TW202105440A - Charged particle beam device and operation method therefor - Google Patents

Abstract

When adjusting optical axes of a multi-beam charged particle beam device and the like, because parameters of optical systems are dependent on each other, the time it takes to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit (160) for setting parameters of optical systems for emitting multiple primary charged particle beams to a sample, detectors (101) for individually detecting multiple secondary charged particle beams discharged from the sample, multiple memories (112) for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units (113) for deriving evaluation values of the primary charged particle beams from the images, and a GUI (130) capable of displaying the images and receiving an input from a user, wherein the GUI displays evaluation results based on the images and the evaluation values and changes optical parameters of various kinds in real time.

Description

Charged particle beam device and its operating method

The present invention relates to a charged particle beam device with a plurality of detectors and its operating method.

As a prior art of a charged particle beam device having a plurality of detectors, there is, for example, Japanese Patent Application Laid-Open No. 2006-190554 (Patent Document 1). In this publication, it is described in an electron microscope with multiple secondary electron or reflected electron detectors. It is designed to control the contrast/brightness of multiple detectors through a single control operation, so the use of accompanying actions The ratio of the signal amount between the detectors changed by the change of the observation conditions such as distance, and the contrast variable coefficient is set for each detector. For example, the relationship between the operating distance and the contrast variable coefficient is obtained in advance. For the operating distance read from the observation condition memory, the coefficient calculation unit separately calculates the contrast variable coefficient for the upper detector and the lower detector. / The single control action performed by the brightness operation section is to individually give the change amount of the contrast to each detector through the detector control section. Prior art literature Patent literature

Patent Document 1: Japanese Patent Application Publication No. 2006-190554

The problem to be solved by the invention

Patent Document 1 discloses an image adjustment method that uses a single control operation to achieve the contrast/brightness of an image obtained by multiple detectors in an electron microscope with multiple detectors. However, in the method of Patent Document 1, the images obtained by each detector are added and displayed, and the parameters are adjusted by the user. Therefore, when there is a dependency between the parameters, the adjustment will be complicated and the adjustment period may be long. Timed. For example, in a multi-beam type charged particle beam device, the optical axis of a plurality of primary electron beams is adjusted by each voltage of the aperture array, that is, the aperture voltage. However, if the aperture voltage for a certain beam is changed, the electric field The state will change, so it will affect other beams. Like this, when there are dependencies between parameters, it is expected that it is difficult to adjust the parameters under a single image display, resulting in reduced ease of use.

The purpose of the present invention is to solve the above-mentioned unsolved problems, and provide a charged particle beam device that realizes the parameter adjustment of a plurality of images corresponding to the number of a plurality of detectors without causing the abandonment of the image, and an operating method thereof . Technical means to solve the problem

In order to achieve the above-mentioned object, the present invention provides a charged particle beam device, which includes: an optical system for irradiating a plurality of primary charged particle beams to a sample; and an optical parameter setting section for setting the parameters of the optical system; and a detector for detecting the slaves individually A plurality of secondary charged particle beams emitted from the sample; and a plurality of memory parts, which convert the signals detected by the detector into digital pixels, and store them as an image; and an evaluation value derivation part, which derives the evaluation of the primary charged particle beam from the image Value; and GUI, which displays an image that can accept input from the user; GUI, which displays the aforementioned image and the evaluation result based on the aforementioned evaluation value.

In addition, in order to achieve the above object, the present invention provides a method for operating a charged particle beam device, wherein the charged particle beam device has a GUI that can display images and accept input from a user, and set a plurality of primary charged particle beams The parameters of the optical system used to irradiate the sample are individually detected for a plurality of secondary charged particle beams emitted from the sample, and the measured signals are converted into digital pixels to create an image, and the evaluation value of the primary charged particle beam is derived from the image , Display the image and the evaluation result based on the evaluation value on the GUI. The effect of invention

According to the present invention, in the adjustment of the parameters of the charged particle beam device having a plurality of detectors, it is possible to view the whole and to adjust the parameters, thereby improving the adjustment efficiency.

