TW201915225A - Electroplating solution processing device and electroplating solution processing method applying the same including a filtering step, a first emptying step, a backwashing step and a second emptying step - Google Patents

Abstract

This invention provides an electroplating solution processing device and an electroplating solution processing method applying the same. The electroplating solution processing device includes: an operation unit including an operation assembly receiving an operation instruction; and a filtering unit electrically connected to the operation unit, wherein the filtering unit is composed of a filtering main body assembly, a filtering pump assembly, an emptying pump assembly, a blower assembly, a backwashing pump assembly, and a fluid communication tube system communicating these assemblies. The electroplating solution processing method applying the electroplating solution processing device of this invention includes: a filtering step, a first emptying step, a backwashing step and a second emptying step.

Description

 Electroplating liquid processing equipment and electroplating liquid processing method using same  

The present invention relates to a chemical liquid processing apparatus and a chemical liquid processing method using the same; more specifically, it is an electroplating liquid processing apparatus and an electroplating liquid processing method using the same.

At present, the filtering method of the electroplating liquid in the market is mainly to use the filter element and the filter bag as the filter material, so the filtering method is easy to cause blockage, resulting in poor filtering effect, and the filter material must be manually taken out after cleaning, after repeated use It must also be discarded, which not only wastes manpower, but also causes loss of filter materials and waste of resources.

Moreover, when the filter material replaced by the manual is taken out or cleaned, the filter material contains a large amount of impurities of the plating solution, and is infiltrated in the plating solution for a long time, whether it is an impurity in the plating solution or the plating solution. All are chemical agents, and this replacement process is also prone to work safety problems, resulting in permanent injury or death of the staff.

Therefore, in order to solve the above-mentioned drawbacks, it is necessary to provide an electroplating solution processing apparatus which can automatically clean the filter material through an operating element to solve the aforementioned problems.

The problem to be solved by the present invention is to improve the problem of "safety and manpower required for manual replacement of filter materials for electroplating liquids" by using "electroplating solution processing equipment capable of automatically cleaning the filter material after combining the operation units". .

In order to solve the above problems, the present invention discloses an electroplating solution processing apparatus, the structure comprising: an operation unit including an operation element receiving an operation instruction; and a filter unit electrically connected to the operation unit, the filter unit being a filter body element, a filter pump element, an empty pump element, a blower element, a backwash pump element, and a fluid communication tube system connecting the elements, the filter body element is always vertical a cylindrical container, each of which is provided with a flow port on the upper and lower sides and is connected to the fluid communication pipe system. The inner space of the cylindrical container is arranged in an upright manner with a plurality of longitudinally stretched and compressed long beam filter materials. a unit, the filtered pump element enters the fluid communication tube system via the first fluid communication tube for driving the first solution of the plating solution introduced from the plating solution tank into the fluid communication tube system to communicate above the filter body member The mouth enters the filter body element for filtration from top to bottom, and then the electroplating solution is filtered and discharged through the second flow port. Electroplating solution tank, the evacuation pumping element drives a residual electroplating solution in the filter body element via a second fluid communication tube to discharge the filtering through a fluid communication tube system connected to the second flow port below the filter body element a body member, the blower member and the backwash pump member respectively enter a fluid communication tube system via a third fluid communication tube and a fourth fluid communication tube for driving a cleaning fluid (including cleaning liquid and gas) through the filter body a second flow port below the component enters the filter body element for bottom-up cleaning, and then discharges the filter body element from the upper first flow port, and then passes through the evacuation pump element through a second fluid communication tube The cleaning fluid (including the cleaning liquid and the gas) that drives the interior of the filter body member is discharged from the fluid communication tube system connected by the lower second flow port to discharge the filter body member.

In an embodiment, a tripod base is further included for placing the operating unit and the filtering unit.

In an embodiment, the operating unit is electrically connected to the filter pumping element, the venting pumping component, the blower component and the backwashing pumping component, and controls the filtering pumping component by using an automatic control system. The pumping element is emptied, the blower element, and the backwash pump element are actuated.

