TW201928110A - Film formation device capable of alleviating the burden of maintenance work and improving the durability - Google Patents

Abstract

The invention provides a film formation device, which is formed by leading a lead wire wrapped in an insulating film out through a sealing structural part. The film formation device is capable of alleviating the burden of maintenance work and improving the durability. The film formation device is provided with a vacuum chamber (3), a coil (17) and a cooling medium accommodating part. A sealing structural part (23) arranged on the outer wall of the cooling medium accommodating part is only provided with a pressing cover (43) for pressing a sealing element (27) with a lead wire sealing part (27a) at the outer side of the cooling medium accommodating part. Due to the arrangement of the pressing cover (43) at the outer side of the cooling medium accommodating part, the locking operation and the like can be easily performed during detection, and the work burden can be alleviated. In addition, the lead wire (19) with an appropriate length can be led out to be sealed during assembly, so that the service life of the lead wire (19) never becomes shorter than that expected, and the durability of the film formation device (1) can be improved.

Description

Film forming device

The present invention relates to a film forming apparatus. More specifically, the present invention relates to a film forming apparatus configured to directly lead a lead wire wrapped in an insulating film to the outside.

In Fig. 1 of Patent Document 1, a film forming apparatus 1 using an RPD (Reactive Plasma Deposition) method is disclosed. Since the schematic configuration of the film forming apparatus 1 is the same as that of the film forming apparatus 1 of the invention of the present application, the description will be made while using FIG. 1 of the present application. As shown in Fig. 1, the film forming apparatus 1 converges the high-density plasma directly above the tablet T as a film forming material, and as a result, the sheet T is sublimated and adhered to the upper substrate W to form a film. . The film forming apparatus 1 includes a vacuum chamber 3 that performs a film forming process, and a plasma gun 5 that emits a plasma beam B is attached to a side wall of the vacuum chamber 3. Further, at the bottom of the vacuum chamber 3, a main furnace 7 which holds the pressing piece T as a film forming material and converges the plasma beam B is attached. Further, an auxiliary anode (also referred to as a "ring furnace") 9 that surrounds the main hearth 7 in a ring shape is disposed around the main hearth 7. The auxiliary anode 9 is constituted by a coil 17 formed by a lead 19 which is water-cooled using a water jacket 15. In the related art, current is introduced by a current introduction terminal that is airtightly attached to the outer wall of the water jacket 15 . However, there is a problem in durability in the current introduction terminal on the cooling water side. Therefore, in Patent Document 1, the coated lead wire 19 is directly taken out to the outside of the water-cooling jacket 15, and sealed in the sealing structure portion 23 through which the lead wire 19 passes, thereby achieving internal and external insulation of the water-cooling jacket 15. Among them, the sealing structure portion of Patent Document 1 will be described. In the film forming apparatus 1 of Patent Document 1, the lead 19 of the coil 17 constituting the auxiliary anode 9 is covered with a portion of the water jacket 15 over the entire line, and the coated lead 19 is directly passed through the sealing structure portion 23 and is led out. Go to the vacuum side. Further, the seal structure portion 23 includes an outer side seal portion that seals the vacuum side, that is, an inner seal portion that seals the coolant side, that is, the inner side. Further, in the seal structure portion 23, the seal structure portion 23 including the outer seal portion and the inner seal portion is first assembled, and then the assembled seal structure portion 23 is attached to the auxiliary anode 9. However, in the sealing structure portion 23 of the patent document 1, the inner sealing portion is provided on the inner side of the cooling water side. Therefore, when the auxiliary anode 9 is assembled once the sealing is performed, the user of the film forming apparatus 1 changes even in the inner sealing portion. It is also impossible to confirm the slack when loose, and it is impossible to lock. Therefore, if the slack confirmation and the locking work are performed, there is a problem that the load of the maintenance work sharply increases. Further, since the outer seal portion and the inner seal portion are assembled first, it is necessary to lead the lead wire 19 with a margin in advance, and when the auxiliary anode 9 is finally attached, the lead wire 19 which is led out in excess is contained in the water-cooling jacket 15 again. It is bent so that an excessive load is sometimes applied to the lead wires 19. Therefore, there is a problem that the durability of the film forming apparatus 1 may become short. (Prior Art Document) (Patent Document) Patent Document 1: JP-A-2010-209403

