TW202039065A - Start-up method of ultrapure water production device, and ultrapure water production device - Google Patents

Abstract

To reduce a start-up period of an ultrapure water production device. The start-up method of an ultrapure water production device according to the present invention, is a start-up method of an ultrapure water production device comprising a water treatment system at least comprising a channel for water to be treated to flow therethrough and an ultrafiltration membrane device disposed on the channel to treat the water to be treated before a use point, and comprises a step of installing a temporary filter device on the channel before the ultrafiltration membrane device, a step of cleaning the water treatment system by starting to send water along the channel, and a step of separating the temporary filtration device from the ultrapure water production device when a predetermined period has passed since the beginning of the cleaning by sending water.

Description

Starting method of ultrapure water manufacturing device and ultrapure water manufacturing device

The present invention relates to a method for starting an ultrapure water production device, such as an ultrapure water production device used when starting a new installation, and an ultrapure water production device that can use the startup method.

The ultrapure water production equipment used in the semiconductor process, etc., is a water treatment system that includes the flow path of the treated water to the point of use (place of use) and various treatment devices, and the treated water flows on the flow path. Implement water treatment to obtain ultrapure water. This kind of ultrapure water production device mainly includes a primary pure water production department and a secondary pure water production department. The primary pure water production unit uses, for example, a reverse osmosis membrane device and an ion exchange device that removes suspended substances in raw water from the pretreatment unit, and removes total organic carbon (TOC) components and ion components in the pre-treated water. Pure water. On the other hand, the secondary pure water production section removes particles, colloidal substances, organic matters, metals, anions, etc. remaining in the primary pure water, thereby producing secondary pure water (ultra pure water).

Here, in order to start the ultrapure water production device, for example, a new installation, the installation site of the ultrapure water production device, for example, assembling work, it will happen: the particles, bacteria, total organic carbon in the water treatment system Problems such as the mixing of metal components and the elution of metal components from the piping constituting the flow path of the water to be treated. Therefore, as a countermeasure, before the normal operation of the ultrapure water production device, the water treatment system in the ultrapure water production device is cleaned in advance (for example, refer to Patent Document 1). [Prior Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent Application Publication No. 2004-122020

[The problem to be solved by the invention]

However, even after the above-mentioned washing operation is continued for a long period of time, the ultrapure water produced by the ultrapure water production device may still fail to meet the desired production specifications. For example, when the piping connections in the ultrapure water production device are complicatedly connected, or the environment where the ultrapure water production device is installed has problems with the cleanliness, such as metal particles with large particle size, sand, etc. , May exist in the water treatment system in a state of being captured by an ultrafiltration membrane device etc. arranged in the front stage of the point of use. At this time, the elution of components such as metal particles continues for a long period of time in the water treatment system, and as a result, the water quality of the produced ultrapure water is continuously deteriorated.

The present invention was developed to solve the above-mentioned problems, and its purpose is to provide an ultrapure water production device startup method and an ultrapure water production device that can shorten the startup period of the ultrapure water production device. [Technical means to solve the problem]

The startup method of the ultrapure water production device of the present invention is a startup method of an ultrapure water production device equipped with a water treatment system. The water treatment system at least includes: a flow path for allowing the treated water to flow through, and An ultrafiltration membrane device that treats the aforementioned treated water in the front stage of the point of use on the road. The startup method of the ultrapure water production device has: a temporary filter is installed in the front stage of the aforementioned ultrafiltration membrane device on the flow path. The process of the device is the process of cleaning the water treatment system by starting the water supply along the flow path after the temporary filter device is installed, and after a predetermined period of time has elapsed from the start of the cleaning of the water supply, the The process of separating the temporary filter device from the aforementioned ultrapure water production device.

The aforementioned washing preferably includes a sterilization treatment. Furthermore, it is preferable to implement after the aforementioned separation step: a step of starting water supply along the aforementioned flow path until obtaining ultrapure water that meets the desired manufacturing specifications is performed. In addition, it is preferable that the ultrapure water production device further includes a storage tank on the upstream side of the temporarily placed filtering device on the flow path, and the flow path has a circulation line that returns to the storage tank after passing through the ultrafiltration membrane device In the aforementioned washing, the aforementioned water supplied is circulated in the aforementioned circulation pipe. More preferably, the predetermined period is a period in which the number of cycles calculated based on the amount and flow rate of the water in the circulation line becomes 0.5 to 2200 following the start of the washing.

