TW201742667A - Solvent mixer - Google Patents

Abstract

The present application provides a solvent mixer comprising a storage tank, multiple liquid inlets for feeding different liquids into the storage tank, a primary flow deflecting ring located under the storage tank, and a secondary taper ring located under the primary flow deflecting ring, wherein the storage tank has an opening at lower terminal, the primary flow deflecting ring has an inlet at upper terminal and multiple taper holes at lower terminal, and the opening docks with the inlet; the secondary taper ring docks with the primary flow deflecting ring and has a liquid outlet at lower terminal. The solvent mixer is able to mix liquids rapidly and effectively. A control module can be combined with the solvent mixture to achieve precise formulation and auto-control. The solvent mixer is low cost, space-efficient and simply operated, and has excellent practicability.

Description

Solvent mixer

This invention relates to semiconductor fabrication techniques, and more particularly to a solvent mixer.

In semiconductor manufacturing technology, it is often necessary to mix and use a large amount of different solvent ratios. For example, in the epitaxial technology, the ruthenium is placed inside the quartz cavity for epitaxial growth, and the epitaxial film is deposited not only on the surface of the ruthenium but also on the inner wall of the quartz cavity, thus requiring quartz The chamber and other components are cleaned, and the cleaning solution is prepared and mixed in proportion. The mixing method is generally agitation or self-loop. Usually, when cleaning, the parts to be cleaned are placed in advance in the cleaning tank, and the external container, that is, the pre-mixing tank, is pre-mixed and mixed with the cleaning liquid, and then the mixed cleaning liquid in the pre-mixing tank is introduced into the cleaning tank. Wash it. In the premixing tank, the impeller is usually driven by a motor to stir or a self-loop pump is used to mix different solvents.

1 is a schematic view of a conventional method in which a motor is driven by an impeller to perform solvent mixing, wherein a plurality of different liquid inlets are respectively introduced into a premixing tank, and the impeller is stirred by a stirring motor to mix the premixed liquid. After that, it is pumped into the cleaning tank to clean the internal parts.

2 is a schematic diagram of a solvent mixing using a self-looping pump in the prior art, in which a plurality of different liquid inlets are respectively introduced into a plurality of different proportioning liquids to a premixing tank, and the valve 2 is opened by closing the valve 1 to start the pump recirculation. Mix the mixture, after mixing evenly, open the valve 1 to close the valve 2 and send the cleaning solution to the cleaning Slots to clean internal parts.

However, the use of a motor to drive the impeller or use a self-loop pump to mix is expensive, and when the demand for the cleaning fluid is large, a large volume of premixing tank is required, or a premixing of a smaller volume is required. The ratio is mixed and mixed in the tank. The former increases the cost and takes up a large space, and the latter is cumbersome to operate. Therefore, it is necessary to improve the existing solvent mixing method to avoid the above problems.

In view of the above-mentioned shortcomings of the prior art, it is an object of the present invention to provide a solvent mixer for solving the problems of high cost and complicated operation in solvent mixing in the prior art.

To achieve the above and other related objects, the present invention provides a solvent mixer comprising: a liquid storage tank; a plurality of liquid inlets for introducing a plurality of liquids into the liquid storage tank; and a primary guide located below the liquid storage tank a flow ring; a secondary tapered ring located below the primary flow coil; wherein the lower end of the liquid storage tank is provided with an opening, an upper end of the primary flow guiding ring is provided with an inlet, and the inlet and the inlet The lower end of the primary air guiding ring is provided with a plurality of tapered holes; the upper end of the secondary tapered ring is in abutment with the primary air guiding ring, and the lower end of the secondary tapered ring is provided with a liquid outlet .

Preferably, the primary air guiding ring is annular, and the inlet is one or more, and is disposed at one side of the upper end of the primary air guiding ring, and the tapered hole is a large upper and lower cone. Formed and dispersedly disposed at a lower end of the primary flow guiding ring.

Preferably, the upper end of the tapered hole is inclined toward the center of the primary choke so that the center line of the tapered hole is inclined by less than 90 degrees with the plane of the primary choke.

Preferably, the secondary tapered ring has a conical shape that is upper and lower.

Preferably, the multi-channel inlet port comprises a first inlet port and a second inlet port; the second inlet port is disposed centrally in the middle of the reservoir and the nozzle extends into the reservoir. The first liquid inlet is disposed around the second liquid inlet and the nozzle is higher than the nozzle of the second liquid inlet.

Preferably, the plurality of liquid inlets are respectively provided with flow solenoid valves for respectively controlling the liquid flow rate of the plurality of inlet ports.

Preferably, a liquid storage tank solenoid valve is disposed at the lower end of the liquid storage tank.

