TW202044000A - Touch panel and manufacturing method thereof - Google Patents

Touch panel and manufacturing method thereof Download PDF

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TW202044000A
TW202044000A TW109108636A TW109108636A TW202044000A TW 202044000 A TW202044000 A TW 202044000A TW 109108636 A TW109108636 A TW 109108636A TW 109108636 A TW109108636 A TW 109108636A TW 202044000 A TW202044000 A TW 202044000A
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layer
metal
touch panel
peripheral
substrate
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TW109108636A
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TWI788640B (en
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蔡宜珍
方瑋嘉
朱俊鴻
蕭仲欽
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英屬維京群島商天材創新材料科技股份有限公司
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0443Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/02Local etching
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/18Acidic compositions for etching copper or alloys thereof
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/30Acidic compositions for etching other metallic material
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416Control or interface arrangements specially adapted for digitisers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1603Process or apparatus coating on selected surface areas
    • C23C18/1607Process or apparatus coating on selected surface areas by direct patterning
    • C23C18/1608Process or apparatus coating on selected surface areas by direct patterning from pretreatment step, i.e. selective pre-treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31Coating with metals
    • C23C18/38Coating with copper
    • C23C18/40Coating with copper using reducing agents
    • C23C18/405Formaldehyde
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416Control or interface arrangements specially adapted for digitisers
    • G06F3/04164Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads

Abstract

A manufacturing method of a touch panel includes providing a substrate, wherein the substrate has a display area and a peripheral area. A metal layer and a metal nanowire layer are disposed. The first portion of the metal nanowire layer is disposed in the display area. The second portion of the metal nanowire layer and the metal layer are in the peripheral area. A patterned layer having a pattern is disposed. A patterning operation is performed according to the patterned layer. The patterning operation includes forming the metal layer into a plurality of peripheral leads and simultaneously forming the second portion of the metal layer into a plurality of etching layers, using an etching solution which can etch the metal layer and the metal nanowire layer. A touch panel is further provided.

Description

觸控面板及其製作方法 Touch panel and manufacturing method thereof

本發明涉及觸控面板及其製作方法。 The invention relates to a touch panel and a manufacturing method thereof.

近年來,透明導體可同時讓光穿過並提供適當的導電性,因而常應用於許多顯示或觸控相關的裝置中。一般而言,透明導體可以是各種金屬氧化物,例如氧化銦錫(Indium Tin Oxide,ITO)、氧化銦鋅(Indium Zinc Oxide,IZO)、氧化鎘錫(Cadmium Tin Oxide,CTO)或摻鋁氧化鋅(Aluminum-doped Zinc Oxide,AZO)。然而,這些金屬氧化物薄膜並不能滿足顯示裝置的可撓性需求。因此,現今發展出了多種可撓性的透明導體,例如利用奈米線等材料所製作的透明導體。 In recent years, transparent conductors can allow light to pass through at the same time and provide appropriate conductivity, so they are often used in many display or touch-related devices. Generally speaking, the transparent conductor can be various metal oxides, such as indium tin oxide (ITO), indium zinc oxide (IZO), cadmium tin oxide (Cadmium Tin Oxide, CTO) or aluminum-doped oxide. Zinc (Aluminum-doped Zinc Oxide, AZO). However, these metal oxide films cannot meet the flexibility requirements of display devices. Therefore, a variety of flexible transparent conductors have been developed today, such as transparent conductors made of materials such as nanowires.

然而,所述的奈米線的工藝技術尚有許多需要解決的問題,例如觸控面板的工藝上大多採用曝光顯影步驟,之後再依據圖案移除不需要的部分金屬,而在雙面電極製作工藝上,必須克服雙面曝光的干擾問題。 However, the nanowire process technology has many problems that need to be solved. For example, the process of touch panels mostly uses exposure and development steps, and then removes unnecessary parts of the metal according to the pattern, and the double-sided electrode is made In the process, the interference problem of double-sided exposure must be overcome.

再者,利用奈米線製作觸控電極,奈米線與周邊區 的引線在進行對位時需預留對位元誤差區域,所述對位元誤差區域造成周邊區的引線尺寸無法縮減,進而導致周邊區的寬度較大,尤其採用卷對卷(Roll to Roll)工藝,基材的形變量導致所述對位元誤差區域的尺寸更加放大(如150um),使得周邊區的寬度最小僅達到2.5mm,故無法滿足顯示器的窄邊框需求。 Furthermore, the use of nanowires to make touch electrodes, nanowires and surrounding areas During the alignment of the lead, it is necessary to reserve an alignment error area. The alignment error area causes the lead size of the peripheral area to be unable to be reduced, resulting in a larger width of the peripheral area, especially the use of roll to roll (Roll to Roll) ) Process, the deformation of the substrate causes the size of the alignment error area to be enlarged (such as 150um), so that the minimum width of the peripheral area is only 2.5mm, so the narrow frame requirement of the display cannot be met.

本發明的部分實施方式中,通過將材料以圖案化的方式設置於金屬奈米線層或金屬層上,不須額外的曝光顯影步驟就可以直接進行金屬奈米線層或金屬層的圖案化,以達到簡化工藝的目的,進而控制製作成本。 In some embodiments of the present invention, by patterning the material on the metal nanowire layer or metal layer, the metal nanowire layer or metal layer can be directly patterned without additional exposure and development steps. , In order to achieve the purpose of simplifying the process, and then control the production cost.

本發明的部分實施方式中,通過金屬奈米線層與金屬層的一次性蝕刻,藉以達到不需預留對位時的對位元誤差區域的效果,以形成寬度較小的周邊引線,進而滿足窄邊框的需求。 In some embodiments of the present invention, the metal nanowire layer and the metal layer are etched at one time, so as to achieve the effect of not needing to reserve an alignment error area when alignment is required to form a peripheral lead with a smaller width, and then Meet the needs of narrow bezels.

根據本發明的部分實施方式,一種觸控面板,其特徵在於,包含:一基板,其中該基板具有一顯示區與一周邊區;多個周邊引線設置於該周邊區;多個第一覆蓋物,該些第一覆蓋物覆蓋該些周邊引線;以及一觸控感應電極,設置於該基板的該顯示區,該觸控感應電極電性連接該些周邊引線,其中該些第一覆蓋物及該觸控感應電極包括金屬奈米線;一圖案化層是以具有圖案的方式設置於該些第一覆蓋物及該觸控感應電極上,該圖案化層具有一印刷側 面。 According to some embodiments of the present invention, a touch panel is characterized by comprising: a substrate, wherein the substrate has a display area and a peripheral area; a plurality of peripheral leads are arranged in the peripheral area; a plurality of first coverings, The first coverings cover the peripheral leads; and a touch sensing electrode disposed in the display area of the substrate, the touch sensing electrode is electrically connected to the peripheral leads, wherein the first coverings and the The touch sensing electrodes include metal nanowires; a patterned layer is patterned on the first coverings and the touch sensing electrodes, and the patterned layer has a printed side surface.

於本發明的部分實施方式中,案化層與該些第一覆蓋物形成一第一複合結構,或者該圖案化層與該觸控感應電極形成一第二複合結構。 In some embodiments of the present invention, the patterned layer and the first coverings form a first composite structure, or the patterned layer and the touch sensing electrode form a second composite structure.

於本發明的部分實施方式中,第一覆蓋物具有一側面,該側面與該些周邊引線的一側面為一共同蝕刻面,該共同蝕刻面與該印刷側面相互對齊。 In some embodiments of the present invention, the first covering has a side surface, the side surface and a side surface of the peripheral leads are a common etching surface, and the common etching surface and the printing side surface are aligned with each other.

於本發明的部分實施方式中,更包括設置在該周邊區的多個標記及覆蓋該些標記的多個第二覆蓋物,其中該些第二覆蓋物包括金屬奈米線。 In some embodiments of the present invention, it further includes a plurality of marks disposed in the peripheral area and a plurality of second coverings covering the marks, wherein the second coverings include metal nanowires.

於本發明的部分實施方式中,第二覆蓋物具有一側面,該側面與該些標記的一側面為一共同蝕刻面,該共同蝕刻面與該印刷側面相互對齊。 In some embodiments of the present invention, the second covering has a side surface, the side surface and a side surface of the marks are a common etching surface, and the common etching surface and the printing side surface are aligned with each other.

於本發明的部分實施方式中,更包含:一膜層。 In some embodiments of the present invention, it further includes: a film layer.

於本發明的部分實施方式中,該些周邊引線與該些標記為金屬材料製成。周邊引線與標記為同一層的金屬材料製成。 In some embodiments of the present invention, the peripheral leads and the marks are made of metal materials. The peripheral leads are made of the same layer of metal material as marked.

根據本發明的部分實施方式,一種觸控面板的製作方法,其特徵在於,包含:提供一基板,其中該基板具有一顯示區與一周邊區;設置一金屬層與一金屬奈米線層,其中該金屬奈米線層的一第一部分位於該顯示區,該金屬奈米線層的一第二部分與該金屬層位於該周邊區;設置具有圖樣的一圖案化層;及依據該圖案化層進行一圖案化步驟,其中該圖案化步驟包括利用可蝕刻該金屬層與該金屬 奈米線層的一蝕刻液將該金屬層形成多個周邊引線並同時將該金屬層的該第二部分形成多個蝕刻層。 According to some embodiments of the present invention, a manufacturing method of a touch panel is characterized by comprising: providing a substrate, wherein the substrate has a display area and a peripheral area; and disposing a metal layer and a metal nanowire layer, wherein A first portion of the metal nanowire layer is located in the display area, a second portion of the metal nanowire layer and the metal layer are located in the peripheral area; a patterned layer with a pattern is provided; and according to the patterned layer Perform a patterning step, wherein the patterning step includes using the metal layer and the metal An etching solution for the nanowire layer forms the metal layer into a plurality of peripheral leads and simultaneously forms a plurality of etching layers on the second part of the metal layer.

於本發明的部分實施方式中,該圖案化步驟更包括利用該蝕刻液將該金屬奈米線層的該第一部分形成一觸控感應電極,該觸控感應電極設置於該基板的該顯示區,該觸控感應電極電性連接該些周邊引線。 In some embodiments of the present invention, the patterning step further includes using the etching solution to form the first portion of the metal nanowire layer into a touch sensing electrode, and the touch sensing electrode is disposed on the display area of the substrate , The touch sensing electrode is electrically connected to the peripheral leads.

於本發明的部分實施方式中,圖案化層是利用柔版印刷、凸版印刷、凹版印刷或網版印刷所成型。 In some embodiments of the present invention, the patterned layer is formed by flexographic printing, relief printing, gravure printing or screen printing.

於本發明的部分實施方式中,設置該金屬層與該金屬奈米線層包括:設置該金屬層於該周邊區;及接著設置該金屬奈米線層於該顯示區與該周邊區,該第一部分位於該顯示區而成形於該基板上,該第二部分位於該周邊區而成形於該金屬層上。 In some embodiments of the present invention, disposing the metal layer and the metal nanowire layer includes: disposing the metal layer in the peripheral area; and then disposing the metal nanowire layer in the display area and the peripheral area, the The first part is located in the display area and formed on the substrate, and the second part is located in the peripheral area and formed on the metal layer.

於本發明的部分實施方式中,設置該金屬層於該周邊區包括:選擇性的將該金屬層成形於該周邊區而不成形於該顯示區。 In some embodiments of the present invention, disposing the metal layer in the peripheral area includes: selectively forming the metal layer in the peripheral area but not in the display area.

於本發明的部分實施方式中,設置該金屬層於該周邊區包括:將該金屬層成形於該周邊區與該顯示區;及移除位於該顯示區的該金屬層。 In some embodiments of the present invention, disposing the metal layer in the peripheral area includes: forming the metal layer in the peripheral area and the display area; and removing the metal layer located in the display area.

於本發明的部分實施方式中,設置具有圖樣的該圖案化層包括將該圖案化層設置於該金屬奈米線層上,該圖案化層與該金屬奈米線層形成一複合結構。 In some embodiments of the present invention, disposing the patterned layer with a pattern includes disposing the patterned layer on the metal nanowire layer, and the patterned layer and the metal nanowire layer form a composite structure.

於本發明的部分實施方式中,該圖案化步驟更包括利用該蝕刻液將該金屬層形成多個標記,該些蝕刻層包括 多個第一覆蓋物及多個第二覆蓋物,每一該些第一覆蓋物設置在對應的該些周邊引線上,每一該些第二覆蓋物設置在對應的該些標記上。 In some embodiments of the present invention, the patterning step further includes using the etching solution to form a plurality of marks on the metal layer, and the etching layers include A plurality of first coverings and a plurality of second coverings, each of the first coverings is arranged on the corresponding peripheral leads, and each of the second coverings is arranged on the corresponding marks.

於本發明的部分實施方式中,設置該金屬層與該金屬奈米線層包括:設置該金屬奈米線層於該顯示區與該周邊區;及接著設置該金屬層於該周邊區,其中該金屬層位於該第二部分上。 In some embodiments of the present invention, disposing the metal layer and the metal nanowire layer includes: disposing the metal nanowire layer in the display area and the peripheral area; and then disposing the metal layer in the peripheral area, wherein The metal layer is on the second part.

於本發明的部分實施方式中,圖案化步驟更包括利用該蝕刻液將該金屬層形成多個標記,該些蝕刻層包括多個第一中間層及多個第二中間層,每一該些第一中間層設置在對應的該些周邊引線與該基板之間,每一該些第二中間層設置在對應的該些標記與該基板之間。 In some embodiments of the present invention, the patterning step further includes using the etching solution to form a plurality of marks on the metal layer. The etching layers include a plurality of first intermediate layers and a plurality of second intermediate layers. The first intermediate layer is arranged between the corresponding peripheral leads and the substrate, and each of the second intermediate layers is arranged between the corresponding marks and the substrate.

於本發明的部分實施方式中,該圖案化的步驟之後,更包括移除該圖案化層。 In some embodiments of the present invention, after the step of patterning, it further includes removing the patterned layer.

於本發明的部分實施方式中,更包括設置一膜層。 In some embodiments of the present invention, it further includes providing a film layer.

於本發明的部分實施方式中,製作方法可於該基板的一面或雙面進行。 In some embodiments of the present invention, the manufacturing method can be performed on one side or both sides of the substrate.

100:觸控面板 100: Touch panel

110:基板 110: substrate

120:周邊引線 120: peripheral lead

122:側面 122: side

124:上表面 124: upper surface

140:標記 140: mark

142:側面 142: side

144:上表面 144: upper surface

130:膜層 130: Membrane

136:非導電區域 136: Non-conductive area

160:遮罩導線 160: mask wire

170:軟性電路板 170: flexible circuit board

ML:金屬層 ML: Metal layer

NWL:金屬奈米線層 NWL: Metal Nanowire Layer

PL:圖案化層 PL: Patterned layer

M1:第一中間層 M1: the first middle layer

M1L:側面 M1L: side

M2:第二中間層 M2: The second middle layer

M2L:側面 M2L: side

VA:顯示區 VA: Display area

PA:周邊區 PA: Surrounding area

BA:接合區 BA: junction area

TE1:第一觸控電極 TE1: The first touch electrode

TE2:第二觸控電極 TE2: second touch electrode

TE:觸控電極 TE: touch electrode

C1:第一覆蓋物 C1: first cover

C1L:側面 C1L: side

C2:第二覆蓋物 C2: second cover

C2L:側面 C2L: side

D1:第一方向 D1: First direction

D2:第二方向 D2: second direction

第1A圖至第1C圖為根據本發明的部分實施方式的觸控面板的製作方法的步驟示意圖。 1A to 1C are schematic diagrams of steps of a manufacturing method of a touch panel according to some embodiments of the present invention.

