TW202040125A - Sensors and arrangement of sensors which can suppress the accidental action caused by mixing with foreign matters - Google Patents

Abstract

The sensor 5 of the present invention has: a plurality of detection units comprising a pair of electrodes and a detection area between the pairs of electrodes in which the resistance between the pairs of electrodes changes by accumulating conductor particles; and a detection section 50 which outputs a detection signal when the resistance changes in at least two or more of the detection units.

Description

Sensors and sensor arrangement

The invention relates to a sensor.

Mechanical devices such as speed reducers are housed in a housing containing lubricating oil to prevent damage to mechanical parts such as gears. If the mechanical parts are worn during the operation of this mechanical device, the abrasion powder is mixed into the lubricating oil. The abrasion powder is a conductive substance such as iron powder. If the wear of the mechanical parts continues and enters the wear failure period in the failure rate curve (Bathtub curve), the amount of wear powder mixed into the lubricant will increase. Therefore, the preventive protection of mechanical parts can be reliably performed by the sensor that detects the amount of abrasion powder in the lubricant.

As such a sensor, for example, Patent Document 1 discloses an oil inspection sensor that is installed in an automobile gearbox or the like to inspect the deterioration of oil in an oil container or the degree of friction of mechanical parts lubricated with oil. The sensor is equipped with a pair of electrodes and a magnet that adsorbs iron powder contained in the oil. Based on the resistance value between one pair of electrodes that is changed by the adsorbed conductive material, it detects the conductive material in the oil. the amount. [Prior Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2002-286697

[The problem to be solved by the invention]

However, during the manufacture of a mechanical device, there is a possibility that foreign matter with a large particle diameter (for example, cutting powder, etc.) generated by cutting processing may adhere to the constituent members of the mechanical device and be mixed into the lubricant. If such a foreign matter with a large particle diameter adheres to the sensor, even if abrasion powder is hardly generated, it will short-circuit the pair of electrodes. In this way, the sensor for detecting the amount of abrasion powder may accidentally activate the sensor even if the amount of abrasion powder is small.

One of the objectives of the present invention is to provide a sensor that can prevent accidental operation due to the inclusion of foreign objects. Other objects of the present invention are clarified by the description of the entire specification. [Technical means to solve the problem]

A sensor according to an embodiment of the present invention includes: a plurality of detection units including a pair of electrodes, and a detection area arranged between the pair of electrodes and accumulating conductor particles to change the resistance between the pair of electrodes; And a detection unit, which outputs a detection signal when the resistance of at least two detection units changes.

In an embodiment of the present invention, a plurality of detection units may include a first detection unit and a second detection unit. The first detection unit is provided with the first electrode, the second electrode, and the first electrode and the second The first detection area between the electrodes is constituted, and the second detection unit is constituted by the first electrode, the third electrode, and the second detection area provided between the first electrode and the third electrode.

In an embodiment of the present invention, a plurality of detection units may include a third detection unit and a fourth detection unit, and the third detection unit is provided with the fourth electrode, the fifth electrode, and the fourth electrode and the fifth electrode. The third detection area in between is constituted, and the fourth detection unit is constituted by the fourth electrode, the sixth electrode, and the fourth detection area provided between the fourth electrode and the sixth electrode.

In an embodiment of the present invention, a plurality of detection units may also be connected in series.

In an embodiment of the present invention, a plurality of detection units may also be connected in parallel with each other.

In an embodiment of the present invention, each of the plurality of detection units may include a resistor for flowing a micro current between a pair of electrodes.

In one embodiment of the present invention, the sensor may also be provided with: a voltage application control section including a power supply for applying voltage to a plurality of detection units; a signal detection section which detects the output of the detection signal; and a memory section, which In the case of outputting the detection signal, the output of the detection signal is memorized; and the power application control section blocks the voltage application of the power supply during the period when the memory section stores the output of the detection signal.

The sensor arrangement of an embodiment of the present invention may also include a plurality of the above-mentioned sensors, and each sensor is arranged at a different detection position. [Effects of Invention]

According to the present invention, there is provided a sensor which can prevent accidental operation due to the mixing of foreign objects.

Hereinafter, each embodiment of the present invention will be described with reference to appropriate drawings. In addition, for the common constituent elements in plural patterns, the same reference signs are attached through the plural patterns. It should be noted that the drawings may not be recorded at the correct scale for ease of explanation.

