TW201802357A - Dry vacuum pump with abatement function - Google Patents

Abstract

An objective of this invention is to provide an abatement system allowing maintenance to be easily performed. A dry vacuum pump (100) with abatement function provided in this invention includes a dry pump (1) for performing vacuum discharging with respect to exhaust gas from a tool (200), an abatement section (2) for performing abatement treatment to the exhaust gas discharged by the dry pump (1), and a flow path (3) directly connecting the dry pump (1) and the abatement section (2) in an un-detachable way.

Description

Dry vacuum pump with decontamination function

The present invention relates to a dry vacuum pump having a dry pump and a decontamination function for detoxifying exhaust gas.

In a manufacturing process of a semiconductor device, a liquid crystal panel, a solar cell, or the like, various processing such as an etching process or a chemical vapor deposition (CVD) process is performed by introducing a process gas into a tool (process chamber) that is evacuated to a vacuum. Further, such tools are periodically washed by discharging the cleaning gas.

Since the exhaust gas of such a process gas or a purge gas is detrimental to decane (SiH ₄ , TEOS, etc.), halogen gas (NF ₃ , ClF ₃ , SF ₆ , CHF _{3 ,} etc.), it is not suitable to be directly discharged to the atmosphere. Therefore, such exhaust gas must be detoxified by an abatement system provided on the downstream side of the tool.

Fig. 20 is a schematic block diagram showing a configuration example of the abatement system 90. The decontamination system 90 is configured to detoxify the exhaust gas (process gas, purge gas) from the tool 91, and includes a dry pump 94 including a booster pump 92 (BP) and a main pump 93 (MP), and a detoxification unit 95. The vent gas system sucked by the dry pump 94 is led to the abatement part 95.

The main pump 93 in the dry pump 94 is connected to the abatement unit 95 by a long pipe 96. The pipe 96 is connected to the dry pump 94 by the connecting member 96a, and is connected to the abatement part 95 by the connecting member 96b. In order to make the concentration of the exhaust gas in the pipe 96 below the explosion limit, nitrogen gas (preferably hot nitrogen gas (hot N ₂ )) for diluting the exhaust gas is introduced into the pipe 96. In addition, since the sublimation product is precipitated in the pipe 96 due to a decrease in the temperature of the exhaust gas in the pipe 96, the heater 97 is attached to increase the temperature of the pipe 96.

(previous technical literature) (Patent Literature)

Patent Document 1: Japanese Patent Publication No. 9-861

The dry pump 94 precipitates a product inside due to the processing gas, and is corroded by the cleaning gas. Therefore, regular maintenance is required. In order to minimize the downtime of the tool 91, it is preferable to perform so-called swap maintenance in which the main pump 93 in operation is exchanged with the standby pump of the same type.

However, in general (Fig. 20), the abatement system is large and fixed, making it difficult to perform maintenance.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a dry vacuum pump with a deterrent function that is easy to maintain.

According to the same aspect of the present invention, a dry vacuum pump with a decontamination function is provided, which has one or a plurality of dry pumps and an abatement part. The dry pump will be discharged from the tool The gas is evacuated by vacuum. The detoxification unit detoxifies the exhaust gas evacuated by the dry pump. With this configuration, the abatement unit can also perform so-called exchange maintenance.

Further, by providing a flow path in which the dry pump and the abatement unit are directly connected to each other so as not to be detachable, it is possible to provide a connection method which is extremely safe with respect to leakage of gas.

Furthermore, since the dry pump is directly connected to the abatement part, maintenance becomes easy.

The dry pump may be provided with an exhaust port on a side surface of the dry pump, and the abatement part may have a combustion unit that burns the exhaust gas and a nozzle that introduces the exhaust gas into the combustion unit, and the flow path is horizontal The direction is extended, one end is connected to the exhaust port of the dry pump, and the other end is connected to the nozzle of the abatement part.

With such a connection, the flow path can be shortened.

In the dry pump, an exhaust port may be provided on an upper surface of the dry pump, and the abatement unit may include a combustion unit that burns the exhaust gas and a nozzle that introduces the exhaust gas into the combustion unit, and the flow path has a vertical line. The L shape of the partial portion and the horizontal portion, the lower end of the vertical portion is connected to the exhaust port of the dry pump, and one end of the horizontal portion is connected to the nozzle of the abatement portion.

The more the amount of exhaust gas to be treated, the higher the combustion portion must be, but with this connection, the height portion of the dry pump can ensure a part of the height of the combustion portion, and the dry vacuum pump with the function of removing the damage can be reduced as a whole. the height of.

In the dry pump, an exhaust port may be provided on a lower surface of the dry pump, and the abatement unit may include a combustion unit that burns the exhaust gas and a nozzle that introduces the exhaust gas into the combustion unit, and the flow path has a vertical line. The L shape of the partial portion and the horizontal portion, the upper end of the vertical portion is connected to the exhaust port of the dry pump, and one end of the horizontal portion is connected to the nozzle of the abatement portion.

Such a connection may also be used when the amount of exhaust gas to be treated by the detoxification portion does not need to be too large. The combustion portion may be cylindrical, and the nozzle is provided on a side surface of the combustion portion, and the exhaust gas is introduced along a tangential direction of the combustion portion.

Thereby, the exhaust gas can be effectively detoxified.

The aforementioned dry pump may be a screw pump or a Rogowski pump.