第2圖為根據本發明的部分實施方式的觸控面板的上視示意圖。 FIG. 2 is a schematic top view of a touch panel according to some embodiments of the present invention.

第2A圖為沿第2圖的線A-A的剖面示意圖。 Fig. 2A is a schematic cross-sectional view taken along the line A-A in Fig. 2.

第2B圖為沿第2圖的線B-B的剖面示意圖。 Fig. 2B is a schematic cross-sectional view taken along the line B-B in Fig. 2.

第3圖為根據本發明的部分實施方式的觸控面板與軟性電路板組裝後的上視示意圖。 FIG. 3 is a schematic top view of the touch panel and the flexible circuit board after assembly according to some embodiments of the present invention.

第4圖為根據本發明的另一實施方式的觸控面板的示意圖。 FIG. 4 is a schematic diagram of a touch panel according to another embodiment of the present invention.

第5圖為根據本發明的另一實施方式的觸控面板的上視示意圖。 FIG. 5 is a schematic top view of a touch panel according to another embodiment of the present invention.

第5A圖為沿第5圖的線A-A的剖面示意圖。 Fig. 5A is a schematic cross-sectional view taken along the line A-A in Fig. 5.

第6A圖至第6C圖為根據本發明的部分實施方式的觸控面板的製作方法的步驟示意圖。 6A to 6C are schematic diagrams of steps of a manufacturing method of a touch panel according to some embodiments of the present invention.

第7圖為根據本發明的另一實施方式的觸控面板的上視示意圖。 FIG. 7 is a schematic top view of a touch panel according to another embodiment of the present invention.

第7A圖為沿第7圖的線A-A的剖面示意圖。 Fig. 7A is a schematic cross-sectional view taken along the line A-A in Fig. 7.

第7B圖為沿第7圖的線B-B的剖面示意圖。 Fig. 7B is a schematic cross-sectional view taken along the line B-B in Fig. 7.

第8圖為根據本發明的另一實施方式的觸控面板的示意圖。 FIG. 8 is a schematic diagram of a touch panel according to another embodiment of the present invention.

第9圖為根據本發明的另一實施方式的觸控面板的上視示意圖。 FIG. 9 is a schematic top view of a touch panel according to another embodiment of the present invention.

第9A圖為沿第9圖的線A-A的剖面示意圖。 Fig. 9A is a schematic cross-sectional view taken along the line A-A in Fig. 9.

第10圖為根據本發明的另一實施方式的觸控面板的上視示意圖。 FIG. 10 is a schematic top view of a touch panel according to another embodiment of the present invention.

以下將以圖式揭露本發明的多個實施方式,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本發明。也就是說,在本發明部分實施方式中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式為之。 Hereinafter, a number of embodiments of the present invention will be disclosed in the form of drawings. For clear description, many practical details will be described in the following description. However, it should be understood that these practical details should not be used to limit the present invention. That is, in some embodiments of the present invention, these practical details are unnecessary. In addition, in order to simplify the drawings, some conventional structures and elements will be shown in the drawings in a simple way.

關於本文中所使用的「約」、「大約」或「大致」,一般是指數值的誤差或範圍於百分之二十以內,較好地是於百分之十以內,更佳地是於百分之五以內。文中若無明確說明,所提及的數值皆視為近似值,即具有如「約」、「大約」或「大致」所表示的誤差或範圍。 Regarding the "about", "approximately" or "approximately" used in this article, the error or range of the index value is generally within 20%, preferably within 10%, and more preferably Within five percent. If there is no clear description in the text, the values mentioned are regarded as approximate values, that is, they have the error or range indicated by "about", "approximately" or "approximately".

請先參閱第2圖至2B圖,其為根據本發明的部分實施方式的觸控面板100的上視示意圖與剖視示意圖。觸控面板100包含基板110、周邊引線120、第一覆蓋物C1、圖案化層PL以及觸控感應電極TE。參閱第2圖,基板110具有顯示區VA與周邊區PA,周邊區PA設置於顯示區VA的側邊,例如周邊區PA則可為設置於顯示區VA的四周(即涵蓋右側、左側、上側及下側)的框型區域,但在其他實施例中,周邊區PA可為一設置於顯示區VA的左側及下側的L型區域。又如第2圖所示,本實施例共有八組周邊引線120以及與周邊引線120相對應的第一覆蓋物C1設置於基板110的周邊區PA;觸控感應電極TE大致設置於基板110的顯示區VA。 Please refer to FIGS. 2 to 2B first, which are schematic top views and schematic cross-sectional views of the touch panel 100 according to some embodiments of the present invention. The touch panel 100 includes a substrate 110, a peripheral lead 120, a first cover C1, a patterned layer PL, and a touch sensing electrode TE. Referring to Figure 2, the substrate 110 has a display area VA and a peripheral area PA. The peripheral area PA is arranged on the side of the display area VA. For example, the peripheral area PA can be arranged around the display area VA (that is, covering the right, left, and upper sides). And the lower side), but in other embodiments, the peripheral area PA may be an L-shaped area disposed on the left and lower sides of the display area VA. As shown in Figure 2, in this embodiment, there are a total of eight sets of peripheral leads 120 and the first cover C1 corresponding to the peripheral leads 120 are disposed on the peripheral area PA of the substrate 110; the touch sensing electrode TE is generally disposed on the substrate 110 Display area VA.

借由圖案化層PL進行圖案的轉移,可將第一覆蓋物C1設置於周邊引線120的上表面124,使上下兩層材料不須對位就能將第一覆蓋物C1與周邊引線120成型在預定的位置,故可以達到減少或避免在工藝中設置對位元誤差區域的需求,藉以降低周邊區PA的寬度,進而達到顯示器的窄邊框需求。 By using the patterned layer PL for pattern transfer, the first cover C1 can be disposed on the upper surface 124 of the peripheral lead 120, so that the first cover C1 and the peripheral lead 120 can be formed without aligning the upper and lower layers of materials. In a predetermined position, it is possible to reduce or avoid the need for setting a bit error area in the process, thereby reducing the width of the peripheral area PA, thereby achieving the narrow frame requirement of the display.

觸控面板100更包含標記140以及第二覆蓋物C2,參閱第2圖,本實施例具有兩組標記140以及與標記140相對應的第二覆蓋物C2設置於基板110的周邊區PA。上述的周邊引線120、標記140、第一覆蓋物C1、第二覆蓋物C2以及觸控感應電極TE的數量可為一或多個,而以下各具體實施例及圖式中所繪製的數量僅為解說之用,並未限制本發明。 The touch panel 100 further includes a mark 140 and a second cover C2. Referring to FIG. 2, the present embodiment has two sets of marks 140 and a second cover C2 corresponding to the marks 140 are disposed on the peripheral area PA of the substrate 110. The number of the aforementioned peripheral leads 120, marks 140, first cover C1, second cover C2, and touch sensing electrode TE can be one or more, and the numbers drawn in the following specific embodiments and drawings are only For illustrative purposes, the invention is not limited.

具體而言,請參閱第1A圖至1C圖,本發明的實施方式中的觸控面板100可依以下方式製作:首先提供基板110,其上具有事先定義的周邊區PA與顯示區VA。接著,形成金屬層ML於周邊區PA(如第1A圖);接著形成金屬奈米線(metal nanowires)層NWL於周邊區PA與顯示區VA(如第1B圖);接著形成圖案化層PL於金屬奈米線層NWL上(如第1C圖);接著依據圖案化層PL進行圖案化,以形成具有圖樣的金屬層ML與金屬奈米線層NWL。以下進行更詳細的說明。 Specifically, referring to FIGS. 1A to 1C, the touch panel 100 in the embodiment of the present invention can be fabricated in the following manner: first, a substrate 110 is provided, on which there is a predefined peripheral area PA and a display area VA. Next, a metal layer ML is formed in the peripheral area PA (as shown in Figure 1A); then a metal nanowires layer NWL is formed in the peripheral area PA and the display area VA (as shown in Figure 1B); and then a patterned layer PL is formed On the metal nanowire layer NWL (as shown in Figure 1C); then patterning is performed according to the patterned layer PL to form a patterned metal layer ML and a metal nanowire layer NWL. A more detailed description is given below.

請參閱第1A圖,形成金屬層ML於基板110的周邊區PA,金屬層ML可經過後續的圖案化而成為周邊引 線120。詳細而言,本發明的部分實施方式中金屬層ML可為導電性較佳的金屬所構成,較佳為單層金屬結構,例如銀層、銅層等;或為多層導電結構,例如鉬/鋁/鉬、銅/鎳、鈦/鋁/鈦、鉬/鉻等,上述金屬結構較佳的為不透光,例如可見光(如波長介於400nm-700nm)的光穿透率(Transmission)小於約90%。 Referring to Figure 1A, a metal layer ML is formed on the peripheral area PA of the substrate 110. The metal layer ML can be patterned to become a peripheral lead Line 120. In detail, in some embodiments of the present invention, the metal layer ML may be made of metal with better conductivity, preferably a single-layer metal structure, such as a silver layer, a copper layer, etc.; or a multilayer conductive structure, such as molybdenum/ Aluminum/molybdenum, copper/nickel, titanium/aluminum/titanium, molybdenum/chromium, etc., the above-mentioned metal structure is preferably opaque, for example, the light transmittance of visible light (such as a wavelength between 400nm-700nm) is less than About 90%.

在本實施例中,可利用濺鍍方式(例如但不限於物理濺鍍、化學濺鍍等)將前述金屬形成於基板110上。金屬層ML可直接選擇性的成形於周邊區PA而不成形於顯示區VA,或是先整面的形成於周邊區PA與顯示區VA,再借由蝕刻等步驟移除位於顯示區VA的金屬層ML。 In this embodiment, the aforementioned metal can be formed on the substrate 110 by a sputtering method (such as but not limited to physical sputtering, chemical sputtering, etc.). The metal layer ML can be directly and selectively formed in the peripheral area PA without being formed in the display area VA, or it can be formed in the peripheral area PA and the display area VA first, and then removed by etching and other steps in the display area VA. The metal layer ML.

在一實施例中,以化學鍍的方式將銅層沉積於基板110的周邊區PA,化學鍍即在無外加電流的情況下借助合適的還原劑,使鍍液中金屬離子在金屬觸媒催化下還原成金屬並鍍覆於其表面,此過程稱之為無電鍍(electroless plating)也稱為化學鍍(chemical plating)或自身催化鍍(autocatalytic plating),是故,本實施例的金屬層ML亦可稱作無電鍍層、化學鍍層或自身催化鍍層。具體而言,可採用例如主成分為硫酸銅的鍍液,其組成可為但不限於:濃度為5g/L的硫酸銅(copper sulfate),濃度為12g/L的乙二胺四乙酸(ethylenediaminetetraacetic acid),濃度為5g/L的甲醛(formaldehyde),無電鍍銅鍍液的pH以氫氧化鈉(sodium hydroxide)調整為約11至13,鍍浴溫度為 約50至70℃,浸泡的反應時間為1至5分鐘。在一實施例中,可先形成催化層(圖未示)於基板110的周邊區PA上,由於顯示區VA中並無催化層,故銅層僅沉積於周邊區PA而不成形於顯示區VA。在進行無電鍍的反應時,銅材料可在具有催化/活化能力的催化層上成核,而後靠銅的自我催化繼續成長銅膜。 In one embodiment, the copper layer is deposited on the peripheral area PA of the substrate 110 by electroless plating. The electroless plating means that the metal ions in the plating solution are catalyzed by the metal catalyst with the help of a suitable reducing agent without external current. It is reduced to metal and plated on the surface. This process is called electroless plating, also called chemical plating or autocatalytic plating. Therefore, the metal layer ML of this embodiment It can also be called electroless plating, electroless plating or autocatalytic plating. Specifically, for example, a plating solution whose main component is copper sulfate may be used, and its composition may be but not limited to: copper sulfate with a concentration of 5 g/L, and ethylenediaminetetraacetic acid with a concentration of 12 g/L. acid), formaldehyde with a concentration of 5g/L, the pH of the electroless copper plating solution is adjusted to about 11-13 with sodium hydroxide, and the bath temperature is About 50 to 70°C, the reaction time of soaking is 1 to 5 minutes. In one embodiment, a catalytic layer (not shown) may be formed on the peripheral area PA of the substrate 110 first. Since there is no catalytic layer in the display area VA, the copper layer is only deposited on the peripheral area PA and not formed in the display area. VA. During the electroless plating reaction, the copper material can nucleate on the catalytic layer with catalytic/activation ability, and then continue to grow the copper film by the self-catalysis of copper.

接著,請參閱第1B圖,將至少包括金屬奈米線的金屬奈米線層NWL,例如奈米銀線(silver nanowires)層、奈米金線(gold nanowires)層或奈米銅線(copper nanowires)層塗布於周邊區PA與顯示區VA;金屬奈米線層NWL的第一部分是位元在顯示區VA,第一部分主要成形於基板110上,而在周邊區PA的第二部分則主要成形於金屬層ML上。在本實施例的具體作法為:將具有金屬奈米線的分散液或漿料(ink)以塗布方法成型於基板110上,並加以乾燥使金屬奈米線覆著於基板110及前述金屬層ML的表面,進而成型為設置於基板110及前述金屬層ML上的金屬奈米線層NWL。而在上述的固化/乾燥步驟之後,溶劑等物質被揮發,而金屬奈米線以隨機的方式分佈於基板110及前述金屬層ML的表面;較佳的,金屬奈米線140會固著於基板110及前述金屬層ML的表面上而不至脫落而形成所述的金屬奈米線層NWL,且金屬奈米線可彼此接觸以提供連續電流路徑,進而形成一導電網路(conductive network)。 Next, referring to Figure 1B, the metal nanowire layer NWL including at least metal nanowires, such as silver nanowires layer, gold nanowires layer or copper nanowires nanowires) layer is coated on the peripheral area PA and the display area VA; the first part of the metal nanowire layer NWL is located in the display area VA, the first part is mainly formed on the substrate 110, and the second part of the peripheral area PA is mainly It is formed on the metal layer ML. In this embodiment, the specific method is as follows: a dispersion or slurry (ink) with metal nanowires is formed on the substrate 110 by a coating method and dried to coat the substrate 110 and the aforementioned metal layer with the metal nanowires. The surface of the ML is further formed into a metal nanowire layer NWL disposed on the substrate 110 and the aforementioned metal layer ML. After the above-mentioned curing/drying step, the solvent and other substances are volatilized, and the metal nanowires are randomly distributed on the surface of the substrate 110 and the aforementioned metal layer ML; preferably, the metal nanowires 140 are fixed on The metal nanowire layer NWL is formed on the surface of the substrate 110 and the aforementioned metal layer ML without falling off, and the metal nanowires can contact each other to provide a continuous current path, thereby forming a conductive network (conductive network) .

