TW201940710A - Cu-Ni-Si-based copper alloy strip which is provided with improved strength and high flatness - Google Patents
Cu-Ni-Si-based copper alloy strip which is provided with improved strength and high flatness Download PDFInfo
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Abstract
Description
本發明係關於一種可適宜用於電子材料等之電子零件之製造的Cu-Ni-Si系銅合金條。 The present invention relates to a Cu-Ni-Si-based copper alloy strip that can be suitably used in the manufacture of electronic parts such as electronic materials.
近年來,隨著IC封裝體之小型化,要求引線框架、電子機器之各種端子、連接器等之小型化、甚至是多引腳化。尤其是,開發出在被稱為QFN(quad flat non-leaded package)之LSI封裝體之連接盤(land)上配置電極墊且不露出引線引腳之構造,且進而要求多引腳化、窄間距化。 In recent years, with the miniaturization of IC packages, miniaturization and even multi-pinning of lead frames, various terminals and connectors of electronic devices are required. In particular, a structure in which electrode pads are arranged on a land of an LSI package called a QFN (quad flat non-leaded package) without exposing lead pins has been developed, and further multi-pin, narrow Spacing.
此處,當形成引線框架時,需對引線框架材料實施蝕刻加工。而且,為了提高引線框架之生產性,要求擴大作為材料之銅合金條之材料寬度。因此,引線框架用之銅合金條之材料要求具有大寬度及優良的平坦性,尤其要求於蝕刻後之平坦性。 Here, when the lead frame is formed, the lead frame material needs to be etched. Further, in order to improve the productivity of the lead frame, it is required to widen the material width of the copper alloy strip as a material. Therefore, the material of the copper alloy strip used for the lead frame is required to have a large width and excellent flatness, and especially flatness after etching.
並且,該等銅合金還要求具有高強度及高導電率,作為引線框架用材料,採用時效析出型Cu-Ni-Si系銅合金(專利文獻1)。 In addition, these copper alloys are required to have high strength and high electrical conductivity. As a material for lead frames, an age-precipitated Cu-Ni-Si-based copper alloy is used (Patent Document 1).
[先前技術文獻] [Prior technical literature]
[專利文獻] [Patent Literature]
[專利文獻1]日本特開平4-231419號公報 [Patent Document 1] Japanese Unexamined Patent Publication No. 4-231419
然而,作為矯正材料之形狀來提高平坦性之方法,有表面軋延(skin pass rolling),但因Cu-Ni-Si系銅合金之材料強度高,故無法利用表面軋延充分進行形狀矯正,從而存在平坦性不佳之情況。並且,專利文獻1中,記載有進行弛力退火(stress-relief annealing)後實施表面軋延之內容,雖能確保材料之強度,但無法充分改善平坦性。 However, as a method of correcting the shape of the material to improve the flatness, there is skin pass rolling. However, because of the high strength of the Cu-Ni-Si-based copper alloy, it is impossible to use the surface rolling to sufficiently shape correct. Therefore, there are cases where the flatness is not good. In addition, Patent Document 1 describes that surface rolling is performed after stress-relief annealing is performed. Although the strength of the material can be secured, the flatness cannot be sufficiently improved.
即,本發明係為了解決上述問題而完成,其目的在於提供一種提高了強度且平坦性高的Cu-Ni-Si系銅合金條。 That is, the present invention has been made in order to solve the above problems, and an object thereof is to provide a Cu-Ni-Si-based copper alloy bar having improved strength and high flatness.
本發明人經過多種研究後發現,藉由在Cu-Ni-Si系銅合金之表面軋延前實施中間弛力退火且控制表面軋延之加工度,能提高材料之加工性而不會損及強度,且能提高表面軋延後之平坦性。 After various studies, the inventors have found that by implementing intermediate relaxation annealing before controlling the surface rolling of Cu-Ni-Si-based copper alloy and controlling the surface rolling processability, the workability of the material can be improved without compromising Strength, and can improve the flatness after surface rolling.
