TW201826422A - Surface 3D detection apparatus and method quickly realizing surface 3D detection of a large-sized sample to be tested without performing vertical scanning - Google Patents

Abstract

This invention relates to a surface 3D detection apparatus and method. The apparatus comprises a lighting unit, a polarization beam splitting unit, a multi-path beam splitting unit, a plurality of phase shifting plates, a polarization combiner, and a detector, wherein a light beam generated by the lighting unit forms a detection light beam and a reference light beam whose polarization directions are perpendicular to each other by the polarization beam splitting unit; the detection light beam and the reference light beam after being superposed are respectively separated into a plurality of sub-beams by the multi-path beam splitting unit, each sub-beam passes through one phase shifting plate to enable the detection sub-beam and the reference sub-beam whose polarization directions are perpendicular to each other in the sub-beam to generate an additional phase difference, and finally generate a plurality of interference signals on the surface of the detector; wherein the additional phase differences generated by the plurality of phase shifting plates are different from each other. This invention can quickly realize the surface 3D detection of a large-sized sample to be tested without performing vertical scanning.

Description

Surface 3D detection device and detection method

The invention relates to a surface 3D detection device and a detection method.

Concepts such as "Super Moore's Law" lead the IC industry from the era of pursuing manufacturing technology nodes to a new era that is more dependent on the development of chip packaging technology. Compared with traditional packaging, Wafer Level Packaging (WLP) has significant advantages in reducing package size and saving process costs. Therefore, WLP will be one of the main technologies supporting the continuous development of the IC industry in the future.

WLP mainly includes Pillar / Gold / Solder Bump, RDL, TSV and other manufacturing technologies. In order to increase the yield of wafer manufacturing, the wafers need to be inspected for defects during the entire packaging process. Early equipment mainly focused on surface 2D defect inspections, such as contamination, scratches, and particles. With the increase of process control requirements, it is more and more necessary to detect the 3D features on the surface, such as Bump height, RDL thickness, TSV hole depth, etc.

At present, the industry's methods for surface 3D measurement mainly include laser triangulation, laser confocal, and interferometer. Among them, laser triangulation can be scanned using Laser Line, which greatly improves the detection speed, but the accuracy is relatively low; laser Although the confocal and interferometer can obtain higher vertical resolution, it needs to perform vertical scanning, the detection efficiency is low, and it is difficult to meet the needs of wafer full-chip scanning detection.

The invention provides a surface 3D detection device and a detection method to solve the above technical problems in the conventional technology.

In order to solve the above technical problem, the present invention provides a surface 3D detection device, which includes an illumination unit, a polarization beam splitting unit, a multi-path light beam splitting unit, a plurality of phase shift plates, a polarization combiner, and a detector in order along the beam propagation direction; The light beam generated by the illumination unit passes through the polarization beam splitting unit to form a detection beam and a reference beam whose polarization directions are perpendicular to each other; the detection beam enters the surface of the sample to be measured and is reflected and enters the polarization beam splitting unit again; A reference beam is incident on a first reflector of the polarization beam splitting unit, and after reflecting on the surface of the first mirror, it enters the polarization beam splitting unit again, and is superimposed on the detection beam reflected on the surface of the sample to be measured. ; The superposed detection beam and reference beam are separated into multiple sub-beams by the multi-path beam splitting unit, and each sub-beam passes a corresponding phase shift plate so that the polarization directions contained in the sub-beams are perpendicular to each other. The detection sub-beam and the reference sub-beam generate an additional phase difference, and then each sub-beam passes through the polarization combiner to make each detection sub-beam And the reference sub-beams have the same polarization direction, thereby producing a plurality of interference signals on the detector surface; wherein said plurality of additional phase shift retardation plate produced from each other.

Preferably, the lighting unit includes a light source, a collimated beam expander, and a second reflector in this order, and the light beam emitted by the light source passes through the collimated beam expander and enters the second reflector and passes through the second reflector. The second reflecting mirror is incident on the polarization beam splitting unit.

Preferably, the light source is a mercury lamp, a xenon lamp, a halogen lamp or a laser light source.

