TW201803958A - Anisotropic conductive film, method for manufacturing the same and connection structure - Google Patents

Anisotropic conductive film, method for manufacturing the same and connection structure Download PDF

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TW201803958A
TW201803958A TW106104745A TW106104745A TW201803958A TW 201803958 A TW201803958 A TW 201803958A TW 106104745 A TW106104745 A TW 106104745A TW 106104745 A TW106104745 A TW 106104745A TW 201803958 A TW201803958 A TW 201803958A
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layer
conductive
conductive particles
anisotropic conductive
particle
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TWI734745B (en
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平山堅一
尾怜司
三宅健
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迪睿合股份有限公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J201/00Adhesives based on unspecified macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00Adhesives in the form of films or foils
    • C09J7/20Adhesives in the form of films or foils characterised by their carriers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0016Apparatus or processes specially adapted for manufacturing conductors or cables for heat treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0036Details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/06Insulating conductors or cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/30Drying; Impregnating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/16Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R11/00Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts
    • H01R11/01Individual connecting elements providing two or more spaced connecting locations for conductive members which are, or may be, thereby interconnected, e.g. end pieces for wires or cables supported by the wire or cable and having means for facilitating electrical connection to some other wire, terminal, or conductive member, blocks of binding posts characterised by the form or arrangement of the conductive interconnection between the connecting locations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/831Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus
    • H01L2224/83101Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus as prepeg comprising a layer connector, e.g. provided in an insulating plate member

Abstract

An anisotropic conductive film (10) has a structure in which an insulating resin layer (1) and a conductive-particle-containing layer (4) that has a plurality of conductive particles (3) existing therein are layered. The insulating resin layer (1) and the conductive-particle-containing layer (4) are both a photopolymerizable resin composition layer containing a photopolymerizable compound and a photopolymerization initiator. The conductive particles (3) exist in a mutually independent manner when the anisotropic conductive film is viewed in a planar view. The anisotropic conductive film has a transmissivity of at least 40%, in the film thickness direction, for light having a wavelength of 300-400 nm.

Description

異向性導電膜、其製造方法及連接結構體 Anisotropic conductive film, manufacturing method thereof, and connection structure

本發明係關於一種異向性導電膜、其製造方法及連接結構體。 The present invention relates to an anisotropic conductive film, a method for manufacturing the same, and a connection structure.

將IC晶片等電子零件安裝至顯示元件用透明基板時廣泛使用異向性導電膜,近年來,就應用於高密度安裝之觀點而言,為了提高導電粒子捕捉效率或連接可靠性、降低短路發生率,如圖7所示使用2層結構之異向性導電膜50,該異向性導電膜50係將層厚相對厚且熔融黏度低之絕緣性樹脂層51與使導電粒子53分散於絕緣性黏合劑52之層厚相對較薄且熔融黏度高之含導電粒子層54積層而成。 Anisotropic conductive films are widely used when mounting electronic components such as IC chips on transparent substrates for display elements. In recent years, from the viewpoint of application to high-density mounting, in order to improve the capture efficiency of conductive particles or connection reliability, and reduce the occurrence of short circuits. As shown in FIG. 7, an anisotropic conductive film 50 having a two-layer structure is used. The anisotropic conductive film 50 is an insulating resin layer 51 having a relatively thick layer and a low melt viscosity, and the conductive particles 53 are dispersed in the insulation. The conductive adhesive-containing layer 52 is formed by laminating the conductive particle-containing layer 54 with a relatively thin layer and a high melt viscosity.

且說,於使用異向性導電膜藉由異向性導電連接製造連接結構體的情況下,為了達成製造成本之降低等,嘗試使用與玻璃基板相比柔軟性較優異但耐熱性較低之塑膠基板作為應連接之基板。又,即便為玻璃基板之情況,薄型化亦得到推進,為了於低溫進行安裝,對將熱與能量線組合之安裝方法進行了各種研究。因此,提出有使用以紫外線等光於低溫 下亦進行聚合之光陽離子聚合性樹脂組成物作為構成異向性導電膜之絕緣性黏合劑,於異向性導電連接時,對透明基板、藉由光照射而半硬化之異向性導電膜及電子零件之積層物一面加熱一面自透明基板側照射紫外線進行正式硬化(專利文獻1、段落0040),並考慮將此技術應用於上述2層結構之異向性導電膜。於此情況下,用於半硬化之光照射會自相對較厚之絕緣性樹脂層側進行,用於正式硬化之光照射會自透明基板側(即含導電粒子層側)進行。 In addition, in the case where an anisotropic conductive film is used to manufacture a connection structure by anisotropic conductive connection, in order to reduce the manufacturing cost, etc., it is attempted to use a plastic that is more flexible than a glass substrate but has lower heat resistance. The substrate serves as the substrate to be connected. In addition, even in the case of a glass substrate, the reduction in thickness has been promoted. In order to perform mounting at low temperatures, various mounting methods that combine heat and energy rays have been studied. Therefore, the use of light such as ultraviolet rays at low temperatures has been proposed. The photo-cationically polymerizable resin composition that is also polymerized below is used as an insulating adhesive for the anisotropic conductive film. During anisotropic conductive connection, the transparent substrate and the anisotropic conductive film that is semi-hardened by light irradiation are used. While the laminate of the electronic component is heated while being irradiated with ultraviolet rays from the transparent substrate side for formal hardening (Patent Document 1, paragraph 0040), it is considered to apply this technology to the anisotropic conductive film of the above two-layer structure. In this case, the light irradiation for semi-hardening is performed from the relatively thick insulating resin layer side, and the light irradiation for formal hardening is performed from the transparent substrate side (that is, the conductive particle-containing layer side).

然而,於將專利文獻1之技術單純地應用於上述2層結構之異向性導電膜的情況下,無法避免光照射成為2階段之情況,預想到異向性導電連接操作會變繁雜,連接成本增大。 However, in the case where the technology of Patent Document 1 is simply applied to the anisotropic conductive film having the above-mentioned two-layer structure, it is unavoidable that light irradiation becomes two stages, and it is expected that the anisotropic conductive connection operation will be complicated and the connection Cost increases.

因此,嘗試省略用以半硬化之光照射之後,一面對積層體加壓一面自透明基板側進行光照射,該積層體係自絕緣性樹脂層側對透明基板配置聚合前之2層結構之異向性導電膜並使電子零件與異向性導電膜之含導電粒子層側相對向而構成。 Therefore, it is attempted to omit the light irradiation from the transparent substrate side while pressurizing the laminated body after the light irradiation with semi-hardening. The difference between the two-layer structure of the laminated system before the polymerization is arranged on the transparent substrate from the insulating resin layer side. The anisotropic conductive film is configured by facing the electronic component and the conductive particle-containing layer side of the anisotropic conductive film.

[先前技術文獻] [Prior technical literature]

[專利文獻] [Patent Literature]

專利文獻1:日本專利特開2002-97443號公報 Patent Document 1: Japanese Patent Laid-Open No. 2002-97443

然而,由於分散混合於含導電粒子層中之導電粒子之一部分形成凝聚體,故而擔憂產生如下問題:因生成在含導電粒子層之粒子凝聚 體導致自透明基板側入射之光被遮擋,異向性導電膜,尤其是絕緣性樹脂層之硬化變得不均勻,結果粒子捕捉性降低,視位置不同有時無法確保目標連接強度,連接可靠性亦降低。 However, since a part of the conductive particles dispersed and mixed in the conductive particle-containing layer forms aggregates, there is a concern that the following problem arises: the particles generated in the conductive particle-containing layer are aggregated. The light incident from the transparent substrate side is blocked by the body, and the hardening of the anisotropic conductive film, especially the insulating resin layer becomes uneven. As a result, the particle trapping property is reduced. Depending on the position, the target connection strength may not be guaranteed and the connection is reliable. Sex is also reduced.

本發明之課題在於:於使用積層有絕緣性樹脂層、與絕緣性黏合劑中存在多個導電粒子之含導電粒子層的異向性導電膜,將透明基板與電子零件異向性導電連接時,可使異向性導電膜尤其是絕緣性樹脂層之硬化不會變得不均勻,並且可確保良好之粒子捕捉性,於任何位置均可確保目標連接強度,進而可防止連接可靠性之降低。 The object of the present invention is to use an anisotropic conductive film including an insulating resin layer and a conductive particle-containing layer having a plurality of conductive particles in an insulating adhesive, and anisotropically conductively connect a transparent substrate to an electronic component. , It can make the anisotropic conductive film, especially the insulating resin layer harden non-uniform, and can ensure good particle capture, can ensure the target connection strength at any position, and can prevent the reduction of connection reliability .

本發明人等發現,由分別含有光聚合性化合物與光聚合起始劑之聚合前之光聚合性樹脂組成物之層構成絕緣性樹脂層與含導電粒子層,並且將導電粒子以於俯視異向性導電膜時相互獨立地存在之方式進行配置,且將對於波長300~400nm之光的膜厚方向透射率設為40%以上,藉此可解決上述課題,從而完成了本發明。 The present inventors have found that the insulating resin layer and the conductive particle-containing layer are composed of a layer each containing a photopolymerizable compound and a photopolymerizable resin composition before polymerization of the photopolymerization initiator, and the conductive particles are different in plan view. The tropic conductive films are arranged so as to exist independently of each other, and the film thickness direction transmittance for light having a wavelength of 300 to 400 nm is set to 40% or more, thereby solving the above-mentioned problems and completing the present invention.

即,本發明提供一種異向性導電膜,其係積層有絕緣性樹脂層、與存在多個導電粒子之含導電粒子層者,絕緣性樹脂層與含導電粒子層分別為含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物之層,導電粒子於俯視異向性導電膜時相互獨立地存在,對於波長300~400nm之光之膜厚方向透射率為40%以上。 That is, the present invention provides an anisotropic conductive film comprising an insulating resin layer and a conductive particle-containing layer in which a plurality of conductive particles are present, and the insulating resin layer and the conductive particle-containing layer each contain a photopolymerizable compound. In the layer of the photopolymerizable resin composition with the photopolymerization initiator, the conductive particles exist independently of each other when the anisotropic conductive film is viewed from the top, and the transmittance in the film thickness direction for light having a wavelength of 300 to 400 nm is 40% or more.

又,本發明提供一種製造方法,其係上述異向性導電膜之製造方法,該方法將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組 成物成膜在存在多個導電粒子之含導電粒子層之單面,藉此形成絕緣性樹脂層。 In addition, the present invention provides a manufacturing method which is the above-mentioned method for manufacturing an anisotropic conductive film. The method comprises a photopolymerizable resin group containing a photopolymerizable compound and a photopolymerization initiator. The product is formed into a film on one side of the conductive particle-containing layer having a plurality of conductive particles, thereby forming an insulating resin layer.

又,本發明提供一種製造方法,其係上述異向性導電膜之製造方法,具有以下之步驟A~C:(步驟A)將導電粒子放入形成有多個凹部之轉印模具之凹部的步驟;(步驟B)將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物按壓至轉印模具內之導電粒子,藉此形成轉印有導電粒子之含導電粒子層的步驟;及(步驟C)將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物成膜於轉印有導電粒子之含導電粒子層之導電粒子轉印面,藉此形成絕緣性樹脂層之步驟。 In addition, the present invention provides a manufacturing method, which is the above-mentioned method for manufacturing an anisotropic conductive film, and has the following steps A to C: (step A) placing conductive particles into a recessed portion of a transfer mold having a plurality of recessed portions; Step; (Step B) a step of pressing a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator to conductive particles in a transfer mold, thereby forming a conductive particle-containing layer on which conductive particles are transferred ; And (Step C) forming an insulating resin by forming a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator on a conductive particle transfer surface of a conductive particle-containing layer to which conductive particles are transferred, thereby forming an insulating resin Layer of steps.

進一步,本發明提供一種製造方法,其係上述異向性導電膜之製造方法,具有以下之步驟A、B、CC及D:(步驟A)將導電粒子放入形成有多個凹部之轉印模具之凹部的步驟;(步驟B)將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物按壓至轉印模具內之導電粒子,藉此形成轉印有導電粒子之含導電粒子層的步驟;(步驟CC) 將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物成膜於轉印有導電粒子之含導電粒子層之導電粒子非轉印面,藉此形成絕緣性樹脂層的步驟;及(步驟D)於含導電粒子層之絕緣性樹脂層側的相反側表面形成黏著層的步驟。 Further, the present invention provides a manufacturing method, which is the above-mentioned method for manufacturing an anisotropic conductive film, and has the following steps A, B, CC, and D: (step A) placing conductive particles into a transfer formed with a plurality of recesses Step of concave portion of mold; (Step B) Pressing a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator onto conductive particles in a transfer mold, thereby forming a conductive material containing conductive particles transferred thereto Steps of the particle layer; (Step CC) A step of forming an insulating resin layer by forming a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator on a non-transferable surface of a conductive particle containing a conductive particle layer on which conductive particles are transferred; and (Step D) A step of forming an adhesive layer on the surface on the opposite side of the insulating resin layer side including the conductive particle layer.

此外,本發明提供一種利用上述異向性導電膜將第1電子零件異向性導電連接於第2電子零件之連接結構體。 In addition, the present invention provides a connection structure in which the first electronic component is anisotropically conductively connected to the second electronic component using the anisotropic conductive film.

關於具有積層有絕緣性樹脂層與存在多個導電粒子之含導電粒子層之構成的本發明之異向性導電膜,絕緣性樹脂層與含導電粒子層分別為含有光聚合性化合物與光聚合起始劑之聚合前的光聚合性樹脂組成物之層。因此,即便不實施光半硬化處理,亦能以一次光照射實現異向性導電連接。而且,導電粒子於俯視異向性導電膜時相互獨立地存在。即,不存在導電粒子之凝聚體。因此,於將本發明之異向性導電膜應用在異向性導電連接時,雖經由以光聚合性樹脂組成物所構成之含導電粒子層向絕緣性樹脂層之光的入射會被各個導電粒子遮擋,但因通過導電粒子彼此之間之光會擴散開來,因此,結果可使異向性導電膜(尤其是絕緣性樹脂層)之光聚合變均勻,能夠確保良好之粒子捕捉性,從而可確保目標連接強度,進一步可防止連接可靠性之降低。而且,本發明之異向性導電膜對於波長300~400nm之光的膜厚方向透射率達到40%以上,因此可使異向性導電膜(尤其是絕緣性樹脂層)之光聚合更均勻,能夠確保良好之連接強度,進而可進一步防止連接可靠性之降低。 Regarding the anisotropic conductive film of the present invention having a structure in which an insulating resin layer is laminated and a conductive particle-containing layer in which a plurality of conductive particles are present, the insulating resin layer and the conductive particle-containing layer each contain a photopolymerizable compound and photopolymerization A layer of a photopolymerizable resin composition before polymerization of the initiator. Therefore, anisotropic conductive connection can be achieved with a single light irradiation even without performing photo-hardening treatment. Furthermore, the conductive particles exist independently of each other when the anisotropic conductive film is viewed from the top. That is, there are no aggregates of conductive particles. Therefore, when the anisotropic conductive film of the present invention is applied to an anisotropic conductive connection, the light incident on the insulating resin layer through the conductive particle-containing layer composed of the photopolymerizable resin composition is conducted by each of the conductive layers. Particles are blocked, but since the light between the conductive particles is diffused, as a result, the photopolymerization of the anisotropic conductive film (especially the insulating resin layer) can be made uniform, and good particle capture can be ensured. As a result, the target connection strength can be ensured, and the reduction in connection reliability can be further prevented. In addition, the anisotropic conductive film of the present invention has a transmittance in the thickness direction of light with a wavelength of 300 to 400 nm of more than 40%, so that the photopolymerization of the anisotropic conductive film (especially the insulating resin layer) can be more uniform. It can ensure good connection strength, and further prevent the reduction of connection reliability.

