TW201843725A - Workpiece cutting method and joining member - Google Patents

Abstract

The present invention is a wire-saw-based workpiece cutting method in which a fixed abrasive particle wire, to the surface of which are bonded abrasive particles, is wrapped around a plurality of grooved rollers to form a wire array, and, while reciprocatingly running the fixed abrasive particle wire in the axial direction thereof, a workpiece held by a workpiece holding means via a joining member bonded to the workpiece is delivered toward and cut into by the wire array, thereby simultaneously cutting the workpiece at a plurality of locations along the axial direction thereof, wherein a joining member partially constituted by a grindstone is used so that, after the workpiece has finished being cut and before the workpiece is pulled away from the wire array, the fixed abrasive particle wire is abraded by the grindstone forming the joining member. As a result, a workpiece cutting method is provided that is capable of suppressing the formation of saw marks and the occurrence of wire breakage caused by the fixed abrasive particle wire catching on the workpiece when the wire is withdrawn after the workpiece has been cut.

Description

Cutting method of workpiece and joining member

The present invention relates to a method for cutting a workpiece and a joining member.

Conventionally, as a method of cutting out a wafer from a workpiece such as a silicon ingot or a compound semiconductor ingot, a wire saw having a fixed abrasive steel wire with abrasive particles fixed on its surface is known. Among the wire abrasive saws of the fixed abrasive method, as in Patent Document 1, for example, a fixed abrasive steel wire for cutting is wound around a plurality of rollers multiple times to form a steel wire array, and the abrasive steel wire is fixed. It is driven at high speed in the axial direction, and the machining fluid is appropriately supplied and the workpiece is cut by feeding the steel wire array, so that the workpiece is cut at the same time at each steel wire position.

Here, an outline of an example of a wire saw using a general fixed abrasive steel wire is shown in FIG. 5. As shown in FIG. 5, the fixed abrasive grain type wire saw 101 mainly includes the following: a fixed abrasive grain steel wire 102 for cutting a workpiece W with a fixed abrasive grain on a surface of a steel wire (high tension steel wire), a coil The grooved roller 103 and the grooved roller 103 'around which the fixed abrasive steel wire 102 is wound, and the steel wire array 111 composed of the fixed abrasive steel wire 102 wound around the grooved roller 103 and the grooved roller 103' are used. A mechanism 104 and a mechanism 104 'for applying tension to the fixed abrasive steel wire 102, a mechanism 105 for sending the cut workpiece W downward, and a mechanism 106 for supplying a cooling liquid 109 (also called a coolant) during cutting. .

The fixed abrasive steel wire 102 is sent out from a steel wire reel 107 at one end, passes through the tension imparting mechanism 104, and enters the grooved roller 103. The fixed abrasive steel wire 102 is wound about 300 to 400 times with the grooved roller 103 and the grooved roller 103 ', and then is wound up to the steel wire reel 107' by the tension applying mechanism 104 'at the other end.

In addition, the grooved roller 103 and the grooved roller 103 'are rollers that press the polyurethane resin into the periphery of a steel drum and cut grooves at a certain interval on the surface. The fixed abrasive steel wire 102 that is wound can be borrowed. The driving motor 110 is driven in a reciprocating direction at a predetermined cycle.

In addition, as shown in FIG. 6, the workpiece feed mechanism 105 in FIG. 5 includes a workpiece support mechanism 114 including a workpiece support portion 112 and a workpiece plate 113. The workpiece plate 113 is a joining member attached to the workpiece W ( Beam) 120 while bonding the workpiece W.

When the workpiece W is cut, the workpiece W is supported by the workpiece feed mechanism 105 and is relatively pushed down, so that the fixed abrasive steel wire 102 wound around the grooved roller 103 and the grooved roller 103 'is wound. The composed steel wire array 111 is sent out. At this time, an appropriate tension is applied to the fixed abrasive steel wire 102 using the steel wire tension applying mechanism 104, the fixed abrasive steel wire 102 is driven in a reciprocating direction by a driving motor 110, and a cooling liquid 109 is supplied through the nozzle 108 The workpiece W is cut and fed by the workpiece feeding mechanism 105 to cut the workpiece W into a wafer shape. In addition, after the cutting of the workpiece W is completed, the completed workpiece is moved in a direction opposite to that at the time of cutting, and the completed workpiece is pulled out from the steel wire array 111. [Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2011-20197

[Problems to be Solved by the Invention] In the wire saw shown in Figs. 5 and 6, the workpiece W is cut off by pushing and moving a fixed abrasive steel wire 102 wound around a grooved roller 103, so After the completion, the workpiece W is positioned below the steel wire array 111. Therefore, in order to pull out the workpiece W, it is necessary to move the workpiece W upwards, and the steel wire 102 must be pulled relatively downward through the gap of the wafer-shaped workpiece W.