Preferably, the dry vacuum pump with the abatement function is that the dry pump and the abatement part are movable modules, and can be exchanged and maintained.

The dry pump may have a first pump (for example, a booster pump) connected to the tool, and a detachable connection with the first pump and connected to the abatement part by the flow path to be undetachable. The second pump (eg main pump).

Further, the abatement unit may include two or more combustion units that burn the exhaust gas, and a switching mechanism that connects one of the two or more combustion units to the dry pump.

Since the dry vacuum pump with the decontamination function includes a dry pump and a detoxification unit, and these members are directly connected, maintenance of the decontamination unit becomes easy. Thereby, it is possible to avoid the danger of removing the piping between the dry pump and the abatement part in the user's factory.

1, 94‧‧‧ dry pump

1a, 92, BP‧‧‧ booster pump

1b, 93, MP‧‧‧ main pump

2. 95‧‧‧Demolition Department

3‧‧‧Flow path

3a‧‧‧Lead part

3b‧‧‧ horizontal section

4‧‧‧ overall control panel

5a‧‧‧lower frame

5b‧‧‧Upper frame

6‧‧‧Frame, switching mechanism

6a, 6b‧‧‧ three-way valve

7‧‧‧N ₂ unit for dilution

8, 96‧‧‧ piping

10‧‧‧Spiral pump

11a, 41a‧‧‧ suction port

11b, 41b‧‧ vents

12, 42‧‧ ‧ Motor Department

13, 43‧ ‧ pump department

14a, 14b, 423a, 423b‧‧‧ timing gear

20, 20a, 20b‧‧ Burning Department

23a‧‧‧Fuel nozzle

23b‧‧‧ nozzle for combustion-supporting gas

23c‧‧‧ nozzle for exhaust gas

24‧‧‧Water supply nozzle

25‧‧‧ slots

26‧‧‧ Washing tower

40‧‧‧Rouge pump

41, 112‧‧‧ cover

41c‧‧‧ converter

90‧‧‧Destroy system

91, 200‧‧‧ tools

96a, 96b‧‧‧connecting members

97‧‧‧heater

100‧‧‧Dry vacuum pump with decontamination function

101‧‧‧Package

111‧‧‧ suction side casing

113‧‧‧Exhaust side casing

113a, 113b, 114a, 114b, 413a, 413b, 414a, 414b‧ ‧ bearings

120, 420‧‧ ‧ motor frame

121a, 121b, 421a, 421b‧‧‧ stator windings

122a, 122b, 422a, 422b‧‧‧ motor rotor

Main axis of 131a, 131b, 431a, 431b‧‧‧

132a, 132b‧‧‧ spiral rotor

410‧‧‧Intermediate room

4321a to 4325a, 4321b to 4325b‧‧‧Lux rotor

INV‧‧‧ reverser

MFC1, MFC2, MFC4‧‧‧ mass flow controller

V11, V12, V14‧‧‧ blocking valve

Fig. 1 is a block diagram showing a schematic configuration of a dry vacuum pump 100 with a detoxification function according to an embodiment.

Fig. 1A is a view showing the main pump 1b, the abatement unit 2, and the entire control panel 4, which are detached from the dry vacuum pump 100 with the abatement function.

Fig. 2A is a cross-sectional view of the combustion portion 20 which is a main portion of the abatement portion 2.

Fig. 2B is a cross-sectional view taken along line A-A of Fig. 2A.

2C is a view for explaining the input and output of information between the tool 200 and the entire control panel 4 of the dry vacuum pump 100 with the detoxification function, and the overall control panel 4 and the dry pump 1, the dilution N ₂ unit 7 and the detoxification. Schematic diagram of various controls performed between the sections 2.

Fig. 3 is a vertical sectional view of the screw pump 10 as an example of the main pump 1b.

Fig. 4 is a horizontal sectional view of the screw pump 10.

Fig. 5 is a schematic view showing a first connection example of the screw pump 10 and the combustion portion 20.

Fig. 6 is a schematic view showing a second connection example of the screw pump 10 and the combustion portion 20.

Fig. 7 is a schematic view showing a third example of connection between the screw pump 10 and the combustion portion 20.

Fig. 8 is a schematic view showing a fourth connection example of the screw pump 10 and the combustion portion 20.

Fig. 9 is a schematic view showing a fifth connection example of the screw pump 10 and the combustion portion 20.

Fig. 10 is a vertical sectional view showing a Lue pump 40 of another example of the main pump 1b.

Figure 11 is a horizontal cross-sectional view of the Rouer pump 40.

Fig. 12 is a cross-sectional view taken along line B-B of Fig. 11.

Fig. 13 is a view showing a first example of connection between the Rox pump 40 and the combustion portion 20.

Fig. 14 is a view showing a second example of connection between the Rox pump 40 and the combustion portion 20.

Fig. 15 is a view showing a third example of connection between the Rox pump 40 and the combustion portion 20.

Fig. 16 is a view showing a fourth example of connection between the Rox pump 40 and the combustion portion 20.

Fig. 17 is a block diagram showing a first modification of Fig. 1.

Fig. 18 is a block diagram showing a second modification of Fig. 1.

Fig. 19 is a block diagram showing a third modification of Fig. 1.

Fig. 20 is a schematic block diagram showing a configuration example of the abatement system 90.

Hereinafter, the embodiments will be specifically described with reference to the drawings.

