TW202017665A - Metal filter cleaning method and device - Google Patents

Metal filter cleaning method and device Download PDF

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TW202017665A
TW202017665A TW107139048A TW107139048A TW202017665A TW 202017665 A TW202017665 A TW 202017665A TW 107139048 A TW107139048 A TW 107139048A TW 107139048 A TW107139048 A TW 107139048A TW 202017665 A TW202017665 A TW 202017665A
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metal filter
electrolytic
cleaning
cleaning solution
item
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TW107139048A
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Chinese (zh)
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王俊修
楊順化
陳俊達
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中國鋼鐵股份有限公司
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Abstract

A metal filter cleaning method and device are provided. The metal filter cleaning method includes the steps of: providing an electrolytic cleaning liquid. Immersing a metal filter and a conductive plate in the electrolytic cleaning liquid. And applying a negative voltage to the metal, applying a positive voltage to the conductive plate such that an electrolytic reaction is formed in the electrolytic cleaning liquid. The metal filter is cleaned by the electrolytic reaction. The electrolytic reaction can be formed in the holes of the deep layer of the metal filter. The bubbles generated by the electrolytic reaction can be used to peel off the dirt in the holes of the deep layer of the metal filter, so as to achieve a quick and effective cleaning.

Description

金屬濾心清洗方法及其裝置 Metal filter cleaning method and device

本發明係關於一種濾心清洗方法及其裝置,特別是關於一種金屬濾心清洗方法及其裝置。 The invention relates to a filter element cleaning method and device, in particular to a metal filter element cleaning method and device.

傳統的金屬濾心的清洗方法主要是利用刷毛接觸金屬濾心進行刷洗,例如中華民國公告第M299041號新型專利所揭示之電鍍用濾心清洗機,而傳統利以刷毛刷洗或是以噴水沖洗的方式都只能清洗濾心表面,無法有效清洗濾心中用來過濾的孔洞。此外,上述傳統的清洗方式更無法清洗多層結構濾心的內部,僅能清除濾心的外層結構。 The traditional cleaning method of metal filter is mainly to use the bristles to contact the metal filter for cleaning, such as the filter cleaning machine for electroplating disclosed in the new patent No. M299041 published by the Republic of China, and the traditional brush cleaning or spraying All methods can only clean the surface of the filter core, and cannot effectively clean the holes used for filtering in the filter core. In addition, the above-mentioned traditional cleaning method cannot clean the inside of the multi-layer structure filter element, but can only remove the outer layer structure of the filter element.

為了清洗多層結構濾心的內部及孔洞,由濾心出水口通入清水,提供逆向的水流進行反向清洗,藉此水流的壓力來清洗孔洞及濾心內部的髒污,例如中華民國公告第218489號發明專利所揭示之逆流式之濾清器。然而由於水流會往已經導通的孔洞流動,阻塞嚴重的孔洞不會有水流通過,也無法產生清洗的功效。再加上水流經過多層結構後也沒有足夠的力量清洗內部濾心的表面,因此金屬濾心常有清洗不均的狀況產生,例如部分孔洞依舊阻塞。 In order to clean the inside and holes of the multi-layer filter element, fresh water is passed through the filter outlet to provide reverse water flow for reverse cleaning, and the pressure of the water flow is used to clean the holes and the dirt inside the filter element. The counter-flow filter disclosed in the invention patent No. 218489. However, because the water flow will flow to the holes that have been turned on, the holes that are severely blocked will not pass through the water flow, and cannot have the cleaning effect. In addition, after the water flow passes through the multi-layer structure, there is not enough power to clean the surface of the internal filter element. Therefore, the metal filter element often has uneven cleaning conditions, for example, some holes are still blocked.

