TW202000329A - Cutter wheel cleaning mechanism and scribe device capable of removing dusts or cutting residuals attached to the cutter tip or gap between the holder and the cutter in a short time without using manual operation - Google Patents

Cutter wheel cleaning mechanism and scribe device capable of removing dusts or cutting residuals attached to the cutter tip or gap between the holder and the cutter in a short time without using manual operation Download PDF

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TW202000329A
TW202000329A TW108113958A TW108113958A TW202000329A TW 202000329 A TW202000329 A TW 202000329A TW 108113958 A TW108113958 A TW 108113958A TW 108113958 A TW108113958 A TW 108113958A TW 202000329 A TW202000329 A TW 202000329A
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Taiwan
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cutter wheel
cleaning mechanism
cutter
suction port
wheel cleaning
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TW108113958A
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Chinese (zh)
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酒井敏行
成尾徹
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日商三星鑽石工業股份有限公司
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Publication of TW202000329A publication Critical patent/TW202000329A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04Cleaning by suction, with or without auxiliary action
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D3/00Cutting work characterised by the nature of the cut made; Apparatus therefor
    • B26D3/08Making a superficial cut in the surface of the work without removal of material, e.g. scoring, incising
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/10Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12Brushes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/08Means for treating work or cutting member to facilitate cutting
    • B26D7/088Means for treating work or cutting member to facilitate cutting by cleaning or lubricating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/18Means for removing cut-out material or waste
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B26HAND CUTTING TOOLS; CUTTING; SEVERING
    • B26DCUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
    • B26D7/00Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
    • B26D7/18Means for removing cut-out material or waste
    • B26D7/1845Means for removing cut-out material or waste by non mechanical means
    • B26D7/1863Means for removing cut-out material or waste by non mechanical means by suction
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Forests & Forestry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
  • Cleaning In General (AREA)
  • Details Of Cutting Devices (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

The invention provides a cutter wheel cleaning mechanism, which can remove dust attached to the cutter wheel in a short time without using manual operation. The cutter cleaning mechanism is mounted on a scribe device, which uses a side to press the cutter wheel 12 to the surface of the substrate W while moving the cutter wheel to process the scribing lines on the substrate W. The cutter wheel cleaning mechanism includes a motor-driven rotary brush 13 which is located away from the work area where the scribing line is processed and arranged within the movable range of the above-mentioned cutter wheel 12; and a suction port 14, which is opened near the rotary brush 13, and is connected to an air source P.

Description

刀輪清掃機構及刻劃裝置Cutter wheel cleaning mechanism and scribing device

本發明係關於一種刀輪清掃機構及刻劃裝置,該刀輪清掃機構安裝於利用刀輪於樹脂基板或脆性材料基板加工分斷用之刻劃線之刻劃裝置,而清掃去除附著於刀輪之粉塵等。The invention relates to a cutter wheel cleaning mechanism and a scoring device. The cutter wheel cleaning mechanism is installed in a scoring device for scoring lines for processing and breaking a resin substrate or a brittle material substrate using a cutter wheel, and the cleaning is removed and attached to the knife The dust of the wheel.

通常,於自大型母基板切割單位基板之情形時,例如,使用如專利文獻1中所示之刻劃裝置,一邊將刀輪按壓於母基板之表面一邊使其移動而以格子狀形成縱向、橫向刻劃線(切割槽),繼而,進行使基板彎曲等操作而自刻劃線處分斷,藉此取出單位基板。Generally, in the case of cutting a unit substrate from a large mother substrate, for example, a scribing device as shown in Patent Document 1 is used to move the cutter wheel while pressing the cutter wheel against the surface of the mother substrate to form a longitudinal shape in a lattice shape. Lateral scribing lines (cutting grooves), and then, operations such as bending the substrate are performed to break from the scribing lines, thereby taking out the unit substrate.

