TW202113320A - Tightness test of a liquid-filled test specimen - Google Patents

Tightness test of a liquid-filled test specimen Download PDF

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TW202113320A
TW202113320A TW109124216A TW109124216A TW202113320A TW 202113320 A TW202113320 A TW 202113320A TW 109124216 A TW109124216 A TW 109124216A TW 109124216 A TW109124216 A TW 109124216A TW 202113320 A TW202113320 A TW 202113320A
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test
liquid
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gas
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麥斯米蘭 雷斯曼
丹尼爾 偉奇
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德商英飛康股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205Accessories or associated equipment; Pump constructions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/42Methods or arrangements for servicing or maintenance of secondary cells or secondary half-cells
    • H01M10/4228Leak testing of cells or batteries
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00Investigating fluid-tightness of structures
    • G01M3/02Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • H01M10/0525Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00Electrolytes
    • H01M2300/0017Non-aqueous electrolytes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M2300/00Electrolytes
    • H01M2300/0017Non-aqueous electrolytes
    • H01M2300/0025Organic electrolyte
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

A method for tightness test of a test specimen (14) filled with a liquid (12) and having an internal pressure which is lower than atmospheric pressure, comprising the following steps: placing the test specimen (14) into a test chamber (16); evacuating the test chamber (16) to a pressure which is lower than the internal pressure inside the test specimen (14); withdrawing residual gas constituents from the test chamber together with gas constituents desorbing from a wall of the test chamber and parts of the liquid escaping through a leak in the test specimen from the latter, without any carrier gas being supplied to the test chamber from the outside; transporting the extracted residual gas constituents together with the parts of the liquid escaped from the test specimen to a detector (28); and detecting parts of the liquid (12) escaped through a leak in the test specimen (14) by means of a detector (28).

Description

填充液體樣本的滲漏試驗方法Leak test method for filled liquid samples

本發明係關於一種用於對填充液體試驗樣本進行滲漏偵測之方法。The present invention relates to a method for leak detection of a test sample filled with liquid.

用於工業滲漏試驗之各種方法為已知的,其中在試驗室中藉由將試驗室抽空來使填充有試驗氣體之試驗樣本經受負壓。由於所得壓力差,故試驗氣體經由有可能存在於試驗樣本中之滲漏部逸出至試驗室中,將試驗氣體自該試驗室供應至感測器中以偵測試驗氣體。舉例而言,為了進行滲漏試驗,食品封裝會主動填充諸如氦氣之試驗氣體,且隨後置放至試驗室中。可替代地,其中當將該試驗樣本置放至試驗室中時使用試驗樣本中已含之氣體作為試驗氣體之方法為已知的。在此情況下不需要用試驗氣體主動填充試驗樣本。Various methods for industrial leak testing are known, in which a test sample filled with a test gas is subjected to negative pressure in a test chamber by evacuating the test chamber. Due to the resulting pressure difference, the test gas escapes into the test chamber through a leak that may be present in the test sample, and the test gas is supplied from the test chamber to the sensor to detect the test gas. For example, in order to conduct a leak test, the food package is actively filled with a test gas such as helium, and then placed in the test chamber. Alternatively, a method of using the gas already contained in the test sample as the test gas when the test sample is placed in the test chamber is known. In this case, there is no need to actively fill the test sample with test gas.

此類方法描述於例如DE 10 2014 224 799 A1中。當將該試驗樣本置放至膜室中時,試驗樣本中已含之氣體可為諸如氮氣、氧氣或二氧化碳之空氣成分。此外,可使用含有試驗樣本中所含之產品調味物質之氣體或由此等物質構成之氣體作為試驗氣體,在咖啡之情況下該等產品調味物質諸如為咖啡調味物質。另一可能性為使用由諸如食品之試驗樣本中所含之產品產生之氣體作為試驗氣體。在咖啡之情況下,此氣體可為在幾小時之後在咖啡袋中產生之CO2Such methods are described, for example, in DE 10 2014 224 799 A1. When the test sample is placed in the membrane chamber, the gas already contained in the test sample may be an air component such as nitrogen, oxygen, or carbon dioxide. In addition, a gas containing product flavoring substances contained in the test sample or a gas composed of such substances can be used as the test gas. In the case of coffee, the product flavoring substances are, for example, coffee flavoring substances. Another possibility is to use the gas generated by the product contained in the test sample such as food as the test gas. In the case of coffee, this gas may be CO 2 generated in the coffee bag after a few hours.

相比之下,本發明係關於對不含有待用作試驗氣體之任何氣體且不應或無法主動地填充有單獨試驗氣體之填充液體試驗樣本進行的滲漏偵測。舉例而言,情況如下:填充有電解質液體之電池,諸如填充有作為電解質之碳酸二甲酯之鋰離子電池。In contrast, the present invention relates to leak detection of a filled liquid test sample that does not contain any gas to be used as a test gas and should not or cannot be actively filled with a separate test gas. For example, the situation is as follows: a battery filled with an electrolyte liquid, such as a lithium ion battery filled with dimethyl carbonate as an electrolyte.

在上文所描述之基於自試驗樣本內部流動至外部之氣體偵測原理之方法中,憑藉氣體偵測器頻繁偵測所逸出之氣體。藉助於真空方法測試試驗樣本之滲漏緊度。為了進行滲漏試驗,將試驗樣本置放至真空室中。藉助於真空系統使經由試驗樣本中之滲漏部逸出至真空室中之氣體自真空室連續地排出。在真空系統中憑藉合適感測器,選擇性地偵測滲漏氣體。在足夠低的壓力下,滲漏氣體藉由擴散或以分子形式充分地迅速且自由朝向感測器移動。In the method described above based on the gas detection principle that flows from the inside of the test sample to the outside, the escaping gas is frequently detected by the gas detector. Test the leak tightness of the test sample by means of the vacuum method. In order to perform a leak test, the test sample is placed in a vacuum chamber. With the aid of a vacuum system, the gas that escapes into the vacuum chamber through the leak in the test sample is continuously exhausted from the vacuum chamber. With suitable sensors in the vacuum system, the leaking gas can be selectively detected. At a sufficiently low pressure, the leaking gas moves toward the sensor sufficiently quickly and freely by diffusion or in the form of molecules.

