A. 搬運固定治具之概要
圖1係本發明之一實施形態之搬運固定治具之概略剖視圖。搬運固定治具100具備第1基材10及設置於第1基材10上之奈米碳管集合體20。於一實施形態中，如圖示例般，於第1基材10與奈米碳管集合體20之間配置接著劑層30。於該實施形態中，第1基材10與奈米碳管集合體20經由接著劑層30而接合。奈米碳管集合體20包括複數個奈米碳管21。奈米碳管21沿長度L之方向配向，而奈米碳管集合體20構成為纖維狀柱狀構造體。奈米碳管21較佳為相對於第1基材10沿大致垂直方向配向。此處，所謂「大致垂直方向」係指相對於第1基材10之面之角度較佳為90°±20°，更佳為90°±15°，進而較佳為90°±10°，尤佳為90°±5°。 本發明之搬運固定治具可於保持並搬運面積為40 cm2
以上且重量為5 g以上之被搬運物時使用。再者，於本說明書中，所謂「面積」係指與供配置奈米碳管集合體之第1基材面對向而進行觀察時(自圖1之紙面上側進行觀察時)之俯視面積。因此，所謂被搬運物之面積係指搬運時與第1基材及奈米碳管集合體對向之面之面積。被搬運物之面積較佳為40 cm2
～3000 cm2
，更佳為75 cm2
～2000 cm2
，進而較佳為300 cm2
～1600 cm2
。又，被搬運物之重量較佳為5 g～600 g，更佳為10 g～500 g，進而較佳為40 g～400 g，尤佳為50 g～300 g。 本發明之搬運固定治具能夠利用奈米碳管集合體之黏著性保持被搬運物。若使用奈米碳管集合體，則能夠獲得不易污染被搬運物之搬運固定治具。本發明之搬運固定治具可適宜用於例如半導體元件之製造步驟、光學構件之製造步驟等。更詳細而言，本發明之搬運固定治具可用於在半導體元件製造中之步驟與步驟之間或特定步驟內，移送材料、製造中間品、製品等(具體而言，半導體材料、晶圓、晶片、電子零件、膜等)被搬運物。又，可用於在光學構件製造中之步驟間或特定步驟內，移送玻璃基板等被搬運物。又，本發明之搬運固定治具亦可為能夠把持被搬運物之形態。 較佳為，奈米碳管集合體20設置於第1基材10之一部分面上。又，較佳為，奈米碳管集合體20於第1基材10之一部分面上設置複數個。奈米碳管集合體較佳為以被搬運物能夠相對於第1基材表面大致平行地保持之方式配置，例如，較佳為於第1基材上設置有3個以上(較佳為3～8，更佳為3～5，尤佳為4)奈米碳管集合體。又，於本發明之搬運固定治具中，以被搬運物能夠與全部奈米碳管集合體接觸之方式配置奈米碳管集合體。 奈米碳管集合體平均每個之面積(表觀面積)較佳為8 mm2
～60 mm2
，更佳為9 mm2
～50 mm2
，進而較佳為9 mm2
～40 mm2
，尤佳為9 mm2
～30 mm2
，最佳為9 mm2
～20 mm2
。再者，此處之面積如上所述係與配置有奈米碳管集合體之第1基材面對向而進行觀察時(自圖1之紙面上側進行觀察時)之俯視面積。 奈米碳管集合體之總面積(表觀面積)較佳為30 mm2
～240 mm2
，更佳為35 mm2
～200 mm2
，進而較佳為35 mm2
～160 mm2
，尤佳為35 mm2
～120 mm2
，最佳為35 mm2
～80 mm2
。 奈米碳管集合體較佳為以於載置有被搬運物時對奈米碳管集合體施加之荷重成為0.05 kg/cm2
以上之方式構成，更佳為以成為0.06 kg/cm2
～1 kg/cm2
之方式構成，進而較佳為以成為0.07 kg/cm2
～0.7 kg/cm2
之方式構成，進而較佳為以成為0.08 kg/cm2
～0.6 kg/cm2
之方式構成，尤佳為以成為0.09 kg/cm2
～0.5 kg/cm2
之方式構成，最佳為以成為0.15 kg/cm2
～0.4 kg/cm2
之方式構成。再者，上述荷重係藉由被搬運物之重量/奈米碳管集合體之總面積(表觀面積)求出。 於本發明之搬運固定治具中，藉由以對奈米碳管集合體施加之荷重成為0.05 kg/cm2
以上之方式構成，而能夠以非常高之抓持力保持被搬運物。奈米碳管集合體係纖維狀之奈米碳管之集合體，因此，於載置於搬運固定治具之被搬運物中，產生與奈米碳管接觸之部分及不與奈米碳管接觸之部分。可認為，於本發明中，藉由以受到特定值以上之荷重之方式使奈米碳管集合體構成，而使載置有被搬運物時之被搬運物與奈米碳管之接觸率增大，從而可獲得上述效果。此種搬運固定治具例如能夠藉由將具有相對於被搬運物之面積充分小之面積之奈米碳管集合體配置於第1基材上而獲得。構成本發明之搬運固定治具之奈米碳管集合體容易於長度方向變形，而載置有被搬運物時之接觸率增大變得顯著，於縮小奈米碳管集合體本身之面積之情形時，荷重增大產生之效果變得具有支配性。另一方面，若荷重超過特定值，則即便進而增大荷重亦不會見到抓持力提昇效果(抓持力飽和)。因此，奈米碳管集合體之面積較佳為特定以上(例如，如上所述，總面積為30 mm2
以上)。 如上述般，抓持力優異之本發明之搬運固定治具當然於常溫下會表現出優異之抓持力，於高溫下(例如，400℃以上，較佳為500℃～1000℃，更佳為500℃～700℃)亦能夠表現出優異之抓持力。奈米碳管本身具有耐熱性，且藉由上述構成而於高溫下亦能夠表現出較高之抓持力，因此，本發明之搬運固定治具對高溫下之使用、尤其是高溫下之高速搬運有用。 於本發明之搬運固定治具載置有128 g之被搬運物之情形時，被搬運物與奈米碳管之真實接觸面積較佳為0.08 cm2
以上，更佳為0.09 cm2
以上，進而較佳為0.1 cm2
以上，更佳為0.11 cm2
以上。只要為此種範圍，則能夠獲得抓持力尤其優異之搬運固定治具。真實接觸面積之上限相對於奈米碳管集合體總面積(表觀面積)，較佳為70%以下，更佳為50%以下。再者，真實接觸面積係指於23℃之環境下，以載置於構成搬運固定治具之全部奈米碳管之集合體上之方式放置1個被搬運物，而被搬運物之荷重全部施加至奈米碳管集合體之情形時，被搬運物與奈米碳管接觸之部分之面積。真實接觸面積可藉由如下方式求出：藉由利用SEM之剖面觀察，測定被搬運物與奈米碳管之接觸率(接觸部分之長度/奈米碳管集合體表面測定長)，根據該接觸率與奈米碳管集合體之總面積之積求出。 上述搬運固定治具之奈米碳管集合體側表面之相對於矽製晶圓之23℃下之靜摩擦係數較佳為1.0以上。上述靜摩擦係數之上限值較佳為50。只要為此種範圍，則能夠獲得抓持性優異之搬運固定治具。再者，當然，相對於玻璃表面之摩擦係數較大之上述搬運固定治具對包括玻璃以外之材料之被載置物(例如，半導體晶圓)亦能夠表現出較強之抓持性。 上述搬運固定治具之奈米碳管集合體側表面之相對於玻璃表面之300℃下之靜摩擦係數較佳為1.0以上。上述靜摩擦係數之上限值較佳為50。 上述搬運固定治具之奈米碳管集合體側表面之相對於矽製晶圓之23℃下之垂直剝離力較佳為0.01 N/cm2
以下，更佳為0.001 N/cm2
以下，進而較佳為0 N/cm2
。垂直剝離力能夠藉由將奈米碳管集合體側表面與矽製晶圓貼合而製作測定用樣品，針對該評價用樣品，自兩面相對於奈米碳管集合體側表面於垂直方向進行拉張而進行測定。垂直剝離力相當於在該拉張試驗中使矽製晶圓自奈米碳管集合體表面剝離之力。再者，垂直剝離力之測定例如使用拉張試驗機(TG-1kN：Minebea公司製造)及測力計(TT3D-50N：Minebea公司製造)。於拉張試驗中，評價用樣品例如經由固定於評價用樣品兩面之短銷(鋁製，平面部f12.5 mm)而被拉張。 圖2係本發明之另一實施形態之搬運固定治具之概略剖視圖。於圖2之搬運固定治具200中，奈米碳管集合體20包括奈米碳管21及第2基材22，奈米碳管21形成於第2基材22上。接著劑層30配置於第2基材22之未形成有奈米碳管21之側。第1基材10與第2基材22經由接著劑層30而接合。於本實施形態中亦然，奈米碳管集合體20之配置、面積、載置有被搬運物時受到之荷重及真實接觸面積、以及靜摩擦係數如上所述。 B. 第 1 基材
上述第1基材作為搬運半導體材料、電子材料等時之搬運基材發揮功能。作為第1基材之形態，例如可列舉搬運臂、搬運台、搬運環、搬運導軌、收納盒、鉤、搬運架等。第1基材之大小或形狀可視目的適當選擇。第1基材亦可為搬運臂、搬運台、搬運環、搬運導軌、收納盒、鉤、搬運架等之一部分。將第1基材為搬運臂之情形時之一例表示於圖3之概略立體圖。圖3之搬運固定治具100於作為搬運臂之第1基材10配置有4個奈米碳管集合體20。再者，上述圖1係搬運固定治具100之I-I線之剖視圖。 作為構成上述第1基材之材料，可採用任意之適當之材料。於一實施形態中，作為構成搬運基材之材料，使用氧化鋁、氮化矽等陶瓷材料；不鏽鋼等耐熱性材料。較佳為使用氧化鋁。 上述第1基材之線膨脹係數較佳為5 ppm/℃～12 ppm/℃，更佳為6 ppm/℃～9 ppm/℃。只要為此種範圍，則能夠獲得於高溫下亦能夠良好地發揮功能之搬運固定治具。於本說明書中，線膨脹係數可利用熱機械分析裝置(TMA)進行測定。 上述第1基材之體積膨脹係數較佳為15 ppm/℃～36 ppm/℃，更佳為18 ppm/℃～27 ppm/℃。只要為此種範圍，則能夠獲得於高溫下亦能夠良好地發揮功能之搬運固定治具。 C. 接著劑層
上述接著劑層可包括任意之適當之接著劑。作為構成上述接著劑層之接著劑，較佳為使用無機系接著劑、碳系接著劑或矽溶膠系接著劑。該等接著劑就耐熱性優異之方面而言較佳。其中，較佳為無機系接著劑或碳系接著劑。 作為上述無機系接著劑，例如可列舉陶瓷接著劑。 陶瓷接著劑係藉由使鹼金屬矽酸鹽、磷酸鹽、金屬烷氧化物等硬化成分硬化而能夠表現出接著性之接著劑。較佳為使用包含鹼金屬矽酸鹽或磷酸鹽(例如，磷酸鋁)之陶瓷接著劑作為硬化成分。 陶瓷接著劑可進而包含硬化劑(硬化促進劑)及/或填充劑(填料)。又，陶瓷接著劑可包含任意之適當之分散介質。 作為與上述鹼金屬矽酸鹽組合而使用之硬化劑(硬化促進劑)，例如可列舉：鋅、鎂、鈣等之氧化物或氫氧化物；鈉、鉀、鈣等之矽化物；鋁、鋅等之磷酸鹽；鈣、鋇、鎂等之硼酸鹽；等。作為與上述磷酸鹽組合而使用之硬化劑(硬化促進劑)，例如可列舉：鎂、鈣、鋅、鋁等之氧化物或氫氧化物；鎂、鈣等之矽酸鹽；II族硼酸鹽；等。 作為上述填充劑(填料)，例如可列舉氧化鋁、二氧化矽、氧化鋯、氧化鎂等。於一實施形態中，藉由填充劑(填料)之種類及/或添加量調整接著劑層之線膨脹係數。 作為上述分散介質，使用任意之適當之溶劑。作為該溶劑，可使用水系溶劑，亦可使用有機系溶劑。水系溶劑就能夠形成更加高耐熱之接著劑層之方面而言較佳。又，有機系溶劑就與奈米碳管集合體之親和性優異之方面而言較佳。 上述陶瓷接著劑中之成分可根據構成第1基材之材料、構成第2基材之材料、所需之耐熱溫度等適當選擇。於一實施形態中，於第1基材包括氧化鋁之情形時，使用金屬烷氧化物作為硬化成分，使用氧化鋁作為填充劑，使用甲醇等醇作為分散介質。 於一實施形態中，碳系接著劑包含黏合劑、碳系填料及溶劑。作為黏合劑，例如可列舉鹼金屬矽酸鹽、磷酸鹽、金屬烷氧化物等，較佳為鹼金屬矽酸鹽。作為碳系填料，例如可列舉石墨粉末、碳黑等，較佳為碳黑。作為溶劑，例如可列舉水等。 於另一實施形態中，碳系接著劑可包含特定樹脂及碳系填料。作為該樹脂，可使用藉由加熱變成難石墨化碳之樹脂。作為此種樹脂，例如可列舉酚系樹脂、聚碳二醯亞胺樹脂等。作為碳系填料，例如可列舉石墨粉末、碳黑等。又，碳系接著劑可包含任意之適當之溶劑。作為碳系接著劑中包含之溶劑，例如可列舉水、苯酚、甲醛、乙醇等。 上述接著劑層之線膨脹係數較佳為5 ppm/℃～12 ppm/℃，更佳為6 ppm/℃～9 ppm/℃。只要為此種範圍，則能夠獲得於高溫下奈米碳管集合體亦不易脫離之搬運固定治具。再者，接著劑層之線膨脹係數係指使接著劑硬化後之線膨脹係數。 上述接著劑層之體積膨脹係數較佳為15 ppm/℃～36 ppm/℃，更佳為18 ppm/℃～27 ppm/℃。只要為此種範圍，則能夠獲得於高溫下奈米碳管集合體亦不易脫離之搬運固定治具。再者，接著劑層之體積膨脹係數係指使接著劑硬化後之體積膨脹係數。 上述接著劑層之厚度較佳為0.1 μm～100 μm，更佳為0.5 μm～50 μm，進而較佳為1.0 μm～20 μm。只要為此種範圍，則能夠經由該接著劑層而將奈米碳管集合體或第2基材與第1基材牢固地接合。 D. 奈米碳管集合體
奈米碳管集合體包括複數個奈米碳管。 上述奈米碳管之長度較佳為50 μm～3000 μm，更佳為200 μm～2000 μm，進而較佳為300 μm～1500 μm，尤佳為400 μm～1000 μm，最佳為500 μm～1000 μm。只要為此種範圍，則能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 奈米碳管集合體例如可採用下述實施形態(第1實施形態、第2實施形態)。 奈米碳管集合體之第1實施形態具備複數個奈米碳管，該奈米碳管具有複數層，該奈米碳管之層數分佈之分佈寬度為10層以上，該層數分佈之眾數之相對頻度為25%以下。藉由奈米碳管集合體採用此種構成，而能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 於第1實施形態中，奈米碳管之層數分佈之分佈寬度較佳為10層以上，更佳為10層～30層，進而較佳為10層～25層，尤佳為10層～20層。藉由將奈米碳管之層數分佈之分佈寬度調整為此種範圍內，而能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 奈米碳管之層數分佈之「分佈寬度」係指奈米碳管之層數之最大層數與最小層數之差。藉由將奈米碳管之層數分佈之分佈寬度調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 奈米碳管之層數、層數分佈利用任意之適當之裝置進行測定即可。較佳為利用掃描式電子顯微鏡(SEM)或穿透電子顯微鏡(TEM)進行測定。例如，自奈米碳管集合體取出至少10根、較佳為20根以上之奈米碳管，利用SEM或TEM進行測定，對層數及層數分佈進行評價即可。 於第1實施形態中，奈米碳管之層數之最大層數較佳為5層～30層，更佳為10層～30層，進而較佳為15層～30層，尤佳為15層～25層。藉由將奈米碳管之層數之最大層數調整為此種範圍內，而能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 於第1實施形態中，奈米碳管之層數之最小層數較佳為1層～10層，更佳為1層～5層。藉由將奈米碳管之層數之最小層數調整為此種範圍內，而能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 於第1實施形態中，藉由將奈米碳管之層數之最大層數及最小層數調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第1實施形態中，奈米碳管之層數分佈之眾數之相對頻度較佳為25%以下，更佳為1%～25%，進而較佳為5%～25%，尤佳為10%～25%，最佳為15%～25%。藉由將奈米碳管之層數分佈之眾數之相對頻度調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第1實施形態中，奈米碳管之層數分佈之眾數較佳為存在層數2層至層數10層，進而較佳為存在層數3層至層數10層。藉由將奈米碳管之層數分佈之眾數調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第1實施形態中，作為奈米碳管之形狀，只要其橫剖面具有任意之適當之形狀即可。例如，其橫剖面可列舉大致圓形、橢圓形、n角形(n係3以上之整數)等。 於第1實施形態中，奈米碳管之長度較佳為50 μm以上，更佳為100 μm～3000 μm，進而較佳為300 μm～1500 μm，進而較佳為400 μm～1000 μm，尤佳為500 μm～1000 μm。藉由將奈米碳管之長度調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第1實施形態中，奈米碳管之直徑較佳為0.3 nm～2000 nm，更佳為1 nm～1000 nm，進而較佳為2 nm～500 nm。