故,有必要提供一種金屬濾心清洗方法及其裝置,以解決習用技術所存在的問題 Therefore, it is necessary to provide a metal filter cleaning method and device to solve the problems in the conventional technology

本發明之主要目的在於提供一種金屬濾心清洗方法及其裝置,透過電解原理在金屬濾心的孔洞及內部形成電解反應,透過電解反應所產生的氣泡使髒污從金屬濾心的表面及孔洞中剝離,達到清洗的效果。 The main purpose of the present invention is to provide a method and device for cleaning a metal filter element. An electrolysis reaction is formed in the pores and inside of the metal filter element through the principle of electrolysis, and air bubbles generated through the electrolysis reaction make dirt from the surface and the hole of the metal filter element. Medium peeling to achieve the cleaning effect.

本發明的次要目的在於提供一種金屬濾心清洗方法及其裝置,透過電解原理結合超音波震盪,加強電解清洗液的滲透力,以達成更 有效率的清洗功效。 The secondary objective of the present invention is to provide a metal filter cleaning method and device, which combines the ultrasonic vibration with the principle of electrolysis to enhance the penetration of electrolytic cleaning solution to achieve more Effective cleaning effect.

為了達上述之目的,本發明提供一種金屬濾心清洗方法,其包含步驟:提供一電解清洗液;將一金屬濾心及一導電板浸入該電解清洗液中;及施加一負電壓於該金屬濾心,施加一正電壓於該導電板,使得該電解清洗液內形成一電解反應,並且透過該電解反應清洗該金屬濾心。 In order to achieve the above object, the present invention provides a metal filter cleaning method, which includes the steps of: providing an electrolytic cleaning solution; immersing a metal filter and a conductive plate in the electrolytic cleaning solution; and applying a negative voltage to the metal The filter element applies a positive voltage to the conductive plate, so that an electrolytic reaction is formed in the electrolytic cleaning solution, and the metal filter element is washed through the electrolytic reaction.

在本發明之一實施例中,控制該負電壓與該正電壓之間的電壓差在5V至30V,且控制該電解反應的電流密度在10A/m2至100A/m2In one embodiment of the present invention, the voltage difference between the negative voltage and the positive voltage is controlled to be 5V to 30V, and the current density of the electrolytic reaction is controlled to be 10A/m 2 to 100A/m 2 .

在本發明之一實施例中,在透過該電解反應清洗該金屬濾心的同時,更包含步驟:施加一超音波以震盪該電解清洗液。 In one embodiment of the present invention, while cleaning the metal filter element through the electrolytic reaction, the method further includes the step of applying an ultrasonic wave to oscillate the electrolytic cleaning solution.

在本發明之一實施例中,控制該超音波的頻率在28kHz至125kHz。 In one embodiment of the present invention, the frequency of the ultrasonic wave is controlled to be from 28 kHz to 125 kHz.

在本發明之一實施例中,控制該電解清洗液的工作溫度在25℃至80℃。 In one embodiment of the present invention, the working temperature of the electrolytic cleaning solution is controlled at 25°C to 80°C.

在本發明之一實施例中,該金屬濾心清洗方法可在一負壓環境中實施。 In one embodiment of the present invention, the metal filter cleaning method can be implemented in a negative pressure environment.

在本發明之一實施例中,提供該電解清洗液係以一鹼性溶液作為該電解清洗液。 In one embodiment of the present invention, the electrolytic cleaning solution is provided by using an alkaline solution as the electrolytic cleaning solution.

本發明更提供一種金屬濾心清洗裝置,其包含:一清洗槽,用以容置一電解清洗液;一直流電源,包含一正極及一負極,其中該負極電性連接一金屬濾心,且該金屬濾心浸入該電解清洗液中;及一導電板,電性連接該正極,且該導電板浸入該電解清洗液中。 The invention further provides a metal filter cleaning device, which comprises: a cleaning tank for accommodating an electrolytic cleaning solution; a DC power supply, which comprises a positive electrode and a negative electrode, wherein the negative electrode is electrically connected to a metal filter element, and The metal filter is immersed in the electrolytic cleaning solution; and a conductive plate is electrically connected to the positive electrode, and the conductive plate is immersed in the electrolytic cleaning solution.

