TW201920910A - Apparatus for measuring light, system and method thereof - Google Patents

Abstract

The present invention relates to an apparatus, a system and a method for measuring light received from a specimen. A conventional hybrid system, which acquires a corrected image of a tristimulus value and the like by measuring the light emitted from the specimen, has a problem in which the photosensitivity of a measurement device is reduced since an optical branch means such as a beam splitter is used, thereby resulting in the slowing down of measuring speed. In order to resolve the problem, the present invention enables the light, which is emitted from the specimen and is incident on a light measurement apparatus, to be incident on a first measurement device and a second measurement device without passing the optical branch means for making light branch into a plurality of lights and directing the lights in different directions. To this end, the present invention has the first measurement device and the second measurement device arranged such that a first optical path section, which extends from one point within a common measurement area, of light paths of a first light arriving at the first measurement device and a second optical path section, which extends from one point of optical paths of a second light arriving at the second measurement device, are not overlapped with each other and form an angle therebetween within a range greater than 0 DEG and less than 180 DEG.

Description

Device, system and method for measuring light

The invention relates to a device, a system and a method for measuring light received from a test object.

There are a variety of photometers and colorimeters for measuring the brightness and chromaticity of light emitted from a test object. In particular, in order to check the performance of the panel of a display device, there are photometers and colorimeters for measuring the brightness, chromaticity, and other luminous characteristics of light emitted from flat panel display panels such as LCDs and PDPs.

For example, a spectral photometer or a spectral colorimeter is used as a machine that can measure the brightness and chromaticity of the correct light for high-performance inspection. The spectrophotometer / colorimeter can divide the spectrum of light into a plurality of channels (for example, 30 to 200 channels) with a specific frequency band (for example, 1 to 10 nm), and measure the energy of each frequency band. Furthermore, in a spectrophotometer / colorimeter, the energy of each frequency band is integrated by using a specific color matching function to calculate the brightness of the color space corresponding to the color matching function. And / or chroma. For example, in the inspection of display devices, in order to perform inspection based on the color perceived by humans, a spectrophotometer / colorimeter can accurately obtain the CIE tristimulus (XYZ) that expresses it. Such a spectrophotometer / colorimeter has the advantages of obtaining the correct brightness and / or chromaticity by using the above-mentioned methods, but has the disadvantages that the measurement takes a long time, the complexity of the device increases, and the cost is high. In addition, in general, there is a limitation that the measured value has no spatial resolution or a small spatial resolution.

In order to solve the above-mentioned problems, a composite system of a spectrophotometer / colorimeter and a video camera has been created since before. For example, there is a color measuring machine system such as Korean Published Patent Publication No. 10-2016-0098083. In the previous measuring machine system as shown in FIG. 1, the coaxial light emitted from the test object is split by the beam splitter 30, and the divergent lights are directed to the RGB camera 20 and the spectral colorimeter 10, and then the spectral chromaticity is used. The tristimulus value measured by the meter 10 transforms and corrects the RGB image obtained by the RGB camera 20 to produce a tristimulus value image. The prior art as described above has the advantages of integrating the RGB camera 20 that can obtain the RGB image of the subject at a faster speed in a wider area, and can analyze in a narrower area without space The spectral colorimeter 10 of the three-excitation value of the test object is obtained more accurately under the degree, and the mapping information of the three-excitation value with improved accuracy can be obtained.

[Problems to be solved by the invention]

However, since the previous measuring machine system described above uses a light splitting mechanism such as a beam splitter in order to measure coaxial light with different measuring machines, the amount of light of at least one of them is reduced to As a result of 1/2 or less, there is a problem that the light sensitivity is reduced to 1/2 or less in at least one of the two measuring machines. Furthermore, when the light sensitivity decreases as described above, the time required to collect light for measurement increases, so the measurement time for the test object increases, and as a result, there is a problem that the production efficiency of the test object inspection process decreases. In addition, since the optical branching mechanism must be provided in the optical measuring device, the volume of the device becomes large. Since the position of the measuring machine is determined according to the configuration of the optical branching mechanism, there is a problem that the degree of freedom of the measuring machine is restricted. In addition, when an aperture mirror is used as the light divergence mechanism, an image of a portion corresponding to the hole of the mirror cannot be obtained, and when the hole becomes smaller, the amount of light passing through the hole to the measuring machine decreases.

Therefore, the problem of the optical measurement device, system, and method of the present invention is to solve the problems of the foregoing prior art. [Technical means to solve the problem]

In order to solve the above-mentioned problems, the present invention enables the light emitted from the test object and incident on the light measuring device to be directed to the first measuring machine without passing through a light diverging mechanism that divides the light into a plurality and makes the iso-directed directions to different directions. And the second measuring machine enters. Further, the present invention is characterized in that the first measuring machine and the second measuring machine are arranged in such a manner that the first measuring machine and the second measuring machine are extended from one point in the common measuring area in the first light path to the first measuring machine. The first optical path section and the second optical path of the second light path to the second measuring machine do not overlap with each other and form an angle within a range of greater than 0 ° and smaller than 180 °.

The light measurement device of the present invention may include: a first measurement mechanism that receives the first light from the first measurement area of the sample, and generates at least one first measurement value from the received first light; a second measurement mechanism, It receives the second light from the second measurement area of the test object, and generates a set of second measurement values with a specific spatial resolution from the received second light; and a correction mechanism based on the first measurement value, At least one of conversion and correction of the second measurement value is performed. In addition, here, the first measurement mechanism and the second measurement mechanism may be arranged in such a manner that the first measurement area and the second measurement area have a common measurement area in which at least a part of the measurement area overlaps, and the first measurement area and the second measurement area are up to the first measurement area. Among the first light path of the mechanism, the first light path section extended from one point in the common measurement area, and the second light path of the second light path extended to the second measurement mechanism from the one point. The light path intervals do not overlap with each other, but form an angle within a range of greater than 0 ° and less than 180 °.

In one embodiment, the second measurement mechanism may generate the second measurement value with respect to all the regions in the second measurement region.

In an embodiment, the light measuring device may further include a control mechanism, which changes the position of the first measurement mechanism by changing the angle between the first light path interval and the second light path interval, At least one of the setting of the optical axis and the optical system, the position of the second measurement mechanism, and the setting of the optical axis and the optical system.

In one embodiment, the correction mechanism may perform at least one of conversion and correction of the second measurement value based on an angle between the first light path section and the second light path section.

In one embodiment, the light incident on the light measuring device may be incident on the first measurement mechanism and the second measurement without passing through a light diverging mechanism that divides the light into a plurality of directions and makes them point in different directions. mechanism.

In an embodiment, the light measurement device may include a plurality of the second measurement mechanisms, and the second measurement region of the plurality of second measurement mechanisms has at least a portion of a region that overlaps, and the common measurement region is located in the region of the repeats. within the area.

