TW201739592A - Device for controlling the thickness of a ceramic substrate and a preparation method thereof to adjust the thickness of the ceramic substrate by changing the height of the movable track unit - Google Patents

Abstract

The present invention provides a device for controlling the thickness of a ceramic substrate and a method for preparing the same. The device includes a scraper forming coater substrate; a movable track unit disposed on the scraper forming coater substrate and having a track for supporting a scraper; a top baffle, combined with the movable track unit to form a receiving space; a release film, set in the bottom of the receiving space. In the invention, the ceramic slurry is injected into the receiving space, the ceramic slurry exceeding the height of the track is scraped by a scraper. After the ceramic slurry is solidified, the movable track unit and the release film are removed, and a heat treatment is performed to obtain a ceramic substrate. In this way, the thickness of the ceramic substrate can be adjusted by changing the height of the movable track unit.

Description

Device for regulating thickness of ceramic substrate and preparation method thereof

The invention relates to a device for forming a doctor blade and a preparation method thereof, in particular to an apparatus for regulating the thickness of a ceramic substrate and a preparation method thereof.

There are many types of blade forming designs. From the international patent search, it is known that Japanese Patent No. 05347950 discloses a protruding blade to create a ceramic substrate with grooves for producing a long green ceramic substrate. Japanese Patent No. 10,224,824 has a gate type. The blade forming machine is used for cutting the green mold to facilitate subsequent processing, and the Korean Patent No. 867510B1 discloses a doctor blade platform with an upper and lower amplitude rotor, which can conveniently control the thickness of the green embryo; In terms of flatness, for example, Japanese Patent No. 2002205303 discloses the installation of a low-frequency vibration device under the blade forming platform for completely mixing the ceramic slurry and reducing the risk of failure of the coating. Japanese Patent No. 2000334714 is issued as a rotary stirring device. Before scraping the blade, it is used to remove bubbles and reduce the agglomeration of the ceramic slurry, so that the ceramic green embryo structure is complete. Japanese Patent No. 2003181814 discloses a double-layer scraper structure design, which reduces the phenomenon of agglomeration of the ceramic slurry during the first blade forming. The second layer of scraper is to scrape the ceramic slurry onto the platform.

The currently used doctor blade forming system is mainly made up of 1.0 mm or less, and is continuously produced by using a release film winding system. Although the production rate can be increased, it is impossible to prepare a product larger than 1.0 mm because of the need for rapid drying to remove the solvent.

Therefore, in the case of a ceramic thick substrate having a product end requirement of more than 1.0 mm, the following two methods are mainly used: (1) After the doctor blade forming process, the substrate is laminated by cold pressing or hot pressing. However, the lamination molding method wastes cost and time and reduces the strength and characteristics of the thick film substrate. (2) In the blade forming process, the thickness is finely adjusted by an adjustable moving blade. For example, Japanese Patent No. 1159204 adds a film thickness detecting device to the blade forming machine, and compensates for the lifting height of the blade to make a film. The thickness is driven to the same level, and Chinese Patent No. 203863801 can adjust the film thickness of aluminum nitride by adjusting the trimming nut on the doctor blade holder. However, when the film thickness is more than 1.0 mm, the film thickness cannot be effectively controlled and formed, and a thin surface is generated at the edge, and the film thickness distribution at the center to the edge is uneven, which causes difficulty in controlling subsequent sintering conditions and flattening process. .

In addition, the existing blade forming system is generally used for high viscosity and high solid content slurry, but if the thickness of the raw embryo is more than 1.0 mm, the thickness and uniformity tend to be inconsistent when flowing down from the slurry box, because the slurry is The cohesive force is less than the action of gravity, and the flow is extended to the periphery, so that the thickness of the edge is thin, thereby affecting the flatness of the green embryo. The traditional solution is to use a slicer to cut the thinner side of the edge, but it will cause material waste and process cost. question.

In order to solve the above problems, the present invention develops an apparatus for regulating the thickness of a ceramic substrate and a preparation method thereof, which can be directly used for producing a thick film ceramic substrate, and thereby solves the problem of inconsistent thickness of the green embryo. Since the thickness distribution of the green plate is relatively uniform, it is not easy to produce defects in the subsequent process to prepare a thick-film ceramic substrate having a uniform thickness.

In view of the above-mentioned shortcomings of the prior art, the present invention develops a preparation method for regulating the thickness of a ceramic substrate, and can be directly used for producing a thick film ceramic substrate by a movable track unit, and regulates the thickness of the green substrate and improves the leveling thereof. degree.

In order to achieve the above object, according to the solution of the present invention, an apparatus for regulating the thickness of a ceramic substrate is provided, comprising: a blade forming coater substrate; and a movable track unit disposed on the blade forming coater substrate, The utility model has a track for carrying a scraper; a top baffle for combining with the movable track unit to form an accommodating space; and a release film disposed at the bottom of the accommodating space. The design of the movable track unit can include two movable tracks, which can change the movable track with different height depending on the thickness of the ceramic raw embryo.

