TW201930723A - Pump apparatus - Google Patents

Abstract

A pump apparatus is provided with a tank in which a handled-fluid having insulating properties is stored, and with a pump that is mounted in the tank. The pump has an impeller in which a magnet is embedded, a motor stator that is disposed at a position opposing the magnet, a pump casing that houses the impeller, and a motor casing that houses the motor stator. The motor casing is open such that a winding of the motor stator is immersed in the handled-fluid.

Description

Pumping device

The present technology relates to a pumping device.

Conventionally, a processing liquid (heat medium) used for an external device such as a cooling or temperature-adjusting semiconductor manufacturing device is circulated by a pump from a tank storing the processing liquid to a heat exchange section of the external device.

Such pumps are often installed outside the tank (side or lower part of the tank), especially when the pump is installed on the side of the tank, and the entire device tends to become larger. Japanese Patent Application Laid-Open No. 2006-330901 discloses a longitudinal multi-stage pump in which a motor portion of the pump is provided at an upper portion of a tank.

In addition, when a fluorine-based insulating liquid is used as a processing liquid (heating medium), the processing liquid itself is expensive, and a gas detector is provided to detect a toxic gas used in a manufacturing process of a semiconductor manufacturing plant. There may be cases where the gas detector is incorrectly detected. Therefore, there is also an example in which a jacketed motor pump that does not cause liquid leakage is used as a pump that circulates the processing liquid.

However, since the jacketed motor pump uses a processing liquid to cool the motor to generate heat, when the circulating temperature of the processing liquid is relatively high, the motor temperature becomes high. Therefore, liquid circulation or air blowing for forced cooling of the motor from the outside is required, and the entire device tends to be larger.

It is desirable to provide a pump device that can handle relatively high-temperature processing liquids without increasing the overall size of the device.

A pump device according to an embodiment includes a tank in which an insulating processing liquid is stored, and a pump provided in the tank, wherein the pump has:
Impeller with magnets buried;
The motor holder is arranged at a position facing the magnet;
A pump housing houses the impeller; and a motor housing houses the motor holder, and the motor housing is opened so that the winding wire of the motor holder is immersed in the processing liquid.

A pump device according to a first aspect of the embodiment includes a tank in which an insulating processing liquid is stored, and a pump provided in the tank, wherein the pump has:
Impeller with magnets buried;
The motor holder is arranged at a position facing the magnet;
A pump housing houses the impeller; and a motor housing houses the motor holder, and the motor housing is opened so that the winding wire of the motor holder is immersed in the processing liquid.

According to this aspect, since the pump is installed in the tank, the entire device can be miniaturized. In addition, because the motor casing is opened, the winding wire of the motor holder is immersed in the processing liquid in the tank, so the winding wire can be directly cooled by the processing liquid, and the cooling efficiency of the winding wire is improved. As a result, the temperature rise of the winding can be reduced, so the pumping capacity can be increased or the upper limit of the temperature of the processing liquid can be increased.

Moreover, according to this aspect, a part of a conventional motor housing or a waterproof type connector used for a power connector is not required, and the housing can be simplified and costs can be reduced. In addition, compared with the conventional example where the motor is cooled by airflow, it does not require air blowing, so it can save energy, can reduce the size of the device, reduce the number of components such as cooling fans and manifolds, and do not need to control the air flow. The entire device can be simplified.

In addition, according to this aspect, the pump is installed in the tank and immersed in the processing liquid, and the tank plays a double shell role, so noise can be reduced.

The pump device according to the second aspect of the embodiment is the pump device according to the first aspect, wherein a guide is arranged on the suction side of the pump, and the guide guides the processing liquid into the processing liquid. Through the position of the aforementioned motor housing opening.

According to this aspect, the processing liquid is guided by the guide through the opening of the motor, and near the winding of the motor holder, even if the heating of the winding causes the temperature of the processing liquid to rise, the temperature-increasing processing liquid will not stay there. It is possible to further improve the coil cooling efficiency by the processing liquid.