In one embodiment, the light measurement device may include a plurality of the first measurement mechanisms, and the first measurement area of the plurality of first measurement mechanisms has at least two or more of the common measurement areas in the repeated area. .

In one embodiment, the first measurement mechanism may be any one of a spectrophotometer, a spectrophotometer, a spectroradiometer, a photoelectric photometer, a photoelectric colorimeter, and a photoelectric radiometer. The second measurement mechanism may be any one of a camera having a spatial resolution, an image photometer, and an image colorimeter.

The method for measuring the light received from the test object in the light measuring device of the present invention may include: receiving the first light from the first measurement area of the test object by a first measuring machine, and generating at least the first light received from the first measurement machine. 1 step of a first measurement value; a second measuring machine receives a second light from a second measurement area of the specimen, and generates a set of second measurement values with a specific spatial resolution from the received second light And a correction step of performing at least one of conversion and correction of the second measurement value based on the first measurement value. Here, the first measuring machine and the second measuring machine may be arranged in such a manner that the first measuring area and the second measuring area have a common measuring area in which at least a part of the measuring area overlaps, and the first measuring area and the second measuring area are arranged to the first measuring area. Among the first light path of the measuring machine, the first light path section extended from one point in the common measurement area and the second light path of the second measuring machine extending from the one point in the light path. The second light path sections do not overlap each other, but form an angle within a range of greater than 0 ﾟ and less than 180 ﾟ.

The light measurement system of the present invention may include: a first measuring machine that receives the first light from the first measurement area of the test object, and generates at least one first measurement value from the received first light; the second measurement machine, It receives the second light from the second measurement area of the test object, and generates a set of second measurement values with a specific spatial resolution from the received second light; and a correction circuit based on the first measurement value, At least one of conversion and correction of the second measurement value is performed.

The light measurement system of the present invention may be configured to include: a first measuring machine that receives the first light from the first measurement area of the test object, and generates at least one first measurement value from the received first light; the second measurement A receiver that receives the second light from the second measurement area of the specimen, and generates a set of second measurement values with a specific spatial resolution from the received second light; and at least one processor; and the processing described above The device performs at least one of conversion and correction of the second measurement value based on the first measurement value.

Here, the first measuring machine and the second measuring machine may be arranged in such a manner that the first measuring area and the second measuring area have a common measuring area in which at least a part of the measurement area overlaps, and the above-mentioned first measuring machine Of the first light path, the first light path section extended from one point in the common measurement area, and the second light path extended from the one point in the second light path to the second measuring machine. The intervals do not overlap each other, but form an angle within a range of greater than 0 ﾟ and less than 180 ﾟ. [Effect of the invention]

According to the light measuring device, system, and method of the present invention, since a light branching mechanism such as a beam splitter is not used, the process of measuring the value of a measurement object defined in a specific color space such as a tristimulus value can be obtained more quickly. The corrected mapping data has the advantageous effect of improving the production efficiency of the test body inspection process. In addition, the design of the light measuring device is simplified, and the device can be miniaturized. In addition, in the present invention, since the difference in the characteristics of light due to the difference in the viewing angle is corrected, it is possible to correctly correct even if the coaxial light is not measured using the light divergence mechanism. In addition, according to the present invention, by using a plurality of cameras, there is an advantageous effect that a measurement area with a wider area can be measured, or measurement can be performed with a larger resolution, and the spatial resolution can be improved. In addition, there is an advantageous effect that measurement values can be corrected / converted uniformly throughout the entire sample. In addition, according to the present invention, since the measurement area is set regionally, and the reference measurement value of the measured region is used to correct / transform the measurement value with the spatial resolution as the object of the correction, there is a further improvement in the accuracy of the correction / transformation Beneficial effect. In addition, according to the present invention, there is an advantageous effect that measured values of a plurality of types of viewing angles can be simultaneously corrected and / or changed.

The optical measurement device of the present invention includes a first measurement mechanism, a second measurement mechanism, and a correction mechanism. The correction mechanism performs conversion and conversion of the second measurement value of the second measurement mechanism based on the first measurement value of the first measurement mechanism with respect to the sample. At least one of the amendments. Here, the detection system means an object that is the object of measuring the light received from it. The detection object may also be an object that actively emits light, or an object that reflects incident light. For example, the detection body is not limited to these, and may be a display (for example, OLED, LCD, and PDP, etc.), various light sources (for example, LED, etc.) or illumination provided in a device that provides a display to a user.

The first measuring mechanism of the present invention may be a first measuring machine that receives the first light from the first measurement area of the sample and generates at least one first measurement value from the received first light. In the present invention, the first measuring machine is characterized in that it generates a measurement value having a relatively higher accuracy than the second measuring machine described later. For example, the first measuring machine may be any of a known spectrophotometer, radiometer, and spectral colorimeter, or any one of a photoelectric photometer and a photoelectric colorimeter.

A spectral photometer or a spectral colorimeter is a machine that analyzes the spectrum of light and measures the brightness and chromaticity of light more accurately. When the first measurement mechanism is a measuring machine based on such a spectral analysis, the measuring machine may include a detector such as a spectroscope 101a that generates a spectrum of incident light, a light sensor that detects a spectrum, and the like as shown in FIG. 2 (a). 102a, and a circuit or processor 103a that processes the band-wise energy of the light detected by the detector. In a spectrophotometer or a colorimeter, the spectrum of light is divided into a plurality of channels (for example, 30 to 200 channels) having a specific frequency band (for example, 1 to 10 nm), and the energy in each frequency band is measured. The specific color matching function integrates the energy according to the frequency band to obtain the brightness and / or chromaticity of the color space corresponding to the color matching function. For example, the CIE triplex value (XYZ) can be obtained by integrating the energy of the spectrum by using a CIE XYZ color matching function designed to model colors perceived by the human eye. For example, the CIE triple-excitation value (XYZ) can be obtained by using Equation 1 below.

[Formula 1]

Here, X, Y, and Z are CIE tristimulus values, λ is the wavelength, L is the spectral radiation, and x, y, and z are the color matching functions of the CIE XYZ color space.

Or, the spectrophotometer / colorimeter can also obtain the value of the standardized CIE xyY color space according to the needs, and can also use the color matching function defined in other color spaces to obtain the brightness and / or chromaticity of the color space. As described above, the machine that analyzes the spectrum and measures light reflects the value of the energy of each frequency band in the color matching function and calculates the brightness and / or chromaticity specified by the color matching function, so it is possible to obtain the correct brightness and / or Advantages of chroma. However, the method of analyzing the spectrum as described above has the disadvantages that it takes a long time to obtain brightness and / or chromaticity, the complexity of the device increases, and the cost is high. In addition, in general, there is a limitation that the measured value has no spatial resolution or a small spatial resolution.

