TW201911301A - Three dimensional memory and method of operating the same - Google Patents

Abstract

Provided is a three dimensional memory including a substrate, a plurality of source lines, a plurality of isolation structures, a plurality of drain lines, a plurality of bit lines, a plurality of charge storage structures, and a plurality of conductive layers. The source lines are located on the substrate. The isolation structures are respectively located between the source lines, so as to electrically isolate the source lines from each other. The drain lines are located on the source lines. Extending directions of the source lines and the drain lines are different. The bit lines extend from the source lines to the drain lines. The charge storage structures respectively surround the bit lines. The conductive layer respectively cover surfaces of the charge storage structures arranged along each of the source lines.

Description

Three-dimensional memory and its operation method

The present invention relates to a semiconductor device and a method of operating the same, and more particularly to a three-dimensional memory and method of operating the same.

Flash memory components have become widely used in personal computers and electronic devices because they have the advantages of allowing data to be stored, read, erased, etc., and the stored data does not disappear after power-off. A non-volatile memory component used.

A typical flash memory device is a doped polysilicon that is fabricated with a floating gate and a control gate. Moreover, the floating gate and the control gate are separated by a dielectric layer. The floating gate is separated from the substrate by a tunneling oxide layer. When reading the data in the flash memory, an operating voltage is applied to the control gate, and the on/off of the lower channel is affected according to the charged state of the floating gate, and the on/off of the channel is The basis for reading the data value "0" or "1".

With the advancement of technology, all kinds of electronic products are moving toward high speed, high efficiency, light and short, and under this trend, the demand for flash memory with higher storage capacity has also increased. Therefore, the design of flash memory has also been developed toward a three-dimensional flash memory structure with high integration and high density.

The invention provides a three-dimensional memory and a method for operating the same, which can store 4-bit data in a single memory cell, thereby improving the overall three-dimensional memory storage capacity.

The present invention provides a three-dimensional memory that arranges an isolation structure between adjacent source lines, thereby reducing interference during reading.

The present invention provides a three-dimensional memory comprising: a substrate, a plurality of source lines, a plurality of isolation structures, a plurality of drain lines, a plurality of bit lines, a plurality of charge storage structures, and a plurality of conductor layers. The source line is on the substrate. The isolation structures are respectively located between the source lines to electrically isolate the source lines. The bungee line is on the source line. The dipole line and the source line extend in different directions. The bit line extends from the source line to the drain line. The charge storage structures surround the bit lines, respectively. The conductor layers respectively cover the surfaces of the charge storage structures arranged along the respective source lines.

In an embodiment, the material forming the bit line comprises a first type polysilicon material. The material forming the source line and the drain line includes a second type polysilicon material. The first type polycrystalline germanium material is different from the second type polycrystalline germanium material.

In an embodiment, each of the bit lines includes a first portion, a second portion, and a third portion. The second part is located between the first part and the third part. The second portion is surrounded by a charge storage structure. The first part is connected to the source line and acts as a source. The third part connects the bungee line and acts as a bungee.

In one embodiment, the three-dimensional memory further includes a deuterated metal layer on the source line to reduce a resistance value between the source line and the bit line.

In an embodiment, the charge storage structure is configured to store 4 bits of data.

In an embodiment, the charge storage structure includes a tunneling dielectric layer, a charge storage layer, and an electron blocking layer. The charge storage layer is between the tunneling dielectric layer and the electron blocking layer.

In an embodiment, the material of the charge storage layer comprises tantalum nitride, aluminum oxide, hafnium oxide, zirconium dioxide, hafnium oxide, tantalum oxide or a combination thereof.

The present invention provides a method of operation for the three-dimensional memory, comprising: stylizing, erasing or reading a charge storage structure.

In one embodiment, the step of staging the charge storage structure includes applying a positive voltage to the conductor layer, applying another positive voltage to the drain line, and grounding the source line to store electrons near the drain line In the charge storage structure.