The pump device according to the third aspect of the embodiment is the pump device according to the first or second aspect, wherein the suction port of the pump is disposed at a higher position than the motor holder.

According to this aspect, during the normal operation of the pump, the winding wire of the motor holder is immersed in the processing liquid, and the direct cooling can be maintained.

The pump device according to the fourth aspect of the embodiment is the pump device according to the third aspect, and further includes a control unit that monitors a current supplied to the motor holder, and a ratio of a current supplied to the motor holder When the specific threshold is smaller, at least one of stopping the supply of current to the motor holder and issuing an alarm is performed.

According to this aspect, when the winding wire is not immersed in the processing liquid, and the winding liquid cannot be effectively cooled by the processing liquid, the pump operation is continued to prevent the temperature of the winding wire from increasing excessively.

Hereinafter, specific examples of the embodiments will be described in detail with reference to the drawings. In addition, in the drawings attached to the present specification, in order to facilitate understanding of the illustrations, appropriate scales, aspect ratios, and the like are exaggerated from the actual objects.

The first figure is a schematic diagram showing the configuration of the pump device 1 according to the first embodiment. As shown in the first figure, the pump device 1 includes a tank 10 and a pump 20 provided in the tank 10.

An insulating processing liquid 11 is stored in the tank 10. As the processing liquid 11, for example, a fluorine-based insulating liquid (for example, Fluorinert (registered trademark)) is used.

In the example shown in the figure, a transmission pipe 14 is inserted into the lower wall side of the tank 10, and the discharge pipe 20 c of the pump 20 is connected to the transmission pipe 14 via a joint 15. In order to facilitate piping connection and separation in the groove 10, it is preferable to use a pipe joint or a ferrule joint as the joint 15. The processing liquid 11 discharged from the discharge pipe 20c of the pump 20 is sent to an external device (not shown) through the sending pipe 14.

A return pipe 13 is inserted into the top of the tank 10, and the processing liquid 11 that is heat-exchanged by an external device (not shown) is returned to the inside of the tank 10 through the return pipe 13 and stored.

The second figure is an enlarged sectional view showing a pump 20 provided in the tank 10. As shown in the second figure, the pump 20 includes an impeller 21 with a magnet (permanent magnet) 22 embedded therein, a motor holder 23 disposed at a position facing the magnet 22, a pump housing 24 housing the impeller 21, and a motor housing 25. The motor holder 23 is housed. The wetted parts of the pump housing 24 and the motor housing 25 are formed of a material resistant to the processing liquid 11, such as resins such as PPS (poly (p-phenylene sulfide)) and PEEK (polyether ether ketone).

As shown in the second figure, the motor holder 23 and the motor housing 25 are arranged on the suction side of the impeller 21, and the motor housing 25 defines a suction port 20a. A bearing assembly 26 is disposed between the motor housing 25 and the impeller 21. The bearing assembly 26 supports a radial load and a thrust load of the impeller 21.

As shown in the second figure, liquid flow paths are formed in the center portions of the motor housing 25 and the bearing assembly 26, respectively. These liquid flow paths are connected in a row and constitute one liquid flow path extending from the suction port 20 a to the liquid inlet of the impeller 21. These liquid flow paths communicate with the liquid inlet of the impeller 21.

The pump 20 of this embodiment is a pump equipped with an axial gap motor in which a magnet 22 and a motor holder 23 are arranged along these liquid flow paths.

As shown in the second figure, a discharge pipe 20c is provided on the side of the pump casing 24, and the discharge pipe 20c has a discharge port 20b. The liquid boosted by the rotating impeller 21 is discharged from the discharge port 20b through the discharge pipe 20c. The pump 20 of this embodiment is an end top type pump in which the suction port 20a and the discharge port 20b intersect perpendicularly.

The impeller 21 is formed of a non-magnetic material that is slippery, hard to wear, and resistant to the treatment liquid 11. For example, as the material of the impeller 21, a resin such as PPS (poly (p-phenylene sulfide)) or PEEK (polyetheretherketone) or ceramics is preferably used. The pump casing 24 and the motor casing 25 may be formed of a material similar to the impeller 21.