在本發明之一實施例中,該金屬濾心清洗裝置更包含:一超音波震盪器,連接該清洗槽,該超音波震盪器用以施加一超音波以震盪該電解清洗液。 In one embodiment of the present invention, the metal filter cleaning device further includes: an ultrasonic oscillator connected to the cleaning tank. The ultrasonic oscillator is used to apply an ultrasonic wave to oscillate the electrolytic cleaning solution.

在本發明之一實施例中,該金屬濾心清洗裝置更包含:一抽氣外罩,罩附該清洗槽進而形成一空間;及一真空泵,連接該抽氣外罩,該真空泵促使該空間形成一負壓環境。 In an embodiment of the present invention, the metal filter cleaning device further includes: a suction cover, the cover is attached to the cleaning tank to form a space; and a vacuum pump, connected to the suction cover, the vacuum pump causes the space to form a Negative pressure environment.

如上所述,本發明以金屬濾心作為電極並且浸泡在電解清洗液中,利用電解原理,在金屬濾心的孔洞及表面形成電解反應,使得電解 清洗液產生氣泡,讓氣泡來剝離孔洞內及表面上的髒污。此外,本發明可以透過超音波震盪幫助電解清洗液滲透髒污或滲透至孔洞中,進而加強剝離髒污的效果。本發明更可以透過在負壓環境中操作、控制電解清洗液工作溫度與維持電解清洗液乾淨的方式,來加強清洗效率。 As described above, the present invention uses a metal filter as an electrode and is immersed in an electrolytic cleaning solution. Using the principle of electrolysis, an electrolytic reaction is formed on the holes and the surface of the metal filter to make electrolysis The cleaning solution generates air bubbles, which allow the air bubbles to peel off dirt in the holes and on the surface. In addition, the invention can help the electrolytic cleaning solution penetrate the dirt or penetrate into the hole through ultrasonic vibration, thereby enhancing the effect of peeling off the dirt. The present invention can further enhance the cleaning efficiency by operating in a negative pressure environment, controlling the working temperature of the electrolytic cleaning solution, and maintaining the cleanness of the electrolytic cleaning solution.

S101~S104‧‧‧步驟 S101~S104‧‧‧Step

1‧‧‧清洗槽 1‧‧‧Cleaning tank

2‧‧‧直流電源 2‧‧‧DC power supply

3‧‧‧金屬濾心 3‧‧‧Metal filter

4‧‧‧導電板 4‧‧‧Conductive plate

5‧‧‧超音波震盪器 5‧‧‧Ultrasonic Oscillator

6‧‧‧抽氣外罩 6‧‧‧Exhaust cover

7‧‧‧空間 7‧‧‧Space

8‧‧‧真空泵 8‧‧‧Vacuum pump

9‧‧‧電解清洗液循環泵 9‧‧‧ Electrolytic cleaning fluid circulation pump

10‧‧‧加熱器 10‧‧‧heater

11‧‧‧電解清洗液 11‧‧‧Electrolytic cleaning solution

21‧‧‧正極 21‧‧‧Positive

22‧‧‧負極 22‧‧‧Negative

91‧‧‧電解清洗液過濾器 91‧‧‧ Electrolytic cleaning fluid filter

第1圖是本發明之金屬濾心清洗方法一實施例的流程圖。 FIG. 1 is a flowchart of an embodiment of the metal filter cleaning method of the present invention.

第2圖是本發明之金屬濾心清洗裝置一實施例的結構示意圖。 FIG. 2 is a schematic structural view of an embodiment of the metal filter cleaning device of the present invention.

