TW201731337A - Fluid heater device - Google Patents

Abstract

The present invention provides a fluid heater device for heating fluid by electrifying and heating a fluid distribution pipe through which the fluid flows, capable of improving the circuit power factor and increasing the apparatus efficiency. A fluid heater device (100) is provided to heat fluid by electrifying and heating a flow channel formation member (2) made of conductive material and defined therein a flow channel R through which fluid to be heated flows. The fluid heater device (100) includes: a first power supply member (3) connected with one end (2a) of the flow channel of the flow channel formation member (2); and a second power supply member (4) connected with the other end (2b) of the flow channel of the flow channel formation member (2). The second power supply member (4) is arranged toward said one end (2a) of the flow channel along the flow channel direction of the flow channel formation member (2).

Description

Fluid heating device

The present invention relates to a fluid heating device.

As shown in Patent Document 1, there is provided a fluid heating device that electrically heats a hollow conductor tube to heat a fluid flowing inside the conductor tube to generate a heating fluid. In the fluid heating device described above, an alternating current is applied to the side wall of the conductor tube by applying an alternating voltage from electrodes provided at both end portions of the conductor tube, and the conductor tube generates heat by itself using Joule heat generated by the internal resistance of the conductor tube. The fluid flowing in the conductor tube is heated by the self-heating of the conductor tube described above.

However, in an apparatus in which an AC voltage is applied to both end portions of the conductor tube, there is a problem in that the voltage is lowered due to the inductance of the conductor tube, and the power factor of the circuit for applying an AC voltage to the conductor tube is lowered.

Patent Document 1: Japanese Patent Laid-Open Publication No. 2011-86443.

In order to completely solve the above problems, the main intended subject of the present invention is to improve the circuit power factor and improve the efficiency of the device in a fluid heating device that electrically energizes the flow path forming member having fluid flow therein.

In other words, the present invention provides a fluid heating device that heats a flow path forming member having a flow path through which a heated fluid flows and which is made of a conductive material, and heats the flow in the flow path. Heating the fluid, the fluid heating device is characterized in that an alternating voltage is applied between the first power supply member and the second power supply member, and the first power supply member is connected to one end of the flow path of the flow path forming member, Two power supply members are connected to the other end of the flow path of the flow path forming member, and the second supply The electric member is disposed toward one end of the flow path along the flow path direction of the flow path forming member.

According to this configuration, since the current flowing in the flow path forming member and the current flowing in the second power supply member are opposite to each other, the magnetic fluxes generated by the respective currents cancel each other, so that the reactance generated in the flow path forming member can be reduced. And improve the circuit power factor. Therefore, the equipment efficiency of the fluid heating device can be improved.

In order to utilize the magnetic flux generated by the current of the second power supply member to sufficiently exert the effect of canceling the magnetic flux generated by the current of the flow path forming member, it is preferable that the first power supply member and the second power supply member are One end of the flow path of the flow path forming member is led to the power supply side. Therefore, since the first power supply member and the second power supply member are taken out from one end of the flow path of the flow path forming member, the magnetic flux generated by the current flowing in the first power supply member or the flow path in the second power supply member can be prevented. The magnetic flux generated by the current flowing in the portion other than the portion in which the member is formed prevents the canceling effect of the magnetic flux. Further, after the second power supply member is disposed from the other end of the flow path of the flow path forming member to one end of the flow path, it is directly taken out from only one end of the flow path, so that the device structure can be simplified.

As a specific embodiment of the flow path forming member, it is preferable that the flow path forming member has a straight tube shape. Thereby, the structure of the flow path forming member can be simplified. Further, the second power feeding member can be easily disposed in the flow path direction of the flow path forming member, so that the structure of the second power feeding member can also be simplified.

Preferably, a connecting portion for connecting to the other flow path forming member is provided at both end portions of the flow path forming member. Thus, by connecting a plurality of flow path forming members, a fluid heating device having a desired length of flow path can be constructed.

As a specific embodiment of the first power supply member and the second power supply member, it is preferable that the first power supply member includes a first electrode and a first electric wire, and the first electrode is disposed in a flow path of the flow path forming member One end, the first electric wire is connected to the first electrode for applying an alternating voltage to the first electrode, the second power supply member includes a second electrode and a second electric wire, and the second electrode is disposed at The other end of the flow path of the flow path forming member is connected to the second electrode for applying an alternating voltage to the second electrode.

Preferably, in the second power feeding member, the second electrode is disposed toward one end of the flow path along a flow path direction of the flow path forming member. Thereby, by directly connecting the second electric wire to the second electrode, it is possible to make the current flowing in the flow path forming member and the current flowing in the second power supply member face opposite, so that the circuit connection work can be easily performed.

Preferably, in the second power feeding member, the second electric wire is disposed toward one end of the flow path along a flow path direction of the flow path forming member. Thus, since the second electric wire can be made to follow the structure of the flow path forming member, the structure of the second electrode can be simplified.

Preferably, an insulating heat insulating member is provided on an outer circumference of the flow path forming member, the second electric wire has a bare electric wire, and the bare electric wire is in contact with the insulating heat insulating member, and is formed along the flow path The flow path direction of the piece is arranged toward one end of the flow path. Thereby, even if the flow path forming member is heated by electric conduction and the temperature rises, heat radiation from the flow path forming member to the outside can be reduced. Further, since the second electric wire has a bare electric wire disposed in contact with the insulating heat insulating member, the second electric wire can be cooled and the reactance can be lowered.

Preferably, the fluid heating device is provided with n sets of fluid heating units, and the n sets of fluid heating units are connected by a flow path of two flow path forming members and are disposed on the two flow path forming members. a power supply member is located inside, connecting the two flow path forming members, wherein n is an integer of 1 or more, and power supply outputs of the same polarity are applied to the two first power supply members of the fluid heating units. The two second power supply members of the respective fluid heating units apply a power supply output that is different from the polarity applied to the first power supply member and that is the same or different from each other. Thus, by selecting the number of fluid heating units to be connected, a fluid heating device having a desired length of flow path can be constructed. In addition, by using the fluid heating unit, the Scott wiring transformer can be connected to each fluid heating unit, and the Scott wiring transformer will be a three-phase alternating current from a single-phase AC power source, a three-phase AC power source, or a three-phase AC power source. Convert to two single-phase exchanges.

In order to individually control the temperature of the two flow path forming members constituting the above fluid heating unit Preferably, a current control circuit is provided on the circuit that inputs the power output to the two second power supply members constituting the fluid heating unit.

Preferably, the fluid heating device comprises n sets of fluid heating units, the n sets of fluid heating units being connected by a flow path of three flow path forming members and providing a first power supply provided on the three flow path forming members The member and the second power supply member are connected to the three flow path forming members in such a manner that the n is an integer of 1 or more, and the first flow path forming member and the second member constituting each of the fluid heating units In the flow path forming member and the third flow path forming member, the first phase of the three-phase alternating current power source is connected to the first power supply member and the second flow path forming member of the first flow path forming member a second power supply member, a second phase of the three-phase AC power source connected to the first power supply member of the second flow path forming member and a second power supply member of the third flow path forming member, Three phases are connected to the first power supply member of the third flow path forming member and the second power supply member of the first flow path forming member. Thus, by selecting the number of fluid heating units to be connected, a fluid heating device having a desired length of flow path can be constructed. Further, by using the fluid heating unit, the three-phase AC power source can be directly connected to each fluid heating unit.

Preferably, a fluid heating device is provided which electrically heats a flow path forming member having a flow path through which a heated fluid flows and which is formed of a conductive material to heat the flow in the flow path. Heating the fluid, the fluid heating device having 3n+1 power supply members connected to different positions along the flow path direction on the flow path forming member, wherein n is an integer of 1 or more, The 3n+1 power supply members alternately connect the U phase, the V phase, and the W phase of the three-phase AC power supply in such a manner that the polarities of the three-phase AC power sources connected to the three power supply members arranged in series are different. Thus, since the U-phase, the V-phase, and the W-phase of the three-phase AC power source are connected in such a manner that the polarities of the three-phase AC power sources connected to the three power supply members that are continuously arranged are different, the flow path forming member is The magnetic fluxes generated by the flowing current cancel each other, which can reduce the impedance generated in the flow path forming member and improve the circuit power factor. Therefore, the equipment efficiency of the fluid heating device can be improved.

Further, the present invention provides a fluid heating apparatus that heats a flow path forming member having a flow path through which a heated fluid flows and which is made of a conductive material, and heats the flow in the flow path. Heating the fluid, the fluid heating device is characterized in that an alternating voltage is applied between the first power supply member and the second power supply member, and the first power supply member is connected to one end of the flow path of the flow path forming member, Two power supply members are connected to the other end of the flow path of the flow path forming member, and the second power supply member has a cover covering the other end of the flow path from the flow path forming member to the outside of one end of the flow path The other end of the flow path of the cover member is electrically connected to the flow path forming member in a substantially entire circumferential direction of the circumferential surface.

According to this configuration, since the current flowing in the flow path forming member and the current flowing in the second power supply member, particularly in the cover member, are opposite to each other, the magnetic fluxes generated by the respective currents cancel each other, and the flow can be reduced. The reactance generated in the track formation improves the circuit power factor. Therefore, the equipment efficiency of the fluid heating device can be improved. Further, since the entire circumferential direction from the other end of the flow path of the flow path forming member to the outer circumferential surface of one end of the flow path is covered by the cover member, the cover member also functions as a heat insulating member, and therefore, The temperature of the heated fluid flowing inside the flow path forming member and the flow path forming member is prevented from being lowered.

In order to eject the heated fluid from the flow path forming member in a state of higher temperature, it is preferable that the flow path forming member is closer to the flow path than the connecting portion connected to the cover member. A fluid discharge port is provided at one end. Therefore, since it can be directly ejected from the fluid ejection port provided on the flow path forming member, it can be directly directly without lowering the temperature of the heated fluid after heating inside the flow path forming member ejection.

Preferably, the fluid ejection port is provided on an outer circumferential surface of the flow path forming member. Since the fluid discharge port is provided on the outer peripheral surface of the flow path forming member, the heated fluid can be ejected toward the outer circumferential direction of the flow path forming member. Therefore, the heated fluid can be directly ejected to the inner peripheral surface of a deep hole having a bottom or a deep hole penetrating, and the inner peripheral surface of the deep hole or the deep hole can be effectively surface-modified. Sex. Here, the shape of the opening of the deep hole or the deep hole to be processed is not limited to a specific opening shape, and may be a circle, an ellipse, a polygon, or the like. Further, when the maximum size of the opening shape is d, and the depth dimension of the deep hole or the length dimension of the deep hole is L, the deep hole or the deep hole satisfies the relationship of d < L. Further, if the fluid discharge port is provided along the circumferential direction of the flow path forming member, the heated fluid can be further efficiently ejected toward the outer circumferential direction of the flow path forming member. As a manner in which the fluid ejection port is disposed in the circumferential direction, for example, one of the fluid ejection ports may extend in the circumferential direction of the flow path forming member, or a plurality of the fluid ejection ports may be along the flow. The circumferential formation of the track forming members.

Preferably, the flow path forming member is made of a conductive material having a resistance higher than that of the cover member. Thus, since the flow path forming member can be further efficiently heated during energization heating, the heated fluid can be effectively brought into a high temperature state.

Preferably, the cover member is composed of copper or brass. Thereby, by forming the cover member from copper or brass having a small electric resistance, it is possible to prevent the cover member from being heated by energization, so that the flow path forming member can be efficiently heated.

Preferably, the flow path forming member and the cover member are respectively in a straight tube shape, and the flow path forming member and the cover member are electrically connected by soldering. Thereby, the structure of the flow path forming member can be simplified. Further, the cover member can be easily disposed in the flow path direction of the flow path forming member, so that the structure of the cover member can also be simplified.

Preferably, an insulating member is provided between the flow path forming member and the cover member. Thereby, the flow path forming member and the cover member can be reliably insulated, so that short-circuiting at a portion other than the connection portion can be prevented.

Preferably, the fluid heating device is provided with an insulating member made of a ceramic material, the insulating member covering an outer peripheral surface from one end of the flow path forming member to the other end of the flow path, from the flow The cover member is formed by winding a metal foil to the outer peripheral surface of the other end of the flow path to the outer peripheral surface of the insulating member than the insulating member, thereby forming the cover. Thus, since it can be composed of a thin metal foil The cover member allows the entire fluid heating device to be of a smaller size. Further, since the insulating member is made of a ceramic material having flame resistance, insulation properties can be ensured even under high temperature conditions such as generation of high-temperature superheated steam.

