TW201932813A - Optical gas sensor and system and manufacturing method thereof including a transparent substrate and a sensing layer - Google Patents

Abstract

An optical gas sensor includes a transparent substrate and a sensing layer. The sensing layer is disposed on the substrate, and includes a plurality of polymer wires, and a plurality of nanorods respectively located in each of the polymer wires, arranged in the same direction, and capable of emitting light after being excited by light. The present invention further provides an optical gas sensing system having the optical gas sensor and a method for manufacturing the optical gas sensor.

Description

Optical gas sensor and system thereof and manufacturing method

The invention relates to a gas sensor, in particular to an optical gas sensor and a system thereof and a manufacturing method thereof.

Organic chemicals with high volatility, high vapor pressure and boiling point below 250 ° C under normal temperature and pressure are generally called volatile organic compounds (VOCs).

Because volatile organic compounds (VOCs) are irritating and toxic to humans, excessive inhalation can cause symptoms such as nausea, vomiting, dizziness, and the like, and can even damage the brain, liver, kidneys, and nervous system or cause cancer. When volatile organic compounds (VOCs) reach a certain concentration or content, there are more doubts about the explosion, so it is necessary to effectively monitor the content of volatile organic compounds (VOCs). Currently, commercially available sensors for monitoring volatile organic compounds (VOCs) use molecular liberation, catalytic combustion, infrared light sensing, and semiconductor methods, etc., but regardless of the detection method, the price and Maintenance costs are quite expensive and a burden on chemical plants that require extensive monitoring.

In general, most of the current sensors are resistive gas sensors, and most of them use semiconductor materials as sensing elements, mainly by detecting the change of resistance of the semiconductor material by gas adsorption. However, resistive The sensor needs to be operated at a specific temperature (100~400 °C), so the heating element is used to heat the sensing element to effectively detect the gas, and the continuous heating and cooling will shorten the life of the sensing element, and only Detection of specific volatile organic compounds limits the development of applications.

Another common gas sensor is an optical gas sensor that can be used at room temperature and can detect multiple gases, but requires a complex optical detection system that makes the price relatively expensive. It is not easy to shrink, and is easily interfered by the external environment. It can be seen that the numerous limitations of today's gas sensors make it difficult to promote. Therefore, how to provide a high-sensitivity, low-cost, and instantly detectable and portable VOC sensor to reduce the damage and accident of volatile organic compounds to create a safe and sound life. The environment is a safe living environment for the problems to be solved in the current technical field, and is a problem to be solved in the current technical field.

Accordingly, it is an object of the present invention to provide an optical gas sensor that is highly sensitive, low cost, and instantly detectable and portable.

Thus, the optical gas sensor of the present invention comprises a transparent substrate and a sensing layer. The sensing layer is disposed on the substrate, and includes a plurality of polymer wires, and a plurality of nanorods located in each of the polymer wires and arranged in the same direction and excited by the light.

In addition, the present invention also provides an optical gas sensor system.

The optical gas sensor system includes a rotation control device, an optical gas sensor as described above, a light source device, and a receiving analysis device.

The optical gas sensor is disposed on the rotation control device, and the rotation control device can drive the optical gas sensor to rotate. The light source device is capable of emitting a light source that illuminates the sensing layer of the optical gas sensor to excite the nanorods to cause the nanorods to emit excitation light. The receiving and analyzing device is disposed on a light path of the excitation light emitted by the nano-rods to receive and analyze the intensity of the excitation light emitted by the nano-rods.

Moreover, the present invention also provides a method of fabricating an optical gas sensor.

The optical gas sensor manufacturing method comprises a preparation step, a solution preparation step, and a sensing layer forming step.

The preparation step is to prepare a transparent substrate, an organic polymer, a plurality of nanorod luminescent materials, and a first organic solvent. The solution preparation step is to mix the organic polymer with the nanorod luminescent material in the first organic solvent to form a first solution. The sensing layer forming step is to deposit the first solution on the transparent substrate by using an electrospinning technique to form a sensing layer on the transparent substrate, the sensing layer includes a plurality of polymer wires, and more A nanorod located in each of the polymer filaments and arranged in the same direction and excited by light.