Fig. 1 is a cross-sectional view showing an example of a mechanism 1 provided with a sensor 5 according to an embodiment of the present invention. The mechanism 1 is, for example, a movable part such as a robot arm, and includes a speed reducer 2, a flange 3 provided on the input side, a servo motor 4, and a device A1 on the output side.

The reducer 2 includes a housing 41 which is mounted on the flange 3; an input shaft 43 which is connected to the output shaft 42 of the servo motor 4; and an output shaft 24 which is connected to the device A1 on the output side. The input shaft 43 and the output shaft 44 are rotatably supported about the shaft AX with respect to the housing 41. The output of the servo motor 4 is input to the reducer 2 via the input shaft 43, and after being decelerated by the reducer 2, it is transmitted to the device A1 on the output side via the output shaft 44. Thereby, the device A1 on the output side and the flange 3 can rotate relatively.

The flange 3 is a cylindrical member and accommodates at least a part of the reducer 2. In addition, a servo motor 4 is attached to the flange 3. The opening at one end of the flange 3 in the direction of the axis AX is covered by the reducer 2, and the opening at the other end is covered by the servo motor 4. Thereby, a sealed hollow portion (space S) is formed in the flange 3. Lubricating oil is accommodated in the space S, and the flange 3 also functions as an oil groove.

In the housing 41 of the reducer 2, for example, a gear mechanism is housed. The space in the housing 41 is continuous with the space S in the flange 3. If the speed reducer 2 is activated, the lubricating oil will circulate between the space in the housing 41 and the space S in the flange 10 as the gear mechanism in the housing 41 rotates. Through the circulation of the lubricating oil, conductive materials such as abrasion powder generated in the reducer 2 are discharged to the space S in the flange 3.

In the space S, a sensor 5 for detecting the amount of conductive substance contained in the lubricating oil is installed. The sensor 5 is fixed to the flange 3 via a supporting member 45, for example. The sensor 5 uses a magnet to accumulate the conductive substance contained in the lubricating oil between a pair of electrodes, and detects the amount of the conductive substance in the lubricating oil based on the resistance change between the pair of electrodes. The position where the sensor 5 is arranged can also be, for example, in the housing 41. If it is a space containing lubricating oil, it can be arranged in any place in the mechanism 1.

Next, the structure of the sensor 5 will be described in detail with reference to FIG. 2. Fig. 2 is a diagram showing the structure of a sensor 5 according to an embodiment of the present invention. FIG. 2 shows a top view of the sensor 5 and a cross-section along the line A-A of the top view.

As shown in FIG. 2, the sensor 5 has a substantially cylindrical shape, and is equipped with a plurality of detection units and a detection unit 50 that outputs a signal when the resistance changes in the detection units. Each detection unit includes a pair of electrodes, and a detection area that changes the resistance between the pair of electrodes by accumulating conductor particles. More specifically, the sensor 5 includes a first electrode (center electrode) 6 near the center, a second electrode (outer electrode) 7, a third electrode (outer electrode) 8, and a fourth electrode near the center ( The center electrode) 9, the fifth electrode (outer electrode) 10 located on the outside, the sixth electrode (outer electrode) 11, the magnet 40, the fastening member 12, and the resin material 13. As shown in the cross-sectional view of FIG. 2, the center electrodes 6 and 9 are formed with a space on the inner side of the outer electrodes 7, 8, 10, and 11. Thereby, a plurality of detection regions are formed on the upper part of the resin material 13 between the center electrodes 6 and 9 and the outer electrodes 7, 8, 10, and 11.

In the illustrated embodiment, the sensor 5 has four detection units, and a first detection area GA1, a second detection area GA2, a third detection area GA3, and a fourth detection area GA4 are formed on the upper portion of the resin material 13. Of 4 detection areas. The first detection unit is composed of a first electrode 6, a second electrode 7, and a first detection area GA1 provided between the first electrode 6 and the second electrode 7. The second detection unit is composed of a first electrode 6, a third electrode 8, and a second detection area GA2 provided between the first electrode 6 and the third electrode 8. The third detection unit is composed of a fourth electrode 9, a fifth electrode 10, and a third detection area GA3 provided between the fourth electrode 9 and the fifth electrode 10. The fourth detection unit is composed of a fourth electrode 9, a sixth electrode 11, and a fourth detection area GA4 provided between the fourth electrode 9 and the sixth electrode 11. In addition, instead of using the magnet 40, the center electrode 6 may be configured to serve as both the magnet and the electrode.

