TWI577868B - A hinge for vacuum opening and closing of vacuum chamber and its vacuum processing device - Google Patents

Description

Hinge for vacuum chamber cover opening and closing and vacuum processing device thereof

The invention relates to the field of semiconductor technology, and in particular to a hinge for opening and closing a vacuum chamber cover and a vacuum processing device thereof.

The invention relates to the field of semiconductor technology, and in particular to a hinge for opening and closing a vacuum chamber cover and a vacuum processing device thereof.

In order to overcome the above problems, the present invention aims to provide a hinge for opening and closing a vacuum chamber cover, by setting an eccentric shaft to rotate in cooperation with a hinge, and using a relative positional relationship between the slope and the eccentric shaft to suppress the hinge in a vertical state. Any rotation continues to occur.

In order to achieve the above object, the present invention provides a hinge for opening and closing a vacuum chamber cover, comprising: an upper hinge (3) and a lower hinge (4), the upper hinge (3) having a cavity cover connection end (31), an abutting end (33), and a lower connecting end (32) for connecting to the lower hinge (4), the lower connecting end (32) includes a connecting hole (35) having an upper end (35a) and a lower end (35b), and a lower hinge (4) There is a cavity connecting end (42) and an upper connecting end (41) for connecting with the upper hinge (3), the upper connecting end (41) has a pin hole (43), and a pin (1) passes through the bottom The connecting hole (35) of the connecting end (32) and the pin hole (43) of the upper connecting end (41) connect the upper hinge (3) and the lower hinge (4), and the inner diameter of the connecting hole (35) is larger than the pin pin The outer diameter of (1) has a positioning ring (5) at both ends of the pin (1); the lower connecting end (32) of the upper hinge (3) is provided with an eccentric shaft (34), and the connecting hole (35) is eccentrically arranged In the eccentric shaft (34); the upper connecting end (41) of the lower hinge (4) is provided with a slope (6); the slope (6) has a bottom end (6a) and an inclined surface (6b); during opening of the chamber cover, The upper hinge (3) drives the eccentric shaft (34) to rotate together, and the eccentric shaft (34) is in the process before the chamber lid is opened from the closed state to the center of the chamber. The circle never touches the state of the slope (6) to the inclined surface (6b) which gradually approaches and contacts the slope (6); the rotation process after the outer ring of the eccentric shaft (34) contacts the inclined surface (6b) of the slope (6) In the middle, since the eccentric shaft (34) is subjected to the force of the slope (6), the pin (1) is always held against the lower end of the connecting hole (35), when the abutting end (33) of the upper hinge (3) and the slope When the bottom end (6a) of (6) is in contact, the upper hinge (3) stops rotating, so that the rotation of the chamber cover stops; during the closing of the chamber cover, the upper hinge (3) drives the eccentric shaft (34) to rotate together, in the cavity During the process from the open state to the state in which the cover is not over the center of gravity, the outer ring of the eccentric shaft (34) always contacts the inclined surface (6b) of the slope (6), since the eccentric shaft (34) is subjected to the slope (6) Force, the pin (1) is always held against the lower end of the connecting hole (35); the outer ring of the eccentric shaft (34) gradually moves away from the inclined surface of the slope (6) during the process of rotating the cavity cover to the state of not passing the center of gravity (6b), when the chamber cover is closed, the outer ring of the eccentric shaft (34) does not contact the slope (6).

Preferably, the upper end (35a) and/or the lower end (35b) of the connecting hole (35) have a long groove shape; or the upper end (35a) and/or the lower end (35b) of the connecting hole (35) have a circular arc shape.

Preferably, the upper end (35a) and the lower end (35b) of the connecting hole (35) have a circular arc shape, and the arc shape of the upper end (35a) is semicircular, and the circular arc shape of the lower end (35b) is semicircular.

Preferably, the hinge for opening and closing the vacuum chamber cover further comprises: a sleeve (8) sleeved on the bolt (1), and the connecting hole (35) and the pin hole (43) are sleeved in the sleeve ( 8), the outer diameter of the bolt (1) is matched with the inner diameter of the sleeve (8), the outer diameter of the sleeve (8) and the upper end (35a) and the lower end (35b) of the connecting hole (35) and the bolt The inner diameter of the pin hole (43) is matched.