Preferably, the fluid heating device is provided with an outer insulating member made of a ceramic material, and the outer insulating member covers substantially the entire circumferential direction of the outer peripheral surface of the covering member. With this configuration, it is possible to prevent electric leakage from the cover to the outside even when the object to be placed in which the fluid heating device is provided is made of a conductive member or when it is made conductive by the heated fluid to be ejected. Further, since the insulating member is made of a ceramic material having heat resistance, insulation properties can be ensured even under high temperature conditions such as generation of high-temperature superheated water vapor.

Preferably, the heated fluid flowing into the flow path forming member is saturated water vapor or superheated water vapor, and the fluid flowing out from the flow path forming member is superheated water vapor.

Further, the present invention provides a fluid heating apparatus that applies an alternating voltage to a conductor tube having a fluid flow therein to be electrically heated to heat a fluid flowing in the conductor tube, the fluid heating apparatus characterized by 2N The conductor tubes are disposed in parallel with each other, and the N is an integer of 1 or more, and one end portions of the 2N conductor tubes are electrically connected to each other, and the other end portions of the 2N conductor tubes are connected to the other end portions adjacent to each other. The single-phase AC power supply has a different polarity and alternately connects the U-phase and the V-phase of the single-phase AC power supply.

According to this configuration, since the currents flowing in the mutually adjacent conductor tubes face in opposite directions, the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the conductor tubes can be lowered and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device can be improved.

Preferably, the fluid heating device has a shunt tube having electrical conductivity, the shunt tube being connected to one end of the 2N conductor tube and shunting the fluid to the 2N conductor tube, The 2N conductor tubes are electrically connected by the shunt tube. Thus, by flowing the fluid from the branch pipe to the 2N conductor tubes, the number of fluid inflow ports can be less than 2N, so that the structure of the pipes can be made simple. Chemical. Further, since the shunt tube has electrical conductivity, the piping structure can be simplified and electrically connected. In particular, in order to simplify the structure of the piping, it is preferable to connect a single shunt having 2N branches to one end portion of the 2N conductor tubes.

Further, the present invention provides a fluid heating apparatus that applies an alternating voltage to a conductor tube having a fluid flow therein to be electrically heated to heat a fluid flowing in the conductor tube, the fluid heating apparatus characterized by 3N The conductor tubes are disposed in parallel with each other, the N is an integer of 1 or more, one end portions of the 3N conductor tubes are electrically connected to each other, and the other end portion of the 3N conductor tubes is arranged in three consecutive ends The U-phase, V-phase, and W-phase of the three-phase AC power supply are alternately connected in a manner in which the polarity of the three-phase AC power source connected is different.

According to this configuration, since the U-phase, the V-phase, and the W-phase of the three-phase AC power supply are connected in a manner different from the polarities of the three-phase AC power sources connected to the three other end portions arranged in series, three consecutively arranged The magnetic fluxes generated by the current flowing in the conductor tubes cancel each other out, which can reduce the impedance generated in the conductor tubes and improve the circuit power factor. Therefore, the equipment efficiency of the fluid heating device can be improved.

Preferably, the fluid heating device has a shunt tube having electrical conductivity, the shunt tube being connected to one end of the 3N conductor tube and shunting the fluid to the 3N conductor tube, The 3N conductor tube is electrically connected by the shunt tube. Thus, by flowing the fluid from the branch pipe to the 3N conductor tubes, the number of fluid inflow ports can be made less than 3N, so that the structure of the pipes can be simplified. Further, since the shunt tube has electrical conductivity, the piping structure can be simplified and electrically connected. In particular, in order to simplify the structure of the pipe, it is preferable to connect a single branch pipe having a branching of 3N to one end portion of the 3N conductor pipe.

Generally, the fluid heated by one heat source is concentratedly discharged from one portion, but is mostly dispersed and discharged in the case of using the heated fluid. Further, the temperature may be maintained or further heated so that the temperature of the heated fluid does not decrease. Therefore, it is preferable that the other end portion of the conductor tube is closed, and a plurality of fluid ejection ports are formed in the middle of the conductor tube, and the fluid is ejected from the fluid ejection port.

Further, it is preferable that the conductor tube is inserted into a storage chamber or a processing chamber, and the storage chamber is a storage chamber for accommodating a storage container for the heated fluid, and the processing chamber is for heating A processing chamber for processing a processing container or the like of the workpiece. Thereby, the heated fluid can be stored or heated in the storage chamber. In addition, the processed object can be processed in the processing chamber. In this case, it is preferable that the single-phase AC power source or the three-phase AC power source connected to the conductor tube is provided in a space different from the storage chamber or the processing chamber. In the present invention, since the conductor tube functions as a superheated steam generating portion, the conductor tube can be inserted into a heat insulating chamber or a processing chamber, and can be connected to a single-phase AC power source or a three-phase AC outside the heat insulating chamber or the processing chamber. By supplying power to the power supply, the piping structure can be simplified, the heating efficiency can be improved, and the energy saving can be greatly contributed. In addition, the insulation chamber or the processing chamber can be connected to a space in which a single-phase AC power source or a three-phase AC power source (for example, a power supply room) is connected by wires, which simplifies the overall structure of the fluid heating device and enables single-phase AC power or three-phase AC communication. The power supply is not affected by the heat from the conductive tubes.

Preferably, the electrode connected to the other end portion of the conductor tube has a shape along the outer peripheral surface of the conductor tube. Therefore, when the conductor tube is inserted from the wall of the heat insulating chamber or the processing chamber or the like, the electrode is not hindered when the conductor tube is attached to the wall of the heat insulating chamber or the processing chamber or the like, or when the electrode is taken out.

Preferably, the conductor tube is a circular tube, and the electrode has a partial cylindrical shape. Thereby, the contact area between the fluid and the conductor tube can be made as large as possible to improve the heating efficiency. Further, the electrode has a partial cylindrical shape, and the electrode does not interfere when the conductor tube is attached to the wall of the heat insulating chamber or the processing chamber or the like.

Preferably, one or more fluid nozzles are disposed in the middle of the conductor tube, and the fluid is ejected from the fluid nozzle. Thus, by providing a fluid nozzle on the conductor tube, the heated fluid can be ejected from the fluid nozzle to a predetermined prescribed injection range. Here, the fluid nozzles provided on the conductor tubes are selected depending on the application.

Further, the present invention provides a fluid heating device for electrically heating a flow path forming member having a heated fluid flowing therein and made of a conductive material. a heated fluid flowing in the flow path, the fluid heating device characterized in that the flow path forming member has one or more straight portions forming a linear flow path, and the plurality of straight portions are provided on the straight portion a fluid ejection port, the plurality of fluid ejection ports ejecting a fluid flowing in the flow channel, and the linear portion is connected to a plurality of electrodes along a flow channel direction of the flow channel to be adjacent to each other The U-phase and V-phase of the single-phase AC power supply are alternately connected in such a manner that the polarity of the single-phase AC power source connected to the electrodes is different.

According to this configuration, since the phases of the currents flowing between the electrodes adjacent to each other are opposite to each other, the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the flow path forming member can be lowered and the circuit power can be improved. Factor. Therefore, the equipment efficiency of the fluid heating device can be improved. Further, since the plurality of fluid ejection ports are provided in the linear portion, the heated fluid to be heated can be directly ejected from the flow path forming member to a predetermined injection range outside.

Preferably, the electrode is connected to each other at a position where the straight portion is equally divided in the flow path direction 2n, and n is an integer of 1 or more. Thereby, the magnetic flux generated between the electrodes is substantially equal, and the magnetic flux generated between the electrodes can be effectively canceled.

Further, the present invention provides a fluid heating apparatus that heats a flow path in which a flow path is formed by a conductive material to form a flow path in which a heated fluid flows, and heats the flow in the flow path. The fluid heating device is characterized in that the flow path forming member has: 2n straight portions arranged to be substantially parallel to each other to form a linear flow path; and 2n-1 folded portions connected to each other The end portion of the straight portion forms a bent one flow channel, and the fluid forming member is provided with a plurality of fluid ejection ports, wherein n is an integer of 1 or more, and the plurality of fluid ejection ports are ejected in the chamber a fluid flowing in the flow channel, in which both ends of the bent flow path are connected to the electrode, and at least one of the 2n-1 folded portions is connected to the electrode, The plurality of electrodes are connected such that the straight portions forming the flow paths between the electrodes adjacent to each other in the flow path direction are an even number, and the single-phase AC power source connected to the electrodes adjacent to each other along the flow path direction Polarity The U and V phases of the single-phase AC power supply are alternately connected in different ways.

According to this configuration, since the currents flowing in the straight portions adjacent to each other face in opposite directions, the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the flow path forming member can be reduced and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device can be improved. Further, since the plurality of fluid ejection ports are provided in the linear portion, the heated fluid to be heated can be directly ejected from the flow path forming member to a predetermined injection range outside.

Preferably, the electrodes connected to the folded portion are connected such that the straight portions forming the flow paths between the electrodes adjacent to each other in the flow path direction are two.

Thereby, each of the straight portions between the electrodes adjacent to each other in the flow path direction has two, and the magnetic flux generated by the current flowing in each of the straight portions can be reliably canceled. Thereby, the effect of reducing the impedance generated in the flow path forming member can be made more remarkable, so that the improvement effect of the circuit power factor can be improved.

Further, it is preferable that the present invention provides a fluid heating apparatus that heats a flow path forming member having a heated fluid flowing therein and composed of a conductive material to heat the heated flow in the flow path. a fluid, the flow path forming member having one or more straight portions forming a linear flow path, wherein the linear portion is provided with a plurality of fluid ejection ports, and the plurality of fluid ejection ports are ejected in the flow channel a flowing fluid, wherein the plurality of electrodes are connected to the flow path along the flow path of the flow path, and the three-phase AC power sources connected to the three consecutive electrodes are different in polarity, and are alternately connected U phase, V phase and W phase of the phase AC power supply.

According to this configuration, since the U-phase, the V-phase, and the W-phase of the three-phase AC power supply are connected in a manner different in polarity from the three-phase AC power source connected to the three electrodes arranged in series, three electrodes are continuously arranged. The magnetic fluxes generated by the flowing currents cancel each other, which can reduce the impedance generated in the flow path forming member and improve the circuit power factor. Therefore, the equipment efficiency of the fluid heating device can be improved. Further, since the plurality of fluid discharge ports are provided in the straight portion, it is possible to eject to a predetermined predetermined injection range.

Preferably, the electrode is connected to each other at a position where the straight portion is equally divided in the flow path direction 3n, and n is an integer of 1 or more. Thereby, the magnetic flux generated between the electrodes is substantially equal, and the magnetic flux generated between the electrodes can be effectively canceled.

Further, it is preferable that the present invention provides a fluid heating apparatus that heats a flow path forming member having a flow path through which a heated fluid flows and is formed of a conductive material to heat the flow path. a fluid to be heated flowing inside, the flow path forming member having: 3n straight portions arranged to be substantially parallel to each other to form a linear flow path; and 3n-1 folded portions connecting the straight portions adjacent to each other a flow path formed by bending the end portion, wherein n is an integer of 1 or more, and a plurality of fluid ejection ports are disposed on the flow path forming member, and the plurality of fluid ejection ports are ejected in the flow path a fluid flowing in the flow path forming member, wherein both end portions of the bent flow path and the folded portion are respectively connected to an electrode connected to a three-phase alternating current power source, and The three-phase AC power sources connected to the three electrodes continuously arranged in the direction of the flow path are alternately connected to the U phase, the V phase, and the W phase of the three-phase AC power source.

According to this configuration, since the U-phase, the V-phase, and the W-phase of the three-phase AC power supply are connected in a manner different in polarity from the three-phase AC power source connected to the three electrodes arranged in series, three electrodes are continuously arranged. The magnetic fluxes generated by the flowing currents cancel each other, which can reduce the impedance generated in the flow path forming member and improve the circuit power factor. Therefore, the equipment efficiency of the fluid heating device can be improved. Further, since the plurality of fluid ejection ports are provided in the linear portion, the heated fluid to be heated can be directly ejected from the flow path forming member to a predetermined injection range outside.