In one embodiment, the step of erasing the charge storage structure includes applying a negative voltage to the conductor layer, applying a positive voltage to the drain line, and grounding the source line to attract the hole to the drain line. The charge storage structure.

In one embodiment, the mechanism for reading the charge storage structure includes applying a read voltage to the conductor layer, applying a positive voltage to the drain line, and grounding the source line to read the charge near the drain line. Store the storage state in the structure.

In one embodiment, the mechanism for reading the charge storage structure includes applying a read voltage to the conductor layer, applying a positive voltage to the source line, and grounding the drain line to read the charge near the source line. Store the storage state in the structure.

Based on the above, the present invention electrically isolates two adjacent source lines by arranging an isolation structure between adjacent two source lines, thereby reducing interference during reading. In addition, the present invention uses a high dielectric constant material as a charge storage layer, which can store 4-bit data in a single memory cell, thereby improving the overall three-dimensional memory storage capacity. In addition, the present invention erases the memory cell by a valence band-guideband thermowell injection mode, which can reduce the damage of the tunneling dielectric layer and thereby improve the reliability of the three-dimensional memory.

The above described features and advantages of the invention will be apparent from the following description.

The invention will be more fully described with reference to the drawings of the embodiments. However, the invention may be embodied in a variety of different forms and should not be limited to the embodiments described herein. The thickness of layers and regions in the drawings will be exaggerated for clarity. The same or similar reference numerals indicate the same or similar elements, and the following paragraphs will not be repeated.

FIG. 1 is a perspective view of a three-dimensional memory according to an embodiment of the invention. In the present embodiment, the three-dimensional memory of FIG. 1 may be, for example, a reverse or (NOR) flash memory. For the sake of clarity, only the substrate, the bottom dielectric layer, the source line, the isolation structure, the memory cell, and the drain line are shown in FIG. 1. For other components, refer to the subsequent cross-sectional schematic diagram.

Referring to FIG. 1 , the embodiment provides a three-dimensional memory, including: a substrate 100, a bottom dielectric layer 102, a plurality of source lines 104a, a plurality of isolation structures 116a, a plurality of memory cells, and a plurality of bit lines 114. A plurality of word lines WL and a plurality of drain lines 128. In detail, the bottom dielectric layer 102 is located on the substrate 100. The source line 104a is on the bottom dielectric layer 102 such that the bottom dielectric layer 102 is between the source line 104a and the substrate 100. The source line 104a is a stripe pattern extending in the Y direction. The isolation structure 116a is located on the bottom dielectric layer 102 between the source lines 104a to electrically isolate the adjacent two source lines 104a, thereby reducing interference during reading. In an embodiment, the isolation structure 116a is strip-shaped that extends in the Y direction.

The memory cells are respectively located on the source line 104a in an array manner. In particular, each memory cell includes a charge storage structure 118. The charge storage structure 118 surrounds the second portion 114b of the bit line 114 (as shown in Figure 2L). In an embodiment, the bit line 114 can be, for example, a cylindrical structure, and the charge storage structure 118 is strip-shaped and surrounds a central portion of the bit line 114. However, the present invention is not limited thereto. In other embodiments, the bit line 114 may be, for example, a polygonal columnar structure. In addition, the length L of the charge storage structure 118 with respect to the vertical direction of the surface of the substrate 100 can be regarded as the channel length. Bit line 114 extends from source line 104a to drain line 128. In one embodiment, the bit line 114 extends along the Z direction such that both ends of the bit line 114 are connected to the source line 104a and the drain line 128, respectively. The material forming the bit line 114 includes a P-type polysilicon material such that the first portion 114a (shown in FIG. 2L) of the bit line 114 between the source line 104a and the charge storage structure 118 can serve as a source. The second portion 114b of the bit line 114 covered by the charge storage structure 118 can serve as an active or channel region, a third portion 114c of the bit line 114 between the drain line 128 and the charge storage structure 118 (eg 2L) can be used as a bungee. Each word line WL covers the surface of a plurality of charge storage structures 118 arranged along the same column. As shown in FIG. 1, the word line WL extends in the Y direction. That is, the direction in which the word line WL extends is the same as the direction in which the source line 104a extends.