作為上文所描述之基於自試驗樣本內部流動至外部之氣體偵測原理之方法之替代方案,已知憑藉載體氣體向氣體偵測器中供應所逸出之氣體的技術方案。當真空室中之操作壓力比1毫巴高得多時,特別地應用載體氣體方法。在該等情況下,待偵測之滲漏氣體在真空室中之擴散速度過慢。此類載體氣體方法描述於例如WO 2005/054806 A1中,其中載體氣體流流過含有試驗樣本之試驗室。用載體氣體吹掃試驗室。將自試驗樣本逸出之試驗氣體與載體氣體流一起運輸至試驗室之外且供應至試驗氣體感測器中。As an alternative to the method described above based on the gas detection principle that flows from the inside of the test sample to the outside, a technical solution is known that supplies the escaped gas into the gas detector by means of a carrier gas. When the operating pressure in the vacuum chamber is much higher than 1 mbar, the carrier gas method is particularly applied. In these cases, the diffusion rate of the leaking gas to be detected in the vacuum chamber is too slow. This type of carrier gas method is described, for example, in WO 2005/054806 A1, in which a carrier gas stream flows through a test chamber containing a test sample. Purge the test chamber with carrier gas. The test gas escaping from the test sample is transported out of the test chamber together with the carrier gas flow and supplied to the test gas sensor.

在製冷及加熱、通風及空氣調節產業中,檢查填充有液體冷卻劑(例如熱交換劑)之試驗樣本之滲漏緊度是習知的技術。此等試驗試樣之特殊特徵在於經過量增壓之試驗樣本中含有液體冷卻劑以獲得冷卻劑液相。為對填充有液體冷卻劑之該等試驗試樣執行滲漏試驗,使嗅探探針(sniffer probe)沿待測試滲漏緊度之試驗樣本區域穿過,該嗅探探針吸收經由滲漏部逸出至外部氛圍中且汽化之冷卻劑且將其供應至氣體偵測器中。嗅探探針吸收來自試驗樣本環境之空氣且因此吸收逸出中的滲漏氣體,該逸出中的滲漏氣體係由對應感測器選擇性地感測且因此區別於所吸收之空氣組分。In the refrigeration and heating, ventilation and air conditioning industries, it is a well-known technique to check the leakage tightness of test samples filled with liquid coolants (such as heat exchangers). The special feature of these test samples is that the pressurized test sample contains liquid coolant to obtain the coolant liquid phase. In order to perform a leak test on the test samples filled with liquid coolant, the sniffer probe is made to pass through the test sample area to be tested for leak tightness. The sniffer probe absorbs the leak The part escapes into the external atmosphere and vaporizes the coolant and supplies it to the gas detector. The sniffer probe absorbs air from the environment of the test sample and therefore absorbs the leaking gas that is escaping. The leaking gas system is selectively sensed by the corresponding sensor and is therefore distinguished from the absorbed air group Minute.

當一填充液體之試驗樣本,其內部壓力低於其外部環境之大氣壓力(例如,內部壓力在約50-500毫巴範圍內)之情況下,無法應用嗅探探針型滲漏偵測方法,此係因為若存在滲漏部,則無滲漏氣體逸出至外部。舉例而言,在填充有具有低蒸氣壓之液體電解質且其中普遍存在負壓之電池中,任何存在的滲漏部皆會使空氣自試驗樣本外部環境進入試驗樣本內部。無法憑藉嗅探探針偵測滲漏。When a liquid-filled test sample has an internal pressure lower than the atmospheric pressure of the external environment (for example, the internal pressure is in the range of about 50-500 mbar), the sniffer probe type leak detection method cannot be used , This is because if there is a leak, no leaking gas escapes to the outside. For example, in a battery filled with a liquid electrolyte with a low vapor pressure and a negative pressure prevailing therein, any leakage will cause air to enter the inside of the test sample from the external environment of the test sample. It is not possible to detect leaks with sniffer probes.

其中使用試驗樣本中所含之試驗氣體之上文所描述之滲漏偵測方法亦不可應用或至少不準確,此係因為當將試驗樣本外部環境抽空時試驗樣本中之液體行進至滲漏部開口或通道中且阻礙試驗氣體向外流動或至少實質上影響試驗氣體逸出。因此,試驗樣本外部之一定量之所偵測試驗氣體不為試驗樣本中之滲漏部之存在或尺寸的特徵。The leak detection method described above using the test gas contained in the test sample is also not applicable or at least inaccurate. This is because the liquid in the test sample travels to the leaking part when the external environment of the test sample is evacuated Openings or channels and obstruct the outward flow of the test gas or at least substantially affect the escape of the test gas. Therefore, a certain amount of the detected test gas outside the test sample is not a feature of the existence or size of the leak in the test sample.

EP 1 522 838 B1描述一種方法,其中填充有電解質之試驗樣本容納在內部壓力低於試驗樣本內部之壓力之試驗室中。根據載體氣體方法,將充當載體氣體之經純化空氣或周圍空氣供應至試驗室中以向偵測器中供應自試驗樣本逸出之液體成分。EP 1 522 838 B1 describes a method in which a test sample filled with electrolyte is contained in a test chamber whose internal pressure is lower than the pressure inside the test sample. According to the carrier gas method, purified air or ambient air serving as a carrier gas is supplied to the test chamber to supply the liquid component escaping from the test sample into the detector.

鑒於此種情況,本發明之一目標為提供用於內部壓力低於或等於大氣壓之填充液體試驗樣本之滲漏偵測方法。In view of this situation, one of the objectives of the present invention is to provide a leak detection method for test samples filled with liquid whose internal pressure is lower than or equal to atmospheric pressure.

本發明之方法係由如請求項1所述之特徵定義。The method of the present invention is defined by the characteristics described in claim 1.

