TW202005215A - Laser diode surface mounting structure - Google Patents
Laser diode surface mounting structure Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49111—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
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- H—ELECTRICITY
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- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19105—Disposition of discrete passive components in a side-by-side arrangement on a common die mounting substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
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Abstract
Description
本發明係有關一種雷射二極體表面安裝結構,尤其一種使用表面安裝技術(SMT)之邊射型雷射二極體封裝結構,可滿足大電流、高散熱及無熱應力之需求。 The invention relates to a laser diode surface mounting structure, especially a side-emitting laser diode packaging structure using surface mounting technology (SMT), which can meet the requirements of large current, high heat dissipation and no thermal stress.
圖1,包含圖1a及圖1b,所示為現有邊射型中、高功率(指輸出光功率大於50mW)雷射二極體之封裝架構,其中圖1a為雷射二極體晶片結構,圖1b為現有雷射二極體封裝架構。參考圖1a,雷射二極體晶片(laser chip)的結構是以基板(substrate,100)為基礎,然後以各種沈積法將原子堆積在基板上,稱磊晶層(epitaxial layer,101)。對於紅光及近紅外光(0.7~1.1um)的雷射二極體晶片,多為砷化鎵(GaAs)晶體,紅外光(1.1~1.9um)晶片多為磷化銦(InP)晶體,其作用在機械支撐及散熱,厚約0.3mm;磊晶層則是有砷、鎵、銦、磷、鋁等三五族元素組成的半導體化合物,細分有近十層,合計厚度約1um。雷射共振腔(106)是在磊晶層(101)中以光罩蝕刻技術做一個小區域,寬約50um,長約500um,主輸出雷射呈橢圓型光錐射出(107),副輸出雷射方向(108)與主輸出雷 射相反。在基板(100)和磊晶層(101)外面,還要鍍金屬以便導電(圖1(a)未示)。現有雷射二極體封裝架構參考圖1b,晶片以焊接或膠黏固定在能迅速散熱的導熱板(submount,103),導熱板上層有金屬層(105),晶片上方連接跳線(bonding wire,102,金屬導體),跳線連接另一金屬層(109),兩金屬層標註+及-處為銲墊,可供銲接電線(未示出),以供電給晶片。導熱板(103)則緊密接觸封裝之外殼(enclosure,104,多為金屬薄板),一般中功率是用膠黏附外殼,高功率則是導熱板兩片鍍金屬,再焊接於外殼。外殼再緊密接觸一熱沉(heat sink,110,又稱散熱器),以便散熱。在現有架構中,電流要由(105)及(109)標註+及-處另行接導線出入晶片,熱則是產自雷射共振腔,經過導熱板、外殼至熱沈。在熱膨脹係數不一樣的材質接面(例如磊晶層101和導熱板103之間),熱會造成應力扭曲結晶格,原本良好的雷射共振腔(106)的雷射產生效率即大減,對雷射品質及壽命也極為不利,是中高功率雷射必須要克服的技術難關。要實現中高功率邊射型雷射二極體,就必須要同時提供大電流和大散熱能量,要考慮下列三點:1.發熱集中在雷射共振腔(106),必須迅速散熱,而雷射二極體的基板太厚且導熱係數太低,故絕大部份現有產品是以磊晶層(101)貼在能迅速散熱的導熱板(103);2.和磊晶層(101)接觸的導熱板(103),其熱膨脹率最好和磊晶層(101)接近,否則會形成熱應力,扭曲磊晶層(101)的晶格,這樣會雷射共振腔(106)效率和壽命也隨之大減;3.要避免熱應力,也可用很軟的材料介於磊晶層和導熱板之間,例如銦或銀膠,吸收兩者因熱脹冷縮而形成的形變,但這類材料的壽命並不完美,像銦容易氧化變得很硬,而銀膠的導電度並不高,加熱後會產生空洞(void),成為熱和 電流的障礙,二者都無法承受大電流;4.仍有部分熱量會由跳線(102)傳導,跳線若成不對稱分佈在晶片上,也會形成熱應力。 FIG. 1, including FIGS. 1a and 1b, shows a package structure of a conventional edge-emitting medium- and high-power (referred to as an output optical power greater than 50mW) laser diode package, wherein FIG. 1a is a laser diode chip structure, Figure 1b shows the existing laser diode package architecture. Referring to FIG. 1a, the structure of a laser diode chip is based on a substrate (substrate, 100), and then atoms are deposited on the substrate by various deposition methods, called an epitaxial layer (101). For red and near-infrared (0.7~1.1um) laser diode wafers, most of them are gallium arsenide (GaAs) crystals, and infrared (1.1~1.9um) wafers are mostly indium phosphide (InP) crystals. It is used for mechanical support and heat dissipation, and is about 0.3mm thick. The epitaxial layer is a semiconductor compound composed of three or five elements such as arsenic, gallium, indium, phosphorus, and aluminum. It is subdivided into nearly ten layers and has a total thickness of about 1um. The laser resonant cavity (106) is a small area in the epitaxial layer (101) made by photomask etching technology, with a width of about 50um and a length of about 500um. The main output laser is emitted as an elliptical light cone (107), and the auxiliary output The laser direction (108) is opposite to the main output laser. Outside the substrate (100) and the epitaxial layer (101), metal is also plated to conduct electricity (not shown in FIG. 1(a)). The existing laser diode package architecture refers to FIG. 1b. The chip is fixed to the heat dissipation plate (submount, 103) that can quickly dissipate heat by soldering or gluing. The heat transfer plate has a metal layer (105), and a bonding wire (bonding wire) is connected above the chip , 102, metal conductor), the jumper connects to another metal layer (109), and the two metal layers are marked with + and-as pads, which can be used to weld wires (not shown) to supply power to the chip. The thermally conductive plate (103) is in close contact with the enclosure of the package (enclosure, 104, mostly a thin metal plate). Generally, the medium power is to attach the shell with glue, and the high power is to heat the two plates of the thermally conductive plate, and then welded to the shell. The casing is in close contact with a heat sink (heat sink, 110, also known as a heat sink) to dissipate heat. In the existing architecture, the current must be marked with (105) and (109) + and-to connect wires to and out of the chip separately, and the heat is produced from the laser resonator, passing through the heat conducting plate and the shell to the heat sink. At the junction of materials with different thermal expansion coefficients (for example, between the