為了讓本發明之上述及其他目的、特徵、優點能更明顯易懂,下文將特舉本發明較佳實施例,並配合所附圖式,作詳細說明如下。再者,本發明所提到的方向用語,例如上、下、頂、底、前、後、左、右、內、外、側面、周圍、中央、水平、橫向、垂直、縱向、軸向、徑向、最上層或最下層等,僅是參考附加圖式的方向。因此,使用的方向用語是用以說明及理解本發明,而非用以限制本發明。 In order to make the above and other objects, features, and advantages of the present invention more comprehensible, the preferred embodiments of the present invention will be specifically described below in conjunction with the accompanying drawings, which will be described in detail below. Furthermore, the terms of direction mentioned in the present invention, such as up, down, top, bottom, front, back, left, right, inner, outer, side, surrounding, center, horizontal, horizontal, vertical, longitudinal, axial, The radial direction, the uppermost layer or the lowermost layer, etc., are only the directions referring to the attached drawings. Therefore, the directional terminology is used to illustrate and understand the present invention, not to limit the present invention.

請參照第1圖,本發明之金屬濾心清洗方法的一實施例包含包含:步驟S101,提供一電解清洗液,而所提供的該電解清洗液可以是一鹼性溶液。該電解清洗液的PH值在10~13之間。該電解清洗液可以依照該金屬濾心上髒污的不同而更換調整。此外,更可以保持該電解清洗液的工作溫度在25℃至80℃之間,用以提高電解反應的效果。 Referring to FIG. 1, an embodiment of the metal filter cleaning method of the present invention includes: Step S101, providing an electrolytic cleaning solution, and the electrolytic cleaning solution provided may be an alkaline solution. The pH value of the electrolytic cleaning solution is between 10 and 13. The electrolytic cleaning solution can be replaced and adjusted according to the different dirt on the metal filter. In addition, the working temperature of the electrolytic cleaning solution can be kept between 25°C and 80°C to improve the effect of the electrolytic reaction.

步驟S102,將一金屬濾心及一導電板浸入該電解清洗液中,其中該金屬濾心具有多層結構,而該導電板可以由金屬所製成,例如鋼材。該導電板更可以以不鏽鋼為材料,藉此避免該導電板在電解反應中產生鏽蝕,進而污染該電解清洗液。 In step S102, a metal filter element and a conductive plate are immersed in the electrolytic cleaning solution, wherein the metal filter element has a multi-layer structure, and the conductive plate can be made of metal, such as steel. The conductive plate can also be made of stainless steel, thereby avoiding corrosion of the conductive plate during the electrolytic reaction, thereby contaminating the electrolytic cleaning solution.

步驟S103,施加一負電壓於該金屬濾心,施加一正電壓於該導電板,使得該電解清洗液內形成一電解反應,其中可以控制該負電壓與該正電壓之間的電壓差在5V至30V之間,並且控制該電解反應的電流密度在10A/m2至100A/m2之間。透過電壓差及電流密度的調配可以控制電解反應的速度,進而調整金屬濾心的清洗效率。避免電解反應過程中氣泡 產生過快(反應太過劇烈),使得該金屬濾心的孔洞受損。此外,電壓差及電流密度的調配也可以讓該電解反應產生細緻的氣泡,避免氣泡過大而無法清洗該機屬濾心的中的微小孔洞 Step S103, a negative voltage is applied to the metal filter element, and a positive voltage is applied to the conductive plate, so that an electrolytic reaction is formed in the electrolytic cleaning solution, wherein the voltage difference between the negative voltage and the positive voltage can be controlled at 5V To 30V, and the current density of the electrolysis reaction is controlled between 10A/m 2 and 100A/m 2 . Through the adjustment of voltage difference and current density, the speed of electrolytic reaction can be controlled, and then the cleaning efficiency of the metal filter can be adjusted. To avoid that the bubbles are generated too quickly during the electrolysis reaction (the reaction is too violent), so that the holes of the metal filter are damaged. In addition, the adjustment of the voltage difference and the current density can also produce fine bubbles in the electrolytic reaction, to avoid the bubbles being too large to clean the tiny holes in the filter element of the machine

