TW202134194A - Method for manufacturing glass film - Google Patents

Method for manufacturing glass film Download PDF

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TW202134194A
TW202134194A TW110105995A TW110105995A TW202134194A TW 202134194 A TW202134194 A TW 202134194A TW 110105995 A TW110105995 A TW 110105995A TW 110105995 A TW110105995 A TW 110105995A TW 202134194 A TW202134194 A TW 202134194A
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glass film
manufacturing
base material
conveying
back surface
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TW110105995A
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Chinese (zh)
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TWI834950B (en
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山城陸
森弘樹
桐畑洋平
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日商日本電氣硝子股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/16Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by roller conveyors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y70/00Materials specially adapted for additive manufacturing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H20/00Advancing webs
    • B65H20/10Advancing webs by a feed band against which web is held by fluid pressure, e.g. suction or air blast
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B17/00Forming molten glass by flowing-out, pushing-out, extruding or drawing downwardly or laterally from forming slits or by overflowing over lips
    • C03B17/06Forming glass sheets
    • C03B17/065Forming profiled, patterned or corrugated sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B9/00Blowing glass; Production of hollow glass articles
    • C03B9/10Blowing glass cylinders for sheet manufacture
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B9/00Blowing glass; Production of hollow glass articles
    • C03B9/30Details of blowing glass; Use of materials for the moulds
    • C03B9/36Blow heads; Supplying, ejecting or controlling the air
    • C03B9/3609Selection or characteristics of the blowing medium, e.g. gas composition, moisture content, cryogenic state
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/08PCBs, i.e. printed circuit boards
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Advancing Webs (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

This method for manufacturing a glass film includes a direction conversion step for converting a conveyance direction of a glass film G1 by means of a direction conversion device 3 from a vertical direction GY to a horizontal direction GX. The direction conversion step includes a deformation step for deforming the glass film G1 so that the rear surface G1Sb of the glass film assumes a convex shape.

Description

玻璃膜的製造方法Manufacturing method of glass film

本發明是有關於一種製造玻璃膜的方法。The present invention relates to a method of manufacturing a glass film.

如眾所周知,於用於液晶顯示器及有機電致發光(electroluminescent,EL)顯示器等面板顯示器(panel display)的板玻璃(plate glass)中,伴隨著對輕量化的要求的提高,薄板化得到推進,直至開發並製造出其厚度為300 μm以下、或薄板化至200 μm以下的玻璃膜(glass film)。As is well known, in plate glass used in panel displays (panel displays) such as liquid crystal displays and organic electroluminescent (EL) displays, as the demand for weight reduction has increased, thinning has been promoted. Until the development and manufacture of a glass film whose thickness is 300 μm or less, or thinned to 200 μm or less.

如上所述的玻璃膜可藉由例如以溢流下拉法(overflow downdraw method)為代表的製造方法來製造,所述製造方法包括:成形步驟,使帶狀的玻璃膜成形;退火步驟,一面於縱方向上搬運經成形的玻璃膜,一面實施退火處理;方向轉換步驟,將玻璃膜的搬運方向自縱方向轉換為橫方向;以及橫向搬運步驟,於橫方向上搬運經方向轉換的玻璃膜。The glass film as described above can be manufactured by, for example, a manufacturing method represented by an overflow downdraw method. The manufacturing method includes: a forming step to shape a ribbon-shaped glass film; and an annealing step to The shaped glass film is conveyed in the vertical direction while annealing treatment is performed on one side; the direction conversion step is to convert the conveying direction of the glass film from the vertical direction to the horizontal direction; and the lateral conveying step is to convey the glass film that has been changed in the horizontal direction.

但是,當採用如上所述的製造方法時,玻璃膜因其薄度而存在如下的情況:由於各種外部主要因素,而使得於縱方向上的搬運過程中,產生表面與背面中的任一側呈凸狀,另一側呈凹狀的彎曲變形,進而其彎曲變形的方向(凹凸的方向)以短週期發生調換。However, when the above-mentioned manufacturing method is adopted, the glass film has the following situation due to its thinness: due to various external factors, during the transportation process in the longitudinal direction, either side of the surface or the back surface is generated. It has a convex shape and a concave shape on the other side, and the direction of the bending deformation (the direction of the unevenness) is exchanged in a short cycle.

若如上所述,縱方向搬運過程中的玻璃膜的姿勢不穩定,則導入至方向轉換步驟時的玻璃膜的姿勢亦不固定,由於此時的姿勢,而有可能於玻璃膜中產生應力集中,導致所述玻璃膜的破損。此種破損會導致生產線的長期停止,且至重新開始生產線的運轉需要大量時間,因此成為使玻璃膜的生產率變差的主要因素。As described above, the posture of the glass film during vertical transport is unstable, and the posture of the glass film when introduced to the direction switching step is also not fixed. Due to the posture at this time, stress concentration may occur in the glass film. , Resulting in damage to the glass film. Such damage causes a long-term stop of the production line, and it takes a lot of time to restart the operation of the production line, and therefore becomes a main factor that deteriorates the productivity of the glass film.

因此,作為所述問題的解決對策,本申請人已提出專利文獻1所述的製造方法。於所述製造方法中,於橫向搬運步驟中,藉由橫向搬運部而對玻璃膜的寬度方向兩端部賦予推進橫方向上的搬運的第一推進力,對寬度方向中央部賦予第二推進力。藉由使第一推進力大於第二推進力,可於沿縱方向搬運著的一部分玻璃膜上,產生背面側呈凸狀、表面側呈凹狀的較佳變形。 [現有技術文獻] [專利文獻]Therefore, the applicant has already proposed the manufacturing method described in Patent Document 1 as a solution to the above-mentioned problem. In the manufacturing method, in the lateral conveying step, the lateral conveying portion applies a first propelling force for advancing conveyance in the lateral direction to both ends in the width direction of the glass film by the lateral conveying portion, and a second advancing force is given to the central portion in the width direction. force. By making the first propulsion force greater than the second propulsion force, a portion of the glass film conveyed in the longitudinal direction can be deformed with a convex shape on the back side and a concave shape on the surface side. [Prior Art Literature] [Patent Literature]

專利文獻1:日本專利特開2019-104642號公報Patent Document 1: Japanese Patent Laid-Open No. 2019-104642

[發明所欲解決之課題] 但是,於所述製造方法中,於方向轉換步驟後的橫向搬運步驟中對玻璃膜賦予規定的各推進力。即,於與玻璃膜所變形的部位相離的位置對所述玻璃膜施加力,因此根據玻璃膜的成形條件或搬運條件,存在其效果未必說得上充分的情況。[The problem to be solved by the invention] However, in the above-mentioned manufacturing method, predetermined respective propelling forces are applied to the glass film in the lateral conveying step after the direction changing step. That is, a force is applied to the glass film at a position away from the portion where the glass film is deformed. Therefore, depending on the molding conditions or transportation conditions of the glass film, the effect may not necessarily be sufficient.

欲適當地控制玻璃膜的變形,理想的是於與所述變形所產生的部位相近的位置將力賦予至玻璃膜。In order to appropriately control the deformation of the glass film, it is desirable to apply force to the glass film at a position close to the portion where the deformation occurs.

因此,本發明的技術課題在於,於方向轉換步驟中防止製造過程中欠佳的方向上的玻璃膜的彎曲變形。Therefore, the technical problem of the present invention is to prevent the bending deformation of the glass film in the unfavorable direction during the manufacturing process in the direction switching step.

[解決課題之手段] 本發明用以解決所述課題,本發明的玻璃膜的製造方法包括:成形步驟,藉由成形裝置而使帶狀的玻璃膜成形;以及搬運步驟,搬運所述玻璃膜;所述玻璃膜的製造方法的特徵在於:所述搬運步驟包括:縱向搬運步驟,藉由縱向搬運裝置而於縱方向上搬運所述玻璃膜;方向轉換步驟,將所述玻璃膜的搬運方向藉由方向轉換裝置而自所述縱方向轉換為橫方向;以及橫向搬運步驟,藉由橫向搬運裝置而於所述橫方向上搬運所述玻璃膜;所述玻璃膜包括於所述橫向搬運步驟中成為上表面的表面、以及位於所述表面的相反側的背面,所述方向轉換步驟包括變形步驟,所述變形步驟使所述玻璃膜變形,以使所述背面呈凸狀。[Means to solve the problem] The present invention is to solve the problem. The method of manufacturing the glass film of the present invention includes: a forming step of forming a ribbon-shaped glass film by a forming device; and a conveying step of conveying the glass film; The manufacturing method is characterized in that: the conveying step includes: a longitudinal conveying step of conveying the glass film in a longitudinal direction by a longitudinal conveying device; a direction switching step of conveying the glass film in a direction changing device Converting from the longitudinal direction to the lateral direction; and a lateral conveying step in which the glass film is conveyed in the lateral direction by a lateral conveying device; the glass film includes a surface that becomes an upper surface in the lateral conveying step , And a back surface located on the opposite side of the surface, the direction conversion step includes a deforming step, and the deforming step deforms the glass film so that the back surface is convex.