In one embodiment, the fluid communication tube system is provided with one or more automatic valves at the first flow port, the second flow port, and the first to fourth fluid communication tubes.

In the above embodiment, the operating unit is electrically connected to the automatic valves, and the automatic control system is used to control the opening and closing of the automatic valves.

In an embodiment, the operating element is a push switch or a touch screen.

In an embodiment, the operating unit can be connected to the remote control module for monitoring and operation by the remote end.

In one embodiment, the cylindrical container for filtering the main body member is divided into an upper cover structure, a cylindrical structure and a lower cover structure, wherein the upper cover structure and the cylindrical structure are assembled by flange fixing. The lower cover structure and the tubular structure are combined and assembled by flange fixing.

In one embodiment, the long bundle filter media filtering unit is made of polypropylene (PP) material or other filter material with good chemical resistance.

An electroplating solution processing method using the processing device as described above, the steps comprising: 1. a filtering step: driving the electroplating solution to be filtered by the filter pumping element through the fluid communication pipe system from the first flow port Filtering the main body component to cause the electroplating solution containing the impurities to pass through the long bundle filter media unit to compress and filter the adsorbed impurities by using a long beam filter unit that is longitudinally stretched and compressed. The driving of the pumping element naturally discharges the electroplating liquid through the second flow port below; 2. an emptying step: driving the electroplating liquid remaining inside the filtering main element through the second circulation by driving the pumping element The port completely discharges the filter body member to the empty state; 3. a backwashing step: driving the cleaning liquid in the fluid communication tube system with the backwash pumping element, and introducing the gas generated by the blower element, the cleaning liquid and the gas passing through The fluid communication tube system enters the filter body element from the second flow port, and the longitudinally stretched and compressed longitudinal beam filter unit is stretched from bottom to top. Excluding the adsorbed impurities from the long bundle filter media filtering unit, and driving the cleaning liquid and the gas through the first flow port above by the driving of the backwashing pumping element; and 4. an emptying two steps: The driving of the emptied pumping element completely discharges the cleaning liquid and the gas remaining inside the filtering body member from the second flow port to the emptied state.

The main feature of the present invention is that the control unit is controlled by the automatic control system by the setting and combination of the operation unit, so that the filter material for filtering the plating solution can be fully cleaned without manual work.

Therefore, the present invention can perform the operation of replacing the chemical filter material with high risk without manual operation, and can perform the filtering of the plating solution and the automatic cleaning of the filter material through the setting of the automatic control system; The filter system retains the electroplating solution at a high level after effective filtration to prevent the loss of the plating solution, and the part of the cleaning fluid (such as the amount of washing water) can be effectively saved. Meanwhile, the long beam filter used in the present invention and The related structure allows the filter bed to be fixed, thus achieving long-term use.

The present invention will be further described in conjunction with the drawings and specific embodiments, so that those skilled in the art can understand the invention and practice.

