TW202032727A - Flip-chip package structure of power chip and packaging method thereof - Google Patents
Flip-chip package structure of power chip and packaging method thereof Download PDFInfo
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本發明是有關於一種功率晶片封裝結構及其封裝方法,且尤其是有關一種使用覆晶封裝方式的功率晶片覆晶封裝結構及其封裝方法。 The present invention relates to a power chip packaging structure and a packaging method thereof, and in particular to a power chip flip-chip packaging structure and a packaging method using flip-chip packaging.
習知的功率晶片封裝結構包含一塑膠殼體、複數接腳及一功率晶片,功率晶片設置在塑膠殼體內部,透過打線方式和接腳電性連接,接腳再外露於塑膠殼體用以和應用電路連接。 The conventional power chip packaging structure includes a plastic shell, a plurality of pins, and a power chip. The power chip is arranged inside the plastic shell and is electrically connected to the pins through wire bonding. The pins are then exposed on the plastic shell for use Connect with application circuit.
然而,此種封裝方式的穩定性不足,且當功率晶片是大功率的晶片時,容易在使用過程中發出大量的熱能,但塑膠殼體的散熱不佳,進而導致功率晶片的壽命減短,雖然目前會在於塑膠殼體上外加散熱鰭片,但其散熱效果仍有限。 However, the stability of this packaging method is insufficient, and when the power chip is a high-power chip, it is easy to emit a large amount of heat during use, but the heat dissipation of the plastic shell is not good, which causes the life of the power chip to be shortened. Although heat dissipation fins are currently added to the plastic shell, the heat dissipation effect is still limited.
有鑑於此,如何有效地增加功率晶片封裝結構的穩定性,遂成相關業者努力的目標。 In view of this, how to effectively increase the stability of the power chip package structure has become the goal of the relevant industry.
本發明提供一種功率晶片覆晶封裝結構及其封裝方法,透過第一引線架及第二引線架的配置,可以有效地增加電性的穩定性,並且使功率晶片覆晶封裝結構更方便於後續電路的安裝。 The present invention provides a power chip flip chip packaging structure and a packaging method thereof. Through the configuration of the first lead frame and the second lead frame, electrical stability can be effectively increased, and the power chip flip chip packaging structure is more convenient for follow-up Circuit installation.
依據本發明之一態樣之一實施方式提供一種功率晶片覆晶封裝結構,其包含一第一引線架、一第二引線架及一功率晶片。第一引線架包含一第一本體、至少一第一接腳及至少一第一金屬層,前述至少一第一接腳一體連接於第一本體,前述至少一第一金屬層自第一本體的一內表面延伸至前述至少一第一接腳的複數表面中的至少一表面。第二引線架與第一引線架組接且包含一第二本體、至少一第二接腳及至少一第二金屬層,前述至少一第二接腳一體連接於第二本體,前述至少一第二金屬層自第二本體的一內表面延伸至前述至少一第二接腳的複數表面中的至少一表面。功率晶片位於第一引線架及第二引線架之間且包含一第一晶片表面、至少一第一導電部、一第二晶片表面及至少一第二導電部,第一晶片表面朝向第一引線架,前述至少一第一導電部位於第一晶片表面且與前述至少一第一金屬層電性連接,且前述至少一第一導電部的數量對應前述至少一第一金屬層之數量;第二晶片表面朝向第二引線架,前述至少一第二導電部位於第二晶片表面且與前述至少一第二金屬層電性連接,且前述至少一第二導電部的數量對應前述至少一第二金屬層之數量。其中,第一引線架及第二引線架至少其中之一 包含一凹槽容設功率晶片,第一引線架與第二引線架組接後,至少一第一接腳與至少一第二接腳間隔排列。 An embodiment according to an aspect of the present invention provides a power chip flip-chip package structure, which includes a first lead frame, a second lead frame and a power chip. The first lead frame includes a first body, at least one first pin, and at least one first metal layer. The at least one first pin is integrally connected to the first body. The at least one first metal layer is formed from the first body. An inner surface extends to at least one of the plurality of surfaces of the at least one first pin. The second lead frame is assembled with the first lead frame and includes a second body, at least one second pin, and at least one second metal layer. The at least one second pin is integrally connected to the second body, and the at least one The two metal layers extend from an inner surface of the second body to at least one of the plurality of surfaces of the at least one second pin. The power chip is located between the first lead frame and the second lead frame and includes a first chip surface, at least one first conductive part, a second chip surface, and at least one second conductive part. The first chip surface faces the first lead Frame, the at least one first conductive portion is located on the surface of the first chip and is electrically connected to the at least one first metal layer, and the number of the at least one first conductive portion corresponds to the number of the at least one first metal layer; second The surface of the chip faces the second lead frame, the at least one second conductive portion is located on the surface of the second chip and is electrically connected to the at least one second metal layer, and the number of the at least one second conductive portion corresponds to the at least one second metal The number of layers. Among them, at least one of the first lead frame and the second lead frame The power chip is contained in a groove. After the first lead frame and the second lead frame are assembled, at least one first pin and at least one second pin are arranged at intervals.
