TW201945710A - Particle detecting module - Google Patents

Abstract

A particle detecting module is disclosed and comprises a main body, which is consist of an air guiding part and a detecting part, by driving a plurality of heaters disposed within a plurality of chambers of the air guiding part, the gas inside these chambers is heated and the moisture of the gas is removed, and then the gas is transmitted to the detecting part, so that a sensor of the detecting part could detect the diameter and the concentration of the particle, and the interference of the moisture is reduced.

Description

Particle monitoring module

This case relates to a particulate monitoring module, especially a particulate monitoring module that can maintain a standard monitoring humidity and can be combined with a thin portable device for gas monitoring.

Suspended particles are solid particles or droplets contained in the air. Due to their very small particle size, they can easily enter the lungs of the human body through the nose hair in the nasal cavity, which can cause lung inflammation, asthma or cardiovascular disease. Contaminants attach to suspended particles, which will increase the harm to the respiratory system.

Most current gas detection is fixed-point, and can only measure the gas information around the gas observation station. It cannot provide the concentration of suspended particles anytime, anywhere. In addition, the detection of suspended particles is difficult to avoid the interference of water vapor. Under high humidity environment, After the particles are surrounded by water vapor, the volume becomes larger, the light transmission is insufficient, and the small water molecules (water droplets) increase, which will directly affect the accuracy of the detection. In view of this, how to detect suspended particles anytime, anywhere, and To avoid the influence of the ambient temperature and humidity on the detection results, to achieve the purpose of accurately monitoring the concentration of suspended particulates anytime, anywhere, is a problem that needs to be urgently solved at present.

The main purpose of this case is to provide a particle monitoring module that can be combined with a thin portable device for particle monitoring. The particle monitoring module first sucks gas from the air inlet into the first compartment and heats it in the first compartment, so that the gas located in the first compartment can be maintained at the standard humidity monitoring, and the sensing efficiency of the gas sensor is improved. In addition, the main body is provided with a monitoring chamber with a one-way opening to provide a one-way gas introduction and discharge monitoring. The resonance plate then conducts gas through the actuation of the actuator to achieve the purpose of real-time monitoring of the particle monitoring module in a thin portable device.

A broad implementation aspect of this case is a particle monitoring module, which includes: a main body, a particle monitoring base, an actuator, and a sensor. The main body is composed of a gas guiding body and a monitoring body, wherein the gas guiding body has a plurality of gas storage chambers and a plurality of ventilation channels. Each of the gas storage chambers is provided with an air inlet, a hot gas exhaust port, an air outlet, and a heating element. The heating element heats and dehumidifies the gas in the gas storage chamber, and causes the water vapor formed by heating inside the gas storage chamber to be discharged from the hot gas discharge port, and the dehumidified gas is led out through the air discharge port. Each two adjacent gas storage chambers communicate with each other through a corresponding ventilation channel, so that the gas in each gas storage chamber is guided to a neighboring ventilation channel through a corresponding ventilation channel after dehumidification. Air-storage chamber to perform dehumidification operation again. An air inlet compartment and an air outlet compartment are separated from the inside of the monitoring body by a bearing partition, and the monitoring body is provided with an exhaust hole to communicate with the air outlet compartment and the outside of the body. The carrying partition is provided with a communication port for connecting the inlet compartment and the outlet compartment. The particle monitoring base is disposed in the intake compartment and has a monitoring channel. One end of the monitoring channel is provided with a receiving slot, and the receiving slot is in communication with the monitoring channel. The actuator is installed in the particle monitoring base to control the gas from the inlet compartment into the monitoring channel, and then communicate with the outlet through the communication port to the outlet compartment. Finally, it is discharged through the exhaust hole to form a single-direction gas in the monitoring body The sensor is arranged on the bearing partition and is located in the monitoring channel of the particle monitoring base for monitoring the particle concentration of the gas in the monitoring channel. As a result, when external air with a humidity of more than 40% is introduced into the air-conducting body, it is heated and dehumidified by a series of air storage chambers, so that the humidity of the gas reaches 10 ~ 40%, and then it is introduced into the monitoring body and guided by the actuator. Sent to the monitoring channel, and the sensor detects the accurate particle concentration of the gas in the monitoring channel.

Some typical embodiments embodying the features and advantages of this case will be described in detail in the description in the subsequent paragraphs. It should be understood that the present case can have various changes in different aspects, all of which do not depart from the scope of the present case, and the descriptions and diagrams therein are essentially for the purpose of illustration, rather than limiting the case.

This case provides a particle monitoring module. Please refer to FIGS. 1 to 3. In the first embodiment of the case, the particle monitoring module includes a main body 1, a particle monitoring base 2, an actuator 3, and a sensor 4. . The main body 1 is formed by combining a gas guiding body 11 and a monitoring body 12 with each other. The air guiding body 11 has a plurality of air storage chambers 111 and a plurality of ventilation channels 112. Each of the gas storage chambers 111 is provided with an air inlet 1111, a hot gas exhaust port 1112, an air outlet 1113, and a heating element 1114. After the gas enters the gas storage chamber 111 from the air inlet 1111, the gas in the gas storage chamber 111 is heated and dehumidified through the heating element 1114, so that the water vapor formed by the heating in the gas storage chamber 111 is heated by the hot gas. The discharge port 1112 is discharged outside the gas storage chamber 111. Finally, the heated and dehumidified gas is discharged from the air outlet 1113. Each ventilation channel 112 is disposed between the corresponding two adjacent gas storage chambers 111, which means that each two adjacent gas storage chambers 111 communicate with each other through a corresponding ventilation channel 112. After the dehumidification, the gas in each air storage chamber 111 is guided to a neighboring air storage chamber 111 through a corresponding ventilation channel 112, so as to perform the dehumidification operation again.