於在母基板加工縱向、橫向刻劃線時,由於連續使用刀輪,故而存在於使用中粉塵或鬚狀之切割屑附著於刀輪之刀尖或者進入與保持刀輪之保持器之間隙之情況。尤其是樹脂基板由於切割屑較多且有黏性,故而容易發生對刀尖或間隙之附著。 [先前技術文獻] [專利文獻]When the longitudinal and lateral scoring lines are processed on the mother substrate, the cutter wheel is continuously used, so the dust or whisker-like cutting chips present in use adhere to the tip of the cutter wheel or enter the gap between the holder holding the cutter wheel Happening. In particular, since the resin substrate has many cutting chips and is sticky, adhesion to the blade tip or gap is likely to occur. [Prior Technical Literature] [Patent Literature]

[專利文獻1]日本特開2012-72008號公報[Patent Document 1] Japanese Patent Application Publication No. 2012-72008

[發明所欲解決之問題][Problems to be solved by the invention]

若粉塵或切割屑附著於刀輪之刀尖或與保持器之間隙,則刀輪之旋轉變差,刻劃線之加工精度變差,並且對刀尖之負載增大,刀尖壽命縮短。因而,每使用一定時間即對刀尖進行檢查,若存在粉塵等之附著,則需要使用刷子等以人工作業進行清掃,但該操作非常麻煩,耗費時間。If dust or cutting debris adheres to the tip of the cutter wheel or the gap with the holder, the rotation of the cutter wheel becomes worse, the machining accuracy of the scribing line becomes worse, and the load on the cutter tip increases, and the life of the cutter tip shortens. Therefore, the tool tip is inspected every time it is used, and if there is adhesion of dust or the like, it is necessary to use a brush or the like to clean it manually, but this operation is very troublesome and time-consuming.

因此,鑒於上述課題,本發明之目的在於提供一種刻劃裝置之刀輪清掃機構,可不利用人工作業,而於短時間內乾淨地去除附著於刀輪之粉塵物。 [解決問題之手段]Therefore, in view of the above-mentioned problems, an object of the present invention is to provide a cutter wheel cleaning mechanism of a scoring device, which can cleanly remove dust attached to the cutter wheel in a short time without using manual work. [Means to solve the problem]

為了達成上述目的,於本發明中採取如下技術手段。即,本發明係一種刀輪清掃機構,安裝於刻劃裝置,該刻劃裝置藉由一邊將刀輪按壓於基板表面一邊使其移動而加工刻劃線,該刀輪清掃機構之構成為具備:馬達驅動式旋轉刷,其於遠離加工上述刻劃線之作業區域之位置且配置於上述刀輪之可移動之範圍內;及吸引口,其於該旋轉刷之附近開口,上述吸引口連接於空氣源。本發明亦將安裝有上述刀輪清掃機構之刻劃裝置作為對象。 [發明之效果]In order to achieve the above object, the following technical means are adopted in the present invention. That is, the present invention is a cutter wheel cleaning mechanism that is mounted on a scoring device that processes a scribe line by moving the cutter wheel while pressing the cutter wheel against the surface of the substrate. The cutter wheel cleaning mechanism is configured to include : Motor-driven rotating brush, which is located away from the working area for processing the scoring line and arranged within the movable range of the cutter wheel; and a suction port, which is opened near the rotating brush, and the suction port is connected For air source. The present invention also targets a scoring device equipped with the above-described cutter wheel cleaning mechanism. [Effect of invention]

根據本發明,視需要藉由將刀輪移動至旋轉刷之位置,可利用旋轉刷於短時間內乾淨地去除附著於刀輪之刀尖或與保持器之間隙之粉塵或切割屑而可消除由如以往般之人工作業所引起之繁雜,並且由於所去除之粉塵物自吸引口吸引,故而可避免刀輪周圍之污染。又,於利用刀輪進行刻劃線加工時,由於清掃機構位於遠離作業區域之位置,故而有不妨礙刻劃作業等效果。According to the present invention, by moving the cutter wheel to the position of the rotating brush as needed, the rotating brush can be used to cleanly remove the dust or cutting debris attached to the tip of the cutter wheel or the gap with the holder in a short time and can be eliminated The complexity caused by manual work as in the past, and because the removed dust is attracted from the suction port, it is possible to avoid pollution around the cutter wheel. In addition, when the scribing process is performed by the cutter wheel, since the cleaning mechanism is located away from the work area, there is an effect that the scribing work is not hindered.

於本發明中,較佳為設為如下構成:上述吸引口經由配管連接於真空噴射器之空氣吸引埠,於該真空噴射器之空氣流入埠經由導管連接有空氣源,驅動上述旋轉刷之馬達由氣動馬達形成。 藉此,可利用來自空氣源之壓縮空氣進行於吸引口之粉塵物吸引動作,並且吸引口之空氣源與旋轉刷之空氣源可共用同一者,從而可實現機構之省力化。In the present invention, it is preferable that the suction port is connected to an air suction port of a vacuum ejector via a pipe, and an air source is connected to the air inflow port of the vacuum ejector via a duct to drive the motor of the rotating brush Formed by an air motor. In this way, the compressed air from the air source can be used to perform the dust suction operation at the suction port, and the air source of the suction port and the air source of the rotating brush can share the same one, so that the labor saving of the mechanism can be achieved.

