TW201910719A - Displacement detecting device and measuring method of object displacement - Google Patents

Displacement detecting device and measuring method of object displacement Download PDF

Info

Publication number
TW201910719A
TW201910719A TW107127636A TW107127636A TW201910719A TW 201910719 A TW201910719 A TW 201910719A TW 107127636 A TW107127636 A TW 107127636A TW 107127636 A TW107127636 A TW 107127636A TW 201910719 A TW201910719 A TW 201910719A
Authority
TW
Taiwan
Prior art keywords
light
displacement
sensing
sensing element
parallel
Prior art date
Application number
TW107127636A
Other languages
Chinese (zh)
Other versions
TWI666422B (en
Inventor
徐志豪
林正軒
Original Assignee
億光電子工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 億光電子工業股份有限公司 filed Critical 億光電子工業股份有限公司
Publication of TW201910719A publication Critical patent/TW201910719A/en
Application granted granted Critical
Publication of TWI666422B publication Critical patent/TWI666422B/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a displacement sensor device and object displacement measurement method. The displacement sensor device comprises a light-emitting element, a optical element, a light splitting element and a sensing element, wherein the sensing element will reflect the different sensing changes of the light when the object moves between the light splitting element and the sensing element or when the object moves between the light splitting element and the optical device; wherein the displacement of the object is measured through the light sensing changes of the sensing element that is generated corresponding to the movement of the object. The displacement sensor device of the invention achieves the purpose of using the displacement sensor device to accurately and instantly collecting and monitoring the changes in the displacement of the object, and solves the technical problem in the prior art that the displacement sensor device measures the displacement of the object at low precision.

Description

一種位移偵測裝置及物體位移的測量方法    Displacement detection device and method for measuring object displacement   

本發明係關於一種發光感測領域,特別是一種位移偵測裝置及物體位移的測量方法。 The invention relates to the field of luminescence sensing, in particular to a displacement detection device and a method for measuring the displacement of an object.

位置檢測感測器是一種對物體位置進行檢測的裝置,透過對物體的位置的檢測從而獲得物體的狀態,進而根據物體的狀態執行相應的控制操作,位置檢測感測器可以應用於工件的位移、尺寸、表面狀態及振動、偏心、間隙、衝程等運動狀態的線上檢測以及空間三維位移檢測和機器人測距等方面。 The position detection sensor is a device that detects the position of an object. The position of the object is obtained by detecting the position of the object, and the corresponding control operations are performed according to the state of the object. The position detection sensor can be applied to the displacement of the workpiece , Size, surface state and on-line detection of vibration, eccentricity, clearance, stroke and other motion states, as well as spatial 3D displacement detection and robot ranging.

目前,位置檢測感測器主要包括:發光元件和受光元件,受光元件具體為光電二級管(photodiode),其中,發光元件將電轉為光,光投射到受光元件,由受光元件將光轉為電信號,控制單元根據電信號判斷出外接物的存在或接近等狀態,具體的,當發光元件和受光元件之間沒有遮擋物體時,則發光元件發出的光線會全部射到受光元件上,當有一被測物體位於發光元件和受光元件之間時被測物體會擋住一部分光線,這時受光元件根據檢測到的光線感測出有物體通過,此時控制單元根據受光元件的信號判斷出發光元件和受光元件之間有物體通過或接近。 At present, position detection sensors mainly include a light-emitting element and a light-receiving element. The light-receiving element is a photodiode. The light-emitting element converts electricity into light, and the light is projected onto the light-receiving element. The light-receiving element converts the light into The electrical signal, the control unit determines the presence or proximity of the external object according to the electrical signal. Specifically, when there is no obstruction between the light-emitting element and the light-receiving element, all the light emitted by the light-emitting element will hit the light-receiving element. When a measured object is located between the light-emitting element and the light-receiving element, the measured object will block a part of the light. At this time, the light-receiving element detects that the object passes through according to the detected light. At this time, the control unit judges the light-emitting element and the light-emitting element based on the signal of the light-receiving element. Objects pass or approach between light receiving elements.

然而,上述位置檢測感測器只能檢測出物體是否通過或接近等狀態,無法對物體移動過程中的位移變化進行檢測。 However, the above position detection sensor can only detect whether the object is passing or approaching, and cannot detect a change in displacement during the movement of the object.

鑒於上述問題,本發明之目的在於提供一種位移偵測裝置及物體位移的測量方法,實現了對物體位移變化的高精度測量目的。 In view of the above problems, the object of the present invention is to provide a displacement detection device and a method for measuring the displacement of an object, so as to achieve the high-precision measurement of the displacement of the object.

為達上述目的,本發明提供一種位移偵測裝置,該位移偵測裝置包括:一發光元件,用於提供一光線;一光學元件,設置於該發光元件的一側,用於將該光線轉換成一平行光束;一分光元件,設置於該光學元件的一側,用於將該平行光束劃分為多個平行光線;以及一感測元件,設置於該分光元件的一側;其中,當一物體位於該分光元件及該感測元件之間或位於該分光元件及該光學元件之間時,該物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該感測元件,該感測元件產生一光線感測;其中,當該物體在該分光元件及該感測元件之間移動時或當該物體在該分光元件及該光學元件之間移動時,該感測元件會反應出不同的光線感測變化;其中,透過該物體位移時所對應產生的該感測元件的光線感測變化測量該物體的位移。 To achieve the above object, the present invention provides a displacement detection device. The displacement detection device includes: a light emitting element for providing a light; and an optical element disposed on a side of the light emitting element for converting the light. Forming a parallel beam; a beam splitting element disposed on one side of the optical element for dividing the parallel beam into a plurality of parallel beams; and a sensing element disposed on one side of the beam splitting element; wherein when an object When located between the light splitting element and the sensing element or between the light splitting element and the optical element, the object shields a portion of the parallel light rays, and the object allows another portion of the parallel light rays to be projected onto the sensing element. , The sensing element generates a light sensing; wherein, when the object moves between the spectroscopic element and the sensing element or when the object moves between the spectroscopic element and the optical element, the sensing element Different light sensing changes are reflected; wherein the displacement of the object is measured through the light sensing change of the sensing element that is generated when the object is displaced.

較佳地,該位移偵測裝置還包括一固定架。 Preferably, the displacement detection device further includes a fixing frame.

較佳地,該發光元件為發光二極體、鐳射二極體、固態鐳射、 液態鐳射、氣態鐳射、准分子鐳射及光纖鐳射的其中一者或至少二者以上所任意組合的群組。 Preferably, the light emitting element is one of a light emitting diode, a laser diode, a solid state laser, a liquid laser, a gaseous laser, an excimer laser, and an optical fiber laser, or any combination of at least two of them.

較佳地,該位移偵測裝置還包括一固定架,其中該發光元件、該光學元件及該分光元件設置在該固定架的同一側。 Preferably, the displacement detecting device further includes a fixing frame, wherein the light emitting element, the optical element and the light splitting element are disposed on the same side of the fixing frame.

較佳地,還包括一固定架,其中該感測元件設置在該固定架的另一同側面上。 Preferably, it further comprises a fixing frame, wherein the sensing element is disposed on the other side of the fixing frame.

較佳地,該位移偵測裝置還包括一固定架,其中該發光元件、該光學元件及該分光元件設置在該固定架的同一側,該感測元件設置在該固定架的另一同側面上,或者, 該發光元件、該光學元件設置在該固定架的同一側,該分光元件和該感測元件設置在該固定架的另一同側面上。 Preferably, the displacement detection device further includes a fixing frame, wherein the light emitting element, the optical element, and the beam splitting element are disposed on the same side of the fixing frame, and the sensing element is disposed on the same side of the fixing frame. Or, the light emitting element and the optical element are disposed on the same side of the fixed frame, and the light splitting element and the sensing element are disposed on the same side of the fixed frame.

較佳地,該位移偵測裝置還包括一處理元件,用於處理該感測元件的光線感測變化,並產生該物體的位移數值。 Preferably, the displacement detection device further includes a processing element for processing a light sensing change of the sensing element and generating a displacement value of the object.

較佳地,該光線包括可見光及不可見光。 Preferably, the light includes visible light and invisible light.

較佳地,該光學元件為單凸光學元件或透鏡,或者,該光學元件為雙凸光學元件或透鏡。 Preferably, the optical element is a single convex optical element or lens, or the optical element is a double convex optical element or lens.

較佳地,該分光元件包括一光柵、一分光鏡、一棱鏡、一分光光學膜、一光纖耦合器、一光子晶體元件的其中一者或至少二者以上所任意組合的群組。 Preferably, the beam splitting element includes one of a grating, a beam splitter, a prism, a beam splitting optical film, a fiber coupler, and a photonic crystal element, or any combination of at least two of them.

較佳地,該分光元件包括多個透光口或透光窗。 Preferably, the light splitting element includes a plurality of light transmitting ports or light transmitting windows.

較佳地,該位移偵測裝置還包括一固定架,其中該固定架為U型結構。 Preferably, the displacement detecting device further includes a fixing frame, wherein the fixing frame has a U-shaped structure.

較佳地,該位移偵測裝置還包括一固定架,其中該固定架的材料為矽膠、熱固性膠體、環氧樹脂中的任意一種或者至少兩種的組合。 Preferably, the displacement detecting device further includes a fixing frame, wherein the material of the fixing frame is any one or a combination of at least two of silicon rubber, thermosetting gel, and epoxy resin.

較佳地,該位移偵測裝置還包括一固定架,其中該固定架具有一出光面。 Preferably, the displacement detection device further includes a fixing frame, wherein the fixing frame has a light emitting surface.

較佳地,該位移偵測裝置還包括一固定架,其中該固定架具有一收光面。 Preferably, the displacement detection device further includes a fixing frame, wherein the fixing frame has a light-receiving surface.

較佳地,該出光面和該收光面之間具有一物體位移測量空間。 Preferably, an object displacement measurement space is provided between the light emitting surface and the light receiving surface.

較佳地,該感測元件包括位置感測器(PSD)、光耦合感測元件(CCD)、場效應半導體感測元件(CMOS)、半導體感測元件的其中一者或至少二者以上所任意組合的群組。 Preferably, the sensing element includes one or at least two of a position sensor (PSD), a light-coupled sensing element (CCD), a field effect semiconductor sensing element (CMOS), and a semiconductor sensing element. Any combination of groups.

較佳地,該位移偵測裝置還包括:一處理元件,與該感測元件電性連接,用於處理該感測元件的光線感測變化,並產生該物體的位移數值;以及一顯示元件,與該處理元件電性連接,用於顯示該物體的位移數值。 Preferably, the displacement detection device further includes: a processing element electrically connected to the sensing element for processing a light sensing change of the sensing element and generating a displacement value of the object; and a display element Is electrically connected to the processing element and used to display the displacement value of the object.

較佳地,該光學元件位於該發光元件及該分光元件之間。 Preferably, the optical element is located between the light emitting element and the light splitting element.

較佳地,該分光元件位於該光學元件及該感測元件之間。 Preferably, the light splitting element is located between the optical element and the sensing element.

較佳地,該分光元件及該感測元件之間具有一物體位移測量空間。 Preferably, an object displacement measurement space is provided between the spectroscopic element and the sensing element.

較佳地,該分光元件及該光學元件之間具有一物體位移測量空間。 Preferably, an object displacement measurement space is provided between the spectroscopic element and the optical element.

本發明還提供一種物體位移的測量方法,包括: 提供一發光元件,用於提供一光線;提供一光學元件,用於將該光線轉換成一平行光束;提供一分光元件,用於將該平行光束劃分為多個平行光線;提供一感測元件;當一物體位於該分光元件及該感測元件之間或位於該分光元件及該光光學件之間時,該物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該感測元件,該感測元件產生一光線感測;當該物體在該分光元件及該感測元件之間移動時或當該物體在該分光元件及該光學元件之間移動時,該感測元件會反應出不同的光線感測變化;以及透過該物體位移時所對應產生的該感測元件的光線感測變化測量該物體的位移。 The invention also provides a method for measuring the displacement of an object, including: providing a light emitting element for providing a light; providing an optical element for converting the light into a parallel light beam; providing a beam splitting element for the parallel light beam Divided into a plurality of parallel rays; providing a sensing element; when an object is located between the beam splitting element and the sensing element or between the beam splitting element and the optical optics, the object blocks a portion of the parallel rays , The object allows the parallel light of another part to be projected onto the sensing element, and the sensing element generates a light sensing; when the object moves between the spectroscopic element and the sensing element or when the object is in the When the spectroscopic element and the optical element are moved, the sensing element reflects different light sensing changes; and the displacement of the object is measured through the light sensing changes of the sensing element that are generated when the object is displaced.

