TW201715731A - Thin film transistor and method of manufacturing the same - Google Patents

Abstract

A thin film transistor includes a gate electrode, an insulating layer, an intrinsic amorphous silicon layer, a drain electrode and a source electrode. The insulating layer is located between the gate electrode and the intrinsic amorphous silicon layer to insulate them from each other. Wherein, the intrinsic amorphous silicon layer further includes a first layer and a second layer. The second layer is formed above the first layer. The second layer includes a non-doped region and doped regions at two sides of the non-doped region. The doped regions are coupled with both of the drain electrode and the source electrode, while the non-doped region and at least part of the doped region exposed between them.

Description

Thin film transistor and manufacturing method thereof

The invention relates to a thin film transistor and a method of fabricating the same.

Thin film transistors are used in displays, usually as switches that charge or discharge storage capacitors. A common thin film transistor includes a gate, a gate insulating layer, a channel layer, an ohmic contact layer, a source, and a drain. The gate is used to open or close the electronic channel in the channel layer. The gate insulating layer covers the gate to insulate the gate and the channel layer from each other, and the ohmic contact layer is disposed on the channel layer. The source and the drain are respectively disposed at both ends of the ohmic contact layer, and the ohmic contact layer between the source and the drain is etched away to reveal the channel layer. Wherein, the channel layer between the source and the drain serves as a back channel, and a certain thickness is required to provide better use characteristics. However, in the case of the thin film transistor of the structure, in the case where the channel layer needs to satisfy a certain thickness, the added ohmic contact layer increases the overall thickness of the thin film transistor, which is disadvantageous for the development of the thin display.

In view of this, it is necessary to provide a thin film transistor having a small thickness.

A thin film transistor comprising a gate, a gate insulating layer, an intrinsic amorphous germanium layer, a source, and a drain. The gate insulating layer is disposed between the gate and the intrinsic amorphous germanium layer to insulate the two from each other. Wherein, the intrinsic amorphous germanium layer comprises a first layer and a second layer, the second layer covering the first layer. The second layer includes an undoped region and a doped region on both sides of the undoped region. The source and the drain are both in contact with the doped region, and the undoped region and at least a portion of the doped region are exposed between the source and the drain.

It is also necessary to provide a method of fabricating the above-described thin film transistor.

The method includes the steps of: providing a substrate, and sequentially forming a gate electrode and a gate insulating layer covering the gate electrode; and forming a first semiconductor layer and a second semiconductor layer in sequence on the gate insulating layer, wherein The first semiconductor layer and the second semiconductor layer are both intrinsic amorphous germanium materials, and the first semiconductor layer is formed by a first deposition rate, and the second semiconductor layer is higher in speed than the first deposition rate Forming a deposition rate; forming a first photoresist layer on the second semiconductor layer, and patterning the first photoresist layer to form a first photoresist pattern; etching the first layer not covered by the first photoresist pattern a semiconductor layer and the second semiconductor layer to respectively form a first semiconductor pattern layer and a second semiconductor pattern layer; removing both sides of the first photoresist pattern to expose a portion of the second semiconductor pattern layer, and remaining the first light The resist pattern forms a second photoresist pattern; the first semiconductor pattern layer and the second semiconductor pattern layer not covered by the second photoresist pattern are doped, the first semiconductor pattern layer is doped and the portion The two semiconductor pattern layers collectively form a first layer, such that the first layer includes a doped region and a non-doped region, the undoped portion of the first semiconductor pattern layer forms a second layer; and the second photoresist pattern is removed; And forming source and drain electrodes separated from each other on the doped region, the undoped region and at least a portion of the doped region being exposed to the source and the drain.

It is also necessary to provide a method of fabricating a thin film transistor.