Please continue to refer to FIG. 1 and FIG. 4, an air inlet compartment 122 and an air outlet compartment 123 are separated from the inside of the monitoring body 12 by a bearing partition 121. The monitoring body 12 is provided with an exhaust hole 124 that communicates with the air outlet compartment 123 and the outside of the main body 1. The carrying partition 121 is provided with a communication port 125 to communicate the inlet compartment 122 and the outlet compartment 123.

The particle monitoring base 2 is disposed in the intake compartment 112. In this embodiment, the particle monitoring base 2 is disposed on the bearing partition 121 and accommodated in the intake compartment 122. The particle monitoring base 2 has a monitoring channel 21, one end of the monitoring channel 21 has a receiving slot 22, the receiving slot 22 communicates with the monitoring channel 21, and the other end of the monitoring channel 21 is connected to the communication opening 125 of the carrying partition 121 through.

The actuator 3 is disposed in the receiving groove 22 of the particle monitoring base 2 and closes the receiving groove 22 to control the introduction of gas from the inlet compartment 122 into the monitoring channel 21 and then to the outlet compartment through the communication port 125 In 123, it is finally discharged through the exhaust hole 124, so as to constitute a single-direction gas guide of the monitoring body 12. The sensor 4 is disposed on the bearing partition 121 and is located in the monitoring channel 21 of the particle monitoring base 2 to monitor the particle concentration of the gas in the monitoring channel 21. Among them, the monitoring channel 21 is directly connected to the intake compartment 122 vertically, so that the upper side of the monitoring channel 21 can conduct gas directly without affecting the flow of air. This can speed up the introduction of gas into the monitoring channel 21 and detect through the sensor 4 to improve gas monitoring. s efficiency.

Please continue to refer to FIG. 1 and FIG. 4. The particle monitoring base 24 further has a laser emitter 23 and a beam channel 24. The laser transmitter 23 is electrically connected to the bearing partition 121 and is adjacent to the beam channel 24 to emit the beam into the beam channel 24. The beam channel 24 is in communication with the monitoring channel 21 and is used to guide the laser transmitter The emitted light beam is irradiated into the monitoring channel 21. When the light beam irradiates the gas in the monitoring channel 21, a plurality of light spots will be generated by the suspended particles contained in the gas. The sensor 4 senses the particle diameter and concentration of the suspended particles by receiving the light spots generated by the suspended particles. In this embodiment, the sensor 4 is a PM2.5 sensor, but is not limited thereto.

Referring to FIG. 1, the monitoring body 12 further has a connection hole 126 for a circuit flexible board 5 to penetrate into, so that one end of the circuit flexible board 5 is electrically connected to the actuator 3. After the circuit flexible board 5 is connected to the actuator 3, the connection hole 126 is closed with a sealant to prevent gas from being introduced into the intake compartment 122 through the connection hole 126. In addition, the carrying partition 121 has an exposed portion 121a extending out of the main body 1, and a connector 127 is provided on the exposed portion 121a. The connector 127 is electrically connected to the other end of the flexible circuit board 5 and is used to provide electrical energy and signals for the bearing partition 121 and the flexible circuit board 5. In this embodiment, the carrier partition 121 is a circuit board, but is not limited thereto.

Please continue to refer to FIG. 1. After the external air having a humidity of more than 40% is introduced into the air guiding body 11, it is heated and dehumidified through a plurality of air storage chambers 111 connected in series, so that the humidity of the gas reaches 10 to 40%, and then It is introduced into the monitoring body 12 and guided to the monitoring channel 21 through the actuator 3, and the gas in the monitoring channel 21 is monitored by the sensor 4 for accurate particle concentration. It is worth noting that, in this embodiment, it is best to keep the humidity of the gas at 20% to 30%.

Referring to FIG. 3, the air guiding body 11 includes a plurality of temperature and humidity sensors 1116, which are respectively disposed in the air storage chamber 111 and are used to monitor the humidity of the gas in the air storage chamber 111 to adjust the heating elements respectively. 1114 heating time and heating power. Each of the gas storage chambers 111 is further provided with a first connection hole 1115 and a second connection hole 1117. The first connection perforation 1115 is provided for the circuit soft board 5 to pass through, so that the circuit soft board 5 can be electrically connected to the heating element 1114, and the first connection perforation 1115 is closed by a sealant to prevent gas from entering the gas storage chamber 111 from the first connection perforation 1115. Inside. The second connection perforation 1117 is also provided for the circuit soft board 5 to pass through, so that the circuit soft board 5 can be electrically connected to the temperature and humidity sensor 1116, and the second connection perforation 1117 is closed by a sealant to prevent gas from entering through the second connection perforation 1117. Inside the gas storage chamber 111.

Please refer to FIG. 5. In this embodiment, the air guiding body 11 is further provided with a plurality of valves 6 respectively provided at the air inlet 1111, the hot air exhaust port 1112 and the air outlet 1113 of each air storage chamber 111. It is used to control the opening and closing of the gas storage chamber 111 for heating and dehumidification, and the result of monitoring by the temperature and humidity sensor 1116 is used to control the opening and closing state of the valve 6.