藉由將奈米碳管之直徑調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第1實施形態中，奈米碳管之比表面積、密度可設定為任意之適當之值。 奈米碳管集合體之第2實施形態具備複數個奈米碳管，該奈米碳管具有複數層，該奈米碳管之層數分佈之眾數存在層數10層以下，該眾數之相對頻度為30%以上。藉由奈米碳管集合體採用此種構成，而能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 於第2實施形態中，奈米碳管之層數分佈之分佈寬度較佳為9層以下，更佳為1層～9層，進而較佳為2層～8層，尤佳為3層～8層。藉由將奈米碳管之層數分佈之分佈寬度調整為此種範圍內，而能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 於第2實施形態中，奈米碳管之層數之最大層數較佳為1層～20層，更佳為2層～15層，進而較佳為3層～10層。藉由將奈米碳管之層數之最大層數調整為此種範圍內，而能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 於第2實施形態中，奈米碳管之層數之最小層數較佳為1層～10層，更佳為1層～5層。藉由將奈米碳管之層數之最小層數調整為此種範圍內，而能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 於第2實施形態中，藉由將奈米碳管之層數之最大層數及最小層數調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第2實施形態中，奈米碳管之層數分佈之眾數之相對頻度較佳為30%以上，更佳為30%～100%，進而較佳為30%～90%，尤佳為30%～80%，最佳為30%～70%。藉由將奈米碳管之層數分佈之眾數之相對頻度調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第2實施形態中，奈米碳管之層數分佈之眾數較佳為存在層數10層以下，更佳為存在層數1層至層數10層，進而較佳為存在層數2層至層數8層，尤佳為存在層數2層至層數6層。藉由將奈米碳管之層數分佈之眾數調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第2實施形態中，作為奈米碳管之形狀，只要其橫剖面具有任意之適當之形狀即可。例如，其橫剖面可列舉大致圓形、橢圓形、n角形(n係3以上之整數)等。 於第2實施形態中，奈米碳管之長度較佳為50 μm以上，更佳為550 μm～3000 μm，進而較佳為600 μm～2000 μm，進而較佳為650 μm～1000 μm，尤佳為700 μm～1000 μm。藉由將奈米碳管之長度調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第2實施形態中，奈米碳管之直徑較佳為0.3 nm～2000 nm，更佳為1 nm～1000 nm，進而較佳為2 nm～500 nm。藉由將奈米碳管之直徑調整為上述範圍內，而該奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 於第2實施形態中，奈米碳管之比表面積、密度可設定為任意之適當之值。 於一實施形態中，上述奈米碳管之至少包含尖端之部分被無機材料被覆。此處所謂之「至少包含尖端之部分」係指至少包含奈米碳管之尖端、即奈米碳管之與第1基材為相反側之尖端之部分。 關於上述奈米碳管，可全部奈米碳管之至少包含尖端之部分被無機材料被覆，亦可其中一部分奈米碳管之至少包含尖端之部分被無機材料被覆。複數個存在之奈米碳管整體中之至少包含尖端之部分被無機材料被覆之奈米碳管之含有比率較佳為50重量%～100重量%，更佳為60重量%～100重量%，進而較佳為70重量%～100重量%，進而較佳為80重量%～100重量%，尤佳為90重量%～100重量%，最佳為實質上100重量%。只要為此種範圍，則能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 上述被覆層之厚度較佳為1 nm以上，更佳為3 nm以上，進而較佳為5 nm以上，進而較佳為7 nm以上，尤佳為9 nm以上，最佳為10 nm以上。上述被覆層之厚度之上限值較佳為50 nm，更佳為40 nm，進而較佳為30 nm，尤佳為20 nm，最佳為15 nm。只要為此種範圍，則能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 上述被覆層之長度較佳為1 nm～1000 nm，更佳為5 nm～700 nm，進而較佳為10 nm～500 nm，尤佳為30 nm～300 nm，最佳為50 nm～100 nm。只要為此種範圍，則能夠形成抓持力較高且不易污染被搬運物之搬運固定治具。 作為上述無機材料，於無損本發明之效果之範圍內可採用任意之適當之無機材料。作為此種無機材料，例如可列舉SiO2
、Al2
O3
、Fe2
O3
、TiO2
、MgO、Cu、Ag、Au等。 作為奈米碳管集合體之製造方法，可採用任意之適當之方法。 作為奈米碳管集合體之製造方法，例如可列舉藉由化學氣相沈積法(Chemical Vapor Deposition，CVD法)製造大致垂直於平板而配向之奈米碳管集合體之方法，所述化學氣相沈積法係於平板之上形成觸媒層，於利用熱、電漿等使觸媒活化之狀態下填充碳源，而使奈米碳管成長。 作為奈米碳管集合體之製造方法中可使用之平板，可採用任意之適當之平板。例如可列舉具有平滑性、且具有可耐受奈米碳管之製造之高溫耐熱性之材料。作為此種材料，例如可列舉石英玻璃、矽(矽晶圓等)、鋁等之金屬板等。 作為用以製造奈米碳管集合體之裝置，可採用任意之適當之裝置。例如，作為熱CVD裝置，可列舉如圖4所示之使筒型之反應容器被電阻加熱式之電管狀爐包圍而構成之熱壁型等。於該情形時，作為反應容器，例如，較佳為使用耐熱性之石英管等。 作為可用於奈米碳管集合體之製造之觸媒(觸媒層之材料)，可使用任意之適當之觸媒。例如可列舉鐵、鈷、鎳、金、鉑、銀、銅等金屬觸媒。 製造奈米碳管集合體時，視需要亦可於平板與觸媒層之中間設置氧化鋁/親水性膜。 作為氧化鋁/親水性膜之製作方法，可採用任意之適當之方法。例如，可藉由於平板之上製作SiO2
膜，蒸鍍Al後，升溫至450℃而使之氧化而獲得。根據此種製作方法，Al2
O3
與親水性之SiO2
膜相互作用，形成相較於直接蒸鍍Al2
O3
者粒徑不同之Al2
O3
面。若於平板之上，不製作親水性膜，即便於蒸鍍Al後升溫至450℃而使之氧化，亦有不易形成粒徑不同之Al2
O3
面之虞。又，若於平板之上，製作親水性膜，但直接蒸鍍Al2
O3
，則亦有不易形成粒徑不同之Al2
O3
面之虞。 可用於奈米碳管集合體之製造之觸媒層之厚度為了使微粒形成而較佳為0.01 nm～20 nm，更佳為0.1 nm～10 nm。藉由將可用於奈米碳管集合體之製造之觸媒層之厚度調整為上述範圍內，而形成之奈米碳管能夠兼具優異之機械特性及較高之比表面積，進而，該奈米碳管能夠成為表現出優異之黏著特性之奈米碳管集合體。 觸媒層之形成方法可採用任意之適當之方法。例如可列舉藉由EB(電子束)、濺鍍等蒸鍍金屬觸媒之方法、將金屬觸媒微粒之懸濁液塗佈於平板上之方法等。 作為可用於奈米碳管集合體之製造之碳源，可使用任意之適當之碳源。例如可列舉：甲烷、乙烯、乙炔、苯等烴；甲醇、乙醇等醇；等。 作為奈米碳管集合體之製造中之製造溫度，可採用任意之適當之溫度。例如，為了形成能夠充分表現出本發明之效果之觸媒粒子，較佳為400℃～1000℃，更佳為500℃～900℃，進而較佳為600℃～800℃。 (第2基材) 上述第2基材可為形成奈米碳管集合體時所使用之平板。即，具備第2基材之搬運固定治具係將形成有奈米碳管集合體之平板直接積層於第2基材而獲得。 E. 搬運固定治具之製造方法
搬運固定治具可藉由任意之適當之方法而製造。於一實施形態中，於第1基板上塗佈構成接著劑層之接著劑，並於藉由該塗佈形成之塗佈層上配置奈米碳管集合體後，使該塗佈層硬化，藉此，形成接著劑層，而能夠獲得搬運固定治具。作為將奈米碳管集合體配置於塗佈層上之方法，例如可列舉自附有藉由上述D項中說明之方法獲得之奈米碳管集合體之平板，將奈米碳管集合體轉印至上述塗佈層之方法。 於另一實施形態中，於第1基板上塗佈構成接著劑層之接著劑，並於藉由該塗佈形成之塗佈層上，積層形成有奈米碳管集合體之平板(第2基板)後，使該塗佈層硬化，藉此，能夠獲得搬運固定治具。 作為接著劑之塗佈方法，可採用任意之適當之方法。作為塗佈方法，例如可列舉利用缺角輪塗佈機或模嘴塗佈機之塗佈、利用分注器之塗佈、利用刮刀之塗佈等。 作為上述接著劑塗佈層之硬化方法，可採用任意之適當之方法。較佳為使用藉由加熱進行硬化之方法。硬化溫度可根據接著劑之種類適當設定。該硬化溫度例如為90℃～400℃。於一實施形態中，於使用碳系接著劑作為接著劑之情形時，硬化後，於高溫下進行燒成。燒成溫度較佳為高於該接著劑之使用溫度，例如為350℃～3000℃。 [實施例] 以下，基於實施例對本發明進行說明，但本發明並不限定於該等。 [製造例1]奈米碳管集合體之製造 於矽製之平板(valqua-fft公司製造，厚度700 μm)上，利用濺鍍裝置(SHIBAURA MECHATRONICS公司製造，商品名「CFS-4ES」)形成Al2
O3
薄膜(極限真空：8.0×10-4
Pa，濺鍍氣體：Ar，氣壓：0.50 Pa，生長率：0.12 nm/sec，厚度：20 nm)。於該Al2
O3
薄膜上，進而利用濺鍍裝置(SHIBAURA MECHATRONICS公司製造，商品名「CFS-4ES」)形成Fe薄膜作為觸媒層(濺鍍氣體：Ar，氣壓：0.75 Pa，生長率：0.012 nm/sec，厚度：1.0 nm)。 其後，將該平板載置於30 mmf之石英管內，使保持為水分率700 ppm之氦/氫(105/80 sccm)混合氣體於石英管內流通30分鐘，而對管內進行置換。其後，使用電管狀爐使管內升溫至765℃，並使其穩定於765℃。於使溫度保持在765℃下之狀況下，使氦/氫/乙烯(105/80/15 sccm，水分率700 ppm)混合氣體填充至管內，放置60分鐘，而於平板上形成奈米碳管集合體。 [實施例1] 於第1基材(陶瓷製)上，塗佈接著劑。於該接著劑上，自上述平板採取製造例1中獲得之奈米碳管集合體，配置於接著劑塗佈層上而製作評價樣品。奈米碳管集合體係將平均每個面積設為9 mm2
，於第1基材上配置4個奈米碳管集合體(總面積：0.36 cm2
)。 [實施例2] 將奈米碳管集合體平均每個之面積設為16 mm2
(總面積：0.64 cm2
)，除此以外，以與實施例1相同之方式製作評價樣品。 [實施例3] 將奈米碳管集合體平均每個之面積設為36 mm2
(總面積：1.44 cm2
)，除此以外，以與實施例1相同之方式製作評價樣品。 [比較例1] 將奈米碳管集合體平均每個之面積設為81 mm2
(總面積：3.24 cm2
)，除此以外，以與實施例1相同之方式製作評價樣品。 ＜評價＞ 將實施例及比較例中獲得之評價樣品供至下述評價。將評價結果與對奈米碳管集合體施加之荷重一起表示於表1。 (1)接觸率、真實接觸面積 於實施例及比較例中獲得之評價樣品上放置重量128 g且面積707 cm2
之被搬運物。此時，使之成為於全部4個奈米碳管集合體上載有被搬運物之狀態，而使該被搬運物之荷重施加至全部奈米碳管集合體。 於如此載有被搬運物之狀態下，利用SEM(倍率：2萬倍)觀察奈米碳管集合體表面部分之剖面，而測得被搬運物與奈米碳管之接觸率(奈米碳管與被搬運物接觸之部分之長度/奈米碳管集合體表面測定長)。 又，根據奈米碳管集合體之面積及該接觸率，藉由(奈米碳管集合體之面積)×(接觸率)之式，求出真實接觸面積。 (2)臨界滑動角 以與上述(1)相同之方式，於評價樣品上放置被搬運物。其後，於常溫(23℃)下，使載有被搬運物之評價樣品傾斜，逐漸增加傾斜角度，測定被搬運物保持於評價樣品(不會滑落)之傾斜角度之最大值，將其設為臨界滑動角。 又，於300℃之環境下，藉由相同之方法測得臨界滑動角。 (3)靜摩擦係數 依據JIS K7125進行測定。 將評價樣品之奈米碳管集合體側置於矽製晶圓，於自其上放置滑動片(底面：毛氈，63 mm×63 mm)，進而於該滑動片之上放置砝碼(滑動片之總質量成為200 g之重量之砝碼)，於該狀態下，以試驗速度100 mm/min拉張試驗片，根據試驗片開始移動時之最大荷重算出靜摩擦係數。 又，基於靜摩擦係數對高溫高速搬運性進行評價。於靜摩擦係數大於1.6之情形時，判斷為具有實用上能夠容許之高溫高速搬運性(表1中，△)，於靜摩擦係數為1.8以上之情形時，判斷為具有優異之高溫高速搬運性(表1中，〇)。 [表1]
根據表1可明確，以對奈米碳管集合體施加之荷重成為0.05 kg/cm2
以上之方式構成之本申請之搬運固定治具係抓持力優異，且於高溫下之高速搬運性優異。 A. Summary of handling fixtures
Fig. 1 is a schematic cross-sectional view showing a conveyance fixing jig according to an embodiment of the present invention. The transport fixture 100 includes a first base material 10 and a carbon nanotube aggregate 20 provided on the first base material 10. In one embodiment, as shown in the example, the adhesive layer 30 is disposed between the first substrate 10 and the carbon nanotube assembly 20. In this embodiment, the first base material 10 and the carbon nanotube aggregate 20 are joined via the adhesive layer 30. The carbon nanotube assembly 20 includes a plurality of carbon nanotubes 21. The carbon nanotubes 21 are aligned in the direction of the length L, and the carbon nanotube assemblies 20 are configured as a fibrous columnar structure. The carbon nanotubes 21 are preferably aligned in a substantially vertical direction with respect to the first substrate 10. Here, the term "substantially perpendicular direction" means that the angle with respect to the surface of the first substrate 10 is preferably 90 ° ± 20 °, more preferably 90 ° ± 15 °, and still more preferably 90 ° ± 10 °. Especially preferably 90 ° ± 5 °. The carrying fixture of the present invention can maintain and transport an area of 40 cm2