Each of the drain lines 128 is connected to a plurality of bit lines 114 arranged in the same row. The drain line 128 extends in the X direction. That is, the direction in which the drain line 128 extends from the source line 104a is different.

2A to 2L are schematic cross-sectional views showing the manufacturing flow along the line A-A of Fig. 1. 3A to 3P are schematic cross-sectional views showing the manufacturing flow along the line B-B of Fig. 1.

Referring to FIG. 2A and FIG. 3A simultaneously, this embodiment provides a method for manufacturing the three-dimensional memory of FIG. 1 , and the steps are as follows. First, a substrate 100 is provided. In one embodiment, the substrate 100 can be, for example, a semiconductor substrate, a semiconductor compound substrate, or a semiconductor substrate (Semiconductor Over Insulator (SOI)). In the present embodiment, the substrate 100 may be a P-type germanium substrate.

Next, a bottom dielectric layer 102, a conductor layer 104, a buffer structure 106, and a dielectric layer 108 are sequentially formed on the substrate 100. In an embodiment, the bottom dielectric layer 102 may be a ruthenium oxide layer, and the formation method thereof may be, for example, a chemical vapor deposition method. Conductor layer 104 can be a doped polysilicon layer. In this embodiment, the conductor layer 104 may be an N+ polysilicon layer, and the implanted dopant may be, for example, phosphorus or arsenic, and the doping concentration thereof may be, for example, 1 ́10 ¹⁸ /cm ³ to 1 ́10 ²¹ / Cm ³ . The buffer structure 106 includes a composite structure of a ruthenium oxide layer 106a, a tantalum nitride layer 106b, and a ruthenium oxide layer 106c, which may be formed, for example, by chemical vapor deposition. The dielectric layer 108 may be a tantalum nitride layer, and the formation method thereof may be, for example, a chemical vapor deposition method.

2A-2B and FIGS. 3A-3B, an isolation layer 110 is formed in the conductor layer 104, the buffer structure 106, and the dielectric layer 108. The isolation layer 110 extends in the A-A line direction (i.e., the Y direction of FIG. 1), thereby dividing the conductor layer 104 into a plurality of source lines 104a. The method of forming the isolation layer 110 may, for example, form the opening 10 in the conductor layer 104, the buffer structure 106, and the dielectric layer 108. The opening 10 exposes the top surface of the bottom dielectric layer 102. Next, an isolation material is filled into the opening 10 and a planarization process is performed. In this stage, as shown in FIG. 3B, the top surface of the isolation layer 110 is substantially coplanar with the top surface of the dielectric layer 108. In an embodiment, the planarization process may be a chemical mechanical polishing process (CMP) or an etchback process. The material of the isolation layer 110 may be ruthenium oxide.

2B-2C and FIGS. 3B-3C, a plurality of openings 12 are formed through the buffer structure 106 and the dielectric layer 108 to expose the top surface of the source line 104a. In addition, since the opening 12 is for defining the position of the bit line 114 of FIG. 1, the openings 12 are respectively formed on the source line 104a in an array manner. Thereafter, a conductor material 112 is formed on the substrate 100. Conductor material 112 fills the opening 12 and covers the top surface of dielectric layer 108. In one embodiment, the conductor material 112 can be, for example, a P-type polysilicon material, the dopant being implanted can be, for example, boron.

Referring to FIGS. 2C-2D and FIGS. 3C-3D simultaneously, a planarization process is performed to expose the top surface of dielectric layer 108 and form bit lines 114 in each opening 12. In this stage, the top surface of the bit line 114 is substantially coplanar with the top surface of the dielectric layer 108. In an embodiment, the planarization process may be a chemical mechanical polishing process or an etch back process.