Fig. 1 is a block diagram showing a schematic configuration of a dry vacuum pump 100 with a detoxification function according to an embodiment. The dry vacuum pump 100 with the decontamination function is to remove the exhaust gas from the tool 200, and has: Dry pump 1 including a booster pump 1a (Bp) and a main pump 1b (MP) respectively provided with an inverter (INV), a poisoning unit 2, a flow path 3, an overall control panel 4, a lower frame 5a, and upper Frame 5b, as indicated by symbol 101, is encapsulated. The tool 200 is a manufacturing device such as a semiconductor device, a liquid crystal panel, or a solar cell. The exhaust gas system refers to a processing gas used in the tool 200, a cleaning gas for cleaning, and the like.

The exhaust gas system booster pump 1a and the main pump 1b from the tool 200 are evacuated by vacuum, and are guided to the abatement part 2 through the flow path 3. Specifically, the booster pump 1a connected to the tool 200 is a pump having a large capacity, and can evacuate a large-flow exhaust gas by vacuum. The main pump 1b provided downstream of the booster pump 1a compresses and exhausts the exhaust gas from the booster pump 1a in each stage to reduce the pressure and ensure the degree of vacuum.

The abatement unit 2 is composed of the combustion unit 20, the tank 25, the water washing tower 26, and the like, and detoxifies the exhaust gas. Specifically, the combustion unit 20 is combusted by adding air, oxygen, or the like to the exhaust gas, for example, to burn a toxic gas, a combustible gas, or the like contained in the exhaust gas. The burned exhaust gas system is introduced into a tank 25 containing water and cooled. Thereafter, in the water washing tower 26 filled with the resin member, water is sprayed on the exhaust gas to remove the water-soluble gas. The harmless gas is discharged to the exhaust line of the user's factory.

The overall control panel 4 controls the booster pump 1a, the main pump 1b, and the abatement unit 2. Although not shown, the booster pump 1a, the main pump 1b, and the abatement unit 2 are provided with a connection port (not shown) of a general-purpose supply device such as a power source, cooling water, nitrogen gas, or fuel required for operation.

In the present embodiment, the booster pump 1a and the main pump 1b are equipped with The pipe 8 is connected, but the pipe on the side of the booster pump 1a and the pipe on the side of the main pump 1b are detachably connected, for example, by a clamp. On the other hand, the main pump 1b and the abatement unit 2 (the combustion unit 20 therein) are directly connected by the flow path 3 without a joint (no joint). That is, the main pump 1b, the flow path 3, and the abatement unit 2 are integrated into a module and cannot be attached and detached, and cannot be detached (or at least not disassembled at the user's factory).

The integrated main pump 1b and the abatement part 2 (and the entire control panel 4) are movable modules, and are provided, for example, in the lower frame 5a. In this manner, the members and the connecting port are housed in the frame 6. The lower frame 5a is provided with casters and can be easily carried. Further, the upper frame 5b is provided with a booster pump 1a. When the general-purpose supply device is excluded, the connection between the lower frame 5a and the upper frame 5b and the outside is only the connection of the booster pump 1a (vacuum pipe) and the connection for discharging the harmless exhaust gas.

With such a configuration, the exchange and maintenance of the abatement unit 2 becomes easy. In other words, the main pump 1b removes the booster pump 1a, and carries out the maintenance main pump 1b and the abatement unit 2 together with the lower frame 5a (see FIG. 1A). Then, the main pump 1b for storing (or exchanging) and the other lower frame 5a of the abatement unit 2 are carried in and stored in the booster pump 1a. Thereby, the down time of the tool 200 can be minimized. Furthermore, it is possible to avoid the danger of disassembling the dry pump 1 and the abatement part 2 at the user's factory.

As described above, the dry pump 1 (the main pump 1b in the middle) is directly coupled to the abatement unit 2, and has the following advantages. Since the distance between the two is short, the temperature of the exhaust gas in the flow path 3 is hardly lowered, and the heater shown in Fig. 20 may not be provided. Therefore, it can be reduced Heater construction and operation costs. Further, it is not necessary to introduce nitrogen gas for reducing the concentration of the exhaust gas, and the total amount of the gas to be treated by the abatement part is reduced, the size of the abatement part can be reduced, and the fuel such as oxygen necessary for the harmlessness can be reduced. Further, the diameter of the flow path 3 can be reduced. Furthermore, since there is no joint, the risk of leakage of the exhaust gas can also be reduced.

Specific configuration examples and connection examples of the abatement unit 2 and the main pump 1b will be described below.

Fig. 2A is a cross-sectional view of the combustion portion 20 which is a main portion of the abatement portion 2. The combustion portion 20 has a cylindrical shape in which the upper end is closed and the lower end is open. An exhaust gas capable of introducing fuel (fuel gas), a combustion-supporting gas (oxygen-containing gas), and a tool 200 sucked by the dry pump 1 is formed in the vicinity of the upper end portion of the combustion portion 20. That is, the upper portion of the combustion portion 20 is directly connected to the main pump 1b in Fig. 1 through the flow path 3. Further, the upper end portion of the combustion portion 20 is provided with an ignition burner 22 for ignition, and is constructed to supply fuel and air. Further, in actuality, a cleaning portion or the like is provided below the combustion portion 20, but the illustration is omitted here.