It is used when the weight is 5 g or more. In the present specification, the term "area" refers to a plan view area when viewed from the first substrate on which the carbon nanotube assemblies are arranged to face each other (when viewed from the upper side of the paper of FIG. 1). Therefore, the area of the object to be transported refers to the area of the surface facing the first base material and the carbon nanotube aggregate during transportation. The area to be transported is preferably 40 cm2
~3000 cm2
More preferably 75 cm2
~2000 cm2
And further preferably 300 cm2
~1600 cm2
. Further, the weight of the object to be transported is preferably from 5 g to 600 g, more preferably from 10 g to 500 g, further preferably from 40 g to 400 g, particularly preferably from 50 g to 300 g. The conveyance fixing jig of the present invention can hold the object to be conveyed by the adhesiveness of the carbon nanotube assembly. When a carbon nanotube aggregate is used, it is possible to obtain a transport fixture that does not easily contaminate the object to be transported. The handling fixture of the present invention can be suitably used for, for example, a manufacturing step of a semiconductor element, a manufacturing step of an optical member, and the like. More specifically, the transport fixture of the present invention can be used to transfer materials, manufacture intermediates, articles, etc. (specifically, semiconductor materials, wafers, etc.) between steps and steps in the manufacture of semiconductor components or in specific steps. Wafers, electronic parts, films, etc.) are carried. Moreover, it can be used to transfer a conveyed object such as a glass substrate between steps in the manufacture of an optical member or in a specific step. Moreover, the conveyance fixing jig of the present invention may be in the form of being able to hold the object to be conveyed. Preferably, the carbon nanotube assembly 20 is provided on a part of the surface of the first substrate 10. Further, it is preferable that the carbon nanotube assembly 20 is provided in plural on a part of the surface of the first base material 10. The carbon nanotube assembly is preferably disposed such that the object to be conveyed can be held substantially parallel to the surface of the first substrate. For example, it is preferable to provide three or more (preferably 3) on the first substrate. ～8, more preferably 3 to 5, and particularly preferably 4) carbon nanotube aggregates. Moreover, in the conveyance fixing jig of the present invention, the carbon nanotube aggregate is disposed so that the object to be conveyed can contact the entire carbon nanotube assembly. The average area (apparent area) of the carbon nanotube aggregate is preferably 8 mm.2
~60 mm2
More preferably 9 mm2
~50 mm2
, preferably 9 mm2
~40 mm2
, especially good for 9 mm2
~30 mm2
, preferably 9 mm2
~20 mm2
. In addition, the area here is a plan view area when the first base material on which the carbon nanotube aggregate is disposed is faced as viewed as described above (when viewed from the upper side of the paper of FIG. 1). The total area (apparent area) of the carbon nanotube aggregate is preferably 30 mm2
~240 mm2
More preferably 35 mm2
~200 mm2
, preferably 35 mm2
~160 mm2
, especially for 35 mm2
~120 mm2
, preferably 35 mm2
~80 mm2
. The carbon nanotube aggregate is preferably such that the load applied to the carbon nanotube aggregate when the object to be transported is 0.05 kg/cm.2
More preferably, it is made to be 0.06 kg/cm.2
~1 kg/cm2
The configuration is further preferably to be 0.07 kg/cm.2
~0.7 kg/cm2
The configuration is further preferably to be 0.08 kg/cm.2
~0.6 kg/cm2
The composition of the way, especially to become 0.09 kg / cm2
~0.5 kg/cm2
The way it is constructed, preferably to be 0.15 kg/cm2
~0.4 kg/cm2
The way it is structured. Further, the load is obtained by the weight of the object to be transported/the total area (apparent area) of the carbon nanotube assembly. In the handling fixture of the present invention, the load applied to the carbon nanotube assembly is 0.05 kg/cm.2
According to the above configuration, the object to be transported can be held at a very high gripping force. The carbon nanotube assembly system is a collection of fibrous carbon nanotubes. Therefore, it is placed in the transported article of the fixed fixture, and is in contact with the carbon nanotube and is not in contact with the carbon nanotube. Part of it. In the present invention, it is considered that the carbon nanotube aggregate is configured so as to receive a load of a specific value or more, and the contact ratio between the object to be transported and the carbon nanotube is increased when the object to be transported is placed. Large, so that the above effects can be obtained. Such a transport fixing jig can be obtained, for example, by disposing a carbon nanotube aggregate having an area sufficiently smaller than the area of the object to be transported on the first base material. The carbon nanotube assembly constituting the transport fixture of the present invention is easily deformed in the longitudinal direction, and the contact ratio at the time of placing the object to be transported is significantly increased, and the area of the carbon nanotube aggregate itself is reduced. In the case, the effect of the increase in load becomes dominant. On the other hand, if the load exceeds a certain value, the gripping force lifting effect (scratch force saturation) is not seen even if the load is further increased. Therefore, the area of the carbon nanotube aggregate is preferably specific or more (for example, as described above, the total area is 30 mm2
the above). As described above, the handling fixture of the present invention excellent in gripping ability of course exhibits excellent gripping force at normal temperature, and is preferably at a high temperature (for example, 400 ° C or higher, preferably 500 ° C to 1000 ° C, more preferably It is also excellent in gripping force from 500 ° C to 700 ° C. The carbon nanotube itself has heat resistance, and can exhibit a high grip force at a high temperature by the above configuration. Therefore, the handling fixture of the present invention is used at a high temperature, particularly at a high temperature. It is useful to carry. When the handling fixture of the present invention is loaded with 128 g of the object to be transported, the actual contact area of the object to be transported with the carbon nanotube is preferably 0.08 cm.2
Above, more preferably 0.09 cm2
Above, further preferably 0.1 cm2
Above, more preferably 0.11 cm2