The method includes the steps of: providing a substrate, and sequentially forming a gate electrode and a gate insulating layer covering the gate electrode; and forming a first semiconductor layer and a second semiconductor layer in sequence on the gate insulating layer, wherein The first semiconductor layer and the second semiconductor layer are both intrinsic amorphous germanium materials, and the first semiconductor layer is formed by a first deposition rate, and the second semiconductor layer is higher in speed than the first deposition rate Forming a deposition rate; forming a first photoresist layer on the second semiconductor layer, and patterning the first photoresist layer to form a first photoresist pattern; etching the first layer not covered by the first photoresist pattern a semiconductor layer and the second semiconductor layer to respectively form a first semiconductor pattern layer and a second semiconductor pattern layer; removing the first photoresist pattern; forming a third photoresist layer covering the second half pattern layer on the substrate, And patterning the third photoresist layer to form a fourth photoresist pattern; doping the first semiconductor pattern layer and the second semiconductor pattern layer not covered by the fourth photoresist pattern, the first semiconductor Pattern layer The impurity portion and the second semiconductor pattern layer together form a first layer, such that the first layer includes a doped region and a non-doped region, and the undoped portion of the first semiconductor pattern layer forms a second layer; a fourth photoresist pattern; and forming source and drain electrodes separated from each other on the doped region, the undoped region and at least a portion of the doped region being exposed to the source and the drain.

Compared with the prior art, the thin film transistor and the manufacturing method thereof provide partial doping of the material intrinsic amorphous germanium layer to form doped regions and non-doped regions, source and drain electrodes and The doped region contacts, the undoped region and the partially doped region are exposed between the source and the drain, and the doped region in contact with the source drain serves as an ohmic contact layer, thereby reducing the need for an additional ohmic contact layer The overall thickness of the thin film transistor is favorable for the thinning development of the display.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a cross-sectional view showing the structure of a thin film transistor provided by the present invention.

2 is a flow chart showing a method of fabricating a thin film transistor according to a first preferred embodiment of the present invention.

3 to 7 are cross-sectional views showing the flow of each step in Fig. 2.

8 is a flow chart showing a method of fabricating a thin film transistor according to a second preferred embodiment of the present invention.

9 to 13 are cross-sectional views showing the flow of each step in Fig. 8.

The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings, wherein the present invention is described by taking a bottom gate type thin film transistor as an example.

1 is a cross-sectional view showing the structure of a thin film transistor 100 provided by the present invention. The thin film transistor 100 is formed on a substrate 200 including a gate 110, a gate insulating layer 120, an intrinsic amorphous germanium layer 160, a source 151, and a drain 152. The gate 110 is disposed on the substrate 200. The gate insulating layer 120 is disposed on the substrate 200 and the gate 110. The intrinsic amorphous germanium layer 160 is disposed on a side of the gate insulating layer 120 away from the substrate 200. And located at a position corresponding to the gate 110. The gate insulating layer 120 is used to insulate the gate 110 from the intrinsic amorphous germanium layer 160, the source 151, and the drain 152. The intrinsic amorphous germanium layer 160 further includes a first layer 131 and a second layer 141 covering the top surface and both sides of the first layer 131. The second layer 141 includes a doped region 1411 and a non-doped region 1412 formed at both ends of the second layer 141. The undoped region 1412 is formed at a middle portion of the upper surface of the second layer 141. The source 151 and the drain 152 respectively cover the doped region 1411, and the source 151 and the drain 152 are separated from each other. The undoped region 1412 is exposed between the source 151 and the drain 152. At least a portion of the doped region 1411 is also shown between the source 151 and the drain 152. The opposite sides of the undoped region 1412 are spaced apart from the source 151 and the drain 152 by a certain distance. The doped region 1411 is flush with the side of the undoped region 1412 away from the first layer 131, that is, the doped region 1411 is at the same level as the top surface of the undoped region 1412.

Wherein, the first layer 131 is formed by a first deposition rate, and a portion of the second layer 141 contacting at least the source 151 and the drain 152 is formed by a second deposition rate, and the second deposition rate is higher than the first layer A deposition rate. In this embodiment, the second layer 141 is formed by the second deposition rate. In other embodiments, it is also possible that the lower layer of the second layer 141 is formed by the first deposition rate and the upper layer is formed by the second deposition rate. The first deposition rate is between 4 and 8 A/s, the second deposition rate is between 20 and 30 A/s, and the thickness of the first layer 131 is between 200 and 400 A, and the thickness of the second layer 141 is greater than 0. Less than 500A. In this embodiment, the thickness of the first layer 131 is greater than the thickness of the second layer 141, and the thickness of the second layer 141 is 300A. The materials of the first layer 131 and the second layer 141 are both intrinsic amorphous germanium.