Preferably, the flow path forming member has a resistance higher than that of copper. As described above, when copper is used for wiring, electrodes, or the like, the flow path forming member can be efficiently heated during energization heating, so that the heated fluid can be effectively brought into a high temperature state.

Preferably, a power control device is provided between each of the electrodes, which is capable of being controlled The power applied to the electrodes is made. Thereby, the temperature of the flow path forming member between each of the electrodes can be individually controlled, so that the heated fluid can be effectively brought into a desired state.

Preferably, a fluid nozzle is mounted on the fluid discharge port. Thus, by providing a fluid nozzle on the fluid discharge port, the fluid nozzle can be used to eject the heated fluid to a predetermined predetermined injection range. Here, the fluid nozzle provided on the fluid ejection port is selected depending on the application.

Preferably, the heated fluid flowing into the flow path forming member is saturated water vapor or superheated water vapor, and the fluid flowing out from the flow path forming member is superheated water vapor.

According to the invention of the above construction, in the fluid heating apparatus which electrically heats the flow path forming member for the internal fluid flow, the circuit power factor can be improved and the efficiency of the apparatus can be improved.

100‧‧‧ Fluid heating device

2‧‧‧Flow forming parts (tubes)

3‧‧‧First power supply unit

4‧‧‧Second power supply components

5‧‧‧Power supply

6‧‧‧Insulating insulation members

7‧‧‧ Current Control Circuit

8‧‧‧Outer insulating members

10‧‧‧ Fluid heating unit

20‧‧‧Conductor tube

21‧‧‧Flange

22‧‧‧Fluid discharge

23‧‧‧Blocked components

24‧‧‧ fluid nozzle

25‧‧‧ Straight line

26‧‧‧Connecting Department

27‧‧‧Departure

28‧‧‧Pipekeeping Department

30‧‧‧Shunt tube

31‧‧‧First electrode

32‧‧‧First wire

40‧‧‧ single phase AC power supply

41‧‧‧second electrode

42‧‧‧second wire

43‧‧‧Cover

50‧‧‧ electrodes

51‧‧‧Scott wiring transformer

60‧‧‧AC power supply

70‧‧‧ electrodes

201‧‧‧ fluid nozzle

421‧‧‧ bare wire

801‧‧‧ left and right side walls

802‧‧‧ left and right side walls

20a‧‧‧End

20b‧‧‧End

20m‧‧ ‧ piping

20x‧‧‧fluid outlet

2a‧‧‧End

2b‧‧‧End

2c‧‧‧ Straight line

2y‧‧‧Departure

2z‧‧‧Departure

3z‧‧‧electrode

43a‧‧‧End

43b‧‧‧End

P1‧‧‧ fluid inlet

P2‧‧‧ fluid outlet

PR‧‧‧Power Room

R‧‧‧ runner

U‧‧‧Alternative connection of single-phase AC power

V‧‧‧Alternative connection of single-phase AC power supply

W‧‧‧Alternative connection of single-phase AC power

Fig. 1 is a view schematically showing a configuration of a fluid heating device according to a first embodiment.

Fig. 2 is a view schematically showing a fluid heating device according to a first embodiment and a conventional fluid heating device.

Fig. 3 is a view schematically showing a configuration of a fluid heating device of a second embodiment.

Fig. 4 is a view schematically showing a configuration of a fluid heating device of a third embodiment.

Fig. 5 is a view schematically showing a configuration of a fluid heating device according to a third embodiment, and a cross-sectional view taken along line A-A.

Fig. 6 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment and a cross-sectional view taken along line B-B.

Fig. 7 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment (connecting a three-phase AC power source).

Fig. 8 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment (connecting a single-phase AC power source).

Fig. 9 is a view schematically showing the configuration of a fluid heating device according to a modified embodiment (connecting a Scott wiring transformer).

Fig. 10 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 11 is a view schematically showing a configuration of a fluid heating device of a fourth embodiment.

Fig. 12 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 13 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 14 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 15 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 16 is a view schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 17 is a plan view, a cross-sectional view taken along line A-A', and a circuit configuration diagram schematically showing a configuration of a fluid heating device according to a fifth embodiment.

Fig. 18 is a plan view, a cross-sectional view taken along line A-A', and a circuit configuration diagram schematically showing a configuration of a fluid heating device according to a sixth embodiment.

Fig. 19 is a plan view, a cross-sectional view taken along line A-A', and a circuit configuration diagram showing a modification of the sixth embodiment.

Fig. 20 is a plan view and a circuit configuration diagram showing a configuration of a fluid heating device according to a seventh embodiment.

Fig. 21 is a plan view and a circuit configuration diagram schematically showing a configuration of a fluid heating device according to an eighth embodiment.

Fig. 22 is a plan view and a circuit configuration diagram showing a modification of the eighth embodiment.

Fig. 23 is a plan view and a circuit configuration diagram schematically showing a configuration of a fluid heating device according to a modified embodiment.

Figure 24 is a schematic view showing the structure of a fluid heating device according to a modified embodiment; View and circuit diagram.

Fig. 25 is a front elevational view schematically showing the configuration of a fluid heating device having a storage container.

Fig. 26 is a cross-sectional view, taken along the line A-A', showing the structure of a fluid heating device having a storage container.

Fig. 27 is a plan view schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 28 is a plan view schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 29 is a plan view, a cross-sectional view taken along line A-A', and a circuit configuration diagram schematically showing a configuration of a fluid heating device according to a modified embodiment.

Fig. 30 is a front elevational view schematically showing a configuration of a fluid heating device of a ninth embodiment.

Fig. 31 is a bottom view schematically showing a configuration of a modification of the ninth embodiment.

Fig. 32 is a front elevational view schematically showing a configuration of a fluid heating device of a tenth embodiment.

Fig. 33 is a bottom view schematically showing a configuration of a modification of the tenth embodiment.

Fig. 34 is a bottom view schematically showing a configuration of a fluid heating device according to an eleventh embodiment.

Fig. 35 is a bottom view schematically showing a configuration of a fluid heating device according to a twelfth embodiment.

Embodiments of the fluid heating apparatus of the present invention will now be described with reference to the accompanying drawings.

1. First embodiment

As shown in Fig. 1, the fluid heating device 100 of the first embodiment is configured to apply an alternating current voltage to a flow path forming member 2 in which a flow path R through which a heated fluid flows is formed, and is directly energized. Using the inside of the flow path forming member 2 The Joule heat generated by the partial resistance heats the flow path forming member 2 to heat the heated fluid flowing in the flow path R.

The flow path forming member 2 of the present embodiment is formed of a substantially cylindrical straight tubular tube. Thereby, the flow path R becomes a linear flow path.

Further, one end portion 2a of the flow path forming member 2 as one end of the flow path is connected to the first power supply member 3, and the other end portion 2b of the flow path forming member 2 as the other end of the flow path and the second power supply member 4 connection. Further, by connecting the output terminal of the single-phase AC power supply 5 to the first power supply member 3 and the second power supply member 4, a single-phase AC voltage is applied to the flow path forming member 2 via the first power supply member 3 and the second power supply member 4. .

The first power supply member 3 includes: a first electrode 31 connected to the flow path end portion 2a of the flow path forming member 2; and a first electric wire 32 connected to the first electrode 31 and an output terminal of the single-phase AC power source 5 connection. Further, the second power supply member 4 includes: a second electrode 41 disposed on the other end portion 2b of the flow path forming member 2; and a second electric wire 42 connected to the second electrode 41 and connected to the single-phase AC power source 5 The other output terminal is connected. The first electrode 31 and the second electrode 41 are wound around the outer peripheral surface of the flow path forming member 2, respectively, and joined by welding or the like.

Then, the first power feeding member 3 and the second power feeding member 4 are taken out from the flow passage end portion 2a of the flow path forming member 2 toward the power source 5 side. Specifically, the first electrode 31 is disposed to extend in a direction perpendicular to the flow path direction, and the second electrode 41 is along the flow path direction of the flow path forming member 2, and is in a straight line along the side peripheral surface of the flow path forming member 2. The shape extends and is disposed from the other end portion 2b of the flow path toward the flow path end portion 2a. The second electrode 41 of the present embodiment is bent at the other end portion 2b of the flow path so as to extend in the same direction as the extending direction of the first electrode 31. Further, the extending direction of the first electrode 31 and the extending direction of the second electrode 41 are not necessarily the same, and may be, for example, a direction different in the circumferential direction at the other end portion 2b of the flow path. Further, in the present embodiment, a space is formed between the outer peripheral surface of the second electrode 41 and the flow path forming member 2, but the outer peripheral surface of the flow path forming member 2 and the second electrode opposed to the outer peripheral surface may be provided. An insulating member is disposed between 41.

Further, since the second power supply member 4 flows from the flow path direction of the flow path forming member 2 The other end portion 2b is disposed toward the flow path end portion 2a, and the first power supply member 3 and the second power supply member 4 are taken out from the flow path end portion 2a of the flow path forming member 2 to the power source 5 side, so that the flow path forming member 2 Only the second power feeding member 4 (specifically, the second electrode 41) is provided in the vicinity of the outer peripheral surface between the first electrode 31 and the second electrode 41.

In the fluid heating device 100 of such a configuration, if a single-phase AC voltage is applied from the single-phase AC power source 5 to the flow path forming member 2 via the first power supply member 3 and the second power supply member 4, in the flow path forming member 2 The direction of the current flowing between the first electrode 31 and the second electrode 41 is opposite to the direction of the current flowing in the second electrode 41 opposed to the outer peripheral surface of the flow path forming member 2. Thereby, the magnetic fluxes generated by the respective currents cancel each other, and the reactance generated in the flow path forming member 2 can be reduced and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device 100 can be improved.

Next, a test showing the power factor of the fluid heating device 100 having such a structure will be described. Further, in the following tests, in order to remarkably show a comparative tendency, a single-phase AC power source having a frequency of 800 Hz was used.

Fig. 2 (1) shows a circuit structure of the present invention in which a material SUS304, an outer diameter of 34 mm, a wall thickness of 1.65 mm, a length of 2,200 mm, a temperature of 20 ° C, and a power supply member are disposed along the tube, in (2) The conventional circuit structure in which the power supply member is not disposed along the tube is used in the same tube as (1).

At this time, as shown in Table 1 below, the power factor is 0.251 in the case of the circuit configuration (1), and the power factor is 0.102 in the case of the circuit configuration (2). Thus, it can be considered that in the case of the circuit configuration (1) of Fig. 2, since the magnetic flux generated in the flow path forming member and the second electrode cancels, the voltage drop is suppressed and the power factor is improved. In addition, in the case of converting to the AC voltage of the commercial frequency of 60 Hz, the power factor of the circuit structure (1) is 0.961, whereas the power factor of the circuit structure (2) is 0.810, which can be seen that a large improvement can be obtained. effect.

[Table 1]

2. Second embodiment

As shown in FIG. 3, the fluid heating device 100 of the second embodiment applies a three-phase AC voltage to the flow path forming member 2 forming the linear flow path R to be directly energized, and is generated by utilizing the internal resistance of the flow path forming member 2. The Joule heat heats the flow path forming member 2 to heat the heated fluid flowing in the flow path R.

The fluid heating device 100 is connected to a flow path forming member 2 to a first power supply member 3 and three second power supply members 4. Specifically, the first power supply member 3 is connected to the flow path end portion 2a of the flow path forming member 2, and the three second power supply members 4 are formed from the flow path end portion 2a of the flow path forming member 2 to the other end portion of the flow path. A manner of approximately three equal divisions between 2b is connected to the flow path forming member 2 at substantially equal intervals.

Here, the number of the second power supply members 4 is not limited to three, and may be, for example, 3n (n is an integer of 1 or more). At n In the case of 2, the 3n second power supply members 4 are connected to the flow path forming member 2 at a position which is equally divided from the flow path end portion 2a of the flow path forming member 2 to the other end portion 2b of the flow path by approximately 3 n. Just fine.

Further, as shown in FIG. 3, the fluid heating device 100 is configured to alternately connect the U of the three-phase AC power source 5 in such a manner that the polarities of the three-phase AC power sources connected to the three power supply members that are continuously arranged are different. Phase, V phase and W phase. Specifically, the first power supply member 3 is connected to the U of the three-phase AC power supply 5, and the three second power supply members 4 are sequentially from the side of the flow passage end portion 2a of the flow path forming member 2: the first second power supply The member 4 is connected to W, the second second power supply member 4 is connected to V, and the third second power supply member 4 is connected to U.