At that time, when a fixed abrasive steel wire is used, as shown in FIG. 7, no clearance is generated between the fixed abrasive steel wire 102 and the workpiece W. Therefore, the fixed abrasive steel wire 102 is not easy to pull out, and the workpiece W is caught and the fixed abrasive steel wire 102 floats. Once the fixed abrasive steel wire 102 is pulled out in this state, the cut surface will be damaged and the cut Sections are prone to so-called saw marks, so Warp deteriorates and impairs quality. In addition, when the floating of the fixed abrasive steel wire 102 becomes large, the steel wire may be broken. If the steel wire is broken, it takes time to rewind the fixed abrasive steel wire 102 to the grooved roller 103 and the grooved roller 103 '. In addition, there must be an additional rewinding amount of the fixed abrasive steel wire 102, etc. Wait, the losses are considerable.

In view of the problems as described above, an object of the present invention is to provide a method for cutting a workpiece and a joining member, which can prevent the occurrence of saw marks caused by the steel wire stuck by the fixed abrasive grains when the steel wire is pulled out after the workpiece is cut. And the occurrence of broken wire. [Technical means to solve problems]

In order to achieve the above object, the present invention provides a cutting method of a workpiece, which is performed by a wire saw. The wire saw is formed by winding a fixed abrasive steel wire with abrasive particles fixed on a surface around a plurality of attached steel wires. Groove rollers form a steel wire array, the fixed abrasive steel wire is driven back and forth in the axial direction, and a workpiece supported by a workpiece supporting mechanism through a joining member attached to the workpiece is cut into the steel wire array and fed , And the workpiece is cut at a plurality of positions arranged in the axial direction at the same time. Among them, a part of the grindstone is used as the joining member. After the cutting of the workpiece is finished and before the workpiece is pulled out from the steel wire column , The fixed abrasive steel wire is abraded by the grinding stone of the joining member.

According to the cutting method of the workpiece of the present invention, the fixed abrasive steel wire can be worn by the grinding stone of the joining member located between the workpiece and the workpiece supporting mechanism before the workpiece is pulled out from the steel wire array, so the workpiece can be prevented Occurrence of seizure of the fixed abrasive steel wire when pulling out. Therefore, according to the cutting method of the workpiece of the present invention, it is possible to prevent the occurrence of saw marks and wire breakage due to the workpiece being stuck by the fixed abrasive steel wire.

In addition, it is preferable to use a WA (White Alundum) grindstone as the grindstone constituting a part of the joint member.

By using the WA grindstone in this way, it is possible to more effectively wear the fixed abrasive steel wire, and it is possible to more reliably prevent the seizure of the fixed abrasive steel wire from being pulled out of the workpiece.

In addition, as the WA grindstone constituting a part of the joining member, it is preferable to use an abrasive grain number # 100 to # 10,000.

In this way, the abrasive grain number of the WA grinding stone is # 100 ~ # 10,000, which can particularly effectively wear the fixed abrasive steel wire, and can more reliably prevent the fixed abrasive steel wire from being stuck.

In addition, in order to achieve the above object, the present invention provides a joining member that is attached to a surface of the workpiece supporting mechanism supporting side of a workpiece supported by a workpiece supporting mechanism of a wire saw, wherein a part of the joining member is a grinding stone Constituted by.

The joint member according to the present invention can be positioned between the workpiece support mechanism of the wire saw and the workpiece when the workpiece is cut, and after the workpiece is cut and before the workpiece is pulled out, the abrasive grains of the wire saw are worn by the grinding stone. . Therefore, the joining member of the present invention can prevent the occurrence of saw marks and wire breakage due to the workpiece being stuck by the fixed abrasive steel wire.

At this time, the grinding stone constituting a part of the joining member is preferably a WA grinding stone.

In this way, the fixed abrasive steel wire can be worn more effectively, and the fixed abrasive steel wire can be more reliably prevented from being caught and the workpiece can be pulled out.

In addition, it is preferable that the WA grindstone constituting a part of the joint member has an abrasive grain number of # 100 to # 10,000.

