TW201940852A - Pressure sensing device - Google Patents

Abstract

A pressure-sensitive device (10A) comprises: a pressure sensor (20); a film member (30); and an elastic member (40A). The pressure sensor (20) has a pressure-sensitive surface (201). The film member (30) is elastic and is fixed around the pressure-sensitive surface (201) so as to face the pressure-sensitive surface (201) with a space therebetween. The elastic member (40A) is disposed between the pressure-sensitive surface (201) and the film member (30) and transmits a force applied to the film member (30) to the pressure-sensitive surface (201).

Description

Pressure sensing device

This description relates to a general pressure sensing device, and more particularly to a pressure sensing device including a pressure sensor.

Patent Document 1 discloses a capacitive pressure sensing semiconductor device (pressure sensing device). The semiconductor device includes a pressure sensing section that senses pressure by a change in electrostatic capacitance, and a package that closes the pressure sensor. The pressure sensing unit includes a first electrode and a second electrode disposed opposite to the first electrode through a predetermined distance, and an electrostatic capacitance is formed between the first electrode and the second electrode. The pressure sensor changes the capacitance by changing the distance according to the pressure transmitted to the first electrode by the pressing member. The package is provided with a pressure transmitting member that transmits the pressure generated by the pressing member of the first electrode that is transmitted to the pressure sensor to the first electrode.

In Patent Document 1, it is necessary to form a package in which not only the pressure sensing section but also a pressure transmitting member is accommodated, so the overall structure becomes complicated.
[Prior technical literature]
[Patent Literature]

Patent Document 1: Japanese Patent Application Publication No. 2013-156066

[Problems to be Solved by the Invention]

An object of the present invention is to provide a pressure-sensing device capable of improving the efficiency of transmitting pressure to a pressure-sensing surface with a simple structure.

[Means for solving problems]

A pressure sensing device according to the present invention includes a pressure sensor, a membrane member, and an elastic member. The pressure sensor has a pressure-sensitive surface. The film member has elasticity and is relatively fixed around the pressure-sensitive surface to the pressure-sensitive surface at intervals. The elastic member is positioned between the pressure-sensitive surface and the film member, and transmits a force applied to the film member to the pressure-sensitive surface.

Implementation form
1.1 Embodiment 1
1.1.1 Overview FIGS. 1 and 2 show a pressure sensing device 10A according to this embodiment. The pressure sensing device 10A includes a pressure sensor 20, a membrane member 30, and an elastic member 40A. The pressure sensor 20 has a pressure-sensitive surface 201. The film member 30 has elasticity and is relatively fixed around the pressure-sensitive surface 201 on the pressure-sensitive surface 201 at intervals. The elastic member 40A is located between the pressure-sensitive surface 201 and the film member 30 and transmits a force applied to the film member 30 to the pressure-sensitive surface 201.

As described above, the pressure-sensitive device 10A fixes the elastic film member 30 around the pressure-sensitive surface 201 on the pressure-sensitive surface 201 with an interval therebetween, and arranges the elastic member 40A between the film member 30 and the pressure-sensitive surface 201. In this configuration, when pressure is applied to the film member 30, the pressure applied to the film member 30 is transmitted to the pressure-sensitive surface 201 through the elastic member 40A due to the deformation of the film member 30 itself. That is, the film member 30 and the elastic member 40A have a function as a pressing mechanism for pressing the pressure-sensitive surface 201. Thereby, the improvement of the pressure transmission efficiency to the pressure-sensitive surface 201 can be improved. Moreover, this effect can be obtained only by the simple structure in which the film member 30 and the elastic member 40A are provided in the pressure sensor 20. Therefore, with the pressure-sensing device 10A, it is possible to improve the pressure transmission efficiency of the pressure-sensing surface 201 with a simple structure. In addition, since the film member 30 is fixed around the pressure-sensitive surface 201, positioning of the elastic member 40A becomes easy.

In addition, the elastic member 40A is positioned between the film member 30 and the pressure-sensitive surface 201, thereby protecting the pressure-sensitive surface 201 from excessive pressure applied to the film member 30. Therefore, the pressure sensitive device 10A is expected to protect the pressure sensitive surface 201 of the elastic member 40A and the film member 30.

