TW201723297A - Opening/closing device capable of preventing chamber door of vacuum chamber from overshooting and vacuum chamber having the same capable of preventing chamber door of vacuum chamber from overshooting, and having a baffle for blocking the relative sliding motion generated while the chamber door being opened - Google Patents

Abstract

The present invention discloses an opening/closing device capable of preventing chamber door of vacuum chamber from overshooting and a vacuum chamber having the same, comprising a linear driving part having a linear driving shaft, and a connection head part, one end of the connection head part is fastened at an edge of the chamber door, and the other end of the connection head part is formed with a connection hole; one end of the linear driving part is moveably connected to an outer wall of the vacuum chamber, and the other end thereof is moveably connected to the other end of the connection head part via the connection hole; the connection head part is driven to rotate through the rotation of the linear driving part, thereby allowing the chamber door to be opened or closed; a baffle sleeve surrounding the distal end of the linear driving part; a baffle disposed on the connection hole of the connection head part, and having a stop end close to the linear driving part; a bolt pin penetrating the connection hole for fixedly connecting the baffle with the baffle sleeve, and allowing the baffle and the connection head part to be moveably connected; a baffle stopper disposed on the connection head part, which is close to the stop end of the baffle, and when the stop end of the baffle is in contact with the baffle stopper, the connection head part is blocked by the baffle and unable to continue the rotation.

Description

The opening and closing device for avoiding the overshoot of the vacuum chamber door and the vacuum chamber in which it is located

The present invention relates to the field of semiconductor technology, and more particularly to an opening and closing device for avoiding overshoot of a vacuum chamber door.

The vacuum chamber needs to be closed or opened during operation or maintenance. Generally, a joint member is fixedly connected to the edge of the vacuum chamber door, and a linear driving member is connected to the outer wall of the vacuum chamber. One end of the joint member has a connecting hole, and a pin passes through the connecting hole to move one end of the joint member and one end of the linear driving device. Connecting, that is, during opening or closing of the door, the pin abuts against the upper end of the connecting hole, and the linear driving member pushes the joint member to open or close the door by the pin, and the joint member can be the pin The fulcrum produces a relative rotation relative to the linear drive member to open or close the door.

When the door is closed, the vacuum chamber is evacuated. At this time, the door will move further downward under the action of vacuum suction. In order to avoid hard pressing of the pin and the top of the connecting hole in the connecting hole, the connecting hole can be set. The size is larger than the outer diameter of the pin. When the vacuum door is further lowered downward during the vacuuming process, the above-mentioned connecting hole can be used to release the force applied to the door, so that the door can be moved downward when vacuuming, avoiding the case when the door is down and the current drive Component conflicts interfere to ensure a higher degree of vacuum.

However, since the size of the connecting hole is larger than the outer diameter of the pin, when the opening direction of the door is required to exceed the vertical direction or the center of gravity of the door exceeds the vertical state, the door will suddenly reverse under its own gravity, forcing the pin. Sliding toward the lower end of the connecting hole causes the door to generate vibration or jitter in the opposite direction with respect to the opening direction, in particular, when the door is fully opened and in a vertical state, due to the gravity of the door itself and the rotation of the door The end speed causes severe overshoot of the door, resulting in uncontrollable movement of the door, and vibration of the fragile parts to cause damage, which also generates unwanted particles and damages the mechanical support system.

Therefore, there is an urgent need to explore a solution to avoid overshoot problems when the door is opened to reduce the above effects and losses due to overshoot.

In order to overcome the above problems, the present invention is directed to an opening and closing device that avoids overshooting of a vacuum chamber door, by providing a baffle to block relative sliding along the connecting hole when the door is opened.

In order to achieve the above object, the present invention provides an opening and closing device for avoiding overshoot of a vacuum chamber door, comprising a joint member and a linear drive member having a linear drive shaft, one end of the joint member being fixed to the edge of the door door and the other end being provided with a connecting hole The linear drive component drives the joint component to rotate to open or close the door by the connecting hole; the opening and closing device further comprises:

a baffle sleeve surrounding the end of the linear drive shaft;

a baffle plate is located on one side of the connecting hole, and is sequentially connected with the connecting hole and the baffle sleeve by a bolt;

The baffle block is located on the joint member, and the baffle and the baffle block abut each other when the door is opened to the vertical direction or the center of gravity of the door to the vertical direction.

Preferably, the baffle, the baffle sleeve and the linear drive shaft maintain a synchronous rotation during opening or closing of the door.

