TW202124053A - Coating device and coating method - Google Patents

Coating device and coating method Download PDF

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TW202124053A
TW202124053A TW109133126A TW109133126A TW202124053A TW 202124053 A TW202124053 A TW 202124053A TW 109133126 A TW109133126 A TW 109133126A TW 109133126 A TW109133126 A TW 109133126A TW 202124053 A TW202124053 A TW 202124053A
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coating liquid
coating
coated
nozzle
slit
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TW109133126A
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Chinese (zh)
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TWI756841B (en
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西尾勤
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日商中外爐工業股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The present invention provides a coating device and a coating method, in which a coating nozzle 10 is moved above a body to be coated W relative to the body to be coated. When coating liquid P from the release slit 11 at the tip of the coating nozzle is applied to the surface of the body to be coated, the coating liquid introduction portion 13 of the coating nozzle accommodating the coating liquid is configured to communicate with the release slit, and at the bottom in the coating liquid introduction portion, a coating liquid supply body 14 provided with a coating liquid containing recess 14a of a predetermined pattern shape on the outer peripheral surface is rotatably disposed above the release slit, so that the coating liquid supply body can rotate to apply the coating liquid from inside the coating liquid containing recess through the release slit on the surface of the relatively moving body to be coated.

Description

塗佈裝置及塗佈方法 Coating device and coating method

本發明是關於一種塗佈裝置及塗佈方法，該塗佈裝置係將於前端部具有供塗液吐出的開縫狀吐出口的塗佈用噴嘴設置於被塗佈體的上方，使前述被塗佈體與塗佈用噴嘴相對移動，並通過前述開縫狀吐出口將塗液塗佈在被塗佈體的表面，該塗佈方法係使用該種塗佈裝置在被塗佈體的表面塗佈塗液。尤其具有下述特徵：在如前述使被塗佈體與塗佈用噴嘴相對移動，並通過設在塗佈用噴嘴的開縫狀吐出口將塗液塗佈在被塗佈體的表面時，使塗液不會發生濃度不均或黏度不均等，並使塗液在被塗佈體的表面能形成圓形形狀等各種形狀，而可簡單地進行塗佈。 The present invention relates to a coating device and a coating method. The coating device is provided with a coating nozzle having a slit-shaped discharge port for discharging coating liquid on the top of the coated body, so that the coating The coating body and the coating nozzle are relatively moved, and the coating liquid is applied to the surface of the coating body through the aforementioned slit-shaped discharge port. This coating method uses this kind of coating device on the surface of the coating body Apply the coating liquid. In particular, it has the following feature: when the body to be coated and the coating nozzle are moved relative to each other as described above, and the coating liquid is applied to the surface of the body to be coated through the slit-shaped discharge port provided in the coating nozzle, The coating liquid does not have uneven concentration or viscosity unevenness, and the coating liquid can be formed into various shapes such as a circular shape on the surface of the coated body, and the coating can be easily performed.

要在晶圓等的被塗佈體的表面利用塗佈裝置將塗液塗佈成既定的形狀時，過去以來使用過各種方法，例如，已知有將於前端部具有供塗液吐出的開縫狀吐出口的塗佈用噴嘴設置於被塗佈體的上方，並使前述被塗佈體與塗佈用噴嘴相對移動，而通過前述開縫狀吐出口將塗液塗佈在被塗佈體的表面的塗佈裝置等的各種塗佈裝置。 Various methods have been used in the past to apply the coating liquid to the surface of a coated body such as a wafer with a coating device into a predetermined shape. The coating nozzle of the slit-shaped ejection port is installed above the coated body, and the object to be coated and the coating nozzle are moved relative to each other, and the coating liquid is applied to the coated body through the slit-shaped ejection port. Various coating devices such as coating devices on the surface of the body.

在此，例如要在晶圓等的圓形形狀的被塗佈體的表面將塗液塗佈成圓形形狀時，已知有如專利文獻1所示之旋轉塗佈機，該旋轉塗佈機將圓 形形狀的被塗佈體設置在旋轉的轉台上方並使其旋轉，並且從噴嘴將塗液供給至如此旋轉的被塗佈體的中心部，藉由旋轉的被塗佈體的離心力將塗液塗佈在圓形形狀的被塗佈體的表面。 Here, for example, when a coating liquid is to be applied to the surface of a circular-shaped object to be coated such as a wafer in a circular shape, a spin coater such as that shown in Patent Document 1 is known. Will round The body to be coated is placed above the rotating turntable and rotates, and the coating liquid is supplied from the nozzle to the center of the coated body thus rotated, and the coating liquid is transferred by the centrifugal force of the rotating coated body. Coated on the surface of a circular shape to be coated.

然而，專利文獻1所示的旋轉塗佈機當中，要在旋轉的被塗佈體的表面以會形成固定的厚度之方式均勻地供給塗液相當不容易，而且被供給至旋轉的被塗佈體的表面的塗液會因為離心力而從被塗佈體上方甩飛而導致浪費塗液，尤其是昂貴的塗液的情況，便產生了浪費掉的塗液的成本提高的問題。 However, in the spin coater shown in Patent Document 1, it is quite difficult to uniformly supply the coating liquid on the surface of the rotating object to be coated in such a way that a fixed thickness is formed, and it is supplied to the rotating coated object. The coating liquid on the surface of the body will fly away from the body to be coated due to centrifugal force, resulting in wasted coating liquid, especially in the case of expensive coating liquid, which raises the problem of the cost of wasted coating liquid.

又，如專利文獻2所示，提案將圓形形狀的被塗佈體設置在旋轉的轉台上方並使其旋轉，並且使將塗液供給至旋轉的被塗佈體之表面的噴嘴從旋轉的被塗佈體的中心部慢慢朝外周側移動，將塗液以漩渦狀供給至旋轉的被塗佈體的表面，而將塗液塗佈在旋轉的圓形形狀的被塗佈體的表面。 In addition, as shown in Patent Document 2, it is proposed that a circular shape to be coated is placed on a rotating turntable and rotated, and the nozzle that supplies the coating liquid to the surface of the rotating coated body is changed from the rotating The center part of the coated body slowly moves toward the outer periphery, and the coating liquid is supplied to the surface of the rotating coated body in a spiral shape, and the coating liquid is applied to the surface of the rotating circular shape of the coated body .

然而，如專利文獻2所示，使將塗液供給至旋轉的被塗佈體之表面的噴嘴從旋轉的被塗佈體的中心部慢慢朝外周側移動，將塗液以漩渦狀供給至旋轉的被塗佈體的表面，而將塗液塗佈在旋轉的圓形形狀的被塗佈體的表面的情況，產生了以下問題：將塗液塗佈在圓形形狀的被塗佈體之表面所需的時間變長，以致生產性變差，並且亦變得難以將塗液以均一的厚度塗佈在被塗佈體的表面。 However, as shown in Patent Document 2, the nozzle that supplies the coating liquid to the surface of the rotating coated body is slowly moved from the center of the rotating coated body to the outer peripheral side, and the coating liquid is supplied to the surface in a whirlpool. The surface of the coated body is rotating, and the coating liquid is applied to the surface of the rotating circular shape to be coated. The following problem arises: the coating liquid is applied to the circular shape of the coated body The time required for the surface of the coating becomes longer, resulting in poor productivity, and it also becomes difficult to apply the coating liquid to the surface of the coated body with a uniform thickness.

又，如專利文獻3所示，提案設置可供被塗佈體放置，且可至少旋轉180度的旋轉台，並設置樹脂膜形成頭部及移動機構，該樹脂膜形成頭部係配置用以沿著相當於以通過前述被塗佈體之中心的第1方向(X方向)軸一分為二的第1被塗佈體周邊區域及第2被塗佈體周邊區域之一方的圓弧吐出樹脂的複數個噴嘴，並且前述噴嘴被設置成與被塗佈體的周邊區域相對向，該移動機構 係使被塗佈體與樹脂膜形成頭部朝向與第1方向正交的第2方向(Y方向)相對移動，藉由前述移動機構來控制樹脂膜形成頭部的移動，並且個別控制各噴嘴當中的塗液的吐出及停止，以個別控制從各噴嘴吐出的塗液的吐出寬度，從而將塗液塗佈在圓形形狀的被塗佈體的表面。 In addition, as shown in Patent Document 3, it is proposed to install a rotating table that can be placed on the body to be coated and can rotate at least 180 degrees, and to install a resin film forming head and a moving mechanism. The resin film forming head is arranged for Discharge along an arc corresponding to one of the peripheral area of the first coated object and the peripheral area of the second coated object that is divided into two by the axis in the first direction (X direction) passing through the center of the coated object A plurality of nozzles of resin, and the aforementioned nozzles are arranged opposite to the peripheral area of the body to be coated, the moving mechanism The body to be coated and the resin film forming head are relatively moved in a second direction (Y direction) orthogonal to the first direction. The movement of the resin film forming head is controlled by the aforementioned moving mechanism, and each nozzle is individually controlled. During the discharge and stop of the coating liquid, the discharge width of the coating liquid discharged from each nozzle is individually controlled, so that the coating liquid is applied to the surface of the circular-shaped object to be coated.

