TW201923387A - Inkjet coating device - Google Patents

Abstract

The purpose of the present invention is to provide an inkjet coating device that can maintain coating position precision even if the environmental temperature does not satisfy prescribed temperature conditions. Specifically, provided is an inkjet coating device that coats a substrate with ink and is provided with a stage whereon a substrate is mounted and a coating unit having a plurality of heads having nozzles for coating the substrate on the stage with ink, wherein the inkjet coating device comprises a linear scale for a coating gantry and a control device for controlling positioning of the coating unit on the basis of a coating gantry position pulse sequence from the linear scale for the coating gantry and controlling the heads on the basis of ink coating position information, and is configured such that the heads are controlled by acquiring a position pulse correction table for those conditions and generating a corrected position pulse sequence on the basis of the coating gantry position pulse sequence and the position pulse correction table.

Description

Inkjet coating device

The present invention relates to an inkjet coating device that sprays ink from a plurality of nozzles and applies ink to a substrate.

Previously, an inkjet coating apparatus for manufacturing a color filter for a flat-panel display such as a color liquid crystal display was configured as follows: a stage having a substrate on which a color filter is placed, and a plurality of nozzles having ink applied thereon. A coating unit that sprays ink onto the substrate from the coating unit to coat the substrate. In the coating unit, a plurality of heads having nozzles are supported by a holder for coating via a head box portion. The inkjet coating device is configured to be movable to an arbitrary position with respect to the stage by moving the coating holder and the head box portion. The inkjet coating device moves the coating unit based on the coating position information of the nozzles obtained in advance, and ejects ink only from the nozzles formed in the pixels formed on the substrate, so that the ink can be accurately applied to specific pixels. Inside.

The head provided in the head case is configured to drive a piezoelectric element that generates less heat than an electromagnetic actuator or the like and apply ink. However, since a plurality of heads are installed in the head box portion, the head box portion is thermally expanded due to the heating of the piezoelectric element, and thus the coating position obtained from the coating position information of the nozzle obtained in advance and the actual coating position An error corresponding to the thermal expansion occurs between time. Therefore, there is known an inkjet coating device in which a position measurement unit for measuring the current position of the head box portion is provided on the body of the inkjet coating device, thereby obtaining coating position information after thermal expansion. For example, Patent Document 1.

In the inkjet coating apparatus described in Patent Document 1, the current position of the head box portion immediately before coating is obtained by the position measurement unit. Furthermore, the inkjet coating device is configured as follows: the difference between the coating position information obtained in advance and the current position of the head box is calculated, and the difference is considered in the coating position information of each nozzle, thereby correcting Coating position. Therefore, the inkjet coating device can easily correct the coating position immediately before the coating regardless of the thermal expansion state of the head case, and thus can suppress the decrease in the coating accuracy of the ink caused by the influence of the head heat. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2011-215173

[Problems to be solved by the invention]

However, regarding the inkjet coating device described in Patent Document 1, the entire inkjet coating device including the position measuring section thermally expands in accordance with the ambient temperature. That is, when the operating ambient temperature is not a specific temperature condition, the frame of the inkjet coating device or the position measuring section itself thermally expands, so the current position of the head box section measured by the position measuring section is subject to thermal expansion. influences. Therefore, when the inkjet coating device is operated at an ambient temperature different from a specific temperature condition, the accuracy of coating position required in all movable ranges may not be maintained due to the accumulation of errors caused by thermal expansion.

An object of the present invention is to provide an inkjet coating device capable of maintaining the accuracy of the coating position even when the ambient temperature is different from a specific temperature condition. [Technical means to solve the problem]

The problems to be solved by the present invention are as described above, and the means for solving these problems are described below.