Preferably, the size of the connecting hole is larger than the outer diameter of the pin.

Preferably, the shape of the connecting hole is a long groove shape or an elliptical shape.

Preferably, the long slot type connecting hole is arc-shaped near one end of the linear driving component; the cut end of the baffle is also arc-shaped; when the door is closed, the arc of the cut end of the baffle is cut into the long slot The type of connection hole is close to an arc of one end of the linear drive member; and the center line of the long groove type connection hole coincides with the center line of the linear drive shaft.

Preferably, the end of the baffle near the linear driving component includes a cut-off end, and the baffle stop is a convex curved surface; the curved surface is disposed near the cut-off end of the baffle; when the cavity door is opened to the vertical direction or When the center of gravity of the door is in the vertical direction, the cut end of the baffle and the curved surface abut each other.

Preferably, the curved surface is 1/4 circle.

Preferably, the baffle stop is integrally or detachably mounted to the joint member.

Preferably, the central position of the baffle has a first pin hole engaged with the pin for fixedly connecting with one end of the pin; the baffle sleeve has a second pin hole for engaging with the pin for The other end of the pin is fixedly connected.

Preferably, the opening and closing device further comprises a sensor; the sensor is connected to a chain system for controlling the movement of the linear driving component.

Preferably, one end of the sensor is movably connected to the joint member, and the other end is clamped on both sides of the edge of the baffle and is not in contact with the baffle.

In order to achieve the above object, the present invention also provides a vacuum chamber having a cavity door overshooting opening and closing device, comprising a chamber door and an outer wall enclosing a vacuum reaction chamber, and the vacuum chamber is provided with an opening and closing preventing the chamber door from overshooting. The device, the opening and closing device has the above features.

The opening and closing device of the invention avoids the overshoot of the vacuum chamber door, and the baffle sleeve is fixedly connected with the baffle by the baffle sleeve, so that the baffle can rotate synchronously with the linear driving component; Provided on both sides of the connecting hole to realize the movable connection of the baffle and the baffle sleeve with respect to the joint member, thereby creating a condition that the joint member is rotated relative to the baffle to contact the baffle and the baffle stop; The baffle and the baffle resisting member matched with the baffle block the positional relationship between the baffle block and the baffle when the door is opened, thereby hindering the movement of the door, thereby avoiding the movement of the door. Overshoot occurs when the door is opened.

In order to make the content of the present invention clearer and easier to understand, the contents of the present invention will be further described below in conjunction with the drawings. The invention is of course not limited to the specific embodiment, and the general alternatives well known to those skilled in the art to which the invention pertains are also encompassed within the scope of the invention. It should be noted that the drawings all adopt a very simplified form, use a non-precision ratio, and only serve to facilitate and clearly achieve the purpose of the embodiment.

1 shows a schematic view of a specific installation of the opening and closing device of the present invention for avoiding vacuum chamber door overshoot on a vacuum reaction chamber, the opening and closing device including a linear drive member 202 and a joint member 1. In FIG. 1, the vacuum chamber includes a chamber door 201 and an outer wall 200. One end of the linear driving member 202 is mounted on the outer wall 200 of the vacuum chamber, and is rotated on the surface of the outer wall 200 by a pin 206; the other end of the linear driving member 202 is provided with a retractable linear drive shaft 6. 1 and 2, the end of the joint member 1 is fixed to the edge of the door 201, and the other end is provided with a connecting hole 7. The connecting hole 7 is provided with a pin 4, and the linear drive shaft 6 is connected with the pin 4, and The drive of the joint part 1 is effected by the drive pin 4.