Here, the U phase and the V phase of the three-phase AC power source 5 connected to each power supply member are The order of the W phase is not limited to the one shown in FIG. 3, and the U phase, the V phase, and the W phase may be sequentially connected to the respective power supply members.

Further, as shown in FIG. 3, the second power supply member 4 of the fluid heating device 100 extends along the flow path direction of the flow path forming member 2, and extends linearly along the side peripheral surface of the flow path forming member 2 to one end of the flow path. The vicinity of the power supply member adjacent to the portion 2a side. Further, in the present embodiment, a space is formed between the outer peripheral surface of the second electrode 41 and the flow path forming member 2, but the outer peripheral surface of the flow path forming member 2 and the second electrode opposed to the outer peripheral surface may be provided. An insulating member is disposed between 41.

According to the fluid heating apparatus 100 configured as described above, the U-phase and the V-phase of the three-phase AC power source are connected in such a manner that the polarities of the three-phase AC power source 5 connected to the three consecutive power supply members 4 that are continuously arranged are different. With the W phase, the magnetic flux generated by the current flowing in the flow path forming member 2 and the second power supply member 4 cancels, and the impedance generated in the flow path forming member 2 can be lowered and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device 100 can be improved.

3. Third embodiment

As shown in FIGS. 4 and 5, the flow path forming member 2 of the fluid heating apparatus 100 of the third embodiment has three straight portions 2a to 2c forming a linear flow path, and two folded portions 2Y and 2Z. The straight portions 2a to 2c are connected. Specifically, the lengths of the straight portions 2a to 2c are substantially the same. Further, the folded-back portions 2Y and 2Z are configured as The shape or the U shape is such that the straight portions 2a to 2c are substantially parallel to each other.

Here, as the arrangement structure of the straight portions 2a to 2c, the straight portions 2a to 2c may be substantially parallel to each other, and may be arranged in the same plane at equal intervals as shown in FIG. 4, or as shown in FIG. The three straight portions 2a to 2c are arranged to be located at the vertices of the triangle.

Further, the number of straight portions of the flow path forming member 2 is not limited to three, and may be, for example, 3n (n is an integer of 1 or more). At n In the case of 2, the number of the folded portions is 3n-1, and is disposed at a position where the flow path end portion 2a of the flow path forming member 2 is substantially equally divided between the flow path end portions 2a and the other end portions 2b of the flow path.

The fluid heating device 100 using such a flow path forming member 2 is connected to the flow path forming member 2 with four first power supply members 3. Specifically, the first power feeding member 3 is connected to the flow path end portion 2a, the folded portion 2Y, the folded portion 2Z, and the other end portion 2b of the flow path forming member 2. The first power feeding member 3 connected to the folded portion 2Y and the folded portion 2Z is connected to an intermediate position between the folded portion 2Y and the folded portion 2Z.

Here, the fluid heating device 100 is configured to alternately connect the U-phase and the V-phase of the three-phase AC power source 5 in such a manner that the polarities of the three-phase AC power sources connected to the three first power supply members 3 that are continuously arranged are different. And W phase. Specifically, from the side of the flow passage end portion 2a of the flow path forming member 2, the first second power supply member 4 is connected to W, the second second power supply member 4 is connected to V, and the third The second power supply member 4 is connected to the U. Further, in the present embodiment, a space is formed between the outer peripheral surface of the second electrode 41 and the flow path forming member 2, but the outer peripheral surface of the flow path forming member 2 and the second electrode opposed to the outer peripheral surface may be provided. An insulating member is disposed between 41.

According to the fluid heating apparatus 100 configured as described above, the U-phase and the V-phase of the three-phase AC power source are connected in such a manner that the polarities of the three-phase AC power source 5 connected to the three consecutive power supply members 4 that are continuously arranged are different. Since the magnetic fluxes generated by the currents flowing from the straight portions 2a to 2c cancel each other, the impedance generated in the flow path forming member 2 can be reduced and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device 100 can be improved.

4. Modifications of the first to third embodiments

Further, the present invention is not limited to the first to third embodiments. For example, although in the first to third embodiments, the second electrode is disposed along the flow path direction of the flow path forming member on the second power feeding member, the second electrode may be disposed in the flow path forming member. The other end of the flow path is disposed, and the second electric wire connected to the second electrode is disposed along the flow path direction of the flow path forming member.

Further, as shown in FIG. 6, the insulating heat insulating member 6 may be provided to cover the outer peripheral surface of the flow path forming member 2. Thereby, even if the flow path forming member 2 is electrically heated and the temperature is raised, the heat radiation from the flow path forming member 2 to the outside can be reduced. this At this time, the first power feeding member 3 and the second power feeding member 4 are connected to the flow path forming member 2 at a position outward of the insulating heat insulating member 6 . Further, flanges 21 are formed at both ends of the flow path forming member 2 of Fig. 6, and the flanges 21 are connection portions for connection with the other flow path forming members 2. Further, the first electrode 31 and the second electrode 41 are connected between the insulating heat insulating member 6 and the flange 21.

Further, in FIG. 6, the second electric wire 42 disposed along the flow path direction of the flow path forming member 2 has the bare electric wire 421. Therefore, since the second electric wire 42 disposed in contact with the insulating heat insulating member 6 is the bare electric wire 421, the second electric wire 42 can be cooled and the reactance can be lowered.

Further, as shown in FIGS. 7 to 9, the fluid heating device 100 may be configured by connecting the two flow path forming members 2 by the flange 21 and unitizing them so that the two flow path forming members 2 are The flow path R is continuous, and the first power supply member 3 disposed at the two flow path forming members 2 is located inside. 7 to 9, an example in which the fluid heating device 100 is configured using one fluid heating unit 10 is shown, but a plurality of fluid heating units 10 may be connected to connect their flow passages R to constitute a fluid heating device. 100.

The fluid heating unit 10 of Fig. 7 shows a case where a first power supply output (V phase) of the three-phase AC power supply 5 is applied to the above two first power supply members 3, and three are applied to one of the two second power supply members 4. The second power output (U phase) of the alternating current power source 5, and the third power output (W phase) of the three-phase alternating current power source 5 is applied to the other of the two second power supply members 4.

The fluid heating unit 10 of FIG. 8 shows a case where a power supply output of the single-phase AC power source 5 is applied to the two first power supply members 3, and a single-phase AC power source 5 is applied to both of the two second power supply members 4. Another power output. Further, in the fluid heating unit 10 described above, a current control circuit 7 using, for example, a thyristor is provided on a circuit that inputs a power supply output to the two second power supply members 4.

The fluid heating unit 10 of Fig. 9 shows a case where the above two first power supply members 3 are connected to the o terminal of the Scott wiring transformer 51 and are applied with the same polarity. Output, one of the two second power supply members 4 is connected to the u terminal of the Scott wiring transformer 51 and is applied with the u phase, the other of the two second power supply members 4 and the v terminal of the Scott wiring transformer 51 Connect and apply the v phase.

Further, as shown in FIG. 10, the fluid heating device 100 can be configured by connecting the three flow path forming members 2 by the flange 21 and unitizing them so that the flow paths R of the three flow path forming members 2 are connected. And the first power supply member 3 and the second power supply member 4 disposed in the three flow path forming members 2 face in the same direction. Further, although an example in which the fluid heating device 100 is constituted by one fluid heating unit 10 is shown in FIG. 10, a plurality of fluid heating units 10 may be connected so that their flow passages R communicate to constitute the fluid heating device 100. Further, in Fig. 10, the first flow path forming member, the second flow path forming member, and the third flow path forming member are from the left.

In the fluid heating unit 10 described above, the first power supply member 3 of the first flow path forming member 2 and the second power supply member 4 of the second flow path forming member 2 are connected to the V of the three-phase AC power supply 5, and the second The first power supply member 3 of the flow path forming member 2 and the second power supply member 4 of the third flow path forming member 2 are connected to the W of the three-phase AC power source 5, and the first of the third flow path forming member 2 The power supply member 3 and the second power supply member 4 of the first flow path forming member 2 are connected to the U of the three-phase AC power supply 5. With this configuration, the three-phase AC power supply can be directly connected.

5. Fourth embodiment

As shown in FIG. 11, the fluid heating apparatus 100 of the fourth embodiment has a structure in which an alternating current voltage is applied directly to a flow path forming member 2 in which a flow path R for a heated fluid flows and a conductive material is formed. When the current is supplied, the flow path forming member 2 is heated by the Joule heat generated by the internal resistance of the flow path forming member 2, and the heated fluid flowing in the flow path R is heated.

The flow path forming member 2 of the present embodiment is formed of a substantially cylindrical straight tubular tube made of a conductive material. Thereby, the flow path R becomes a linear flow path.

Further, one end portion 2a of the flow path forming member 2 as one end of the flow path is connected to the first power supply member 3, and the flow path forming member 2 is closer to the flow path than the first power supply member 3. The other end is connected to the second power supply member 4. Further, by connecting the output terminal of the single-phase AC power supply 5 to the first power supply member 3 and the second power supply member 4, a single-phase AC voltage is applied to the flow path forming member 2 through the first power supply member 3 and the second power supply member 4. .

The first power supply member 3 includes: a first electrode 31 connected to the flow path end portion 2a of the flow path forming member 2; and a first electric wire 32 connected to the first electrode 31 and an output terminal of the single-phase AC power source 5 connection. The first electrode 31 is wound around the outer peripheral surface of the flow path forming member 2 and joined by welding or the like.

Further, the second power supply member 4 includes a cover member 43 that is connected to a position of the flow path forming member 2 that is closer to the other end of the flow path than the first power supply member 3, and a second electrode 41 that serves as a flow path with the cover member 43. A flow path end end portion 43a of one end is connected; and a second electric wire 42 is connected to the second electrode 41 and connected to the other output terminal of the single-phase AC power source 5. The second electrode 41 is wound around the outer peripheral surface of the cover member 43 and joined by welding or the like.

Specifically, the cover member 43 is formed of a substantially cylindrical straight tubular tube made of a conductive material. Further, the cover member 43 is provided along the outer circumferential surface of the flow path forming member 2, covering substantially the entire circumferential direction from the other end of the flow path of the flow path forming member 2 to the outer circumferential surface of one end of the flow path. Here, the cover member 43 has a larger diameter than the flow path forming member 2, and the cover member 43 is disposed coaxially with the flow path forming member 2. That is, the cover member 43 together with the flow path forming member 2 forms a so-called double tube structure. Further, as shown in FIG. 11, the cover member 43 is electrically connected to the outer peripheral surface of the flow path forming member 2 at the other end portion 43b of the flow path by welding.

Here, the flow path forming member 2 of the present embodiment is formed of a conductive material whose electric resistance is higher than that of the first power feeding member 3 and the second power feeding member 4. Specifically, in the case where the first power supply member 3 and the second power supply member 4 are formed of copper or brass, the flow path forming member 2 may be formed of a conductive material having a higher electrical resistance than copper or brass, for example, It is formed of stainless steel or titanium.

Further, in the present embodiment, the other end opening 2z of the flow path forming member 2 that communicates with the flow path R is closed by the closing member 23. Moreover, the flow path formation of the present embodiment The member 2 is provided with a fluid discharge port 22 on the other end portion 2b of the flow path which is the other end of the flow path than the connection portion connected to the cover member 43. The fluid ejection port 22 of the present embodiment is constituted by one or a plurality of slits 22, and the one or more slits 22 extend in a direction perpendicular to the axial direction on the outer peripheral surface of the flow path forming member 2.

Further, an insulating member 6 made of a ceramic material is provided between the flow path forming member 2 and the cover member 43. Specifically, an insulating member 6 is provided on the outer circumferential surface of the flow path forming member 2 opposed to the cover member 43. Here, the insulating member 6 may or may not be in contact with the inner peripheral surface of the cover member 43. Further, the insulating member 6 may be provided on the inner circumferential surface of the cover member 43. The flow path forming member 2 and the cover member 43 can be reliably insulated by the above-described insulating member 6, and short-circuiting at a portion other than the connecting portion can be prevented.

Further, an outer insulating member 8 made of a ceramic material is provided on the outer peripheral surface of the cover member 43 so as to cover substantially the entire circumferential direction of the outer peripheral surface of the cover member 43. Even when the object to be placed in which the fluid heating device 100 is provided is made of a conductive member or is electrically conductive by the heated fluid to be ejected, the outer insulating member 8 can be used to prevent the cover member from being removed. 43 Leakage to the outside.