步驟S104,施加一超音波以震盪該電解清洗液,其中可以控制該超音波的頻率在28kHz至125kHz。由於該金屬濾心上的髒污可能累積相當的厚度,再加上該金屬濾心上用來過濾的孔洞可能相當微小,該電解清洗液要完全浸潤髒污或是滲透到每個孔洞中可能需要花費斷時間。藉由超音波震盪可以幫助該電解清洗液滲透髒污或者是更快速地滲透至該金屬濾心的每個孔洞中,進而加強剝離髒污的效果。 In step S104, an ultrasonic wave is applied to oscillate the electrolytic cleaning solution, wherein the frequency of the ultrasonic wave can be controlled from 28 kHz to 125 kHz. Since the dirt on the metal filter element may accumulate a considerable thickness, and the holes used for filtering on the metal filter element may be quite small, the electrolytic cleaning solution may completely infiltrate the dirt or penetrate into each hole. It takes time. Ultrasonic vibration can help the electrolytic cleaning solution penetrate the dirt or penetrate into each hole of the metal filter faster, thereby enhancing the effect of peeling off the dirt.

此外,該金屬濾心清洗方法的步驟S101至步驟S104可以在一負壓環境中實施。可以利用脫氣或真空原理形成該負壓環境,而該負壓環境有利於該電解反應中所產生的氣體排出。藉此,增加超音波震盪的力道,提高剝離髒污的能力。 In addition, steps S101 to S104 of the metal filter cleaning method can be implemented in a negative pressure environment. The negative pressure environment can be formed using the principle of degassing or vacuum, and the negative pressure environment facilitates the discharge of the gas generated in the electrolytic reaction. In this way, the force of ultrasonic vibration is increased, and the ability to strip dirt is improved.

請參照第2圖,本發明更提供了一種金屬濾心清洗裝置,可以搭配上述金屬濾心清洗方法操作。該金屬濾心清洗裝置包含:一清洗槽1、一直流電源2、一導電板4、一超音波震盪器5、一抽氣外罩6及一真空泵8。 Please refer to FIG. 2, the present invention further provides a metal filter cleaning device, which can be operated in conjunction with the above metal filter cleaning method. The metal filter cleaning device includes: a cleaning tank 1, a DC power supply 2, a conductive plate 4, an ultrasonic oscillator 5, a suction cover 6 and a vacuum pump 8.

該清洗槽1,用以容置一電解清洗液11。其中該電解清洗液可以是一鹼性溶液。該電解清洗液的PH值可以在10~13之間。 The cleaning tank 1 is used for containing an electrolytic cleaning solution 11. The electrolytic cleaning solution may be an alkaline solution. The pH value of the electrolytic cleaning solution can be between 10 and 13.

該直流電源2包含一正極21及一負極22,其中該負極22電性連接一金屬濾心3,且該金屬濾心3浸入該電解清洗液11中。該直流電源至少可以該正極21與該負極22之間提供5V至30V的電壓差,也可以控制該電解反應的電流密度維持在10A/m2至100A/m2之間。該金屬濾心3可以具有多層結構,例如五層式金屬燒結網。該金屬濾心3可以具有許多用來過濾的微小孔洞,而該金屬濾心3的過濾精度可以小於10微米,例如1微米。 The DC power supply 2 includes a positive electrode 21 and a negative electrode 22, wherein the negative electrode 22 is electrically connected to a metal filter element 3, and the metal filter element 3 is immersed in the electrolytic cleaning solution 11. The DC power supply can provide at least a voltage difference of 5V to 30V between the positive electrode 21 and the negative electrode 22, and can also control the current density of the electrolytic reaction to be maintained between 10A/m 2 and 100A/m 2 . The metal filter element 3 may have a multi-layer structure, such as a five-layer metal sintered mesh. The metal filter element 3 may have many tiny holes for filtering, and the filtering accuracy of the metal filter element 3 may be less than 10 microns, such as 1 micron.