1、51‧‧‧絕緣性樹脂層 1. 51‧‧‧ insulating resin layer

2、52‧‧‧絕緣性黏合劑 2.52‧‧‧insulating adhesive

3、53‧‧‧導電粒子 3.53‧‧‧Conductive particles

4、54‧‧‧含導電粒子層 4, 54‧‧‧ layer containing conductive particles

5‧‧‧黏著層 5‧‧‧ Adhesive layer

10、20、30、40、50‧‧‧異向性導電膜 10, 20, 30, 40, 50‧‧‧ anisotropic conductive film

圖1係本案發明之異向性導電膜之剖面圖。 FIG. 1 is a cross-sectional view of the anisotropic conductive film of the present invention.

圖2係本案發明之異向性導電膜之剖面圖。 FIG. 2 is a cross-sectional view of the anisotropic conductive film of the present invention.

圖3係本案發明之異向性導電膜之剖面圖。 FIG. 3 is a cross-sectional view of the anisotropic conductive film of the present invention.

圖4係本案發明之異向性導電膜之剖面圖。 FIG. 4 is a cross-sectional view of the anisotropic conductive film of the present invention.

圖5係本案發明之異向性導電膜之剖面圖。 FIG. 5 is a cross-sectional view of the anisotropic conductive film of the present invention.

圖6係本案發明之異向性導電膜之剖面圖。 FIG. 6 is a cross-sectional view of the anisotropic conductive film of the present invention.

圖7係先前之異向性導電膜之剖面圖。 FIG. 7 is a cross-sectional view of a conventional anisotropic conductive film.

以下,一面參照圖式一面詳細地說明本發明之異向性導電膜之一例。再者,各圖中,同一符號表示同一或同等之構成要素。 Hereinafter, an example of the anisotropic conductive film of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same symbol represents the same or equivalent component.

<<異向性導電膜之整體構成>> << Overall composition of anisotropic conductive film >>

圖1係本發明之一實施例之異向性導電膜10的剖面圖。此異向性導電膜10具有積層有絕緣性樹脂層1、與於絕緣性黏合劑2中存在多個導電粒子3之含導電粒子層4之構成。 FIG. 1 is a cross-sectional view of an anisotropic conductive film 10 according to an embodiment of the present invention. This anisotropic conductive film 10 has a structure in which an insulating resin layer 1 is laminated and a conductive particle-containing layer 4 in which a plurality of conductive particles 3 are present in an insulating adhesive 2.

於本發明,絕緣性樹脂層1與含導電粒子層4分別為含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物之層。換言之,意指絕緣性樹脂層1與含導電粒子層4為可進行光聚合之狀態。若為可進行光聚合之狀態,則能夠在不實施光半硬化處理下以一次之光照射實現異向性導電連接。 In the present invention, the insulating resin layer 1 and the conductive particle-containing layer 4 are layers of a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator, respectively. In other words, it means that the insulating resin layer 1 and the conductive particle-containing layer 4 are in a state capable of photopolymerization. As long as it is in a state where photopolymerization is possible, anisotropic conductive connection can be achieved with a single light irradiation without performing a photo-hardening treatment.

又,於本發明之異向性導電膜10,導電粒子3於俯視異向性導電膜10時相互獨立地存在。因此,於自含導電粒子層4側對異向性導電膜10進行光照射之情況下,可使絕緣性樹脂層1整體良好地進行光聚合。此處,所謂「相互獨立地存在」意指導電粒子3不凝聚地相互非接觸,而且於膜厚方向亦不重疊的狀態。關於「非接觸」之程度,鄰接之導電粒子3的中心間距離較佳為平均粒徑之1.5~50倍,更佳為2~30倍。又,所謂「於膜厚方向亦不重疊的狀態」意指於俯視異向性導電膜時,導電粒子不與其他導電粒子重疊。 In the anisotropic conductive film 10 of the present invention, the conductive particles 3 exist independently of each other when the anisotropic conductive film 10 is viewed from the top. Therefore, when the anisotropic conductive film 10 is irradiated with light from the conductive particle-containing layer 4 side, the entire insulating resin layer 1 can be photopolymerized well. Here, the "existence independently of each other" means a state in which the electric particles 3 are not in contact with each other without agglomeration, and do not overlap in the film thickness direction. Regarding the degree of "non-contact", the distance between centers of adjacent conductive particles 3 is preferably 1.5 to 50 times the average particle diameter, and more preferably 2 to 30 times. In addition, the "state which does not overlap in the film thickness direction" means that the conductive particles do not overlap with other conductive particles when the anisotropic conductive film is viewed in plan.

再者,「獨立地存在之導電粒子」相對於全部導電粒子之比率較佳為95%以上,更佳為96%以上,進而更佳為99%以上。此比率可藉由金屬顯微鏡或SEM等觀測特定面積(例如,觀測多個100μm×200μm之區域,其合計為至少達到1mm2以上之面積、較佳為達到3mm2以上之面積)之圖像而求得,或者可藉由圖像分析計測系統(WinROOF、三谷商事(股份有限公司))等進行。 In addition, the ratio of "the conductive particles that exist independently" to all conductive particles is preferably 95% or more, more preferably 96% or more, and even more preferably 99% or more. This ratio can be obtained by observing an image of a specific area (for example, observing a plurality of areas of 100 μm × 200 μm, and the total area is at least 1 mm 2 or more, and preferably 3 mm 2 or more). The determination can be performed by an image analysis and measurement system (WinROOF, Mitani Corporation).

如上所述,導電粒子3於俯視異向性導電膜10時相互獨立地存在,但為了實現於異向性導電膜10整體之均勻之光透過,較佳為規則排列。作為規則排列,可列舉:六角格子、斜方格子、正方格子、矩形格子、平行體格子等。又,亦可不為格子形狀,而為並列地形成排列於直線上之線狀者。於此情況下,較佳以於膜之寬度方向上歪斜之方式存在線。線間之距離並無特別限制,可有規則亦可無規則,於實際使用上較佳為有規則性。 As described above, the conductive particles 3 exist independently of each other when the anisotropic conductive film 10 is viewed from the top, but in order to achieve uniform light transmission throughout the anisotropic conductive film 10, it is preferable to arrange them regularly. Examples of the regular arrangement include a hexagonal lattice, an oblique lattice, a square lattice, a rectangular lattice, and a parallel lattice. Moreover, it is not necessary to have a grid shape, but to form a line shape arranged in a line side by side. In this case, it is preferable that the lines exist in such a manner that the film is skewed in the width direction of the film. There is no particular limitation on the distance between the lines, and there may be rules or rules. In practice, it is better to have regularity.

又,關於本發明之異向性導電膜10,對於包含i射線之波長 300~400nm之光的膜厚方向透射率為40%以上,較佳為60%以上。因此,可使異向性導電膜(尤其是絕緣性樹脂層)之光聚合更均勻,能夠確保良好之連接強度,進一步可防止連接可靠性之降低。此處,測定透過率時之膜厚通常為1~100μm,較佳為1~40μm。又,透過率可利用公知之分光光度計進行測定。 In addition, the anisotropic conductive film 10 of the present invention has a wavelength including i rays. The film thickness direction transmittance of light at 300 to 400 nm is 40% or more, and preferably 60% or more. Therefore, the photopolymerization of the anisotropic conductive film (especially the insulating resin layer) can be made more uniform, a good connection strength can be ensured, and a decrease in connection reliability can be further prevented. Here, the film thickness when measuring the transmittance is usually 1 to 100 μm, and preferably 1 to 40 μm. The transmittance can be measured with a known spectrophotometer.

於圖1之態樣,導電粒子3之一部分自含導電粒子層4突出至絕緣性樹脂層1。換言之,導電粒子3存在於絕緣性樹脂層1與含導電粒子層4之界面。根據此態樣,可使導電粒子引起之光照射對各層之影響為最小限度,變得易於將異向性導電膜之摻合物或各種的物性、固化劑之反應活性或製品壽命、層厚等設計因素最佳化。 In the state of FIG. 1, a part of the conductive particles 3 protrudes from the conductive particle-containing layer 4 to the insulating resin layer 1. In other words, the conductive particles 3 exist at the interface between the insulating resin layer 1 and the conductive particle-containing layer 4. According to this aspect, the influence of light irradiation caused by the conductive particles on each layer can be minimized, and it becomes easy to blend the anisotropic conductive film or various physical properties, the reactivity of the curing agent, the life of the product, and the layer thickness. And other design factors.

<絕緣性樹脂層1> <Insulating resin layer 1>

絕緣性樹脂層1為含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物之層。為了即便藉由異向性導電連接時之熱加壓亦可進行聚合,較佳含有熱聚合起始劑。作為光聚合性樹脂組成物之例,可列舉含有(甲基)丙烯酸酯化合物與光自由基聚合起始劑之光自由基聚合性丙烯酸酯系組成物、含有環氧化合物與光陽離子聚合起始劑之光陽離子聚合性環氧系樹脂組成物等。如上所述,於使用光自由基聚合起始劑之情況下,可併用熱自由基聚合起始劑。同樣地,於使用光陽離子聚合起始劑之情況下,可併用熱陽離子聚合起始劑。 The insulating resin layer 1 is a layer of a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator. In order that polymerization can be performed even by heat pressure during anisotropic conductive connection, a thermal polymerization initiator is preferably contained. Examples of the photopolymerizable resin composition include a photoradically polymerizable acrylate-based composition containing a (meth) acrylate compound and a photoradical polymerization initiator, and an epoxy compound and a photocationic polymerization initiation. Photocationically polymerizable epoxy resin composition and the like. As described above, when a photo radical polymerization initiator is used, a thermal radical polymerization initiator may be used in combination. Similarly, when using a photocationic polymerization initiator, a thermal cationic polymerization initiator may be used in combination.

此處,作為(甲基)丙烯酸酯化合物,可使用先前公知之光聚合型(甲基)丙烯酸酯單體。例如,可使用單官能(甲基)丙烯酸酯系單體、二官能以上之多官能(甲基)丙烯酸酯系單體。於本發明,為了可於異向性導電 連接時將絕緣性樹脂層熱硬化,較佳對(甲基)丙烯酸酯系單體之至少一部分使用多官能(甲基)丙烯酸酯系單體。此處,(甲基)丙烯酸酯包含丙烯酸酯與甲基丙烯酸酯。 Here, as the (meth) acrylate compound, a conventionally known photopolymerizable (meth) acrylate monomer can be used. For example, a monofunctional (meth) acrylate-based monomer or a difunctional or more multifunctional (meth) acrylate-based monomer can be used. In the present invention, in order to be anisotropic conductive The insulating resin layer is thermally cured at the time of connection, and a polyfunctional (meth) acrylate monomer is preferably used for at least a part of the (meth) acrylate monomer. Here, (meth) acrylate includes acrylate and methacrylate.

作為光自由基聚合起始劑,例如可列舉苯乙酮系光聚合起始劑、苯偶醯縮酮系光聚合起始劑、磷系光聚合起始劑等之公知之聚合起始劑。 Examples of the photo-radical polymerization initiator include well-known polymerization initiators such as acetophenone-based photopolymerization initiators, benzophenone ketal-based photopolymerization initiators, and phosphorus-based photopolymerization initiators.

為了使聚合充分地進行,而且抑制剛性降低,光自由基聚合起始劑之使用量相對於(甲基)丙烯酸酯化合物100質量份,較佳為0.1~25質量份,更佳為0.5~15質量份。 In order to sufficiently advance the polymerization and suppress the decrease in rigidity, the amount of the photo-radical polymerization initiator used is preferably 0.1 to 25 parts by mass, and more preferably 0.5 to 15 parts relative to 100 parts by mass of the (meth) acrylate compound. Parts by mass.

作為與光自由基聚合起始劑併用之熱自由基聚合起始劑,例如可列舉:有機過氧化物、偶氮系化合物等。尤其,較佳地可使用不產生導致氣泡之氮的有機過氧化物。 Examples of the thermal radical polymerization initiator used in combination with the photo radical polymerization initiator include organic peroxides and azo compounds. In particular, it is preferable to use an organic peroxide that does not generate nitrogen that causes bubbles.

為了抑制硬化不良,而且亦抑制製品壽命之降低,熱自由基聚合起始劑之使用量相對於(甲基)丙烯酸酯化合物100質量份,較佳為2~60質量份,更佳為5~40質量份。 In order to suppress poor curing and reduce product life, the amount of the thermal radical polymerization initiator used is preferably 2 to 60 parts by mass and more preferably 5 to 100 parts by mass of the (meth) acrylate compound. 40 parts by mass.

作為環氧化合物,可列舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、酚醛清漆型環氧樹脂、其等之變性環氧樹脂、脂環式環氧樹脂等,可併用此等之2種以上。又,除環氧化合物外亦可併用氧環丁烷化合物。 Examples of the epoxy compound include a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, a novolac type epoxy resin, a modified epoxy resin thereof, an alicyclic epoxy resin, and the like, and these can be used in combination. Wait for more than 2 kinds. An oxycyclobutane compound may be used in addition to the epoxy compound.

作為光陽離子聚合起始劑,可採用公知者作為環氧化合物之光陽離子聚合起始劑,例如可列舉鋶鹽、鎓鹽等。 As a photocationic polymerization initiator, a well-known photocationic polymerization initiator of an epoxy compound can be used, For example, a sulfonium salt, an onium salt, etc. are mentioned.