根據本發明,將填充液體試驗樣本置放至試驗室中。液體容納在試驗樣本內部。試驗樣本內部之內部壓力低於或等於大氣壓。在已將試驗樣本置放至試驗室中之後,將試驗室抽空至低於試驗樣本內部之內部壓力且低於大氣壓之壓力。藉由抽吸將試驗室中所含之殘餘氣體成分與自至少一個試驗室壁脫附之氣體成分及經由滲漏部自試驗樣本行進至試驗室中之液體之任何部分一起抽出,其中不向試驗室中供應載體氣體。藉由偵測器選擇性地偵測自試驗樣本逸出之液體之部分或粒子。According to the present invention, the test sample filled with liquid is placed in the test chamber. The liquid is contained inside the test sample. The internal pressure inside the test sample is lower than or equal to atmospheric pressure. After the test sample has been placed in the test chamber, the test chamber is evacuated to a pressure lower than the internal pressure inside the test sample and lower than atmospheric pressure. The residual gas components contained in the test chamber are drawn out together with the gas components desorbed from at least one test chamber wall and any part of the liquid that travels from the test sample to the test chamber through the leakage part. Carrier gas is supplied in the test chamber. The detector selectively detects the part or particles of the liquid escaping from the test sample.

對於本發明而言尤其重要的為,不向試驗室中供應來自外部之載體氣體,該載體氣體應來源於連接至試驗室之載體氣體源或自環境中吸收而來。特定言之,不存在沿試驗樣本表面流過之氣流。相反地,將自試驗樣本逸出之液體之部分或粒子與殘餘氣體成分一起自試驗室中抽出且供應至偵測器中。不需要載體氣體。It is particularly important for the present invention that no external carrier gas is supplied to the test chamber. The carrier gas should be sourced from a carrier gas source connected to the test chamber or absorbed from the environment. In particular, there is no air flow along the surface of the test sample. On the contrary, the part or particles of the liquid escaping from the test sample are extracted from the test chamber together with residual gas components and supplied to the detector. No carrier gas is required.

經由滲漏部逸出之液體之部分可為呈汽化態之分子粒子。當液體自試驗樣本逸出時可發生汽化。通常,液體在滲漏部通道出口處汽化,該滲漏部通道延伸穿過試驗樣本之不緊密壁。液體在室溫(約15℃至25℃)下之蒸氣壓可低於500毫巴。特定言之,試驗樣本可為諸如鋰離子電池之電池,且液體可為諸如碳酸二甲酯之電解質。The part of the liquid that escapes through the leakage part may be molecular particles in a vaporized state. Vaporization can occur when the liquid escapes from the test sample. Typically, the liquid vaporizes at the exit of the leak channel, which extends through the loose wall of the test sample. The vapor pressure of the liquid at room temperature (approximately 15°C to 25°C) can be lower than 500 mbar. In particular, the test sample may be a battery such as a lithium ion battery, and the liquid may be an electrolyte such as dimethyl carbonate.

試驗室可經組態為具有硬壁之硬質試驗室。可替代地,試驗室可經組態為膜室,該膜室之特徵在於其包含至少一個可撓性壁區域,該可撓性壁區域在抽空期間經抽吸朝向試驗樣本,因此減小膜室體積。此外,特別地具有完全由可撓性膜構成之壁之膜室提供以下優點:附著至試驗樣本之壁支撐試驗樣本,此在可撓性試驗樣本之情況下尤其有利。The laboratory can be configured as a hard laboratory with hard walls. Alternatively, the test chamber can be configured as a membrane chamber, which is characterized in that it contains at least one flexible wall area that is pumped towards the test sample during evacuation, thereby reducing the membrane Chamber volume. In addition, a membrane chamber having a wall entirely composed of a flexible membrane provides the advantage that the wall attached to the test sample supports the test sample, which is particularly advantageous in the case of the flexible test sample.

偵測器包含選擇性地偵測液體之待偵測部分或粒子且可因此將其與其他部分或氣體區分開之感測器。所逸出液體之部分可呈液態且供應至偵測器中。偵測器必須能夠分析液體且選擇性地偵測試驗樣本中所含之液體。可將所逸出液體以薄霧或氣溶膠形式供應至偵測器中。The detector includes a sensor that selectively detects the part or particles to be detected in the liquid and can thus distinguish it from other parts or gases. The part of the escaped liquid can be liquid and supplied to the detector. The detector must be able to analyze the liquid and selectively detect the liquid contained in the test sample. The escaped liquid can be supplied to the detector in the form of mist or aerosol.

可替代地,可規定,液體在其經由試驗樣本中之滲漏部逸出時汽化,且將液體之所逸出部分以汽化態,亦即以氣相形式供應至偵測器中。偵測器必須經組態為氣體偵測器且必須能夠分析氣體且將呈其氣相形式之試驗樣本中之液體與其他氣體區分開。此處,關鍵的是,試驗樣本中所含之液體僅在其離開試驗樣本,亦即在試驗樣本外部或在滲漏部之開口或通道中時自液相轉變其氣相。因此,不使用試驗樣本中之氣體作為試驗氣體,此係因為試驗樣本中之液體呈液態,即使當液體經由滲漏部逸出且汽化時亦如此。Alternatively, it may be provided that the liquid vaporizes when it escapes through the leak in the test sample, and the escaped portion of the liquid is supplied to the detector in a vaporized state, that is, in a gas phase. The detector must be configured as a gas detector and must be able to analyze the gas and distinguish the liquid in the test sample in its gas phase form from other gases. Here, it is crucial that the liquid contained in the test sample changes its gas phase from the liquid phase only when it leaves the test sample, that is, outside the test sample or in the opening or passage of the leak. Therefore, the gas in the test sample is not used as the test gas because the liquid in the test sample is liquid, even when the liquid escapes through the leak and vaporizes.

用於液體之待偵測部分之偵測器可為諸如氣體譜儀、氣相層析儀、紅外輻射吸收偵測器或具有化學感測器或半導體感測器之偵測器的氣體偵測器。The detector used for the part of the liquid to be detected can be gas detection such as gas spectrometer, gas chromatograph, infrared radiation absorption detector or detector with chemical sensor or semiconductor sensor Device.