The impeller 21 is rotatably supported by a single bearing assembly 26. This bearing assembly 26 is a plain bearing (dynamic pressure bearing) using fluid dynamic pressure. This bearing assembly 26 is composed of a combination of a rotation-side bearing 26 a and a fixed-side bearing 26 b that slowly mesh with each other.

The rotation-side bearing 26 a is fixed to the impeller 21 and is arranged to surround the fluid inlet of the impeller 21. The fixed-side bearing 26b is fixed to the motor housing 25 and is arranged on the suction side of the rotating-side bearing 26a. This rotation-side bearing 26a has a cylindrical portion extending in the axial direction of the rotation-side bearing 26a and a flange portion protruding outward from the cylindrical portion.

The cylindrical portion of the fixed-side bearing 26 b has a radial surface to support the radial load of the impeller 21, and the flange portion has a thrust surface to support the thrust load of the impeller 21. The radial surface is parallel to the axial center of the impeller 21, and the thrust surface is perpendicular to the axial center of the impeller 21. The rotation-side bearing 26a is arranged around the cylindrical portion of the fixed-side bearing 26b.

A part of the processing liquid 11 discharged from the impeller 21 is guided to the bearing assembly 26 through a small gap between the impeller 21 and the motor housing 25. When the rotation-side bearing 26 a rotates together with the impeller 21, a hydrodynamic pressure is generated between the rotation-side bearing 26 a and the fixed-side bearing 26 b, whereby the impeller 21 is supported by the bearing assembly 26 without contact. Since the fixed-side bearing 26 b supports the rotating-side bearing 26 a with a vertical radial surface and a thrust surface, the tilting movement of the impeller 21 is restricted by the bearing assembly 26.

The motor holder 23 includes a core 23 a and a plurality of coils (coils) 23 b. These plural winding wires 23b are arranged in a ring shape. The impeller 21, the motor holder 23, the bearing assembly 26, and the suction port 20a are arranged concentrically.

A wire 23c is connected to the winding wire 23b of the motor holder 23 via a wiring board 23d. Referring to the first figure, a power connector 12 is mounted on the upper side wall of the slot 10, and the winding wire 23 b of the motor holder 23 is electrically connected to the inverter device 3 via the lead wire 23 c, the wiring board 23 d, and the power connector 12. The inverter device 3 is connected to the power source 2 and is also connected to a control device (control unit) 4 that controls the operation of the inverter device 3.

This inverter device 3 supplies a current to the winding wire 23 b of the motor holder 23, and generates a rotating magnetic field in the motor holder 23. This rotating magnetic field acts on the magnet 22 embedded in the impeller 21 and drives the impeller 21 to rotate. The torque of the impeller 21 depends on the amount of current supplied to the motor holder 23. As long as the load applied to the impeller 21 is fixed, the current supplied to the motor holder 23 is substantially constant.

When the impeller 21 rotates, the processing liquid 11 stored in the tank 10 is introduced from the suction port 20 a to the liquid inlet of the impeller 21. The treatment liquid 11 is boosted by the rotation of the impeller 21 and is discharged from the discharge port 20b. When the impeller 21 transfers the treatment liquid, the back surface of the impeller 21 is pushed to the suction side by the pressurized liquid (that is, toward the suction port 20a). Since the bearing assembly 26 is disposed on the suction side of the impeller 21, the thrust load of the impeller 21 is supported from the suction side.

In this embodiment, as shown in the first and second figures, the motor case 25 is opened so that the winding wire 23 b of the motor holder 23 is immersed in the processing liquid 11. The symbol 25a indicates an opening of the motor case 25. The motor case 25 is opened on the suction side (the upper side in the drawing) of the pump 20.