藉此,功率晶片的第一導電部的電性可直接傳導至第一接腳,第二導電部的電性可直接傳導至第二接腳,而可減少多次間接電性傳導造成的電性不穩定性。 Thereby, the electrical properties of the first conductive portion of the power chip can be directly conducted to the first pin, and the electrical properties of the second conductive portion can be directly conducted to the second pin, thereby reducing the electrical conductivity caused by multiple indirect electrical conduction. Sexual instability.
依據前述之功率晶片覆晶封裝結構的複數實施例,其中,前述至少一第一接腳的數量可為一,前述至少一第二接腳的數量可為二,且凹槽位於第一本體。或者第一接腳可沿一z軸方向凸伸於第一本體,二第二接腳可沿一y軸方向凸伸於第二本體,第二引線架與第一引線架組接後,第一接腳位於二第二接腳之間且平行排列。或者第一接腳的至少一表面可具有一斜面部連接第一本體的內表面。 According to the foregoing multiple embodiments of the power chip flip chip package structure, the number of the at least one first pin may be one, the number of the at least one second pin may be two, and the groove is located in the first body. Or the first pin can protrude from the first body along a z-axis direction, and the two second pins can protrude from the second body along a y-axis direction. After the second lead frame is assembled with the first lead frame, the first One pin is located between the two second pins and arranged in parallel. Or at least one surface of the first pin may have an inclined surface connected to the inner surface of the first body.
依據前述之功率晶片覆晶封裝結構的複數實施例,可更包含一散熱鰭片,其設置於第一引線架。或者第一引線架可更包含一外金屬層,且第一本體更包含一外表面,其中外金屬層設置於外表面,且外金屬層供散熱鰭片設置。 According to the aforementioned multiple embodiments of the power chip flip-chip package structure, it may further include a heat sink fin disposed on the first lead frame. Or the first lead frame may further include an outer metal layer, and the first body further includes an outer surface, wherein the outer metal layer is disposed on the outer surface, and the outer metal layer is provided for heat dissipation fins.
依據本發明之一態樣之另一實施方式提供一種功率晶片覆晶封裝方法,應用於前述功率晶片覆晶封裝結構,功率晶片覆晶封裝方法包含一功率晶片植入步驟、一組裝步驟及一防水步驟。功率晶片植入步驟是設置至少一第二導電材料於第二引線架的前述至少一第二金屬層,固接功率晶片於前述至少一第二金屬層上,使前述至少一第二導電部透過前述至少一第二導電材料與前述至少一第二金屬層電性連接。組裝步驟是設置至少一第一導電材料於功率晶片的前述 至少一第一導電部,組裝第一引線架,使前述至少一第一導電部透過前述至少一第一導電材料與前述至少一第一金屬層電性連接。防水步驟是以一絕緣防水膠材密合第一引線架與第二引線架間的一縫隙。 Another embodiment according to one aspect of the present invention provides a power chip flip chip packaging method, which is applied to the aforementioned power chip flip chip packaging structure. The power chip flip chip packaging method includes a power chip implantation step, an assembly step, and a Waterproof step. The power chip implantation step is to set at least one second conductive material on the at least one second metal layer of the second lead frame, and fix the power chip on the at least one second metal layer so that the at least one second conductive portion can pass through The aforementioned at least one second conductive material is electrically connected to the aforementioned at least one second metal layer. The assembly step is to install at least one first conductive material on the aforementioned power chip At least one first conductive part is assembled with a first lead frame so that the at least one first conductive part is electrically connected to the at least one first metal layer through the at least one first conductive material. The waterproofing step is to tightly seal a gap between the first lead frame and the second lead frame with an insulating and waterproof glue material.