試驗室中不引入載體氣體。詳言之,如同應用於氣體滲漏偵測之習知載體氣體方法中一般,不將恆定載體氣體流供應至試驗室中。相反地,使用試驗室內部之殘餘成分及自試驗室壁脫附之氣體成分以將經由試驗樣本中之滲漏部逸出至試驗室中之液體之部分或粒子運輸至偵測器。因此,將來自試驗室內部或來自試驗室壁之氣體成分與試驗樣本中所含之液體之部分及粒子的混合物供應至偵測器中且憑藉用於偵測藉由氣體運輸之部分之偵測器進行分析。No carrier gas is introduced into the test chamber. In detail, as in the conventional carrier gas method applied to gas leakage detection, a constant flow of carrier gas is not supplied to the test chamber. On the contrary, the residual components inside the test chamber and the gas components desorbed from the walls of the test chamber are used to transport the part or particles of the liquid that escapes into the test chamber through the leak in the test sample to the detector. Therefore, a mixture of gas components from the inside of the test chamber or from the walls of the test chamber and the part of the liquid contained in the test sample and particles are supplied to the detector and rely on the detection for detecting the part transported by the gas Analysis.

較佳地,僅在試驗室中或試驗室與將試驗室抽空之真空泵之間的連接管線中達到壓力極限值時,將用於運輸液體之部分之氣體供應至偵測器中。此壓力極限值範圍可在2毫巴與50毫巴之間且其較佳低於20毫巴。較佳為膜泵之真空泵可經由閥連接至試驗室及/或連接真空泵與試驗室之氣體管線。在抽空開始時,關閉閥。當達到壓力極限值時,打開閥且部分流行進至偵測器,而剩餘主要氣流繼續經膜泵提取。此處,特別地在經組態為膜泵之真空泵之情況下,與習知載體氣體方法形成對比,實現自滲漏部逸出之液體之積聚。當達到壓力極限值時,將已積聚至今之液體部分供應至偵測器中。Preferably, the gas used to transport the liquid is supplied to the detector only when the pressure limit value is reached in the test chamber or the connecting line between the test chamber and the vacuum pump that evacuates the test chamber. This pressure limit can range between 2 mbar and 50 mbar and it is preferably lower than 20 mbar. The vacuum pump, which is preferably a membrane pump, can be connected to the test chamber via a valve and/or a gas line connecting the vacuum pump and the test chamber. At the beginning of the evacuation, close the valve. When the pressure limit is reached, the valve is opened and part of the gas flows into the detector, while the remaining main gas flow continues to be extracted by the membrane pump. Here, especially in the case of a vacuum pump configured as a membrane pump, in contrast with the conventional carrier gas method, the accumulation of liquid escaping from the leak is realized. When the pressure limit is reached, the liquid part that has accumulated so far is supplied to the detector.

較佳地,規定在試驗室中用吹掃氣體吹掃試驗樣本以移除黏著至試驗樣本之液體之部分。較佳地,在實際滲漏偵測之前,例如在將試驗室抽空之前用吹掃氣體吹掃試驗樣本。Preferably, it is provided that the test sample is purged with a purge gas in the test chamber to remove the part of the liquid adhering to the test sample. Preferably, the test sample is purged with purge gas before actual leakage detection, for example, before evacuating the test chamber.

可設想地到的是,自滲漏部逸出之液體之部分之積聚係在出於分析目的將液體之部分或殘餘氣體與液體之部分的混合物供應至偵測器中之前一段時間期間發生在試驗室中或連接管線中。It is conceivable that the accumulation of the part of the liquid escaping from the leak occurs during a period of time before the part of the liquid or the mixture of the part of the residual gas and the liquid is supplied to the detector for analysis purposes. In the test room or in the connecting pipeline.

可憑藉填充有試驗液體之試驗滲漏部進行校準。試驗滲漏部可經組態為毛細管滲漏部,其中試驗液體經由形成於試驗滲漏部壁中之具有已知尺寸之毛細管逸出。可替代地,試驗滲漏部可為滲透液體滲漏部,其中試驗滲漏部壁之區域經組態為具有用於試驗液體之已知滲透特徵之膜。憑藉此類校準,在實際滲漏偵測期間可獲得且記錄液體之偵測部分之量與滲漏部之尺寸之間的相關性,以便不僅確定滲漏部之存在,且亦確定其尺寸。It can be calibrated by means of a test leak filled with test liquid. The test leak can be configured as a capillary leak, in which the test liquid escapes through a capillary with a known size formed in the wall of the test leak. Alternatively, the test leak may be a permeable liquid leak, wherein the area of the test leak wall is configured as a membrane with known permeation characteristics for the test liquid. With this type of calibration, the correlation between the amount of the detected part of the liquid and the size of the leak can be obtained and recorded during the actual leak detection, so as not only to determine the existence of the leak, but also to determine its size.

根據本發明,可特別地規定,基於對自滲漏部逸出之液體之部分的偵測獲得滲漏部尺寸。According to the present invention, it can be specifically provided that the size of the leakage portion is obtained based on the detection of the portion of the liquid escaping from the leakage portion.

在兩個實施例中,填充有液體12之試驗樣本14容納在試驗室16中。在本發明實施例中,試驗樣本14為填充有液體電解質之電池。在本發明實施例中,試驗室16為習知硬質試驗室。In both embodiments, the test sample 14 filled with the liquid 12 is contained in the test chamber 16. In the embodiment of the present invention, the test sample 14 is a battery filled with liquid electrolyte. In the embodiment of the present invention, the test chamber 16 is a conventional hard test chamber.

試驗室16具備將其與真空泵24連接之真空連接器22,試驗室16可藉助於真空泵24進行抽空。出於此目的,真空泵24包含經組態為膜泵之至少一個真空泵。試驗室16及真空泵24彼此以氣體傳導方式藉由連接管線26連接以使得真空泵24可經由連接管線26提取來自試驗室16之氣體。The test chamber 16 is provided with a vacuum connector 22 for connecting it with a vacuum pump 24, and the test chamber 16 can be evacuated by means of the vacuum pump 24. For this purpose, the vacuum pump 24 includes at least one vacuum pump configured as a membrane pump. The test chamber 16 and the vacuum pump 24 are connected to each other by a connecting line 26 in a gas conduction manner so that the vacuum pump 24 can extract gas from the test chamber 16 through the connecting line 26.