Here, the electrode is a magnetic member made of a conductive magnetic material such as iron, ferrite core, silicon steel, etc. Between these electrodes, a resin material 13 which is a non-magnetic body (insulator) is arranged. In this way, each electrode and the magnet 40 are formed in such a way that at least a part of them is embedded in the central area of the resin material. In addition, the shape of each electrode or magnet 40 is not limited to the example shown in the figure, and various shapes can be adopted.

An output line (not shown) is connected to each of the center electrodes 6, 9 and the outer electrodes 7, 8, 10, and 11. In addition, a magnet 40 may be installed on the lower part of the center electrodes 6, 9, etc., of course, this may not be the case. In addition, when the magnet 40 is installed, the magnet 40 is formed of a magnet or an electromagnet, or it may be formed by covering the magnet with a non-magnetic material such as copper and connecting a signal line (not shown) to the covering layer. With the magnet 40, magnetic flux lines are formed around the detection areas GA1, GA2, GA3, and GA4. Thereby, the conductive substances contained in the lubricating oil accumulate in the periphery of each detection area GA1, GA2, GA3, GA4.

The sensor 5 is connected to a detection unit 50. The detection unit 50 includes a sensor drive circuit that monitors the resistance value, and predicts the failure of mechanical parts based on the change in the resistance value caused by the accumulation of conductive materials between the electrodes ( Not shown). If more than a certain amount of conductive material accumulates in the detection area, the resistance of at least one of the electrodes 6, and 9, and the electrodes 7, 8, 10, and 11 (that is, any detection unit) to which the voltage is applied decreases (that is, Short circuit), and the output level of the output line changes. The sensor drive circuit of the detection part 50 can perform failure prediction of mechanical parts by detecting the change of the resistance. In addition, when the resistance is lowered, it may also include detection in two states of non-energized and energized based on the on-off signal of non-energized and energized (hereinafter referred to as "digital detection").

The sensor drive circuit is wired or wirelessly connected to an upper control device such as a controller. The circuit board 43 of Figure 1 can also always send the output of the output line (the output of the sensor 40A) to the upper control device, or it can be sent to the upper control device intermittently (every specific time) for power saving .

The host control device may be configured to, if a change in the output level of the output line received from the circuit board 43 is detected, a specific notification mechanism (display device or sound output device) is used to issue, for example, a warning to urge the maintenance of the reducer 2 .

Next, referring to FIG. 3, the connection state of the sensor 5 in one embodiment of the present invention will be explained. As shown in the figure, the fifth electrode (outer electrode) 10 located on the outer side is connected to the detection circuit 17 by a connecting wire 15, and the second electrode (outer electrode) 7 located on the outer side is connected to the detection circuit 17 by a connecting wire 16. . In addition, as shown in the figure, the third electrode (outer electrode) 8 and the sixth electrode (outer electrode) 11 are connected by a connecting wire 14. In this way, the structure is composed of a fifth electrode (outer electrode) 10, a fourth electrode near the center (center electrode) 9, a sixth electrode (outer electrode) 11, a third electrode (outer electrode) 8, and a first electrode near the center The sequence of (center electrode) 6 and second electrode (outer electrode) 7 is a logical product of 4 circuits. With this structure, the number of leads can be reduced to two. When the first electrode (center electrode) 6 near the center and the fourth electrode (center electrode) 9 near the center are integrated, each of the outer electrodes 7, 8, 10, 11 must have 5 leads, but With the above structure, the number of leads can be greatly reduced.

In the configuration shown in FIG. 3, a voltage is applied between the second electrode 7 and the fifth electrode 10, and the third electrode 8 and the sixth electrode 11 are short-circuited. Thereby, the first detection area GA1 between the first electrode (center electrode) 6 and the second electrode (outer electrode) 7 near the center, the first electrode (center electrode) 6 near the center, and the third electrode (outer electrode) 7 The second detection area GA2 between the electrodes) 8, the fourth electrode near the center (center electrode) 9 and the third detection area GA3 between the fifth electrode (outer electrode) 10, and the fourth electrode near the center (center electrode) ) 9 and the fourth detection area GA4 between the sixth electrode (outer electrode) 11 constitute a state of a series circuit. In this way, a plurality of detection units are connected to each other in series, so that even if the cutting powder or the like remains in the lubricating oil, as long as the cutting powder does not adhere to all the detection areas, the detection circuit can prevent false signals from being sent out, thereby suppressing Unexpected operation of the sensor 5 caused by the mixing of foreign objects.