On the other hand, a photoelectric photometer or a photoelectric colorimeter is a machine that uses optical filters and light sensors to measure brightness and / or chromaticity instead of directly analyzing the spectrum. Such a photoelectric measuring machine may include, as shown in FIG. 2 (b): an optical filter 101b, a detector 102b such as a light sensor, and a circuit or processor 103b that processes the output value of the detector. The photoelectric photometer / colorimeter measures the color space by using an optical filter corresponding to the color matching function of the color space to be measured, and measuring the energy of light passing through the optical filter with a light sensor. Brightness and / or chroma. Such a photoelectric photometer / colorimeter has the advantage of obtaining brightness and / or chromaticity more quickly, but since the energy of the spectrum of light is not directly analyzed, an optical filter is used to model the color matching function. There is a limitation that the accuracy of the measurement is relatively low.

The first measuring machine of the present invention may be any one of the above-mentioned spectrophotometer or radiometer, spectral colorimeter, photoelectric photometer, and photoelectric colorimeter, or may be based on a method other than the above-mentioned method. Spectrophotometer / radiometer / colorimeter for optical spectrum analysis or photoelectric phenomenon. Here, it is preferable that the first measuring machine may be a spectrophotometer or a colorimeter in order to obtain a more accurate first measurement value. However, the first measuring machine is not limited to these, as long as it is a light measuring machine that measures brightness, chromaticity, or other characteristics of light with a relatively higher accuracy than the second measuring machine described below. Therefore, the first measuring machine may be a photometer, a colorimeter, or other light measuring device in addition to the method described above and based on other methods. In addition, the first measurement value generated by the first measuring machine may be a brightness and / or chromaticity defined in an arbitrary color space, or other characteristic values of light, preferably, a tristimulus value, and At least one of the CIE triple shock values (XYZ). However, the first measurement value is not limited to these, and may be a brightness and / or chromaticity value defined in another color space as required, or another characteristic value of light.

The second measuring mechanism of the present invention may be a second measuring machine that receives the second light from the second measurement area of the sample, and generates a set of second measurement values having a specific spatial resolution from the received second light. Here, the set of the second measurement value may have a form such as an image, a two-dimensional array, or a mapping having a specific spatial resolution (for example, 640 × 480, 1024 × 768, 1280 × 1024, etc.), or may have a color space. The number of channels corresponds to a data structure of at least three dimensions. The second measuring machine of the present invention is characterized in that it generates a measurement value having a relatively lower accuracy than the first measuring machine described above, but has a higher spatial resolution. Here, the relatively low accuracy may mean that the second measurement value of the second measurement machine or the converted value of the second measurement value has a larger measurement error than the first measurement value of the first measurement machine, and has a lower accuracy. Accuracy. For example, the second measuring machine may be any one of a camera having a specific spatial resolution, an image photometer, and an image colorimeter.

Here, the second measuring machine may be a camera, a photometer, a colorimeter, and the like including an optical filter and a light sensor having a spatial resolution. Here, a well-known optical filter corresponding to the color space to be measured by the second measuring machine can be used as the optical filter, and a well-known sensor that can obtain an image, such as CCD, CMOS, can be used as the light sensor. . For example, the second measuring machine may be an RGB camera or a rotating filter camera, or may be used to generate a CIE triple-excitation (XYZ) image or to generate an optical filter using an optical filter defined not only in the RGB color space but also in the CIE XYZ color space as needed. Image photometer / colorimeter for other color space measurements.

The second measuring machine may be a measuring machine that generates an image of the same color space as the image of the specific color space that the light measuring device of the present invention is intended to obtain, or may be a measuring machine that generates an image of a different color space. If the second measurement machine generates a second measurement value of a color space different from the color space of the data to be obtained by the light measurement device of the present invention, the color space of the second measurement value must be converted. Such a color space conversion can be performed by a second measurement mechanism or by a correction mechanism described below. The color space conversion of the correction mechanism described below can be performed by the second measurement mechanism, and the correction mechanism can be integrated with the second measurement mechanism as necessary. For example, when the light measuring device of the present invention generates a three-excitation image of a subject, the second measuring machine may be a photometer or a colorimeter that generates a three-excitation image, or may be a camera that generates an RGB image. If the second measuring machine is an RGB camera, the RGB measurement value generated by the second measuring machine can be converted into a tristimulus value, and the conversion can also be performed during the correction process as required.

The second measuring machine of the present invention may be any one of the above-mentioned camera, image photometer, and image colorimeter, and may also be a light measuring device having other specific spatial resolution. The second measuring machine of the present invention is not limited to the above examples, as long as it measures the brightness and / or chromaticity, or other light characteristics with a relatively lower accuracy than the first measuring machine, it has a specific spatial analysis. Degree light measuring machine. The second measurement value generated by the second measurement machine may be a characteristic value of brightness and / or chromaticity or other light defined in an arbitrary color space, preferably, it may be RGB data, tristimulus value, and CIE three At least one of the shock values (XYZ).

In one embodiment, in the light measuring device of the present invention, the first measuring machine may be a spectral colorimeter, and the second measuring machine may be an image colorimeter or an RGB camera. However, the combination of the first measurement machine and the second measurement machine is not limited to the above example, and may be selected from a combination that satisfies the conditions of accuracy and spatial resolution of the measurement values of the first measurement machine and the second measurement machine. In addition, the first and second measuring machines of the present invention are not limited to individual machines or objects that are physically distinguished. They can also measure brightness and / or chromaticity as defined in a specific color space as described above. The combination of other hardware and / or software features of light features exists in the form of at least one device or system.

In the present invention, the first measurement area of the first measuring machine on the subject and the second measurement area of the second measuring machine on the subject have a common measurement area in which at least a portion is repeated. For example, referring to FIGS. 3 and 4, the first measurement area 1 of the test body 3 of the first measuring machine 100 and the second measurement area 2 of the test body 3 of the second measuring machine 200 have a common measurement area that is repeated. In the examples of FIGS. 3 and 4, the entire first measurement area 1 is a common measurement area 1.

In the light measuring device of the present invention, the first measuring machine and the second measuring machine are arranged in the following manner, that is, the first measuring machine in the first light path to the first measuring machine is extended from a point in the common measuring area. The first optical path section and the second optical path of the second light path to the second measuring machine do not overlap with each other and form an angle within a range of greater than 0 ° and smaller than 180 °. Here, the meaning that the light path sections overlap each other is not the meaning that the light paths of the lights traveling in different directions only cross each other at any intersection point, but the meaning that the light paths overlap each other at least in some sections. For example, in the previous measuring machine system as shown in FIG. 1, the light paths of the light to each measuring machine 10, 20 overlap each other in a section extending from the common measurement area of the test body to the beam splitter. On the other hand, in the present invention, the overlapping of the light paths as described above does not occur. In the present invention, the first light path section may be a straight line section extended from any one point in the common measurement area in the first light path section, and the second light path section may be the above-mentioned second light path section. For a straight line section extended at the same location, as described above, the first light path section and the second light path section may not overlap with each other to form an angle. Therefore, the first light path and the second light path sections extended from all the points in the common measurement area may not overlap each other.