然而，如專利文獻3所示，為了將塗液塗佈在圓形形狀的被塗佈體的表面，產生了以下問題：裝置複雜化，其控制也困難，將塗液塗佈在圓形形狀的被塗佈體之表面所需的裝置成本提高，而且進行其控制操作也變得麻煩，因而無法簡單地將塗液塗佈在圓形形狀的被塗佈體的表面，再者，要將塗液以均勻的厚度塗佈在被塗佈體的表面也變得困難等。 However, as shown in Patent Document 3, in order to apply the coating liquid to the surface of a circular shape to be coated, the following problems have arisen: the device is complicated and its control is also difficult, and the coating liquid is applied to the circular shape. The cost of the equipment required for the surface of the coated body has increased, and the control operation has become cumbersome. Therefore, it is impossible to simply apply the coating liquid on the surface of the circular shape of the coated body. It also becomes difficult to apply the coating liquid to the surface of the body to be coated with a uniform thickness.

又，如專利文獻4所示，提案在具有朝噴嘴長邊方向延伸的圓柱形狀的空洞部、朝噴嘴長邊方向延伸的開縫狀吐出口、及形成從前述空洞部到前述吐出口的藥液通路的滴落部(land)的長條型的噴嘴主體當中，為了在前述空洞部內，將收容塗液的圓筒狀的旋轉歧管以可旋轉之方式嵌入，從塗液供給部將塗液供給並收容在該旋轉歧管內，並封住該旋轉歧管的端部，另一方面，在該旋轉歧管的外周部貫穿設置與要供給至被塗佈體上的塗液的塗佈形狀相對應的開口，使前述噴嘴主體相對於要塗佈塗液的被塗佈體相對移動，並且使供給有塗液的前述旋轉歧管在空洞部內旋轉，將貫穿設置在該旋轉歧管的外周的開口引導至與前述開縫狀吐出口相對應的位置，從設在旋轉歧管的外周的前述開口通過開縫狀的吐出口將塗液供給至前述被塗佈體的表面，以與設在旋轉歧管的外周的開口的形狀相對應的方式將塗液塗佈在被塗佈體的表面。 In addition, as shown in Patent Document 4, it is proposed to have a cylindrical cavity extending in the longitudinal direction of the nozzle, a slit-shaped discharge port extending in the longitudinal direction of the nozzle, and a medicine formed from the cavity to the discharge port. In the elongated nozzle body of the land of the liquid passage, in order to rotatably insert a cylindrical rotating manifold containing the coating liquid in the cavity, the coating liquid is supplied from the coating liquid supply part. The liquid is supplied and contained in the rotating manifold, and the end of the rotating manifold is sealed. On the other hand, the outer peripheral portion of the rotating manifold is penetrated with the coating liquid to be supplied to the body to be coated. The opening corresponding to the shape of the cloth allows the nozzle body to move relative to the body to be coated with the coating liquid, and the rotating manifold supplied with the coating liquid is rotated in the cavity, and is installed through the rotating manifold The outer periphery of the opening is guided to a position corresponding to the slit-shaped discharge port, and the coating liquid is supplied to the surface of the coated body through the slit-shaped discharge port from the opening provided on the outer periphery of the rotating manifold. The coating liquid is applied to the surface of the body to be coated in a manner corresponding to the shape of the opening provided on the outer periphery of the rotating manifold.

然而，如專利文獻4所示，將塗液供給並收容在以可旋轉之方式嵌入於噴嘴主體的空洞部內的圓筒狀的旋轉歧管內，使如此收容有塗液的旋轉 歧管在空洞部內旋轉，使貫穿設在該旋轉歧管的外周的開口被引導至與噴嘴主體的開縫狀的吐出口相對應的位置的情況，使收容在旋轉歧管內的塗液從前述開口通過開縫狀的吐出口而將塗液供給至前述被塗佈體的表面時，會產生以下問題：收容在旋轉歧管內的塗液從貫穿設置的開口通過開縫狀的吐出口過多的被供給至被塗佈體的表面，而變得難以用固定的厚度將塗液供給至被塗佈體的表面，或是旋轉歧管內的塗液會通過設在旋轉歧管的前述開口流入旋轉歧管與空洞部之間，以致該塗液通過開縫狀的吐出口滴在被塗佈體的表面，或是甚至收容在旋轉歧管內的塗液無法整體均勻地被使用，部份塗液的濃度或黏度發生不均以致發生塗工不良的問題。 However, as shown in Patent Document 4, the coating liquid is supplied and contained in a cylindrical rotating manifold that is rotatably embedded in the cavity of the nozzle body, so that the coating liquid is rotated in this manner. When the manifold rotates in the cavity and the opening penetrating the outer circumference of the rotating manifold is guided to a position corresponding to the slit-shaped discharge port of the nozzle body, the coating liquid contained in the rotating manifold is removed from When the opening is used to supply the coating liquid to the surface of the object to be coated through the slit-shaped discharge port, the following problem arises: the coating liquid contained in the rotating manifold passes through the slit-shaped discharge port through the opening provided therethrough Too much is supplied to the surface of the coated body, and it becomes difficult to supply the coating liquid to the surface of the coated body with a fixed thickness, or the coating liquid in the rotating manifold will pass through the aforementioned The opening flows into the space between the rotating manifold and the cavity, so that the coating liquid drips on the surface of the body to be coated through the slit-shaped discharge port, or even the coating liquid contained in the rotating manifold cannot be used uniformly throughout. The concentration or viscosity of part of the coating solution is uneven, resulting in poor coating problems.

又，專利文獻5所示的內容也與前述專利文獻4所示者同樣是將塗液收容在內筒部內，使如此被收容的塗液通過周部開口與吐出口重疊的部分而供給至被塗佈體的表面，因而存在有與前述專利文獻4同樣的問題。 In addition, the content shown in Patent Document 5 is the same as that shown in Patent Document 4, in that the coating liquid is contained in the inner cylinder, and the coating liquid thus contained is supplied to the substrate through the portion where the peripheral opening overlaps the discharge port. The surface of the coated body therefore has the same problems as the aforementioned Patent Document 4.

[先前技術文獻] [Prior Technical Literature]

[專利文獻] [Patent Literature]

專利文獻1：日本特開2009-290029號公報 Patent Document 1: Japanese Patent Application Publication No. 2009-290029

專利文獻2：日本特開2002-320902號公報 Patent Document 2: Japanese Patent Application Publication No. 2002-320902

專利文獻3：日本特開2013-54128號公報 Patent Document 3: JP 2013-54128 A

專利文獻4：日本特開2014-22545號公報 Patent Document 4: Japanese Patent Application Publication No. 2014-22545

專利文獻5：日本特開2012-120938號公報 Patent Document 5: JP 2012-120938 A

本發明之課題在於解決要在被塗佈體等的被塗佈體的表面將塗液塗佈成既定的形狀時之如前述的各種問題。 The subject of the present invention is to solve the aforementioned various problems when a coating liquid is applied to the surface of an object to be coated, such as an object to be coated, in a predetermined shape.

亦即，本發明之課題如下：在將前端部具有供塗液吐出的開縫狀吐出口的塗佈用噴嘴設置在被塗佈體上方，使前述被塗佈體與塗佈用噴嘴相對移動，而通過前述開縫狀吐出口將塗液塗佈在被塗佈體的表面時，使塗液發生不會發生濃度不均或黏度不均等，且可使塗液在被塗佈體的表面形成圓形狀等各種形狀，而可簡單地進行塗佈。 That is, the subject of the present invention is as follows: a coating nozzle having a slit-shaped discharge port for discharging the coating liquid at the tip portion is installed above the coated body, and the coated body and the coating nozzle are moved relative to each other , And when the coating liquid is applied to the surface of the coated body through the aforementioned slit-like discharge port, the coating liquid will not have uneven concentration or viscosity unevenness, and the coating liquid can be applied to the surface of the coated body. Various shapes such as round shapes can be formed, and coating can be easily performed.