Preferably, the outer ring of the eccentric shaft (34) is a bearing (2), the bearing (2) is sleeved on the eccentric shaft (34), and the inner diameter of the bearing (2) matches the outer diameter of the eccentric shaft (34). .

Preferably, the longitudinal direction of the cavity connecting end (31) of the upper hinge (3) is perpendicular to the longitudinal direction of the connecting hole (35).

Preferably, it is located on the side wall of the upper connecting end (41) of the lower hinge (4) and has a hollowed out area (9) on the edge of the slope (6), the partial boundary of the hollowed out area (9) being the edge of the slope (6).

Preferably, the ramp (6) is located below the pin hole (43).

Preferably, the eccentric shaft (34) is integrally formed with the lower connecting end (32) of the upper hinge (3).

Preferably, the eccentric shaft (34) is not integral with the lower connecting end (32) of the upper hinge (3), and the eccentric shaft (34) is fixedly coupled to the lower connecting end (32) of the upper hinge (3).

Further, the present invention also discloses a vacuum processing apparatus comprising a chamber door and a side wall enclosing a vacuum reaction chamber, the vacuum chamber being provided with a hinge for opening and closing the vacuum chamber cover, the hinge having the above features.

The hinge for opening and closing the vacuum chamber cover of the present invention utilizes the relative position between the slope and the eccentric shaft, so that the eccentric shaft contacts the slope during the rotation, so that the eccentric shaft is subjected to the force of the slope without rotating. Too fast, to avoid overshoot of the vacuum chamber cover, when the abutting end of the upper hinge contacts the bottom end of the slope, the eccentric shaft stops rotating, further avoiding the problem of overshoot of the vacuum chamber cover.

In order to make the content of the present invention clearer and easier to understand, the contents of the present invention will be further described below in conjunction with the drawings. It is a matter of course that the invention is not limited to the embodiment, and that the general scope of the invention, which is well known to those skilled in the art, is also encompassed within the scope of the invention.

The invention utilizes the feature that the eccentric shaft gradually increases or decreases during the rotation process, and designs the relationship between the eccentric shaft and the slope in the lower hinge so that the vacuum chamber cover is eccentric when it is opened and before the center of gravity is exceeded. The outer ring of the shaft is in contact with the slope, so that the eccentric shaft is subjected to the force of the slope, that is, the friction force, so that the eccentric shaft cannot produce excessive sliding, so that neither the upper hinge nor the vacuum chamber cover can produce excessive sliding, and Keeping the pin at the lower end of the long groove prevents the vacuum chamber cover from overshooting after the center of gravity exceeds the center of gravity, until the abutting end of the upper hinge contacts the bottom end of the slope. At this time, the upper hinge cannot continue to rotate. The vacuum chamber cover stops rotating, thereby avoiding the overshoot of the vacuum chamber cover.

The hinge for opening and closing the vacuum chamber cover of the present invention will be further described in detail below with reference to Figs. 1 to 6 and the embodiment. It should be noted that the drawings are in a very simplified form, using a non-precise ratio, and are only used to facilitate the purpose of the present embodiment.

Referring to FIG. 1 and FIGS. 2a to 4b, the hinge structure for vacuum chamber lid opening and closing of the present embodiment includes an upper hinge and a lower hinge.

Referring to FIG. 1, the upper cover hinge end 31 of the hinge structure is connected to the chamber cover 100, and can be fixedly connected to the outer side wall of the vacuum chamber cover 100 by mechanical fixing; the cavity connection end of the lower hinge 42 is connected to the outer wall 200 of the vacuum chamber, which can be fixedly connected to the outer wall 200 of the cavity by mechanical fixing; the outer wall 200 of the vacuum chamber is also fixedly connected with a linear driving device, and the lower hinge 4 is fixed. A quick release pin 7 is attached, and the quick release pin 7 is used to insert a portion of the linear drive unit and the vacuum chamber outer side wall 200. As shown in Figures 2a and 2b, the quick release pin 7 is fixed on the outside of the lower hinge 4, and the cover is required to be stable when other parts are mounted on the vacuum chamber cover 100. For safety reasons, the quick release pin and the hinge constitute double insurance to prevent The vacuum chamber cover is turned over. The quick unloading can be a conventional structure and will not be described here.