The optical measuring device of the present invention is characterized in that the first optical path section and the second optical path section form an angle without overlapping as described above, and as shown in FIG. 4, when the common measurement area is emitted, the angles are different from each other. The first light and the second light in the optical path reach the first measuring machine 100 and the second measuring machine 200, respectively. That is, in the previous light measuring device as shown in FIG. 1, after the light advances in the same light path, the light is diverged by a light branching mechanism 30 such as a beam splitter, and is incident on each of the RGB cameras 20 and the spectral colorimeter 10 In the present invention, the light from the first measuring machine and the second measuring machine is light having different light paths from the common measuring area 1 when they are emitted.

The conventional light measuring device shown in FIG. 1 uses a light splitting mechanism such as a beam splitter and an aperture mirror to perform divergence in order to measure coaxial light with different measuring machines. That is, it has a structure that a beam splitter or the like diverges light traveling along the same optical path, points them in different directions, and receives light diverged by each measuring machine. However, in the previous light measuring device as described above, in the process of diverging light, at least any one of the amount of divergent light is reduced to less than 1/2 compared to the light before the divergence. As a result, there are two There is a problem that the light sensitivity of at least one of the measuring machines is reduced to less than 1/2. Furthermore, when the light sensitivity decreases as described above, the time required to collect light for measurement increases, so the measurement time for the sample increases, and as a result, there is a problem that the production efficiency of the sample inspection process decreases. In addition, since the optical branching mechanism must be provided in the optical measuring device, the volume of the device becomes large, and since the position of the measuring machine is determined according to the configuration of the optical branching mechanism, there is a problem that the degree of freedom of arrangement of the measuring machine is restricted. In addition, when an aperture mirror is used as the light divergence mechanism, an image of a portion corresponding to the hole of the mirror cannot be obtained, and when the hole becomes smaller, the amount of light passing through the hole to the measuring machine decreases.

In order to solve the above-mentioned problems of the prior art light measuring device, the light emitted from the test object and incident on the light measuring device can be directed to different directions without dividing the light into a plurality of light and so on. The light branching mechanism is incident on the first measuring machine and the second measuring machine. Therefore, the light measuring device of the present invention is such that the first measuring machine and the second measuring machine are arranged as described above, that is, a point in the common measurement area from the light path of the first light to the first measuring machine. The extended first light path section and the second light path section of the second light path to the second measuring machine do not overlap each other and form an angle within a range of greater than 0 ﾟ and less than 180 ﾟ.

In one embodiment, as in the example of FIG. 4, the first measuring machine and the second measuring machine are arranged such that the optical axis of the first measuring machine and the optical axis of the second measuring machine form a specific angle, and the first optical path The angle between the interval and the second light path interval may be greater than 0 °. Here, since the first measuring machine and the second measuring machine directly receive light from the test body without passing through the light divergence mechanism and are separated from each other at the specific angles described above, they respectively receive light having different light paths. .

In the present invention, the angle between the first optical path section and the second optical path section may be based on the distance between the first measuring machine and the second measuring machine and the test object, and between the first measuring machine and the second measuring machine. Distance and so on. Here, the angle between the first light path section and the second light path section can be set in such a way that the first light from the first measurement area and the second light from the second measurement area do not become the same or overlapping lights. For a specific angle or more. The above-mentioned angles can also be set to small angles such as 0.001 ﾟ or 0.01 ﾟ under ideal circumstances, but can be set in consideration of the physical size of the first and second measuring machines or the distance from each other and the distance from the test body This is the angle that can be achieved with a light measuring device. For example, considering the constraints described above, an angle of 0.5 ° or more, 1 ° or more, or 1.5 ° or more may be set.

As described above, the first measurement mechanism and the second measurement mechanism are arranged such that the angle between the first optical path section and the second optical path section forms an angle greater than 0 °. In the present invention, even if the beam splitter is not used If the light divergence mechanism is used, the second measurement mechanism can still generate the second measurement value for all the areas in the second measurement area without omission. In addition, the first measurement mechanism may generate the first measurement value in an area where there is no omission in the first measurement area.

On the other hand, in order to adjust the arrangement of the first measuring machine and the second measuring machine as needed, it is not intended to divide the light incident on the measuring machine, but the optical measuring device of the present invention may further include a reflecting mirror. Waiting light path changing mechanism. Furthermore, at this time, the arrangement of the first measuring machine and the second measuring machine may be determined by further considering the arrangement of the light path changing mechanism. Therefore, in the present invention, the angle between the first optical path section and the second optical path section may not necessarily coincide with the angle between the optical axis of the first measuring machine and the optical axis of the second measuring machine. According to the needs, it can correspond to the configuration change of the more equipped light path changing mechanism. Therefore, the optical measuring device of the present invention is characterized in that it satisfies the condition that the first optical path section and the second optical path section do not overlap with each other and form an angle in a range of greater than 0 ﾟ less than 180 ，. The positions of the first and second measuring machines, the direction of the optical axis, and the settings of the optical system can be changed as needed. The angle between the first light path section and the second light path section may be fixed, or may be changed as needed by a control mechanism described later.

Here, as the angle between the first light path section and the second light path section increases, the possibility that the characteristics of the first light and the second light are different from each other may increase. Therefore, the angle between the first light path section and the second light path section is preferably set within 90 °, 60 °, 45 °, or 30 °. In particular, the inventors of the present invention have found that when the angle between the first optical path interval and the second optical path interval is within 15 °, preferably within 10 °, and more preferably within 5 °, the When measuring light of equal value, there is almost no obvious error due to the difference in the light path of the first light and the second light. That is, the inventors of the present invention discovered the fact that even if the first measuring machine and the second measuring machine do not use light having the same optical path from the test object, if the first optical path section and the second The light path interval is within a specific angle, and there will still not be a significant difference in the accuracy of the tristimulus value of the final corrected specimen. It is thought that this is because when the difference between the two light paths emitted from the detection body is within a specific angle, the difference between the measured three stimuli is so small that it can be ignored. Therefore, in the present invention, the angle between the first light path section and the second light path section is set to 15 ° or less, preferably 10 ° or less, and more preferably 5 ° or less, and The correction accuracy of the second measurement value can be maintained at the same level as that of the prior art, and the problems of the above-mentioned prior art can be solved while the measurement speed can be increased, thereby achieving a favorable effect that can improve the production efficiency of the inspection process of the specimen. . In addition, since a light branching mechanism such as a beam splitter is not used, there is an advantageous effect that no complicated optical design is required, the design of the light measuring device is simplified, and the device can be miniaturized. Moreover, in the present invention, since the characteristic difference of the light accompanying the above-mentioned difference in the viewing angle can be further corrected by the method described later, even if the first measuring machine and the second measuring machine are arranged in the manner described above, it is still possible to further Improve the accuracy of light measuring devices.