在本發明的實施例中,上述分散液可為水、醇、酮、 醚、烴或芳族溶劑(苯、甲苯、二甲苯等等);上述分散液亦可包含添加劑、介面活性劑或粘合劑,例如羧甲基纖維素(carboxymethyl cellulose;CMC)、2-羥乙基纖維素(hydroxyethyl Cellulose:HEC)、羥基丙基甲基纖維素(hydroxypropyl methylcellulose;HPMC)、磺酸酯、硫酸酯、二磺酸鹽、磺基琥珀酸酯、磷酸酯或含氟介面活性劑等等。而所述的含有金屬奈米線的分散液或漿料可以用任何方式成型於基板110及前述金屬層ML的表面,例如但不限於:網版印刷、噴頭塗布、滾輪塗布等工藝;在一種實施例中,可採用卷對卷(roll to roll;RTR)工藝將含有金屬奈米線的分散液或漿料塗布於連續供應的基板110及前述金屬層ML的表面。 In the embodiment of the present invention, the above-mentioned dispersion may be water, alcohol, ketone, Ether, hydrocarbon or aromatic solvent (benzene, toluene, xylene, etc.); the above dispersion may also contain additives, surfactants or binders, such as carboxymethyl cellulose (CMC), 2-hydroxy Hydroxyethyl Cellulose (HEC), hydroxypropyl methylcellulose (HPMC), sulfonate, sulfate, disulfonate, sulfosuccinate, phosphate or fluorine-containing interface activity Agent and so on. The dispersion or slurry containing metal nanowires can be formed on the surface of the substrate 110 and the aforementioned metal layer ML in any manner, such as but not limited to: screen printing, nozzle coating, roller coating, etc.; in a In an embodiment, a roll to roll (RTR) process may be used to coat the dispersion or slurry containing metal nanowires on the continuously supplied substrate 110 and the surface of the aforementioned metal layer ML.

本文所用的「金屬奈米線(metal nanowires)」為一集合名詞,其指包含多個元素金屬、金屬合金或金屬化合物(包括金屬氧化物)的金屬線的集合,其中所含金屬奈米線的數量,並不影響本發明所主張的保護範圍;且單一金屬奈米線的至少一個截面尺寸(即截面的直徑)小於約500nm,較佳小於約100nm,且更佳小於約50nm;而本發明所稱的為”線(wire)”的金屬奈米結構,主要具有高的縱橫比,例如介於約10至100,000之間,更詳細的說,金屬奈米線的縱橫比(長度:截面的直徑)可大於約10,較佳大於約50,且更佳大於約100;金屬奈米線可以為任何金屬,包括(但不限於)銀、金、銅、鎳及鍍金的銀。而其他用語,諸如絲(silk)、纖維(fiber)、管(tube) 等若同樣具有上述的尺寸及高縱橫比,亦為本發明所涵蓋的範疇。 As used herein, "metal nanowires" is a collective term that refers to a collection of metal wires containing multiple element metals, metal alloys or metal compounds (including metal oxides), which contain metal nanowires The number does not affect the scope of protection claimed by the present invention; and at least one cross-sectional dimension (ie, the diameter of the cross-section) of a single metal nanowire is less than about 500nm, preferably less than about 100nm, and more preferably less than about 50nm; and this The metal nanostructure called "wire" in the invention mainly has a high aspect ratio, for example, between about 10 and 100,000. More specifically, the aspect ratio (length: cross section) of the metal nanowire The diameter) can be greater than about 10, preferably greater than about 50, and more preferably greater than about 100; the metal nanowire can be any metal, including but not limited to silver, gold, copper, nickel, and gold-plated silver. And other terms, such as silk, fiber, tube If the same size and high aspect ratio as mentioned above are also covered by the present invention.

接著,請參閱第1C圖,形成圖案化層PL於金屬奈米線層NWL上。在一實施例中,圖案化層PL是利用柔版印刷(flexography)技術將材料直接以具有圖案的結構成型於金屬奈米線層NWL上;換言之,圖案化層PL在成型於工作面(在本實施例即為金屬奈米線層NWL)上的同時就已經具有特定的圖樣,故不需針對塗布後的材料進行圖形化步驟。根據本發明之一或多個具體實例,可利用柔版印刷方法製作上述的圖案化層PL,例如但不限於以下印刷裝置,柔版印刷設備可至少包括供料滾輪與印刷滾輪,而印刷滾輪上具有柔版印刷結構。在操作中,供料滾輪因旋轉而將待印刷材料自供料盤轉移至供料滾輪;接著隨著供料滾輪旋轉,將待印刷材料轉移至柔版印刷結構;柔版印刷結構可包括具特定圖樣的接觸表面,以將待印刷材料依照特定圖樣轉移至金屬奈米線層NWL上。在一實施例中,待印刷材料印刷於金屬奈米線層NWL上後可再依照材料特性進行固化步驟。在一實施例中,圖案化層PL是利用凸版印刷、凹版印刷或網版印刷等將待印刷材料依照特定圖樣轉移至金屬奈米線層NWL上。依據前述方法所製作的圖案化層PL可具有印刷側面,有別於傳統的經過曝光顯影或蝕刻等工藝所處理成型的側面。 Next, referring to FIG. 1C, a patterned layer PL is formed on the metal nanowire layer NWL. In one embodiment, the patterned layer PL is formed on the metal nanowire layer NWL in a patterned structure using flexography technology; in other words, the patterned layer PL is formed on the working surface (in In this embodiment, the metal nanowire layer (NWL) already has a specific pattern, so there is no need to perform a patterning step for the coated material. According to one or more specific examples of the present invention, the above-mentioned patterned layer PL may be produced by a flexographic printing method, such as but not limited to the following printing devices. The flexographic printing equipment may at least include a feeding roller and a printing roller, and the printing roller It has a flexographic printing structure. In operation, the supply roller rotates to transfer the material to be printed from the supply tray to the supply roller; then as the supply roller rotates, the material to be printed is transferred to the flexographic printing structure; the flexographic printing structure may include specific The contact surface of the pattern to transfer the material to be printed to the metal nanowire layer NWL according to the specific pattern. In one embodiment, after the material to be printed is printed on the metal nanowire layer NWL, a curing step can be performed according to the characteristics of the material. In one embodiment, the patterned layer PL uses relief printing, gravure printing or screen printing to transfer the material to be printed onto the metal nanowire layer NWL according to a specific pattern. The patterned layer PL fabricated according to the foregoing method may have a printed side surface, which is different from the side surface processed and formed by traditional processes such as exposure, development or etching.

圖案化層PL可依前述方法形成於周邊區PA,亦可形成於周邊區PA與顯示區VA。位於周邊區PA的圖案 化層PL(亦稱第二圖案化層)主要做於周邊區PA的蝕刻遮罩,以用於後述步驟中將周邊區PA的金屬奈米線層NWL與金屬層ML進行圖案化,而位於顯示區VA的圖案化層PL(亦稱第一圖案化層)主要做於顯示區VA的蝕刻遮罩,以用於後述步驟中將顯示區VA的金屬奈米線層NWL進行圖案化。 The patterned layer PL can be formed in the peripheral area PA according to the aforementioned method, and can also be formed in the peripheral area PA and the display area VA. Pattern located in the surrounding area PA The patterned layer PL (also known as the second patterned layer) is mainly used as an etching mask in the peripheral area PA for patterning the metal nanowire layer NWL and the metal layer ML in the peripheral area PA in the following steps, and is located The patterned layer PL (also called the first patterned layer) of the display area VA is mainly used as an etching mask of the display area VA for patterning the metal nanowire layer NWL of the display area VA in the following steps.

本發明實施例並不限制圖案化層PL的材料(即前述的待印刷材料),例如高分子材料包含以下:各類光阻材料、底塗層材料、外塗層材料、保護層材料、絕緣層材料等,而所述高分子材料可為酚醛樹酯、環氧樹酯、壓克力樹酯、PU樹酯、ABS樹酯、胺基樹酯、矽脂樹酯等。而以材料特性而言,圖案化層PL的材料可為光固化型或熱固化型。在一實施例中,圖案化層PL的材料的黏度約200-1500cps,固含量約30-100%。 The embodiment of the present invention does not limit the material of the patterned layer PL (that is, the aforementioned material to be printed). For example, the polymer material includes the following: various photoresist materials, undercoating materials, outer coating materials, protective layer materials, and insulating materials. Layer materials, etc., and the polymer material can be phenolic resin, epoxy resin, acrylic resin, PU resin, ABS resin, amino resin, silicone resin, etc. In terms of material characteristics, the material of the patterned layer PL may be a photo-curing type or a heat-curing type. In one embodiment, the material of the patterned layer PL has a viscosity of about 200-1500 cps and a solid content of about 30-100%.

接著進行圖案化,在圖案化步驟之後即可製作如圖2所示的觸控面板100。在一實施例中,在周邊區PA採用可同時蝕刻金屬奈米線層NWL與金屬層ML的蝕刻液,配合圖案化層PL(亦稱第二圖案化層)形成的蝕刻遮罩以在同一工序中製作具有圖樣的金屬層ML與金屬奈米線層NWL。如第2圖、第2B圖所示,在周邊區PA上所製作出的具有圖樣的金屬層ML即為周邊線路120,而具有圖樣的金屬奈米線層NWL即構成蝕刻層,由於本實施例的蝕刻層位於周邊線路120上,故亦可稱作第一覆蓋物C1;換言之,在圖案化步驟之後,周邊區PA形成由金屬奈米 線層NWL的第二部分所構成的第一覆蓋物C1以及由金屬層ML所構成的周邊線路120。在另一實施例中,在周邊區PA上可製作出由金屬奈米線層NWL的第二部分所構成的蝕刻層以及由金屬層ML所構成的周邊線路120與標記140(請參考第2圖、第2A圖及第2B圖),蝕刻層可包括第一覆蓋物C1與第二覆蓋物C2,第一覆蓋物C1設置於對應的周邊線路120上,第二覆蓋物C2設置於對應的標記140上。在一實施例中,可同時蝕刻金屬奈米線層NWL與金屬層ML指的是對金屬奈米線層NWL與金屬層ML蝕刻速率比值介於約0.1-10或0.01-100。 Then, patterning is performed, and after the patterning step, the touch panel 100 as shown in FIG. 2 can be manufactured. In one embodiment, an etching solution that can simultaneously etch the metal nanowire layer NWL and the metal layer ML is used in the peripheral area PA, and the etching mask formed by the patterned layer PL (also known as the second patterned layer) is used in the same In the process, a patterned metal layer ML and metal nanowire layer NWL are produced. As shown in Figures 2 and 2B, the patterned metal layer ML formed on the peripheral area PA is the peripheral circuit 120, and the patterned metal nanowire layer NWL constitutes the etching layer. Because of this embodiment The etching layer in the example is located on the peripheral circuit 120, so it can also be called the first cover C1; in other words, after the patterning step, the peripheral area PA is formed by metal nano The first cover C1 formed by the second part of the line layer NWL and the peripheral circuit 120 formed by the metal layer ML. In another embodiment, an etching layer composed of the second part of the metal nanowire layer NWL and a peripheral circuit 120 and a mark 140 composed of the metal layer ML can be formed on the peripheral area PA (please refer to the second part Figure, Figure 2A and Figure 2B), the etching layer may include a first cover C1 and a second cover C2, the first cover C1 is disposed on the corresponding peripheral circuit 120, and the second cover C2 is disposed on the corresponding Mark on 140. In one embodiment, the simultaneous etching of the metal nanowire layer NWL and the metal layer ML means that the ratio of the etching rate to the metal nanowire layer NWL and the metal layer ML is about 0.1-10 or 0.01-100.

根據一具體實施例,金屬奈米線層NWL為奈米銀層,金屬層ML為銅層的情況下,蝕刻液可用於蝕刻銅與銀,例如蝕刻液的主成分為H3PO4(比例為約55%至70%)及HNO3(比例約5%至15%),以在同一工藝中移除銅材料與銀材料。在另一具體實施例中,可在蝕刻液的主成分之外加入添加物,例如蝕刻選擇比調整劑,以調整蝕刻銅與蝕刻銀的速率;舉例而言,可在主成分為H3PO4(比例約55%至70%)及HNO3(比例約5%至15%)中添加約5%至10%的Benzotriazole(BTA),以解決銅的過蝕刻問題。在另一具體實施例中,蝕刻液的主成分為氯化鐵/硝酸或為磷酸/雙氧水等組成。 According to a specific embodiment, when the metal nanowire layer NWL is a nanosilver layer and the metal layer ML is a copper layer, the etching solution can be used to etch copper and silver. For example, the main component of the etching solution is H 3 PO 4 (proportion It is about 55% to 70%) and HNO 3 (the ratio is about 5% to 15%) to remove copper material and silver material in the same process. In another specific embodiment, additives may be added to the main component of the etching solution, such as an etching selection ratio adjuster, to adjust the rate of etching copper and silver; for example, the main component may be H 3 PO 4 Benzotriazole (BTA) is added to HNO 3 (approximately 55% to 70%) and HNO 3 (approximately 5% to 15%) to solve the problem of copper over-etching. In another specific embodiment, the main component of the etching solution is ferric chloride/nitric acid or phosphoric acid/hydrogen peroxide.