2D-2E and FIGS. 3D-3E, the isolation layer 110 is recessed such that the top surface of the isolation structure 116 is substantially coplanar with the top surface of the buffer structure 106. Dielectric layer 108 is then removed to expose the top surface of buffer structure 106. In one embodiment, the method of recessing the isolation layer 110 can be, for example, a wet etch process that can be performed using an etchant having a high etch selectivity to the isolation layer 110 and the dielectric layer 108 (or the bit line 114). . Similarly, the method of removing the dielectric layer 108 can also be a wet etch process that can be performed using an etchant having a high etch selectivity to the dielectric layer 108 and the bit line 114 (or isolation structure 116).

Referring to FIG. 2F and FIG. 3F simultaneously, a charge storage structure 118 is formed on the substrate 100. The charge storage structure 118 conformally covers the surface of the bit line 114, the top surface of the buffer structure 106, and the top surface of the isolation structure 116. Although the charge storage structure 118 illustrated in FIG. 2F and FIG. 3F is a single layer structure, the charge storage structure 118 may include a tunneling dielectric layer, a charge storage layer, and an electron blocking layer (not shown). The charge storage layer is between the tunneling dielectric layer and the electron blocking layer. In one embodiment, the charge storage structure 118 can be, for example, a composite structure composed of a hafnium oxide layer/tantalum nitride layer/yttria layer. However, the invention is not limited thereto. In other embodiments, the material of the charge storage layer may be a high dielectric constant material to provide a high capacitive coupling. A high dielectric constant material refers to a dielectric material having a dielectric constant higher than 4. The high dielectric constant material may be, for example, tantalum nitride, aluminum oxide, hafnium oxide, zirconium dioxide, hafnium oxide, tantalum oxide or a combination thereof. Compared with the conventional memory in which the doped polysilicon is used as a floating gate, the charge storage structure 118 of the present embodiment can reduce the thickness of the tunneling dielectric layer and the electron blocking layer while maintaining the reliability of the memory. In addition, the high dielectric constant charge storage layer of the present embodiment has a low effective oxide thickness (EOT), which is advantageous for the size reduction of the memory. In addition, since the high dielectric constant material is an electrically insulating material, electrons can be separately stored in a charge storage layer having a high dielectric constant to achieve the effect of storing 4-bit data in a single memory cell. In an alternative embodiment, the material of the charge storage layer may also be a material having a larger conduction band offset relative to the tunneling dielectric layer and the electron blocking layer, which has better reliability. .

It is noted that at high temperatures, the N-type dopant of the source line 104a will diffuse into the first portion 114a of the bit line 114, thereby forming a source region. The second portion 114b of the bit line 114 is located on the first portion 114a of the bit line 114. In an embodiment, the second portion 114b of the bit line 114 may be a P-type conductivity type; and the first portion (or source region) 114a of the bit line 114 may be an N-type conductivity type. The first portion 114a of the bit line 114 is embedded in the buffer structure 106. The charge storage structure 118 covers and surrounds the second portion 114b of the bit line 114. For the sake of brevity, this first portion 114a is only shown in FIG. 2F and FIG. 3F and is not shown in the subsequent figures.

Referring to FIG. 2G and FIG. 3G simultaneously, the conductor layer 120 is formed on the charge storage structure 118. Conductor layer 120 surrounds charge storage structure 118 and covers the top surface of charge storage structure 118. In an embodiment, the material of the conductor layer 120 may be, for example, a doped polysilicon, which may be formed by chemical vapor deposition. In an alternate embodiment, the material of the conductor layer 120 may be a metallic material such as copper (Cu), aluminum (Al), tungsten (W), or a combination thereof.

Referring to FIGS. 2G-2H and FIGS. 3G-3H simultaneously, the conductor layer 120 is planarized to expose the top surface of the charge storage structure 118. In this case, as shown in FIGS. 2H and 3H, the conductor layer 120a is disposed beside the bit line 114, and the top surface of the conductor layer 120a and the top surface of the charge storage structure 118 may be substantially coplanar. In an embodiment, the planarization process may be a chemical mechanical polishing process or an etch back process.