In the above, the accommodating space may be used to accommodate the ceramic slurry, and the release film may be a PET film, and the squeegee may be selected from one of an adjustable single-slice slit type blade and an adjustable feed slit type blade; In addition, the movable track unit can Make up for the lack of cohesive force of the ceramic slurry to prevent the flow of gravity of the ceramic slurry, prevent the slurry from flowing out of the blade boundary, and effectively improve the thickness and flatness of the ceramic green.

The preparation method of the invention comprises the following steps: (A) providing a movable track unit and a release film, which are disposed on a blade forming coater substrate having a top end plate, and the movable track unit and the top end block are used. Forming an accommodating space, wherein the release film is located at the bottom of the accommodating space; (B) injecting a ceramic slurry into the accommodating space, so that the ceramic slurry height exceeds the track in the movable track unit (C) providing a scraper to utilize the track of the movable track unit to scrape the ceramic slurry exceeding the track height of the movable track unit; (D) after the ceramic slurry is solidified, the movable track is removed The unit and the release film are subjected to a heat treatment to obtain a ceramic substrate, wherein the movable track is formed according to a thickness of the ceramic substrate to change the height of the movable track.

The above summary and the following detailed description and drawings are intended to further illustrate the manner, means and effects of the present invention in achieving its intended purpose. Other purposes and advantages of this creation will be explained in the following description and drawings.

1‧‧‧Active track unit

2‧‧‧Ceramic slurry

3‧‧‧ release film

4‧‧‧Scraper forming coater substrate

5‧‧‧ top baffle

6‧‧‧Scraper

S101-S104‧‧‧Steps

The first figure is a schematic diagram of a device for regulating the thickness of a ceramic substrate according to the present invention; the second figure is a schematic cross-sectional view of a device for regulating the thickness of a ceramic substrate; The third figure is a flow chart of a preparation method for regulating the thickness of a ceramic substrate according to the present invention.

The embodiments of the present invention are described by way of specific examples, and those skilled in the art can readily understand the advantages and effects of the present invention from the disclosure of the present disclosure.

In the conventional doctor blade forming machine, when a thick-film ceramic substrate larger than 1 mm is produced, since the slurry is easily spread to the boundary of the blade, the thickness of the edge is thin, which tends to cause inconsistency in thickness and uniformity. The invention develops a device for regulating the thickness of a ceramic substrate and a preparation method thereof, the ceramic powder is mixed with a solvent, a plasticizer and the like to prepare a ceramic slurry, and then the slurry solution is placed in the device to prepare a ceramic green germ substrate; The invention can be directly used for producing a thick film substrate without an additional process, and can thereby solve the problem of inconsistent thickness of the raw embryo.

Please refer to the first figure and the second figure, which are schematic diagrams of a device for regulating the thickness of a ceramic substrate and a cross-sectional view thereof. As shown in the figure, a track movable blade forming technology and device comprises a movable track unit 1, a release film 3, a blade forming coater substrate 4, a top baffle 5, and a scraper 6, wherein the movable track The unit 1 is two long rails, which can be replaced with different heights according to the thickness requirements of the ceramic green embryo; in addition, the movable rail unit 1 has a groove (track) for carrying the scraper so that the scraper can be placed in the groove (track) to facilitate the horizontal shift of the scraper; wherein the release film 3 mainly uses PET film as the forming bottom The purpose of the film is that after the ceramic slurry 2 is solidified, the principle of difficulty in bonding between the release film 3 and the ceramic (green) slurry 2 is utilized, thereby facilitating the accelerated removal of the green embryo separately after the subsequent processing; the scraper 6 can be It is an adjustable single-piece slit type scraper, an adjustable feed slit type scraper, a wire bar type scraper or other types of scrapers.

Please refer to the third figure, which is a flow chart of a method for preparing a thickness of a ceramic substrate according to the present invention. As shown in the figure, the present invention provides a method for preparing a thickness of a ceramic substrate, the steps comprising: (A) providing a movable track unit 1, a release film 3, and a blade forming coating having a top end plate 5. The movable track unit 1 and the top end baffle 5 form an accommodating space, wherein the release film 3 is located at the bottom of the accommodating space S101; (B) injecting a ceramic slurry 2 In the accommodating space, the height of the ceramic slurry 2 exceeds the track height S102 in the movable track unit 1; (C) provides a scraper 6 using the track of the movable track unit 1 to scrape off the movable type The ceramic slurry S103 of the track height of the track unit 1; (D) after the ceramic slurry 2 is solidified, the movable track unit 1 and the release film 3 are removed, and a heat treatment is performed to obtain a ceramic substrate S104; Wherein, the movable track changes the height of the movable track according to the film thickness of the ceramic substrate.