the above. As long as it is in such a range, it is possible to obtain a transport fixing jig having particularly excellent gripping power. The upper limit of the true contact area is preferably 70% or less, more preferably 50% or less, based on the total area (apparent area) of the carbon nanotube aggregate. In addition, the actual contact area means that one object to be transported is placed in an environment of 23 ° C in such a manner that it is placed on the assembly of all the carbon nanotubes constituting the fixed fixture, and the load of the object to be transported is all The area of the portion of the object to be contacted with the carbon nanotube when applied to the carbon nanotube assembly. The true contact area can be obtained by measuring the contact ratio between the object to be transported and the carbon nanotube by the cross-sectional observation by SEM (the length of the contact portion/the length of the surface of the carbon nanotube aggregate), according to the The product of the contact rate and the total area of the carbon nanotube aggregate is determined. The static friction coefficient at 23 ° C of the side surface of the carbon nanotube assembly on which the fixed fixture is transported is preferably 1.0 or more with respect to the tantalum wafer. The upper limit of the above static friction coefficient is preferably 50. When it is such a range, the conveyance fixing jig which is excellent in grip can be obtained. Further, of course, the above-described transport fixing jig having a large friction coefficient with respect to the glass surface can exhibit strong grip for a substrate (for example, a semiconductor wafer) including a material other than glass. The static friction coefficient at 300 ° C of the side surface of the carbon nanotube assembly on which the fixed fixture is transported is preferably 1.0 or more with respect to the glass surface. The upper limit of the above static friction coefficient is preferably 50. The vertical peeling force at 23 ° C of the side surface of the carbon nanotube assembly on which the fixed fixture is transported is preferably 0.01 N/cm.2
Below, more preferably 0.001 N/cm2
Hereinafter, it is further preferably 0 N/cm.2
. The vertical peeling force can be produced by laminating the side surface of the carbon nanotube assembly with the tantalum wafer, and the sample for evaluation is applied in the vertical direction from the both sides with respect to the side surface of the carbon nanotube assembly. The measurement was carried out by stretching. The vertical peeling force corresponds to the force by which the tantalum wafer is peeled off from the surface of the carbon nanotube assembly in the tensile test. Further, the vertical peeling force is measured by, for example, a tensile tester (TG-1kN: manufactured by Minebea Co., Ltd.) and a dynamometer (TT3D-50N: manufactured by Minebea Co., Ltd.). In the tensile test, the sample for evaluation was stretched, for example, via a short pin (aluminum, flat portion f12.5 mm) fixed to both sides of the sample for evaluation. Fig. 2 is a schematic cross-sectional view showing a conveyance fixing jig according to another embodiment of the present invention. In the transport fixture 200 of FIG. 2, the carbon nanotube assembly 20 includes a carbon nanotube 21 and a second base material 22, and the carbon nanotube 21 is formed on the second base material 22. The subsequent agent layer 30 is disposed on the side of the second base material 22 where the carbon nanotubes 21 are not formed. The first base material 10 and the second base material 22 are joined via the adhesive layer 30. Also in the present embodiment, the arrangement and the area of the carbon nanotube assembly 20, the load and the actual contact area which are received when the object to be conveyed are placed, and the static friction coefficient are as described above. B. First 1 Substrate
The first base material functions as a transport substrate when transporting a semiconductor material, an electronic material, or the like. Examples of the form of the first base material include a transfer arm, a transfer table, a conveyance ring, a conveyance rail, a storage case, a hook, and a carrier. The size or shape of the first substrate may be appropriately selected depending on the purpose. The first substrate may be one of a transfer arm, a transfer table, a conveyance ring, a conveyance rail, a storage case, a hook, and a carrier. An example of the case where the first base material is a transfer arm is shown in a schematic perspective view of Fig. 3 . In the conveyance fixing jig 100 of FIG. 3, four carbon nanotube assemblies 20 are disposed on the first base material 10 as a conveyance arm. 1 is a cross-sectional view of the I-I line of the fixed fixture 100. Any suitable material can be used as the material constituting the first base material. In one embodiment, a ceramic material such as alumina or tantalum nitride or a heat resistant material such as stainless steel is used as a material constituting the conveyance substrate. Alumina is preferably used. The linear expansion coefficient of the first substrate is preferably 5 ppm/°C to 12 ppm/°C, more preferably 6 ppm/°C to 9 ppm/°C. As long as it is in such a range, it is possible to obtain a transport fixture that can function satisfactorily at a high temperature. In the present specification, the coefficient of linear expansion can be measured using a thermomechanical analysis device (TMA). The volume expansion coefficient of the first substrate is preferably 15 ppm/°C to 36 ppm/°C, more preferably 18 ppm/°C to 27 ppm/°C. As long as it is in such a range, it is possible to obtain a transport fixture that can function satisfactorily at a high temperature. C. Subsequent layer
The above adhesive layer may include any suitable adhesive. As the adhesive constituting the above-mentioned adhesive layer, an inorganic adhesive, a carbon-based adhesive or a ruthenium-based adhesive is preferably used. These adhesives are preferred in terms of excellent heat resistance. Among them, an inorganic binder or a carbon-based binder is preferred. As the inorganic binder, for example, a ceramic binder can be mentioned. The ceramic adhesive is an adhesive capable of exhibiting adhesion by curing a hardening component such as an alkali metal niobate, a phosphate or a metal alkoxide. It is preferred to use a ceramic binder containing an alkali metal niobate or a phosphate (for example, aluminum phosphate) as a hardening component. The ceramic adhesive may further comprise a hardener (hardening accelerator) and/or a filler (filler). Further, the ceramic adhesive may contain any suitable dispersion medium. Examples of the curing agent (hardening accelerator) used in combination with the above alkali metal silicate include oxides or hydroxides such as zinc, magnesium, and calcium; and tellurides such as sodium, potassium, and calcium; and aluminum. Phosphate such as zinc; borate such as calcium, barium, magnesium, etc.; Examples of the curing agent (hardening accelerator) used in combination with the above phosphates include oxides or hydroxides