Hereinafter, various embodiments of the present invention will be described in sequence according to the drawings. In addition, in the following embodiments, an electron beam is illustrated as a charged particle beam, but it is not limited to an electron beam, and can also be applied to other charged particle beams. Example 1

In the first embodiment, an embodiment of a charged particle beam device that adjusts the optical axis of a plurality of primary electron beams by manually adjusting the parameters of the user is described.

FIG. 1 is a schematic diagram of a structure of the charged particle beam device of the first embodiment. The charged particle beam device is composed of the following: a pixel acquisition device 100 composed of a plurality of detectors 101 and an A/D converter 102; an arithmetic device 110, a memory controller 111, and a plurality of images acquired by memory A memory 112, an evaluation value derivation unit 113 and an image reduction unit 114 inputted into the image read out from the memory 112; the overall control unit 120; Graphical User Interface (GUI) including the display Interface) 130; display control unit 140; display image memory 150; optical parameter setting unit 160 for setting the parameters of the optical system; scanning control unit 170; In addition, the A/D converter 102, the memory controller 111, the plurality of memories 112, the evaluation value derivation unit 113, and the image reduction unit 114 are a system having the number (n) of the detector 101 (hereinafter referred to as Channel), each act in parallel. The overall control unit 120 sets the information input from the GUI 130 to the optical parameter setting unit 160, and sets the scan information to the scan control unit 170.

In the same figure, the pixel acquisition device 100, the optical parameter setting unit 160, and the scanning control unit 170 are each constituted by dedicated hardware. The arithmetic device 110, the overall control unit 120, the GUI 130, the display control unit 140, and the display image memory 150 can be used by Personal Computer (PC) (personal computer) central processing unit (CPU), memory unit represented by memory or SSD (Solid State Drive) (solid state drive), etc., memory unit, display controller, etc. For example, the evaluation value derivation unit 113 or the image reduction unit 114 can be realized by a function program executed in the CPU.

2A and 2B show examples of display of GUI screens of the charged particle beam device of this embodiment. Fig. 2A is an example of displaying all 9-channel images, and Fig. 2B is another example of displaying 4 channels of channels 5, 6, 8, and 9.

The GUI screen 200 is composed of: an image display unit 201 that displays the image obtained by the detector 101 and the evaluation result of the primary electron beam corresponding to each detector; the display selection input for selecting the displayed image Section 202; parameter selection section 203 for selecting the set parameters; sliding bar input section 204 for parameter change; predetermined value input section 205 for the evaluation value of each beam; automatic adjustment button 206 for selecting automatic adjustment; manual adjustment for selecting manual adjustment Button 207; and a completion button 208 used to input adjustment completion.

That is, the GUI 130 includes a display selection input unit 202 for selecting an image to be displayed, and an image display unit 201 for displaying a predetermined number of images selected by the user and the corresponding evaluation result side by side. In this way, the user can make adjustments while viewing the whole or a part thereof, thereby improving the adjustment efficiency. In addition, the GUI 130 includes a parameter selection unit 203 for selecting parameters, a slider input unit 204 for changing parameters in real time, and a predetermined value input unit 205 for inputting predetermined values of evaluation values. Thereby, the parameter adjustment time can be shortened.

Hereinafter, a series of parameter adjustment procedures will be explained by using the example of the manual adjustment procedure of this embodiment shown in FIG. 3. First, after pressing the manual adjustment button 207, the user selects the displayed channel (step 300, S300 below). Sometimes the parameters are continuously changed to confirm the image change, so S300 can be skipped. Then, the slider input part 204 is used to change and adjust the parameter, that is, the aperture voltage corresponding to each channel, to perform parameter setting (S301). At the time when the sliding input is completed, the scanning information 171 such as the optical parameter information 161 and the scanning method is transferred from the overall control unit 120 to the optical parameter setting unit 160 and the scanning control unit 170, and the scanning control unit 170 performs an electron beam 1 picture frame scanning (S302). While scanning, the primary electron beam enters the sample for adjusting the optical axis in the mirror cylinder (not shown), and the secondary electron beam emitted thereby is input to the detector 101. The analog signal 103 output by the detector 101 is converted into a digital pixel value 104 by the A/D converter 102, and is stored in the memory 112 as the image information 115 through the memory controller 111.