(Problems to be Solved by the Invention) In view of the above circumstances, an object of the present invention is to provide a film forming apparatus which can reduce the load of maintenance work and improve the durability of the apparatus. (Means for Solving the Problem) The film forming apparatus according to the first aspect of the invention includes: a vacuum chamber; a coil disposed in the vacuum chamber and covered with an insulating film; and a cooling medium accommodating portion for accommodating the cooling a cooling medium for a coil, wherein the outer wall of the cooling medium accommodating portion is provided with a sealing structure portion through which a lead wire of the coil is formed, and the sealing structure portion includes a sealing member having insulation from the lead wire a lead seal portion for film contact; and a pressing cover for pressing the seal member only to the side opposite to the side on which one side of the cooling medium exists, that is, the outside of the cooling medium storage portion. In the film forming apparatus according to the second aspect of the invention, the lead sealing portion is provided in two or more. According to a second aspect of the invention, in the second aspect of the invention, the lead sealing portion is provided by arranging two or more lead sealing portions, and the sealing member has one lead sealing portion. According to a third aspect of the invention, in the third aspect of the invention, an intermediate member is provided between the two or more seal members, and an O-ring is held on an outer circumference of the intermediate member. According to a fourth aspect of the invention, in the fourth aspect of the invention, the intermediate member has an inclined shape for pressing the sealing member that is in contact with the intermediate member to the lead side. According to the first aspect of the invention, the lead wire forming the coil is penetrated in the sealing structure portion, and the sealing structure portion is provided with a pressing cover for pressing the sealing member only outside the cooling medium containing portion, whereby the film forming apparatus When the user detects the film forming apparatus, it is sufficient to confirm only the outer sealing portion that is easy to see, and it is easy to perform the locking operation, so that the load on the maintenance work can be reduced. Moreover, since the lead wire of an appropriate length can be taken out and sealed after assembly, there is no possibility that the lead wire is excessively placed in the cooling medium accommodating portion and the posture is unreasonable, and the life of the lead wire is not shortened as expected. In this case, the durability of the film forming apparatus can be improved. According to the second aspect of the invention, the number of the lead seal portions is two or more, whereby the same sealing ability as that of the outer side and the inner side of the cooling medium containing portion can be secured, and the maintenance work load can be reduced and the durability of the device can be achieved. Improvement. According to the third aspect of the invention, the lead sealing portion is configured by arranging two or more sealing members having one lead sealing portion, thereby eliminating the need to separately manufacture a sealing member having two or more lead sealing portions, and is easy to obtain and inexpensive. Since the sealing member has one lead sealing portion, the cost of the sealing structure portion can be suppressed, and the manufacturing time of the sealing structure portion can be shortened. According to the fourth aspect of the invention, the O-ring is held on the outer circumference of the intermediate member, whereby it is not necessary to have two sealing functions through the inner surface side of the hole and the side of the lead by only one sealing member, and the sealing can be reliably performed. According to the fifth aspect of the invention, the intermediate member has an inclined shape for pressing the seal member in contact with the intermediate member to the lead wire, whereby the sealing function of the seal member can be realized only by twisting the cover member with the intermediate member and the seal member and applying a compressive force.