較佳地,該發光元件為發光二極體、鐳射二極體、固態鐳射、液態鐳射、氣態鐳射、准分子鐳射及光纖鐳射的其中一者或至少二者以上所任意組合的群組。 Preferably, the light-emitting element is a light-emitting diode, a laser diode, a solid-state laser, a liquid laser, a gas-phase laser, an excimer laser, and an optical fiber laser, or any combination of at least two of them.

較佳地,該物體位移的測量方法還包括:提供一處理元件,用於處理該感測元件的光線感測變化,而產生該物體的位移數值。 Preferably, the method for measuring the displacement of the object further includes: providing a processing element for processing a change in light sensing of the sensing element to generate a displacement value of the object.

較佳地,該光線包括可見光及不可見光。 Preferably, the light includes visible light and invisible light.

較佳地,該光學元件為單凸光學元件或透鏡,或者,該光學元件為雙凸光學元件或透鏡。 Preferably, the optical element is a single convex optical element or lens, or the optical element is a double convex optical element or lens.

較佳地,該分光元件包括一光柵、一分光鏡、一棱鏡、一分光光學膜、一光纖耦合器、一光子晶體元件的其中一者或至少二者以上所任意組合的群組。 Preferably, the beam splitting element includes one of a grating, a beam splitter, a prism, a beam splitting optical film, a fiber coupler, and a photonic crystal element, or any combination of at least two of them.

較佳地,該分光元件包括多個透光口或透光窗。 Preferably, the light splitting element includes a plurality of light transmitting ports or light transmitting windows.

較佳地,該感測元件包括位置感測器(PSD)、光耦合感測元件(CCD)、場效應半導體感測元件(CMOS)、半導體感測元件的其中一者或至少二者以上所任意組合的群組。 Preferably, the sensing element includes one or at least two of a position sensor (PSD), a light-coupled sensing element (CCD), a field effect semiconductor sensing element (CMOS), and a semiconductor sensing element. Any combination of groups.

較佳地,該物體位移的測量方法還包括:提供一處理元件,與該感測元件電性連接,用於處理該感測元件的光線感測變化,並產生該物體的位移數值;以及提供一顯示元件,與該處理元件電性連接,用於顯示該物體的位移數值。 Preferably, the method for measuring the displacement of the object further includes: providing a processing element electrically connected to the sensing element for processing the light sensing change of the sensing element and generating a displacement value of the object; and providing A display element is electrically connected to the processing element and used for displaying the displacement value of the object.

較佳地,該光學元件位於該發光元件及該分光元件之間。 Preferably, the optical element is located between the light emitting element and the light splitting element.

較佳地,該分光元件位於該光學元件及該感測元件之間。 Preferably, the light splitting element is located between the optical element and the sensing element.

較佳地,該分光元件及該感測元件之間具有一物體位移測量空間。 Preferably, an object displacement measurement space is provided between the spectroscopic element and the sensing element.

較佳地,該分光元件及該光學元件之間具有一物體位移測量空間。 Preferably, an object displacement measurement space is provided between the spectroscopic element and the optical element.

本發明還提供一種位移偵測裝置,包括:一發光二極體,用於提供一光線;一透鏡,設置於該發光二極體的一側,用於將該光線轉換成一平行光束;一光柵,設置於該透鏡的一側,用於將該平行光束劃分為多個平行光線;以及一位置感測器(PSD),設置於該光柵的一側; 其中,當一物體位於該光柵及該位置感測器之間或位於該光柵及該透鏡之間時,該物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該位置感測器,該位置感測器產生一光線感測;其中,當該物體在該光柵及該位置感測器之間移動時或當該物體在該光柵及該透鏡之間移動時,該位置感測器會反應出不同的光線感測變化;其中,透過該物體位移時所對應產生的該位置感測器的光線感測變化測量該物體的位移。 The invention also provides a displacement detection device, comprising: a light emitting diode for providing a light; a lens disposed on one side of the light emitting diode for converting the light into a parallel light beam; a grating Is disposed on one side of the lens to divide the parallel beam into a plurality of parallel rays; and a position sensor (PSD) is disposed on one side of the grating; wherein when an object is located on the grating and the When between the position sensors or between the grating and the lens, the object shields a part of the parallel light rays, the object allows another part of the parallel light rays to be projected to the position sensor, the position sensor A light sensor is generated; wherein when the object moves between the grating and the position sensor or when the object moves between the grating and the lens, the position sensor reflects different lights Sensing change; wherein the displacement of the object is measured through the light sensing change of the position sensor corresponding to the displacement of the object.

較佳地,該位移偵測裝置還包括一固定架,其中該發光二極體、該透鏡及該光柵設置在該固定架的同一側,該位置感測器設置在該固定架的另一同側面上,或者,該發光二極體、該透鏡設置在該固定架的同一側,該光柵和該位置感測器設置在該固定架的另一同側面上。 Preferably, the displacement detection device further includes a fixing frame, wherein the light-emitting diode, the lens and the grating are disposed on the same side of the fixing frame, and the position sensor is disposed on the same side of the fixing frame. Or the light emitting diode and the lens are disposed on the same side of the fixed frame, and the grating and the position sensor are disposed on the same side of the fixed frame.

較佳地,該位移偵測裝置還包括一處理元件,用於處理該位置感測器的光線感測變化,並產生該物體的位移數值。 Preferably, the displacement detection device further includes a processing element for processing the light sensing change of the position sensor and generating a displacement value of the object.

較佳地,該光線包括可見光及不可見光。 Preferably, the light includes visible light and invisible light.

較佳地,該透鏡為單凸透鏡或雙凸透鏡。 Preferably, the lens is a single convex lens or a double convex lens.

較佳地,該光柵包括多個透光口或透光窗。 Preferably, the grating includes a plurality of light transmission ports or light transmission windows.

較佳地,該位移偵測裝置還包括一固定架,其中該固定架為U型結構。 Preferably, the displacement detecting device further includes a fixing frame, wherein the fixing frame has a U-shaped structure.

較佳地,該位移偵測裝置還包括一固定架,其中該固定架的材料為矽膠、熱固性膠體、環氧樹脂中的任意一種或者至少兩種的組合。 Preferably, the displacement detecting device further includes a fixing frame, wherein the material of the fixing frame is any one or a combination of at least two of silicon rubber, thermosetting gel, and epoxy resin.

較佳地,該位移偵測裝置還包括一固定架,其中該固定架具 有一出光面。 Preferably, the displacement detecting device further includes a fixing frame, wherein the fixing frame has a light emitting surface.

較佳地,該位移偵測裝置還包括一固定架,其中該固定架具有一收光面。 Preferably, the displacement detection device further includes a fixing frame, wherein the fixing frame has a light-receiving surface.

較佳地,該出光面和該收光面之間具有一物體位移測量空間。 Preferably, an object displacement measurement space is provided between the light emitting surface and the light receiving surface.

較佳地,該位移偵測裝置還包括:一處理元件,與該位置感測器電性連接,用於處理該位置感測器的光線感測變化,並產生該物體的位移數值;以及一顯示元件,與該處理元件電性連接,用於顯示該物體的位移數值。 Preferably, the displacement detection device further comprises: a processing element electrically connected to the position sensor, for processing a light sensing change of the position sensor, and generating a displacement value of the object; and The display element is electrically connected to the processing element and is used for displaying the displacement value of the object.

較佳地,該透鏡位於該發光二極體及該光柵之間。 Preferably, the lens is located between the light-emitting diode and the grating.

較佳地,該光柵位於該透鏡及該位置感測器之間。 Preferably, the grating is located between the lens and the position sensor.

較佳地,該光柵及該位置感測器之間具有一物體位移測量空間。 Preferably, an object displacement measurement space is provided between the grating and the position sensor.

較佳地,該光柵及該透鏡之間具有一物體位移測量空間。 Preferably, there is an object displacement measurement space between the grating and the lens.

本發明還提供一種物體位移的測量方法,包括:提供一發光二極體,用於提供一光線;提供一透鏡,用於將該光線轉換成一平行光束;提供一光柵,用於將該平行光束劃分為多個平行光線;提供一位置感測器;當一物體位於該光柵及該位置感測器之間或位於該光柵及該透鏡之間時,該物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該位置感測器,該位置感測器產生一光線感測; 當該物體在該光柵及該位置感測器之間移動時或當該物體在該光柵及該透鏡之間移動時,該位置感測器會反應出不同的光線感測變化;以及透過該物體位移時所對應產生的該位置感測器的光線感測變化測量該物體的位移。 The invention also provides a method for measuring the displacement of an object, comprising: providing a light emitting diode for providing a light; providing a lens for converting the light into a parallel light beam; providing a grating for the parallel light beam Divided into a plurality of parallel rays; providing a position sensor; when an object is located between the grating and the position sensor or between the grating and the lens, the object shields a part of the parallel rays, the The object allows the parallel light of another part to be projected to the position sensor, and the position sensor generates a light sensor; when the object moves between the grating and the position sensor or when the object is in the When the grating and the lens move, the position sensor reflects different light sensing changes; and the displacement of the object is measured through the light sensing changes of the position sensor corresponding to the displacement of the object.

本發明還提供一種位移偵測裝置,包括:一發光元件,用以提供多個平行光線;以及一感測元件,設置於該發光元件的一側;其中,當一物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該感測元件,該感測元件產生一光線感測;其中,當該物體移動時,該感測元件會反應出不同的光線感測變化;其中,透過該物體位移時所對應產生的該感測元件的光線感測變化,用以量測該物體的位移/速度/大小。 The invention also provides a displacement detection device, comprising: a light emitting element for providing a plurality of parallel light rays; and a sensing element disposed on one side of the light emitting element; wherein, when an object covers a part of the parallel light beams, Light, the object allows the parallel light of another part to be projected to the sensing element, and the sensing element generates a light sensing; wherein, when the object moves, the sensing element will reflect different light sensing changes ; Wherein the change in light sensing of the sensing element corresponding to the displacement of the object is used to measure the displacement / speed / size of the object.

本發明還提供一種位移偵測裝置,包括:一發光二極體,用以提供多個平行光線;以及一位置感測器,設置於該發光二極體的一側;其中,當一物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該位置感測器,該位置感測器產生一光線感測;其中,當該物體移動時,該位置感測器會反應出不同的光線感測變化;其中,透過該物體位移時所對應產生的該位置感測器的光線感測變化,用以量測該物體的位移/速度/大小。 The invention also provides a displacement detection device, comprising: a light-emitting diode for providing a plurality of parallel light; and a position sensor disposed on one side of the light-emitting diode; wherein, when an object is shielded One part of the parallel light, the object allows the other part of the parallel light to be projected to the position sensor, and the position sensor generates a light sensor; wherein when the object moves, the position sensor will Different light sensing changes are reflected; among them, the light sensing change of the position sensor generated when the object is displaced is used to measure the displacement / speed / size of the object.

本實施例提供的位移偵測裝置,透過包括一發光元件、一光 學元件、一分光元件以及一感測元件,這樣分光元件可以平行光束分割為多個平行光線,而多個平行光線可以與感測元件的感光區一一對應,這樣物體在分光元件的其中一側移動時,將其中一些光線遮擋時,感測元件根據與平行光線的對應關係可以準確地感測到光線變化,這樣根據光線變化便可以測量出物體的位移變化,與現有技術相比,本申請中的位移偵測裝置透過感測元件與光源搭配二次光學調整的平行光線,大大提高了位移偵測裝置的靈敏度,實現了位移偵測裝置對物體位移變化的高精度及時採集監測的目的,從而使得物體位移測量更加準確和安全,更方便快捷的獲得物體位置的變化,解決了現有技術中位移檢測裝置對物體位移的測量精度不高的技術問題。 The displacement detection device provided in this embodiment includes a light emitting element, an optical element, a light splitting element, and a sensing element. In this way, the light splitting element can divide a parallel light beam into multiple parallel light rays, and the multiple parallel light rays can be connected with the sensor. The light-sensitive areas of the sensing element correspond one-to-one, so that when an object moves on one side of the spectroscopic element and blocks some of the light, the sensing element can accurately sense the light change according to the corresponding relationship with the parallel light. The change can measure the change of the displacement of the object. Compared with the prior art, the displacement detection device in this application uses a parallel light with a secondary optical adjustment through a sensing element and a light source, which greatly improves the sensitivity of the displacement detection device. The purpose of the high-accuracy and timely collection and monitoring of the displacement of the object by the displacement detection device is to make the measurement of the displacement of the object more accurate and safe, and to obtain the change of the position of the object more conveniently and quickly. Technical problems with low measurement accuracy.

為讓上述目的、技術特徵及優點能更明顯易懂,下文是以較佳的實施例配合所附圖式進行詳細說明。 In order to make the above-mentioned objects, technical features, and advantages more comprehensible, the following detailed description is made by using preferred embodiments in conjunction with the accompanying drawings.