光陽離子聚合起始劑之摻合量,若過少則有反應性消失之傾 向;若過多則有接著劑之製品壽命降低之傾向,因此相對於環氧化合物100質量份,較佳為3~15質量份,更佳為5~10質量份。 If the content of the photocationic polymerization initiator is too small, the reactivity disappears. If it is too much, the product life of the adhesive tends to decrease. Therefore, it is preferably 3 to 15 parts by mass and more preferably 5 to 10 parts by mass relative to 100 parts by mass of the epoxy compound.

作為與光陽離子聚合起始劑併用之熱陽離子聚合起始劑,可採用公知者作為環氧化合物之熱陽離子聚合起始劑,例如可使用會因受熱而產生酸之錪鹽、鋶鹽、鏻鹽、二茂鐵(ferrocene)類等,尤其可較佳地使用對溫度顯示良好的潛在性之芳香族鋶鹽。 As the thermal cationic polymerization initiator used in combination with the photocationic polymerization initiator, a known one can be used as the thermal cationic polymerization initiator of the epoxy compound. For example, a sulfonium salt, a sulfonium salt, and a sulfonium which can generate an acid upon heating As the salt, ferrocene, etc., an aromatic sulfonium salt exhibiting a good potential for temperature can be particularly preferably used.

熱陽離子聚合起始劑之摻合量,若過少則有變得硬化不良之傾向;若過多則有製品壽命降低之傾向,因此相對於環氧化合物100質量份,較佳為2~60質量份,更佳為5~40質量份。 If the blending amount of the thermal cationic polymerization initiator is too small, it tends to become poor in hardening; if it is too large, the product life tends to decrease. Therefore, it is preferably 2 to 60 parts by mass relative to 100 parts by mass of the epoxy compound. , More preferably 5 to 40 parts by mass.

光聚合性樹脂組成物較佳含有膜形成樹脂或矽烷偶合劑。作為膜形成樹脂,可列舉:苯氧基樹脂、環氧樹脂、不飽和聚酯樹脂、飽和聚酯樹脂、胺酯樹脂(urethane resin)、丁二烯樹脂、聚醯亞胺樹脂、聚醯胺樹脂、聚烯烴樹脂等,可併用此等之2種以上。此等之中,從成膜性、加工性、連接可靠性之觀點而言,可較佳地使用苯氧基樹脂。又,作為矽烷偶合劑,可列舉環氧系矽烷偶合劑、丙烯酸系矽烷偶合劑等。此等之矽烷偶合劑主要為烷氧基矽烷衍生物。 The photopolymerizable resin composition preferably contains a film-forming resin or a silane coupling agent. Examples of the film-forming resin include phenoxy resin, epoxy resin, unsaturated polyester resin, saturated polyester resin, urethane resin, butadiene resin, polyimide resin, and polyimide A resin, a polyolefin resin, or the like may be used in combination of two or more of them. Among these, a phenoxy resin can be preferably used from a viewpoint of film-forming property, processability, and connection reliability. Examples of the silane coupling agent include epoxy-based silane coupling agents and acrylic silane-based coupling agents. These silane coupling agents are mainly alkoxysilane derivatives.

再者,於光聚合性樹脂組成物視需要可摻合填充劑、軟化劑、促進劑、抗老化劑、著色劑(顏料、染料)、有機溶劑、離子捕捉劑等。 Furthermore, fillers, softeners, accelerators, anti-aging agents, colorants (pigments, dyes), organic solvents, ion trapping agents, and the like may be blended in the photopolymerizable resin composition as necessary.

由如上所述之光聚合性樹脂組成物構成之絕緣性樹脂層1之厚度較佳為3~50μm,更佳為5~20μm。 The thickness of the insulating resin layer 1 composed of the photopolymerizable resin composition as described above is preferably 3 to 50 μm, and more preferably 5 to 20 μm.

<含導電粒子層4> <Conductive particle-containing layer 4>

含導電粒子層4具有以絕緣性黏合劑2保持導電粒子之構成,較佳具 有於絕緣性黏合劑2中存在有多個導電粒子3之構成。此絕緣性黏合劑2含有於絕緣性樹脂層1所說明之光聚合性化合物與光聚合起始劑。因此,含導電粒子層4具有於含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物之層中存在導電粒子3的構成。 The conductive particle-containing layer 4 has a structure in which conductive particles are held by an insulating adhesive 2, and is preferably The insulating adhesive 2 includes a plurality of conductive particles 3. This insulating adhesive 2 is contained in the photopolymerizable compound and the photopolymerization initiator described in the insulating resin layer 1. Therefore, the conductive particle-containing layer 4 has a structure in which conductive particles 3 are present in a layer of a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator.

(導電粒子3) (Conductive particles 3)

作為導電粒子3,可自先前公知之異向性導電膜所使用者之中適當選擇而使用。例如可列舉:鎳、鈷、銀、銅、金、鈀等之金屬粒子、焊料等之合金粒子、金屬被覆樹脂粒子等。亦可併用2種以上。 The conductive particles 3 can be appropriately selected and used from among users of previously known anisotropic conductive films. Examples include metal particles such as nickel, cobalt, silver, copper, gold, palladium, alloy particles such as solder, and metal-coated resin particles. Two or more types may be used in combination.

作為導電粒子3之平均粒徑,為了可應對配線高度之不均,又,為了抑制導通電阻之上升,且抑制短路之發生,較佳為2.5μm以上30μm以下,更佳為3μm以上9μm以下。導電粒子3之粒徑可利用通常之粒度分布測定裝置進行測定,又,其平均粒徑亦可使用市售之粒度分布測定裝置(例如,FPIA-3000,Malvern Instruments公司製造)求得。 The average particle diameter of the conductive particles 3 is preferably 2.5 μm or more and 30 μm or less, and more preferably 3 μm or more and 9 μm or less in order to cope with variations in wiring height and to suppress an increase in on-resistance and to suppress occurrence of a short circuit. The particle diameter of the conductive particles 3 can be measured with a general particle size distribution measurement device, and the average particle diameter can also be obtained using a commercially available particle size distribution measurement device (for example, FPIA-3000, manufactured by Malvern Instruments).

再者,於導電粒子為金屬被覆樹脂粒子之情況下,為了獲得良好的連接可靠性,樹脂核粒子之粒子硬度(20%K值;壓縮彈性變形特性K20)較佳為100~1000kgf/mm2,更佳為200~500kgf/mm2。壓縮彈性變形特性K20系,例如可使用微小壓縮試驗機(MCT-W201,島津製作所股份有限公司)於測定溫度20℃進行測定。 Furthermore, in the case where the conductive particles are metal-coated resin particles, in order to obtain good connection reliability, the particle hardness (20% K value; compression elastic deformation characteristic K 20 ) of the resin core particles is preferably 100 to 1000 kgf / mm. 2 , more preferably 200 to 500 kgf / mm 2 . The compressive elastic deformation characteristics of the K 20 series can be measured, for example, using a micro compression tester (MCT-W201, Shimadzu Corporation) at a measurement temperature of 20 ° C.

為了抑制導電粒子捕捉捉效率之降低,且抑制短路之發生,導電粒子3於異向性導電膜10中之存在量較佳為每1mm250個以上100000個以下,更佳為200個以上70000個以下。此存在量之測定可藉由以光學顯微鏡觀察膜面進行。再者,於異向性導電連接前,有因異向性導電膜10中 之導電粒子3存在於絕緣性黏合劑2中而難以利用光學顯微鏡進行觀察的情況。於該種情況下,亦可觀察異向性導電連接後之異向性導電膜。於此情況下,可考慮連接前後之膜厚變化而算出存在量。 In order to suppress the reduction in the capture efficiency of the conductive particles and the occurrence of a short circuit, the amount of the conductive particles 3 in the anisotropic conductive film 10 is preferably 50 or more and 100,000 or less per 1 mm 2 , more preferably 200 or more and 70,000 or more. Or less. The measurement of this amount can be performed by observing the film surface with an optical microscope. Moreover, before the anisotropic conductive connection, the conductive particles 3 in the anisotropic conductive film 10 may be difficult to observe with an optical microscope because the conductive particles 3 are present in the insulating adhesive 2. In this case, the anisotropic conductive film after the anisotropic conductive connection can also be observed. In this case, the existing amount can be calculated by considering the film thickness change before and after connection.

為了不妨礙光照射,導電粒子之面積占有率較佳為70%以下,更佳為50%以下。又,為了防止至端子之捕捉數量的減少;抑制導通電阻值之增加,較佳為5%以上,更佳為10%以上。此處,導電粒子之面積佔有率為俯視異向性導電膜時,將導電粒子二維地投影在膜平面時之導電粒子面積相對於膜面積之比率,可藉由通常之圖像分析而算出。 In order not to hinder light irradiation, the area occupancy of the conductive particles is preferably 70% or less, and more preferably 50% or less. In addition, in order to prevent a decrease in the number of captures to the terminals and to suppress an increase in the on-resistance value, it is preferably 5% or more, and more preferably 10% or more. Here, when the area occupancy ratio of the conductive particles is a plan view of the anisotropic conductive film, the ratio of the conductive particle area to the film area when the conductive particles are projected two-dimensionally on the film plane can be calculated by ordinary image analysis. .

又,於參考端子之佈局而將導電粒子規則排列之情況下,為了可將捕捉至端子之數量的減少抑制為最小限度,面積佔有率若為0.2%以上,則於實際使用中不存在問題,為了獲得穩定的連接,較佳為5%以上,更佳為10%以上。所謂參考端子之佈局的規則排列係指例如於矩形狀端子之長邊方向(通常利用IC進行COG連接之情況為膜之寬度方向),導電粒子之外接線未落於直線上之類的排列,且為以外接線貫穿導電粒子之方式進行配置之格子狀的排列。亦可稱為蜿蜒之狀態。藉此,於如導電粒子存在於相對難以被捕捉到的端子之緣端部的情況下,可捕捉最低限度之導電粒子。於導電粒子之外接線落於直線上之情況(即一致之情況)下,存在於端子之緣端部之導電粒子可能同樣會成為未被捕捉之狀態。上述為用於避免該情況之配置之一例。再者,為了避免發生短路,面積占有率之下限通常較佳未達50%,更佳未達40%,進而更佳為35%以下。 In addition, when the conductive particles are regularly arranged with reference to the terminal layout, in order to suppress the reduction in the number of captured terminals to a minimum, if the area occupancy rate is 0.2% or more, there is no problem in actual use. In order to obtain a stable connection, it is preferably 5% or more, and more preferably 10% or more. The so-called regular arrangement of the layout of the reference terminals refers to an arrangement in which, for example, the longitudinal direction of a rectangular terminal (usually the width of the film in the case of a COG connection using an IC), the wiring other than the conductive particles does not fall on a straight line. In addition, it is a grid-like arrangement in which the outer wires penetrate the conductive particles. It can also be called a meandering state. Thereby, in the case where, for example, the conductive particles are present at the edge end portion of the terminal which is relatively difficult to be captured, the minimum conductive particles can be captured. In the case where the wires other than the conductive particles fall on a straight line (that is, the case where they are consistent), the conductive particles existing at the edge of the terminal may also become uncaptured. The above is an example of a configuration for avoiding this situation. Furthermore, in order to avoid a short circuit, the lower limit of the area occupancy is usually preferably less than 50%, more preferably less than 40%, and even more preferably 35% or less.

再者,導電粒子3於異向性導電膜10中之存在量亦可以質量基準表示。於此情況下,其存在量成為如下之量:於將異向性導電膜10 之總質量設為100質量份時,於該100質量份中較佳為1質量份以上30質量份以下,更佳為3質量份以上10質量份以下。 The amount of conductive particles 3 present in the anisotropic conductive film 10 can also be expressed on a mass basis. In this case, the amount of the anisotropic conductive film 10 is as follows: When the total mass is 100 parts by mass, it is preferably 1 part by mass or more and 30 parts by mass or less, more preferably 3 parts by mass or more and 10 parts by mass or less in the 100 parts by mass.

含導電粒子層4之厚度較佳為3~50μm,更佳為5~20μm,但較佳不厚於絕緣性樹脂層1。 The thickness of the conductive particle-containing layer 4 is preferably 3 to 50 μm, more preferably 5 to 20 μm, but it is preferably not thicker than the insulating resin layer 1.

<圖2之態樣之異向性導電膜> <Anisotropic Conductive Film in the State of Figure 2>

圖2係與圖1不同之態樣之異向性導電膜20的剖面圖。此態樣之異向性導電膜20具有導電粒子3之整體嵌入至含導電粒子層4中的構成。於此情況下,自絕緣性樹脂層1與含導電粒子層4之界面至各導電粒子3之最短距離h較佳為導電粒子3之平均粒徑之3%以上,且更佳為對於所有導電粒子均大致相同。此結果為,由於導電粒子3靠近光照射側,故能夠使絕緣性樹脂層1更均勻地進行光聚合。此原因在於,藉由使成為光之遮蔽物的導電粒子靠近光源側,容易控制光源對各層之影響。再者,最短距離h之上限若過大,則導電粒子太過靠近膜之外界面,擔心影響膜之黏性,因此,較佳為導電粒子之最接近距離距膜之外界面相隔2~10%左右。又,所謂最短距離h對於所有的導電粒子大致相同係指:於以剖面觀察異向性導電膜之情況下,導電粒子之高度大致一致。 FIG. 2 is a cross-sectional view of an anisotropic conductive film 20 in a state different from that of FIG. 1. The anisotropic conductive film 20 in this aspect has a structure in which the entire conductive particles 3 are embedded in the conductive particle-containing layer 4. In this case, the shortest distance h from the interface between the insulating resin layer 1 and the conductive particle-containing layer 4 to each conductive particle 3 is preferably 3% or more of the average particle diameter of the conductive particles 3, and more preferably for all conductive particles. The particles are all approximately the same. As a result, since the conductive particles 3 are closer to the light irradiation side, the insulating resin layer 1 can be more uniformly photopolymerized. This is because the effect of the light source on each layer can be easily controlled by bringing the conductive particles serving as a shield of light closer to the light source side. In addition, if the upper limit of the shortest distance h is too large, the conductive particles are too close to the outer interface of the film, which may affect the viscosity of the film. Therefore, it is preferable that the closest distance of the conductive particles is 2 to 10% away from the outer interface of the film. about. The shortest distance h is substantially the same for all the conductive particles. This means that when the anisotropic conductive film is viewed in a cross section, the heights of the conductive particles are substantially the same.