In this case, the dehumidifying and heating method for introducing gas into the air guiding body 11 has the following embodiments:

First of all, the first embodiment is as follows. When the control valve 6 opens the air inlets 1111, the hot air exhaust ports 1112, and the air outlets 1113 of all the gas storage chambers 111, when external air with a humidity of 40% or more is introduced into the air guiding body 11, the air is used in series. The connected and connected gas storage chamber 111 performs multiple heating and dehumidification of multiple chambers, and uses a temperature and humidity sensor 1116 to monitor the humidity of the gas in the gas storage chamber 111 to adjust the heating time and heating of the heating element 1114 respectively. power. In addition, the water vapor formed by heating and dehumidification in the gas storage chamber 111 is discharged from the hot gas discharge port 1112, and the gas with a humidity of 10-40% after dehumidification is then introduced into the monitoring body 12.

The second embodiment is as follows. When one of the gas storage chambers 111 is heated and dehumidified, the control valve 6 opens the air inlet 1111 and the hot gas discharge port 1112 of one of the gas storage chambers 111 and closes one of the gas storage chambers 111. The air outlet 1113 controls the valve 6 of the other air storage chamber 111 to open the air inlet 1111 of the other air storage chamber 111 and the air outlet 1113 and close the hot air exhaust port 1112 of the other air storage chamber 111, so that the humidity is above 40%. The external air is introduced into one of the air storage chambers 111 and is heated and dehumidified by the heating element 1114. After the temperature and humidity sensor 1116 monitors the humidity of the gas in one of the air storage chambers 111 to a desired value, the air outlet 1113 of the air storage chamber 111 that has completed heating and dehumidification is opened, thereby achieving a humidity of 10 ~ 40% of the gas is directly introduced into the monitoring body 12 to form a single chamber heating and dehumidifying operation.

The third embodiment is as follows. When one of the air storage chambers 111 is heated and dehumidified, the control valve 6 opens the air inlet 1111 and the hot air discharge port 1112 of one of the air storage chambers 111 and closes one of the air storage chambers 111. The air outlet 1113 allows external air having a humidity of more than 40% to be introduced into one of the air storage chambers 111, and is heated and dehumidified by the heating element 1114. After the temperature and humidity sensor 1116 monitors the humidity of the gas in one of the gas storage chambers 111 at a desired value, the air outlet 1113 is opened, and the dehumidified gas is introduced into the next gas storage chamber 111 for heating and dehumidification. . At this time, the valve 6 of the next connected gas storage chamber 111 is controlled to open the air inlet 1111 and the hot air exhaust port 1112 and close the air outlet 1113, so that the gas is heated and dehumidified again after dehumidification. Similarly, after the temperature and humidity sensor 1116 monitors the humidity of the gas in the next series of connected gas storage chambers 111 to a desired value, the air outlet 1113 is opened, and the gas after the second dehumidification is introduced into the other gas storage chambers connected in series. The chamber 111 continues to perform multiple batch heating dehumidification. Finally, the required gas with a humidity of 10 to 40% is led into the monitoring body 12 to constitute a multi-chamber heating and dehumidification operation.

After understanding the heating and dehumidifying operation of the above particle monitoring module, the structure and operation mode of the actuator 3 of the first embodiment of the present invention will be described below.

Please refer to FIG. 6 to FIG. 7C. The actuator 3 of the first embodiment of the present case is a gas pump. The actuator 3 includes a jet hole plate 31, a cavity frame 32, and an actuator 33 that are sequentially stacked. 。 Insulation frame 34 and conductive frame 35. The air-jet hole sheet 31 includes a plurality of connecting members 31a, a suspension sheet 31b, and a hollow hole 31c. The suspension sheet 31b can be bent and vibrated, and the plurality of connecting members 31a are adjacent to the periphery of the suspension sheet 31b. In the first embodiment of the present application, the number of the connecting members 31a is four, which are respectively adjacent to the four corners of the suspension sheet 31b, but it is not limited thereto. A hollow hole 31c is formed at the center of the suspension sheet 31b. The cavity frame 32 is stacked on the suspension sheet 31b, and the actuator 33 is stacked on the cavity frame 32, and includes a piezoelectric carrier 33a, an adjustment resonance plate 33b, and a piezoelectric plate 33c. The piezoelectric carrier 33a is stacked on the cavity frame 32, the adjustment resonance plate 33b is stacked on the piezoelectric carrier 33a, and the piezoelectric plate 33c is stacked on the adjusted resonance plate 33b. The piezoelectric plate 33c is deformed after a voltage is applied to drive the piezoelectric carrier plate 33a and the adjustment resonance plate 33b to perform reciprocating bending vibration. The insulating frame 34 carries a piezoelectric carrier plate 33 a stacked on the actuating body 33, and the conductive frame 35 carries a stack on the insulating frame 34. A resonance chamber 36 is formed between the actuator 33, the cavity frame 32, and the suspension sheet 31b. The thickness of the adjustment resonance plate 33b is larger than the thickness of the piezoelectric carrier plate 33a.

Referring to FIG. 7A, the actuator 3 allows the actuator 3 to be disposed in the receiving groove 22 of the particle monitoring base 2 through the connecting member 31 a. The air-jet hole sheet 31 is spaced from the bottom surface of the receiving groove 22, and an air-flow chamber 37 is formed therebetween. Please refer to FIG. 7B. When a voltage is applied to the piezoelectric plate 33c of the actuator 33, the piezoelectric plate 33c begins to deform due to the piezoelectric effect and drives the adjustment resonance plate 33b and the piezoelectric carrier plate 33a to move in the same place. At this time, the air jet hole piece 31 will be driven together by the Helmholtz resonance principle, so that the actuating body 33 moves away from the bottom surface of the receiving groove 22. As the actuating body 33 moves away from the bottom surface of the receiving groove 22, the volume of the airflow chamber 37 between the air-jet hole piece 31 and the bottom surface of the receiving groove 22 increases, and a negative pressure is formed in the internal air pressure, which causes the actuation Because of the pressure gradient, the air outside the device 3 enters the airflow chamber 37 through the gap between the connecting piece 31a of the air-jet hole sheet 31 and the side wall of the receiving groove 22 and collects pressure. Finally, please refer to FIG. 7C. When the gas continuously enters the airflow chamber 37 to make the air pressure in the airflow chamber 37 form a positive pressure, the actuator 33 is driven by the voltage to move to the bottom surface of the receiving groove 22 to compress the airflow chamber. The volume of the chamber 37 pushes the air in the airflow chamber 37 so that the gas enters the airflow passage 21. Thereby, the sensor 4 can detect the concentration of suspended particles contained in the gas in the air flow passage 21.