是以,現有雷射二極體晶片結構,顯然無法同時滿足大電流、高散熱、無熱應力三項需求,而大有改善之空間,進而說明如下: US5825054A是用矽做導熱板,矽雖是半導體可導電,但是導電係數很低,不能和金屬相比。矽的熱導率149W/(m.K)(後文熱導率之單位皆如此,省略),膨脹係數2.6ppm/℃(後文膨脹係數之單位皆如此,省略);而氮化鋁(AlN)的熱導率285,熱膨脹係數4.5,較接近砷化鎵的6.86,磷化銦的4.60,也有更佳的熱導率。導熱是由長長的插件式引腳(lead)傳導,路徑太長,也不可能應用在中高功率(大於100mW)。 Therefore, the existing laser diode chip structure obviously cannot meet the three requirements of high current, high heat dissipation, and no thermal stress at the same time, and there is much room for improvement. The explanation is as follows: US5825054A uses silicon as the heat conducting plate. Semiconductors can conduct electricity, but the conductivity is very low and cannot be compared with metals. The thermal conductivity of silicon is 149W/(m.K) (the units of thermal conductivity are hereinafter omitted, and the expansion coefficient is 2.6ppm/℃ (the units of expansion coefficients are hereinafter omitted, and omitted); and aluminum nitride ( AlN) has a thermal conductivity of 285 and a thermal expansion coefficient of 4.5, which is closer to 6.86 of gallium arsenide and 4.60 of indium phosphide, and also has better thermal conductivity. Heat conduction is conducted by long plug-in leads, and the path is too long to be applied to medium and high power (greater than 100mW).
DE102015114292A1揭露兩個實施例,一是雷射晶片直接放在引腳上,二是用FR4或陶瓷PCB。銅雖是熱與電的良導體,但其膨脹係數16.5與砷化鎵晶體的6.86差異基大,也不可能應用在高功率。US9379517B2也是不用導熱板,同理它不能承載散熱量大的雷射晶片。 DE102015114292A1 discloses two embodiments, one is that the laser chip is placed directly on the pins, and the other is the use of FR4 or ceramic PCB. Although copper is a good conductor of heat and electricity, its coefficient of expansion of 16.5 is very different from that of gallium arsenide crystal of 6.86, so it is impossible to apply it to high power. US9379517B2 also does not use a thermally conductive plate. Similarly, it cannot carry a laser chip with a large heat dissipation.
US9728935把氮化鋁導熱板的上下表面和側面都鍍上金屬,以供電流通過導熱板。然而,在導熱板表面鍍金,其厚度有限,且電流路徑太長,對中高功率並不利。 In US9728935, the upper and lower surfaces and sides of the aluminum nitride heat conduction plate are plated with metal to allow current to pass through the heat conduction plate. However, gold plating on the surface of the heat conductive plate has a limited thickness and a current path that is too long, which is not good for medium and high power.
US8130807提到用鎢銅合金(CuW)做為導熱板,雖然CuW熱膨脹係數(6.5ppm/℃)和砷化鎵接近(6.86ppm/℃),但是它的導熱係數很低(170W/m‧K),不到氮化鋁(2850W/m‧K)的十分之一, 不能用在大功率。 US8130807 mentions the use of tungsten copper alloy (CuW) as a thermally conductive plate. Although the thermal expansion coefficient of CuW (6.5ppm/℃) is close to that of gallium arsenide (6.86ppm/℃), its thermal conductivity is very low (170W/m‧K ), less than one-tenth of aluminum nitride (2850W/m‧K), and cannot be used for high power.
US2018/0062346A1是在於把多個串聯雷射二極體以打線串聯在一起,它的導熱板和習知的氮化鋁基板一樣,上下鍍金,不會上下導電。這樣的結構,導熱板的打線完全在單一側,並不對稱,必然會出現熱應力。 US2018/0062346A1 is to connect multiple laser diodes in series by wire bonding, and its heat conducting plate is the same as the conventional aluminum nitride substrate, which is gold plated up and down, and does not conduct electricity up and down. In this structure, the bonding wires of the heat conduction plate are completely on a single side, and are not symmetrical, and thermal stress will inevitably occur.
因此,在既有各種雷射二極體之封裝結構會遭致如上所述之諸多缺失,本發明即在提出一舉而可解決上述問題之雷射二極體表面安裝結構。 Therefore, in the packaging structure of various existing laser diodes, many defects as described above will be caused. The present invention proposes a laser diode surface mounting structure that can solve the above problems in one fell swoop.
本發明之要旨在提供一種雷射二極體表面安裝結構,可兼顧邊射型雷射二極體發熱集中在雷射共振腔磊晶層必須迅速散熱,與磊晶層接觸的導熱板之熱膨脹率須與磊晶層接近而不致形成熱應力,可以承受大電流,及跳線須具對稱分佈在晶片等重要需求,因而提出一種可同時滿足大電流、高散熱及無熱應力之雷射二極體表面安裝結構,以一舉克服習知技術之缺失及盲點。 The main purpose of the present invention is to provide a surface mounting structure for a laser diode, which can take into account that the edge laser type laser diode heat is concentrated in the laser resonance cavity and the epitaxial layer must be quickly dissipated, and the thermal expansion of the thermally conductive plate in contact with the epitaxial layer The rate must be close to the epitaxial layer without forming thermal stress, which can withstand large currents, and the jumper must be symmetrically distributed on the chip and other important requirements. Therefore, a laser two that can meet high current, high heat dissipation and no thermal stress is proposed. The surface mounting structure of the polar body can overcome the lack of conventional technology and blind spots in one fell swoop.