Further, the first power feeding member 3 and the second power feeding member 4 are taken out from the flow path end portion 2a of the flow path forming member 2 toward the power source 5 side. Specifically, the first electrode 31 extends from the flow path end portion 2a of the flow path forming member 2 in a direction perpendicular to the flow path direction, and the second electrode 41 faces from the flow path end end portion 43a of the cover member 43 toward the flow path direction. Extends in a vertical direction. Further, the extending direction of the first electrode 31 and the extending direction of the second electrode 41 are not limited to the same direction, and may be, for example, a direction different in the circumferential direction at the one end portion 2a of the flow path.

The flow path forming member 2 of such a configuration is inserted into a accommodating chamber for accommodating the heated fluid, and the processing chamber for processing the object to be processed by the heated fluid. Specifically, a portion of the flow path forming member 2 from which the flow path end portion 2a is removed is inserted and disposed in the storage chamber or the processing chamber. Moreover, connected to the flow channel The single-phase AC power source 5 of the forming member 2 is provided in a space (for example, a power supply room) different from the housing chamber or the processing chamber.

Here, the flow of the heated fluid in the fluid heating device 100 of such a configuration will be described. The heated fluid flows in from the one end opening 2y (one end of the flow path) of the flow path forming member 2 that communicates with the flow path R, and flows while being heated in the flow path R inside the flow path forming member 2, and reaches the flow path R. The other end opening 2z of the communicating flow path forming member 2 is formed. Here, in the present embodiment, since the other end opening 2z is closed by the closing member 23, and the slit 22 is provided at the other end portion 2b of the flow path, the heated fluid flows from the slit 22 to the outside of the flow path forming member 2, That is, the outside of the fluid heating device 100 flows out. Further, as an example of the fluid to be heated, the heated fluid flowing into the flow path forming member 2 is saturated steam or superheated steam, and the fluid flowing out of the flow path forming member 2 is superheated steam. However, the fluid to be heated is not limited to a specific fluid, and may be appropriately selected in accordance with the use of the fluid heating device 100.

In the fluid heating device 100 of such a configuration, if a single-phase AC voltage is applied from the single-phase AC power source 5 to the flow path forming member 2 via the first power supply member 3 and the second power supply member 4, in the flow path forming member 2 The direction of the current flowing along the flow path forming member 2 is opposite to the direction of the current flowing in the cover member 43 of the second power supply member 4. Thereby, the magnetic fluxes generated by the respective currents cancel each other, so that the reactance generated in the flow path forming member 2 can be reduced and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device 100 can be improved.

Further, since it can be directly ejected from the fluid ejection port 22 provided in the flow path forming member 2, the temperature of the heated fluid heated inside the flow path forming member 2 can be ejected without falling. Further, since the cover member 43 is made of copper or brass, and the flow path forming member 2 is formed of a conductive material having a higher electric resistance than the cover member 43, the cover member 43 is not heated by energization, since it is effectively heated. Since the fluid flow path forming member 2 is heated, the heated fluid can be effectively brought into a high temperature state.

Further, since the fluid discharge port 22 is circumferentially on the outer peripheral surface of the flow path forming member 2 Since the fluid heating device 100 is inserted into a deep hole or a deep hole formed, for example, on a workpiece made of iron, the heated fluid is ejected from the fluid discharge port 22, whereby the fluid can be easily discharged. A film of triiron tetroxide is formed on the inner peripheral surface of the object to be treated.

6. Modification of the fourth embodiment

In addition, the invention is not limited to the fourth embodiment. For example, as shown in FIG. 12, an insulating member 6 may be provided which covers the outer peripheral surface from the one end of the flow path forming member 2 to the other end of the flow path, and passes through the flow path forming member 2 The cover member 43 is formed by winding a strip-shaped metal foil 401 around the outer peripheral surface of the other end of the flow path and the outer peripheral surface of the insulating member 6 over the insulating member 6. Therefore, since the cover member 43 is constituted by the thin strip-shaped metal foil 401, the entire fluid heating device 100 can be made smaller.

Further, the cover member 43 does not have to cover the entire circumferential direction at the outer peripheral surface from the other end of the flow path forming member 2 to the one end of the flow path. For example, a slit shape or a hole may be provided in a part of the cover member 43, or the end surface of the flow path end end portion 43a of the cover member 43 or the other end end portion 43b of the flow path may not be perpendicular to the flow path direction.

The flow path forming member 2 and the cover member 43 are not limited to a cylindrical straight tubular shape, and the cross section may be a polygonal shape, an elliptical shape, a free curve, or the like. Further, the cross section of the flow path forming member 2 and the cover member 43 may have different shapes, for example, the cross section of the flow path forming member 2 may be a quadrangle, and the cover member 43 may be an elliptical shape or the like.

Further, the flow path forming member 2 and the cover member 4 are not limited to a straight shape, and may be a curved shape. For example, in the case where the flow path forming member 2 has a curved shape, the cover member 43 may be formed such that the outer peripheral surface of the flow path forming member 2 is curved.

Further, as shown in FIGS. 13 to 15, the fluid heating device 100 may be configured by connecting the two flow path forming members 2 by the flange 21 and unitizing them so that the two flow path forming members 2 The flow path R is in communication, and the first power supply member 3 disposed in the two flow path forming members 2 is located inside. 13 to 15 show an example in which the fluid heating device 100 is configured using one fluid heating unit 10 described above. Alternatively, a plurality of fluid heating units 10 may be connected such that their flow passages R communicate to form the fluid heating device 100.

The fluid heating unit 10 of Fig. 13 shows a case where a first power supply output (V phase) of the three-phase AC power supply 5 is applied to the two first power supply members 3, and three phases are applied to one of the two second power supply members 4. The second power output (U phase) of the AC power source 5, and the third power source output (W phase) of the three-phase AC power source 5 is applied to the other of the two second power supply members 4.

The fluid heating unit 10 of Fig. 14 shows a case where a power supply output of the single-phase AC power supply 5 is applied to the two first power supply members 3, and a single-phase AC power supply 5 is applied to both of the two second power supply members 4. Another power output. Further, in the fluid heating unit 10 described above, a current control circuit 7 using, for example, a thyristor is provided on a circuit that inputs a power supply output to the two second power supply members 4.

The fluid heating unit 10 of Fig. 15 shows a case where the above two first power supply members 3 are connected to the o terminal of the Scott wiring transformer 51 and are applied with outputs of the same polarity, one of the two second power supply members 4 The u terminal of the Cote wiring transformer 51 is connected and a u phase is applied, and the other of the two second power supply members 4 is connected to the v terminal of the Scott wiring transformer 51 and a v phase is applied.

Further, as shown in FIG. 16, the fluid heating device 100 can be constructed by connecting the three flow path forming members 2 by the flange 21 and unitizing them so that the flow paths R of the three flow path forming members 2 are connected. And the first power supply member 3 and the second power supply member 4 disposed on the three flow path forming members 2 face in the same direction. In addition, an example in which the fluid heating device 100 is configured using the above-described three fluid heating units 10 is shown in FIG. 16, but a plurality of fluid heating units 10 may be connected such that the flow paths R of the plurality of fluid heating units 10 are connected to each other. Fluid heating device 100. Further, in Fig. 16, the first flow path forming member, the second flow path forming member, and the third flow path forming member are from the left.

In the fluid heating unit 10 described above, the first power supply member 3 of the first flow path forming member 2 and the second power supply member 4 of the second flow path forming member 2 and the three-phase AC power supply 5 The V-phase connection, the first power supply member 3 of the second flow path forming member 2 and the second power supply member 4 of the third flow path forming member 2 are connected to the W of the three-phase AC power source 5, and the third flow The first power supply member 3 of the track forming member 2 and the second power supply member 4 of the first flow path forming member 2 are connected to the U of the three-phase AC power supply 5. With this configuration, the three-phase AC power source 5 can be directly connected.

Further, the closing member 23 may not be provided on the other end opening 2z of the flow path forming member 2 communicating with the flow path R, and the other end opening 2z of the flow path forming member 2 may be opened. In this case, the other end opening 2z of the flow path forming member 2 can be used as the fluid ejection port 22. Further, when the other end opening 2z of the flow path forming member 2 is used as the fluid ejection port 22, a fluid nozzle may be attached to the fluid ejection port 22 (the other end opening 2z). Thereby, the fluid nozzle can be selected by the combined use, and the heated fluid can be ejected to a predetermined predetermined injection range by the fluid nozzle.

7. Fifth embodiment

The fluid heating device 100 according to the fifth embodiment is configured such that an alternating current voltage is applied to the conductor tube 20 in which the fluid flows in the flow path R in which the fluid flows, and the conductor tube 20 is electrically connected to the inside of the conductor tube 20 The Joule heat generated by the resistor heats the conductor tube 20 to heat the fluid flowing in the flow path R.

Specifically, as shown in FIG. 17, the two conductor tubes 20 of the fluid heating device 100 are arranged in parallel with each other, and the one end portions 20a of the two conductor tubes 20 on the fluid introduction side are electrically connected to each other. Each of the conductor tubes 20 is a straight tubular tube and has the same shape.

Specifically, the one end portion 20a of the two conductor tubes 20 is electrically connected by a conductive shunt tube 30. The shunt tube 30 is connected to the one end portion 20a of the two conductor tubes 20, and the fluid is branched to the two conductor tubes 20. Further, in the present embodiment, the conductor tube 20 and the shunt tube 30 are integrally formed. In other words, the piping structure of the fluid heating device 100 of the present embodiment has one fluid introduction port P1 on the upstream side and two flow passages R on the downstream side, and two fluid outlet ports P2. In addition, a flange portion is formed in the fluid introduction port P1 formed by the upstream side opening of the branch pipe 30, and can be connected to the external pipe. Further, it is constituted by the other end portion 20b of the conductor tube 20. A flange portion is formed in the fluid outlet P2, and can be connected to an external pipe.

Further, the other end portion 20b of the two conductor tubes 20 as the fluid lead-out side is connected to the single-phase AC power source 40. Specifically, one of the other end portions 20b of the two conductor tubes 20 is connected to the U of the single-phase AC power source 40, and the other end of the other end portion 20b of the two conductor tubes 20 is connected to the V of the single-phase AC power source 40. . As shown in Fig. 17, the electrode 50 connected to the other end portion 20b of each conductor tube 20 is wound around a part of the outer peripheral surface of the other end portion 20b, and is joined by welding or the like. The above electrode 50 is disposed to extend in a direction perpendicular to the direction in which the two conductor tubes 20 are arranged.

In the fluid heating apparatus 100 of such a structure, if a single-phase AC voltage is applied from the single-phase AC power source 40 to the body tube 20 through the electrode 50, the direction of the current flowing in one conductor tube 20 and the flow in the other conductor tube 20 The current is oriented in the opposite direction. Therefore, the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the conductor tube 20 can be lowered and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device 100 can be improved.

8. Sixth embodiment

As shown in FIG. 18, the three conductor tubes 20 of the fluid heating device 100 of the sixth embodiment are arranged in parallel with each other, and one end portion 20a of the three conductor tubes 20 as the fluid introduction side is electrically connected to each other. Each of the conductor tubes 20 is a straight tubular tube and has the same shape. Further, the three conductor tubes 20 are arranged at equal intervals on the same plane.

Specifically, the one end portion 20a of the three conductor tubes 20 is electrically connected by a conductive shunt tube 30. The shunt tube 30 is connected to one end portion 20a of the three conductor tubes 20, and shunts fluid to the three conductor tubes 20. Further, in the present embodiment, the conductor tube 20 and the shunt tube 30 are integrally formed. In other words, the piping structure of the fluid heating apparatus 100 of the present embodiment has one fluid introduction port P1 on the upstream side and three fluid passages P2 on the downstream side of the three-channel bypass. Further, similarly to the first embodiment, a flange portion is formed in the fluid introduction port P1 and the fluid outlet port P2.

And the other end portions 20b and three of the three conductor tubes 20 as the fluid-extracting side The AC power source 60 is connected. Specifically, in the other end portion 20b of the three conductor tubes 20, the first other end portion 20b is connected to the U phase of the three-phase AC power source 60, and the second other end portion 20b is connected to the V phase of the three-phase AC power source 60. Connected, the third other end 20b is connected to the W of the three-phase AC power source 60. As shown in Fig. 18, the electrode 70 connected to the other end portion 20b of each of the conductor tubes 20 is wound around a part of the outer peripheral surface of the other end portion 20b and joined by welding or the like. The above electrode 70 is disposed to extend in a direction perpendicular to the direction in which the three conductor tubes 20 are arranged.