The third figure is a plan view of the pump 20 as viewed from the suction side. In the third figure, reference numeral 25a1 indicates the inner periphery of the opening 25a of the motor housing 25, and reference numeral 25a2 indicates the outer periphery of the opening 25a. A region between the inner periphery 25a1 and the outer periphery 25a2 is an opening 25a. In the example shown in the third figure, a wiring board 23d is arranged in the opening 25a of the motor housing 25. The wiring board 23d is used to wire the lead wire 23c extending from the power connector 12 to each of the winding wires 23b. A plurality of notches 23e are formed at the edge and the inner peripheral edge, respectively. The plurality of notches 23e are formed apart (for example, at regular intervals) in the circumferential direction. The processing liquid 11 stored in the tank 10 flows from the opening 25 a of the motor housing 25 through the notch 23 e of the terminal board 23 d into the inside of the motor housing 25, and the winding wire 23 b is directly immersed in the processing liquid 11.

In addition, the wiring board 23d is not always required, and the wiring board 23d may be omitted, and the lead wires 23c extending from the power connector 12 may be directly wired to the respective winding wires 23b. In this case, the processing liquid 11 stored in the tank 10 flows directly into the inside of the motor housing 25 through the opening 25 a of the motor housing 25, and the winding wire 23 b is directly immersed in the processing liquid 11.

During the operation of the pump 20, current flows through the coil 23b of the motor holder 23, and the resistance of the coil 23b causes heat to be generated. 10 of the processing liquid 11, the coil 23b can be directly cooled by the processing liquid 11, and the coil 23b can be effectively cooled. In this embodiment, since the treatment liquid 11 is an electrically insulating liquid, immersion in the treatment liquid 11 does not cause a short circuit in the coil 23 b.

As shown in the first and second figures, the suction port 20 a of the pump 20 may be disposed at a higher position than the motor holder 23. Thereby, during the operation of the pump 20, the state in which the coil 23b of the motor holder 23 is immersed in the processing liquid 11 and directly cooled can be maintained.

Referring to the first figure, the control device 4 that controls the operation of the inverter device 3 monitors the current supplied from the inverter device 3 to the motor holder 23, and stops when the current supplied to the motor holder 23 is smaller than a specific threshold value. At least one of supplying electric current to the motor holder 23 and issuing an alarm.

For example, the control device 4 determines whether the pump 20 is operating in the abnormal state of the current, that is, in the dry state or the insufficient liquid state, based on the current change rate and / or the change in the current value. If the pump 20 is immersed in the processing liquid 11 and the processing liquid 11 exists in the pump 20, the current change rate and / or the change in the current value is substantially zero.

On the other hand, when the pump 20 is operated (dry operation) in a dry state or a liquid shortage state, the current supplied to the motor holder 23 decreases. The control device 4 compares the change rate of the current and / or the change in the current value with a specific threshold. Here, the specific threshold is a general term for the values shown below (the number of times below the reference value, the set value, the predetermined value, the number of times below the allowable value, or the amount of deviation, etc.).

More specifically, when the pump 20 is operated in a dry state or a liquid shortage state, the power of the pump 20 is reduced, so the current supplied from the inverter device 3 to the motor holder 23 is reduced. That is, when there is no liquid in the pump 20, the load applied to the impeller 21 is the smallest, so the current supplied to the motor holder 23 is the smallest. Therefore, the control device 4 monitors the current supplied to the motor holder 23 and calculates the current change rate for each specific period. In one embodiment, the control device 4 may calculate a current change rate for each specific period (for example, one month).

Then, the control device 4 determines whether the pump 20 is operating in the abnormal state of the current, that is, in the dry state or the insufficient liquid state based on the current supplied to the motor holder 23. The current abnormality level can be defined as follows, for example. That is, the average value obtained from the current value during the normal operation of the pump 20 is used as a reference value in advance. Then, the rate of change of the current supplied using this reference value is calculated. The value of this change rate is only when the specific number of times is negative, and the control device 4 determines the current abnormality level. In one embodiment, the current change rate is smaller than a specific set value, and the control device 4 may determine the current abnormality level.

In another embodiment, after the start of the operation of the pump 20, the control device 4 measures the current value at a specific time, and the deviation value between the past current measurement value and the current current measurement value is smaller than the specified value. The control device 4 may also Determine the current abnormality level. In this case, instead of calculating the current change rate, the change in current is calculated. The change in current is the aforementioned deviation value. In another embodiment, the control device 4 may determine the current abnormality level based on the number of times the deviation value is below a certain allowable value or the amount of deviation. These predetermined values and allowable values may be the same value or different values.