連接真空泵24與試驗室16之連接管線26使其與偵測器28連接以分析且偵測液體12之部分。在本發明兩個實施例中,偵測器28為經組態為質譜儀之選擇性氣體偵測器,舉例而言,該選擇性氣體偵測器之感測器選擇性地偵測液體12之分子部分且可將該等分子部分與其他氣體區分開。偵測器28為用於將質譜儀抽空之包含前真空泵19及高真空泵18之質譜真空系統20之一部分。The connection line 26 connecting the vacuum pump 24 and the test chamber 16 is connected to the detector 28 to analyze and detect the portion of the liquid 12. In the two embodiments of the present invention, the detector 28 is a selective gas detector configured as a mass spectrometer. For example, the sensor of the selective gas detector selectively detects the liquid 12 The molecular part and can distinguish the molecular part from other gases. The detector 28 is a part of a mass spectrometer vacuum system 20 including a front vacuum pump 19 and a high vacuum pump 18 for evacuating the mass spectrometer.

偵測器28以氣體傳導方式經由氣體傳導偵測管線21連接至連接管線26。偵測管線21具備用於調節與連接管線26岔開之氣流之節流閥38及用於選擇性地關閉偵測管線21之閥V2。為量測連接管線26內部之壓力,以氣體傳導方式將連接管線26連接至壓力感測器17。The detector 28 is connected to the connecting line 26 via the gas conduction detection line 21 in a gas conduction manner. The detection pipeline 21 is provided with a throttle valve 38 for adjusting the air flow that diverges from the connecting pipeline 26 and a valve V2 for selectively closing the detection pipeline 21. In order to measure the pressure inside the connecting pipeline 26, the connecting pipeline 26 is connected to the pressure sensor 17 in a gas conduction manner.

液體12之部分經由試驗樣本14中之滲漏部逸出且行進至試驗室16。當液體12自試驗樣本14逸出時,其可汽化以使得液體12之所逸出部分可呈其氣態。Part of the liquid 12 escapes through the leak in the test sample 14 and travels to the test chamber 16. When the liquid 12 escapes from the test sample 14, it can be vaporized so that the escaped portion of the liquid 12 can be in its gaseous state.

偵測器28在真空系統中在低於試驗室16內部之壓力且低於連接管線26與偵測管線21之間的連接點40處之壓力的壓力下作為質譜儀操作。在用於將本發明之試驗室16抽空之膜泵24中,在試驗室16內部不生成高真空。相反地,膜泵24生成在數毫巴範圍內之壓力。膜泵24提取來自試驗室16之殘餘氣體成分。此外,當在試驗室16中達到在約10毫巴範圍內之壓力時,氣體成分自試驗室之壁脫附,該等氣體成分亦經膜泵24提取。此等氣體成分,亦即來自試驗室16之殘餘氣體成分及自其壁脫附之氣體成分吸取經由滲漏部自試驗樣本14行進至試驗室16中的液體12之部分。將液體12之此等部分供應至偵測器28中。The detector 28 operates as a mass spectrometer in a vacuum system at a pressure lower than the pressure inside the test chamber 16 and lower than the pressure at the connection point 40 between the connection line 26 and the detection line 21. In the membrane pump 24 for evacuating the test chamber 16 of the present invention, a high vacuum is not generated in the test chamber 16. Conversely, the membrane pump 24 generates a pressure in the range of several millibars. The membrane pump 24 extracts residual gas components from the test chamber 16. In addition, when the pressure in the test chamber 16 reaches a pressure in the range of about 10 mbar, the gas components are desorbed from the walls of the test chamber, and these gas components are also extracted by the membrane pump 24. These gas components, that is, the residual gas components from the test chamber 16 and the gas components desorbed from its walls are absorbed from the test sample 14 to the part of the liquid 12 in the test chamber 16 through the leak. These parts of the liquid 12 are supplied to the detector 28.

在抽空之後試驗室16內部之真空壓力為數毫巴。自試驗樣本14逸出且汽化之液體12之部分之擴散在此壓力下仍具惰性。在不使用任何載體氣體及不向氣體腔室16中自外部供應任何載體氣體之情況下,利用氣體成分加速液體12之所逸出部分運輸至偵測器28。After evacuation, the vacuum pressure inside the test chamber 16 is several millibars. The diffusion of the part of the liquid 12 that has escaped from the test sample 14 and vaporized is still inert under this pressure. Without using any carrier gas and supplying any carrier gas from the outside into the gas chamber 16, the gas component is used to accelerate the transportation of the escaped part of the liquid 12 to the detector 28.

可替代地,可設想,自試驗樣本14逸出之液體部分之積聚係在將所逸出液體12之部分供應至偵測器28中之前發生在試驗室16內部或連接管線26內部。出於此目的,可設想,在連接點40與膜泵24之間設置有圖1中未繪示之閥,當試驗室16內部達到充分真空壓力時,關閉該閥,以便引起所逸出液體部分在試驗室16內部或試驗室16與未繪示之閥之間的連接管線26中積聚,隨後進行偵測。出於偵測目的,可打開閥V2。在積聚階段期間,可關閉或打開閥V2。Alternatively, it is conceivable that the accumulation of the liquid portion escaping from the test sample 14 occurs inside the test chamber 16 or the connecting line 26 before the portion of the escaping liquid 12 is supplied to the detector 28. For this purpose, it is conceivable that a valve not shown in Fig. 1 is provided between the connection point 40 and the membrane pump 24. When the inside of the test chamber 16 reaches a sufficient vacuum pressure, the valve is closed to cause the escaped liquid Part of it accumulates inside the test chamber 16 or in the connecting pipeline 26 between the test chamber 16 and a valve not shown, and then is detected. For detection purposes, valve V2 can be opened. During the accumulation phase, valve V2 can be closed or opened.