根據所述結構,於方向轉換步驟中包括使玻璃膜變形,以使背面呈凸狀的變形步驟,藉此可確實地控制所述玻璃膜的變形。因此,可防止於方向轉換步驟中玻璃膜的欠佳的彎曲變形。According to this configuration, the step of changing the direction includes the step of deforming the glass film so that the back surface is convex, whereby the deformation of the glass film can be reliably controlled. Therefore, it is possible to prevent poor bending deformation of the glass film in the direction switching step.

於本方法中,亦可為:所述方向轉換裝置包括變形裝置,所述變形裝置藉由利用氣流,而使所述玻璃膜變形,以使所述背面呈凸狀。In this method, it may also be that the direction conversion device includes a deforming device that deforms the glass film by using airflow, so that the back surface is convex.

於本方法中,亦可為:所述變形裝置包括噴射氣體的噴附部,藉由使所述氣流抵碰至所述玻璃膜的所述表面,而使所述玻璃膜變形,以使所述背面呈凸狀,所述氣流是藉由自所述噴附部噴射的所述氣體而產生。In this method, it may also be that: the deformation device includes a spraying part that sprays gas, and the gas flow is pressed against the surface of the glass film to deform the glass film, so that the glass film is deformed. The back surface is convex, and the air flow is generated by the gas sprayed from the spray part.

又,亦可為:所述方向轉換裝置包括:限制輥,配置於所述縱向搬運裝置的下方,並且與所述玻璃膜的所述表面接觸;以及輥式輸送機(roller conveyer),配置於所述輥的下方位置,並且支持所述背面;所述噴附部配置於所述限制輥與所述輥式輸送機之間。Alternatively, the direction changing device may include: a restricting roller arranged below the longitudinal conveying device and in contact with the surface of the glass film; and a roller conveyor (roller conveyer) arranged at The position below the roller and supports the back surface; the spray attachment part is arranged between the restricting roller and the roller conveyor.

根據所述結構,於已藉由限制輥而限制玻璃膜的位置的狀態下,利用噴附部的氣流使玻璃膜變形,可確實地且高精度地控制所述玻璃膜的變形。According to the above configuration, in a state where the position of the glass film is restricted by the restriction roller, the glass film is deformed by the airflow of the spray part, and the deformation of the glass film can be reliably and accurately controlled.

所述變形裝置亦可包括調整所述氣流的氣流調整部。藉由利用氣流調整部調整來自氣流產生部的氣流,可根據玻璃膜的尺寸或搬運條件,使所述玻璃膜適當變形。The deformation device may also include an air flow adjusting part for adjusting the air flow. By adjusting the air flow from the air flow generating part by the air flow adjusting part, the glass film can be appropriately deformed according to the size of the glass film or the conveying conditions.

所述噴附部亦可使所述氣流抵碰至所述玻璃膜的所述表面的寬度方向中央部。The spray part may also make the air flow abut against the center part in the width direction of the surface of the glass film.

亦可為:所述變形裝置包括噴射氣體的噴附部,藉由使所述氣流抵碰至所述玻璃膜的所述背面,而使所述玻璃膜變形,以使所述背面呈凸狀,所述氣流是藉由自所述噴附部噴射的所述氣體而產生。It may also be that: the deforming device includes a spraying part for injecting gas, and by making the air flow to hit the back surface of the glass film, the glass film is deformed so that the back surface is convex The air flow is generated by the gas sprayed from the spray part.

此時,所述噴附部亦可使所述氣流抵碰至所述玻璃膜的所述背面的寬度方向端部。At this time, the spray part may also make the air flow abut the width direction end of the back surface of the glass film.

於本方法中,亦可為:所述變形裝置包括抽吸氣體的抽吸部,所述抽吸部藉由抽吸所述玻璃膜的所述背面側的空氣,而使所述玻璃膜變形,以使所述背面呈凸狀。In this method, it may be that: the deformation device includes a suction part that sucks gas, and the suction part deforms the glass film by sucking air on the back side of the glass film , So that the back surface is convex.

此時,所述抽吸部亦可抽吸所述玻璃膜的所述背面的寬度方向中央部側的空氣。At this time, the said suction part may also suck the air of the width direction center part side of the said back surface of the said glass film.

於本方法中,亦可為:所述橫向搬運步驟包括如下的步驟,即,藉由所述橫向搬運裝置,而對所述玻璃膜的寬度方向兩端部賦予推進所述橫方向上的搬運的第一推進力,並且對所述玻璃膜的寬度方向中央部賦予推進所述橫方向上的搬運的第二推進力,所述第一推進力大於所述第二推進力。In this method, it may be that: the lateral conveying step includes the following steps, that is, by the lateral conveying device, the both ends of the glass film in the width direction are given to push the conveying in the lateral direction. The first propelling force of the glass film, and a second propelling force for advancing conveyance in the lateral direction is given to the center portion in the width direction of the glass film, and the first propelling force is greater than the second propelling force.

[發明的效果] 根據本發明,可於方向轉換步驟中防止製造過程中欠佳的方向上的玻璃膜的彎曲變形。[Effects of the invention] According to the present invention, it is possible to prevent bending deformation of the glass film in a poor direction during the manufacturing process in the direction switching step.

以下,一面參照圖式,一面對用以實施本發明的形態進行說明。圖1至圖5表示本發明的玻璃膜的製造方法的第一實施形態。Hereinafter, the mode for implementing the present invention will be described with reference to the drawings. 1 to 5 show the first embodiment of the method of manufacturing the glass film of the present invention.

圖1及圖2表示本方法中所使用的玻璃膜(玻璃捲筒(glass roll))的製造裝置的整體結構。製造裝置1包括:成形裝置2,利用熔融玻璃使帶狀的母材玻璃膜(玻璃帶(glass ribbon))G1成形;方向轉換裝置3,轉換母材玻璃膜G1的行進方向;橫向搬運裝置4,沿橫方向GX搬運母材玻璃膜G1;以及捲繞裝置5,去除母材玻璃膜G1的寬度方向端部Ga、寬度方向端部Gb的多餘部分,將寬度方向中央部Gc作為製品玻璃膜G2加以捲繞而形成玻璃捲筒GR。1 and 2 show the overall structure of a glass film (glass roll) manufacturing apparatus used in this method. The manufacturing device 1 includes: a forming device 2, which uses molten glass to shape a ribbon-shaped base material glass film (glass ribbon) G1; a direction changing device 3, which changes the traveling direction of the base material glass film G1; and a lateral conveying device 4 , The base material glass film G1 is conveyed in the horizontal direction GX; and the winding device 5 removes the excess part of the width direction end Ga and the width direction end Gb of the base material glass film G1, and uses the width direction center Gc as the product glass film G2 is wound to form a glass roll GR.

於本說明書中,所謂「橫方向」,是包括水平方向、以及相對於水平方向成固定角度的方向的概念。所謂「縱方向」,是指包括鉛垂方向、以及相對於鉛垂方向成固定角度的方向的概念。所謂母材玻璃膜G1的「寬度方向端部」(Ga、Gb),是指自所述母材玻璃膜G1的寬度方向兩端位置起至所述母材玻璃膜G1的整個寬度方向尺寸的5%以上且10%以下為止的區域。所謂母材玻璃膜G1的「寬度方向中央部」(Gc),是指所述母材玻璃膜G1的除寬度方向端部以外的區域。In this specification, the "horizontal direction" is a concept that includes a horizontal direction and a direction at a fixed angle with respect to the horizontal direction. The "longitudinal direction" refers to a concept including a vertical direction and a direction at a fixed angle with respect to the vertical direction. The "width direction end" (Ga, Gb) of the base material glass film G1 refers to the width direction dimension from the width direction ends of the base material glass film G1 to the entire width direction of the base material glass film G1 The area from 5% to 10%. The "width direction center portion" (Gc) of the base material glass film G1 refers to a region other than the width direction end portions of the base material glass film G1.