That is, the present invention is an inkjet coating apparatus including: a stage for mounting a substrate; and a coating unit having a plurality of heads having nozzles for applying ink to the substrate on the stage; The ink is applied to the substrate by spraying ink onto a specific position of the substrate from the nozzle while moving the coating unit and the substrate relatively; and the inkjet coating device includes a position measuring device that measures the coating. The position of the unit; and a control device that performs positioning control of the coating unit based on the position pulse train from the position measurement device, and controls the head based on the coating position information of the ink; and the control device performs the During the positioning control of the coating unit, a position pulse wave correction table at its ambient temperature is acquired, and a correction position pulse wave train is generated based on the position pulse train from the position measuring device and the position pulse wave correction table, and based on the correction position pulse The above-mentioned coating position information is applied to control the above-mentioned head.

In the inkjet coating device, the position pulse wave correction table is generated based on a difference between an actual movement amount of the coating unit and a measurement value obtained by the position measurement device, and the control device causes the position from the position measurement device to be changed. The pulse wave train adds or subtracts a correction pulse wave obtained based on the position pulse wave correction table to generate a corrected position pulse train.

In the inkjet coating device, the position pulse wave correction table is generated in advance for each ambient temperature when performing positioning control of the coating unit, and the control device selectively acquires and performs positioning control of the coating unit. The above-mentioned position pulse wave correction table corresponding to the ambient temperature at the time. [Effect of the invention]

The effects of the present invention exhibit the following effects.

In the present invention, the position pulse wave train is corrected by a position pulse wave correction table corresponding to the ambient temperature, so the ink is applied at a position that takes into account the cumulative error caused by thermal expansion. Thereby, the application position accuracy can be maintained even if the ambient temperature is different from a specific temperature condition.

In the present invention, the position pulse wave correction table is used to apply the ink in consideration of the deviation between the measured value of the coating unit and the actual movement amount. Thereby, the application position accuracy can be maintained even if the ambient temperature is different from a specific temperature condition.

In the present invention, the position pulse wave correction table corresponding to the ambient temperature is selected, so even if the ambient temperature changes, an appropriate correction position pulse train is generated at any time. Thereby, the application position accuracy can be maintained even if the ambient temperature is different from a specific temperature condition.

An inkjet coating apparatus 1 which is an embodiment of the inkjet coating apparatus according to the present invention will be described with reference to FIGS. 1 to 3.

In this embodiment, the substrate W, which is a color filter to which the ink is applied, is set by arranging a plurality of finely divided R (red), G (green), and B (blue) in a specific pattern (RGB pattern). Color) formed by three color pixels. In addition, the ambient temperature T1 in this embodiment is the temperature around the inkjet coating device 1 when it is operated, and means the temperature in a state where the temperature of the inkjet coating device 1 becomes the ambient temperature T1.

As shown in FIG. 1, the inkjet coating apparatus 1 is one that applies ink to the pixels of the substrate W. The inkjet coating device 1 includes a base 2, a stage 3, a coating unit 4, a linear optical scale 12 for a head as a position measuring device, a linear optical scale 13 for a coating door frame, a camera unit 14, and a control device 21.

The stage 3 sucks and holds the substrate W in a horizontal state. The substrate mounting surface of the stage 3 is formed flat, and a plurality of suction holes are formed on the surface. A vacuum pump 3a is connected to the stage 3 (see FIG. 3). Thereby, the stage 3 is comprised so that the substrate W can be adsorbed and held in a horizontal posture by operating the vacuum pump 3a while the substrate W is placed. A substrate positioning device (not shown) is provided on the stage 3. The stage 3 is configured such that the substrate W carried in can be positioned at a specific position by the substrate positioning device. Furthermore, in this embodiment, the stage 3 holds the substrate W by suction, but it is not limited to this.

The coating unit 4 sprays ink onto the substrate W to perform coating. The coating unit 4 includes a coating mast 5, a head box portion 8, and a linear optical scale 12 for the head. In this embodiment, the direction in which the coating door frame 5 moves is defined as the X-axis direction, and the direction in which the head box portion 8 moves is defined as the Y-axis direction.