即,本發明之Cu-Ni-Si系銅合金條含有Ni:1.5~4.5質量%、Si:0.4~1.1質量%且剩餘部分含有Cu及不可避免之雜質,並且導電率為30%IACS以上,拉伸強度為800MPa以上,當按照JCBA-T326-2014,於與軋延方向正交之軋延直角方向以25mm以下之間距對於5點以上測定軋延方向之急峻度時,上述急峻度為0.5以下,且以(上述急峻度之偏差/上述急峻度之平均值)×100表示之急峻度之偏差率為12%以下。 That is, the Cu-Ni-Si-based copper alloy strip of the present invention contains Ni: 1.5 to 4.5% by mass, Si: 0.4 to 1.1% by mass, and the remaining portion contains Cu and unavoidable impurities, and has a conductivity of 30% IACS or more, The tensile strength is 800 MPa or more. When the urgency of the rolling direction is measured at 5 points or more in a rolling orthogonal direction orthogonal to the rolling direction at a distance of 25 mm or less according to JCBA-T326-2014, the above-mentioned urgency is 0.5. Hereinafter, the deviation ratio of the urgency expressed by (the deviation of the urgency / the average value of the urgency) × 100 is 12% or less.
進而,較佳為含有合計為0.005~0.8質量%之選自Mg、Fe、P、Mn、Co及Cr之群中之一種以上。 Furthermore, it is preferable to contain one or more selected from the group consisting of Mg, Fe, P, Mn, Co, and Cr in a total amount of 0.005 to 0.8% by mass.
根據本發明,可獲得強度高且平坦性高的Cu-Ni-Si系銅合金條。 According to the present invention, a Cu-Ni-Si-based copper alloy strip having high strength and high flatness can be obtained.
P‧‧‧間距 P‧‧‧Pitch
S1、S2‧‧‧測定點 S1, S2‧‧‧Measurement points
2‧‧‧軋延方向之高度分布 2‧‧‧ height distribution in rolling direction
l‧‧‧波之長度 l‧‧‧wave length
h‧‧‧波之高度 h‧‧‧ wave height
圖1係表示本發明之實施形態之Cu-Ni-Si系銅合金條之材料應變之俯視圖之一例的圖。 FIG. 1 is a diagram showing an example of a top view of a material strain of a Cu—Ni—Si based copper alloy strip according to an embodiment of the present invention.
圖2係表示急峻度之測定方法之模式圖。 Fig. 2 is a schematic diagram showing a method for measuring the severity.
圖3係表示引線框架加工時之平坦性之測定方法之模式圖。 Fig. 3 is a schematic diagram showing a method for measuring flatness during processing of a lead frame.
圖4係繼圖3之後之模式圖。 FIG. 4 is a schematic diagram following FIG. 3.
以下,將說明本發明之實施形態之Cu-Ni-Si系銅合金條。再者,關於本發明之合金組成中之%,只要無特別說明,則均表示質量%。 Hereinafter, a Cu-Ni-Si-based copper alloy strip according to an embodiment of the present invention will be described. In addition, about% in the alloy composition of the present invention, unless otherwise specified, it means mass%.
首先,說明銅合金條之組成之限定理由。 First, the reasons for limiting the composition of the copper alloy bars will be explained.
<Ni及Si> <Ni and Si>
關於Ni及Si,藉由進行時效處理而使Ni與Si形成為以微細的Ni2Si為主的金屬間化合物之析出粒子,從而使合金之強度明顯增加。並且,隨著時效處理中之Ni2Si析出,導電性提高。 Regarding Ni and Si, Ni and Si are formed into precipitated particles of intermetallic compounds mainly composed of fine Ni 2 Si by aging treatment, thereby significantly increasing the strength of the alloy. In addition, as Ni 2 Si is precipitated during the aging treatment, the conductivity is improved.
然而,當Ni濃度未達1.5%、或Si濃度未達0.4%時,即便添加其他成分亦無法獲得所需之強度。並且,當Ni濃度超過4.5%、或Si濃度超過1.1%時,雖可獲得充分的強度,但會導致導電性下降。因此,將Ni的含量設為1.5~4.5%,將Si的含量設為0.4~1.1%。較佳為,將Ni的含量設為1.6~3.0%,將Si的含量設為0.4~0.7%。 However, when the Ni concentration is less than 1.5% or the Si concentration is less than 0.4%, the required strength cannot be obtained even if other components are added. In addition, when the Ni concentration exceeds 4.5% or the Si concentration exceeds 1.1%, sufficient strength can be obtained, but the conductivity decreases. Therefore, the content of Ni is set to 1.5 to 4.5%, and the content of Si is set to 0.4 to 1.1%. The content of Ni is preferably 1.6 to 3.0%, and the content of Si is preferably 0.4 to 0.7%.