Fig. 2B is a cross-sectional view taken along line A-A of Fig. 2A. As shown in Fig. 2B, the fuel injection nozzle 23a, the combustion-supporting gas nozzle 23b to which the combustion-supporting gas is blown, and the discharge gas nozzle 23c which is connected to the flow path 3 and blows the discharge gas are burned. The side surface of the inner peripheral surface of the portion 20 is provided in the tangential direction. The fuel nozzle 23a, the combustion-supporting gas nozzle 23b, and the exhaust gas nozzle 23c are located on the same plane orthogonal to the axis of the cylindrical combustion unit 20, in other words, a part of the openings of the three types of nozzles on the inner peripheral side of the combustion chamber. The system is on the same plane.

As shown in FIG. 2A, the combustion unit 20 is provided with a supply of a wet wall (water) on the inner wall surface of the combustion unit 20 at a position slightly below the blowing position of the fuel, the combustion-supporting gas, and the exhaust gas. The water of the water of the membrane is supplied to the nozzle 24.

In the combustion unit 20 configured as shown in FIG. 2A and FIG. 2B, the fuel nozzle 23a, the combustion-supporting gas nozzle 23b, and the exhaust gas nozzle 23c are directed toward the combustion portion at a flow rate equal to or higher than the combustion rate of the flame. In the tangential direction of the circumferential surface of 20, fuel, combustion-supporting gas and exhaust gas are respectively blown. Thereby, three kinds of mixed cylindrical mixed flames floating from the inner wall of the combustion portion 20 are formed. The cylindrical mixed flame is formed along the axial direction of the combustion portion 20.

Since all three gases are blown in the tangential direction, the outer side of the cylindrical mixed flame is formed by rotating the centrifugal force to have a lower temperature and a heavier unburned three mixed gas, and the inner side temperature is higher and lighter. The distribution of the three mixed combustion gases. Therefore, since the cylindrical mixed flame is self-insulated by the three kinds of mixed gases which are not ignited at a low temperature, the temperature is not lowered by heat radiation, and the gas treatment with high combustion efficiency can be performed.

2C is a view for explaining the input and output of information between the tool 200 and the entire control panel 4 of the dry vacuum pump 100 with the detoxification function, and the overall control panel 4 and the dry pump 1, the dilution N ₂ unit 7 and the detoxification. Schematic diagram of various controls performed between the sections 2. Further, the N ₂ unit for dilution 7 introduces nitrogen gas into the dry pump 1 to prevent the product from adhering to the internal system of the dry pump 1 .

The dry pump 1 is configured to mix the flow rate of the process gas flowing inside the pump, and the N ₂ gas for dilution is introduced into the pump from the intake side of the last compression stage by the N ₂ unit 7 for dilution, whereby the pump can be omitted. When the exhaust performance is adversely affected and the running cost is not increased, the solid is prevented from adhering to the final compression stage where the processing gas is compressed and the processing gas inside the pump is most concentrated, and the occurrence of corrosion is suppressed.

The overall control panel 4 controls the flow rate of the N ₂ gas supplied to the dry pump 1 in accordance with the operation of the tool 200 and the type of gas supplied to the tool 200 and the gas flow rate. Further, the overall control panel 4 controls the flow rate and electric power of the water supplied to the dry pump 1 in accordance with the operation of the tool 200 and the type of gas supplied to the tool 200 and the information of the gas flow rate.

In Fig. 2C, the overall control panel 4 is shown as a controller of the control machine of the dry vacuum pump 100 with the detoxification function, but the entire control panel 4 can also be attached to each machine (dry pump 1, dilution N). ₂ units 7 and individual controllers provided in the sterilization unit 2).

In the dry vacuum pump 100 with the abatement function shown in FIG. 2C, the operation of the tool 200, the type of the supplied gas, and the flow rate of the supplied gas are input from the tool 200 to the entire control panel 4. For example, when the tool 200 is a CVD apparatus, the tool 200 sequentially performs wafer loading, vacuum extraction, temperature rise, film formation (feeding material gas), temperature reduction, atmospheric pressure recovery, and wafer removal operations. Carry out these operational projects. Further, in order to remove the solid matter adhering to the tool 200, the cleaning gas (HF, ClF ₃ , NF ₃ or the like) is periodically supplied into the tool 200 and exhausted.

The overall control panel 4 is based on the operation of the tool 200, The gas type and the supply gas flow rate are supplied, and the rotation speeds of the booster pump 1a and the main pump 1b of the dry pump 1 are automatically controlled. In other words, the booster pump 1a disposed on the vacuum side and the main pump 1b disposed on the atmosphere side are controlled to have an optimum rotational speed in accordance with the operation of the tool 200, the type of the supplied gas, and the flow rate of the supplied gas.

When the tool 200 is a CVD apparatus, the optimum rotation speed of the booster pump 1a and the main pump 1b in each operation is as follows.

1) Wafer input: Although the operation of the dry pump 1 is not required, when the dry pump 1 is completely stopped, it takes time to start, so that the operation is performed by, for example, reducing the output by about 20%, and the tool is used to stop the tool 200. Vacuum exhaust.

2) Vacuum extraction: The dry pump 1 is operated with 100% output.

3) Temperature rise: If the vacuum is maintained, the dry pump 1 is operated, for example, at 70% output.

4) Film formation: Since the material gas is supplied, the dry pump 1 is operated at 100% output.