本發明在另一要旨再提出一種是用於中、高功率之雷射二極體表面安裝結構,可迅速有效地散熱,因而使雷射二極體維持較佳之發光效率,並保有較長之壽命。 The invention further proposes a surface mounting structure for medium and high-power laser diodes, which can quickly and efficiently dissipate heat, thereby maintaining the laser diode with better luminous efficiency and maintaining a longer life.
依據本發明之一種雷射二極體表面安裝結構,包括至少一邊射型雷射二極體晶片,包含具有一陽極及一陰極之兩電極; 一導熱板,具有一上層導電層、一下層導電層及至少一貫穿該上層導電層及該下層導電層之導電體貫孔,用以承載該至少一邊射型雷射二極體晶片之兩電極之一極,該至少一導電體貫孔用以電導通該上層導電層及該下層導電層;二個以上相互間隔且配置於一平面上之金屬板,其中一第一金屬板配置於該導熱板之下方並與該導熱板之下層導電層接觸,一第二金屬板配置於相鄰而隔開於該第一金屬板,該第二金屬板藉由至少一跳線與該兩電極之另一極電連接;以及一具有開口之絕緣框架,設置於該二個以上之金屬板上方,用以固持該等二個以上之金屬板,其中該開口用以供該至少一邊射型雷射二極體晶片發射的雷射光穿過。 A laser diode surface mounting structure according to the present invention includes at least one-sided laser diode chip, including two electrodes having an anode and a cathode; a thermally conductive plate having an upper conductive layer and a lower conductive layer Layer and at least one conductor through-hole penetrating through the upper conductive layer and the lower conductive layer to support one of the two electrodes of the at least one-sided laser diode wafer, the at least one conductor through-hole Electrically conducting the upper conductive layer and the lower conductive layer; two or more metal plates spaced apart from each other and arranged on a plane, wherein a first metal plate is arranged below the thermally conductive plate and is in contact with the underlying conductive layer of the thermally conductive plate , A second metal plate is arranged adjacent to and separated from the first metal plate, the second metal plate is electrically connected to the other electrode of the two electrodes through at least one jumper; and an insulating frame with an opening, The two or more metal plates are arranged above the two or more metal plates for holding the two or more metal plates, wherein the opening is used for the laser light emitted by the at least one side-emitting laser diode chip to pass through.
依據本發明,雷射二極體晶片承載於導熱板之上,導熱板的本體厚度約0.3mm,毋須太厚,其功能一是導熱,二是避免雷射二極體晶片和導熱板之間,因熱膨脹係數不同而產生熱應力。主輸出雷射光束向前發射至封裝外,另有一副輸出雷射光束,其方向與主輸出雷射光束相反,射向一後方的感光二極體,主輸出雷射光束之強度約為副輸出雷射光束之五十倍。導熱板材質以熱導率高且熱膨脹係數接近雷射二極體晶片基板(砷化鎵或磷化銦)為佳,例如碳化矽(熱膨脹係數4.0)、氮化鋁或氧化鋁(7.8),以降低熱應力。導熱板之上層及下層皆鍍薄膜導體(例如金,厚度約數um,以避免熱應力),並由上至下鑽一貫孔,孔內也有導體(例如金),使上下層之間可導電。導熱板可視其承載之雷射二極體晶片所須逸散的熱量,而 向左右或向前後延伸擴展,以實現較佳的散熱能力。導熱板置放於最前端之第一金屬板,其厚度約0.2mm,也毋須太厚,其材質為銅體鍍錫,功能為導熱兼導電。 According to the present invention, the laser diode chip is carried on the thermally conductive plate. The thickness of the body of the thermally conductive plate is about 0.3 mm, and does not need to be too thick. Its function is to conduct heat, and secondly to avoid the gap between the laser diode chip and the thermally conductive plate , Due to different thermal expansion coefficients and thermal stress. The main output laser beam is emitted forward out of the package, and there is another pair of output laser beams, the direction of which is opposite to the main output laser beam, and it is directed to a rear photosensitive diode. The intensity of the main output laser beam is about Fifty times the output laser beam. The material of the heat conducting plate is preferably high thermal conductivity and thermal expansion coefficient close to the laser diode chip substrate (gallium arsenide or indium phosphide), such as silicon carbide (thermal expansion coefficient 4.0), aluminum nitride or aluminum oxide (7.8), To reduce thermal stress. Both the upper and lower layers of the heat conducting plate are plated with thin film conductors (such as gold with a thickness of about um to avoid thermal stress), and a through hole is drilled from top to bottom. There are also conductors (such as gold) in the holes to make the upper and lower layers conductive. The thermally conductive plate can be extended to the left or right or forward and backward according to the heat dissipated by the laser diode chip it carries to achieve better heat dissipation capability. The first metal plate placed on the front end of the heat conducting plate has a thickness of about 0.2mm and does not need to be too thick. Its material is tin plated copper body, which functions as heat conduction and electrical conduction.
於本發明中,金屬板之製作方法與習知之積體電路導線架(lead frame)相似,易於大量生產。銅的熱膨脹係數16.5,迥異於砷化鎵或磷化銦晶體,並不適合直接承載砷化鎵或磷化銦晶體,故本發明改由氮化鋁或氧化鋁導熱板承載砷化鎵晶體,再由銅體鍍錫的金屬板承載氮化鋁導熱板。由於氮化鋁或氧化鋁和銅的熱膨脹係數差異甚大,可預期導熱板和金屬板之間會存在較大的熱應力,然而,這個熱應力並不會扭曲磊晶層也不致於降低雷射壽命,這是因為氮化鋁或氧化鋁硬度極大(莫氏硬度分別為8與9),而銅卻軟得多(莫氏硬度為3),以致於這個熱應力會扭曲銅而非氮化鋁,磊晶層不會被扭曲,可確保雷射品質。 In the present invention, the manufacturing method of the metal plate is similar to the conventional integrated circuit lead frame, which is easy to mass-produce. The thermal expansion coefficient of copper is 16.5, which is very different from gallium arsenide or indium phosphide crystals, and is not suitable for directly bearing gallium arsenide or indium phosphide crystals. A tin plated copper plate carries an aluminum nitride thermally conductive plate. Since the thermal expansion coefficients of aluminum nitride or aluminum oxide and copper are very different, it can be expected that there will be a large thermal stress between the thermally conductive plate and the metal plate. However, this thermal stress will not distort the epitaxial layer nor reduce the laser life. , This is because aluminum nitride or aluminum oxide is extremely hard (Mohs hardness is 8 and 9 respectively), while copper is much softer (Mohs hardness is 3), so that this thermal stress will distort copper instead of aluminum nitride , The epitaxial layer will not be distorted, which can ensure the laser quality.