In the ceramic substrate formed in this embodiment, aluminum nitride is taken as an example. In the step (A) of the embodiment, the release film 3 is completely spread on the blade forming coater substrate 4, and is kept flat; The rail unit 1 and the top baffle plate 5 are placed on the release film 3 to form an accommodating space of the aluminum nitride slurry. The accommodating space can be open or closed according to requirements, and the open capacity is adopted. Blanking In the meantime, the length of the green coating can be increased to facilitate the automated production process; wherein the movable track unit 1 is placed on the left and right sides of the substrate 4 of the blade forming coater according to the film forming width required by the different aluminum nitride ceramic slurry 2 The movable rails on the left and right sides can be replaced with different heights to change the forming thickness of the aluminum nitride ceramic slurry 2; and in the step (B) of the embodiment, an aluminum nitride ceramic slurry 2 is injected into the volume. The height of the aluminum nitride ceramic slurry 2 is higher than the height of the movable track unit 1 in the space; in addition, in the step (C), the aluminum nitride ceramic slurry 2 is scraped horizontally by the scraper 6 in this embodiment. Applying to the release film 3 while scraping the aluminum nitride ceramic slurry 2 exceeding the height of the movable track unit 1 so that the aluminum nitride ceramic slurry 2 and the movable track unit 1 are in the same height to form nitrogen. The aluminum thick film green embryo, wherein the scraping method can be manually or automatically controlled; and in the step (D), the embodiment is to remove the movable rail unit 1 and the release film 3 after the aluminum nitride ceramic slurry 2 is solidified. And carry out a heat treatment. The heat treatment process includes de-esterification and sintering, and the de-esterification system places the aluminum nitride ceramic green germ substrate in a de-esterification furnace, and is heated from room temperature to 500 to 600 ° C or higher, and is taken out after aging for 1 to 2 hours. Aluminum deesterification raw embryo; sintering system delaminates the aluminum nitride deproteinized raw embryos in a high temperature furnace, the sintering temperature is above 1700 ° C, and after taking a few hours of cooling, the cooling is taken out to obtain a high density, uniform film thickness and thickness greater than 1mm aluminum nitride ceramic thick film substrate.

The above-described embodiments are merely illustrative of the features and functions of the present invention and are not intended to limit the scope of the technical content of the present invention. Any person skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the creation. Therefore, the scope of protection of this creation should be as The scope of the patent application described later is listed.

1‧‧‧Active track unit

2‧‧‧Ceramic slurry

3‧‧‧ release film

4‧‧‧Scraper forming coater substrate

5‧‧‧ top baffle

6‧‧‧Scraper

Claims (10)

An apparatus for regulating the thickness of a ceramic substrate comprises: a blade forming coater substrate; a movable track unit disposed on the blade forming coater substrate, having a track for carrying a scraper; a top stop The plate is configured to be combined with the movable track unit to form an accommodating space; and a release film is disposed at the bottom of the accommodating space. An apparatus for regulating the thickness of a ceramic substrate according to claim 1, wherein the accommodating space is for accommodating a ceramic slurry. An apparatus for regulating the thickness of a ceramic substrate according to claim 1, wherein the release film is a PET film. An apparatus for regulating the thickness of a ceramic substrate according to claim 1, wherein the movable track unit comprises two movable tracks. An apparatus for regulating the thickness of a ceramic substrate according to the second aspect of the invention, wherein the movable track is formed according to a film thickness of the ceramic slurry to change the height of the movable track. A method for preparing a thickness of a ceramic substrate, comprising the steps of: (A) providing a movable track unit and a release film disposed on a substrate of a blade forming coater having a top end plate, using the movable track unit and The top baffle forms an accommodating space, wherein the release film system Located at the bottom of the accommodating space; (B) injecting a ceramic slurry into the accommodating space such that the ceramic slurry height exceeds the track height in the movable track unit; (C) providing a scraper to utilize the movable track a track of the unit to scrape the ceramic slurry exceeding the track height of the movable track unit; (D) after the ceramic slurry is solidified, the movable track unit and the release film are removed, and a heat treatment is performed to Obtaining a ceramic substrate; wherein the movable track is formed according to a thickness of the ceramic substrate to change the height of the movable track. A method for preparing a thickness of a control ceramic substrate according to claim 6, wherein the release film is a PET film. A method for preparing a thickness of a control ceramic substrate according to claim 6, wherein the movable track unit comprises two movable tracks. A method for preparing a thickness of a control ceramic substrate according to claim 6, wherein the doctor blade is selected from the group consisting of an adjustable single-slice slit type blade and an adjustable feed slit type blade. The method for preparing a thickness of a control ceramic substrate according to claim 6, wherein the accommodating space is an open space.