<其他元素> <Other elements>
進而,為了改善合金之強度、耐熱性、耐應力緩和性等目的,上述合金中可含有合計為0.005~0.8%之選自Mg、Fe、P、Mn、Co及Cr之群中的一種以 上。若這些元素的合計量未達0.005%,則不會產生上述效果;若超過0.8%,則雖可獲得所需的特性,但有導電性下降之情形。 Furthermore, in order to improve the strength, heat resistance, and stress relaxation resistance of the alloy, the above alloy may contain at least one selected from the group consisting of Mg, Fe, P, Mn, Co, and Cr in a total amount of 0.005 to 0.8%. If the total amount of these elements is less than 0.005%, the above-mentioned effect will not be produced; if it exceeds 0.8%, the required characteristics may be obtained, but the conductivity may be reduced.
<導電率與拉伸強度TS> <Conductivity and tensile strength TS>
本發明之實施形態之Cu-Ni-Si系銅合金條之導電率為30%IACS以上,拉伸強度TS為800MPa以上。 The Cu-Ni-Si-based copper alloy strip according to the embodiment of the present invention has a conductivity of 30% IACS or more and a tensile strength TS of 800 MPa or more.
由於隨著半導體元件之高功能化,處理能力亦增大等原因,引線框架等之電路之通電發熱會增大,故將銅合金條之導電率設為30%IACS以上。 As the semiconductor device becomes more functional and the processing capacity is increased, the electric heating of the lead frame and other circuits will increase, so the conductivity of the copper alloy strip is set to 30% IACS or more.
並且,為了防止線結合時之引線框架之變形等並維持形狀,將拉伸強度TS設為800MPa以上。 In addition, in order to prevent deformation and the like of the lead frame during wire bonding and maintain the shape, the tensile strength TS is set to 800 MPa or more.
<急峻度> <Severity>
本發明之實施形態之Cu-Ni-Si系銅合金條之軋延方向之急峻度之平均值Av為0.5以下,且以(急峻度之偏差D/急峻度之平均值Av)×100表示的急峻度之偏差率DR為12%以下。 The average value of the severity in the rolling direction of the Cu-Ni-Si-based copper alloy strip according to the embodiment of the present invention is 0.5 or less, and is expressed by (deviation of severity D / average of severity Av) × 100. The deviation rate DR is less than 12%.
於JCBA-T326-2014中規定了急峻度,如圖1所示,測定Cu-Ni-Si系銅合金條之表面之軋延方向及軋延直角方向之高度之變化(起伏)而求出急峻度。 JCBA-T326-2014 specifies the severity. As shown in Figure 1, the change in the rolling direction of the surface of the Cu-Ni-Si-based copper alloy strip and the height (rolling) in the rolling direction are determined to determine the severity. degree.
具體而言,如圖2所示,將軋延方向之高度分布2中之波形之波谷至波谷的距離作為波之長度l,將波谷與波谷之間連成之直線至波峰的距離作為波之高度h,並表示為 急峻度=(h/l)×100(%)。 Specifically, as shown in FIG. 2, the distance from the trough to the trough of the waveform in the rolling height distribution 2 is taken as the wave length l, and the distance from the straight line connecting the trough to the trough is taken as the wave length. The height h is expressed as the severity = (h / l) × 100 (%).
並且,如圖1所示,對於軋延方向之高度分佈2,於軋延直角方向以25mm以下之間距P在5點以上之測定點S1、S2……進行測定,取其平均值作為急峻度之平均值Av。 In addition, as shown in FIG. 1, the height distribution 2 in the rolling direction is measured at measurement points S1, S2,... At a distance P of 5 mm or less in the rolling orthogonal direction, and the average value is taken as the urgency. Mean Av.
當急峻度之平均值Av為0.5以下時,引線框架加工時之原材料之平坦性高,故線結合性變得良好,組裝工程中之不良狀況減少。 When the average value of the severities Av is 0.5 or less, the flatness of the raw materials during the processing of the lead frame is high, so the wire bondability becomes good, and the defects in the assembly process are reduced.