The actuator 3 in the first embodiment of this case is a gas pump. Of course, the actuator 3 in this case can also be a micro-electro-mechanical system gas pump manufactured by a micro-electro-mechanical process. Among them, the air jet hole sheet 31, the cavity frame 32, the actuator body 33, the insulating frame 34, and the conductive frame 35 can be made by a surface micromachining technology, thereby reducing the volume of the actuator 3.

The specific structure of the valve 6 is described with reference to FIGS. 8A and 8B. The valve 6 includes a holding member 61, a sealing member 62, and a displacement member 63. The displacement member 63 is disposed between the holding member 61 and the sealing member 62 and is displaceable therebetween. The holding member 61 has a plurality of through holes 611, and the displacement member 63 is also provided with a through hole 631 at a position corresponding to the through hole 611 on the holding member 61. The through holes 611 of the holder 61 and the through holes 631 of the displacement member 63 are aligned with each other. The sealing member 62 is provided with a plurality of through holes 621, and the positions of the through holes 621 of the sealing member 62 and the through holes 611 on the holding member 61 are misaligned and misaligned. The holding member 61, the sealing member 62, and the displacement member 63 of the valve 6 are connected to a processor (not shown) through the flexible circuit board 5. The processor controls the displacement of the displacement member 63 to constitute the opening of the valve 6.

The displacement member 63 of the valve 6 may be a charged material, and the holder 61 is a conductive material with two polarities. The holder 61 is electrically connected to the processor of the circuit board 5 for controlling the polarity (positive or negative polarity) of the holder 61. If the displacement member 63 is a negatively charged material, when the valve 6 must be controlled to open, the processor controls the holder 61 to form a positive electrode. At this time, the displacement member 63 and the holder 61 maintain different polarities, which will cause the displacement member 63 Approaching the holder 61, the valve 6 is opened (as shown in FIG. 8B). Conversely, if the displacement member 63 is a negatively charged material, when the valve 6 must be controlled to be closed, the processor controls the holder 61 to form a negative electrode. At this time, the displacement member 63 and the holder 61 maintain the same polarity, so that the displacement member 63 Approaching the seal 62 closes the valve 6 (as shown in FIG. 8A).

Alternatively, the displacement member 63 of the valve 6 may be a magnetic material, and the holder 61 is a magnetic material whose polarity can be controlled. The holder 61 is electrically connected to the processor of the circuit board 5 for controlling the polarity (positive or negative) of the holder 61. If the displacement member 63 is a magnetic material with a negative electrode, when the valve 6 must be controlled to open, the processor controls the holder 61 to form a positive magnetism. At this time, the displacement member 63 and the holder 61 maintain different polarities, so that the displacement member 63 faces The holder 61 approaches, and the valve 6 is opened (as shown in FIG. 8B). Conversely, if the displacement member 63 is a magnetic material with a negative electrode, when the valve 6 must be controlled to be closed, the processor controls the holder 61 to form a negative magnet. At this time, the displacement member 63 and the holder 61 maintain the same polarity, so that the displacement member 63 approaches the sealing member 62 and closes the valve 6 (as shown in FIG. 8A).

Please refer to FIG. 9 to FIG. 11. The structure and operation mode of the second embodiment of the particle monitoring module of this case are substantially the same as those of the first embodiment, except that the structure and operation mode of the actuator 3 ′ are different. The structure and operation method of the actuator 3 'in the second embodiment of the present case will be described.

Please refer to FIG. 12A, FIG. 12B, and FIG. 13A. The actuator 3 'of the second embodiment of the present case is a gas pump, which includes an air inlet plate 31', a resonance plate 32 ', and a piezoelectric actuator. Device 33 ', a first insulating sheet 34', a conductive sheet 35 ', and a second insulating sheet 36'. The air intake plate 31 ', the resonance sheet 32', the piezoelectric actuator 33 ', the first insulating sheet 34', the conductive sheet 35 ', and the second insulating sheet 36' are sequentially stacked and combined.

In the second embodiment, the air inlet plate 31 'has at least one air inlet hole 31a', at least one busbar groove 31b ', and a busbar cavity 31c'. The busbar groove 31b 'is provided corresponding to the air inlet hole 31a'. The air inlet hole 31a 'is used for introducing gas, and the bus bar groove 31b' guides the gas introduced from the air inlet hole 31a 'to the merge chamber 31c'. The resonance piece 32 'has a hollow hole 32a', a movable portion 32b ', and a fixed portion 32c'. The hollow hole 32a 'is provided corresponding to the confluence chamber 31c' of the air intake plate 31 '. The movable portion 32b 'is provided around the hollow hole 32a', and the fixed portion 32c 'is provided on the periphery of the movable portion 32b'. The resonance sheet 32 'and the piezoelectric actuator 33' together form a cavity space 37 'therebetween. Therefore, when the piezoelectric actuator 33 'is driven, the gas will be introduced through the air inlet hole 31a' of the air inlet plate 31 ', and then collected by the busbar groove 31b' to the busbar chamber 31c '. Then, the gas passes through the hollow hole 32a 'of the resonance sheet 32', so that the piezoelectric actuator 33 'and the movable portion 32b' of the resonance sheet 32 'resonate to transmit the gas.