On the other hand, the ultrapure water production device of the present invention is provided with: a flow path for the water to be treated to flow through, and an ultrafiltration membrane that is installed on the flow path and performs water treatment on the water to be treated before the point of use A device, and a filter attachment and detachment mechanism installed in the front stage of the ultrafiltration membrane device on the flow path, the filter attachment and detachment mechanism can temporarily attach and detach the filter device to the flow path.

The aforementioned temporary filtration device is preferably, for example, a microfiltration membrane device. Preferably, the flow path is constituted by a first pipe, the filter attachment and detachment mechanism is provided with a plurality of joints and a first opening and closing valve, and the plurality of joints are detachably connected to the second pipe to the first Piping, the second piping constitutes a branch flow path that branches from the flow path once and passes through the temporary filter device to merge on the downstream side of the flow path. The first on-off valve is provided on the first piping Between the aforementioned branch position and the aforementioned confluence position. Furthermore, it is preferable that each of a pair of second on-off valves is provided on the second piping, for example, before and after the temporary filter device. [Effects of Invention]

According to the present invention, it is possible to provide an ultrapure water production device startup method and an ultrapure water production device that can shorten the startup period of the ultrapure water production device.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. As shown in FIG. 1, the ultrapure water production device 10 of this embodiment is a device that performs water treatment on the water to be treated to obtain ultrapure water. The water treatment system 15 provided therein includes: a pretreatment unit 12, The primary pure water production unit 14, the flow path 31 of the water to be treated, the storage tank 16, and the secondary pure water production unit 18. The pretreatment part 12 introduces tap water, well water, industrial water, etc. as raw water. The pre-treatment section 12 has an appropriate structure in accordance with the water quality of the raw water and the like, and removes suspended substances in the raw water to produce pre-treated water. The pre-processing part 12 is equipped with, for example, a sand filter, a micro filter, etc., and also has a heat exchanger for adjusting the temperature of the water to be treated as necessary.

The primary pure water production unit 14 removes organic components, ion components, dissolved gases, etc. in the pre-treated water to produce primary pure water, and supplies the primary pure water to the storage tank (TK) 16. The primary pure water production unit 14 includes, for example, reverse osmosis membrane equipment, ion exchange equipment (cation exchange equipment, anion exchange equipment, mixed bed ion exchange equipment, etc.), ultraviolet oxidation equipment, and degassing equipment (vacuum degassing equipment, One or more of the membrane degassing device, etc.) are appropriately combined and configured. For the primary pure water, for example, the total organic carbon (TOC: Total Organic Carbon) concentration is 5 μgC/L or less, and the resistivity is 17 MΩ･cm or more. The storage tank 16 stores the primary pure water and supplies the necessary amount of it to the secondary pure water production unit 18.

On the other hand, the secondary pure water production section 18 removes impurities in the primary pure water produced by the primary pure water production section 14 to produce secondary pure water and supplies it to the ultrapure water. The point of use (POU: Point Of Use)20. The flow path 31 is a flow path for the water to be treated to flow through. It is the water treatment system 15 that constitutes the water treatment system 15 by the pretreatment unit 12, the primary pure water production unit 14, and the secondary pure water production unit 18. The treated water is sent to the point of use 20. In addition, as shown in FIGS. 1 and 2, the storage tank 16 is located on the upstream side of the microfiltration membrane device (temporary filtration device) 27 described later on the flow path 31. In addition, the flow path 31 has a circulation line 31b that passes through the ultrafiltration membrane device 28 described later and then returns to the storage tank 16. Here, in the example of FIGS. 1 and 2, the circulation line 31b is configured to return to the position of the point of use 20 via the storage tank 16 and the secondary pure water production unit 18 from the position of the point of use 20 located at the most downstream. In other words, the ultrapure water remaining after the point of use 20 passes through the circulation pipe 31b of the flow path 31 and is recovered in the storage tank 16.