Referring to FIGS. 2H-2I and FIGS. 3H-3I simultaneously, an etching process is performed to remove a portion of the conductor layer 120a to expose the upper portion 118U of the charge storage structure 118. In this case, as shown in FIGS. 2I and 3I, the top surface of the conductor layer 120b is lower than the top surface of the charge storage structure 118 (or the bit line 114). In an embodiment, the etching process may be an etch back process.

Referring to FIG. 3I and FIG. 3J simultaneously, an opening 14 is formed in the conductor layer 120b between the bit lines 114 to form the conductor layer 120c. The opening 14 corresponds to the isolation structure 116a. In an embodiment, the opening 14 can be a strip-shaped opening that extends along the Y-direction (as shown in Figure 1). The opening 14 extends through the conductor layer 120c, the charge storage structure 118, and the partial buffer structure 106 to expose the yttrium oxide layer 106a of the buffer structure 106. In one embodiment, the method of forming the opening 14 includes a lithography process and an etch process. The etching process can be, for example, a reactive ion etching process (RIE).

Referring to FIG. 3J and FIG. 3K simultaneously, a spacer material 122 is formed on the substrate 100. The spacer material 122 conformally covers the surface of the opening 14, the top surface of the conductor layer 120c, and the top surface of the charge storage structure 118. In an embodiment, the material of the spacer material 122 may be, for example, tantalum nitride, which may be formed by chemical vapor deposition.

Referring to FIG. 3K and FIG. 3L simultaneously, a dry etching process is performed to remove a portion of the spacer material 122 to form a spacer 122a on the sidewall of the conductor layer 120c and a spacer 122b on the sidewall of the upper portion 118U of the charge storage structure 118. In this case, the spacer material 122 of the bottom surface of the opening 14 is also removed to expose the top surface (not shown) of the ruthenium oxide layer 106a of the buffer structure 106. In an embodiment, the dry etching process can be, for example, a reactive ion etching process (RIE). Thereafter, a wet etching process is performed to remove the hafnium oxide layer 106a of the buffer structure 106 and to form the voids 16 in the buffer structure 106. The void 16 exposes a portion of the top surface of the source line 104a. As shown in FIG. 3L, the void 16 is defined by the tantalum nitride layer 106b of the buffer structure 106, the bit line 114, and the source line 104a.

Referring to FIG. 3L and FIG. 3M simultaneously, a metal deuteration process is performed to form a deuterated metal layer 124 on a portion of the top surface of the source line 104a exposed to the void 16. As shown in FIG. 3M, the deuterated metal layer 124 is disposed on the top surface of the source line 104a other than the source line 104a, and is further disposed in the source line 104a under the source line 104a to lower the source. The resistance between line 104a and bit line 114 increases the speed of the memory. The step of the metal deuteration process includes forming a metal layer (not shown) on the source line 104a. Thereafter, an Anneal process is performed such that the metal layer reacts with the source line 104a that it contacts to form the deuterated metal layer 124. In one embodiment, the material of the deuterated metal layer 124 is, for example, nickel germanium (NiSi), cobalt (CoSi), titanium (TiSi), tungsten germanium (WSi), molybdenum (MoSi), platinum (PtSi), Palladium telluride (PdSi) or a combination thereof.

Since the changes of the layers of FIGS. 3J to 3M do not appear on the AA line cross section of FIG. 1, for the sake of brevity, the AA line corresponding to the steps of FIGS. 3J to 3M is not shown herein. Sectional view. That is, the step of FIG. 2J is subsequent to the formation of the deuterated metal layer 124. Referring to FIG. 2J and FIGS. 3M-3N simultaneously, a dielectric layer 126 is formed on the substrate 100. Dielectric layer 126 fills into opening 14 and fills void 16. Dielectric layer 126 also covers the top surface of charge storage structure 118 as shown in FIG. 3N. In one embodiment, the material of the dielectric layer 126 includes hafnium oxide, which may be formed by chemical vapor deposition.