在圖案化的步驟中,更可包括:同時進行在顯示區VA的金屬奈米線層NWL圖案化。換言之,如第1C圖所示,可配合圖案化層PL(亦即第一圖案化層)形成的蝕刻遮 罩,利用前述的蝕刻液將顯示區VA的金屬奈米線層NWL的第一部分進行圖案化以製作本實施例的觸控感應電極TE於顯示區VA,觸控感應電極TE可電性連接周邊引線120。具體而言,觸控感應電極TE同樣可為至少包括金屬奈米線的金屬奈米線層,也就是說,圖案化之後的金屬奈米線層NWL在顯示區VA形成觸控感應電極TE,而在周邊區PA形成第一覆蓋物C1,故觸控感應電極TE可借由第一覆蓋物C1與周邊引線120的接觸而達到與周邊引線120達成電性連接進行信號的傳輸。而金屬奈米線層NWL在周邊區PA也會形成第二覆蓋物C2,其設置於標記140的上表面144,標記140可以廣泛的被解讀為非電性功能的圖樣,但不以此為限。在本發明的部分實施例中,周邊引線120與標記140可為同層的金屬層ML所製作(即兩者為相同的金屬材料,如前述的化學鍍銅層或是濺鍍銅層);觸控感應電極TE、第一覆蓋物C1與第二覆蓋物C2可為同層的金屬奈米線層NWL所製作。 In the step of patterning, it may further include: simultaneously patterning the metal nanowire layer NWL in the display area VA. In other words, as shown in Figure 1C, the etching mask formed by the patterned layer PL (that is, the first patterned layer) can be matched Cover, using the aforementioned etching solution to pattern the first part of the metal nanowire layer NWL in the display area VA to make the touch sensing electrode TE of this embodiment in the display area VA. The touch sensing electrode TE can be electrically connected to the periphery Lead 120. Specifically, the touch sensing electrode TE can also be a metal nanowire layer including at least a metal nanowire, that is, the patterned metal nanowire layer NWL forms the touch sensing electrode TE in the display area VA. The first cover C1 is formed in the peripheral area PA, so the touch sensing electrode TE can achieve electrical connection with the peripheral lead 120 for signal transmission through the contact between the first cover C1 and the peripheral lead 120. The metal nanowire layer NWL also forms a second cover C2 in the peripheral area PA, which is disposed on the upper surface 144 of the mark 140. The mark 140 can be widely interpreted as a pattern with non-electrical functions, but not as a pattern. limit. In some embodiments of the present invention, the peripheral lead 120 and the mark 140 may be made of the same metal layer ML (that is, the two are the same metal material, such as the aforementioned electroless copper layer or sputtered copper layer); The touch sensing electrode TE, the first covering C1 and the second covering C2 can be made of the same metal nanowire layer NWL.

在一變化實施例中,位於顯示區VA與周邊區PA的金屬奈米線層NWL可借由不同的蝕刻步驟(亦即使用不同的蝕刻液)進行圖案化,例如在金屬奈米線層NWL為奈米銀層,金屬層ML為銅層的情況下,顯示區VA所使用的蝕刻液可選用僅對銀有蝕刻能力的蝕刻液。換言之,蝕刻液對銀的蝕刻速率大於對銅蝕刻速率的約100倍、約1000倍或約10000倍。 In a variant embodiment, the metal nanowire layer NWL located in the display area VA and the peripheral area PA can be patterned by different etching steps (that is, using different etching solutions), for example, on the metal nanowire layer NWL When it is a nano-silver layer and the metal layer ML is a copper layer, the etching solution used in the display area VA can be an etching solution that can only etch silver. In other words, the etching rate of silver by the etching solution is greater than about 100 times, about 1000 times, or about 10000 times of the copper etching rate.

根據一具體實施例,圖案化層PL選用可留存於結 構中的材料,換言之,在上述蝕刻步驟之後,圖案化層PL並不會被移除。舉例來說,圖案化層PL可為一種光固化材料,其具高透光性、低介電常數、低霧度,以維持顯示區VA的觸控感應電極TE穿透度介於約88%-94%,霧度介於約0-2,面電阻介於約10-150歐姆/平方(ohm/square),上述圖案化層PL的光電特性使得圖案化層PL與金屬奈米線層NWL的組合符合於顯示區VA的光學及觸控感測的要求。在本實施方式中,更可包刮一固化步驟(例如UV curing),固化之後可使顯示區VA的觸控感應電極TE與圖案化層PL形成的複合結構,且複合結構較佳地具有導電性與透光性,例如,所述複合結構的可見光(如波長介於約400nm-700nm)的光穿透率(Transmission)可大於約80%,且表面電阻率(surface resistance)在約10至1000歐姆/平方(ohm/square)之間;較佳地,複合結構的可見光(例如波長介於約400nm-700nm)的光穿透率(Transmission)大於約85%,且表面電阻率(surface resistance)在約50至500歐姆/平方(ohm/square)之間。 According to a specific embodiment, the patterned layer PL is selected to be retained in the junction The material in the structure, in other words, the patterned layer PL will not be removed after the above-mentioned etching step. For example, the patterned layer PL can be a photocurable material with high light transmittance, low dielectric constant, and low haze to maintain the TE penetration of the touch sensing electrode in the display area VA at about 88% -94%, haze is about 0-2, sheet resistance is about 10-150 ohm/square (ohm/square), the photoelectric characteristics of the patterned layer PL make the patterned layer PL and the metal nanowire layer NWL The combination meets the requirements of optical and touch sensing in the display area VA. In this embodiment, a curing step (such as UV curing) can be included. After curing, the touch sensing electrode TE of the display area VA and the patterned layer PL can form a composite structure, and the composite structure is preferably conductive For example, the visible light (such as a wavelength between about 400nm-700nm) of the composite structure can have a light transmittance (Transmission) greater than about 80%, and a surface resistance (surface resistance) of about 10 to 1000 ohm/square (ohm/square); preferably, the visible light (for example, the wavelength is between about 400nm-700nm) of the composite structure has a light transmittance (Transmission) greater than about 85%, and the surface resistance ) Is between about 50 to 500 ohm/square.

此外,上述圖案化層PL可與金屬奈米線層NWL(例如第一覆蓋物C1、第二覆蓋物C2或觸控感應電極TE)形成複合結構而具有某些特定的化學、機械及光學特性,例如提供觸控感應電極TE、第一覆蓋物C1、第二覆蓋物C2與基板110的黏著性,或是較佳的實體機械強度,故圖案化層PL又可被稱作基質(matrix)。又一方面,使用 某些特定的聚合物製作圖案化層PL,使觸控感應電極TE、第一覆蓋物C1、第二覆蓋物C2具有額外的抗刮擦及磨損的表面保護,在此情形下,圖案化層PL又可被稱作外塗層(overcoat),採用諸如聚丙烯酸酯、環氧樹脂、聚胺基甲酸酯、聚矽烷、聚矽氧、聚(矽-丙烯酸)等可使觸控感應電極TE、第一覆蓋物C1、第二覆蓋物C2具有較高的表面強度以提高耐刮能力。然而,上述僅是說明圖案化層PL的其他附加功能/名稱的可能性,並非用於限制本發明。值得說明的是,本文的附圖將圖案化層PL與觸控感應電極TE、第一覆蓋物C1、第二覆蓋物C2繪製為不同層的結構,但在一實施例中,用於製作圖案化層PL的聚合物在未固化前或在預固化的狀態下可以滲入金屬奈米線之間而形成填充物,當聚合物固化後,金屬奈米線會嵌入圖案化層PL之中。也就是說,本發明不限定圖案化層PL與金屬奈米線層NWL(例如第一覆蓋物C1、第二覆蓋物C2或觸控感應電極TE)之間的結構。 In addition, the patterned layer PL and the metal nanowire layer NWL (such as the first cover C1, the second cover C2 or the touch sensing electrode TE) can form a composite structure and have certain specific chemical, mechanical and optical properties. For example, to provide the touch sensing electrode TE, the first covering C1, the second covering C2 and the substrate 110 adhesion, or better physical mechanical strength, so the patterned layer PL can also be called a matrix (matrix) . On the other hand, use Some specific polymers make the patterned layer PL, so that the touch sensing electrode TE, the first covering C1 and the second covering C2 have additional surface protection against scratches and abrasion. In this case, the patterned layer PL can also be referred to as an overcoat, which uses polyacrylate, epoxy resin, polyurethane, polysiloxane, polysiloxane, poly(silicon-acrylic acid), etc. to make touch sensing electrodes TE, the first cover C1 and the second cover C2 have higher surface strength to improve scratch resistance. However, the foregoing is only to illustrate the possibility of other additional functions/names of the patterned layer PL, and is not intended to limit the present invention. It is worth noting that the drawings in this document draw the patterned layer PL, the touch sensing electrode TE, the first cover C1, and the second cover C2 as different layers of structure, but in one embodiment, they are used to make patterns The polymer of the patterned layer PL can penetrate between the metal nanowires to form a filler before being cured or in a pre-cured state. After the polymer is cured, the metal nanowires will be embedded in the patterned layer PL. In other words, the present invention does not limit the structure between the patterned layer PL and the metal nanowire layer NWL (for example, the first cover C1, the second cover C2 or the touch sensing electrode TE).

第2圖顯示根據本發明的實施方式的觸控面板100的上視示意圖,第2A圖及第2B圖分別為第2圖的A-A線與B-B線的剖面圖。請先參閱第2A圖,如第2A圖所示,周邊引線120與標記140均設置於周邊區PA,第一覆蓋物C1、第二覆蓋物C2分別成型且覆蓋周邊引線120的的上表面124與標記140的上表面144,且圖案化層PL在上述蝕刻製成之後被保留在第一覆蓋物C1與第二覆蓋物C2之上。而在本發明的部分實施方式中,金屬奈 米線可為奈米銀線。為了方便說明,本文的周邊引線120與標記140的剖面是為一四邊形(例如第2A圖所繪製的長方形),但周邊引線120的側面122與上表面124、與標記140的側面142與上表面144的結構型態或數量皆可依實際應用而變化,並非以本文的文字與圖式所限制。 FIG. 2 shows a schematic top view of the touch panel 100 according to an embodiment of the present invention. FIG. 2A and FIG. 2B are cross-sectional views taken along the line A-A and B-B of FIG. 2, respectively. Please refer to FIG. 2A first, as shown in FIG. 2A, the peripheral lead 120 and the mark 140 are both disposed in the peripheral area PA, and the first cover C1 and the second cover C2 are respectively formed and cover the upper surface 124 of the peripheral lead 120 And the upper surface 144 of the mark 140, and the patterned layer PL is retained on the first cover C1 and the second cover C2 after the etching process described above. In some embodiments of the present invention, the metal naphthalene The rice noodles can be silver nanowires. For the convenience of description, the cross section of the peripheral lead 120 and the mark 140 is a quadrilateral (for example, the rectangle drawn in FIG. 2A), but the side 122 and the upper surface 124 of the peripheral lead 120, and the side 142 and the upper surface of the mark 140 The structure and number of 144 can be changed according to actual applications, and are not limited by the text and drawings in this article.

在本實施例中,標記140是設置在周邊區PA的接合區BA,其為對接對位元標記,也就是在將一外部電路板,如在軟性電路板170連接於觸控面板100的步驟(即bonding步驟)用於將軟性電路板170與觸控面板100進行對位元的記號(請配合第2圖)。然而,本發明並不限制標記140的置放位置或功能,例如標記140可以是任何在工藝中所需的檢查記號、圖樣或標號,均為本發明保護的範疇。標記140可以具有任何可能的形狀,如圓形、四邊形、十字形、L形、T形等等。另一方面,周邊引線120延伸至接合區BA的部分又可被稱作連接部(bonding section),同於前述實施例,在接合區BA的連接部的上表面同樣被第一覆蓋物C1所覆蓋。 In this embodiment, the mark 140 is set in the bonding area BA of the peripheral area PA, which is a docking bit mark, that is, in the step of connecting an external circuit board, such as the flexible circuit board 170, to the touch panel 100 (Ie, the bonding step) is used to mark the position of the flexible circuit board 170 and the touch panel 100 (please refer to Fig. 2). However, the present invention does not limit the placement position or function of the mark 140. For example, the mark 140 can be any check mark, pattern or label required in the process, which is within the protection category of the present invention. The mark 140 may have any possible shape, such as a circle, a quadrilateral, a cross, an L shape, a T shape, and so on. On the other hand, the portion of the peripheral lead 120 that extends to the bonding area BA can also be referred to as a bonding section. Similar to the previous embodiment, the upper surface of the connection portion in the bonding area BA is also covered by the first cover C1. cover.

如第2A圖及第2B圖所示,在周邊區PA中,相鄰周邊引線120之間具有非導電區域136,以電性阻絕相鄰周邊引線120進而避免短路。也就是說,相鄰周邊引線120的側面122之間具有非導電區域136,而在本實施例中,非導電區域136為一間隙(gap),以隔絕相鄰周邊引線120。而利用圖案化層PL,可採用蝕刻法制作上述的間隙,故周邊引線120的側面122與第一覆蓋物C1的側面 C1L為一共同蝕刻面,且相互對齊,也就是說利用圖案化層PL的印刷側面作為基準,周邊引線120的側面122與第一覆蓋物C1的側面C1L是在同一個蝕刻步驟中依據圖案化層PL的印刷側面所成型,故印刷側面與共同蝕刻面相互對齊;類似的,標記140的側面142與第二覆蓋物C2的側面C2L為一共同蝕刻面,且相互對齊,且圖案化層PL的印刷側面同樣與共同蝕刻面相互對齊。在一實施例中,第一覆蓋物C1的側面C1L與第二覆蓋物C2的側面C2L會因上述的蝕刻步驟而不會有所述的金屬奈米線存在於其上。再者,圖案化層PL、周邊引線120及第一覆蓋物C1會具有相同或近似的圖樣與尺寸,如均為長直狀等的圖樣,且寬度相同或近似;圖案化層PL、標記140與第二覆蓋物C2也同樣具有相同或近似的圖樣與尺寸,如均為半徑相同或近似的圓形、邊長相同或近似的四邊形等,或其他相同或近似的十字形、L形、T形等的圖樣。 As shown in FIGS. 2A and 2B, in the peripheral area PA, there is a non-conductive area 136 between adjacent peripheral leads 120 to electrically block the adjacent peripheral leads 120 to avoid short circuits. In other words, there is a non-conductive area 136 between the side surfaces 122 of the adjacent peripheral leads 120, and in this embodiment, the non-conductive area 136 is a gap to isolate the adjacent peripheral leads 120. Using the patterned layer PL, the above-mentioned gap can be formed by an etching method, so the side surface 122 of the peripheral lead 120 and the side surface of the first cover C1 C1L is a common etching surface and aligned with each other, that is, using the printed side surface of the patterned layer PL as a reference, the side surface 122 of the peripheral lead 120 and the side surface C1L of the first cover C1 are based on the patterning in the same etching step The printed side surface of the layer PL is formed so that the printed side surface and the common etching surface are aligned with each other; similarly, the side surface 142 of the mark 140 and the side surface C2L of the second cover C2 are a common etching surface and are aligned with each other, and the patterned layer PL The printed side of the same is aligned with the common etching surface. In one embodiment, the side surface C1L of the first cover C1 and the side surface C2L of the second cover C2 will not have the metal nanowires on them due to the above-mentioned etching step. Furthermore, the patterned layer PL, the peripheral leads 120, and the first cover C1 will have the same or similar patterns and dimensions, such as long and straight patterns, and the same or similar widths; the patterned layer PL, the mark 140 It also has the same or similar pattern and size as the second cover C2, such as a circle with the same or similar radius, a quadrilateral with the same or similar side length, etc., or other the same or similar cross, L-shape, T Shape and other patterns.