又,於本發明中,較佳為設為如下構成:上述旋轉刷以及上述吸引口與上述真空噴射器一併作為一個單元組裝於共通之底板。 藉此,可緊密地集中清掃機構,並且容易組裝於刻劃裝置。In addition, in the present invention, it is preferable that the rotating brush and the suction port are assembled together with the vacuum ejector as a unit on a common bottom plate. Thereby, the cleaning mechanism can be closely concentrated, and it is easy to assemble to the scribing device.

以下,根據圖1~圖5對本發明之刀輪清掃機構之詳細內容進行詳細說明。 圖1係表示將本發明之刀輪清掃機構A組裝於一般刻劃裝置之實施例之前視圖。於該刻劃裝置中,具備:平台1,其將應加工之基板W保持於上表面;旋轉機構2,其使該平台1於水平面上旋轉;軌道3,其將平台1與旋轉機構2一併以可沿一個方向(圖1之前後方向)移動之方式保持;螺紋軸4,其用於使平台1沿著軌道3移動;及馬達5,其驅動螺紋軸。Hereinafter, the details of the cutter wheel cleaning mechanism of the present invention will be described in detail based on FIGS. 1 to 5. FIG. 1 is a front view showing an embodiment in which the cutter wheel cleaning mechanism A of the present invention is assembled into a general scribing device. The scoring device includes: a platform 1, which holds the substrate W to be processed on the upper surface; a rotating mechanism 2, which rotates the platform 1 on a horizontal plane; a track 3, which holds the platform 1 and the rotating mechanism 2 It is held in such a way that it can move in one direction (the front and back directions in FIG. 1); the screw shaft 4, which is used to move the platform 1 along the rail 3; and the motor 5, which drives the screw shaft.

又,於以跨越平台1之方式設置之門型框體6設有於與平台1之移動方向正交之方向延伸之水平橫樑(beam)7,於設於該橫樑7之水平導件8可移動地保持具備刻劃頭9之安裝板10。於刻劃頭9之下端經由保持器11安裝有刀輪12。又,刻劃頭9相對於安裝板10可上下移動地組裝。藉此成為如下構成:藉由於平台1上載置基板W,一邊將刀輪12按壓於基板表面一邊使其沿著導件8移動,可於基板表面加工刻劃線。In addition, the door frame 6 installed across the platform 1 is provided with a horizontal beam 7 extending in a direction orthogonal to the moving direction of the platform 1, and the horizontal guide 8 provided on the beam 7 can be The mounting plate 10 provided with the scoring head 9 is movably held. A cutter wheel 12 is attached to the lower end of the scoring head 9 via a holder 11. In addition, the scoring head 9 is assembled so as to be movable up and down relative to the mounting plate 10. Thereby, a structure is achieved in which the substrate W is placed on the stage 1 and the cutter wheel 12 is moved along the guide 8 while pressing the cutter wheel 12 against the surface of the substrate, so that a scribe line can be processed on the surface of the substrate.

於該刻劃裝置中,於遠離加工上述刻劃線之作業區域之位置,即遠離平台1之位置,於可將刀輪12沿著導件8移動之範圍內設有刀輪清掃機構A。In the scoring device, a cutter wheel cleaning mechanism A is provided within a range where the cutter wheel 12 can be moved along the guide 8 at a position away from the working area for processing the scribe line, that is, a position away from the platform 1.

如圖2所示,刀輪清掃機構A具備旋轉刷13、及於該旋轉刷13之附近開口之一對吸引口14。吸引口14自旋轉刷13之旋轉圓周方向之左右朝向旋轉刷開口。又,旋轉刷13具備作為驅動源之氣動馬達15,以將來自壓縮機等空氣源之壓縮空氣經由導管16自空氣導入口17導入並驅動之方式形成。所導入之空氣自排氣口18排出。As shown in FIG. 2, the cutter wheel cleaning mechanism A includes a rotary brush 13 and a pair of suction ports 14 that are opened near the rotary brush 13. The suction port 14 opens toward the rotating brush from left to right in the circumferential direction of the rotating brush 13. In addition, the rotary brush 13 includes an air motor 15 as a driving source, and is formed to introduce and drive compressed air from an air source such as a compressor through the duct 16 from the air inlet 17. The introduced air is discharged from the exhaust port 18.