本發明的塗佈裝置為了解決如前所述的課題，塗佈裝置係將於前端部具有供塗液吐出的開縫狀吐出口的塗佈用噴嘴設置於被塗佈體上方，使前述被塗佈體與塗佈用噴嘴相對移動，通過前述開縫狀吐出口將塗液塗佈在被塗佈體之表面，該塗佈裝置中，將使塗液從塗液供給口供給至前述塗佈用噴嘴內部的塗液導入部設置成與前述開縫狀吐出口連通，並且將在外周面設有收容被供給至該塗液導入部內的塗液且形成既定圖案形狀的塗液收容凹部的塗液供給體，以位在與前述塗液導入部連通的開縫狀吐出口的上方的方式在塗液導入部內設置成可旋轉，使前述被塗佈體與塗佈用噴嘴相對移動，並且使在前述塗液收容凹部內被供給有塗液的塗液供給體在塗液導入部內旋轉，使塗液從塗液收容凹部內通過塗佈用噴嘴的前端部之開縫狀吐出口而供給至與塗佈用噴嘴相對移動的被塗佈體的表面，並將塗液依塗液收容凹部的形狀塗佈在前述被塗佈體的表面。 In order to solve the aforementioned problems in the coating device of the present invention, a coating nozzle having a slit-shaped discharge port for discharging the coating liquid is installed above the coated body in the coating device, so that the coating The coating body and the coating nozzle move relatively, and the coating liquid is applied to the surface of the coating body through the slit-shaped discharge port. In this coating device, the coating liquid is supplied from the coating liquid supply port to the coating liquid. The coating liquid introduction part inside the cloth nozzle is provided to communicate with the aforementioned slit-shaped discharge port, and a coating liquid receiving recessed portion that accommodates the coating liquid supplied into the coating liquid introduction part and forms a predetermined pattern shape is provided on the outer peripheral surface The coating liquid supply body is rotatably installed in the coating liquid introduction part so as to be positioned above the slit-shaped discharge port communicating with the coating liquid introduction part, so that the coated body and the coating nozzle are relatively moved, and The coating liquid supply body supplied with the coating liquid in the coating liquid accommodating recess is rotated in the coating liquid introduction part, and the coating liquid is supplied from the coating liquid accommodating recess through the slit-like discharge port at the tip of the coating nozzle The coating liquid is applied to the surface of the object to be coated that moves relatively to the coating nozzle, and the coating liquid is applied to the surface of the object to be coated in accordance with the shape of the coating liquid accommodating recess.

接下來，如本發明的塗佈裝置，在從塗液供給口供給有塗液的塗佈用噴嘴之塗液導入部內，將塗液供給體以位在開縫狀吐出口的上方的方式設置成可旋轉，並且將被供給至塗液導入部內的塗液引導至設在該塗液供給體之外周面之形成既定圖案形狀的塗液收容凹部內，使以上述方式在塗液收容凹部內被引導有塗液的塗液供給體在前述開縫狀吐出口上方的位置旋轉，並且使被塗佈體與塗佈用噴嘴相對移動時，在前述塗液供給體之塗液收容凹部被引導至與開縫狀吐出口連通的位置的狀態下，塗液從該塗液收容凹部內通過塗佈用噴嘴的前端部之開縫狀吐出口被供給至與塗佈用噴嘴相對移動的被塗佈體的表面，而將塗液依塗液收容凹部的形狀塗佈在被塗佈體的表面。 Next, as in the coating device of the present invention, the coating liquid supply body is installed in the coating liquid introduction part of the coating nozzle supplied with the coating liquid from the coating liquid supply port so as to be positioned above the slit-shaped discharge port. The coating liquid is rotatable, and the coating liquid supplied into the coating liquid introduction part is guided to the coating liquid accommodating recess formed on the outer peripheral surface of the coating liquid supply body and forming a predetermined pattern shape, so as to be in the coating liquid accommodating recess in the above-mentioned manner. When the coating liquid supply body guided with the coating liquid rotates at a position above the slit-shaped discharge port and the coated body and the coating nozzle are moved relative to each other, the coating liquid supply body is guided in the coating liquid receiving recessed portion of the coating liquid supply body In the state where it communicates with the slit-shaped ejection port, the coating liquid is supplied from the coating liquid accommodating recess through the slit-shaped ejection port at the tip of the coating nozzle to the coated object that moves relative to the coating nozzle. On the surface of the cloth body, the coating liquid is applied to the surface of the body to be coated in accordance with the shape of the coating liquid accommodating recess.

又，本發明的塗佈裝置當中，亦可使前述塗液供給體形成圓柱狀，並且使有塗液供給的前述塗佈用噴嘴的內部之塗液導入部的至少底部形成為平面狀，使前述開縫狀吐出口與該形成為平面狀的塗液導入部的底部連通，以與該形成為平面狀的塗液導入部之底部接觸的方式將前述塗液供給體設置成可旋轉。 Furthermore, in the coating device of the present invention, the coating liquid supply body may be formed in a cylindrical shape, and at least the bottom of the coating liquid introduction part inside the coating nozzle to which the coating liquid is supplied may be formed into a flat shape. The slit-shaped discharge port communicates with the bottom of the flat coating liquid introduction part, and the coating liquid supply body is rotatably installed so as to contact the bottom of the flat coating liquid introduction part.

又，本發明的塗佈裝置當中，可使前述塗液供給體形成圓柱狀，並且使有塗液供給的塗佈用噴嘴的內部之塗液導入部的至少底部形成為圓弧狀，使前述開縫狀吐出口與該形成圓弧狀的塗液導入部的底部連通，並且以與該形成為圓弧狀的塗液導入部之底部接觸的方式將前述塗液供給體設置成可旋轉。如此一來，在設有塗液收容凹部的塗液供給體以與形成為圓弧狀的塗液導入部之底部密接的狀態被保持成可旋轉，且未設有塗液收容凹部的塗液供給體的部分與塗液導入部之底部密接的狀態下，便可確實防止塗液通過塗佈用噴 嘴的前端部之開縫狀吐出口而漏出，塗佈在被塗佈體的塗液的圖案的輪廓會變得更清晰。 In addition, in the coating device of the present invention, the coating liquid supply body can be formed into a cylindrical shape, and at least the bottom of the coating liquid introduction part inside the coating nozzle to which the coating liquid is supplied is formed into an arc shape. The slit-shaped discharge port communicates with the bottom of the arc-shaped coating liquid introduction part, and the coating liquid supply body is set to be rotatable so as to be in contact with the bottom of the arc-shaped coating liquid introduction part. In this way, the coating liquid supply body provided with the coating liquid receiving recess is held in a rotatable state in close contact with the bottom of the coating liquid introduction portion formed in an arc shape, and the coating liquid is not provided with the coating liquid receiving recess When the part of the supply body is in close contact with the bottom of the coating liquid introduction part, the coating liquid can be reliably prevented from passing through the coating spray The slit-like discharge port at the tip of the nozzle leaks out, and the outline of the pattern of the coating liquid applied to the body becomes clearer.

又，本發明的塗佈裝置當中，由於使旋轉的塗液供給體形成為圓柱狀，並將塗液先供給至塗液收容凹部內之後再吐出，因此可防止如前述專利文獻4之要直接吐出大量被收容在圓筒狀的旋轉歧管內的塗液的情況時，塗液會過多地吐出或是滴落之情形。 In addition, in the coating device of the present invention, since the rotating coating liquid supply body is formed in a cylindrical shape and the coating liquid is first supplied into the coating liquid accommodating recess and then discharged, it is possible to prevent direct discharge as in the aforementioned Patent Document 4 In the case of a large amount of coating liquid contained in the cylindrical rotating manifold, the coating liquid may be excessively discharged or dripped.