101‧‧‧發光元件 101‧‧‧light-emitting element

102‧‧‧光學元件 102‧‧‧optical element

103‧‧‧光線 103‧‧‧ Light

104‧‧‧分光元件 104‧‧‧ Beamsplitter

105‧‧‧平行光線 105‧‧‧ parallel rays

106‧‧‧感測元件 106‧‧‧ sensing element

107‧‧‧物體 107‧‧‧ objects

108‧‧‧固定架 108‧‧‧ fixed frame

109‧‧‧透光口 109‧‧‧Translucent mouth

110‧‧‧出光面 110‧‧‧light surface

111‧‧‧收光面 111‧‧‧ Glossy surface

112‧‧‧平行光束 112‧‧‧ Parallel Beam

301‧‧‧處理元件 301‧‧‧processing element

302‧‧‧顯示元件 302‧‧‧Display element

303‧‧‧通訊元件 303‧‧‧Communication components

304‧‧‧記憶元件 304‧‧‧Memory element

為了更清楚地說明本發明實施例或現有技術中的技術方案,下面將對實施例或現有技術描述中所需要使用的附圖作一簡單地介紹,顯而易見地,下面描述中的附圖是本發明的一些實施例,對於本領域普通技術人員來講,在不付出創造性勞動性的前提下,還可以根據這些附圖獲得其他的附圖。 In order to more clearly explain the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are Some embodiments of the invention, for those skilled in the art, can obtain other drawings according to these drawings without paying creative labor.

圖1A是本發明實施例一提供的位移偵測裝置中物體位於分光元件和感測元件之間的剖面結構示意圖;圖1B是本發明實施例一提供的位移偵測裝置中物體位於分光元件和光學元件之間的剖面結構示意圖; 圖2A-2B是本發明實施例一提供的位移偵測裝置在測量物體沿著X方向的位移的立體結構示意圖;圖3A-3B是本發明實施例一提供的位移偵測裝置在測量物體沿著Y方向位移的立體結構示意圖;圖4是本發明實施例一提供的位移偵測裝置的電路方框結構示意圖;圖5是本發明實施例二提供的物體位移的測量方法的流程示意圖;圖6是本發明實施例四提供的物體位移的測量方法的流程示意圖。 FIG. 1A is a schematic cross-sectional structure diagram of an object located between a light-splitting element and a sensing element in a displacement detection device according to a first embodiment of the present invention; FIG. 1B is an object located between a light-splitting element and a light-splitting element in a displacement detection device according to the first embodiment of the present invention; Schematic diagram of the cross-section structure between optical elements; Figures 2A-2B are schematic diagrams of the three-dimensional structure of the displacement detection device measuring the displacement of an object along the X direction according to the first embodiment of the present invention; and Figures 3A-3B are the first embodiment of the present invention. Schematic diagram of the three-dimensional structure of the displacement detection device measuring the displacement of the object along the Y direction; FIG. 4 is a schematic diagram of the circuit block structure of the displacement detection device according to the first embodiment of the present invention; FIG. 5 is an object provided by the second embodiment of the present invention FIG. 6 is a schematic flowchart of a method for measuring displacement of an object according to a fourth embodiment of the present invention.

為使本發明實施例的目的、技術方案和優點更加清楚,下面將結合本發明實施例中的附圖,對本發明實施例中的技術方案進行清楚、完整地描述,顯然,所描述的實施例是本發明一部分實施例,而不是全部的實施例。基於本發明中的實施例,本領域普通技術人員在沒有作出創造性勞動前提下所獲得的所有其他實施例,都屬於本發明保護的範圍。 In order to make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of the embodiments of the present invention, but not all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

實施例一 Example one

圖1A是本發明實施例一提供的位移偵測裝置中物體位於分光元件和感測元件之間的剖面結構示意圖,圖1B是本發明實施例一提供的位移偵測裝置中物體位於分光元件和光學元件之間的剖面結構示意圖,圖2A-2B是本發明實施例一提供的位移偵測裝置在測量物體沿著X方向的位移的立體結構示意圖,圖3A-3B是本發明實施例一提供的位移偵測裝置在測量物體沿著Y方向位移的立體結構示意圖,圖4是本發明實施例一提供的位移偵測裝置的電路方框結構示意圖。 FIG. 1A is a schematic cross-sectional structure diagram of an object located between a spectroscopic element and a sensing element in a displacement detection device according to a first embodiment of the present invention, and FIG. 1B is an object located between the spectroscopic element and a spectroscopic element in a displacement detection device according to the first embodiment of the present invention. Schematic diagram of the cross-sectional structure between optical elements. Figures 2A-2B are schematic diagrams of the three-dimensional structure of the displacement detection device measuring the displacement of an object along the X direction according to the first embodiment of the present invention. Figures 3A-3B are the first embodiment of the present invention. A schematic diagram of the three-dimensional structure of the displacement detection device for measuring the displacement of an object along the Y direction. FIG. 4 is a schematic structural diagram of a circuit block of the displacement detection device according to the first embodiment of the present invention.

本實施例提供的位移偵測裝置用於對物體的位移進行測量,其中,位移偵測裝置可以應用在洗衣機、印表機、掃描器以及投影機等設備中,該些設備根據位移偵測裝置檢測到的部件位移變化控制設備執行相應的操作。其中,位移偵測裝置也可應用於任何用於偵測物體位移的電子裝置、設備或系統上。 The displacement detection device provided in this embodiment is used to measure the displacement of an object. The displacement detection device can be applied to equipment such as a washing machine, a printer, a scanner, and a projector. The detected component displacement change controls the device to perform corresponding operations. Among them, the displacement detection device can also be applied to any electronic device, equipment or system for detecting the displacement of an object.

請參見圖1A圖至圖4所示,本實施例中,位移偵測裝置包括:一發光元件101、一光學元件102、一分光元件104以及一感測元件106,其中,發光元件101用於提供光源,發光元件101具體為發光二極體、鐳射二極體、固態鐳射、液態鐳射、氣態鐳射、准分子鐳射及光纖鐳射的其中一者或至少二者以上所任意組合的群組,發光元件101發出的光線包括可見光及不可見光,即發光元件101發出的光線可以為可見光,也可以為不可見光,例如鐳射。其中,光學元件102設在發光元件101的一側,光學元件102用於將發光元件101發出的光線103轉換成一平行光束112,光學元件102具體可以為單凸光學元件或透鏡,或者,光學元件102為雙凸光學元件或透鏡。其中,分光元件104設置於光學元件102的一側,具體的,發光元件101位於光學元件102的一側,分光元件104位於光學元件102的另一側,即光學元件102位於發光元件101及分光元件104之間,分光元件104用於將光學元件102轉換的平行光束112劃分為多個平行光線105,分光元件104包括一光柵、一分光鏡、一棱鏡、一分光光學膜、一光纖耦合器、一光子晶體元件的其中一者或至少二者以上所任意組合的群組,例如,分光元件104可以由分光鏡、光柵和光子晶體元件組成。其中,感測元件106設置於分光元件104的一側,具體的,光學元件102位於分光元件104的一側,感測元件106位於 分光元件104的另一側,即分光元件104位於光學元件102及感測元件106之間,其中,感測元件106正對分光元件104,這樣便於分光元件104劃分出的多個平行光線105投射到感測元件106,感測元件106可以為位置感測器(PSD)、光耦合感測元件106(Charge-Coupled Device,CCD)、場效應半導體感測元件106(Complementary Metal-Oxide-Semiconductor,CMOS)、半導體感測元件106(Photo Detector)的其中一個,優選的,感測元件106為PSD。 Please refer to FIG. 1A to FIG. 4. In this embodiment, the displacement detecting device includes a light emitting element 101, an optical element 102, a light splitting element 104, and a sensing element 106. The light emitting element 101 is used for A light source is provided. The light emitting element 101 is specifically a light emitting diode, a laser diode, a solid-state laser, a liquid laser, a gaseous laser, an excimer laser, and an optical fiber laser. The light emitted by the element 101 includes visible light and invisible light, that is, the light emitted by the light emitting element 101 may be visible light or invisible light, such as laser. The optical element 102 is disposed on one side of the light emitting element 101. The optical element 102 is used to convert the light 103 emitted by the light emitting element 101 into a parallel light beam 112. The optical element 102 may specifically be a single convex optical element or a lens, or an optical element 102 is a lenticular optical element or lens. The light-splitting element 104 is disposed on one side of the optical element 102. Specifically, the light-emitting element 101 is on one side of the optical element 102, and the light-splitting element 104 is on the other side of the optical element 102, that is, the optical element 102 is on the light-emitting element 101 and the light Between the elements 104, the beam splitting element 104 is used to divide the parallel light beam 112 converted by the optical element 102 into a plurality of parallel rays 105. The beam splitting element 104 includes a grating, a beam splitter, a prism, a beam splitting optical film, and a fiber coupler. One or a combination of at least two of a photonic crystal element, for example, the spectroscopic element 104 may be composed of a spectroscope, a grating, and a photonic crystal element. The sensing element 106 is disposed on one side of the spectroscopic element 104. Specifically, the optical element 102 is positioned on one side of the spectroscopic element 104, and the sensing element 106 is positioned on the other side of the spectroscopic element 104, that is, the spectroscopic element 104 is positioned on the optical element 102. And the sensing element 106, where the sensing element 106 faces the beam splitting element 104, so that a plurality of parallel rays 105 divided by the beam splitting element 104 are projected onto the sensing element 106, and the sensing element 106 can be a position sensor (PSD), light-coupled device 106 (Charge-Coupled Device, CCD), field effect semiconductor sensor 106 (Complementary Metal-Oxide-Semiconductor, CMOS), semiconductor sensor 106 (Photo Detector) Preferably, the sensing element 106 is a PSD.

本實施例中,當一物體107位於分光元件104和感測元件106之間(圖1A所示),或者,一物體107位於分光元件104和光學元件102之間(如圖1B所示)時,物體107遮蔽一部分的該些平行光線105,物體107允許另一部分的該些平行光線105投射至感測元件106,投射到感測元件106上的平行光線105使得感測元件106產生一光線感測,當物體107在分光元件104及感測元件106之間移動時或當物體107在分光元件104及光學元件102之間移動時,依據物體移動的位置、速度及位移、光線被物體遮蔽的範圍以及其餘未被物體遮蔽的光線範圍,感測元件106會感測出不同的光線感測變化,這樣根據物體107位移時所對應產生的光線感測變化測量物體107的位移,即本實施例中,透過感測元件106感測到的光線感測測量物體107的位移,與現有技術相比,本實施例中,由於設置分光元件104,透過分光元件104使得平行光束112劃分為多個平行光線105,這樣各個平行光線105與感測元件106的感光區可以相對應,物體107移動時,物體107對其中的平行光線105遮擋時,感測元件106的感光區根據與平行光線105的對應關係可以準確地感測出光線變化,而且由於平行光線105與感測元件106的感光區相對應,所以即使物體107進行微小移動、震動或偏移狀態,感測元件106也可 以感測到,所以本實施例提供的位移偵測裝置透過感測元件106與光源搭配二次光學調整的平行光線105,大大提高了位移偵測裝置的靈敏度,實現了位移偵測裝置對物體107位移變化的高精度及時採集監測的目的,從而使得物體107位移測量更加準確和安全,更方便快捷的獲得物體107位置的變化。 In this embodiment, when an object 107 is located between the spectroscopic element 104 and the sensing element 106 (as shown in FIG. 1A), or an object 107 is located between the spectroscopic element 104 and the optical element 102 (as shown in FIG. 1B) The object 107 shields part of the parallel rays 105. The object 107 allows another part of the parallel rays 105 to be projected onto the sensing element 106. The parallel rays 105 projected on the sensing element 106 make the sensing element 106 produce a light sense. When the object 107 moves between the spectroscopic element 104 and the sensing element 106 or when the object 107 moves between the spectroscopic element 104 and the optical element 102, according to the position, speed and displacement of the object, the light is blocked by the object. Range and the remaining range of light that is not blocked by the object, the sensing element 106 will sense different light sensing changes, so that the displacement of the object 107 is measured according to the corresponding light sensing change when the object 107 is displaced, that is, this embodiment In the embodiment, compared with the prior art, in the present embodiment, because the light splitting element 104 is provided, the light splitting through the light sensing element 106 is used to transmit the light splitting element 104. The parallel light beam 112 is divided into a plurality of parallel light rays 105, so that each of the parallel light rays 105 and the photosensitive area of the sensing element 106 can correspond. When the object 107 moves, when the object 107 blocks the parallel light rays 105 therein, the light sensing element 106 receives light. The area can accurately sense the change of light according to the corresponding relationship with the parallel light 105, and since the parallel light 105 corresponds to the photosensitive area of the sensing element 106, even if the object 107 performs a slight movement, vibration or offset state, the sensing The element 106 can also be sensed, so the displacement detection device provided in this embodiment passes the sensing element 106 and the light source with the parallel optical adjustment 105 of the secondary optical adjustment, which greatly improves the sensitivity of the displacement detection device and realizes the displacement detection. The purpose of the device is to collect and monitor the displacement of the object 107 with high accuracy and timely, so that the displacement measurement of the object 107 is more accurate and safe, and the change of the position of the object 107 is obtained more conveniently and quickly.