Referring to Figures 3a to 3b and Figures 2a to 2e, the upper hinge has a cavity cover connection end 31, an abutment end 33, and a lower connection end 32 for connection to the lower hinge, the lower connection end 32 including an upper end and a lower end In the present embodiment, the connecting hole 35 is a connecting hole having an upper end and/or a lower end, and the arc is semicircular, that is, the connecting hole 35 has an upper semicircular end and/or a lower semicircular end. The connecting hole 35, preferably, in order to enable the pin 1 to be simultaneously and better cut into the upper semicircular end and the lower semicircular end of the connecting hole 35, the upper end and the lower end of the connecting hole 35 are both semicircular; in the other aspect of the present invention In the embodiment, the upper end and/or the lower end of the connecting hole 35 are long groove-shaped; the lower connecting end 32 of the upper hinge is provided with an eccentric shaft 34, and the connecting hole 35 is eccentrically disposed in the eccentric shaft 34; preferably, in order to avoid the eccentric shaft The friction between the 34 and the lower hinge causes wear and ensures lubrication during rotation. The outer ring of the eccentric shaft 34 is the bearing 2, the bearing 2 is sleeved on the eccentric shaft 34, and the inner diameter of the bearing 2 and the outer diameter of the eccentric shaft 34 Cooperating; the eccentric shaft 34 and the lower connecting end 32 of the upper hinge can be integrally formed, eccentric 34 may be employed to connect the fixed hinge mechanically connecting terminal 32 and the like; the present embodiment, the cavity is connected to the longitudinal direction of the hinge end 31 in the longitudinal direction and the connection hole 35 vertically.

Referring to Figures 4a and 4b, the lower hinge 4 has a cavity connecting end 42 and an upper connecting end 41 for connecting with the upper hinge, the upper connecting end 41 has a pin hole 43; the cavity connecting end 42 has a bolt hole 421; The upper connecting end 41 of the lower hinge 4 is provided with a ramp 6 which is located below the pin hole 43; the ramp 6 has a bottom end 6a and an inclined surface 6b, preferably also has a top end 6c; the bottom end 6a of the ramp 6 The inclination is greater than the inclination of the inclined surface 6b, so that the bottom end 6a of the slope 6 can well resist the abutment end 33 of the upper hinge 3, and the inclination of the inclined surface 6b is small, and the outer circumference of the eccentric shaft 34 can be ensured. The bearing 2 is in good contact with the inclined face 6b and does not hinder the rotation of the eccentric shaft 34. Located on the side wall of the upper connecting end 41 of the lower hinge 4 and having a hollowed out area 9 on the edge of the ramp 6, the partial boundary of the hollowed out area 9 is the edge of the ramp 6. The setting of the hollowed out area 9 can increase the tolerance of the slope 6.

Referring to FIGS. 2a to 2d, the pin 1 is connected to the upper hinge and the lower hinge through the connecting hole 35 of the lower connecting end 32 and the pin hole of the upper connecting end 41. The overall inner diameter of the connecting hole 35 is larger than the pin 1 The outer diameter of the pin 1 and the outer diameter of the upper semicircular end and the lower semicircular end of the connecting hole 35 cooperate with the positioning ring 5 at both ends of the pin 1; preferably, in order to avoid the pin 1 and The friction between the upper hinge and the lower hinge, as shown in Fig. 2c, is also sleeved on the pin 1 with a sleeve 8 having an outer diameter greater than the outer diameter of the intermediate portion, the connecting hole 35 and the bolt The pin hole is sleeved on the sleeve 8, and the outer diameter of the bolt 1 is matched with the inner diameter of the sleeve 8, the outer diameter of the sleeve 8 and the upper and lower semi-circular ends of the connecting hole 35 and the inner side of the pin hole The diameter matches. a positioning ring 5 sleeved at the end of the pin 1 for fixing the relative positions of the lower hinge 4, the upper hinge 3, the sleeve 8 and the eccentric shaft 34, so that the upper hinge 3 drives the eccentric shaft 34 to rotate while not Under the influence of the lower hinge 4. It will be understood by those skilled in the art that the cooperation relationship between the sleeve and the upper hinge, the lower hinge and the eccentric shaft can be realized by conventional means, and will not be described herein.