Next, an embodiment of the present invention will be described based on the drawings. Fig. 1 is a front sectional view showing a film forming apparatus 1 according to an embodiment of the present invention. As shown in Fig. 1, the film forming apparatus 1 is a device for forming a film on a substrate W by an RPD method, and is generally referred to as an in-line type transfer method. The film forming apparatus 1 includes a vacuum chamber 3 that performs a film forming process, and transports the substrate W along a specific path above the vacuum chamber 3. A pressure gradient type plasma torch 5 is disposed on a side wall of the vacuum chamber 3, and a main hearth 7 for holding a film forming material, that is, a pressing piece T, and an auxiliary anode surrounding the main hearth 7 in an annular shape are disposed at the bottom portion (also It is called “ring furnace” and “beam guide”9. The plasma beam B irradiated from the plasma gun 5 is introduced into the main hearth 7 to converge, and the tablet T is sublimated and diffused. The substrate W is formed by evaporating particles of sublimation. The auxiliary anode 9 surrounds the vicinity of the upper portion of the main hearth 7 in an annular shape, and includes a permanent magnet 11 slightly eccentric with respect to the axis of the main hearth 7, and a ring-shaped electromagnetic body disposed concentrically with the permanent magnet 11 under the permanent magnet 11 Iron 13. Further, the auxiliary anode 9 is provided with an annular (circular) water jacket 15 that houses the permanent magnet 11 and the electromagnets 13 disposed in the upper and lower stages. Cooling water (cooling medium) is accommodated in the water jacket 15 for cooling the protective auxiliary anode 9 and the main hearth 7 from the heat generation of the electromagnet 13 and the radiant heat from the plasma beam B. The plasma jet B is guided by the magnetic field of the auxiliary anode 9. Further, by adjusting the electromagnet 13 of the auxiliary anode 9, it is possible to control the flight direction distribution of the evaporated particles, and as a result, the film thickness distribution can be made uniform. Further, in the present embodiment, the cooling medium housing portion described in the patent application scope is the water jacket 15 . The coil 17 constituting the electromagnet 13 is formed by a wound lead wire (see FIG. 2) 19, and the lead wire 19 is covered with an electrically insulating film (insulating film) over the entire length. In the form of the lead 19 coated with the insulating film, it is preferable to cover the outer periphery of the lead 19 by using two or more heat shrinkable tubes such as a fluorine-based heat shrinkable hose. The lead-in side of the current toward the coil 17 and the lead-out side of the current from the coil 17 are protruded by the lead which becomes the remaining portion (hereinafter, the lead of the portion is referred to as "insulated lead portion") 19, and the insulated lead portion via the lead 19 The introduction and extraction of current are performed, and as a result, the coil 17 functions as the electromagnet 13. The current introduction structure 20 for functioning the coil 17 as the electromagnet 13 will be described. Further, the current introduction structure 20 of the present embodiment includes both the introduction side and the extraction side of the current toward the coil 17, but the introduction side and the lead-out side have the same structure. Therefore, the introduction side will be described as an example, and the lead-out side will be omitted. Detailed description. The current introduction structure 20 includes a water jacket 15, an insulated lead portion that introduces a current into the water jacket 15, and the insulated conductor portion passes through the inside and isolates the sealing structure portion 23 inside and outside the water jacket 15. In the present embodiment, the cooling water introduced from the cooling water pipe is accommodated in the water jacket 15 . The water jacket 15 is made of a conductor such as copper, and has an annular (circular) appearance in a state in which a cover is assembled to the base. The inner side of the annular shape faces the main hearth 7, and a through hole through which the insulated lead wire is led out from the coil 17 is formed on the outer circumference of the ring. Further, a seal structure portion 23 is attached to the through hole. 2 is a front cross-sectional view showing an auxiliary anode 9 in a portion A of FIG. 1, and FIG. 3 is an enlarged plan cross-sectional view showing a current introduction structure taken along line B of FIG. 2, and FIG. 4 is a view showing a fracture along the line B of FIG. A side cross-sectional view of a portion of the C-line cut seal structure portion 23, and Fig. 5 is a perspective view of the seal member 27 and the intermediate member 29 shown in Fig. 3. The seal structure portion 23 includes a lead-out side cover 41 that is attached to the seal structure portion body 25 of the water jacket 15 and the insulated lead portion that covers the lead wires 19 of the seal structure portion body 25. The seal structure portion main body 25 has a tubular portion 25b that is fitted into the through hole of the water jacket 15 with a gap, and a rectangular projecting portion 25a that protrudes outward in the radial direction of the tubular portion 25b. The projecting portion 25a is screwed to the water jacket 15, and the airtightness between the outer circumference of the water jacket 15 and the projecting portion 25a is maintained by an O-ring or the like. The insulated lead portion of the lead wire 19 passes through the inner side of the tubular portion 25b, that is, the through hole of the sealing structure portion body 25. The seal structure portion 23 is surely sealed in both the inner surface side of the passage hole of the seal structure portion main body 25 and the outer peripheral side of the insulated lead portion of the lead wire 19, thereby isolating the inside and the outside of the water jacket 15 . Further, the end portion of the tubular portion 25b (the leftmost side of the tubular portion 25b on the paper surface of Fig. 3) is provided with a convex portion 25b' having a small inner diameter so that the element provided on the inner side of the cylindrical portion 25b is prevented from falling to the cooling water. side. Further, the outer end of the other end portion of the tubular portion 25b (the rightmost side of the tubular portion 25b on the paper surface of FIG. 3) is formed with a screw threaded to the internal thread of the pressing cover 43 to be described later. The first boss 33, the seal 27, the intermediate member 29, the seal 27, and the second boss 35 are provided along the lead 19 from the convex portion 25b of the tubular portion 25b inside the through hole of the seal structure portion main body 25. The sealing member 27 is made of a resin such as rubber, and is appropriately selected from a material suitable for the cooling medium in the water jacket 15 and a vacuum inside thereof, such as fluororubber or the like. The shape of the sealing member 27 is as shown in Figs. 3 and 5, and is formed in such a manner that both ends of the cylinder are formed in a conical shape, and the conical apex is cut so that the plane remains on the end surface side. Further, the outer circumference of the cylinder is also formed to have a residual plane. The insulated lead portion of the lead 19 passes through the through hole of the cylinder. In the present specification, the surface of the seal 27 that is in contact with the insulated lead portion of the lead 