因此,本實施例提供的位移偵測裝置,透過包括一發光元件101、一光學元件102、一分光元件104以及一感測元件106,其中,分光元件104可以平行光束112分割為多個平行光線105,而多個平行光線105可以與感測元件106的感光區一一對應,這樣物體107在分光元件104的其中一側移動時,將其中一些光線遮擋時,感測元件106根據與平行光線105的對應關係可以準確地感測到光線變化,這樣根據光線變化便可以測量出物體107的位移變化,與現有技術相比,本申請中的位移偵測裝置透過感測元件106與光源搭配二次光學調整的平行光線105,大大提高了位移偵測裝置的靈敏度,實現了位移偵測裝置對物體107位移變化的高精度及時採集監測的目的,從而使得物體107位移測量更加準確和安全,更方便快捷的獲得物體107位置的變化,解決了現有技術中位移檢測裝置對物體107位移的測量精度不高的技術問題。 Therefore, the displacement detection device provided in this embodiment includes a light emitting element 101, an optical element 102, a beam splitting element 104, and a sensing element 106. The beam splitting element 104 can be divided into a plurality of parallel rays by a parallel beam 112. 105, and a plurality of parallel light rays 105 may correspond to the light-sensitive area of the sensing element 106 one by one. In this way, when the object 107 moves on one side of the beam splitting element 104 and blocks some of the light rays, the sensing element 106 The corresponding relationship of 105 can accurately sense the change in light, so that the change in displacement of the object 107 can be measured according to the change in light. Compared with the prior art, the displacement detection device in this application matches the light source through the sensing element 106. The parallel optical 105 of the secondary optical adjustment greatly improves the sensitivity of the displacement detection device, and achieves the purpose of high-accuracy and timely collection and monitoring of the displacement change of the object 107 by the displacement detection device, thereby making the displacement measurement of the object 107 more accurate and safe. Obtain the change of the position of the object 107 conveniently and quickly, and solve the displacement of the object 107 by the displacement detection device in the prior art Measurement accuracy is not high technical issues.

進一步的,在上述實施例的基礎上,本實施例中,為了方便物體107在分光元件104及感測元件106之間移動,分光元件104及感測元件106之間具有一物體位移測量空間,這樣物體107可以在物體位移測量空間中進行移動,或者,本實施例中,由於物體107也可以分光元件104及光學元件102之間移動,所以,可以在分光元件104及光學元件102之間具有一物體位移測量空間,這樣物體107便可以在分光元件104及光學元件102之間的 物體位移測量空間中進行移動。 Further, on the basis of the above embodiment, in this embodiment, in order to facilitate the movement of the object 107 between the spectroscopic element 104 and the sensing element 106, there is an object displacement measurement space between the spectroscopic element 104 and the sensing element 106. In this way, the object 107 can be moved in the object displacement measurement space, or, in this embodiment, since the object 107 can also move between the spectroscopic element 104 and the optical element 102, it is possible to have the object 107 between the spectroscopic element 104 and the optical element 102. An object displacement measurement space, so that the object 107 can be moved in the object displacement measurement space between the spectroscopic element 104 and the optical element 102.

進一步的,在上述實施例的基礎上,本實施例中,如圖1A所示,為了對發光元件101、光學元件102、分光元件104和感測元件106進行支撐,還包括:一固定架108,其中,固定架108包括兩端,且兩端之間具有可供物體107移動的空間,具體的,如圖1A所示,發光元件101、光學元件102和分光元件104位於固定架108的其中一端中,感測元件106位於固定架108的另一端中,且感測元件106與分光元件104相對,感測元件106和分光元件104之間具有可供物體107移動的空間,即發光元件101、光學元件102和分光元件104位於固定架108的同一側,感測元件106位於固定架108的另一側,或者,本實施例中,還可以將發光元件101和光學元件102位於固定架108的其中一端中,分光元件104和感測元件106位於固定架108的另一端中,且光學元件102與分光元件104之間具有可供物體107移動的空間,即發光元件101和光學元件102位於固定架108的同一側,分光元件104和感測元件106位於固定架108的另一側中,本實施例中,發光元件101、光學元件102、分光元件104和感測元件106透過固定架108組裝成一個整體部件。 Further, on the basis of the above embodiment, as shown in FIG. 1A, in order to support the light emitting element 101, the optical element 102, the light splitting element 104, and the sensing element 106, a fixing frame 108 is further included in this embodiment. Wherein, the fixed frame 108 includes two ends, and there is space for the object 107 to move between the two ends. Specifically, as shown in FIG. 1A, the light emitting element 101, the optical element 102 and the beam splitting element 104 are located in the fixed frame 108. In one end, the sensing element 106 is located in the other end of the fixed frame 108, and the sensing element 106 is opposite to the light splitting element 104. There is a space between the sensing element 106 and the light splitting element 104 for the object 107 to move, that is, the light emitting element 101 The optical element 102 and the beam splitting element 104 are located on the same side of the fixed frame 108, and the sensing element 106 is located on the other side of the fixed frame 108. Alternatively, in this embodiment, the light emitting element 101 and the optical element 102 may also be located on the fixed frame 108 In one of the ends, the spectroscopic element 104 and the sensing element 106 are located in the other end of the fixed frame 108, and there is a space for the object 107 to move between the optical element 102 and the spectroscopic element 104, that is, the light-emitting element. 101 and the optical element 102 are located on the same side of the fixed frame 108, and the light splitting element 104 and the sensing element 106 are located on the other side of the fixed frame 108. In this embodiment, the light emitting element 101, the optical element 102, the light splitting element 104, and the sensing element The element 106 is assembled into a single unit through the fixing frame 108.

其中,本實施例中,固定架108具體為U型結構,這樣U型結構之間的空間可供物體107進行移動。 In this embodiment, the fixing frame 108 is specifically a U-shaped structure, so that the space between the U-shaped structures can be used for the object 107 to move.

其中,本實施例中,固定架108的材料具體可以為矽膠、熱固性膠體、或者環氧樹脂,或者也可以為矽膠、熱固性膠體和環氧樹脂中至少兩種的組合,例如可以為矽膠和熱固性膠體製成固定架108,或者也可以為矽膠、熱固性膠體和環氧樹脂三種材料製成的固定架108。 Wherein, in this embodiment, the material of the fixing frame 108 may specifically be a silicone gel, a thermosetting gel, or an epoxy resin, or a combination of at least two of the silicone gel, a thermosetting gel, and an epoxy resin, such as a silicone gel and a thermosetting resin. The fixing body 108 is made of colloid, or it can also be a fixing frame 108 made of three materials: silicone, thermosetting gel and epoxy.

進一步的,本實施例中,固定架108具有一出光面110,這樣 平行光束112或平行光線105可以從出光面110射出,同時,固定架108還具有一收光面111,這樣光線射入收光面111上時,收光面111可以接收該些光線,本實施例中,固定架108的出光面110和收光面111相對設置,且出光面110和收光面111之間具有可供為物體107移動的物體位移測量空間。 Further, in this embodiment, the fixing frame 108 has a light emitting surface 110, so that the parallel light beam 112 or the parallel light 105 can be emitted from the light emitting surface 110, and at the same time, the fixing frame 108 also has a light receiving surface 111, so that the light enters and receives When the light surface 111 is on, the light receiving surface 111 can receive these lights. In this embodiment, the light emitting surface 110 and the light receiving surface 111 of the fixing frame 108 are oppositely arranged, and there is a space between the light emitting surface 110 and the light receiving surface 111. A space is measured for the displacement of the object 107 moving.

進一步的,本實施例中,為了對感測元件106感測到的光線進行處理,本實施例中,還包括:一處理元件301,處理元件301與感測元件106電性相連,處理元件301用於處理感測元件106的光線感測變化,並產生物體107的位移數值,其中,本實施例中,還包括通訊元件303和記憶元件304,如圖4所示,通訊元件303和記憶元件304分別與處理元件301相連,處理元件301將獲得位移數值置於記憶元件304進行存儲。 Further, in this embodiment, in order to process the light sensed by the sensing element 106, this embodiment further includes a processing element 301, the processing element 301 is electrically connected to the sensing element 106, and the processing element 301 It is used to process the light sensing change of the sensing element 106 and generate the displacement value of the object 107. In this embodiment, the communication element 303 and the memory element 304 are also included. As shown in FIG. 4, the communication element 303 and the memory element 304 are respectively connected to the processing element 301, and the processing element 301 stores the obtained displacement value in the memory element 304 for storage.

進一步的,本實施例中,還包括:一顯示元件302,顯示元件302與處理元件301電性連接,用於顯示物體107的位移數值。 Further, in this embodiment, a display element 302 is further included, and the display element 302 is electrically connected to the processing element 301 for displaying the displacement value of the object 107.

進一步的,本實施例中,為了使得分光元件104將平行光束112劃分為多個平行光線105,具體的,分光元件104包括多個透光口109或透光窗,即光線透過透光口109或透光窗形成多個平行光線105,其中多個透光口109或透光窗相互平行且間隔均勻,其中,多個透光口109或透光窗可以橫向平行設置,或者也可以豎向平行設置,只要能將光束分割為相互平行的多個光線即可。 Further, in this embodiment, in order to make the beam splitting element 104 divide the parallel light beam 112 into a plurality of parallel rays 105, specifically, the beam splitting element 104 includes a plurality of light transmitting ports 109 or light transmitting windows, that is, light passes through the light transmitting ports 109. Or the light transmission window forms a plurality of parallel light rays 105, in which the plurality of light transmission ports 109 or the light transmission windows are parallel to each other and are evenly spaced. Among them, the plurality of light transmission ports 109 or the light transmission windows may be arranged horizontally in parallel, or may be vertical Set in parallel, as long as the beam can be divided into multiple rays parallel to each other.

本實施例中,具體的,如圖2A所示,分光元件204設在固定架208的一端上,感測元件106位於固定架208的另一端上,分光元件204上開設的多個透光口209沿著X軸方向間隔排成一排,分光元件204的透光口209發出的平行光線投射到感測元件106,當物體207置於平行光線中並沿著 X軸方向移動時(如圖2B所示),平行光線在物體207的遮擋下只有部分平行光線照射到感測元件106上,感測元件106感測光線的變化並將得到的脈衝類比電信號傳輸給處理元件301,處理元件301對得到的電信號經過放大、波形處理後轉化為數位信號,然後根據量測公式計算得到物體的位移,同時,處理元件301可將測量結果輸出給顯示單元302以直觀顯示出,並可同時輸出給記憶元件304進行存儲保存。 In this embodiment, specifically, as shown in FIG. 2A, the light-splitting element 204 is disposed on one end of the fixing frame 208, the sensing element 106 is located on the other end of the fixing frame 208, and a plurality of light-transmitting openings are opened on the light-splitting element 204. 209 are arranged in a row at intervals along the X-axis direction. The parallel light emitted by the light-transmitting opening 209 of the spectroscopic element 204 is projected to the sensing element 106. When the object 207 is placed in parallel light and moves in the X-axis direction (as shown in the figure) (Shown in FIG. 2B), under the shielding of the object 207, only a part of the parallel light irradiates the sensing element 106. The sensing element 106 senses the change of the light and transmits the obtained pulse analog electrical signal to the processing element 301. The processing element The obtained electric signal is converted into a digital signal after being amplified and processed by the waveform in 301, and then the displacement of the object is calculated according to the measurement formula. At the same time, the processing element 301 can output the measurement result to the display unit 302 for intuitive display, and can simultaneously display Output to the memory element 304 for storage.