Please refer to FIGS. 12A, 12B, and 13A. The piezoelectric actuator 33 'includes a suspension plate 33a', an outer frame 33b ', at least one bracket 33c', and a piezoelectric element 33d '. In this embodiment, the suspension plate 33a 'has a square shape and can be bent and vibrated, but it is not limited thereto. The suspension plate 33a 'has a convex portion 33f'. In the second embodiment, the suspension plate 33a 'is designed in a square shape because the structure of the square suspension plate 33a' obviously has the advantage of saving power compared to the circular shape. For a capacitive load operating at a resonance frequency, the power consumption will increase as the resonance frequency increases. Since the resonance frequency of the square suspension plate 33a 'is lower than that of a circular suspension plate, the power consumption will also be lower. However, in other embodiments, the 33a ′ shape of the suspension plate may be changed according to actual needs. The outer frame 33b 'is provided around the outside of the suspension plate 33a'. The bracket 33c 'is connected between the suspension plate 33a' and the outer frame 33b 'to provide a supporting force for elastically supporting the suspension plate 33a'. The piezoelectric element 33d 'has a side length that is less than or equal to one side length of the suspension plate 33a'. The piezoelectric element 33d 'is attached to a surface of the suspension plate 33a', and is used to apply a driving voltage to drive the suspension plate 33a 'to bend and vibrate. At least one gap 33e 'is formed between the suspension plate 33a', the outer frame 33b ', and the bracket 33c' for the gas to pass through. The convex portion 33f 'is convexly provided on the other surface of the suspension plate 33a'. In the second embodiment, the suspension sheet 33 a ′ and the convex portion 33 f ′ are an integrally formed structure manufactured by an etching process, but not limited thereto.

Please refer to FIG. 13A. In the second embodiment, the cavity space 37 'can be filled with a material, such as conductive, by using a gap generated between the resonance plate 32' and the outer frame 33b 'of the piezoelectric actuator 33'. Glue, but not limited to this, so that a certain depth can be maintained between the resonance plate 32 'and the suspension plate 33a', thereby guiding the gas to flow more quickly. In addition, since the suspension plate 33a 'and the resonance plate 32' are kept at an appropriate distance, the contact interference between them is reduced, and the generation of noise can also be reduced. In other embodiments, the height of the outer frame 33b 'of the piezoelectric actuator 33' can be increased to reduce the gap filled between the resonance plate 32 'and the outer frame 33b' of the piezoelectric actuator 33 '. The thickness of the conductive adhesive in. In this way, under the condition that the suspension plate 33a 'and the resonance plate 32' can still be kept at an appropriate distance, the overall assembly of the actuator 3 'will not affect the filling thickness of the conductive adhesive due to the hot pressing temperature and cooling temperature, and avoid the conductive adhesive Due to thermal expansion and contraction, the actual size of the chamber space 37 'after assembly is completed.

Please refer to FIG. 13B. In other embodiments, the suspension plate 33a 'can be formed by stamping, so that the suspension plate 33a' can extend outward by a distance, and the outward extension distance can be formed by the bracket 33c 'between the suspension plate 33a' and the outside. It is adjusted between the frames 33b 'so that both the surface of the convex portion 33f' on the suspension plate 33a 'and the surface of the outer frame 33b' form a non-coplanar surface. A small amount of filling material is applied to the assembled surface of the outer frame 33b ', for example, conductive adhesive, and the piezoelectric actuator 33' is bonded to the fixing portion 32c 'of the resonance plate 32' by hot pressing, so that the pressure is reduced. The electric actuator 33 'can be combined with the resonance plate 32'. In this way, the structural improvement of the cavity space 37 'by pressing and forming the suspension plate 33a' of the above-mentioned piezoelectric actuator 33 'is required. The cavity space 37 'can be completed by adjusting the stamping distance of the floating plate 33a' of the piezoelectric actuator 33 ', which effectively simplifies the structural design of adjusting the cavity space 37', and also achieves simplified process and shortened process time. Etc.

Please return to FIG. 12A and FIG. 12B. In the second embodiment, the first insulating sheet 34 ', the conductive sheet 35', and the second insulating sheet 36 'are all frame-shaped thin sheets, but this is not the case. limit. The air inlet plate 31 ', the resonance sheet 32', the piezoelectric actuator 33 ', the first insulating sheet 34', the conductive sheet 35 ', and the second insulating sheet 36' can be processed by micro-electromechanical surface micromachining technology. The actuator 3 'is reduced in size to form a micro-electromechanical system actuator 3'.

Next, referring to FIG. 13C, during the actuation process of the piezoelectric actuator 33 ', the piezoelectric element 33d' of the piezoelectric actuator 33 'is deformed when a driving voltage is applied, which drives the suspension plate 33a' away from the intake air. The plate 31 'is displaced in the direction, and the volume of the chamber space 37' is increased at this time, and a negative pressure is formed in the chamber space 37 ', so that the gas in the confluence chamber 31c' is drawn into the chamber space 37 '. At the same time, the resonance plate 32 'generates resonance and moves in a direction away from the air intake plate 31', which in turn increases the volume of the confluence chamber 31c '. And because the gas in the confluence chamber 31c 'enters the chamber space 37', the confluence chamber 31c 'is also in a negative pressure state, and then the gas is sucked into the confluence through the air inlet 31a' and the bus groove 31b '. Inside the chamber 31c '.