The utility model has the advantages that the organic polymer and the nano rods are blended, and the nano-rods comprising a plurality of coatings having the same directionality are formed on the transparent substrate by an electrospinning technique. The sensing layer formed by the polymer filament constitutes an optical gas sensor, and when the gas sensing is performed, the sensor is rotated to make the polymer filament and the nanorod relative to the detecting light source In order to rotate the lens into different angles, the light source can be illuminated by the sensor, which produces a significant polarization change and is highly sensitive to detect low concentrations of volatile organic compounds.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.

Referring to FIG. 1 and FIG. 2, a first embodiment of the optical gas sensor 2 of the present invention comprises a transparent substrate 21 and a sensing layer 22 formed on the transparent substrate 21.

Specifically, FIG. 2 is a partial enlarged view of the sensing layer 22 of FIG. 1. As can be seen from FIG. 2, the sensing layer 22 includes a plurality of polymer wires 211, and a plurality of the plurality of polymer wires 211 are disposed. The nanorods 212 are arranged in the same directionality and are excited by light to emit light.

The transparent substrate 21 suitable for the first embodiment may be selected from the group consisting of an indium tin oxide substrate, a tin fluoride substrate, a glass substrate, an organic polymer substrate, or a ceramic substrate; and the polymer wires 211 Then, it may be selected from polymethyl methacrylate (PMMA), polystyrene (PS), polylactic acid (PLA) or chitosan. In the first embodiment, the transparent substrate 21 is made of glass. The substrate, the polymer filaments 211 are exemplified by polymethyl methacrylate (PMMA), and the nanorods 212 are selected from cadmium selenide/cadmium sulfide (CdSe/CdS).

As can be seen from the materials used in the first embodiment, the optical gas sensor 2 is mainly used to detect volatile organic compounds such as acetone, gasoline, or tetrahydrofuran. The detection mode is mainly that the organic polymer filaments 211 adsorbed on the sensing layer 22 by the volatile organic compound have a molten state, and the optical characteristics of the sensing layer 22 are changed, thereby enabling the optical gas sense. The detector 2 optically detects volatile organic compounds.

Preferably, the thickness of the sensing layer 22 formed on the transparent substrate 21 is between 50 nm and 50 μm, and the polymer wires 211 can be arranged in a random manner, interlaced, or directional. In the first embodiment, the polymer wires 211 are arranged in the same direction as an example, and the polymer wires 211 arranged in the same direction are formed on the transparent substrate 21 and added. The optical gas sensor 2 composed of the nanorod 212 allows it to have a better polarizing effect.

More preferably, the roughness of the sensing layer 22 is further changed by dry etching, the surface of the sensing layer 22 is irregularly recessed, and the polymer wires 211 arranged in the same direction are formed by an electrospinning technique. In order to make the sensing layer 22 a composite material having a three-dimensional structure with a high specific surface area, in order to adsorb the gas gain optical behavior and improve the sensing sensitivity.

Referring to FIG. 3, the structure of a second embodiment of the optical gas sensor 2 of the present invention is substantially the same as that of the first embodiment, except that the sensing layer 22 includes a plurality of Metal nanoparticles 213 in the molecular filament 211. The metal nanoparticles 213 may be selected from gold, silver, or copper. Preferably, the metal nanoparticles 213 have a particle diameter of 5 nm to 100 nm. By incorporating such metal nanoparticles 213 with the nanorods 212, the optical behavior of the polymeric filaments 211 can be enhanced by surface plasmon resonance to sense optical changes in low concentration volatile organic compounds.

A third embodiment of the optical gas sensor 2 of the present invention is substantially the same as the structure of the first embodiment, except that the sensing layer 22 further comprises an organic dye blended in each of the polymer filaments. . The constituent material of the organic dye can be selected from the group consisting of methyl orange, methyl red, brilliant green, rhodamine B, Congo red, thymol blue, or bromocresol chlorine. The optical characteristic enhancing sensing effect of the sensing layer 22 can be further increased by blending the organic dyes with the nanorods 212.

In order to more clearly understand the optical gas sensor 2 described above, the method of manufacturing the optical gas sensor 2 will be described below.

Referring to FIG. 4 and FIG. 2, the method for fabricating the optical gas sensor of the present invention comprises the following steps: preparing a step 401, a solution blending step 402, and the step of fabricating the optical gas sensor 2 of the first embodiment. A sensing layer forming step 403, and an etching step 404.