The control device 4 transmits a control signal to the inverter device 3 when the current change rate and / or the change in the current value exceeds a specific threshold value, and stops supplying current to the motor holder 23. As a result, the pump 20 is not immersed in the processing liquid 11, that is, in a state where the winding wire 23b of the motor holder 23 cannot be directly cooled by the processing liquid 11, the current is supplied to the motor holder 23, which can prevent the winding due to the winding. The heat of 23b causes an excessive temperature rise.

In addition, the control device 4 may stop supplying current to the motor holder 23 when the current change rate and / or the change in the current value exceeds a specific threshold value, or may instead issue an emergency alarm, and request the manager to respond immediately.

According to the present embodiment described above, since the pump 20 is provided in the tank 10, the entire device can be miniaturized. In addition, since the motor case 25 is opened and the winding wire 23b of the motor holder 23 is immersed in the processing liquid 11 in the tank 10, the processing wire 11 can directly cool the winding wire 23b, and the cooling efficiency of the winding wire 23b is improved. Thereby, since the temperature rise of the winding wire 23b can be reduced, the pumping capacity or the upper limit of the temperature of the processing liquid can be increased.

In addition, according to this embodiment, a part of a conventional motor housing or a water-proof joint used for a power supply connection portion is not required, the case can be simplified, and costs can be reduced. In addition, compared with the conventional example in which the motor is cooled by airflow, air blowing is not required. Therefore, energy-saving effects are obtained, the device can be miniaturized, the number of components such as a cooling fan or a manifold can be reduced, and air flow control is not required. The entire device can be simplified.

Furthermore, according to this embodiment, when the pump 20 is installed in the tank 10 and immersed in the processing liquid 11, the tank 10 functions as a double casing, so noise can be reduced.

In addition, according to this embodiment, the suction port 20a of the pump 20 is disposed at a higher position than the motor holder 23. Therefore, during normal operation of the pump 20, the coil 23b of the motor holder 23 can be kept immersed in the treatment liquid. 11 to the state of direct cooling.

Further, according to this embodiment, the control device 4 monitors the current supplied to the motor holder 23 and the current supplied to the motor holder 23 is smaller than a specific threshold value, and stops at least one of supplying the current to the motor holder 23 and issuing an alarm As a result, when the winding wire 23b is not immersed in the processing liquid 11, and the winding wire 23b cannot be effectively cooled by the processing liquid 11, it is possible to prevent the temperature of the winding wire 23b from being excessively increased due to the continuous pump 20 operation.

The first embodiment has been described in detail above, but the present technology is not limited to the above-mentioned embodiment, and various modifications can be added to the above-mentioned embodiment. Hereinafter, modifications will be described with reference to the drawings. In the following description and the drawings used in the following description, the same reference numerals as those used for the corresponding parts of the above-mentioned embodiment may be used for the same parts as those of the above-mentioned embodiment, and redundant descriptions are omitted.

The fourth figure is a schematic diagram showing the configuration of the pumping device 1 'according to the second embodiment.

In the second embodiment, a guide 29 is arranged on the suction side of the pump 20, and the guide 29 guides the processing liquid 11 to a position where the processing liquid 11 passes through the motor housing 25. In the example shown in the figure, the guide 29 has a flat plate shape, and is arranged so as to be separated from above the suction port 20 a and faces both the suction port 20 a and the opening 25 a of the motor case 25.

When the operation of the pump 20 is started, the processing liquid 11 in the tank 10 is sucked into the suction port 20 a from the gap between the motor casing 25 and the guide 29 through the position where the motor casing 25 is opened.

According to this aspect, even in the vicinity of the winding wire 23b of the motor holder 23, the temperature of the processing liquid 11 rises due to the heating of the winding wire 23b, and the processing liquid 11 whose temperature rises does not stay there. The cooling efficiency of the winding wire 23b.