Next, a description will be given of a case where a sensor array (sensor group) composed of a plurality of sensors in FIG. 4 is provided. Each of the plurality of sensors 5 is arranged at different detection positions. In the embodiment shown in the figure, a sensor array (sensor group) composed of two sensors 5 is provided, and the sensor 5 is configured to detect the amount of conductor material at two detection positions by each sensor 5 . The detection position and the number of sensors 5 are not limited to this, and can be changed as appropriate. For example, the volume of the lubricating oil storage space S (refer to Figure 1) is somewhat large, and there are cases where it is difficult for one sensor 5 to detect, but by setting a plurality of detection positions, each The detection position is equipped with one or more sensors, which can exactly correspond to the physical position of the detection.

In this configuration, for example, as shown in the figure, two sensors 5 can be connected in series to form a circuit. Because there are two sensors 5 in series, only when the conductive material is attached to the sensor in the detection area of one, no current flows in the circuit, and the conductive material is also attached to the detection area of the other In the case of the sensor 5, current flows in the circuit. In this way, the sensor arrangement in one embodiment of the present invention can reliably prevent the output related to the failure prediction even if one sensor 5 erroneously detects the failure prediction situation.

Next, referring to FIG. 5, the connection mode of the sensor 5 in one embodiment of the present invention will be explained. As shown in the figure, in the plurality of detection areas illustrated in FIG. 3, the second electrode 7, the third electrode 8, and the fifth electrode 10 are connected in parallel by a connecting wire 24, a connecting wire 25, and a connecting wire 26, respectively. The six electrodes 11 are connected in series by a connecting wire 28 and connected to a detection circuit 29 including a voltage source.

As shown in FIG. 5, one of the four outer electrodes (ie, the second electrode 7, the third electrode 8, the fifth electrode 10, and the sixth electrode 11) can be configured as a multiplexed (Gnd) structure, And use the remaining 3 outer electrodes as signals. The first electrode 6 and the fourth electrode 9 are electrically connected by accumulating conductor particles. The two parts are connected in series via the central circular electrode, and some of them are connected in parallel, so that the voltage can be reduced to about half, and it is related to the improvement of the robustness against disconnection.

Next, referring to FIG. 6, the connection state of the sensor 5 of other embodiments will be explained. The sensor 5 shown in FIG. 6 has the same structure as the sensor shown in FIG. 3, but is connected to the detection circuit by a connection method different from that in FIG. In the resulting sensor 5 shown in FIG. 6, the second electrode 7, the third electrode 8, the fifth electrode 10, and the sixth electrode 11 are connected via the connecting wire 18, the connecting wire 19, the connecting wire 20, and the connecting wire 21, respectively. They are connected in parallel, and these are connected to a detection circuit 23 including a voltage source.

As shown in FIG. 6, by connecting the four outer electrodes, namely, the second electrode 7, the third electrode 8, the fifth electrode 10, and the sixth electrode 11 in parallel, compared with the case where the four outer electrodes are connected in series , The voltage can be reduced to about one-fourth, and by multiplying the Gnd line, the robustness against disconnection can be improved.

Next, FIG. 7 shows a top view and an A-A cross-sectional view of the sensor 5 of another embodiment of the present invention.

As shown in FIG. 7, a sensor 5 of another embodiment of the present invention includes a first electrode (center electrode) 6 near the center, a second electrode (outer electrode) 7 located on the outside, and a third electrode (outer electrode) 8 , The fourth electrode (center electrode) 9 near the center, the fifth electrode (outer electrode) 10 located on the outside, the sixth electrode (outer electrode) 11, the magnet 40, the fastening member 12, and the resin material 13.

In the illustrated embodiment, between the first electrode (center electrode) 6 and the second electrode (outer electrode) 7, between the first electrode (center electrode) 6 and the third electrode (outer electrode) 8, the second electrode Between the fourth electrode (center electrode) 9 and the fifth electrode (outer electrode) 10, and between the fourth electrode (center electrode) 9 and the sixth electrode (outer electrode) 11, the resistor 30 is arranged on the resin material 13, respectively. That is, each of the plurality of detection units of the sensor 5 further has a resistor 30 for flowing a micro current between a pair of electrodes constituting the detection unit. The arrangement of the resistor body 30 shown in the figure is an example, and the shape, structure, arrangement location, arrangement aspect, etc. of the resistor body 30 are not particularly limited, and can be appropriately changed.