其中,分光元件204上開設的多個透光口209除了如圖2A所示的排成多列外,還可以如圖3A所示,分光元件304上的多個透光口309沿著Y軸排成一列,分光元件304設在固定架308的一端上,感測元件106位於固定架308的另一端上,如圖3A,物體307置於平行光線中並沿著Y軸方向移動時(如圖3B所示),平行光線在物體307的遮擋下只有部分平行光線照射到感測元件106上,感測元件106感測光線的變化並將得到的脈衝類比電信號傳輸給處理元件301,處理元件301對得到的電信號經過放大、波形處理後轉化為數位信號,然後根據量測公式計算得到物體的位移,同時,處理元件301可將測量結果輸出給顯示單元302以直觀顯示出,並可同時輸出給記憶元件304進行存儲保存。 The plurality of light-transmitting openings 209 opened on the light-splitting element 204 may be arranged in multiple rows as shown in FIG. 2A, and as shown in FIG. 3A, the plurality of light-transmitting openings 309 on the light-splitting element 304 may be along the Y axis. Arranged in a row, the beam splitting element 304 is disposed on one end of the fixed frame 308, and the sensing element 106 is positioned on the other end of the fixed frame 308. As shown in FIG. 3A, when the object 307 is placed in parallel light and moves along the Y-axis direction (such as (As shown in FIG. 3B), only a part of the parallel light rays are irradiated onto the sensing element 106 under the obstruction of the object 307. The sensing element 106 senses the change of the light and transmits the obtained pulse analog electrical signal to the processing element 301 for processing. Element 301 converts the obtained electrical signal into digital signal after amplification and waveform processing, and then calculates the displacement of the object according to the measurement formula. At the same time, processing element 301 can output the measurement result to display unit 302 for intuitive display, and At the same time, it is output to the memory element 304 for storage.

其中,需要說明的是,分光元件304上的多個透光口309還可以排成十字型,這樣物體不管沿著X軸移動或者Y軸移動,感測元件106均可以感測到物體的位移變化。 It should be noted that the plurality of light-transmitting openings 309 on the light splitting element 304 can also be arranged in a cross shape, so that the object 106 can sense the displacement of the object regardless of whether the object moves along the X axis or the Y axis. Variety.

實施例二 Example two

圖5是本發明實施例二提供的物體位移的測量方法的流程示 意圖。 FIG. 5 is a schematic flowchart of an object displacement measurement method according to a second embodiment of the present invention.

本實施例提供一種物體位移的測量方法,具體使用上述實施例一的位移偵測裝置對物體的位移進行測量,測量方法如圖5所示,包括如下步驟: This embodiment provides a method for measuring the displacement of an object. Specifically, the displacement detection device of the first embodiment is used to measure the displacement of the object. The measurement method is shown in FIG. 5 and includes the following steps:

步驟21):提供一發光元件101,用於提供一光線;其中,發光元件101具體為發光二極體、鐳射二極體、固態鐳射、液態鐳射、氣態鐳射、准分子鐳射及光纖鐳射的其中一者或至少二者以上所任意組合的群組,本實施例中,光線包括可見光及不可見光,即發光元件101發出的光線可以為可見光,也可以為不可見光,例如鐳射。 Step 21): Provide a light-emitting element 101 for providing a light. The light-emitting element 101 is specifically a light-emitting diode, a laser diode, a solid-state laser, a liquid laser, a gas laser, an excimer laser, and an optical fiber laser. One or a combination of at least two or more of them. In this embodiment, the light includes visible light and invisible light, that is, the light emitted by the light emitting element 101 may be visible light or invisible light, such as laser.

步驟22):提供一光學元件102,用於將光線轉換成一平行光束112;其中,光學元件102具體可以為單凸光學元件或透鏡,或者,光學元件102為雙凸光學元件或透鏡。 Step 22): An optical element 102 is provided for converting light into a parallel light beam 112. The optical element 102 may be a single convex optical element or a lens, or the optical element 102 is a double convex optical element or a lens.

步驟23):提供一分光元件104,用於將平行光束112劃分為多個平行光線105;其中,分光元件104包括一光柵、一分光鏡、一棱鏡、一分光光學膜、一光纖耦合器、一光子晶體元件的其中一者或至少二者以上所任意組合的群組,例如,分光元件104可以由分光鏡、光柵和光子晶體元件組成。 Step 23): Provide a beam splitting element 104 for dividing the parallel light beam 112 into a plurality of parallel rays 105. The beam splitting element 104 includes a grating, a beam splitter, a prism, a beam splitting optical film, a fiber coupler, One of the photonic crystal elements or a group of any combination of at least two of them. For example, the spectroscopic element 104 may be composed of a spectroscope, a grating, and a photonic crystal element.

步驟24):提供一感測元件106,當一物體107位於分光元件104及感測元件106之間或位於分光元件104及光光元件之間時,物體107遮蔽一部分的該些平行光線105,物體107允許另一部分的該些平行光線105投射至感測元件106,感測元件106產生一光線感測; 其中,感測元件106具體可以為位置感測器(PSD)、光耦合感測元件106(CCD)、場效應半導體感測元件106(CMOS)、半導體感測元件106的其中一個,本實施例中,優選的,感測元件106為位置感測器(PSD),其中,PSD是將光點轉成連續位置資料的光電元件,可以提供極佳的解析度,快速回應和極佳線性度特性,可以適用寬範圍的光牆,這樣使得物體的位移檢測精度更高。 Step 24): Provide a sensing element 106. When an object 107 is located between the spectroscopic element 104 and the sensing element 106 or between the spectroscopic element 104 and the light-optic element, the object 107 shields a part of the parallel light rays 105, The object 107 allows another part of the parallel rays 105 to be projected onto the sensing element 106, and the sensing element 106 generates a light sensing; wherein the sensing element 106 may specifically be a position sensor (PSD), a light coupling sensing element One of 106 (CCD), field effect semiconductor sensing element 106 (CMOS), and semiconductor sensing element 106. In this embodiment, preferably, the sensing element 106 is a position sensor (PSD), where PSD is The photoelectric element that converts the light point into continuous position data can provide excellent resolution, fast response and excellent linearity characteristics. It can be applied to a wide range of light walls, which makes the displacement detection accuracy of the object higher.

其中,本實施例中,光學元件102位於發光元件101及分光元件104之間,分光元件104位於光學元件102及感測元件106之間,這樣發光元件101發出的光線經過光學元件102裝成平行光束112,平行光束112經過分光元件104分割為多個平行光束112,平行光束112在沒有物體107遮擋時可以射到感測元件106上,感測元件106產生一光線感測。 In this embodiment, the optical element 102 is located between the light-emitting element 101 and the light-splitting element 104, and the light-splitting element 104 is located between the optical element 102 and the sensing element 106. In this way, the light emitted by the light-emitting element 101 is installed in parallel through the optical element 102 The light beam 112 and the parallel light beam 112 are divided into a plurality of parallel light beams 112 by the beam splitting element 104. The parallel light beam 112 can be incident on the sensing element 106 when it is not blocked by the object 107, and the sensing element 106 generates a light sensor.

步驟25):當物體107在分光元件104及感測元件106之間移動時或當物體107在分光元件104及光學元件102之間移動時,感測元件106會反應出不同的光線感測變化,以及透過物體107位移時所對應產生的感測元件106的光線感測變化測量物體107的位移。 Step 25): When the object 107 moves between the spectroscopic element 104 and the sensing element 106 or when the object 107 moves between the spectroscopic element 104 and the optical element 102, the sensing element 106 reflects different light sensing changes , And the change in light sensing of the sensing element 106 corresponding to the displacement of the object 107 when the object 107 is displaced measures the displacement of the object 107.

其中,本實施例中,透過分光元件104將平行光束112分割為多個平行光線105,這樣物體107移動過程中,感測元件106可以感測到平行光線105的變化,根據光線的變化測量處出物體107的位移,本實施例中,由於平行光線105可以與感測元件106的感光區進行對應,這樣物體107即使微小移動,感測元件106也可以進行感測,所以,本實施例中,透過位移偵測裝置對物體107位移測量時,感測元件106與光源搭配二次光學調整的平行光線105配合,實現了對物體107位移變化的高精度及時採集監測的目 的,從而使得物體107位移測量更加準確和安全,更方便快捷的獲得物體107位置的變化,解決了現有技術中位移檢測裝置對物體107位移的測量精度不高的技術問題。 Wherein, in this embodiment, the parallel light beam 112 is divided into a plurality of parallel light rays 105 through the light splitting element 104, so that during the movement of the object 107, the sensing element 106 can sense the change of the parallel light rays 105, and measure the position according to the change of light rays. The displacement of the object 107 is shown in this embodiment. Since the parallel light 105 can correspond to the photosensitive area of the sensing element 106, even if the object 107 moves slightly, the sensing element 106 can also sense. Therefore, in this embodiment, When measuring the displacement of the object 107 through the displacement detection device, the sensing element 106 and the light source are matched with the parallel optical adjustment 105 of the secondary optical adjustment to achieve the purpose of high-precision and timely collection and monitoring of the change in the displacement of the object 107, so that the object 107 The displacement measurement is more accurate and safe, and it is more convenient and quick to obtain the change of the position of the object 107, which solves the technical problem that the displacement detection device does not measure the displacement of the object 107 accurately in the prior art.

進一步的,本實施例中,為了對感測元件106感測到的光線進行處理,本實施例中,還包括:提供一處理元件301,處理元件301與感測元件106電性相連,處理元件301用於處理感測元件106的光線感測變化,並產生物體107的位移數值, Further, in this embodiment, in order to process the light sensed by the sensing element 106, this embodiment further includes: providing a processing element 301, the processing element 301 is electrically connected to the sensing element 106, and the processing element 301 is used to process the light sensing change of the sensing element 106 and generate a displacement value of the object 107.

進一步的,本實施例中,還包括:提供一顯示元件302,顯示元件302與處理元件301電性連接,用於顯示物體107的位移數值。 Further, in this embodiment, a display element 302 is further provided, and the display element 302 is electrically connected to the processing element 301 for displaying the displacement value of the object 107.

為了方便物體107在分光元件104及感測元件106之間移動,分光元件104及感測元件106之間具有一物體位移測量空間,這樣物體107可以在物體位移測量空間中進行移動,或者,本實施例中,由於物體107也可以分光元件104及光學元件102之間移動,所以,可以在分光元件104及光學元件102之間具有一物體位移測量空間,這樣物體107便可以在分光元件104及光學元件102之間的物體位移測量空間中進行移動。 In order to facilitate the movement of the object 107 between the spectroscopic element 104 and the sensing element 106, there is an object displacement measurement space between the spectroscopic element 104 and the sensing element 106, so that the object 107 can be moved in the object displacement measurement space. In the embodiment, since the object 107 can also move between the beam splitting element 104 and the optical element 102, there can be an object displacement measurement space between the beam splitting element 104 and the optical element 102, so that the object 107 can be moved between the beam splitting element 104 and The object displacement between the optical elements 102 moves in the measurement space.

進一步的,本實施例中,為了使得分光元件104將平行光束112劃分為多個平行光線105,具體的,分光元件104包括多個透光口109或透光窗,即光線透過透光口109或透光窗形成多個平行光線105,其中多個透光口109或透光窗相互平行且間隔均勻,其中,多個透光口109或透光窗可以橫向平行設置,或者也可以豎向平行設置,只要能將光束分割為相互平行的多個光線即可。 Further, in this embodiment, in order to make the beam splitting element 104 divide the parallel light beam 112 into a plurality of parallel rays 105, specifically, the beam splitting element 104 includes a plurality of light transmitting ports 109 or light transmitting windows, that is, light passes through the light transmitting ports 109. Or the light transmission window forms a plurality of parallel light rays 105, in which the plurality of light transmission ports 109 or the light transmission windows are parallel to each other and are evenly spaced. Among them, the plurality of light transmission ports 109 or the light transmission windows may be arranged horizontally in parallel, or may be vertical Set in parallel, as long as the beam can be divided into multiple rays parallel to each other.