The coating mast 5 includes two leg portions 5a and a beam member 5b. The two leg portions 5 a are arranged on both outer sides of the stage 3. The two leg portions 5a are connected to each other by a beam member 5b made of stone material so as to straddle the stage 3, and are formed into a substantially portal shape. That is, the two leg portions 5 a support a beam member 5 b disposed above the stage 3. Both leg portions 5 a are provided on the base 2 via a linear guide 6. The linear guide 6 is arranged along the stage 3 in a direction perpendicular to the beam member 5b. That is, the coating door frame 5 is configured such that the beam member 5b can freely move back and forth above the stage 3 in one direction (X-axis direction). Furthermore, a coating servo motor 7 is attached to the leg part 5a (refer FIG. 3). The coating mast 5 is configured to be movable to an arbitrary position in the X-axis direction by a coating servo motor 7.

The head box portion 8 integrally holds a plurality of head bodies 9. The head box portion 8 is provided on the beam member 5b. The head box portion 8 includes a box member made of aluminum. As shown in FIG. 2, the head box portion 8 is formed in such a manner that a plurality of head bodies 9 can be integrally fixed in a state in which they are aligned. The head body 9 is a body in which a plurality of heads 10 having a plurality of nozzles for ejecting ink are arranged in a line. The head body 9 is attached with the nozzle of the head 10 facing the surface of the stage 3. The head 10 is configured to drive the piezoelectric element 10 a (see FIG. 3) and eject ink.

In this embodiment, the head body 9 is composed of five heads 10. A plurality of the head bodies 9 are attached to the head box portion 8 (see FIG. 2). The head body 9 is constituted by setting the number of the heads 10 to which any one of R (red), G (green), and B (blue) is applied, and applying R to each head body 9 (Red), G (green), B (blue) inks. The head body 9 is arranged and fixed to the head box portion 8 in a specific pattern.

The head box portion 8 is attached so as to be movable along the beam member 5b by the head servo motor 11 (see FIG. 3). That is, the head box portion 8 is configured to freely move back and forth above the stage 3 in one direction (Y-axis direction). Thereby, the head box part 8 is comprised so that the nozzle of the head 10 can be moved to arbitrary positions of a Y-axis direction, and ink can be apply | coated. In addition, the head box portion 8 is mounted freely by a lifting mechanism (not shown). Therefore, when the ink is applied, the substrate W and the nozzle are adjusted to an appropriate distance to perform the coating operation. In the case of a standby retreat state where no coating is performed, etc., in order to prevent damage to the nozzle, the nozzle position can be moved to a relatively High security position.

The linear optical scale 12 as the head of the position measuring device measures the position of the head box portion 8. A scale 12a of the linear optical scale 12 for the head is provided at one end of the beam member 5b. The read head 12b of the linear optical scale 12 for a head is provided in the head case 8 facing the scale 12a. The linear optical scale 12 for a head is configured to detect the position of the reading head 12b moving with the head box portion 8 relative to the scale 12a. That is, the linear optical scale 12 for a head is comprised so that the position of the head case part 8 with respect to the beam member 5b in a Y-axis direction may be detected. The head linear optical scale 12 outputs the position information as a head pulse train Ph, which is a position pulse train (see FIG. 3).

The linear optical scale 13 for a coating door frame as a position measuring device measures the position of the coating door frame 5. The scale 13 a of the linear optical scale 13 for the coating door frame is arranged along the base 2 and along a linear guide 6. The reading head 13b of the linear optical scale 13 for the coating door frame is provided on a leg portion 5a facing the scale 13a. The linear optical scale 13 for a coating door frame is comprised so that the position of the reading head 13b which moves with the leg part 5a with respect to the scale 13a may be detected. That is, the linear optical scale 13 for a coating door frame is comprised so that the position of the coating door frame 5 in the X-axis direction with respect to the stage 3 of the base 2 may be detected. The linear optical scale 13 for the coating door frame outputs the position information as the position pulse wave line, that is, the coating door frame pulse wave Pa (see FIG. 3).

The camera unit 14 captures the ink applied on the substrate W. The camera unit 14 includes a camera gantry 15 and a camera 17.