(絕緣性樹脂層1與含導電粒子層4之熔融黏度的關係) (Relationship between the melt viscosity of the insulating resin layer 1 and the conductive particle-containing layer 4)

若考慮異向性導電膜之異向性導電連接時的粒子捕捉性,則關於熔融黏度,較佳存在「絕緣性樹脂層<含導電粒子層」之關係。具體而言,關於熔融黏度,以「絕緣性樹脂層<含導電粒子層」之關係為前提,絕緣性樹脂層1之熔融黏度於80℃較佳為3000Pa.s以下,更佳為1000Pa.s以下;含導電粒子層之熔融黏度於80℃較佳為1000~60000Pa.s,更佳為3000 ~50000Pa.s。膜之層整體之熔融黏度於80℃下較佳為100~10000Pa.s,更佳為500~5000Pa.s,進而較佳為1000~3000Pa.s。再者,熔融黏度例如可使用旋轉式流變儀(TA Instruments公司)於升溫速度10℃/min、測定壓力固定為5g、使用測定板直徑8mm之條件下進行測定。 Considering the particle trapping property during anisotropic conductive connection of an anisotropic conductive film, it is preferable to have a relationship of “insulating resin layer <conducting particle-containing layer” regarding the melt viscosity. Specifically, the melt viscosity is based on the relationship of “insulating resin layer <conducting particle-containing layer”, and the melt viscosity of insulating resin layer 1 is preferably 3000 Pa at 80 ° C. Below s, more preferably 1000Pa. s or less; The melt viscosity of the conductive particle-containing layer is preferably 1000 to 60,000 Pa at 80 ° C. s, more preferably 3000 ~ 50000Pa. s. The melt viscosity of the whole film layer is preferably 100 ~ 10000Pa at 80 ° C. s, more preferably 500 ~ 5000Pa. s, more preferably 1000 ~ 3000Pa. s. The melt viscosity can be measured, for example, using a rotary rheometer (TA Instruments) at a temperature rise rate of 10 ° C./min, a measurement pressure of 5 g, and a measurement plate diameter of 8 mm.

<圖3之態樣之異向性導電膜> <Anisotropic Conductive Film in the State of Figure 3>

圖3係圖1之態樣之異向性導電膜10的變形態樣之異向性導電膜30的剖面圖,且為於含導電粒子層4之絕緣性樹脂層1側的相反側表面形成有黏著層5之態樣。根據該態樣,即便於含導電粒子層4之黏著性不充分之情況下,亦可對異向性導電膜30賦予良好之黏著性。此種黏著層5亦可較佳地應用於圖2態樣之異向性導電膜20(未圖示)。 FIG. 3 is a cross-sectional view of the anisotropic conductive film 30 in the modified form of the anisotropic conductive film 10 shown in FIG. 1 and is formed on the surface on the opposite side of the insulating resin layer 1 side including the conductive particle layer 4. There is the appearance of the adhesive layer 5. According to this aspect, even when the adhesiveness of the conductive particle-containing layer 4 is insufficient, it is possible to impart good adhesiveness to the anisotropic conductive film 30. Such an adhesive layer 5 can also be preferably applied to the anisotropic conductive film 20 (not shown) as shown in FIG. 2.

此種黏著層5可由與構成絕緣性樹脂層1或含導電粒子層4之光聚合性樹脂組成物同樣之組成物之層構成。 Such an adhesive layer 5 may be composed of a layer having the same composition as the photopolymerizable resin composition constituting the insulating resin layer 1 or the conductive particle-containing layer 4.

黏著層5之厚度較佳為1~50μm,更佳為1~20μm。較佳為黏著層5與含導電粒子層4之厚度的合計成為絕緣性樹脂層1之1~10倍之關係。 The thickness of the adhesive layer 5 is preferably 1 to 50 μm, and more preferably 1 to 20 μm. It is preferable that the total of the thicknesses of the adhesive layer 5 and the conductive particle-containing layer 4 is 1 to 10 times the relationship of the insulating resin layer 1.

(絕緣性樹脂層1、含導電粒子層4及黏著層5之熔融黏度的關係) (Relationship between the melt viscosity of the insulating resin layer 1, the conductive particle-containing layer 4, and the adhesive layer 5)

若考慮異向性導電膜之異向性導電連接時的粒子捕捉性,則關於熔融黏度,較佳存在「絕緣性樹脂層<含導電粒子層<黏著層」之關係。具體而言,關於熔融黏度,以「絕緣性樹脂層<含導電粒子層<黏著層」之關係為前提,絕緣性樹脂層1之熔融黏度於80℃較佳為3000Pa.s以下,更佳為1000Pa.s以下;含導電粒子層之熔融黏度於80℃較佳為1000~60000 Pa.s,更佳為3000~50000Pa.s;黏著層之熔融黏度於80℃較佳為1000~40000Pa.s,更佳為3000~30000Pa.s。膜之層整體之熔融黏度於80℃較佳為100~10000Pa.s,更佳為500~5000Pa.s,進而較佳為1000~3000Pa.s。再者,熔融黏度例如可使用旋轉式流變儀(TA Instruments公司),於升溫速度10℃/min、測定壓力固定為5g、使用測定板直徑8mm之條件下進行測定。 Considering the particle trapping property during anisotropic conductive connection of an anisotropic conductive film, it is preferable to have a relationship of "insulating resin layer <conducting particle-containing layer <adhesive layer" regarding the melt viscosity. Specifically, the melting viscosity is based on the premise of the relationship of "insulating resin layer <conducting particle-containing layer <adhesive layer", and the melting viscosity of the insulating resin layer 1 is preferably 3000 Pa at 80 ° C. Below s, more preferably 1000Pa. Below s; the melt viscosity of the layer containing conductive particles is preferably 1000 ~ 60000 at 80 ° C Pa. s, more preferably 3000 ~ 50,00000Pa. s; The melt viscosity of the adhesive layer is preferably 1000 to 40,000 Pa at 80 ° C. s, more preferably 3000 ~ 30000Pa. s. The melt viscosity of the whole film layer is preferably 100 ~ 10000Pa at 80 ℃. s, more preferably 500 ~ 5000Pa. s, more preferably 1000 ~ 3000Pa. s. The melt viscosity can be measured, for example, using a rotary rheometer (TA Instruments) under conditions of a temperature rise rate of 10 ° C./min, a measurement pressure of 5 g, and a measurement plate diameter of 8 mm.

<圖4之態樣之異向性導電膜> <Anisotropic Conductive Film in the State of Figure 4>

圖4之異向性導電膜40係圖3之異向性導電膜30的變形例,且為導電粒子3之一部分突出至黏著層5側而非絕緣性樹脂層1側之態樣。藉由設為此種構成,導電粒子3被配置於異向性導電連接時之光照射側,能夠於異向性導電膜40整體實現更均勻且完全之光聚合。 The anisotropic conductive film 40 of FIG. 4 is a modified example of the anisotropic conductive film 30 of FIG. 3, and a part of the conductive particles 3 protrudes to the adhesive layer 5 side instead of the insulating resin layer 1 side. With such a configuration, the conductive particles 3 are arranged on the light irradiation side during anisotropic conductive connection, and more uniform and complete photopolymerization can be achieved in the entire anisotropic conductive film 40.

導電粒子3較佳如上述圖1或圖3之態樣般存在於絕緣性樹脂層1與含導電粒子層4之層間之界面,或如圖4般存在於黏著層5與含導電粒子層4之層間之界面,或者如圖2之態樣般存在於絕緣性樹脂層1與含導電粒子層4之層間之界面附近的含導電粒子層4側。關於圖2之態樣,雖著眼於自絕緣性樹脂層1與含導電粒子層4之界面至各導電粒子3之最短距離h進行了說明,但對於此等態樣,亦可著眼於絕緣性樹脂層1與含導電粒子層4之層間之界面,自「基準線」及導電粒子之「中心點」之觀點出發,如下所述進行說明。 The conductive particles 3 preferably exist at the interface between the insulating resin layer 1 and the conductive particle-containing layer 4 as shown in FIG. 1 or FIG. 3 described above, or exist in the adhesive layer 5 and the conductive particle-containing layer 4 as shown in FIG. 4. The interface between the layers is present on the conductive particle-containing layer 4 side near the interface between the insulating resin layer 1 and the conductive particle-containing layer 4 as shown in FIG. 2. Regarding the aspect of FIG. 2, although the shortest distance h from the interface between the insulating resin layer 1 and the conductive particle-containing layer 4 to each of the conductive particles 3 has been described, for these aspects, it is also possible to focus on the insulation property. The interface between the resin layer 1 and the conductive particle-containing layer 4 will be described below from the viewpoint of the "reference line" and the "center point" of the conductive particles.

(自基準線至導電粒子中心點之距離) (Distance from the reference line to the center point of the conductive particles)

即,於以異向性導電膜之剖面進行觀察之情況下,於將絕緣性樹脂層1與含導電粒子層4之層間之界面作為基準線且將含導電粒子層4側之方向 設為正時,自基準線至導電粒子中心點之距離就製造容易性之觀點而言,較佳為導電粒子直徑之-80%以上,更佳為-75%以上。又,就使連接時之捕捉性穩定之觀點而言,較佳為80%以下,更佳為75%以下。藉由如此將導電粒子嵌入至含導電粒子層4,於光照射未受到導電粒子妨礙之含導電粒子層4中,導電粒子之流動得到抑制,可提高導電粒子之捕捉性。又,因絕緣性樹脂層1之硬化亦變均勻,故亦可避免連接可靠性降低。換言之,藉由導電粒子存在於含導電粒子層4與熔融黏度等特性不同的其他樹脂層之界面,可於不妨礙導電粒子之壓入之情況下抑制導電粒子本身之流動。又其原因在於,導電粒子之壓入方向為層之厚度方向,樹脂流動之方向主要為與此大致成一列之方向,但為了再現性良好且適當地調整於此等不同方向起作用之力,導電粒子亦較理想為存在於膜界面間。再者,於導電粒子之中心點未嚴格地一致之情況下,將其平均值設為中心點。 That is, when the cross section of the anisotropic conductive film is observed, the interface between the insulating resin layer 1 and the conductive particle-containing layer 4 is used as a reference line, and the direction of the conductive particle-containing layer 4 side is taken as a reference line. When it is set to be positive, the distance from the reference line to the center point of the conductive particles is preferably -80% or more of the diameter of the conductive particles, and more preferably -75% or more from the viewpoint of ease of production. From the viewpoint of stabilizing the catchability at the time of connection, it is preferably 80% or less, and more preferably 75% or less. By embedding the conductive particles in the conductive particle-containing layer 4 in this manner, the flow of the conductive particles is suppressed in the conductive particle-containing layer 4 which is not obstructed by the conductive particles when light is irradiated, and the capture property of the conductive particles can be improved. In addition, since the hardening of the insulating resin layer 1 also becomes uniform, it is also possible to avoid a decrease in connection reliability. In other words, since the conductive particles exist at the interface between the conductive particle-containing layer 4 and other resin layers having different characteristics such as melt viscosity, the flow of the conductive particles itself can be suppressed without impeding the pressing of the conductive particles. The reason is that the pressing direction of the conductive particles is the thickness direction of the layer, and the direction of the resin flow is mainly a direction aligned with this. However, for good reproducibility and appropriately adjusting the forces acting in these different directions, The conductive particles are also preferably present between the membrane interfaces. When the center points of the conductive particles are not exactly the same, the average value is set as the center point.

又,於導電粒子之膜厚方向位置位於膜之外界面附近的情況下,自膜之外界面至導電粒子中心點之距離較佳為小於俯視導電粒子時之粒子間距離。藉此,即便光自該外界面側入射,因導電粒子導致入射光被遮蔽之影響亦可被抑制為最小限度。 When the position in the film thickness direction of the conductive particles is near the outer interface of the film, the distance from the outer interface of the film to the center point of the conductive particles is preferably smaller than the distance between the particles when the conductive particles are viewed in plan. Thereby, even if light is incident from the outer interface side, the influence of shielding the incident light by the conductive particles can be suppressed to a minimum.