Specifically, as shown in FIGS. 2 and 3, the secondary pure water production unit 18 includes a circulating pump (water supply pump) 22, a heat exchanger (HEX: Heat Exchanger) 23, and an ultraviolet oxidation device ( TOC-UV) 24, membrane degasifier (MDG: membrane degasifier) 25, purifier (polisher) 26, filter loading and unloading mechanism 30, ultrafiltration membrane (UF: Ultrafiltration Membrane) device 28, and particle counter 29.

The circulation pump 22 is a water supply pump for supplying the water to be treated (primary pure water) contained in the storage tank 16 to the heat exchanger 23. The heat exchanger 23 adjusts the temperature of the water to be treated supplied from the circulation pump 22. At this time, the water to be treated is preferably adjusted by the heat exchanger 23 to, for example, 25±3°C.

The ultraviolet oxidizer 24 irradiates the water to be treated (primary pure water) whose temperature has been adjusted by the heat exchanger 23 with ultraviolet rays to decompose and remove trace organic matter in the water to be treated. The ultraviolet oxidation device 24 has, for example, an ultraviolet lamp, and generates ultraviolet rays with a wavelength of around 185 nm. The ultraviolet oxidation device 24 may also be one that generates ultraviolet rays with a wavelength around 254 nm. If the water to be treated is irradiated with ultraviolet rays in such an ultraviolet oxidizing device 24, the ultraviolet rays decompose water molecules to generate hydroxyl groups, which oxidatively decompose organic substances in the water to be treated.

The membrane degassing device 25 depressurizes the secondary side of the air-permeable membrane, and only allows the dissolved gas in the water to be treated flowing through the primary side to pass through the secondary side to remove it. The purifier 26 is a non-regenerative mixed bed ion exchange device, which has a mixed bed ion exchange resin formed by mixing cation exchange resin and anion exchange resin, and is used to remove trace amounts of cation and anion components in the water to be treated. Adsorption to remove.

The filter mounting and dismounting mechanism (filter mounting and dismounting mechanism) 30 described in detail later is the front stage (near the front) of the ultrafiltration membrane device 28 installed on the flow path 31 of the water to be treated, and can be performed on the flow path 31 described above. Installation and unloading of the microfiltration membrane device 27. The ultrafiltration membrane device 28 is provided in the most downstream section of the flow path 31 before the point of use 20 (immediately in front).

The ultrafiltration membrane device 28 has a plurality of hollow fiber type modules, and the water flow rate of each hollow fiber type module is 5 m ³ /h or more, generally 10 m ³ /h or more. The ultrafiltration membrane device 28 installed on the flow path 31 is to treat the water treated by the purifier 26 (or the microfiltration membrane device 27 at the time of assembly), and perform further water treatment before the point of use 20. Thereby, for example, fine particles having a particle diameter of 50 nm or more are removed to obtain ultrapure water (secondary pure water).

Here, the ultrapure water (ultrapure water that satisfies the desired water quality conditions) of the ultrapure water production device 10 of the present embodiment, the number of particles with a particle size of 50nm or more is 200 particles/L or less, and the total organic The carbon concentration is 1μgC/L or less, and the resistivity is 18MΩ･cm or more. The particle counter 29 measures the particle size of the particles in the secondary pure water (ultra-pure water) after water treatment by the ultrafiltration membrane device 28.

Next, the filter attachment and detachment mechanism 30 and the temporarily placed microfiltration membrane device 27 will be described in detail. The filter attachment and detachment mechanism 30 is provided with a plurality of joints 36, 37, 41, 42 and an on-off valve (first on-off valve) 33 as shown in FIGS. 2 and 3. On the other hand, the pore size of the membrane of the microfiltration membrane (MF: Microfiltration Membrane) device 27 is larger than that of the ultrafiltration membrane device 28 in the latter stage. The pore size of the microfiltration membrane is not particularly limited, but preferably has a filtration accuracy that can separate particles of 0.2 μm or more. This is because in the present invention, the substance that prevents the early activation of the damage is larger particles, so a microfiltration membrane with a larger pore size is sufficient. Furthermore, such a microfiltration membrane can substantially reduce the number of membranes and reduce the pressure loss, so that good water permeability can be obtained.