製品玻璃膜G2的厚度設為300 μm以下,較佳設為100 μm以下。製品玻璃膜G2包括於利用橫向搬運裝置4的搬運過程中成為上表面的第一主面G2Sa、以及位於第一主面G2Sa的相反側的第二主面G2Sb。以下,於母材玻璃膜G1中,將與製品玻璃膜G2的第一主面G2Sa相對應的面(於利用橫向搬運裝置4的搬運過程中可能成為上表面的面)稱為表面G1Sa,將與製品玻璃膜G2的第二主面G2Sb相對應的面(位於表面G1Sa的相反側,於利用橫向搬運裝置4的搬運過程中可能成為下表面的面)稱為背面G1Sb。當於第一主面G2Sa實施高品質的成膜等時,第一主面G2Sa成為品質保證面。再者,於母材玻璃膜G1的寬度方向兩端,形成有厚度尺寸大於其他部分的耳部Gd。The thickness of the product glass film G2 is set to 300 μm or less, preferably 100 μm or less. The product glass film G2 includes the first main surface G2Sa which becomes the upper surface during the conveyance by the lateral conveying device 4, and the second main surface G2Sb located on the opposite side of the first main surface G2Sa. Hereinafter, in the base material glass film G1, the surface corresponding to the first main surface G2Sa of the product glass film G2 (the surface that may become the upper surface during conveyance by the lateral conveying device 4) is referred to as the surface G1Sa. The surface corresponding to the second main surface G2Sb of the product glass film G2 (the surface located on the opposite side of the surface G1Sa and which may become the lower surface during the conveyance by the lateral conveying device 4) is called the back surface G1Sb. When high-quality film formation or the like is performed on the first main surface G2Sa, the first main surface G2Sa becomes a quality assurance surface. Furthermore, at both ends in the width direction of the base material glass film G1, ear parts Gd having a larger thickness than other parts are formed.

如圖1所示,成形裝置2包括:剖視為大致楔形的成形體6,於上端部形成有溢流槽6a;拉邊輥(edge roller)7,配置於成形體6的正下方,自表面與背面兩側夾持自成形體6溢出的熔融玻璃;以及退火爐(annealer)8,配備於拉邊輥7的正下方。As shown in Fig. 1, the forming device 2 includes: a forming body 6 that is approximately wedge-shaped in cross-section, and an overflow groove 6a is formed at the upper end; The molten glass overflowing from the molded body 6 is clamped on both sides of the surface and the back surface;

成形裝置2使自成形體6的溢流槽6a的上方溢流的熔融玻璃沿兩側面分別流下,於下端使其合流而使膜狀的熔融玻璃成形。拉邊輥7限制熔融玻璃的寬度方向收縮而使其成為規定寬度的母材玻璃膜G1。The forming apparatus 2 causes the molten glass overflowing from the upper side of the overflow groove 6a of the molded body 6 to flow down respectively along both side surfaces, and merge them at the lower end to shape the film-like molten glass. The draw roll 7 restricts the width direction shrinkage of the molten glass to make it a base material glass film G1 of a predetermined width.

退火爐8用以對母材玻璃膜G1實施退火處理(除應變處理)。所述退火爐8包括配設於上下方向多層的退火爐輥8a。各退火爐輥8a包括自表面與背面兩側夾持母材玻璃膜G1的輥對。退火爐輥8a作為縱向搬運裝置而發揮作用,在退火爐8內沿縱方向GY搬運藉由成形裝置2而成形的母材玻璃膜G1。The annealing furnace 8 is used to perform annealing treatment (de-strain treatment) on the base material glass film G1. The annealing furnace 8 includes annealing furnace rolls 8a arranged in multiple layers in the vertical direction. Each annealing furnace roll 8a includes a roll pair that sandwiches the base material glass film G1 from both sides of the front and back surfaces. The annealing furnace roll 8a functions as a longitudinal conveying device, and conveys the base material glass film G1 formed by the forming device 2 in the longitudinal direction GY in the annealing furnace 8.

於退火爐8的下方,配設有自表面與背面兩側夾持母材玻璃膜G1的支持輥9。於支持輥9與拉邊輥7之間或支持輥9與任一處的退火爐輥8a之間,賦予了用以促使母材玻璃膜G1薄壁化的張力。Below the annealing furnace 8 is provided a support roll 9 which clamps the base material glass film G1 from both sides of the front and back. Between the support roll 9 and the edge-drawing roll 7 or between the support roll 9 and any annealing furnace roll 8a, the tension for promoting the thickness reduction of the base material glass film G1 is given.

方向轉換裝置3將母材玻璃膜G1的行進方向自縱方向GY轉換為橫方向GX。方向轉換裝置3設置於退火爐8及支持輥9的下方位置。The direction conversion device 3 converts the traveling direction of the base material glass film G1 from the vertical direction GY to the horizontal direction GX. The direction changing device 3 is installed at a position below the annealing furnace 8 and the support roll 9.

如圖3及圖4所示,方向轉換裝置3包括:限制輥10a、限制輥10b,抵接於母材玻璃膜G1的表面G1Sa;變形裝置11,使母材玻璃膜G1變形;以及輥式輸送機12,設置於限制輥10a、限制輥10b及變形裝置11的下方。As shown in FIGS. 3 and 4, the direction changing device 3 includes: a restricting roller 10a and a restricting roller 10b, which abut the surface G1Sa of the base material glass film G1; a deforming device 11, which deforms the base material glass film G1; and a roller type The conveyor 12 is installed below the restriction roller 10 a, the restriction roller 10 b, and the deforming device 11.

限制輥10a、限制輥10b自母材玻璃膜G1的表面G1Sa側與所述母材玻璃膜G1的端部Ga、端部Gb接觸。限制輥10a、限制輥10b包括與母材玻璃膜G1的寬度方向上的一端部Ga接觸的第一限制輥10a、以及與母材玻璃膜G1的寬度方向上的另一端部Gb接觸的第二限制輥10b。The restriction roller 10a and the restriction roller 10b are in contact with the end Ga and the end Gb of the base material glass film G1 from the surface G1Sa side of the base material glass film G1. The restriction roller 10a and the restriction roller 10b include a first restriction roller 10a that is in contact with one end Ga in the width direction of the base material glass film G1, and a second restriction roller 10a that is in contact with the other end Gb of the base material glass film G1 in the width direction. Restriction roller 10b.

變形裝置11於縱方向GY上,配置於限制輥10a、限制輥10b與輥式輸送機12之間。變形裝置11包括:氣流產生部13,相對於母材玻璃膜G1產生氣流A;以及氣流調整部14,調整來自氣流產生部13的氣流A。The deforming device 11 is arranged between the restriction roller 10 a, the restriction roller 10 b, and the roller conveyor 12 in the longitudinal direction GY. The deforming device 11 includes an airflow generating part 13 that generates an airflow A with respect to the base material glass film G1, and an airflow adjusting part 14 that adjusts the airflow A from the airflow generating part 13.

氣流產生部13配置成與母材玻璃膜G1的表面G1Sa相向。氣流產生部13包括將氣體噴射至母材玻璃膜G1的噴附部15。噴附部15構成為管狀,可使氣體於內部流通。噴附部15包括向母材玻璃膜G1的表面G1Sa噴射氣體的多個噴射口16。The airflow generating portion 13 is arranged to face the surface G1Sa of the base material glass film G1. The airflow generating part 13 includes a spraying part 15 that sprays gas to the base material glass film G1. The spray part 15 is configured in a tube shape and allows gas to circulate inside. The spray part 15 includes a plurality of spray ports 16 that spray gas to the surface G1Sa of the base material glass film G1.

如圖3所示,噴射口16構成為形成於噴附部15的中途部的圓形孔,但噴射口16的形狀並不限定於本實施形態。如圖4所示,噴射口16是以氣流A(以實線表示)呈直角抵碰至母材玻璃膜G1的表面G1Sa的方式噴射氣體。並不限定於此,噴射口16亦可如圖4中以二點鏈線所示,以氣流A朝向斜下方的方式噴射氣體。As shown in FIG. 3, the injection port 16 is configured as a circular hole formed in the middle of the spray part 15, but the shape of the injection port 16 is not limited to this embodiment. As shown in FIG. 4, the injection port 16 injects gas so that the airflow A (represented by a solid line) hits the surface G1Sa of the base material glass film G1 at a right angle. It is not limited to this, and as shown by a two-dot chain line in FIG. 4, the injection port 16 may inject gas so that the airflow A may face diagonally downward.

氣流調整部14包括多個(例如兩塊)遮蔽構件17a、遮蔽構件17b、以及使遮蔽構件17a、遮蔽構件17b移動的移動機構(圖略)。遮蔽構件17a、遮蔽構件17b包括長條狀的板構件,但並不限定於所述形狀。遮蔽構件17a、遮蔽構件17b配置於氣流產生部13與母材玻璃膜G1的表面G1Sa之間。The airflow adjusting unit 14 includes a plurality of (for example, two) shielding members 17 a, shielding members 17 b, and a moving mechanism (illustration omitted) that moves the shielding members 17 a and the shielding members 17 b. The shielding member 17a and the shielding member 17b include elongated plate members, but are not limited to the above-mentioned shapes. The shielding member 17a and the shielding member 17b are arranged between the airflow generating portion 13 and the surface G1Sa of the base material glass film G1.