並且,求出以上述方式測定5點以上所得的急峻度之偏差D,按照(急峻度之偏差D/急峻度之平均值Av)×100(%)求出急峻度之偏差率DR。 Then, the deviation D of the severities obtained by measuring 5 or more points as described above is obtained, and the deviation rate DR of the severities is obtained from (the deviation D of the severities / the average value of the severities Av) × 100 (%).
若急峻度之偏差率為12%以下,則表示抑制了Cu-Ni-Si系銅合金條之邊波(edge wave)、中波(center wave)形狀,即便材料寬度大,平坦性亦會提高。 If the deviation rate of severity is less than 12%, it means that the edge wave and center wave shapes of Cu-Ni-Si based copper alloy bars are suppressed. Even if the material width is large, the flatness will be improved. .
作為將急峻度之平均值Av控制為0.5以下、將急峻度之偏差率控制為12%以下之方法,可列舉如下文所述般規定弛力退火及其後之表面軋延之條件。 As a method of controlling the average value Av of the jerkiness to be 0.5 or less and the deviation rate of the jerkiness to be 12% or less, the conditions for defining the relaxation annealing and subsequent surface rolling as described below can be cited.
<Cu-Ni-Si系銅合金條之製造> <Manufacture of Cu-Ni-Si series copper alloy strip>
本發明之實施形態之Cu-Ni-Si系銅合金條通常可對鑄塊依序進行熱軋、冷軋、固溶處理、時效處理、時效後冷軋、弛力退火、表面軋延而製造。固溶處理(solution treatment)前之冷軋並非必需,可根據需要而實施。並且,可根據需要而於固溶處理後且為時效處理前實施冷軋。於上述各工程之間,為了除去表面之氧化皮,可適當實施研削、研磨、噴丸(shot blasting)、酸洗等。 The Cu-Ni-Si-based copper alloy strip according to the embodiment of the present invention can generally be manufactured by sequentially hot rolling, cold rolling, solution treatment, aging treatment, post-aging cold rolling, relaxation annealing, and surface rolling. . Cold rolling before solution treatment is not necessary, and it can be performed as needed. In addition, if necessary, cold rolling may be performed after the solution treatment and before the aging treatment. Between the above processes, in order to remove the scale on the surface, grinding, grinding, shot blasting, pickling, etc. may be appropriately performed.
固溶處理係使Ni-Si系化合物等矽化物固溶於Cu基質中,且同時使Cu基質再結晶之熱處理。亦可將固溶處理兼用於熱軋。 The solution treatment is a heat treatment in which a silicide such as a Ni-Si compound is dissolved in a Cu matrix and the Cu matrix is recrystallized at the same time. The solution treatment can also be used for hot rolling.
時效處理中使經固溶處理而固溶之矽化物作為以Ni2Si為主之金屬間化合物之微細粒子析出。該時效處理中,強度與導電率上升。時效處理例如可於375~625℃、1~50小時之條件進行,藉此能提高強度。 In the aging treatment, the silicide solution-dissolved by the solution treatment is precipitated as fine particles of the intermetallic compound mainly composed of Ni 2 Si. In this aging treatment, strength and electrical conductivity are increased. The aging treatment can be performed at, for example, 375 to 625 ° C. for 1 to 50 hours, thereby improving the strength.
若時效處理之溫度、時間未達上述範圍,則有Ni2Si之析出量少從而無法獲得充分的強度之情形。若時效處理之溫度、時間超過上述範圍,則有析出物會發生粗大化或再固溶,無法充分提高強度或導電率之情形。 If the temperature and time of the aging treatment are not within the above-mentioned ranges, there may be a case where the amount of precipitation of Ni 2 Si is small and sufficient strength cannot be obtained. If the temperature and time of the aging treatment exceed the above ranges, the precipitates may coarsen or re-solidify, and the strength or conductivity may not be sufficiently improved.
<時效後冷軋> <Cold rolling after aging>
繼而,亦可於時效處理之後,以40%以上之加工度進行冷軋(時效後冷軋)。藉由時效後冷軋可賦予材料加工應變從而提高強度。 Then, after the aging treatment, cold rolling (cold rolling after aging) can be performed at a working degree of 40% or more. Cold rolling after aging can impart processing strain to the material to increase strength.