As the microfiltration membrane, a surface filtration type or a depth filtration type can be used. The latter deep filtration type microfiltration membrane can ensure a large amount of water flow, thereby reducing the number of membranes used and making it cheaper, so it is preferable.

In addition, the deep filtration type microfiltration membrane is generally applied to the front side of an ultrapure water production device, such as a guard filter of a reverse osmosis membrane installed in the primary pure water production section, or the pretreatment section However, if it is intended to be used in the secondary pure water production section as in this embodiment, because the pore size of the deep filtration type microfiltration membrane is too large, it was previously thought that the removal of fine particles was unpredictable, but it showed an effect in terms of activation It was unexpected.

As surface filtration type microfiltration membranes, HDC II series, PolyFine II series (the above are made by Pall) can be used; as deep filtration type microfiltration membranes, Betafine series (made by 3M Japan) can be used , PROFILE II, NEXIS series, PROFILE UP series (the above are made by Pall), etc.

That is, the microfiltration membrane device 27 can capture: metal particles (foreign matter) detached from, for example, pipes in the ultrapure water production device 10, and sand mixed into the water treatment system 15 from the installation environment of the ultrapure water production device 10 Wait.

The microfiltration membrane device 27 is a temporary (temporary) protection filter (Temporary Guard Filter) device. The microfiltration membrane device 27 is installed in the ultrapure water production device 10 when the ultrapure water production device 10 is newly installed, for example, when the ultrapure water production device is started up. However, after the startup of the ultrapure water production device is completed, it is removed from the filter attachment/detachment mechanism 30 The ultrapure water production device 10 is removed (removed).

Here, the flow path 31 of the water to be treated is constituted by a pipe 31a. In addition, in order to temporarily place the microfiltration membrane device 27, a piping (second piping) 32a for constituting the branch flow path 32 is prepared. The branch flow path 32 is branched from the flow path 31 and passed through the microfiltration membrane device 27. Converge on the downstream side of the flow path 31. That is, the microfiltration membrane device 27 is interposed on the way of the pipe 32a.

As shown in FIGS. 2 and 3, the joints 41 and 42 connect the pipe 32a to the pipe 31a in a detachable manner. In addition, the joints 36 and 37 also connect the pipe 32a to the pipe 31a detachably. Specifically, the joints 36 and 37 make the pipe 32a detachable from the pipe 31a together with the on-off valves 34 and 35. In this embodiment, as shown in FIG. 3, the main exemplified aspect is to remove the pipe 32a and the temporarily placed microfiltration membrane device 27 from the pipe 31a through the joints 41 and 42.

The on-off valve 33 is provided between the aforementioned branch position and the aforementioned confluence position on the pipe 31a, and is used to switch between the passage of water and the blocking (non-passing of water) in the pipe 31a. In addition, a pair of on-off valves (second on-off valves) 34 and 35 are provided on the pipe 32a before and after the temporarily placed microfiltration membrane device 27, respectively. The on-off valves 34 and 35 are used to switch between the passage of water and the blocking (non-passing of water) in the pipe 32a.

Therefore, as shown in FIG. 2, for example, in a state where the microfiltration membrane device 27 is installed, the flow path 31 branches once and passes through the branch flow path 32 and the microfiltration membrane device 27 and is located on the downstream side of the flow path 31 When water is sent on the confluent route, the on-off valve 33 is closed and the on-off valves 34 and 35 are opened. In addition, in a state where the microfiltration membrane device 27 is separated (removed) from the ultrapure water production device 10 as shown in FIG. 3, or includes a state in which the microfiltration membrane device 27 is installed as shown in FIG. If water is not supplied to the flow path 31 through the route of the branch flow path 32 and the microfiltration membrane device 27, the on-off valve 33 is opened and the on-off valves 34 and 35 are closed.