Referring to FIG. 2J-2K and FIG. 3N-3O, the dielectric layer 126 is planarized to remove a portion of the dielectric layer 126, a portion of the charge storage structure 118, and a portion of the spacers 122b to expose the bit lines 114. Top surface. In this case, as shown in FIG. 3O, the top surface of the bit line 114, the top surface of the charge storage structure 118, and the top surface of the dielectric layer 126a may be substantially coplanar. In an embodiment, the planarization process may be a chemical mechanical polishing process or an etch back process.

Referring to FIG. 2L and FIG. 3P simultaneously, a drain line 128 is formed on the bit line 114. The drain line 128 extends in the BB line direction (or the X direction of FIG. 1) and traverses the source line 104a and the isolation structure 116a. In this embodiment, the drain line 128 may be an N+ polysilicon layer, and the implanted dopant may be, for example, phosphorus or arsenic, and the doping concentration may be, for example, 1 ́10 ¹⁸ /cm ³ to 1 ́10 ^{21 .} /cm ³ . However, the invention is not limited thereto, and in other embodiments, the drain line 128 may also be a metal or other conductor material. In an alternate embodiment, the bit line 114 can also be subjected to an ion implantation process to implant a phosphorous or arsenic dopant into the third portion 114c of the bit line 114, thereby forming a drain region. That is, as shown in FIG. 2L, the bit line 114 includes a first portion 114a, a second portion 114b, and a third portion 114c. The second portion 114b is located between the first portion 114a and the third portion 114c. In an embodiment, the conductivity type of the second portion 114b is different from the conductivity type of the first portion 114a and the third portion 114c. In the present embodiment, the second portion 114b may have a P-type conductivity type, which may be regarded as an active region or a channel region. The first portion 114a and the third portion 114c may have an N-type conductivity type. The first portion 114a can be considered a source region; and the third portion 114c can be considered a drain region.

It is noted that, as shown in FIGS. 2L and 3P, the bit line 114 extends from the source line 104a to the drain line 128. The charge storage structure 118 surrounds the sidewall of the bit line 114 and extends over the top surface of the buffer structure 106. The conductor layer 120c covers the surface of the charge storage structure 118 such that the charge storage structure 118 is disposed between the bit line 114 and the conductor layer 120c. Conductor layer 120c covers at least a second portion (or channel region) 114b of bit line 114. In other words, the conductor layer 120c can be regarded as a control gate or a word line of the memory cell.

In the present embodiment, although the source line 104a illustrated in FIGS. 2L and 3P is the source terminal; and the drain line 128 is the 汲 terminal, the present invention is not limited thereto. In other embodiments, source line 104a can also be used as the 汲 extreme; and drain line 128 can also be used as the source terminal.

4A is a schematic cross-sectional view of a three-dimensional memory embodying an embodiment of the present invention. 4B is a schematic cross-sectional view of a three-dimensional memory in which an embodiment of the present invention is erased. 4C and 4D are schematic cross-sectional views showing a three-dimensional memory according to an embodiment of the present invention, respectively.

The method of operating the three-dimensional memory of this embodiment includes stylizing, erasing or reading the charge storage structure 118 of FIG. Referring to FIG. 4A, the mechanism for programming the charge storage structure 118 includes a channel hot electron injection (Channel Hot Electron Injection). In detail, the steps of the channel hot electron injection mode are as follows. A positive voltage V _g is applied to the word line WL (which corresponds to the conductor layer 120c of FIG. 1 ), and another positive voltage V _d is applied to the drain D (which corresponds to the drain line 128 of FIG. 1 ) and the source is applied. The pole S (which corresponds to the source line 104a of FIG. 1) is grounded such that the memory cells are turned on. Therefore, a current flows from the drain D to the source S, and the hot electrons generated in the channel C are attracted and stored in the charge storage structure 118 near the drain D to generate a state of "01". Similarly, when different voltages are applied to the word line WL, the drain D, and the source S, a state of "10", "11", or "00" can be generated. Thus, the charge storage structure 118 of the present embodiment can be configured to store 4-bit data. In one embodiment, the voltage V _g may be between 7 volts to 9.5 volts; may be interposed between the voltage V _d is 5 volts to 3.5 volts.