Referring to FIGS. 2-7, FIG. 2 is a flow chart of a method for fabricating a thin film transistor 100 according to a first preferred embodiment of the present invention. 3 to 7 are cross-sectional views showing the flow of each step in Fig. 2. The method steps will be further described below, and it should be noted that, for convenience of explanation, the same components as those described above are used hereinafter.

Step S201, first referring to FIG. 3, a substrate 200 is provided, and a gate 110 and a gate insulating layer 120 covering the gate 110 are sequentially formed on the substrate 200.

Step S202, referring again to FIG. 3, a first semiconductor layer 13 and a second semiconductor layer 14 are sequentially formed on the gate insulating layer 120. The first semiconductor layer 13 is formed by a first deposition rate, and the second semiconductor layer is formed. 14 is formed by a second deposition rate that is higher than the first deposition rate. The first semiconductor layer 13 and the second semiconductor layer 14 are each formed of intrinsic amorphous germanium.

The first deposition rate is between 4 and 8 A/s, the second deposition rate is between 20 and 30 A/s, and the thickness of the first semiconductor layer 13 is between 20 and 400 A. The second semiconductor layer 14 is The thickness is greater than 0 but less than 500A. In the embodiment, the thickness of the first semiconductor layer 13 is greater than the thickness of the second semiconductor layer 14.

Step S203, further referring to FIG. 4, a first photoresist layer (not shown) is formed on the second semiconductor layer 14, and the first photoresist layer is patterned to form a first photoresist pattern 11, and then etched. The first semiconductor layer 13 and the second semiconductor layer 14 covered by the first photoresist pattern 11 respectively form a first semiconductor pattern layer 130 and a second semiconductor pattern layer 140.

Specifically, the first photoresist layer may be exposed and developed by a gray-scale mask, for example, a halftone mask, to form the first photoresist pattern 11 having a thin intermediate structure on both sides. In a modified embodiment, the first photoresist layer may be exposed and developed by using a mask having a uniform light transmittance to form the first photoresist pattern 12, and the first photoresist pattern 12 has a uniform thickness. , as shown in Figure 7.

Step S204, next, the thinner sides of the first photoresist pattern 11 are removed to expose a portion of the second semiconductor pattern layer 140, and the remaining intermediate portion of the first photoresist pattern 11 forms a second photoresist pattern 21.

Specifically, the thinner sides of the first photoresist pattern 11 are removed by an oxygen (O2) or ozone (O3) ashing process to expose both sides of the second semiconductor pattern layer 140. It can be understood that when the first photoresist pattern 11 is formed by using a mask of uniform light transmittance, in this step, both side portions of the first photoresist pattern 11 are removed, and the middle portion is left to form a second photoresist pattern. twenty one.

Step S205, further referring to FIG. 5, the first semiconductor pattern layer 130 and the second semiconductor pattern layer 140 not covered by the second photoresist pattern 21 are doped to form the first layer 131 and the second layer. 141.

Specifically, a region of the second semiconductor pattern layer 140 covered by the second photoresist pattern 21 forms the undoped region 1412, and the remaining portions are doped to be doped with the first semiconductor pattern layer 130. The doped region 1411 is formed together. The doped region 1411 and the undoped region 1412 together form the first layer 131, and the undoped portion of the first semiconductor pattern layer 130 forms the second layer 141. The doping process of the first semiconductor pattern layer 130 and the second semiconductor pattern layer 140 is not less than the thickness of the second semiconductor pattern layer 140, but smaller than the first semiconductor pattern layer 130 and the second semiconductor pattern. The sum of the thicknesses of layers 140. The doping treatment may be performed by ion implantation, ion treatment or other methods, and the doped material may be phosphorus or boron. In the present embodiment, phosphorus is doped by ion implantation.