In this case, the section from the joint 36 to the on-off valve 34 and the section from the on-off valve 35 to the joint 37 become dead spaces, and there is a concern that the water quality may deteriorate due to water retention. Therefore, after the temporary microfiltration membrane device 27 is removed together with the pipe 32a, a thinner pipe is installed instead of the separated pipe 32a, so that a small flow rate flows from the joint 36 to the joint 37, which prevents water retention. .

Next, in addition to FIGS. 1 to 3, referring to the flowchart shown in FIG. 4, the startup method of the ultrapure water production device 10 of the present embodiment (the ultrapure water production method using the ultrapure water production device 10) will be described. When the ultrapure water production device 10 is started, first, in addition to assembling the purifier 26, the ultrafiltration membrane device 28, the flow path 31 (piping 31a), etc., the filter attaching and detaching mechanism 30 is also shown in FIGS. 2 and 4 Generally, a temporary microfiltration membrane device 27 is installed (assembled) in the body of the ultrapure water production device 10 (S1).

After the microfiltration membrane device 27 is installed, the on-off valve 33 on the pipe 31a is closed, and the on-off valves 34 and 35 on the pipe 32a (the branch flow path 32) are opened. After the microfiltration membrane device 27 is installed in this way, for example, water is sent from the front section of the pretreatment section 12 along the branch flow path 32 and the flow path 31 including the circulation pipe 31b, as shown in FIGS. 1, 2 and 4 Generally, the water treatment system 15 including the pretreatment unit 12, the devices in the primary pure water production unit 14, the aforementioned flow path 31, the purifier 26, the ultrafiltration membrane device 28, and the like is cleaned (S2). At this time, metal particles detached from, for example, pipes in the ultrapure water production device 10, sand mixed in the water treatment system 15 and the like are captured by the microfiltration membrane device 27.

In the aforementioned washing, the water (washing water) used for the water supply of the washing water treatment system 15 is preferably pure water once. In addition, for such washing, the washing water (washing water) passing through the position of the point of use 20 following the start of washing is performed at least once for a predetermined period of time or more around the circulation line 31b and then returns to the point of use. The job at the 20th position.

With the start of the aforementioned washing, the number of cycles calculated based on the water volume and flow rate in the circulation pipe 31b is preferably 0.5-2200 times, more preferably 1~1000 times, particularly preferably 40~500 times. In addition, the water passing time is preferably 0.25 hours to 1000 hours, more preferably 0.5 hours to 720 hours, and particularly preferably 24 hours to 170 hours. Also, because a large amount of foreign matter is contained on the front side of the circulatory system, even if the number of cycles is 0.5, the effect is effective, but the effect becomes greater if the number of cycles exceeds one.

When the number of cycles and the water passing time are small, because the microfiltration membrane cannot sufficiently capture foreign matter, the effect of shortening the start-up time cannot be obtained. On the other hand, when the number of cycles and the water passing time are large, the foreign matter captured by the microfiltration membrane is pulverized and flows out later, and the effect of shortening the start-up time cannot be obtained. The optimal conditions will vary according to the length, diameter, number of branches, etc. of the piping to be laid. The appropriate conditions can be selected from the above range to perform cleaning.

Here, the predetermined period may be, for example, one week. In addition, during washing, the devices in the pre-processing unit 12, the primary pure water production unit 14, and the secondary pure water production unit 18 are in an operating state. By the aforementioned washing, the metal particles, etc., detached from, for example, pipes in the ultrapure water production device 10 are captured by the microfiltration membrane device 27.

After a predetermined period has elapsed from the start of washing (Yes in S3), the microfiltration membrane device 27 that has captured metal particles and the like is removed (separated) from the ultrapure water production device 10 (S4). Specifically, after the water supply is stopped, the on-off valves 34 and 35 on the pipe 32a (the branch flow path 32) are closed. Next, as shown in FIG. 3, the pipe 32a and the temporarily placed microfiltration membrane device 27 are removed through the joints 41 and 42.