Referring to FIG. 4B, the mechanism for erasing the charge storage structure 118 includes a Band to Band Hot Hole Injection. In detail, the steps of the valence band-guide band hot hole injection mode are as follows. Applying a negative voltage V _g to the word line WL (which corresponds to the conductor layer 120c of FIG. 1 ), applying a positive voltage V _d to the drain D (which corresponds to the drain line 128 of FIG. 1 ), and applying a source S (which corresponds to the source line 104a of FIG. 1) is grounded. As such, the thermoelectric holes in channel C are attracted and injected into the charge storage structure 118 near the drain D such that the thermal holes are coupled to the stored electrons. In the present embodiment, the charge storage structure 118 is erased in the valence band-guideband thermal hole injection mode, which can reduce the damage of the tunneling dielectric layer in the charge storage structure 118, thereby improving the reliability of the three-dimensional memory. In one embodiment, the voltage V _g may be between -10 volts to -15 volts; may be interposed between the voltage V _d is 5 volts to 3.5 volts.

Referring to FIGS. 4C and 4D, the mechanism for reading the charge storage structure 118 includes a forward read mode or a reverse read mode. In detail, the steps of the operation in the forward read mode are as follows. 4C, a read voltage V _g is applied to the word line WL (which corresponds to the conductor layer 120c of FIG. 1), a positive voltage is applied to the drain D (which corresponds to a drain line 128 of FIG. 1) V _F , and the source S (which corresponds to the source line 104a of FIG. 1) is grounded to read the stored state in the charge storage structure 118 near the drain D. Therefore, when electrons have been stored in the charge storage structure 118 near the drain D, the threshold of the memory cell rises and the memory cell operates in a disconnected manner. In one embodiment, the read voltage V _g may be between 3.5 volts to 4.5 volts; voltage V _F may be between 0.7 volts to 1.2 volts.

The operation of the reverse read mode is similar to the above steps. As shown in FIG. 4D, a read voltage is applied to the word line WL (which corresponds to the conductor layer 120c of FIG. 1), and a positive voltage V _R is applied to the source S (which corresponds to the source line 104a of FIG. 1). The drain D (which corresponds to the drain line 128 of FIG. 1) is grounded to read the stored state in the charge storage structure 118 near the source S. Therefore, when electrons are not stored in the charge storage structure 118 near the source S, the threshold of the memory cell is lowered, and the memory cell is operated in a conducting manner. In one embodiment, the read voltage V _g may be between 3.5 volts to 4.5 volts; voltage V _R may be between 0.7 volts to 1.2 volts.

In summary, the present invention electrically isolates two adjacent source lines by arranging an isolation structure between adjacent two source lines, thereby reducing interference during reading. In addition, the present invention uses a high dielectric constant material as a charge storage layer, which can store 4-bit data in a single memory cell, thereby improving the overall three-dimensional memory storage capacity. In addition, the present invention erases the memory cell by a valence band-guideband thermowell injection mode, which can reduce the damage of the tunneling dielectric layer and thereby improve the reliability of the three-dimensional memory.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