Preferably, the collimating beam-expanding unit includes a first lens and a second lens which are sequentially arranged.

Preferably, the polarization beam splitting unit further includes a polarization beam splitter, a first 1/4 Wave plate, third lens, second 1/4 The wave plate, the fourth lens, and the fifth lens, the light beam generated by the illumination unit is divided into a detection beam and a reference beam whose polarization directions are perpendicular to each other after the polarization beam splitter, and the detection beam passes through the first 1 / 4 After the wave plate and the third lens, it is incident on the surface of the sample to be measured, and after being reflected by the surface of the sample to be measured, it passes through the third lens and the first 1/4 again. The wave plate is rotated by 90 ° in the polarization direction, passes through the polarization beam splitter, and is incident on the multi-path optical beam splitting unit through a fifth lens; the reference beam passes through the second 1/4 After the wave plate and the fourth lens, it is incident on the first mirror, and after being reflected by the first mirror, it passes through the fourth lens and the second 1/4 again. The wave plate has a polarization direction rotated by 90 °, is reflected by the polarization beam splitter, and is incident on the multi-path optical beam splitting unit through the fifth lens.

Preferably, a plurality of interference objective lenses with different magnifications are provided between the illumination unit and the sample to be measured.

Preferably, the interference objective lens is switched by an objective lens wheel.

Preferably, the light emitted from the illumination unit is incident on the interference objective lens through the polarization beam splitting unit, and the polarization beam splitting unit is a first beam splitter.

Preferably, the multi-path optical beam splitting unit adopts a diffractive optical element, and the diffractive optical element generates a plurality of area-array interference patterns or a plurality of strip-shaped interference signals on the surface of the detector.

Preferably, the multi-path optical beam splitting unit includes n second beam splitters, and the n second beam splitters separate the superposed detection beam and the reference beam into n + 1 sub-beams, each of which passes through one A corresponding phase shift plate, a corresponding polarization combiner, is incident on a corresponding detector, where n is a positive integer.

Preferably, the detector is a CMOS or CCD sensor.

Preferably, the multi-path optical beam splitting unit uses a spatial light modulator.

The invention also provides a surface 3D detection method. Using the surface 3D detection device, the height of the measurement point relative to the reference plane is calculated based on multiple interference signals generated on the surface of the detector at any measurement point at the same time.

Preferably, the calculation formula of the height h of the measurement point relative to the reference plane is:

among them, The wavelength of the light beam generated by the lighting unit, Is the phase difference between the superimposed probe beam and the reference beam.

Preferably, when the multi-path optical beam splitting unit separates the superposed detection beam and the reference beam into four sub-beams, the phase difference The calculation formula is:

Among them, I ₁ , I ₂ , I ₃ , and I ₄ are the intensity of interference signals generated by the four sub-beams on the surface of the detector, respectively.

Preferably, the calculation formulas of I ₁ , I ₂ , I ₃ and I ₄ are:

Where A and B are constants.

Compared with the conventional technology, the surface 3D detection device and method provided by the present invention do not need to perform vertical scanning, and can instantly obtain multiple interference signals of measurement points, thereby calculating the height of the surface of the sample to be measured in the field of view. Information, combined with the scanning of the motion table, can quickly realize the 3D detection of the surface of large-sized samples to be tested, thereby improving the detection efficiency.

In order to express the technical solution of the above invention in more detail, specific examples are listed below to prove the technical effects; it should be emphasized that these examples are used to illustrate the present invention and not to limit the scope of the present invention.