In step S206, please refer to FIG. 5 again to remove the second photoresist pattern 21.

Step S207, with further reference to FIG. 6, a source 151 and a drain 152 separated from each other are formed on the gate insulating layer 120 and the first layer 131, and the source 151 and the drain 152 are mixed with the drain 152. The impurity region 1411 is in contact, and the undoped region 1412 and a portion of the doped region 1411 are exposed between the source electrode 151 and the drain electrode 152 to obtain a thin film transistor 100 as shown in FIG.

Specifically, first, the second metal layer 15 and the second photoresist layer 30 are formed on the gate insulating layer 120, the first layer 131, and the second layer 141. Next, the second photoresist layer 30 is patterned to form a third photoresist pattern 31. Then, the second metal layer 15 not covered by the third photoresist pattern 31 is removed by etching to form the source electrode 151 and the drain electrode 152, and the third photoresist pattern 31 is removed, as shown in FIG. Thin film transistor 100.

Referring to FIGS. 8-13, FIG. 8 is a flow chart of a method for fabricating a thin film transistor 100 according to a second preferred embodiment of the present invention. 9 to 13 are cross-sectional views showing the flow of each step in Fig. 8. The method steps will be further described below, and it should be noted that, for convenience of explanation, the same components as those described above are used hereinafter.

Step S801, first referring to FIG. 9, a substrate 200 is provided, and a gate 110 and a gate insulating layer 120 covering the gate 110 are sequentially formed on the substrate 200.

Step S802, referring again to FIG. 9, a first semiconductor layer 13 and a second semiconductor layer 14 are sequentially formed on the gate insulating layer 120. The first semiconductor layer 13 is formed by a first deposition rate, and the second semiconductor layer is formed. 14 is formed by a second rate of deposition that is higher than the first deposition rate. The first semiconductor layer 13 and the second semiconductor layer 14 are each formed of intrinsic amorphous germanium.

The first deposition rate is between 4 and 8 A/s, the second deposition rate is between 20 and 30 A/s, and the thickness of the first semiconductor layer 13 is between 20 and 400 A. The second semiconductor layer 14 is The thickness is greater than 0 but less than 500A. In the embodiment, the thickness of the first semiconductor layer 13 is greater than the thickness of the second semiconductor layer 14.

Step S803, further referring to FIG. 10, a first photoresist layer (not shown) is formed on the second semiconductor layer 14, and the first photoresist layer is patterned to form a first photoresist pattern 12, followed by etching. The first semiconductor layer 13 and the second semiconductor layer 14 covered by the first photoresist pattern 12 respectively form a first semiconductor pattern layer 130 and a second semiconductor pattern layer 140.

In step S804, referring again to FIG. 10, the first photoresist pattern 12 is removed.

Step S805, further referring to FIG. 11, a third photoresist layer 40 covering the gate insulating layer 120, the first semiconductor pattern layer 130, and the second semiconductor pattern layer 140 is formed on the substrate 200, and patterned. The three photoresist layers 40 expose the two sides of the first semiconductor pattern layer 130 and the second semiconductor pattern layer 140, and the third photoresist layer 40 forms a fourth photoresist pattern 41. The fourth photoresist pattern 41 may have the same structural shape as the second photoresist pattern 21 .

Step S806, referring to FIG. 12, doping the first semiconductor pattern layer 130 and the second semiconductor pattern layer 140 that are not covered by the fourth photoresist pattern 41 to form the first layer 131 and the second layer 141. .

Specifically, a region of the second semiconductor pattern layer 140 covered by the fourth photoresist pattern 41 forms the undoped region 1412, and the remaining portions are doped to be doped with the first semiconductor pattern layer 130. The doped region 1411 is formed together. The doped region 1411 and the undoped region 1412 together form the first layer 131. The undoped portion of the first semiconductor pattern layer 130 forms the second layer 141. Doping the first semiconductor pattern layer 130 and the second semiconductor pattern layer 140 to a depth not less than the thickness of the second semiconductor pattern layer 140 but smaller than the first semiconductor pattern layer 130 and the second semiconductor pattern layer The sum of the thicknesses of 140. The doping treatment may be performed by ion implantation, ion treatment or other methods, and the doped material may be phosphorus or boron. In the present embodiment, phosphorus is doped by ion implantation.