1.1.2 Structure Hereinafter, the pressure sensing device 10A will be described in more detail with reference to FIGS. 1 to 3. The pressure sensing device 10A includes a pressure sensor 20, a membrane member 30, an elastic member 40A, a pressing member 50, a first adhesive layer 61, and a second adhesive layer 62.

The pressure sensor 20 has a pressure-sensitive surface 201. The pressure sensor 20 detects a force (pressure) applied to the pressure-sensitive surface 201. In this embodiment, the pressure sensor 20 is an electrostatic capacitance type pressure sensor. The electrostatic capacitance type pressure sensor has the advantages of saving power and obtaining a circuit for detecting output from the pressure sensor 20 (for example, an amplifier is not needed).

The pressure sensor 20 includes a sensor element 21 and a package 22 as shown in FIG. 3. The pressure sensor 20 includes a first terminal 23, a second terminal 24, a first connection portion 25, and a second connection portion 26. The pressure sensor 20 has a size of several [mm] in a vertical dimension, a number of [mm] in a horizontal dimension, and a size of 1 [mm] or less in height.

The sensing element 21 includes a substrate 210, an electrode 211, a separator 212, an insulating member 213, an adhesive member 214, and an electrode pad 215. The sensing element 21 can be fabricated as a micro-electromechanical system (MEMS).

The substrate 210 is a flat plate having a quadrangular shape (for example, a square shape). The substrate 210 has electrical insulation. In this embodiment, the substrate 210 is made of glass. The substrate 210 has a first surface and a second surface (upper and lower surfaces in FIG. 3).

The electrode 211 is located on the first surface of the substrate 210. In particular, the electrode 211 is fixed to the center of the first surface of the substrate 210. The electrode 211 is, for example, a circular film.

The diaphragm 212 is a first surface of the substrate 210. The diaphragm 212 includes a thin plate portion 212a and a support portion 212b. The thin plate portion 212a is a portion used for sensing pressure. Since the thin plate portion 212a is thinner than the support portion 212b, it is easier to deform than the support portion 212b. The support portion 212 b is a portion for supporting the thin plate portion 212 a at a predetermined position with respect to the substrate 210. More specifically, the support portion 212 b is fixed to the first surface of the substrate 210 around the electrode 211, and the thin plate portion 212 a and the electrode 211 located on the first surface of the substrate 210 support the thin plate portion 212 a with an interval therebetween. Further, as shown in FIG. 3, the separator 212 has a through hole 212 c for connecting the second connection portion 26 to the electrode 211. The separator 212 has conductivity. The separator 212 is formed of, for example, silicon having conductivity as a dopant of impurities. Further, in the present embodiment, the thin plate portion 212a is circular, and the support portion 212b is rectangular frame-shaped. Therefore, the diaphragm 212 has a rectangular plate shape (for example, a square shape) as a whole.

The thin plate portion 212 a of the separator 212, the insulating member 213, and the electrode 211 constitute a capacitor 216. In this case, the surface (the upper surface in FIG. 3) opposite to the electrode 211 of the thin plate portion 212 a becomes the pressure-sensitive surface 201. That is, a region of the pressure-sensitive surface 201 opposite to the membrane member 30 is formed by the diaphragm 212. When a force is applied to the pressure-sensitive surface 201, the thin plate portion 212a of the diaphragm 212 is bent in response to the applied force. That is, as the force applied to the pressure-sensitive surface 201 increases, the bending of the thin plate portion 212a increases. In addition, the distance between the thin plate portion 212a and the electrode 211 is changed in accordance with the bending of the thin plate portion 212a, and as a result, the electrostatic capacitance of the capacitor 216 is changed. That is, as the force applied to the pressure-sensitive surface 201 becomes larger, the distance between the thin plate portion 212a and the electrode 211 becomes shorter, and the electrostatic capacitance of the capacitor 216 becomes larger. Therefore, a force (pressure) applied to the pressure-sensitive surface 201 can be detected.