The acquired image information 115 is image transferred to the evaluation value derivation unit 113 and the image reduction unit 114 of the calculation device 110 as the image information 116 (S303), and the evaluation value derivation (S304) and reduction processing (S304) are performed in parallel ( S305). The derived evaluation value 117 is forwarded to the display control unit 140 (S306), the reduced image 118 is forwarded to the display image memory 150 (S307), and the evaluation result/image of the channel selected by the user is displayed The control unit 140 is displayed on the GUI screen 200 (S308). Based on this result, the user determines whether to continue parameter adjustment (S309), and returns to (S300) if it continues. Although not shown, (S303) to (S308) implement the number of channels.

The method of deriving the evaluation value here includes the method of obtaining the roundness of the image or the method of obtaining the normalized cross-correlation value of the image and the golden pattern, etc. The evaluation method is not limited. In addition, the image reduction unit 114 has a function of converting the reduction ratio of the image based on the selected number of channels. For example, when the image display unit 201 is set to display a maximum image size of 512×512, and when a 512×512 image is obtained from each channel, if all channels of 9 channels are selected as shown in FIG. 2A, Each image will be reduced vertically and horizontally to one-third (170×170 size) and transferred to the display image memory 150. In addition, if 4 channels are selected as shown in FIG. 2B, only the selected channel will be reduced by one-half (256×256 size) in the vertical and horizontal directions and transferred to the display image memory 150. In either case, multiple images can be viewed.

With this embodiment, even if there is a dependency between the parameters such as the adjustment of the optical axis of the primary electron beam, the full beam state of the 9 channels can still be viewed, and at the same time, the beam state can be grasped at the same time if any channel is further selected. While adjusting the parameters of the details, it becomes easy to confirm the dependencies. As a result, the adjustment efficiency will be improved, and the parameter adjustment time can be shortened. In addition, although all 9 channels are set in this embodiment, if the number of beam channels increases and the number of channels increases to, for example, 36, 64, etc., the configuration of this embodiment will function more efficiently. In addition, since the automatic adjustment button 206 and the manual adjustment button 207 are arranged in the GUI screen 200, the user's work efficiency can be improved.

According to the first embodiment described above, in the adjustment of parameters that are dependent on the parameters such as the aperture voltage of a multi-beam type charged particle beam device with a plurality of detectors, it is possible to comprehensively view the whole and adjust the parameters, thereby improving Adjust efficiency. In addition, it is possible to prevent discarding caused by overwriting of scanned pixels, and simultaneously perform scanning, evaluation value derivation, and image display in parallel, thereby shortening the parameter adjustment time. Example 2

In the second embodiment, an embodiment of a charged particle beam device in which the optical axis of a plurality of primary electron beams is adjusted by automatic adjustment is described by pressing the automatic adjustment button 206 instead of manually adjusting the parameters of the user. In the following, it is explained that the automatic adjustment is to change the parameters by all combinations of the preset value range and scale width of the parameters, and the adjustment method of the higher estimated value is adopted. For example, when setting the value range of each aperture voltage: -100V to +100V, and the scale width: 2V, the parameters of 100 combinations will be changed for one beam. However, this embodiment is not limited to the above-mentioned adjustment method.

FIG. 4 shows an example of the detailed structure of the memory controller 111 of FIG. 1. The digital pixel value 104 output from the A/D converter 102 is written into the memory 112 as the image information 115 through the writing control 400. In addition, at the time of image transfer, the image information 116 is transferred from the memory 112 through the reading control 401 to various processing units such as the evaluation value derivation unit 113.