又，本發明的塗佈裝置當中，使前述被塗佈體與塗佈用噴嘴相對移動，並且使在前述塗液收容凹部內供給有塗液的塗液供給體在塗液導入部內旋轉，使被收容在塗液收容凹部內的塗液通過塗佈用噴嘴的前端部之開縫狀吐出口而供給至與塗佈用噴嘴相對移動的被塗佈體的表面，而可將塗液依前述塗液收容凹部的形狀在晶圓等形成為圓形形狀的被塗佈體的表面塗佈成圓形形狀。 In addition, in the coating device of the present invention, the coated body and the coating nozzle are moved relative to each other, and the coating liquid supply body supplied with the coating liquid in the coating liquid accommodating recessed portion is rotated in the coating liquid introducing portion to make The coating liquid contained in the coating liquid accommodating recess is supplied to the surface of the object to be coated which moves relative to the coating nozzle through the slit-like discharge port at the tip of the coating nozzle, and the coating liquid can be supplied as described above. The shape of the coating liquid accommodating recess is coated in a circular shape on the surface of an object to be coated formed in a circular shape such as a wafer.

在此，在以上述方式將塗液從塗佈用噴嘴在被塗佈體的表面塗佈成圓形形狀時，可在塗液供給體的外周面將塗液收容凹部凹設成軸方向的長度較長的橢圓形狀，並使被塗佈體與塗佈用噴嘴相對移動的移動速度比使前述塗液供給體旋轉的圓周速度更快，而在被塗佈體的表面將塗液塗佈成圓形形狀。如此一來，可縮小設置塗液收容凹部的塗液供給體的直徑，而可使塗佈用噴嘴小型化。 Here, when the coating liquid is applied to the surface of the coated body from the coating nozzle in the above-mentioned manner in a circular shape, the coating liquid receiving recess may be recessed in the axial direction on the outer peripheral surface of the coating liquid supply body. Long elliptical shape, and the moving speed of the relative movement of the coated body and the coating nozzle is faster than the circumferential speed of the rotation of the coating liquid supply body, and the coating liquid is applied on the surface of the coated body Into a circular shape. In this way, the diameter of the coating liquid supply body provided with the coating liquid accommodating recesses can be reduced, and the coating nozzle can be miniaturized.

而且，本發明的塗佈方法當中，使用如前所述的塗佈裝置，在藉由於前述塗液導入部內設置成可旋轉的塗液供給體之未設有塗液收容凹部的部分封閉塗佈用噴嘴的前端部之開縫狀吐出口的狀態下，從前述塗液供給口將塗液供給至塗液導入部內，並且將前述塗液供給至形成於在該塗液導入部內設 置成可旋轉的前述塗液供給體之外周面之形成既定圖案形狀的塗液收容凹部內，使前述被塗佈體與塗佈用噴嘴相對移動，並且使在前述塗液收容凹部內供給有塗液的塗液供給體在塗液導入部內旋轉，從塗液收容凹部內通過塗佈用噴嘴的前端部之開縫狀吐出口將塗液供給至與塗佈用噴嘴相對移動的被塗佈體的表面，而將塗液依塗液收容凹部的形狀塗佈在前述被塗佈體的表面。 Furthermore, in the coating method of the present invention, the coating device as described above is used, and the coating liquid supply body is rotatably provided in the coating liquid introduction portion, and the portion not provided with the coating liquid accommodating recess is closed for coating. With the slit-shaped discharge port at the tip of the nozzle, the coating liquid is supplied from the coating liquid supply port into the coating liquid introduction part, and the coating liquid is supplied to the coating liquid inlet formed in the coating liquid introduction part. In the coating liquid receiving recess formed in a predetermined pattern on the outer peripheral surface of the coating liquid supply body that is set to be rotatable, the body to be coated and the coating nozzle are relatively moved, and the coating liquid receiving recess is supplied with The coating liquid supply body of the coating liquid rotates in the coating liquid introduction part, and supplies the coating liquid from the coating liquid accommodating recess through the slit-like discharge port at the tip of the coating nozzle to the coated object moving relative to the coating nozzle The surface of the body, and the coating liquid is applied to the surface of the body to be coated according to the shape of the coating liquid containing recess.

如此實施的情況，從前述塗液供給口將塗液供給至形成為筒狀的塗液導入部內時，塗佈用噴嘴之開縫狀吐出口會被塗液供給體之未設有塗液收容凹部的部分封閉，使塗液不會漏出至外部。而且，如前述使被塗佈體與塗佈用噴嘴相對移動，並且使在塗液收容凹部內供給有塗液的前述塗液供給體在塗液導入部內旋轉時，可使被收容在塗液收容凹部內的塗液通過塗佈用噴嘴之開縫狀吐出口而被供給至與塗佈用噴嘴相對移動的被塗佈體的表面，而將塗液依塗液收容凹部的形狀塗佈在被塗佈體的表面。 In the case of this implementation, when the coating liquid is supplied from the aforementioned coating liquid supply port into the cylindrical coating liquid introduction part, the slit-shaped discharge port of the coating nozzle will be accommodated by the coating liquid supply body which is not provided with the coating liquid. The recessed part is partially closed so that the coating liquid will not leak to the outside. Furthermore, when the body to be coated and the coating nozzle are moved relative to each other, and the coating liquid supply body supplied with the coating liquid in the coating liquid accommodating recess is rotated in the coating liquid introduction part, the coating liquid can be accommodated in the coating liquid. The coating liquid in the accommodating recess is supplied to the surface of the coated body moving relative to the coating nozzle through the slit-like discharge port of the coating nozzle, and the coating liquid is applied to the surface of the coating liquid accommodating recess according to the shape of the coating liquid accommodating recess. The surface of the coated body.

本發明的塗佈裝置當中，如前所述，在有塗液從塗液供給口供給至塗佈用噴嘴之內部的塗液導入部內的底部，將塗液供給體以位在開縫狀吐出口的上方的方式設置成可旋轉，使被供給至前述塗液導入部內的塗液收容在設於該塗液供給體之外周面之形成既定圖案形狀的塗液收容凹部內，使以上述方式於塗液收容凹部內供給有塗液的塗液供給體在前述開縫狀吐出口上方的位置旋轉，並且使被塗佈體與塗佈用噴嘴相對移動時，可使塗液從前述塗液收容凹部內通過塗佈用噴嘴的前端部當中的開縫狀吐出口供給至與塗佈用噴嘴相對移動的被塗佈體的表面，而將塗液依塗液收容凹部的形狀塗佈在被塗佈體的表面。 In the coating device of the present invention, as described above, at the bottom of the coating liquid introduction part where the coating liquid is supplied from the coating liquid supply port to the inside of the coating nozzle, the coating liquid supply body is ejected in a slit shape. The upper part of the outlet is set to be rotatable, so that the coating liquid supplied into the aforementioned coating liquid introduction part is accommodated in the coating liquid accommodating recess formed on the outer peripheral surface of the coating liquid supply body and formed in a predetermined pattern. When the coating liquid supply body supplied with the coating liquid in the coating liquid accommodating recess is rotated at a position above the slit-shaped discharge port, and the coated body and the coating nozzle are moved relative to each other, the coating liquid can be removed from the coating liquid The inside of the accommodating recess is supplied to the surface of the coated body moving relative to the coating nozzle through the slit-like discharge port in the tip of the coating nozzle, and the coating liquid is applied to the surface of the object according to the shape of the coating liquid accommodating recess. The surface of the coated body.

結果，本發明的塗佈裝置或是使用該種塗佈裝置的塗佈方法當中，在將於前端部具有供塗液吐出的開縫狀吐出口的塗佈用噴嘴設置於被塗佈體的上方，使前述被塗佈體與塗佈用噴嘴相對移動，通過前述開縫狀吐出口將塗液塗佈在被塗佈體的表面時，可使塗液發生不會發生濃度不均或黏度不均等，並且使塗液在被塗佈體的表面形成圓形形狀等各種形狀，而可簡單地進行塗佈。 As a result, in the coating device of the present invention or the coating method using such a coating device, a coating nozzle having a slit-shaped discharge port for discharging the coating liquid at the tip is installed on the body to be coated Above, when the coated body and the coating nozzle are moved relative to each other, and the coating liquid is applied to the surface of the coated body through the slit-like ejection port, the coating liquid can be prevented from unevenness in concentration or viscosity. It is not uniform, and the coating liquid is formed into various shapes such as a circular shape on the surface of the coated body, and the coating can be easily performed.