<異向性導電膜之製造方法> <Manufacturing method of anisotropic conductive film>

本發明之異向性導電膜可藉由如下方式製造:於在絕緣性黏合劑保持有多個導電粒子之含導電粒子層(例如,絕緣性黏合劑中存在多個導電粒子之含導電粒子層)之單面,將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物成膜而形成絕緣性樹脂層,進而視需要於含導電粒子層表面形成黏著層。此處,在絕緣性黏合劑保持有多個導電粒子之含導電粒 子層(例如,在絕緣性黏合劑中存在多個導電粒子之含導電粒子層)可藉由利用先前公知之方法,將導電粒子散佈於絕緣膜之表面,或者藉由使其單層地附著並使其雙軸延伸而形成。又,即使使用轉印模具也可形成。再者,於此等情況下,亦可將導電粒子壓入至絕緣性黏合劑,該壓入造成之影響產生於導電粒子之外周部周邊的絕緣性黏合劑(壓入之條件只要為不對異向性導電膜造成不良影響之程度之低溫低壓即可)。例如,如圖5所示,以沿著導電粒子3之外周部之方式形成傾斜2a。或者如圖6所示,在不自絕緣性黏合劑2露出下嵌入之導電粒子3的正上方之絕緣性黏合劑2之表面形成起伏2b。此處,所謂傾斜2a係指絕緣性黏合劑2因導電粒子3之嵌入而深入地形成於內部之斜面,斜面包含垂直面或懸突面。又,所謂起伏2b係指視上述壓入程度或條件,於形成傾斜後在導電粒子上堆積微量之絕緣性黏合劑2而成者(亦有因該堆積導致傾斜消失之情況)。此種傾斜2a或起伏2b沿著導電粒子之外周部存在,因此若與導電粒子間之絕緣性黏合劑2之表面狀態進行比較,則可容易地確認。如此,藉由在絕緣性黏合劑形成傾斜或起伏,導電粒子成為一部分或整體被嵌入至絕緣性黏合劑之狀態而被保持,故而可使連接時之樹脂流動等之影響為最小限度,連接時之導電粒子之捕捉性提高。再者,若傾斜或起伏以沿著導電粒子3之外周部之方式存在,則構成含導電粒子層之黏度相對較高之絕緣性黏合劑於挟持導電粒子之一對端子之一側以較另一側少之量存在,故而可期待於異向性導電連接時,來自端子之按壓力變得容易施加至導電粒子的效果。又,若存在起伏,則導電粒子正上方的樹脂量較其周圍少,因此可期待如下效果:於異向性導電連接時,容易排除導電粒子正上方之絕緣性黏合劑,端子與 導電粒子變得容易接觸;提高端子上之導電粒子的捕捉性,導通可靠性提高。推測與起伏相關之此等效果更容易於傾斜之情況下顯現。又,以下雖對使用轉印模具進行製造之例進行說明,但於含導電粒子層形成傾斜或起伏等之條件並不受以下之製造例所列舉之製造條件之限定。 The anisotropic conductive film of the present invention can be produced by a conductive particle-containing layer having a plurality of conductive particles held in an insulating adhesive (for example, a conductive particle-containing layer having a plurality of conductive particles in an insulating adhesive). ) On one side, a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator is formed into a film to form an insulating resin layer, and an adhesive layer is formed on the surface of the conductive particle-containing layer as necessary. Here, the conductive particles containing a plurality of conductive particles are held in the insulating adhesive. The sublayer (for example, a conductive particle-containing layer having a plurality of conductive particles in an insulating adhesive) can be used to spread the conductive particles on the surface of the insulating film by using a conventionally known method, or by attaching them in a single layer It is formed by extending it biaxially. It can be formed even by using a transfer mold. Furthermore, in these cases, the conductive particles may be pressed into the insulating adhesive, and the influence caused by the pressing may be caused by the insulating adhesive around the outer periphery of the conductive particles. Low temperature and low pressure to the extent that anisotropic conductive film can adversely affect). For example, as shown in FIG. 5, the slope 2 a is formed so as to follow the outer periphery of the conductive particles 3. Alternatively, as shown in FIG. 6, the surface of the insulating adhesive 2 directly above the conductive particles 3 embedded without being exposed from the insulating adhesive 2 forms undulations 2b. Here, the inclination 2a refers to an inclined surface in which the insulating adhesive 2 is deeply formed due to the embedding of the conductive particles 3, and the inclined surface includes a vertical surface or an overhang surface. In addition, the undulation 2b refers to a product obtained by depositing a small amount of the insulating adhesive 2 on the conductive particles after the formation of inclination, depending on the degree of indentation or conditions described above (the inclination may disappear due to the accumulation). Such an inclination 2a or an undulation 2b exists along the outer periphery of the conductive particles, and therefore, it can be easily confirmed by comparing with the surface state of the insulating adhesive 2 between the conductive particles. In this way, by forming an inclination or undulation in the insulating adhesive, a part or the whole of the conductive particles are embedded and held in the insulating adhesive, so that the influence of resin flow and the like during connection can be minimized. Capturing of conductive particles is improved. Furthermore, if the tilt or undulation exists along the outer periphery of the conductive particles 3, an insulating adhesive constituting a conductive particle-containing layer having a relatively high viscosity is more likely to be held on one side of a pair of terminals holding the conductive particles. There is a small amount on one side, and therefore, it is expected that when an anisotropic conductive connection is made, the pressing force from the terminal can be easily applied to the conductive particles. In addition, if there is undulation, the amount of resin directly above the conductive particles is smaller than the surrounding area, so the following effect can be expected: In anisotropic conductive connection, it is easy to exclude the insulating adhesive directly above the conductive particles, the terminals and the The conductive particles become easy to contact; the capturing property of the conductive particles on the terminal is improved, and the conduction reliability is improved. It is speculated that these effects associated with undulations are more likely to appear with tilt. In addition, although an example of manufacturing using a transfer mold is described below, the conditions for forming a slope or undulation in the conductive particle-containing layer are not limited to the manufacturing conditions listed in the following manufacturing examples.

於圖1、圖3所示之異向性導電膜10、30可依據以下之步驟A~C進行製造。 The anisotropic conductive films 10 and 30 shown in FIGS. 1 and 3 can be manufactured according to the following steps A to C.

首先,將導電粒子放入形成有多個凹部之轉印模具之凹部(步驟A)。繼而,將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物按壓至轉印模具內之導電粒子,藉此形成轉印有導電粒子之含導電粒子層(步驟B)。進而,於轉印有導電粒子之含導電粒子層之導電粒子轉印面,將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物成膜,藉此形成絕緣性樹脂層(步驟C)。藉此可獲得異向性導電膜。再者,關於由光聚合性樹脂組成物構成之絕緣性樹脂層,可使用將其最低熔融黏度設為2000Pa.s以上(較佳為3000~15000Pa.s),將60℃之黏度設為3000Pa.s以上(較佳為3000~20000Pa.s以上)者。又,作為步驟B之按壓時的條件,可例示於溫度60℃~70℃以0.5MPa進行按壓之條件,但並不限定於該條件。 First, the conductive particles are placed in a concave portion of a transfer mold in which a plurality of concave portions are formed (step A). Then, a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator is pressed against the conductive particles in the transfer mold, thereby forming a conductive particle-containing layer on which conductive particles are transferred (step B). Furthermore, on the conductive particle transfer surface on which the conductive particle layer containing the conductive particles is transferred, a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator is formed into a film, thereby forming an insulating resin layer (step C). Thereby, an anisotropic conductive film can be obtained. In addition, as for the insulating resin layer composed of a photopolymerizable resin composition, its minimum melt viscosity can be set to 2000 Pa. above s (preferably 3000 ~ 15000Pa.s), the viscosity at 60 ° C is set to 3000Pa. above s (preferably above 3000 ~ 20,000 Pa.s). In addition, as a condition at the time of pressing in step B, a condition of pressing at a temperature of 60 ° C. to 70 ° C. and 0.5 MPa can be exemplified, but it is not limited to this condition.

再者,較佳於步驟B之後,步驟C之前使含導電粒子層自轉印模具分離。又,藉由調整步驟B之按壓,可改變導電粒子於含導電粒子層之嵌入程度。藉由增大按壓程度,導電粒子於含導電粒子層中之嵌入程度會增大,最終可使其完全嵌入至含導電粒子層中。 Furthermore, it is preferable to separate the conductive particle-containing layer from the transfer mold after step B and before step C. In addition, by adjusting the pressing in step B, the embedding degree of the conductive particles in the conductive particle-containing layer can be changed. By increasing the pressing degree, the embedding degree of the conductive particles in the conductive particle-containing layer will be increased, and finally it can be completely embedded in the conductive particle-containing layer.

又,圖2之態樣之異向性導電膜20可藉由在步驟C之後, 在含導電粒子層之絕緣性樹脂層側的相反側表面形成黏著層(步驟D)而製造。 In addition, the anisotropic conductive film 20 in the state shown in FIG. 2 can be obtained after step C. An adhesive layer is formed on the surface opposite to the insulating resin layer side of the conductive particle-containing layer (step D), and is manufactured.

於圖4所示之異向性導電膜40可依據以下之步驟A、B、CC及D而製造。 The anisotropic conductive film 40 shown in FIG. 4 can be manufactured according to the following steps A, B, CC, and D.

首先,將導電粒子放入形成有多個凹部之轉印模具之凹部(步驟A)。繼而,將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物按壓至轉印模具內之導電粒子,藉此形成轉印有導電粒子之含導電粒子層(步驟B)。進而,將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物成膜於轉印有導電粒子之含導電粒子層之導電粒子非轉印面,藉此形成絕緣性樹脂層(步驟CC)。進而,於含導電粒子層之導電粒子轉印面形成黏著層(步驟D)。藉此可獲得異向性導電膜。 First, the conductive particles are placed in a concave portion of a transfer mold in which a plurality of concave portions are formed (step A). Then, a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator is pressed against the conductive particles in the transfer mold, thereby forming a conductive particle-containing layer on which conductive particles are transferred (step B). Furthermore, a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator is formed on a non-transferable surface of a conductive particle containing a conductive particle layer to which conductive particles are transferred, thereby forming an insulating resin layer (step CC). Further, an adhesive layer is formed on the conductive particle transfer surface of the conductive particle-containing layer (step D). Thereby, an anisotropic conductive film can be obtained.

再者,較佳於步驟CC之後、步驟D之前使含導電粒子層自轉印模具分離。 Furthermore, it is preferable to separate the conductive particle-containing layer from the transfer mold after step CC and before step D.

(轉印模具) (Transfer mold)

作為於本發明之製造方法所使用之轉印模具,例如可使用藉由光微影法等公知之開口形成方法,對矽、各種陶瓷、玻璃、不鏽鋼等金屬等無機材料,或各種樹脂等有機材料等形成開口而成者。又,轉印模具可採用板狀、輥狀等形狀。 As the transfer mold used in the manufacturing method of the present invention, for example, a well-known opening forming method such as photolithography can be used, and inorganic materials such as silicon, various ceramics, glass, and stainless steel, or organic materials such as various resins can be used. Materials and the like are formed by openings. The transfer mold may have a shape such as a plate shape or a roll shape.

作為轉印模具之凹部之形狀,可例示圓柱狀、四角柱等柱形狀、圓錐台、角錐台、圓錐形、四角錐形等錐體形狀等。 Examples of the shape of the concave portion of the transfer mold include a cylindrical shape, a column shape such as a quadrangular pillar, a conical shape, a pyramid shape, a conical shape, and a pyramid shape such as a quadrangular pyramid.

作為凹部之排列,可與導電粒子所採用之排列相應地設為格子狀、鋸齒狀等。 As the arrangement of the recesses, a lattice shape, a zigzag shape, or the like can be used in accordance with the arrangement used for the conductive particles.

就轉印性提昇與導電粒子保持性之平衡性而言,導電粒子之平均粒徑相對於凹部深度之比(=導電粒子之平均粒徑/開口之深度)較佳為0.4~3.0,更佳為0.5~1.5。再者,轉印模具之凹部的直徑與深度可利用雷射顯微鏡進行測定。 In terms of the balance between the improvement of transferability and the retention of conductive particles, the ratio of the average particle diameter of the conductive particles to the depth of the recesses (= the average particle diameter of the conductive particles / the depth of the openings) is preferably 0.4 to 3.0, more preferably It is 0.5 ~ 1.5. The diameter and depth of the concave portion of the transfer mold can be measured with a laser microscope.

就導電粒子之易收容性、絕緣性樹脂之易壓入性等之平衡性而言,凹部之開口直徑相對於導電粒子之平均粒徑之比(=凹部之開口直徑/導電粒子之平均粒徑)較佳為1.1~2.0,更佳為1.3~1.8。 In terms of the balance between the ease of accommodating the conductive particles and the ease of press-fitting of the insulating resin, the ratio of the opening diameter of the recessed portion to the average particle diameter of the conductive particles (= opening diameter of the recessed portion / average particle diameter of the conductive particles) ) Is preferably 1.1 to 2.0, and more preferably 1.3 to 1.8.

再者,於凹部之底徑小於其開口直徑之情況下,較佳將底徑設為導電粒徑之1.1倍以上而未達2倍,將開口直徑設為導電粒徑之1.3倍以上而未達3倍。 When the bottom diameter of the recess is smaller than the opening diameter, it is preferable to set the bottom diameter to be 1.1 times or more and not more than 2 times the conductive particle diameter, and set the opening diameter to be 1.3 times or more the conductive particle diameter. Up to 3 times.

<<連接結構體>> << connection structure >>

本發明之異向性導電膜可於將IC晶片、IC模組、FPC等第1電子零件與塑膠基板、玻璃基板等第2電子零件異向性導電連接時較佳地應用。只要能量線(例如紫外線)可透過任一電子零件,而且不使本發明之效果受損,則可採用各種材質作為此等電子零件之材質。以此種方式獲得之連接結構體亦為本發明之一部分。 The anisotropic conductive film of the present invention can be preferably applied when anisotropically conductively connects a first electronic component such as an IC chip, an IC module, and an FPC to a second electronic component such as a plastic substrate or a glass substrate. As long as energy rays (such as ultraviolet rays) can pass through any electronic component without impairing the effect of the present invention, various materials can be used as the material of these electronic components. The connection structure obtained in this way is also a part of the present invention.

作為使用異向性導電膜之電子零件的連接方法,例如可藉由如下方法製造:自含導電粒子層側,或者於形成有黏著層之情況下自黏著層側將異向性導電膜暫貼至各種基板等第2電子零件;並將IC晶片、FPC等第1電子零件搭載於被暫貼後之異向性導電膜,一面以熱加壓工具自第1電子零件側進行按壓,一面自第2電子零件側進行光照射。可適當調整光照射之時間或開始及結束之時機。又,亦可以如下方式製造:自含導電粒 子層側,或者於形成有黏著層之情況下自黏著層側將異向性導電膜暫貼至第2電子零件;於對被暫貼後之異向性導電膜進行光照射之後搭載第1電子零件,並以熱加壓工具自第1電子零件側進行按壓。於此情況下,亦可自第2電子零件側與上述方式同樣地進一步進行光照射。 As a method of connecting an electronic part using an anisotropic conductive film, for example, it can be manufactured by the following method: self-contained conductive particle layer side, or when an anisotropic conductive film is formed on the self-adhesive layer side when an adhesive layer is formed To various electronic components such as various substrates; and to mount the first electronic component such as IC chip and FPC on the anisotropic conductive film after being temporarily pasted, while pressing from the first electronic component side with a hot press tool, The second electronic component is irradiated with light. The timing of light irradiation or the timing of start and end can be adjusted appropriately. It can also be manufactured as follows: self-contained conductive particles The anisotropic conductive film is temporarily attached to the second electronic component from the side of the sub-layer, or from the side of the adhesive layer in the case where an adhesive layer is formed; The electronic component is pressed from the first electronic component side by a hot press tool. In this case, light irradiation may be performed from the second electronic component side in the same manner as described above.

[實施例] [Example]

以下,藉由實施例具體地說明本發明。再者,熔融黏度係使用旋轉式流變儀(TA Instruments公司),於升溫速度10℃/min、測定壓力固定為5g、使用測定板直徑8mm、測定溫度80℃之條件下進行測定。又,透光係使用分光光度計(UV-3600,島津製作所股份有限公司)測定於300~400nm之波長的透光率。獨立地存在之導電粒子相對於全部導電粒子之比率(獨立粒子比率),或導電粒子面積占有率係使用三谷商事股份有限公司之WinROOF進行測定。進而,根據利用金屬顯微鏡之觀察,測定導電粒子中心點之位置距絕緣性樹脂層與含導電粒子層之界面(基準線)之距離。 Hereinafter, the present invention will be specifically described by way of examples. The melt viscosity was measured using a rotary rheometer (TA Instruments) under the conditions of a temperature rise rate of 10 ° C / min, a measurement pressure of 5 g, a measurement plate diameter of 8 mm, and a measurement temperature of 80 ° C. The light transmittance was measured using a spectrophotometer (UV-3600, Shimadzu Corporation) at a wavelength of 300 to 400 nm. The ratio of independent conductive particles to all conductive particles (independent particle ratio), or area ratio of conductive particles was measured using WinROOF of Mitani Corporation. Furthermore, the distance between the position of the center point of the conductive particles and the interface (reference line) between the insulating resin layer and the conductive particle-containing layer was measured based on observation with a metal microscope.