5) Cooling down: Since the inflow of gas stops, the operation of the output can be reduced a little, so the dry pump 1 operates, for example, at 70% of the output.

6) Responding to atmospheric pressure: N ₂ is allowed to flow into the tool 200 so that it does not oxidize. Although the operation of the dry pump 1 is not required, it is possible to operate in a state where the output is reduced for the same reason as 1).

7) Take out the wafer: same as 1).

Further, since the tool 200 is not supplied with gas in the vacuum pumping process, the dry pump 1 inputs the operation of vacuum drawing from the tool 200 to the entire control panel 4, and inputs information indicating that there is no supply gas type and the supply gas flow rate is zero. And, when the gas is supplied to the tool 200, the worker 200 pairs of the entire control panel 4 are input with information on the operation, the type of gas supplied, and the flow rate of the supplied gas. In the process of supplying the gas to the tool 200, the overall control panel 4 automatically controls the rotational speeds of the booster pump 1a and the main pump 1b of the dry pump 1 in accordance with the type of the supplied gas and the flow rate of the supplied gas. Thereby, the booster pump 1a and the main pump 1b can be operated with the most appropriate exhaust capability with respect to the type of the supply gas of the tool 200 and the supply gas flow rate. Therefore, the power consumption of the dry pump 1 can be reduced to save energy.

In the abatement unit 2, mass flow controllers MFC1 and MFC2 are provided in the pipes of the fuel and the combustion-supporting gas, respectively, and the supply amount of the fuel and the combustion-supporting gas to the combustion unit 20 can be automatically adjusted. In addition, the shutoff valves V11 and V12 are provided in the piping of the fuel and the combustion-supporting gas, and the supply of the fuel and the combustion-supporting gas to the combustion unit 20 can be blocked in the manufacturing process in which the exhaust gas treatment is not required. Further, the N ₂ pipe is provided with a mass flow controller MFC4 and a shutoff valve V14.

The overall control panel 4 pre-memorizes the supply amount of the fuel and the combustion-supporting gas in response to the operation of the manufacturing apparatus, the type of the supplied gas, and the supply gas flow, and the feed-forward and PID (proportional-integral-derivative) control The combination automatically controls the mass flow controllers MFC1, MFC2. That is, by the overall control panel 4, the amount of gas supplied to the tool, the flow rate of the gas supplied to the tool 200, and the flow rate of N ₂ supplied to the dry pump are automatically calculated, and the fuel and the combustion-supporting gas are automatically calculated. The supply amount is automatically adjusted by the mass flow controllers MFC1 and MFC2 to supply the fuel and the combustion-supporting gas. Further, in the process of manufacturing the manufacturing apparatus that does not require the gas discharge, the shutoff valves V11 and V12 are operated to block the supply of fuel. Thereby, it is possible to reduce the amount of electric power used in the abatement unit 2 and reduce the supply amount of the fuel and the combustion-supporting gas to achieve energy saving. Further, the information from the tool 200 may be input to individually control the controller of the abatement unit 2 to control the abatement portion instead of the overall control panel 4.

When the connection pump of the dry pump 1, the abatement unit 2, the tool 200, and the dry pump detects that a predetermined amount of powder has adhered, the tool 200 is generated from the machines of the dry vacuum pump 100 with the function of the detoxification function. The signal output of the message attached to the powder is used as a maintenance requirement. This output can also be performed from a controller for individually controlling each of the dry vacuum pumps 100 with the abatement function, or from the entire control panel 4. The powder adhesion detection of the dry vacuum pump 100 with the detoxification function is detected by pressure (vacuum pump discharge pressure, etc.), vacuum pump load factor (electric power, etc.), gas discharge time from the manufacturing apparatus, and the like.

The maintenance signal can be transmitted to the host computer (the computer that is connected to a plurality of semiconductor manufacturing apparatuses and managed by the plurality of semiconductor manufacturing apparatuses) in addition to the output of the tool 200. It can also be exchanged and maintained by receiving the transmitted maintenance signal.

Fig. 3 is a vertical sectional view of the spiral pump 10 as an example of the main pump 1b (a view seen from the side). In addition, FIG. 4 is a horizontal cross-sectional view of the screw pump 10 (a view seen from above). Figures 3 and 4 show a helical pump 10 that is placed transversely.

The screw pump 10 includes an intake side casing 111, a cover 112, an exhaust side casing 113, and a horse provided on the outer side of the exhaust side casing 113. The portion 12 and the pump portion 13 disposed in the cover 112. An intake port 11a and an exhaust port 11b are formed in the cover 112. The intake port 11a is connected to the booster pump 1a through the pipe 8 of Fig. 1, and the exhaust port 1b is directly connected to the abatement part 2 through the flow path 3. The positions of the intake port 11a and the exhaust port 11b can be various.

As shown in Fig. 1, when the booster pump 1a is disposed above the main pump 1b, the screw pump 10 provided with the intake port 11a on the upper surface of the cover 112 is used (Fig. 3(a), (b) ))). On the other hand, when the booster pump 1a is disposed below the main pump 1b, the screw pump 10 provided with the intake port 11a on the lower surface of the cover 112 (Fig. 3 (c), (d)) can. Similarly, the exhaust port 11b may be located on the upper surface of the cover 112 (Fig. 3 (a), (c)), or may be located on the lower surface (Fig. 3 (b), (d)), or may be located side.