of magnesium, calcium, zinc, aluminum, etc.; citrates of magnesium and calcium; and group II borate ;Wait. Examples of the filler (filler) include alumina, ceria, zirconia, and magnesia. In one embodiment, the linear expansion coefficient of the adhesive layer is adjusted by the type and/or amount of the filler (filler). As the dispersion medium, any appropriate solvent is used. As the solvent, an aqueous solvent can be used, or an organic solvent can also be used. It is preferred that the aqueous solvent be capable of forming a more highly heat resistant adhesive layer. Further, the organic solvent is preferred because it has excellent affinity with the carbon nanotube aggregate. The component in the ceramic adhesive can be appropriately selected depending on the material constituting the first substrate, the material constituting the second substrate, the heat resistance temperature required, and the like. In one embodiment, when the first base material includes alumina, a metal alkoxide is used as a hardening component, alumina is used as a filler, and an alcohol such as methanol is used as a dispersion medium. In one embodiment, the carbon-based adhesive includes a binder, a carbon-based filler, and a solvent. Examples of the binder include an alkali metal ruthenate, a phosphate, a metal alkoxide, and the like, and an alkali metal ruthenate is preferred. Examples of the carbon-based filler include graphite powder, carbon black, and the like, and carbon black is preferred. Examples of the solvent include water and the like. In another embodiment, the carbon-based adhesive may include a specific resin and a carbon-based filler. As the resin, a resin which becomes non-graphitizable carbon by heating can be used. Examples of such a resin include a phenol resin, a polycarbodiimide resin, and the like. Examples of the carbon-based filler include graphite powder, carbon black, and the like. Further, the carbon-based adhesive may contain any suitable solvent. Examples of the solvent contained in the carbon-based adhesive include water, phenol, formaldehyde, ethanol, and the like. The linear expansion coefficient of the above adhesive layer is preferably from 5 ppm/°C to 12 ppm/°C, more preferably from 6 ppm/°C to 9 ppm/°C. As long as it is in such a range, it is possible to obtain a conveyance fixing jig in which the carbon nanotube aggregate is not easily separated at a high temperature. Further, the coefficient of linear expansion of the adhesive layer means a linear expansion coefficient after hardening the adhesive. The volume expansion coefficient of the above adhesive layer is preferably from 15 ppm/°C to 36 ppm/°C, more preferably from 18 ppm/°C to 27 ppm/°C. As long as it is in such a range, it is possible to obtain a conveyance fixing jig in which the carbon nanotube aggregate is not easily separated at a high temperature. Further, the volume expansion coefficient of the adhesive layer means a volume expansion coefficient after hardening the adhesive. The thickness of the above adhesive layer is preferably from 0.1 μm to 100 μm, more preferably from 0.5 μm to 50 μm, still more preferably from 1.0 μm to 20 μm. If it is such a range, the carbon nanotube aggregate or the 2nd base material can be firmly joined with the 1st base material via this adhesive layer. D. Carbon nanotube aggregate
The carbon nanotube assembly includes a plurality of carbon nanotubes. The length of the above carbon nanotubes is preferably from 50 μm to 3000 μm, more preferably from 200 μm to 2000 μm, further preferably from 300 μm to 1500 μm, particularly preferably from 400 μm to 1000 μm, and most preferably from 500 μm to ～ 1000 μm. As long as it is in such a range, it is possible to form a transport fixture that has a high gripping force and is less likely to contaminate the object to be transported. For the carbon nanotube assembly, for example, the following embodiments (first embodiment and second embodiment) can be employed. The first embodiment of the carbon nanotube assembly includes a plurality of carbon nanotubes having a plurality of layers, and the distribution width of the number of layers of the carbon nanotubes is 10 or more, and the number of layers is distributed The relative frequency of the mode is below 25%. According to this configuration of the carbon nanotube aggregate, it is possible to form a transport fixture having a high grip force and which is less likely to contaminate the object to be transported. In the first embodiment, the distribution width of the number of layers of the carbon nanotubes is preferably 10 or more, more preferably 10 to 30, still more preferably 10 to 25, and particularly preferably 10 to ～ 20 floors. By adjusting the distribution width of the layer distribution of the carbon nanotubes to such a range, it is possible to form a transport fixture that has a high grip force and is less likely to contaminate the object to be transported. The "distribution width" of the layer distribution of the carbon nanotubes refers to the difference between the maximum number of layers of the carbon nanotubes and the minimum number of layers. By adjusting the distribution width of the layer distribution of the carbon nanotubes to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube can be expressed. A carbon nanotube aggregate with excellent adhesion characteristics. The number of layers and the number of layers of the carbon nanotubes may be measured by any appropriate means. It is preferably measured by a scanning electron microscope (SEM) or a transmission electron microscope (TEM). For example, at least 10, preferably 20 or more carbon nanotubes are taken out from the carbon nanotube aggregate, and measured by SEM or TEM, and the number of layers and the layer number distribution may be evaluated. In the first embodiment, the maximum number of layers of the carbon nanotubes is preferably 5 to 30, more preferably 10 to 30, still more preferably 15 to 30, and particularly preferably 15 Layer ~ 25 layers. By adjusting the maximum number of layers of the carbon nanotubes to such a range, it is possible to form a transport fixture that has a high gripping force and is less likely to contaminate the object to be transported. In the first embodiment, the minimum number of layers of the carbon nanotubes is preferably from 1 to 10, more preferably from 1 to 5. By adjusting the minimum number of layers of the carbon nanotubes to such a range, it is possible to form a transport fixture that has a high gripping force and is less likely to contaminate the object to be transported. In the first embodiment, by adjusting the maximum number of layers and the minimum number of layers of the carbon nanotubes to the above range, the carbon nanotubes can have excellent mechanical properties and a high specific surface area. Further, the carbon nanotube can be a