依據前述之功率晶片覆晶封裝方法的複數實施例,其中,於功率晶片植入步驟中,前述至少一第二導電材料可為一錫膏、一銀膏、一導電膠或一金球,加熱使前述至少一第二導電材料固接於功率晶片及前述至少一第二金屬層之間。或者,於組裝步驟中,前述至少一第一導電材料可為一錫膏、一銀膏、一導電膠或一金球,加熱使前述至少一第一導電材料固接於功率晶片及前述至少一第一金屬層之間。 According to the foregoing multiple embodiments of the power chip flip-chip packaging method, in the power chip implantation step, the at least one second conductive material may be a solder paste, a silver paste, a conductive glue or a gold ball, and heat The at least one second conductive material is fixed between the power chip and the at least one second metal layer. Alternatively, in the assembling step, the at least one first conductive material may be a solder paste, a silver paste, a conductive glue or a gold ball, and the heating causes the at least one first conductive material to be fixed to the power chip and the at least one Between the first metal layer.
100‧‧‧功率晶片覆晶封裝結構 100‧‧‧Power Chip Flip Chip Package Structure
200‧‧‧第一引線架 200‧‧‧First lead frame
210‧‧‧第一本體 210‧‧‧First Body
211‧‧‧內表面 211‧‧‧Inner surface
220‧‧‧第一接腳 220‧‧‧First pin
2211‧‧‧斜面部 2211‧‧‧Slanted face
230‧‧‧第一金屬層 230‧‧‧First metal layer
240‧‧‧凹槽 240‧‧‧Groove
300‧‧‧第二引線架 300‧‧‧Second Lead Frame
310‧‧‧第二本體 310‧‧‧Second Body
311‧‧‧內表面 311‧‧‧Inner surface
320_1、320_2‧‧‧第二接腳 320_1, 320_2‧‧‧Second pin
330_1、330_2‧‧‧第二金屬層 330_1, 330_2‧‧‧Second metal layer
400‧‧‧功率晶片 400‧‧‧Power chip
410‧‧‧第一晶片表面 410‧‧‧First chip surface
411‧‧‧第一導電部 411‧‧‧The first conductive part
420‧‧‧第二晶片表面 420‧‧‧Second chip surface
421、422‧‧‧第二導電部 421, 422‧‧‧Second conductive part
511‧‧‧第一導電材料 511‧‧‧First conductive material
512‧‧‧第二導電材料 512‧‧‧Second conductive material
700‧‧‧功率晶片覆晶封裝方法 700‧‧‧Power chip flip chip packaging method
710‧‧‧功率晶片植入步驟 710‧‧‧Power chip implantation steps
720‧‧‧組裝步驟 720‧‧‧Assembly steps
730‧‧‧防水步驟 730‧‧‧Waterproof steps
100a‧‧‧功率晶片覆晶封裝結構 100a‧‧‧Power chip flip chip package structure
200a‧‧‧第一引線架 200a‧‧‧First lead frame
300a‧‧‧第二引線架 300a‧‧‧Second Lead Frame
212a‧‧‧外表面 212a‧‧‧Outer surface
250a‧‧‧外金屬層 250a‧‧‧Outer metal layer
600a‧‧‧散熱鰭片 600a‧‧‧Radiating Fins
x、y、z‧‧‧軸方向 x, y, z‧‧‧axis direction
第1圖繪示依照本發明一實施例之一種功率晶片覆晶封裝結構的立體示意圖;第2圖繪示第1圖之功率晶片覆晶封裝結構的爆炸示意圖;第3圖繪示第1圖之功率晶片覆晶封裝結構沿割面線3-3的剖視示意圖;第4圖繪示第1圖之功率晶片覆晶封裝結構沿割面線4-4的剖視示意圖;第5圖繪示依照本發明另一實施例之一種功率晶片覆晶封裝結構的側視示意圖;以及 第6圖繪示依照本發明又一實施例之一種功率晶片覆晶封裝方法的步驟流程圖。 Figure 1 shows a three-dimensional schematic diagram of a power chip flip chip package structure according to an embodiment of the present invention; Figure 2 shows an exploded schematic diagram of the power chip flip chip package structure of Figure 1; Figure 3 shows Figure 1 A schematic cross-sectional view of the power-on-chip flip-chip package structure along cutting line 3-3; Fig. 4 shows a schematic cross-sectional view of the power-on-chip flip chip package structure of Fig. 1 along cutting line 4-4; Shows a schematic side view of a flip chip package structure of a power chip according to another embodiment of the present invention; and FIG. 6 shows a flow chart of a method for flip-chip packaging of a power chip according to another embodiment of the present invention.