圖2中所繪示之第二實施例與圖1之第一實施例之不同之處在於,包含閥V2之偵測管線21之區段30經包含另一閥V3之區段36橋接以使得閥V2、V3並聯連接。在連接管線26之區段32中,在包括區段30之連接管線26之連接點40與連接管線26與區段36之間的連接點42之間設置閥V1。為將試驗室16抽空,打開閥V1。關閉閥V2。上述情況同樣適用於閥V3。當關閉閥V2、V3且打開閥V1時,真空泵24僅將試驗室16抽空。第二實施例之偵測器28亦為包括獨立真空系統之質譜儀。亦經由真空泵24將進入質譜儀之入口區抽空。出於此目的,閥V2保持關閉,同時關閉閥V1且打開閥V3以將進入質譜儀之入口區抽空至所需真空壓力。在抽空之後,關閉閥V1且打開閥V2及V3來進行量測操作,以使得經由真空泵24將量測介質自試驗室16運輸通過偵測器28。The second embodiment depicted in FIG. 2 is different from the first embodiment in FIG. 1 in that the section 30 of the detection line 21 including the valve V2 is bridged by the section 36 including the other valve V3 so that The valves V2 and V3 are connected in parallel. In the section 32 of the connecting pipeline 26, a valve V1 is provided between the connecting point 40 including the connecting pipeline 26 of the section 30 and the connecting point 42 between the connecting pipeline 26 and the section 36. To evacuate the test chamber 16, the valve V1 is opened. Close valve V2. The same applies to valve V3. When the valves V2 and V3 are closed and the valve V1 is opened, the vacuum pump 24 only evacuates the test chamber 16. The detector 28 of the second embodiment is also a mass spectrometer including an independent vacuum system. The inlet area into the mass spectrometer is also evacuated via the vacuum pump 24. For this purpose, valve V2 is kept closed, while valve V1 is closed and valve V3 is opened to evacuate the inlet area into the mass spectrometer to the required vacuum pressure. After evacuating, the valve V1 is closed and the valves V2 and V3 are opened to perform a measurement operation, so that the measurement medium is transported from the test chamber 16 through the detector 28 via the vacuum pump 24.

在試驗樣本14中有滲漏部之情況下,試驗樣本14中所含之液體12之部分行進至試驗室16中。液體可為用作鋰離子電池中之電解質之碳酸二甲酯。在鋰離子電池中,在抽空試驗室16之後,在試驗樣本14外部區域中普遍存在高於試驗室16內部之壓力的真空壓力。液體電解質在其經由滲漏部自試驗樣本14逸出時汽化以使得液體12之待偵測部分可以氣相之分子粒子形式存在。In the case where there is a leak in the test sample 14, the part of the liquid 12 contained in the test sample 14 travels into the test chamber 16. The liquid can be dimethyl carbonate used as an electrolyte in lithium ion batteries. In the lithium ion battery, after the test chamber 16 is evacuated, there is generally a vacuum pressure higher than the pressure inside the test chamber 16 in the area outside the test sample 14. The liquid electrolyte vaporizes when it escapes from the test sample 14 through the leakage part, so that the to-be-detected portion of the liquid 12 can exist in the form of molecular particles in the gas phase.

使液體12之部分經由管線26、30、21運輸通過試驗室16且到達偵測器28中且進一步經由管線36到達泵24中。產生來源於試驗室16內部及/或來源於試驗室16之壁之氣體成分與液體12之所運輸部分的混合物。質譜偵測器28之選擇性感測器偵測液體12之部分且能夠將其與試驗室16之氣體成分區分開。對經由試驗樣本14之滲漏部逸出之液體12之部分進行的偵測充當對試驗樣本中之滲漏部之存在的指示。液體12之所偵測部分之量可指示滲漏部之尺寸。The portion of the liquid 12 is transported through the test chamber 16 via the lines 26, 30, 21 and to the detector 28 and further to the pump 24 via the line 36. A mixture of gas components originating from the inside of the test chamber 16 and/or from the walls of the test chamber 16 and the transported part of the liquid 12 is generated. The selective sensor of the mass detector 28 detects the part of the liquid 12 and can distinguish it from the gas composition of the test chamber 16. The detection of the portion of the liquid 12 escaping through the leak of the test sample 14 serves as an indication of the presence of the leak in the test sample. The amount of the detected portion of the liquid 12 can indicate the size of the leak.

此外,經由試驗樣本14中之滲漏部逸出之液體12之部分可在偵測發生之前在試驗室16中積聚。出於此目的,在積聚階段期間關閉閥V1、V3。此外,在積聚階段期間亦可關閉閥V2。當一預定義之時間段已過去時,打開閥V2以使得將液體12之所積聚部分供應至偵測器28中。In addition, the portion of the liquid 12 that escapes through the leak in the test sample 14 can accumulate in the test chamber 16 before detection occurs. For this purpose, the valves V1, V3 are closed during the accumulation phase. In addition, valve V2 can also be closed during the accumulation phase. When a predefined period of time has elapsed, the valve V2 is opened so that the accumulated part of the liquid 12 is supplied to the detector 28.

可在積聚階段之後,將所積聚氣體經由來自試驗室16之氣體成分進一步運輸至偵測器28中。出於此目的,不將來自外部之載體氣體供應至經抽空試驗室16中。在試驗室16關閉之情況下,必須等待直至液體12之部分在一預定義之時間段內在試驗室16中積聚為止。憑藉真空泵18、19將偵測器28設定為低於試驗室16中普遍存在之壓力之壓力。當打開閥V2時,將液體12之所積聚部分運輸至偵測器28中且在此處進行偵測。After the accumulation phase, the accumulated gas can be further transported to the detector 28 via the gas composition from the test chamber 16. For this purpose, no carrier gas from the outside is supplied into the evacuated test chamber 16. In the case that the test chamber 16 is closed, it is necessary to wait until a portion of the liquid 12 accumulates in the test chamber 16 within a predefined period of time. The detector 28 is set to a pressure lower than the pressure prevailing in the test chamber 16 by virtue of the vacuum pumps 18 and 19. When the valve V2 is opened, the accumulated part of the liquid 12 is transported to the detector 28 and detected there.