The process of avoiding overshoot of the vacuum chamber cover by the hinge structure of the present embodiment will be described below with reference to FIGS. 5a to 5d and FIG.

As shown in Fig. 5a, when the vacuum chamber cover is naturally closed, the cavity cover connecting end 31 of the upper hinge is in a level state, and the pin 1 is located at the lower semicircular end of the connecting hole 35; see Fig. 5b, the cavity cover is open The cavity cover connecting end 31 of the upper hinge starts to rotate, and drives the eccentric shaft 34 to rotate together, in the process before the cavity cover is opened from the closed state to the center of gravity of the cavity cover (the center of gravity here is the physical center of gravity), the eccentric shaft 34 The outer ring never touches the state of the ramp 6 to gradually approach and contact the inclined surface of the ramp 6, where the outer ring of the eccentric shaft 34 is the bearing 2, that is, the outer surface of the bearing 2 never contacts the slope 6 to gradually approach and The inclined surface of the contact slope 6; during the rotation after the outer ring of the eccentric shaft 34 contacts the inclined surface of the slope 6, since the eccentric shaft 34 is subjected to the force of the slope 6, the pin 1 always remains against the connection hole 35 Semi-circular end; please refer to Fig. 5c, when the chamber cover is rotated to the vertical state, since the abutting end 33 of the upper hinge has not yet contacted the bottom end of the slope, the chamber cover can continue to rotate, and the pin 1 Still remaining in the lower half of the connection hole 35 Referring to FIG. 5d, when the abutting end 33 of the upper hinge contacts the bottom end of the slope 6, the upper hinge stops rotating, so that the cavity cover also stops rotating. At this time, the pin 1 is still located under the connecting hole 35. Semi-circular end; thus avoiding overshoot of the chamber cover during opening.

The process of closing the chamber cover is opposite to the sequence of the process of opening the chamber cover, but the principle is the same; the chamber cover is rotated back from the stop state, please continue to refer to FIG. 5c, the upper hinge drives the eccentric shaft 34 to rotate together, from the chamber cover During the stop state until the chamber cover is in a vertical state, the pin 1 remains at the lower semicircular end of the connecting hole 35, and the abutting end 33 of the upper hinge gradually moves away from the bottom end of the ramp 6; please continue to refer to Fig. 5b, in the cavity The outer ring of the eccentric shaft 34 always contacts the inclined surface of the slope 6 from the open state to the state before the cavity cover has not passed the center of gravity. Here, the outer ring of the eccentric shaft 34 is the bearing 2, that is, the outer surface of the bearing 2 is always The inclined surface of the contact slope 6; since the eccentric shaft 34 is subjected to the force of the slope 6, the pin 1 is always held against the lower semicircular end of the connecting hole 35; during the process after the chamber cover is rotated to the state of not passing the center of gravity, the eccentric shaft 34 The outer ring (here the outer surface of the bearing 2) is gradually away from the inclined surface of the slope 6; please continue to refer to Fig. 5a, when the chamber cover is closed, the outer ring of the eccentric shaft 34 does not contact the slope 6, the pin 1 is still Keeped under the connection hole 35 The semicircular end; in addition, when vacuuming the process chamber, refer to FIG. 6, the upper hinge will move downward as a whole due to the presence of the connecting hole 35 until the pin 1 bears against the upper semicircular end of the connecting hole 35, thereby realizing the process The cavity is completely sealed.

In summary, the hinge for opening and closing the vacuum chamber cover of the present invention utilizes the relative position between the slope and the eccentric shaft, so that the eccentric shaft contacts the slope during the rotation, so that the eccentric shaft is subjected to the force of the slope when rotating. It does not rotate too fast, thus avoiding the problem of the process of the vacuum chamber cover, and the vacuum chamber cover cannot be continuously turned over when the abutting end of the upper hinge contacts the bottom end of the slope, further avoiding the occurrence of the vacuum chamber cover. The problem of rushing.

The present invention has been described in the above preferred embodiments, and the embodiments of the present invention are intended to be illustrative only and not to limit the scope of the present invention. For the modification and retouching, the scope of protection claimed by the present invention shall be as described in the scope of the patent application.

