光材料之後填充基板材料所形成的剖面結構示意圖;12A, 12B, and 12C are schematic cross-sectional structural diagrams formed by partially filling the opening with a light-shielding material and then filling the substrate material when fabricating a lens grating according to an embodiment of the present disclosure;

圖13是本公開實施例提供的製作透鏡光柵時形成遮光結構和透鏡的另一流程示意圖;13 is another schematic flowchart of forming a light-shielding structure and a lens when fabricating a lens grating according to an embodiment of the present disclosure;

圖14是本公開實施例提供的製作透鏡光柵時形成的基板的另一剖面結構示意圖;14 is another cross-sectional structural schematic diagram of a substrate formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖15是本公開實施例提供的製作透鏡光柵時形成遮光結構的另一流程示意圖;15 is another schematic flowchart of forming a light-shielding structure when fabricating a lens grating according to an embodiment of the present disclosure;

圖16A、圖16B是本公開實施例提供的製作透鏡光柵時在基板上形成的開口的另一剖面結構示意圖;16A and 16B are another cross-sectional structural schematic diagram of an opening formed on a substrate when a lens grating is fabricated according to an embodiment of the present disclosure;

圖17A、圖17B是本公開實施例提供的製作透鏡光柵時在基板中完全填充遮光材料所形成的另一剖面結構示意圖;17A and 17B are another schematic cross-sectional structure diagrams formed by completely filling a light-shielding material in a substrate when fabricating a lens grating according to an embodiment of the present disclosure;

圖18A、圖18B是本公開實施例提供的製作透鏡光柵時在基板中部分填充遮光材料所形成的另一剖面結構示意圖;18A and 18B are another cross-sectional schematic diagram of a structure formed by partially filling a light-shielding material in a substrate when fabricating a lens grating according to an embodiment of the present disclosure;

圖19A、圖19B是本公開實施例提供的製作透鏡光柵時在基板中部分填充遮光材料之後填充基底材料所形成的另一剖面結構示意圖;FIGS. 19A and 19B are another cross-sectional structural schematic diagram formed by partially filling the substrate with a light-shielding material and then filling the base material when fabricating a lens grating according to an embodiment of the present disclosure;

圖20A、圖20B、圖20C、圖20D、圖20E是本公開實施例提供的製作透鏡光柵時形成的透鏡的另一剖面結構示意圖;20A, 20B, 20C, 20D, and 20E are another cross-sectional structural schematic diagram of a lens formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖21是本公開實施例提供的製作透鏡光柵時形成的凹透鏡的另一剖面結構示意圖;21 is another cross-sectional structural schematic diagram of a concave lens formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖22是本公開實施例提供的製作透鏡光柵時形成的凹透鏡和凸透鏡的另一剖面結構示意圖;22 is another cross-sectional structural schematic diagram of a concave lens and a convex lens formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖23A、圖23B、圖23C、圖23D是本公開實施例提供的製作透鏡光柵時刻蝕遮光層所形成的遮光結構的另一剖面結構示意圖;23A, FIG. 23B, FIG. 23C, and FIG. 23D are another cross-sectional structural schematic diagram of a light-shielding structure formed by etching a light-shielding layer while manufacturing a lens grating according to an embodiment of the present disclosure;

圖24是本公開實施例提供的製作透鏡光柵時在基板表面形成的遮光層的另一剖面結構示意圖;24 is another cross-sectional structural schematic diagram of the light shielding layer formed on the surface of the substrate during the manufacture of the lens grating provided by the embodiment of the present disclosure;

圖25是本公開實施例提供的製作透鏡光柵時在基板表面形成的遮光結構的另一剖面結構示意圖;25 is another cross-sectional structural schematic diagram of the light-shielding structure formed on the surface of the substrate when the lens grating is fabricated according to an embodiment of the present disclosure;

圖26A、圖26B、圖26C是本公開實施例提供的製作透鏡光柵時形成的透鏡的另一剖面結構示意圖;26A, 26B, and 26C are another cross-sectional structural schematic diagram of a lens formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖27、圖28、圖29是本公開實施例提供的製作透鏡光柵時形成的基板的另一剖面結構示意圖;27 , 28 and 29 are another cross-sectional structural schematic diagram of a substrate formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖30是本公開實施例提供的製作透鏡光柵時形成的柱狀透鏡的排列方式示意圖;FIG. 30 is a schematic diagram of an arrangement of cylindrical lenses formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖31是本公開實施例提供的製作透鏡光柵時形成的柱狀透鏡的另一排列方式示意圖;31 is a schematic diagram of another arrangement of the lenticular lenses formed when the lens grating is fabricated according to an embodiment of the present disclosure;

圖32是本公開實施例提供的製作透鏡光柵時形成的球面透鏡的排列方式示意圖;32 is a schematic diagram of an arrangement of spherical lenses formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖33是本公開實施例提供的製作透鏡光柵時形成的球面透鏡的另一排列方式示意圖;33 is a schematic diagram of another arrangement of spherical lenses formed when a lens grating is fabricated according to an embodiment of the present disclosure;

圖34是本公開實施例提供的製作透鏡光柵時形成的柱狀透鏡和球面透鏡的排列方式示意圖。FIG. 34 is a schematic diagram of an arrangement of cylindrical lenses and spherical lenses formed when a lens grating is fabricated according to an embodiment of the present disclosure.