1‧‧‧Electroplating solution processing equipment

11‧‧‧Operating unit

111‧‧‧Operating components

112‧‧‧Automatic valve

12‧‧‧Filter unit

121‧‧‧Filter body components

1211‧‧‧ first circulation

1212‧‧‧second circulation

12121‧‧‧Return pipe

1213‧‧‧Long bundle filter unit

1214‧‧‧Overlay structure

1215‧‧‧Cylinder structure

1216‧‧‧Under cover structure

122‧‧‧Filter pump components

123‧‧‧Draining pump components

1231‧‧‧Draining fluid pipe

124‧‧‧Blower components

125‧‧‧Backwash pump components

126‧‧‧Fluid communication pipe system

1261‧‧‧First fluid communication tube

1262‧‧‧Second fluid communication tube

1263‧‧‧ Third fluid communication tube

1264‧‧‧fourth fluid communication tube

2‧‧‧foot base

S1‧‧‧Electroplating solution treatment method

S10‧‧‧Filter step

S20‧‧‧emption one step

S30‧‧‧Backwashing step

S40‧‧‧ emptying two steps

1A is a perspective view showing the structure of an electroplating solution processing apparatus according to the present invention; FIG. 1B is a plan view showing the structure of the electroplating solution processing apparatus of the present invention; FIG. 2 is a schematic view showing the operation of the filter body member according to the present invention; FIG. 3B is a schematic view showing fluid flow when the pumping pumping element operates in accordance with the present invention; FIG. 3C is a schematic view showing fluid flow during operation of the backwashing pumping component of the present invention; 3D is a schematic view showing the fluid flow of the backwashing pump element and the blower element simultaneously operating according to the present invention; FIG. 4 is a method for treating the plating solution according to the present invention.

First, referring to FIG. 1A and FIG. 1B, FIG. 1A is a schematic perspective view of the electroplating solution processing apparatus 1 , and FIG. 1B is a top view showing the structure of the electroplating solution processing apparatus 1 . The liquid chemical processing apparatus 1 is configured to include an operation unit 11 including an operation element 111 that receives an operation command, and a filter unit 12 electrically connected to the operation unit 11, the filter unit 12 being configured by a filter body element 121. a filter pump element 122, an empty pump element 123, a blower element 124, a backwash pump element 125, and a fluid communication tube system 126 that communicates with each of the elements, the filter body element 121 being erected a cylindrical container, the filter body member 121 is provided with a flow port (the upper first flow port 1211 and the lower second flow port 1212 respectively) and is connected to the fluid communication pipe system 126. The inner space of the shaped container is provided in an upright manner with a plurality of longitudinally stretchable long bundle filter media filtering units 1213 (shown in FIG. 2), the filtered pumping element 122 passing through the first fluid communication tube 1261 The fluid communication tube system 126 is configured to drive the plating solution introduced from the plating solution tank in the fluid communication tube system 126 to communicate with the first flow port 1211 of the filter body member 121 to enter the filter body member 121. Filtration from top to bottom, and then connecting the fluid communication tube system 126 through the second flow port 1212 to discharge the filtered electroplating solution (transferred back to the electroplating solution tank through a return tube 12121), and then draining the pumping element 123 a second fluid communication tube 1262 drives the residual plating solution in the filter body member 121 to pass through the second flow port 1212 of the filter body member 121 to discharge the filter body member 121 via the evacuation fluid pipe 1231. The blower member 124 and The backwashing pumping elements 125 are each passed through a third fluid communication tube 1263 and a fourth fluid communication tube 1264 into the fluid communication tube system for driving the cleaning fluid (including the cleaning liquid and the gas) through the filtering body member 121. The second flow port 1212 enters the filter body member 121 via the fluid communication pipe system 126 for bottom-up cleaning, and then the filter body member 121 is discharged from the upper first flow port 1211. The venting pumping element 123 is further driven by a second fluid communication tube 1262 to drive the cleaning fluid (including the cleaning liquid and the gas) remaining inside the filtering body member 121 to be discharged by the fluid communication tube system connected by the lower second flow port 1212. The filter body member 121 is filtered.

In the same embodiment, a tripod base 2 is further included for arranging the operating unit 11 and the filtering unit 12.

In the same embodiment, the operating unit 11 is electrically connected to the filtered pumping element 122, the evacuated pumping element 123, the blower element 124 and the backwashing pumping element 125, and is controlled by an automated control system. The pumping element 122, the evacuation pumping element 123, the blower element 124, and the backwash pumping element 125 actuate.

In the same embodiment, the fluid communication tube system 126 is connected to the first flow port 1211, the second flow port 1212, and the first fluid communication tube 1261, the second fluid communication tube 1262, and the third fluid communication tube 1263. One or more automatic valves 112 are provided at each of the fourth fluid communication tubes 1264.