Furthermore, as shown in FIG. 13D, the piezoelectric element 33d 'drives the suspension plate 33a' to move toward the air intake plate 31 ', compressing the chamber space 37'. Similarly, the resonance plate 32 'is actuated by the suspension plate 33a', Resonance is generated and the gas is displaced toward the air intake plate 31 ′, forcing the gas in the chamber space 37 ′ to be pushed synchronously to further transmit through the gap 33 e ′ to achieve the effect of transmitting the gas.

Finally, as shown in FIG. 13E, when the suspension plate 33a 'is driven back to the state not driven by the piezoelectric element 33d', the resonance plate 32 'is also driven at the same time to move away from the intake plate 31', At this time, the resonance sheet 32 'moves the gas in the compression chamber space 37' toward the gap 33e ', and increases the volume in the convergence chamber 31c', so that the gas can continuously pass through the air inlet hole 31a 'and the busbar groove 31b. 'To converge in the confluence chamber 31c'. By continuously repeating the operation steps of the actuator 3 'shown in Figs. 13C to 13E, the actuator 3' can continuously flow gas at a high speed to achieve the operation of transmitting and outputting the gas by the actuator 3 '.

Next, referring back to FIG. 12A and FIG. 12B, a conductive pin 351 'protrudes from the outer edge of the conductive sheet 35', and a curved electrode 352 'protrudes from the inner edge. The electrode 352' is electrically connected to the piezoelectric electrode. The piezoelectric element 33d 'of the actuator 33'. The conductive pin 351 'of the conductive sheet 35' is turned on by an external current to drive the piezoelectric element 33d 'of the piezoelectric actuator 33'. In addition, the arrangement of the first insulating sheet 34 'and the second insulating sheet 36' can prevent the occurrence of a short circuit.

In summary, the particle monitoring module provided in this case has heating elements installed in the plurality of air storage chambers, so that the air introduced into the monitoring body by the air guiding body maintains the humidity at 10 ~ 40%, and then the actuator will The gas maintained at 10 ~ 40% humidity is introduced into the monitoring channel from the intake compartment to detect the particle size and concentration of suspended particles. By maintaining the monitoring standard humidity, the monitoring efficiency of suspended particles is improved, and the effect of detecting suspended particles is improved. In addition, the particle monitoring module provided in this case can be combined with a thin portable device to monitor suspended particles. In line with the habit of carrying portable devices with modern people, it can achieve the effect of detecting suspended particles anytime and anywhere, which is extremely industrially applicable. And progressive.

This case can be modified by anyone who is familiar with this technology, but it is not as bad as the protection of the scope of patent application.