Like the coating door frame 5, the camera door frame 15 includes two leg portions 15a and a beam member 15b. The two leg portions 15 a are arranged on both outer sides of the stage 3. The two leg portions 15a are connected to each other by a beam member 15b so as to straddle the stage 3, and are formed into a substantially portal shape. That is, the two leg portions 15 a support a beam member 15 b disposed above the stage 3. Both leg portions 15 a are provided on the base 2 via a linear guide 6. That is, the camera gantry 15 is configured such that the beam member 15b can freely move back and forth above the stage 3 in one direction (X-axis direction). Further, a camera servo motor 16 is attached to the leg portion 15a (see FIG. 3). The camera gantry 15 is configured to be movable to an arbitrary position in the Y-axis direction by the camera gantry servo motor 16.

The camera 17 includes a CCD (Charge Coupled Device) camera. The camera 17 is attached to the beam member 15 b of the camera gantry 15 in a state capable of capturing the stage 3. The camera 17 is attached so that it can move along the beam member 15b by the camera servo motor 18 (refer FIG. 3). Thereby, the camera 17 is configured to be able to capture a state of a pixel at an arbitrary position on the stage 3.

A linear optical ruler 19 for a camera door frame as a position measuring device measures a position of the camera door frame 15. The scale 19 a of the linear optical scale 19 for the camera door frame is arranged on the base 2 along a linear guide 6. The reading head 19b of the linear optical scale 19 for a camera gantry is provided on a leg portion 15a opposite to the scale 19a. The linear optical scale 19 for a camera door frame is comprised so that the position of the reading head 19b which moves with the leg part 15a with respect to the scale 19a may be detected. That is, the linear optical scale 19 for a camera door frame is comprised so that the position of the camera door frame 15 in the X-axis direction with respect to the stage 3 of the base 2 may be detected. The linear optical scale 19 for the camera gantry outputs the position information as the position pulse train, that is, the camera gantry position pulse train Pc (see FIG. 3).

The linear optical ruler 20 for a camera as a position measuring device is a person who measures the position of the camera 17. The scale 20 a of the linear optical scale 20 for a camera is provided at one end of the beam member 15 b of the camera mast 15 (one side in the Y-axis direction in FIG. 2). The read head 20b of the linear optical scale 20 for a camera is provided on the camera 17 facing the scale 20a. The linear optical scale 20 for a camera is configured to detect the position of the reading head 20b moving with the camera 17 with respect to the scale 20a. That is, the camera linear optical scale 20 is configured to detect the position of the camera 17 with respect to the beam member 15b in the Y-axis direction. The camera linear optical scale 20 outputs the position information as a position pulse train, that is, a camera position pulse train Pca (see FIG. 3).

As shown in FIG. 3, the control device 21 uses a linear optical scale 12 from the head, a linear optical scale 13 for a coating door frame, a linear optical scale 19 for a camera door frame, and a linear optical scale 20 for a camera to obtain position information, and controls the vacuum pump 3a, The coating servo motor 7, the head 10, the head servo motor 11, the camera gantry servo motor 16, the camera 17, and the camera servo motor 18 are based on the position pulse wave correction tables Tb1, Tb2, Tb3 ... Make corrections. The control device 21 may be a CPU (Central Processing Unit, central processing unit), ROM (Read Only Memory), RAM (Random Access Memory, Random Access Memory), HDD (Hard Disk Drive, hard disk drive) A disk drive) or the like is connected by a bus, or may be a LSI (Large Scale Integration) including a single chip. The control device 21 stores various programs or data for controlling the vacuum pump 3a, the coating servo motor 7, the head 10, the head servo motor 11, the camera portal frame servo motor 16, the camera 17, the camera servo motor 18, and the like. The control device 21 stores application position information including the application position of the ink, the type of the ink, and the like.

The control device 21 is connected to the vacuum pump 3a and can control the switch of the vacuum pump 3a.

The control device 21 is connected to the coating servo motor 7 and can control the operation, stop, rotation speed, rotation direction, and the like of the coating servo motor 7.

The control device 21 is connected to the head 10 and can control the driving of the piezoelectric element 10a of the head 10 based on the coating portal position pulse train Pa or the correction position pulse train Pr.