兩塊遮蔽構件17a、17b是以沿氣流產生部13的噴附部15的長度方向的方式配置。移動機構構成為使各遮蔽構件17a、遮蔽構件17b沿噴附部15的長度方向(母材玻璃膜G1的寬度方向)移動。The two shielding members 17 a and 17 b are arranged along the longitudinal direction of the spray portion 15 of the air flow generating portion 13. The moving mechanism is configured to move each shielding member 17a and shielding member 17b in the longitudinal direction of the spray part 15 (the width direction of the base material glass film G1).

如圖3所示,氣流調整部14的遮蔽構件17a、遮蔽構件17b遮蔽氣流產生部13的一部分噴射口16,且使剩下的噴射口16相對於母材玻璃膜G1露出而不遮蔽。遮蔽構件17a、遮蔽構件17b藉由利用移動機構變更其位置,而變更所遮蔽的噴射口16的數量。藉此,氣流調整部14調整自氣流產生部13向母材玻璃膜G1的氣流A的強度及範圍。As shown in FIG. 3, the shielding member 17a and the shielding member 17b of the airflow adjustment part 14 shield a part of the injection ports 16 of the airflow generating part 13, and expose the remaining injection ports 16 with respect to the base material glass film G1 without shielding. By changing the position of the shielding member 17a and the shielding member 17b by a moving mechanism, the number of the ejection ports 16 to be shielded is changed. Thereby, the airflow adjusting part 14 adjusts the intensity and range of the airflow A from the airflow generating part 13 to the base material glass film G1.

輥式輸送機12包括支持母材玻璃膜G1的背面G1Sb的多個導輥(guide roller)12a。各導輥12a配置於規定的位置,以便描繪大致圓弧狀的軌跡來搬運母材玻璃膜G1。The roller conveyor 12 includes a plurality of guide rollers 12a that support the back surface G1Sb of the base material glass film G1. Each guide roller 12a is arrange|positioned at a predetermined position so that it may draw a substantially circular arc-shaped trajectory, and convey the base material glass film G1.

橫向搬運裝置4於母材玻璃膜G1的行進方向上,配置於方向轉換裝置3的下游側。橫向搬運裝置4包括第一搬運裝置18、第二搬運裝置19及第三搬運裝置20。第一搬運裝置18配置於方向轉換裝置3的下游側。第二搬運裝置19配置於第一搬運裝置18的下游側。第三搬運裝置20配置於第二搬運裝置19的下游側。The lateral conveying device 4 is arranged on the downstream side of the direction changing device 3 in the traveling direction of the base material glass film G1. The lateral conveying device 4 includes a first conveying device 18, a second conveying device 19, and a third conveying device 20. The first conveying device 18 is arranged on the downstream side of the direction changing device 3. The second conveying device 19 is arranged on the downstream side of the first conveying device 18. The third conveying device 20 is arranged on the downstream side of the second conveying device 19.

第一搬運裝置18例如包括懸浮式的帶式輸送機(belt conveyor)。如圖5所示,第一搬運裝置18包括循環狀的輸送機帶21、以及使輸送機帶21驅動的驅動輥22。The first conveying device 18 includes, for example, a suspended belt conveyor. As shown in FIG. 5, the first conveying device 18 includes an endless conveyor belt 21 and a driving roller 22 that drives the conveyor belt 21.

於輸送機帶21,形成有多個孔部23。輸送機帶21使來自氣體供給裝置(圖略)的氣體V自孔部23噴射,所述氣體供給裝置配設於所述輸送機帶21的內周。藉由自孔部23噴射的氣體V,可使母材玻璃膜G1的一部分懸浮。In the conveyor belt 21, a plurality of holes 23 are formed. The conveyor belt 21 injects gas V from the holes 23 from a gas supply device (not shown), which is arranged on the inner circumference of the conveyor belt 21. The gas V injected from the hole 23 can suspend a part of the base material glass film G1.

於輸送機帶21的外表面的寬度方向兩側,呈循環狀黏附有膠帶(tape)24。因此,導入至第一搬運裝置18上的母材玻璃膜G1的寬度方向兩端部Ga、Gb與該些膠帶24相接。設置於輸送機帶21的多個孔部23之中、設置於輸送機帶21的寬度方向兩側的孔部23被膠帶24堵塞。因此,於與膠帶24相接的母材玻璃膜G1的寬度方向兩端部Ga、Gb,藉由噴射供給氣體V而產生的浮力不起作用。On both sides in the width direction of the outer surface of the conveyor belt 21, tape 24 is adhered in a loop shape. Therefore, the widthwise end portions Ga and Gb of the base material glass film G1 introduced into the first conveying device 18 are in contact with these tapes 24. Among the plurality of holes 23 provided in the conveyor belt 21, the holes 23 provided on both sides of the conveyor belt 21 in the width direction are blocked by the tape 24. Therefore, the buoyancy generated by the injection of the supply gas V at the widthwise end portions Ga and Gb of the base material glass film G1 in contact with the tape 24 does not act.

第二搬運裝置19例如包括帶式輸送機。第二搬運裝置19包括循環狀的輸送機帶25、以及將母材玻璃膜G1的寬度方向端部Ga、寬度方向端部Gb作為非製品部Ge加以切斷的切斷裝置26。The second conveying device 19 includes, for example, a belt conveyor. The second conveying device 19 includes an endless conveyor belt 25 and a cutting device 26 that cuts the width direction end Ga and the width direction end Gb of the base material glass film G1 as the non-product portion Ge.

輸送機帶25將母材玻璃膜G1搬運至所述輸送機帶25的中途部,於所述中途部,將藉由切斷母材玻璃膜G1而形成的製品玻璃膜G2及非製品部Ge搬運至下游側。The conveyor belt 25 conveys the base material glass film G1 to the midway portion of the conveyor belt 25, where the product glass film G2 formed by cutting the base material glass film G1 and the non-product portion Ge Transport to the downstream side.

切斷裝置26是例如藉由雷射切割而切斷母材玻璃膜G1,但並不限定於所述切斷方式。切斷裝置26包括一對雷射照射裝置26a、以及配置於所述雷射照射裝置26a的下游側的一對冷卻裝置26b。切斷裝置26於自各雷射照射裝置26a對被搬運的母材玻璃膜G1的規定部位照射雷射光而進行加熱之後,自冷卻裝置26b釋放冷媒而使所述加熱部位冷卻。The cutting device 26 cuts the base material glass film G1 by, for example, laser cutting, but it is not limited to the cutting method described above. The cutting device 26 includes a pair of laser irradiation devices 26a and a pair of cooling devices 26b arranged on the downstream side of the laser irradiation device 26a. After the cutting device 26 irradiates laser light from each laser irradiation device 26a to a predetermined portion of the conveyed base material glass film G1 to heat it, the cutting device 26 releases a refrigerant from the cooling device 26b to cool the heated portion.

第三搬運裝置20例如包括吸附輸送機。第三搬運裝置20將製品玻璃膜G2以固定保持著的狀態,搬運至下游側。The third conveying device 20 includes, for example, a suction conveyor. The third conveying device 20 conveys the product glass film G2 to the downstream side in a fixed and held state.

第三搬運裝置20包括能夠吸附製品玻璃膜G2的輸送機帶27。於輸送機帶27,形成有於厚度方向上貫通所述輸送機帶27的多個吸附用孔(圖略)。又,於輸送機帶27的內周側,配置有與真空泵等連接的負壓產生裝置(圖略)。負壓產生裝置產生用以經由吸附用孔吸附製品玻璃膜G2的負壓。The third conveying device 20 includes a conveyor belt 27 capable of sucking the product glass film G2. The conveyor belt 27 is formed with a plurality of suction holes (not shown) penetrating the conveyor belt 27 in the thickness direction. In addition, on the inner peripheral side of the conveyor belt 27, a negative pressure generating device (not shown) connected to a vacuum pump or the like is arranged. The negative pressure generating device generates negative pressure for adsorbing the product glass film G2 through the adsorption holes.

因此,輸送機帶27的表面藉由吸附而固定保持製品玻璃膜G2的第二主面G2Sb。吸附於輸送機帶27的狀態的製品玻璃膜G2於與所述輸送機帶27的輸送速度相同的搬運速度下,被搬運至搬運路徑的下游側。Therefore, the surface of the conveyor belt 27 fixes and holds the second main surface G2Sb of the product glass film G2 by suction. The product glass film G2 in the state adsorbed to the conveyor belt 27 is conveyed to the downstream side of the conveying path at the same conveying speed as the conveying speed of the conveyor belt 27.