實施例三 Example three

本實施例中提供一種位移偵測裝置,具體的,位移偵測裝置包括:一發光二極體、一透鏡、一光柵和一PSD,即發光元件101為發光二級管,光學元件102為透鏡,分光元件104為光柵,感測元件106為PSD,其中,發光二極體用於提供一光線,透鏡設置於發光二極體的一側,透鏡用於將光線轉換成一平行光束112,光柵設置於透鏡的一側,光柵用於將平行光束112劃分為多個平行光線105,PSD設置於光柵的一側,具體的,透鏡位於發光二極體及光柵之間,光柵位於透鏡及位置感測器之間,其中,發光二極體、透鏡、光柵和PSD之間的位置關係可以上述實施例一中的發光元件101、光學元件102、分光元件104和感測元件106的位置關係,光柵及位置感測器之間具有一物體位移測量空間,這樣可以方便物體107在光柵和位置感測器之間移動,或者,本實施例中,也可以在光柵及透鏡之間具有一物體位移測量空間,這樣物體107可以在光柵及透鏡之間的物體位移測量空間移動,其中,本實施例中,當一物體107位於光柵及位置感測器之間或位於光柵及透鏡之間時,物體107遮蔽一部分的該些平行光線105,物體107允許另一部分的該些平行光線105投射至位置感測器,位置感測器產生一光線感測,具體的,PSD的靶面上會產生一條陰影帶或光線感測帶,當物體107在光柵及位置感測器之間移動時或當物體107在光柵及透鏡之間移動時,位置感測器會反應出不同的光線感測變化,其中,透過物體107位移時所對應產生的位置感測器的光線感測變化測量物體107的位移,具體的,透過測量陰影在PSD靶面上的左右偏移來反映物體107位置的變化。 This embodiment provides a displacement detection device. Specifically, the displacement detection device includes a light-emitting diode, a lens, a grating, and a PSD, that is, the light-emitting element 101 is a light-emitting diode, and the optical element 102 is a lens. The beam splitting element 104 is a grating and the sensing element 106 is a PSD. Among them, the light emitting diode is used to provide a light, the lens is arranged on one side of the light emitting diode, the lens is used to convert the light into a parallel light beam 112, and the grating is set On the side of the lens, the grating is used to divide the parallel beam 112 into a plurality of parallel rays 105. The PSD is arranged on the side of the grating. Specifically, the lens is located between the light-emitting diode and the grating, and the grating is located on the lens and position sensing. The positional relationship between the light emitting diode, the lens, the grating, and the PSD can be the positional relationship between the light emitting element 101, the optical element 102, the beam splitting element 104, and the sensing element 106 in the first embodiment. There is an object displacement measurement space between the position sensors, so that the object 107 can be easily moved between the grating and the position sensor, or, in this embodiment, it can also be There is an object displacement measurement space between the objects, so that the object 107 can move in the object displacement measurement space between the grating and the lens. In this embodiment, when an object 107 is located between the grating and the position sensor or between the grating and the position sensor, Between the lenses, the object 107 shields part of the parallel rays 105. The object 107 allows another part of the parallel rays 105 to be projected to the position sensor. The position sensor generates a light sensor. Specifically, the target of the PSD A shadow band or light sensing band will be generated on the surface. When the object 107 moves between the grating and the position sensor or when the object 107 moves between the grating and the lens, the position sensor will reflect different light. Sensing change, wherein the light sensing change of the position sensor generated when the object 107 is displaced measures the displacement of the object 107. Specifically, the position of the object 107 is reflected by measuring the left and right offset of the shadow on the PSD target surface The change.

與現有技術相比,本實施例中,透過光柵使得平行光束112 劃分為多個平行光線105,這樣各個平行光線105與PSD的感光區可以相對應,物體107移動時,物體107對其中的平行光線105遮擋時,PSD的感光區根據與平行光線105的對應關係可以準確地感測出光線變化,而且由於平行光線105與PSD的感光區相對應,所以即使物體107進行微小移動、震動或偏移狀態,PSD也可以感測到平行光線105變化,所以本實施例提供的位移偵測裝置透過PSD與光源搭配二次光學調整的平行光線105,大大提高了位移偵測裝置的靈敏度,實現了位移偵測裝置對物體107位移變化的高精度及時採集監測的目的,從而使得物體107位移測量更加準確和安全,更方便快捷的獲得物體107位置的變化。 Compared with the prior art, in this embodiment, the parallel light beam 112 is divided into a plurality of parallel light rays 105 through the grating. In this way, each parallel light beam 105 can correspond to the photosensitive area of the PSD. When the object 107 moves, the object 107 is parallel to it. When the light 105 is blocked, the photosensitive area of the PSD can accurately detect the change of light according to the corresponding relationship with the parallel light 105. Moreover, since the parallel light 105 corresponds to the photosensitive area of the PSD, even if the object 107 performs a small movement, vibration or bias The PSD can also detect the change of the parallel light 105 in the shifting state. Therefore, the displacement detection device provided in this embodiment uses the PSD and the light source in combination with the secondary optical adjustment of the parallel light 105 to greatly improve the sensitivity of the displacement detection device. The purpose of the displacement detection device is to collect and monitor the displacement of the object 107 with high accuracy and timely, so that the displacement measurement of the object 107 is more accurate and safe, and the change of the position of the object 107 is obtained more conveniently and quickly.

其中,本實施例中,PSD具體可以透過鍍膜塗布或膠材選用,進行選擇性波長透過,這樣PSD可以只對發光二極體發出的光線進行感測,達到抗干擾功能。 Wherein, in this embodiment, the PSD can be specifically selected through coating or adhesive material for selective wavelength transmission, so that the PSD can only sense the light emitted by the light emitting diode to achieve the anti-interference function.

其中,本實施例中,PSD中的感測元件的排列方式與光柵的方向保持一致,可以根據PSD中的感測元件的排列方式調整光柵的方向。 In this embodiment, the arrangement of the sensing elements in the PSD is consistent with the direction of the grating, and the orientation of the grating can be adjusted according to the arrangement of the sensing elements in the PSD.

其中,本實施例中,PSD具體可以為一維或二維PSD,而且,PSD可採用線陣PSD,用DSP實現PSD的程式控制驅動、信號處理和識別、細分、計算及通信等功能。PSD可設置在一個電路板上,電路板可包括處理元件和通訊單元,PSD可透過處理單元和通訊單元與一個遠端監測中心採用無線或有線方式實現同步光接收及傳遞即時位移監測。 Wherein, in this embodiment, the PSD may be a one-dimensional or two-dimensional PSD. Moreover, the PSD may adopt a linear array PSD, and use DSP to implement program control driving, signal processing and identification, subdivision, calculation, and communication functions of the PSD. The PSD can be set on a circuit board. The circuit board can include processing elements and communication units. The PSD can realize synchronous light reception and transmission of real-time displacement monitoring through the processing unit and communication unit and a remote monitoring center by wireless or wired means.

進一步的,在上述實施例的基礎上,本實施例中,為了對發光二極體、透鏡、光柵和PSD進行支撐,還包括:一固定架108,其中,固定架108包括兩端,且兩端之間具有可供物體107移動的空間,具體的,發 光二極體、透鏡和光柵位於固定架108的其中一端中,PSD位於固定架108的另一端中,且PSD與光柵相對,PSD和光柵之間具有可供物體107移動的空間,即發光二極體、透鏡和光柵位於固定架108的同一側,PSD位於固定架108的另一側,或者,本實施例中,還可以將發光二極體和透鏡位於固定架108的其中一端中,光柵和PSD位於固定架108的另一端中,且透鏡與光柵之間具有可供物體107移動的空間,即發光二極體和透鏡位於固定架108的同一側,光柵和PSD位於固定架108的另一側中,本實施例中,發光二極體、透鏡、光柵和PSD透過固定架108組裝成一個整體部件。 Further, on the basis of the above embodiment, in this embodiment, in order to support the light emitting diode, the lens, the grating, and the PSD, it further includes: a fixing frame 108, wherein the fixing frame 108 includes two ends, and two There is space for the object 107 to move between the ends. Specifically, the light emitting diode, the lens and the grating are located in one end of the fixed frame 108, and the PSD is located in the other end of the fixed frame 108. The PSD is opposite to the grating, and the PSD and There is space between the gratings for the object 107 to move, that is, the light emitting diode, the lens and the grating are located on the same side of the fixed frame 108, and the PSD is located on the other side of the fixed frame 108. Alternatively, in this embodiment, The diode and the lens are located in one end of the fixed frame 108, the grating and the PSD are located in the other end of the fixed frame 108, and there is a space between the lens and the grating for the object 107 to move, that is, the light emitting diode and the lens are located in the fixed On the same side of the frame 108, the grating and the PSD are located on the other side of the fixed frame 108. In this embodiment, the light emitting diode, the lens, the grating, and the PSD are assembled into an integral part through the fixed frame 108.

其中,本實施例中,固定架108具體為U型結構,這樣U型結構之間的空間可供物體107進行移動。 In this embodiment, the fixing frame 108 is specifically a U-shaped structure, so that the space between the U-shaped structures can be used for the object 107 to move.

其中,本實施例中,固定架108的材料具體可以為矽膠、熱固性膠體、或者環氧樹脂,或者也可以為矽膠、熱固性膠體和環氧樹脂中至少兩種的組合,例如可以為矽膠和熱固性膠體製成固定架108,或者也可以為矽膠、熱固性膠體和環氧樹脂三種材料製成的固定架108。 Wherein, in this embodiment, the material of the fixing frame 108 may specifically be a silicone gel, a thermosetting gel, or an epoxy resin, or a combination of at least two of the silicone gel, a thermosetting gel, and an epoxy resin, such as a silicone gel and a thermosetting resin. The fixing body 108 is made of colloid, or it can also be a fixing frame 108 made of three materials: silicone, thermosetting gel and epoxy.

進一步的,本實施例中,固定架108具有一出光面110,這樣平行光束112或平行光線105可以從出光面110射出,同時,固定架108還具有一收光面111,這樣光線射入收光面111上時,收光面111可以接收該些光線,本實施例中,固定架108的出光面110和收光面111相對設置,且出光面110和收光面111之間具有可供為物體107移動的物體位移測量空間。 Further, in this embodiment, the fixing frame 108 has a light emitting surface 110, so that the parallel light beam 112 or the parallel light 105 can be emitted from the light emitting surface 110. At the same time, the fixing frame 108 also has a light receiving surface 111, so that the light enters the receiving When the light surface 111 is on, the light receiving surface 111 can receive these lights. In this embodiment, the light emitting surface 110 and the light receiving surface 111 of the fixing frame 108 are oppositely arranged, and there is a space between the light emitting surface 110 and the light receiving surface 111. A space is measured for the displacement of the object where the object 107 moves.

進一步的,本實施例中,為了對PSD感測到的光線進行處理,本實施例中,還包括:一處理元件301,處理元件301與PSD電性相 連,處理元件301用於處理PSD的光線感測變化,並產生物體107的位移數值,即本實施例中,PSD將得到的脈衝類比電信號傳輸給處理元件301,處理元件301對得到的電信號經過放大、波形處理後轉化為數位信號,然後根據量測公式計算得到物體107的位移。 Further, in this embodiment, in order to process the light sensed by the PSD, the embodiment further includes a processing element 301, the processing element 301 is electrically connected to the PSD, and the processing element 301 is used to process the light of the PSD. The change is sensed and the displacement value of the object 107 is generated. That is, in this embodiment, the PSD transmits the obtained pulse analog electric signal to the processing element 301. The processing element 301 converts the obtained electric signal into a digital signal after amplification and waveform processing. , And then calculate the displacement of the object 107 according to the measurement formula.

進一步的,本實施例中,還包括:一顯示元件302,顯示元件302與處理元件301電性連接,用於顯示物體107的位移數值,這樣處理元件301可將測量結果輸出給顯示單元以直觀顯示出,並可同時輸出給記憶元件進行存儲保存。 Further, in this embodiment, it further includes: a display element 302. The display element 302 is electrically connected to the processing element 301 for displaying the displacement value of the object 107. In this way, the processing element 301 can output the measurement result to the display unit for intuitiveness. It is displayed and can be output to the memory element for storage at the same time.

進一步的,本實施例中,發光二極體發出的光線包括可見光及不可見光,即發光二極體發出的光線可以為可見光,也可以為不可見光,例如鐳射。 Further, in this embodiment, the light emitted by the light emitting diode includes visible light and invisible light, that is, the light emitted by the light emitting diode may be visible light or invisible light, such as laser.

進一步的,本實施例中,透鏡具體可以為單凸透鏡,或者,透鏡為雙凸透鏡。 Further, in this embodiment, the lens may specifically be a single convex lens, or the lens may be a double convex lens.

進一步的,本實施例中,為了使得光柵將平行光束112劃分為多個平行光線105,具體的,光柵包括多個透光口109或透光窗,即光線透過透光口109或透光窗形成多個平行光線105,其中多個透光口109或透光窗相互平行且間隔均勻,其中,多個透光口109或透光窗可以橫向平行設置,或者也可以豎向平行設置,只要能將光束分割為相互平行的多個光線即可,舉例來說,光柵包括相互平行的5個透光口109或透光窗,此時,PSD上的感光區的長度為x,則透過輸出電流值判斷,若為1/5或其倍數可得知目前狀態,透過PSD晶片特性可達到類數位的信號輸出。 Further, in this embodiment, in order to make the grating divide the parallel light beam 112 into a plurality of parallel rays 105, specifically, the grating includes a plurality of light transmitting ports 109 or light transmitting windows, that is, light passes through the light transmitting ports 109 or light transmitting windows. A plurality of parallel light rays 105 are formed, in which a plurality of light-transmitting ports 109 or light-transmitting windows are parallel to each other and spaced evenly. Among them, a plurality of light-transmitting ports 109 or light-transmitting windows may be arranged horizontally in parallel, or may be vertically parallel, provided The light beam can be divided into a plurality of parallel light rays. For example, the grating includes five light transmission ports 109 or light transmission windows that are parallel to each other. At this time, the length of the photosensitive area on the PSD is x, and the light is transmitted through the output. Judging the current value, if it is 1/5 or a multiple thereof, the current status can be known, and the digital signal output can be achieved through the characteristics of the PSD chip.

實施例四 Embodiment 4

圖6是本發明實施例四提供的物體位移的測量方法的流程示意圖。 FIG. 6 is a schematic flowchart of a method for measuring an object displacement according to a fourth embodiment of the present invention.