In the same embodiment, the operating unit 11 is electrically connected to the automatic valves 112, and the automatic control system is used to control the opening and closing of the automatic valves 112.

In an embodiment, the operating element 111 is a push switch or a touch screen.

In an embodiment, the operating unit 11 can be connected to the remote control module for monitoring and operation by the remote end.

In one embodiment, the cylindrical container of the filter body member 121 is divided into an upper cover structure 1214, a cylindrical structure 1215 and a lower cover structure 1216, wherein the upper cover structure 1214 and the cylindrical structure 1215 are flanged. The combination of the lower cover structure 1216 and the tubular structure 1215 is assembled by flange fixing.

Please refer to FIG. 2 for the operation of the filter body member 121. FIG. 2 is a schematic view showing the operation of the filter body member according to the present invention. As shown in FIG. 2, the cylindrical container of the filter body member 121 is divided into an upper cover structure 1214, a cylindrical structure 1215 and a lower cover structure 1216, wherein the upper cover structure 1214 and the cylindrical structure 1215 are flange-fixed. The combination of the lower cover structure 1216 and the tubular structure 1215 is flange-fixed; the filter body member 121 is provided with a flow port on the upper and lower sides (the upper first flow port 1211 and the lower one) The two flow ports 1212) are each connected to the fluid communication pipe system 126 (the upper first flow port 1211 and the lower second flow port 1212 are connected to the fluid communication pipe system 126 and the automatic valve 112 can be set as needed). The inner space of the shaped container is provided in an upright manner with a plurality of longitudinally stretchable, long bundle filter media filtering units 1213.

In one embodiment, the long bundle filter media filtering unit 1213 is made of polypropylene (PP) material, and the long beam filter material made of PP material has high chemical resistance and adopts a fixed filter bed in structure. The design prevents the loss of the filter unit during the filtration process, thus achieving the effect of long-term use, thereby eliminating the need for regular replacement costs and achieving cost-effective effects.

The long bundle filter unit 1213 is made of polypropylene (PP) material with a longitudinally stretchable compression structure or other filter material with good chemical resistance. When the plating solution to be filtered is introduced from the plating solution tank, When the upper first flow port 1211 flows into the filter body member 121, the long beam filter unit 1213 is compressed by the natural gravity downward of the water flow, and the impurities in the plating solution are intercepted through the long beam filter unit. The electroplating solution that has no impurities after filtration can flow out of the filter body member 121 through the second flow port 1212 below and flow back to the plating solution tank through the return pipe 12121 to continue plating.

The electroplating solution processing method of the electroplating solution processing apparatus described above comprises the following steps: 1. A filtering step as shown in FIG. 3A: driving the electroplating solution to be filtered by the filter pumping element 122 through the fluid communication tube The system 126 enters a filter body member 121 from the upper first flow port 1211, so that the plating solution containing the impurities compresses the long bundle with the water flow from top to bottom when passing through the long beam filter unit that can be longitudinally stretched and compressed. The filter material filtering unit intercepts the adsorbed impurities and drives the pumping liquid 122 to the electroplating solution through the lower flow port 12121 via the lower second flow port 1212. (In an embodiment, the filtering The pumping element 122 flows into the fluid communication tube system 126 via a first fluid communication tube 1261 provided with an automatic valve 112 as shown in the figure; 2. an emptying step as shown in FIG. 3B: an emptying pump The driving of the pumping element 123 completely discharges the residual electroplating solution inside the filtering body member 121 through the lower second fluid communication port 1262 to the second fluid communication tube 1262 via the evacuation fluid passage tube 1231 to the filter body member 121 to In the empty state, in this step, the filtering system can still highly retain the plating solution after effectively filtering the plating solution, thereby preventing the loss of the plating solution, and the plating solution has a special drug property, so the price is high, and the invention is high in price. The filtering of the device can effectively prevent the loss of the plating solution and achieve the cost-saving effect; 3. a step of introducing the cleaning liquid as shown in FIG. 3C or a backwashing step of simultaneously introducing the cleaning liquid and the gas as shown in FIG. 3D: The wash pump element 125 and the blower element 124 drive the cleaning liquid and the gas in the fluid communication tube system 126, and the cleaning liquid and the gas enter the filter body element 121 from the lower second flow port 1212 via the fluid communication tube system 126, The longitudinally stretch-compressed long bundle filter unit 1213 (shown in FIG. 2) is stretched from bottom to top, and the adsorbed impurities intercepted by the long bundle filter unit 1213 are taken out and backwashed by the pump. The driving of the element 125 naturally discharges the cleaning liquid and the gas through the first first flow port 1211 (in an embodiment, the blower element 124 and the backwash pump element 125 are as shown in the figure As shown, the third fluid communication tube 1263 and the fourth fluid communication tube 1264 provided with the automatic valve 112 flow into the fluid communication tube system 126). In this step, the cleaning liquid and the cleaning gas work together, thereby being effective. Control the flow rate of the cleaning liquid (such as the amount of washing water), thereby reducing the effect of cleaning the waste liquid; and 4. The emptying of the liquid or the emptying of the cleaning liquid and the gas at the same time as shown in Fig. 3B: The driving of the evacuation pumping element 123 completely discharges the cleaning liquid and the gas remaining in the filtering body member 121 from the lower second flow port 1212 to the filtering body member 121 to the empty state.