電流由第一金屬板流經導熱板、雷射晶片、跳線、至第二金屬板。同理其他金屬板也可視其承載之電子元件所須逸散的熱量及電流,而向左右或向後延伸,以實現較佳的散熱能力及電流承載力。跳線分為兩組,分別列於雷射晶片之左右兩側,使其對稱,以降低熱應力。跳線較佳的排列方式是呈八字型開口,避免遮蔽向後射至電子元件或光學元件的雷射光。由於雷射光的強度會隨溫度而大幅度化,故本發明選擇性地用一感光二極體置於雷射二極體後方,以監視其發射光強度,再輸入一運算放大器之倒相端或一電晶體,以推動雷射二極體,即可實現一負回授光強度穩定電路,此電路所有元件都可安裝在此封裝內。第一金屬板及第二金屬板 皆可以(但不限於)實行表面安裝技術(SMT),銲接在印刷電路板上的表面導體上(一般為銅箔),整個雷射二極體封裝即可安裝在電路板上,有良好的導電及導熱特性。表面導體的下方為印刷電路板的本體,可選用習知之FR4(玻璃纖維強化樹脂),或是散熱效率更佳的鋁質、氮化鋁或氧化鋁為本體。以此結構,大部份磊晶層產生的熱經由很薄的導熱板和很薄又可大幅延伸的第一金屬板,就直接傳導至印刷電路板的本體,途徑很短,導熱速度極快。電流的途徑和熱流幾乎一樣,也是很短,從印刷電路板的表面導體經由很薄的第一金屬板和很薄的導熱板,就直接穿過磊晶層然後經跳線到達第二金屬板,不像現有技術可能要多再一條長長的跳線,如此架構其寄生的電感和電容量會很低,可供高速、大電流、高功率操作。 The current flows from the first metal plate through the heat conduction plate, the laser chip, the jumper, and the second metal plate. In the same way, other metal plates can also be extended to the left or right or backward according to the heat and current required by the electronic components they carry to achieve better heat dissipation capacity and current carrying capacity. Jumpers are divided into two groups, which are listed on the left and right sides of the laser chip to make them symmetrical to reduce thermal stress. The preferred arrangement of the jumper is a figure eight opening to avoid shielding the laser light that is emitted backward to the electronic component or the optical component. Since the intensity of the laser light will greatly increase with temperature, the present invention selectively uses a photosensitive diode placed behind the laser diode to monitor the intensity of the emitted light, and then inputs it into the inverting end of an operational amplifier Or a transistor to push the laser diode to realize a negative feedback light intensity stable circuit, all components of this circuit can be installed in this package. Both the first metal plate and the second metal plate can (but are not limited to) implement surface mount technology (SMT), soldered to the surface conductor (generally copper foil) on the printed circuit board, and the entire laser diode can be packaged Installed on the circuit board, it has good electrical and thermal conductivity characteristics. Below the surface conductor is the main body of the printed circuit board. The conventional FR4 (glass fiber reinforced resin), or aluminum, aluminum nitride, or aluminum oxide with better heat dissipation efficiency can be used as the main body. With this structure, most of the heat generated by the epitaxial layer is directly transmitted to the main body of the printed circuit board through the very thin heat conducting plate and the first metal plate that is very thin and can be greatly extended, the path is short, and the heat conduction speed is extremely fast . The path of the current is almost the same as the heat flow, and it is also very short. From the surface conductor of the printed circuit board through the thin first metal plate and the thin thermal conduction plate, it directly passes through the epitaxial layer and then reaches the second metal plate through the jumper Unlike the existing technology, there may be one more long jumper, so the parasitic inductance and capacitance of this architecture will be very low, which can be used for high-speed, high-current, and high-power operation.
為維持所有金屬板之相對位置固定不變,以一絕緣框架固持。絕緣框架有一開口供雷射光射出,容納雷射二極體和其他元件,並保護元件不受外力影響。 In order to maintain the relative position of all metal plates fixed, it is held by an insulating frame. The insulating frame has an opening for the laser light to exit, to accommodate the laser diode and other components, and to protect the components from external forces.
於本發明中可加一上蓋,以覆蓋於絕緣框架上。 In the present invention, an upper cover can be added to cover the insulating frame.
為增加絕緣框架對金屬板之固持力,金屬板兩側可選擇性地增加一個或多個凸包(bump out),兩側的凸包仍以中心線呈左右對稱,以免除熱應力。現有之金屬板多成直線,本發明改進為多兩處彎折,可增加絕緣框架對金屬板之固持力,使金屬板更不易旋轉或被拉扯致脫離絕緣框架。 In order to increase the holding force of the insulating frame on the metal plate, one or more bumps can be selectively added on both sides of the metal plate. The convex hulls on both sides are still bilaterally symmetrical about the center line to avoid thermal stress. The existing metal plates are mostly straight. The improvement of the present invention is to bend two more places, which can increase the holding force of the insulating frame to the metal plate, so that the metal plate is less likely to rotate or be pulled away from the insulating frame.