In this way, by connecting the resistor 30 with a large resistance to each of the detection areas GA1, GA2, GA3, and GA4 of the sensor 5, even when the accumulated conductor material is small, a small current can pass through the resistor 30 circulates between a pair of electrodes. In this configuration, since it is assumed that a small current does not flow when the copper wire (connecting wire, etc.) is broken, the circuit breakage can be detected. In addition, the resistance R of the resistor 30 is configured to be larger than the resistance value Ω of the gap portion at the time of fault detection. In addition, due to the failure of the reducer, when conductive materials are gathered, the resistance value of the detection area decreases and a current with a larger current value flows. Therefore, the threshold value of the current value can be set to predict the failure. With the above configuration, both the disconnection of the circuit and the fault prediction can be performed reliably.

Secondly, the sensor of one embodiment of the present invention has a structure that always flows current if conductive material adheres to the threshold value and the sensor is turned on, and energy may be wasted. In addition, the life of the photo coupler (PC: Photo coupler) is related to the power-on time, so it is believed that it will also affect the life of the PC and cause problems such as circuit damage.

FIG. 8 is a diagram illustrating the structure of a signal processing circuit to prevent this problem. As shown in FIG. 8, the sensor 5 is connected to the power supply control unit 31 provided with the power supply 32 through a connecting wire, and then connected to the voltage detection unit 33, the memory unit 34, and the output unit 35. The storage unit 34 is connected to the power application control unit 31 by a connecting wire.

The power supply control unit 31 shown in the figure includes a power supply 32 that applies a voltage between the electrodes of the sensor 5, and is configured to block the voltage application of the power supply. The voltage detection unit 33 detects the voltage application of the power supply 32 and outputs a detection signal. The storage unit 34 stores the output of the detection signal when the signal detection unit 33 outputs the detection signal. The memory part 34 shown in the figure shows the state memory based on the RS flip-flop, but it can also be an integrated device including the memory of a microcomputer, or other aspects. When the output unit 35 stores the detection signal in the memory unit 34, it outputs the detection signal to generate an alarm trigger for predicting failure.

The sensor 5 of one embodiment of the present invention is energized (conducted state) between the power supply 32 when a conductive substance exceeding the threshold value is attached, and the detection unit 33 that detects this situation outputs a detection signal to the memory unit 34. This signal Stored in the memory part 34. If the signal is stored in the memory unit 34, it will be in the Hi state. As a result, the power application control unit 31 will also be in the Hi state, thereby blocking the application of voltage and turning the PC1 into an OFF state. In this way, since the energization of the sensor 5 is in an off state, the output of the detection unit 33 to the memory unit 34 changes. However, since the output of the memory unit 34 is held by the circuit of the memory unit 34, the output The alarm triggers for subsequent failure prediction.

In this way, preventing current from continuing to flow in the circuit can prolong the life of the optocoupler (PC) and avoid circuit damage.

Next, FIG. 9 is a diagram illustrating another configuration of the signal processing circuit. As shown in FIG. 9, the sensor 5 is connected to the power supply control unit 31 provided with the power supply 32 through a connecting wire, and then connected to the voltage detection unit 33, the memory unit 34, and the output unit 35. The storage unit 34 is connected to the power application control unit 31 by a connecting wire. Unlike the case of FIG. 8, a timer circuit 36 is connected between the memory unit 34 and the power application control unit 31.

The power supply control unit 31 shown in the figure includes a power supply 32 that applies a voltage between the electrodes of the sensor 5, and is configured to block the voltage application of the power supply. The voltage detection unit 33 detects the voltage application of the power supply 32 and outputs a detection signal. The storage unit 34 stores the output of the detection signal when the signal detection unit 33 outputs the detection signal. The memory part 34 shown in the figure shows the state memory based on the RS flip-flop. It can also be an integrated device including the memory of a microcomputer, or other aspects. The output unit 35 outputs the detection signal when the memory unit 34 memorizes the detection signal, and generates the triggering of the failure prediction alarm.

The sensor 5 of one embodiment of the present invention is energized (conducted state) between the power supply 32 when a conductive substance exceeding a threshold value is attached, and the detection unit 33 that detects this condition outputs a detection signal to the memory unit 34. This signal It is memorized in the memory part 34. However, since the conductor material generally tends to increase gradually, it is not always necessary to continuously monitor the voltage applied to the sensor 5, and even intermittent monitoring can effectively predict failures.

In the signal processing circuit shown in FIG. 9, a timer circuit 36 is added, and a voltage is applied every specific time or every specific time. In this way, since current can be prevented from always flowing in the circuit, energy consumption can be reduced.