That is, the application method of the present invention is an electroplating solution processing method S1 of the backwashing process in which the cleaning liquid and the gas are introduced from the bottom up, after the electroplating solution is filtered from the top to the bottom, as shown in the flow chart of FIG. Shown.

4 is the electroplating solution processing method of the present invention, that is, the electroplating solution processing method S1, the steps of which include: 1. a filtering step S10: the electroplating solution to be filtered is fluidly connected to the driving of the filtering pump element. The tube system enters a filter body element from the first flow port, so that the electroplating solution containing the impurities compresses the long beam filter unit by the water flow from top to bottom when passing through the long bundle filter unit that can be longitudinally stretched and compressed Intercepting the adsorbed impurities, and driving the pumping element through the second flow port below to discharge the plating solution; 2. Emptying a step S20: driving the filter body element by driving the pumping element The residual electroplating solution completely discharges the filtering main body member to the empty state through the second flow port; 3. a backwashing step S30: driving the cleaning liquid in the fluid communication pipe system with the backwashing pumping element, and introducing the blower component to generate a gas, the cleaning liquid and the gas enter the filter body member through the second flow port through the fluid communication pipe system, and the long beam filter that can be longitudinally stretched and stretched is stretched from bottom to top. a material filtering unit, which carries out the impurities adsorbed by the long bundle filter medium filtering unit, and naturally drives the cleaning liquid and the gas through the first flow port above by the driving of the backwashing pumping element; and 4. Evacuation two step S40: driving the evacuation pump element to completely discharge the cleaning liquid and the gas remaining inside the filter body element from the second flow port to the empty state.

Therefore, the present invention can perform the operation of replacing the chemical filter material with high risk without manual operation, and can perform the filtering of the plating solution and the automatic cleaning of the filter material through the setting of the automatic control system; The filter system retains the electroplating solution at a high level after effective filtration to prevent the loss of the plating solution, and the part of the cleaning fluid (such as the amount of washing water) can be effectively saved. Meanwhile, the long beam filter used in the present invention and The related structure allows the filter bed to be fixed, thus achieving long-term use.

In the above, it is merely described that the present invention is an embodiment or an embodiment of the technical means for solving the problem, and is not intended to limit the scope of the invention. That is, the equivalent changes and modifications made to the scope of the patent application of the present invention, or the scope of the patent application of the present invention, are covered by the scope of the invention.