10,12,14‧‧

16‧‧‧ gap

100‧‧‧Base

102‧‧‧ bottom dielectric layer

104‧‧‧Conductor layer

104a‧‧‧Source line

106‧‧‧buffer structure

106a, 106c‧‧‧ yttrium oxide layer

106b‧‧‧ layer of tantalum nitride

108‧‧‧ dielectric layer

110‧‧‧Isolation

112‧‧‧Conductor materials

114‧‧‧ bit line

114a‧‧‧Part I

114b‧‧‧Part II

114c‧‧‧Part III

116, 116a‧‧‧Isolation structure

118‧‧‧Charge storage structure

118U‧‧‧ upper

120, 120a‧‧‧ conductor layer

120b, 120c‧‧‧ conductor layer

122‧‧‧ spacer material

122a, 122b‧‧‧ spacer

124‧‧‧Deuterated metal layer

126, 126a‧‧‧ dielectric layer

128‧‧‧汲polar line

C‧‧‧ channel

D‧‧‧汲

S‧‧‧ source

L‧‧‧ length

WL‧‧‧ character line

X, Y, Z‧‧ Direction

V _g , V _d , V _F , V _R ‧‧‧ voltage

1 is a perspective view of a three-dimensional memory according to an embodiment of the present invention. 2A to 2L are schematic cross-sectional views showing the manufacturing flow along the line A-A of Fig. 1. 3A to 3P are schematic cross-sectional views showing the manufacturing flow along the line B-B of Fig. 1. 4A is a schematic cross-sectional view of a three-dimensional memory embodying an embodiment of the present invention. 4B is a schematic cross-sectional view of a three-dimensional memory in which an embodiment of the present invention is erased. 4C and 4D are schematic cross-sectional views showing a three-dimensional memory according to an embodiment of the present invention, respectively.

Claims (12)

A three-dimensional memory comprising: a plurality of source lines on a substrate; a plurality of isolation structures respectively located between the source lines to electrically isolate the source lines; a plurality of drain lines located at the a source line, wherein the drain line is different from an extension direction of the source line; a plurality of bit lines extending from the source line to the drain line; and a plurality of charge storage structures respectively surrounding The bit line; and a plurality of conductor layers respectively covering surfaces of the charge storage structures arranged along each of the source lines. The three-dimensional memory of claim 1, wherein the material forming the bit line comprises a first type polysilicon material, and the material forming the source line and the drain line comprises a second type polysilicon material. And the first type polysilicon material is different from the second type polysilicon material. The three-dimensional memory of claim 1, wherein each of the bit lines includes a first portion, a second portion, and a third portion, the second portion being located in the first portion and the third portion The second portion is surrounded by the charge storage structure, the first portion is connected to the source line and serves as a source, and the third portion is connected to the drain line and serves as a drain. The three-dimensional memory according to claim 1, further comprising a deuterated metal layer on the source line to reduce a resistance value between the source line and the bit line. The three-dimensional memory of claim 1, wherein the charge storage structure is configured to store 4 bits of data. The three-dimensional memory of claim 1, wherein the charge storage structure comprises a tunneling dielectric layer, a charge storage layer, and an electron blocking layer, wherein the charge storage layer is located at the tunneling dielectric layer Between the electron blocking layers. The three-dimensional memory of claim 1, wherein the material of the charge storage layer comprises tantalum nitride, aluminum oxide, hafnium oxide, zirconium dioxide, hafnium oxide, tantalum oxide or a combination thereof. A method of operating a three-dimensional memory as described in claim 1, comprising staging, erasing or reading the charge storage structure. The method of claim 8, wherein the step of staging the charge storage structure comprises applying a positive voltage to the conductor layer, applying another positive voltage to the drain line, and The source line is grounded to store electrons in the charge storage structure adjacent to the drain line. The method of claim 8, wherein the step of erasing the charge storage structure comprises applying a negative voltage to the conductor layer, applying a positive voltage to the drain line, and applying the source The pole line is grounded to attract the hole into the charge storage structure adjacent to the drain line. The method of claim 8, wherein the step of reading the charge storage structure comprises applying a read voltage to the conductor layer, applying a positive voltage to the drain line, and The source line is grounded to read a stored state in the charge storage structure proximate the drain line. The method of claim 8, wherein the step of reading the charge storage structure comprises applying a read voltage to the conductor layer, applying a positive voltage to the source line, and The drain line is grounded to read a state of storage in the charge storage structure proximate the source line.