The light measuring device of the present invention may further include a control mechanism. The control mechanism can change at least one of the position of the first measuring machine, the optical axis and the optical system setting, and the position of the second measuring machine, the optical axis and the optical system setting to change the first optical path section and the second optical path section. Between angles. In one embodiment, the configuration of the light path changing mechanism such as a mirror may be changed together with the above-mentioned changes of the first and second measuring machines, and the interval between the first light path section and the second light path section may be changed. Angle. The control mechanism for the above-mentioned changes may include: a well-known physical mechanism for changing the position or direction of a measuring machine or a mirror, etc. for fixing, moving and posture adjustment, and a motor for physically controlling the same Waiting for the drive mechanism. For example, it may include a well-known fixing mechanism such as a screw that fixes a measuring machine or a mirror, a bonding mechanism, and a well-known moving mechanism or a rotating shaft that is adjusted by physically changing the position or direction of the fixing mechanism. The well-known rotating mechanism may include a well-known driving mechanism such as a motor that can control the moving or rotating mechanism. In addition, it may include a combination of a control circuit or a processor and hardware and / or software that functions by controlling the aforementioned mechanism. In addition, it may include a combination of a circuit or a processor and hardware and / or software that functions by controlling the optical system settings such as the focus and exposure settings of the measuring machine.

The correction mechanism of the present invention corrects and / or converts the second measurement value of the second measurement machine based on the first measurement value of the first measurement machine. In the present invention, the correction mechanism may be a correction circuit composed of hardware and / or software that performs the conversion and / or correction functions described below. For example, the correction circuit may be an electrical or electronic circuit coupled with specific components designed to perform a function as described above. In addition, the correction mechanism may be a combination of at least one processor and hardware and / or software that performs the functions described above.

In the present invention, when the first measurement value and the second measurement value are measurement values defined in the same color space, the second measurement value may be corrected based on the first measurement value. In addition, when the first measurement value and the second measurement value are measurement values defined in different color spaces, the second measurement value may be converted into the color space of the first measurement value, and then the first measurement value may be modified based on the first measurement value. 2 Transformed value of the measured value. Or, according to the setting of the transformation and / or correction function, when the first measurement value and the second measurement value are defined with different color spaces, the color space processing based on the first measurement value can be transformed and modified. Performed as a transformation of integration.

In the present invention, since the first measuring machine and the second measuring machine do not receive coaxial light, as described above, the first light and the second light that do not overlap with each other in the first optical path section and the second optical path section are received, respectively, and a first light is generated. 1 measurement value and 2nd measurement value, so when correcting the 2nd measurement value based on the 1st measurement value, it is preferable to correct the difference of the light path as described above. Therefore, in the present invention, the second measurement value can be corrected and / or converted by further considering the angle between the first optical path section and the second optical path section. Therefore, the first measurement value may be corrected based on the angle between the first light path section and the second light path section, and the second measurement value may be corrected and / or converted based on the corrected first measurement value. If necessary, it can be integrated into the correction and / or conversion process of the second measurement value.

The intensity of the light emitted from the test object and received by the measuring machine changes according to the field of view angle of the light of the actual test object and the angle at which the test machine observes the test object. Here, when the light distribution information of the test object is set to display information in which the brightness and / or chromaticity are differently measured according to the viewing angle of the test object, the measurement is related to the intensity of the viewing angle of the test object The light distribution information can be collected through prior measurement. Or, when the light distribution information of the sample cannot be collected in advance, the light distribution information can also be mathematically modeled based on the Lambert cosine theorem. That is, when the intensity of the light toward the normal direction of the test object is defined as I ₀ , the intensity I of the light at an angle θ can be specified using the angle θ formed with the normal as in the following Equation 2.

[Formula 2]

I = I ₀ × cosθ

Therefore, using the light distribution information as described above, in the present invention, the first measurement value can be corrected based on the angle between the first optical path section and the second optical path section. For example, when the second measuring machine is arranged in the normal direction of the test object, and the first measuring machine forms an angle θ with the normal direction, if there is light distribution information according to the field of view angle of the test object, it can be used. The magnitude of the first measurement value is corrected by reflecting the difference in light intensity based on the difference in the viewing angle. For example, in the above example, if the light distribution information of the light having an angle θ of 10 ° to the normal line having 90% less light intensity than the light in the normal direction is collected and stored in advance, the In a manner in which the size is in accordance with the reference of the second measuring machine in the normal direction, the first measured value is multiplied by 10/9 to generate a corrected first measured value. In this way, in order to use the light distribution information collected in advance for the detection body, the correction mechanism may store it in a storage device such as a memory. In addition, if there is no light distribution information collected in advance, the size of the first measurement value can also be modified based on the above-mentioned Lambert cosine theorem. At this time, the light distribution information based on the Lambert cosine theorem can also be stored in the correction mechanism. The above-mentioned correction of the magnitude of the first measurement value may be performed by integrating the correction and / or conversion process of the second measurement value.

The above-mentioned correction will be explained again with reference to FIG. 5, which is different from the light distribution characteristic 4 of an ideal test body that is not affected by the viewing angle or the light distribution characteristic 6 of a test body based on the Lambert cosine theorem. The actual light distribution of the test body The characteristic may have a distribution such as 5. In the present invention, the first measurement value measured to be incident on the first measuring machine along the first optical path section 8 is corrected as if the light is traveling along the second optical path section 9, and the actuality of the sample can be collected in advance. The light distribution characteristic 5 is stored as the light distribution information, and the size of the first measurement value is corrected by using this.

In the present invention, the second measurement value may be corrected and / or converted based on the first measurement value corrected as described above. However, since the angle between the first light path section and the second light path section is small, the difference in the intensity of light due to the angle difference may not be large, so the use of the above-mentioned light distribution information may be omitted as needed. The correction of the first measurement value is based on the correction and / or conversion of the second measurement value directly based on the first measurement value generated by the first measurement machine.

Hereinafter, the conversion of the first measurement value based on the corrected or uncorrected and / or the correction of the second measurement value will be described in more detail. In addition, for convenience of explanation, the first measurement value that has been corrected by using the above-mentioned light distribution information is also simply referred to as a first measurement value.

The correction mechanism of the present invention may use the first measurement value and the second measurement value obtained in the common measurement area to set a coefficient of a transformation function and / or a correction function to be applied to the second measurement value in the second measurement area.