The insulating member 213 includes an insulating film 213a and a cylindrical portion 213b. The insulating film 213a is, for example, a disc-shaped insulator (dielectric). The insulating film 213a is thinner than the thin plate portion 212a, for example. The insulating film 213 a is a surface (the lower surface of FIG. 3) facing the electrode 211 in the thin plate portion 212 a of the separator 212. When the thin plate portion 212a is pressed toward the substrate 210 side with a certain force or more, the insulating film 213a is brought into contact with the electrode 211. The insulating film 213a can prevent the separator 212 and the electrode 211 from being short-circuited by directly contacting the separator 212 and the electrode 211 by the deformation of the thin plate portion 212a of the separator 212. In addition, with the insulating member 213, the pressure sensor 20 can secure a gap between the thin plate portion 212a of the diaphragm 212 and the electrode 211. Therefore, in the pressure sensor 20, an electrostatic capacitance is generated between the thin plate portion 212 a and the electrode 211. Thereby, the pressure sensor 20 can detect the force applied to the pressure-sensitive surface 201. The cylindrical portion 213b is, for example, a cylindrical insulator (dielectric). The cylindrical portion 213b is provided at one end of the insulating film 213a. The cylindrical portion 213 b surrounds the connection point with the second connection portion 26 in the electrode 211. The inside of the tube portion 213b is connected to the through hole 212c of the diaphragm 212. As a result, a part of the electrode 211 is exposed inside the cylindrical portion 213b and the through hole 212c.

The next member 214 is fixed to the second surface of the substrate 210. The next member 214 is used for fixing the pressure sensitive device 10A to the mounting substrate. Next, the member 214 has a rectangular shape (for example, a square shape). In this embodiment, the bonding member 214 is a die attach film (DAF). The small piece of connection film has almost no function as an adhesive at room temperature, for example, it has a function as an adhesive by heating in a manufacturing step.

The electrode pad 215 is a surface (the upper surface in FIG. 3) located on the side opposite to the substrate 210 of the separator 212. The electrode pad 215 can be used for applying a potential to the separator 212.

Both the first terminal 23 and the second terminal 24 are flat. The first terminal 23 and the second terminal 24 are electrically connected to the diaphragm 212 and the electrode 211 via the first connection portion 25 and the second connection portion 26, respectively. Both the first connection portion 25 and the second connection portion 26 are conductive cables. The first connection portion 25 connects one end to the first terminal 23 and connects the other end to the electrode pad 215. The second connection portion 26 connects one end to the second terminal 24 and connects the other end to the electrode 211 through the through-hole 212c of the support portion 212b.

The package 22 houses the sensing element 21, the first terminal 23, the second terminal 24, the first connection portion 25, and the second connection portion 26. The package 22 has a rectangular box shape (for example, a rectangular parallelepiped box shape) as a whole (see FIG. 2). The package 22 includes a first surface 221 and a second surface 222 that face the opposite sides in the thickness direction. The first surface 221 and the second surface 222 of the package 22 are a surface and an inner surface of the pressure sensor 20, respectively. The first surface 221 of the package 22 has an opening 223 that exposes at least the pressure-sensitive surface 201 of the sensing element 21. Thereby, the inner side surface of the opening 223 and the pressure-sensing surface 201 constitute a recess 202 of the pressure sensor 20. The pressure-sensitive surface 201 is located on the bottom surface of the recess 202. The opening size of the opening 223 gradually decreases as it goes from the first surface 221 to the second surface 222 of the package 22. In this embodiment, the opening 223 is circular, and the inner diameter of the opening 223 gradually decreases as it goes from the first surface 221 to the second surface 222 of the package 22. The opening 223 is a central portion of the first surface 221 of the package 22. Then, the second member 222, the first terminal 23, and the second terminal 24 are exposed on the second surface 222 of the package 22. The package 22 is a resin molded product. That is, the pressure sensor 20 is formed by inserting the sensing element 21, the first terminal 23, the second terminal 24, the first connection portion 25, and the second connection portion 26 as inserts, and can be formed by insert molding.