The control device 21 is connected to the head servo motor 11 and can control the operation, stop, rotation speed, rotation direction, and the like of the head servo motor 11.

The control device 21 is connected to the linear optical scale 12 for the head, and can obtain the position information in the Y-axis direction of the head box 8 from the linear optical scale 12 for the head, that is, the head position pulse train Ph.

The control device 21 is connected to the linear optical scale 13 for the coating door frame, and can obtain the position information of the coating door frame 5 in the X-axis direction from the linear optical scale 13 for the coating door frame, that is, the coating pulse frame position pulse train Pa.

The control device 21 is connected to the camera gantry servo motor 16 and can control the operation, stop, rotation speed, rotation direction, etc. of the camera gantry servo motor 16.

The control device 21 is connected to the camera 17 and can control a shooting action of the camera 17 and acquire an image taken by the camera 17.

The control device 21 is connected to the camera servo motor 18 and can control the operation, stop, rotation speed, rotation direction, and the like of the camera servo motor 18.

The control device 21 is connected to the linear optical scale 19 for the camera gantry, and can obtain the position information of the camera gantry 15 in the X-axis direction from the linear optical scale 19 for the camera gantry, that is, the camera gantry position pulse train Pc.

The control device 21 is connected to the linear optical scale 20 for a camera, and can obtain the position information of the camera 17 in the Y-axis direction from the linear optical scale 20 for the camera, that is, the camera position pulse train Pca.

The control device 21 is connected to an external device 22 such as a PC (Personal Computer), and obtains position pulse wave correction tables Tb1, Tb2, Tb3, ... from the external device 22 such as a PC, and based on the position pulse wave correction tables Tb1, Tb2, Tb3 ... The correction pulse wave train Pr is generated by adding (adding) or deleting (subtracting) the correction pulse wave train Pa from the coating gate position pulse train Pa of the coating gate linear light scale 13.

The control device 21 is connected to the temperature sensor 23 and can obtain the ambient temperature from the temperature sensor 23.

With this, the inkjet coating apparatus 1 is configured to move the head box section 8 and the coating door frame 5 in the X direction together by the coating servo motor 7 and the head box section by the head servo motor 11. 8 moves in the Y direction, whereby the nozzle position of the head 10 can be moved to an arbitrary position. Therefore, the inkjet coating apparatus 1 can apply a random RGB pattern on the substrate W by moving the nozzle to a specific pixel on the substrate W placed on the stage 3 and applying the ink based on the application position information. Cloth ink.

Hereinafter, the position pulse wave correction table Tb1 which is one of the position pulse wave correction tables will be described using FIG. 4. In the present embodiment, the position pulse wave correction table Tb1 is a configuration obtained from an external device 22 such as a PC connected to the control device 21, but it may be stored in the control device 21 in advance.

As shown in FIG. 4, the position pulse wave correction table Tb1 corrects the errors generated by the linear optical scale 13 for the coating door frame and the linear optical scale 19 for the camera door frame as the position measuring device according to the ambient temperature T1. The position pulse wave correction table Tb1 is measured and set for each body of the inkjet coating device 1 and for each specific ambient temperature T1. The position pulse wave correction table Tb1 is in the inkjet coating device 1 whose body temperature becomes a specific ambient temperature T1. According to the measured value of the mother glass (not shown), that is, the actual movement amount of the camera door frame relative to the camera door frame, linear optics The difference between the measured values of the scale 19 is calculated.

In the inkjet coating apparatus 1, a mother glass engraved with a size serving as a reference (X-axis coordinate value, Y-axis coordinate value) is placed on a stage 3. The inkjet coating device 1 moves the camera door frame 15 at a fixed pitch (for example, a 100 mm pitch) based on the measured values of the linear optical scale 19 for the camera door frame. In addition, the inkjet coating apparatus 1 measures the size on the mother glass when the camera door frame 15 is moved at a fixed pitch by the camera 17.