The memory controller 111 includes a scanning pixel counter 403 for counting digital pixels, and a transfer pixel counter 405 for counting the number of pixels to be transferred during image transfer, based on the number of scanned pixels output from the scanning pixel counter 403 and a preset setting When it is judged that the scan is completed with a good image size, the writing control is performed by switching the memory storing the image, and it is judged based on the number of transferred pixels output from the transfer pixel counter 405 and the preset image size At the same time the transfer is completed, the reading control is performed by switching the memory for reading the image.

Hereinafter, using the operation flow example of the memory controller of the present embodiment of FIG. 5, a control method of preventing scanning pixels from being discarded due to overwriting of the scanned pixels is described, and at the same time, scanning and image transfer are executed in parallel. First, set the memory 112 (hereinafter referred to as the writing memory) to write the image obtained by scanning the frame of the first image, and the memory 112 (hereinafter referred to as the same image) for reading (transferring) the same image Read the memory) (S500, S501), and set the initial value of the optical parameter (S502). Scanning is started at the same time as the parameter setting is completed (S503), and it is on standby before the scanning is completed (S504). Here, the scan completion determination 402 is implemented by comparing the number of scanned pixels 407 counted by the scan pixel counter 403 in the memory controller with a preset image size (number of pixels). If the number of scanned pixels 407 is equal to the image size, the scanning is completed.

When the scan is completed, switch to the memory (S505), determine whether it is the scan of the first frame (506), if it is the first frame, change the parameters (S507), and immediately set the next optical parameter to the optical parameter setting Section 160 performs scanning (after the second frame). In addition, if it is the first scan, the image transfer is started at the same time as the scan is completed (S509), and if it is the second frame or later, it waits until the image transfer of all channels is completed (S508) to restart the transfer. The transfer completion determination 404 is implemented by comparing the number of transferred pixels 408 counted by the transfer pixel counter 405 with a previously set image size not shown. If the number of pixels 408 to be transferred is the same as the image size, the transfer is completed (here, the transfer completion signal 409 = "1"). When the transfer is completed (S510), the read memory is switched (S511). As in the first embodiment, the evaluation value derivation and image reduction processing flow is implemented and displayed on the GUI screen 200 (S512) to (S517).

Although not shown here, S509 to S517 are executed in parallel for the number of channels. If it is after 2 frames and the evaluation under all parameters is completed, the adjustment ends (S518). If the adjustment continues, proceed to the next parameter setting (S519), wait for the image transfer of all channels to be completed (S520), and perform the next scan at the point of completion of the transfer (S503). The transfer completion determination under all channels is to take the logical sum 406 of the transfer completion signal 410 of all the memory controllers, and determine the completion by the output of the transfer completion signal 410 becoming "1". The logical sum output is input to the scan control unit 170, thereby becoming a trigger signal for the start of the next scan. That is, based on the completion of the transfer of the memory controllers corresponding to the plurality of detectors, the scan control unit 170 is instructed to start scanning.

Fig. 6A and Fig. 6B show examples of the time chart of scanning/image transfer under the conventional structure. Due to a simple relationship, only 1-channel image transfer is disclosed. 6A is an example of image transfer time 603≦(parameter setting time 600+scan time 601). In this case, scanning and image transfer are performed in parallel without any problems. FIG. 6B is an example of image transfer time 612>(parameter setting time 610 + scanning time 611). In the conventional structure, the scanned image is stored in a memory that is different from the memory that is being transferred, but the transfer time is long due to waiting for CPU processing, etc., so reading the memory will become in use and cause failure. Pixels stored in the memory (shaded areas 613 and 614 in the figure). As a result, there are unsolved problems that make it impossible to evaluate all images. In this example, the case where the memory is 2 is taken as an example, but the same problem remains to be solved under the plural memory.