1‧‧ ‧ pinning
100‧‧‧ cavity cover
2‧‧‧ bearing
200‧‧‧ outer side wall
3‧‧‧Upper hinge
31, 42‧‧‧ cavity cover connection
32‧‧‧Bottom connection
33‧‧‧Abutment
34‧‧‧Eccentric shaft
35‧‧‧Connection hole
35a‧‧‧Upper
35b‧‧‧Bottom
4‧‧‧ Lower hinge
41‧‧‧Upper connection
421‧‧‧Bolt holes
43‧‧‧ pin hole
5‧‧‧ positioning ring
6‧‧‧ slope
6a‧‧‧ bottom
6b‧‧‧ sloped surface
6c‧‧‧Top
7‧‧‧ fast unloading
8‧‧‧ casing
9‧‧‧ hollow area

1 is a schematic view showing the cooperation structure of a hinge and a vacuum chamber for opening and closing a vacuum chamber cover according to a preferred embodiment of the present invention. 2a is a schematic perspective view of a 135° perspective view of a hinge for opening and closing a vacuum chamber cover according to a preferred embodiment of the present invention. Fig. 2b is a 45° perspective view of a hinge for opening and closing a vacuum chamber cover according to a preferred embodiment of the present invention. Figure 2c is a partial cross-sectional view showing the connection relationship of the pin, the sleeve, the upper hinge and the lower hinge in accordance with a preferred embodiment of the present invention. Figure 2d is a schematic cross-sectional view of a hinge for opening and closing a vacuum chamber cover according to a preferred embodiment of the present invention. 2e is a schematic plan view showing a hinge for opening and closing a vacuum chamber cover according to a preferred embodiment of the present invention, wherein the lower hinge is made transparent. Fig. 3a is a perspective view showing the structure of the upper hinge of a preferred embodiment of the present invention. Figure 3b is a plan view of the upper hinge of a preferred embodiment of the present invention. Figure 4a is a perspective view showing the structure of the lower hinge of a preferred embodiment of the present invention. Figure 4b is a schematic plan view showing the lower hinge of a preferred embodiment of the present invention. Figure 5a is a schematic view showing the structure of the hinge when the vacuum chamber cover is naturally closed, in accordance with a preferred embodiment of the present invention. Figure 5b is a schematic view showing the structure of the hinge during the rotation of the vacuum chamber cover according to a preferred embodiment of the present invention. Figure 5c is a schematic view showing the structure of the hinge when the vacuum chamber cover is in a vertical state according to a preferred embodiment of the present invention. Figure 5d is a schematic view showing the structure of the hinge when the vacuum chamber cover is stopped, in accordance with a preferred embodiment of the present invention. Figure 6 is a schematic view showing the structure of the hinge when the vacuum chamber cover is vacuum closed according to a preferred embodiment of the present invention.

1‧‧ ‧ pinning

2‧‧‧ bearing

31‧‧‧Cover cover connection

33‧‧‧Abutment

34‧‧‧Eccentric shaft

35‧‧‧Connection hole

35a‧‧‧Upper

35b‧‧‧Bottom

6‧‧‧ slope

8‧‧‧ casing

Claims (11)