如第2B圖所示,在顯示區VA中,相鄰觸控感應電極TE之間具有非導電區域136,以電性阻絕相鄰觸控感應電極TE進而避免短路。也就是說,相鄰觸控感應電極TE的側壁之間具有非導電區域136,而在本實施例中,非導電區域136為一間隙(gap),以隔絕相鄰觸控感應電極TE;在一實施例中,可採用上述的蝕刻法制作相鄰觸控感應電極TE之間的間隙,故圖案化層PL的印刷側面與觸控感應電極TE的蝕刻側面為一相互對齊的共平面。在本實施例中,觸控感應電極TE與第一覆蓋物C1可利用同層 的金屬奈米線層NWL(如奈米銀線層)所製作,故在顯示區VA與周邊區PA的交界處,金屬奈米線層NWL會形成一爬坡結構,以利金屬奈米線層NWL成形並覆蓋周邊引線120的上表面124,而形成所述的第一覆蓋物C1。 As shown in FIG. 2B, in the display area VA, there is a non-conductive area 136 between adjacent touch sensing electrodes TE to electrically block the adjacent touch sensing electrodes TE to avoid short circuits. In other words, there is a non-conductive area 136 between the side walls of adjacent touch sensing electrodes TE, and in this embodiment, the non-conductive area 136 is a gap to isolate the adjacent touch sensing electrodes TE; In one embodiment, the above-mentioned etching method can be used to form the gap between adjacent touch sensing electrodes TE, so the printed side surface of the patterned layer PL and the etched side surface of the touch sensing electrode TE are aligned and coplanar. In this embodiment, the touch sensing electrode TE and the first cover C1 can use the same layer The metal nanowire layer NWL (such as the silver nanowire layer) is made, so at the junction of the display area VA and the surrounding area PA, the metal nanowire layer NWL will form a climbing structure to facilitate the metal nanowire The layer NWL is shaped and covers the upper surface 124 of the peripheral lead 120 to form the first cover C1.

本發明的部分實施方式中,觸控面板100的第一覆蓋物C1設置於周邊引線120的上表面124,第一覆蓋物C1及周邊引線120並在同一蝕刻工藝中成型,故可以達到減少或避免在工藝中設置對位元誤差區域的需求,藉以降低周邊區PA的寬度,進而達到顯示器的窄邊框需求。具體而言,本發明部分實施方式的觸控面板100的周邊引線120的寬度為約5um至30um,相鄰周邊引線120之間的距離為約5um至30um,或者觸控面板100的周邊引線120的寬度為約3um至20um,相鄰周邊引線120之間的距離為約3um至20um,而周邊區PA的寬度也可以達到約小於2mm的尺寸,較傳統的觸控面板產品縮減約20%或更多的邊框尺寸。 In some embodiments of the present invention, the first cover C1 of the touch panel 100 is disposed on the upper surface 124 of the peripheral lead 120, and the first cover C1 and the peripheral lead 120 are formed in the same etching process, so the reduction or Avoiding the need for setting the bit error area in the process, so as to reduce the width of the peripheral area PA, so as to achieve the narrow frame requirement of the display. Specifically, the width of the peripheral leads 120 of the touch panel 100 of some embodiments of the present invention is about 5um to 30um, and the distance between adjacent peripheral leads 120 is about 5um to 30um, or the peripheral leads 120 of the touch panel 100 The width is about 3um to 20um, the distance between adjacent peripheral leads 120 is about 3um to 20um, and the width of the peripheral area PA can also reach a size less than 2mm, which is about 20% or less than the traditional touch panel products. More frame sizes.

本發明的部分實施方式中,觸控面板100更具有第二覆蓋物C2與標記140,第二覆蓋物C2設置於標記140的上表面144,第二覆蓋物C2與標記140並在同一蝕刻工藝中成型。 In some embodiments of the present invention, the touch panel 100 further has a second cover C2 and a mark 140. The second cover C2 is disposed on the upper surface 144 of the mark 140. The second cover C2 and the mark 140 are in the same etching process. In molding.

第3圖則顯示軟性電路板170與觸控面板100進行對位元後的組裝結構,其中軟性電路板170的電極墊(未繪示)可通過導電膠(未繪示,例如異方性導電膠)電性連接位於基板110上的接合區BA的周邊引線120。於部分實 施方式中,位於接合區BA的第一覆蓋物C1可以開設開口(未繪示),而露出周邊引線120,導電膠(例如異方性導電膠)可填入第一覆蓋物C1的開口而直接接觸周邊引線120而形成導電通路。本實施方式中,觸控感應電極TE以非交錯式的排列設置。舉例而言,觸控感應電極TE為沿第一方向D1延伸且在第二方向D2上具有寬度變化的長條型電極,彼此並不產生交錯,但於其他實施方式中,觸控感應電極TE可以具有適當的形狀,而不應以此限制本發明的範圍。本實施方式中,觸控感應電極TE採用單層的配置,其中可以通過偵測各個觸控感應電極TE的自身的電容值變化,而得到觸控位置。再者,圖案化層PL及觸控感應電極TE會具有相同或近似的圖樣與尺寸,如均為上述沿第一方向D1延伸且在第二方向D2上具有寬度變化的長條型電極等的圖樣,且尺寸相同或近似。 Figure 3 shows the assembly structure of the flexible circuit board 170 and the touch panel 100 after alignment, wherein the electrode pads (not shown) of the flexible circuit board 170 can be made of conductive glue (not shown, such as anisotropic conductive The glue) is electrically connected to the peripheral lead 120 of the bonding area BA on the substrate 110. In part In the embodiment, the first cover C1 located in the bonding area BA may have an opening (not shown), and the peripheral lead 120 may be exposed. A conductive adhesive (such as anisotropic conductive adhesive) may be filled into the opening of the first cover C1. The peripheral lead 120 is directly contacted to form a conductive path. In this embodiment, the touch sensing electrodes TE are arranged in a non-staggered arrangement. For example, the touch sensing electrode TE is an elongated electrode extending along the first direction D1 and having a width change in the second direction D2, and does not intersect each other. However, in other embodiments, the touch sensing electrode TE It may have an appropriate shape, and should not limit the scope of the present invention. In this embodiment, the touch sensing electrode TE adopts a single-layer configuration, in which the touch position can be obtained by detecting the change of the capacitance value of each touch sensing electrode TE. Furthermore, the patterned layer PL and the touch sensing electrode TE will have the same or similar pattern and size, such as the above-mentioned elongated electrodes extending along the first direction D1 and having varying widths in the second direction D2. The drawings are the same or similar in size.

本發明亦可將上述方法應用於基板110的雙面以製作的雙面型態的觸控面板100,例如可依以下方式製作:首先提供基板110,其上具有事先定義的周邊區PA與顯示區VA。接著,於基板110的相對的第一與第二表面(如上表面與下表面)形成金屬層ML,且金屬層ML位於周邊區PA;接著分別形成金屬奈米線(metal nanowires)層NWL於第一與第二表面的周邊區PA與顯示區VA;接著分別形成圖案化層PL於第一與第二表面的金屬奈米線層NWL上;接著依據圖案化層PL進行第一與第二表面的圖案化步驟,以在第一與第二表面形成上述觸控感應電極TE 與周邊引線120,且第一覆蓋物C1會覆蓋於周邊引線120。本步驟形成圖案化層PL的方式可採用柔版印刷工藝分別在第一與第二表面的金屬奈米線層NWL上設置圖案化層PL,如第4圖。而由於本實施例不須經過黃光工藝(曝光顯影等),故無雙面工藝相互影響/干擾的問題,有益於簡化工藝並提高良率。本實施例的具體實施方式可參照前文,與此不再贅述。 The present invention can also apply the above method to both sides of the substrate 110 to produce a double-sided touch panel 100. For example, it can be produced in the following manner: first, a substrate 110 is provided, which has a predefined peripheral area PA and a display District VA. Next, a metal layer ML is formed on the opposite first and second surfaces (such as the upper surface and the lower surface) of the substrate 110, and the metal layer ML is located in the peripheral area PA; and then a metal nanowire layer NWL is formed on the second surface respectively. The peripheral area PA and the display area VA of the first and second surfaces; then a patterned layer PL is formed on the metal nanowire layer NWL on the first and second surfaces respectively; then the first and second surfaces are performed according to the patterned layer PL The patterning step to form the touch sensing electrode TE on the first and second surfaces And the peripheral lead 120, and the first covering C1 will cover the peripheral lead 120. The method of forming the patterned layer PL in this step may be to use a flexographic printing process to respectively provide the patterned layer PL on the metal nanowire layer NWL on the first and second surfaces, as shown in FIG. 4. Since this embodiment does not need to go through the yellow light process (exposure and development, etc.), there is no problem of mutual influence/interference between the double-sided processes, which is beneficial to simplify the process and improve the yield. For the specific implementation manner of this embodiment, reference may be made to the foregoing, and details are not described herein again.

第5圖即為本發明實施例的觸控面板100,其包含基板110、在基板110之上下兩表面所形成的觸控感應電極TE(即金屬奈米線層NWL所形成的第一觸控感應電極TE1及第二觸控感應電極TE2)及在基板110之上下表面所形成的周邊線路120;為了圖式的簡潔,第5圖未標示出第一、第二覆蓋物C1、C2及圖案化層PL。以基板110之上表面觀之,顯示區VA的第一觸控感應電極TE1與周邊區PA的周邊線路120會彼此電性連接以傳遞信號;類似的,以基板110的下表面觀之,顯示區VA的第二觸控感應電極TE2與周邊區PA的周邊線路120會彼此電性連接以傳遞信號。另外,如同前述實施例,第一觸控感應電極TE1及第二觸控感應電極TE2上分別成形有圖案化層PL(如第5A圖所示);周邊線路120由金屬層ML構成,其上成形有第一覆蓋物C1與圖案化層PL(同樣如第5A圖所示)。本實施例更可具有標記140以及與標記140相對應的第二覆蓋物C2設置於基板110的周邊區PA,具體可參照前文內容。 Figure 5 is a touch panel 100 according to an embodiment of the present invention. It includes a substrate 110, and touch sensing electrodes TE formed on the upper and lower surfaces of the substrate 110 (ie, the first touch panel formed by the metal nanowire layer NWL). The sensing electrode TE1 and the second touch sensing electrode TE2) and the peripheral circuit 120 formed on the upper and lower surfaces of the substrate 110; for the sake of brevity, Figure 5 does not show the first and second coverings C1, C2 and patterns化层PL。 The layer PL. Viewed from the upper surface of the substrate 110, the first touch sensing electrode TE1 of the display area VA and the peripheral circuit 120 of the peripheral area PA are electrically connected to each other to transmit signals; similarly, viewed from the lower surface of the substrate 110, the display The second touch sensing electrode TE2 of the area VA and the peripheral circuit 120 of the peripheral area PA are electrically connected to each other to transmit signals. In addition, as in the foregoing embodiment, the first touch sensing electrode TE1 and the second touch sensing electrode TE2 are respectively formed with a patterned layer PL (as shown in FIG. 5A); the peripheral circuit 120 is composed of a metal layer ML, on which A first cover C1 and a patterned layer PL are formed (also shown in FIG. 5A). The present embodiment may further have a mark 140 and a second cover C2 corresponding to the mark 140 disposed on the peripheral area PA of the substrate 110. For details, please refer to the foregoing content.

請參閱第5圖並配合第5A圖所顯示的剖視圖,在一實施例中,第一觸控感應電極TE1大致位於顯示區VA,其可包含多個沿同一方向(如第一方向D1)延伸的長直條狀的感應電極,而蝕刻去除區則可被定義為非導電區136,以電性阻絕相鄰的感應電極。而每一感應電極上均具有圖案化層PL,第一觸控感應電極TE1與圖案化層PL具有對應的圖樣;在一實施例中,第一觸控感應電極TE1與圖案化層PL具有實質相同的圖樣,如上述的長直條狀,而第一觸控感應電極TE1與圖案化層PL具有相互對齊的側邊或側面。相似的,第二觸控感應電極TE2大致位於顯示區VA,其可包含多個沿同一方向(如第二方向D2)延伸的長直條狀的感應電極,而去除區則可被定義為非導電區136,以電性阻絕相鄰的感應電極。每一感應電極上均具有圖案化層PL。第二觸控感應電極TE2與圖案化層PL具有對應的圖樣,在一實施例中,第二觸控感應電極TE2與圖案化層PL具有實質相同的圖樣,如上述的長直條狀,第二觸控感應電極TE2與圖案化層PL具有相互對齊的側面)。第一觸控感應電極TE1及第二觸控感應電極TE2在結構上相互交錯,兩者可組成觸控感應電極TE,以用感應觸碰或控制手勢等。 Please refer to FIG. 5 in conjunction with the cross-sectional view shown in FIG. 5A. In one embodiment, the first touch sensing electrode TE1 is substantially located in the display area VA, and it may include multiple ones extending in the same direction (such as the first direction D1) The long and straight sensing electrodes are etched away, and the etch-removed area can be defined as a non-conductive area 136 to electrically block adjacent sensing electrodes. Each sensing electrode has a patterned layer PL, and the first touch sensing electrode TE1 and the patterned layer PL have corresponding patterns. In one embodiment, the first touch sensing electrode TE1 and the patterned layer PL have a substantial The same pattern is the above-mentioned long straight strip shape, and the first touch sensing electrode TE1 and the patterned layer PL have sides or sides aligned with each other. Similarly, the second touch sensing electrode TE2 is roughly located in the display area VA, which can include a plurality of long and straight sensing electrodes extending in the same direction (such as the second direction D2), and the removed area can be defined as non- The conductive area 136 electrically blocks adjacent sensing electrodes. Each sensing electrode has a patterned layer PL. The second touch sensing electrode TE2 and the patterned layer PL have a corresponding pattern. In one embodiment, the second touch sensing electrode TE2 and the patterned layer PL have substantially the same pattern, such as the above-mentioned long straight strip. The two touch sensing electrodes TE2 and the patterned layer PL have sides aligned with each other). The first touch sensing electrode TE1 and the second touch sensing electrode TE2 are interlaced in structure, and the two can form the touch sensing electrode TE for sensing touch or controlling gestures.

請參閱第6A圖至第6C圖,本發明的另一實施方式中的觸控面板可依以下方式製作:首先提供基板110,其上具有事先定義的周邊區PA與顯示區VA。接著,形成金屬奈米線(metal nanowires)層NWL於周邊區PA與 顯示區VA;接著形成金屬層ML於周邊區PA(如第6A圖);接著形成圖案化層PL於金屬奈米線層NWL上(如第6B圖);接著依據圖案化層PL進行圖案化,以形成具有圖樣的金屬層ML與金屬奈米線層NWL(如第6C圖)。本實施例與前述實施例的差異至少在於金屬層ML與金屬奈米線層NWL的成型順序,換言之,本實施例先製作金屬奈米線層NWL,再接著製作金屬層ML。本步驟的具體實施方式可參照前文,例如,形成圖案化層PL的方式可採用柔版印刷工藝在金屬層ML與金屬奈米線層NWL上設置圖案化層PL;再借由蝕刻等步驟將圖案化層PL的圖樣轉移至金屬層ML與金屬奈米線層NWL。 Referring to FIGS. 6A to 6C, the touch panel in another embodiment of the present invention can be manufactured in the following manner: First, a substrate 110 is provided, on which a pre-defined peripheral area PA and a display area VA are provided. Next, a metal nanowires layer NWL is formed in the peripheral area PA and Display area VA; then a metal layer ML is formed on the peripheral area PA (as shown in Figure 6A); then a patterned layer PL is formed on the metal nanowire layer NWL (as shown in Figure 6B); and then patterned according to the patterned layer PL , To form a patterned metal layer ML and a metal nanowire layer NWL (as shown in Figure 6C). The difference between this embodiment and the previous embodiment is at least in the forming sequence of the metal layer ML and the metal nanowire layer NWL. In other words, this embodiment first produces the metal nanowire layer NWL, and then produces the metal layer ML. The specific implementation of this step can refer to the foregoing. For example, the method of forming the patterned layer PL can use a flexographic printing process to provide the patterned layer PL on the metal layer ML and the metal nanowire layer NWL; The pattern of the patterned layer PL is transferred to the metal layer ML and the metal nanowire layer NWL.