10:塗佈用噴嘴 10: Nozzle for coating

11:開縫狀吐出口 11: Slotted spout

12:塗液供給口 12: Coating liquid supply port

13:塗液導入部 13: Coating liquid introduction part

14:塗液供給體 14: Coating fluid supply body

14a:塗液收容凹部 14a: Coating liquid receiving recess

14b:旋轉軸 14b: Rotation axis

15:旋轉裝置 15: Rotating device

P:塗液 P: coating liquid

W:被塗佈體 W: Coated body

圖1係顯示在本發明之實施形態的塗佈裝置當中，相對於在供給有塗液的塗佈用噴嘴之塗液導入部內設置成可旋轉的塗液供給體的外周面，設有收容塗液且形成為橢圓形狀的塗液收容凹部的狀態，(A)係設有塗液收容凹部的塗液供給體的概略正面圖，(B)係設在塗液供給體之外周面的塗液收容凹部的展開平面圖。 Fig. 1 shows a coating device according to an embodiment of the present invention, with respect to the outer peripheral surface of a coating liquid supply body that is rotatable in the coating liquid introduction part of the coating nozzle supplied with the coating liquid, and is provided with a housing coating The state of the coating liquid containing recesses formed into an elliptical shape, (A) is a schematic front view of the coating liquid supply body provided with the coating liquid storage recesses, and (B) is the coating liquid provided on the outer peripheral surface of the coating liquid supply body An expanded plan view of the accommodating recess.

圖2係顯示在前述實施形態的塗佈裝置當中，使前述塗液供給體被供給有塗佈用噴嘴之內部之塗液的前述塗佈用噴嘴之內部之塗液導入部的至少底部形成為平面狀，並且使前述開縫狀吐出口與該形成為平面狀的塗液導入部的底部連通，以與形成為平面狀的塗液導入部的底部接觸的方式將前述塗液供給體設置成可旋轉，並且由塗液供給體之未設有塗液收容凹部的部分將塗佈用噴嘴的前端部之開縫狀吐出口封閉的狀態，(A)係塗佈用噴嘴的長邊方向的概略剖面說明圖，(B)係與塗佈用噴嘴的長邊方向交叉的方向的概略剖面說明圖。 Fig. 2 shows that in the coating apparatus of the foregoing embodiment, at least the bottom of the coating liquid introduction part inside the coating nozzle, in which the coating liquid supply body is supplied with the coating liquid inside the coating nozzle, is formed as It is flat, and the slit-shaped discharge port is communicated with the bottom of the flat coating liquid introduction part, and the coating liquid supply body is set so as to contact the bottom of the flat coating liquid introduction part. It is rotatable, and the slit-like discharge port at the tip of the coating nozzle is closed by the portion of the coating liquid supply body that is not provided with the coating liquid receiving recess. (A) is the longitudinal direction of the coating nozzle A schematic cross-sectional explanatory diagram, (B) is a schematic cross-sectional explanatory diagram in a direction intersecting the longitudinal direction of the coating nozzle.

圖3係顯示出在前述實施形態之塗佈裝置中，在將前述塗液供給體在塗佈用噴嘴之內部之底部形成為平面狀的塗液導入部內設置成可旋轉，並且由該塗液供給體之未設有塗液收容凹部的部分封閉塗佈用噴嘴的前端部之開縫狀吐出口的狀態下，從塗佈用噴嘴的塗液供給口將塗液供給至塗液導入部，而將塗液收容在塗液供給體之塗液收容凹部內的狀態，(A)係塗佈用噴嘴的長邊方向的概略剖面說明圖，(B)係與塗佈用噴嘴的長邊方向交叉的方向的概略剖面說明圖。 Fig. 3 shows that in the coating device of the foregoing embodiment, the coating liquid supply body is set to be rotatable in the coating liquid introduction part where the bottom of the coating nozzle inside the coating nozzle is formed to be rotatable, and the coating liquid In the state where the portion of the supply body not provided with the coating liquid accommodating recess is closed with the slit-like discharge port at the tip of the coating nozzle, the coating liquid is supplied to the coating liquid introduction part from the coating liquid supply port of the coating nozzle, The state where the coating liquid is contained in the coating liquid accommodating recess of the coating liquid supply body, (A) is a schematic cross-sectional explanatory view of the longitudinal direction of the coating nozzle, and (B) is the longitudinal direction of the coating nozzle A schematic cross-sectional explanatory diagram of the direction of intersection.

圖4係顯示在前述實施形態的塗佈裝置當中，在將塗液供給至塗佈用噴嘴之塗液導入部的狀態下，使該塗佈用噴嘴在被塗佈體的上方移動，並且使前述塗液供給體在塗液導入部內旋轉，而從塗液供給體之塗液收容凹部內，使塗液從塗佈用噴嘴的前端部的開縫狀吐出口塗佈在被塗佈體的表面的狀態，(A)係顯示利用塗佈用噴嘴將塗液塗佈在被塗佈體之表面的最初狀態的塗佈用噴嘴之長邊方向及與長邊方向交叉的方向的概略剖面說明圖，(B)係顯示利用塗佈用噴嘴將塗液以最大寬度塗佈在被塗佈體之表面的狀態的塗佈用噴嘴之長邊方向及與長邊方向交叉的方向的概略剖面說明圖，(C)係利用塗佈用噴嘴將塗液塗佈在被塗佈體的整個表面時之塗佈用噴嘴的長邊方向及與長邊方向交叉的方向的概略剖面說明圖。 Fig. 4 shows the coating device of the foregoing embodiment, in a state where the coating liquid is supplied to the coating liquid introduction part of the coating nozzle, the coating nozzle is moved above the object to be coated, and the The aforementioned coating liquid supply body is rotated in the coating liquid introduction part, and the coating liquid is applied from the slit-like discharge port at the tip of the coating nozzle from the coating liquid accommodating recess of the coating liquid supply body to the coating body The state of the surface, (A) is a schematic cross-sectional illustration showing the longitudinal direction of the coating nozzle and the direction intersecting the longitudinal direction in the initial state of the coating nozzle applying the coating liquid on the surface of the body to be coated Figure, (B) is a schematic cross-sectional illustration showing the longitudinal direction of the coating nozzle and the direction intersecting the longitudinal direction of the coating nozzle in a state where the coating liquid is applied to the surface of the coated body with the largest width using the coating nozzle Figure (C) is a schematic cross-sectional explanatory view of the longitudinal direction of the coating nozzle and the direction intersecting the longitudinal direction when the coating liquid is applied to the entire surface of the body using the coating nozzle.

圖5係顯示在前述實施形態的塗佈裝置當中，如前述圖4所示，使塗佈用噴嘴在被塗佈體上方移動，並且使前述塗液供給體在塗液導入部內旋轉，而從塗液供給體之塗液收容凹部內使塗液從塗佈用噴嘴的前端部的開縫狀吐出口塗佈在被塗佈體之表面的被塗佈體的平面狀態，(A)係顯示出圖4(A)之狀態的平面圖，(B)係顯示出圖4(B)之狀態的平面圖，(C)係顯示出圖4(C)之狀態的平面圖。 Figure 5 shows the coating device of the foregoing embodiment. As shown in Figure 4, the coating nozzle is moved above the body to be coated, and the coating liquid supply body is rotated in the coating liquid introduction section, and The flat state of the coated body in which the coating liquid is applied to the surface of the coated body from the slit-like discharge port at the tip of the coating nozzle in the coating liquid receiving recess of the coating liquid supply body, (A) is shown Show a plan view of the state of FIG. 4(A), (B) is a plan view showing the state of FIG. 4(B), and (C) is a plan view showing the state of FIG. 4(C).

圖6係顯示在前述實施形態的塗佈裝置當中，將前述塗液供給體在塗佈用噴嘴之內部之底部形成為圓弧狀的塗液導入部內設置成可旋轉，並且由該塗液供給體之未設有塗液收容凹部的部分將塗佈用噴嘴的前端部當中的開縫狀吐出口封閉的狀態的概略剖面說明圖。 Fig. 6 shows that in the coating device of the foregoing embodiment, the coating liquid supply body is set to be rotatable in the coating liquid introduction part formed in an arc shape at the bottom of the coating nozzle, and is supplied by the coating liquid A schematic cross-sectional explanatory view of a state in which the portion of the body not provided with the coating liquid accommodating recessed portion closes the slit-like discharge port in the tip portion of the coating nozzle.