The film member 30 has elasticity. As shown in FIG. 3, the film member 30 is relatively fixed around the pressure-sensitive surface 201 on the pressure-sensitive surface 201 at intervals. The film member 30 is shown as a quadrangle (for example, a rectangle) as shown in FIG. 2. The membrane member 30 is the entirety of the first surface 221 of the package 22 covering the pressure sensor 20 as shown in FIG. 1. That is, the film member 30 is the first surface 221 of the package 22 fixed to the pressure sensor 20 as shown in FIGS. As described above, since the film member 30 covers the recessed portion 202, it is possible to prevent foreign matter from being mixed into the recessed portion 202 and to prevent a malfunction of the pressure sensor 20. In the present embodiment, the membrane member 30 and the pressure sensor 20 are joined by the first adhesive layer 61. The first adhesive layer 61 covers the entire surface of the pressure sensor 20 side of the film member 30. Examples of the material of the film member 30 include elastomers (for example, polyimide, silicone, and butyl rubber). The film member 30 has electrical insulation properties. Thereby, the electrical influence on the pressure-sensitive surface 201 can be reduced.

The elastic member 40A is located between the pressure-sensitive surface 201 and the membrane member 30 as shown in FIG. 3. The elastic member 40A is a member for transmitting a force applied to the film member 30 to the pressure-sensitive surface 201. The elastic member 40A is fixed to the film member 30. Thereby, the film member 30 is fixed to the pressure sensor 20, and positioning of the elastic member 40A is performed. In particular, the elastic member 40A is fixed to the film member 30 so as to face the pressure-sensitive surface 201. Since the elastic member 40A is fixed to the membrane member 30, the displacement of a surface perpendicular to the pressure direction of the elastic member 40A is prevented, and the detection accuracy of the pressure sensor 20 can be improved. Here, the respective central axes of the elastic member 40A and the pressure-sensitive surface 201 coincide with each other. The fixing of the elastic member 40A of the film member 30 is performed using the first adhesive layer 61. The elastic member 40A has a circular columnar shape. At this time, the height of the elastic member 40A is smaller than the depth of the recessed portion 202. Therefore, as shown in FIG. 3, there is a gap between the elastic member 40A and the pressure-sensitive surface 201. Thereby, the transmission of the low pressure to the pressure-sensing surface 201 is eliminated, and a high pressure can be transmitted, and the pressure sensor 20 can detect a high pressure. The volume of the elastic member 40A is smaller than the volume of the recess 202. This means that the entirety of the recess 202 is not buried in the elastic member 40A. Thereby, the elastic member 40A can be displaced within the recessed portion 202. Therefore, even when the elastic member 40A is deformed under pressure, the elastic member 40A can be incorporated into the recess 202 to improve the efficiency of transmitting the pressure to the pressure-sensitive surface 201. Examples of the material of the elastic member 40A include an elastomer (for example, polyimide, silicone, and butyl rubber). The elastic member 40A has electrical insulation properties. Thereby, the electrical influence on the pressure-sensitive surface 201 can be reduced.

In the present embodiment, the bending deflection of the elastic member 40A is larger than the bending deflection of the diaphragm 212. Further, the bending deflection of the film member 30 is larger than the bending deflection of the elastic member 40A. Thereby, the transmission efficiency of the pressure to the pressure-sensitive surface 201 can be improved.

As shown in FIG. 3, the pressing member 50 is positioned on the side opposite to the elastic member 40A with the film member 30 interposed therebetween. That is, the pressing member 50 is fixed to the film member 30 on the side opposite to the elastic member 40A. Having the pressing member 50 easily applies pressure to the film member 30. The film member 30 and the pressing member 50 are joined by the second adhesive layer 62. In the present embodiment, the respective central axes of the pressing member 50 and the elastic member 40A coincide with each other. The pressing member 50 has a circular plate shape. The size (outer dimension) of the pressing member 50 is smaller than the size (outer dimension) of the elastic member 40A. Examples of the material of the pressing member 50 are elastomers (for example, polyimide, silicone, and butyl rubber). However, the pressing member 50 has higher hardness than the film member 30 and the elastic member 40A. Therefore, when pressure is applied to the pressing member 50, the film member 30 and the elastic member 40A are deformed before the pressing member 50. This makes it easier to apply pressure to the film member 30 and improves operability. The pressing member 50 has electrical insulation properties. Thereby, the electrical influence on the pressure-sensitive surface 201 can be reduced.