19 is referred to as a lead seal portion 27a. The first bushing 33 and the second bushing 35 are made of metal, and the intermediate member 29 is made of resin. These materials are appropriately selected from the sealing medium 27 to be suitable for the cooling medium in the water jacket 15 and the vacuum of the outside thereof, and the intermediate member is, for example, a PEEK material, Teflon (registered trademark) or the like. The first boss 33 has a substantially cylindrical shape, and a concave portion that can accommodate the convex portion 25b' of the seal structure portion 25 is formed on the end surface on the distal end side of the tubular portion 25b. Further, the other end face is formed with a conical recess so that the portion of the seal member 27 formed into a conical shape enters. The outer peripheral gap of the first boss 33 is fitted into the through hole of the seal structure main body 25, and the insulated lead portion of the lead 19 is fitted to the inner peripheral gap. The intermediate member 29 has a cylindrical shape, and has conical recesses in which conical portions of the seal member 27 are formed at both end faces. Further, an insulating lead portion of the lead 19 is fitted to the intermediate member 29 through the hole gap. An O-ring 31 groove 29a is provided on the outer peripheral side of the intermediate member 29, and the O-ring 31 is held by the groove 29a. The groove 29a of the O-ring 31 is formed in a predetermined size with respect to the O-ring 31, and if the O-ring 31 is inserted into the through hole of the sealing structure portion 25 while being held by the intermediate member 29, the O-ring 31 is in contact with the inner surface of the through hole of the sealing structure portion body 25 to seal the portion. The second boss 35 has a substantially cylindrical shape, and a left-side end surface on the paper surface of Fig. 3 is formed with a conical recess so that a portion of the seal 27 that is in contact with the end surface is formed in a conical shape. Further, an engaging portion (protrusion portion) that engages with the inner surface of the pressing cover 43 to be described later is provided in a portion close to the end surface on the right side of the paper surface of FIG. Similarly to the first boss 33, the outer peripheral gap is fitted into the through hole of the tubular portion 25b, and the insulated lead portion of the lead 19 is fitted to the inner peripheral gap. In the present embodiment, the seal structure portion 23 is provided with a pressing cover 43 on the side opposite to the side of the cooling water, that is, the cooling water. Here, the opposite side to the side where the cooling water is present is the vacuum side in the present embodiment, and has the same meaning as the outer side of the water-cooling jacket 15 which is the cooling medium containing portion. The pressing cover 43 is formed in a shape in which a through hole is provided in the center of the cap nut, and has an internal thread that is screwed to the outside of the sealing structure portion 25 provided in the sealing structure portion 23. The pressing cover 43 is fitted into the sealing structure portion main body 25, whereby the pressing cover 43 is pressed into the engaging portion of the second boss 35 toward the left side of FIG. Thereby, the second boss 35 is press-fitted toward the left side of FIG. The seal 27 on the right side of FIG. 3 is such that the lead seal portion 27a presses the insulated lead portion of the lead 19 by the conical recess of the second boss 35 and the conical recess of the intermediate member 29, and the portion is sealed. Further, the seal member 27 on the left side of FIG. 3 is formed by the conical recessed portion of the first boss 33 and the conical recessed portion of the intermediate member 29, and the lead seal portion 27a presses the insulated lead portion of the lead 19, and the portion is sealed. In the seal structure portion 23, only the press cover 43 for pressing the lead seal portion 27a is provided outside the water jacket 15 . As a result, when the user of the film forming apparatus 1 detects the film forming apparatus 1, it is sufficient to confirm only the outer sealing portion that is easy to see, and it is also easy to perform the locking operation, so that the load on the maintenance work can be reduced. Further, since the lead wire 19 of an appropriate length can be taken out after the assembly and sealed, the lead wire 19 is not excessively placed in the water-cooling jacket 15 when it is accommodated in the water-cooling jacket 15, and the posture is unreasonable. Therefore, the life of the film forming apparatus 1 can be improved without the fact that the life of the lead wire 19 is shortened beyond the assumption. By providing two or more of the lead seal portions 27a, it is possible to reduce the maintenance work load and improve the durability of the device while ensuring the same sealing ability as when the lead seal portions 27a are provided on the outer and inner sides of the water jacket 15 respectively. The lead seal portion 27a is configured by arranging two or more seals 27 having one lead seal portion 27a along the lead, thereby eliminating the need to separately manufacture the seal 27 having two or more lead seal portions 27a. Moreover, since it is comprised by the sealing material 27 which is easy to acquire and is inexpensive and has one lead sealing part 27a, the cost of the sealing structure part 23 can be suppressed, and the manufacturing time of the sealing structure part 23 can be shortened. The intermediate member 29 holds the O-ring 31 which is in contact with the inner surface of the through-hole through the insulated lead portion of the lead 19, whereby it is not necessary to bear the inner side and the lead side of the through-hole by only one of the seals 27 The sealing function and the sealing can be performed separately. The intermediate member 29 has a conical inclined portion for pressing the sealing member 27 in contact with the intermediate member 29 to the insulated lead portion of the lead 19, whereby the intermediate member 29 and the seal can be sealed only by the screw or the like that rotates the pressing cover 43. The member 27 applies a compressive force to achieve the sealing function of the seal 27. When the insulated lead portion of the lead 19 is taken out from the pressing cover 43, the film is removed and connected to the external lead 39 by the connector 37. As shown in FIG. 2, the external lead 39 is connected to the current introduction terminal 45 provided at the bottom of the vacuum chamber 3, and current is supplied from the outside via this portion. In the present embodiment, the seal members 27 having only one lead seal portion 27a are arranged along the lead wires 19, that is, along the longitudinal direction of the insulated lead portions, to constitute the seal structure portion 23. However, the present invention is not limited thereto. There is no problem that the seal 27 has two or more lead seal portions 27a. Further, the both end faces of the intermediate member 29 are conical recesses, and the lead seal portion 27a is pressed against the insulated lead portion of the lead 19, but the shape is not limited thereto. It is necessary to form a shape in which the end portion of the seal member 27 is fitted to the end portion of the intermediate member 29 in a state of being combined. [Industrial Applicability] The sealing structure portion 23 of the film forming apparatus 1 of the present embodiment can be widely used for other devices that use the liquid to cool the coil 17 in the vacuum chamber 3.