After the microfiltration membrane device 27 is removed, the on-off valve 33 is closed to make the devices in the pretreatment section 12, the primary pure water production section 14 and the secondary pure water production section 18 become operational, and then start to perform The water supply of the flow path 31 of the circulation pipe 31b (raw water is supplied to the pretreatment part 12) is subjected to water treatment by the water treatment system 15 (S5). During the operation between the removal step (S4) and the water treatment step (S5), washing may be performed without stopping the water supply. In this case, the on-off valve 33 is opened, and at the same time or afterwards, the on-off valves 34 and 35 are closed. Then, the microfiltration membrane device 27 can be removed. This water treatment is continued until the ultrapure water (the water quality of the ultrapure water meets the specifications) that meets the desired manufacturing specifications as exemplified above is obtained (S6). At this time, whether the particle size of the particles in the secondary pure water (ultra-pure water) meets the manufacturing specifications is measured by the particle counter 29. Then, when ultrapure water meeting the manufacturing specifications is obtained (Yes in S6), the startup of the ultrapure water manufacturing device 10 is completed (S7).

Here, the startup method of the ultrapure water production device 10 of this embodiment is to start the washing in the water treatment system 15 in the state where the microfiltration membrane device 27 is installed before the ultrafiltration membrane device 28 (immediately in front). After a predetermined period of time has elapsed, the microfiltration membrane device 27 that has captured, for example, metal particles, sand, etc., is removed (separated) from the ultrapure water production device 10, and then water treatment is performed. Therefore, it can be removed from the water treatment system 15 The aforementioned metal particles, sand, etc. are removed. Therefore, the startup method of the ultrapure water production device 10 according to the present embodiment can avoid: components such as sand and metal particles that may be present in the water treatment system 15 continue to dissolve and become a state in which the water quality of the ultrapure water decreases, etc. . That is, the water treatment after the removal of the microfiltration membrane device 27 can quickly obtain ultrapure water that meets the desired manufacturing specifications, so that the startup period of the ultrapure water manufacturing device 10 can be shortened.

At any stage of this operation, the sterilization operation in the secondary pure water production unit 18 using hydrogen peroxide or the like can be performed. In this case, a pipeline (not shown) that bypasses the purifier 26 and/or ultrafiltration membrane device 28 is used to connect the purifier 26 and/or ultrafiltration membrane device 28 from the system (water treatment system 15 ) It is removed, and hydrogen peroxide is added to the system by using a branch valve installed in any part of the secondary pure water production section 18, such as the suction side of the storage tank 16 or the pump 22. Then the cycle for a predetermined time. After a sufficient sterilization treatment is performed, the hydrogen peroxide aqueous solution is discharged from any place. When the hydrogen peroxide in the system disappears, the bypass of the purifier 26 and/or the ultrafiltration membrane device 28 is stopped.

In addition, in the start-up method of the ultrapure water production device of the present invention, the water treatment system 15 including the purifier 26 can also be cleaned without filling the ion exchange resin in the purifier 26 body. At this stage, the washing operation is stopped and the ion exchange resin is filled in the purifier 26 body.

Furthermore, although the above operation is described using the circulation line 31b including the point of use 20, as shown in FIG. 5, the circulation line 31c that bypasses the point of use 20 can also be used. In this case, the operation of including the point of use 20 in the circulation line is performed at any stage. In order to further shorten the start-up time, it is preferable to select a start-up method including the circulation line 31b of the point of use 20.

In addition, in order to supplement the water supply of the circulating pump 22, as shown in FIG. 5, a booster pump 43 may be provided between the purifier 26 and the joint 36. Such a booster pump 43 can also be additionally installed in the secondary pure water production part illustrated in FIGS. 2 and 3 and the secondary pure water production part illustrated in FIG. 6 described later.

On the other hand, as a result of verification, regarding the device structure of the ultrapure water production device 10, an ultrapure water production device that does not have the above-mentioned temporary filtering device (microfiltration membrane device 27) is used to use the washing water. In the case of water treatment after the washing, even if such washing and water treatment are continued for a period of, for example, 4 months, ultrapure water that meets the manufacturing specifications cannot be obtained. In this case, the hollow fiber module in the ultrafiltration membrane device 28 is in a state where metal powder, sand, etc. are captured, and the captured foreign matter will be crushed over time and flow out later. This causes inconsistency. Manufacturing specifications. Then, after replacing all the hollow fiber-type modules in the ultrafiltration membrane device 28 with new ones, water treatment is performed again, and finally ultrapure water that meets the manufacturing specifications is obtained.