Fig. 7 is a time chart of scanning/image transfer according to this embodiment under the same conditions as Fig. 6B. An example of the image transfer periods 702 and 703 of channel 1 and channel 2 after the parameter setting time 700 and scan time 701 is revealed, but it can be seen that the scan is performed after the scan standby 704 is performed before the image transfer of all channels is completed. Therefore, scanning and image transfer can be executed in parallel without pixel waste. With this embodiment, it is possible to prevent pixel waste from being discarded with a simple structure, and to achieve parallel execution of scanning and image transfer at the same time. In other words, it is possible to reliably perform image evaluation under all parameters, while shortening the parameter adjustment time.

In addition, in this embodiment, although it is configured with two memories to switch the memories, it can also be designed to ensure an area for storing two images on one memory, and switch the image writing respectively. Address and the address where the image is read. Example 3

In the second embodiment, a method for preventing pixel obsolescence in a two-memory configuration is disclosed. In this embodiment, it is disclosed that more than three plural memories are used to extend the period until the scan standby occurs, thereby improving the overall output method.

FIG. 8 shows the structure of the memory controller 111 for preventing pixel obsolescence under the four memories 112. In terms of a configuration different from that shown in Figure 4, it has a write/read memory inconsistency determination 806, which reads write memory information 809 and read memory information from write control 800 and read control 801, respectively 810. If the inconsistency determination signal 811 is inconsistent in the write memory and read memory, "1" is output, and "0" is output if they are consistent. It has the following functions: from the logic of the inconsistency determination signal 812 of all channels and the output signal of 807, if the memory in use in all channels is inconsistent, the next scan will start immediately, and as long as one of the channels is consistent, the scan is on standby. In other words, the memory controller executes the inconsistency determination of whether the memory storing the image and the memory for reading the image are inconsistent, and instructs based on the inconsistency determination of the memory controllers corresponding to a plurality of detectors The scan control unit 170 starts scanning. In addition, the memory switching in this embodiment is based on a method of switching on a ring buffer such as memory 1, memory 2, memory 3, memory 4, memory 1, etc. as an example.

Fig. 9 is a flowchart in this embodiment. There are steps common to the second embodiment, so the details are omitted, but there are new steps (step S907) (step S913). Switch to write memory when scanning is completed, and switch to read memory when transfer is completed. Therefore, in step S907, the consistency determination of memory is performed on all channels. As long as one channel is consistent, it will be set to scan standby, so that it can be implemented. Scanning and image transfer without pixel waste. In addition, in (step S913), the consistency of the memory is determined for each channel, so that the image transmission can be started immediately in the case of inconsistency. Here (step S910) to (step S919) are executed in parallel by the number of channels.

Fig. 10 is a time chart of scanning/image transfer in this embodiment. Take the case where the image transfer period 1003 becomes a long period in channel 2 as an example. As shown in FIG. 10, the scanning standby 1004 can be set only when the pixel is discarded. Therefore, compared with the second embodiment, an overall increase in yield can be achieved. In addition, the transfer standby 1005 is the period when each channel is on standby until the image can be transferred. Although this embodiment is configured to transfer images that can be transferred at any time, it can also be configured to synchronize images of all channels. For the purpose of transfer, wait for the image transfer of all channels to be completed for image transfer. Example 4

Embodiments 2 and 3 are implemented to prevent pixel wastage based on scanning standby, and waste time between scans. In other words, it means that compared to the highest image frame rate (number of scanned image frames per unit time) in the case of scanning without wasting time, the image frame rate will be reduced. FIG. 11 shows a GUI composition 1100 that reveals to the user that the frame rate of the picture is reduced. When scanning is on standby, the frame rate reduction information of the display image and which channel is included for the long-term transmission is also displayed 1101, so that you can grasp the condition settings for parameter adjustment (scanning image size, etc.) ) Whether it is appropriate or mastering the channel that becomes the bottleneck, etc., can improve the ease of use. The display control unit 140 controls to perform such a display 1101 based on the status of the image stored in the display image memory 150. In other words, the display control unit 14 controls the GUI 130 to display the image frame rate reduction information when a scan stop period occurs between scans of one image frame.