The position pulse wave correction table Tb1 contains the amount of movement of the fixed interval (for example, 100 mm, 200 mm, 300 mm, etc.) to record the measured value of the mother glass relative to the fixed distance obtained by using the linear optical scale 19 of the camera door frame. The resulting spacing error is the result. Similarly, in the inkjet coating device 1 where the body temperature becomes other specific ambient temperatures T2, T3, ..., the distance error between the movement distances at fixed intervals is measured to generate position pulse wave corrections at the ambient temperature T2, T3, ... Tables Tb2, Tb3 ... The error of the linear optical scale 19 for the camera door frame and the error of the linear optical scale 13 for the coating door frame are set to be the same depending on the mounting position and the like. That is, the actual movement amount of the camera door frame 15 relative to the measured value of the linear optical scale 19 for the camera door frame is the same as the actual movement amount of the coating door frame 5 relative to the measured value of the linear optical scale 13 for the coating door frame.

Hereinafter, the correction position pulse train Pr will be described. In this embodiment, the correction position pulse wave train Pr is generated based on the position pulse wave correction table Tb1 calculated based on the difference between the measured value of the linear optical scale 19 for the camera door frame and the measured value of the mother glass, that is, the actual movement amount, The corrected position pulse train Pr obtained by correcting the coating gate position pulse train Pa. In addition, the position pulse wave correction table for the head position pulse wave line Ph can be generated based on the distance error between the measured value of the mother glass and the fixed amount of movement obtained by using the linear optical scale 12 for the head, so as to generate the head 10 The correction position pulse train Pr.

As shown in FIG. 4, in the inkjet coating device 1, the pulse wave correction table Tb1 at the position of the ambient temperature T1 is moved relative to the position where the coating door frame 5 is based on the mother glass at a position of 0 mm on the X axis relative to the mother glass. The actual movement amount to the position of 100 mm is 100 mm. The measurement value of the linear optical scale 13 for the coating door frame is 100.004 mm, which results in an error of +4 μm. In the inkjet coating device 1, the actual movement amount of the coating door frame 5 from the position of the X-axis coordinate value of 500 mm to the position of 600 mm based on the mother glass is 100 mm. The measurement value of the linear optical scale 13 was 99.99 mm, which caused an error of -10 μm. That is, it is shown in the inkjet coating apparatus 1 that the linear optical scale 13 for coating the portal frame is shortened by 4 μm in the interval of 100 mm between each X-axis coordinate value of 0 mm to 100 mm at the ambient temperature T1. In each 100-mm interval between the X-axis coordinate value of 500 mm and 600 mm, the linear optical scale 13 for the coating door frame became 10 μm longer.

When the linear optical ruler 13 for the coating door frame outputs 1 pulse per 1 μm (0.001 mm), the actual movement amount of the inkjet coating device 1 from the position of the X-axis coordinate value of 0 mm to the position of 100 mm is 100 mm, 100004 pulses are output from the linear optical scale 13 for the coating door frame, and the actual movement of 100 mm from the position of the X-axis coordinate value of 500 mm to the position of 600 mm is 100 mm. Pulse wave. For example, the inkjet coating apparatus 1 is set in such a manner that, when the ink is applied at a pitch of 100 mm of movement, the ink is applied every time a 100,000 pulse wave is obtained from the linear optical scale 13 for the coating door frame. Therefore, at the ambient temperature T1, the inkjet coating device 1 was moved by 4 pulses less than the actual movement amount of 100 mm (100004 pulse wave) at a position of 0 mm from the X axis coordinate value by 99.996 mm. Apply the ink at the position. In addition, the inkjet coating device 1 applies ink at a position that is 10 mm more than the actual movement amount of 100 mm (99990 pulses) from the position where the X-axis coordinate value is 500 mm.