A hinge for opening and closing a vacuum chamber cover, comprising: an upper hinge (3) and a lower hinge (4), the upper hinge (3) having a cavity cover connecting end (31), an abutting end (33) and a lower connecting end (32) connected to the lower hinge (4), the lower connecting end (32) comprising a connecting hole (35) having an upper end (35a) and a lower end (35b), the lower hinge (4) having a cavity a connecting end (42) and an upper connecting end (41) for connecting to the upper hinge (3), the upper connecting end (41) having a pin hole (43) through which a pin (1) passes The connecting hole (35) of the end (32) and the pin hole (43) of the upper connecting end (41) connect the upper hinge (3) and the lower hinge (4), and the inside of the connecting hole (35) The diameter is larger than the outer diameter of the pin (1), and has a positioning ring (5) at both ends of the pin (1); wherein the lower connecting end (32) of the upper hinge (3) is provided with an eccentric shaft ( 34), the connecting hole (35) is eccentrically disposed in the eccentric shaft (34); the upper connecting end (41) of the lower hinge (4) is provided with a slope (6) having a bottom end ( 6a) and inclined surface (6b); the upper hinge (3) drives the eccentric shaft (34) to rotate together during the opening of the chamber cover, and the chamber cover is opened from the closed state to the chamber In the process before the center of gravity, the outer ring of the eccentric shaft (34) never contacts the state of the slope (6) to the inclined surface (6b) which gradually approaches and contacts the slope (6); at the eccentric shaft (34) During the rotation of the outer ring contacting the inclined surface (6b) of the slope (6), since the eccentric shaft (34) is subjected to the force of the slope (6), the pin (1) is always kept abutting At the lower end of the connecting hole (35), when the abutting end (33) of the upper hinge (3) comes into contact with the bottom end (6a) of the slope (6), the upper hinge (3) stops rotating, Thereby the rotation of the chamber cover is stopped; during the closing of the chamber cover, the upper hinge (3) drives the eccentric shaft (34) to rotate together, before the chamber cover is opened from the state to the state in which the chamber cover is not over the center of gravity The outer ring of the eccentric shaft (34) always contacts the inclined surface (6b) of the slope (6), and since the eccentric shaft (34) is subjected to the force of the slope (6), the pin (1) is always Keeping against the lower end of the connecting hole (35); the outer ring of the eccentric shaft (34) gradually moves away from the inclined surface (6b) of the slope (6) during the process of rotating the cavity cover to the state of not passing the center of gravity When the lid is closed In the closed state, the outer ring of the eccentric shaft (34) does not contact the slope (6). The hinge for opening and closing a vacuum chamber cover according to claim 1, wherein the upper end (35a) or the lower end (35b) of the connecting hole (35) is a long groove shape, or the connection hole (35) The upper end (35a) or the lower end (35b) has a circular arc shape. The hinge for opening and closing a vacuum chamber cover according to claim 2, wherein the upper end (35a) and the lower end (35b) of the connecting hole (35) are arc-shaped, and the upper end (35a) The circular arc shape is a semicircle, and the circular arc shape of the lower end (35b) is a semicircle. The hinge for opening and closing the vacuum chamber cover according to claim 1, further comprising a sleeve (8) sleeved on the bolt (1), the connecting hole (35) and the bolt a hole (43) is sleeved on the sleeve (8), an outer diameter of the bolt (1) is matched with an inner diameter of the sleeve (8), an outer diameter of the sleeve (8) and the connecting hole The upper end (35a) of the (35) and the lower end (35b) and the inner diameter of the pin hole (43) are fitted. The hinge for opening and closing a vacuum chamber cover according to claim 1, wherein the outer ring of the eccentric shaft (34) is a bearing (2), and the bearing (2) is sleeved on the eccentric shaft (34). Upper, the inner diameter of the bearing (2) matches the outer diameter of the eccentric shaft (34). A hinge for opening and closing a vacuum chamber cover according to claim 1, wherein a length direction of the cavity connecting end (31) of the upper hinge (3) is perpendicular to a length direction of the connecting hole (35) . A hinge for opening and closing a vacuum chamber cover according to claim 1, wherein the upper connecting end (41) of the lower hinge (4) is on a side wall and has a hollow on the edge of the slope (6) Region (9), the partial boundary of the hollow region (9) is the edge of the slope (6). A hinge for opening and closing a vacuum chamber cover according to claim 1, wherein the slope (6) is located below the pin hole (43). A hinge for opening and closing a vacuum chamber cover according to any one of claims 1 to 8, wherein the eccentric shaft (34) is integral with the lower connecting end (32) of the upper hinge (3). production. A hinge for opening and closing a vacuum chamber cover according to any one of claims 1 to 8, wherein the eccentric shaft (34) and the lower connecting end (32) of the upper hinge (3) are not Integral, and the eccentric shaft (34) is fixedly coupled to the lower connecting end (32) of the upper hinge (3). A vacuum processing device comprising a chamber door and a side wall enclosing a vacuum reaction chamber, the vacuum chamber being provided with a hinge for opening and closing the vacuum chamber cover, the hinge for opening and closing the vacuum chamber cover having the first to the patent scope The technical features described in any of the eight items.