In addition, it was also verified that when an ultrapure water production device with the same device structure as the ultrapure water production device 10 is used, with the microfiltration membrane device 27 installed, washing with washing water and water treatment are also performed In the case, even if such washing and water treatment are continued for a period of, for example, 3 months, ultrapure water that meets the manufacturing specifications cannot be obtained. In this case, for example, metal powder, sand, etc. of a visually visible size are captured in the microfiltration membrane device 27, and after removing the microfiltration membrane device 27, water treatment is performed again, and finally ultrapure water that meets the manufacturing specifications is obtained.

In contrast to this, it was also verified that according to the startup method of the ultrapure water production device 10 of the present embodiment, with the microfiltration membrane device 27 installed, the cleaning with the cleaning solution containing hydrogen peroxide was performed for 1 week After that, the microfiltration membrane device 27 that has captured, for example, metal particles, sand, etc. is removed from the ultrapure water production device 10, and then water treatment is performed, thereby immediately obtaining ultrapure water that meets the manufacturing specifications.

As described above, according to the startup method of the ultrapure water production device 10 of this embodiment (and the ultrapure water production device 10 that can use the startup method), the temporary filter device (microfiltration membrane device 27 ) And the washing and water treatment of the filter attachment and unloading mechanism 30, it is possible to shorten the startup period of the ultrapure water production device 10. Instead of the filter attachment and detachment mechanism 30 shown in FIG. 3, it is also possible to apply the filter attachment and detachment mechanism 40 to the ultrapure water production device and its activation method as shown in FIG. In the case of the filter attachment and detachment mechanism 40, after closing the opening and closing valves 34, 35, the pipe 32 (the branch flow path 32a) and the microfiltration membrane device 27 are connected with the opening and closing valves 34, 35 through the joints 36, 37. Remove (separate). After removing the temporarily placed microfiltration membrane device 27 together with the on-off valves 34, 35 and the pipe 32a from the ultrapure water production device 10, install a plug (water stopper) on the joint 36, 37 where the pipe 32a was originally installed. ) 38, 39, etc.

As mentioned above, the present invention has been specifically explained using the embodiments, but the present invention is not limited to the embodiments, and various changes can be made within the scope of the implementation stage without departing from the gist. For example, a certain component can be deleted from all the components disclosed in the embodiment, and it is also possible to appropriately combine a plurality of components disclosed in the above embodiment.

10: Ultrapure water manufacturing device 12: Pre-processing department 14: Primary pure water manufacturing department 15: Water treatment system 16: Storage tank (TK) 18: Secondary Pure Water Manufacturing Department 20: Point of Use (POU) 22: circulation pump 23: Heat exchanger (HEX) 24: Ultraviolet oxidation device (TOC-UV) 25: Membrane degassing device (MDG) 26: Purifier 27: Microfiltration membrane device (MF) 28: Ultrafiltration membrane device (UF) 29: Particle Counter 30, 40: filter loading and unloading mechanism 31: Flow Path 31a: Piping (1st piping) 31b, 31c: circulation pipeline 32: branch flow path 32a: Piping (2nd piping) 33: On-off valve (1st on-off valve) 34, 35: On-off valve (2nd on-off valve) 36, 37, 41, 42: Connector 38, 39: Embolism

[Fig. 1] A block diagram schematically showing the structure of an ultrapure water production device according to an embodiment of the present invention. [Fig. 2] is a block diagram showing the structure of the secondary pure water production section included in the ultrapure water production device of Fig. 1. [Fig. 3] It is a diagram showing the state after separating the temporarily placed microfiltration membrane device from the secondary pure water production part of Fig. 2. [Fig. 4] is a flowchart showing the startup method of the ultrapure water production device according to the embodiment of the present invention. [Fig. 5] A configuration example showing a part of the circulation pipeline of the water to be treated is different from that of the secondary pure water production part of Fig. 2. [Fig. 6] A diagram illustrating another separation state different from the separation state of the microfiltration membrane device of Fig. 3.