本實施例同樣可利用柔版印刷技術將材料直接以圖案化的方式直接成型於工件上,例如本實施例的金屬層ML上。本實施例選用光阻材料製作圖案化層PL;具體而言,可選用黏度約300-1000cp、固含量約50~80%的光阻,例如樹酯系酚醛樹酯、壓克力樹酯、環氧樹酯系列等;且可選用熱固化型材料,熱固化條件可為固化溫度小於130度、固化時間小於60秒。在一實施例中,可選用具耐酸性蝕刻特性的光阻,以直接進行後段的蝕刻工藝。 In this embodiment, the flexographic printing technology can also be used to directly pattern the material on the workpiece, such as the metal layer ML in this embodiment. In this embodiment, a photoresist material is used to make the patterned layer PL; specifically, a photoresist with a viscosity of about 300-1000 cp and a solid content of about 50-80% can be selected, such as resin-based phenolic resin, acrylic resin, Epoxy resin series, etc.; and thermosetting materials can be selected, and the thermosetting conditions can be curing temperature less than 130 degrees and curing time less than 60 seconds. In one embodiment, a photoresist with acid etching resistance can be selected to directly perform the subsequent etching process.

圖案化的步驟之後,更包括移除圖案化層PL的步驟。在具體實施例中,可通過有機溶劑或鹼性去膜劑剝除,如:KOH、K2CO3、丙二醇甲基醚醋酸酯(Propylene Glycol Methyl Ether Acetate;PGMEA)等。換言之,在上述蝕刻步驟之後,圖案化層PL會被移除而不殘留 於產品的結構中。 After the step of patterning, it further includes a step of removing the patterned layer PL. In a specific embodiment, it can be stripped off by an organic solvent or alkaline remover, such as KOH, K 2 CO 3 , Propylene Glycol Methyl Ether Acetate (PGMEA) and the like. In other words, after the above-mentioned etching step, the patterned layer PL will be removed without remaining in the structure of the product.

本實施例的其他詳細製作方法均可參照前文,與此不再贅述。 For other detailed manufacturing methods of this embodiment, reference may be made to the foregoing, and will not be repeated here.

請參閱第7圖,其顯示本發明的實施例所完成的觸控面板100(已移除圖案化層PL),第7A圖、第7B圖分別為第7圖中的A-A、B-B剖面的態樣,A-A剖面可看出位於周邊區PA的態樣,而B-B剖面則可看出位於周邊區PA與顯示區VA的態樣。如第7A圖、第7B圖所示,位於周邊區PA的金屬奈米線層NWL與金屬層ML經過蝕刻步驟(如前述的一次性蝕刻)之後可形成空隙(即非導電區域136),即在周邊區PA形成由金屬奈米線層NWL經圖案化後所構成的蝕刻層以及由金屬層ML所構成的周邊線路120;由於蝕刻層位於周邊線路120與基板110之間,故可稱作第一中間層M1,換言之,周邊線路120下具有同樣被圖案化的第一中間層M1,相鄰周邊線路120之間具有非導電區域136;再者,周邊引線120的側面122與第一中間層M1的側面M1L為一共同蝕刻面,且相互對齊,也就是說在圖案化步驟中利用圖案化層PL的側壁作為基準,周邊引線120的側面122與第一中間層M1的側面M1L是在同一個蝕刻步驟中依據圖案化層PL的側壁所成型。由於周邊區PA的結構層是在同一步驟中進行圖案化,故可省略傳統的對位元步驟,進而達到減少或避免在工藝中設置對位元誤差區域的需求,藉以降低周邊區PA的寬度,進而達到觸控面板/觸控顯示器的窄邊框需求。 Please refer to FIG. 7, which shows the touch panel 100 completed by the embodiment of the present invention (with the patterned layer PL removed). FIG. 7A and FIG. 7B are the AA and BB cross-sectional states in FIG. 7, respectively. In this way, the AA profile can be seen in the peripheral area PA, and the BB profile can be seen in the peripheral area PA and the display area VA. As shown in Figures 7A and 7B, the metal nanowire layer NWL and the metal layer ML located in the peripheral area PA can form voids (ie, non-conductive regions 136) after an etching step (such as the one-time etching described above), namely In the peripheral area PA, an etching layer formed by patterning the metal nanowire layer NWL and a peripheral circuit 120 formed by the metal layer ML are formed; since the etching layer is located between the peripheral circuit 120 and the substrate 110, it can be called The first middle layer M1, in other words, there is a first middle layer M1 that is also patterned under the peripheral lines 120, and there is a non-conductive area 136 between adjacent peripheral lines 120; furthermore, the side surfaces 122 of the peripheral leads 120 are The side surface M1L of the layer M1 is a common etching surface and is aligned with each other, that is, the side wall of the patterned layer PL is used as a reference in the patterning step, and the side surface 122 of the peripheral lead 120 and the side surface M1L of the first intermediate layer M1 are in It is shaped according to the sidewall of the patterned layer PL in the same etching step. Since the structural layer of the peripheral area PA is patterned in the same step, the traditional bit alignment step can be omitted, thereby reducing or avoiding the need for setting bit error areas in the process, thereby reducing the width of the peripheral area PA , And then meet the requirement of narrow frame of touch panel/touch display.

在另一實施例中,在周邊區PA上可具有由金屬奈米線層NWL所構成的蝕刻層以及由金屬層ML所構成的周邊線路120與標記140,而蝕刻層可包括第一中間層M1與第二中間層M2,第一中間層M1設置於周邊線路120與基板110之間,第二中間層M2設置於標記140與基板110之間,標記140的側面142與第二中間層M2的側面M2L為一共同蝕刻面,且相互對齊。 In another embodiment, the peripheral area PA may have an etching layer composed of a metal nanowire layer NWL and a peripheral circuit 120 and a mark 140 composed of a metal layer ML, and the etching layer may include a first intermediate layer M1 and the second intermediate layer M2. The first intermediate layer M1 is arranged between the peripheral circuit 120 and the substrate 110, the second intermediate layer M2 is arranged between the mark 140 and the substrate 110, and the side surface 142 of the mark 140 is connected to the second intermediate layer M2 The side surface M2L is a common etching surface and is aligned with each other.

而如第7B圖所示,在位於顯示區VA中,金屬奈米線層NWL亦是利用圖案化層PL做為蝕刻遮罩,而在前述的圖案化步驟中形成觸控感應電極TE。在本實施例中,金屬奈米線層NWL會被圖樣化而形成空隙,以形成相鄰觸控感應電極TE之間的非導電區域136。再者,觸控感應電極TE可通過延伸至周邊區PA的金屬奈米線層NWL與周邊線路120形成電性連接。 As shown in FIG. 7B, in the display area VA, the metal nanowire layer NWL also uses the patterned layer PL as an etching mask, and the touch sensing electrode TE is formed in the aforementioned patterning step. In this embodiment, the metal nanowire layer NWL is patterned to form voids to form non-conductive areas 136 between adjacent touch sensing electrodes TE. Furthermore, the touch sensing electrode TE can be electrically connected to the peripheral circuit 120 through the metal nanowire layer NWL extending to the peripheral area PA.

在另一實施例中,前述的觸控面板100可包括膜層130或保護層。舉例而言,第8圖為膜層130成型於上述第7B圖所示實施例的示意圖。在一實施例中,膜層130是全面性的覆蓋觸控面板100,例如膜層130可設置於顯示區VA與周邊區PA,以覆蓋於觸控感應電極TE、周邊線路120及/或標記140之上。如圖所示,在周邊區PA中,膜層130覆蓋第一周邊線路120上,膜層130並填入相鄰周邊引線120之間的非導電區域136,也就是說,相鄰周邊引線120之間的非導電區域136中具有一與膜層130相同的材料所製成的填充層。另外,以單一組對應的 周邊引線120與第一中間層M1而言,膜層130會包圍所述的單一組上下對應的周邊引線120與第一中間層M1。類似的,以單一組對應的標記140與第二中間層M2而言,膜層130會包圍所述的單一組上下對應的標記140與第二中間層M2。 In another embodiment, the aforementioned touch panel 100 may include a film layer 130 or a protective layer. For example, FIG. 8 is a schematic diagram of the film layer 130 formed on the embodiment shown in FIG. 7B. In one embodiment, the film layer 130 comprehensively covers the touch panel 100. For example, the film layer 130 may be disposed in the display area VA and the peripheral area PA to cover the touch sensing electrode TE, the peripheral circuit 120 and/or the marking Above 140. As shown in the figure, in the peripheral area PA, the film layer 130 covers the first peripheral circuit 120, and the film layer 130 fills the non-conductive area 136 between adjacent peripheral leads 120, that is, adjacent peripheral leads 120 There is a filling layer made of the same material as the film layer 130 in the non-conductive area 136 therebetween. In addition, corresponding to a single group As far as the peripheral leads 120 and the first intermediate layer M1 are concerned, the film layer 130 surrounds the single set of the peripheral leads 120 and the first intermediate layer M1 corresponding to each other up and down. Similarly, in terms of a single set of corresponding marks 140 and the second intermediate layer M2, the film layer 130 will surround the single set of corresponding marks 140 and the second intermediate layer M2.

而在顯示區VA中,膜層130覆蓋於觸控感應電極TE之上,膜層130並填入相鄰觸控感應電極TE之間的非導電區域136,也就是說,相鄰觸控感應電極TE之間的非導電區域136中具有一與膜層130相同的材料所製成的填充層,藉以隔絕相鄰觸控感應電極TE。 In the display area VA, the film layer 130 covers the touch sensing electrode TE, and the film layer 130 fills the non-conductive area 136 between adjacent touch sensing electrodes TE, that is, adjacent touch sensing electrodes TE The non-conductive area 136 between the electrodes TE has a filling layer made of the same material as the film layer 130 to isolate adjacent touch sensing electrodes TE.

而在本發明的部分實施方式中膜層130的材料可以是非導電的樹脂或其他有機材料,舉例而言,膜層130可為聚乙烯(polyethylene;PE)、聚丙烯(Polypropylene;PP)、聚乙烯醇縮丁醛(Polyvinyl butyral;PVB)、聚碳酸酯(polycarbonate;PC)、丙烯腈-丁二烯-苯乙烯共聚物(Acrylonitrile butadiene styrene;ABS)、聚(3,4-伸乙二氧基噻吩)(PEDOT)、聚(苯乙烯磺酸)(PSS)或陶瓷材料等等。在本發明的一種實施方式中,膜層130可為以下聚合物,但不限於此:聚丙烯酸系樹脂,諸如聚甲基丙烯酸酯(例如,聚(甲基丙烯酸甲酯))、聚丙烯酸酯及聚丙烯腈;聚乙烯醇;聚酯(例如,聚對苯二甲酸乙二酯(PET)、聚酯萘二甲酸酯及聚碳酸酯);具有高芳香度的聚合物,諸如酚醛樹脂或甲酚-甲醛、聚苯乙烯、聚乙烯基甲苯、聚乙烯基二甲苯、聚醯亞胺、聚醯 胺、聚醯胺醯亞胺、聚醚醯亞胺、聚硫化物、聚碸、聚伸苯基及聚苯基醚;聚胺基甲酸酯(polyurethane;PU);環氧樹脂;聚烯烴(例如聚丙烯、聚甲基戊烯及環烯烴);纖維素;聚矽氧及其他含矽聚合物(例如聚倍半氧矽烷及聚矽烷);聚氯乙烯(PVC);聚乙酸酯;聚降冰片烯;合成橡膠(例如,乙丙橡膠(ethylene-propylene rubber;EPR)、丁苯橡膠(styrene-Butadiene Rubber;SBR)、三元乙丙橡膠(ethylene-Propylene-Diene Monomer;EPDM);及含氟聚合物(例如,聚偏氟乙烯、聚四氟乙烯(TFE)或聚六氟丙烯);氟-烯烴與烴烯烴的共聚物等。在其他實施例中,可使用以二氧化矽、富鋁紅柱石、氧化鋁、SiC、碳纖維、MgO-Al2O3-SiO2、Al2O3-SiO2或MgO-Al2O3-SiO2-Li2O等無機材料。於本發明的部分實施方式中,膜層130由絕緣材料所形成。於本發明的部分實施方式中,可以借由旋塗、噴塗、印刷等方式形成膜層130。於部分實施方式中,膜層130的厚度大約為20奈米至10微米、或50奈米至200奈米、或30至100奈米,舉例而言,膜層130的厚度大約可為90奈米或100奈米。 In some embodiments of the present invention, the material of the film layer 130 may be a non-conductive resin or other organic materials. For example, the film layer 130 may be polyethylene (PE), polypropylene (PP), or polypropylene. Vinyl butyral (Polyvinyl butyral; PVB), polycarbonate (PC), acrylonitrile-butadiene-styrene copolymer (Acrylonitrile butadiene styrene; ABS), poly(3,4-ethylenedioxy) Thiophene) (PEDOT), poly(styrene sulfonic acid) (PSS) or ceramic materials, etc. In an embodiment of the present invention, the film layer 130 may be the following polymer, but is not limited thereto: polyacrylic resin, such as polymethacrylate (for example, poly(methyl methacrylate)), polyacrylate And polyacrylonitrile; polyvinyl alcohol; polyester (for example, polyethylene terephthalate (PET), polyester naphthalate and polycarbonate); polymers with high aromaticity, such as phenolic resins Or cresol-formaldehyde, polystyrene, polyvinyl toluene, polyvinyl xylene, polyimide, polyimide, polyimide imine, polyether imide, polysulfide, polyvinyl toluene, Polyphenylene and polyphenyl ether; polyurethane (PU); epoxy resin; polyolefin (such as polypropylene, polymethylpentene and cycloolefin); cellulose; polysiloxane and Other silicon-containing polymers (such as polysilsesquioxane and polysiloxane); polyvinyl chloride (PVC); polyacetate; polynorbornene; synthetic rubber (such as ethylene-propylene rubber (EPR) , Styrene-butadiene rubber (SBR), ethylene-Propylene-Diene Monomer (EPDM); and fluoropolymers (for example, polyvinylidene fluoride, polytetrafluoroethylene (TFE) or Polyhexafluoropropylene); copolymers of fluoro-olefins and hydrocarbon olefins, etc. In other embodiments, silica, mullite, alumina, SiC, carbon fiber, MgO-Al 2 O 3 -SiO 2. Inorganic materials such as Al 2 O 3 -SiO 2 or MgO-Al 2 O 3 -SiO 2 -Li 2 O. In some embodiments of the present invention, the film layer 130 is formed of an insulating material. In part of the present invention In embodiments, the film layer 130 can be formed by spin coating, spray coating, printing, etc. In some embodiments, the thickness of the film layer 130 is approximately 20 nanometers to 10 microns, or 50 nanometers to 200 nanometers, or 30 to 100 nanometers, for example, the thickness of the film layer 130 can be approximately 90 nanometers or 100 nanometers.