1‧‧‧ film forming device

3‧‧‧vacuum chamber

15‧‧‧Water cooling jacket (cooling medium housing)

17‧‧‧ coil

19‧‧‧ leads

23‧‧‧Seal Structure Department

27‧‧‧Seal

27a‧‧‧ lead seal

29‧‧‧Intermediate components

31‧‧‧O-ring

Fig. 1 is a front sectional view showing a film forming apparatus according to an embodiment of the present invention. Fig. 2 is a front cross-sectional view showing the auxiliary anode 9 of the portion A of Fig. 1 enlarged. Fig. 3 is an enlarged plan sectional view showing the current introduction structure taken along line B of Fig. 2; Fig. 4 is a side cross-sectional view showing a portion of the sealing structure portion 23 cut along the line C of Fig. 3 . Figure 5 is a perspective view of the seal 27 and the intermediate member 29 shown in Figure 3.

Claims (5)

A film forming apparatus comprising: a vacuum chamber; a coil disposed in the vacuum chamber and covered with an insulating film; and a cooling medium receiving portion accommodating a cooling medium for cooling the coil, the film forming device is characterized a sealing structure portion through which a lead wire of the coil is formed is provided on an outer wall of the cooling medium accommodating portion, and the sealing structure portion includes a sealing member having a lead sealing portion that is in contact with an insulating film of the lead wire, and a pressing cover. It is used to press the seal member only on the side opposite to the side where one of the aforementioned cooling mediums is present, that is, the outside of the aforementioned cooling medium containing portion. The film forming apparatus according to the first aspect of the invention, wherein the lead sealing portion is provided in two or more. The film forming apparatus according to the second aspect of the invention, wherein the two or more lead sealing portions are provided, and two or more sealing members are arranged, and the sealing member has one lead sealing portion. The film forming apparatus according to claim 3, wherein an intermediate member is provided between the two or more seal members, and an O-ring is held on an outer circumference of the intermediate member. The film forming apparatus according to claim 4, wherein the intermediate member has an inclined shape for pressing the sealing member that is in contact with the intermediate member to the lead side.