又,朝向旋轉刷13開口之吸引口14亦如圖4之空氣迴路圖所示,經由配管19連接於真空噴射器20之吸引埠20a。於真空噴射器20之空氣流入埠20b經由導管21連接於壓縮機等空氣源P。於真空噴射器之空氣流入埠20b設有空氣流量控制器23。於本實施例中,與真空噴射器20相連之空氣源P及上述氣動馬達15之空氣源共用同一者。但是,亦可將空氣源分開形成。In addition, as shown in the air circuit diagram of FIG. 4, the suction port 14 opening toward the rotating brush 13 is also connected to the suction port 20 a of the vacuum ejector 20 through the pipe 19. The air inflow port 20b of the vacuum ejector 20 is connected to an air source P such as a compressor via a duct 21. An air flow controller 23 is provided at the air inflow port 20b of the vacuum ejector. In this embodiment, the air source P connected to the vacuum ejector 20 and the air source of the air motor 15 share the same one. However, the air source can also be formed separately.

真空噴射器20由於為一般廣泛使用之眾所周知者,故而省略其詳細之說明,但大致如圖3所示,為如下構成:自空氣流入埠20b流入之壓縮空氣由噴嘴20c集中而以高速向擴散室20d噴流並自排出埠20e釋放。藉由朝向該擴散室20d之高速噴流將周圍之空氣引入而擴散室20d被減壓,於與擴散室20d相連之吸引埠20a產生吸引力。The vacuum ejector 20 is a well-known one that is generally widely used, so its detailed description is omitted, but as shown generally in FIG. 3, it is configured as follows: the compressed air flowing in from the air inflow port 20b is concentrated by the nozzle 20c and diffuses at high speed The chamber 20d jets and is released from the discharge port 20e. The surrounding air is introduced by a high-speed jet toward the diffusion chamber 20d, and the diffusion chamber 20d is decompressed, and an attractive force is generated in the suction port 20a connected to the diffusion chamber 20d.

上述旋轉刷13或朝向其開口之吸引口14以及上述真空噴射器20或配管19組裝於共通之底板22而作為一個單元形成。底板22如圖1所示,經由安裝轉角24以可調整安裝位置之方式安裝於刻劃裝置之框體6。The rotating brush 13 or the suction port 14 opening toward it and the vacuum ejector 20 or the piping 19 are assembled on a common bottom plate 22 and formed as a unit. As shown in FIG. 1, the bottom plate 22 is mounted on the frame 6 of the scoring device via the mounting corner 24 in an adjustable mounting position.

於上述構成中,於利用刀輪12進行刻劃線加工時,由於刀輪清掃機構A位於遠離成為作業區域之平台1之位置,故而不妨礙刻劃作業。於清掃刀輪12時,如圖5所示,藉由將刀輪12沿著導件8移動至刀輪清掃機構A之旋轉刷13之位置,利用旋轉刷13對刀輪12或與保持器11之間隙部分進行清掃,可於短時間內乾淨地去除附著於刀尖或間隙之粉塵或切割屑。所去除之粉塵物自吸引口14吸引而自真空噴射器20之排出埠20e排出。於圖式中,排出埠20e以露出之狀態保留,但較佳為於該排出埠連接與刻劃裝置外部相連之排出導管(未圖示)而將粉塵物排出至裝置外部,或者排出至另外設置之集塵箱。In the above configuration, when the scoring process is performed by the cutter wheel 12, the cutter wheel cleaning mechanism A is located at a position away from the platform 1 that becomes the work area, so the scoring work is not hindered. When cleaning the cutter wheel 12, as shown in FIG. 5, by moving the cutter wheel 12 along the guide 8 to the position of the rotary brush 13 of the cutter wheel cleaning mechanism A, the rotary brush 13 is used to align the cutter wheel 12 or the holder The clearance part of 11 can be cleaned to remove dust or cutting debris attached to the tip or clearance of the knife in a short time. The removed dust is sucked from the suction port 14 and discharged from the discharge port 20e of the vacuum ejector 20. In the figure, the discharge port 20e is left in an exposed state, but it is preferable to connect the discharge port (not shown) connected to the outside of the scoring device to discharge the dust to the outside of the device or to another Set dust box.