此外,類似於前述內容,膜層130可與金屬奈米線(例如觸控感應電極TE)形成複合結構而具有某些特定的化學、機械及光學特性,例如提供金屬奈米線與基板110的黏著性,或是較佳的實體機械強度,故膜層130又可被稱作基質(matrix)。值得說明的是,本文的附圖將膜層 130與觸控感應電極TE繪製為不同層的結構,但用於製作膜層130的聚合物在未固化前或在預固化的狀態下可以滲入金屬奈米線之間而形成填充物,當聚合物固化後,金屬奈米線會嵌入膜層130之中,也就是說,本發明不特別限定膜層130與金屬奈米線層NWL(例如觸控感應電極TE)之間的結構。值得說明的是,膜層130或保護層可應用於本揭露的實施例,並不以第7B圖所示實施例為限。 In addition, similar to the foregoing, the film layer 130 can form a composite structure with a metal nanowire (such as a touch sensing electrode TE) to have certain specific chemical, mechanical and optical properties, such as providing a metal nanowire and a substrate 110 Adhesion, or better physical mechanical strength, so the film layer 130 can also be called a matrix. It is worth noting that the drawings in this article will 130 and the touch sensing electrode TE are drawn as different layers, but the polymer used to make the film layer 130 can penetrate between the metal nanowires to form a filler before being cured or in a pre-cured state. After the material is cured, the metal nanowire will be embedded in the film layer 130, that is, the present invention does not particularly limit the structure between the film layer 130 and the metal nanowire layer NWL (such as the touch sensing electrode TE). It should be noted that the film layer 130 or the protective layer can be applied to the embodiment of the present disclosure, and is not limited to the embodiment shown in FIG. 7B.

第9圖則顯示本發明的實施方式中所製作的雙面型態的觸控面板,可依以下方式製作:首先提供基板110,其上具有事先定義的周邊區PA與顯示區VA。接著,於基板110的相對的第一與第二表面(如上表面與下表面)分別形成金屬奈米線層NWL於第一與第二表面的周邊區PA與顯示區VA;接著形成金屬層ML,且金屬層ML位於周邊區PA;接著分別形成圖案化層PL於第一與第二表面的金屬奈米線層NWL及金屬層ML上;接著依據圖案化層PL進行第一與第二表面圖案化,以在第一與第二表面形成第一觸控電極TE1、第二觸控電極TE2與周邊引線120,且周邊引線120會覆蓋於第一中間層M1。本發明的實施方式更可包含移除圖案化層PL。為了圖式的簡潔,第9圖未標示出第一中間層M1。 Fig. 9 shows the double-sided touch panel manufactured in the embodiment of the present invention. It can be manufactured in the following manner: first, a substrate 110 is provided, on which a pre-defined peripheral area PA and a display area VA are provided. Next, a metal nanowire layer NWL is formed on the first and second opposite surfaces of the substrate 110 (such as the upper surface and the lower surface), respectively, on the peripheral area PA and the display area VA of the first and second surfaces; then the metal layer ML is formed , And the metal layer ML is located in the peripheral area PA; then a patterned layer PL is formed on the metal nanowire layer NWL and the metal layer ML on the first and second surfaces respectively; then the first and second surfaces are performed according to the patterned layer PL Patterning to form the first touch electrode TE1, the second touch electrode TE2 and the peripheral lead 120 on the first and second surfaces, and the peripheral lead 120 will cover the first intermediate layer M1. The embodiment of the present invention may further include removing the patterned layer PL. For the sake of brevity, Fig. 9 does not show the first intermediate layer M1.

本步驟的具體實施方式可參照前文,例如,形成圖案化層PL的方式可採用柔版印刷工藝分別在第一與第二表面的金屬奈米線層NWL及金屬層ML上設置圖案化層PL。而由於本實施例不須經過黃光工藝(曝光顯影等),故 無雙面工藝相互影響/干擾的問題,有益於簡化工藝並提高良率。 The specific implementation of this step can refer to the foregoing. For example, the method of forming the patterned layer PL can use a flexographic printing process to provide the patterned layer PL on the metal nanowire layer NWL and the metal layer ML on the first and second surfaces, respectively. . And because this embodiment does not need to go through the yellow light process (exposure and development, etc.), so There is no problem of mutual influence/interference between the double-sided process, which is beneficial to simplify the process and improve the yield.

請參考第9圖與第9A圖,第一觸控電極TE1形成於基板110的一面(如上表面),第二觸控電極TE2則形成於基板110的另一面(如下表面),使第一觸控電極TE1、第二觸控電極TE2彼此電性絕緣;而電性連接於第一觸控電極TE1的周邊引線120則覆蓋第一中間層M1;同理,連接於第二觸控電極TE2的周邊引線120則覆蓋其對應的第一中間層M1。第一觸控電極TE1為多個沿第一方向D1排列的長條狀電極,第二觸控電極TE2為多個沿第二方向D2排列的長條狀電極。如圖所示,長條狀觸控感應電極TE1與長條狀觸控感應電極TE2的延伸方向不同,而互相交錯。第一觸控感應電極TE1與第二觸控感應電極TE2可分別用以傳送控制信號與接收觸控感應信號。自此,可以經由偵測第一觸控感應電極TE1與第二觸控感應電極TE2之間的信號變化(例如電容變化),得到觸控位置。借由此設置,使用者可於基板110上的各點進行觸控感應。本實施例的觸控面板100更可以包含膜層130,其是全面性的覆蓋觸控面板100,也就是說基板110的上下兩面均設置有膜層130,並覆蓋於第一觸控電極TE1、第二觸控電極TE2以及周邊引線120之上,且膜層130也同樣覆蓋並填入基板110的上下的非導電區域136。 Please refer to Figure 9 and Figure 9A, the first touch electrode TE1 is formed on one side of the substrate 110 (such as the upper surface), and the second touch electrode TE2 is formed on the other side of the substrate 110 (the lower surface), so that the first touch The control electrode TE1 and the second touch electrode TE2 are electrically insulated from each other; and the peripheral lead 120 electrically connected to the first touch electrode TE1 covers the first intermediate layer M1; in the same way, the peripheral lead 120 connected to the second touch electrode TE2 The peripheral lead 120 covers its corresponding first intermediate layer M1. The first touch electrode TE1 is a plurality of elongated electrodes arranged along the first direction D1, and the second touch electrode TE2 is a plurality of elongated electrodes arranged along the second direction D2. As shown in the figure, the elongated touch sensing electrode TE1 and the elongated touch sensing electrode TE2 extend in different directions, but are intersected with each other. The first touch sensing electrode TE1 and the second touch sensing electrode TE2 can be used to transmit control signals and receive touch sensing signals, respectively. From then on, the touch position can be obtained by detecting the signal change (such as the capacitance change) between the first touch sensing electrode TE1 and the second touch sensing electrode TE2. With this configuration, the user can perform touch sensing at each point on the substrate 110. The touch panel 100 of this embodiment may further include a film layer 130, which comprehensively covers the touch panel 100, that is, the film layer 130 is provided on both the upper and lower sides of the substrate 110 and covers the first touch electrode TE1 , On the second touch electrode TE2 and the peripheral leads 120, and the film layer 130 also covers and fills the upper and lower non-conductive areas 136 of the substrate 110.

同於前述實施例,基板110的任一面(如上表面或下表面)更可包括標記140與第二中間層M2。 Similar to the foregoing embodiment, any surface (such as the upper surface or the lower surface) of the substrate 110 may further include the mark 140 and the second intermediate layer M2.

第10圖為根據本發明的部分實施方式的觸控面板100的上視示意圖。本實施方式與前述實施方式相似,主要的差異在於:本實施方式中,觸控面板100更包含設置於周邊區PA的遮罩導線160,其主要包圍觸控感應電極TE與周邊引線120,且遮罩導線160會延伸至接合區BA而電性連接於軟性電路板170上的接地端,故遮罩導線160可以遮罩或消除信號干擾或是靜電放電(Electrostatic Discharge,ESD)防護,特別是人手碰到觸控裝置周圍的連接導線而導致的微小電流變化。 FIG. 10 is a schematic top view of a touch panel 100 according to some embodiments of the present invention. This embodiment is similar to the previous embodiment. The main difference is that: in this embodiment, the touch panel 100 further includes a mask wire 160 disposed in the peripheral area PA, which mainly surrounds the touch sensing electrode TE and the peripheral lead 120, and The shield wire 160 extends to the bonding area BA and is electrically connected to the ground terminal on the flexible circuit board 170. Therefore, the shield wire 160 can shield or eliminate signal interference or electrostatic discharge (ESD) protection, especially A small current change caused by a human hand touching the connecting wires around the touch device.

依照前述不移除圖案化層PL的製作方法,遮罩導線160與周邊引線120可為同層的金屬層ML所製作(即兩者為相同的金屬材料,例如前述的化學鍍銅層),其上迭層有金屬奈米線層NWL(或稱第三覆蓋層)與圖案化層PL,並依照圖案化層PL的圖樣進行蝕刻之後所製成,亦可理解成遮罩導線160為包括圖案化層PL、金屬奈米線層NWL及金屬層ML的複合結構層,具體可參照第2A圖及第2B圖所示實施例的說明。另外,依照前述移除圖案化層PL的製作方法,遮罩導線160與周邊引線12可為同層的金屬層ML所製作(即兩者為相同的金屬材料,例如前述的化學鍍銅層),並依照圖案化層PL的圖樣進行蝕刻,再移除圖案化層PL之後所製成,故亦可理解成遮罩導線160為包括金屬奈米線層NWL(或稱第三中間層)及金屬層ML的複合結構層,具體可參照第7A圖及第7B圖所示實施例的說明。 According to the aforementioned manufacturing method without removing the patterned layer PL, the mask wire 160 and the peripheral lead 120 can be made of the same metal layer ML (that is, the two are the same metal material, such as the aforementioned electroless copper plating layer), The metal nanowire layer NWL (or the third covering layer) and the patterned layer PL are laminated on it, and are made after etching according to the pattern of the patterned layer PL. It can also be understood that the mask wire 160 includes For the composite structure layer of the patterned layer PL, the metal nanowire layer NWL, and the metal layer ML, please refer to the description of the embodiment shown in FIG. 2A and FIG. 2B for details. In addition, according to the aforementioned method for removing the patterned layer PL, the mask wire 160 and the peripheral lead 12 can be made of the same metal layer ML (that is, the two are the same metal material, such as the aforementioned electroless copper plating layer) , And etch according to the pattern of the patterned layer PL, and then remove the patterned layer PL, so it can also be understood that the mask wire 160 includes a metal nanowire layer NWL (or third intermediate layer) and For the composite structure layer of the metal layer ML, refer to the description of the embodiment shown in FIGS. 7A and 7B for details.

在一部分實施方式中,本文所述的觸控面板100可借由卷對卷(Roll to Roll)工藝來製作,卷對卷(Roll to Roll)塗覆工藝使用習知設備且可完全自動化,可顯著降低製造觸控面板的成本。卷對卷塗覆的具體工藝如下:首先選用具可撓性的基板110,並使卷帶狀的基板110安裝於兩滾輪之間,利用馬達驅動滾輪,以使基板110可沿兩滾輪之間的移動路徑進行連續性的工藝。例如,利用鍍槽進行金屬層ML的沉積、利用儲存槽、噴霧裝置、刷塗裝置及其類似物將含金屬奈米線的漿料則沈積於基板110的表面上並施加固化步驟以形成金屬奈米線層NWL;成型具有圖案的圖案化層PL(例如利用前述柔版印刷方式)於金屬層ML及/或金屬奈米線層NWL上;利用蝕刻槽或噴塗蝕刻液進行圖案化等步驟。隨後,所完成的觸控面板100借由產線最後端的滾輪加以卷出形成觸控感測器卷帶。 In some embodiments, the touch panel 100 described herein can be manufactured by a roll to roll process. The roll to roll coating process uses conventional equipment and can be fully automated. Significantly reduce the cost of manufacturing touch panels. The specific process of roll-to-roll coating is as follows: first select a flexible substrate 110, and install the roll-shaped substrate 110 between the two rollers, and use the motor to drive the rollers so that the substrate 110 can run between the two rollers. The moving path of the continuity process. For example, the metal layer ML is deposited using a plating tank, a metal nanowire-containing slurry is deposited on the surface of the substrate 110 using a storage tank, a spray device, a brushing device, and the like, and a curing step is applied to form Metal nanowire layer NWL; forming patterned patterned layer PL (for example, using the aforementioned flexographic printing method) on the metal layer ML and/or metal nanowire layer NWL; patterning by etching grooves or spraying etching solution, etc. step. Subsequently, the completed touch panel 100 is rolled out by the roller at the end of the production line to form a touch sensor tape.

本實施例的觸控感測器卷帶更可以包含膜層130,其是全面性的覆蓋觸控感測器卷上未裁切的觸控面板100,也就是說膜層130可覆蓋於觸控感測器卷上未裁切的多個觸控面板100上,再被切割分離為個別的觸控面板100。 The touch sensor tape of this embodiment may further include a film layer 130, which comprehensively covers the uncut touch panel 100 on the touch sensor roll, that is, the film layer 130 can cover the touch sensor. The uncut touch panels 100 on the control sensor roll are cut and separated into individual touch panels 100.

於本發明的部分實施方式中,基板110較佳為透明基板,詳細而言,可以為一硬式透明基板或一可撓式透明基板,其材料可以選自玻璃、壓克力(polymethylmethacrylate;PMMA)、聚氯乙烯(polyvinyl Chloride;PVC)、聚丙烯(polypropylene;PP)、聚對苯二甲酸乙二醇酯 (polyethylene terephthalate;PET)、聚萘二甲酸乙二醇酯(polyethylene naphthalate;PEN)、聚碳酸酯(polycarbonate;PC)、聚苯乙烯(polystyrene;PS)、環烯烴聚合物(Cyclo Olefin Polymers;COP)、環烯烴共聚物(cycloolefin copolymer;COC)等透明材料。 In some embodiments of the present invention, the substrate 110 is preferably a transparent substrate. Specifically, it may be a rigid transparent substrate or a flexible transparent substrate. The material may be selected from glass and acrylic (polymethylmethacrylate; PMMA). , Polyvinyl Chloride (PVC), Polypropylene (PP), Polyethylene Terephthalate (polyethylene terephthalate; PET), polyethylene naphthalate (PEN), polycarbonate (PC), polystyrene (PS), Cyclo Olefin Polymers (COP) ), transparent materials such as cycloolefin copolymer (COC).