以下將參照圖式說明本發明之實施例。為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,閱讀者應瞭解到,這些實務上的細節不應用以限制本發明。也就是說,在本發明部分實施例中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式繪示;並且重複之元件將可能使用相同的編號或類似的編號表示。 Hereinafter, embodiments of the present invention will be described with reference to the drawings. For the sake of clarity, many practical details will be explained in the following description. However, the reader should understand that these practical details should not be used to limit the present invention. That is to say, in some embodiments of the present invention, these practical details are unnecessary. In addition, for the sake of simplification of the drawings, some conventionally used structures and elements will be drawn in a simple schematic manner in the drawings; and repeated elements may be represented by the same number or similar numbers.
此外,本文中當某一元件(或機構或模組等)「連接」、「設置」或「耦合」於另一元件,可指所述元件是直接連接、直接設置或直接耦合於另一元件,亦可指某一元件是間接連接、間接設置或間接耦合於另一元件,意即,有其他元件介於所述元件及另一元件之間。而當有明示某一元件是「直接連接」、「直接設置」或「直接耦合」於另一元件時,才表示沒有其他元件介於所述元件及另一元件之間。而第一、第二、第三等用語只是用來描述不同元件或成分,而對元件/成分本身並無限制,因此,第一元件/成分亦可改稱為第二元件/成分。且本文中之元件/成分/機構/模組之組合非此領域中之一般周知、常規或習知之組合,不能以元件/成分/機構/模組本身是否為習知,來判定其組合關係是否容易被技術領域中之通常知識者輕易完成。 In addition, when a component (or mechanism or module, etc.) is “connected”, “configured” or “coupled” to another component in this document, it can mean that the component is directly connected, directly disposed, or directly coupled to another component It can also mean that an element is indirectly connected, indirectly disposed, or indirectly coupled to another element, that is, there are other elements between the element and another element. When it is clearly stated that a certain element is "directly connected", "directly arranged" or "directly coupled" to another element, it means that no other element is between the element and another element. The terms first, second, third, etc. are only used to describe different elements or components, and there are no restrictions on the elements/components themselves. Therefore, the first element/component can also be referred to as the second element/component. And the combination of components/components/mechanisms/modules in this article is not a combination of general well-known, conventional or conventional in this field. It cannot be judged whether the combination relationship is based on whether the component/component/mechanism/module itself is conventional It can be easily completed by ordinary knowledgeable persons in the technical field.
請參閱第1圖、第2圖、第3圖及第4圖,其中第1圖繪示依照本發明一實施例之一種功率晶片覆晶封裝結構100的立體示意圖,第2圖繪示第1圖之功率晶片覆晶封裝結構100的爆炸示意圖,第3圖繪示第1圖之功率晶片覆晶封裝結構100沿割面線3-3的剖視示意圖,第4圖繪示第1圖之功率晶片覆晶封裝結構100沿割面線4-4的剖視示意圖。功率晶片覆晶封裝結構100包含一第一引線架200、一第二引線架300及一功率晶片400。