Preferably, the liquid storage tank is provided with a liquid level sensor for detecting the liquid level in the liquid storage tank.

Preferably, the solvent mixer further includes a control module, and the control module is connected to the liquid level sensor, the flow solenoid valve and the liquid storage tank solenoid valve, according to the desired mixed liquid The configuration ratio controls the flow rate of the multi-channel inlet through the flow solenoid valve, and controls the opening of the liquid storage tank solenoid valve and the flow solenoid valve according to the liquid level signal sent by the liquid level sensor. shut down.

Further preferably, when the liquid level in the liquid storage tank is lower than a preset working liquid level, the liquid level sensor does not send a signal to the control module, and the control module maintains the storage The liquid tank solenoid valve is closed; when the liquid level in the liquid storage tank reaches a preset working liquid level, the liquid level sensor sends a signal that the liquid level element reaches the working liquid level to the control module, The control module opens the liquid storage tank solenoid valve; when the liquid level in the liquid storage tank reaches a preset warning liquid level, the liquid level sensor sends a liquid level element to the control module to reach the warning The signal of the liquid level, the control module forcibly closes all flow solenoid valves.

Preferably, the material of the liquid storage tank, the primary flow guiding ring and the secondary tapered ring is polytetrafluoroethylene.

As described above, the solvent mixer of the present invention has the following advantageous effects: the solvent mixer of the present invention can realize efficient and rapid mixing of various liquids by sequentially aligning the liquid storage tank, the primary flow guiding ring and the secondary tapered ring. The device has low cost, simple operation and small space occupation. Combined with the control module, it can achieve accurate rationing and automatic control, and has strong practicability.

1‧‧‧ reservoir

2‧‧‧Primary Diversion Ring

3‧‧‧Second tapered ring

401‧‧‧First inlet

402‧‧‧Second inlet

403‧‧‧Flow solenoid valve

101‧‧‧Liquid tank solenoid valve

102‧‧‧ Liquid level sensor

201‧‧‧ Import

202‧‧‧Conical hole

301‧‧‧liquid outlet

FIG. 1 is a schematic view showing the mixing of a solvent in the conventional art in which the motor is driven by an impeller to achieve solvent mixing.

Figure 2 shows a schematic diagram of solvent mixing using a self-loop pump in the prior art.

3 is a schematic view showing the structure of a solvent mixer according to an embodiment of the present invention.

4 is a schematic cross-sectional view showing a primary flow guiding ring according to an embodiment of the present invention.

FIG. 5 shows a schematic diagram of a top surface of a primary air guiding coil according to an embodiment of the present invention.

FIG. 6 shows a schematic diagram of a bottom surface of a primary air guiding coil according to an embodiment of the present invention.

The invention is further described in detail below in conjunction with the drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the description and claims. It should be noted that the drawings are all in a very simplified form, and both use non-precise proportions, and are only for convenience and clarity to assist the purpose of the embodiments of the present invention.

Referring to FIG. 3, the embodiment provides a solvent mixer, comprising: a liquid storage tank 1; a plurality of liquid inlets for introducing a plurality of liquids into the liquid storage tank 1; and the liquid storage tank 1 is located below the liquid storage tank 1 a primary choke 2; a secondary tapered ring 3 located below the primary choke 2; wherein the lower end of the reservoir 1 is provided with an opening, and the upper end of the primary choke 2 is provided with an inlet 201, the inlet 201 is docked with the opening, and the liquid in the liquid storage tank 1 is introduced into the primary flow guiding ring 2. The lower end of the primary air guiding ring 2 is provided with a plurality of tapered holes 202. The liquid in the primary flow guide 2 flows out through the tapered bore 202; the upper end of the secondary tapered ring 3 interfaces with the primary flow guide 2 such that liquid passing through the tapered bore 202 flows into the In the secondary tapered ring 3, the lower end of the secondary tapered ring 3 is provided with a liquid outlet 301.

The primary choke 2 is preferably annular in shape, and the inlet 201 is one or more. In this embodiment, a plurality of the inlets are disposed on one side of the upper end of the primary choke 2 . The tapered hole 202 has a taper shape that is large and small, and is dispersedly disposed at a lower end of the primary flow guide ring 2. As a preferred embodiment of the present invention, the upper end of the tapered hole 202 is inclined toward the center of the primary flow coil 2 such that the center line of the tapered hole 202 is smaller than the plane of the primary flow guide 2 90 degree inclination.