2 is a schematic view showing the structure of the joint member. As shown in FIG. 2, the linear drive shaft 6 is provided with a hole-like structure (not shown) near the end of the joint member 1, and the pin 4 passes through the joint hole 7 and linearly drives. The hole-like structure on the shaft 6 enables the linear drive shaft 6 to drive the joint member 1. In order to ensure that the downward movement of the door 201 by the vacuum suction is not hindered after the door 201 is completely closed, the size of the connecting hole 7 is set larger than the size of the pin 4, so that the pin 4 can occur in the connecting hole 7. The movement of the position releases the vacuum suction applied to the door 201. In an alternative embodiment, the shape of the connecting hole 7 is a long groove. 2 shows that the long slot type connecting hole 7 includes an upper end 7a and a lower end 7b. During the opening or closing of the chamber door 201, the linear drive shaft 6 pushes the pin 4 against the upper end 7a of the long slot type connecting hole 7, and controls the linear drive shaft. 6 is stretched outwardly or inwardly under the action of the linear driving member 202, and the cavity door 201 is smoothly opened or closed by the force of the abutting against the joint member 1 and the interaction of the gravity of the door 201; When the door 201 is opened to the vertical direction or the center of gravity of the door 201 exceeds the vertical direction, the door 201 has a backward turning action, and the pin 4 is pulled from the upper end 7a of the long groove type connecting hole 7 to the lower end 7b; To prevent the loss of the linear drive shaft 6 supporting the door 201 will fall downward in the opposite direction under the action of gravity, resulting in greater vibration or jitter, which will not only cause safety concerns, but also reduce the service life of the equipment and the opening and closing device. Further, when the linear drive shaft 6 is contracted inward, the pin 4 is also pulled to move from the upper end 7a to the lower end 7b of the long groove type connection hole 7, causing unnecessary vibration or chattering. In order to solve the above problem, the present invention provides a baffle at the long slot type connecting hole 7 and a baffle stopper matching the baffle on the joint member 1, when the external force pulls the pin 4 from the upper end 7a of the connecting hole When the lower end 7b moves, the baffle 3 and the baffle stop abut each other to avoid the above problem.

3 is a perspective view showing a three-dimensional structure of a vacuum chamber door overshooting opening and closing device according to a preferred embodiment of the present invention. The opening and closing device of this embodiment includes:

The joint member 1 has an upper end which can be fixed to the edge of the edge of the door 201 by a bolt, and a baffle stop is disposed at the lower end thereof. In this embodiment, the baffle block is provided with a convex curved surface 8. The convex curved surface 8 may be integrally provided with the joint member 1, or may be detachably mounted on the joint member 1, and a long groove type connecting hole 7 is disposed below the curved surface 8; both ends of the long groove type connecting hole 7 It is a circular arc. A baffle 3 is disposed outside the long groove type connecting hole 7, and has a cut end 3a close to the curved surface 8. Since the curved surface 8 receives the force of the baffle 3, the curved surface 8 can be resistant to impact. The wear material is prepared, for example, the entire joint member 1 is an impact-resistant and wear-resistant material.

The opening and closing device further includes: a baffle sleeve 5 surrounding the end of the linear drive shaft 6; the bolt 4 sequentially passes through the baffle 3, the slotted connection hole 7 and the baffle sleeve 5, and the baffle plate 3 is fixedly connected to the baffle sleeve 5, and the baffle 3 is movably connected to the joint member 1; in the embodiment, the width of the cut end 3a of the baffle 3 is smaller than the width of the other end 3b of the baffle 3 to increase the block. The flexibility of the plate 3; the central position of the baffle 3 has a first pin hole for cooperating with the pin 4 for fixed connection with one end of the pin 4; the material of the baffle 3 can be an existing impact and wear resistant material For example, it may be an organic plastic stopper, an alloy stopper, or the like.

The end of the long groove type connecting hole 7 near the linear drive shaft 6 has an arc shape; the cut end 3a of the baffle 3 also has an arc shape; the curved surface 8 is a quarter circle, which is close to the cut end 3a of the baffle 3. Here, the end of the curved surface 8 near the linear driving member 202 is the cut-off starting end 8a; when the opening direction of the chamber door 201 exceeds the vertical state or the center of gravity of the door 201 exceeds the vertical state, or the telescopic movement of the linear drive shaft 6 When the direction of the force is changed, the cut end 3a of the baffle 3 and the curved surface 8 (the baffle stop) abut each other to prevent the vacuum chamber door 201 from vibrating or shaking. When the door 201 is in the closed state, the arc of the cut end 3a of the baffle 3 is inscribed in the arc of the end of the long slot type connecting hole 7 near the linear driving member 202; and the center line of the slot type connecting hole 7 and the linear drive The centerlines of the shaft 6 coincide.

The linear driving component 202 has a bottom portion movably connected to the outer wall 200 of the vacuum chamber, and an outer surface of the top linear drive shaft 6 is sleeved with a baffle sleeve 5, and the material of the baffle sleeve 5 may be wear-resistant material. For example, metal copper or the like; the baffle sleeve 5 has a second pin hole that engages with the pin 4 in the slot-type connecting hole 7 for fixed connection with the other end of the pin in the slot type connecting hole 7. So that the baffle 3 is fixedly coupled to the baffle sleeve 5 to ensure that the baffle 3, the baffle sleeve 5 and the linear drive shaft 6 are kept in sync during movement during the movement of the linear drive shaft 6; The control baffle 3 and the baffle stop abut each other. In this embodiment, referring to FIGS. 1 and 3, the connecting portion 205 at the bottom of the linear driving member 202 has four holes, three of which are bolt holes, and the bottom of the linear driving member 202 is fixedly connected to the vacuum chamber by the fitting bolts. The other hole is a movable connecting hole, and the linear driving member 202 and the linear driving shaft 6 are rotated along the outer wall 200 by the matching pin 206, by the rotation of the linear driving member 202 and the expansion and contraction of the linear driving shaft 6. Movement to drive the joint member 1 to open or close the chamber door 201.