圖7係顯示出在前述實施形態的塗佈裝置當中，在塗液供給體的外周面設置收容塗液的塗液收容凹部時，將塗液收容凹部的形狀改變後的複數個變更例的概略展開圖。 Fig. 7 shows the outline of a plurality of modified examples in which the shape of the coating liquid receiving recess is changed when the coating liquid receiving recess is provided on the outer peripheral surface of the coating liquid supply body in the coating device of the foregoing embodiment Expanded view.

以下，依據所附圖面來具體說明本發明之實施形態的塗佈裝置及塗佈方法。此外，本發明的塗佈裝置及塗佈方法並不限於以下實施形態所示的內容，而可在不改變發明之要旨的範圍當中進行適當的變更來實施。 Hereinafter, the coating device and coating method of the embodiment of the present invention will be described in detail based on the drawings. In addition, the coating device and coating method of the present invention are not limited to the content shown in the following embodiments, and can be implemented with appropriate changes within a range that does not change the gist of the invention.

在此，該實施形態的塗佈裝置是如圖2(A)、(B)等的圖式所示，將在前端部具有供塗液P吐出的開縫狀吐出口11的塗佈用噴嘴10配置在被塗佈體W上方，並將從塗液供給口12施加壓力而被供給有塗液P至前述塗佈用噴嘴10之內部的塗液導入部13設置成與前述開縫狀吐出口11連通，並且使與該開縫狀吐出口11連通的塗液導入部13的底部形成為平面狀。 Here, the coating apparatus of this embodiment is a coating nozzle having a slit-shaped discharge port 11 for discharging the coating liquid P at the tip as shown in the diagrams of Fig. 2 (A), (B), etc. 10 is arranged above the body W to be coated, and the coating liquid introduction part 13 which is supplied with the coating liquid P to the inside of the coating nozzle 10 by applying pressure from the coating liquid supply port 12 is set to be slit-like ejection The outlet 11 communicates, and the bottom of the coating liquid introduction part 13 communicating with the slit-shaped discharge outlet 11 is formed in a flat shape.

又，在該實施形態的塗佈裝置當中，作為塗液供給體14，如圖1(A)、(B)所示，使用在形成為圓柱狀的塗液供給體14的外周面凹設有形成為軸方向的長度較長之橢圓形狀的塗液收容凹部14a而成者，如圖2(A)、(B)所示，使該塗液供給體14如前述與形成為平面狀的塗液導入部13的底部接觸，將該塗液供給體14收容成可在塗液導入部13內的底部旋轉，並且使旋轉軸14b從該塗 液供給體14的兩端面的中心部朝兩側延伸出去，將各旋轉軸14b以密封在塗佈用噴嘴10的兩側部的狀態保持成可旋轉，並藉由旋轉裝置15使從塗佈用噴嘴10的單側的側部延伸出去的旋轉軸14b旋轉。 In addition, in the coating apparatus of this embodiment, as the coating liquid supply body 14, as shown in Figs. As shown in Figure 2 (A) and (B), the coating liquid supply body 14 is formed into a flat coating liquid as described above. The bottom of the introduction portion 13 contacts, the coating liquid supply body 14 is housed so as to be rotatable at the bottom of the coating liquid introduction portion 13, and the rotating shaft 14b is moved from the coating The center portions of both end surfaces of the liquid supply body 14 extend to both sides, and each rotating shaft 14b is kept rotatable while being sealed on both sides of the coating nozzle 10, and the rotating device 15 makes the coating The nozzle 10 is rotated by a rotating shaft 14b extending from one side of the nozzle 10.

在此，本實施形態的塗佈裝置中，如前述使形成為圓柱狀的塗液供給體14與形成為平面狀的塗液導入部13的底部接觸，並在塗液導入部13內的底部收容成可旋轉，且如圖3(A)、(B)所示，使該塗液供給體14之前述塗液收容凹部14a不與塗佈用噴嘴10的開縫狀吐出口11重疊，而在未設有塗液收容凹部14a的塗液供給體14的部分封閉開縫狀吐出口11，在該狀態下，從前述塗液供給口12將塗液P供給至塗佈用噴嘴10內部的塗液導入部13，而藉由前述塗液供給體14使被供給至塗液導入部13內的塗液P不會被引導至開縫狀吐出口11。 Here, in the coating device of the present embodiment, the coating liquid supply body 14 formed in a cylindrical shape is brought into contact with the bottom of the coating liquid introduction portion 13 formed in a flat shape as described above, and the bottom of the coating liquid introduction portion 13 It is housed so as to be rotatable, and as shown in Figs. 3(A) and (B), so that the aforementioned coating liquid accommodating recess 14a of the coating liquid supply body 14 does not overlap with the slit-shaped discharge port 11 of the coating nozzle 10, and The slit-shaped discharge port 11 is closed at the portion of the coating liquid supply body 14 not provided with the coating liquid accommodating recess 14a. In this state, the coating liquid P is supplied from the coating liquid supply port 12 to the inside of the coating nozzle 10 The coating liquid introduction part 13 prevents the coating liquid P supplied into the coating liquid introduction part 13 from being guided to the slit-shaped discharge port 11 by the aforementioned coating liquid supply body 14.

接下來，本實施形態的塗佈裝置中，在如前述藉由前述塗液供給體14使被供給至塗液導入部13內的塗液P不會被引導至開縫狀吐出口11的狀態下，引導至要開始從前述開縫狀吐出口11對被塗佈體W的表面進行塗液P之塗佈的位置，並且如圖4(A)至(C)所示，使前述塗佈用噴嘴10朝向要在被塗佈體W之表面塗佈塗液P的方向移動，並同時藉由前述旋轉裝置15使前述塗液供給體14旋轉，而從凹設在塗液供給體14之外周面的塗液收容凹部14a與塗佈用噴嘴10的開縫狀吐出口11重疊的部分通過開縫狀吐出口11，將收容在塗液收容凹部14a內的塗液P供給至被塗佈體W的表面。此外，在該塗佈裝置當中，如圖3(A)、(B)或圖4(A)至(C)所示，操作中係形成塗液P注滿整個開縫狀吐出口11的狀態，如圖4(A)、(B)所示，塗液供給體14旋轉，只有凹設在塗液供給體14之外周面的塗液收容凹部14a與塗佈用噴嘴10的開縫狀吐出口11重疊的部分，塗液P會通過開縫狀吐出口11被供給至被塗佈體W的表面。 Next, in the coating apparatus of the present embodiment, the coating liquid P supplied into the coating liquid introduction portion 13 is not guided to the slit-shaped discharge port 11 by the coating liquid supply body 14 as described above. , Guide to the position where the coating of the coating liquid P is to be started on the surface of the coated body W from the aforementioned slit-shaped discharge port 11, and as shown in Figs. 4(A) to (C), make the aforementioned coating The nozzle 10 is moved in the direction to apply the coating liquid P on the surface of the coated body W, and at the same time, the coating liquid supply body 14 is rotated by the rotation device 15 to be recessed in the coating liquid supply body 14 The portion where the coating liquid accommodating recess 14a on the outer peripheral surface overlaps with the slit-shaped ejection port 11 of the coating nozzle 10 passes through the slit-shaped ejection port 11, and the coating liquid P accommodated in the coating fluid accommodating recess 14a is supplied to the to-be-coated The surface of the body W. In addition, in this coating device, as shown in Figs. 3(A), (B) or Figs. 4(A) to (C), the operation is in a state where the coating liquid P fills the entire slit-shaped discharge port 11 4(A) and (B), the coating liquid supply body 14 rotates, and only the coating liquid accommodating recess 14a recessed on the outer peripheral surface of the coating liquid supply body 14 and the slit-like ejection of the coating nozzle 10 In the part where the outlet 11 overlaps, the coating liquid P is supplied to the surface of the body W through the slit-shaped outlet 11.

接下來，在本實施形態的塗佈裝置當中，如圖4(A)至(C)及圖5(A)至(C)所示，對形成為圓形形狀的被塗佈體W的表面，將被收容在凹設於前述塗液供給體14之外周面的塗液收容凹部14a的塗液P，從塗佈用噴嘴10通過開縫狀吐出口11塗佈成圓形形狀。 Next, in the coating device of the present embodiment, as shown in FIGS. 4(A) to (C) and 5(A) to (C), the surface of the body W formed into a circular shape The coating liquid P contained in the coating liquid accommodating recess 14a recessed on the outer peripheral surface of the coating liquid supply body 14 is applied from the coating nozzle 10 through the slit-like discharge port 11 into a circular shape.