Claims (22)

一種透鏡光柵的製作方法,包括: 提供基板; 在所述基板上形成至少一個遮光結構以及至少兩個透鏡,使得所述遮光結構對應於所述至少兩個透鏡中相鄰透鏡的交界區域。A method for manufacturing a lens grating, comprising: provide the substrate; At least one light-shielding structure and at least two lenses are formed on the substrate, so that the light-shielding structure corresponds to a boundary area of adjacent lenses among the at least two lenses. 如請求項1所述的透鏡光柵的製作方法,其中,所述基板為整體基板。The method for manufacturing a lens grating according to claim 1, wherein the substrate is an integral substrate. 如請求項2所述的透鏡光柵的製作方法,其中,在所述基板上形成至少一個遮光結構以及至少兩個透鏡,包括: 在所述基板的一面形成所述至少兩個透鏡; 在所述基板上形成所述至少一個遮光結構。The method for manufacturing a lens grating according to claim 2, wherein at least one light-shielding structure and at least two lenses are formed on the substrate, comprising: forming the at least two lenses on one side of the substrate; The at least one light shielding structure is formed on the substrate. 如請求項3所述的透鏡光柵的製作方法,其中,在所述基板上形成所述至少一個遮光結構,包括: 在所述基板上對應於所述至少兩個透鏡中相鄰透鏡的交界區域,設置開口; 在所述開口中填充遮光材料,形成所述遮光結構。The method for manufacturing a lens grating according to claim 3, wherein forming the at least one light-shielding structure on the substrate comprises: An opening is provided on the substrate corresponding to the boundary area between adjacent lenses of the at least two lenses; A light-shielding material is filled in the opening to form the light-shielding structure. 如請求項4所述的透鏡光柵的製作方法,其中,在所述基板上對應於所述至少兩個透鏡中相鄰透鏡的交界區域,設置開口,包括: 所述基板上對應於所述至少兩個透鏡中相鄰透鏡的交界區域,沿所述基板的厚度方向上設置開口。The method for manufacturing a lens grating according to claim 4, wherein an opening is provided on the substrate corresponding to a boundary area between adjacent lenses of the at least two lenses, comprising: An opening is provided on the substrate along the thickness direction of the substrate corresponding to the boundary area between adjacent lenses among the at least two lenses. 如請求項5所述的透鏡光柵的製作方法,其中,沿所述基板的厚度方向設置開口,包括: 從所述基板背離所述至少兩個透鏡的一面,形成開口,使得所述開口延伸至對應的透鏡內,或者延伸至所述基板內,或者貫穿所述基板。The method for manufacturing a lens grating according to claim 5, wherein arranging openings along the thickness direction of the substrate comprises: An opening is formed from a side of the substrate facing away from the at least two lenses, so that the opening extends into the corresponding lens, or extends into the substrate, or penetrates through the substrate. 如請求項6所述的透鏡光柵的製作方法,其中,在所述開口中填充遮光材料,包括: 在所述開口中完全填充遮光材料;或者, 在所述開口中部分填充遮光材料。The method for manufacturing a lens grating according to claim 6, wherein filling the opening with a light-shielding material includes: Fill the opening completely with light-shielding material; or, The opening is partially filled with light-shielding material. 如請求項7所述的透鏡光柵的製作方法,其中,在所述開口中部分填充遮光材料之後,還包括: 在所述遮光材料表面填充材料。The method for manufacturing a lens grating according to claim 7, wherein after the opening is partially filled with a light-shielding material, the method further comprises: Filling material on the surface of the light-shielding material. 如請求項2所述的透鏡光柵的製作方法,其中,在所述基板上形成至少一個遮光結構以及至少兩個透鏡,包括: 在所述基板上形成所述至少一個遮光結構; 在所述基板的一面形成所述至少兩個透鏡。The method for manufacturing a lens grating according to claim 2, wherein at least one light-shielding structure and at least two lenses are formed on the substrate, comprising: forming the at least one light-shielding structure on the substrate; The at least two lenses are formed on one surface of the substrate. 如請求項9所述的透鏡光柵的製作方法,其中,在所述基板上形成所述至少一個遮光結構,包括: 在所述基板的預設位置設置開口; 在所述開口中填充遮光材料,形成所述遮光結構。The method for manufacturing a lens grating according to claim 9, wherein forming the at least one light-shielding structure on the substrate comprises: an opening is provided at a preset position of the substrate; A light-shielding material is filled in the opening to form the light-shielding structure. 如請求項10所述的透鏡光柵的製作方法,其中,在所述基板的預設位置設置開口,包括: 從所述基板的一面,沿所述基板的厚度方向上設置開口,所述開口延伸至所述基板的另一面或者延伸至所述基板內。The method for manufacturing a lens grating according to claim 10, wherein setting the opening at a preset position of the substrate includes: From one side of the substrate, an opening is provided along the thickness direction of the substrate, and the opening extends to the other side of the substrate or extends into the substrate. 