During the opening or closing of the door 201, the pin 4 can be rotated within the slotted coupling hole 7 to effect the pushing of the joint member 1 by the linear drive shaft 6. During the rotation of the pin 4, the pin 4 is always kept fixed relative to the baffle 3 and the baffle sleeve 5, thereby ensuring that the baffle 3, the baffle sleeve 5 and the linear drive shaft 6 are kept in synchronous rotation to achieve The linear drive shaft 6 supports the moment when the door is opened to fall in the opposite direction from the vertical direction, and the baffle 3 can abut against the baffle block. Figure 4 exemplarily shows a manner in which the retaining flap is relatively fixed in position to the baffle sleeve. In Figure 4, the pin 4 extends through the baffle 3, the baffle sleeve 5 and the pin hole at the end of the linear drive shaft 6. The at least one planar engaging surface 14 is cut on the surface of the substantially cylindrical pin 4, and the corresponding engaging surface is simultaneously disposed at a position where the baffle 3 and the baffle sleeve 5 are in contact with the engaging surface 14 of the pin 4. (not shown), it is ensured that the shutter 3, the baffle sleeve 5 and the linear drive shaft 6 are kept in rotation.

The invention controls the tolerance of the baffle stop end 3a and the curved surface 8 such that when the cavity door 201 is rotated to a certain extent, the cut end 3a of the baffle 3 partially overlaps with the curved surface 8 but does not contact, when the cavity door 201 is further opened and the opening direction 3a and the arc of the baffle 3 are opened when the opening direction of the door 201 exceeds the vertical state or the center of gravity of the door exceeds the vertical state, or the direction of the force is changed due to the telescopic movement of the linear drive shaft 6. The profile 8 is in contact with the abutment to prevent shock and vibration of the door 201. The specific working process can be described below with reference to the following figures:

Referring to FIG. 5, when the linear drive shaft 6 pushes the door 201 to open to an angle greater than 80° and less than 90° from the horizontal direction, that is, the vertical direction has not yet been reached, the cut-off end 3a of the baffle 3 and the baffle stop are The curved surface 8 partially overlaps but does not touch; referring to FIG. 6 and FIG. 7, when the linear drive shaft 6 continues to push the chamber door 201 to open to an angle of not less than 90 degrees and not more than 120 degrees from the horizontal direction, the baffle 3 The cut end 3a and the curved surface 8 (baffle stop) of the baffle stop are stuck to each other. Preferably, referring to FIG. 5, the matching relationship between the cut end 3a of the baffle 3 and the curved surface 8 and the arc of the long slot type connecting hole 7 near the end of the linear driving member 202 should cause the chamber door 201 to rotate to When approaching 90° (angle with the vertical direction), for example 85°, the cut-off end 3a of the baffle 3 contacts the cut-off starting end 8a of the curved surface 8, and the baffle 3 opens as the chamber door 201 is further rotated. The contact area of the cut end 3a with the curved surface 8 is larger and larger, and when the cavity door 201 is rotated to an angle of 90° (vertical direction) with the horizontal direction, the surface of the cut end 3a of the baffle 3 is completely curved. When the surface 8 is in contact, the cut-off end 3a of the baffle 3 is stuck at a certain position of the curved surface 8, so that the joint member 1 cannot rotate relative to the baffle 3; when the chamber door 201 is further rotated to more than 90° (with vertical) When the angle of the direction of the door or the center of gravity of the door 201 exceeds the vertical direction, since the cut end 3a of the baffle 3 and the curved surface 8 of the baffle stop abut each other, the linear drive shaft is closed during the closing of the door 201 6 Pulling the moment that the door 201 passes over the vertical direction avoids the loss of linear drive in the prior art due to the cavity door The support vibration occurred under its own gravity. After the cavity door 201 passes the vertical direction, the cavity door 201 will accelerate to fall under the action of its own gravity. In order to ensure the smooth closing of the cavity door 201, the linear drive shaft 6 continues to drive the pin 4 to rotate in the long slot type connection hole 7, The door 201 is slowly and smoothly closed. The opening and closing device of the present invention further includes a sensor 2 connected to a interlocking system (not shown) for controlling the movement of the linear driving member 202; the sensor 2 may be an optical sensor It may be a mechanical sensor that can determine whether the door 201 has reached the desired position based on the positional movement of the flapper 3. Illustratively, Figures 8A and 8B illustrate the operation of the sensor 2 of an embodiment. In Figure 8A, the linear drive shaft 6 pulls the chamber door 201 to the closed state, at which time no vacuum has been applied to the vacuum chamber. The process, before this, the other end 3b of the baffle 3 is not contacted in the hollow clamp of the sensor 2, the sensor 2 senses the position of the baffle 3, and drives the linear drive shaft 6 to control the cavity door 201 In Fig. 8B, the vacuum chamber is evacuated, and the pin 4 drives the baffle 3 to move from the upper end 7a of the long slot type connecting hole 7 to the lower end 7b to release the vacuum pressure acting on the chamber door 201. The other end 3b of the baffle 3 is separated from the hollow clip of the sensor 2. After the sensor 2 detects the baffle 3, the stop signal is sent to the interlocking system, and the interlocking system controls the linear driving component 202 to be in a stopped motion state.