再者,將應用於以下之實施例1~16及比較例1~4之絕緣性樹脂層、含導電粒子層、及黏著層之各摻合成分預先示於表1。 In addition, Table 1 shows each of the blending points of the insulating resin layer, the conductive particle-containing layer, and the adhesive layer applied to the following Examples 1 to 16 and Comparative Examples 1 to 4 in advance.

Figure TW201803958AD00001
Figure TW201803958AD00001

實施例1(圖1之異向性導電膜之製造) Example 1 (manufacturing of anisotropic conductive film of Fig. 1)

(絕緣性樹脂層之形成) (Formation of insulating resin layer)

如表1所示,製備含有苯氧基樹脂(新日鐵住金化學股份有限公司,YP-50)50質量份、液狀環氧樹脂(三菱化學股份有限公司,jER828)30質量份、光陽離子聚合起始劑(BASF Japan股份有限公司,Irgacure 250)4質量份、熱陽離子聚合起始劑(三新化學工業股份有限公司,SI-60L)4質量份、二氧化矽填料(艾羅西爾R805,日本艾羅西爾股份有限公司)20質量份、及矽烷偶合劑(信越化學工業股份有限公司,KBM-403)1質量份之光聚合性樹脂組成物,將其塗布於膜厚50μm之PET膜上,於80℃之烘箱中使其乾燥5分鐘,於PET膜上形成表2之厚度(14μm)之黏著性 絕緣性樹脂層。將此絕緣性樹脂層之熔融黏度示於表2。再者,於本實施例以及以下之實施例及比較例,熔融黏度之測定係使用旋轉式流變儀(TA Instruments公司)於升溫速度10℃/min、測定壓力固定為5g、使用測定板直徑8mm之條件下進行,求得於80℃之熔融黏度。 As shown in Table 1, 50 parts by mass of a phenoxy resin (Nippon Steel & Sumikin Chemical Co., Ltd., YP-50), 30 parts by mass of a liquid epoxy resin (Mitsubishi Chemical Co., Ltd., jER828), and a photocation were prepared. 4 parts by mass of a polymerization initiator (BASF Japan Co., Ltd., Irgacure 250), 4 parts by mass of a thermal cationic polymerization initiator (Sanxin Chemical Industry Co., Ltd., SI-60L), silicon dioxide filler (airoxel R805, Japan Elosir Co., Ltd.) 20 parts by mass and a silane coupling agent (Shin-Etsu Chemical Industry Co., Ltd., KBM-403) 1 part by mass of a photopolymerizable resin composition, which was applied to a film thickness of 50 μm The PET film was dried in an oven at 80 ° C. for 5 minutes, and the thickness of the thickness (14 μm) of Table 2 was formed on the PET film. Insulating resin layer. Table 2 shows the melt viscosity of this insulating resin layer. Furthermore, in this example and the following examples and comparative examples, the measurement of the melt viscosity was performed using a rotary rheometer (TA Instruments) at a temperature rise rate of 10 ° C./min, the measurement pressure was fixed at 5 g, and the diameter of the measurement plate was used. It was performed under the condition of 8 mm, and the melt viscosity at 80 ° C was obtained.

(含導電粒子層之形成) (Formation of the layer containing conductive particles)

另一方面,製作具有與正方格子圖案對應之凸部之排列圖案的模具,將使公知之透明性樹脂之顆粒熔融而成者流入至該模具並冷卻而使其凝固,藉此製作具有表2之密度(與導電粒子之粒子密度對應)之正方格子圖案之凹部的樹脂製轉印模具。於此轉印模具之凹部填充導電粒子(積水化學工業股份有限公司,AUL703、粒徑3μm)。 On the other hand, a mold having an array pattern of convex portions corresponding to a square lattice pattern was produced, and a pellet obtained by melting particles of a known transparent resin was flowed into the mold and cooled to solidify, thereby producing a sheet having Table 2 Resin transfer mold with a density (corresponding to the particle density of conductive particles) in the concave portion of the square lattice pattern. The concave portion of the transfer mold was filled with conductive particles (Sekisui Chemical Industry Co., Ltd., AUL703, particle diameter: 3 μm).

另外,如表1所示,製備含有苯氧基樹脂(新日鐵住金化學股份有限公司,YP-50)25質量份、液狀環氧樹脂(三菱化學股份有限公司,jER828)30質量份、光陽離子聚合起始劑(BASF Japan股份有限公司,Irgacure 250))4質量份、熱陽離子聚合起始劑(三新化學工業股份有限公司,SI-60L)4質量份、二氧化矽填料(艾羅西爾R805,日本艾羅西爾股份有限公司)45質量份、及矽烷偶合劑(信越化學工業股份有限公司,KBM-403)1質量份之光聚合性樹脂組成物,將此光聚合性樹脂組成物塗布於膜厚50μm之PET膜上,於80℃之烘箱中使其乾燥5分鐘而獲得黏著性樹脂膜,被覆該樹脂膜,於按壓時溫度50℃、按壓0.5MPa之條件下按壓至轉印模具之導電粒子收容面,藉此使導電粒子轉印至樹脂膜,從而形成表2之厚度(4μm)之含導電粒子層。其次,將含導電粒子層自轉印模具剝離。將此含導電粒子層之熔融黏度、獨立存在之導電粒子相對於全部導電粒子 之比率及導電粒子占有面積比率示於表2。此導電粒子之狀態及圖案係藉由顯微鏡觀察,確認至少用於連接之經裁斷之膜的面積(1.8mm×22mm)之整面。 In addition, as shown in Table 1, 25 parts by mass of a phenoxy resin (Nippon Steel & Sumikin Chemical Co., Ltd., YP-50), 30 parts by mass of a liquid epoxy resin (Mitsubishi Chemical Co., Ltd., jER828), 4 parts by mass of photocationic polymerization initiator (BASF Japan Co., Ltd., Irgacure 250)), 4 parts by mass of thermal cationic polymerization initiator (Sanxin Chemical Industry Co., Ltd., SI-60L), silicon dioxide filler (Ai Rossier R805, Japan Aerosil Corporation) 45 parts by mass and 1 part by mass of a photopolymerizable resin composition of a silane coupling agent (Shin-Etsu Chemical Industry Co., Ltd., KBM-403). The resin composition was coated on a PET film having a thickness of 50 μm, and dried in an oven at 80 ° C. for 5 minutes to obtain an adhesive resin film. The resin film was covered and pressed at a temperature of 50 ° C. and a pressure of 0.5 MPa when pressed. To the conductive particle receiving surface of the transfer mold, thereby transferring the conductive particles to the resin film, thereby forming a conductive particle-containing layer having a thickness (4 μm) as shown in Table 2. Next, the conductive particle-containing layer was peeled from the transfer mold. The melt viscosity of this conductive particle-containing layer and the independent conductive particles are compared with all the conductive particles The ratios and the ratios of the conductive particle occupied areas are shown in Table 2. The state and pattern of the conductive particles were observed under a microscope, and at least the entire area of the cut film (1.8 mm × 22 mm) used for connection was confirmed.

(含導電粒子層與絕緣性樹脂層之積層) (Laminated layer containing conductive particles and insulating resin layer)

使絕緣性樹脂層與含導電粒子層之導電粒子之轉印面相對向,將此等於按壓時溫度50℃、按壓0.2MPa之條件下貼合;照射波長365nm、累計光量4000mJ/cm2之紫外線,藉此製造圖1之異向性導電膜。測定所獲得之異向性導電膜對i射線之透光率並依據以下之評價基準進行評價。將所獲得之結果示於表2。又,利用金屬顯微鏡測定導電粒子之中心點相對於絕緣性樹脂層與含導電粒子層之界面(基準線)的位置,結果為0.00μm. The insulating resin layer is opposed to the transfer surface of the conductive particles containing the conductive particle layer, and this is bonded under the conditions of a temperature of 50 ° C and a pressure of 0.2 MPa when pressed; ultraviolet rays with a wavelength of 365 nm and a cumulative light amount of 4000 mJ / cm 2 Thereby, the anisotropic conductive film of FIG. 1 is manufactured. The transmittance of the obtained anisotropic conductive film to i-rays was measured and evaluated in accordance with the following evaluation criteria. The obtained results are shown in Table 2. Also, the position of the center point of the conductive particles with respect to the interface (reference line) between the insulating resin layer and the conductive particle-containing layer was measured using a metal microscope, and the result was 0.00 μm.

A(非常良好):透光率60%以上 A (very good): Light transmittance above 60%

B(良好):透光率50%以上且未達60% B (Good): The light transmittance is more than 50% and less than 60%

C(普通):透光率40%以上且未達50% C (general): the light transmittance is more than 40% and less than 50%

D(不良):透光率未達40% D (bad): light transmittance is less than 40%

實施例2~6(圖2之異向性導電膜之製造) Examples 2 to 6 (manufacturing of anisotropic conductive film of Fig. 2)

於形成含導電粒子層時,以導電粒子距絕緣性樹脂層與含導電粒子層之界面之最短距離成為1.50μm(實施例2)、1.75μm(實施例3)、2.00μm(實施例4)、2.25μm(實施例5)、2.50μm(實施例6)之方式將導電粒子嵌入至含導電粒子層中,除此以外,以與實施例1相同之方式製作異向性導電膜。 When forming the conductive particle-containing layer, the shortest distances between the conductive particles and the interface between the insulating resin layer and the conductive particle-containing layer were 1.50 μm (Example 2), 1.75 μm (Example 3), and 2.00 μm (Example 4). An anisotropic conductive film was produced in the same manner as in Example 1 except that conductive particles were embedded in the conductive particle-containing layer in the manner of 2.25 μm (Example 5) and 2.50 μm (Example 6).

實施例7(圖3之異向性導電膜之製造) Embodiment 7 (manufacturing of an anisotropic conductive film of FIG. 3)

(絕緣性樹脂層之形成) (Formation of insulating resin layer)

形成與實施例1相同之黏著性絕緣性樹脂層。 The same adhesive insulating resin layer as in Example 1 was formed.

(含導電粒子層之形成) (Formation of the layer containing conductive particles)

如表1所示,由苯氧基樹脂(新日鐵住金化學股份有限公司,YP-50)40質量份、液狀環氧樹脂(三菱化學股份有限公司,jER828)30質量份、光陽離子聚合起始劑(BASF Japan股份有限公司,Irgacure 250)4質量份、熱陽離子聚合起始劑(三新化學工業股份有限公司,SI-60L)4質量份、二氧化矽填料(艾羅西爾R805,日本艾羅西爾股份有限公司)30質量份、及矽烷偶合劑(信越化學工業股份有限公司,KBM-403)1質量份構成光聚合性樹脂組成物,且將保持導電粒子之樹脂膜之厚度設為2μm,除此以外,以與實施例1相同之方式形成含導電粒子層。將該含導電粒子層之熔融黏度、以及導電粒子之粒子面積占有率、進而將獨立存在之導電粒子相對於全部導電粒子之比率示於表2。 As shown in Table 1, 40 parts by mass of a phenoxy resin (Nippon Steel & Sumikin Chemical Co., Ltd., YP-50) and 30 parts by mass of a liquid epoxy resin (Mitsubishi Chemical Co., Ltd., jER828) were photocationically polymerized. 4 parts by mass of an initiator (BASF Japan Co., Ltd., Irgacure 250), 4 parts by mass of a thermal cationic polymerization initiator (San Shin Chemical Industry Co., Ltd., SI-60L), silicon dioxide filler (Aerosil R805 , Japan Elosir Co., Ltd.) 30 parts by mass, and 1 part by mass of a silane coupling agent (Shin-Etsu Chemical Industry Co., Ltd., KBM-403) constitute a photopolymerizable resin composition, and will retain the resin film of conductive particles. A conductive particle-containing layer was formed in the same manner as in Example 1 except that the thickness was set to 2 μm. Table 2 shows the melt viscosity of the conductive particle-containing layer, the particle area occupancy of the conductive particles, and the ratio of the conductive particles that exist independently to all the conductive particles.

(黏著層之形成) (Formation of adhesive layer)

又,將苯氧基樹脂(新日鐵住金化學股份有限公司,YP-50)變更為30質量份、二氧化矽填料(艾羅西爾R805,日本艾羅西爾股份有限公司)變更為40質量份,除此以外以與含導電粒子層相同之方式製作黏著層。將此黏著層之熔融黏度示於表2。 In addition, the phenoxy resin (Nippon Steel & Sumitomo Chemical Co., Ltd., YP-50) was changed to 30 parts by mass, and the silica filler (Ilocicill R805, Japan's Ilocicil Corporation) was changed to 40. Except for mass parts, an adhesive layer was produced in the same manner as in the conductive particle-containing layer. The melt viscosity of this adhesive layer is shown in Table 2.

(含導電粒子層、絕緣性樹脂層及黏著層之積層) (Laminated layer containing conductive particle layer, insulating resin layer, and adhesive layer)

使絕緣性樹脂層與含導電粒子層之導電粒子轉印面相對向,於將此等熱壓接之後,將積層物自轉印模具取下,於按壓時溫度50℃、按壓0.2MPa之條件下將黏著層貼合至含導電粒子層之導電粒子非轉印面,藉此製造圖3之異向性導電膜。將所獲得之異向性導電膜對於i射線之透光率的評價示於 表2。 The insulating resin layer and the conductive particle transfer surface of the conductive particle-containing layer are opposed to each other. After thermocompression bonding, the laminate is removed from the transfer mold, and the temperature is 50 ° C and 0.2MPa when pressed. The adhesive layer is adhered to the non-transferable surface of the conductive particles containing the conductive particle layer, thereby manufacturing the anisotropic conductive film of FIG. 3. The evaluation of the transmittance of the obtained anisotropic conductive film to i-rays is shown in FIG. Table 2.

實施例8、9(圖4之異向性導電膜之製造) Examples 8 and 9 (manufacturing of anisotropic conductive film of Fig. 4)

於形成含導電粒子層時,以導電粒子距絕緣性樹脂層與含導電粒子層之界面之最短距離成為1.50μm(實施例8)、2.50μm(實施例9)之方式將導電粒子嵌入至含導電粒子層中,除此以外,以與實施例7相同之方式製作異向性導電膜。 When forming the conductive particle-containing layer, the conductive particles were embedded in the conductive particles such that the shortest distance between the conductive particles and the interface between the insulating resin layer and the conductive particle-containing layer was 1.50 μm (Example 8) and 2.50 μm (Example 9). An anisotropic conductive film was produced in the same manner as in Example 7 except for the conductive particle layer.