製品玻璃膜G2是藉由第三搬運裝置20的固定保持,而於第二搬運裝置19與第三搬運裝置20之間的區域內以鬆弛的狀態被搬運,於第三搬運裝置20與捲繞裝置5之間,以於其長度方向上賦予有張力的狀態被搬運。The product glass film G2 is fixed and held by the third conveying device 20, and is conveyed in a relaxed state in the area between the second conveying device 19 and the third conveying device 20, and is wound on the third conveying device 20. Between the apparatuses 5, they are conveyed in the state which gave tension|tensile_strength to the longitudinal direction.

捲繞裝置5設置於第三搬運裝置20的下游側。捲繞裝置5包括捲繞輥28、對所述捲繞輥28進行旋轉驅動的馬達(motor)(圖略)、以及對捲繞輥28供給保護片材PS的保護片材供給部29。捲繞裝置5一面自保護片材供給部29使保護片材PS與製品玻璃膜G2重合,一面藉由馬達使捲繞輥28旋轉,而將製品玻璃膜G2捲繞成捲筒狀。經捲繞的製品玻璃膜G2構成為玻璃捲筒GR。The winding device 5 is provided on the downstream side of the third conveying device 20. The winding device 5 includes a winding roller 28, a motor (not shown) for rotationally driving the winding roller 28, and a protection sheet supply unit 29 that supplies the protection sheet PS to the winding roller 28. The winding device 5 superimposes the protective sheet PS and the product glass film G2 from the protective sheet supply part 29, and while rotating the winding roller 28 by a motor, winds the product glass film G2 into a roll shape. The rolled product glass film G2 is configured as a glass roll GR.

以下,說明使用所述結構的製造裝置1製造玻璃膜G1、玻璃膜G2(玻璃捲筒GR)的方法。本方法包括:成形步驟,使母材玻璃膜G1成形;搬運步驟,搬運各玻璃膜G1、玻璃膜G2;以及捲繞步驟,將製品玻璃膜G2捲繞成捲筒狀。Hereinafter, a method of manufacturing the glass film G1 and the glass film G2 (glass reel GR) using the manufacturing apparatus 1 of the above-mentioned structure will be described. The method includes: a forming step to shape the base material glass film G1; a transport step to transport each glass film G1 and glass film G2; and a winding step to wind the product glass film G2 into a roll shape.

於成形步驟中,使自成形裝置2中的成形體6的溢流槽6a的上方溢流的熔融玻璃沿兩側面分別流下,於下端使其合流而使所述熔融玻璃成形為膜狀。此時,利用拉邊輥7限制熔融玻璃的寬度方向收縮而使其成為規定寬度的母材玻璃膜G1。其後,藉由退火爐8對母材玻璃膜G1實施退火處理(退火步驟)。母材玻璃膜G1利用藉由支持輥9而賦予的張力的作用,形成為規定的厚度。In the forming step, the molten glass overflowing from the upper side of the overflow groove 6a of the formed body 6 in the forming apparatus 2 is caused to flow down respectively along both side surfaces, and the molten glass is merged at the lower end to form the molten glass into a film shape. At this time, the edging roll 7 restricts the width direction shrinkage of the molten glass and makes it the base material glass film G1 of a predetermined width. After that, the base material glass film G1 is annealed in the annealing furnace 8 (annealing step). The base material glass film G1 is formed to a predetermined thickness by the action of the tension imparted by the support roller 9.

搬運步驟包括:縱向搬運步驟,沿縱方向GY搬運母材玻璃膜G1;方向轉換步驟,將母材玻璃膜G1的搬運方向自縱方向GY轉換為橫方向GX;以及橫向搬運步驟,沿橫方向GX搬運母材玻璃膜G1。The conveying steps include: a longitudinal conveying step, conveying the base glass film G1 along the longitudinal direction GY; a direction switching step, changing the conveying direction of the base glass film G1 from the longitudinal direction GY to the lateral direction GX; and a lateral conveying step along the lateral direction GX transports base material glass film G1.

於縱向搬運步驟中,一面對母材玻璃膜G1實施退火處理,一面藉由作為縱向搬運裝置的退火爐輥8a而沿縱方向GY(下方)搬運所述母材玻璃膜G1。In the longitudinal conveyance step, while annealing the base material glass film G1, the base material glass film G1 is conveyed in the longitudinal direction GY (downward) by the annealing furnace roll 8a as a longitudinal conveying device.

於方向轉換步驟中,藉由方向轉換裝置3,將自退火爐8搬運的母材玻璃膜G1的搬運方向自縱方向GY轉換為橫方向GX。方向轉換步驟包括變形步驟,所述變形步驟於即將進行方向轉換之前使母材玻璃膜G1的一部分變形。In the direction changing step, the direction changing device 3 converts the conveying direction of the base material glass film G1 conveyed from the annealing furnace 8 from the longitudinal direction GY to the lateral direction GX. The direction conversion step includes a deformation step that deforms a part of the base material glass film G1 immediately before the direction conversion.

於變形步驟中,各限制輥10a、限制輥10b與母材玻璃膜G1的表面G1Sa的寬度方向端部Ga、寬度方向端部Gb接觸。藉此,得以限制母材玻璃膜G1的位置。又,於變形步驟中,藉由自變形裝置11的氣流產生部13(噴附部15)噴射氣體,而產生自該變形裝置11向母材玻璃膜G1的表面G1Sa的氣流A。所述氣流A抵碰至母材玻璃膜G1的表面G1Sa的寬度方向中央部Gc。藉由母材玻璃膜G1的寬度方向中央部Gc被所述氣流A按壓,而如圖4中以二點鏈線所示,於母材玻璃膜G1的寬度方向中央部Gc,其表面G1Sa呈凹狀變形。伴隨著所述變形,母材玻璃膜G1的寬度方向中央部Gc的背面G1Sb呈凸狀變形。In the deformation step, each of the restriction roller 10a and the restriction roller 10b is in contact with the width direction end Ga and the width direction end Gb of the surface G1Sa of the base material glass film G1. Thereby, the position of the base material glass film G1 can be restricted. In addition, in the deformation step, gas is injected from the airflow generating portion 13 (spraying portion 15) of the deforming device 11 to generate the airflow A from the deforming device 11 to the surface G1Sa of the base material glass film G1. The air flow A hits the center part Gc in the width direction of the surface G1Sa of the base material glass film G1. The width direction center Gc of the base material glass film G1 is pressed by the air flow A, and as shown by the two-dot chain line in FIG. Concave deformation. Along with this deformation, the back surface G1Sb of the center portion Gc in the width direction of the base material glass film G1 is deformed convexly.

其後,母材玻璃膜G1穿過變形裝置11,抵達至輥式輸送機12。母材玻璃膜G1於由輥式輸送機12的各導輥12a支持著背面G1Sb的狀態下被引導,藉此將行進方向自縱方向GY變為橫方向GX。After that, the base material glass film G1 passes through the deformation device 11 and reaches the roller conveyor 12. The base material glass film G1 is guided in a state where the back surface G1Sb is supported by each guide roller 12a of the roller conveyor 12, thereby changing the traveling direction from the vertical direction GY to the horizontal direction GX.

於橫向搬運步驟中,利用第一搬運裝置18及第二搬運裝置19搬運穿過方向轉換裝置3的母材玻璃膜G1,利用第二搬運裝置19及第三搬運裝置20搬運製品玻璃膜G2。In the lateral conveyance step, the first conveying device 18 and the second conveying device 19 convey the base material glass film G1 passing through the direction changing device 3, and the second conveying device 19 and the third conveying device 20 convey the product glass film G2.

如圖5所示,第一搬運裝置18對母材玻璃膜G1的寬度方向兩端部Ga、Gb,賦予推進橫方向GX上的搬運的第一推進力F1。又,第一搬運裝置18對母材玻璃膜G1的寬度方向中央部Gc賦予第二推進力F2。As shown in FIG. 5, the 1st conveyance apparatus 18 provides the 1st propulsion force F1 which promotes conveyance in the lateral direction GX to the width direction both ends Ga and Gb of the base material glass film G1. In addition, the first conveying device 18 applies a second propelling force F2 to the central portion Gc in the width direction of the base material glass film G1.

當將母材玻璃膜G1導入至第一搬運裝置18上時,將氣體V經由孔部23噴射供給至輸送機帶21上的母材玻璃膜G1。藉此,母材玻璃膜G1的寬度方向中央部Gc成為自輸送機帶21懸浮的狀態。此時,包括耳部Gd的母材玻璃膜G1的寬度方向兩端部Ga、Gb不懸浮,而以與第一搬運裝置18的膠帶24接觸的狀態受到支持。藉由對第一搬運裝置18的輸送機帶21進行驅動,而向第二搬運裝置19搬運母材玻璃膜G1。When the base material glass film G1 is introduced into the first conveying device 18, the gas V is injected and supplied to the base material glass film G1 on the conveyor belt 21 through the hole 23. Thereby, the width direction center part Gc of the base material glass film G1 is in the state suspended from the conveyor belt 21. At this time, the widthwise end portions Ga and Gb of the base material glass film G1 including the ear portion Gd are not suspended, but are supported in a state of being in contact with the tape 24 of the first conveying device 18. By driving the conveyor belt 21 of the first conveying device 18, the base material glass film G1 is conveyed to the second conveying device 19.