Example one

A surface 3D detection device provided by the present invention, please refer to FIG. 1, and includes an illumination unit 10, a polarization beam splitting unit 20, a multi-path optical beam splitting unit 30, and a plurality of phase shift plates 40a, 40b, and 40c in order along a beam propagation direction. , 40d, and detector 50; the incident beam 100 generated by the illumination unit 10 forms a detection beam 101 and a reference beam 102 through the polarization beam splitting unit 20; the detection beam 101 is incident on the surface of the sample 60 to be measured and passes through the After the surface reflects, it enters the polarization beam splitting unit 20 again; the reference beam 102 enters the second reflection mirror 26, and after reflecting on the surface of the second mirror 26, it enters the polarization beam splitting unit 20 again, and communicates with The detection beam 101 reflected on the surface of the sample to be measured 60 is superimposed, that is, the reference optical path coincides with the detection optical path; the outgoing beam 103 (ie, the superimposed detection beam 101 and reference beam 102) emitted from the polarization beam splitting unit 20 passes through The multi-path optical beam splitting unit 30 is separated into multi-path branches (in this embodiment, the branches are four-way), and the four-way branches respectively correspond to a phase shift plate 40a, 40b, 40c, and 40d, and the polarization directions are detected perpendicular to each other. Light Beam 101 and reference beam 102 generate an additional phase difference, and then pass through the polarization combiner 41 so that the detection beam 101 and the reference beam 102 have the same polarization direction, thereby generating an interference signal on the surface of the detector 50; The phase shift plates 40a, 40b, 40c, and 40d in FIG. 3B generate different phase differences. In the present invention, the multi-path optical beam splitting unit 30 is used to separate the interference signals into multi-path branches. The phase-shift technique is used to obtain multiple interference signals at a single measurement point on the surface of the sample 60 to be measured. In this way, vertical scanning is not required. Instantly obtain multiple interference signals from the measurement points to calculate the height information of the surface of the sample 60 to be measured in the field of view, and cooperate with the scanning of the moving stage 61 to quickly achieve 3D detection of the surface of the large sample 60 to be tested, which improves the detection. effectiveness.

Preferably, please continue to refer to FIG. 1, the lighting unit includes a light source 11, a collimating beam expanding unit, and a first reflector 14 in order, wherein the collimating beam expanding unit includes a first lens 12 and The second lens 13 is used for collimating and expanding the light beam emitted from the light source 11, and the light emitted by the collimating and expanding unit enters the first reflecting mirror 14 and is reflected by the first reflecting mirror 14. And then incident on the polarization beam splitting unit 20. Preferably, the light source 11 may be a monochromatic light source, such as a semiconductor laser, an optical fiber laser, a gas laser, or the like; a wide-band white light such as a mercury lamp, a xenon lamp, or a halogen lamp may also be used. Better white light with a wider wavelength range can increase the measurement range of the surface height of the sample 60 to be measured. The wavelength of the light beam emitted by the light source 11 is Means.

Preferably, please continue to refer to FIG. 1. The polarization beam splitting unit 20 further includes a polarization beam splitter 21, a first 1/4 Wave plate 22, third lens 23, second 1/4 The wave plate 24, the fourth lens 25, and the fifth lens 27. The incident light beam 100 generated by the illumination unit 10 is divided into a detection beam 101 and a reference beam 102 whose polarization directions are perpendicular to each other after passing through the polarization beam splitter 21. The detection beam 101 passes through the first 1/4 After the wave plate 22 and the third lens 23 are incident on the surface of the sample 60 to be measured on the moving stage 61, the surface of the sample 60 to be measured is reflected again by the first 1/4 The wave plate 22 is rotated by 90 ° in the polarization direction, passes through the polarization beam splitter 21, and is incident on the multi-path optical beam splitting unit 30 through a fifth lens 27; the reference beam 102 passes through the second 1/4 After the wave plate 24 and the fourth lens 25, the light is incident on the second mirror 26, and is reflected by the second mirror 26 again through the second quarter The wave plate 24 is rotated by 90 ° in the polarization direction, is reflected by the polarization beam splitter 21, and is incident on the multi-path optical beam splitting unit 30 through the fifth lens 27, so as to form a detection beam 101 and a reference beam 102. When the light beam 103 is emitted, it is superimposed in space. Since the distance between the polarization beam splitter 21 and the second reflector 26 is constant, and the distances between the polarization beam splitter 21 and different measurement points on the surface of the sample 60 to be measured vary with the height of the measurement points, When the probe beam 101 and the reference beam 102 reflected from different positions on the surface of the sample 60 to be measured are superimposed, different phase differences will occur. The phase difference is directly related to the height of the measurement point, and the phase difference appears as different light intensity on the detector 50. That is, the light intensity information carries height information of the measurement points. In order to extract the height information of the measurement points, the outgoing beam 103 needs to be entered into the multi-path beam splitting unit 30.

Preferably, please refer to FIG. 1. In this embodiment, the multi-path optical beam splitting unit 30 uses a diffractive optical element (DOE, full English name: Diffraction Optical Elements) to realize multi-path light output. In this embodiment, The branches are four-way. The four-way branches are generated by the corresponding phase shift plates 40a, 40b, 40c, and 40d. Each phase shift plate 40a, 40b, 40c, and 40d can generate a detection beam 101 and a reference beam 102 with polarization directions perpendicular to each other. Specific phase difference, for example, the additional phase differences of 40a, 40b, 40c, and 40d are 0, π / 2, π , and 3π / 2, respectively. The polarization combiner provided after the phase shift plates 40a, 40b, 40c, and 40d 41, the detection beam 101 and the reference beam 102 can be made to have the same polarization direction, thereby causing interference on the surface of the detector 50.

The present invention also provides a surface 3D detection method. An incident light beam 100 generated by the illumination unit 10 is used to form a detection beam 101 and a reference beam 102 through a polarization beam splitting unit 20. The detection beam 101 and the reference beam 102 are superimposed and multi-pathed. The beam splitting unit 30 is separated into multiple branches, and each branch generates a phase difference after passing through a phase shift plate 40a, 40b, 40c, 40d, thereby generating an interference signal on the surface of the detector 50. The phase shift plate in each branch The additional phase differences generated by 40a, 40b, 40c, and 40d are different, and the height of the measurement point with respect to the reference plane is calculated based on the interference signal generated at the same time of the arbitrary measurement point on the surface of the detector 50.

Specifically, the phase differences generated by the phase shift plates 40a, 40b, 40c, and 40d can be designed as required. In this embodiment, the additional phase differences generated by the phase shift plates 40a, 40b, 40c, and 40d are: ; ; ; For example, the interference signal generated by four-way light can be simplified as (for the convenience of description, only the interference of monochromatic light is considered here):

(1)

In the above formula, A and B are undetermined coefficients. Indicates the phase difference between the detection optical path and the reference optical path, and h indicates the height of the surface of the sample 60 to be measured relative to the reference zero plane, where the reference zero plane is selected as a virtual plane that satisfies the following conditions: the distance from the reference zero plane to the polarization beam splitter 21 It is equal to the distance from the second mirror 26 to the polarization beam splitter 21. In this way, when the additional phase differences of the phase shift plates 40a, 40b, 40c, and 40d are 0, π / 2, π , and 3π / 2, respectively, the phase difference between the detection optical path and the reference optical path The calculation method is as follows:

(2)

Please refer to Figure 2 for emphasis. The solid squares, prisms, triangles, and circles indicate the interference signals on the surface of the detector 50 after the four phase shift plates 40a, 40b, 40c, and 40d, respectively. T1-T4 indicates Different measurement points on the surface of the sample to be measured 60 have different height differences from the reference zero plane, and the interference signals corresponding to the measurement points plotted above T1-T4 are also different. For any measurement point, according to the intensity I _{i of the} four-channel interference light (i = 1, 2, 3, 4), it can be calculated by formula (2) To calculate the height of the point relative to the reference zero plane:

(3)

Preferably, the detector 50 in this embodiment uses a CMOS or CCD sensor, and the phase shift plates 40a, 40b, 40c, and 40d will generate four area-array interference patterns on the surface of the detector 50 (such as Figures 3a to 3d), the pixels at the same position in the four interference patterns correspond to the same point in the detection field of view, and the height of each point can be calculated based on the light intensity values recorded by the four pixels through an algorithm Calculated.

The surface 3D detection method provided by the present invention does not need to perform vertical scanning, and can instantly obtain multiple interference signals of measurement points, thereby calculating the height information of the surface of the sample 60 to be measured in the field of view. Quickly implement 3D inspection of the surface of the large-sized sample 60 to be tested, thereby improving detection efficiency.

Example two

Preferably, please refer to FIG. 4. The difference between this embodiment and the first embodiment is that the multi-path optical beam splitting unit is composed of n second beam splitters 31a, 31b, and 31c, where n is positive Integer, the number of the second beam splitters 31a, 31b, and 31c in this embodiment is three. The three second beam splitters 31a, 31b, and 31c divide the beam into four branches, and each branch corresponds to a corresponding phase. Moving plates 40a, 40b, 40c, 40d, a corresponding polarization combiner 41a, 41b, 41c, 41d, and a corresponding detector 50a, 50b, 50c, 50d. In other words, compared to the first embodiment, this embodiment In each branch, each phase is equipped with its own phase shift plate, polarization combiner, and detector. Under this configuration, the photosensitive area of each detector 50a, 50b, 50c, 50d will be fully utilized. Compared with the detection field of view, The first example is increased by 4 times, which further improves the detection efficiency.

Example three

Preferably, the difference between this embodiment and the first embodiment is that this embodiment uses a linear light source for detection. Please refer to FIG. 5 for emphasis. Four linear beams are separated from the multi-path optical beam splitting unit 30. After moving the plates 40a, 40b, 40c, 40d, and the polarization combiner 41, they enter the detector 50. Please refer to Figure 6. Four-way light will generate four strip-shaped interference signals P1, P2, P3, and P4 on the surface of the detector 50. The four light intensity values on the same column correspond to the interference signal at the same point. According to the formula (1 ) And (2) to obtain the height value h at that point. By processing each column of pixels in turn, the surface height change of the sample 60 to be measured on a line can be obtained, as shown by the circled curve in FIG. 6. In this embodiment, vertical scanning is not required, and 3D detection of the surface of a large-sized sample to be tested can be quickly implemented.

Embodiment 4

Preferably, please refer to FIG. 7. The difference between this embodiment and the first embodiment is that the multi-path optical beam splitting unit 30 uses a spatial light modulator to perform beam splitting. Specifically, the multi-path optical beam splitting unit 30 The unit 30 is divided into four areas: area 1, area 2, area 3, and area 4. By changing the polarization angles in the four areas, area 1, area 2, area 3, and area 4, four or more channels can be realized. The light is split, and each branch enters the corresponding phase plate 40a, 40b, 40c, 40d, respectively. This embodiment uses a spatial light modulator to perform beam splitting, which can realize more flexible configuration of the optical path and more separate detection branches.

Example 5

Preferably, please refer to FIG. 8 in detail. The interference objective lenses 29a, 29b, and 29c of different magnifications are provided between the illumination unit 10 and the sample 60 to be measured. In this embodiment, the interference objective lenses 29a, 29b, and 29c are provided. The number is 3, and the magnifications are 5X, 10X, and 20X. Preferably, the interference objective lenses 29a, 29b, and 29c are switched by the objective lens wheel 29, and the interference objective lenses 29a, 29b, and 29c are switched. The larger the magnification, the smaller the detection field of view 70, and the higher the horizontal resolution. Preferably, the output light of the illumination unit 10 is incident on the interference objective lenses 29a, 29b, and 29c through the first beam splitter 28, and is used to guide detection light to the interference objective lenses 29a, 29b, and 29c.

In summary, a surface 3D detection device and a detection method provided by the present invention include an illumination unit 10, a polarization beam splitting unit 20, a multi-path light beam splitting unit 30, and a plurality of phase shift plates 40a in order along the beam propagation direction. , 40b, 40c, 40d and detector 50; the light beam generated by the illumination unit 10 forms a detection beam 101 and a reference beam 102 through the polarization beam splitting unit 20; the detection beam 101 is incident on the surface of the sample 60 to be measured and reflected And then enters the polarization beam splitting unit 20 again; the reference beam 101 enters the second reflection mirror 26, and after reflecting on the surface of the second reflection mirror 26, enters the polarization beam splitting unit 20 again, and passes through the polarization beam splitting unit 20; The detection beam 101 reflected on the surface of the test sample 60 is superimposed; the superposed detection beam 101 and the reference beam 102 are separated into multiple branches by the multi-path optical beam splitting unit 30, and each branch corresponds to a phase shift plate 40a, 40b. , 40c, 40d, the detection beam 101 and the reference beam 102 which make the polarization directions perpendicular to each other generate an additional phase difference, and then pass through the polarization combiner 41, so that the detection beam 101 and the reference beam 102 have the same polarization direction Thereby generating an interference signal on the detector surface 50; each of said channel branches phase shift plates 40a, 40b, 40c, 40d of different phase generated extra. The invention does not need to perform vertical scanning, and can obtain multiple interference signals of measurement points in an instant, thereby calculating the height information of the surface of the sample 60 to be measured in the field of view. With the scanning of the moving stage 61, a large-sized sample to be measured can be quickly realized. 60's surface 3D inspection.