Claims (10)

 An electroplating solution processing apparatus, comprising: an operation unit comprising an operation element receiving an operation command; and a filter unit electrically connected to the operation unit, the filter unit being filtered by a main body element and a filter pump An element, an empty pumping element, a blower element, a backwashing pumping element, and a fluid communication tube system communicating with each of the elements, the filtering body element being an upright cylindrical container, the filtering body element Each of the sides is provided with a flow port and is connected to the fluid communication pipe system. The inner space of the cylindrical container is provided in an upright manner with a plurality of longitudinally stretchable long beam filter media filtering units. a fluid communication tube enters the fluid communication tube system for driving the plating solution in the fluid communication tube system to communicate with the first flow port of the filter body member to enter the filter body member for top-to-bottom filtration, and The drive of the filtered pump element naturally discharges the plating solution through the second flow port below, the evacuated pump element passes through a second fluid Passing the tube into the fluid communication tube system for driving the plating solution remaining in the filter body member in the filter body member to discharge the filter body member through the second flow port of the filter body member, the blower member and the backwash pump Each of the pump elements enters the fluid communication tube system via a third fluid communication tube and a fourth fluid communication tube for driving fluid in the filter body member to pass through the second flow port below the filter body member via the fluid communication tube system Entering the filter body element, and driving the backwash pump element to naturally discharge the cleaning fluid through the upper first flow port, and driving the residual cleaning fluid inside the filter body element by driving the emptied pump element The lower flow port is discharged from the filter body member.    The electroplating solution processing apparatus of claim 1, further comprising a tripod base for placing the operating unit and the filtering unit.    The electroplating solution processing apparatus of claim 1, wherein the operation unit is electrically connected to the filter pump element, the evacuation pump element, the blower element, and the backwash pump element, and The filter pumping element, the venting pumping element, the blower element, and the backwashing pumping element are controlled by an automated control system.    The electroplating solution processing apparatus according to claim 1, wherein the fluid communication tube system is provided with a first connection port, the second flow port, and the first to fourth fluid communication tubes. Or multiple automatic valves.    The electroplating solution processing apparatus according to claim 1, wherein the operation unit is electrically connected to the automatic valves, and the automatic control system is used to control opening and closing of the automatic valves.    The electroplating solution processing apparatus according to claim 1, wherein the operating element is a push switch or a touch screen.    The electroplating solution processing apparatus according to claim 1, wherein the operation unit is connectable to the remote control module.    The electroplating solution processing apparatus according to claim 1, wherein the cylindrical container for filtering the main element is divided into an upper cover structure, a cylindrical structure and a lower cover structure, wherein the upper cover structure and the cylindrical body The structures are assembled by flange fixing, and the lower cover structure and the tubular structure are combined and assembled by flange fixing.    The electroplating solution processing device according to claim 1, wherein the long bundle filter media is made of polypropylene (PP) or other filter material with good chemical resistance.    An electroplating solution processing method according to the processing device of claim 1, wherein the step of filtering comprises: filtering the electroplating solution to be filtered by driving the pumping element through the fluid communication tube system The first flow port enters a filter body element, so that the electroplating solution containing impurities can be used to intercept the adsorbed impurities by compressing the long beam filter unit from the top to bottom when passing through the long beam filter unit that can be longitudinally stretched and compressed. And driving the pumping element through the second flow port below to discharge the electroplating solution; one emptying step: driving the electroplating liquid inside the filtering body element through the driving of the evacuation pumping element The second flow port completely discharges the filter body member to the empty state; a backwashing step: driving the cleaning liquid in the fluid communication pipe system with the backwash pump element, and introducing the gas generated by the blower device, the cleaning liquid and the gas Entering the filter body member through the second flow port through the fluid communication tube system, and stretching the longitudinally stretchable long beam filter from bottom to top Filtering the unit and taking out the impurities adsorbed by the long bundle filter unit, and driving the cleaning fluid through the first flow port above by the driving of the backwash pump element; and a row of empty two steps: The driving of the evacuation pumping element completely discharges the cleaning liquid and the gas remaining inside the filtering body member from the second flow port to the emptying state.