選定節流閥38之指導值及閥V2打開之處之節流閥38前方(在圖式中左側)壓力的臨限值,以使得經由節流閥38進入質譜儀28之腔室體積中之進氣口引起不超過10-4 毫巴之壓力增加。較佳地,在實驗室條件下之壓力臨限值為約5毫巴。Select the guide value of the throttle valve 38 and the threshold value of the pressure in front of the throttle valve 38 (on the left in the figure) where the valve V2 is opened, so that it enters the chamber volume of the mass spectrometer 28 through the throttle valve 38 The air inlet causes a pressure increase of not more than 10 -4 mbar. Preferably, the pressure threshold under laboratory conditions is about 5 mbar.

藉助於質譜儀28,基於量測質量生成信號,該質量為液體12之特徵組分(電解質組分)之特徵。將量測信號與臨限值進行比較,其中超出臨限值視為對試驗樣本14中之滲漏部之指示。在量測之後關閉閥V2,使試驗室通風且可將試驗樣本14自試驗室16移除。With the aid of the mass spectrometer 28, a signal is generated based on the measured mass, which is characteristic of the characteristic component (electrolyte component) of the liquid 12. The measurement signal is compared with the threshold value, where exceeding the threshold value is regarded as an indication of the leakage in the test sample 14. After the measurement, the valve V2 is closed to ventilate the test chamber and the test sample 14 can be removed from the test chamber 16.

本發明之方法不需要用於將試驗室16抽空之任何高級真空泵,諸如高真空泵,而僅需要可到達低於10毫巴之最終壓力之簡單真空泵,諸如膜泵。The method of the present invention does not require any advanced vacuum pump, such as a high vacuum pump, for evacuating the test chamber 16, but only a simple vacuum pump that can reach a final pressure of less than 10 mbar, such as a membrane pump.

本發明兩個實施例之間的基本差異在於,在圖2之實施例中,在已關閉閥V1且已打開閥V2、V3之後,當尚未達到所界定之壓力臨限值時,必須行進比圖1之實施例中更短之自節流閥38至質譜儀28之距離。在節流閥38與質譜儀28之間的區域中,偵測管線21內部之壓力低,亦即低於10-4 毫巴,以使得在此區域中氣體可以分子形式自由移動。因此,氣體擴散至質譜儀28所需之時間可忽略掉。The basic difference between the two embodiments of the present invention is that in the embodiment of FIG. 2, after the valve V1 has been closed and the valves V2 and V3 have been opened, when the defined pressure threshold has not been reached, the travel ratio must be In the embodiment of FIG. 1, the distance from the throttle valve 38 to the mass spectrometer 28 is shorter. In the area between the throttle valve 38 and the mass spectrometer 28, the pressure inside the detection pipeline 21 is low, that is, less than 10 -4 mbar, so that the gas can move freely in molecular form in this area. Therefore, the time required for the gas to diffuse to the mass spectrometer 28 can be ignored.

舉例而言,在背離質譜儀之節流閥38之側,亦即在圖式中在節流閥38之左手側,管線26、30、32、36內部之壓力為5毫巴。黏性流動條件普遍存在,由此必須沿此距離使量測氣體擴散通過殘餘氣體,藉此引起時間延遲。在圖1中,自連接管線26與真空管線21之間的連接點40至節流閥38的此擴散距離長於圖2中管線30、36、21之連接點44與節流閥38之間的擴散距離。For example, on the side facing away from the throttle valve 38 of the mass spectrometer, that is, on the left-hand side of the throttle valve 38 in the diagram, the pressure inside the pipelines 26, 30, 32, and 36 is 5 mbar. Viscous flow conditions are ubiquitous, so the measurement gas must be diffused through the residual gas along this distance, thereby causing a time delay. In FIG. 1, the diffusion distance from the connecting point 40 between the connecting line 26 and the vacuum line 21 to the throttle valve 38 is longer than the distance between the connecting point 44 of the lines 30, 36, and 21 and the throttle valve 38 in FIG. Diffusion distance.

12:液體 14:試驗樣本 16:試驗室 17:壓力感測器 18:高真空泵 19:前真空泵 20:質譜真空系統 21:偵測管線 22:真空連接器 24:真空泵 26:連接管線 28:偵測器 30:偵測管線區段 32:連接管線區段 36:管線區段 38:節流閥 40:連接點 42:連接點 44:連接點 V1:閥 V2:閥 V3:閥12: Liquid 14: Test sample 16: Laboratory 17: Pressure sensor 18: High vacuum pump 19: Front vacuum pump 20: Mass spectrometry vacuum system 21: Detection pipeline 22: Vacuum connector 24: Vacuum pump 26: Connect the pipeline 28: Detector 30: Detect pipeline section 32: Connecting pipeline section 36: Pipeline section 38: Throttle valve 40: connection point 42: connection point 44: connection point V1: Valve V2: Valve V3: Valve

下文將詳細參照圖式解釋本發明之兩個實施例,其中: 圖1顯示第一實施例之方塊圖; 圖2顯示第二實施例之方塊圖。Hereinafter, two embodiments of the present invention will be explained in detail with reference to the drawings, in which: Figure 1 shows a block diagram of the first embodiment; Fig. 2 shows a block diagram of the second embodiment.