It should be noted that, in the above embodiment, the baffle stop is a convex curved surface 8 of the joint member 1, which is not used to limit the scope of the present invention. In the present invention, the baffle stop may also be disposed close to the block. The corners of the cut-off end of the plate, such as a right angle, an obtuse angle, etc., may also be a convex plane or other convex shape, as long as the position of the convex plane and the cut-off end position of the baffle plate can be made to be stuck to each other.

It should be noted that since one end of the sensor is fixed to the joint member and the other end of the sensor is movably connected to the baffle, the sensor rotates with the joint member during the rotation of the chamber door. The detector and the baffle are relatively rotated.

It should be noted that the shape of the baffle plate may be any shape, and the shape of the cut-off end of the baffle may also be any shape, preferably a circular arc shape, because the arc-shaped shape can make the cut-off end of the baffle easy to block. The plate resists are in smooth contact, reducing material wear. In addition, when the baffle and the baffle stop are in contact with each other until they are stuck to each other, there is a buffering time, so as to avoid sudden contact between the baffle and the baffle stop and stop the occurrence of a strong collision. Bad effects.

In addition, the present invention also provides a vacuum chamber having an over-opening and closing device for preventing a door, comprising a chamber door and an outer wall enclosing a vacuum reaction chamber, the vacuum chamber being provided with the above-mentioned opening and closing preventing the overshoot of the chamber door Device.

In summary, the opening and closing device of the present invention for avoiding the overshoot of the vacuum chamber door can be rotated synchronously by the baffle sleeve and the baffle plate, and the baffle can be rotated synchronously with the linear driving member; The baffle sleeves are respectively disposed on both sides of the connecting hole to realize the movable connection of the baffle and the baffle sleeve with respect to the joint member, so that the joint member is rotated relative to the baffle to contact the baffle and the baffle block. The condition is created; by the baffle and the baffle blocking member matched with the baffle, when the door is opened, the positional relationship between the baffle block and the baffle is used to block the door and continue to block the door. Movement, thus avoiding overshoot when the door is opened.

The present invention has been described in terms of the preferred embodiments thereof, and the embodiments of the present invention are intended to be illustrative only and not to limit the scope of the present invention. A variety of changes and retouchings may be made under the premise, and the scope of protection claimed by the present invention shall be subject to the scope of the patent application.

1‧‧‧Connector parts
14‧‧‧Flat card interface
2‧‧‧Sensor
200‧‧‧ outer wall
201‧‧‧ Door
202‧‧‧Linear drive components
205‧‧‧Connected section
206‧‧‧Tax
3‧‧‧Baffle
3a‧‧‧ cut-off
3b‧‧‧The other end
4‧‧ ‧ pinning
5‧‧‧Baffle sleeve
6‧‧‧Flexible linear drive shaft
7‧‧‧connection hole
7a‧‧‧Upper
7b‧‧‧Bottom
8‧‧‧ curved surface
8a‧‧‧ cut-off start