為求監測雷射二極體的輸出功率,可選擇性地在雷射二極體後方加裝一感光二極體、第三與第四金屬板,如前述,亦用絕緣框架固持。 為增加此雷射二極體之效能,可選擇性加裝電子元件,貼裝在金屬板上,茲列出兩個實施例:第一例是如較小的元件,其兩引腳和雷射二極體晶片一樣是連接至第一金屬板及第二金屬板,適用於安裝防靜電二極體、逆向偏壓保護二極體、電容或突波抑制電容等元件,以保護雷射二極體。實務上雷射二極體很容易受到靜電或突波傷害,若有一保護元件在旁邊,即可大幅延長雷射二極體的壽命。第二例是較大的元件,其一引腳連接至第一或第二金屬板和雷射二極體晶片之一極連接,其另一金屬板連接至其他金屬板,此例適用於安裝電流感測電阻或熱敏電阻,藉以監視雷射二極體晶片的電流和溫度。在若此元件會顯著發熱,可考慮將其位置向外移遠離雷射二極體晶片,以維持散熱的對稱性。若是電子元件有許多金屬板,也可加裝金屬板,例如推動雷射二極體的MOSFET、積體電路或前述的負回授光強度穩定電路,必須很接近雷射二極體以避免寄生電感和電容,就可以安裝在雷射二極體旁邊,才能實現高速大電流脈衝。 In order to monitor the output power of the laser diode, a photosensitive diode, the third and fourth metal plates can be selectively installed behind the laser diode, and as mentioned above, it is also held by an insulating frame. In order to increase the efficiency of this laser diode, electronic components can be selectively installed and mounted on a metal board. Two examples are listed below. The first example is a smaller component, whose two pins and the laser The laser diode chip is connected to the first metal plate and the second metal plate, and is suitable for installing anti-static diodes, reverse bias protection diodes, capacitors or surge suppression capacitors, etc., to protect the laser diode Polar body. In practice, the laser diode is easily damaged by static electricity or surge. If there is a protective component next to it, the life of the laser diode can be greatly extended. The second example is a larger component, where one pin is connected to the first or second metal plate and one pole of the laser diode chip, and the other metal plate is connected to the other metal plate, this example is suitable for installation The current sensing resistor or thermistor is used to monitor the current and temperature of the laser diode chip. If the device will generate significant heat, consider moving its position away from the laser diode chip to maintain the symmetry of heat dissipation. If there are many metal plates for electronic components, metal plates can also be installed, such as MOSFETs that drive laser diodes, integrated circuits or the aforementioned negative feedback light intensity stabilization circuits, which must be very close to the laser diodes to avoid parasitics Inductance and capacitance can be installed next to the laser diode to achieve high-speed large-current pulses.
為增加此雷射二極體之效能,可選擇性加裝一個或多個光學元件,放在出口端,用絕緣框架夾持固定。在絕緣框架的開口處左右兩邊設一凹槽,即可容納光學元件的邊緣。邊射型雷射二極體之光束必然成一橢圓角光錐,又有相當的像散(astigmatisim),對於精密的應用是很不利的,常常須要用光學元件修正其光束才容易應用,例如加一柱面鏡或稜鏡將橢圓角光錐整型為圓型。再者,絕大部份的雷射應用都是利用準直光束,故而本發明可在雷射光出口端置一準直鏡(凸透鏡),將發散光錐聚攏成準直光束。成為準直光束之後,可再加一繞射光柵(或稱全像片)產生特 定圖紋,或再加一光學晶體(例如Nd:YAG釔鋁榴石)即可產生固態雷射,又再加一非線性晶體(例如磷酸氧鈦鉀KTiOPO4-KTP,或偏磷酸鋰LiB3O5-LBO,又稱二次諧波產生器)可產生波長為原雷射之半的光波。用絕緣框架夾持固定光學元件,光學元件就可以很靠近雷射,可以在光錐還未發散得很大之前就將其收聚,光束直徑就可以很小,從而其後的光學鏡片和整個系統就可以縮得很小,這可以大幅增加應用領域。 In order to increase the efficiency of this laser diode, one or more optical components can be optionally installed, placed at the outlet end, and clamped and fixed by an insulating frame. A groove is provided on the left and right sides of the opening of the insulating frame to accommodate the edge of the optical element. The beam of an edge-emitting laser diode must form an elliptical light cone and have a considerable astigmatism (astigmatisim), which is very unfavorable for precision applications. It is often necessary to use optical components to modify its beam before it is easy to apply. A cylindrical mirror or prism rounds the elliptical light cone to a round shape. Furthermore, most laser applications utilize collimated light beams. Therefore, in the present invention, a collimating lens (convex lens) can be placed at the exit end of the laser light to converge the divergent light cone into a collimated light beam. After becoming a collimated beam, a diffraction grating (or hologram) can be added to produce a specific pattern, or an optical crystal (such as Nd:YAG yttrium aluminum garnet) can be added to produce a solid-state laser, and then Adding a non-linear crystal (such as potassium titanyl phosphate KTiOPO4-KTP, or lithium metaphosphate LiB 3 O 5 -LBO, also known as a second harmonic generator) can generate light waves with a wavelength half that of the original laser. The optical element is clamped and fixed with an insulating frame, the optical element can be very close to the laser, and the light cone can be collected before the divergence is large, and the beam diameter can be small, so that the subsequent optical lens and the entire The system can be reduced to a very small size, which can greatly increase the application area.
為增加散熱效果,可擴大第一金屬板,但是為避免擴大後的第一金屬板阻擋出射光,可選擇性地在第一金屬板設一切口,切口為V型。如此就有很大的第一金屬板用於散熱,又不會阻擋出射光。切口也可為U型或其他型,例如依上述加一準直鏡將光錐收聚成準直光束後,切口可為U型,這樣就可以有較大面積的第一金屬板以利傳導熱。 In order to increase the heat dissipation effect, the first metal plate can be enlarged, but in order to prevent the expanded first metal plate from blocking outgoing light, a cutout can be selectively provided in the first metal plate, and the cutout is V-shaped. In this way, there is a very large first metal plate for heat dissipation, without blocking outgoing light. The incision can also be U-shaped or other types. For example, after adding a collimating lens to converge the light cone into a collimated beam according to the above, the incision can be U-shaped, so that there can be a first metal plate with a larger area to facilitate conduction heat.