4 is a schematic cross-sectional view of the primary flow guiding ring provided in the embodiment, wherein a plurality of different liquids arranged in the liquid storage tank 1 , that is, a pre-mixed liquid, enters into the primary air guiding ring 2 through a plurality of inlets 201 , and then The premix is then sprinkled through the dispersed tapered holes 202 and mixed by rotation. 5 and FIG. 6 are respectively a schematic view of the top surface and the bottom surface of the primary flow guiding ring, wherein the top surface is provided with a plurality of inlets 201 on one side of the annular flow guiding ring, and the bottom surface is visible in an inwardly inclined circularly dispersed arrangement. Tapered hole 202. Through the special design of this primary choke, the premix can be fully dispersed and mixed.

The secondary tapered ring 3 is preferably conical in shape that is large and small. The small shape of the upper mouth and the large opening can enlarge the contact area of the premixed liquid, and the premixed liquid which is rotated and broken by the primary flow guiding ring After thorough mixing, the premixed liquid can be directly sent through the liquid outlet 301 to a place to be used, such as a washing tank, after being mixed a plurality of times.

As a preferred embodiment of the present invention, the multi-channel inlet port may include a first liquid inlet port 401 and a second liquid inlet port 402 as shown in FIG. 3, and the second liquid inlet port 402 may be collectively disposed in the liquid storage port. a middle portion of the tank 1 and a nozzle extending into the liquid storage tank 1. The first liquid inlet 401 is disposed around the second liquid inlet 402 and the nozzle is higher than the second liquid inlet 402. The mouth of the pipe.

Wherein, the first liquid inlet 401 can be used to introduce a large flow of liquid, and the second liquid inlet 402 can be used to introduce a liquid of a conventional flow rate, and the inlet can be selected according to actual conditions, for example, in the chemical liquid to be mixed. In the case where a large amount is required, it can be introduced through a large flow inlet, and a small amount is required to be introduced from a conventional inlet. By setting multiple inlets in different flow ranges, the ratioing time can be shortened and the ratio efficiency can be improved.

In addition, the plurality of liquid inlet ports are preferably provided with a flow solenoid valve 403 for controlling the liquid flow rate of the multiple inlet ports. Through the flow solenoid valve 403, the liquid flow rate can be accurately controlled, and the multiple groups can be used together to achieve the precise ratio of the mixed liquid, the precision is high, and the ratio operation is simple.

As a preferred embodiment of the present invention, a liquid storage tank solenoid valve 101 is provided at the lower end opening of the liquid storage tank 1 of the present embodiment, and the liquid flow rate through the opening can be controlled. When the liquid storage tank solenoid valve 101 is opened, the liquid in the liquid storage tank 1 flows into the primary flow guiding ring 2 through the opening, and when the liquid storage tank solenoid valve 101 is completely closed, The liquid in the liquid storage tank 1 cannot flow out through the opening, so that the liquid storage tank 1 can be effectively stored to form an effective pressure.

As a preferred embodiment of the present invention, the liquid storage tank 1 of the present embodiment is further provided with a liquid level sensor 102 for detecting the liquid level in the liquid storage tank 1.

As a preferred embodiment of the present invention, the solvent mixer of the present embodiment further includes a control module for realizing automatic control of liquid mixing. The control module is connected to the liquid level sensor 102, the flow solenoid valve 403, and the liquid storage tank solenoid valve 101, and can be set according to a configuration ratio of a desired mixed liquid, through which the flow rate is set. The solenoid valve 403 controls the flow rate of the multi-channel inlet port to achieve an accurate ratio; and can control the reservoir solenoid valve 101 and the flow solenoid valve according to the liquid level signal sent by the liquid level sensor 102 403 is turned on and off.

Wherein, when the switch of the liquid storage tank solenoid valve 101 and the flow rate electromagnetic valve 403 is controlled according to the liquid level signal sent by the liquid level sensor 102, the control module can realize three-level control: Level 1 , when the liquid level in the liquid storage tank 1 is lower than a preset working liquid level, the liquid level sensor 102 does not send a signal to the control module, and the control module maintains the storage The liquid tank solenoid valve 101 is closed to allow the liquid storage tank 1 to perform effective liquid storage; and in the second stage, when the liquid level in the liquid storage tank 1 reaches a preset working liquid level, the liquid level sensor 102 Transmitting, to the control module, a signal that the liquid level element reaches the working liquid level, the control module opens the liquid storage tank solenoid valve 101, so that the liquid sequentially enters the primary flow guiding ring 2 and the secondary tapered ring 3, achieving effective mixing; the third stage, when the liquid level reaches the preset warning level in the liquid storage, the liquid level sensor 102 sends the liquid level element to the control module to reach the warning liquid The signal of the bit, the control module forcibly closes all flow solenoid valves 403 to prevent the liquid level from overflowing the reservoir 1.