若時效後冷軋之加工度未達40%,則有難以充分提高強度之情形。時效後冷軋之加工度較佳為40~90%。若加工度超過90%,則有會因強加工之加工應變而使導電率下降之情形。 If the workability of cold rolling after aging is less than 40%, it may be difficult to sufficiently increase the strength. The workability of cold rolling after aging is preferably 40 to 90%. If the processing degree exceeds 90%, the conductivity may decrease due to the processing strain of the strong processing.
時效後冷軋之加工度係指相對於將要進行時效後冷軋前之材料厚度而言的、時效後冷軋後之厚度之變化率。 The workability after cold rolling after aging refers to the rate of change of the thickness after cold rolling after aging with respect to the material thickness before cold rolling after aging.
本發明之Cu-Ni-Si系銅合金條之厚度並無特別限定,可設為例如0.03~0.6mm。 The thickness of the Cu-Ni-Si-based copper alloy strip of the present invention is not particularly limited, and may be, for example, 0.03 to 0.6 mm.
<弛力退火> <Relaxation annealing>
於時效後冷軋之後進行弛力退火。弛力退火只要於普通條件進行即可,可於例如300℃~550℃、保持時間為5秒~300秒之條件進行。藉此,藉由去除材料內部之一部分錯位而恢復延展性,從而能充分利用表面軋延進行形狀矯正。尤其理想為將弛力退火後之△TS設為10~30MPa。若△TS未達10MPa,則無法充分恢復延展性,無法充分利用表面軋延進行形狀矯正。當△TS超過30MPa時,加工性良好,但有會因退火引起之強度下降而使TS未達800MPa之情形。 Relaxation annealing was performed after cold rolling after aging. The relaxation annealing may be performed under ordinary conditions, and may be performed under conditions of, for example, 300 ° C. to 550 ° C. and a holding time of 5 seconds to 300 seconds. Thereby, a part of the inside of the material is removed to restore the ductility, so that the surface rolling can be used for shape correction. It is particularly desirable to set the ΔTS after relaxation annealing to 10 to 30 MPa. If the ΔTS is less than 10 MPa, the ductility cannot be sufficiently restored, and the surface rolling cannot be used for shape correction. When △ TS exceeds 30 MPa, the processability is good, but the TS may not reach 800 MPa due to the decrease in strength due to annealing.
再者,△TS(MPa)表示為(將要弛力退火前之材料之拉伸強度TS(MPa))-(剛實施弛力退火後之材料之拉伸強度TS(MPa)),通常,△TS>0。 Furthermore, △ TS (MPa) is expressed as (tensile strength TS (MPa) of the material before relaxation annealing)-(tensile strength TS (MPa) of the material immediately after relaxation annealing). Generally, △ TS> 0.
<表面軋延> <Surface rolling>
藉由在弛力退火後進行加工度0.4~1.6%之表面軋延,而矯正材料之形狀。若表面軋延之加工度未達0.4%,則無法充分進行形狀矯正,殘留軋延應變,有無法提高平坦性之情形。若加工度超過1.6%,則藉由處於高壓,材料會產生新的應變,故有無法提高平坦性之情形。 The shape of the material is corrected by surface rolling with a working degree of 0.4 to 1.6% after relaxation annealing. If the workability of surface rolling is less than 0.4%, shape correction cannot be performed sufficiently, rolling strain remains, and flatness may not be improved. If the degree of processing exceeds 1.6%, the material will generate new strain by being exposed to a high pressure, and thus there may be cases where flatness cannot be improved.
<最終弛力退火> <Final Relaxation Annealing>
亦可於表面軋延之後進行最終弛力退火。最終弛力退火可於與上述表面軋延前之弛力退火相同之條件進行,藉此,能恢復因表面軋延而下降之材料之彈 性。 Final relaxation annealing can also be performed after surface rolling. The final relaxation annealing can be performed under the same conditions as the relaxation annealing before the surface rolling described above, whereby the elasticity of the material which is reduced by the surface rolling can be restored.
[實施例1] [Example 1]
按如下方式製作各實施例及各比較例之試樣。 Samples of each example and each comparative example were prepared as follows.
將電解銅作為原料,使用大氣熔解爐熔製、鑄造出表1所示之組成之銅合金。對於該鑄塊,於950℃進行熱軋直至板厚達到10mm。熱軋後進行研削,獲得寬度為600mm之材料,之後依序進行冷軋、固溶處理、時效處理。 Using electrolytic copper as a raw material, a copper alloy having a composition shown in Table 1 was melted and cast using an atmospheric melting furnace. This ingot was hot-rolled at 950 ° C. until the sheet thickness reached 10 mm. After hot rolling, grinding was performed to obtain a material with a width of 600 mm, and then cold rolling, solution treatment, and aging treatment were sequentially performed.
繼而,以表1所示之加工度進行時效後冷軋,直至板厚達到0.152mm。進而,以表1所示之條件(△TS)進行弛力退火,其次,以表1所示之加工度進行表面軋延,之後進行最終弛力退火,獲得試樣。 Then, post-ageing cold rolling was performed at the working degrees shown in Table 1 until the sheet thickness reached 0.152 mm. Furthermore, relaxation annealing was performed under the conditions (ΔTS) shown in Table 1, followed by surface rolling at the processing degree shown in Table 1, and then final relaxation annealing was performed to obtain a sample.
<導電率(%IACS)> <Conductivity (% IACS)>
針對所得之試樣,按照JIS H0505並利用4端子法,測定25℃之導電率(%IACS)。 About the obtained sample, the electrical conductivity (% IACS) at 25 ° C. was measured in accordance with JIS H0505 and the 4-terminal method.
<拉伸強度(TS)> <Tensile strength (TS)>
針對所得之試樣,利用拉伸試驗機,按照JIS-Z2241,分別測定與軋延方向平行之方向上的拉伸強度(TS)。首先,利用各試樣,以拉伸方向為軋延方向之方式,使用加壓機製作JIS13B號試驗片。拉伸試驗之條件設為:試驗片寬度12.7mm、室溫(15~35℃)、拉伸速度5mm/min、標距50mm。 About the obtained sample, the tensile strength (TS) in the direction parallel to a rolling direction was measured using the tensile tester according to JIS-Z2241, respectively. First, using each sample, a test piece No. JIS13B was produced using a press so that the stretching direction was the rolling direction. The conditions of the tensile test were set as follows: a test piece width of 12.7 mm, room temperature (15 to 35 ° C), a tensile speed of 5 mm / min, and a gage length of 50 mm.
<急峻度> <Severity>
針對所得之試樣(軋延直角方向之寬度600mm、軋延方向之長度1000mm),按照JCBA-T326-2014,使用非接觸式3次元測定機,以軋延直角方向之中央部為中心、以25mm間距對合計5點測定軋延方向之急峻度。 Regarding the obtained sample (600 mm width in the rolling direction and 1000 mm length in the rolling direction), according to JCBA-T326-2014, a non-contact 3-dimensional measuring machine was used, with the center portion in the rolling direction as the center, and The severity of the rolling direction was measured at a total of 5 points at a pitch of 25 mm.
而且,如上所述,求出急峻度之平均值Av與急峻度之偏差D,算出急峻度之偏差率DR=(急峻度之偏差D/)×100(%)。 Then, as described above, the deviation D between the mean value Av of the severity and the severity is calculated, and the deviation ratio DR of the severity is calculated as (Deviation of the severity D /) × 100 (%).
<引線框架加工時之平坦性> <Flatness during Lead Frame Processing>
針對所得之試樣(軋延直角方向之寬度600mm、軋延方向之長度20mm),如圖3所示,藉由將波美度47、40℃之蝕刻液對試樣之一面進行噴蝕,形成引線長度8mm、寬度0.25mm、引線間距0.5mm之狹縫圖案。該狹縫圖案為多根引線LE以梳子狀於軋延直角方向相鄰地排列,且模擬引線框架之內部引線部。 Regarding the obtained sample (600 mm width in the rolling direction and 20 mm length in the rolling direction), as shown in FIG. 3, one surface of the sample was etched by an etching solution having a Baume degree of 47 and 40 ° C. A slit pattern with a lead length of 8 mm, a width of 0.25 mm, and a lead pitch of 0.5 mm was formed. The slit pattern is a plurality of leads LE arranged in a comb shape adjacent to each other in a rolling right angle direction, and simulates an inner lead portion of the lead frame.