First, when the color space of the first measurement value is different from the color space of the second measurement value, a conversion function for converting the second measurement value into the color space of the first measurement value may exist. For example, there may be a transformation having a specific size matrix. In addition, there may be a correction function for correcting the accuracy of the second measurement value. For example, there may be a correction matrix having a specific size. Here, the color space conversion and correction may be performed sequentially, but the color space conversion function and the correctness correction function may be integrated to perform the conversion and correction together, or they may be collectively referred to as conversion.

For example, the correction mechanism of the present invention may use a generally known color space conversion function or a color space conversion function obtained by using a pre-learning method known to optimize the characteristics of the detection body to transform the common measurement area. Color space of the second measurement. Furthermore, the coefficient of the correction function can be obtained between the second measured value and the first measured value in which the color space of the common measurement area is transformed. As a method of obtaining the coefficient of the correction function, a variety of well-known methods such as a least square method used to estimate an optimal function parameter using samples of the input value and output value of the function can be used. For example, when the first measurement value is the tri-excitation value XYZ and the second measurement value is the RGB data, a mapping of the tri-excitation value can be generated in the color space of the tri-excitation value by converting the RGB data with the resolution in the common measurement area to the tri-excitation value. Then, the value of the tristimulus value measured in the common measurement area is used to modify the mapping of the tristimulus value generated above.

Or, as described above, when the conversion and the correction are performed together, the coefficient of the conversion function that is performed by integrating the color space conversion of the second measurement value and the accuracy correction can be obtained. In this case, the second measurement value and the first measurement value of the common measurement area can be used to directly obtain the coefficients of the transformation function. Here, a well-known coefficient estimation method can also be used. For example, if the first measurement value is a tristimulus value XYZ and the second measurement value is RGB data, it may be between the value of the tristimulus value measured in the common measurement area and the RGB data with the resolution in the common measurement area. Obtain the best transformation coefficient or transformation matrix for transforming the RGB data into the measured tristimulus value. At this time, for example, a well-known closed loop process can be used to estimate and obtain the transform coefficient.

On the other hand, if the color space of the first measurement value is the same as that of the second measurement value, no color space conversion is required, and only the correction can be considered. Therefore, the coefficient of the correction function between the first measurement value and the second measurement value in the common measurement area can be obtained by using the above-mentioned method of estimating and obtaining the coefficient.

If the coefficient of the conversion function and / or the correction function is determined as described above, the correction mechanism may apply the determined coefficient to the second measurement value in the second measurement area, and convert and / or correct the second measurement value. Therefore, in the first measurement area where the first measurement value is measured by the more accurate first measurement machine and the second measurement area other than the common measurement area, the second measurement value is also converted and / or corrected to obtain more accurate results. Correct measurement. That is, since the common measurement area is an area for obtaining either the first measurement value with relatively high measurement accuracy and the second measurement value with low measurement accuracy, the first measurement value obtained in the common measurement area can be used. The first and second measurement values are obtained by converting and / or correcting coefficients as described above, and are performed by applying the conversion and / or correction coefficients obtained as described above to the second measurement values having a spatial resolution in the second measurement area. Transform and / or modify to obtain more accurate measurements with spatial resolution.

In the present invention, the method of using the first measurement value conversion and / or correction of the second measurement value is not limited to the above-mentioned method. In addition, other methods such as the present invention can also be applied to methods having different degrees of accuracy. In the composite system of the 1st measuring machine and the 2nd measuring machine, various known methods are used to convert and / or correct the 2nd measured value with spatial resolution based on a more accurate 1st measured value.

In one embodiment of the present invention, the light measuring device may include a plurality of second measuring machines. At this time, the second measurement area of the plurality of second measuring machines has at least a part of the overlapping area, and the common measurement area of the first and second measurement areas may be located in the overlapping area. 6 (a) and FIG. 6 (b), in the above embodiment, the plurality of second measuring machines divide the imaging object 3, but a part of the second measuring area 2 captured by each of the second measuring machines overlaps, The first measurement area 1 of the first measuring machine is located in a part of the repeated area, and the common measurement area 1 is located in the repeated area. In this case, the first measurement value can be similarly applied to any one of the second measurement values of the second measurement machine that captures the repeated area, and can be corrected and / or converted. Therefore, in the above-mentioned embodiment, since a wider area of the detection body can be measured and a larger resolution can be measured, there is a beneficial effect that the measurement space resolution is improved. In addition, since the second measurement values of the plurality of second measuring machines are corrected and / or converted based on the common first measurement values obtained in the overlapping area, the second measurement value can be corrected or converted uniformly throughout the entire sample. Beneficial effects of measured values.

In one embodiment of the present invention, the light measuring device may include a plurality of second measuring machines and a plurality of first measuring machines. At this time, the second measurement area of the plurality of second measuring machines has at least a part of the overlapping area, and the common measurement area of the first and second measurement areas may be located in the overlapping area. In addition, the first measurement area of the plurality of first measuring machines may have at least two or more of the common measurement areas in the overlapping area. Description is made with reference to FIG. 7. In the above-mentioned embodiment, among the repeated areas of the second measurement area 2 photographed by each second measuring machine, a plurality of first measuring machines are used to set mutually different areas as the first measuring area 1. And the photometry is performed, and the second measurement value of the second measurement machine that photographs the area measured by the first measurement machine can be corrected and / or converted by applying the first measurement value measured by each first measurement machine. In this case, since the first measurement area can be set regionally and the first measurement value in each area can be measured compared with the case where one first measuring machine is used, and correction and / or conversion is performed using this, This is a beneficial effect of further improving the correction and / or conversion accuracy of the second measurement value.

In an embodiment of the present invention, as in the example of FIG. 8, the second optical path section of any one of the plurality of second measuring machines 200a and the second light of the other second measuring machine 200b. The path interval can be set in a manner different from the angle of the light emitting surface or the light reflecting surface of the detection body. Thereby, in the above-mentioned embodiment, it is possible to simultaneously measure the detection bodies at different viewing angles. In the example of FIG. 8, the second measuring machine 200 a can obtain a second measurement value on the front side of the test object, and the second measuring machine 200 b can obtain a second measurement value on the side of the test object. These second measurement values can be The first measurement value obtained by the first measurement machine 100 is used for conversion and / or correction according to the method described above. In the prior art, there is a problem that since a camera and a spectrocolorimeter are used, in order to measure a test body at various viewing angles in an inspection process, it is necessary to perform a plurality of changes while changing the viewing angle. Metering to correct tristimulus values. However, in the above-mentioned embodiment, since the plurality of second measuring machines are arranged at a plurality of angles and taken at the same time, and the first measurement values obtained by the common first measuring machine are used to correct and / or convert them, it is possible to simultaneously Advantageous effect of correcting and / or changing the second measurement value of various viewing angles.