於橫向搬運步驟中,能夠以整體上不彎曲的平坦姿勢於橫方向上搬運母材玻璃膜G1,並且利用第一搬運裝置18一邊對母材玻璃膜G1的寬度方向兩端部Ga、Gb賦予具有相應的大小的橫方向上的搬運推進力(第一推進力F1),一邊沿橫方向GX搬運母材玻璃膜G1。又,藉由第一搬運裝置18而賦予至母材玻璃膜G1的寬度方向中央部Gc的第二推進力F2實質上為零,因此可確實地使第一推進力F1大於所述第二推進力F2。In the lateral conveyance step, the base material glass film G1 can be conveyed in the lateral direction in a flat posture that does not bend as a whole, and the first conveying device 18 is used to apply the widthwise ends Ga and Gb of the base material glass film G1. The base material glass film G1 is conveyed in the lateral direction GX while having a corresponding magnitude of the conveyance propulsion force in the lateral direction (first propulsion force F1). In addition, the second propelling force F2 imparted to the central portion Gc of the base material glass film G1 in the width direction by the first conveying device 18 is substantially zero, so that the first propulsive force F1 can be reliably made larger than the second propulsion力 F2.

如上所述,藉由擴大第二推進力F2與第一推進力F1的差,可相對於在縱方向GY上搬運著的上游側的母材玻璃膜G1的部分,積極地產生表面G1Sa呈凹狀,背面G1Sb呈凸狀的彎曲變形。即,第一搬運裝置18發揮輔助作用,以促進變形裝置11使母材玻璃膜G1產生適當變形。As described above, by enlarging the difference between the second propulsion force F2 and the first propulsion force F1, it is possible to positively produce a concave surface G1Sa with respect to the portion of the base material glass film G1 on the upstream side that is conveyed in the longitudinal direction GY. Shape, the back surface G1Sb is convexly curved and deformed. That is, the first conveying device 18 plays an auxiliary role to promote the deformation device 11 to appropriately deform the base material glass film G1.

橫向搬運步驟包括將母材玻璃膜G1分割成製品玻璃膜G2與非製品部Ge的切斷步驟、以及廢棄非製品部Ge的廢棄步驟。The lateral conveyance step includes a cutting step of dividing the base material glass film G1 into the product glass film G2 and the non-product portion Ge, and a discarding step of discarding the non-product portion Ge.

於切斷步驟中,藉由第二搬運裝置19的輸送機帶25,將自第一搬運裝置18搬運的母材玻璃膜G1搬運至下游側。於所述搬運的途中,切斷裝置26自雷射照射裝置26a將雷射光照射至母材玻璃膜G1的一部分而進行加熱。其後,利用冷卻裝置26b對經加熱的部位噴附冷媒。藉此,於母材玻璃膜G1中產生熱應力。於母材玻璃膜G1,預先形成有初始裂紋(crack),切斷裝置26藉由熱應力而使所述裂紋發展。藉此,利用母材玻璃膜G1形成製品玻璃膜G2及非製品部Ge。In the cutting step, the base material glass film G1 conveyed from the first conveying device 18 is conveyed to the downstream side by the conveyor belt 25 of the second conveying device 19. During the transportation, the cutting device 26 irradiates a part of the base material glass film G1 with laser light from the laser irradiation device 26a to heat it. Thereafter, the cooling device 26b is used to spray the refrigerant on the heated part. As a result, thermal stress is generated in the base material glass film G1. In the base material glass film G1, an initial crack is formed in advance, and the cutting device 26 develops the crack by thermal stress. Thereby, the base material glass film G1 is used to form the product glass film G2 and the non-product part Ge.

於廢棄步驟中,將非製品部Ge,藉由第二搬運裝置19而搬運至下游側。其後,非製品部Ge自製品玻璃膜G2的搬運路徑朝下方脫離,而切斷為適合於廢棄的長度。In the discarding step, the non-product part Ge is conveyed to the downstream side by the second conveying device 19. After that, the conveyance path of the non-product part Ge self-product glass film G2 is detached downward and cut to a length suitable for disposal.

於捲繞步驟中,一面自保護片材供給部29將保護片材PS供給至製品玻璃膜G2,一面利用捲繞裝置5的捲繞輥28將藉由第三搬運裝置20搬運的製品玻璃膜G2捲繞成捲筒狀。藉由利用捲繞輥28捲繞規定長度的製品玻璃膜G2,而完成玻璃捲筒GR。In the winding step, the protective sheet PS is supplied to the product glass film G2 from the protective sheet supply part 29, and the product glass film conveyed by the third conveying device 20 is transferred by the winding roller 28 of the winding device 5 G2 is wound into a roll. The glass roll GR is completed by winding the product glass film G2 of a predetermined length by the winding roller 28.

根據以上說明的本實施形態的玻璃膜的製造方法,於方向轉換步驟中,藉由使變形裝置11的氣流A抵碰至母材玻璃膜G1的表面G1Sa,可使所述母材玻璃膜G1變形,以使背面G1Sb側呈凸狀。因此,可防止母材玻璃膜G1的表面G1Sa呈凸狀的欠佳的變形的產生。According to the method of manufacturing the glass film of the present embodiment described above, in the direction changing step, the airflow A of the deforming device 11 is brought into contact with the surface G1Sa of the base material glass film G1, so that the base material glass film G1 Deform so that the back surface G1Sb side becomes convex. Therefore, it is possible to prevent the occurrence of undesirable deformation in which the surface G1Sa of the base material glass film G1 is convex.

圖6表示本發明的玻璃膜的製造方法的第二實施形態。本實施形態的變形裝置11的氣流產生部13包括兩個噴附部(第一噴附部15a及第二噴附部15b)。Fig. 6 shows a second embodiment of the glass film manufacturing method of the present invention. The airflow generating portion 13 of the deforming device 11 of the present embodiment includes two spraying portions (a first spraying portion 15a and a second spraying portion 15b).

各噴附部15a、噴附部15b可不經由第一實施形態中的氣流調整部14,對母材玻璃膜G1的表面G1Sa噴附氣體。於本實施形態中,不調整氣流A,而直接使氣流A抵碰至適當的位置(寬度方向中央部Gc)以使母材玻璃膜G1變形,藉此可使母材玻璃膜G1的背面G1Sb呈凸狀變形。各噴附部15a、噴附部15b亦可構成為藉由移動機構,而變更其位置。Each spraying portion 15a and spraying portion 15b can spray a gas on the surface G1Sa of the base material glass film G1 without passing through the airflow adjusting portion 14 in the first embodiment. In this embodiment, the airflow A is not adjusted, and the airflow A is directly hit to an appropriate position (the center part Gc in the width direction) to deform the base glass film G1, thereby making the back surface G1Sb of the base glass film G1 Deformed convexly. Each spraying part 15a and spraying part 15b can also be comprised so that the position may be changed by a moving mechanism.

圖7及圖8表示本發明的玻璃膜的製造方法的第三實施形態。本實施形態的變形裝置11的氣流產生部13配置成與母材玻璃膜G1的背面G1Sb相向。7 and 8 show the third embodiment of the method of manufacturing the glass film of the present invention. The airflow generating part 13 of the deforming device 11 of this embodiment is arrange|positioned so that it may oppose the back surface G1Sb of the base material glass film G1.

氣流產生部13包括兩個噴附部(第一噴附部15a及第二噴附部15b)。第一噴附部15a配置成與母材玻璃膜G1的寬度方向上的一端部Ga相向。第二噴附部15b配置成與母材玻璃膜G1的寬度方向上的另一端部Gb相向。The airflow generating part 13 includes two spraying parts (a first spraying part 15a and a second spraying part 15b). The first spray part 15a is arranged to face one end Ga in the width direction of the base material glass film G1. The second spray part 15b is arranged to face the other end Gb in the width direction of the base material glass film G1.

於本實施形態中,於方向轉換步驟中,使第一噴附部15a所噴附的氣流A自母材玻璃膜G1的背面G1Sb側抵碰至所述母材玻璃膜G1的一端部Ga。此外,使第二噴附部15b所噴附的氣流A自母材玻璃膜G1的背面G1Sb側抵碰至所述母材玻璃膜G1的另一端部Gb。In this embodiment, in the direction switching step, the air flow A sprayed by the first spraying portion 15a is made to abut the one end Ga of the base glass film G1 from the back surface G1Sb side of the base glass film G1. In addition, the air flow A sprayed by the second spraying portion 15b is made to abut against the other end Gb of the base glass film G1 from the back surface G1Sb side of the base glass film G1.