carbon nanotube aggregate exhibiting excellent adhesive properties. In the first embodiment, the relative frequency of the mode distribution of the number of layers of the carbon nanotubes is preferably 25% or less, more preferably 1% to 25%, still more preferably 5% to 25%, and particularly preferably 10% to 25%, preferably 15% to 25%. By adjusting the relative frequency of the mode of the layer distribution of the carbon nanotubes to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube It can be a carbon nanotube aggregate that exhibits excellent adhesion characteristics. In the first embodiment, the number of layers of the carbon nanotubes is preferably from 2 to 10 layers, and more preferably from 3 to 10 layers. By adjusting the mode of the layer distribution of the carbon nanotubes to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube can be expressed. A carbon nanotube aggregate with excellent adhesion characteristics. In the first embodiment, the shape of the carbon nanotube may be any shape as long as it has an appropriate cross section. For example, the cross section thereof may be a substantially circular shape, an elliptical shape, or an n-angle shape (n is an integer of 3 or more). In the first embodiment, the length of the carbon nanotubes is preferably 50 μm or more, more preferably 100 μm to 3000 μm, still more preferably 300 μm to 1500 μm, still more preferably 400 μm to 1000 μm, and particularly preferably 400 μm to 1000 μm. It is preferably 500 μm to 1000 μm. By adjusting the length of the carbon nanotube to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube can exhibit excellent adhesive properties. Nano carbon tube assembly. In the first embodiment, the diameter of the carbon nanotubes is preferably from 0.3 nm to 2000 nm, more preferably from 1 nm to 1000 nm, and still more preferably from 2 nm to 500 nm. By adjusting the diameter of the carbon nanotube to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube can exhibit excellent adhesive properties. Nano carbon tube assembly. In the first embodiment, the specific surface area and density of the carbon nanotubes can be set to any appropriate value. The second embodiment of the carbon nanotube assembly includes a plurality of carbon nanotubes having a plurality of layers, and the number of layers of the number of layers of the carbon nanotubes is 10 or less, and the mode The relative frequency is 30% or more. According to this configuration of the carbon nanotube aggregate, it is possible to form a transport fixture having a high grip force and which is less likely to contaminate the object to be transported. In the second embodiment, the distribution width of the number of layers of the carbon nanotubes is preferably 9 or less, more preferably 1 to 9 layers, still more preferably 2 to 8 layers, and particularly preferably 3 layers. 8 floors. By adjusting the distribution width of the layer distribution of the carbon nanotubes to such a range, it is possible to form a transport fixture that has a high grip force and is less likely to contaminate the object to be transported. In the second embodiment, the maximum number of layers of the carbon nanotubes is preferably from 1 to 20, more preferably from two to fifteen, still more preferably from three to ten. By adjusting the maximum number of layers of the carbon nanotubes to such a range, it is possible to form a transport fixture that has a high gripping force and is less likely to contaminate the object to be transported. In the second embodiment, the minimum number of layers of the carbon nanotubes is preferably from 1 to 10, more preferably from 1 to 5. By adjusting the minimum number of layers of the carbon nanotubes to such a range, it is possible to form a transport fixture that has a high gripping force and is less likely to contaminate the object to be transported. In the second embodiment, by adjusting the maximum number of layers and the minimum number of layers of the carbon nanotubes to the above range, the carbon nanotubes can have excellent mechanical properties and a high specific surface area. Further, the carbon nanotube can be a carbon nanotube aggregate exhibiting excellent adhesive properties. In the second embodiment, the relative frequency of the mode distribution of the number of layers of the carbon nanotubes is preferably 30% or more, more preferably 30% to 100%, still more preferably 30% to 90%, and particularly preferably 30% to 80%, preferably 30% to 70%. By adjusting the relative frequency of the mode of the layer distribution of the carbon nanotubes to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube It can be a carbon nanotube aggregate that exhibits excellent adhesion characteristics. In the second embodiment, the number of layers of the carbon nanotubes is preferably 10 or less, more preferably 1 to 10, and more preferably 2 The number of layers to 8 layers is particularly preferably 2 layers to 6 layers. By adjusting the mode of the layer distribution of the carbon nanotubes to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube can be expressed. A carbon nanotube aggregate with excellent adhesion characteristics. In the second embodiment, the shape of the carbon nanotube may be any shape as long as it has a suitable cross section. For example, the cross section thereof may be a substantially circular shape, an elliptical shape, or an n-angle shape (n is an integer of 3 or more). In the second embodiment, the length of the carbon nanotubes is preferably 50 μm or more, more preferably 550 μm to 3000 μm, still more preferably 600 μm to 2000 μm, still more preferably 650 μm to 1000 μm, and particularly preferably 650 μm to 1000 μm. Good is 700 μm to 1000 μm. By adjusting the length of the carbon nanotube to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube can exhibit excellent adhesive properties. Nano carbon tube assembly. In the second embodiment, the diameter of the carbon nanotubes is preferably from 0.3 nm to 2000 nm, more preferably from 1 nm to 1000 nm, and still more preferably from 2 nm to 500 nm. By adjusting the diameter of the carbon nanotube to the above range, the carbon nanotube can have excellent mechanical properties and a high specific surface area, and further, the carbon nanotube can exhibit excellent adhesive properties. Nano carbon tube assembly. In the second embodiment, the specific surface area and density of the carbon nanotubes can be set to any appropriate value. In one embodiment, at least a portion of the carbon nanotube having a tip end is covered with an inorganic material. The term "portion including at least a tip" as used herein means a portion including at least a tip end of a carbon nanotube, that is, a tip end of the carbon nanotube which is opposite to the first substrate. In the above carbon nanotube, at least a portion including all the