本實施例提供一種物體位移的測量方法,具體使用上述實施例三的位移偵測裝置對物體107的位移進行測量,測量方法,如圖6所示,包括如下步驟: This embodiment provides a method for measuring the displacement of an object. Specifically, the displacement detection device of the third embodiment is used to measure the displacement of the object 107. As shown in FIG. 6, the measurement method includes the following steps:

步驟41):提供一發光二級管,用於提供一光線; Step 41): providing a light-emitting diode for providing a light;

步驟42):提供一透鏡,用於將光線轉換成一平行光束112; Step 42): providing a lens for converting light into a parallel light beam 112;

步驟43):提供一光柵,用於將平行光束112劃分為多個平行光線105; Step 43): providing a grating for dividing the parallel light beam 112 into a plurality of parallel light rays 105;

步驟44):提供一PSD,當一物體107位於光柵及PSD之間或位於光柵及光光元件之間時,物體107遮蔽一部分的該些平行光線105,物體107允許另一部分的該些平行光線105投射至PSD,PSD產生一光線感測;其中,本實施例中,透鏡位於發光二級管及光柵之間,光柵位於透鏡及PSD之間,這樣發光二級管發出的光線經過透鏡裝成平行光束112,平行光束112經過光柵分割為多個平行光束112,平行光束112在沒有物體107遮擋時可以射到PSD上,PSD產生一光線感測。 Step 44): Provide a PSD. When an object 107 is located between the grating and the PSD or between the grating and the light-optical element, the object 107 blocks a part of the parallel rays 105, and the object 107 allows another part of the parallel rays. 105 is projected onto the PSD, and the PSD generates a light sensor. In this embodiment, the lens is located between the light-emitting diode and the grating, and the grating is located between the lens and the PSD. In this way, the light emitted by the light-emitting diode is assembled through the lens. The parallel light beam 112 is divided into a plurality of parallel light beams 112 by a grating. The parallel light beam 112 can be incident on the PSD when it is not blocked by the object 107, and the PSD generates a light sensor.

步驟45):當物體107在光柵及PSD之間移動時或當物體107在光柵及透鏡之間移動時,PSD會反應出不同的光線感測變化,以及透過物體107位移時所對應產生的PSD的光線感測變化測量物體107的位移。 Step 45): When the object 107 moves between the grating and the PSD or when the object 107 moves between the grating and the lens, the PSD will reflect different light sensing changes and the corresponding PSD generated when the object 107 is displaced through the object 107 The change in light sensing measures the displacement of the object 107.

其中,本實施例中,透過光柵將平行光束112分割為多個平行光線105,這樣物體107移動過程中,PSD可以感測到平行光線105的變化,根據光線的變化測量處出物體107的位移,本實施例中,由於平行光 線105可以與PSD的感光區進行對應,這樣物體107即使微小移動,PSD也可以進行感測,所以,本實施例中,透過位移偵測裝置對物體107位移測量時,PSD與光源搭配二次光學調整的平行光線105配合,實現了對物體107位移變化的高精度及時採集監測的目的,從而使得物體107位移測量更加準確和安全,更方便快捷的獲得物體107位置的變化,解決了現有技術中位移檢測裝置對物體107位移的測量精度不高的技術問題。 In this embodiment, the parallel light beam 112 is divided into a plurality of parallel light rays 105 through a grating, so that the PSD can sense the change of the parallel light rays 105 during the movement of the object 107, and measure the displacement of the object 107 according to the change of light rays. In this embodiment, since the parallel light 105 can correspond to the photosensitive area of the PSD, so that even if the object 107 moves slightly, the PSD can sense. Therefore, in this embodiment, the displacement of the object 107 is measured through the displacement detection device. At the same time, the PSD and the light source are matched with the parallel light 105 of the secondary optical adjustment to achieve the purpose of high-precision and timely collection and monitoring of the displacement of the object 107, so that the measurement of the displacement of the object 107 is more accurate and safe, and the object 107 is obtained more conveniently and quickly. The change of position solves the technical problem that the displacement detection device does not measure the displacement of the object 107 accurately in the prior art.

進一步的,本實施例中,為了對PSD感測到的光線進行處理,本實施例中,還包括:提供一處理元件301,處理元件301與PSD電性相連,處理元件301用於處理PSD的光線感測變化,並產生物體107的位移數值, 進一步的,本實施例中,還包括:提供一顯示元件302,顯示元件302與處理元件301電性連接,用於顯示物體107的位移數值。 Further, in this embodiment, in order to process the light sensed by the PSD, the embodiment further includes: providing a processing element 301, the processing element 301 is electrically connected to the PSD, and the processing element 301 is used to process the PSD. The light sense changes and generates a displacement value of the object 107. Further, in this embodiment, a display element 302 is further provided, and the display element 302 and the processing element 301 are electrically connected to display the displacement value of the object 107.

進一步的,本實施例中,光線包括可見光及不可見光,即發光二級管發出的光線可以為可見光,也可以為不可見光,例如鐳射。 Further, in this embodiment, the light includes visible light and invisible light, that is, the light emitted by the light emitting diode may be visible light or invisible light, such as laser.

進一步的,在上述實施例的基礎上,本實施例中,為了方便物體107在光柵及PSD之間移動,光柵及PSD之間具有一物體位移測量空問,這樣物體107可以在物體位移測量空間中進行移動,或者,本實施例中,由於物體107也可以光柵及透鏡之間移動,所以,可以在光柵及透鏡之間具有一物體位移測量空間,這樣物體107便可以在光柵及透鏡之間的物體位移測量空間中進行移動。 Further, on the basis of the above embodiment, in this embodiment, in order to facilitate the movement of the object 107 between the grating and the PSD, there is an object displacement measurement space between the grating and the PSD, so that the object 107 can be in the object displacement measurement space. Or in this embodiment, since the object 107 can also move between the grating and the lens, there can be an object displacement measurement space between the grating and the lens, so that the object 107 can be between the grating and the lens The object is moved in the measurement space.

進一步的,本實施例中,透鏡具體可以為單凸透鏡,或者,透鏡為雙凸透鏡。 Further, in this embodiment, the lens may specifically be a single convex lens, or the lens may be a double convex lens.

進一步的,本實施例中,為了使得光柵將平行光束112劃分為多個平行光線105,具體的,光柵包括多個透光口109或透光窗,即光線透過透光口109或透光窗形成多個平行光線105,其中多個透光口109或透光窗相互平行且間隔均勻,其中,多個透光口109或透光窗可以橫向平行設置,或者也可以豎向平行設置,只要能將光束分割為相互平行的多個光線即可。 Further, in this embodiment, in order to make the grating divide the parallel light beam 112 into a plurality of parallel rays 105, specifically, the grating includes a plurality of light transmitting ports 109 or light transmitting windows, that is, light passes through the light transmitting ports 109 or light transmitting windows. A plurality of parallel light rays 105 are formed, in which a plurality of light-transmitting ports 109 or light-transmitting windows are parallel to each other and spaced evenly. Among them, a plurality of light-transmitting ports 109 or light-transmitting windows may be arranged horizontally in parallel, or may be vertically parallel, as long as The beam can be divided into a plurality of parallel rays.

進一步的,本實施例中,發光二極體發出的光線包括可見光及不可見光,即發光二極體發出的光線可以為可見光,也可以為不可見光,例如鐳射。 Further, in this embodiment, the light emitted by the light emitting diode includes visible light and invisible light, that is, the light emitted by the light emitting diode may be visible light or invisible light, such as laser.

在本發明的描述中,需要理解的是,術語「中心」、「縱向」、「橫向」、「長度」、「寬度」、「厚度」、「上」、「下」、「前」、「後」、「左」、「右」、「豎直」、「水準」、「頂」、「底」、「內」、「外」等指示的方位或位置關係為基於附圖所示的方位或位置關係,僅是為了便於描述本發明和簡化描述,而不是指示或暗示所指的裝置或元件必須具有特定的方位、以特定的方位構造和操作,因此不能理解為對本發明的限制。 In the description of the present invention, it should be understood that the terms "center", "vertical", "horizontal", "length", "width", "thickness", "top", "bottom", "front", " The orientations or positional relationships indicated by "back", "left", "right", "vertical", "level", "top", "bottom", "inside", "outside", etc. are based on the orientation shown in the drawings Or the positional relationship is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, structure and operation in a specific orientation, so it cannot be understood as a limitation to the present invention.

在本發明的描述中,需要理解的是,本文中使用的術語「包括」和「具有」以及他們的任何變形,意圖在於覆蓋不排他的包含,例如,包含了一系列步驟或單元的過程、方法、系統、產品或設備不必限於清楚地列出的那些步驟或單元,而是可包括沒有清楚地列出的或對於這些過程、方法、產品或設備固有的其它步驟或單元。 In the description of the present invention, it should be understood that the terms "including" and "having" and any variants thereof used herein are intended to cover non-exclusive inclusions, for example, processes that include a series of steps or units, The method, system, product, or device is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or inherent to these processes, methods, products, or devices.

除非另有明確的規定和限定,術語「安裝」、「相連」、「連接」、「固定」等應做廣義理解,例如可以是固定連接,也可以是可拆卸連接, 或成為一體;可以是直接相連,也可以透過中間媒介間接相連,可以使兩個元件內部的連通或兩個元件的相互作用關係。對於本領域的普通技術人員而言,可以根據具體情況理解上述術語在本發明中的具體含義。此外,術語「第一」、「第二」等僅用於描述目的,而不能理解為指示或暗示相對重要性或者隱含指明所指示的技術特徵的數量。 Unless otherwise specified and limited, the terms "installation," "connected," "connected," and "fixed" should be understood in a broad sense, such as fixed connections, detachable connections, or integration; they can be Directly connected, or indirectly connected through an intermediate medium, can make the internal communication between two elements or the interaction between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations. In addition, the terms "first", "second", etc. are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated.

最後應說明的是:以上各實施例僅用於說明本發明的技術方案,而非對其限制;儘管參照前述各實施例對本發明進行了詳細的說明,本領域的普通技術人員應當理解:其依然可以對前述各實施例所記載的技術方案進行修改,或者對其中部分或者全部技術特徵進行等同替換;而這些修改或者替換,並不使相應技術方案的本質脫離本發明各實施例技術方案的範圍。 In the end, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not limited thereto. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: It is still possible to modify the technical solutions described in the foregoing embodiments, or to replace some or all of the technical features equivalently; and these modifications or replacements do not depart from the essence of the corresponding technical solutions of the technical solutions of the embodiments of the present invention. range.

Claims (22)