1 is a schematic view showing the relative positional relationship between an opening and closing device and a vacuum chamber and a door according to a preferred embodiment of the present invention; FIG. 2 is a schematic structural view of a joint member according to the above preferred embodiment of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS FIG. 4 is a perspective view of the opening and closing device for avoiding vacuum chamber door overshoot; FIG. 4 is a perspective view of a preferred embodiment of the present invention. FIG. 5 is a schematic structural view of a baffle plate in contact with a circular arc surface when the chamber door is at 85° in the vertical direction according to a preferred embodiment of the present invention; FIG. 6 is a schematic view of a preferred embodiment of the present invention; FIG. 7 is a schematic structural view of the baffle when the cavity door is in contact with the circular arc surface at a 90° direction; FIG. 7 is a baffle plate when the cavity door is 120° in the vertical direction according to a preferred embodiment of the present invention. FIG. 8A is a schematic structural view of a door according to a preferred embodiment of the present invention when the door is naturally closed; FIG. 8B is a schematic view of the door according to a preferred embodiment of the present invention when the door is naturally closed. structure Intentions.

1‧‧‧Connector parts

2‧‧‧Sensor

3‧‧‧Baffle

3a‧‧‧ cut-off

3b‧‧‧The other end

4‧‧ ‧ pinning

5‧‧‧Baffle sleeve

6‧‧‧Flexible linear drive shaft

7‧‧‧connection hole

8‧‧‧ curved surface

8a‧‧‧ cut-off start

Claims (12)

An opening and closing device for avoiding overshoot of a vacuum chamber door, comprising a joint component (1) and a linear drive component (202) having a linear drive shaft (6), one end of the joint component (1) being fixed to the cavity The edge of the door (201) is provided with a connecting hole (7) at the other end; the linear driving component (202) drives the joint component (1) to rotate to open or close the cavity door (201) by the connecting hole (7); Wherein, the opening and closing device further comprises: a baffle sleeve (5) surrounding the end of the linear drive shaft (6); a baffle (3) located on the side of the connecting hole (7) a bolt (4) is sequentially connected to the connecting hole (7) and the baffle sleeve (5); a baffle stop (8) is located on the joint member (1) when the door ( 201) When the vertical direction or the center of gravity of the door (201) is opened to the vertical direction, the baffle (3) and the baffle stop (8) abut each other. The opening and closing device of claim 1, wherein the baffle (3), the baffle sleeve (5) and the linear drive shaft (6) are maintained during opening or closing of the door (201) Rotate synchronously. The opening and closing device of claim 1, wherein the connecting hole (7) has a size larger than an outer diameter of the pin (4). The opening and closing device of claim 3, wherein the connecting hole (7) has a long groove shape or an elliptical shape. The opening and closing device of claim 4, wherein the long slot type connecting hole (7) is arc-shaped near an end of the linear driving member (202); a cut end of the baffle (3) 3a) also has an arc shape; when the chamber door (201) is in a closed state, an arc of the cut end (3a) of the baffle (3) is inscribed in the long groove type connecting hole (7) close to the linear An arc of one end of the driving member (202); and a center line of the long slot type connecting hole (7) coincides with a center line of the linear driving shaft (6). The opening and closing device of claim 1, wherein one end of the baffle (3) adjacent to the linear driving member (202) includes a cut-off end (3a), and the baffle stop (8) is a convex a curved surface; the curved surface is disposed adjacent to the cut end (8a) of the baffle; when the chamber door (201) is opened to the vertical direction or the center of gravity of the door (201) to the vertical direction, the block The cut end (3a) of the plate (3) abuts against the curved surface. The opening and closing device of claim 6, wherein the curved surface is 1/4 circle. The opening and closing device of claim 1, wherein the baffle stop (8) is integrally or detachably mounted with the joint member (1). The opening and closing device of claim 1, wherein the baffle (3) has a first pin hole at a center position of the baffle (4) for engaging with one end of the pin (4) A fixed connection; the baffle sleeve (5) has a second pin hole engaged with the pin (4) for fixed connection with the other end of the pin (4). The opening and closing device of claim 1, wherein the opening and closing device further comprises a sensor (2); the sensor (2) is connected to a chain system for controlling the linearity The movement of the drive member (202). The opening and closing device of claim 10, wherein one end of the sensor (2) is movably connected to the joint member (1), and the other end is clamped on both sides of the edge of the baffle (3) and Not in contact with the baffle (3). A vacuum chamber having an over-opening and closing device for preventing a door, comprising a chamber door and an outer wall enclosing a vacuum reaction chamber, wherein the vacuum chamber is provided with an opening and closing device for preventing overshoot of the chamber door, the opening and closing device having The feature of any one of claims 1 to 11 is claimed.