1‧‧‧ main body

11‧‧‧Air guiding body

111‧‧‧Gas storage chamber

1111‧‧‧Air inlet

1112‧‧‧Hot air exhaust

1113‧‧‧Air outlet

1114‧‧‧Heating element

1115‧‧‧ first connection perforation

1116‧‧‧Temperature and Humidity Sensor

1117‧‧‧Second connection perforation

112‧‧‧Ventilation channel

12‧‧‧ monitoring body

121‧‧‧ bearing partition

121a‧‧‧Exposed

122‧‧‧Air inlet compartment

123‧‧‧Outlet compartment

124‧‧‧Vent hole

125‧‧‧Connecting port

126‧‧‧Connecting hole

127‧‧‧Connector

2‧‧‧ Particle monitoring base

21‧‧‧monitoring channel

22‧‧‧Receiving trough

23‧‧‧Laser Launcher

24‧‧‧ Beam Channel

3‧‧‧Actuator

3'‧‧‧Actuator

31‧‧‧air hole film

31'‧‧‧Air intake plate

31a‧‧‧Connector

31b‧‧‧ Suspension Tablet

31c‧‧‧Hollow

31a'‧‧‧air inlet

31b'‧‧‧ bus bar

31c'‧‧‧Confluence Chamber

32‧‧‧ Cavity Frame

32'‧‧‧ Resonator

32a'‧‧‧ hollow hole

32b'‧‧‧ Movable part

32c'‧‧‧Fixed section

33‧‧‧Actuator

33a‧‧‧ Piezo Carrier

33b‧‧‧Adjust resonance plate

33c‧‧‧piezo

33c'‧‧‧ bracket

33'‧‧‧ Piezo Actuator

33a'‧‧‧ suspension board

33b'‧‧‧ frame

33d'‧‧‧ Piezoelectric element

33e'‧‧‧ Clearance

33f'‧‧‧ convex

34‧‧‧ Insulated Frame

34'‧‧‧First insulating sheet

35‧‧‧ conductive frame

35'‧‧‧Conductive sheet

351'‧‧‧ conductive pin

352'‧‧‧ electrode

36‧‧‧Resonant Chamber

36'‧‧‧Second insulation sheet

37‧‧‧Airflow chamber

37'‧‧‧ chamber space

4‧‧‧ Sensor

5‧‧‧circuit board

6‧‧‧ valve

61‧‧‧Retainer

62‧‧‧seals

63‧‧‧Displacement

611, 621, 631‧‧‧ through hole

FIG. 1 is a schematic cross-sectional view of the first embodiment of the particle monitoring module of the present invention. FIG. 2 is a schematic cross-sectional view of a gas guiding body according to the first embodiment of the present invention. FIG. 3 is a schematic cross-sectional view of the gas storage chamber of the first embodiment of the present invention as viewed from a perspective opposite to that of FIG. 2. FIG. 4 is a schematic cross-sectional view of a monitoring body according to the first embodiment of the present invention. FIG. 5 is a schematic cross-sectional view of a valve provided in the gas storage chamber according to the first embodiment of the present invention. FIG. 6 is a three-dimensional exploded view of the actuator according to the first embodiment of the present invention. FIG. 7A is a schematic cross-sectional view of an actuator according to the first embodiment of the present invention. 7B to 7C are schematic diagrams of the operation of the actuator according to the first embodiment of the present invention. FIG. 8A is a schematic sectional view of a valve according to the first embodiment of the present invention. FIG. 8B is a schematic diagram of the operation of the valve according to the first embodiment of the present invention. FIG. 9 is a schematic cross-sectional view of a second embodiment of the particle monitoring module of the present invention. FIG. 10 is a schematic cross-sectional view of a monitoring body according to a second embodiment of the present invention. FIG. 11 is a schematic cross-sectional view of a valve provided in a gas storage chamber according to a second embodiment of the present invention. FIG. 12A is a schematic three-dimensional exploded view of an actuator according to the second embodiment of the present invention as viewed from a top view. FIG. 12B is a schematic three-dimensional exploded view of the actuator viewed from a bottom perspective according to the second embodiment of the present invention. FIG. 13A is a schematic cross-sectional view of an actuator according to a second embodiment of the present invention. FIG. 13B is a schematic cross-sectional view of an actuator according to another embodiment of the present invention. 13C to 13E are schematic diagrams of the operation of the actuator according to the second embodiment of the present invention.

Claims (17)