實施例10、11(圖4之異向性導電膜之製造) Examples 10 and 11 (manufacturing of anisotropic conductive film of Fig. 4)

將黏著層厚度設為1μm,將含導電粒子層厚度設為3μm,且於形成含導電粒子層時,以導電粒子距絕緣性樹脂層與含導電粒子層之界面之最短距離成為1.50μm(實施例10)、2.50μm(實施例11)之方式將導電粒子嵌入至含導電粒子層中,除此以外,以與實施例7相同之方式製作異向性導電膜。 The thickness of the adhesive layer is 1 μm, and the thickness of the conductive particle-containing layer is 3 μm. When the conductive particle-containing layer is formed, the shortest distance between the conductive particles and the interface between the insulating resin layer and the conductive particle-containing layer is 1.50 μm (implementation). Example 10) An anisotropic conductive film was produced in the same manner as in Example 7 except that the conductive particles were embedded in the conductive particle-containing layer in the manner of 2.50 μm (Example 11).

實施例12、13(圖4之異向性導電膜之製造) Examples 12 and 13 (manufacturing of anisotropic conductive film of Fig. 4)

將黏著層厚度設為0.5μm,將含導電粒子層厚度設為3.5μm,且於形成含導電粒子層時,以導電粒子距絕緣性樹脂層與含導電粒子層之界面之最短距離成為1.50μm(實施例12)、2.50μm(實施例13)之方式將導電粒子嵌入至含導電粒子層中,除此以外,以與實施例7相同之方式製作異向性導電膜。 The thickness of the adhesive layer is 0.5 μm, and the thickness of the conductive particle-containing layer is 3.5 μm. When the conductive particle-containing layer is formed, the shortest distance between the conductive particles and the interface between the insulating resin layer and the conductive particle-containing layer is 1.50 μm. (Example 12) An anisotropic conductive film was produced in the same manner as in Example 7 except that conductive particles were embedded in the conductive particle-containing layer in the manner of 2.50 μm (Example 13).

實施例14、15(圖4之異向性導電膜之製造) Examples 14 and 15 (manufacturing of anisotropic conductive film of Fig. 4)

將導電粒子密度設為30×103個/mm2,將粒子面積占有率設為21.2%(實施例14),或者將導電粒子密度設為15×103個/mm2,將粒子面積占有率設為10.6%(實施例15),除此以外,以與實施例8相同之方式製作異向性導 電膜。 The conductive particle density was set to 30 × 10 3 particles / mm 2 and the particle area occupation ratio was 21.2% (Example 14), or the conductive particle density was set to 15 × 10 3 particles / mm 2 and the particle area occupied An anisotropic conductive film was produced in the same manner as in Example 8 except that the ratio was set to 10.6% (Example 15).

實施例16(圖4之異向性導電膜之製造) Embodiment 16 (manufacturing of an anisotropic conductive film of FIG. 4)

實施例16不對含導電粒子層、絕緣性樹脂層、黏著層之各層摻合光陽離子聚合起始劑(BASF Japan股份有限公司,Irgacure 250)且於積層時省略紫外線照射,除此以外,以與實施例14相同之方式製作異向性導電膜。 In Example 16, a photocationic polymerization initiator (BASF Japan Co., Ltd., Irgacure 250) was not blended with each layer containing the conductive particle layer, the insulating resin layer, and the adhesive layer, and the ultraviolet irradiation was omitted during lamination. An anisotropic conductive film was produced in the same manner as in Example 14.

比較例1~3(圖7之異向性導電膜之製造) Comparative Examples 1 to 3 (manufacturing of anisotropic conductive film of Fig. 7)

(絕緣性樹脂層之形成) (Formation of insulating resin layer)

形成與實施例1相同之黏著性絕緣性樹脂層。 The same adhesive insulating resin layer as in Example 1 was formed.

(含導電粒子層之形成) (Formation of the layer containing conductive particles)

對於光聚合性樹脂組成物,將苯氧基樹脂(新日鐵住金化學股份有限公司,YP-50)30質量份、液狀環氧樹脂(三菱化學股份有限公司,jER828)30質量份、光陽離子聚合起始劑(BASF Japan股份有限公司,Irgacure 250)4質量份、熱陽離子聚合起始劑(三新化學工業股份有限公司,SI-60L)4質量份、二氧化矽填料(艾羅西爾R805,日本艾羅西爾股份有限公司)40質量份、矽烷偶合劑(信越化學工業股份有限公司,KBM-403)1質量份、及導電粒子(積水化學工業股份有限公司,AUL703、粒徑3μm)60質量份(比較例1)、30質量份(比較例2)或15質量份(比較例3)均勻地混合,製備含有導電粒子之光聚合性樹脂組成物。將其塗布於膜厚50μm之PET膜上,並於80℃之烘箱中使其乾燥5分鐘,於PET膜上形成表2之厚度之黏著性含導電粒子層。 For the photopolymerizable resin composition, 30 parts by mass of a phenoxy resin (Nippon Steel & Sumikin Chemical Co., Ltd., YP-50), 30 parts by mass of a liquid epoxy resin (Mitsubishi Chemical Co., Ltd., jER828), and 4 parts by mass of a cationic polymerization initiator (BASF Japan Co., Ltd., Irgacure 250), 4 parts by mass of a thermal cationic polymerization initiator (Sanxin Chemical Industry Co., Ltd., SI-60L), silica filler (Irosic R805, Japan Aerosil Corporation) 40 parts by mass, 1 part by mass of a silane coupling agent (Shin-Etsu Chemical Industry Co., Ltd., KBM-403), and conductive particles (Sekisui Chemical Industry Co., Ltd., AUL703, particle size 3 μm) 60 parts by mass (Comparative Example 1), 30 parts by mass (Comparative Example 2), or 15 parts by mass (Comparative Example 3) were uniformly mixed to prepare a photopolymerizable resin composition containing conductive particles. This was coated on a PET film having a film thickness of 50 μm, and dried in an oven at 80 ° C. for 5 minutes to form an adhesive conductive particle-containing layer having a thickness of Table 2 on the PET film.

(含導電粒子層與絕緣性樹脂層之積層) (Laminated layer containing conductive particles and insulating resin layer)

使絕緣性樹脂層與含導電粒子層相對向,於按壓時溫度50℃、按壓0.2 MPa之條件下將此等貼合,藉此製造圖7之異向性導電膜。 The insulating resin layer and the conductive particle-containing layer were opposed to each other, and the temperature was 50 ° C and the pressure was 0.2 during the pressing. These were bonded together under the condition of MPa to manufacture the anisotropic conductive film of FIG. 7.

比較例4 Comparative Example 4

比較例4將含導電粒子層之苯氧基樹脂(新日鐵住金化學股份有限公司,YP-50)變更為50質量份、將二氧化矽填料(艾羅西爾R805,日本艾羅西爾股份有限公司)變更為20質量份,除此以外,以與實施例7相同之方式製作異向性導電膜。 Comparative Example 4 A phenoxy resin (Nippon Steel & Sumitomo Chemical Co., Ltd., YP-50) containing a conductive particle layer was changed to 50 parts by mass, and a silica filler (Ilocicill R805, Ilocicill, Japan) Co., Ltd.), except that it was changed to 20 parts by mass, an anisotropic conductive film was produced in the same manner as in Example 7.

<評價> <Evaluation>

對於實施例1~16及比較例1~4之異向性導電膜,藉由以下條件之UV照射連接或熱壓接連接將以下之評價用IC與玻璃基板異向性導電連接,製作評價用連接結構體。 For the anisotropic conductive films of Examples 1 to 16 and Comparative Examples 1 to 4, the following evaluation ICs were anisotropically conductively connected to a glass substrate by UV irradiation connection or thermocompression connection under the following conditions, and produced for evaluation. Connection structure.

評價用IC:外形=1.8mm×20mm×0.2mm、金凸塊規格=15μm(高)×15μm(寬)×100μm(長)(凸塊間之間隙15μm) Evaluation IC: Outline = 1.8mm × 20mm × 0.2mm, gold bump specification = 15μm (height) × 15μm (width) × 100μm (length) (gap between bumps 15μm)

附TiAl塗層配線之玻璃基板:外徑=30mm×50mm×0.5mm Glass substrate with TiAl coating wiring: outer diameter = 30mm × 50mm × 0.5mm

UV照射連接:於100℃以80MPa之壓力熱壓接5秒鐘,另一方面,於熱壓接開始經過4秒鐘後,自紫外線照射裝置(Omron股份有限公司、ZUV-C30H)照射1秒鐘之i射線。 UV irradiation connection: thermal compression bonding at 100 ° C and 80 MPa for 5 seconds. On the other hand, after 4 seconds from the start of thermal compression bonding, irradiate from an ultraviolet irradiation device (Omron Corporation, ZUV-C30H) for 1 second. Bell i-ray.

熱壓接連接:自IC晶片側以150℃(到達溫度)且80MPa進行5秒鐘之熱壓接。工具寬度設為1.8mm。 Thermocompression bonding: The thermocompression bonding is performed from the IC chip side at 150 ° C (arriving temperature) and 80MPa for 5 seconds. The tool width is set to 1.8mm.

對於所製作之此等評價用連接結構體,分別以於下文所說明之方式對(a)初始導通電阻、(b)導通可靠性、(c)短路發生率、(d)暫貼性、(e)粒子捕捉性、(f)接合強度、(g)絕緣性樹脂層之硬化率(光聚合率)、(h)異向性導電膜整體之硬化率(光聚合率)、(i)配線間空間之異 向性導電膜之硬化率(光聚合率)、(j)配線中央部之異向性導電膜之硬化率(光聚合率)進行評價。將所獲得之結果示於表2。 For these manufactured connection structures for evaluation, (a) initial on-resistance, (b) on-reliability, (c) short-circuit occurrence rate, (d) temporary adhesion, ( e) Particle trapping property, (f) Joint strength, (g) Hardening rate (photopolymerization rate) of the insulating resin layer, (h) Hardening rate (photopolymerization rate) of the entire anisotropic conductive film, (i) Wiring Space difference The hardening rate (photopolymerization rate) of the anisotropic conductive film and (j) the hardening rate (photopolymerization rate) of the anisotropic conductive film in the central portion of the wiring were evaluated. The obtained results are shown in Table 2.

(a)初始導通電阻 (a) Initial on resistance

對於所獲得之評價用連接結構體之導通電阻,使用數位萬用表並以四端子法測定通電2mA之電流時之值。於實際使用中,期待測定電阻值為1Ω以下。 As for the on-resistance of the obtained connection structure for evaluation, a digital multimeter was used to measure the value at a current of 2 mA using a four-terminal method. In practical use, it is expected that the measured resistance value is 1 Ω or less.

(b)導通可靠性 (b) Continuity reliability

對於所獲得之評價用連接結構體,與初始導通電阻同樣地測定於溫度85℃、濕度85%RH之恆溫槽中放置500小時後之導通電阻。於實際使用中,期待測定電阻值為5Ω以下。 The obtained connection structure for evaluation was measured for the on-resistance after being left in a constant temperature bath at a temperature of 85 ° C. and a humidity of 85% RH for 500 hours in the same manner as the initial on-resistance. In practical use, it is expected that the measured resistance value is 5 Ω or less.

(c)短路發生率 (c) Short circuit occurrence rate

使用數位萬用電表測定所獲得之評價用連接結構體之短路發生率。藉由將連接結構體之短路發生數除以15μm空間數而求得短路發生率,根據以下之基準進行評價。 A digital multimeter was used to measure the short-circuit occurrence rate of the obtained connection structure for evaluation. The short-circuit occurrence rate was calculated by dividing the number of short-circuit occurrences of the connection structure by the space number of 15 μm, and evaluated based on the following criteria.

(評價基準) (Evaluation criteria)

A(非常良好):短路發生率未達10ppm之情況 A (very good): when the short-circuit occurrence rate is less than 10 ppm

B(良好):短路發生率為10ppm以上且未達50ppm之情況 B (Good): When the short-circuit occurrence rate is 10 ppm or more and less than 50 ppm

C(普通):短路發生率為50ppm以上且未達200ppm之情況 C (general): when the short-circuit occurrence rate is 50 ppm or more and less than 200 ppm

D(不良):短路發率為200ppm以上之情況 D (bad): when the short-circuit occurrence rate is 200 ppm or more

(d)暫貼性 (d) Provisional

使用市售之ACF貼附裝置(型號TTO-1794M、Shibaura Mechatronics股份有限公司),將異向性導電膜以2mm×5cm之尺寸貼附於玻璃基板,以 1秒後之到達溫度變為40~80℃之方式以壓力1MPa進行暫貼,並將玻璃基板翻轉,於該情況下目視異向性導電膜是否自玻璃基板剝落或浮起,根據以下之基準進行評價。 Using a commercially available ACF attachment device (model TTO-1794M, Shibaura Mechatronics Co., Ltd.), an anisotropic conductive film was attached to a glass substrate in a size of 2 mm × 5 cm, and After 1 second, the temperature reached 40 ~ 80 ° C, temporarily apply the pressure at 1 MPa, and flip the glass substrate. In this case, visually check whether the anisotropic conductive film peels off or floats from the glass substrate, according to the following criteria Evaluate.

(評價基準) (Evaluation criteria)

A(非常良好):即便於40℃亦可良好地暫貼之情況 A (very good): a case where it can be temporarily affixed even at 40 ° C

B(良好):於40℃無法暫貼、但於60℃可暫貼之情況 B (Good): Temporary paste at 40 ℃, but temporary paste at 60 ℃

C(普通):於60℃無法暫貼、但於80℃可暫貼之情況 C (general): Temporary paste at 60 ℃, but temporary paste at 80 ℃

D(不良):於80℃無法暫貼之情況 D (bad): the case where it cannot be temporarily posted at 80 ° C

(e)粒子捕捉性 (e) Particle capture

自玻璃基板側使用金屬顯微鏡觀察連接後之端子,對壓痕數進行計數,藉此判定粒子之捕捉性。將判定基準示於下文。具體而言,對連接面積1500μm2之IC晶片的凸塊(凸塊尺寸15μm×100μm)上之壓痕數進行計數。 The terminal after the connection was observed with a metal microscope from the glass substrate side, and the number of indentations was counted to determine the capture property of the particles. The determination criteria are shown below. Specifically, the number of indentations on bumps (bump size 15 μm × 100 μm) of an IC wafer with a connection area of 1500 μm 2 was counted.