為增加感光二極體的受光面積,可選擇性地扭曲第三金屬板的中段,使中段和其所背負的感光二極體不再維持水平,而是傾斜成一角度,增加有效受光面積。第三金屬板的中段靠雷射二極體之一側可彎曲成一L型,以便扶持感光二極體,在未貼裝之前維持不墜。扭曲的中段的最低部維持在原金屬板下層之上,不致於過低,以便能順利進行表面安裝。 In order to increase the light-receiving area of the photodiode, the middle section of the third metal plate can be selectively twisted so that the middle section and the photodiode carried by it no longer maintain the level, but are inclined at an angle to increase the effective light-receiving area. The middle section of the third metal plate can be bent into an L-shape on one side of the laser diode, so as to support the photosensitive diode and keep it from falling before being mounted. The lowest part of the twisted middle section is maintained above the lower layer of the original metal plate, so as not to be too low, so that the surface mounting can be carried out smoothly.
若有必要使用上蓋保護雷射晶片和跳線等,上蓋也可固持一個或多個光學元件,上蓋也可在出口端設一凹槽,容納光學元件的邊緣,以便將光學元件夾持在上蓋和第一金屬板之間。 If it is necessary to use an upper cover to protect the laser chip and jumpers, the upper cover can also hold one or more optical elements, and the upper cover can also be provided with a groove at the exit end to accommodate the edge of the optical element, so as to clamp the optical element on the upper cover And the first metal plate.
光學元件還可以用金屬板的一部份半切割再折起加以固持。 The optical element can also be held in half by cutting a part of the metal plate and then folding it up.
同一個雷射二極體封裝可以安裝多個雷射二極體晶片,晶片之間可以串聯或並聯。 Multiple laser diode chips can be installed in the same laser diode package, and the chips can be connected in series or in parallel.
同一個雷射二極體封裝也可串聯及並聯多個雷射二極體晶片,或複數個雷射二極體晶片串聯後再並聯,或複數個雷射二極體晶片並聯後再串聯。可以針對不同的電源電壓而採取不同之串聯並聯組態,即可獲最佳之電源使用效率。 The same laser diode package can also be connected in series and in parallel with multiple laser diode chips, or a plurality of laser diode chips are connected in series and then connected in parallel, or a plurality of laser diode chips are connected in parallel and then connected in series. Different series and parallel configurations can be adopted for different power supply voltages to obtain the best power supply efficiency.
10‧‧‧雷射二極體表面安裝結構 10‧‧‧Laser diode surface mounting structure
20‧‧‧一邊射型雷射二極體 20‧‧‧Side-fired laser diode
21‧‧‧兩電極 21‧‧‧Two electrodes
211‧‧‧陽極 211‧‧‧Anode
212‧‧‧陰極 212‧‧‧Cathode
30‧‧‧導熱板 30‧‧‧Heat conduction board
31‧‧‧上層導電層 31‧‧‧ Upper conductive layer
32‧‧‧下層導電層 32‧‧‧Lower conductive layer
33‧‧‧至少一導電體貫孔 33‧‧‧At least one conductor hole
40‧‧‧二個以上之金屬板 40‧‧‧ More than two metal plates
40-1‧‧‧第一金屬板 40-1‧‧‧First metal plate
40-2‧‧‧第二金屬板 40-2‧‧‧Second metal plate
40-3‧‧‧第三金屬板 40-3‧‧‧third metal plate
40-4‧‧‧第四金屬板 40-4‧‧‧The fourth metal plate
50,50-1,50-2,50-3‧‧‧跳線 50, 50-1, 50-2, 50-3 ‧‧‧ jumper
60‧‧‧絕緣框架 60‧‧‧Insulation frame
61‧‧‧開口 61‧‧‧ opening
62‧‧‧主輸出雷射橢圓型光錐 62‧‧‧Main output laser elliptical light cone
70‧‧‧電子元件 70‧‧‧Electronic components
71‧‧‧雷射光出口端切口 71‧‧‧Laser exit cutout
73-1,73-2‧‧‧金屬板之彎曲 73-1, 73-2‧‧‧Bending of metal plate
80‧‧‧印刷電路板 80‧‧‧ printed circuit board
81‧‧‧印刷電路板的表面導體層 81‧‧‧Surface conductor layer of printed circuit board
82‧‧‧印刷電路板的本體 82‧‧‧Body of printed circuit board
90‧‧‧光學元件 90‧‧‧Optical components
100‧‧‧基板 100‧‧‧ substrate
101‧‧‧磊晶層 101‧‧‧Epitaxial layer
102‧‧‧跳線 102‧‧‧Jumper
103‧‧‧導熱板 103‧‧‧Heat conduction board
104‧‧‧外殼 104‧‧‧Housing
105、109‧‧‧金屬層 105, 109‧‧‧ metal layer
106‧‧‧雷射共振腔 106‧‧‧Laser resonant cavity
107‧‧‧橢圓型光錐 107‧‧‧Elliptical light cone
108‧‧‧副輸出雷射方向 108‧‧‧Secondary output laser direction
110‧‧‧熱沉 110‧‧‧Heat sink
圖1,包含圖1(a)及圖1(b),圖1(a)顯示雷射二極體晶片結構,圖1(b)顯示現有邊射型中高功率雷射二極體之表面安裝結構。 Fig. 1, including Fig. 1(a) and Fig. 1(b), Fig. 1(a) shows the structure of the laser diode chip, and Fig. 1(b) shows the surface mounting of the existing edge-fired medium-high power laser diode structure.