tips of the carbon nanotubes may be coated with an inorganic material, or a part of the carbon nanotubes including at least a tip end may be covered with an inorganic material. The content of the carbon nanotubes in which at least the tip portion of the plurality of existing carbon nanotubes is covered with the inorganic material is preferably 50% by weight to 100% by weight, more preferably 60% by weight to 100% by weight. Further, it is preferably 70% by weight to 100% by weight, more preferably 80% by weight to 100% by weight, still more preferably 90% by weight to 100% by weight, most preferably substantially 100% by weight. As long as it is in such a range, it is possible to form a transport fixture that has a high gripping force and is less likely to contaminate the object to be transported. The thickness of the coating layer is preferably 1 nm or more, more preferably 3 nm or more, further preferably 5 nm or more, further preferably 7 nm or more, particularly preferably 9 nm or more, and most preferably 10 nm or more. The upper limit of the thickness of the above coating layer is preferably 50 nm, more preferably 40 nm, further preferably 30 nm, particularly preferably 20 nm, and most preferably 15 nm. As long as it is in such a range, it is possible to form a transport fixture that has a high gripping force and is less likely to contaminate the object to be transported. The length of the coating layer is preferably from 1 nm to 1000 nm, more preferably from 5 nm to 700 nm, further preferably from 10 nm to 500 nm, more preferably from 30 nm to 300 nm, and most preferably from 50 nm to 100 nm. . As long as it is in such a range, it is possible to form a transport fixture that has a high gripping force and is less likely to contaminate the object to be transported. As the above inorganic material, any suitable inorganic material can be employed within the range not impairing the effects of the present invention. As such an inorganic material, for example, SiO is mentioned2
Al2
O3
, Fe2
O3
TiO2
, MgO, Cu, Ag, Au, etc. As a method of producing the carbon nanotube aggregate, any appropriate method can be employed. Examples of the method for producing the carbon nanotube assembly include a method of producing a carbon nanotube aggregate aligned substantially perpendicular to a flat plate by a chemical vapor deposition method (CVD method). In the phase deposition method, a catalyst layer is formed on a flat plate, and a carbon source is filled in a state in which a catalyst is activated by heat or plasma to grow a carbon nanotube. As the flat plate which can be used in the method for producing a carbon nanotube aggregate, any suitable flat plate can be employed. For example, a material which has smoothness and has high temperature heat resistance which can withstand the manufacture of a carbon nanotube can be cited. Examples of such a material include a quartz glass, a tantalum wafer, and the like, and a metal plate such as aluminum. As the means for producing the carbon nanotube aggregate, any appropriate means can be employed. For example, as the thermal CVD apparatus, a hot wall type or the like in which a cylindrical reaction vessel is surrounded by a resistance heating type electric tubular furnace as shown in FIG. 4 can be cited. In this case, as the reaction container, for example, a heat-resistant quartz tube or the like is preferably used. As the catalyst (material of the catalyst layer) which can be used for the production of the carbon nanotube aggregate, any appropriate catalyst can be used. For example, a metal catalyst such as iron, cobalt, nickel, gold, platinum, silver or copper can be cited. When a carbon nanotube aggregate is produced, an alumina/hydrophilic film may be provided between the flat plate and the catalyst layer as needed. As a method of producing the alumina/hydrophilic film, any appropriate method can be employed. For example, SiO can be made on the flat plate.2
The film was obtained by vapor-depositing Al and then raising the temperature to 450 ° C to oxidize it. According to this method of production, Al2
O3
Hydrophilic SiO2
Membrane interaction, formation compared to direct evaporation of Al2
O3
Al with different particle sizes2
O3
surface. If a hydrophilic film is not formed on the flat plate, even if it is heated to 450 ° C after evaporation of Al, it is oxidized, and it is difficult to form Al having different particle diameters.2
O3
Face to face. Moreover, if a hydrophilic film is formed on the flat plate, the Al is directly vapor-deposited.2
O3
, it is also difficult to form Al with different particle sizes.2
O3
Face to face. The thickness of the catalyst layer which can be used for the production of the carbon nanotube aggregate is preferably from 0.01 nm to 20 nm, more preferably from 0.1 nm to 10 nm, in order to form the fine particles. By adjusting the thickness of the catalyst layer which can be used for the production of the carbon nanotube aggregate to the above range, the formed carbon nanotube can have both excellent mechanical properties and a high specific surface area, and further, the nai The carbon nanotubes can be a collection of carbon nanotubes exhibiting excellent adhesion characteristics. The method of forming the catalyst layer can be any suitable method. For example, a method of depositing a metal catalyst by EB (electron beam) or sputtering, a method of applying a suspension of metal catalyst particles to a flat plate, or the like can be given. As a carbon source which can be used for the production of a carbon nanotube aggregate, any appropriate carbon source can be used. For example, a hydrocarbon such as methane, ethylene, acetylene or benzene; an alcohol such as methanol or ethanol; and the like can be mentioned. As the manufacturing temperature in the production of the carbon nanotube aggregate, any appropriate temperature can be employed. For example, in order to form the catalyst particles capable of sufficiently exhibiting the effects of the present invention, it is preferably 400 ° C to 1000 ° C, more preferably 500 ° C to 900 ° C, still more preferably 600 ° C to 800 ° C. (Second Substrate) The second substrate may be a flat plate used to form a carbon nanotube assembly. In other words, the conveyance fixing jig provided with the second base material is obtained by directly laminating a flat plate on which the carbon nanotube aggregate is formed on the second base material. E. Method for manufacturing a fixed fixture