The control device 21 of the inkjet coating device 1 obtains a position pulse wave correction table Tb1 corresponding to the ambient temperature T1 from an external device 22 such as a PC. Based on the acquired position pulse wave correction table Tb1, the control device 21 generates a correction position pulse wave train Pr that adds or deletes (divides) the correction pulse wave Ps based on the coated position pulse wave train Pa. In this embodiment, the control device 21 generates and deletes (subtracts) 4 pulse waves based on the pulse train line Pa of the coating gate position at a 100 mm pitch interval from the position of the X-axis coordinate value of 0 mm to the position of 100 mm. The correction position pulse train Pr obtained after the correction using the pulse wave Ps. Similarly, the control device 21 generates an additional (plus) 10 pulse wave correction based on the pulse train line Pa of the coating mast position at a 100 mm pitch interval from the position of the X-axis coordinate value of 500 mm to the position of 600 mm. The corrected position pulse train Pr obtained by the pulse wave Ps. Thereby, the inkjet coating apparatus 1 corrects the coating portal position pulse train Pa from the linear optical scale 13 for a coating portal frame which expands or contracts due to the ambient temperature T1 so that it may correspond to an actual movement amount.

The control device 21 generates the corrected position pulse wave train Pr based on the position pulse wave correction table Tb1 corresponding to the ambient temperature T1 in the manner described above. Furthermore, the control device 21 controls the piezoelectric element 10 a so as to open and close the nozzles so as to apply the ink at a specific timing based on the generated correction position pulse train Pr. Accordingly, the inkjet coating apparatus 1 does not need to set the timing (pulse wave number) of the pulse wave train of the ink to be ejected at each ink ejection position according to the ambient temperature T1. That is, the inkjet coating device 1 can generate the position pulse wave correction table Tb1 only by performing measurement using a mother glass for each ambient temperature T1.

With this configuration, the inkjet coating apparatus 1 corrects the coating pulse frame position pulse train Pa with the position pulse wave correction tables Tb1, Tb2, Tb3, ... for each ambient temperature T1, T2, T3, .... Therefore, the substrate W is coated with ink at a position that takes into account the cumulative error between the measurement position of the coating unit 4 and the actual movement amount caused by the thermal expansion and thermal contraction of the linear optical scale 13 for the coating door frame. Thereby, the application position accuracy can be maintained even if the ambient temperature is different from a specific temperature condition.

In addition, the inkjet coating device 1 may be configured to further include an environmental temperature acquisition device such as a temperature sensor 23 (see FIG. 3), thereby selectively acquiring a position pulse wave correction corresponding to the acquired environmental temperature. Table Tb1. The inkjet coating device 1 is controlled by a control device 21 from an external device 22 such as a PC or a position pulse wave correction table Tb1, Tb2, Tb3, ... of each ambient temperature T1, T2, T3, ... stored in the control device 21 in advance. Obtain the position pulse correction table closest to the conditions of the ambient temperature. The control device 21 generates a corrected position pulse wave train Pr based on the acquired position pulse wave correction table. With this configuration, the inkjet coating apparatus 1 selects a position pulse wave correction table corresponding to a temperature close to the ambient temperature, and therefore generates an appropriate correction position pulse train Pr at any time even if the ambient temperature changes. Thereby, the application position accuracy can be maintained even if the ambient temperature is different from a specific temperature condition.

In addition, the inkjet coating device 1 can also estimate the temperature at the ambient temperature at which the position pulse wave correction table is not generated based on the position pulse wave correction tables Tb1, Tb2, Tb3, ... of each environmental temperature T1, T2, T3, ... that are memorized in advance. Position pulse wave correction table. For example, for a command to move from a position of 0 mm to a position of 100 mm in the X-axis coordinate, the position pulse wave correction table Tb1 when the ambient temperature T1 is 20 degrees is 4 μm more, and the ambient temperature T2 is 24 degrees At this time, the actual movement amount is 8 μm more. In this case, the control device 21 can also estimate that the actual movement amount is 6 μm more by proportional calculation or the like when the ambient temperature is 22 degrees, thereby generating a position pulse wave correction table.

In addition, in this embodiment, the inkjet coating apparatus 1 has a configuration in which the coating unit 4 moves relative to the stage 3, but is not limited to this, and may also have a configuration in which the stage 3 moves relative to the coating unit 4. . In this case, a linear optical scale for a stage is set as the position measuring device of the stage 3 in the inkjet coating apparatus 1, and the position pulse wave train of the stage is corrected by a position pulse wave correction table.