如請求項11所述的透鏡光柵的製作方法,其中,在所述開口中填充遮光材料,包括: 在所述開口中完全填充遮光材料;或者, 在所述開口中部分填充遮光材料。The method for manufacturing a lens grating according to claim 11, wherein filling the opening with a light-shielding material includes: Fill the opening completely with light-shielding material; or, The opening is partially filled with light-shielding material. 如請求項12所述的透鏡光柵的製作方法,其中,在所述開口中部分填充遮光材料之後,還包括: 在所述遮光材料表面填充材料。The method for manufacturing a lens grating according to claim 12, wherein after the opening is partially filled with a light-shielding material, the method further comprises: Filling material on the surface of the light-shielding material. 如請求項10至13中任一項所述的透鏡光柵的製作方法,其中,在所述基板的一面形成所述至少兩個透鏡,包括: 在所述基板的任意一面形成所述至少兩個透鏡。The method for manufacturing a lens grating according to any one of claims 10 to 13, wherein forming the at least two lenses on one side of the substrate comprises: The at least two lenses are formed on either side of the substrate. 如請求項12所述的透鏡光柵的製作方法,其中,在所述開口中完全填充遮光材料之後,還包括: 在所述基板上靠近所述開口的開口端的一面,對應於開口區域形成遮光材料,使得形成的所述遮光結構部分凸出於所述基板的表面。The method for manufacturing a lens grating according to claim 12, wherein after the light-shielding material is completely filled in the opening, the method further comprises: On the side of the substrate close to the opening end of the opening, a light-shielding material is formed corresponding to the opening area, so that the formed light-shielding structure partially protrudes from the surface of the substrate. 如請求項9所述的透鏡光柵的製作方法,其中,在所述基板上形成所述至少一個遮光結構,包括: 在所述基板的一面形成遮光結構,所述遮光結構完全凸出於所述基板的表面。The method for manufacturing a lens grating according to claim 9, wherein forming the at least one light-shielding structure on the substrate comprises: A light-shielding structure is formed on one side of the substrate, and the light-shielding structure completely protrudes from the surface of the substrate. 如請求項15或16所述的透鏡光柵的製作方法,其中,在所述基板的一面形成所述至少兩個透鏡,包括: 在所述基板上所述遮光結構凸出於所述基板的一面,設置所述至少兩個透鏡,使得所述遮光結構凸出的部分對應於所述至少兩個透鏡中相鄰透鏡的交界區域。The method for manufacturing a lens grating according to claim 15 or 16, wherein forming the at least two lenses on one side of the substrate comprises: On the substrate, the light-shielding structure protrudes from one side of the substrate, and the at least two lenses are arranged so that the protruding part of the light-shielding structure corresponds to the boundary area between adjacent lenses of the at least two lenses . 如請求項1所述的透鏡光柵的製作方法,其中,所述基板為部分基板: 在所述基板上形成至少一個遮光結構,包括: 在所述部分基板的一面形成遮光結構; 在所述部分基板形成有所述遮光結構的一面鋪設基板材料。The method for manufacturing a lens grating according to claim 1, wherein the substrate is a partial substrate: At least one light-shielding structure is formed on the substrate, including: forming a light-shielding structure on one side of the partial substrate; A substrate material is laid on one side of the partial substrate on which the light-shielding structure is formed. 如請求項3或9所述的透鏡光柵的製作方法,其中,形成的所述至少兩個透鏡包括凹透鏡和凸透鏡中的至少一種。The method for manufacturing a lens grating according to claim 3 or 9, wherein the at least two lenses formed include at least one of a concave lens and a convex lens. 如請求項19所述的透鏡光柵的製作方法,其中,形成的所述至少兩個透鏡包括柱狀透鏡和球面透鏡中的至少一種。The method for manufacturing a lens grating according to claim 19, wherein the at least two lenses formed include at least one of a cylindrical lens and a spherical lens. 如請求項20所述的透鏡光柵的製作方法,其中,所述至少兩個透鏡包括柱狀透鏡; 在所述基板上形成所述至少兩個透鏡包括: 將所述柱狀透鏡中的部分或全部呈平行分佈在所述基板上。The method for manufacturing a lens grating according to claim 20, wherein the at least two lenses comprise cylindrical lenses; Forming the at least two lenses on the substrate includes: Part or all of the lenticular lenses are distributed on the substrate in parallel. 如請求項20所述的透鏡光柵的製作方法,其中,所述至少兩個透鏡包括球面透鏡; 在所述基板上形成所述至少兩個透鏡包括: 將所述球面透鏡中的部分或全部呈陣列排佈在所述基板上。The method for manufacturing a lens grating according to claim 20, wherein the at least two lenses comprise spherical lenses; Forming the at least two lenses on the substrate includes: Part or all of the spherical lenses are arranged on the substrate in an array.
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