In the fluid heating apparatus 100 of such a configuration, if a three-phase AC voltage is applied from the three-phase AC power source 60 through the electrode 70 to the body tube 20, the magnetic fluxes generated by the currents flowing through the three conductor tubes 20 cancel each other out. The impedance generated in the conductor tube 20 is reduced and the circuit power factor is improved. Therefore, the equipment efficiency of the fluid heating device 100 can be improved.

9. Modification of the sixth embodiment

The three conductor tubes 20 of the second embodiment are arranged at equal intervals on the same plane, but as shown in Fig. 19, the three conductor tubes 20 may be arranged to be located at three vertices of a triangle. Further, in this case, the electrode 7 provided on the other end portion 20b of each of the conductor tubes 20 is provided, for example, to radially extend toward the outer side of the triangle. Thereby, by providing the electrode 70 in a radial shape, wiring can be easily performed, and short circuit can be prevented.

10. Seventh embodiment

As shown in Fig. 20, the two conductor tubes 20 of the fluid heating device 100 of the seventh embodiment are arranged in parallel with each other, and the one end portions 20a of the two conductor tubes 20 as the fluid introduction sides are electrically connected to each other. Each of the conductor tubes 20 is a straight tubular tube and is of the same shape.

Specifically, the one end portion 20a of the two conductor tubes 20 is electrically connected by a conductive shunt tube 30. The shunt tube 30 is connected to the one end portion 20a of the two conductor tubes 20, and the fluid is branched to the two conductor tubes 20. Further, in the present embodiment, the conductor tube 20 and the shunt tube 30 are integrally formed.

Further, the other end portion 20b of the two conductor tubes 20 is closed, and a plurality of fluid ejection ports 20x are formed in the side wall of the conductor tube 20 (between the one end portion 20a and the other end portion 20b). The plurality of fluid ejection ports 20x may be formed on the side wall of the conductor tube 20 along the entire circumference, or may be formed on one side of the side wall of the conductor tube 20 in one direction perpendicular to the arrangement direction. Further, in FIG. 20, a plurality of fluid ejection ports 20x are formed on the side wall from the one end portion 20a to the other end portion 20b in substantially the entire longitudinal direction, but may be formed as a part from the long side direction, for example, the conductor tube 20. The central portion in the longitudinal direction is to the other end portion 20b.

Thus, the piping structure of the fluid heating apparatus 100 of the present embodiment has one fluid introduction port P1 on the upstream side, two flow passages R on the downstream side, and a plurality of fluid discharge ports from the respective flow passages R. 20x sprays the heated fluid.

Further, the closed other end portion 20b of the two conductor tubes 20 is connected to the single-phase AC power source 40. Specifically, one of the other end portions 20b of the two conductor tubes 20 is connected to the U of the single-phase AC power source 40, and the other end of the other end portion 20b of the two conductor tubes 20 is connected to the V of the single-phase AC power source 40. . As shown in FIG. 20, the electrode 50 connected to the other end portion 20b of each conductor tube 20 has a shape along the outer peripheral surface of the conductor tube 20, and is disposed to extend further than the other end portion 20b of the conductor tube 20. The long side is on the outside. Specifically, the conductor tube 20 has a circular tubular shape, and the electrode 50 has a so-called semi-cylindrical shape of a partial cylindrical shape. The electrode 50 is connected to the other end portion 20b of the conductor tube 20 by welding or the like. In this way, since the electrode 50 has a semi-cylindrical shape and extends in the longitudinal direction of the conductor tube 20, when the conductor tube 20 is inserted into a storage container in which a storage chamber for accommodating the heated fluid is used, when When the conductor tube 20 is mounted in the storage container or taken out, the electrode 50 does not interfere.

In the fluid heating apparatus 100 of such a configuration, if a single-phase AC voltage is applied from the single-phase AC power source 40 to the body tube 20 through the electrode 50, the direction of the current flowing in one conductor tube 20 and the other conductor tube 20 The current flowing in the opposite direction is opposite. Thereby, the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the conductor tube 20 can be lowered and the circuit power factor can be improved. Therefore, the fluid heating device can be improved 100 device efficiency. Further, since the plurality of fluid ejection ports 20x are formed between the one end portion 20a of the conductor tube 20 and the closed other end portion 20b, when the heated fluid is dispersed and used, it can be easily used.

11. Eighth embodiment

As shown in FIG. 21, the three conductor tubes 20 of the fluid heating device 100 of the eighth embodiment are arranged in parallel with each other, and the one end portions 20a of the three conductor tubes 20 as the fluid introduction sides are electrically connected to each other. Each of the conductor tubes 20 is a straight tubular tube and has the same shape. Further, the three conductor tubes 20 are arranged at equal intervals on the same plane.

Specifically, the one end portion 20a of the three conductor tubes 20 is electrically connected by a conductive shunt tube 30. The shunt tube 30 is connected to one end portion 20a of the three conductor tubes 20, and shunts fluid to the three conductor tubes 20. Further, in the present embodiment, the conductor tube 20 and the shunt tube 30 are integrally formed.

Further, the other end portion 20b of the three conductor tubes 20 is closed, and a plurality of fluid ejection ports 20x are formed in the side wall of the conductor tube 20 (between the one end portion 20a and the other end portion 20b). The plurality of fluid ejection ports 20x may be formed on the side wall of the conductor tube 20 along the entire circumference, or may be formed on one side of the side wall of the conductor tube 20 in one direction perpendicular to the arrangement direction. Further, in Fig. 21, a plurality of fluid ejection ports 20x are formed on the side walls from one end portion 20a to the other end portion 20b in substantially the entire longitudinal direction, but may be formed as a part from the long side direction, for example, the conductor tube 20. The central portion in the longitudinal direction is to the other end portion 20b.

Thus, the piping structure of the fluid heating apparatus 100 of the present embodiment has one fluid introduction port P1 on the upstream side, three flow passages R on the downstream side, and a plurality of fluid discharge ports 20x from the respective flow passages. R ejects the heated fluid.

12. Modification of the eighth embodiment

The three conductor tubes 20 of the fourth embodiment are arranged at equal intervals on the same plane. However, as shown in FIG. 22, the three conductor tubes 20 may be arranged in a triangular shape as in the modification of the second embodiment. Three vertices.

13. Other variant implementations

Further, the present invention is not limited to the fifth to eighth embodiments. For example, in the fifth to eighth embodiments, the conductor tube 20 and the shunt tube 30 are integrally formed, but the conductor tube 20 and the shunt tube 30 may also be different members, and they are connected by a flange.

Further, in the fifth embodiment and the seventh embodiment, the fluid heating device 100 having the two conductor tubes 20 has been described. However, as shown in FIG. 23, it may have 2N (N is 2 or more). Integer) conductor tube 20. In addition, in FIG. 23, the fluid heating device 100 having the four conductor tubes 20 is exemplified. Further, electrical connection is performed by connecting a single shunt tube 30 having 2N flow paths to one end portion 20a of the 2N conductor tubes 20. Further, the other end portion 20b of the 2N conductor tube 20 is alternately connected to the U phase and the V phase of the single-phase AC power source 40 in such a manner that the polarity of the single-phase AC power source 40 connected to the other end portion 20b adjacent to each other is different. . In Fig. 23, the other end portions 20b of the four conductor tubes 20 are connected in order from the top to the U phase, the V phase, the U phase, and the V phase.

Even in this manner, the directions of the currents flowing in the mutually adjacent conductor tubes 20 are reversed, so that the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the conductor tubes 20 can be lowered and the circuit power factor can be improved. Therefore, the equipment efficiency of the fluid heating device 100 can be improved. Further, by increasing the number of the conductor tubes 20, it is possible to increase the capacity of the fluid after heating. Further, by forming the plurality of fluid ejection ports 20x on the 2N conductor tubes 20, the discharge area of the heated fluid can be increased, whereby the fluid can be diffused to a large range.

In addition, in FIG. 23, the other end portion 20b of the conductor tube 20 is closed, and a plurality of fluid ejection ports 20x are formed in the middle of the conductor tube 20. However, as in the first embodiment, a plurality of fluid ejections may not be formed. The outlet 20x is opened while the other end 20b of the conductor tube 20 is opened to form a fluid outlet.

Further, in the sixth embodiment and the eighth embodiment, the fluid heating device 100 having the three conductor tubes 20 has been described. However, as shown in FIG. 24, it may have 3N (N is an integer of 2 or more. ) Conductor tube 20. In addition, in Figure 24, A fluid heating device 100 having six conductor tubes 20 is illustrated. Further, electrical connection is performed by connecting a single shunt tube 30 having 3N flow paths to one end portion 20a of the 3N conductor tubes 20. Further, the other end portion 20b of the 3N conductor tube 20 and the U-phase and V-phase of the three-phase AC power source 60 are different in such a manner that the polarities of the three-phase AC power source 60 connected to the three other end portions 20b which are continuously arranged are different. The W phases are alternately connected. In FIG. 24, the other end portion 20b of the six conductor tubes 20 is connected so as to be W phase, V phase, U phase, W phase, V phase, and U phase from the top.

Even in this manner, since the U-phase, the V-phase, and the W-phase of the three-phase AC power source 60 are connected in such a manner that the polarities of the three-phase AC power source 60 connected to the three other end portions 20b which are continuously arranged are different, continuous The magnetic fluxes generated by the current flowing in the three conductor tubes 20 arranged to cancel each other, thereby also reducing the impedance generated in the conductor tube 20 and improving the circuit power factor. Therefore, the equipment efficiency of the fluid heating device 100 can be improved. Further, by increasing the number of the conductor tubes 20, the volume of the fluid after heating can be increased. Further, by forming the plurality of fluid ejection ports 20x on the 3N conductor tubes 20, the discharge area of the heated fluid can be increased, whereby the fluid can be diffused to a large range.

In addition, in FIG. 24, the other end portion 20b of the conductor tube 20 is closed, and a plurality of fluid ejection ports 20x are formed in the middle of the conductor tube 20. However, as in the second embodiment, a plurality of fluids may not be formed. The discharge port 20x is opened, and the other end portion 20b of the conductor tube 20 is opened to form a fluid outlet port.

Further, when a plurality of fluid ejection ports 20x are formed on the conductor tube 20 like the fluid heating device 100 of the seventh embodiment and the eighth embodiment, as shown in FIGS. 25 and 26, the fluid heating device 100 The heat insulating container 80 may be formed with a storage chamber for accommodating the heated fluid ejected from the fluid ejection port 20x of the conductor tube 20 and holding the heat. Specifically, the conductor tube 20 is inserted and inserted so as to penetrate the left and right side walls 801 and 802 of the heat insulating container 8. At this time, in the state in which the left and right side walls 801 and 802 of the heat insulating container 80 are inserted, the conductor tube 20 is located between the left and right side walls 801 and 802, that is, in the sealed state of the heat insulating container 80. A plurality of fluid ejection ports 20x are formed in a portion of the space. Further, in a state where the conductor tube 20 is inserted into the heat insulating container 80, the electrode 50 connected to the conductor tube 20 is located outside the heat insulating container 80. Further, the electrode 50 has a semi-cylindrical shape as in the third embodiment. Thereby, the conductor tube 20 provided with the electrode 50 can be easily attached and detached only by forming a hole for passing the conductor tube 20 on the left and right side walls 801, 802 of the heat retention container 80. In other words, when the conductor tube 20 is inserted into the heat insulating container 80 or the conductor tube 20 is taken out from the heat insulating container 80 and taken out, it is possible to prevent the electrode 50 from interfering with the left and right side walls 801 and 802. Further, a single-phase AC power source 40 connected to the conductor tube 20 is disposed in the power source chamber PR, and the power source chamber PR is disposed outside the heat insulating container 80. Thus, the single-phase AC power source 40 disposed in a different space from the heat retention container 80 is electrically connected to the electrode 50 of the conductive tube 20 through the electric wire.