1.1.3 Operation As in the pressure sensing device 10A described above, the pressure sensor 20 detects a force (for example, a pressing force) applied to the pressing member 50. When a user (or a pressing member) presses the pressing member 50, the film member 30 is deformed by the pressing force applied to the pressing member 50, and the elastic member 40A is moved to the pressure-sensitive surface 201 side. When the pressing force is increased in this state, the elastic member 40A is brought into contact with the pressure-sensitive surface 201, whereby the pressing force applied to the pressing member 50 is transmitted to the pressure-sensitive surface 201 through the membrane member 30 and the elastic member 40A. In addition, a detection output corresponding to a force applied to the film member 30 (pressing member 50) can be obtained from the pressure sensor 20.

1.1.4 Application The pressure sensing device 10A is used to provide control or information for a device or the like that uses the detection output of the pressure sensor 20. Specific uses include, for example, a stylus, a wearable terminal, an information terminal (smartphone, tablet terminal, etc.), a control device (power tool, etc.), a detection device (tactile detection device, warpage detection device, etc.) . The pressure sensing device 10A can also be used for sensors such as an air pressure sensor and a water pressure sensor.

1.2 Embodiment 2
4 and 5 show a pressure sensing device 10B according to the second embodiment. The pressure sensing device 10B includes an elastic member 40B instead of the elastic member 40A.

The elastic member 40B is located between the pressure-sensitive surface 201 and the membrane member 30 as shown in FIG. 5. The elastic member 40B is a member for transmitting a force applied to the film member 30 to the pressure-sensitive surface 201. However, the elastic member 40B is in contact with the pressure-sensitive surface 201 and covers the pressure-sensitive surface 201. More specifically, the elastic member 40B is the entire recessed portion 202 of the pressure sensor 20 in the recessed portion 202. However, the elastic member 40B is not a previously formed component, as the elastic member 40A is formed by filling the recessed portion 202 with the material of the elastic member 40B and hardening. That is, in this embodiment, the elastic member 40B is formed by filling the recessed portion 202 with the material of the elastic member 40B, and it is not necessary to perform positioning of the elastic member 40B. The height of the elastic member 40B corresponds to the depth of the recess 202. Therefore, the surface opposite to the pressure-sensitive surface 201 of the elastic member 40B is the same plane as the first surface 221 of the package 22. Therefore, the elastic member 40B is connected to the film member 30. The material of the elastic member 40B is the same as that of the elastic member 40A, and examples thereof include an elastomer (for example, polyimide, silicone, and butyl rubber). In addition, the elastic member 40B has electrical insulation properties.

As described above, in the pressure sensing device 10B, the pressure sensor 20 detects a force (for example, a pressing force) applied to the pressing member 50. When the user (or the pressing member) presses the pressing member 50, the film member 30 and the elastic member 40B are pressed to the pressure-sensitive surface 201 by the pressing force applied to the pressing member 50. Thereby, the pressing force applied to the pressing member 50 is transmitted to the pressure-sensitive surface 201 through the membrane member 30 and the elastic member 40B. In addition, a detection output corresponding to a force applied to the film member 30 (pressing member 50) can be obtained from the pressure sensor 20.

The pressure-sensing device 10B of the second embodiment can be used for the same applications as the pressure-sensing device 10A.

2 Modifications The embodiments 1 and 2 described above are merely examples of various embodiments of the present specification. In addition, as long as the first and second embodiments can achieve the purpose of the cost specification, various changes can be made to the design and the like. Hereinafter, modifications of the first and second embodiments will be listed.

For example, the structure of the pressure sensor 20 is not limited to the example described above. For example, the sensing element 21 of the pressure sensor 20 is not an electrostatic capacitance type, and may be a resistance type using a varistor. In the sensing element 21, the adhering member 214 is not necessary. In addition, the shape of the package 22 may be a polygonal box shape other than a quadrangle, or a circular box shape. The package 22 only needs to expose at least a part of the pressure-sensing surface 201 of the sensing element 21 and accommodate the shape of the sensing element 21. Although the first terminal 23 and the second terminal 24 are exposed on the second surface 222 of the package 22, they may be exposed on the side surface of the package 22. In addition, as long as the sensing element 21 has a configuration equivalent to the first terminal 23 and the second terminal 24, the first connection portion 25 and the second connection portion 26 are not necessary.