母材玻璃膜G1的各端部Ga、端部Gb藉由被氣流A按壓,而如圖8中以二點鏈線所示,以與變形裝置11相離的方式變形。母材玻璃膜G1的寬度方向中央部Gc未被氣流A按壓,因而幾乎不變形。藉由如上所述的母材玻璃膜G1的端部Ga、端部Gb的變形,而使得母材玻璃膜G1以背面G1Sb呈凸狀,表面G1Sa呈凹狀的方式變形。Each end Ga and end Gb of the base material glass film G1 are pressed by the airflow A, and are deformed in a manner separated from the deforming device 11 as shown by a two-dot chain line in FIG. 8. Since the center part Gc of the width direction of the base material glass film G1 is not pressed by the airflow A, it hardly deforms. Due to the deformation of the end Ga and the end Gb of the base material glass film G1 as described above, the base material glass film G1 is deformed such that the back surface G1Sb is convex and the surface G1Sa is concave.

圖9及圖10表示本發明的玻璃膜的製造方法的第四實施形態。本實施形態的變形裝置11的氣流產生部13配置成與母材玻璃膜G1的背面G1Sb相向。氣流產生部13包括抽吸氣體的抽吸部30。抽吸部30包括吸入周圍的空氣的吸入口31。9 and 10 show the fourth embodiment of the method of manufacturing the glass film of the present invention. The airflow generating part 13 of the deforming device 11 of this embodiment is arrange|positioned so that it may oppose the back surface G1Sb of the base material glass film G1. The airflow generating part 13 includes a suction part 30 that sucks gas. The suction part 30 includes a suction port 31 that sucks in surrounding air.

如圖10所示,於方向轉換步驟中,氣流產生部13藉由抽吸部30而抽吸母材玻璃膜G1的背面G1Sb側、即所述母材玻璃膜G1的寬度方向中央部Gc側的周圍的空氣。藉此,產生自母材玻璃膜G1向抽吸部30的氣流A。As shown in FIG. 10, in the direction switching step, the air flow generating unit 13 sucks the back G1Sb side of the base material glass film G1, that is, the width direction center Gc side of the base material glass film G1 by the suction unit 30 The surrounding air. Thereby, the air flow A from the base material glass film G1 to the suction part 30 is generated.

母材玻璃膜G1的寬度方向中央部Gc藉由所述氣流A而吸引至抽吸部30側。因此,母材玻璃膜G1如圖10中以二點鏈線所示,以背面G1Sb呈凸狀,表面G1Sa呈凹狀的方式變形。The center part Gc in the width direction of the base material glass film G1 is sucked to the suction part 30 side by the air flow A. Therefore, the base material glass film G1 is deformed such that the back surface G1Sb is convex and the surface G1Sa is concave as shown by the two-dot chain line in FIG. 10.

再者,本發明並不限定於所述實施形態的結構,亦不限定於所述作用效果。本發明於不脫離本發明的主旨的範圍內可進行各種變更。In addition, this invention is not limited to the structure of the said embodiment, and it is not limited to the said effect. Various changes can be made to the present invention within the scope not departing from the gist of the present invention.

於所述實施形態中,已例示藉由第一搬運裝置18而賦予可使母材玻璃膜G1變形的推進力F1、推進力F2的步驟,但本發明並不限定於所述結構。第一搬運裝置18亦可包括懸浮式的輸送機以外的搬運裝置。作為第一搬運裝置18,亦可使用賦予單一推進力的常規的帶式輸送機。In the above-mentioned embodiment, the step of applying the propulsion force F1 and the propulsion force F2 that can deform the base material glass film G1 by the first conveying device 18 has been exemplified, but the present invention is not limited to the above-mentioned structure. The first conveying device 18 may also include a conveying device other than a suspended conveyor. As the first conveying device 18, a conventional belt conveyor that imparts a single propulsion force can also be used.

於所述實施形態中,以利用捲繞輥28捲繞製品玻璃膜G2,來製作玻璃捲筒GR的形態進行了說明,但並不限定於所述形態。例如,亦可為如下的形態:藉由取代捲繞輥28,設置未圖示的寬度方向切斷裝置,來製造單片式玻璃膜。In the above-mentioned embodiment, the form in which the product glass film G2 is wound by the winding roller 28 to produce the glass roll GR has been described, but it is not limited to the above-mentioned form. For example, it may be a form which replaces the winding roller 28 and installs a width direction cutting device which is not shown in figure, and manufactures a single-piece glass film.

亦可使所述實施形態適當組合。例如,亦可使第一實施形態與第三實施形態加以組合。亦可使第二實施形態與第三實施形態加以組合。亦可使第三實施形態與第四實施形態加以組合。亦可使第一實施形態、第三實施形態與第四實施形態加以組合。亦可使第二實施形態、第三實施形態與第四實施形態加以組合。The above-mentioned embodiments may be appropriately combined. For example, the first embodiment and the third embodiment may be combined. It is also possible to combine the second embodiment and the third embodiment. It is also possible to combine the third embodiment and the fourth embodiment. It is also possible to combine the first embodiment, the third embodiment, and the fourth embodiment. It is also possible to combine the second embodiment, the third embodiment, and the fourth embodiment.

1:製造裝置 2:成形裝置 3:方向轉換裝置 4:橫向搬運裝置 5:捲繞裝置 6:成形體 6a:溢流槽 7:拉邊輥 8:退火爐 8a:退火爐輥(縱向搬運裝置) 9:支持輥 10a:第一限制輥 10b:第二限制輥 11:變形裝置 12:輥式輸送機 12a:導輥 13:氣流產生部 14:氣流調整部 15:噴附部 15a:第一噴附部 15b:第二噴附部 16:噴射口 17a、17b:遮蔽構件 18:第一搬運裝置 19:第二搬運裝置 20:第三搬運裝置 21、25、27:輸送機帶 22:驅動輥 23:孔部 24:膠帶 26:切斷裝置 26a:雷射照射裝置 26b:冷卻裝置 28:捲繞輥 29:保護片材供給部 30:抽吸部 31:吸入口 A:氣流 F1:第一推進力 F2:第二推進力 G1:母材玻璃膜 G1Sa:母材玻璃膜的表面 G1Sb:母材玻璃膜的背面 G2:製品玻璃膜 G2Sa:第一主面 G2Sb:第二主面 Ga、Gb:母材玻璃膜的寬度方向端部 Gc:母材玻璃膜的寬度方向中央部 Gd:耳部 Ge:非製品部 GR:玻璃捲筒 GX:橫方向 GY:縱方向 PS:保護片材 V:氣體1: Manufacturing device 2: Forming device 3: Direction conversion device 4: Horizontal handling device 5: Winding device 6: forming body 6a: Overflow trough 7: Side-drawing roller 8: Annealing furnace 8a: Annealing furnace roll (longitudinal conveying device) 9: Support roller 10a: The first restriction roller 10b: The second limit roller 11: Deformation device 12: Roller conveyor 12a: guide roller 13: Airflow generating part 14: Airflow adjustment department 15: Spray attachment 15a: The first spray attachment 15b: The second spray attachment part 16: Jet 17a, 17b: Shading member 18: The first transport device 19: The second conveying device 20: The third conveying device 21, 25, 27: conveyor belt 22: drive roller 23: Hole 24: Tape 26: Cutting device 26a: Laser irradiation device 26b: Cooling device 28: Winding roller 29: Protect the sheet supply part 30: Suction section 31: suction port A: Airflow F1: First propulsion F2: Second propulsion G1: Base material glass film G1Sa: The surface of the base material glass film G1Sb: The back of the base material glass film G2: Product glass film G2Sa: the first major aspect G2Sb: Second main surface Ga, Gb: the width direction end of the base material glass film Gc: The central part of the base material glass film in the width direction Gd: Ear Ge: Non-Products Department GR: Glass reel GX: Horizontal direction GY: longitudinal direction PS: Protective sheet V: gas

圖1是表示第一實施形態的玻璃膜的製造裝置的側視圖。 圖2是圖1的II-II箭視線上的剖面圖。 圖3是方向轉換裝置的後視圖。 圖4是圖3的IV-IV箭視線上的剖面圖。 圖5是橫向搬運裝置的第一搬運裝置的立體圖。 圖6是第二實施形態的方向轉換裝置的後視圖。 圖7是第三實施形態的方向轉換裝置的後視圖。 圖8是圖7的VIII-VIII箭視線上的側視圖。 圖9是第四實施形態的方向轉換裝置的後視圖。 圖10是圖9的X-X箭視線上的剖面圖。Fig. 1 is a side view showing the glass film manufacturing apparatus of the first embodiment. Fig. 2 is a cross-sectional view taken along the line of arrow II-II in Fig. 1. Fig. 3 is a rear view of the direction changing device. Fig. 4 is a cross-sectional view taken along the line of arrow IV-IV in Fig. 3. Fig. 5 is a perspective view of a first conveying device of the lateral conveying device. Fig. 6 is a rear view of the direction changing device of the second embodiment. Fig. 7 is a rear view of the direction changing device of the third embodiment. Fig. 8 is a side view of Fig. 7 on the line of arrow VIII-VIII. Fig. 9 is a rear view of the direction changing device of the fourth embodiment. Fig. 10 is a cross-sectional view taken along the line of arrow X-X in Fig. 9.