一種位移偵測裝置,包括:一發光元件,用於提供一光線;一光學元件,設置於該發光元件的一側,用於將該光線轉換成一平行光束;一分光元件,設置於該光學元件的一側,用於將該平行光束劃分為多個平行光線;以及一感測元件,設置於該分光元件的一側;其中,當一物體位於該分光元件及該感測元件之間或位於該分光元件及該光學元件之間時,該物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該感測元件,該感測元件產生一光線感測;其中,當該物體在該分光元件及該感測元件之間移動時或當該物體在該分光元件及該光學元件之間移動時,該感測元件會反應出不同的光線感測變化;其中,透過該物體位移時所對應產生的該感測元件的光線感測變化測量該物體的位移。     A displacement detection device includes: a light-emitting element for providing a light; an optical element disposed on one side of the light-emitting element for converting the light into a parallel light beam; a light-splitting element disposed on the optical element One side is used to divide the parallel light beam into a plurality of parallel light rays; and a sensing element is disposed on one side of the spectroscopic element; wherein when an object is located between the spectroscopic element and the sensing element or located When the beam splitting element and the optical element are in between, the object shields a part of the parallel light rays, the object allows the other part of the parallel light rays to be projected onto the sensing element, and the sensing element generates a light sensing; wherein, When the object moves between the spectroscopic element and the sensing element or when the object moves between the spectroscopic element and the optical element, the sensing element reflects different light sensing changes; The light sensing change of the sensing element corresponding to the displacement of the object measures the displacement of the object.     如請求項1所述的位移偵測裝置,其中該發光元件為發光二極體、鐳射二極體、固態鐳射、液態鐳射、氣態鐳射、准分子鐳射及光纖鐳射的其中一者或至少二者以上所任意組合的群組。     The displacement detection device according to claim 1, wherein the light emitting element is one or at least two of a light emitting diode, a laser diode, a solid state laser, a liquid laser, a gaseous laser, an excimer laser, and a fiber laser. Any combination of the above.     如請求項1所述的位移偵測裝置,還包括一固定架,其中該發光元件、該光學元件及該分光元件設置在該固定架的同一側,該感測元件設置在該 固定架的另一同側面上,或者,該發光元件、該光學元件設置在該固定架的同一側,該分光元件和該感測元件設置在該固定架的另一同側面上。     The displacement detection device according to claim 1, further comprising a fixing frame, wherein the light emitting element, the optical element, and the beam splitting element are disposed on the same side of the fixing frame, and the sensing element is disposed on another side of the fixing frame. On the same side, or the light emitting element and the optical element are disposed on the same side of the fixed frame, and the light splitting element and the sensing element are disposed on the other same side of the fixed frame.     如請求項1所述的位移偵測裝置,還包括一固定架,其中該固定架為U型結構。     The displacement detection device according to claim 1, further comprising a fixing frame, wherein the fixing frame has a U-shaped structure.     如請求項1所述的位移偵測裝置,還包括一固定架,其中該固定架具有一出光面和一收光面,且該出光面和該收光面之間具有一物體位移測量空間。     The displacement detection device according to claim 1, further comprising a fixing frame, wherein the fixing frame has a light emitting surface and a light receiving surface, and an object displacement measurement space is provided between the light emitting surface and the light receiving surface.     如請求項1所述的位移偵測裝置,還包括:一處理元件,用於處理該感測元件的光線感測變化,並產生該物體的位移數值,以及,一顯示元件,與所述處理元件電性連接,用於顯示該物體的位移數值。     The displacement detection device according to claim 1, further comprising: a processing element for processing a light sensing change of the sensing element and generating a displacement value of the object; and a display element and the processing The component is electrically connected to display the displacement value of the object.     如請求項1所述的位移偵測裝置,其中該光學元件為單凸光學元件或透鏡,或者,該光學元件為雙凸光學元件或透鏡。     The displacement detection device according to claim 1, wherein the optical element is a single convex optical element or a lens, or the optical element is a double convex optical element or a lens.     如請求項1所述的位移偵測裝置,其中該分光元件包括一光柵、一分光鏡、一棱鏡、一分光光學膜、一光纖耦合器、一光子晶體元件的其中一者或至少二者以上所任意組合的群組。     The displacement detection device according to claim 1, wherein the beam splitting element comprises one or at least two of a grating, a beam splitter, a prism, a beam splitting optical film, a fiber coupler, and a photonic crystal element. Any combination of groups.     如請求項1所述的位移偵測裝置,其中該分光元件包括多個透光口或透光窗。     The displacement detection device according to claim 1, wherein the light splitting element includes a plurality of light transmitting ports or light transmitting windows.     如請求項1所述的位移偵測裝置,其中該感測元件包括位置感測器 PSD、光耦合感測元件CCD、場效應半導體感測元件CMOS、半導體感測元件的其中一者。     The displacement detection device according to claim 1, wherein the sensing element comprises one of a position sensor PSD, a light-coupled sensing element CCD, a field-effect semiconductor sensing element CMOS, and a semiconductor sensing element.     一種物體位移的測量方法,包括:提供一發光元件,用於提供一光線;提供一光學元件,用於將該光線轉換成一平行光束;提供一分光元件,用於將該平行光束劃分為多個平行光線;提供一感測元件;當一物體位於該分光元件及該感測元件之間或位於該分光元件及該光學元件之間時,該物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該感測元件,該感測元件產生一光線感測;當該物體在該分光元件及該感測元件之間移動時或當該物體在該分光元件及該光學元件之間移動時,該感測元件會反應出不同的光線感測變化;以及透過該物體位移時所對應產生的該感測元件的光線感測變化測量該物體的位移。     An object displacement measurement method includes: providing a light emitting element for providing a light beam; providing an optical element for converting the light beam into a parallel beam; providing a beam splitting element for dividing the parallel beam into a plurality of beams; Parallel light; providing a sensing element; when an object is located between the spectroscopic element and the sensing element or between the spectroscopic element and the optical element, the object shields a portion of the parallel light, and the object allows another A part of the parallel light is projected onto the sensing element, and the sensing element generates a light sensing; when the object moves between the spectroscopic element and the sensing element or when the object moves between the spectroscopic element and the optical element When the elements move, the sensing element reflects different light sensing changes; and the displacement of the object is measured through the light sensing changes of the sensing element that are generated when the object is displaced.     如請求項11所述的物體位移的測量方法,還包括:提供一處理元件,用於處理該感測元件的光線感測變化,而產生該物體的位移數值。     The method for measuring the displacement of an object according to claim 11, further comprising: providing a processing element for processing a change in light sensing of the sensing element to generate a displacement value of the object.     如請求項12所述的物體位移的測量方法,還包括:提供一顯示元件,與該處理元件電性連接,用於顯示該物體的位移數值。     The method for measuring the displacement of an object according to claim 12, further comprising: providing a display element electrically connected to the processing element for displaying the displacement value of the object.     如請求項11所述的物體位移的測量方法,其中該分光元件包括一光柵、一分光鏡、一棱鏡、一分光光學膜、一光纖耦合器、一光子晶體元件的其中一者或至少二者以上所任意組合的群組。     The method for measuring an object displacement according to claim 11, wherein the beam splitting element includes one or at least two of a grating, a beam splitter, a prism, a beam splitting optical film, a fiber coupler, and a photonic crystal element Any combination of the above.     如請求項11所述的物體位移的測量方法,其中該分光元件包括多個透光口或透光窗。     The method for measuring the displacement of an object according to claim 11, wherein the light splitting element includes a plurality of light transmitting ports or light transmitting windows.     如請求項11所述的物體位移的測量方法,其中該感測元件包括位置感測器PSD、光耦合感測元件CCD、場效應半導體感測元件CMOS、半導體感測元件的其中一者。     The method for measuring an object displacement according to claim 11, wherein the sensing element includes one of a position sensor PSD, a light-coupled sensing element CCD, a field effect semiconductor sensing element CMOS, and a semiconductor sensing element.     一種位移偵測裝置,包括:一發光二極體,用於提供一光線;一透鏡,設置於該發光二極體的一側,用於將該光線轉換成一平行光束;一光柵,設置於該透鏡的一側,用於將該平行光束劃分為多個平行光線;以及一位置感測器,設置於該光柵的一側;其中,當一物體位於該光柵及該位置感測器之間或位於該光柵及該透鏡之間時,該物體遮蔽一部分的該些平行光線,該物體允許另一部分的該些平行光線投射至該位置感測器,該位置感測器產生一光線感測;其中,當該物體在該光柵及該位置感測器之間移動時或當該物體在該光柵及該透鏡之間移動時,該位置感測器會反應出不同的光線感測變化;其中,透過該物體位移時所對應產生的該位置感測器的光線感測變化 測量該物體的位移。     A displacement detection device includes: a light-emitting diode for providing a light; a lens provided on one side of the light-emitting diode for converting the light into a parallel light beam; and a grating provided on the light-emitting diode. One side of the lens is used to divide the parallel beam into multiple parallel rays; and a position sensor is disposed on one side of the grating; wherein when an object is located between the grating and the position sensor or When located between the grating and the lens, the object shields a portion of the parallel light rays, the object allows the other portion of the parallel light rays to be projected to the position sensor, and the position sensor generates a light sensor; , When the object moves between the grating and the position sensor or when the object moves between the grating and the lens, the position sensor will reflect different light sensing changes; The displacement of the object is measured by the light sensing change of the position sensor corresponding to the displacement of the object.     如請求項17所述的位移偵測裝置,還包括一固定架,其中該發光二極體、該透鏡及該光柵設置在該固定架的同一側,該位置感測器設置在該固定架的另一同側面上,或者,該發光二極體、該透鏡設置在該固定架的同一側,該光柵和該位置感測器設置在該固定架的另一同側面上。     The displacement detection device according to claim 17, further comprising a fixing frame, wherein the light emitting diode, the lens and the grating are disposed on the same side of the fixing frame, and the position sensor is disposed on the fixing frame. On the other side, or the light emitting diode and the lens are disposed on the same side of the fixed frame, and the grating and the position sensor are provided on the other side of the fixed frame.     如請求項17所述的位移偵測裝置,還包括一固定架,其中該固定架為U型結構。     The displacement detecting device according to claim 17, further comprising a fixing frame, wherein the fixing frame has a U-shaped structure.     如請求項17所述的位移偵測裝置,還包括一固定架,其中該固定架具有一出光面和一收光面,且該出光面和該收光面之間具有一物體位移測量空間。     The displacement detecting device according to claim 17, further comprising a fixing frame, wherein the fixing frame has a light emitting surface and a light receiving surface, and an object displacement measurement space is provided between the light emitting surface and the light receiving surface.     如請求項17所述的位移偵測裝置,還包括一處理元件,用於處理該位置感測器的光線感測變化,並產生該物體的位移數值。     The displacement detection device according to claim 17, further comprising a processing element, configured to process a change in light sensing of the position sensor, and generate a displacement value of the object.     如請求項21所述的位移偵測裝置,還包括一顯示元件,與該處理元件電性連接,用於顯示該物體的位移數值。     The displacement detection device according to claim 21, further comprising a display element electrically connected to the processing element for displaying a displacement value of the object.    
TW107127636A 2017-08-09 2018-08-08 A displacement sensor device and object displacement measurement method TWI666422B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201762542812P 2017-08-09 2017-08-09
US62/542,812 2017-08-09

Publications (2)

Publication Number Publication Date
TW201910719A true TW201910719A (en) 2019-03-16
TWI666422B TWI666422B (en) 2019-07-21

Family

ID=65418032

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107127636A TWI666422B (en) 2017-08-09 2018-08-08 A displacement sensor device and object displacement measurement method

Country Status (3)

Country Link
JP (1) JP2019032325A (en)
CN (1) CN109387148A (en)
TW (1) TWI666422B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111947574A (en) * 2020-08-07 2020-11-17 珠海格力电器股份有限公司 Smoke stove integrated machine, position detection method and position detection device
CN114152194B (en) * 2021-11-16 2022-10-04 华中科技大学 Micro-displacement measuring device and method based on reflection grating

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1061466A3 (en) * 1999-06-10 2003-07-16 Konica Corporation Optical pickup device and optical type surface displacement detecting apparatus
JP4496955B2 (en) * 2004-12-28 2010-07-07 セイコーエプソン株式会社 Droplet discharge device
TWI268339B (en) * 2005-05-25 2006-12-11 Ind Tech Res Inst Displacement measuring device and method, an internal diameter measuring device by use of the variance of the wavelength to measure the displacement and the internal diameter
JP5905729B2 (en) * 2011-10-26 2016-04-20 Dmg森精機株式会社 Displacement detector
CN102589422B (en) * 2011-12-16 2014-10-15 哈尔滨工业大学 Orthogonal light path two-dimensional micro-focus collimation and three-dimensional coordinate sensor
JP6427399B2 (en) * 2014-04-14 2018-11-21 Dmg森精機株式会社 Displacement detection device

Also Published As

Publication number Publication date
CN109387148A (en) 2019-02-26
JP2019032325A (en) 2019-02-28
TWI666422B (en) 2019-07-21

Similar Documents

Publication Publication Date Title
WO2018091640A3 (en) Detector for optically detecting at least one object
JP2004521355A (en) Optical distance measuring device
US11269065B2 (en) Muilti-detector with interleaved photodetector arrays and analog readout circuits for lidar receiver
CN104713474B (en) A kind of multiple beam ladder planar reflector laser interference instrument
TWI666422B (en) A displacement sensor device and object displacement measurement method
CN106524921B (en) A kind of high precision and large measuring range double-layer nanometer grating micro-displacement detection device
US10801896B2 (en) Sequential beam splitting in a radiation sensing apparatus
JP2009222616A (en) Method and apparatus for measuring azimuth
CN110609299A (en) Three-dimensional imaging system based on TOF
CN108594258B (en) Doppler effect-based correction type speed measurement sensor and calibration and measurement method thereof
JP6402272B1 (en) Thickness measuring device and thickness measuring method
CN103940341A (en) Displacement and inclination angle integrated test instrument
JP2007010556A (en) Optical range finding sensor, and equipment provided therewith
US11293799B2 (en) Chromatic confocal sensor
KR20140001299A (en) Laser radar system for 3d image detection with photo-detectors array
KR101628761B1 (en) surface shape measuring appatstus using asymmetric interferometer
CN103913217A (en) Elevator spindle vibration detection method based on PSD laser triangulation method
CN204085453U (en) A kind of laser vibrometer, displacement transducer
KR20100134351A (en) Beam width measurement method and system using optical grating panel
Marszalec et al. A photoelectric range scanner using an array of LED chips
JP2009098003A (en) Vibration displacement detecting device and method of detecting displacement and vibration
JPH06258040A (en) Laser displacement meter
JPH11142110A (en) Charge coupled device photodetector and distance measuring apparatus using the same
KR100326170B1 (en) Measuring device for waveguides pitch of optical device
JPS62291511A (en) Distance measuring apparatus

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees