TW201820452A - Gas phase etching apparatus and gas phase etching method - Google Patents

Abstract

A gas phase etching apparatus and a gas phase etching method are provided. The apparatus includes a tank body having an isolation chamber, a fogging chamber and a reaction chamber provided between the isolation chamber and the fogging chamber. There is a slit between the fogging chamber and the reaction chamber. An outlet is provided between the isolation chamber and the reaction chamber with respect to the slit. A partition is disposed in the isolation chamber for partitioning the isolation chamber into an exhaust channel connected to the outlet and a non-reactive gas supply channel far away from the outlet, and the partition has an air inlet disposed opposite the outlet to provide passage of non-reactive gases to produce an air curtain to isolate the off-gas.

Description

Vapor phase etching reaction device and vapor phase etching method

The present invention relates to a vapor phase etching apparatus, and more particularly to a vapor phase etching reaction apparatus and a vapor phase etching method.

In recent years, the semiconductor industry has flourished under the guidance of the development policy of high-tech industries. With the improvement of various manufacturing technologies and the expansion of production scale, it has become a fast-growing emerging mainstream industry. Semiconductor processes are mostly carried out in confined spaces in clean rooms, so they are often mistaken for a clean, pollution-free industry. In fact, there are hundreds of chemicals used in semiconductor processes (for example, reactive gases, acid-base solutions, organic solvents, and photosensitive polymers, metals, etc.), and some of the hazardous materials often exceed the legally acceptable concentration. Therefore, the semiconductor industry is blamed as a dangerous workplace.

In the manufacturing process of semiconductors, the chemicals used in the etching reaction are generally toxic, such as hydrofluoric acid having strong reactivity. However, the conventional vapor phase etching apparatus forms a vapor mist in a heating manner, and is stably controlled by uniform distribution of the vapor, so that the heating device is often damaged.

The invention provides a vapor phase etching reaction device capable of avoiding leakage of a highly toxic etchant.

The invention provides a vapor phase etching method, which can guide the flow direction of the gas field, avoid leakage of highly toxic etchant, and ensure the safety of the working environment.

The vapor phase etching reaction device of the present invention comprises a tank body having an isolation chamber, a mist chamber and a reaction chamber disposed between the isolation chamber and the mist chamber. There is a slit between the mist chamber and the reaction chamber for the atomized reaction gas to enter the reaction chamber. Between the isolation chamber and the reaction chamber, an outlet is disposed opposite the slit for exhaust gas to exit the reaction chamber. There is also a partition in the isolation chamber for separating the isolation chamber into an exhaust passage connected to the outlet and a non-reactive gas supply passage away from the outlet, and the partition has an air inlet disposed opposite to the outlet to provide a The reaction gas passes through to create an air curtain that isolates the above exhaust gas.

The gas phase etching reaction apparatus of the present invention is operated by first providing a vapor phase etching reaction apparatus as described above, and further providing a non-reactive gas through the non-reactive gas supply passage to generate a gas curtain at the air inlet. Then, the atomized reaction gas supplied from the mist chamber is driven into the reaction chamber through the slit to perform vapor phase etching and generate exhaust gas. The pressure difference between the non-reactive gas supply passage and the reaction chamber is utilized, so that the exhaust gas exits the reaction chamber through the outlet and is discharged from the exhaust passage and prevents the exhaust gas from escaping with the air curtain.

Based on the above, the device and method of the present invention integrate the slave control method to isolate the gas mist leakage problem of the reaction gas, and can be combined with the normal temperature atomization device to adjust the efficiency and durability of the gas mist device.

In order to make the above-described features of the present invention more comprehensible, the following detailed description of the embodiments will be described in detail below.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a vapor phase etching reaction apparatus in accordance with a first embodiment of the present invention. Referring to FIG. 1 , the vapor phase etching reaction device of the first embodiment includes a tank body 100 having an isolation chamber 102 , a mist chamber 104 , and a chamber disposed between the isolation chamber 102 and the mist chamber 104 . Reaction chamber 106. There is a slit 108 between the mist chamber 104 and the reaction chamber 106. An outlet 110 is disposed between the isolation chamber 102 and the reaction chamber 106 relative to the slit 108. In addition, there is a partition 112 in the isolation chamber 102 for separating the isolation chamber 102 into an exhaust passage 114 connected to the outlet 110 and a non-reactive gas supply passage 116 away from the outlet 110, and the partition 112 has a relative An air inlet 118 is provided at the outlet 110. In addition, the tank body 100 can also have an opening 120, which is connected to the isolation chamber 102 and disposed opposite to the air inlet 118, so that it can be combined with the device such as the tray 122 to enter and exit the reaction chamber 106 from the opening 120, the air inlet 118 and the outlet 110. The processed wafer 124 can be placed on the tray 122.

2 is a schematic cross-sectional view of the vapor phase etching reaction apparatus of FIG. 1 taken along a gas flow direction. Referring to FIG. 2, when the non-reactive gas 200 passes through the non-reactive gas supply passage 116, a gas curtain 202 is generated at the air inlet 118. Please also refer to FIG. 1, wherein the outlet 110 has a size smaller than the size of the air inlet 118 and is exhausted. The action of the track 114 contributes to the isolation of the air curtain 202. Therefore, when the atomized reaction gas 204 enters the reaction chamber 106 through the slit 108 and reacts with the wafer 124 or a film layer (not shown) on the surface thereof, it contains unreacted residual reaction gas 204 and other reactions formed by the reaction. The gas off-gas 206 can be exited from the reaction chamber 106 from the outlet 110 between the isolation chamber 102 and the reaction chamber 106 and isolated via the gas curtain 202; for example, the use of HF as the reactive gas 204 for cerium oxide (SiO ₂ ) Etching, the exhaust gas 206 may contain unreacted HF and SiF ₄ formed by the reaction. Thereafter, the exhaust gas 206 and the non-reactive gas 200 are discharged together through the exhaust passage 114 to the tank 100 and may be sent to an exhaust gas treatment device (not shown). The atomized reactive gas 204 is provided, for example, by an aerosol device (not shown) that is driven from the gas curtain 202, as will be described in detail below. The non-reactive gas 200 is, for example, a clean dry air (CDA), a high-pressure nitrogen gas or a high-pressure argon gas, and the like, so that the non-reactive gas supply passage 116 is in a high pressure state. The reaction gas 204 is, for example, selected from the group consisting of hydrofluoric acid, nitric acid, sulfuric acid, hydrochloric acid, oxalic acid, phosphoric acid, sodium hydroxide, potassium hydroxide, an organic solvent, or a combination thereof.

3 is a side view of a fogging chamber of the vapor phase etching reaction apparatus of FIG. 1. Referring to FIG. 3, the mist-making chamber 104 in the first embodiment is a fluid swirling space, and only a reactive suspended micro-mist having a small particle size (such as a droplet below 10 μm) will drift from the slit 108 to the reaction. The cavity 106 (Fig. 1) and the slit 108 are disposed closer to the bottom 104b of the misting chamber 104, but the invention is not limited thereto. Since the position of the slit 108 directly affects the flow direction and range of the reactive gas 204 (Fig. 2), the slit can be set as needed according to the position of the wafer 124 (Fig. 1) placed in the reaction chamber 106. 108 location. The size (or width) of the slit 108 can also be changed, for example, to the side edges 104c and 104d of the mist chamber 104.

4A, 4B, and 4C are cross-sectional views of other embodiments of the isolation chamber 102 of Fig. 2. Referring to FIG. 4A, there may be another partition 400 in the exhaust passage 114 of the isolation chamber 102 to divide it into a two-layer structure composed of an inner exhaust passage 402 and an outer exhaust passage 404 to increase the air curtain. The airflow resistance caused by 202 can make the gas curtain 202 more stable in the ability to isolate the gas, and control the flow of the reaction exhaust gas through the outlet 406 through the inner exhaust passage 402. In addition, referring to FIG. 4B, the difference from FIG. 4A is that the outermost groove body 100 of the non-reactive gas supply passage 116 of the isolation chamber 102 also has an extension portion 408 extending toward the outer layer exhaust passage 404 to become a section. The L-shaped structure increases the airflow resistance caused by the air curtain 202, and the air curtain 202 is more stable in gas isolation, and is reduced from the opening 120 to the outside of the isolation chamber 102. In addition, please refer to FIG. 4C, which differs from FIG. 4A in that the tray 410 is a stepped structure in which a lower plane can carry a wafer (such as 124 in FIG. 1), and a higher plane can enter the isolation chamber 102 in the tray 410. Thereafter, the outlet 406 and the opening 120 are blocked and even closed, so that the airtightness of the reaction chamber can also be increased.

Different types of aerosol devices in the vapor phase etching reaction apparatus of the present invention will be described below.

Figure 5 is a cross-sectional view of a vapor phase etching reaction apparatus along a gas flow direction in accordance with a second embodiment of the present invention, wherein the same reference numerals are used to denote the same or similar members as in the first embodiment. Fig. 6 is a side view of the mist forming chamber of the vapor phase etching reaction apparatus of Fig. 5.

Please refer to FIG. 5 and FIG. 6 at the same time. The vapor phase etching reaction apparatus of the second embodiment uses the heating atomization apparatus 500 as an aerosol apparatus, which includes a liquid accommodating area 502 located in the smog chamber 104 and a heating element 504 for heating the liquid accommodating area. The liquid of 502, wherein the liquid containing area 502 can accommodate a single liquid or a mixed liquid; when the mixed liquid includes more than one agent. The surface of the heating element 504 can have a corrosion resistant protective layer, such as a graphite layer. In addition, a driven stirring device (not shown) such as a stirring rod or a pneumatic (bubble) agitator may be disposed in the heating atomizing device 500 to enhance the uniformity of the heating of the solution, and even combine the heating element 504 with the stirring function. Since the heating of the atomizing device 500 causes the temperature in the misting chamber 104 to be higher than the temperature of the reaction chamber 106, a temperature difference is generated. Once the atomized reaction gas enters the low temperature reaction chamber 106 from the high temperature mist chamber 104, it may condense and adversely affect the processing of the wafer 124. Therefore, a heat retaining device 506 may be added to the reaction chamber 106 to hold the wafer. The temperature of 124 is above a predetermined temperature to prevent condensation from occurring. In addition, the reaction chamber 106 can also be designed to have a bottom 508 inclined toward the fogging region 104, and a through hole 510 is disposed between the mist chamber 104 and the reaction chamber 106 to condense the exhaust gas and flow through the through hole 510 from the bottom surface 508. And flowing into the liquid accommodating area 502, and recycling is repeated.

The heat insulating device 506 and the design capable of recovering the condensed exhaust gas in the second embodiment can be configured according to the reactants generated by the etching process, in addition to the heat atomizing device 500; for example, etching SiO ₂ using HF H ₂ O is generated, so that the heat retaining device 506 can be used to remove H ₂ O generated during the etching and recover the condensed water.

Fig. 7 is a schematic view of an aerosol device in accordance with a third embodiment of the present invention, in which the same reference numerals are used to denote the same or similar members. Referring to FIG. 7, the third embodiment uses a pneumatic atomizing device 700 as a normal temperature aerosol device, which includes a venturi tube 702 and a liquid supply tube 704. The Chinese tube 702 is disposed outside the mist chamber 104. Connected to the mist chamber 104, and the pneumatic atomizing device 700, for example, feeds gas from the side 104c or 104d of the mist chamber 104 to obtain a longer gas flow field (see the arrow in the mist chamber 104). . The size of the venturi 702 can be designed according to requirements, for example, the mouth portion 706 has a diameter of 0.1 mm to 3 mm, and the diameter of both ends is about 10 mm, but the present invention is not limited thereto. The mist chamber 104 is a fluid swirling space, and only a reactive suspended micro mist having a small particle size (for example, a droplet of 10 μm or less) floats from the slit 108 therein to the reaction chamber. The liquid supply tube 704 is connected to the mouth portion 706 of the venturi 702. Therefore, when the air 710 enters the venturi 702, a negative pressure is generated at the mouth portion 706, and the liquid 712 in the liquid tank 708 (such as a highly reactive etchant). The fluid that has been split into droplets suspended by the liquid supply tube 704 is sent to the misting chamber 104. The supply of the above air 710 may be the same as that of the non-reactive gas (200 of Fig. 2), but the present invention is not limited thereto. Since the third embodiment aerosolizes the highly reactive etchant by means of pneumatic atomization of the venturi 702, the highly reactive etchant is not driven by the high pressure pipeline, so that the accidental loosening of the infusion line can be avoided to cause the hazardous agent. The problem of leaking spray.

8A and 8B are schematic views of two aerosol devices in accordance with a fourth embodiment of the present invention, wherein the same reference numerals are used to denote the same or similar members in the first embodiment. Referring to FIG. 8A, the fourth embodiment uses a pneumatic atomizing device 800 as a normal temperature aerosol device, which includes a liquid tank 802 and a carrier gas source 804. The liquid tank 802 is disposed outside the mist chamber 104. The carrier gas source 804 is connected to the mist chamber 104 and communicates to the liquid tank 802 via a liquid supply tube 806, so that the carrier gas source 804 blows the reaction gas generated by the liquid 808 in the liquid tank 802 through the liquid supply tube 806. The fog chamber 104 is formed. The liquid 808 in the liquid tank 802 can be a single liquid or a mixed liquid, wherein the mixed liquid includes, for example, two agents (for example, one of them is a reactive agent). The carrier gas source 804 may be the same source as the non-reactive gas (200 of FIG. 2), but the present invention is not limited thereto.

Referring to FIG. 8B, the fourth embodiment may further have other pneumatic atomizing devices 810 including another liquid tank 802 and a carrier gas source 804. The liquid 812 within the liquid bath 802 of the pneumatic atomizing device 810 can be different than the liquid 808. Since the etching process has different conditions, the ratio of the etchant can be dynamically adjusted by different pneumatic atomizing devices 810. In particular, the two liquids 808 and 812 in the two liquid tanks 802 do not affect each other and can be independent. control. For example, if two different acidic or alkaline liquids are to be used, the traditional heating atomizing device can not withstand the erosion of the mixed acid solution, especially the organic solvent mixed with strong acid or strong alkali heating or even a chain reaction leading to the risk of explosion. In operation control, different liquids have different vapor partial pressures, which makes it difficult to control the specific gravity of the reaction gas component and increase the difficulty in adjusting the etching characteristics. Further, a solvent, a carrier gas, an oxidizing agent or the like may be incorporated in the liquid tank 802 of the pneumatic atomizing device 810 described above. The solvent can prevent the reaction gas from coagulating; the carrier can produce a transport reaction raw material; the oxidant can help the surface of the wafer to be treated to be oxidized, and then can be etched by an acid (such as HF) capable of removing the oxide, but The invention is not limited to this.

9A and 9B are schematic views of two aerosol devices in accordance with a fifth embodiment of the present invention. Referring first to FIG. 9A, the fifth embodiment uses a piezoelectric atomizing device 900 disposed outside the mist chamber and connected to the mist chamber as a normal temperature aerosol device including a piezoelectric block 902 and contacting the piezoelectric block 902. The oscillating plate 904 can thus atomize the liquid 906 and enter the misting chamber by piezoelectric oscillation. In Fig. 9B is another piezoelectric atomizing device 908 comprising a piezoelectric block 910 and a vibrating plate 912 in contact with the piezoelectric block 910, so that the liquid 906 can be passed through the micropores of the vibrating plate 912 by piezoelectric oscillation. Atomization enters the fogging chamber.

In the vapor phase etching reaction apparatus of the present invention, any one of the second to fifth embodiments of the aerosol device may be used alone, or the same or different types of aerosol devices may be combined according to requirements.

10A through 10C are schematic views of a vapor phase etching process in accordance with a sixth embodiment of the present invention, in which the same reference numerals are used to denote the same or similar members.

Referring first to FIG. 10A, a vapor phase etching reaction apparatus is provided, which is the same as the apparatus of FIG. 1, and includes a tank 100 having an isolation chamber 102, a mist chamber 104, and a reaction chamber 102, wherein the slit 108, The outlet 110 and the air inlet 118 are opposite each other and the wafer 124 has been placed into the reaction chamber 106. Then, the non-reactive gas 1000 is supplied through the non-reactive gas supply passage 116 to generate the air curtain 1002 at the air inlet 118. The non-reactive gas 1000 is, for example, compressed dry air (CDA), high pressure nitrogen or high pressure argon or the like. At this time, the inside of the non-reactive gas supply passage 116 is in a state of higher pressure.

Subsequently, please refer to FIG. 10B. After confirming that the air curtain 1002 has been generated, the atomized reaction gas 1004 is supplied from the misting chamber 104 through the slit 108 into the reaction chamber 106 for vapor phase etching. The above reaction gas 1004 is, for example, selected from the group consisting of hydrofluoric acid, nitric acid, sulfuric acid, hydrochloric acid, oxalic acid, phosphoric acid, sodium hydroxide, potassium hydroxide, an organic solvent, or a combination thereof. At this time, the inside of the reaction chamber 106 is in a state of lower pressure. The method of supplying the atomized reaction gas 1004 can be referred to any one of the second embodiment to the fifth embodiment, and therefore will not be described again. In addition, if the heating atomization method is adopted, since the temperature in the mist chamber 104 is higher than the temperature of the reaction chamber 106, the reaction gas 1004 is prevented from being condensed from the high temperature mist chamber 104 into the low temperature reaction chamber 106. Therefore, the temperature inside the reaction chamber 106 can be increased. In addition, if the reaction gas 1004 is an oxygen-containing gas, it can be combined with the metal catalyst particles to generate a special structure for local oxidation and local etching to form minute holes.

Next, please refer to FIG. 10C. Due to the pressure difference between the non-reactive gas supply passage 116 and the reaction chamber 106, a negative pressure attraction is formed in the reaction chamber 106, and the reacted exhaust gas 1006 is discharged from the reaction chamber 106 through the outlet 110 and discharged from the exhaust passage 114. The curtain 1002 prevents the exhaust gas 1006 from escaping, wherein the non-reactive gas supply passage 116 must be higher than the pressure in the reaction chamber 106 to prevent the exhaust gas 1006 from leaking out. For example, if the pressure in the non-reactive gas supply passage 116 is 5 atm, the pressure in the reaction chamber 106 is It is about 0.5 atm; at this time, the pressure in the exhaust passage 114 is about -0.5 atm.

In summary, the vapor phase etching reaction apparatus and method of the present invention integrate the slave control method to isolate the gas mist leakage problem of the reaction gas, and can be combined with the normal temperature atomization device to reduce the loss of the heating device.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

100‧‧‧ tank

102‧‧‧Isolation chamber

104‧‧‧Fog chamber

104a‧‧‧ top

104b, 508‧‧‧ bottom

104c, 104d‧‧‧ side

106‧‧‧Reaction chamber

108‧‧‧slit

110, 406‧‧ Export

112, 400‧‧ ‧ partition

114‧‧‧Exhaust Road

116‧‧‧Non-reactive gas supply channels

118‧‧‧Air inlet

120‧‧‧ openings

122,410‧‧‧Tray

124‧‧‧ wafer

200, 1000‧‧‧ non-reactive gas

202, 1002‧‧‧ air curtain

204, 1004‧‧‧Reactive gas

206, 1006‧‧‧ exhaust

402‧‧‧Inner exhaust duct

404‧‧‧Outer exhaust duct

408‧‧‧Extension

500‧‧‧heating atomizer

502‧‧‧Liquid accommodating area

504‧‧‧ heating element

506‧‧‧Insulation device

510‧‧‧through hole

700, 800, 810‧‧‧ pneumatic atomizing device

702‧‧‧ Venturi tube

704, 806‧‧‧ liquid supply pipe

706‧‧‧隘口

708, 802‧‧ liquid tank

710‧‧‧ Air

712, 808, 812, 906‧‧ liquid

804‧‧‧ Carrier gas source

900, 908‧‧‧ Piezoelectric atomization device

902, 910‧‧ ‧ piezoelectric block

904, 912‧‧‧ shock film

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a perspective view of a vapor phase etching reaction apparatus in accordance with a first embodiment of the present invention. 2 is a schematic cross-sectional view of the vapor phase etching reaction apparatus of FIG. 1 taken along a gas flow direction. 3 is a side view of a fogging chamber of the vapor phase etching reaction apparatus of FIG. 1. 4A is a cross-sectional view of another embodiment of the isolation chamber of FIG. 2. 4B is a cross-sectional view of still another embodiment of the isolation chamber of FIG. 2. 4C is a cross-sectional view of still another embodiment of the isolation chamber of FIG. 2. Figure 5 is a cross-sectional view of a vapor phase etching reaction apparatus along a gas flow direction in accordance with a second embodiment of the present invention. Fig. 6 is a side view of the mist forming chamber of the vapor phase etching reaction apparatus of Fig. 5. Figure 7 is a schematic illustration of an aerosol device in accordance with a third embodiment of the present invention. Figure 8A is a schematic illustration of an aerosol device in accordance with a fourth embodiment of the present invention. Figure 8B is a schematic illustration of another aerosol device in accordance with a fourth embodiment of the present invention. Figure 9A is a schematic illustration of an aerosol device in accordance with a fifth embodiment of the present invention. Figure 9B is a schematic illustration of another aerosol device in accordance with a fifth embodiment of the present invention. 10A through 10C are schematic views showing a vapor phase etching process in accordance with a sixth embodiment of the present invention.

Claims (25)

A vapor phase etching reaction device comprising: a tank body having an isolation chamber, a mist chamber, and a reaction chamber disposed between the chamber and the mist chamber, wherein the mist chamber and the reaction chamber a slit is provided for the atomized reaction gas to enter the reaction chamber; an outlet between the isolation chamber and the reaction chamber is disposed opposite to the slit for exhaust gas to exit the reaction chamber; and a partition is disposed in the isolation chamber Separating the isolation chamber into an exhaust passage connected to the outlet and a non-reactive gas supply passage away from the outlet, and the partition has an air inlet disposed opposite the outlet to provide a non-reactive gas Through the passage of a gas curtain that isolates the exhaust gas. The vapor phase etching reaction device of claim 1, wherein the tank body has an opening connected to the isolation chamber and disposed opposite to the air inlet. The vapor phase etching reaction apparatus according to claim 2, further comprising a tray through which the reaction chamber can enter and exit through the opening, the air inlet and the outlet. The vapor phase etching reaction device of claim 1, wherein the outlet has a size smaller than a size of the air inlet. The vapor phase etching reaction apparatus according to claim 1, wherein the exhaust passage is a two-layer structure composed of an inner exhaust passage and an outer exhaust passage. The vapor phase etching reactor of claim 5, further comprising an extension extending from an outermost side of the non-reactive gas supply passage toward the outer exhaust passage to increase airflow resistance caused by the air curtain. The vapor phase etching reaction device of claim 5, further comprising a tray through which the reaction chamber can enter and exit through the opening, the air inlet and the outlet, the tray being a stepped structure. The gas phase etching reaction device according to claim 1, further comprising an aerosol device that is driven by the gas curtain, located in the mist chamber or disposed outside the mist chamber and connected to the mist chamber. To atomize the reaction gas. The vapor phase etching reaction device of claim 8, wherein the aerosol device comprises a heating atomizing device, a pneumatic atomizing device, a piezoelectric atomizing device, or a combination thereof. The vapor phase etching reaction device of claim 9, wherein the heating atomization device comprises: a liquid receiving area located in the misting chamber; and a heating element for heating the liquid receiving area Liquid. The gas phase etching reaction device of claim 9, wherein the pneumatic atomizing device comprises: a venturi tube disposed outside the mist chamber and connected to the mist chamber; and a liquid supply tube connected to the liquid supply tube The mouth of the venturi. The gas phase etching reaction device of claim 9, wherein the pneumatic atomizing device comprises: a liquid tank disposed outside the mist chamber; and a carrier gas source connected to the mist chamber, and The carrier gas source is connected to the liquid tank via a liquid supply pipe, and the reaction gas generated in the liquid tank is blown into the mist forming chamber. The vapor phase etching reaction device of claim 9, wherein the piezoelectric atomizing device is disposed outside the mist chamber and connected to the mist chamber, and includes a piezoelectric block and a contact with the piezoelectric block. Shock film. The vapor phase etching reaction device according to claim 1, further comprising a heat insulating device disposed in the reaction chamber. The gas phase etching reaction device of claim 1, wherein the reaction chamber has a bottom inclined toward the fogging region, and at least one through hole is further included between the mist chamber and the reaction chamber, so that The condensed off-gas flows from the bottom surface through the at least one through hole into the liquid receiving area. The vapor phase etching reaction apparatus according to claim 1, wherein the reaction gas is selected from the group consisting of hydrofluoric acid, nitric acid, sulfuric acid, hydrochloric acid, oxalic acid, phosphoric acid, sodium hydroxide, potassium hydroxide, an organic solvent, or a combination thereof. The vapor phase etching reactor of claim 1, wherein the non-reactive gas comprises compressed dry air (CDA), high pressure nitrogen or high pressure argon. A vapor phase etching method comprising: providing a vapor phase etching reaction device, comprising: a tank body having an isolation chamber, a mist chamber, and a reaction chamber disposed between the chamber and the mist chamber a slit is formed between the mist chamber and the reaction chamber; an outlet is disposed between the isolation chamber and the reaction chamber relative to the slit; and a partition is disposed in the isolation chamber to separate the isolation chamber Forming an exhaust passage connected to the outlet and a non-reactive gas supply passage away from the outlet, and the partition has an air inlet disposed opposite the outlet; providing non-reactive gas through the non-reactive gas supply passage The tuyere generates a gas curtain; the reactive gas supplied from the mist chamber is atomized into the reaction chamber through the slit to perform vapor phase etching and generate exhaust gas; and the non-reactive gas supply passage is utilized The pressure difference between the reaction chambers causes the exhaust gas to exit the reaction chamber through the outlet and exit the exhaust passage and prevent the exhaust gas from escaping with the air curtain. The vapor phase etching method of claim 18, wherein the method of supplying the atomized reaction gas comprises heat atomization, pneumatic atomization, piezoelectric atomization, or a combination thereof. The vapor phase etching method of claim 19, wherein the method of pneumatic atomization comprises atomizing at a normal temperature using a venturi. The vapor phase etching method of claim 19, wherein the method of pneumatic atomization comprises feeding the reaction gas from an external gas tank into the mist chamber by using a carrier gas source. The vapor phase etching method as described in claim 18, further comprising increasing the temperature in the reaction chamber. The vapor phase etching method according to claim 18, wherein the reaction gas is selected from the group consisting of hydrofluoric acid, nitric acid, sulfuric acid, hydrochloric acid, oxalic acid, phosphoric acid, sodium hydroxide, potassium hydroxide, an organic solvent, or a combination thereof. The vapor phase etching method of claim 18, wherein the non-reactive gas comprises compressed dry air (CDA), high pressure nitrogen or high pressure argon. The vapor phase etching method of claim 18, wherein the pressure of the non-reactive gas supply passage is greater than the pressure of the reaction chamber.