In this way, the fixed abrasive steel wire can be worn particularly effectively, and the fixed abrasive steel wire can be more reliably prevented from being stuck.

In addition, the joining member is a laminated body, and the laminated system is composed of a layer on the workpiece attachment side and a layer on the workpiece support mechanism support side, and the layer on the workpiece attachment side is resin, carbon, sodium It is preferably composed of lime glass or silicon, and the layer on the support side of the workpiece support mechanism is preferably a workpiece support mechanism composed of a grinding stone.

If the layer on the workpiece attachment side is resin, charcoal, soda-lime glass, or silicon, it becomes a person who does not easily cause a flaw on the surface of the workpiece, and a person who can reliably wear the fixed abrasive steel wire with a grinding stone. [Contrast with the effect of the prior art]

According to the cutting method of the workpiece and the joining member of the present invention, since the workpiece can be pulled out by the worn steel wire, the clearance between the workpiece and the steel wire can be ensured, and no sawing caused by the seizure of the steel wire occurs. Pull out the workpiece in case of scratches or broken wires.

Hereinafter, embodiments of the present invention will be described, but the present invention is not limited thereto.

As mentioned above, when using a wire saw with a fixed abrasive steel wire, there is no gap between the cut workpiece and the fixed abrasive steel wire, which makes it difficult to pull out the fixed abrasive steel wire and jam the workpiece. When the fixed abrasive steel wire is floated, once the steel wire is pulled out in this state, the cut surface of the workpiece will be injured and the cut surface is prone to saw marks. Therefore, Warp will be deteriorated and the quality will be damaged. Further, when the floating of the fixed abrasive steel wire becomes large, there may be a case where the steel wire is disconnected, and when the steel wire is broken, it is necessary to take time to rewind the fixed abrasive steel wire to the attached Groove rollers, or fixed abrasive steel wires that require additional rewinding, etc., cause considerable loss.

Therefore, the present inventors conducted active research in order to solve such a problem, and as a result, it was found that, as a bonding member attached to a workpiece, a fixed abrasive grain steel wire is worn by using a part thereof as a grindstone, and the fixing can be performed without occurrence of fixing. When the abrasive steel wire is stuck, the workpiece is pulled out to complete the present invention.

First, a wire saw that can be used in the workpiece cutting method of the present invention will be described with reference to FIGS. 1 and 2. As shown in FIG. 1, the wire saw 1 includes a fixed abrasive steel wire 2 for cutting a workpiece W, a plurality of grooved rollers 3 and a grooved roller 3 ′ around which the fixed abrasive steel wire 2 is wound, and The steel line 11 between the grooved roller 3 and the grooved roller 3 ', the tension applying mechanism 4 and the tension applying mechanism 4' for applying tension to the fixed abrasive steel wire 2, can support the cut workpiece W and face the steel The in-line feed 11 is a work feed mechanism 5 that can move the workpiece W in a direction opposite to the cut feed direction, and a machining fluid supply mechanism 6 including a nozzle 8 that supplies a coolant 9 during cutting.

The wire saw 1 includes a set of steel wire reels 7 and a steel wire reel 7 '. The fixed abrasive steel wire 2 is sent out from a steel wire reel 7 at one end, passes through the tension imparting mechanism 4, and enters the grooved roller 3. The fixed abrasive steel wire 2 is wound about 300 to 400 times with the grooved roller 3 and the grooved roller 3 ', and then is wound up to the steel wire reel 7' by the tension applying mechanism 4 'at the other end. As the fixed abrasive steel wire 2, for example, diamond abrasive grains are nickel-plated on the surface of the piano wire.

In addition, the grooved roller 3 and the grooved roller 3 'are rollers that press polyurethane resin into the periphery of a steel drum and cut grooves on the surface of the steel drum at a certain interval. The driving motor 10 can reciprocate in the axial direction at a predetermined cycle.

In this jigsaw 1, the work W can be supported as shown in FIG. 2. In other words, the workpiece feeding mechanism 5 is a workpiece supporting mechanism 14 composed of a workpiece supporting portion 12 and a workpiece plate 13, and the joining member 20 is adhered to the workpiece W, and the joining member 20 is supported by the workpiece plate 13. Then, the work W can be supported by the work support portion 12 through the joining member 20 and the work plate 13.

Here, the joining member 20 is a joining member of the present invention. In other words, as shown in FIG. 2, the bonding member is partially composed of the grindstone 21.