As shown in Fig. 4, the motor unit 12 includes a motor frame 120, stator windings 121a and 121b composed of a stator core and windings, and motor rotors 122a and 122b. The rotating main shafts 131a and 131b supported by the bearings 113a and 114b and the bearings 113b and 114b are respectively assembled to the motor rotor 122a and the motor rotor 122b. The main shafts 131a and 131b are suspended from the motor unit 12, and the motor rotors 122a and 122b are inserted/bonded (assembled) to the overhanging main shaft front end.

The pump unit 13 has a main shaft 131a and a spiral rotor 132a, and a main shaft 131b and a spiral rotor 132b. The main shaft 131a is fixed with a spiral rotor 132a, and these members can also be formed (processed) into one body. The same applies to the main shaft 131b and the spiral rotor 132b. The main shafts 131a and 131b are made of, for example, metal, and the motor rotors 122a and 122b are assembled on one end side and on the other end side. The bearings 114a, 114b fixed to the suction side casing 111 and the bearings 113a, 113b fixed to the exhaust side casing 113 are respectively supported to be rotatable.

The main shafts 131a and 131b are synchronously reversed and exhausted while maintaining a constant clearance by the timing gears 14a and 14b provided on the intake side. The timing gears 14a and 14b may be provided on either the intake side or the exhaust side.

The connection of the screw pump 10 and the combustion unit 20 described above will be specifically described.

Fig. 5 is a schematic view showing a first example of connection between the screw pump 10 and the combustion unit 20. Fig. 5(a) is a view seen from above, and Fig. 5(b) is a view seen from the side. Figure 5 shows a transversely placed screw pump 10. As shown in Fig. 5, the side surface of the screw pump 10 is provided with an exhaust port 11b. Further, one end of the flow path 3 extending in the horizontal direction is connected to the exhaust port 11b, and the other end is connected to the discharge gas nozzle 23c of the combustion portion 20.

By connecting in this way, the flow path 3 can be shortened as much as possible. Therefore, even if the heater is not provided, the temperature of the exhaust gas flowing through the flow path 3 does not decrease, and the concentration of the exhaust gas does not have to be diluted. Further, since the screw pump 10 is directly coupled to the combustion portion 20, there is almost no leakage.

Fig. 6 is a schematic view showing a second connection example of the screw pump 10 and the combustion portion 20, and shows a view seen from the side. As shown in Fig. 6, the upper surface of the screw pump 10 is provided with an exhaust port 11b. Further, the flow path 3 has an L shape having a vertical portion 3a and a horizontal portion 3b. The lower end of the vertical portion 3a is connected to the exhaust port 11b, and one end of the horizontal portion 3b is connected to The exhaust gas nozzle 23c of the combustion unit 20.

By thus connecting, the height portion of the screw pump 10 can secure a part of the height of the combustion portion 20. Thereby, the processing capacity of the combustion unit 20 can be increased. Alternatively, even in the case where the amount of the exhaust gas to be treated is increased to make the combustion portion 20 long, the combustion portion 20 can be connected without changing the height of the screw pump 10. In this way, the height of the entire dry vacuum pump 100 with the detoxification function can be reduced.

Fig. 7 is a schematic view showing a third connection example of the screw pump 10 and the combustion portion 20, and shows a view seen from the side. As shown in Fig. 7, the lower surface of the screw pump 10 is provided with an exhaust port 11b. Further, the flow path 3 has an L shape having a vertical portion 3a and a horizontal portion 3b. The upper end of the vertical portion 3a is connected to the exhaust port 11b, and one end of the horizontal portion 3b is connected to the discharge gas nozzle 23c of the combustion portion 20. The processing capacity of the burning portion 20 may not be too large, and may be connected in such a manner.

Fig. 8 is a schematic view showing a fourth connection example of the screw pump 10 and the combustion portion 20, and shows a view seen from the side. Figure 8 shows a longitudinally placed screw pump 10. As shown in Fig. 8, the side surface of the screw pump 10 is provided with an exhaust port 11b. One end of the flow path 3 extending in the horizontal direction is connected to the exhaust port 11b, and the other end is connected to the discharge gas nozzle 23c of the combustion portion 20. By connecting in this way, the flow path 3 can be shortened as much as possible.

Fig. 9 is a view showing a fifth connection example of the screw pump 10 and the combustion portion 20, and showing a view seen from the side, as shown in Fig. 9, the upper surface of the screw pump 10 is provided with an exhaust port. 11b. Further, the flow path 3 has an L shape having a vertical portion 3a and a horizontal portion 3b. Vertical part The lower end of 3a is connected to the exhaust port 11b, and one end of the horizontal portion 3b is connected to the exhaust gas nozzle 23c of the combustion portion 20. By connecting in this way, a part of the height of the combustion portion 20 can be secured. Alternatively, even in the case where the amount of the exhaust gas to be treated is increased to make the combustion portion 20 long, the combustion portion 20 can be connected without changing the height of the screw pump 10. In this way, the height of the entire dry vacuum pump 100 with the detoxification function can be reduced.

Next, a case where a Rogowski pump is used as the main pump 1b will be described.

Fig. 10 is a vertical sectional view of the Rohde pump 40 of another example of the main pump 1b (a view seen from the side). Fig. 11 is a horizontal sectional view of the Rouer pump 40 (a view seen from above). Fig. 12 is a cross-sectional view taken along line B-B of Fig. 11. Although the three-leaf Rouge pump is exemplified below, it may be a Roche pump of three or four leaves or more.

The Rouer pump 40 includes a cover 41, a motor portion 42 provided on one end side of the cover 41, and a pump portion 43 provided in the cover 41. The cover 41 is formed with an intake port 41a and an exhaust port 41b that communicates with the intermediate chamber 410. The intake port 41a is connected to the booster pump 1a through the pipe 8 of Fig. 1, and the exhaust port 41b is directly connected to the abatement part 2 through the flow path 3. The positions of the intake port 41a and the exhaust port 41b can be various.

As shown in Fig. 1, when the booster pump 1a is disposed above the main pump 1b, the Rouer pump 40 provided with the intake port 41a on the upper surface of the cover 41 is used (Fig. 10(a), (b) ))). On the other hand, when the booster pump 1a is disposed below the main pump 1b, the Rouge pump 40 provided with the intake port 41a on the lower surface of the cover 41 (Fig. 10(c), (d)) can. Similarly, the exhaust port 41b may be located on the upper surface of the cover 41 (Fig. 10(a), (c)). It can also be located on the lower surface (Fig. 10(b), (d)) or on the side.

Further, in the case of the Rouer pump 40 shown in FIGS. 10(a) and 10(c), the exhaust gas is exhausted through the adapter 41c for exhaust gas.

As shown in Fig. 11, the motor portion 42 includes a motor frame 420, stator windings 421a and 421b composed of a stator core and windings, and motor rotors 422a and 422b. The motor rotors 422a, 422b extend toward the pump portion 43, and are rotatably supported by bearings 413a, 413b, 414a, and 414b. The motor rotors 422a and 422b are synchronously rotated in the opposite directions (synchronously reversed) by timing gears 423a and 423b provided on the opposite side of the motor unit 42.

The pump unit 43 has a main shaft 431a and Lüss rotors 4321a to 4325a, and a main shaft 431b and Lüss rotors 4321b to 4325b. Motor rotors 422a and 422b are assembled to the main shafts 431a and 431b, respectively. By synchronous inversion of the motor rotors 422a, 422b, the Royce rotors 4321a to 4325a, 4321b to 4325b are synchronously reversed, and the exhaust gas from the suction port 41a is compressed by the Roughner rotors 4321a to 4325a, 4321b to 4325b. The ones are sequentially transported, and are exhausted from the exhaust port 41b through the intermediate chamber 410.

Further, when both the intake port 41a and the exhaust port 41b are located on the upper surface or the lower surface of the cover 41 (Fig. 10 (a), (c)), the intermediate chamber 410 is an essential member, and one of them is When the person is on the upper surface and the other is on the lower surface (Fig. 10(b), (d)), the intermediate chamber 410 is an unnecessary member.

The connection of the Roche pump 40 and the combustion unit 20 described above will be specifically described.

Figure 13 is a view showing a first connection example of the Rox pump 40 and the combustion portion 20. Fig. 13(a) is a view seen from above, and Fig. 13(b) is a view seen from the side. Figure 13 shows the transverse Ros pump 40. As shown in Fig. 13, the side surface of the Rouer pump 40 is provided with an exhaust port 41b. One end of the flow path 3 extending in the horizontal direction is connected to the exhaust port 41b, and the other end is connected to the discharge gas nozzle 23c of the combustion portion 20. By connecting in this way, the flow path 3 can be shortened as much as possible as in the fifth drawing.

Fig. 14 is a view showing a second connection example of the Rox pump 40 and the combustion portion 20, and shows a view seen from the side. As shown in Fig. 14, the upper surface of the Rouer pump 40 is provided with an exhaust port 41b. Further, the flow path 3 has an L shape having a vertical portion 3a and a horizontal portion 3b. The lower end of the vertical portion 3a is connected to the exhaust port 41b, and one end of the horizontal portion 3b is connected to the discharge gas nozzle 23c of the combustion portion 20. By thus connecting, the height portion of the Roul pump 40 can secure a part of the height of the combustion portion 20.

Fig. 15 is a view showing a third example of connection between the Rox pump 40 and the combustion portion 20, and shows a view seen from the side. As shown in Fig. 15, the lower surface of the Rouer pump 40 is provided with an exhaust port 41b. Further, the flow path 3 has an L shape having a vertical portion 3a and a horizontal portion 3b. The upper end of the vertical portion 3a is connected to the exhaust port 41b, and one end of the horizontal portion 3b is connected to the discharge gas nozzle 23c of the combustion portion 20. The processing capacity of the burning portion 20 may not be too large, and may be connected in such a manner.

Fig. 16 is a view showing a fourth example of connection between the Rox pump 40 and the combustion portion 20, and shows a view seen from the side. Figure 16 shows a longitudinal Ros pump 40. As shown in Fig. 16, the side surface of the Rouer pump 40 is provided with an exhaust port 41b. One end of the flow path 3 extending in the horizontal direction and the exhaust port 41b The other end is connected to the discharge gas nozzle 23c of the combustion portion 20. By connecting in this way, the flow path 3 can be shortened as much as possible.

As described above, in the present embodiment, the main pump 1b and the abatement unit 2 are directly connected to each other through the flow path 3 to be modularized. Therefore, the exchange maintenance can be easily performed. Moreover, there is almost no risk of leakage of exhaust gas.