圖2,包含圖2(a)、圖2(b)、圖2(c)及圖2(d),顯示本發明邊射型雷射二極體之表面安裝結構,圖2(a)為導熱板側視圖,圖2(b)為不含絕緣框架俯視圖,圖2(c)為含絕緣框架俯視圖,圖2(d)為雷射二極體晶片、導熱板與印刷電路板組合側視圖。 Fig. 2, including Fig. 2(a), Fig. 2(b), Fig. 2(c) and Fig. 2(d), shows the surface mounting structure of the edge-emitting laser diode of the present invention, and Fig. 2(a) is Side view of the thermally conductive plate, Figure 2(b) is a top view without an insulating frame, Figure 2(c) is a top view with an insulating frame, and Figure 2(d) is a side view of a combination of a laser diode chip, a thermally conductive plate, and a printed circuit board .
圖3,包含圖3(a)及圖3(b),顯示依據本發明雷射二極體表面安裝結構具有複數個雷射二極體之電路連接圖,圖3(a)為三個雷射二極體晶片之並聯圖,圖3(b)為三個雷射二極體晶片之串聯圖。 FIG. 3, including FIG. 3(a) and FIG. 3(b), shows a circuit connection diagram of a plurality of laser diodes according to the surface mounting structure of the laser diode according to the present invention, and FIG. 3(a) shows three lasers The parallel diagram of the laser diode wafer. Figure 3(b) is a series diagram of three laser diode wafers.
圖4,包含圖4(a)及圖4(b),圖4(a)顯示本發明第三金屬板承載一附加之電子元件之俯視圖,圖4(b)顯示本發明於承載一附加之電子元件之第三金屬板呈傾斜配置之側視圖。 FIG. 4, including FIG. 4(a) and FIG. 4(b), FIG. 4(a) shows a top view of the third metal plate of the present invention carrying an additional electronic component, and FIG. 4(b) shows the invention carrying an additional electronic component The third metal plate of the electronic component is a side view with an oblique configuration.
圖5顯示本發明以彎折的金屬板固持光學元件。 FIG. 5 shows that the present invention holds the optical element with a bent metal plate.
圖2,包含圖2(a)、圖2(b)、圖2(c)及圖2(d),顯示依據本發明邊射型雷射二極體之表面安裝結構圖,其中,圖2(a)為導熱板之側視圖;圖2(b)為雷射二極體晶片安裝於金屬板而不含絕緣框架之俯視圖;圖2(c)為圖2(b)所示結構含絕緣框架之整體結構圖;及圖2(d)為雷射二極體晶片依序安裝於導熱板、第一金屬板及印刷電路板之組合側視圖。請同時參考圖2(a)圖2(b)、圖2(c)及圖2(d),依據本發明之一種雷射二極體表面安裝結構10,包括:至少一邊射型雷射二極體晶片20,包含具有一陽極211及一陰極212之兩電極21;一導熱板30,具有一上層導電層31、一下層導電層32及至少一貫穿該上層導電層及該下層導電層之導電體貫孔33(詳如圖2(a)所示),用以承載該至少一邊射型雷射二極體晶片之兩電極21之一極211或212,該至少一導電體貫孔用以電導通該上層導電層及該下層導電層;二個以上相互間隔且配置於一平面上之金屬板40,其中一第一金屬板40-1配置於該導熱板之下方並與該導熱板之下層導電層接觸,一第二金屬板40-2配置於相鄰而隔開於該第一金屬板,該第二金屬板藉由至少一跳線50與該兩電極之另一極212或211電連接;以及一具有開口61之絕緣框架60,設置於該二個以上之金屬板上方,用以固持 該等二個以上之金屬板,其中該開口用以供該至少一邊射型雷射二極體晶片發射的雷射光穿過。 FIG. 2, including FIG. 2(a), FIG. 2(b), FIG. 2(c) and FIG. 2(d), shows a surface mounting structure diagram of an edge-emitting laser diode according to the present invention, in which FIG. 2 (a) is a side view of a thermally conductive plate; Figure 2(b) is a top view of a laser diode chip mounted on a metal plate without an insulating frame; Figure 2(c) is the structure shown in Figure 2(b) with insulation The overall structural diagram of the frame; and FIG. 2(d) is a combined side view of the laser diode chip sequentially mounted on the thermally conductive plate, the first metal plate and the printed circuit board. Please also refer to FIG. 2(a), FIG. 2(b), FIG. 2(c) and FIG. 2(d), a laser diode surface mounting structure 10 according to the present invention includes: at least one side-fired laser diode The polar body chip 20 includes two electrodes 21 having an anode 211 and a cathode 212; a thermally conductive plate 30 having an upper conductive layer 31, a lower conductive layer 32, and at least one penetrating the upper conductive layer and the lower conductive layer Conductor through-hole 33 (detailed in FIG. 2(a)) for supporting one of poles 211 or 212 of two electrodes 21 of the at least one-sided laser diode chip, the at least one conductor through-hole Electrically conducting the upper conductive layer and the lower conductive layer; two or more metal plates 40 spaced apart from each other and arranged on a plane, wherein a first metal plate 40-1 is arranged under the heat conductive plate and connected to the heat conductive plate The lower conductive layer is in contact, a second metal plate 40-2 is disposed adjacent to and separated from the first metal plate, the second metal plate is connected to the other pole 212 of the two electrodes by at least one jumper 50 211 electrical connection; and an insulating frame 60 having an opening 61, disposed above the two or more metal plates, for holding the two or more metal plates, wherein the opening is used for the at least one side-firing laser The laser light emitted by the diode wafer passes through.