該導電板4電性連接該正極21,且該導電板4浸入該電解清洗液11中。該導電板4可以由金屬所製成,例如鋼材。該導電板更可以以不鏽鋼為材料,例如304不銹鋼,藉此避免該導電板4在該電解反應的 過程中產生鏽蝕,進而污染該電解清洗液11。 The conductive plate 4 is electrically connected to the positive electrode 21, and the conductive plate 4 is immersed in the electrolytic cleaning solution 11. The conductive plate 4 may be made of metal, such as steel. The conductive plate can also be made of stainless steel, for example, 304 stainless steel, thereby avoiding the conductive plate 4 in the electrolytic reaction Corrosion occurs during the process, which in turn contaminates the electrolytic cleaning solution 11.

該超音波震盪器5連接該清洗槽1,該超音波震盪器5用以施加一超音波(未繪示)以震盪該電解清洗液11。該超音波震盪器5可以提供頻率在28kHz至125kHz之間的超音波。該超音波震盪器5也可以與該清洗槽1整合為一,如常見的超音波清洗槽。 The ultrasonic oscillator 5 is connected to the cleaning tank 1. The ultrasonic oscillator 5 is used to apply an ultrasonic wave (not shown) to oscillate the electrolytic cleaning solution 11. The ultrasonic oscillator 5 can provide ultrasonic waves with a frequency between 28 kHz and 125 kHz. The ultrasonic oscillator 5 can also be integrated with the cleaning tank 1, such as a common ultrasonic cleaning tank.

該抽氣外罩6罩附該清洗槽1進而形成一空間7。該真空泵8連接該抽氣外罩6,該真空泵8促使該空間7形成一負壓環境。該空間7可以是一密閉空間,透過該真空泵8對該空間抽氣進而形成該負壓環境。應該理解的是,也可以利用其他原理形成該負壓環境也是可以應用於本發明中。 The suction outer cover 6 is attached to the cleaning tank 1 to form a space 7. The vacuum pump 8 is connected to the suction casing 6, and the vacuum pump 8 causes the space 7 to form a negative pressure environment. The space 7 may be a closed space, and the space is drawn through the vacuum pump 8 to form the negative pressure environment. It should be understood that other principles can also be used to form the negative pressure environment and can also be applied to the present invention.

如上所述之該金屬濾心清洗裝置還可以包含一電解清洗液循環泵9、加熱器10及一電解清洗液過濾器91。該電解清洗液循環泵9搭配該電解清洗液過濾器91可以過濾洗在清洗過程中所剝離的髒污,保持該電解清洗液11潔淨,維持穩定的清洗效率。該加熱器10使該電解清洗液11的工作溫度保持在25℃至80℃之間。 As described above, the metal filter cleaning device may further include an electrolytic cleaning solution circulation pump 9, a heater 10, and an electrolytic cleaning solution filter 91. The electrolytic cleaning solution circulation pump 9 and the electrolytic cleaning solution filter 91 can filter and wash the dirt peeled off during the cleaning process, keep the electrolytic cleaning solution 11 clean, and maintain stable cleaning efficiency. The heater 10 maintains the working temperature of the electrolytic cleaning solution 11 between 25°C and 80°C.

以下利用一實例闡述本發明之金屬濾心清洗方法帶來的優點,當金屬濾心是一種過濾面積為0.1m2的五層金屬燒結網,金屬濾心本身的種量為85克,當金屬濾心用來過濾含有碳微球的瀝青後,金屬濾心的重量變為94克,而金屬濾心呈現黑褐色。利用傳統的刷洗僅能去除最外層結構的碳分子髒污。而利用反向清洗由於含碳分子髒污較重,清洗不均的狀況更為嚴重。 The following uses an example to illustrate the advantages of the metal filter cleaning method of the present invention. When the metal filter is a five-layer metal sintered mesh with a filtering area of 0.1 m 2 , the amount of the metal filter itself is 85 grams. When the metal After the filter element is used to filter pitch containing carbon microspheres, the weight of the metal filter element becomes 94 grams, and the metal filter element appears dark brown. Traditional brushing can only remove the dirt of carbon molecules in the outermost structure. The reverse cleaning is more serious due to the heavy dirt of carbon molecules.