The heated fluid accommodated in the heat retention container 80 is taken out from the fluid outlet (not shown) provided in the heat retention container 80 and used. Further, as described above, the case where the storage chamber is formed of the heat retention container has been described, and the storage chamber may be formed of a heating container having heating for further heating the fluid heated in the conductor tube 20. The mechanism may also be formed by a temperature regulating vessel having a temperature regulating function for temperature regulation of the heated fluid. Further, the conductor tube 20 may be inserted into a processing chamber provided for processing the object to be processed by the heated fluid, in addition to being inserted into the accommodating chamber. Here, it is considered that the object to be processed is continuously conveyed to the processing chamber by a conveying mechanism such as a conveyor belt.

Further, in the fifth to eighth embodiments, one end portion 20a of the plurality of conductor tubes 20 is connected to the single shunt tube 30 and the fluid introduction port P1 is one, but as shown in Fig. 27, the plurality of conductor tubes 20 are provided. The one end portion 20a may be opened to have a plurality of fluid introduction ports P1, respectively. In this case, the one end portion 20a of the plurality of conductor tubes 20 is electrically connected by the conductive member 90.

Further, as shown in FIG. 28, the conductor tube 20 can be configured by connecting a plurality of element pipes 20m in series. In this case, it is provided on each element pipe 20m for The other element is a connecting portion such as a flange portion to which the pipe 20m is connected. Thereby, the fluid heating device 100 having the flow path of a desired length can be configured by connecting the plurality of element pipes 20m.

Further, as shown in FIG. 29, a plurality of fluid nozzles 201 may be provided on the side wall of the conductor tube 20 (between the one end portion 20a and the other end portion 20b). The plurality of fluid nozzles 201 may be formed on the side wall of the conductor tube 20 along the entire circumference, or may be formed on one side of the side wall of the conductor tube 20 in one direction perpendicular to the arrangement direction. Further, in FIG. 29, the plurality of fluid nozzles 201 are provided on the side wall at equal intervals from the one end portion 20a to the other end portion 20b, but are not limited thereto. In addition, FIG. 29 shows a case where the fluid heating device 100 having two conductor tubes 20 as in the fifth embodiment is applied, and it is also applicable to three conductors as in the sixth embodiment. The fluid heating device 100 of the tube 20 can also be applied to the fluid heating device 100 having the conductor tube 20 in which the other end portion 20b is closed, as in the seventh and eighth embodiments. Further, it can be applied to the fluid heating device 100 having 2N or 3N (N is an integer of 2 or more). Thus, if the fluid nozzle 201 is provided, the fluid nozzle 201 can be selected by the combined use, and the heated fluid can be ejected to a predetermined predetermined injection range by the fluid nozzle.

14. Ninth embodiment

The fluid heating device 100 according to the ninth embodiment is configured such that an AC voltage is applied to the flow path forming member 2 in which the flow path R for the heated fluid flows and the flow path forming member 2 made of a conductive material is directly supplied, and the flow is directly applied. The Joule heat generated by the internal resistance of the track forming member 2 heats the flow path forming member 2 to heat the heated fluid flowing in the flow path R.

As shown in Fig. 30, the flow path forming member 2 of the present embodiment is formed of a substantially cylindrical straight tubular tube. Thereby, the flow path R is a linear flow path. Further, the flow path forming member 2 is made of a conductive material having a larger resistance than copper, and may be formed of, for example, stainless steel or titanium. In addition, the flange portion 21 is formed in the first flow port P1 which is open at one end of the flow path forming member 2 on the flow passage end portion 2a side, and is connectable to the external pipe. with The flange portion 21 is formed in the second flow port P2 which is the other end opening on the other end portion 2b side of the flow path forming member 2, and can be connected to the external pipe.

Further, five electrodes 3z are connected to the flow path forming member 2 at a position which is substantially equally divided in the flow path direction of the flow path R of the flow path forming member 2. Two of the above-described five electrodes 3z are connected to the flow path end portion 2a and the flow path other end portion 2b. The electrode 3z is connected to the output terminal of the single-phase AC power source, and the U phase and the V phase of the single-phase AC power source are alternately connected so that the polarities of the single-phase AC power sources connected to the adjacent electrodes 3z are different. Specifically, the U-phase, the V-phase, the U-phase, the V-phase, and the U-phase are connected in order from the electrode 3z located on the most end portion 2a side of the flow path. Further, the order of the U phase and the V phase of the single-phase AC power source connected to the electrode 3z is not limited to the one shown in Fig. 30, and the U phase and the V phase may be reversed.

Here, the number of the electrodes 3z is not limited to five, and may be connected to the flow path forming member 2 at a position equal to the flow path direction 2n along the flow path R (n is an integer of 1 or more). For example, when the electrode 3z is connected to each of the flow path end portion 2a and the flow channel other end portion 2b as in the present embodiment, it is only necessary to connect 2n+1 electrodes 3z.

Further, a plurality of fluid discharge ports 22 are provided on the outer circumferential surface of the flow path forming member 2 (between the one end portion 2a and the other end portion 2b). The same number of the fluid ejection ports 22 are disposed between the respective electrodes 3z so that the outer peripheral surface of the flow path forming member 2 faces one side (lower in FIG. 30) perpendicular to the flow path direction. . In the present embodiment, four fluid ejection ports 22 are disposed between the respective electrodes 3z. Further, a fluid nozzle 24 is attached to each of the fluid ejection ports 22 of the present embodiment. Further, the fluid ejection port 22 may be formed on the outer circumferential surface of the flow path forming member 2 along the entire circumferential direction. Further, the fluid ejection port 22 of the present embodiment is formed on the outer circumferential surface of the flow path forming member 2 from the flow passage end portion 2a to the flow passage other end portion 2b in substantially the entire longitudinal direction, but may be formed on the long side from the long side. A part of the direction, for example, the central portion in the longitudinal direction of the flow path forming member 2 to the other end portion 2b.

Here, the flow of the heated fluid in the fluid heating device 100 will be described. The heated fluid flows from the first flow port P1 of the flow path forming member 2 communicating with the flow path R The inside of the flow path R inside the flow path forming member 2 flows while being heated, and reaches the second flow port P2 of the flow path forming member 2 that communicates with the flow path R. A part of the heated fluid is discharged between the first flow port P1 and the second flow port P2 through the fluid discharge port 22 and the fluid nozzle 24 to the outside of the fluid heating device 100. Further, it is also possible to close one of the first flow port P1 or the second flow port P2, and to cause the heated fluid to flow from the other of the first flow port P1 or the second flow port P2, and to make all the heated fluid The fluid ejection port 22 and the fluid nozzle 24 are ejected to the outside. Further, the heated fluid may flow from both the first flow port P1 and the second flow port P2, and all the heated fluid may be ejected from the fluid discharge port 22 and the fluid nozzle 24 to the outside. Further, as an example of the fluid to be heated, it is considered that the heated fluid flowing into the flow path forming member 2 is saturated steam or superheated steam, and the heated fluid flowing out of the flow path forming member 2 is superheated steam. However, the fluid to be heated is not limited to a specific fluid, and may be appropriately selected in accordance with the use of the fluid heating device 100.

In the fluid heating apparatus 100 of such a configuration, if a single-phase AC voltage is applied from the single-phase AC power source to the flow path forming member 2 through the respective electrodes 3z, the phases of the currents flowing between the mutually adjacent electrodes 3z are opposite. Therefore, the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the flow path forming member 2 can be lowered and the circuit power factor can be improved. Therefore, it is possible to efficiently heat the fluid to be heated, and it is possible to improve the equipment efficiency of the fluid heating device 100.

15. Modification of the ninth embodiment

Further, the configuration of the fluid heating device 100 of the ninth embodiment is not limited to the flow path forming member 2 being formed of only one straight portion, and may have a plurality of straight portions. Specifically, as shown in FIG. 31, for example, three straight portions 25 may be provided, and the straight portion 25 is provided with a plurality of fluid discharge ports 22 on the outer peripheral surface. Specifically, the three straight portions 25 are connected by a conductive connecting portion 26 on the other end portion 2b side of the flow path, and the straight portion 25 and the connecting portion 26 constitute the flow path forming member 2. In other words, the piping structure of the fluid heating device 100 has three first flow ports P1 on the flow passage end portion 2a side, in the flow path. The other end portion 2b side has a second flow port P2. When the heated fluid flows from the flow passage end portion 2a to the other end portion 2b of the flow passage, the connecting portion 26 merges the three flow passages into one flow passage, and the heated fluid flows from the other end portion 2b of the flow passage. When one end portion 2a of the flow path flows, one flow path is branched into three flow paths.

Thus, even in the case where the plurality of straight portions 25 are provided, it is preferable that the flow path direction of the flow path forming member 2 from the flow path end portion 2a to the other end portion 2b of the flow path along the flow path R The electrode 3z is disposed at a position of 2n aliquots. For example, in the case of the fluid heating apparatus 100 of Fig. 31, the straight portions 25 are arranged substantially in parallel on the same plane. Further, when viewed in the direction in which the straight portions 25 are arranged (from below in FIG. 31), the electrodes 3z are connected at substantially four equal positions along the flow path direction of the flow path R. Further, the plurality of electrodes 3z connected to the straight portion 25 and the electrodes 3z connected to the adjacent straight portions 25 are connected to substantially the same position along the flow path direction of the flow path R. Further, the straight portion 25 is not limited to three, and may be two or four or more. Further, the straight portions 25 may be arranged, for example, in a radial shape or the like instead of being arranged substantially in parallel.

16. Tenth embodiment

The fluid heating device 100 of the tenth embodiment changes the configuration of the electrode 3z, and changes the power source connected to the electrode 3z from a single-phase AC power source to a three-phase AC power source. Further, the piping structure of the fluid heating device 100 is the same as that of the first embodiment.

As shown in Fig. 32, in the fluid heating apparatus 100 of the present embodiment, seven electrodes 3z are connected to the flow path forming member 2 at substantially six equal positions along the flow path direction of the flow path R. Two of the above-described seven electrodes 3z are connected to the flow path end portion 2a and the flow path other end portion 2b. The electrode 3z is connected to the output terminal of the three-phase AC power source, and alternately connects the U phase, the V phase, and the W of the three-phase AC power source in a manner different from the polarity of the three-phase AC power source connected to the three electrodes 3z that are continuously arranged. phase. Specifically, the U phase, the V phase, the W phase, the U phase, the V phase, the W phase, and the U phase are connected in order from the electrode 3z located on the most end portion 2a side of the flow path. Further, the order of the U phase, the V phase, and the W phase of the three-phase AC power source connected to the electrode 3z is not limited to the mode of FIG. 32, as long as the three-phase AC power source connected to the three electrodes 3z that are continuously arranged is used. The manner in which the polarities are different may be connected to the flow path forming member 2.

Here, the number of the electrodes 3z is not limited to seven, and may be connected to the flow path forming member 2 at a position in the flow path direction 3n along the flow path R (n is an integer of 1 or more). For example, when the flow path end portion 2a and the other end portion 2b of the flow channel are connected to the electrode 3z as in the present embodiment, it is only necessary to connect 3n+1.

Further, a plurality of fluid discharge ports 22 are provided on the outer circumferential surface of the flow path forming member 2 (between the one end portion 2a and the other end portion 2b). Four fluid ejection ports 22 of the present embodiment are disposed between the respective electrodes 3z so as to face one side (the lower side in FIG. 32) perpendicular to the flow path direction of the outer peripheral surface of the flow path forming member 2 . Further, a fluid nozzle 24 extending in the opening direction of the fluid discharge port 22 is attached to each of the fluid ejection ports 22 of the present embodiment. Further, the fluid ejection port 22 may be formed on the outer circumferential surface of the flow path forming member 2 along the entire circumferential direction. Further, the fluid ejection port 22 of the present embodiment is formed on the outer circumferential surface of the flow path forming member 2 from the flow passage end portion 2a to the flow passage other end portion 2b in substantially the entire longitudinal direction, but may be formed on the long side from the long side. A part of the direction, for example, the central portion in the longitudinal direction of the flow path forming member 2 to the other end portion 2b. Further, the number of the fluid discharge ports 22 is not limited to the number of the present embodiment, and an appropriate number of fluid discharge ports 22 may be disposed in accordance with the use of the fluid heating device 100.

The flow of the heated fluid in the fluid heating device 100 is the same as that of the first embodiment. Further, one of the first flow port P1 or the second flow port P2 may be closed to allow the heated fluid to flow from the other of the first flow port P1 or the second flow port P2, and to allow all of the heated fluid to flow from the fluid discharge port. 22 and the fluid nozzle 24 are ejected to the outside. Further, the heated fluid may flow from both the first flow port P1 and the second flow port P2, and all the heated fluid may be ejected from the fluid discharge port 22 and the fluid nozzle 24 to the outside.