Further, the liquid storage tank 1, the primary flow guide 2, the secondary tapered ring 3, and the like may be made of a polytetrafluoroethylene acid-resistant material.

In summary, the solvent mixer of the present invention can realize efficient and rapid mixing of various liquids through the liquid storage tank, the primary flow guiding ring and the secondary tapered ring which are sequentially butted, the device cost is low, the operation is simple, and the space is small. . Combined with the control module to achieve accurate ratio and automatic control, there is very Strong practicality. Therefore, the present invention effectively overcomes various shortcomings in the prior art and has high industrial utilization value.

The above description of the specific embodiments is intended to be illustrative of the invention, and is not intended to limit the invention. It will be understood by those skilled in the art that various changes or modifications may be made to the present invention without departing from the scope of the appended claims.

1‧‧‧ reservoir

2‧‧‧Primary Diversion Ring

3‧‧‧Second tapered ring

401‧‧‧First inlet

402‧‧‧Second inlet

403‧‧‧Flow solenoid valve

101‧‧‧Liquid tank solenoid valve

102‧‧‧ Liquid level sensor

201‧‧‧ Import

202‧‧‧Conical hole

301‧‧‧liquid outlet

Claims (11)

A solvent mixer, comprising: a liquid storage tank; a plurality of liquid inlets for introducing a plurality of liquids into the liquid storage tank; a primary flow guiding coil located below the liquid storage tank; a secondary tapered ring under the flow ring; wherein the lower end of the liquid storage tank is provided with an opening, an upper end of the primary flow guiding ring is provided with an inlet, and the inlet is docked with the opening, the primary diversion The lower end of the ring is provided with a plurality of tapered holes; the upper end of the secondary tapered ring is abutted with the primary flow guiding ring, and the lower end of the secondary tapered ring is provided with a liquid outlet. The solvent mixer according to claim 1, wherein the primary flow guiding ring is annular, and the inlet is one or more, and one of the upper ends of the primary current guiding coil is disposed at a concentration. On the side, the tapered hole is a taper that is large and small, and is disposed at a lower end of the primary choke. The solvent mixer of claim 2, wherein an upper end of the tapered hole is inclined toward a center of the primary choke to make a center line of the tapered hole and the primary flow guide The plane of the circle is inclined by less than 90 degrees. The solvent mixer of claim 1, wherein the secondary tapered ring has a conical shape that is upper and lower. The solvent mixer of claim 1, wherein the multi-channel inlet port comprises a first inlet port and a second inlet port; and the second inlet port is centrally disposed in the reservoir. In the slot And the nozzle extends into the liquid storage tank; the first liquid inlet is disposed around the second liquid inlet and the nozzle is higher than the nozzle of the second liquid inlet. The solvent mixer of claim 1, wherein the plurality of inlet ports are provided with flow solenoid valves for respectively controlling the flow rate of the plurality of inlet ports. The solvent mixer according to claim 1, wherein a liquid storage tank solenoid valve is disposed at an opening of the lower end of the liquid storage tank. The solvent mixer according to claim 1, wherein the liquid storage tank is provided with a liquid level sensor for detecting the liquid level in the liquid storage tank. The solvent mixer according to claim 1, wherein the plurality of liquid inlets are respectively provided with a flow solenoid valve for respectively controlling a liquid flow rate of the plurality of inlet ports; a liquid storage tank solenoid valve is disposed at the lower end opening; the liquid storage tank is provided with a liquid level sensor for detecting the liquid level in the liquid storage tank; the solvent mixer further includes a control module, the control module and the The liquid level sensing, the flow solenoid valve and the liquid storage tank solenoid valve are connected, and the flow rate of the multi-way inlet port is controlled by the flow rate solenoid valve according to the arrangement ratio of the required mixed liquid, and according to the liquid The level signal sent by the bit sensor controls the opening and closing of the reservoir solenoid valve and the flow solenoid valve. The solvent mixer of claim 9, wherein the liquid level sensor does not move to the control mode when the liquid level in the liquid storage tank is lower than a preset working liquid level. The group sends a signal, the control module keeps the liquid storage tank solenoid valve closed; when the liquid level in the liquid storage tank reaches a preset working liquid level, the liquid level sensor is to the control module Sending a signal that the liquid level element reaches the working liquid level, the control module opens the liquid storage tank solenoid valve; when the liquid level in the liquid storage tank reaches a preset warning liquid level, the liquid level sensing Transmitting to the control module The liquid supply unit reaches a signal of the warning liquid level, and the control module forcibly closes all flow solenoid valves. The solvent mixer according to claim 1, wherein the material of the liquid storage tank, the primary flow guiding ring and the secondary tapered ring is polytetrafluoroethylene.