Obviously, those skilled in the art can make various modifications and variations to the invention without departing from the spirit and scope of the invention. In this way, if these modifications and variations of the present invention fall within the scope of the patent application for the present invention and the scope of equivalent technologies, the present invention also intends to include these modifications and variations.

Zones 1, 2, 3, 4‧‧‧

10‧‧‧lighting unit

11‧‧‧ light source

12‧‧‧first lens

13‧‧‧Second lens

14‧‧‧First Mirror

20‧‧‧ polarization beam splitting unit

21‧‧‧ polarization beam splitter

22‧‧‧First 1/4 Wave plate

23‧‧‧ Third lens

24‧‧‧Second 1/4 Wave plate

25‧‧‧Fourth lens

26‧‧‧Second Mirror

27‧‧‧ fifth lens

28‧‧‧First beam splitter

29‧‧‧ objective lens runner

29a, 29b, 29c‧‧‧Interference objective lens

30‧‧‧Multi-path beam splitting unit

31a, 31b, 31c, 31d‧‧‧Second Beamsplitter

40a, 40b, 40c, 40d‧‧‧‧phase shift plate

41, 41a, 41b, 41c, 41d‧‧‧polarization combiners

50, 50a, 50b, 50c, 50d

60‧‧‧Test sample

61‧‧‧Sports

70‧‧‧ detection field of view

100‧‧‧ incident beam

101‧‧‧Probe

102‧‧‧Reference beam

103‧‧‧ outgoing beam

FIG. 1 is a schematic structural diagram of a surface 3D detection device according to the first embodiment of the present invention.

FIG. 2 is a schematic diagram of interference signals at four measurement points in the first embodiment of the present invention.

Figures 3a to 3d are the interference patterns generated on the detector surface by the four measurement points in Figure 2, respectively.

FIG. 4 is a schematic structural diagram of a multi-optical path beam splitter in Embodiment 2 of the present invention.

FIG. 5 is a schematic structural diagram of a centerline light source detector according to the third embodiment of the present invention.

FIG. 6 is a schematic diagram of the interference pattern and surface height calculation results of the detector in Embodiment 3 of the present invention.

FIG. 7 is a schematic structural diagram of a spatial light modulator in Embodiment 4 of the present invention.

FIG. 8 is a schematic structural diagram of a surface 3D detection device according to Embodiment 5 of the present invention.

Claims (16)