In addition, the present invention is not limited by the above-mentioned embodiments, and includes various modifications. For example, the above-mentioned embodiments are described in detail to facilitate the description of the present invention, and are not limited to all the configurations described. In addition, a part of a certain embodiment may be replaced with a configuration of another embodiment, and the configuration of a certain embodiment may be added to the configuration of another embodiment. In addition, with respect to a part of the configuration of each embodiment, other configurations may be added, deleted, or replaced.

In addition, a part or all of the above-mentioned various configurations, functions, processing units, processing means, etc. may also be realized by hardware by, for example, an integrated circuit design or the like. In addition, each of the above-mentioned structures, functions, etc., may also be separately interpreted by the processor to realize the program for each function, and implemented by software through execution. The programs, forms, files and other information that realize each function can be placed in memory, hard disk, SSD (Solid State Drive) and other recording devices, or IC card, SD card, DVD and other recording media. In addition, control lines or information lines are deemed necessary in the disclosure instructions, and may not reveal all control lines or information lines on the product. In fact, it can be considered that almost all the components are connected to each other.

100: Pixel acquisition device 101: Detector 102: A/D converter 103: Analog signal 104: Digital pixel value 110: calculation device 111: Controller 112: Memory 113: Evaluation Value Derivation Department 114: Image reduction section 115, 116: image information 117: evaluation value 118: Reduce image information 120: Overall control department 130: GUI 200: GUI screen 201: Image display section 202: Display selection input section 203: Parameter selection button 204: Slider input section 205: Rated value input section 206: Automatic adjustment button 207: Manual adjustment button 208: Finish button 140: display control unit 150: Display image memory 160: Optical parameter setting department 161: Optical parameter information 170: Scan Control Department 171: Scan Information 400: Write control 401: read control 402: Scanning completion judgment 403: Scanning pixel counter 404: Judgment of completion of transfer 405: Transfer pixel counter

[Fig. 1] A schematic diagram of a configuration of the charged particle beam device of the first embodiment. [Fig. 2A] A schematic diagram of an example of GUI screen display in the first embodiment. [Fig. 2B] A schematic diagram of another example of GUI screen display in the first embodiment. [Fig. 3] The schematic diagram of the action flow of the manual adjustment of the parameters of the first embodiment. [Figure 4] A detailed configuration diagram of the memory controller of the second embodiment. [Fig. 5] A schematic diagram of the operation flow of the memory controller during automatic parameter adjustment of the second embodiment. [Figure 6A] A schematic diagram of an example of a conventional scanning/image transfer timing chart. [Figure 6B] A schematic diagram of another example of the conventional scanning/image transfer timing chart. [Fig. 7] A schematic diagram of an example of the time chart of scanning/image transfer in the second embodiment. [Figure 8] A detailed configuration diagram of the memory controller of the third embodiment. [Fig. 9] A schematic diagram of the operation flow of the memory controller during automatic parameter adjustment of the third embodiment. [Fig. 10] A schematic diagram of an example of the time chart of scanning/image transfer in the third embodiment. [Fig. 11] A schematic diagram of an example of GUI screen display in the fourth embodiment.

100: Pixel acquisition device

101: Detector

102: A/D converter

103: Analog signal

104: Digital pixel value

110: calculation device

111: Controller

112: Memory

113: Evaluation Value Derivation Department

114: Image reduction section

116: Image Information

120: Overall control department

130: GUI

140: display control unit

150: Display image memory

160: Optical parameter setting department

161: Optical parameter information

170: Scan Control Department

171: Scan Information

Claims (15)