Furthermore, the distance between the main pump 1b and the abatement part 2 can be shortened. Therefore, even if the heater 97 shown in Fig. 20 is not provided, it is possible to suppress a decrease in the temperature of the exhaust gas, and it is not necessary to introduce nitrogen gas for reducing the concentration of the exhaust gas, and the total amount of the gas treated by the abatement unit 2 can be reduced. The abatement unit 2 is miniaturized.

Further, Fig. 1 shows an example in which the booster pump 1a of the dry pump 1 is connected to the main pump 1b so as to be detachable. On the other hand, as shown in Fig. 17, the booster pump 1a and the main pump 1b may be integrally formed. In this case, the booster pump 1a is also housed in the upper frame 5b. Further, the booster pump 1a is connected to the tool 200 to be detachable.

Further, when the amount of the exhaust gas from the tool 200 is not large, as shown in Fig. 18, the dry pump 1 may include only the main pump 1b. In this case, the tool 200 is coupled to the main pump 1b to be detachable.

Further, as shown in Fig. 19, two or more combustion portions 20a and 20b may be provided in the package 101, and one of the combustion portions 20a and 20b may be connected to the main pump 1b by the switching mechanism 6. Specifically, the switching mechanism 6 has two three-way valves 6a, 6b connected in series between the combustion portions 20a, 20b. By appropriately opening and closing the three-way valves 6a and 6b, it is possible to connect the combustion units 20a and 20b to the main pump 1b through the flow path 3, and it is also possible to It is sufficient to connect one of the combustion portions 20a, 20b to the bypass.

Since the abatement unit 2 has two or more combustion units, even if the process performed by the tool 200 is executed and the combustion unit fails, the combustion unit can be immediately switched to another combustion unit, and the detoxification function can be continued. Prevent wafer loss from processing in the tool. It is also possible to perform manual switching, and it is also possible to automatically detect and switch the situation in which the combustion unit in use is malfunctioning.

The above embodiments are described for the purpose of carrying out the invention by those of ordinary skill in the art to which the invention pertains. For the sake of this, it is a matter of course that the various modifications of the various embodiments described above can be made, and the technical idea of the present invention can be applied to other embodiments. Therefore, the present invention is not limited to the embodiments described, but should be construed as the maximum range according to the technical idea defined by the scope of the claims.

1‧‧‧ dry pump

1a, BP‧‧‧ booster pump

1b, MP‧‧‧ main pump

2‧‧‧Demolition Department

3‧‧‧Flow path

4‧‧‧ overall control panel

5a‧‧‧lower frame

5b‧‧‧Upper frame

8‧‧‧Pipe

20‧‧‧ Burning Department

25‧‧‧ slots

26‧‧‧ Washing tower

100‧‧‧Dry vacuum pump with decontamination function

101‧‧‧Package

200‧‧‧ tools

INV‧‧‧ reverser

Claims (9)

A dry vacuum pump with a decontamination function, comprising: a dry pump for evacuating exhaust gas from a tool; and a detoxification portion for detoxifying the exhaust gas evacuated by the dry pump; and a flow path; The dry pump and the abatement part are directly connected to each other so as not to be detachable. The dry vacuum pump according to claim 1, wherein the dry pump is provided with an exhaust port on a side surface of the dry pump, and the abatement part has a combustion portion for burning the exhaust gas, And a nozzle for introducing the exhaust gas into the combustion unit, wherein the flow path extends in a horizontal direction, one end is connected to an exhaust port of the dry pump, and the other end is connected to a nozzle of the abatement part. The dry vacuum pump according to claim 1, wherein the dry pump is provided with an exhaust port on an upper surface of the dry pump, and the abatement part has a combustion portion that burns the exhaust gas. And a nozzle for introducing the exhaust gas into the combustion portion, wherein the flow path has an L-shape of a vertical portion and a horizontal portion, and a lower end of the vertical portion is connected to an exhaust port of the dry pump, and one end of the horizontal portion is The nozzle connection of the abatement part. A dry vacuum pump with a detoxification function as described in claim 1 of the patent application, wherein The dry pump is provided with an exhaust port on a lower surface of the dry pump, and the abatement part has a combustion unit that burns the exhaust gas and a nozzle that introduces the exhaust gas into the combustion unit, and the flow path has a vertical portion. And an L shape of the horizontal portion, an upper end of the vertical portion is connected to an exhaust port of the dry pump, and one end of the horizontal portion is connected to a nozzle of the abatement portion. The dry vacuum pump according to any one of claims 2 to 4, wherein the combustion portion is cylindrical, and the nozzle is provided on a side surface of the combustion portion along the combustion portion. The aforementioned exhaust gas is introduced in the tangential direction. The dry vacuum pump with a detoxification function according to any one of claims 1 to 5, wherein the dry pump is a spiral pump or a Rouge pump. The dry vacuum pump with a detoxification function according to any one of claims 1 to 6, wherein the dry pump and the abatement part are movable modules, and can be exchanged and maintained. The dry vacuum pump according to any one of claims 1 to 7, wherein the dry pump has: a first pump connected to the tool; and the first pump is detachable The second pump is connected to the ground and connected to the abatement part by the flow path to be undetachable. The dry vacuum pump with a detoxification function according to any one of claims 1 to 8, wherein the abatement part has two or more combustion parts that burn the exhaust gas; and the two A switching mechanism in which any one of the above combustion units is connected to the dry pump.