For example, the shape of the film member 30 is not limited to the shape described above. For example, the film member 30 may have a polygonal shape other than a quadrangle, or a circular shape. The materials of the film member 30 and the pressing member 50 are not limited to the examples described above. In addition, the film member 30 may have not only a single-layer structure but also a multiple-layer structure. Further, the film member 30 is fixed to the package 22 of the pressure sensor 20, and thereby fixed to the periphery of the pressure-sensing surface 201. However, the film member 30 may be directly fixed around the pressure-sensitive surface 201 of the sensing element 21. At this time, the film member 30 may not be a flat plate shape, but a dome shape that forms a space where the elastic member 40A can be arranged between the film member 30 and the pressure-sensitive surface 201. The film member 30 may be at least opposed to the pressure-sensitive surface 201 at intervals, and may be connected to the periphery of the pressure-sensitive surface 201. Therefore, the film member 30 can be directly or indirectly fixed around the pressure-sensitive surface 201. For bonding the film member 30 of the pressure sensor 20, in addition to using an adhesive such as the first adhesive layer 61, laser welding may be used.

For example, the shape of the elastic member 40A is not limited to the shape described above. For example, the elastic member 40A is not a circular plate shape, but a polygonal plate shape such as a quadrangle. The volume of the elastic member 40A may be equal to or smaller than the volume of the recess 202. One example is that the elastic member 40A may have a shape in which the entire recessed portion 202 is embedded. At this time, the elastic member 40A is fitted into the recess 202, and the elastic member 40A is positioned with respect to the pressure sensor 20. Conversely, the volume of the elastic member 40A may be equal to or greater than the volume of the recess 202. However, it is preferable that the elastic member 40A can be received in the recess 202. Further, in Embodiment 1, the elastic member 40A is not in contact with the pressure-sensitive surface 201 when pressure is not applied to the film member 30 (when the film member 30 is maintained in its original shape). However, the elastic member 40A may be in constant contact with the pressure-sensitive surface 201. The material of the elastic member 40A is not limited to the examples described above. In addition, although the elastic member 40A of the film member 30 is bonded using an adhesive such as the first adhesive layer 61, laser welding may be used. In addition, the elastic member 40A and the film member 30 may be formed as a component.

For example, the shape of the elastic member 40B is not limited to the shape described above. That is, the elastic member 40B may not be a shape in which the entire recessed portion 202 is embedded, but a shape that occupies a part of the recessed portion 202. At this time, the elastic member 40B is only required to be between the pressure-sensitive surface 201 and the film member 30, and may not be in contact with the film member 30. In addition, the material of the elastic member 40B is not limited to the example described above.

For example, the shape of the pressing member 50 is not limited to the shape described above. For example, the pressing member 50 may be not only a circular plate shape but also a polygonal plate shape such as a quadrangle. The material of the pressing member 50 is not limited to the example described above. The bonding of the pressing member 50 of the film member 30 may be performed by laser welding in addition to the adhesive of the second adhesive layer 62. In addition, the pressing member 50 and the film member 30 may be formed as one component. Moreover, the pressing member 50 is not necessary.

3 Aspects As can be seen from the above embodiments and modifications, this specification includes the following first to seventh aspects. The following is only for clearly showing the correspondence relationship with the embodiment, and the symbols with parentheses are attached.

The first aspect of the pressure sensing device (10A; 10B) includes a pressure sensor (20), a membrane member (30), and an elastic member (40A; 40B). The pressure sensor (20) has a pressure-sensitive surface (201). The film member (30) has elasticity. The film member (30) is relatively provided around the pressure-sensitive surface (201) on the pressure-sensitive surface (201) at intervals. The elastic member (40A; 40B) is located between the pressure-sensitive surface (201) and the film member (30), and transmits a force applied to the film member (30) to the pressure-sensitive surface (201). According to the first aspect, it is possible to improve the transmission efficiency of the pressure to the pressure-sensitive surface (201) with a simple structure. In addition, since the film member (30) is fixed around the pressure-sensitive surface (201), positioning of the elastic member (40A; 40B) becomes easy.

The pressure sensing device (10A; 10B) of the second aspect can be realized by combining with the first aspect. In a second aspect, the pressure sensor (20) has a recess (202) on a surface (first surface 221). The pressure-sensitive surface (201) is a bottom surface of the recessed portion (202). The film member (30) is fixed to the surface (first surface 221) and covers the recessed portion (202). According to the second aspect, since the film member (30) covers the recessed portion (202), foreign matter can be prevented from being mixed into the recessed portion, and malfunction of the pressure sensor (20) can be prevented.