(評價基準) (Evaluation criteria)

A(非常良好):10個以上 A (very good): 10 or more

B(良好):5個以上且未達10個 B (Good): 5 or more and less than 10

C(普通):3個以上且未達5個 C (general): 3 or more but less than 5

D(不良):未達3個 D (bad): less than 3

(f)接合強度 (f) Joint strength

對於評價用連接結構體,將晶片剪切強度測試機(4000系列、Nordson Advanced Technology股份有限公司)之探針壓抵於IC晶片之側面,於玻璃基板之平面方向以100μm/sec之速度施加剪力,藉此測定接合強度。於 實際使用中,期待20MPa以上之接合強度。 For the connection structure for evaluation, a probe of a wafer shear strength tester (4000 series, Nordson Advanced Technology Co., Ltd.) was pressed against the side of the IC wafer, and a shear was applied at a speed of 100 μm / sec in the plane direction of the glass substrate. Force to measure the bonding strength. to In actual use, a bonding strength of 20 MPa or more is expected.

(g)絕緣性樹脂層之硬化率(光聚合率) (g) Hardening rate (photopolymerization rate) of the insulating resin layer

於單一成分之絕緣性樹脂層上載置單一成分之含導電粒子層(或含導電粒子層與黏著層之積層體),自含導電粒子層(或含導電粒子層與黏著層之積層體)側進行UV照射,其後使用FT-IR裝置(IRT-100,島津製作所股份有限公司)僅測定絕緣性樹脂層之硬化率(對於以下之評價項目(h)~(j)亦相同)。於實際使用中,期待硬化率為70%以上。 A single-component conductive particle-containing layer (or a multilayer body containing a conductive particle layer and an adhesive layer) is placed on a single-component insulating resin layer, from the conductive particle-containing layer (or a multilayer body containing a conductive particle layer and an adhesive layer) UV irradiation was performed, and thereafter, only the curing rate of the insulating resin layer was measured using an FT-IR device (IR T- 100, Shimadzu Corporation) (the same applies to the following evaluation items (h) to (j)). In practical use, a hardening rate of 70% or more is expected.

(h)異向性導電膜整體之硬化率(光聚合率) (h) Hardening rate (photopolymerization rate) of the entire anisotropic conductive film

對接合強度評價時所破壞之連接結構體之殘留於玻璃基板表面與IC晶片表面之異向性導電膜的硬化物之硬化率進行測定。於實際使用中,期待較低之硬化率為70%以上。 The hardening rate of the hardened | cured material of the anisotropic conductive film which remained on the glass substrate surface and IC wafer surface of the connection structure which was destroyed at the time of joint strength evaluation was measured. In actual use, a lower hardening rate is expected to be 70% or more.

(i)配線間空間之異向性導電膜之硬化率(光聚合率) (i) Hardening rate (photopolymerization rate) of anisotropic conductive film in wiring space

對接合強度評價時所破壞之連接結構體之殘留於玻璃基板表面的配線間空間之異向性導電膜的硬化物之硬化率進行測定。於實際使用中,期待硬化率為70%以上。 The hardening rate of the hardened | cured material of the anisotropic conductive film which remained in the inter-wiring space on the glass substrate surface of the connection structure which was destroyed at the time of joint strength evaluation was measured. In practical use, a hardening rate of 70% or more is expected.

(j)配線中央部之異向性導電膜之硬化率 (j) Hardening rate of the anisotropic conductive film in the center of the wiring

對接合強度評價時所破壞之連接結構體之殘留於玻璃基板表面的配線中央部之異向性導電膜的硬化物之硬化率進行測定。於實際使用中,期待硬化率為70%以上。 The hardening rate of the hardened | cured material of the anisotropic conductive film which remained in the center part of the wiring of the connection structure which destroyed the bonding strength evaluation on the glass substrate surface was measured. In practical use, a hardening rate of 70% or more is expected.

Figure TW201803958AD00002
Figure TW201803958AD00002

由表2可知,實施例1~16之異向性導電膜於任一評價項目中均顯示良好之結果。尤其,由實施例1~6之結果及實施例7及8之結果可知,隨著與界面相距之粒子中心點間距離變長,有粒子捕捉性得到改善之傾向,另一方面,可知雖顯示透光率評價降低之傾向,但可維持實際使用中不存在問題之等級。又,由實施例14及15之結果可知,隨著粒子密度(粒子面積占有率)增大,粒子捕捉性得到改善。再者,關於實施例1~16之異向性導電膜,於80℃之膜整體之熔融黏度均處於500~5000Pa.s之範圍。熔融黏度之測定係利用與上述方法相同之方法進行。 As can be seen from Table 2, the anisotropic conductive films of Examples 1 to 16 showed good results in any of the evaluation items. In particular, it can be seen from the results of Examples 1 to 6 and the results of Examples 7 and 8 that as the distance between the center points of the particles spaced from the interface becomes longer, the particle trapping property tends to be improved. The light transmittance evaluation tends to decrease, but it is possible to maintain a level without problems in actual use. Further, it is understood from the results of Examples 14 and 15 that as the particle density (particle area occupancy) increases, the particle trapping property is improved. Furthermore, regarding the anisotropic conductive films of Examples 1 to 16, the melt viscosity of the entire film at 80 ° C was 500 to 5000 Pa. The range of s. The measurement of the melt viscosity is performed by the same method as the above method.

相對於此,可知比較例1~3之異向性導電膜中,因導電粒子之獨立粒子比率未達70%,故對於i射線之透光率降低,絕緣性樹脂層以及異向性導電膜整體之硬化率(光聚合率)變得不充分,暫貼性及粒子捕捉性降低,產生導通可靠性之降低等。 In contrast, in the anisotropic conductive films of Comparative Examples 1 to 3, since the independent particle ratio of the conductive particles is less than 70%, the light transmittance to i-rays is reduced, and the insulating resin layer and the anisotropic conductive film are The overall hardening rate (photopolymerization rate) becomes insufficient, temporary adhesion and particle trapping properties decrease, and reduction in conduction reliability occurs.

又,可知比較例4之異向性導電膜中,雖導電粒子之獨立粒子比率為95%以上,然而粒子面積占有率超過70%,且粒子捕捉性降低。 In addition, it was found that in the anisotropic conductive film of Comparative Example 4, although the independent particle ratio of the conductive particles was 95% or more, the particle area occupancy ratio exceeded 70%, and the particle trapping property was reduced.

[產業上之可利用性] [Industrial availability]

本發明之異向性導電膜對於IC晶片等電子零件異向性導電連接於配線基板有用。電子零件之配線的狹小化不斷推進,本發明於將狹小化之電子零件異向性導電連接之情況時尤為有用。 The anisotropic conductive film of the present invention is useful for anisotropic conductive connection of electronic components such as IC wafers to a wiring substrate. The narrowing of the wiring of electronic parts is continuously promoted, and the present invention is particularly useful in the case of anisotropic conductive connection of narrowed electronic parts.

Claims (16)

一種異向性導電膜,積層有絕緣性樹脂層與存在多個導電粒子之含導電粒子層,絕緣性樹脂層與含導電粒子層分別為含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物之層,導電粒子於俯視異向性導電膜時相互獨立地存在,該異向性導電膜對於波長300~400nm之光的膜厚方向透射率為40%以上。 An anisotropic conductive film is laminated with an insulating resin layer and a conductive particle-containing layer in which a plurality of conductive particles are present. The insulating resin layer and the conductive particle-containing layer are photopolymerizations containing a photopolymerizable compound and a photopolymerization initiator, respectively. In the layer of the anisotropic conductive composition, conductive particles exist independently of each other when viewed from the anisotropic conductive film. The anisotropic conductive film has a transmittance in the thickness direction of light having a wavelength of 300 to 400 nm of 40% or more. 如申請專利範圍第1項之異向性導電膜,其中,導電粒子存在於絕緣性樹脂層與含導電粒子層之層間之界面,或絕緣性樹脂層與含導電粒子層之層間之界面附近的含導電粒子層側。 For example, the anisotropic conductive film according to item 1 of the patent application, in which conductive particles exist near the interface between the insulating resin layer and the layer containing the conductive particles, or near the interface between the insulating resin layer and the layer containing the conductive particles. The conductive particle-containing layer side. 如申請專利範圍第1項之異向性導電膜,其中,於將絕緣性樹脂層與含導電粒子層之層間之界面設為基準線且將含導電粒子層側之方向設為正時,相對於基準線,導電粒子之中心點存在於導電粒徑之-80%~80%的範圍。 For example, in the anisotropic conductive film of the first patent application scope, when the interface between the insulating resin layer and the layer containing the conductive particle is set as a reference line and the direction of the side containing the conductive particle layer is set as a positive, At the baseline, the center point of the conductive particles exists in the range of -80% to 80% of the conductive particle size. 如申請專利範圍第1至3項中任一項之異向性導電膜,其中,關於熔融黏度,具有「絕緣性樹脂層<含導電粒子層」之關係。 For example, the anisotropic conductive film according to any one of the claims 1 to 3, wherein the melt viscosity has a relationship of "insulating resin layer <conductive particle-containing layer". 如申請專利範圍第1至4項中任一項之異向性導電膜,其中,於膜厚方向,自存在導電粒子之側之膜的外界面至導電粒子中心點之距離小於俯視導電粒子時之粒子間距離。 For example, the anisotropic conductive film according to any one of claims 1 to 4, wherein, in the film thickness direction, the distance from the outer interface of the film on the side where the conductive particles exist to the center point of the conductive particles is smaller than when the conductive particles are viewed from the top. The distance between particles. 如申請專利範圍第1至5項中任一項之異向性導電膜,其中,於含導電粒子層之絕緣性樹脂層側的相反側表面形成有黏著層。 For example, in the anisotropic conductive film according to any of claims 1 to 5, the adhesive layer is formed on the surface on the opposite side of the insulating resin layer side of the conductive particle-containing layer. 如申請專利範圍第6項之異向性導電膜,其中,關於熔融黏度,具有「絕緣性樹脂層<含導電粒子層<黏著層」之關係。 For example, the anisotropic conductive film according to item 6 of the patent application scope has a relationship of "insulating resin layer <containing conductive particle layer <adhesive layer" regarding the melt viscosity. 如申請專利範圍第1至7項中任一項之異向性導電膜,其中,光聚合起始劑為光陽離子聚合起始劑。 For example, the anisotropic conductive film according to any one of claims 1 to 7, wherein the photopolymerization initiator is a photocationic polymerization initiator. 如申請專利範圍第1至8項中任一項之異向性導電膜,其中,絕緣性樹脂層進一步含有熱聚合起始劑。 The anisotropic conductive film according to any one of claims 1 to 8, wherein the insulating resin layer further contains a thermal polymerization initiator. 如申請專利範圍第9項之異向性導電膜,其中,熱聚合起始劑為熱陽離子聚合起始劑或熱自由基聚合起始劑。 For example, the anisotropic conductive film according to item 9 of the application, wherein the thermal polymerization initiator is a thermal cationic polymerization initiator or a thermal radical polymerization initiator. 如申請專利範圍第1至10項中任一項之異向性導電膜,其中,導電粒子呈格子狀地規則排列。 For example, the anisotropic conductive film according to any one of claims 1 to 10, wherein the conductive particles are regularly arranged in a grid pattern. 一種申請專利範圍第1項之異向性導電膜之製造方法,係藉由將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物成膜在存在多個導電粒子之含導電粒子層之單面,而形成絕緣性樹脂層。 A method for manufacturing an anisotropic conductive film under the scope of patent application No. 1 is to form a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator into a film containing a plurality of conductive particles in a conductive state. One side of the particle layer forms an insulating resin layer. 一種申請專利範圍第1項之異向性導電膜之製造方法,具有以下之步驟A~C:(步驟A)將導電粒子放入形成有多個凹部之轉印模具之凹部的步驟;(步驟B)將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物按壓至轉印模具內之導電粒子,藉此形成轉印有導電粒子之含導電粒子層的步驟;及(步驟C) 將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物成膜於轉印有導電粒子之含導電粒子層之導電粒子轉印面,藉此形成絕緣性樹脂層的步驟。 A method for manufacturing an anisotropic conductive film in the scope of patent application No. 1 has the following steps A to C: (step A) a step of placing conductive particles in a concave portion of a transfer mold having a plurality of concave portions; (step B) a step of pressing a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator onto conductive particles in a transfer mold, thereby forming a conductive particle-containing layer on which conductive particles are transferred; and (step C) A step of forming an insulating resin layer by forming a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator on a conductive particle transfer surface of a conductive particle-containing layer to which conductive particles are transferred. 如申請專利範圍第13項之製造方法,其進一步具有以下之步驟D:(步驟D)於含導電粒子層之絕緣性樹脂層側的相反側之表面形成黏著層的步驟。 For example, the manufacturing method according to item 13 of the patent application further includes the following step D: (step D) a step of forming an adhesive layer on the surface on the opposite side of the insulating resin layer side of the conductive particle layer. 一種申請專利範圍第1項之異向性導電膜之製造方法,具有以下之步驟A、B、CC及D:(步驟A)將導電粒子放入形成有多個凹部之轉印模具之凹部的步驟;(步驟B)將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物按壓至轉印模具內之導電粒子,藉此形成轉印有導電粒子之含導電粒子層的步驟;(步驟CC)將含有光聚合性化合物與光聚合起始劑之光聚合性樹脂組成物成膜於轉印有導電粒子之含導電粒子層之導電粒子非轉印面,藉此形成絕緣性樹脂層的步驟;及(步驟D)於含導電粒子層之絕緣性樹脂層側的相反側之表面形成黏著層的步驟。 A method for manufacturing an anisotropic conductive film in the scope of patent application No. 1 has the following steps A, B, CC, and D: (step A) placing conductive particles in a recess of a transfer mold having a plurality of recesses Step; (Step B) a step of pressing a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator to conductive particles in a transfer mold, thereby forming a conductive particle-containing layer on which conductive particles are transferred (Step CC) forming an insulating resin by forming a photopolymerizable resin composition containing a photopolymerizable compound and a photopolymerization initiator on a non-transferable surface of a conductive particle containing a conductive particle layer on which conductive particles are transferred, thereby forming an insulating resin A step of forming a layer; and (step D) a step of forming an adhesive layer on a surface on the opposite side of the insulating resin layer side of the conductive particle-containing layer. 一種連接結構體,係利用申請專利範圍第1至11項中任一項之異向性導電膜將第1電子零件異向性導電連接於第2電子零件。 A connection structure is an anisotropic conductive connection of a first electronic component to a second electronic component by using an anisotropic conductive film according to any one of claims 1 to 11.
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