As shown in FIG. 2, the bonding member 20 of the present invention is preferably a laminated body composed of a layer on the workpiece W application side and a layer on the workpiece support mechanism 14 support side, and the layer on the workpiece W application side is preferably resin 22. It is preferable that the layer on the support side of the workpiece support mechanism is composed of the grindstone 21. If the side to which the workpiece W is attached is made of resin, it is difficult to cause a flaw on the side surface of the workpiece W. The layer on the side to which the workpiece W is applied is not limited to the resin 22, but may be made of carbon, soda lime glass, or silicon. These materials are also less likely to scar the workpiece W.

Next, a method of cutting the work W using the wire saw 1 will be described with reference to FIGS. 1 to 3. As shown in FIGS. 1 and 2, in the wire saw 1, the fixed abrasive steel wire 2 is wound around a plurality of grooved rollers 3 and grooved rollers 3 ′ to form a steel wire array 11, and the fixed abrasive steel wire 2 is made. Drive back and forth in the axial direction, and through the joining member 20 attached to the workpiece W, the workpiece W supported by the workpiece supporting mechanism 14 is cut and fed into the steel wire array 11 by the workpiece feeding mechanism 5, thereby arranging in The workpiece W is cut at a plurality of positions in the axial direction at the same time.

In the present invention, after the cutting of the workpiece W is completed and before the workpiece W is pulled out from the steel wire array 11, the fixed abrasive steel wire 2 is worn by the grinding stone 21 of the joining member 20. Specifically, the fixed abrasive steel wire 2 can be worn as follows. In the cutting of the wire saw 1, as shown in FIG. 3, since the workpiece W is cut into the feed by the diameter of the workpiece W plus a margin, the bonding member 20 that adheres the workpiece W near the cutting end portion Part of it will be cut off. Therefore, by using at least a part of the cutting portion with the above-mentioned cut-in amount as the bonding member 20 of the grindstone 21, the fixed abrasive steel wire 2 can be worn when the steel wire 11 is cut into the grindstone 21 . Thereby, the clearance between the workpiece W and the fixed abrasive steel wire 2 when the workpiece W is pulled out from the steel wire array 11 can be ensured, and the occurrence of seizure of the fixed abrasive steel wire 2 and the pulling of the workpiece W can be prevented. Out. Therefore, according to the method for cutting a workpiece according to the present invention, it is possible to prevent the occurrence of saw marks caused by the fixed abrasive steel wire 2 from jamming the workpiece W and prevent the wire from being broken.

The type of the grindstone constituting a part of the joint member 20 is preferably a WA grindstone. By using the WA grindstone in this way, the fixed abrasive steel wire 2 can be effectively worn, and the occurrence of seizure of the fixed abrasive steel wire 2 can be prevented more reliably.

Furthermore, the abrasive grain number of the WA grindstone constituting a part of the joining member 20 is preferably # 100 to # 10,000. In this way, the number of the abrasive grains of the WA grindstone is # 100 to # 10,000, which can particularly effectively wear the fixed abrasive steel wire 2 and prevent the seizure of the fixed abrasive steel wire 2 more reliably. [Example]

Hereinafter, the present invention will be described in more detail by showing examples and comparative examples of the present invention, but the present invention is not limited to these examples.

(Example) A workpiece was cut using the workpiece cutting method of the present invention. As the cut workpiece, a cylindrical single crystal silicon ingot having a diameter of about 300 mm was used. In addition, as the steel wire for cutting, a fixed abrasive steel wire having diamond abrasive grains fixed to a core wire as shown in Table 1 below was used.

【Table 1】

In addition, the configuration of the joining member and the cutting conditions of the workpiece are set to the conditions shown in Table 2 below.

【Table 2】

As shown in Table 2, in the examples, a resin bonding member having a height of 10 mm and an WA grinder having a grit number of # 4,000 and a grit number of # 4,000 were bonded to each other using an epoxy-based adhesive as a bonding material. As shown in FIG. 4, the height of the bonding member was set to 30 mm. In addition, the cut-in amount to the WA millstone in the example was 5 mm.

As a result, breakage of the fixed abrasive steel wire did not occur at the time of drawing, and no saw mark was confirmed on the main surface of the cut wafer.

(Comparative Example) A single-crystal silicon ingot was cut under the same conditions as in the examples (Table 1, Table 2, and Figure 4), except that a conventional bonding member composed only of resin was used as the bonding member.