The preparation step 401 is to prepare a transparent substrate 2, an organic polymer, a plurality of nano-rod luminescent materials, and a first organic solvent. Specifically, a glass substrate is prepared as the transparent substrate, and polymethyl methacrylate (PMMA) is prepared as the organic polymer, and the nano-rod luminescent material is selected from cadmium selenide/cadmium sulfide (CdSe/CdS). . Wherein, the first organic solvent may be selected from benzene, toluene, chlorobenzene or acetone, and the first organic solvent selected for the optical gas sensor 2 of the first embodiment is selected from the group consisting of chlorobenzene.

The solution preparation step 402 is a first organic solvent in which a polymethyl methacrylate (PMMA) organic polymer and a cadmium selenide/cadmium sulfide (CdSe/CdS) nanorod luminescent material are blended with chlorobenzene. Medium to form a first solution.

The sensing layer forming step 403 is to deposit the first solution on the transparent substrate 2 by using an electrospinning technique to form the sensing layer 22 on the transparent substrate 2, and the sensing layer includes the polymer The wire 211, and a plurality of nanorods 212 located in each of the polymer wires 211 and arranged in the same direction and excited by light, can emit light.

Specifically, when the sensing layer 22 is formed by an electrospinning technique, the shape of the polymer wires 211 can be controlled by controlling the operating voltage, the flow rate, and the distance from the transparent substrate 2.

The diameter of the polymer filaments 211 is controlled by controlling parameters such as an operating voltage of the electrospinning technique, wherein the operating voltage may be between 5 kV and 40 kV, preferably between 10 and 25 kV. Further, it is also possible to further control the flow rate of the polymer filaments 211 at a rate of 0.1 to 1 ml/hr, and optimize the distance from the transparent substrate 21 to 10 cm.

Referring to Fig. 5, the diameters of the polymer wires 211 are measured at different operating voltages (10 kV, 15 kV, 20 kV, 25 kV). As can be seen from Fig. 5, when the polymer is formed at an operating voltage of 20 kV. In the case of the wire 211, the diameter error of each of the polymer wires 211 and the surface state of the sensing layer 22 formed are optimal.

The etching step 404 is to dry-etch the sensing layer 22 such that the surface of the sensing layer 22 is bombarded with ions of the plasma to cause the surface to be recessed to enhance the surface roughness. It should be noted that the dry etching can be performed by a plasma process such as ultraviolet surface treatment (UV/O-zone), and can be used in air, argon, oxygen, nitrogen, ammonia, methane, hydrogen, and four. The carbon fluoride or the antimony difluoride is carried out in an atmosphere, and the etching time is from 1 minute to 120 minutes. When the dry etching is performed under a specific atmosphere at a specific time, a slight doping of different elements is performed on the surface of the sensing layer 22 to generate a specific functional group, so that the sensing layer 22 has high selectivity and enhances specific volatility. Sensitivity of organic compounds. The optical gas sensor 2 for fabricating the first embodiment is etched in air for 60 minutes.

The manufacturing method of the optical gas sensor of the present invention is the same as the step of fabricating the optical gas sensor 2 of the second embodiment and the manufacturing steps of the optical gas sensor 2 of the first embodiment. The same, except that the preparation step 401 and the solution are formulated in step 402.

Specifically, the preparation step 401 further prepares a plurality of metal nanoparticles and a second organic solvent, wherein the metal nanoparticles are selected from gold, silver or copper nanoparticles, and the second organic solvent is selected from Toluene, chlorobenzene, acetone, or dimethylformamide, when the optical gas sensor 2 of the second embodiment is produced, the metal nanoparticles are selected from silver nanoparticles, and the second organic solvent Then chlorobenzene is used. The solution preparation step 402 is to mix silver nanoparticles into the second organic solvent of chlorobenzene to form a second solution, and then mix the first solution and the second solution to form a precursor solution. The layer forming step 403 deposits the precursor solution on the transparent substrate 2 by an electrospinning technique, and the polymer rods 211 have the nanorods 212 and the metal nanoparticles. In other words, the optical gas sensor 2 of the second embodiment is prepared by separately mixing the first solution and the second solution, and then mixing the two solutions together to make the Precursor solution.

The manufacturing method of the optical gas sensor of the present invention is the same as the step of fabricating the optical gas sensor 2 of the third embodiment and the manufacturing steps of the optical gas sensor 2 of the first embodiment. The same, except that the preparation step 401 and the solution are formulated in step 402. Specifically, the preparation step 401 further prepares an organic dye, wherein the organic dye constituent material is selected from the group consisting of methyl orange, methyl red, brilliant green, rhodamine B, Congo red, thymol blue, or bromocresol Chlorine, in the organic dye of the optical gas sensor 2 of the third embodiment, methyl orange is selected, and the solution blending step 402 is further blending methyl orange into the first organic solvent.

1 and an embodiment of the optical gas sensing system of the present invention includes an optical gas sensor 2 as described above, and a rotation control device 3 connected to the optical gas sensor 2. A light source device 4, a receiving and analyzing device 5, and an alarm device 6 connected to the receiving and analyzing device 5. In the embodiment, the optical gas sensing system is configured to: when the gas is detected, the optical gas sensor 2, the rotation control device 3, and the light source device 4 are disposed on an air inlet 101 and The gas sensing chamber 100 of an air outlet 102 is exemplified.

Specifically, the optical gas sensor 2 is disposed on the rotation control device 3, and the rotation control device 3 can drive the optical gas sensor 2 to rotate, and the light source device 4 and the optical gas sensing device The sensing layer 22 of the device 2 is oppositely disposed such that the light source λ emitted by the light source device 4 can illuminate the sensing layer 22 and excite the nano-rods 212 to cause the nano-rods 212 to emit an excitation light. The light source λ emitted by the light source device 4 suitable for the embodiment may be visible light, ultraviolet light, infrared light, or laser light. Preferably, the light source λ may be selected from the absorption wavelength of the nanorod 212. Single wavelength light.

In this embodiment, the arrangement relationship between the light source device 4 and the optical gas sensor 2 is such that a normal line of the sensing layer 22 is parallel to the optical axis of the light source λ emitted by the light source device 4. That is, the light source λ is vertically irradiated to the sensing layer 22, and the distance between the light source device 4 and the sensing layer 22 of the optical gas sensor 2 is between 0.5 cm and 10 cm. It can be seen that the rotation control device 3 drives the optical gas sensor 2 to rotate in such a manner that the optical gas sensor 2 is in a two-dimensional plane of the optical axis of the vertical light source λ (that is, parallel to the sense). The plane of the layer 22 is rotated, and the rotation control device 3 can drive the optical gas sensor 2 to rotate 5 to 180 degrees in 1 to 60 seconds.

It is to be noted that, since the polymer wires 211 are arranged on the transparent substrate 21 in a specific direction, the rotation angle described herein is when the polymer wires 211 are initially illuminated. The angle is 0 degrees. For example, when the polymer wires 211 are arranged in the parallel X-axis direction at the beginning, the angle of the polymer wires 211 is defined as 0 degrees, and the rotation control device 3 is transmitted through the rotation control device 3. After the optical gas sensor 2 is rotated, the angle between the polymer wires 211 and the X-axis is the rotation angle.

Since the polymer wires 211 and the nanorods 212 disposed on the transparent substrate 21 have the same directivity, and the light sources λ at different angles illuminate the nanorods 212, they have different polarization properties. In addition, the optical gas sensing system of the present embodiment utilizes the characteristics of the nanorods 212 by fixing the light source device 4 and transmitting the rotation. The control device 3 rotates the optical gas sensor 2 to achieve and detect optical changes produced by the nanorods 212 at different angles of illumination. It should be noted that the illumination of the sensing layer 22 by the light source λ is not limited to the manner of the embodiment, as long as the sensing layer 22 can be irradiated with light and different optical changes can be generated by rotating different angles.

In detail, when the gas to be detected is input into the gas sensing cavity 100 from the air inlet 101 and adsorbed by the sensing layer 22 of the optical gas sensor 2, the light source is utilized. The light source λ emitted from the device 4 illuminates the sensing layer 22, and simultaneously rotates the optical gas sensor 2 in a two-dimensional plane of the optical axis of the vertical light source λ, so that the polymer wires 211 are arranged in the same directionality. The nanorods 212 have different angles with respect to the light source λ, and the light intensity of the excitation light generated by the nanorods 212 at each angle is received and analyzed by the receiving and analyzing device 5.

In detail, the receiving and analyzing device 5 includes an optical receiver 51 and an optical analyzer 52 connected to the optical receiver 51 and the alarm device 6. The optical receiver 51 is opposite to the optical gas sensor. The sensing layer 22 of the sensing layer 22 is disposed, that is, the excitation light generated by the light beam λ of the sensing layer 22 is directly transmitted through the transparent substrate 21 and received by the optical receiver 51. Then, the optical receiver 51 transmits the received optical signal to the optical analyzer 52 to analyze the light intensity and determine the gas concentration. If the gas concentration is higher than the set value, the signal is transmitted to the alarm device 6 for warning. . The position of the light receiver 51 is not particularly limited as long as the excitation light generated by the nano-rods 212 can be received. In the embodiment, the light receiver 51 detects the light source by using a photoresistor. Take an example for explanation.

It should be noted that, since the nanorods 212 and the polymer wires 211 are both arranged in a directional manner, when the light source λ illuminates the sensing layer 22, the sensing layer 22 may have a polarized light. Characteristics, therefore, the main measurement method of the present invention is that after the volatile organic compound is adsorbed on the sensing layer 22, the sensing layer 22 is irradiated with the light source λ and the light intensity is measured, and then in the foregoing manner. Rotating the sensing layer 22 causes the light source λ to illuminate the light intensity again for the second time, and finally reads the difference between the two light intensities to determine the gas sensing concentration. In more detail, since the sensing layer 22 has a polarization characteristic, when the rotation is to a different specific angle, the excitation light generated by the sensing layer 22 has a relatively strong and relatively weak light intensity, that is, a transmission measurement. The difference in light intensity between the two is used to discriminate the gas sensing concentration. In the present invention, the data is measured by the extinction spectrum and the extinction change.

For a more detailed description, the relevant measurement results of the measurement of volatile organic compounds by the optical gas sensing system of the present invention will be described below.

Referring to FIG. 7 and FIG. 8( a ), the sensing layer 22 etched at different times is measured for optical changes before and after etching. As can be seen from FIG. 7 and FIG. 8( a ), the sensing layer 22 is passed for 10 minutes. After 30 minutes and 60 minutes of etching, the intensity of the extinction spectrum increases, mainly because the surface roughness of the sensing layer 22 increases after etching, so that the light source scattering causes the extinction intensity to rise, and when the sensing layer 22 is etched to At 90 minutes (Fig. 7(e)), the sensing layer 22 is gradually destroyed.

Referring to FIG. 8(b) to FIG. 8(f), FIG. 8(b) to FIG. 8(f) show that the optical gas sensor 2 of the first embodiment of the present invention etches the sensing through different etching times. After layer 2, the extinction spectrum of chlorobenzene was measured. It is known from the experimental results that the extinction intensity of the observation wavelength (about 590 nm) changes, and the larger the difference after subtraction, the better the effect, which means that when The effect of the sensing layer 2 being etched for 30 minutes (Fig. 8(d)) and 60 minutes (Fig. 8(e)) is relatively preferable.

Referring to FIG. 9, FIG. 9 shows the extinction change corresponding to different rotation angles measured by rotating the optical gas sensor 2 of the first embodiment by 360 degrees in 120 minutes in a chlorobenzene environment. 9(a) to 9(h), the optical gas sensor 2 has a significant amount of extinction change at an angle of 60 degrees and 240 degrees (ie, sensing gas is not performed). The intensity of the extinction between the sensing gases is measured, and the detected gas concentration is estimated by measuring the difference between the peak and the valley of the extinction change. For example, when the exposure time is one minute (Fig. 9(a)), the amount of extinction change of the sensor at an angle of 60 degrees is 0.04, and at 90 degrees, the amount of extinction change is 0.005, which is rotated by 60 degrees. The gas concentration was detected by the difference in the amount of extinction change at 90 degrees (0.04-0.005 = 0.035).

Referring to FIG. 10 and FIG. 11 , FIG. 10 and FIG. 11 respectively show the extinction change and the sensitivity change of different volatile organic compounds measured by the optical gas sensor 2 of the first embodiment, which are shown in FIG. 10 and FIG. 11 . It is known that the sensing sensitivity of chlorobenzene and butanol is optimal. Therefore, the extinction changes of different concentrations are further measured by chlorobenzene and butanol, respectively.

Referring to FIG. 12 and FIG. 13 , FIG. 12 and FIG. 13 respectively show the extinction changes of different concentrations of chlorobenzene and butanol measured by the optical gas sensor 2 of the first embodiment, as can be seen from FIG. 12 and FIG. The optical gas sensor 2 does measure the low concentration (100 ppm) of volatile organic compounds.

In summary, the optical gas sensor 2 of the present invention forms a plurality of polymer wires 211 including the plurality of nano-bars 212 having the same orientation on the transparent substrate 21 by an electrospinning technique. The sensing layer 22 is configured to have a better polarizing effect, and further etch the sensing layer 22, and the roughness of the sensing layer 22 can be improved to enhance the optical behavior of the gas gain and improve the sensing sensitivity. When performing gas sensing, by rotating the optical gas sensor 2, the polymer wires 211 and the nanorods 212 are in a two-dimensional plane of the optical axis of the vertical light source λ (that is, parallel) The plane of the sensing layer 22 is rotated, and when the light source is irradiated to the sensing layer 22, the extinction change is observed at a specific angle, and the difference between the peak and the trough of the extinction change is measured to obtain the volatility. The concentration of the organic compound makes it possible to achieve the object of the present invention.

However, the above is only the embodiment of the present invention, and the scope of the invention is not limited thereto, and all the simple equivalent changes and modifications according to the scope of the patent application and the patent specification of the present invention are still Within the scope of the invention patent.

2‧‧‧Optical gas sensor

52‧‧‧ optical analyzer

21‧‧‧Transparent substrate

6‧‧‧Alarm device

22‧‧‧Sensor layer

100‧‧‧ gas sensing chamber

211‧‧‧Polymer wire

101‧‧‧air inlet

212‧‧‧Nano rod

102‧‧‧ outlet

213‧‧‧Metal Nanoparticles

401‧‧‧Preparation steps

3‧‧‧Rotary control unit

402‧‧‧Solution preparation steps

4‧‧‧Light source device

403‧‧‧Sensor layer formation steps

5‧‧‧ Receiving analysis device

404‧‧‧ etching step

51‧‧‧Optical Receiver

Λ‧‧‧ light source

Other features and advantages of the present invention will be apparent from the embodiments of the present invention, wherein: Figure 1 is a top plan view showing a first embodiment of the optical gas sensor of the present invention; FIG. 3 is a top plan view showing a second embodiment of the optical gas sensor of the present invention; FIG. 4 is a schematic flow chart illustrating the present embodiment; FIG. 5 is a diagram showing a diameter versus voltage relationship illustrating a diameter of a polymer filament produced by electrospinning at different voltages; FIG. 6 is a schematic view showing the present invention An embodiment of the optical gas sensing system of the invention; FIG. 7 is an optical microscope (OM) image showing the surface morphology of the sensing layer etched at different times; FIG. 8 is an extinction spectrum diagram illustrating The extinction spectrum of the sensing layer in a Chlorobenzene environment is etched at different times; FIG. 9 is a relationship diagram of the extinction change versus angle, indicating that the optical gas sensor is in the chlorobenzene ring. The extinction change of different angles is rotated under the environment; FIG. 10 is a time diagram of the extinction change versus time, illustrating the extinction change of the different volatile organic compounds in the optical gas sensor; FIG. 11 is a diagram of the sensitivity versus time, illustrating The optical gas sensor changes the sensitivity of different volatile organic compounds; FIG. 12 is a graph of the extinction change versus time, illustrating the extinction change of the optical gas sensor in different concentrations of chlorobenzene; 13 is a graph of extinction change versus time, illustrating the extinction change of the optical gas sensor in different concentrations of butanol environment;

Claims (21)