又,上述利用旋轉刷所進行之刀輪之清掃動作較佳為每刻劃一定時間即定期進行。藉此,可維持刀輪之鋒利度而可高精度地加工刻劃線,並且可延長使用壽命。In addition, the above-mentioned cleaning operation of the cutter wheel by the rotating brush is preferably performed periodically every time a certain time is scored. In this way, the sharpness of the cutter wheel can be maintained, the score line can be processed with high precision, and the service life can be extended.

以上對本發明之代表性實施例進行了說明,但本發明未必特定於上述實施形態。例如,組裝本發明之刀輪清掃機構之刻劃裝置並不限於上述實施例中所示之構成,可將具備可利用刀輪加工刻劃線之構成之刻劃裝置整體作為對象。又,旋轉刷之驅動源亦可為電動馬達而代替氣動馬達。另外本發明可於不脫離申請專利範圍之範圍內適當施加變更、修正。 [產業上之可利用性]The representative embodiments of the present invention have been described above, but the present invention is not necessarily limited to the above embodiments. For example, the scoring device for assembling the cutter wheel cleaning mechanism of the present invention is not limited to the configuration shown in the above embodiment, and the entire scoring device having a structure capable of processing scoring lines with the cutter wheel can be targeted. In addition, the driving source of the rotary brush may be an electric motor instead of a pneumatic motor. In addition, the present invention can be appropriately modified or modified within the scope not departing from the scope of the patent application. [Industry availability]

本發明之刀輪清掃機構可組裝於加工刻劃線之刻劃裝置而用於刀輪之清掃。The cutter wheel cleaning mechanism of the present invention can be assembled into a scoring device for processing scoring lines and used for cleaning of cutter wheels.

A‧‧‧刀輪清掃機構 P‧‧‧空氣源 W‧‧‧基板 1‧‧‧平台 2‧‧‧旋轉機構 3‧‧‧軌道 4‧‧‧螺紋軸 5‧‧‧馬達 6‧‧‧框體 7‧‧‧橫樑 8‧‧‧導件 9‧‧‧刻劃頭 10‧‧‧安裝板 11‧‧‧保持器 12‧‧‧刀輪 13‧‧‧旋轉刷 14‧‧‧吸引口 15‧‧‧氣動馬達 16‧‧‧導管 17‧‧‧空氣導入口 18‧‧‧排氣口 19‧‧‧配管 20‧‧‧真空噴射器 20a‧‧‧空氣吸引埠 20b‧‧‧空氣流入埠 20c‧‧‧噴嘴 20d‧‧‧擴散室 20e‧‧‧排出埠 21‧‧‧導管 22‧‧‧底板 23‧‧‧空氣流量控制器 24‧‧‧安裝轉角A‧‧‧Cutter wheel cleaning mechanism P‧‧‧Air source W‧‧‧Substrate 1‧‧‧platform 2‧‧‧rotating mechanism 3‧‧‧ Orbit 4‧‧‧Threaded shaft 5‧‧‧Motor 6‧‧‧Frame 7‧‧‧beam 8‧‧‧Guide 9‧‧‧Scribe head 10‧‧‧Mounting plate 11‧‧‧ retainer 12‧‧‧Cutter wheel 13‧‧‧Rotary brush 14‧‧‧ attraction 15‧‧‧Air motor 16‧‧‧Catheter 17‧‧‧Air inlet 18‧‧‧Exhaust 19‧‧‧Piping 20‧‧‧Vacuum ejector 20a‧‧‧Air suction port 20b‧‧‧Air inflow port 20c‧‧‧Nozzle 20d‧‧‧Diffusion room 20e‧‧‧Exhaust port 21‧‧‧Catheter 22‧‧‧Bottom plate 23‧‧‧Air flow controller 24‧‧‧Installation corner

圖1係組裝有本發明之刀輪清掃機構之刻劃裝置之前視圖。 圖2係上述刀輪清掃機構之立體圖。 圖3係上述刀輪清掃機構中之真空噴射器之剖面圖。 圖4係上述刀輪清掃機構之空氣迴路圖。 圖5係表示刀輪之清掃時之刻劃裝置之前視圖。Fig. 1 is a front view of a scoring device incorporating the cutter wheel cleaning mechanism of the present invention. Fig. 2 is a perspective view of the above-described cutter wheel cleaning mechanism. Fig. 3 is a cross-sectional view of a vacuum ejector in the above-described cutter wheel cleaning mechanism. Fig. 4 is an air circuit diagram of the above cutter wheel cleaning mechanism. Fig. 5 is a front view of the scoring device during cleaning of the cutter wheel.