1:製造裝置 1: Manufacturing device

2:成形裝置 2: Forming device

3:方向轉換裝置 3: Direction conversion device

4:橫向搬運裝置 4: Horizontal handling device

5:捲繞裝置 5: Winding device

6:成形體 6: forming body

6a:溢流槽 6a: Overflow trough

7:拉邊輥 7: Side-drawing roller

8:退火爐 8: Annealing furnace

8a:退火爐輥(縱向搬運裝置) 8a: Annealing furnace roll (longitudinal conveying device)

9:支持輥 9: Support roller

10a:第一限制輥 10a: The first restriction roller

10b:第二限制輥 10b: The second limit roller

11:變形裝置 11: Deformation device

12:輥式輸送機 12: Roller conveyor

12a:導輥 12a: guide roller

13:氣流產生部 13: Airflow generating part

14:氣流調整部 14: Airflow adjustment department

18:第一搬運裝置 18: The first transport device

19:第二搬運裝置 19: The second conveying device

20:第三搬運裝置 20: The third conveying device

21、25、27:輸送機帶 21, 25, 27: conveyor belt

26:切斷裝置 26: Cutting device

26a:雷射照射裝置 26a: Laser irradiation device

26b:冷卻裝置 26b: Cooling device

28:捲繞輥 28: Winding roller

29:保護片材供給部 29: Protect the sheet supply part

G1:母材玻璃膜 G1: Base material glass film

G1Sa:母材玻璃膜的表面 G1Sa: The surface of the base material glass film

G1Sb:母材玻璃膜的背面 G1Sb: The back of the base material glass film

G2:製品玻璃膜 G2: Product glass film

G2Sa:第一主面 G2Sa: the first major aspect

G2Sb:第二主面 G2Sb: Second main surface

Ge:非製品部 Ge: Non-Products Department

GR:玻璃捲筒 GR: Glass reel

GX:橫方向 GX: Horizontal direction

GY:縱方向 GY: longitudinal direction

PS:保護片材 PS: Protective sheet

V:氣體 V: gas

Claims (11)

一種玻璃膜的製造方法,包括:成形步驟,藉由成形裝置而使帶狀的玻璃膜成形;以及搬運步驟,搬運所述玻璃膜;所述玻璃膜的製造方法的特徵在於: 所述搬運步驟包括:縱向搬運步驟,藉由縱向搬運裝置而於縱方向上搬運所述玻璃膜;方向轉換步驟,藉由方向轉換裝置而將所述玻璃膜的搬運方向自所述縱方向轉換為橫方向;以及橫向搬運步驟,藉由橫向搬運裝置而於所述橫方向上搬運所述玻璃膜; 所述玻璃膜包括於所述橫向搬運步驟中成為上表面的表面、以及位於所述表面的相反側的背面, 所述方向轉換步驟包括變形步驟,所述變形步驟使所述玻璃膜變形,以使所述背面呈凸狀。A method of manufacturing a glass film, comprising: a forming step of forming a ribbon-shaped glass film by a forming device; and a transporting step of transporting the glass film; the method of manufacturing the glass film is characterized by: The conveying step includes: a longitudinal conveying step of conveying the glass film in a longitudinal direction by a longitudinal conveying device; a direction changing step of changing the conveying direction of the glass film from the longitudinal direction by a direction changing device Is a lateral direction; and a lateral conveying step in which the glass film is conveyed in the lateral direction by a lateral conveying device; The glass film includes a surface that becomes an upper surface in the lateral transport step, and a back surface located on the opposite side of the surface, The direction conversion step includes a deforming step that deforms the glass film so that the back surface is convex. 如請求項1所述的玻璃膜的製造方法,其中所述方向轉換裝置包括變形裝置,所述變形裝置藉由利用氣流而使所述玻璃膜變形,以使所述背面呈凸狀。The method of manufacturing a glass film according to claim 1, wherein the direction changing device includes a deforming device that deforms the glass film by using airflow so that the back surface is convex. 如請求項2所述的玻璃膜的製造方法,其中所述變形裝置包括噴射氣體的噴附部, 藉由使所述氣流抵碰至所述玻璃膜的所述表面,而使所述玻璃膜變形,以使所述背面呈凸狀,所述氣流是藉由自所述噴附部噴射的所述氣體而產生。The method for manufacturing a glass film according to claim 2, wherein the deforming device includes a spraying part that sprays gas, By causing the airflow to hit the surface of the glass film, the glass film is deformed so that the back surface is convex, and the airflow is sprayed from the spray part The gas is produced. 如請求項3所述的玻璃膜的製造方法,其中所述方向轉換裝置包括:限制輥,配置於所述縱向搬運裝置的下方,並且與所述玻璃膜的所述表面接觸;以及輥式輸送機,配置於所述限制輥的下方位置,並且支持所述背面; 所述噴附部配置於所述限制輥與所述輥式輸送機之間。The method of manufacturing a glass film according to claim 3, wherein the direction changing device includes: a restricting roller arranged below the longitudinal conveying device and in contact with the surface of the glass film; and roller conveying The machine is arranged at the position below the restriction roller and supports the back surface; The spray attachment part is arranged between the restriction roller and the roller conveyor. 如請求項3或請求項4所述的玻璃膜的製造方法,其中所述變形裝置包括對所述氣流進行調整的氣流調整部。The method for manufacturing a glass film according to claim 3 or claim 4, wherein the deforming device includes an air flow adjusting part that adjusts the air flow. 如請求項3至請求項5中任一項所述的玻璃膜的製造方法,其中所述噴附部使所述氣流抵碰至所述玻璃膜的所述表面的寬度方向中央部。The method for manufacturing a glass film according to any one of claims 3 to 5, wherein the spraying part causes the airflow to abut the center portion in the width direction of the surface of the glass film. 如請求項2所述的玻璃膜的製造方法,其中所述變形裝置包括噴射氣體的噴附部, 藉由使所述氣流抵碰至所述玻璃膜的所述背面,而使所述玻璃膜變形,以使所述背面呈凸狀,所述氣流是藉由自所述噴附部噴射的所述氣體而產生。The method for manufacturing a glass film according to claim 2, wherein the deforming device includes a spraying part that sprays gas, By making the air flow hit the back surface of the glass film, the glass film is deformed so that the back surface is convex, and the air flow is sprayed from the spray part The gas is produced. 如請求項7所述的玻璃膜的製造方法,其中所述噴附部使所述氣流抵碰至所述玻璃膜的所述背面的寬度方向端部。The method of manufacturing a glass film according to claim 7, wherein the spray part makes the air flow abut the width direction end of the back surface of the glass film. 如請求項2所述的玻璃膜的製造方法,其中所述變形裝置包括抽吸氣體的抽吸部, 所述抽吸部藉由抽吸所述玻璃膜的所述背面側的空氣,而使所述玻璃膜變形,以使所述背面呈凸狀。The method of manufacturing a glass film according to claim 2, wherein the deforming device includes a suction part that sucks gas, The suction part deforms the glass film by sucking air on the back side of the glass film so that the back surface is convex. 如請求項9所述的玻璃膜的製造方法,其中所述抽吸部抽吸所述玻璃膜的所述背面的寬度方向中央部側的空氣。The method of manufacturing a glass film according to claim 9, wherein the suction unit sucks air on the side of the center portion in the width direction of the back surface of the glass film. 如請求項1至請求項10中任一項所述的玻璃膜的製造方法,其中所述橫向搬運步驟包括如下的步驟:藉由所述橫向搬運裝置,而對所述玻璃膜的寬度方向兩端部賦予推進所述橫方向上的搬運的第一推進力,並且對所述玻璃膜的寬度方向中央部賦予推進所述橫方向上的搬運的第二推進力, 所述第一推進力大於所述第二推進力。The method for manufacturing a glass film according to any one of claims 1 to 10, wherein the lateral conveying step includes the following steps: by the lateral conveying device, the width direction of the glass film is An end portion is provided with a first propelling force for advancing conveyance in the lateral direction, and a second propelling force for advancing conveyance in the lateral direction is given to the center portion in the width direction of the glass film, The first propulsion force is greater than the second propulsion force.
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