In the light measuring device of the present invention, in order to perform the above-mentioned functions, the above-mentioned correction or control, as shown in FIG. 9, it includes at least one electronic circuit or processor 300 and at least one arithmetic circuit of a memory 400. The light measuring device of the present invention can be integrated or operated in conjunction. Here, it goes without saying that in addition to the electronic circuit or the processor 300 and the memory 400, the arithmetic circuit may include a well-known input / output device and a storage device. Here, the processor is not only a general-purpose processor of a CPU or a DSP, but also an ASIC or FPGA designed to perform the above-mentioned functions, and may be equivalent to at least one of a logic circuit or the like. Any combination of these can be realized, and it can also be realized by any other combination of hardware, software, firmware, or the like. In addition, an electronic circuit or processor for performing the above-mentioned correction or control function of the optical measuring device of the present invention may exist separately from the first and second measuring machines as shown in FIG. 9, but may also be integrated with the first and second measuring machines as required. An electronic circuit or processor included in the 1 measuring machine or the 2 measuring machine.

Hereinafter, a method for measuring light received from a sample in a light measuring device will be described. Here, the method of measuring the light of the present invention can be performed in the same manner as the operation of the light measuring device of the present invention described in detail above.

The method of measuring the light of the present invention includes, as shown in FIG. 10, a step (S100) of generating a first measurement value by a first measuring machine, a step (S200) of generating a second measurement value by a second measuring machine, and a method based on the first The measurement value is subjected to a correction step (S300) of at least one of conversion and correction of the second measurement value. The step of generating the first measurement value (S100) uses the first measuring machine to receive the first light from the first measurement area of the test object, and generates at least one first measurement value from the received first light. The step (S200) of generating a second measurement value receives the second light from the second measurement area of the test object by the second measuring machine, and generates a set of second measurement values with a specific spatial resolution from the received second light. . The correction step (S300) performs at least one of conversion and correction of the second measurement value based on the first measurement value. Here, at least one of correction and conversion may be performed based on the angle between the first optical path section and the second optical path section. Here, the step of generating the first measurement value and the step of generating the second measurement value may be performed first in either step, or may be performed in two steps simultaneously.

Here, the first measuring machine and the second measuring machine are arranged in such a manner that the first measuring area and the second measuring area have a common measuring area in which at least a portion is repeated, and the light of the first light to the first measuring machine The first optical path section extended from one point in the common measurement area in the path and the second optical path section extended from the above point in the second light path to the second measuring machine will not overlap each other and will be greater than 0.角 forms an angle in the range of less than 180 ﾟ. At this time, the light incident on the above-mentioned light measuring device can be incident on the first measuring machine and the second measuring machine without passing through a light branching mechanism that divides the light into a plurality and makes them point in different directions.

The method of measuring light of the present invention may further include a step of changing an angle between the first light path section and the second light path section based on a distance between the light measuring device and the detection body. At this time, at least one of the position of the first measuring machine, the optical axis and the optical system setting, and the position of the second measuring machine, the optical axis and the optical system setting can be changed to change the first optical path section and the second optical path section. Angle between. Here, the setting of the optical system may be a well-known set value such as a focal distance or an exposure value of the optical system constituting the measuring machine.

In an embodiment of the present invention, when the light measuring device includes a plurality of second measuring machines, the second measuring area of the plurality of second measuring machines has at least a part of the overlapping area, and the common measuring area is located in the overlapping area. In a state within the range, the first measurement device can generate a first measurement value, and the second measurement device can generate a second measurement value.

In an embodiment of the present invention, when the light measuring device includes a plurality of first measuring machines, at least two or more of the above-mentioned common measurements are included in the first measuring area of the plurality of first measuring machines in the repeated area. In the state of the area, the first measurement device can generate a first measurement value, and the second measurement device can generate a second measurement value.

In one embodiment of the present invention, the second light path section of any second measuring machine among the plurality of second measuring machines and the second light path section of other second measuring machines and the light emitting surface or light of the detection body When the angles of the reflecting surfaces are different from each other, the first measurement device can generate a first measurement value, and the second measurement device can generate a second measurement value.

The optical measurement system of the present invention will be described below. Omitting a part of the repeated description, the light measurement system of the present invention can operate in the same manner as the light measurement device described in detail above.

The optical measuring system of the present invention includes a first measuring machine, a second measuring machine, and a correction circuit. The first measuring machine receives the first light from the first measurement area of the test object, and generates at least one first measurement value from the received first light. The second measuring machine receives the second light from the second measurement area of the sample, and generates a set of second measurement values having a specific spatial resolution from the received second light. The correction circuit performs at least one of conversion and correction of the second measurement value based on the first measurement value. The first measuring machine and the second measuring machine are arranged in such a manner that the first measuring area and the second measuring area have a common measuring area that is at least partially repeated, and the light path to the first light of the first measuring machine is The first light path interval extended at one point in the common measurement area and the second light path interval extended from the one point in the second light path to the second measuring machine will not overlap each other and will be greater than 0 and less than Angles are formed within a range of 180 °. Here, the light incident on the light measuring system can be incident on the first measuring machine and the second measuring machine without passing through a light diverging mechanism that divides the light into a plurality and directs them in different directions.

The optical measurement system of the present invention may include the above-mentioned first measuring machine, second measuring machine, and at least one processor. The processor may be configured to perform at least one of conversion and correction of the second measurement value based on the first measurement value. Here, at least one of conversion and correction of the second measurement value may be performed based on an angle between the first optical path section and the second optical path section. The optical measurement system may change an angle between the first optical path section and the second optical path section based on the distance between the optical measuring device and the detection body.

In one embodiment, the optical measurement system includes a plurality of second measurement machines, and the second measurement area of the plurality of second measurement machines has at least a part of the repeated area, and the common measurement area may be located in the repeated area. In one embodiment, the optical measurement system includes a plurality of first measurement machines, and the first measurement area of the plurality of first measurement machines may have at least two or more of the common measurement areas in the repeated area. In an embodiment, the angle between the second light path section of any second measuring machine of the plurality of second measuring machines and the second light path section of the other second measuring machines and the light emitting surface or light reflecting surface of the detection body Can be different from each other.

The light measurement device, light measurement system, and light measurement method of the present invention can be used in the display field to evaluate light characteristics of OLED, LCD, and PDP flat panel displays, evaluation of high-resolution displays, and gamma, uniformity, Inspection of moire and viewing angle characteristics. In the field of lighting, it can also be used to evaluate the light characteristics of flat panel lighting, and to evaluate the uniformity and moire.

The method disclosed in this specification or the sequence of actions described in the manufacturing process will be described as an example. Therefore, the order of the steps can be adjusted within the idea of the present invention as needed. In addition, the devices and systems disclosed in this specification may include a mechanism that can perform the functions described in this specification, and may also be implemented as an independent device or system as needed, or in the form of linkage or integration with other systems.