The above-mentioned embodiment shows only a representative form, and can be implemented with various changes without departing from the core of one embodiment. Furthermore, it goes without saying that the invention can be implemented in various forms. The scope of the present invention is indicated by the description of the scope of the patent application, and further includes all meanings equivalent to the description of the scope of the patent application and all changes within the scope.

1‧‧‧ inkjet coating device

2‧‧‧ abutment

3‧‧‧ carrier

3a‧‧‧Vacuum pump

4‧‧‧ Coating unit

5‧‧‧ coated door frame

5a‧‧‧foot

5b‧‧‧ beam member

6‧‧‧ linear guide

7‧‧‧ coating servo motor

8‧‧‧Head Box

9‧‧‧ Head

10‧‧‧ head

11‧‧‧head servo motor

12‧‧‧ linear optical ruler for head

12a‧‧‧ Ruler

12b‧‧‧Read head

13‧‧‧ Linear optical ruler for coated door frame

13a‧‧‧ Ruler

13b‧‧‧Read head

14‧‧‧ Camera Unit

15‧‧‧ Camera Door Frame

15a‧‧‧foot

15b‧‧‧ beam member

16‧‧‧ Servo motor for camera door frame

17‧‧‧ Camera

18‧‧‧ Camera Servo Motor

19‧‧‧ Linear Optical Ruler for Camera Door Frame

19a‧‧‧ ruler

19b‧‧‧Read head

20‧‧‧ camera linear optical ruler

20a‧‧‧ Ruler

20b‧‧‧Read head

21‧‧‧control device

22‧‧‧External Device

23‧‧‧Temperature sensor

Pa‧‧‧Coated gantry position pulse train

Pc‧‧‧Camera position pulse train

Pca‧‧‧ camera position pulse train

Ph‧‧‧Head position pulse train

Pr‧‧‧ Correction position pulse train

Ps‧‧‧ Correction Pulse

Tb‧‧‧Position Pulse Correction Table

Tb1‧‧‧Position Pulse Correction Table

Tb2‧‧‧Position Pulse Correction Table

Tb3‧‧‧Position Pulse Correction Table

W‧‧‧ substrate

FIG. 1 is a perspective view showing the overall configuration of an inkjet coating apparatus according to an embodiment of the present invention. FIG. 2 is a plan view showing the configuration of a head of an inkjet coating apparatus according to an embodiment of the present invention. Fig. 3 is a block diagram showing a control structure of an inkjet coating apparatus according to an embodiment of the present invention. FIG. 4 is a view showing a graph showing a position pulse wave correction table of an inkjet coating apparatus according to an embodiment of the present invention.

Claims (3)

An inkjet coating device includes: a stage on which a substrate is placed; and a coating unit having a plurality of heads, the head having a nozzle for applying ink to the substrate on the stage; The cloth unit and the substrate are relatively moved while spraying ink from a specific position on the substrate by the nozzle, and coating the ink on the substrate; and the inkjet coating device includes: a position measuring device that measures the position of the coating unit; A control device that performs positioning control of the coating unit based on the position pulse train from the position measurement device, and controls the head based on the coating position information of the ink; and the control device performs positioning of the coating unit During control, the position pulse wave correction table at the ambient temperature is obtained, and the corrected position pulse wave train is generated based on the position pulse train from the position measuring device and the position pulse wave correction table, and based on the corrected position pulse wave and the coating The position information controls the above headers. For example, the inkjet coating device of claim 1, wherein the position pulse correction table is generated based on a difference between an actual movement amount of the coating unit and a measurement value obtained by using the position measuring device, and the control device causes The position pulse wave train of the position measuring device adds or subtracts the correction pulse wave obtained based on the position pulse wave correction table to generate a corrected position pulse train. For example, the inkjet coating device of claim 1 or 2, wherein the position pulse wave correction table is generated in advance for each ambient temperature when performing positioning control of the coating unit, and the control device selectively acquires and performs The position pulse wave correction table corresponding to the ambient temperature during positioning control of the coating unit.