The handling fixture can be manufactured by any suitable method. In one embodiment, an adhesive constituting the adhesive layer is applied onto the first substrate, and after the carbon nanotube assembly is placed on the coating layer formed by the coating, the coating layer is cured. Thereby, an adhesive layer is formed, and a conveyance fixing jig can be obtained. As a method of disposing a carbon nanotube aggregate on a coating layer, for example, a carbon nanotube aggregate is attached from a flat plate having a carbon nanotube aggregate obtained by the method described in the above item D. A method of transferring to the above coating layer. In another embodiment, an adhesive constituting the adhesive layer is applied onto the first substrate, and a flat plate on which the carbon nanotube assembly is laminated is formed on the coating layer formed by the coating (second After the substrate, the coating layer is cured, whereby the conveyance fixing jig can be obtained. As the coating method of the adhesive, any appropriate method can be employed. Examples of the coating method include coating by a notch wheel coater or a die coater, application by a dispenser, application by a doctor blade, or the like. As the curing method of the above-mentioned adhesive coating layer, any appropriate method can be employed. It is preferred to use a method of hardening by heating. The hardening temperature can be appropriately set depending on the kind of the adhesive. The hardening temperature is, for example, 90 ° C to 400 ° C. In one embodiment, when a carbon-based adhesive is used as the adhesive, after curing, firing is performed at a high temperature. The firing temperature is preferably higher than the use temperature of the adhesive, and is, for example, 350 ° C to 3000 ° C. [Examples] Hereinafter, the present invention will be described based on examples, but the present invention is not limited thereto. [Production Example 1] The carbon nanotube assembly was produced on a flat plate (manufactured by Valqua-fft Co., Ltd., thickness: 700 μm) and formed by a sputtering apparatus (manufactured by SHIBAURA MECHATRONICS, trade name "CFS-4ES"). Al2
O3
Film (extreme vacuum: 8.0×10-4
Pa, sputtering gas: Ar, gas pressure: 0.50 Pa, growth rate: 0.12 nm/sec, thickness: 20 nm). In the Al2
O3
On the film, a Fe film was formed as a catalyst layer by a sputtering apparatus (manufactured by SHIBAURA MECHATRONICS, trade name "CFS-4ES") (sputtering gas: Ar, gas pressure: 0.75 Pa, growth rate: 0.012 nm/sec, thickness) : 1.0 nm). Thereafter, the plate was placed in a 30 mmf quartz tube, and a helium/hydrogen (105/80 sccm) mixed gas having a moisture content of 700 ppm was passed through the quartz tube for 30 minutes to replace the inside of the tube. Thereafter, the inside of the tube was heated to 765 ° C using an electric tubular furnace and allowed to stabilize at 765 ° C. The mixture of hydrazine/hydrogen/ethylene (105/80/15 sccm, moisture content: 700 ppm) was filled into the tube while maintaining the temperature at 765 ° C for 60 minutes to form nano carbon on the plate. Tube assembly. [Example 1] An adhesive was applied to a first substrate (made of ceramics). On the adhesive, the carbon nanotube aggregate obtained in Production Example 1 was taken from the above-mentioned flat plate, and placed on the adhesive coating layer to prepare an evaluation sample. The carbon nanotube assembly system sets the average area to 9 mm per area.2
, 4 carbon nanotube assemblies are arranged on the first substrate (total area: 0.36 cm2
). [Example 2] The average area of each of the carbon nanotube assemblies was set to 16 mm.2
(Total area: 0.64 cm2
Except for this, an evaluation sample was produced in the same manner as in Example 1. [Example 3] The average area of each of the carbon nanotube assemblies was set to 36 mm.2
(Total area: 1.44 cm2
Except for this, an evaluation sample was produced in the same manner as in Example 1. [Comparative Example 1] The average area of each of the carbon nanotube assemblies was set to 81 mm.2
(Total area: 3.24 cm2
Except for this, an evaluation sample was produced in the same manner as in Example 1. <Evaluation> The evaluation samples obtained in the examples and the comparative examples were subjected to the following evaluations. The evaluation results are shown in Table 1 together with the load applied to the carbon nanotube aggregate. (1) Contact rate, true contact area The evaluation sample obtained in the examples and the comparative examples was placed on a weight of 128 g and an area of 707 cm.2
The object to be transported. In this case, the load of the object to be transported is applied to all of the four carbon nanotube assemblies, and the load of the object to be transported is applied to all of the carbon nanotube assemblies. The SEM (magnification: 20,000 times) was used to observe the cross section of the surface portion of the carbon nanotube assembly, and the contact ratio between the carrier and the carbon nanotube was measured (nano carbon). The length of the portion of the tube in contact with the object to be transported/the surface of the carbon nanotube aggregate is measured long). Further, the actual contact area is obtained from the area of the carbon nanotube aggregate and the contact ratio by the formula (area of the carbon nanotube aggregate) × (contact ratio). (2) Critical slip angle The object to be transported was placed on the evaluation sample in the same manner as in the above (1). Then, at normal temperature (23 ° C), the evaluation sample carrying the object to be conveyed is tilted, the inclination angle is gradually increased, and the maximum value of the inclination angle at which the object to be conveyed is held in the evaluation sample (not slipping) is measured, and the setting is made. It is the critical slip angle. Further, the critical slip angle was measured by the same method in an environment of 300 °C. (3) Static friction coefficient The measurement was carried out in accordance with JIS K7125. The side of the carbon nanotube assembly of the evaluation sample was placed on a tantalum wafer, and a sliding sheet (bottom surface: felt, 63 mm × 63 mm) was placed thereon, and a weight (sliding piece) was placed on the sliding sheet. The total mass was a weight of 200 g. In this state, the test piece was pulled at a test speed of 100 mm/min, and the static friction coefficient was calculated from the maximum load at which the test piece started moving. Further, the high-temperature high-speed portability was evaluated based on the static friction coefficient. When the static friction coefficient is greater than 1.6, it is judged to have a high-temperature high-speed conveyability which is practically acceptable (in Table 1, △), and when the static friction coefficient is 1.8 or more, it is judged to have excellent high-temperature high-speed handling property (Table 1 in, 〇). [Table 1]
According to Table 1, it can be clearly stated that the load applied to the carbon nanotube aggregate is 0.05 kg/cm.2
The conveyance fixing jig of the present application configured as described above is excellent in gripping power and excellent in high-speed portability at high temperatures.