The techniques described in this specification may be implemented at least in part by hardware, software, firmware, or any combination thereof. For example, they may be implemented by more than one processor, DSP, ASIC, FPGA, or equivalent logic circuit, or any combination of at least one of them. The hardware, software, and firmware described above can be implemented in one or more systems or components used to support the actions and functions disclosed in this manual, or they can be implemented in conjunction with or integrated with other systems or components. . In addition, the elements described in this specification are individual, but may be implemented together or individually with logic elements that can be applied to each other. The functions and actions that are described separately in this manual are only as described above in order to emphasize their respective functions. If the above functions are not necessarily implemented by separate hardware, firmware, or software components, they can also be integrated. A combination of common and individual hardware and / or software.

In addition, the technology described in this specification can also be implemented or saved by a computer-readable storage medium containing commands. Moreover, commands stored in computer-readable media can be associated with the commands and actions by the processor. Computer-readable storage media may also include RAM, ROM, PROM, EPROM, EEPROM, flash memory, hard disk, CD-ROM, magnetic media, optical media, or other storage media.

1‧‧‧1st measurement area / common measurement area

2‧‧‧ 2nd measurement area

3‧‧‧ test body

4‧‧‧ light distribution characteristics

5‧‧‧ light distribution characteristics

6‧‧‧ light distribution characteristics

8‧‧‧ 1st light path interval

10‧‧‧Spectral colorimeter / measurement machine

20‧‧‧RGB Camera / Measuring Machine

30‧‧‧ Beamsplitters / Optic Branch

100‧‧‧The first measuring machine

101a‧‧‧ Beamsplitter

101b‧‧‧optical filter

102a‧‧‧ Detector

102b‧‧‧ Detector

103a‧‧‧Processor

103b‧‧‧Processor

200‧‧‧ 2nd measuring machine

200a‧‧‧ 2nd measuring machine

200b‧‧‧ 2nd measuring machine

300‧‧‧ processor

400‧‧‧Memory

Figure 1 is a diagram showing a previous light measurement system. Fig. 2 is a block diagram of a first measuring machine and a second measuring machine according to the present invention. FIG. 3 is a diagram showing a first measurement area, a second measurement area, and a common measurement area for a sample. FIG. 4 is a diagram showing a light measuring device and system according to an embodiment of the present invention. FIG. 5 is a reference diagram for explaining a modification of the present invention. 6 and 7 are diagrams showing settings of a first measurement area, a second measurement area, and a common measurement area of a sample according to an embodiment of the present invention. FIG. 8 is a diagram showing a light measuring device and system according to an embodiment of the present invention. FIG. 9 is a block diagram of a light measuring device and system according to an embodiment of the present invention. FIG. 10 is a flowchart of a light measurement method according to an embodiment of the present invention.

Claims (10)

An optical measurement device, comprising: a first measurement mechanism that receives a first light from a first measurement area of a test object, and generates at least one first measurement value from the received first light; a second measurement mechanism Receiving a second light from the second measurement area of the specimen, and generating a set of second measurement values with a specific spatial resolution from the received second light; and a correction mechanism based on the first measurement value At least one of the second measurement value conversion and correction; and the first measurement mechanism and the second measurement mechanism are configured in the following manner, that is, the first measurement area and the second measurement area have at least A partially repeated common measurement area; and a first optical path section extended from one of the points in the common measurement area among the first light path to the first measurement mechanism, and the first measurement path to the second measurement mechanism. In the light path of the two light, the second light path sections extended from the above-mentioned point do not overlap each other, but form an angle in a range of greater than 0 ﾟ less than 180 ﾟ. The light measuring device according to claim 1, wherein the second measurement mechanism generates the second measurement value for all the areas in the second measurement area. For example, the optical measurement device of claim 1 further includes a control mechanism that changes the position of the first measurement mechanism by changing the angle between the first optical path interval and the second optical path interval. At least one of the setting of the optical axis and the optical system, the position of the second measurement mechanism, and the setting of the optical axis and the optical system. For example, the optical measuring device according to claim 1, wherein the correction mechanism performs at least one of conversion and correction of the second measurement value based on an angle between the first optical path section and the second optical path section. For example, the light measuring device according to claim 1, wherein the light incident on the light measuring device is incident on the first measuring machine and the light measuring device without splitting the light into a plurality of light and directing them to point in mutually different directions. The second measurement mechanism. For example, the light measurement device of claim 1, wherein the light measurement device includes a plurality of the second measurement mechanisms; and the second measurement area of the plurality of second measurement mechanisms has at least a part of a region that overlaps, and the common measurement area is located at Within the repeating area. For example, the light measurement device of claim 6, wherein the light measurement device includes a plurality of the first measurement mechanisms; and the first measurement area of the plurality of first measurement mechanisms has at least two or more of the repeating areas. Common measurement area. The light measuring device according to claim 1, wherein the first measurement mechanism is any one of a spectrophotometer, a spectrophotometer, a spectroradiometer, a photoelectric photometer, a photoelectric colorimeter, and a photoelectric radiometer; 2 The measuring mechanism is any one of a camera having a spatial resolution, an image photometer, and an image colorimeter. A method for measuring light received from a test object, which measures a light received from a test object in a light measuring device, and is characterized by comprising: receiving a first light from a first measurement area of the test object by a first measuring machine; And a step of generating at least one first measurement value from the received first light; receiving a second light from the second measurement area of the subject with a second measuring machine, and generating the second light from the received second light with a specific A step of assembling the second measurement value of the spatial resolution; and a correction step of performing at least one of conversion and correction of the second measurement value based on the first measurement value; and the first measurement machine and the first measurement value 2 The measuring machine is configured in such a manner that the first measuring area and the second measuring area have a common measuring area in which at least a part of the measurement area overlaps; The first optical path section extended at one point in the measurement area and the second optical path section extended from the one point in the second light path to the second measuring machine do not overlap each other, An angle in a range greater than 0 ゚ ゚ of less than 180. An optical measurement system, comprising: a first measuring machine that receives a first light from a first measurement area of a sample, and generates at least one first measurement value from the received first light; a second measurement machine; Receiving a second light from the second measurement area of the test object, and generating a set of second measurement values with a specific spatial resolution from the received second light; and a correction circuit based on the first measurement value To perform at least one of the conversion and correction of the second measurement value; and the first measurement machine and the second measurement machine are arranged in the following manner, that is, the first measurement area and the second measurement area have at least A part of the common measurement area that is partially repeated; and a first optical path section extended from one of the points in the common measurement area of the first light path to the first measurement machine, and the first path to the second measurement machine In the light path of the two light, the second light path sections extended from the above-mentioned point do not overlap each other, but form an angle in a range of greater than 0 ﾟ less than 180 ﾟ.