而利用本發明之金屬濾心清洗方法,將過濾後的金屬濾心連接直流電源負極,以不銹鋼304作為正極,以PH值13的氫氧化鈉(NaOH)溶液作為電解清洗液,通入直流電並且維持在電壓差5V及電流密度為20A/m2進行電解反應。同時導入頻率為40kHz的超音波來震盪電解清洗液,並且保持電解清洗液的溫度在65℃,在90kpa的負壓環境中操作清洗方法5分鐘。清洗後,金屬濾心的外觀恢復金屬光澤之外,重量也恢復到85克,而起泡點壓力測試也可回到未過濾前的壓力值,代表金屬濾心的多層結構及孔洞中的髒污已去除。 Using the metal filter cleaning method of the present invention, the filtered metal filter is connected to the negative electrode of the DC power supply, the stainless steel 304 is used as the positive electrode, and the sodium hydroxide (NaOH) solution with a pH value of 13 is used as the electrolytic cleaning solution, and the direct current is passed and Maintain a voltage difference of 5V and a current density of 20A/m 2 for electrolytic reaction. At the same time, ultrasonic waves with a frequency of 40 kHz were introduced to oscillate the electrolytic cleaning solution, and the temperature of the electrolytic cleaning solution was maintained at 65° C., and the cleaning method was operated in a negative pressure environment of 90 kpa for 5 minutes. After cleaning, the appearance of the metal filter is restored to metallic luster, and the weight is restored to 85 grams, and the bubble point pressure test can also return to the pressure value before unfiltering, which represents the multi-layer structure of the metal filter and the dirt in the holes The dirt has been removed.

綜上所述,本發明以金屬濾心作為電極並且浸泡在電解清洗液中,利用電解原理,在金屬濾心的孔洞及表面形成電解反應,使得電解清洗液產生氣泡,讓氣泡來剝離孔洞內及表面上的髒污。此外,本發明可以透過超音波震盪幫助電解清洗液滲透髒污或滲透至孔洞中,進而加強剝離髒污的效果。本發明更可以透過在負壓環境中操作、控制電解清洗液工作溫度與維持電解清洗液乾淨的方式,來加強清洗效率。 In summary, the present invention uses a metal filter as an electrode and is immersed in an electrolytic cleaning solution. Using the principle of electrolysis, an electrolytic reaction is formed on the holes and the surface of the metal filter, so that the electrolytic cleaning solution generates bubbles, and the bubbles are allowed to peel off the holes. And dirt on the surface. In addition, the invention can help the electrolytic cleaning solution penetrate the dirt or penetrate into the hole through ultrasonic vibration, thereby enhancing the effect of peeling off the dirt. The present invention can further enhance the cleaning efficiency by operating in a negative pressure environment, controlling the working temperature of the electrolytic cleaning solution, and maintaining the cleanness of the electrolytic cleaning solution.

雖然本發明已以較佳實施例揭露,然其並非用以限制本發明,任何熟習此項技藝之人士,在不脫離本發明之精神和範圍內,當可作各種更動與修飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the present invention has been disclosed in preferred embodiments, it is not intended to limit the present invention. Anyone who is familiar with this skill can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the present invention The scope of protection shall be as defined in the scope of the attached patent application.

S101~S104‧‧‧步驟 S101~S104‧‧‧Step

Claims (10)