As a result, disconnection of the fixed abrasive steel wire at the time of drawing occurred, and a saw mark was confirmed on the main surface of the cut wafer.

The results in the above examples and comparative examples are summarized in Table 3 below.

【table 3】

In addition, the present invention is not limited to the above-mentioned embodiments. The above implementation mode is an example, and anyone who has the same technical idea and substantially the same structure as those described in the patent application scope of the present invention to produce the same effect is included in the technical scope of the present invention no matter what.

1‧‧‧Wire saw

2‧‧‧ fixed abrasive steel wire

3‧‧‧ with groove roller

3'‧‧‧ with groove roller

4‧‧‧ tension imparting mechanism

4'‧‧‧Tension imparting mechanism

5‧‧‧Workpiece feed mechanism

6‧‧‧Processing fluid supply mechanism

7‧‧‧ Steel Wire Reel

7'‧‧‧ Steel Wire Reel

8‧‧‧ Nozzle

9‧‧‧ Coolant

10‧‧‧Drive motor

11‧‧‧ Steel wire column

12‧‧‧ Workpiece support

13‧‧‧Workpiece plate

14‧‧‧Workpiece support mechanism

20‧‧‧Joint members

21‧‧‧ Millstone

22‧‧‧resin

W‧‧‧ Workpiece

101‧‧‧Wire saw

102‧‧‧ Fixed abrasive steel wire

103‧‧‧ with groove roller

103'‧‧‧ with groove roller

104‧‧‧Tension imparting mechanism

104’‧‧‧ tension imparting mechanism

105‧‧‧Workpiece feed mechanism

106‧‧‧Coolant supply mechanism

107‧‧‧ Steel Wire Reel

107’‧‧‧ steel wire reel

108‧‧‧ Nozzle

109‧‧‧ Coolant

110‧‧‧Drive motor

111‧‧‧steel wire column

112‧‧‧Work support

113‧‧‧Workpiece plate

114‧‧‧Workpiece support mechanism

120‧‧‧Joint member

FIG. 1 is a schematic diagram showing an example of a wire saw that can be used for a cutting method of a workpiece according to the present invention. FIG. 2 is a schematic diagram illustrating an example of a method for supporting a workpiece in a method for cutting a workpiece according to the present invention. Fig. 3 is a schematic diagram illustrating a method for cutting a workpiece according to the present invention. FIG. 4 is a schematic diagram illustrating a method for cutting a workpiece in Examples and Comparative Examples. FIG. 5 is a schematic diagram showing an example of a general wire saw. FIG. 6 is a schematic diagram showing an example of a workpiece supporting mechanism of a general wire saw. FIG. 7 is a view showing a state of a fixed abrasive steel wire located in a gap of a workpiece.

Claims (7)

A cutting method of a workpiece is performed by a wire saw. The wire saw is a fixed abrasive steel wire with abrasive grains fixed on the surface, and the steel wire is formed by winding around a plurality of grooved rollers. When the fixed abrasive steel wire is driven back and forth in the axial direction, a workpiece supported by a workpiece support mechanism through a joining member attached to the workpiece is cut into the steel wire row to feed the workpiece to A plurality of positions aligned in the axial direction are cut at the same time. Among them, a part of a grindstone is used as the joining member. After the cutting of the workpiece is completed and before the workpiece is pulled out from the steel wire array, the fixed grinding is performed. The grain steel wire is worn by the grinding stone of the joining member. The cutting method for a workpiece according to claim 1, wherein a WA grindstone is used as the grindstone constituting a part of the joining member. The method for cutting a workpiece according to claim 2, wherein the WA grindstone constituting a part of the joining member uses a grain number # 100 to # 10,000. A joining member is attached to a surface of the workpiece supporting mechanism supporting side of a workpiece supported by a workpiece supporting mechanism of a wire saw, wherein a part of the joining member is made of a grindstone. The joining member according to claim 4, wherein the grinding stone constituting a part of the joining member is a WA grinding stone. The joining member according to claim 5, wherein the WA grindstone system constituting a part of the joining member is an abrasive grain number # 100 to # 10,000. The joining member according to any one of claims 4 to 6, wherein the joining member is a laminated body, and the laminated system is composed of a layer on the workpiece attaching side and a layer on the supporting side of the workpiece supporting mechanism. The layer on the work attachment side is made of resin, carbon, soda lime glass or silicon, and the layer on the support side of the work support mechanism is made of grindstone.