在這期間，從塗液供給口12施加壓力所供給的塗液P從塗液導入部13通過塗液收容凹部14a持續供給。 During this period, the coating liquid P supplied under pressure from the coating liquid supply port 12 is continuously supplied from the coating liquid introduction portion 13 through the coating liquid accommodating recess 14a.

在此，本實施形態的塗佈裝置中，如前述在形成為圓柱狀的塗液供給體14的外周面凹設有形成為軸方向長度較長之橢圓形狀的塗液收容凹部14a，因此如前述要將被收容在凹設於塗液供給體14之外周面的塗液收容凹部14a的塗液P，從塗佈用噴嘴10的開縫狀吐出口11在形成為圓形形狀的被塗佈體W的表面塗佈成圓形形狀時，係使在被塗佈體W上方移動的塗佈用噴嘴10的移動速度比起使前述塗液供給體14旋轉的圓周速度更快，然後從形成為軸方向的長度較長之橢圓形狀的塗液收容凹部14a通過前述開縫狀吐出口11，將塗液P在形成為圓形形狀的被塗佈體W的表面塗佈成圓形形狀。 Here, in the coating apparatus of the present embodiment, the outer circumferential surface of the coating liquid supply body 14 formed in a cylindrical shape is recessed with a coating liquid receiving recess 14a formed in an elliptical shape with a long axial length as described above. The coating liquid P contained in the coating liquid receiving recess 14a recessed on the outer peripheral surface of the coating liquid supply body 14 is applied from the slit-shaped discharge port 11 of the coating nozzle 10 to a circular shape to be coated When the surface of the body W is coated in a circular shape, the moving speed of the coating nozzle 10 moving above the body W to be coated is faster than the circumferential speed at which the coating liquid supply body 14 is rotated. The coating liquid accommodating recess 14a, which is an elliptical shape with a long axial length, passes through the slit-shaped discharge port 11 to apply the coating liquid P to the surface of the object to be coated W formed in a circular shape in a circular shape.

如此一來，要將塗液P在形成為圓形形狀的被塗佈體W的表面塗佈成圓形形狀時，就不需要在塗液供給體14的外周面設置與被塗佈體W相對應的大小的圓形形狀的塗液收容凹部14a，而可藉由如前述設為軸方向的長度較長的橢圓形狀的塗液收容凹部14a來縮小塗液供給體14的直徑，且可使塗佈用噴嘴10小型化。 In this way, when the coating liquid P is applied to the surface of the coated body W formed in a circular shape in a circular shape, it is not necessary to provide the coating liquid P on the outer peripheral surface of the coating liquid supply body 14 and the coated body W. Corresponding size of the circular shaped coating liquid receiving recess 14a, and the diameter of the coating liquid supply body 14 can be reduced by setting the above-mentioned elliptical coating liquid receiving recess 14a with a longer axial length, and The coating nozzle 10 is miniaturized.

又，本實施形態的塗佈裝置中，在利用塗佈用噴嘴10將塗液P塗佈在被塗佈體W的表面時，係使塗佈用噴嘴10朝向使塗液P塗佈在被塗佈體W 之表面的方向移動，但亦可使塗佈用噴嘴10固定，使被塗佈體W相對於該塗佈用噴嘴10移動，而使塗液P塗佈在被塗佈體W的表面。 Moreover, in the coating apparatus of this embodiment, when the coating liquid P is applied to the surface of the body W by the coating nozzle 10, the coating nozzle 10 is directed so that the coating liquid P is applied to the surface of the body W. Coating body W However, the coating nozzle 10 may be fixed, and the body W may be moved relative to the nozzle 10 for coating, so that the coating liquid P may be applied to the surface of the body W.

又，本實施形態的塗佈裝置中，在前端部具有供塗液P吐出的開縫狀吐出口11的塗佈用噴嘴10中，將供給有塗液P的塗液導入部13設置成與開縫狀吐出口11連通，並且使與該開縫狀吐出口11連通的塗液導入部13的底部形成為平面狀，但亦可如圖6所示，使與開縫狀吐出口11連通的塗液導入部13的底部形成為圓弧狀。如此一來，在未設有塗液收容凹部14a的塗液供給體14的部分將開縫狀吐出口11封閉的面積增加，可更進一步抑制被供給至塗液導入部13內的塗液P從開縫狀吐出口11漏出。 In addition, in the coating apparatus of the present embodiment, in the coating nozzle 10 having a slit-shaped discharge port 11 for discharging the coating liquid P at the tip, the coating liquid introducing portion 13 supplied with the coating liquid P is provided so as to be compatible with The slit-shaped discharge port 11 communicates with the slit-shaped discharge port 11 and the bottom of the coating liquid introduction part 13 communicating with the slit-shaped discharge port 11 is formed in a flat shape. However, as shown in FIG. 6, the slit-shaped discharge port 11 may be connected The bottom of the coating liquid introduction part 13 is formed in an arc shape. In this way, the area where the slit-like discharge port 11 is closed in the portion of the coating liquid supply body 14 where the coating liquid receiving recess 14a is not provided is increased, and the coating liquid P supplied into the coating liquid introduction portion 13 can be further suppressed. It leaks from the slit-shaped discharge port 11.

又，本實施形態的塗佈裝置中，雖在形成為圓形形狀的被塗佈體W的表面將塗液P從塗佈用噴嘴10塗佈成圓形形狀，但被塗佈體W的形狀不特別限於圓形形狀，並且在通過塗佈用噴嘴10的開縫狀吐出口11使塗液P塗佈在被塗佈體W之表面的前述塗液供給體14之外周面凹設的塗液收容凹部14a的形狀也沒有限定，例如可如圖7(A)、(B)、(C)所示，如使凹設在塗液供給體14之外周面的塗液收容凹部14a的形狀設成四角形狀、三角形狀或是葫蘆形狀等，可設成各種形狀的塗液收容凹部14a。 In addition, in the coating device of this embodiment, although the coating liquid P is applied to the surface of the coated body W formed in a circular shape from the coating nozzle 10 into a circular shape, the The shape is not particularly limited to a circular shape, and the outer peripheral surface of the aforementioned coating liquid supply body 14 that coats the coating liquid P on the surface of the coated body W through the slit-shaped discharge port 11 of the coating nozzle 10 is recessed. The shape of the coating liquid accommodating recess 14a is also not limited. For example, as shown in Figs. The shape is set to a square shape, a triangle shape, a gourd shape, etc., and various shapes of the coating liquid accommodating recess 14a can be provided.

10:塗佈用噴嘴 10: Nozzle for coating

11:開縫狀吐出口 11: Slotted spout

12:塗液供給口 12: Coating liquid supply port

13:塗液導入部 13: Coating liquid introduction part

14:塗液供給體 14: Coating fluid supply body

14a:塗液收容凹部 14a: Coating liquid receiving recess

14b:旋轉軸 14b: Rotation axis

15:旋轉裝置 15: Rotating device

P:塗液 P: coating liquid

W:被塗佈體 W: Coated body

Claims (8)

一種塗佈裝置，係將於前端部具有供塗液吐出的開縫狀吐出口的塗佈用噴嘴設置在被塗佈體的上方，使前述被塗佈體與塗佈用噴嘴相對移動，通過前述開縫狀吐出口將塗液塗佈在被塗佈體之表面，前述塗佈裝置中，將從塗液供給口供給有塗液至前述塗佈用噴嘴內部的塗液導入部設置成與前述開縫狀吐出口連通，並且將在外周面設有收容被供給至該塗液導入部內的塗液且形成為既定圖案形狀的塗液收容凹部的塗液供給體，以位在與前述塗液導入部連通的開縫狀吐出口的上方的方式在塗液導入部內設置成可旋轉，使前述被塗佈體與塗佈用噴嘴相對移動，並且使在前述塗液收容凹部內供給有塗液的塗液供給體在塗液導入部內旋轉，使塗液從塗液收容凹部內通過塗佈用噴嘴的前端部之開縫狀吐出口而供給至與塗佈用噴嘴相對移動的被塗佈體的表面，並將塗液依塗液收容凹部的形狀塗佈在前述被塗佈體的表面。 A coating device in which a coating nozzle with a slit-shaped discharge port for discharging a coating liquid is installed above an object to be coated, and the object to be coated and the coating nozzle are moved relative to each other to pass The slit-shaped discharge port coats the coating liquid on the surface of the coated body. In the coating device, the coating liquid introduction part that supplies the coating liquid from the coating liquid supply port to the inside of the coating nozzle is set to The slit-shaped discharge port communicates with each other, and the coating liquid supply body is provided on the outer peripheral surface with the coating liquid containing recesses formed into a predetermined pattern shape to accommodate the coating liquid supplied into the coating liquid introduction portion, so as to be positioned in contact with the aforementioned coating liquid. The liquid introduction part is connected with the slit-shaped discharge port above the slit-like discharge port, which is rotatably provided in the coating liquid introduction part, so that the coated body and the coating nozzle are relatively moved, and the coating liquid is supplied in the coating liquid accommodating recess. The coating liquid supply body of the liquid rotates in the coating liquid introduction part, so that the coating liquid is supplied from the coating liquid accommodating recess through the slit-like discharge port at the tip of the coating nozzle to the coated object moving relative to the coating nozzle The surface of the body, and the coating liquid is applied to the surface of the body to be coated according to the shape of the coating liquid containing recess. 如請求項1所述之塗佈裝置，其中，前述塗液供給體形成為圓柱狀，供給有塗液的前述塗佈用噴嘴的內部之塗液導入部的至少底部形成為平面狀，使前述開縫狀吐出口與該形成為平面狀的塗液導入部的底部連通，以與該形成為平面狀的塗液導入部之底部接觸的方式將前述塗液供給體設置成可旋轉。 The coating device according to claim 1, wherein the coating liquid supply body is formed in a cylindrical shape, and at least the bottom of the coating liquid introduction part inside the coating nozzle to which the coating liquid is supplied is formed in a flat shape, so that the opening The slit-shaped ejection port communicates with the bottom of the coating liquid introduction part formed in a flat shape, and the coating liquid supply body is provided so as to be rotatable so as to be in contact with the bottom of the coating liquid introduction part formed in a flat shape. 如請求項1所述之塗佈裝置，其中，前述塗液供給體形成為圓柱狀，供給有塗液的前述塗佈用噴嘴的內部之塗液導入部的至少底部形成為圓弧狀，使前述開縫狀吐出口與該形成為圓弧狀的塗液導入部的底部連通，以與該形成為圓弧狀的塗液導入部之底部接觸的方式將前述塗液供給體設置成可旋轉狀態。 The coating device according to claim 1, wherein the coating liquid supply body is formed in a cylindrical shape, and at least the bottom of the coating liquid introduction part inside the coating nozzle to which the coating liquid is supplied is formed in an arc shape so that The slit-shaped discharge port communicates with the bottom of the arc-shaped coating liquid introduction part, and the coating liquid supply body is set in a rotatable state so as to contact the bottom of the arc-shaped coating liquid introduction part. . 如請求項1或2所述之塗佈裝置，其中，使前述被塗佈體與塗佈用噴嘴相對移動，並且使在前述塗液收容凹部內供給有塗液的塗液供給體在塗液導入部內旋轉，使塗液從塗液收容凹部內通過塗佈用噴嘴的前端部之開縫狀吐出口而供給至與塗佈用噴嘴相對移動的被塗佈體的表面，並使塗液依前述塗液收容凹部的形狀在被塗佈體的表面塗佈成圓形形狀。 The coating device according to claim 1 or 2, wherein the coated body and the coating nozzle are moved relative to each other, and the coating liquid supply body supplied with the coating liquid in the coating liquid accommodating recess is applied to the coating liquid The introduction part rotates so that the coating liquid is supplied from the coating liquid accommodating recess through the slit-like discharge port at the tip of the coating nozzle to the surface of the coated body moving relative to the coating nozzle, and the coating liquid The shape of the aforementioned coating liquid accommodating recessed portion is coated in a circular shape on the surface of the coated body. 如請求項3所述之塗佈裝置，其中，使前述被塗佈體與塗佈用噴嘴相對移動，並且使在前述塗液收容凹部內供給有塗液的塗液供給體在塗液導入部內旋轉，使塗液從塗液收容凹部內通過塗佈用噴嘴的前端部之開縫狀吐出口而供給至與塗佈用噴嘴相對移動的被塗佈體的表面，並將塗液依前述塗液收容凹部的形狀在被塗佈體的表面塗佈成圓形形狀。 The coating device according to claim 3, wherein the coated body and the coating nozzle are moved relative to each other, and the coating liquid supply body supplied with the coating liquid in the coating liquid accommodating recess is placed in the coating liquid introduction part Rotate, the coating liquid is supplied from the coating liquid receiving recess through the slit-like discharge port at the tip of the coating nozzle to the surface of the coated body moving relative to the coating nozzle, and the coating liquid is applied as described above. The shape of the liquid containing recessed part is coated in a circular shape on the surface of the to-be-applied body. 如請求項4所述之塗佈裝置，其中，在前述塗液供給體的外周面將塗液收容凹部凹設成軸方向的長度較長的橢圓形狀，使被塗佈體與塗佈用噴嘴相對移動的移動速度比起使前述塗液供給體旋轉的圓周速度更快，而在被塗佈體的表面使塗液塗佈成圓形形狀。 The coating device according to claim 4, wherein the coating liquid accommodating recess is recessed into an elliptical shape with a long axial length on the outer peripheral surface of the coating liquid supplier, so that the coated body and the coating nozzle The moving speed of the relative movement is faster than the circumferential speed at which the aforementioned coating liquid supply body is rotated, and the coating liquid is coated in a circular shape on the surface of the coated body. 如請求項5所述之塗佈裝置，其中，在前述塗液供給體的外周面將塗液收容凹部凹設成軸方向的長度較長的橢圓形狀，使被塗佈體與塗佈用噴嘴相對移動的移動速度比起使前述塗液供給體旋轉的圓周速度更快，而在被塗佈體的表面使塗液塗佈成圓形形狀。 The coating device according to claim 5, wherein the coating liquid accommodating recess is recessed into an elliptical shape with a long axial length on the outer peripheral surface of the coating liquid supplier, so that the coated body and the coating nozzle The moving speed of the relative movement is faster than the circumferential speed at which the aforementioned coating liquid supply body is rotated, and the coating liquid is coated in a circular shape on the surface of the coated body. 一種塗佈方法，係使用請求項1所述之塗佈裝置，在藉由於前述塗液導入部內設置成可旋轉的塗液供給體之未設有塗液收容凹部的部分將塗佈用噴嘴的前端部之開縫狀吐出口封閉的狀態下，從前述塗液供給口將塗液供給至前述塗液導入部內，並將前述塗液供給至形成在該塗液導入部內設置成可旋轉的前述塗液供給體之外周面且形成為既定圖案形狀的塗液收容凹部內，使前述被塗佈體與塗佈用噴嘴相對移動，並且使在前述塗液收容凹部內供給有 塗液的塗液供給體在塗液導入部內旋轉，從塗液收容凹部內使塗液通過塗佈用噴嘴的前端部之開縫狀吐出口而供給至與塗佈用噴嘴相對移動的被塗佈體的表面，並使塗液依塗液收容凹部的形狀塗佈在前述被塗佈體的表面。 A coating method that uses the coating device described in claim 1, in which the coating nozzle is installed in a portion of the coating liquid supply body that is not provided with a coating liquid receiving recess due to a rotatable coating liquid supply body in the coating liquid introduction part. With the slit-like discharge port at the tip closed, the coating liquid is supplied from the coating liquid supply port into the coating liquid introduction part, and the coating liquid is supplied to the coating liquid introduction part formed in the coating liquid introduction part so as to be rotatable. The coating liquid supply body is formed in a predetermined pattern on the outer peripheral surface of the coating liquid receiving recess, and the coated body and the coating nozzle are moved relative to each other, and the coating liquid receiving recess is supplied with The coating liquid supply body of the coating liquid rotates in the coating liquid introduction part, and the coating liquid is supplied from the coating liquid accommodating recess through the slit-like discharge port at the tip of the coating nozzle to the target moving relative to the coating nozzle. On the surface of the cloth body, the coating liquid is applied to the surface of the body to be coated in accordance with the shape of the coating liquid accommodating recess.
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