In step S807, referring again to FIG. 12, the fourth photoresist pattern 41 is removed.

Step S808, referring to FIG. 13, a source 151 and a drain 152 separated from each other are formed on the gate insulating layer 120 and the first layer 131, and the source 151 and the drain 152 are mixed with the drain 152. The impurity region 1411 is in contact, and the undoped region 1412 and a portion of the doped region 1411 are exposed between the source electrode 151 and the drain electrode 152 to obtain a thin film transistor 100 as shown in FIG.

Specifically, first, the second metal layer 15 and the second photoresist layer 30 are formed on the gate insulating layer 120, the first layer 131, and the second layer 141. Next, the second photoresist layer 30 is patterned to form a third photoresist pattern 31. Then, the second metal layer 15 not covered by the third photoresist pattern 31 is removed by etching to form the source electrode 151 and the drain electrode 152, and the third photoresist pattern 31 is removed, as shown in FIG. Thin film transistor 100.

Since the first layer 131 and the second layer 141 are formed by different deposition rates, the second layer 141 located between the first layer 131 and the source 151 and the drain 152 is mainly composed of a second higher rate. The deposition rate is formed, and the resistivity thereof is large, and the electron mobility can be lowered, so that when the thin film transistor 100 is in the off state, the leakage current is reduced, thereby improving the electrical characteristics. The portion in contact with the source drains 151, 152 is doped, and the contact resistance is appropriately reduced so as not to affect the channel current and the intercept mobility when the opening is performed. The doped region 1411 functions as an ohmic contact layer. Therefore, it is not necessary to additionally provide an ohmic contact layer, so that the overall thickness of the thin film transistor 100 can be reduced, which is advantageous for the thinning development of the display.

In summary, the creation meets the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiments, and those skilled in the art will be equivalently modified or changed according to the spirit of the present invention. It should be covered by the following patent application.

100‧‧‧film transistor

110‧‧‧ gate

120‧‧‧ gate insulation

160‧‧‧ intrinsic amorphous layer

13‧‧‧First semiconductor layer

130‧‧‧First semiconductor pattern layer

131‧‧‧ first floor

14‧‧‧Second semiconductor layer

140‧‧‧Second semiconductor pattern layer

141‧‧‧ second floor

1411‧‧‧Doped area

1412‧‧‧Undoped area

15‧‧‧Second metal layer

151‧‧‧ source

152‧‧‧汲polar

11,12‧‧‧First photoresist pattern

21‧‧‧second photoresist pattern

30‧‧‧Second photoresist layer

31‧‧‧ Third photoresist pattern

40‧‧‧ Third photoresist layer

41‧‧‧fourth resist pattern

200‧‧‧Base

no

100‧‧‧film transistor

110‧‧‧ gate

120‧‧‧ gate insulation

160‧‧‧ intrinsic amorphous layer

131‧‧‧ first floor

141‧‧‧ second floor

1411‧‧‧Doped area

1412‧‧‧Undoped area

151‧‧‧ source

152‧‧‧汲polar

200‧‧‧Base

Claims (11)