In the fluid heating apparatus 100 of such a configuration, since a three-phase alternating voltage is applied from the three-phase alternating current power source to the flow path forming member 2 through the respective electrodes 3z, the phase of the current flowing between the three electrodes 3z which are continuously arranged They are 120° out of each other, so The magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the flow path forming member 2 can be lowered and the circuit power factor can be improved. Therefore, the heated fluid can be efficiently heated, so that the equipment efficiency of the fluid heating device 100 can be improved.

17. Modification of the tenth embodiment

Further, the configuration of the fluid heating device 100 of the tenth embodiment is not limited to the flow path forming member 2 being formed of only one straight portion 25, and may have a plurality of straight portions 25. Specifically, as shown in FIG. 33, for example, three straight portions 25 may be provided, and the straight portion 25 may be provided with a plurality of fluid discharge ports 22 on the outer peripheral surface. The piping structure of the fluid heating apparatus 100 of the above-described embodiment is the same as that of the piping structure shown in FIG. 31, and the same or corresponding structures as those of the fluid heating apparatus 100 of FIG. 31 are denoted by the same reference numerals. Therefore, even in the case where the plurality of straight portions 25 are provided, it is preferable that the flow path of the flow path forming member 2 from the one end portion 2a of the flow path to the other end portion 2b of the flow path and along the flow path R The electrode 3z is disposed at a position where the direction is 3n divided. For example, in the case of the fluid heating apparatus 100 of Fig. 33, the straight portions 25 are arranged substantially in parallel on the same plane, and are observed along the flow path when viewed along the direction in which the straight portions 25 are arranged (from below in Fig. 33). The electrode 3z is connected to the flow path direction of R in a substantially six-division position.

18. Eleventh embodiment

As shown in FIG. 34, the fluid heating apparatus 100 of the eleventh embodiment is configured such that an alternating current voltage is applied to a flow path forming member 2 in which a flow path R through which a heated fluid flows and a conductive material is formed. Directly energized, the flow path forming member 2 is heated by Joule heat generated by the internal resistance of the flow path forming member 2, and the heated fluid flowing in the flow path R is heated.

The flow path forming member 2 of the present embodiment includes six straight portions 25 that form linear flow paths that are arranged substantially in parallel with each other, and five folded portions 27 that are connected to end portions of the straight portions 25 that are adjacent to each other to form a bend A runner R. Here, the six straight portions 25 of the present embodiment are arranged at equal intervals so as to be substantially parallel to each other on the same plane, and are substantially the same length. Further, the folded portion 27 is configured as One shape or a U shape, and one end portion and the other end portion of each straight portion 25 are respectively connected to different straight portions 25. Moreover, the flange portion 21 is formed in the first flow port P1 formed in the flow passage end portion 2a of the flow path forming member 2, and can be connected to the external pipe. Similarly, the flange portion 21 is formed in the second flow port P2 formed at the other end portion 2b of the flow path forming member 2, and can be connected to the external pipe.

Further, as shown in FIG. 34, in the flow path forming member 2, the flow path end portion 2a, the other end portion 2b of the flow path, and a part of the folded portion 27 are connected to the electrode 3z. The electrode 3z is connected such that the straight portions 25 forming the flow path R between the mutually adjacent electrodes 3z in the flow path direction of the flow path R are an even number, and are two in the present embodiment. Therefore, in the present embodiment, the flow path end portion 2a, the other end portion 2b of the flow path, and the four portions of the two folded portions 27 located on the flow path end portion 2a and the flow path other end portion 2b side are connected in plan view. There are electrodes 3z.

Further, the electrode 3z is connected to the output terminal of the single-phase AC power source, and the U phase and the V phase of the single-phase AC power source are alternately connected so that the polarities of the single-phase AC power sources connected to the mutually adjacent electrodes 3z are different. Specifically, the V phase, the U phase, the V phase, and the U phase are connected in order from the electrode 3z located on the most end portion 2a side of the flow path. Further, the order of the U phase and the V phase of the single-phase AC power source connected to the electrode 3z is not limited to the mode shown in FIG. 34, and the U phase and the V phase may be reversed.

Further, a plurality of fluid discharge ports 22 are provided on the outer circumferential surface of the flow path forming member 2 (between the one end portion 2a and the other end portion 2b). Four fluid discharge ports of the present embodiment are disposed on each of the straight portions 25 so that the direction of the outer peripheral surface of the flow path forming member 2 is one direction (lower in FIG. 34) perpendicular to the flow path direction. twenty two. Further, a fluid nozzle 24 is attached to each of the fluid ejection ports 22 of the present embodiment. Further, the fluid ejection port 22 may be formed on the outer circumferential surface of the flow path forming member 2 along the entire circumferential direction. Further, the fluid ejection port 22 of the present embodiment is formed on the outer circumferential surface of the flow path forming member 2 from the flow passage end portion 2a to the flow passage other end portion 2b in substantially the entire longitudinal direction, but may be formed in the longitudinal direction. A part of the flow path forming member 2 is, for example, the center portion in the longitudinal direction of the flow path forming member 2 to the other end portion 2b.

Here, the fluid heating device 100 of the present embodiment can close the first flow port One of P1 or the second flow port P2, and the heated fluid flows in from the other of the first flow port P1 or the second flow port P2, and the entire heated fluid is discharged from the fluid discharge port 22 and the fluid nozzle 24 to the outside. ejection. Further, the heated fluid may flow from both the first flow port P1 and the second flow port P2, and all the heated fluid may be ejected from the fluid discharge port 22 and the fluid nozzle 24 to the outside. Further, as shown in FIG. 34, when one or more of the folded portion 27 is connected to the intermediate piping portion 28 for allowing the heated fluid to flow into the flow passage R, the first flow port P1 and the second flow port P2 may be closed. The heated fluid flows in from the intermediate piping portion 28, and all the heated fluid is discharged from the fluid discharge port 22 and the fluid nozzle 24 to the outside. Further, it is conceivable to provide a check valve or a flow rate adjusting valve on the intermediate piping portion 28.

In the fluid heating apparatus 100 of such a configuration, if a single-phase AC voltage is applied from the single-phase AC power source to the flow path forming member 2 through the respective electrodes 3z, the phases of the currents flowing between the mutually adjacent straight portions 25 are mutually On the contrary, the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the flow path forming member 2 can be lowered and the circuit power factor can be improved. Therefore, the heated fluid can be efficiently heated, so that the equipment efficiency of the fluid heating device 100 can be improved.

19. Twelfth embodiment

The fluid heating device 100 of the twelfth embodiment changes the configuration of the electrode 3z, and changes the power source connected to the electrode 3z from a single-phase AC power source to a three-phase AC power source. Further, the piping structure of the fluid heating device 100 is the same as that of the third embodiment.

As shown in Fig. 35, in the fluid heating device 100 of the present embodiment, the flow path forming member 2, the flow path end portion 2a, the other end portion of the flow path 2b, and all the folded portions 27 are connected to the electrode 3z. Further, it is not necessary that all the folded portions 27 are connected to the electrodes 3z, and a part of the folded portions 27 may be connected to the electrodes 3z.

Further, each of the electrodes 3z is connected to the output terminal of the three-phase AC power supply, and the U-phase and the V-phase of the three-phase AC power supply are alternately connected in such a manner that the polarities of the three-phase AC power sources connected to the three electrodes 3z that are continuously arranged are different. And W phase. Specifically, the U-phase and the W-phase are connected in order from the electrode 3z located on the side of the one end portion 2a of the flow path. V phase, U phase, W phase, V phase, U phase. Further, the order of the U phase, the V phase, and the W phase of the three-phase AC power source connected to the electrode 3z is not limited to the mode shown in Fig. 35, as long as the polarity of the three-phase AC power source connected to the three electrodes 3z arranged in series is used. It is only necessary to connect the flow path forming member 2 in a different manner.

Further, a plurality of fluid discharge ports 22 are provided on the outer circumferential surface of the flow path forming member 2 (between the one end portion 2a and the other end portion 2b). Five fluid ejection ports 22 of the present embodiment are disposed on each linear portion 25 so as to face one side (the lower side in FIG. 35) perpendicular to the flow path direction of the outer peripheral surface of the flow path forming member 2 . Further, a fluid nozzle 24 extending in the opening direction of the fluid discharge port 22 is attached to each of the fluid ejection ports 22 of the present embodiment. Further, the fluid ejection port 22 may be formed on the outer circumferential surface of the flow path forming member 2 along the entire circumferential direction. Further, the fluid ejection port 22 of the present embodiment forms the outer circumferential surface of the flow path forming member 2 from the flow passage end portion 2a to the flow passage other end portion 2b in substantially the entire longitudinal direction, but may be formed in the longitudinal direction. A part, for example, from the center portion in the longitudinal direction of the flow path forming member 2 to the other end portion 2b.

Here, the fluid heating device 100 of the present embodiment can close the second flow port P2, allow the heated fluid to flow from the first flow port P1 of the flow path forming member 2, and eject the heated fluid from the fluid discharge port 22, The heated fluid may also flow from both the first flow port P1 and the second flow port P2 of the flow path forming member 2, and the heated fluid may be ejected from the fluid ejection port 22. Further, as shown in FIG. 35, when the flange portion 28 for further flowing the heated fluid is provided on the one or more folded portions 27, both the first flow port P1 and the second flow port P2 may be closed. Further, the heated fluid is ejected from the fluid ejection port 22.

Further, the flange portion 28 is preferably provided with a check valve or a flow rate adjusting valve or the like.

In the fluid heating apparatus 100 of such a configuration, if a three-phase AC voltage is applied from the three-phase AC power supply 5 to the flow path forming member 2 through the respective electrodes 3z, a current flowing between the three linear portions 25 that are continuously arranged The phases are 120° different from each other, Therefore, the magnetic fluxes generated by the respective currents cancel each other, and the impedance generated in the flow path forming member 2 can be lowered and the circuit power factor can be improved. Therefore, the heated fluid can be efficiently heated, so that the equipment efficiency of the fluid heating device 100 can be improved.

20. Modification of the twelfth embodiment

Further, the present invention is not limited to the tenth to twelfth embodiments. For example, a power control device can be provided between the electrodes 3z, and the electric power applied to the electrode 3z can be controlled. Thereby, the temperature of the flow path forming member 2 between each of the electrodes 3z can be individually controlled, so that the heated fluid can be effectively brought into a desired state.

Further, the fluid nozzle 24 may not be attached to the fluid discharge port 22, and the heated fluid may be directly discharged from the fluid discharge port 22. In this case, the shape of the fluid discharge port 22 may be substantially circular, or may be an elongated slit shape or the like. Thereby, the shape of the fluid discharge port 22, the arrangement place of the flow path forming member 2, the presence or absence of the fluid nozzle 24, and the like can be appropriately selected in accordance with the use of the fluid heating device 100.

Further, the two flow path forming members 2 are connected by the flange portion 21 to unitize them so that the flow paths R of the two flow path forming members 2 are communicated, and the electrodes 3z provided on the two flow path forming members 2 are located The inner side constitutes the fluid heating device 100.

Further, the present invention is not limited to the above-described first to twelfth embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

100‧‧‧ Fluid heating device

2‧‧‧Flow forming parts (tubes)

3‧‧‧First power supply unit

4‧‧‧Second power supply components

5‧‧‧Power supply

31‧‧‧First electrode

32‧‧‧First wire

41‧‧‧second electrode

42‧‧‧second wire

2a‧‧‧End

2b‧‧‧End

R‧‧‧ runner

Claims (2)

A fluid heating device that electrically heats a flow path forming member having a flow path through which a heated fluid flows and which is formed of a conductive material to heat a heated fluid flowing in the flow path; The heating device is characterized in that: 3n+1 power supply members connected to different positions along the flow path direction on the flow path forming member, the n being an integer of 1 or more; the 3n+1 power supply members The U phase, the V phase, and the W phase of the three-phase AC power source are alternately connected in such a manner that the polarities of the three-phase AC power sources connected to the three power supply members arranged in series are different. The fluid heating device according to claim 1, wherein the flow path forming member has 3n straight portions forming a linear flow path and 3n-1 folded portions connecting the straight portions into one flow path, n is an integer of 1 or more; and the 3n+1 power supply members are connected to one end portion of the flow path on the flow path forming member, the 3n-1 folding portions, and the other end portion of the flow path.