卷對卷產線可沿基板的移動路徑依需求調整多個塗覆步驟的順序或是可按需求併入任何數目的額外月臺。舉例而言,為了達到適當的後處理工藝,即可將壓力滾輪或電漿設備安裝於產線中。 The roll-to-roll production line can adjust the sequence of multiple coating steps along the moving path of the substrate as required or can incorporate any number of additional platforms as required. For example, in order to achieve an appropriate post-treatment process, pressure rollers or plasma equipment can be installed in the production line.

於部分實施方式中,所形成的金屬奈米線可進一步進行後處理以提高其導電度,此後處理可為包括如加熱、電漿、電暈放電、UV臭氧、壓力或上述工藝組合的過程步驟。例如,在固化形成金屬奈米線層NWL的步驟後,可利用滾輪施加壓力於其上,在一實施例中,可借由一或多個滾輪向金屬奈米線層NWL施加50至3400psi的壓力,較佳為可施加100至1000psi、200至800psi或300至500psi的壓力;而上述施加壓力的步驟較佳地實施在塗布膜層130的步驟之前。於部分實施方式中,可同時進行加熱與壓力之後處理;詳言之,所形成的金屬奈米線可經由如上文所述的一或多個滾輪施加壓力,並同時加熱,例如由滾輪施加的壓力為10至500psi,較佳為40至100psi;同時將滾輪加熱至約70℃與200℃之間,較佳至約100℃與175℃之間,其可提高金屬奈米線的導電度。 於部分實施方式中,金屬奈米線較佳可暴露於還原劑中進行後處理,例如由奈米銀線組成的金屬奈米線較佳可暴露於銀還原劑中進行後處理,銀還原劑包括硼氫化物,如硼氫化鈉;硼氮化合物,如二甲基胺基硼烷(DMAB);或氣體還原劑,諸如氫氣(H2)。而所述的暴露時間約10秒至約30分鐘,較佳約1分鐘至約10分鐘。 In some embodiments, the formed metal nanowires may be further subjected to post-processing to increase their conductivity. The post-processing may include process steps such as heating, plasma, corona discharge, UV ozone, pressure or a combination of the above processes. . For example, after the step of curing to form the metal nanowire layer NWL, a roller can be used to apply pressure thereon. In one embodiment, one or more rollers can be used to apply 50 to 3400 psi to the metal nanowire layer NWL. The pressure is preferably 100 to 1000 psi, 200 to 800 psi, or 300 to 500 psi pressure; and the above pressure application step is preferably implemented before the step of coating the film layer 130. In some embodiments, heating and pressure post-processing can be performed at the same time; in detail, the formed metal nanowire can be heated through one or more rollers as described above and heated at the same time. The pressure is 10 to 500 psi, preferably 40 to 100 psi; at the same time, heating the roller to between about 70°C and 200°C, preferably between about 100°C and 175°C, which can improve the conductivity of the metal nanowire. In some embodiments, the metal nanowire can preferably be exposed to a reducing agent for post-treatment. For example, a metal nanowire composed of silver nanowires can preferably be exposed to a silver reducing agent for post-treatment. The silver reducing agent includes A borohydride, such as sodium borohydride; a boron nitrogen compound, such as dimethylaminoborane (DMAB); or a gas reducing agent, such as hydrogen (H 2 ). The exposure time is about 10 seconds to about 30 minutes, preferably about 1 minute to about 10 minutes.

本實施方式的其他細節大致上如上述實施方式所述,在此不再贅言。 The other details of this embodiment are roughly as described in the foregoing embodiment, and will not be repeated here.

本發明的不同實施例的結構可相互引用,並不為上述各具體實施方式的限制。 The structures of different embodiments of the present invention can be mutually cited, and are not limited to the foregoing specific embodiments.

本發明的部分實施方式中,通過圖案化層PL的直接設置而讓用於蝕刻的遮罩選擇性地設置於金屬奈米線層NWL或/及金屬層ML上的預定位置,故不需整面性的圖案化層PL的材料,亦不須針對圖案化層PL的材料進行額外的圖案化步驟,故可達到節省製作成本的效果。 In some embodiments of the present invention, the mask used for etching is selectively disposed at a predetermined position on the metal nanowire layer NWL or/and the metal layer ML by directly setting the patterned layer PL, so there is no need to adjust The material of the planar patterned layer PL does not require additional patterning steps for the material of the patterned layer PL, so the effect of saving manufacturing costs can be achieved.

本發明的部分實施方式中,通過圖案化層PL作為蝕刻遮罩,使兩層結構(例如上層為金屬奈米線層NWL與下層為金屬層ML,或上層為金屬層ML與下層為金屬奈米線層NWL)可以通過一次性蝕刻以製作周邊區的周邊引線及/或標記,故可以避免對位的過程中所預留的誤差空間,故可有效降低周邊區的寬度。 In some embodiments of the present invention, the patterned layer PL is used as an etching mask to make a two-layer structure (for example, the upper layer is a metal nanowire layer NWL and the lower layer is a metal layer ML, or the upper layer is a metal layer ML and the lower layer is a metal nano The rice line layer (NWL) can be etched at one time to make the peripheral leads and/or marks of the peripheral area, so the error space reserved in the alignment process can be avoided, and the width of the peripheral area can be effectively reduced.

雖然本發明已以多種實施方式揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明的精神和範圍內,當可作各種的更動與潤飾,因此本發明的 保護範圍當視後附的申請專利範圍所界定者為准。 Although the present invention has been disclosed in various embodiments as above, it is not intended to limit the present invention. Anyone who is familiar with this technique can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall be subject to the scope of the attached patent application.

110:基板 110: substrate

120:周邊引線 120: peripheral lead

136:非導電區域 136: Non-conductive area

PL:圖案化層 PL: Patterned layer

PA:周邊區 PA: Surrounding area

VA:顯示區 VA: Display area

TE1:第一觸控電極 TE1: The first touch electrode

TE2:第二觸控電極 TE2: second touch electrode

TE:觸控電極 TE: touch electrode

C1:第一覆蓋物 C1: first cover

Claims (20)

一種觸控面板的製作方法,包含: A manufacturing method of a touch panel, including: 提供一基板,其中該基板具有一顯示區與一周邊區; Providing a substrate, wherein the substrate has a display area and a peripheral area; 設置一金屬層與一金屬奈米線層,其中該金屬奈米線層的一第一部分位於該顯示區,該金屬奈米線層的一第二部分與該金屬層位於該周邊區; Disposing a metal layer and a metal nanowire layer, wherein a first part of the metal nanowire layer is located in the display area, and a second part of the metal nanowire layer and the metal layer are located in the peripheral area; 設置具有圖樣的一圖案化層;及 Setting a patterned layer with a pattern; and 依據該圖案化層進行一圖案化步驟,其中該圖案化步驟包括利用可蝕刻該金屬層與該金屬奈米線層的一蝕刻液將該金屬層形成多個周邊引線並同時將該金屬層的該第二部分形成多個蝕刻層。 A patterning step is performed according to the patterned layer, wherein the patterning step includes using an etching solution that can etch the metal layer and the metal nanowire layer to form a plurality of peripheral leads on the metal layer and simultaneously connect the metal layer The second part forms a plurality of etching layers. 如請求項1所述的觸控面板的製作方法,該圖案化步驟更包括利用該蝕刻液將該金屬奈米線層的該第一部分形成一觸控感應電極,該觸控感應電極設置於該基板的該顯示區,該觸控感應電極電性連接該些周邊引線。 The method for manufacturing a touch panel according to claim 1, wherein the patterning step further comprises using the etching solution to form the first part of the metal nanowire layer into a touch sensing electrode, and the touch sensing electrode is disposed on the In the display area of the substrate, the touch sensing electrode is electrically connected to the peripheral leads. 如請求項1所述的觸控面板的製作方法,其中該圖案化層是利用柔版印刷、凸版印刷、凹版印刷或網版印刷所成型。 The manufacturing method of the touch panel according to claim 1, wherein the patterned layer is formed by flexographic printing, relief printing, gravure printing or screen printing. 如請求項1所述的觸控面板的製作方法,該設置該金屬層與該金屬奈米線層包括: According to the manufacturing method of the touch panel according to claim 1, the arranging the metal layer and the metal nanowire layer includes: 設置該金屬層於該周邊區;及 Disposing the metal layer in the peripheral area; and 接著設置該金屬奈米線層於該顯示區與該周邊區,該第一部分位於該顯示區而成形於該基板上,該第二部分位元於該周邊區而成形於該金屬層上。 Then, the metal nanowire layer is disposed in the display area and the peripheral area, the first part is located in the display area and formed on the substrate, and the second part is located in the peripheral area and formed on the metal layer. 如請求項4所述的觸控面板的製作方法,該設置該金屬層於該周邊區包括:選擇性的將該金屬層成形於該周邊區而不成形於該顯示區。 According to the manufacturing method of the touch panel according to claim 4, the arranging the metal layer in the peripheral area includes: selectively forming the metal layer in the peripheral area but not in the display area. 如請求項4所述的觸控面板的製作方法,該設置該金屬層於該周邊區包括: According to the manufacturing method of the touch panel according to claim 4, the arranging the metal layer in the peripheral area includes: 將該金屬層成形於該周邊區與該顯示區;及 Forming the metal layer on the peripheral area and the display area; and 移除位於該顯示區的該金屬層。 Remove the metal layer located in the display area. 如請求項4所述的觸控面板的製作方法,該設置具有圖樣的該圖案化層包括將該圖案化層設置於該金屬奈米線層上,該圖案化層與該金屬奈米線層形成一複合結構。 The method for manufacturing a touch panel according to claim 4, wherein the arranging the patterned layer with a pattern includes arranging the patterned layer on the metal nanowire layer, the patterned layer and the metal nanowire layer Form a composite structure. 如請求項4所述的觸控面板的製作方法,該圖案化步驟更包括利用該蝕刻液將該金屬層形成多個標記,該些蝕刻層包括多個第一覆蓋物及多個第二覆蓋物,每一該些第一覆蓋物設置在對應的該些周邊引線上,每一該些第二覆蓋物設置在對應的該些標記上。 According to the method for manufacturing a touch panel according to claim 4, the patterning step further includes using the etching solution to form a plurality of marks on the metal layer, and the etching layers include a plurality of first coverings and a plurality of second coverings. Each of the first coverings is arranged on the corresponding peripheral leads, and each of the second coverings is arranged on the corresponding marks. 如請求項1所述的觸控面板的製作方法,該設置該金屬層與該金屬奈米線層包括: According to the manufacturing method of the touch panel according to claim 1, the arranging the metal layer and the metal nanowire layer includes: 設置該金屬奈米線層於該顯示區與該周邊區;及 Disposing the metal nanowire layer in the display area and the peripheral area; and 接著設置該金屬層於該周邊區,其中該金屬層位元於該第二部分上。 Then, the metal layer is disposed on the peripheral area, wherein the metal layer is located on the second part. 如請求項9所述的觸控面板的製作方法,該圖案化步驟更包括利用該蝕刻液將該金屬層形成多個標記,該些蝕刻層包括多個第一中間層及多個第二中間層,每一該些第一中間層設置在對應的該些周邊引線與該基板之間,每一該些第二中間層設置在對應的該些標記與該基板之間。 According to the method for manufacturing a touch panel according to claim 9, the patterning step further includes using the etching solution to form a plurality of marks on the metal layer, and the etching layers include a plurality of first intermediate layers and a plurality of second intermediate layers. Each of the first intermediate layers is arranged between the corresponding peripheral leads and the substrate, and each of the second intermediate layers is arranged between the corresponding marks and the substrate. 如請求項10所述的觸控面板的製作方法,在該圖案化的步驟之後,更包括移除該圖案化層。 The manufacturing method of the touch panel according to claim 10, after the step of patterning, further includes removing the patterned layer. 如請求項1所述的觸控面板的製作方法,更包括設置一膜層。 The manufacturing method of the touch panel as described in claim 1 further includes providing a film layer. 如請求項1所述的觸控面板的製作方法,其中該製作方法可於該基板的一面或雙面進行。 The manufacturing method of the touch panel according to claim 1, wherein the manufacturing method can be performed on one side or both sides of the substrate. 一種觸控面板,包含: A touch panel, including: 一基板,其中該基板具有一顯示區與一周邊區; A substrate, wherein the substrate has a display area and a peripheral area; 多個周邊引線設置於該周邊區; A plurality of peripheral leads are arranged in the peripheral area; 多個第一覆蓋物,該些第一覆蓋物覆蓋該些周邊引線; A plurality of first coverings, the first coverings covering the peripheral leads; 一觸控感應電極,設置於該基板的該顯示區,該觸控感應電極電性連接該些周邊引線,其中該些第一覆蓋物及該觸控感應電極包括金屬奈米線;以及 A touch sensing electrode disposed in the display area of the substrate, the touch sensing electrode is electrically connected to the peripheral leads, wherein the first coverings and the touch sensing electrode include metal nanowires; and 一圖案化層,是以具有圖案的方式設置於該些第一覆蓋物及該觸控感應電極上,該圖案化層具有一印刷側面。 A patterned layer is arranged on the first coverings and the touch sensing electrode in a patterned manner, and the patterned layer has a printed side surface. 如請求項14所述的觸控面板,其中該圖案化層與該些第一覆蓋物形成一第一複合結構,或者該圖案化層與該觸控感應電極形成一第二複合結構。 The touch panel according to claim 14, wherein the patterned layer and the first coverings form a first composite structure, or the patterned layer and the touch sensing electrode form a second composite structure. 如請求項14所述的觸控面板,其中該些第一覆蓋物具有一側面,該側面與該些周邊引線的一側面為一共同蝕刻面,該共同蝕刻面與該印刷側面相互對齊。 The touch panel according to claim 14, wherein the first coverings have a side surface, the side surface and a side surface of the peripheral leads are a common etching surface, and the common etching surface and the printing side surface are aligned with each other. 如請求項14所述的觸控面板,更包括設置在該周邊區的多個標記及覆蓋該些標記的多個第二覆蓋物,其中該些第二覆蓋物包括金屬奈米線。 The touch panel according to claim 14, further comprising a plurality of marks arranged in the peripheral area and a plurality of second coverings covering the marks, wherein the second coverings include metal nanowires. 如請求項17所述的觸控面板,其中該些第二覆蓋物具有一側面,該側面與該些標記的一側面為一共同蝕刻面,該共同蝕刻面與該印刷側面相互對齊。 The touch panel according to claim 17, wherein the second coverings have a side surface, and the side surface and a side surface of the marks are a common etching surface, and the common etching surface and the printing side surface are aligned with each other. 如請求項14所述的觸控面板,更包含:一膜層。 The touch panel according to claim 14, further comprising: a film layer. 如請求項17所述的觸控面板,其中該些周邊引線與該些標記為金屬材料製成。 The touch panel according to claim 17, wherein the peripheral leads and the marks are made of metal materials.
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