An optical gas sensor comprising: a transparent substrate; and a sensing layer disposed on the substrate, comprising a plurality of polymer wires, and a plurality of each of the polymer wires arranged in the same direction And a nano-rod that emits light after being excited by light. The optical gas sensor according to claim 1, wherein the polymer filaments are selected from the group consisting of polymethyl methacrylate, polystyrene, polylactic acid or chitosan. The optical gas sensor of claim 1, wherein the nanorods are cadmium selenide/cadmium sulfide. The optical gas sensor of claim 1, wherein the sensing layer further comprises a plurality of metal nanoparticles located in each of the polymer filaments. The optical gas sensor according to claim 4, wherein the constituent material of the metal nanoparticles is selected from the group consisting of gold, silver, or copper, and the metal nanoparticles have a particle diameter of 5 nm to 100 nm. The optical gas sensor of claim 1, wherein the sensing layer further comprises an organic dye blended in each of the polymer filaments. The optical gas sensor according to claim 6, wherein the constituent material of the organic dye can be selected from the group consisting of methyl orange, methyl red, brilliant green, rhodamine B, Congo red, thymol blue, or bromine. Cresol chlorine. The optical gas sensor according to claim 1, wherein the transparent substrate is selected from the group consisting of an indium tin oxide substrate, a tin fluoride substrate, a glass substrate, an organic polymer substrate, or a ceramic substrate. The optical gas sensor according to claim 1, wherein the polymer filaments have a directional arrangement, a random arrangement, or a staggered arrangement, and the thickness of the sensing layer is between 50 nm and 50 μm. An optical gas sensing system comprising: a rotation control device; an optical gas sensor according to any one of claims 1 to 9, disposed on the rotation control device, the rotation control device capable of driving the optical gas a sensor device that emits a light source that illuminates the sensing layer of the optical gas sensor to excite the nano-rods to cause the nano-rods to emit excitation light; and a receiving analysis The device is disposed on a light path of the excitation light emitted by the nanorods to receive and analyze the intensity of the excitation light emitted by the nanorods. The optical gas sensing system of claim 10, wherein a distance between the light source device and the sensing layer of the optical gas sensor is between 0.5 cm and 10 cm. The optical gas sensing system of claim 10, wherein the light source emitted by the light source device is visible light, ultraviolet light, infrared light, or laser light. The optical gas sensing system of claim 10, wherein the rotation control device rotates the optical gas sensor in a two-dimensional plane of an optical axis of the vertical light source. The optical gas sensing system of claim 10, further comprising an alarm device coupled to the receiving analysis device. A method for fabricating an optical gas sensor, comprising: a preparation step of preparing a transparent substrate, an organic polymer, a plurality of nano-rod luminescent materials, and a first organic solvent; and a solution preparation step to organically a polymer and the nanorod luminescent material are blended in the first organic solvent to form a first solution; and a sensing layer forming step of depositing the first solution on the transparent substrate using an electrospinning technique Forming a sensing layer on the transparent substrate, the sensing layer comprising a plurality of polymer filaments, and a plurality of nanometers located in each of the polymer filaments and arranged in the same direction and excited by light to emit light Rod. The method for fabricating an optical gas sensor according to claim 15, further comprising an etching step performed after the sensing layer forming step, in air, argon, oxygen, nitrogen, ammonia, methane, hydrogen, The sensing layer is dry etched in an atmosphere of carbon tetrafluoride or xenon difluoride, and the etching time is from 1 minute to 120 minutes. The method for fabricating an optical gas sensor according to claim 15, wherein a plurality of metal nanoparticles and a second organic solvent are further prepared in the preparing step, and the solution mixing step is to mix the metal nanoparticles. In the second organic solvent, a second solution is formed, and the first solution and the second solution are mixed to form a precursor solution, and the sensing layer forming step deposits the precursor solution in the electrospinning technique. On a transparent substrate. The method for fabricating an optical gas sensor according to claim 17, wherein the organic polymer is selected from the group consisting of polymethyl methacrylate, polystyrene, polylactic acid, or chitosan, and the metal nanoparticles. From the group consisting of gold, silver, or copper nanoparticles, the first organic solvent is selected from the group consisting of benzene, toluene, chlorobenzene or acetone, and the second organic solvent is selected from the group consisting of toluene, chlorobenzene, acetone, or dimethylformamide. The method of fabricating an optical gas sensor according to claim 15, wherein the preparing step further prepares an organic dye, and the solution blending step further blends the base dye into the first organic solvent. The method of fabricating an optical gas sensor according to claim 19, wherein the organic dye constituting material is selected from the group consisting of methyl orange, methyl red, brilliant green, rhodamine B, Congo red, and thymol blue, or Bromocresol chlorine. The method for fabricating an optical gas sensor according to claim 1, wherein the sensing layer forming step controls an operating voltage of the electrospinning technology to be between 5 kV and 40 kV, and a flow rate between 0.1 and 1 ml. /hr.