A thin film transistor comprising a gate, a gate insulating layer, an intrinsic amorphous germanium layer, a source and a drain; the gate insulating layer is disposed between the gate and the intrinsic amorphous germanium layer so that Insulating each other; wherein the intrinsic amorphous germanium layer comprises a first layer and a second layer, the second layer covering the first layer; the second layer comprises an undoped region and a doping on both sides of the undoped region a impurity region; the source and the drain are both in contact with the doped region, and the undoped region and at least a portion of the doped region are exposed between the source and the drain. The thin film transistor of claim 1, wherein the doped region is flush with a side of the undoped region away from the first layer. The thin film transistor according to claim 1, wherein the doped region is formed by doping phosphorus or boron by ion implantation or plasma treatment. The thin film transistor according to claim 1, wherein the opposite sides of the undoped region are separated from the source and the drain by a certain distance. The thin film transistor of claim 1, wherein the first layer is formed by a first deposition rate, and the second layer is formed at least near a side of the source and the drain by a second deposition rate, The second deposition rate is higher than the first deposition rate. A method of fabricating a thin film transistor, the method comprising the steps of:
Providing a substrate, and sequentially forming a gate and a gate insulating layer covering the gate on the substrate;
Forming a first semiconductor layer and a second semiconductor layer on the gate insulating layer, wherein the first semiconductor layer and the second semiconductor layer are both intrinsic amorphous germanium materials, and the first semiconductor layer is first a deposition rate is formed, the second semiconductor layer being formed by a second deposition rate having a higher rate than the first deposition rate;
Forming a first photoresist layer on the second semiconductor layer, and patterning the first photoresist layer to form a first photoresist pattern;
Etching the first semiconductor layer and the second semiconductor layer not covered by the first photoresist pattern to form a first semiconductor pattern layer and a second semiconductor pattern layer, respectively;
Removing the two sides of the first photoresist pattern to expose a portion of the second semiconductor pattern layer, and the remaining first photoresist pattern forms a second photoresist pattern;
Doping the first semiconductor pattern layer and the second semiconductor pattern layer that are not covered by the second photoresist pattern, the first semiconductor pattern layer doped portion and the second semiconductor pattern layer together form a first a layer, the first layer includes a doped region and a non-doped region, and the undoped portion of the first semiconductor pattern layer forms a second layer;
Removing the second photoresist pattern; and forming source and drain electrodes separated from each other on the first layer, the undoped region and at least a portion of the doped region being exposed to the source and the drain. The method of fabricating a thin film transistor according to claim 6, wherein the first photoresist layer is patterned by using a gray scale mask to form the first photoresist pattern, wherein the first photoresist pattern is in the middle Thin structure on both sides. The method of fabricating a thin film transistor according to claim 6, wherein the first semiconductor pattern layer and the second semiconductor pattern layer are subjected to phosphorus or boron doping treatment by ion implantation or plasma processing to form the Doped area. The method of fabricating a thin film transistor according to claim 6, wherein the doping treatment has a depth not less than a thickness of the second semiconductor pattern layer but less than a thickness of the first semiconductor pattern layer and the second semiconductor pattern layer with. The method of fabricating a thin film transistor according to claim 6, wherein the first deposition rate is between 4 and 8 A/s, and the second deposition rate is between 20 and 30 A/s. A method for fabricating a thin film transistor, the method comprising the following steps:
Providing a substrate, and sequentially forming a gate and a gate insulating layer covering the gate on the substrate;
Forming a first semiconductor layer and a second semiconductor layer on the gate insulating layer, wherein the first semiconductor layer and the second semiconductor layer are both intrinsic amorphous germanium materials, and the first semiconductor layer is first a deposition rate is formed, the second semiconductor layer being formed by a second deposition rate having a higher rate than the first deposition rate;
Forming a first photoresist layer on the second semiconductor layer, and patterning the first photoresist layer to form a first photoresist pattern;
Etching the first semiconductor layer and the second semiconductor layer not covered by the first photoresist pattern to form a first semiconductor pattern layer and a second semiconductor pattern layer, respectively;
Removing the first photoresist pattern;
Forming a third photoresist layer covering the second half pattern layer on the substrate, and patterning the third photoresist layer to form a fourth photoresist pattern;
Doping the first semiconductor pattern layer and the second semiconductor pattern layer that are not covered by the fourth photoresist pattern, and the doped portion of the first semiconductor pattern layer and the second semiconductor pattern layer together form a first a layer, the first layer includes a doped region and a non-doped region, and the undoped portion of the first semiconductor pattern layer forms a second layer;
Removing the fourth photoresist pattern; and forming source and drain electrodes separated from each other on the doped region, the undoped region and at least a portion of the doped region being exposed to the source and the drain.