10: Ultrapure water manufacturing device

12: Pre-processing department

14: Primary pure water manufacturing department

15: Water treatment system

16: Storage tank (TK)

18: Secondary Pure Water Manufacturing Department

20: Point of Use (POU)

31: Flow Path

31b: Circulation line

Claims (13)

A method for starting an ultrapure water manufacturing device is a method for starting an ultrapure water manufacturing device with a water treatment system, The water treatment system at least includes: a flow path for letting the water to be treated flow through, and an ultrafiltration membrane device that is arranged on the flow path and performs water treatment on the treated water before the point of use, The startup method of the ultrapure water manufacturing device has: The process of installing a temporary filter device in the front stage of the aforementioned ultrafiltration membrane device on the aforementioned flow path, After installing the aforementioned temporary filtering device, the process of washing the aforementioned water treatment system by starting to send water along the aforementioned flow path, and After a predetermined period has elapsed from the start of the washing of the water supply, the step of separating the temporarily placed filter device from the ultrapure water production device. The method for starting an ultrapure water manufacturing device according to claim 1, wherein: The aforementioned washing includes sterilization treatment. The startup method of the ultrapure water manufacturing device described in claim 1 or 2, It further has: After the aforementioned separation step, a water treatment step of starting water supply along the aforementioned flow path until obtaining ultrapure water meeting the desired manufacturing specifications is performed. The method for starting an ultrapure water production device according to any one of claims 1 to 3, wherein: The ultrapure water production device further includes a storage tank on the upstream side of the temporarily placed filter device on the flow path, The aforementioned flow path has: a circulation pipeline that returns to the aforementioned storage tank after passing through the aforementioned ultrafiltration membrane device, In the washing, the water supplied by the water is circulated in the circulation line. The method for starting an ultrapure water manufacturing device according to claim 4, wherein: The predetermined period is a period during which the number of cycles calculated based on the water volume and flow rate in the circulation line becomes 0.5 to 2200 times following the start of the washing. The method for starting an ultrapure water production device according to any one of claims 1 to 5, wherein: The aforementioned temporary filtering device has a filtering accuracy for separating particles of 0.2 μm or more. The method for starting an ultrapure water production device according to any one of claims 1 to 6, wherein the ultrafiltration membrane device has a plurality of hollow fiber type modules, and the flow rate of each of the hollow fiber type modules is Above 10m ³ /h. The method for starting an ultrapure water production device according to any one of claims 1 to 7, wherein: For ultrapure water that meets the desired manufacturing specifications, the number of particles with a particle size of 50 nm or more is 200 particles/L or less. An ultrapure water manufacturing device, which is equipped with: The flow path used to let the treated water flow through, An ultrafiltration membrane device installed on the aforementioned flow path and subjecting the aforementioned treated water to water treatment at the front of the point of use, and The filter attachment and detachment mechanism provided in the front stage of the ultrafiltration membrane device on the flow path can temporarily attach and detach the filter device to the flow path. The ultrapure water manufacturing device described in claim 9, wherein: The aforementioned temporary filtration device is a microfiltration membrane device. The ultrapure water manufacturing device according to claim 9 or 10, wherein: The aforementioned flow path is constituted by the first pipe, The aforementioned filter attachment and detachment mechanism is provided with a plurality of joints and a first on-off valve, The plurality of joints connect the second pipe to the first pipe in a detachable manner, The second piping constitutes a branched flow path that branches once from the flow path and passes through the temporarily placed filter device to converge on the downstream side of the flow path. The first on-off valve is provided between the branch position and the confluence position on the first pipe. The ultrapure water manufacturing device according to claim 11, wherein: On the second pipe, a pair of second on-off valves are respectively provided before and after the temporary filter device. The ultrapure water manufacturing device according to any one of claims 9 to 12, wherein: A storage tank is further provided on the upstream side of the temporary filtering device on the flow path, The flow path has a circulation line that returns to the storage tank after passing through the ultrafiltration membrane device.

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