Please refer to FIG. 1, FIG. 2, FIG. 3, and FIG. 4. In which, FIG. 1 shows a three-dimensional schematic diagram of a power chip flip
第一引線架200包含一第一本體210、一第一接腳220及一第一金屬層230,第一接腳220一體連接於第一本體210,第一金屬層230自第一本體210的一內表面211延伸至第一接腳220的複數表面(未標示)中的至少一表面。第二引線架300與第一引線架200組接且包含一第二本體310、二第二接腳320_1、320_2及二第二金屬層330_1、330_2,第二接腳320_1、320_2一體連接於第二本體310,第二金屬層330_1、330_2自第二本體310的一內表面311延伸至第二接腳320_1、320_2的複數表面(未標示)中的至少一表面。
The
功率晶片400位於第一引線架200及第二引線架300之間且包含一第一晶片表面410、一第一導電部411、一第二晶片表面420及二第二導電部421、422,第一晶片表面410朝向第一引線架200,第一導電部411位於第一晶片表面410且與第一金屬層230電性連接;第二晶片表面420朝向第二引線架300;二第二導電部421、422位於第
二晶片表面420且分別與第二金屬層330_1、330_2電性連接。其中,第一引線架200及第二引線架300至少其中之一包含一凹槽240容設功率晶片400(本實施例中,第一引線架200包含凹槽240,凹槽240位於第一本體210),第一引線架200與第二引線架300組接後,第一接腳220與二第二接腳320_1、320_2間隔排列。
The
在此要特別說明的是,雖然第1圖至第4圖中,第一接腳220的數量為一、第二接腳320_1、320_2的數量為二、第一導電部411的數量為一、第二導電部421、422的數量為二,但在其他實施例中,第一接腳的數量、第二接腳的數量、第一導電部的數量及第二導電部的數量均至少為一,且第一導電部的數量對應第一金屬層之數量,第二導電部的數量對應第二金屬層之數量,凹槽亦可置於第二引線架,不以圖示揭露為限。
It should be particularly noted here that although the number of
藉此,功率晶片400的第一導電部411的電性可直接傳導至第一接腳220,二第二導電部421、422的電性可直接傳導至二第二接腳320_1、320_2,而可減少多次間接電性傳導造成的電性不穩定性。後面將更詳細地說明功率晶片覆晶封裝結構100的細節。
Thereby, the electrical properties of the first
功率晶片400示例性為一絕緣柵雙極電晶體(Insulated Gate Bipolar Transistor,IGBT)晶片,其一側具有射極(emitter)與閘極(gate),另一側具有集極(collector),也就是說,如第2圖所示,功率晶片400的第一晶片表面410上的第一導電部411表示集極,第二晶片表面420上的二第二導
電部421、422分別表示閘極與射極。功率晶片亦可以是大功率的金氧半場效電晶體(Metal-Oxide-Semiconductor Field Effect Transistor,MOSFET),包含上述揭露但不以此為限。
The
第一引線架200及第二引線架300可以是陶瓷材料製成,第一金屬層230及第二金屬層330_1、330_2可以是以印刷方式或電鍍技術分別形成於第一本體210的內表面211及第二本體310的內表面311,不限於此。
The
第一接腳220可沿一z軸方向凸伸於第一本體210,二第二接腳320_1、320_2可沿一y軸方向凸伸於第二本體310,第二引線架300與第一引線架200組接後,第一接腳220位於二第二接腳320_1、320_2之間且平行排列。仔細而言,y軸方向、x軸方向、z軸方向彼此垂直,第一本體210在成型時即一體連接第一接腳220,第二本體310在成型時即一體連接第二接腳320_1、320_2,且第二本體310及二第二接腳320_1、320_2排列形成一凹口(未標示),當第二引線架300與第一引線架200組接時,第一接腳220凸入凹口,而可以與二第二接腳320_1、320_2沿x軸方向平行排列。
The
在其他實施例中,亦可以是依第一接腳、第一個第二接腳、第二個第二接腳的順序沿x軸方向平行排列,或是當第一接腳的數目為二,第二接腳的數目為一時,排列方式為第二接腳置於二第一接腳之間,可視功率晶片上第一導電部及第二導電部的數目及位置關係對應之配置,不以上述揭露為限。 In other embodiments, it can also be arranged in parallel along the x-axis in the order of the first pin, the first second pin, and the second second pin, or when the number of first pins is two , When the number of second pins is one, the arrangement is that the second pin is placed between the two first pins, depending on the configuration of the number and position relationship of the first conductive part and the second conductive part on the power chip. Subject to the above disclosure.
較佳地,第一接腳220的至少一表面可具有一斜面部2211連接第一本體210的內表面211,透過此斜面部2211的配置,可以更有利於以印刷方式或電鍍方式形成第一金屬層230。而當凹槽240設置於第一本體210時,第一本體210的內表面211可包含槽底面區(未標示)及槽側面區(未標示),槽側面區連接槽底面區以環繞形成具有容置空間的凹槽240,第一金屬層230可以是由槽底面區延伸至斜面部2211,且更佳地,鄰近第一接腳220的槽側面區亦可以呈傾斜配置,而更有利於第一金屬層230的形成。
Preferably, at least one surface of the