Moreover, in the above-mentioned embodiment, although the pump 20 is arranged in the longitudinal direction (the suction port 20 is upward), it is not limited to this. The pump 20 may be set in the groove 10 in the lateral direction (corresponding to the shape of the groove 10). The suction port 20 is arranged in a horizontal direction).

Further, in the above embodiment, the control device 4 is configured to stop supplying the current to the motor holder 23 when the current change rate of the current supplied to the motor holder 23 is calculated and the current is smaller than a specific threshold value and it is determined to be in the idling state. And at least one action of issuing an alarm, but it is not limited to this.

Further, for example, the control device 4 may be configured to stop supplying current when it monitors a measurement value of a flow sensor (not shown) provided in the transmission pipe 14 and the flow rate is smaller than a specific threshold value to determine that it is in an idle state. At least one of the motor holder 23 and the alarm is issued.

In addition, for example, the control device 4 may be configured to monitor a measurement value of a water level sensor (not shown) provided in the tank 10, and the water level in the tank 10 is higher than a specific threshold (for example, the height position of the suction port 20a). When it is judged that the vehicle is in the idling state when it is small, at least one of stopping the supply of current to the motor holder 23 and issuing an alarm is performed.

Even in this case, when the winding wire 23b is not immersed in the processing liquid 11, and the winding wire 23b cannot be effectively cooled by the processing liquid 11, it is possible to prevent the temperature of the winding wire 23b from being excessively increased by continuing the operation of the pump 20.

The embodiment of the present technology has been described above by way of example. However, the scope of the present technology is not limited to this embodiment. Of course, within the scope described in the claim, appropriate changes and deformations can be applied according to the purpose.

1.1'‧‧‧Pump device

2‧‧‧ Power

3‧‧‧Inverter device

4‧‧‧Control Device (Control Department)

10‧‧‧slot

11‧‧‧ treatment liquid

12‧‧‧Power connector

13‧‧‧ return piping

14‧‧‧ send piping

15‧‧‧ connector

20‧‧‧Pump

20a‧‧‧Suction port

20b‧‧‧Spit Out

20c‧‧‧Spit out the pipe

21‧‧‧ Impeller

22‧‧‧Magnet (permanent magnet)

23‧‧‧Motor holder

23a‧‧‧Core

23b‧‧‧Reel (coil)

23c‧‧‧Wire

23d‧‧‧Terminal board

23e‧‧‧ gap

24‧‧‧Pump housing

25‧‧‧Motor housing

25a‧‧‧ opening

25a1‧‧‧Inner week

25a2‧‧‧periphery

26‧‧‧bearing assembly

26a‧‧‧Rotary side bearing

26b‧‧‧Fixed side bearing

29‧‧‧Guide

[First Figure] A schematic diagram showing a configuration of a pump device according to the first embodiment.

[Second Figure] An enlarged cross-sectional view showing a pump of the pumping device shown in the first figure.

[Third Figure] A plan view of the pump shown in the second figure from the suction side.

[Fourth Figure] A schematic diagram showing a configuration of a pump device according to a second embodiment.

Claims (4)

A pumping device, comprising: Tanks that hold insulating processing fluid; and A pump disposed in the tank, wherein the pump has: Impeller with magnets buried; The motor holder is arranged at a position facing the magnet; A pump housing that houses the aforementioned impeller; and The motor case contains the motor holder, and the motor case is opened so that the winding wire of the motor holder is immersed in the processing liquid. The pump device according to item 1 of the patent application scope, wherein a guide is arranged on the suction side of the pump, and the guide guides the processing liquid to a position where the processing liquid passes through the opening of the motor casing. The pumping device according to item 1 or 2 of the scope of patent application, wherein the suction port of the pump is disposed at a higher position than the motor holder. The pumping device described in item 3 of the scope of patent application, further includes: The control unit monitors the current supplied to the motor holder, and when the current supplied to the motor holder is smaller than a specific threshold value, it performs at least one of stopping the supply of current to the motor holder and issuing an alarm.