A particle monitoring module includes: a main body composed of a gas conducting body and a monitoring body, wherein the gas conducting body has: a plurality of gas storage chambers, each of which is provided with a gas storage chamber An air inlet, a hot gas exhaust port, an air outlet, and a heating element. The heating element heats and dehumidifies the gas in the gas storage chamber, and causes the water vapor formed inside the gas storage chamber to be heated by the hot gas. The vent is discharged, and the dehumidified gas is led out through the vent; and a plurality of ventilation channels, wherein each two adjacent gas storage chambers communicate with each other through a corresponding ventilation channel, so that each After dehumidification, the gas in the gas storage chamber is guided to a neighboring gas storage chamber through a corresponding ventilation channel, so as to perform dehumidification again; the inside of the monitoring body is separated by a bearing partition. An air inlet compartment and an air outlet compartment are provided, and the monitoring body is provided with an exhaust hole, the exhaust hole communicates with the air outlet compartment and the outside of the main body, the carrying partition is provided with a communication port, and the communication port is provided for Connect this An air inlet compartment and the air outlet compartment; a particle monitoring base disposed in the air inlet compartment and having a monitoring channel, one end of the monitoring channel has a receiving slot, and the receiving slot is in communication with the monitoring channel An actuator is arranged in the particle monitoring base to control the introduction of gas from the inlet compartment into the monitoring channel, and then to the outlet compartment through the communication port, and finally discharged through the exhaust hole, thereby A single-direction gas guide constituting the monitoring body; and a sensor disposed on the bearing partition and located in the monitoring channel of the particle monitoring base for monitoring the particle concentration of the gas in the monitoring channel; Therefore, after the external air with a humidity of more than 40% is introduced into the air guiding body, each of the air storage chambers connected in series is heated to dehumidify, so that the humidity of the gas reaches 10 to 40%, and then is introduced into the monitoring body. The actuator is guided into the monitoring channel, and the sensor detects the accurate particle concentration of the gas in the monitoring channel. The particle monitoring module described in the first item of the patent application scope, wherein the humidity of the gas is preferably maintained at 20% -30%. The particulate monitoring module according to item 1 of the scope of patent application, wherein the air guiding body includes a plurality of temperature and humidity sensors, which are respectively disposed in each of the air storage chambers and used to monitor each of the air storage chambers. The humidity of the gas can be used to adjust the heating time and heating power of the heating element. The particulate monitoring module according to item 3 of the scope of patent application, wherein the air guiding body includes a plurality of valves provided in the air inlet, the hot air exhaust port, and the air outlet of each of the air storage chambers. The opening and closing of each of the gas storage chambers for heating and dehumidification is controlled, and the opening and closing state of the valve is controlled by the monitoring result of the temperature and humidity sensor. The particulate monitoring module according to item 4 of the scope of the patent application, wherein the gas storage chamber controls the valve to open the air inlet, the air outlet, and the hot gas exhaust port during heating and dehumidification, so that the humidity is above 40% The external air is introduced into the air guiding body and passes through each of the air storage chambers connected in series to perform multiple heating and dehumidification. The water vapor formed by heating and dehumidification in each air storage chamber can be discharged by the hot air. It is discharged from the mouth, and the gas with a humidity of 10-40% after dehumidification is then introduced into the monitoring body. The particulate monitoring module according to item 4 of the scope of the patent application, wherein one of the gas storage chambers is heated and dehumidified, the valve opens the air inlet and the hot gas discharge port and closes the air outlet, and the other Each of the air storage chambers controls the valve to open the air inlet and the air outlet and close the hot air discharge port, so that external air with a humidity of more than 40% is introduced into the air storage chamber for heating and dehumidification, and is heated by the heating element. Dehumidification, after the temperature and humidity sensor monitors the humidity of the gas in the air storage chamber for heating and dehumidification to reach a required value, open the air outlet of the air storage chamber that has completed heating and dehumidification, and the humidity reaches 10 ~ 40% of the gas passes through each of the other gas storage chambers and enters the monitoring body to form a single chamber heating and dehumidifying operation. The particulate monitoring module according to item 4 of the scope of the patent application, wherein one of the gas storage chambers controls the valve to open the air inlet and the hot gas discharge opening and close the air outlet when heating and dehumidifying, The external air with a humidity of more than 40% is introduced into the air storage chamber, and heated by the heating element to dehumidify. After the temperature and humidity sensor monitors the humidity of the gas in the air storage chamber to a required value, the air outlet is opened. The dehumidified gas is re-introduced into each of the gas storage chambers in the next series for heating and dehumidification. At this time, the valve of each of the gas storage chambers in the next series controls the opening of the air inlet and the hot gas discharge port. Close the air outlet to heat and dehumidify the air again after dehumidification. Similarly, after the temperature and humidity sensor monitors the humidity of the gas in the gas storage chamber to a desired value, open the air outlet again. The gas is re-introduced into each of the gas storage chambers in series to continue to perform multiple batch heating and dehumidification. Finally, the required gas with a humidity of 10 to 40% is introduced into the monitoring body to form a multi-chamber heating and dehumidification. Of operating. The particle monitoring module according to item 1 of the patent application scope, wherein the sensor is a PM2.5 sensor. The particle monitoring module according to item 1 of the patent application scope, wherein the actuator is a micro-electro-mechanical system gas pump. The particle monitoring module according to item 1 of the patent application scope, wherein the actuator is a gas pump, which includes: a jet hole piece, including a plurality of connecting pieces, a suspension piece and a hollow hole, the suspension The sheet can be flexibly vibrated. The plurality of connectors are adjacent to the periphery of the suspension sheet, and the hollow hole is formed at the center of the suspension sheet. The plurality of connectors elastically support the suspension sheet, and by providing the plurality of connectors, The actuator is disposed in the receiving groove of the particle monitoring base, an air flow chamber is formed between the air jet hole piece and the receiving groove, and at least one gap is formed in the plurality of connecting members and the suspension. Between the plates; a cavity frame carrying a stack on the suspension plate; a uniform moving body carrying a stack on the cavity frame for receiving a voltage to generate reciprocating bending vibration; an insulating frame carrying a stack On the actuating body; and a conductive frame, a load-bearing stack is disposed on the insulating frame; wherein a resonance chamber is formed between the actuating body, the cavity frame and the suspension sheet, and the actuating body is driven through In order to drive the air-jet orifice sheet to generate resonance, the suspension sheet of the air-jet orifice sheet generates a reciprocating vibration displacement, thereby driving the gas through the at least one gap into the air flow chamber, and then into the monitoring channel to realize the gas. transmission. The particle monitoring module according to item 10 of the patent application scope, wherein the actuating body comprises: a piezoelectric carrier plate, which is stacked on the cavity frame; an adjustment resonance plate, which is stacked on the piezoelectric body A carrier plate; and a piezoelectric plate carried on the adjustment resonance plate for receiving voltage to drive the piezoelectric carrier plate and the adjustment resonance plate to generate reciprocating bending vibration. The particle monitoring module according to item 11 of the scope of patent application, wherein the thickness of the adjusted resonance plate is greater than the thickness of the piezoelectric carrier plate. The particulate monitoring module according to item 1 of the scope of patent application, wherein the actuator is a gas pump, which includes: an air inlet plate having at least one air inlet hole, at least one corresponding to the position of the air inlet hole A bus bar and a bus chamber, the air inlet hole is used to introduce gas, the bus bar is used to guide the gas introduced from the air hole to the bus room; a resonance plate having a position corresponding to the bus room A hollow hole, and a movable portion surrounding the hollow hole; and a piezoelectric actuator, which is disposed corresponding to the resonance plate in position, so that the air intake plate, the resonance plate, and the piezoelectric actuation The actuators are sequentially stacked, and a cavity space is formed between the resonance plate and the piezoelectric actuator, so that when the piezoelectric actuator is driven, gas is introduced through the air inlet hole of the air inlet plate. Is collected by the busbar groove to the busbar chamber, and then passes through the hollow hole of the resonance plate, so that the piezoelectric actuator and the movable part of the resonance plate generate resonance to transmit gas. The particle monitoring module according to item 13 of the scope of patent application, wherein the piezoelectric actuator includes: a suspension plate having a square shape and can be bent and vibrated; an outer frame arranged around the outside of the suspension plate At least one bracket connected between the suspension plate and the outer frame to provide elastic support; and a piezoelectric element having one side length, the side length being less than or equal to one side length of the suspension plate, and the piezoelectric The component is attached to a surface of the suspension plate and is used to apply a voltage to drive the suspension plate to bend and vibrate. The particulate monitoring module according to item 13 of the patent application scope, wherein the actuator further includes a first insulating sheet, a conductive sheet, and a second insulating sheet, wherein the air inlet plate, the resonance sheet, the pressure The electric actuator, the first insulating sheet, the conductive sheet, and the second insulating sheet are sequentially stacked. The particle monitoring module according to item 1 of the scope of the patent application, wherein the carrier partition is a circuit board. The particle monitoring module according to item 16 of the patent application scope, wherein the particle monitoring base and the sensor are electrically connected to the bearing partition, and the particle monitoring base includes a laser emitter, the laser emitter It is electrically connected to the bearing partition and is provided with a beam channel, which is in communication with the monitoring channel for the beam emitted by the laser emitter to illuminate the monitoring channel, so that the gas contained in the monitoring channel contains The suspended particles are irradiated by the light beam to generate projected light spots, which are sensed by the sensor.