The third aspect of the pressure sensing device (10A) can be realized by a combination with the second aspect. In a third aspect, the volume of the elastic member (40A) is smaller than the volume of the recess (202). According to the third aspect, even when the elastic member (40A) is deformed under pressure, the elastic member (40A) can be incorporated into the recess (202) to improve the efficiency of transmitting pressure to the pressure-sensitive surface (201).

The fourth aspect of the pressure sensing device (10A) can be realized by a combination with the third aspect. In a fourth aspect, the elastic member (40A) is fixed to the film member (30). According to the fourth aspect, since the elastic member (40A) is fixed to the membrane member (30), it is possible to prevent displacement of a surface perpendicular to the pressure direction of the elastic member (40A), thereby improving the detection of the pressure sensor (20). Precision.

The pressure sensing device (10A) of the fifth aspect can be realized by a combination with the third or fourth aspect. In a fifth aspect, there is a gap between the elastic member (40A; 40B) and the pressure-sensitive surface (201). According to the fifth aspect, transmission of low pressure to the pressure-sensitive surface (201) is excluded, and high pressure can be transmitted, and the detection capability of the pressure sensor (20) can be improved.

The sixth aspect of the pressure sensing device (10A) can be realized by a combination with any of the first to fifth aspects. In a sixth aspect, the respective central axes of the elastic member (40A) and the pressure-sensitive surface (201) coincide. According to the sixth aspect, it is possible to improve the transmission efficiency of the pressure to the pressure-sensitive surface (201) with a simple structure.

The pressure sensing device (10B) of the seventh aspect can be realized by a combination with any of the first to fourth aspects. In a seventh aspect, the elastic member (40B) is in contact with the pressure-sensitive surface (201) and covers the pressure-sensitive surface (201). According to the seventh aspect, the material of the elastic member (40B) can be filled into the recess (202) to form the elastic member (40B), and the positioning of the elastic member (40B) is not required.

The pressure sensing device (10B) of the eighth aspect can be realized by combining with the first aspect. In an eighth aspect, the pressure sensor (20) has a recess (202) on a surface (first surface 221). The pressure-sensitive surface (201) is a bottom surface of the recessed portion (202). The elastic member (40B) is an entirety of the recessed portion (202) of the pressure sensor (20) filled in the recessed portion (202). According to the eighth aspect, it is possible to improve the transmission efficiency of the pressure to the pressure-sensitive surface (201) with a simple structure.

The ninth aspect of the pressure sensing device (10B) can be realized by a combination with the eighth aspect. In a ninth aspect, the elastic member (40B) is formed by filling a material of the elastic member (40B) into the recessed portion (202) and curing it. According to the ninth aspect, positioning of the elastic member (40B) is not required.

The pressure sensing device (10B) of the tenth aspect can be realized by a combination with the ninth aspect. In a tenth aspect, the height of the elastic member (40B) is consistent with the depth of the recess (202). According to the tenth aspect, it is possible to improve the transmission efficiency of the pressure to the pressure-sensitive surface (201) with a simple structure.

The pressure sensing device (10A; 10B) of the eleventh aspect can be realized by a combination with any of the first to tenth aspects. In an eleventh aspect, a region of the pressure-sensitive surface (201) opposite to the film member (30) is formed by a diaphragm (212). The bending deflection of the elastic member (40A; 40B) is larger than the bending deflection of the diaphragm (212). The bending deflection of the film member (30) is larger than the bending deflection of the elastic member (40A; 40B). According to the eleventh aspect, the transmission efficiency of the pressure to the pressure-sensitive surface (201) can be improved.

The twelfth aspect of the pressure sensing device (10A; 10B) can be realized by a combination with any of the first to eleventh aspects. In a twelfth aspect, the pressure sensing device (10A; 10B) further includes a pressing member (50). The pressing member (50) is located on the opposite side to the elastic member (40A; 40B) through the film member (30). According to the twelfth aspect, it becomes easy to apply pressure to the membrane member (30).