12:液體 12: Liquid

14:試驗樣本 14: Test sample

16:試驗室 16: Laboratory

17:壓力感測器 17: Pressure sensor

18:高真空泵 18: High vacuum pump

19:前真空泵 19: Front vacuum pump

20:質譜真空系統 20: Mass spectrometry vacuum system

21:偵測管線 21: Detection pipeline

22:真空連接器 22: Vacuum connector

24:真空泵\膜泵 24: Vacuum pump\membrane pump

26:連接管線 26: Connect the pipeline

28:偵測器\質譜儀\質譜偵測器 28: Detector\Mass Spectrometer\Mass Spectrometer Detector

38:節流閥 38: Throttle valve

40:連接點 40: connection point

V2:閥 V2: Valve

Claims (15)

一種用於填充有液體(12)且具有低於大氣壓之內部壓力之試驗樣本(14)之滲漏試驗的方法,其包含以下步驟: 將該試驗樣本(14)置放至試驗室(16)中; 將該試驗室(16)抽空至低於該試驗樣本(14)內部之該內部壓力之壓力; 將殘餘氣體成分與自該試驗室之壁脫附之氣體成分及經由該試驗樣本中之滲漏部自該試驗樣本逸出之液體之部分一起自該試驗室抽出,其中不向該試驗室中供應來自外部之任何載體氣體; 將經抽出之殘餘氣體成分與自該試驗樣本逸出之該液體之該等部分一起運輸至偵測器(28);以及 藉助於偵測器(28)偵測經由該試驗樣本(14)中之滲漏部逸出之該液體(12)之部分。A method for leak testing of a test sample (14) filled with a liquid (12) and having an internal pressure lower than atmospheric pressure, which includes the following steps: Place the test sample (14) in the test room (16); Evacuate the test chamber (16) to a pressure lower than the internal pressure inside the test sample (14); The residual gas components are extracted from the test chamber together with the gas components desorbed from the walls of the test chamber and the part of the liquid escaping from the test sample through the leakage part in the test sample, which does not enter the test chamber Supply any carrier gas from outside; The extracted residual gas components are transported to the detector (28) together with the parts of the liquid escaping from the test sample; and The part of the liquid (12) that escapes through the leak in the test sample (14) is detected by means of a detector (28). 如請求項1所述之方法,其中該液體(12)之經運輸部分為呈汽化態之分子部分。The method according to claim 1, wherein the transported part of the liquid (12) is a molecular part in a vaporized state. 如請求項1或2所述之方法,其中該液體(12)在室溫下之蒸氣壓低於500毫巴。The method according to claim 1 or 2, wherein the vapor pressure of the liquid (12) at room temperature is lower than 500 mbar. 如前述請求項中任一項所述之方法,其中該試驗樣本(14)為電池且該液體為電解質。The method according to any one of the preceding claims, wherein the test sample (14) is a battery and the liquid is an electrolyte. 如前述請求項中任一項所述之方法,其中該試驗室(16)為硬質試驗室或膜室。The method according to any one of the preceding claims, wherein the test chamber (16) is a rigid test chamber or a membrane chamber. 如前述請求項中任一項所述之方法,其中該偵測器(28)包含對偵測之液體部分具有選擇性之感測器。The method according to any one of the preceding claims, wherein the detector (28) comprises a sensor that is selective for the liquid portion to be detected. 如請求項6所述之方法,其中該偵測器(28)為諸如質譜儀、氣相層析儀、紅外吸收偵測器或具有化學或半導體感測器之偵測器之氣體偵測器。The method according to claim 6, wherein the detector (28) is a gas detector such as a mass spectrometer, a gas chromatograph, an infrared absorption detector or a detector with a chemical or semiconductor sensor . 如前述請求項中任一項所述之方法,其中該偵測器(28)係在真空系統中在低於該試驗室(16)內部之該壓力之壓力下操作。The method according to any one of the preceding claims, wherein the detector (28) is operated in a vacuum system at a pressure lower than the pressure inside the test chamber (16). 如前述請求項中任一項所述之方法,其中僅當在該試驗室中已達到預定義之壓力極限值時向該偵測器(28)中供應該等氣體成分及該液體之待偵測部分。The method according to any one of the preceding claims, wherein the gas components and the liquid to be detected are supplied to the detector (28) only when a predefined pressure limit value has been reached in the laboratory section. 如請求項9所述之方法,其中該壓力極限值處於2-100毫巴範圍內且較佳低於10毫巴。The method according to claim 9, wherein the pressure limit value is in the range of 2-100 mbar and preferably lower than 10 mbar. 如請求項9或10所述之方法,其中該偵測器經由閥(V2)連接至該試驗室(16),該閥(V2)在該試驗室抽空開始時關閉且僅當已達到該壓力極限值時打開。The method of claim 9 or 10, wherein the detector is connected to the test chamber (16) via a valve (V2), the valve (V2) is closed at the beginning of the evacuation of the test chamber and only when the pressure has been reached Open at limit value. 如前述請求項中任一項所述之方法,其中該試驗樣本(14)在置放至該試驗室(16)中之後經吹掃氣體吹掃。The method according to any one of the preceding claims, wherein the test sample (14) is purged by a purge gas after being placed in the test chamber (16). 如前述請求項中任一項所述之方法,其中自該試驗樣本(14)逸出之該液體(12)之該等部分之積聚係在藉助於該偵測器(28)偵測該等部分之前一段時間期間發生在該試驗室(16)中或連接管線中。The method according to any one of the preceding claims, wherein the accumulation of the parts of the liquid (12) escaping from the test sample (14) is detected by the detector (28) Part of it occurred in the test chamber (16) or in the connecting pipeline during a period of time before. 如前述請求項中任一項所述之方法,其中在將該試驗樣本(14)置放至該試驗室(16)中之前,使用含有試驗液體之試驗滲漏部,藉由將該試驗滲漏部置放至該試驗室中,將該試驗室抽空且藉助於該偵測器(28)偵測自該滲漏部逸出之該液體之部分來校準該偵測器。The method according to any one of the preceding claims, wherein before placing the test sample (14) in the test chamber (16), a test leak containing a test liquid is used, and the test leak The leak is placed in the test chamber, the test chamber is evacuated and the detector (28) is used to detect the part of the liquid escaping from the leak to calibrate the detector. 如前述請求項中任一項所述之方法,其中不使用該試驗樣本(14)放置於該試驗室(16)中時該試驗樣本(14)已含之氣體作為用於滲漏偵測之試驗氣體。The method according to any one of the preceding claims, wherein the gas contained in the test sample (14) when the test sample (14) is placed in the test chamber (16) is not used as a leak detection Test gas.
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