繼而,如圖4所示,將蝕刻加工後之引線框架以噴蝕面朝上之方式載置於平台T,從引線LE延伸之方向觀察而測定各引線LE距平台T之高度HL。將引線LE之厚度t之150%規定為標準高度HS,當各高度HL連續地為HS以下之區域的引線LE間之軋延直角方向之長度LR為550mm以上時,即便對引線框架進行加工,亦視為引線框架之平坦性優良。 Next, as shown in FIG. 4, the lead frame after the etching process is placed on the stage T with the etched surface facing upward, and the height HL of each lead LE from the stage T is measured from the direction in which the lead LE extends. 150% of the thickness t of the lead LE is specified as the standard height HS. When the length LR of the rolling right angle between the leads LE in the region where each height HL is continuously below HS is 550 mm or more, even if the lead frame is processed, It is also considered that the flatness of the lead frame is excellent.
將所得之結果示於表1。 The obtained results are shown in Table 1.
根據表1可知,於急峻度之偏差率為12%以下之各實施例之情形,拉伸強度為800MPa以上,急峻度之平均值為0.5以下,急峻度之偏差率為12%以下,引線框架加工時(蝕刻後)之平坦性優良。 From Table 1, it can be seen that in the cases where the deviation rate of the severity is 12% or less, the tensile strength is 800 MPa or more, the average value of the severity is 0.5 or less, the deviation rate of the severity is 12% or less, the lead frame Excellent flatness during processing (after etching).
於弛力退火時之△TS未達10MPa之比較例1之情形,急峻度之平均值超過0.5,急峻度之偏差率超過12%,引線框架加工時之平坦性差。 In the case of Comparative Example 1 in which the ΔTS during relaxation annealing is less than 10 MPa, the average value of the jerkiness exceeds 0.5, the deviation rate of the jerkiness exceeds 12%, and the flatness during processing of the lead frame is poor.
於弛力退火時之△TS超過30MPa之比較例2之情形,拉伸強度未達800MPa。 In the case of Comparative Example 2 in which the ΔTS during relaxation annealing exceeds 30 MPa, the tensile strength does not reach 800 MPa.
於表面軋延之加工度超過1.6%之比較例3之情形,表面軋延時產生變形,急峻度超過0.5,急峻度之偏差率超過12%。因此,引線框架加工時之平坦性差。 In the case of Comparative Example 3 where the surface rolling reduction exceeds 1.6%, the surface rolling delay is deformed, the severity exceeds 0.5, and the deviation of the severity exceeds 12%. Therefore, the flatness during processing of the lead frame is poor.
於表面軋延之加工度未達0.4%之比較例4之情形,表面軋延並未充分地進行形狀矯正,故而急峻度超過0.5,急峻度之偏差率超過12%。因此,引線框架加工時之平坦性差。 In the case of Comparative Example 4 where the workability of the surface rolling was less than 0.4%, the surface rolling was not sufficiently shape-corrected, so the urgency exceeded 0.5, and the deviation rate of the urgency exceeded 12%. Therefore, the flatness during processing of the lead frame is poor.
於時效後冷軋之加工度未達40%之比較例5之情形,拉伸強度未達800MPa。 In the case of Comparative Example 5 where the workability of cold rolling after aging was less than 40%, the tensile strength did not reach 800 MPa.
於Ni及Si的含量超過規定範圍之比較例6之情形,導電率未達30%IACS。 In the case of Comparative Example 6 in which the contents of Ni and Si exceeded a predetermined range, the electrical conductivity did not reach 30% IACS.
於Ni及Si的含量未達規定範圍之比較例7之情形,拉伸強度未達800MPa。 In the case of Comparative Example 7 in which the contents of Ni and Si did not reach the predetermined range, the tensile strength did not reach 800 MPa.
於添加元素之合計含量超過0.8質量%之比較例8之情形,導電率未達30%IACS。 In the case of Comparative Example 8 in which the total content of the additive elements exceeded 0.8% by mass, the electrical conductivity did not reach 30% IACS.
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