The pressure sensing device (10A; 10B) of the thirteenth aspect can be realized by combining with the twelfth aspect. In a thirteenth aspect, the size of the pressing member (50) is smaller than the size of the elastic member (40A; 40B). According to the thirteenth aspect, it is easier to apply pressure to the film member (30), and the operability is good.

The pressure sensing device (10A; 10B) of the fourteenth aspect can be realized by combining with the twelfth or thirteenth aspect. In a fourteenth aspect, the pressing member (50) has a higher hardness than the film member (30) and the elastic member (40A; 40B). According to the fourteenth aspect, it is easier to apply pressure to the membrane member (30), and the operability is good.

The fifteenth aspect of the pressure sensing device (10A; 10B) can be realized by a combination with any of the twelfth to fourteenth aspects. In a fifteenth aspect, at least one of the film member (30), the elastic member (40A; 40B), and the pressing member (50) has electrical insulation. According to the fifteenth aspect, the electrical influence on the pressure-sensitive surface (201) can be reduced.

10A, 10B‧‧‧ Pressure Sensing Device

20‧‧‧Pressure sensor

201‧‧‧ pressure sensitive surface

202‧‧‧ Recess

221‧‧‧First side (surface)

30‧‧‧Membrane member

40A, 40B‧‧‧Elastic member

50‧‧‧Pressing member

Fig. 1 is a perspective view of a pressure sensing device according to the first embodiment.

Fig. 2 is an exploded perspective view of the pressure sensing device of the first embodiment.

Fig. 3 is a schematic cross-sectional view of the pressure sensing device of the first embodiment.

Fig. 4 is an exploded perspective view of a pressure sensing device according to a second embodiment.

Fig. 5 is a schematic cross-sectional view of a pressure sensing device according to a second embodiment.

Claims (15)

A pressure sensing device having: Pressure sensor with pressure-sensitive surface; The membrane member has elasticity and is relatively fixed around the pressure-sensitive surface around the pressure-sensitive surface at intervals; and The elastic member is located between the pressure-sensitive surface and the film member, and transmits a force applied to the film member to the pressure-sensitive surface. The pressure-sensing device according to item 1 of the patent application range, wherein the pressure sensor has a recessed portion on the surface, The pressure-sensitive surface is located on the bottom surface of the concave portion. The film member is fixed to the surface and covers the concave portion. According to the pressure-sensing device according to item 2 of the patent application scope, a volume of the elastic member is smaller than a volume of the recessed portion. The pressure-sensing device according to claim 3, wherein the elastic member is fixed to the film member. The pressure-sensing device according to claim 3 or 4, wherein a gap is provided between the elastic member and the pressure-sensitive surface. According to the pressure-sensing device described in any one of claims 1 to 5, in which the central axis of the elastic member and the pressure-sensitive surface are the same. According to the pressure-sensing device according to any one of claims 1 to 4, the elastic member is in contact with the pressure-sensitive surface and covers the pressure-sensitive surface. The pressure-sensing device according to item 1 of the patent application range, wherein the pressure sensor has a recessed portion on the surface, The pressure-sensitive surface is located on the bottom surface of the concave portion. The elastic member is an entirety of the recessed portion filled in the pressure sensor in the recessed portion. According to the pressure-sensing device according to item 8 of the scope of application, the elastic member is formed by filling the recessed portion with a material of the elastic member and curing the elastic member. According to the pressure-sensing device according to item 9 of the scope of patent application, the height of the elastic member is consistent with the depth of the recessed portion. For example, the pressure-sensing device according to any one of claims 1 to 10 in the scope of the patent application, wherein a region of the pressure-sensitive surface opposite to the membrane member is formed of a diaphragm, The bending deflection of the elastic member is greater than the bending deflection of the diaphragm, The bending deflection of the film member is greater than the bending deflection of the elastic member. The pressure-sensing device according to any one of claims 1 to 11 of the scope of patent application, further comprising a pressing member, The pressing member is located on an opposite side to the elastic member via the film member. According to the pressure-sensing device described in claim 12, the size of the pressing member is smaller than the size of the elastic member. According to the pressure-sensing device according to claim 12 or claim 13, the pressing member has a higher hardness than the film member and the elastic member. The pressure-sensing device according to any one of claims 12 to 14, in which at least one of the film member, the elastic member, and the pressing member has electrical insulation properties.