A‧‧‧刀輪清掃機構 A‧‧‧Cutter wheel cleaning mechanism

13‧‧‧旋轉刷 13‧‧‧Rotary brush

14‧‧‧吸引口 14‧‧‧ attraction

15‧‧‧氣動馬達 15‧‧‧Air motor

16、21‧‧‧導管 16, 21‧‧‧ Catheter

17‧‧‧空氣導入口 17‧‧‧Air inlet

18‧‧‧排氣口 18‧‧‧Exhaust

19‧‧‧配管 19‧‧‧Piping

20‧‧‧真空噴射器 20‧‧‧Vacuum ejector

20a‧‧‧空氣吸引埠 20a‧‧‧Air suction port

20b‧‧‧空氣流入埠 20b‧‧‧Air inflow port

20e‧‧‧排出埠 20e‧‧‧Exhaust port

22‧‧‧底板 22‧‧‧Bottom plate

23‧‧‧空氣流量控制器 23‧‧‧Air flow controller

Claims (4)

一種刀輪清掃機構,安裝於刻劃裝置,該刻劃裝置藉由一邊將刀輪按壓於基板表面一邊使其移動而於基板加工刻劃線, 該刀輪清掃機構具備:馬達驅動式旋轉刷,其於遠離加工上述刻劃線之作業區域之位置且配置於上述刀輪之可移動之範圍內;及吸引口,其於該旋轉刷之附近開口,上述吸引口連接於空氣源。A cutter wheel cleaning mechanism is installed in a scribing device. The scribing device processes a scribing line on a substrate by moving the cutter wheel while pressing the surface of the substrate, The cutter wheel cleaning mechanism is provided with: a motor-driven rotating brush located at a position away from the working area for processing the scoring line and within a movable range of the cutter wheel; and a suction port near the rotating brush Opening, the suction port is connected to the air source. 如請求項1所述之刀輪清掃機構,其中, 上述吸引口經由配管連接於真空噴射器之空氣吸引埠,於該真空噴射器之空氣流入埠經由導管連接有上述空氣源,驅動上述旋轉刷之馬達由氣動馬達形成。The cutter wheel cleaning mechanism according to claim 1, wherein, The suction port is connected to an air suction port of a vacuum ejector through a pipe, and the air inflow port of the vacuum ejector is connected to the air source through a duct, and a motor that drives the rotary brush is formed by an air motor. 如請求項2所述之刀輪清掃機構,其中, 上述旋轉刷以及上述吸引口與上述真空噴射器一併組裝於共通之底板而作為一個單元形成。The cutter wheel cleaning mechanism according to claim 2, wherein, The rotary brush and the suction port are assembled together with the vacuum ejector on a common bottom plate and formed as a unit. 一種刻劃裝置,藉由一邊將刀輪按壓於基板表面一邊使其移動而於基板加工刻劃線,安裝有刀輪清掃機構,該刀輪清掃機構具備:馬達驅動式旋轉刷,其於遠離加工上述刻劃線之作業區域之位置且配置於上述刀輪之可移動之範圍內;及吸引口,其於該旋轉刷之附近開口,上述吸引口連接於空氣源。A scribing device that processes a scribing line on a substrate by moving it while pressing the cutter wheel against the surface of the substrate. A cutter wheel cleaning mechanism is installed. The cutter wheel cleaning mechanism includes: a motor-driven rotating brush, which is away from The position of the working area for processing the scribing line is arranged within the movable range of the cutter wheel; and the suction port is opened near the rotating brush, and the suction port is connected to an air source.
TW108113958A 2018-06-28 2019-04-22 Cutter wheel cleaning mechanism and scribe device capable of removing dusts or cutting residuals attached to the cutter tip or gap between the holder and the cutter in a short time without using manual operation TW202000329A (en)

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JPJP2018-123168 2018-06-28
JP2018123168A JP2020001275A (en) 2018-06-28 2018-06-28 Cutter wheel cleaning mechanism and scribe device

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