於本發明之雷射二極體表面安裝結構中,該至少一跳線50為二條跳線50-1、50-2,連接至該至少一邊射型雷射二極體晶片20之另一極212或211,其係以對稱分佈在該至少一邊射型雷射二極體晶片左右兩側之方式搭接。 In the surface mounting structure of the laser diode of the present invention, the at least one
又如圖2(d)之組合圖所示,本發明之雷射二極體表面安裝結構10可安裝於一印刷電路板80,包含一本體82及鍍層於其上之表面導體層81,其中該第一金屬板41焊接於該表面導體層81上。當然,該表面導體層81亦可用於焊接其他金屬板。 2(d), the laser diode
另於本發明中,請同時參閱圖3,該至少一邊射型雷射二極體晶片為複數個,該等複數個邊射型雷射二極體晶片作電路連接,如圖3(a)所示,可為三個雷射二極體晶片20之並聯配置,亦可圖3(b)所示為三個雷射二極體20之串聯配置,當然亦可依需要而作各種串、並聯配置。 In addition, in the present invention, please also refer to FIG. 3, the at least one side-fired laser diode chip is plural, and the plurality of side-fired laser diode chips are used for circuit connection, as shown in FIG. 3(a) As shown, it can be a parallel configuration of three
又於本發明中,該導熱板30之材料為氮化鋁、氧化鋁或碳化矽;且該二個以上之金屬板之材料為銅;而該絕緣框架之材料為塑膠、環氧樹脂或電木。 In the present invention, the material of the thermally
此外,如圖2所示,本發明之雷射二極體表面安裝結構100,可進而包含至少一附加之電子元件70,該至少一附加之電子元件可為一感光二極體、防靜電二極體、逆向偏壓保護二極體、電容、電晶體、積體電 路或突波抑制電容,且該至少一附加之電子元件連接至需作電路接通之一第三金屬板40-3、一第四金屬板40-4及一跳線50-3,該等金屬板40-3及40-4係由該絕緣框架固持。 In addition, as shown in FIG. 2, the laser diode
於本發明中,該至少一金屬板40之兩側具有凸包位於其上,其兩側之凸包以中心線呈左右對稱。此外,該第一金屬板40-1在該至少一邊射型雷射二極體晶片20之雷射光出口端具有一切口71,(示於圖4(a)),以供雷射光通過。 In the present invention, both sides of the at least one
如圖4所示,圖4(a)為俯視圖,圖4(b)為第三金屬板承載電子元件70之側視圖,於本發明之雷射二極體表面安裝結構,中用以承載該至少一附加之電子元件70,當其為一感光二極體,所連接之一第三金屬板40-3在承載該至少一附加之電子元件之位置被彎折成一斜面。另如圖4(b)之側示圖所示,不像其他金屬板一樣係在同一平面(如圖4(b)之虛線),本實施例則於供該至少一電子元件之受光面之法線向量與後雷射光之中心線所成之角度不為90度,俾增加有效受光面積,用以配合一迴授控制電路,以穩定雷射光強度。該第一金屬板40-1向外擴展以加強散熱能力,並在雷射光出口端具有一切口,以供雷射光通過。 As shown in FIG. 4, FIG. 4(a) is a top view, and FIG. 4(b) is a side view of a third metal plate carrying
本發明之雷射二極體表面安裝結構,可進而包含一上蓋(未示於圖中),用以覆蓋該絕緣框架。各該二個以上相互間隔且配置一平面上之金屬板有彎曲(但仍在同一平面上),其分別如圖4(a)中第一金屬板40-1,第二金屬板40-2之左、右側所示,以增加該絕緣框架固持各該金屬板之力量。 The surface mounting structure of the laser diode of the present invention may further include an upper cover (not shown in the figure) for covering the insulating frame. The two or more metal plates spaced apart from each other and arranged on a plane are bent (but still on the same plane), as shown in FIG. 4(a), the first metal plate 40-1 and the second metal plate 40-2 The left and right sides are shown to increase the strength of the insulating frame to hold each metal plate.
如圖5所示,本發明之雷射二極體表面安裝結構,可進而包含一光學元件90,安裝於該邊射型雷射二極體20前方,其可由該絕緣框架固持、或由該上蓋固持、或由一可彎折之金屬板固持,其中該光學元件90為一透鏡、濾鏡、繞射光柵、稜鏡、偏光鏡、光學晶體、或非線性光學晶體,用以依需要而處理該邊射型雷射二極體之光束。 As shown in FIG. 5, the surface mounting structure of the laser diode of the present invention may further include an
此外,本發明之雷射二極體表面安裝結構,其中該至少一附加之電子元件為一雷射光強度穩定電路。 Furthermore, in the laser diode surface mounting structure of the present invention, the at least one additional electronic component is a laser light intensity stabilizing circuit.
10‧‧‧雷射二極體表面安裝結構 10‧‧‧Laser diode surface mounting structure
20‧‧‧邊射型雷射二極體 20‧‧‧side-fired laser diode
21‧‧‧兩電極 21‧‧‧Two electrodes
211‧‧‧陽極 211‧‧‧Anode
212‧‧‧陰極 212‧‧‧Cathode
30‧‧‧導熱板 30‧‧‧Heat conduction board
31‧‧‧上層導電層 31‧‧‧ Upper conductive layer
32‧‧‧下層導電層 32‧‧‧Lower conductive layer
33‧‧‧至少一導電體貫孔 33‧‧‧At least one conductor hole
40‧‧‧金屬板 40‧‧‧Metal plate
40-1‧‧‧第一金屬板 40-1‧‧‧First metal plate
40-2‧‧‧第二金屬板 40-2‧‧‧Second metal plate
40-3‧‧‧第三金屬板 40-3‧‧‧third metal plate
40-4‧‧‧第四金屬板 40-4‧‧‧The fourth metal plate
50-1,50-2,50-3‧‧‧跳線 50-1, 50-2, 50-3‧‧‧ jumper
60‧‧‧絕緣框架 60‧‧‧Insulation frame
61‧‧‧開口 61‧‧‧ opening
70‧‧‧附加之電子元件 70‧‧‧ additional electronic components
80‧‧‧印刷電路板 80‧‧‧ printed circuit board
81‧‧‧印刷電路板的表面導體層 81‧‧‧Surface conductor layer of printed circuit board
82‧‧‧印刷電路板的本體 82‧‧‧Body of printed circuit board
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