A charged particle beam device, characterized in that it has: The optical system irradiates the sample with a plurality of primary charged particle beams; and The optical parameter setting unit sets the parameters of the aforementioned optical system; and A detector to individually detect a plurality of secondary charged particle beams emitted from the aforementioned sample; and A plurality of memory units convert the signals detected by the aforementioned detectors into digital pixels and store them as images; and An evaluation value derivation unit that derives the evaluation value of the aforementioned primary charged particle beam from the aforementioned image; and GUI, which displays the aforementioned image and can accept input from the user; The aforementioned GUI displays the aforementioned image and the evaluation result based on the aforementioned evaluation value. The charged particle beam device according to claim 1, wherein: The image reduction section reduces the aforementioned image; and The display image memory stores the image reduced by the image reduction unit. The charged particle beam device according to claim 2, wherein: The display control unit displays the image and the evaluation result stored in the display image memory on the screen of the GUI. The charged particle beam device described in claim 3, which includes: The scanning control unit generates the scanning signal of the aforementioned primary charged particle beam; and The overall control unit sets the information input from the GUI to the optical parameter setting unit, and sets scan information to the scan control unit. The charged particle beam device described in claim 4, wherein: The GUI includes a display selection input unit for selecting and displaying the image, and an image display unit for displaying a predetermined number of the images selected by the user and the corresponding evaluation results side by side. The charged particle beam device described in claim 5, wherein: The aforementioned GUI further includes a parameter selection unit for selecting the aforementioned parameter, a slider input unit for instantly changing the aforementioned parameter, and a predetermined value input unit for inputting a predetermined value of the evaluation value. The charged particle beam device described in claim 6, wherein: The aforementioned GUI further includes a manual adjustment button and an automatic adjustment button for selecting manual adjustment or automatic adjustment made by the user. The charged particle beam device described in claim 4, wherein: Equipped with: a controller that controls the image writing and reading of the aforementioned memory unit, The controller includes a scanning pixel counter that counts the digital pixels, and a transfer pixel counter that counts the number of pixels to be transferred when the image is transferred, When it is determined that the scanning is completed based on the number of scanned pixels output from the scanning pixel counter and the pre-set image size, the writing control is performed by switching the memory section storing the aforementioned image, When the transfer is determined based on the number of transfer pixels output from the transfer pixel counter and the image size set in advance, the reading control is performed by switching the memory unit for reading the image. The charged particle beam device described in claim 8, wherein: Based on the completion of the transfer of the controller corresponding to the plurality of the detectors, the scanning control unit is instructed to start scanning. The charged particle beam device described in claim 8, wherein: The aforementioned control unit is Perform an inconsistency determination to determine whether the aforementioned memory portion storing the image and the aforementioned memory portion for reading the image are inconsistent, Based on the inconsistency determination of the controllers corresponding to the plurality of detectors, the scanning control unit is instructed to start scanning. The charged particle beam device described in claim 3, wherein: The aforementioned display control unit controls to display the frame rate reduction information in the aforementioned GUI when a scanning stop period occurs between scanning of each 1 frame. An actuation method of a charged particle beam device, which is characterized by: The aforementioned charged particle beam device has a GUI that can display images and accept input from users, Set the parameters of the optical system that irradiates the sample with multiple primary charged particle beams, Individually detect a plurality of secondary charged particle beams emitted from the aforementioned sample, and convert the detected signals into digital pixels to create an image, Derive the evaluation value of the aforementioned primary charged particle beam from the aforementioned image, The aforementioned image and the evaluation result based on the aforementioned evaluation value are displayed on the aforementioned GUI. Such as the operating method of the charged particle beam device described in claim 12, wherein: The aforementioned GUI displays a predetermined number of the aforementioned images selected by the user and the corresponding aforementioned evaluation results side by side. The operating method of the charged particle beam device described in claim 13, wherein: In the aforementioned GUI, the aforementioned parameters can be selected, and the aforementioned parameters can be changed in real time. The operating method of the charged particle beam device described in claim 14, wherein: In the aforementioned GUI, manual adjustment or automatic adjustment by the user can be selected.

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