The embodiment of the present invention is not limited to the above description, and various changes can be made within the scope of the technical idea of the present invention. For example, the content which suitably combines the embodiment etc. which are exemplified and clearly indicated in the specification or the embodiment etc. which is self-evident is also included in the embodiment of this application.

1: Institution 2: reducer 3: flange 4: Servo motor 5: Sensor 6: The first electrode (center electrode) 7: The second electrode (outer electrode) 8: The third electrode (outer electrode) 9: 4th electrode (center electrode) 10: 5th electrode (outer electrode) 11: 6th electrode (outer electrode) 12: Fastening member 13: Resin material 14: Connection line 15: Connection line 16: connection line 17: Detection circuit 18: Connection line 19: Connection line 20: connection line 21: Connection line 23: Detection circuit 24: connection line 25: connection line 26: Connection line 28: Connection line 29: Detection circuit 30: resistor body 31: Power supply control unit 32: Power 33: Voltage detection department 34: Memory Department 35: output section 36: Timer circuit 40: Magnet 40: A sensor 41: Shell 42: output shaft 43: output shaft 44: output shaft 45: support member 50: Inspection Department A1: Device AX: axis GA1: first detection area GA2: 2nd detection area GA3: 3rd detection area GA4: 4th detection area PC1: Optocoupler R: resistance S: Space

Fig. 1 is a cross-sectional view showing an example of a mechanism equipped with a sensor according to an embodiment of the present invention. Figure 2 is a top view and a cross-sectional view of a sensor according to an embodiment of the present invention. Fig. 3 is a schematic diagram showing the connection state of the sensor in one embodiment of the present invention. Fig. 4 is a schematic diagram showing the connection state of the sensor of one embodiment of the present invention. Fig. 5 is a schematic diagram showing the connection state of the sensor in one embodiment of the present invention. Fig. 6 is a schematic diagram showing the connection state of the sensor of one embodiment of the present invention. Fig. 7 is a top view and a cross-sectional view of a sensor according to an embodiment of the present invention. Fig. 8 is a schematic diagram of a signal processing circuit provided with a sensor according to an embodiment of the present invention. Fig. 9 is a schematic diagram of a signal processing circuit provided with a sensor according to an embodiment of the present invention.

5: Sensor

6: The first electrode

7: 2nd electrode

8: 3rd electrode

9: 4th electrode

10: 5th electrode

11: 6th electrode

12: Fastening member

13: Resin material

40: Magnet

GA1: first detection area

GA2: 2nd detection area

GA3: 3rd detection area

GA4: 4th detection area

Claims (10)

A sensor with: A plurality of detection units including a pair of electrodes and a detection area arranged between the pair of electrodes to change the resistance between the pair of electrodes by accumulating conductor particles; and The detection unit outputs a detection signal when the resistance of at least two of the detection units changes. Such as the sensor of claim 1, wherein the plurality of detection units include a first detection unit and a second detection unit; The first detection unit is composed of a first electrode, a second electrode, and a first detection area provided between the first electrode and the second electrode; The second detection unit is composed of the first electrode, the third electrode, and a second detection area provided between the first electrode and the third electrode. Such as the sensor of claim 2, wherein the plurality of detection units include a third detection unit and a fourth detection unit; The third detection unit is composed of a fourth electrode, a fifth electrode, and a third detection area provided between the fourth electrode and the fifth electrode; The fourth detection unit is composed of the fourth electrode, the sixth electrode, and a fourth detection area provided between the fourth electrode and the sixth electrode. The sensor according to any one of claims 1 to 3, wherein the plurality of detection units are connected in series with each other. The sensor according to any one of claims 1 to 3, wherein the plurality of detection units are connected in parallel with each other. The sensor according to any one of claims 1 to 3, wherein each of the plurality of detection units includes a resistor for flowing a micro current between the pair of electrodes. The sensor of claim 4, wherein each of the plurality of detection units includes a resistor for flowing a micro current between the pair of electrodes. The sensor of claim 5, wherein each of the plurality of detection units includes a resistor for flowing a micro current between the pair of electrodes. Such as the sensor of claim 1, which has: A voltage application control unit, which includes a power supply for applying voltage to the plurality of detection units; A signal detection unit, which detects the output of the aforementioned detection signal; and The memory unit, when the detection signal is output, memorizes the output of the detection signal; and The power supply control unit blocks the voltage application of the power supply during the period when the memory unit stores the output of the detection signal. A sensor arrangement, which has a plurality of sensors such as claim 1; and Each of the above-mentioned sensors is arranged at different detection positions.

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