A surface 3D detection device includes an illumination unit, a polarization beam splitting unit, a plurality of light beam splitting units, a plurality of phase shift plates, a polarization combiner, and a detector in order along a beam propagation direction. The beam passes through the polarization beam splitting unit to form a detection beam and a reference beam whose polarization directions are perpendicular to each other; the detection beam is incident on a surface of a sample to be measured and is reflected and enters the polarization beam splitting unit again; the reference beam is incident on the polarization A first reflector of the beam splitting unit is reflected by the surface of the first mirror and enters the polarization beam splitting unit again, and is superposed with the detection beam reflected on the surface of the sample to be measured; the superposed detection beam and the The reference beam is separated into a plurality of sub-beams by the plurality of optical beam splitting units, and each of the sub-beams passes a corresponding phase shift plate, so that a detection sub-beam included in the sub-beams whose polarization directions are perpendicular to each other and and A reference sub-beam generates an additional phase difference, and then each sub-beam passes through the polarization combiner, so that each of the probe sub-beam and the reference sub-beam Beam having the same polarization direction, thereby generating a plurality of interference signals on the detector surface; wherein the plurality of plates to generate additional phase shift of phase from each other. The surface 3D detection device according to item 1 of the scope of patent application, wherein the illumination unit comprises a light source, a collimated beam expander and a second reflector in order, and the light beam emitted by the light source passes through the collimated beam expander. The light is incident on the second reflector and reflected by the second reflector and incident on the polarization beam splitting unit. The surface 3D detection device according to item 2 of the patent application scope, wherein the light source is a mercury lamp, a xenon lamp, a halogen lamp, or a laser light source. The surface 3D detection device according to item 2 of the scope of patent application, wherein the collimating and expanding unit includes a first lens and a second lens which are sequentially arranged. The surface 3D detection device according to item 1 of the patent application scope, wherein the polarization beam splitting unit further includes a polarization beam splitter, a first 1/4 Wave plate, a third lens, a second 1/4 A wave plate, a fourth lens, and a fifth lens, the light beam generated by the illumination unit is divided into the detection beam and the reference beam whose polarization directions are perpendicular to each other after the polarization beam splitter, and the detection beam passes through the first 1 / 4 After the wave plate and the third lens, it is incident on the surface of the sample to be measured, and after being reflected by the surface of the sample to be measured, it passes through the third lens and the first 1/4 again. The wave plate is rotated by 90 ° in the polarization direction, passes through the polarization beam splitter, and is incident on the plurality of optical beam splitting units through the fifth lens; the reference beam passes through the second 1/4 The wave plate and the fourth lens are incident on the first mirror, and are reflected by the first mirror again through the fourth lens and the second 1/4 The wave plate is rotated by 90 ° in the polarization direction, is reflected by the polarization beam splitter, and is incident on the plurality of optical beam splitting units through the fifth lens. The surface 3D detection device according to item 1 of the scope of patent application, wherein a plurality of interference objectives with different magnifications are provided between the illumination unit and the sample to be measured. The surface 3D detection device according to item 6 of the patent application scope, wherein the plurality of interference objective lenses are switched by an objective lens wheel. The surface 3D detection device according to item 6 or item 7 of the patent application scope, wherein the light emitted from the illumination unit is incident on the interference objective lens through the polarization beam splitting unit, and the polarization beam splitting unit is a first beam splitter . The surface 3D detection device according to item 1 of the scope of patent application, wherein the plurality of light beam splitting units use a diffractive optical element, and the diffractive optical element generates a number of area-array interference patterns or Several bar-shaped interference signals. The surface 3D detection device according to item 1 of the patent application scope, wherein the plurality of optical beam splitting units include n second beam splitters, and the n second beam splitters will superimpose the detection beam and the reference. The beam is split into n + 1 sub-beams, each of which passes through a corresponding phase shift plate, a corresponding polarization combiner, and is incident on a corresponding detector, where n is a positive integer. The surface 3D detection device according to item 1 of the patent application scope, wherein the detector uses a CMOS or CCD sensor. The surface 3D detection device according to item 1 of the patent application scope, wherein the plurality of optical beam splitting units adopt a spatial light modulator. A surface 3D detection method using the surface 3D detection device as described in any one of claims 1 to 12 of the scope of patent application, based on a plurality of interference signals generated on the surface of the detector at any one measurement point at the same time The height of this measurement point relative to the reference plane. The surface 3D detection method according to item 13 of the scope of patent application, wherein the calculation formula of the height h of the measurement point relative to the reference plane is: among them, The wavelength of the light beam generated by the lighting unit, Is the phase difference between the superimposed probe beam and the reference beam. The surface 3D detection method according to item 14 of the scope of patent application, wherein when a plurality of optical beam splitting units separate the superposed detection beam and the reference beam into four sub-beams, the phase difference The calculation formula is: Among them, I ₁ , I ₂ , I ₃ , and I ₄ are the intensity of interference signals generated by the four sub-beams on the surface of the detector, respectively. The surface 3D detection method according to item 15 of the scope of patent application, wherein: I ₁ , I ₂ , I ₃ , I ₄ are calculated as: Where A and B are constants.