一種金屬濾心清洗方法,其包含步驟:提供一電解清洗液;將一金屬濾心及一導電板浸入該電解清洗液中;及施加一負電壓於該金屬濾心,施加一正電壓於該導電板,使得該電解清洗液內形成一電解反應,並且透過該電解反應清洗該金屬濾心。 A metal filter cleaning method includes the steps of: providing an electrolytic cleaning solution; immersing a metal filter and a conductive plate in the electrolytic cleaning solution; and applying a negative voltage to the metal filter and applying a positive voltage to the The conductive plate makes an electrolytic reaction form in the electrolytic cleaning solution, and cleans the metal filter element through the electrolytic reaction. 如申請專利範圍第1項所述之金屬濾心清洗方法,其中控制該負電壓與該正電壓之間的電壓差在5V至30V,且控制該電解反應的電流密度在10A/m2至I00A/m2The metal filter cleaning method as described in item 1 of the patent application range, wherein the voltage difference between the negative voltage and the positive voltage is controlled at 5V to 30V, and the current density of the electrolytic reaction is controlled at 10A/m 2 to I00A /m 2 . 如申請專利範圍第1項所述之金屬濾心清洗方法,其中在透過該電解反應清洗該金屬濾心的同時,更包含步驟:施加一超音波以震盪該電解清洗液。 The metal filter cleaning method as described in item 1 of the patent application scope, wherein while cleaning the metal filter through the electrolytic reaction, the method further includes the step of applying an ultrasonic wave to oscillate the electrolytic cleaning solution. 如申請專利範圍第3項所述之金屬濾心清洗方法,其中控制該超音波的頻率在28kHz至125kHz。 The metal filter cleaning method as described in item 3 of the patent application range, wherein the frequency of the ultrasonic wave is controlled from 28 kHz to 125 kHz. 如申請專利範圍第1項所述之金屬濾心清洗方法,其中控制該電解清洗液的工作溫度在25℃至80℃。 The metal filter cleaning method as described in item 1 of the patent application scope, wherein the working temperature of the electrolytic cleaning liquid is controlled at 25°C to 80°C. 如申請專利範圍第1項所述之金屬濾心清洗方法,其中該金屬濾心清洗方法可在一負壓環境中實施。 The metal filter cleaning method as described in item 1 of the patent application scope, wherein the metal filter cleaning method can be implemented in a negative pressure environment. 如申請專利範圍第1項所述之金屬濾心清洗方法,其中提供該電解清洗液係以一鹼性溶液作為該電解清洗液。 The metal filter cleaning method as described in item 1 of the patent application scope, wherein the electrolytic cleaning solution is provided by using an alkaline solution as the electrolytic cleaning solution. 一種金屬濾心清洗裝置,其包含:一清洗槽,用以容置一電解清洗液;一直流電源,包含一正極及一負極,其中該負極電性連接一 金屬濾心,且該金屬濾心浸入該電解清洗液中;及一導電板,電性連接該正極,且該導電板浸入該電解清洗液中。 A metal filter cleaning device includes: a cleaning tank for accommodating an electrolytic cleaning solution; a DC power supply, including a positive electrode and a negative electrode, wherein the negative electrode is electrically connected to a A metal filter element, and the metal filter element is immersed in the electrolytic cleaning solution; and a conductive plate electrically connected to the positive electrode, and the conductive plate is immersed in the electrolytic cleaning solution. 如申請專利範圍第8項所述之金屬濾心清洗裝置,更包含:一超音波震盪器,連接該清洗槽,該超音波震盪器用以施加一超音波以震盪該電解清洗液。 The metal filter cleaning device as described in item 8 of the patent application scope further includes: an ultrasonic oscillator connected to the cleaning tank, and the ultrasonic oscillator is used to apply an ultrasonic wave to oscillate the electrolytic cleaning solution. 如申請專利範圍第8項所述之金屬濾心清洗裝置,更包含:一抽氣外罩,罩附該清洗槽進而形成一空間;及一真空泵,連接該抽氣外罩,該真空泵促使該空間形成一負壓環境。 The metal filter cleaning device as described in item 8 of the scope of the patent application further includes: a suction cover, the cover is attached to the cleaning tank to form a space; and a vacuum pump connected to the suction cover, the vacuum pump promotes the formation of the space A negative pressure environment.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI808446B (en) * 2021-07-05 2023-07-11 力晶積成電子製造股份有限公司 Wafer cleaning system and wafer cleaning method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI808446B (en) * 2021-07-05 2023-07-11 力晶積成電子製造股份有限公司 Wafer cleaning system and wafer cleaning method

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