在本實施例中,各第二接腳320_1、320_2包含與第二本體310的內表面311位於同一側的表面、朝向凹口的表面以及與內表面311位於相反側的表面,且第二接腳320_1、320_2的上述三個表面上均分別設有第二金屬層330_1、330_2。也就是說,第二金屬層330_1、330_2由內表面311的一側電性延伸至相反於內表面311的一側,而使得第二金屬層330_1、330_2與第一金屬層230位於同一側,進而有助於後續之應用,但在其他實例中,亦可以是第一接腳、第二接腳的各面均分別設置第一金屬層及第二金屬層,不限於此。
In this embodiment, each second pin 320_1, 320_2 includes a surface on the same side as the
第一接腳220與第一導電部411透過第一金屬層230直接電性連接,第二接腳320_1、320_2與第二導電部421、422分別透過第二金屬層330_1、330_2直接電性連接,因此當功率晶片覆晶封裝結構100應用於其他電路板時,可在讓第一接腳220上的第一金屬層230及第二接腳
320_1、320_2上的第二金屬層330_1、330_2透過焊錫直接電性連接於電路板,可有效避免間接電性連接造成之電性不穩定。
The
請參閱第5圖,其中第5圖繪示依照本發明另一實施例之一種功率晶片覆晶封裝結構100a的側視示意圖。功率晶片覆晶封裝結構100a的結構與第1圖至第4圖的功率晶片覆晶封裝結構100類似,其包含第一引線架200a及第二引線架300a。而功率晶片覆晶封裝結構100a可更包含一散熱鰭片600a,其設置於第一引線架200a。
Please refer to FIG. 5, where FIG. 5 is a schematic side view of a power chip flip-
更仔細地說,第一引線架200a可更包含一外金屬層250a,且第一本體(未標示)更包含一外表面212a,其中外金屬層250a設置於外表面212a,且外金屬層250a供散熱鰭片600a設置。散熱鰭片600a可增加功率晶片400的散熱效果,且第一引線架200a的第一本體在製作時可預留固定螺絲孔或帶牙螺絲孔,以方便散熱鰭片600a的安裝。
More specifically, the
請參閱第6圖,並請一併參閱第1圖至第4圖,其中第6圖繪示依照本發明又一實施例之一種功率晶片覆晶封裝方法700的步驟流程圖。功率晶片覆晶封裝方法700應用於功率晶片覆晶封裝結構100,功率晶片覆晶封裝方法700包含一功率晶片植入步驟710、一組裝步驟720及一防水步驟730。
Please refer to FIG. 6, and also refer to FIG. 1 to FIG. 4, wherein FIG. 6 is a flowchart of a power chip flip-
功率晶片植入步驟710是設置二第二導電材料512於第二引線架300的第二金屬層330_1、330_2,固接功率晶片400於第二金屬層330_1、330_2上,使第二導電部421、422透過二第二導電材料512分別與第二金屬層
330_1、330_2電性連接。在此要特別說明的是,雖然第1圖至第4圖中僅繪示一第二導電材料512位於第二金屬層330_1,然閱讀者可知,另一第二導電材料512是位於第二金屬層330_2上,僅因為剖面位置而不可見,不以此限制本發明。
The power
組裝步驟720是設置第一導電材料511於功率晶片400的第一導電部411,組裝第一引線架200,使第一導電部411透過第一導電材料511與第一金屬層230電性連接。
In the
防水步驟730是以一絕緣防水膠材(未繪示)密合第一引線架200與第二引線架300間的一縫隙。
The
其中,於功率晶片植入步驟710中,第二導電材料512可為一錫膏、一銀膏、一導電膠或一金球,加熱使二第二導電材料512分別固接於功率晶片400及第二金屬層330_1、330_2之間。或者,於組裝步驟720中,第一導電材料511可為一錫膏、一銀膏、一導電膠或一金球,加熱使第一導電材料511固接於功率晶片400及第一金屬層230之間。
Wherein, in the power
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Anyone who is familiar with this technique can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope shall be subject to those defined in the attached patent scope.
100‧‧‧功率晶片覆晶封裝結構 100‧‧‧Power Chip Flip Chip Package Structure
200‧‧‧第一引線架 200‧‧‧First lead frame
210‧‧‧第一本體 210‧‧‧First Body
211‧‧‧內表面 211‧‧‧Inner surface
220‧‧‧第一接腳 220‧‧‧First pin
2211‧‧‧斜面部 2211‧‧‧Slanted face
230‧‧‧第一金屬層 230‧‧‧First metal layer
240‧‧‧凹槽 240‧‧‧Groove
300‧‧‧第二引線架 300‧‧‧Second Lead Frame
310‧‧‧第二本體 310‧‧‧Second Body
311‧‧‧內表面 311‧‧‧Inner surface
320_1、320_2‧‧‧第二接腳 320_1, 320_2‧‧‧Second pin
330_1、330_2‧‧‧第二金屬層 330_1, 330_2‧‧‧Second metal layer
400‧‧‧功率晶片 400‧‧‧Power chip
410‧‧‧第一晶片表面 410‧‧‧First chip surface
411‧‧‧第一導電部 411‧‧‧The first conductive part
420‧‧‧第二晶片表面 420‧‧‧Second chip surface
421、422‧‧‧第二導電部 421, 422‧‧‧Second conductive part
Claims (9)
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